TW202044714A - Fingerprint sensing module with enhanced electrostatic discharge protection and electric device integrates the electrostatic discharge protection unit and a fingerprint sensor module - Google Patents

Fingerprint sensing module with enhanced electrostatic discharge protection and electric device integrates the electrostatic discharge protection unit and a fingerprint sensor module Download PDF

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TW202044714A
TW202044714A TW108116981A TW108116981A TW202044714A TW 202044714 A TW202044714 A TW 202044714A TW 108116981 A TW108116981 A TW 108116981A TW 108116981 A TW108116981 A TW 108116981A TW 202044714 A TW202044714 A TW 202044714A
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electrostatic discharge
discharge protection
coupled
sensing
input terminal
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TWI706619B (en
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趙帆
李卓
陳飛祥
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大陸商北京集創北方科技股份有限公司
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Abstract

A fingerprint sensing module with enhanced electrostatic discharge protection comprises: a sensing unit, a sensing signal readout unit, a driving unit, a control unit, and a plurality of electrostatic discharge protection unit. Each electrostatic discharge protection unit has an input end to couple with each sensing electrode of the sensing unit and an output end to couple with each signal readout device of the sensing signal readout unit. The electrostatic discharge protection unit includes: a first electrostatic discharge protection device having one end coupled to the input end and the output end, and the other end coupled to a working voltage; a second electrostatic discharge protection device having one end coupled to the input and the output and the other end coupled to a common grounding voltage; and a voltage clamping device coupled between the working voltage and the common grounding voltage.

Description

具增強靜電放電保護的指紋感測模塊及電子裝置Fingerprint sensing module and electronic device with enhanced electrostatic discharge protection

本發明係關於指紋感測之技術領域,尤指一種具增強靜電放電保護的指紋感測模塊及電子裝置。The present invention relates to the technical field of fingerprint sensing, in particular to a fingerprint sensing module and electronic device with enhanced electrostatic discharge protection.

隨著行動支付、電子證券下單等金融交易逐漸地以智慧型手機、智慧型穿戴式產品等電子產品作為主要的操作平台,將以生物特徵辨識技術為基礎的身分辨識系統整合至這些智慧型行動電子裝置也越來越受到重視。生物辨識技術(Biometric identification)係藉由採集人體固有的生理特徵作為個體生物的辨識依據,例如:虹膜(Iris)、臉部(Face)、聲紋(Voice)、與指紋(Fingerprint)等生理特徵。As financial transactions such as mobile payment and electronic securities orders gradually use electronic products such as smart phones and smart wearable products as the main operating platforms, the biometric identification technology-based identity recognition system is integrated into these smart types Mobile electronic devices are also getting more and more attention. Biometric identification technology uses the inherent physiological characteristics of the human body as the identification basis for individual organisms, such as: iris (Iris), face (Face), voice print (Voice), fingerprint (Fingerprint) and other physiological characteristics .

目前,透過標準CMOS製程與像素電路整合為單晶片之電容式指紋感測模塊目前已被廣泛地應用於各式電子產品之中。圖1顯示電容式指紋感測模塊的剖視圖。如圖1所示,所述電容式指紋感測模塊1’主要包括一像素電路集成單元11’與一感測電極單元12’,其中一保護層13’係覆於感測電極單元12’之上,且該感測電極單元12’包括複數個感測電極121’。另一方面,像素電路集成單元11’包括一基材111’以及製作於該基材111’內的感測電路,且所述感測電路包括的複數個P型MOS電晶體112’和複數個N型MOS電晶體113’。當使用者的手指按壓電容式指紋感測模塊1’時,指面的脊部(ridge)與感測電極121’之間會形成一脊部感測電容Cr,且指面的谷部(valley)與感測電極121’之間會形成一谷部感測電容Cv。At present, capacitive fingerprint sensing modules integrated into a single chip through standard CMOS manufacturing processes and pixel circuits have been widely used in various electronic products. Figure 1 shows a cross-sectional view of a capacitive fingerprint sensor module. As shown in FIG. 1, the capacitive fingerprint sensing module 1'mainly includes a pixel circuit integrated unit 11' and a sensing electrode unit 12', wherein a protective layer 13' covers the sensing electrode unit 12' , And the sensing electrode unit 12' includes a plurality of sensing electrodes 121'. On the other hand, the pixel circuit integrated unit 11' includes a substrate 111' and a sensing circuit fabricated in the substrate 111', and the sensing circuit includes a plurality of P-type MOS transistors 112' and a plurality of N-type MOS transistor 113'. When the user's finger presses the capacitive fingerprint sensor module 1', a ridge sensing capacitor Cr is formed between the ridge of the finger surface and the sensing electrode 121', and the valley of the finger surface A valley sensing capacitor Cv is formed between) and the sensing electrode 121'.

如圖1所示,當手指碰觸電容式指紋感測模塊1’時,由指尖釋放的靜電電荷(圖1顯示為正電荷)可能會通過感測電極單元12’進入感測電路進而造成所述P型MOS電晶體112’與/或所述N型MOS電晶體113’的損壞。因此,現有的電容式指紋感測模塊1’的芯片通常具備靜電放電(Electro Static Discharge, ESD)保護之設計。舉例而言,美國專利號US7,076,089通過在複數個所述感測電極之間插設多個ESD防護電極單元,並令各所述ESD防護電極單元的電極高於各所述感測電極,藉以方式完成在電容式指紋感測模塊的芯片上的ESD保護設計。再者,中國專利公開號CN106033531A將ESD防護電極單元設計為複數個十字形電極,並令各所述十字形電極位於任四個感測電極之間。進一步地,中國專利公開號CN106033531A還將ESD防護電極單元變更設計為複數條水平電極與複數條垂直電極。As shown in Figure 1, when a finger touches the capacitive fingerprint sensor module 1', the electrostatic charge released by the fingertip (shown as a positive charge in Figure 1) may enter the sensing circuit through the sensing electrode unit 12' and cause Damage to the P-type MOS transistor 112' and/or the N-type MOS transistor 113'. Therefore, the chip of the existing capacitive fingerprint sensor module 1'usually has an electrostatic discharge (Electro Static Discharge, ESD) protection design. For example, US Pat. No. 7,076,089 inserts a plurality of ESD protection electrode units between a plurality of the sensing electrodes, and makes the electrode of each ESD protection electrode unit higher than each of the sensing electrodes. In this way, the ESD protection design on the chip of the capacitive fingerprint sensing module is completed. Furthermore, Chinese Patent Publication No. CN106033531A designs the ESD protection electrode unit as a plurality of cross-shaped electrodes, and each of the cross-shaped electrodes is located between any four sensing electrodes. Furthermore, Chinese Patent Publication No. CN106033531A also changes the design of the ESD protection electrode unit into a plurality of horizontal electrodes and a plurality of vertical electrodes.

簡單地說,美國專利號US7,076,089和中國專利公開號CN106033531A都是通過在感測電極之間設置ESD防護電極的方式達成對於電容式指紋感測模塊的芯片上的ESD保護設計。然而,所述ESD防護電極在芯片之中係耦接至地端(GND),這樣的設計並無法保證正極靜電荷與負極靜電荷都能夠透過所述ESD防護電極而直接經由地端被洩除掉。Simply put, US Patent No. US7,076,089 and Chinese Patent Publication No. CN106033531A both achieve the ESD protection design on the chip of the capacitive fingerprint sensor module by arranging ESD protection electrodes between the sensing electrodes. However, the ESD protection electrode is coupled to the ground (GND) in the chip. This design does not guarantee that both the positive and negative static charges can pass through the ESD protection electrode and be directly discharged through the ground. Drop.

有鑑於此,中國專利公開號CN105701440A揭露另一種具靜電防護的指紋感測器。圖2顯示一靜電防護單元與一感測電極單元的連接示圖。圖2所示的感測電極單元12’的剖視圖可以參考如圖1之所示者。然而,於圖1所示者不同的是,圖2的感測電極單元12’內部更包括沿水平設置複數條第一ESD電極201’和沿垂直設置複數條第二ESD電極202’。依據中國專利公開號CN105701440A的揭示內容,複數條所述第一ESD電極201’的兩端皆耦接有一組ESD防護單元31’,且所述ESD防護單元31’包括一第一二極體311’與一第二二極體312’。通過增設由該第一二極體311’與該第二二極體312’組成的ESD防護單元31’於電容式指紋感測模塊的芯片中,無論是正極靜電荷與負極靜電荷都能夠透過複數條所述第二ESD電極202’、複數條所述第一ESD電極201’、和複數組所述ESD防護單元31’而直接經由地端被洩除掉。In view of this, Chinese Patent Publication No. CN105701440A discloses another fingerprint sensor with electrostatic protection. FIG. 2 shows a connection diagram of an electrostatic protection unit and a sensing electrode unit. The cross-sectional view of the sensing electrode unit 12' shown in FIG. 2 can refer to that shown in FIG. However, the difference from the one shown in FIG. 1 is that the sensing electrode unit 12' of FIG. 2 further includes a plurality of first ESD electrodes 201' arranged horizontally and a plurality of second ESD electrodes 202' arranged vertically. According to the disclosure of Chinese Patent Publication No. CN105701440A, both ends of the plurality of first ESD electrodes 201' are coupled with a set of ESD protection units 31', and the ESD protection units 31' include a first diode 311 'With a second diode 312'. By adding the ESD protection unit 31' composed of the first diode 311' and the second diode 312' to the chip of the capacitive fingerprint sensor module, both positive and negative electrostatic charges can pass through A plurality of the second ESD electrodes 202', a plurality of the first ESD electrodes 201', and a plurality of the ESD protection units 31' are directly discharged through the ground.

圖3為由第一二極體和第二二極體所組成的ESD防護單元的電路圖。如圖3所示,第一二極體311’通常為接成二極體形式的P型MOS電晶體(Diode connected P-type MOSFET),且第二二極體312’通常為接成二極體形式的N型MOS電晶體(Diode connected N-type MOSFET)。值得說明的是,美國專利號US9,563,802所揭示的指紋辨識晶片同樣具有如圖2與圖3所示的複數組ESD防護單元31’之靜電放電保護設計。然而,必須注意的是,當手指接觸電容式指紋感測模塊的瞬間,靜電電荷有可能在VDD 端與VSS 端之間形成高ESD電壓。實務中發現,此高ESD電壓有很大的機會造成第一二極體311’與/或第二二極體312’的損壞。由上述說明可知,即使目前已經揭示了許多應用於電容式指紋感測芯片之中的靜電防護電路,但習知技術所揭露的靜電防護電路顯然仍具有需要改善之處。Fig. 3 is a circuit diagram of an ESD protection unit composed of a first diode and a second diode. As shown in FIG. 3, the first diode 311' is usually a diode connected P-type MOSFET (Diode connected P-type MOSFET), and the second diode 312' is usually a diode connected Diode connected N-type MOSFET in bulk form. It is worth noting that the fingerprint recognition chip disclosed in US Patent No. US9,563,802 also has an ESD protection design of a complex array of ESD protection units 31' as shown in FIGS. 2 and 3. However, it must be noted that when the finger touches the capacitive fingerprint sensor module, the electrostatic charge may form a high ESD voltage between the V DD terminal and the V SS terminal. In practice, it is found that this high ESD voltage has a great chance of causing damage to the first diode 311' and/or the second diode 312'. It can be seen from the above description that even though many electrostatic protection circuits used in capacitive fingerprint sensor chips have been disclosed, the electrostatic protection circuits disclosed in the prior art clearly still have areas for improvement.

由上述說明可知,本領域亟需一種具增強靜電放電保護的指紋感測模塊。It can be seen from the above description that there is an urgent need in the art for a fingerprint sensing module with enhanced electrostatic discharge protection.

本發明之一目的在於將一靜電放電防護單元與一指紋感測模塊進行整合進而以提出一種具增強靜電放電保護的指紋感測模塊。One purpose of the present invention is to integrate an electrostatic discharge protection unit and a fingerprint sensing module to provide a fingerprint sensing module with enhanced electrostatic discharge protection.

本發明之另一目的在於增加寄生元件於所述指紋感測模塊的感測訊號讀出單元之中,以提升感測訊號讀出單元對於靜電放電的防護能力。Another object of the present invention is to add parasitic elements in the sensing signal readout unit of the fingerprint sensing module, so as to improve the protection capability of the sensing signal readout unit against electrostatic discharge.

為達成上述目的,本發明提出一種具增強靜電放電保護的指紋感測模塊,其包括:To achieve the above objective, the present invention proposes a fingerprint sensing module with enhanced electrostatic discharge protection, which includes:

一感測單元,包括複數個感測電極;A sensing unit, including a plurality of sensing electrodes;

一感測訊號讀出單元,包括複數個訊號讀出器;A sensing signal readout unit, including a plurality of signal readers;

一驅動單元,耦接複數個所述感測電極;A driving unit coupled to a plurality of said sensing electrodes;

一控制單元,耦接該驅動單元與該感測訊號讀出單元;以及A control unit coupled to the driving unit and the sensing signal readout unit; and

複數個靜電放電防護單元,其中各所述靜電放電防護單元均以一輸入端耦接一所述感測電極,及以一輸出端耦接一所述訊號讀出器;A plurality of electrostatic discharge protection units, wherein each of the electrostatic discharge protection units has an input end coupled to the sensing electrode, and an output end coupled to the signal reader;

其中,各所述靜電放電防護單元均包括:一第一靜電放電防護元件,以其一端耦接該輸入端與該輸出端,且以其另一端耦接一工作電壓;一第二靜電放電防護元件,以其一端耦接該輸入端與該輸出端,且以其另一端耦接一共接地電壓;以及一電壓箝制元件,耦接於該工作電壓與該共接地電壓之間。Each of the electrostatic discharge protection units includes: a first electrostatic discharge protection element, one end of which is coupled to the input terminal and the output terminal, and the other end of which is coupled to a working voltage; and a second electrostatic discharge protection element One end of the element is coupled to the input end and the output end, and the other end is coupled to a common ground voltage; and a voltage clamping element is coupled between the working voltage and the common ground voltage.

在一實施例中,所述之具增強靜電放電保護的指紋感測模塊更包括一信號處理單元,且該信號處理單元耦接該感測訊號讀出單元。In one embodiment, the fingerprint sensing module with enhanced electrostatic discharge protection further includes a signal processing unit, and the signal processing unit is coupled to the sensing signal reading unit.

在可能的實施例中,該第一靜電放電防護元件與該第二靜電放電防護元件皆可為二極體或接成二極體形式的金氧半場效電晶體。In a possible embodiment, both the first ESD protection element and the second ESD protection element can be a diode or a metal oxide half field effect transistor connected in the form of a diode.

在可能的實施例中,該電壓箝制元件可為N型金氧半場效電晶體或P型金氧半場效電晶體。In a possible embodiment, the voltage clamping element may be an N-type MOSFET or a P-type MOSFET.

在一實施例中,該訊號讀出器包括:In one embodiment, the signal reader includes:

一運算放大器,具有一負輸入端、一正輸入端及一輸出端,該負輸入端係用以經由一待測電容耦接一感測輸入訊號,該正輸入端耦接該共接地電壓;An operational amplifier having a negative input terminal, a positive input terminal and an output terminal, the negative input terminal is used to couple a sensing input signal via a capacitor to be measured, and the positive input terminal is coupled to the common ground voltage;

一回授電容,耦接於該運算放大器的該負輸入端與該輸出端之間;A feedback capacitor, coupled between the negative input terminal and the output terminal of the operational amplifier;

一第一開關,其通道係與該回授電容並聯;以及A first switch, the channel of which is connected in parallel with the feedback capacitor; and

一第二開關,其通道係耦接於該運算放大器的該負輸入端與該共接地電壓之間。A second switch whose channel is coupled between the negative input terminal of the operational amplifier and the common ground voltage.

在一實施例中,該第一開關為一第一金氧半場效電晶體,且該第一金氧半場效電晶體的汲極與矽基材之間具有一第一寄生二極體。In one embodiment, the first switch is a first MOSFET, and there is a first parasitic diode between the drain of the first MOSFET and the silicon substrate.

在一實施例中,該第二開關為一第二金氧半場效電晶體,且該第二金氧半場效電晶體的汲極與源極之間具有一第二寄生二極體。In one embodiment, the second switch is a second MOSFET, and there is a second parasitic diode between the drain and the source of the second MOSFET.

在一實施例中,該訊號讀出器包括:In one embodiment, the signal reader includes:

一運算放大器,具有一負輸入端、一正輸入端及一輸出端,該負輸入端係用以經由一待測電容耦接一感測輸入訊號,該正輸入端耦接該共接地電壓;An operational amplifier having a negative input terminal, a positive input terminal and an output terminal, the negative input terminal is used to couple a sensing input signal via a capacitor to be measured, and the positive input terminal is coupled to the common ground voltage;

一回授電容,耦接於該運算放大器的該負輸入端與該輸出端之間;A feedback capacitor, coupled between the negative input terminal and the output terminal of the operational amplifier;

一第一開關,其通道係與該回授電容並聯;A first switch whose channel is connected in parallel with the feedback capacitor;

一第二開關,其通道係耦接於該運算放大器的該負輸入端與該待測電容之間;以及A second switch, the channel of which is coupled between the negative input terminal of the operational amplifier and the capacitor under test; and

一第三開關,其一通道端耦接該工作電壓,且其另一通道端係耦接於該待測電容與該第二開關之間,以及該第三開關為一第三金氧半場效電晶體,且該第三金氧半場效電晶體的汲極與源極之間具有一第三寄生二極體。A third switch, one channel terminal of which is coupled to the operating voltage, and the other channel terminal of which is coupled between the capacitor to be measured and the second switch, and the third switch is a third metal oxide half field effect Transistor, and there is a third parasitic diode between the drain and the source of the third MOSFET.

另外,本發明進一步提出一種電子裝置,其具有如前所述之具增強靜電放電保護的指紋感測模塊。In addition, the present invention further provides an electronic device having the fingerprint sensing module with enhanced electrostatic discharge protection as described above.

在可能的實施例中,該電子裝置可為智慧型手機、平板電腦、筆記型電腦、一體式電腦、門口機、電子門鎖或指紋辨識裝置。In possible embodiments, the electronic device may be a smart phone, a tablet computer, a notebook computer, an all-in-one computer, a door phone, an electronic door lock, or a fingerprint recognition device.

為使  貴審查委員能進一步瞭解本發明之結構、特徵、目的、與其優點,茲附以圖式及較佳具體實施例之詳細說明如後。In order to enable your reviewer to further understand the structure, features, purpose, and advantages of the present invention, the drawings and detailed descriptions of preferred specific embodiments are attached as follows.

圖4為本發明之具增強靜電放電保護的指紋感測模塊的一實施例架構圖。如圖4所示,本發明之具增強靜電放電保護的指紋感測模塊1主要包括:一感測單元10、一感測訊號讀出單元11、一驅動單元12、一控制單元13、以及複數個靜電放電防護單元14。圖5為圖4之感測單元、靜電放電防護單元和感測訊號讀出單元的連接示圖。於本發明中,該感測單元10包括複數個感測電極101,且一保護層102係覆於複數個所述感測電極101之上。再者,該感測訊號讀出單元11包括複數個訊號讀出器111,且各所述訊號讀出器111皆耦接所述感測電極101。另一方面,該驅動單元12耦接至複數個所述感測電極101,且該控制單元13耦接至該驅動單元12與該感測訊號讀出單元11。如圖4所示,本發明之具增強靜電放電保護的指紋感測模塊1更包含一信號處理單元15,其耦接該感測訊號讀出單元11。4 is a structural diagram of an embodiment of the fingerprint sensor module with enhanced electrostatic discharge protection of the present invention. As shown in FIG. 4, the fingerprint sensing module 1 with enhanced electrostatic discharge protection of the present invention mainly includes: a sensing unit 10, a sensing signal reading unit 11, a driving unit 12, a control unit 13, and a plurality of A ESD protection unit 14. FIG. 5 is a connection diagram of the sensing unit, the electrostatic discharge protection unit and the sensing signal readout unit of FIG. 4. In the present invention, the sensing unit 10 includes a plurality of sensing electrodes 101, and a protective layer 102 is covered on the plurality of sensing electrodes 101. Furthermore, the sensing signal readout unit 11 includes a plurality of signal readers 111, and each of the signal readers 111 is coupled to the sensing electrode 101. On the other hand, the driving unit 12 is coupled to a plurality of the sensing electrodes 101, and the control unit 13 is coupled to the driving unit 12 and the sensing signal readout unit 11. As shown in FIG. 4, the fingerprint sensing module 1 with enhanced electrostatic discharge protection of the present invention further includes a signal processing unit 15 coupled to the sensing signal reading unit 11.

請重複參閱圖4與圖5。特別地,本發明令各所述靜電放電防護單元14以其一輸入端14in和一輸出端14out分別耦接至所述感測電極101與所述訊號讀出器111。並且,各所述靜電放電防護單元14包括:一第一靜電放電防護元件141、一第二靜電放電防護元件142與一電壓箝制元件143;其中,該第一靜電放電防護元件141以其一端耦接該輸入端14in與該輸出端14out,且以其另一端耦接一工作電壓VDD 。另一方面,該第二靜電放電防護元件142以其一端耦接該輸入端14in與該輸出端14out,且以其另一端耦接一共接地端電壓VSS 。再者,該電壓箝制元件143耦接於該工作電壓VDD 與該共接地端電壓VSS 之間。當手指接觸電容式指紋感測模塊的瞬間,靜電電荷有可能在VDD 端與VSS 端之間形成高ESD電壓,所述電壓箝制元件143可以對所述高ESD電壓起到一個洩除作用,防止高ESD電壓直接對第一靜電放電防護元件141與第二靜電放電防護元件142造成損壞。Please refer to Figure 4 and Figure 5 repeatedly. In particular, in the present invention, each of the electrostatic discharge protection units 14 is coupled to the sensing electrode 101 and the signal reader 111 with an input terminal 14in and an output terminal 14out, respectively. In addition, each of the electrostatic discharge protection units 14 includes: a first electrostatic discharge protection element 141, a second electrostatic discharge protection element 142, and a voltage clamping element 143; wherein, the first electrostatic discharge protection element 141 is coupled with one end thereof The input terminal 14in and the output terminal 14out are connected, and the other terminal is coupled to a working voltage V DD . On the other hand, the second ESD protection element 142 has one end coupled to the input end 14in and the output end 14out, and the other end is coupled to a common ground voltage V SS . Furthermore, the voltage clamping element 143 is coupled between the working voltage V DD and the common ground voltage V SS . When the finger touches the capacitive fingerprint sensor module, the electrostatic charge may form a high ESD voltage between the V DD terminal and the V SS terminal. The voltage clamping element 143 can play a role in releasing the high ESD voltage. , To prevent the high ESD voltage from directly damaging the first electrostatic discharge protection element 141 and the second electrostatic discharge protection element 142.

繼續地參閱圖6,其為圖4之靜電放電防護單元的電路方塊圖。並請同時參閱圖7,其為顯示圖4之靜電放電防護單元的四種實施態樣的電路架構圖。補充說明的是,圖6之中繪有第一線路寄生電阻14pa1與第二線路寄生電阻14pa2,這兩個線路寄生電阻14pa2為習知技術所揭示,用於減少靜電電荷在VDD 端與VSS 端之間形成高ESD電壓直接對第一靜電放電防護元件141與第二靜電放電防護元件142造成損壞。另一方面,由圖7的電路架構(a)可知,所述第一靜電放電防護元件141為一個二極體,並以其正極耦接該輸入端14in與該輸出端14out,且以其負極耦接該工作電壓VDD 。所述第二靜電放電防護元件142同樣為一個二極體,並以其負極耦接該輸入端14in與該輸出端14out,且以其正極耦接該共接地端電壓VSS 。再者,該電壓箝制元件143為一N型金氧半場效電晶體,並以其汲極耦接該工作電壓VDD 與該第一靜電放電防護元件141(二極體)的負極,且以其閘極和源極耦接該共接地端電壓VSS 與該第二靜電放電防護元件142(二極體)的正極。特別說明的是,透過增設所述電壓箝制元件143(N型金氧半場效電晶體)於靜電放電防護單元14之中,則可以減少所述該第一線路寄生電阻14pa1與該第二線路寄生電阻14pa2的使用,或者直接將第一線路寄生電阻14pa1與第二線路寄生電阻14pa2自所述靜電放電防護單元14的架構中去除。Continue to refer to FIG. 6, which is a circuit block diagram of the electrostatic discharge protection unit of FIG. 4. Please also refer to FIG. 7, which is a circuit structure diagram showing four implementation modes of the electrostatic discharge protection unit of FIG. 4. It is supplemented that FIG. 6 depicts the first line parasitic resistance 14pa1 and the second line parasitic resistance 14pa2. These two line parasitic resistances 14pa2 are disclosed by the prior art and used to reduce the electrostatic charge between the V DD terminal and the V DD terminal. The high ESD voltage formed between the SS terminals directly damages the first electrostatic discharge protection element 141 and the second electrostatic discharge protection element 142. On the other hand, it can be seen from the circuit structure (a) of FIG. 7 that the first electrostatic discharge protection element 141 is a diode, and its positive electrode is coupled to the input terminal 14in and the output terminal 14out, and its negative electrode Coupled to the working voltage V DD . The second ESD protection element 142 is also a diode, and its negative electrode is coupled to the input terminal 14in and the output terminal 14out, and its positive electrode is coupled to the common ground terminal voltage V SS . Furthermore, the voltage clamping element 143 is an N-type MOSFET, and its drain is coupled to the working voltage V DD and the negative electrode of the first electrostatic discharge protection element 141 (diode), and The gate and source are coupled to the common ground terminal voltage V SS and the anode of the second electrostatic discharge protection element 142 (diode). In particular, by adding the voltage clamping element 143 (N-type metal oxide half field effect transistor) in the ESD protection unit 14, the parasitic resistance of the first line 14pa1 and the parasitic resistance of the second line can be reduced. The use of the resistor 14pa2, or directly remove the first line parasitic resistance 14pa1 and the second line parasitic resistance 14pa2 from the structure of the electrostatic discharge protection unit 14.

再者,由圖7的電路架構(b)可知,所述電壓箝制元件143也可以是一個P型金氧半場效電晶體,並以其源極及閘極耦接該工作電壓VDD 與該第一靜電放電防護元件141(二極體)的負極,且以其汲極耦接該共接地端電壓VSS 與該第二靜電放電防護元件142(二極體)的正極。另一方面,依據圖7的電路架構(c)和電路架構(d)可知,該第一靜電放電防護元件141也可以是一個接成二極體形式的P型金氧半場效電晶體(Diode connected p-type MOSFET),且該第二靜電放電防護元件142也可以是一個接成二極體形式的N型金氧半場效電晶體。必須特別強調的是,為了清楚地凸顯所述靜電放電防護單元14與感測訊號讀出單元14及複數個感測電極101之間的連接關係,圖4係將靜電放電防護單元14、感測訊號讀出單元14、和複數個感測電極101獨立繪示。然而,在製作感測單元10之時,可將所述靜電放電防護單元14整合至感測單元10之中。又或者,在製作感測訊號讀出單元14的芯片之時,可將所述靜電放電防護單元14整合至芯片之中。Furthermore, it can be seen from the circuit structure (b) of FIG. 7 that the voltage clamping element 143 can also be a P-type MOSFET, and its source and gate are coupled to the working voltage V DD and the The negative electrode of the first electrostatic discharge protection element 141 (diode), and its drain is coupled to the common ground terminal voltage V SS and the positive electrode of the second electrostatic discharge protection element 142 (diode). On the other hand, according to the circuit architecture (c) and the circuit architecture (d) of FIG. 7, it can be known that the first electrostatic discharge protection element 141 may also be a P-type metal oxide half field effect transistor connected in the form of a diode. connected p-type MOSFET), and the second electrostatic discharge protection element 142 can also be an N-type metal oxide half field effect transistor connected in the form of a diode. It must be particularly emphasized that, in order to clearly highlight the connection between the electrostatic discharge protection unit 14 and the sensing signal readout unit 14 and the plurality of sensing electrodes 101, FIG. 4 shows the electrostatic discharge protection unit 14, sensing The signal readout unit 14 and the plurality of sensing electrodes 101 are shown separately. However, when the sensing unit 10 is manufactured, the electrostatic discharge protection unit 14 can be integrated into the sensing unit 10. Alternatively, when manufacturing the chip of the sensing signal readout unit 14, the electrostatic discharge protection unit 14 can be integrated into the chip.

值得說明的是,本發明進一步地在各所述訊號讀出器111之中設計靜電放電之防護設計。圖8a、圖8b與圖8c顯示圖4之訊號讀出器之三個實施例的電路架構圖。由圖8a可知,所述訊號讀出器111為一電容電壓轉換器,且主要包括:一運算放大器1111、一回授電容1112、一第一開關1113、和一第二開關1114;其中,該回授電容1112耦接於該運算放大器1111的一負輸入端與一輸出端之間,且該第一開關1113的通道係與該回授電容1112並聯。另一方面,該第二開關1114之通道係耦接於該運算放大器1111的該負輸入端與該共接地電壓之間。為了令訊號讀出器111具備靜電放電防護功能,於製作訊號讀出器111可使用一第一金氧半場效電晶體作為該第一開關1113,且該第一金氧半場效電晶體的汲極與矽基材之間具有一第一寄生二極體。同時,使用一第二金氧半場效電晶體作為該第二開關1114,且該第二金氧半場效電晶體的汲極與源極之間具有一第二寄生二極體。熟悉電子電路設計的工程師應當理解,如圖8b所示,在實務應用上當然可以只令第二開關1114具有寄生二極體之設計。又或者,可以進一步地增加具有寄生二極體之一第三開關於所述訊號讀出器111的電路架構中。如圖8c所示,該第三開關1115之一通道端耦接該工作電壓,且其另一通道端係耦接於該待測電容1110與該第二開關1114之間;並且,該第三開關1115為一第三金氧半場效電晶體,且該第三金氧半場效電晶體的汲極與源極之間具有一第三寄生二極體。It is worth noting that the present invention further designs an electrostatic discharge protection design in each of the signal readers 111. 8a, 8b, and 8c show circuit structure diagrams of three embodiments of the signal reader of FIG. 4. It can be seen from FIG. 8a that the signal reader 111 is a capacitance-to-voltage converter, and mainly includes: an operational amplifier 1111, a feedback capacitor 1112, a first switch 1113, and a second switch 1114; wherein, the The feedback capacitor 1112 is coupled between a negative input terminal and an output terminal of the operational amplifier 1111, and the channel of the first switch 1113 is connected in parallel with the feedback capacitor 1112. On the other hand, the channel of the second switch 1114 is coupled between the negative input terminal of the operational amplifier 1111 and the common ground voltage. In order to make the signal reader 111 have electrostatic discharge protection function, a first metal oxide half field effect transistor can be used as the first switch 1113, and the drain of the first metal oxide half field effect transistor There is a first parasitic diode between the electrode and the silicon substrate. At the same time, a second MOSFET is used as the second switch 1114, and there is a second parasitic diode between the drain and the source of the second MOSFET. Engineers familiar with electronic circuit design should understand that, as shown in FIG. 8b, in practical applications, of course, only the second switch 1114 can be designed with a parasitic diode. Alternatively, a third switch having a parasitic diode can be further added to the circuit structure of the signal reader 111. As shown in FIG. 8c, one channel end of the third switch 1115 is coupled to the operating voltage, and the other channel end is coupled between the capacitor under test 1110 and the second switch 1114; and, the third switch 1115 The switch 1115 is a third MOSFET, and there is a third parasitic diode between the drain and the source of the third MOSFET.

汲極與源極之間具有寄生二極體的金氧半場效電晶體(MOSFET)經常被使用作為開關元件。然而,本發明特別設計令MOSFET的汲極與基材(或稱基體(body))之間具有寄生二極體。圖9a顯示本發明設計的N型MOSFET的佈局圖和剖視圖,且圖9b顯示一般的N型MOSFET的佈局圖和剖視圖。其中,沿著剖面線A-A切割佈局圖(a)即獲得剖視圖(a)。比較圖9a與圖9b可以輕易地發現,本發明係通過增大汲極的擴散區(Diffusion region)的寬度之方式,令MOSFET的汲極和基材(基體)之間形成有一個寄生二極體。另一方面,圖10a顯示本發明設計的P型MOSFET的佈局圖和剖視圖,且圖10b顯示一般的P型MOSFET的佈局圖和剖視圖。其中,沿著剖面線B-B切割佈局圖(a)即獲得剖視圖(a)。比較圖10a與圖10b可以理解,本發明係通過增大汲極的擴散區(Diffusion region)的寬度之方式,令MOSFET的汲極和基材(基體)之間形成有一個寄生二極體。A MOSFET with a parasitic diode between the drain and the source is often used as a switching element. However, the present invention is specifically designed to have a parasitic diode between the drain of the MOSFET and the substrate (or body). Fig. 9a shows a layout diagram and a cross-sectional view of an N-type MOSFET designed in the present invention, and Fig. 9b shows a layout diagram and a cross-sectional view of a general N-type MOSFET. Among them, cut the layout drawing (a) along the section line A-A to obtain the sectional view (a). Comparing Figure 9a and Figure 9b, it can be easily found that the present invention increases the width of the diffusion region of the drain, so that a parasitic diode is formed between the drain of the MOSFET and the substrate (substrate). body. On the other hand, FIG. 10a shows a layout diagram and a cross-sectional view of a P-type MOSFET designed by the present invention, and FIG. 10b shows a layout diagram and a cross-sectional view of a general P-type MOSFET. Among them, cut the layout diagram (a) along the section line B-B to obtain the section view (a). Comparing FIG. 10a and FIG. 10b, it can be understood that, in the present invention, a parasitic diode is formed between the drain of the MOSFET and the substrate (substrate) by increasing the width of the diffusion region of the drain.

如此,上述係已完整且清楚地說明本發明之具增強靜電放電保護的指紋感測模塊及電子裝置及電子裝置;並且,經由上述可得知本發明係具有下列之優點:In this way, the above description has completely and clearly described the fingerprint sensor module, electronic device, and electronic device with enhanced electrostatic discharge protection of the present invention; and from the above, it can be seen that the present invention has the following advantages:

(1)本發明改良於習知的靜電放電防護單元,特別是將一電壓箝制元件整合至靜電放電防護單元之中,並將所述靜電放電防護單元進一步與指紋感測模塊的感測單元與/或感測訊號讀出單元進行整合,藉以獲得具增強靜電放電保護的指紋感測模塊。(1) The present invention is an improvement on the conventional electrostatic discharge protection unit, and in particular integrates a voltage clamping element into the electrostatic discharge protection unit, and further combines the electrostatic discharge protection unit with the sensing unit of the fingerprint sensor module and /Or the sensing signal readout unit is integrated to obtain a fingerprint sensing module with enhanced electrostatic discharge protection.

(2)本發明更進一步地於感測訊號讀出單元的訊號讀出器之中增加寄生元件,並利用所述寄生元件提升感測訊號讀出單元對於靜電放電的防護能力。(2) The present invention further adds a parasitic element to the signal reader of the sensing signal readout unit, and uses the parasitic element to improve the protection capability of the sensing signal readout unit against electrostatic discharge.

必須加以強調的是,前述本案所揭示者乃為較佳實施例,舉凡局部之變更或修飾而源於本案之技術思想而為熟習該項技藝之人所易於推知者,俱不脫本案之專利權範疇。It must be emphasized that the foregoing disclosures in this case are preferred embodiments, and any partial changes or modifications that are derived from the technical ideas of this case and are easily inferred by those who are familiar with the art will not deviate from the patent of this case. Right category.

綜上所陳,本案無論目的、手段與功效,皆顯示其迥異於習知技術,且其首先發明合於實用,確實符合發明之專利要件,懇請  貴審查委員明察,並早日賜予專利俾嘉惠社會,是為至禱。In summary, regardless of the purpose, means and effects of this case, it is shown that it is very different from the conventional technology, and its first invention is suitable for practicality, and it does meet the patent requirements of the invention. Please check it out and grant the patent as soon as possible. Society is for the best prayer.

<本發明> 1:具增強靜電放電保護的指紋感測模塊 10:感測單元 11:感測訊號讀出單元 12:驅動單元 13:控制單元 14:靜電放電防護單元 15:信號處理單元 101:感測電極 102:保護層 111:訊號讀出器 14in:輸入端 14out:輸出端 141:第一靜電放電防護元件 142:第二靜電放電防護元件 143:電壓箝制元件 14pa1:第一線路寄生電阻 14pa2:第二線路寄生電阻 1111:運算放大器 1112:回授電容 1113:第一開關 1114:第二開關 1110:待測電容 1115:第三開關 <習知> 1’:電容式指紋感測模塊 11’:像素電路集成單元 12’:感測電極單元 13’:保護層 121’:感測電極 111’:基材 112’:P型MOS電晶體 113’:N型MOS電晶體 201’:第一ESD電極 202’:第二ESD電極 31’:ESD防護單元 311’:第一二極體 312’:第二二極體 <The present invention> 1: Fingerprint sensor module with enhanced electrostatic discharge protection 10: Sensing unit 11: Sensing signal readout unit 12: drive unit 13: Control unit 14: Electrostatic discharge protection unit 15: signal processing unit 101: sensing electrode 102: protective layer 111: Signal Reader 14in: input 14out: output terminal 141: The first electrostatic discharge protection component 142: The second electrostatic discharge protection component 143: Voltage Clamping Components 14pa1: Parasitic resistance of the first line 14pa2: Parasitic resistance of the second line 1111: operational amplifier 1112: feedback capacitor 1113: First switch 1114: second switch 1110: Capacitance to be measured 1115: third switch <Acquaintances> 1’: Capacitive fingerprint sensor module 11’: Pixel circuit integrated unit 12’: Sensing electrode unit 13’: Protective layer 121’: Sensing electrode 111’: Substrate 112’: P-type MOS transistor 113’: N-type MOS transistor 201’: The first ESD electrode 202’: The second ESD electrode 31’: ESD protection unit 311’: The first diode 312’: The second diode

圖1為電容式指紋感測模塊的剖視圖; 圖2為靜電防護單元與感測電極單元的連接示圖; 圖3為由第一二極體和第二二極體所組成的ESD防護單元的電路圖; 圖4為本發明之具增強靜電放電保護的指紋感測模塊的一實施例架構圖; 圖5為圖4之感測單元、靜電放電防護單元和感測訊號讀出單元的連接示圖; 圖6為圖4之靜電放電防護單元的電路方塊圖; 圖7a-d為顯示圖4之靜電放電防護單元的四種實施態樣的電路架構圖; 圖8a為圖4之訊號讀出器之一實施例的電路架構圖; 圖8b為圖4之訊號讀出器之另一實施例的電路架構圖; 圖8c為圖4之訊號讀出器之又一實施例的電路架構圖; 圖9a為本發明設計的N型MOSFET的佈局圖和剖視圖; 圖9b為一般的N型MOSFET的佈局圖和剖視圖; 圖10a為本發明設計的P型MOSFET的佈局圖和剖視圖;以及 圖10b為一般的P型MOSFET的佈局圖和剖視圖。Figure 1 is a cross-sectional view of a capacitive fingerprint sensing module; Figure 2 is a connection diagram of an electrostatic protection unit and a sensing electrode unit; Figure 3 is a diagram of an ESD protection unit composed of a first diode and a second diode Circuit diagram; FIG. 4 is a structural diagram of an embodiment of the fingerprint sensing module with enhanced electrostatic discharge protection of the present invention; FIG. 5 is a connection diagram of the sensing unit, the electrostatic discharge protection unit and the sensing signal readout unit of FIG. 4 Fig. 6 is a circuit block diagram of the ESD protection unit of Fig. 4; Figs. 7a-d are circuit diagrams showing four implementations of the ESD protection unit of Fig. 4; Fig. 8a is the signal reader of Fig. 4 A circuit structure diagram of an embodiment; FIG. 8b is a circuit structure diagram of another embodiment of the signal reader of FIG. 4; FIG. 8c is a circuit structure diagram of another embodiment of the signal reader of FIG. 4; 9a is the layout and cross-sectional view of the N-type MOSFET designed by the present invention; Figure 9b is the layout and cross-sectional view of the general N-type MOSFET; Figure 10a is the layout and cross-sectional view of the P-type MOSFET designed by the present invention; and Figure 10b is the general Layout and cross-sectional view of the P-type MOSFET.

10:感測單元 10: Sensing unit

11:感測訊號讀出單元 11: Sensing signal readout unit

14:靜電放電防護單元 14: Electrostatic discharge protection unit

101:感測電極 101: sensing electrode

102:保護層 102: protective layer

111:訊號讀出器 111: Signal Reader

14in:輸入端 14in: input

14out:輸出端 14out: output terminal

Claims (10)

一種具增強靜電放電保護的指紋感測模塊,包括:     一感測單元,包括複數個感測電極;     一感測訊號讀出單元,包括複數個訊號讀出器;     一驅動單元,耦接複數個所述感測電極;     一控制單元,耦接該驅動單元與該感測訊號讀出單元;以及        複數個靜電放電防護單元,其中各所述靜電放電防護單元均以一輸入端耦接一所述感測電極,及以一輸出端耦接一所述訊號讀出器;      其中,各所述靜電放電防護單元均包括:一第一靜電放電防護元件,以其一端耦接該輸入端與該輸出端,且以其另一端耦接一工作電壓;一第二靜電放電防護元件,以其一端耦接該輸入端與該輸出端,且以其另一端耦接一共接地電壓;以及一電壓箝制元件,耦接於該工作電壓與該共接地電壓之間。A fingerprint sensing module with enhanced electrostatic discharge protection, including: a sensing unit including a plurality of sensing electrodes; a sensing signal reading unit including a plurality of signal readers; a driving unit coupled to a plurality of sensing electrodes The sensing electrode; a control unit coupled to the driving unit and the sensing signal readout unit; and a plurality of electrostatic discharge protection units, wherein each of the electrostatic discharge protection units is coupled to one of the Sensing electrodes, and an output terminal coupled to the signal reader; wherein, each of the ESD protection units includes: a first ESD protection element, one end of which is coupled to the input terminal and the output A second ESD protection element, one end of which is coupled to the input terminal and the output end, and the other end of which is coupled to a common ground voltage, and a voltage clamping element , Coupled between the working voltage and the common ground voltage. 如申請專利範圍第1項所述之具增強靜電放電保護的指紋感測模塊,其更包括一信號處理單元,且該信號處理單元耦接該感測訊號讀出單元。The fingerprint sensing module with enhanced electrostatic discharge protection described in the first item of the patent application further includes a signal processing unit, and the signal processing unit is coupled to the sensing signal reading unit. 如申請專利範圍第1項所述之具增強靜電放電保護的指紋感測模塊,其中,該第一靜電放電防護元件與該第二靜電放電防護元件皆係選自於由二極體和接成二極體形式的金氧半場效電晶體所組成的群組之中的任一者。The fingerprint sensor module with enhanced electrostatic discharge protection described in the first item of the scope of patent application, wherein the first electrostatic discharge protection element and the second electrostatic discharge protection element are both selected from a diode and a Any one of the group consisting of metal oxide half field effect transistors in the form of a diode. 如申請專利範圍第1項所述之具增強靜電放電保護的指紋感測模塊,其中,該電壓箝制元件係選自於由N型金氧半場效電晶體和P型金氧半場效電晶體所組成的群組之中的任一者。The fingerprint sensor module with enhanced electrostatic discharge protection as described in the first item of the patent application, wherein the voltage clamping element is selected from N-type MOSFET and P-type MOSFET. Any one of the formed groups. 如申請專利範圍第1項所述之具增強靜電放電保護的指紋感測模塊,其中,該訊號讀出器包括:        一運算放大器,具有一負輸入端、一正輸入端及一輸出端,該負輸入端係用以經由一待測電容耦接一感測輸入訊號,該正輸入端耦接該共接地電壓;        一回授電容,耦接於該運算放大器的該負輸入端與該輸出端之間;        一第一開關,其通道係與該回授電容並聯;以及       一第二開關,其通道係耦接於該運算放大器的該負輸入端與該共接地電壓之間。For example, the fingerprint sensing module with enhanced electrostatic discharge protection described in item 1 of the scope of patent application, wherein the signal reader includes: an operational amplifier with a negative input terminal, a positive input terminal, and an output terminal. The negative input terminal is used to couple a sensing input signal via a capacitor to be measured, and the positive input terminal is coupled to the common ground voltage; a feedback capacitor is coupled to the negative input terminal and the output terminal of the operational amplifier Between; a first switch whose channel is connected in parallel with the feedback capacitor; and a second switch whose channel is coupled between the negative input terminal of the operational amplifier and the common ground voltage. 如申請專利範圍第5項所述之具增強靜電放電保護的指紋感測模塊,其中,該第一開關為一第一金氧半場效電晶體,且該第一金氧半場效電晶體的汲極與矽基材之間具有一第一寄生二極體。The fingerprint sensing module with enhanced electrostatic discharge protection as described in item 5 of the scope of patent application, wherein the first switch is a first metal oxide half field effect transistor, and the drain of the first metal oxide half field effect transistor There is a first parasitic diode between the electrode and the silicon substrate. 如申請專利範圍第6項所述之具增強靜電放電保護的指紋感測模塊,其中,該第二開關為一第二金氧半場效電晶體,且該第二金氧半場效電晶體的汲極與源極之間具有一第二寄生二極體。The fingerprint sensor module with enhanced electrostatic discharge protection described in item 6 of the scope of patent application, wherein the second switch is a second metal oxide half field effect transistor, and the drain of the second metal oxide half field effect transistor There is a second parasitic diode between the pole and the source. 如申請專利範圍第1項所述之具增強靜電放電保護的指紋感測模塊,其中,該訊號讀出器包括:         一運算放大器,具有一負輸入端、一正輸入端及一輸出端,該負輸入端係用以經由一待測電容耦接一感測輸入訊號,該正輸入端耦接該共接地電壓;         一回授電容,耦接於該運算放大器的該負輸入端與該輸出端之間;         一第一開關,其通道係與該回授電容並聯;         一第二開關,其通道係耦接於該運算放大器的該負輸入端與該待測電容之間;以及         一第三開關,其一通道端耦接該工作電壓,且其另一通道端係耦接於該待測電容與該第二開關之間,以及該第三開關為一第三金氧半場效電晶體,且該第三金氧半場效電晶體的汲極與源極之間具有一第三寄生二極體。For example, the fingerprint sensing module with enhanced electrostatic discharge protection described in item 1 of the scope of patent application, wherein the signal reader includes: an operational amplifier with a negative input terminal, a positive input terminal and an output terminal. The negative input terminal is used to couple a sensing input signal via a capacitor to be measured, and the positive input terminal is coupled to the common ground voltage; a feedback capacitor is coupled to the negative input terminal and the output terminal of the operational amplifier Between; a first switch whose channel is connected in parallel with the feedback capacitor; a second switch whose channel is coupled between the negative input terminal of the operational amplifier and the capacitor under test; and a third switch One of the channel ends is coupled to the operating voltage, and the other channel end is coupled between the capacitor under test and the second switch, and the third switch is a third metal oxide half field effect transistor, and There is a third parasitic diode between the drain electrode and the source electrode of the third MOSFET. 一種電子裝置,其具有如申請專利範圍第1-9項中任一項所述之具增強靜電放電保護的指紋感測模塊。An electronic device having a fingerprint sensing module with enhanced electrostatic discharge protection as described in any one of items 1-9 in the scope of patent application. 如申請專利範圍第9項所述之電子裝置,其係選自於智慧型手機、平板電腦、筆記型電腦、一體式電腦、門口機、電子門鎖、和指紋辨識裝置所組成的群組之中的一種裝置。The electronic device described in item 9 of the scope of patent application is selected from the group consisting of smart phones, tablet computers, notebook computers, all-in-one computers, door phones, electronic door locks, and fingerprint recognition devices A device in.
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