TW202040611A - LC composite component - Google Patents

LC composite component Download PDF

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TW202040611A
TW202040611A TW108147923A TW108147923A TW202040611A TW 202040611 A TW202040611 A TW 202040611A TW 108147923 A TW108147923 A TW 108147923A TW 108147923 A TW108147923 A TW 108147923A TW 202040611 A TW202040611 A TW 202040611A
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conductor
magnetic
inductor
metal particles
magnetic layer
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TW108147923A
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TWI717177B (en
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新海芳浩
奥山祐一郎
花井智也
有明佑介
金田功
大塚隆史
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日商 Tdk 股份有限公司
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Abstract

An LC composite component includes a non-magnetic substrate, a magnetic layer with magnetism, capacitors, inductors, and core parts with magnetism. The non-magnetic substrate includes a first surface and a second surface on a side opposite to the first surface. The magnetic layer is disposed to face the first surface of the non-magnetic substrate. The inductors and the capacitors are disposed between the first surface of the non-magnetic substrate and the magnetic layer. The core parts are disposed between the first surface of the non-magnetic substrate and the magnetic layer and connected to the magnetic layer. The thickness of the core parts is 1.0 or more times the thickness of the magnetic layer in a direction perpendicular to the first surface of the non-magnetic substrate, and each of the magnetic layer and the core parts contains magnetic metal particles and resin.

Description

LC複合零件LC composite parts

本發明係關於一種LC複合零件。The present invention relates to an LC composite part.

近年來,進一步要求於移動電話機、無線LAN通信設備等無線通信設備中所使用之電子零件之小型化、高性能化。於專利文獻1中,揭示了一種LC複合零件,其具備電感器、電容器、磁性層及基板,該基板、該磁性層及該電感器以特定之位置關係配置,該基板具有規定之厚度及複磁導率。 先前技術文獻 專利文獻In recent years, there has been a further demand for miniaturization and high performance of electronic components used in wireless communication devices such as mobile phones and wireless LAN communication devices. In Patent Document 1, an LC composite part is disclosed, which includes an inductor, a capacitor, a magnetic layer, and a substrate. The substrate, the magnetic layer, and the inductor are arranged in a specific positional relationship, and the substrate has a predetermined thickness and complex Permeability. Prior art literature Patent literature

專利文獻1 日本專利特開第2016-006847號公報Patent Document 1 Japanese Patent Laid-Open No. 2016-006847

[發明所欲解決之問題][The problem to be solved by the invention]

然而,專利文獻1中揭示之LC複合零件於LC複合零件之插入損耗特性方面有進一步改善之餘地。However, the LC composite component disclosed in Patent Document 1 has room for further improvement in the insertion loss characteristics of the LC composite component.

因此,本發明之目的在於,提供一種插入損耗特性進一步提高之LC複合零件。 [解決問題之技術手段]Therefore, the object of the present invention is to provide an LC composite component with further improved insertion loss characteristics. [Technical means to solve the problem]

本發明之一態樣係關於一種LC複合零件,其具備:非磁性基板、具有磁性之磁性層、1個以上之電容器、1個以上之電感器、及具有磁性之1個以上之芯部,上述非磁性基板具有第1面及與上述第1面為相反側之第2面,上述磁性層以與上述非磁性基板之第1面對向之方式配置,上述1個以上之電感器及上述1個以上之電容器配置於上述非磁性基板之第1面與上述磁性層之間,上述芯部配置於上述非磁性基板之第1面與上述磁性層之間並且連接於上述磁性層,在垂直於上述非磁性基板之第1面之方向,上述芯部之厚度相對於上述磁性層之厚度為1.0倍以上,上述磁性層及上述芯部包含磁性金屬粒子及樹脂。One aspect of the present invention relates to an LC composite component, which includes: a non-magnetic substrate, a magnetic layer with magnetism, one or more capacitors, one or more inductors, and one or more cores with magnetism, The non-magnetic substrate has a first surface and a second surface opposite to the first surface, the magnetic layer is arranged to face the first surface of the non-magnetic substrate, the one or more inductors and the second surface One or more capacitors are arranged between the first surface of the non-magnetic substrate and the magnetic layer, and the core is arranged between the first surface of the non-magnetic substrate and the magnetic layer and connected to the magnetic layer. In the direction of the first surface of the non-magnetic substrate, the thickness of the core is 1.0 times or more relative to the thickness of the magnetic layer, and the magnetic layer and the core include magnetic metal particles and resin.

於一態樣中,磁性金屬粒子之平均長軸徑可為120 nm以下。In one aspect, the average major axis diameter of the magnetic metal particles may be 120 nm or less.

於一態樣中,磁性金屬粒子之平均縱橫比可為1.2~6。In one aspect, the average aspect ratio of the magnetic metal particles may be 1.2-6.

於一態樣中,磁性層及芯部之飽和磁化可為90 emu/g以上。In one aspect, the saturation magnetization of the magnetic layer and the core may be 90 emu/g or more.

於一態樣中,磁性金屬粒子可包含選自由Fe、Co及Ni所組成之群中之至少1種作為主成分。In one aspect, the magnetic metal particles may include at least one selected from the group consisting of Fe, Co, and Ni as a main component.

於一態樣中,磁性金屬粒子之縱橫比之CV值可為0.4以下。 [發明之效果]In one aspect, the CV value of the aspect ratio of the magnetic metal particles may be 0.4 or less. [Effects of Invention]

根據本發明,提供一種插入損耗特性進一步提高之LC複合零件。According to the present invention, an LC composite component with further improved insertion loss characteristics is provided.

以下,對本發明之較佳之實施形態進行說明。但,本發明不限定於以下之實施形態。Hereinafter, a preferred embodiment of the present invention will be described. However, the present invention is not limited to the following embodiments.

(LC複合零件) 參照圖1及圖2,對本發明之本實施形態之LC複合零件進行說明。圖1係示出本實施形態之LC複合零件1之構成之立體圖。圖2係示出本實施形態之LC複合零件之構成之剖視圖。(LC composite parts) 1 and 2, the LC composite component of the present embodiment of the present invention will be described. Fig. 1 is a perspective view showing the structure of the LC composite component 1 of this embodiment. Fig. 2 is a cross-sectional view showing the structure of the LC composite part of the present embodiment.

LC複合零件1具備:非磁性基板21、具有磁性之磁性層22、電感器11、12、17、電容器13~16、具有磁性之芯部23、24、及介電積層體37。The LC composite component 1 includes a non-magnetic substrate 21, a magnetic layer 22 having magnetism, inductors 11, 12, and 17, capacitors 13 to 16, cores 23 and 24 having magnetism, and a dielectric laminate 37.

如圖1及圖2所示,非磁性基板21係具有第1面21a及與第1面為相反側之第2面21b之平板。非磁性基板21之材料之例為樹脂、陶瓷、玻璃、非磁性鐵氧體。在垂直於非磁性基板21之第1面21a之方向上之厚度可設為20~200 μm。As shown in FIGS. 1 and 2, the non-magnetic substrate 21 is a flat plate having a first surface 21a and a second surface 21b opposite to the first surface. Examples of the material of the non-magnetic substrate 21 are resin, ceramic, glass, and non-magnetic ferrite. The thickness in the direction perpendicular to the first surface 21a of the non-magnetic substrate 21 can be set to 20-200 μm.

磁性層22係具有第1面22a及第2面22b之平板,並且以第2面22b與非磁性基板21之第1面21a對向之方式配置。再者,於本說明書中,磁性係指鐵磁性或亞鐵磁性(ferrimagnetism)。關於磁性層22之材料將於下文敍述。The magnetic layer 22 is a flat plate having a first surface 22 a and a second surface 22 b, and is arranged such that the second surface 22 b faces the first surface 21 a of the non-magnetic substrate 21. Furthermore, in this specification, magnetic refers to ferromagnetism or ferrimagnetism. The material of the magnetic layer 22 will be described below.

介電積層體37配置於非磁性基板21之第1面21a與磁性層22(第2面22b)之間。介電積層體37具有如圖2所示地積層之複數層介電層31~36。各介電層31~36包含介電材料。介電材料之例為樹脂、陶瓷。樹脂之例為聚醯亞胺樹脂、苯并環丁烯樹脂、雙馬來醯亞胺三嗪樹脂(BT樹脂)、環氧樹脂、丙烯酸系樹脂,陶瓷之例為氮化矽、氧化鋁。The dielectric laminate 37 is arranged between the first surface 21a of the non-magnetic substrate 21 and the magnetic layer 22 (second surface 22b). The dielectric laminate 37 has a plurality of dielectric layers 31 to 36 laminated as shown in FIG. 2. Each of the dielectric layers 31-36 includes a dielectric material. Examples of dielectric materials are resins and ceramics. Examples of resins are polyimide resin, benzocyclobutene resin, bismaleimide triazine resin (BT resin), epoxy resin, and acrylic resin. Examples of ceramics are silicon nitride and alumina.

LC複合零件1呈長方體形狀,並且具有上表面1t、底面1b及4個側面1s。於本實施形態中,LC複合零件1之上表面1t由非磁性基板21之第2面21b構成。又,LC複合零件1之底面1b由磁性層22之第1面22a構成。LC複合零件1例如以LC複合零件1之底面1b即磁性層22之第1面22a與安裝基板之上表面對向之方式安裝於安裝基板。The LC composite part 1 has a rectangular parallelepiped shape, and has an upper surface 1t, a bottom surface 1b, and four side surfaces 1s. In this embodiment, the upper surface 1t of the LC composite part 1 is constituted by the second surface 21b of the non-magnetic substrate 21. In addition, the bottom surface 1b of the LC composite component 1 is constituted by the first surface 22a of the magnetic layer 22. The LC composite component 1 is mounted on the mounting substrate, for example, such that the bottom surface 1b of the LC composite component 1, that is, the first surface 22a of the magnetic layer 22, and the upper surface of the mounting substrate face each other.

電感器11、12、17、電容器13~16、及芯部23、24配置於非磁性基板21之第1面21a與磁性層22之第2面22b之間,即介電積層體37內。於本實施形態中,各電容器13~16配置於當從垂直於第1面21a之方向觀察時不與其他電感器11、12、17重疊之位置。電感器及電容器用之導體部之材料之例為Cu、Al、Ag。關於電感器及電容器之細節將於下文敍述。The inductors 11, 12, 17, capacitors 13 to 16, and cores 23, 24 are arranged between the first surface 21 a of the non-magnetic substrate 21 and the second surface 22 b of the magnetic layer 22, that is, in the dielectric laminate 37. In this embodiment, the capacitors 13 to 16 are arranged at positions that do not overlap with the other inductors 11, 12, and 17 when viewed from a direction perpendicular to the first surface 21a. Examples of materials for the conductors of inductors and capacitors are Cu, Al, and Ag. The details of inductors and capacitors will be described below.

芯部23、24分別具有柱形狀,分別配置於電感器11、12之線圈構造之軸。芯部23、24連接於磁性層22。於本說明書中,「芯部23、24連接於磁性層22」係指芯部23、24與磁性層22直接連接(接觸)之態樣、及芯部23、24與磁性層22雖不直接連接(接觸)但例如經由大約0.1~10 μm之厚度之非磁性(介電體等)層磁性連接之態樣。於圖2中,芯部23、24與磁性層22接觸。關於芯部之材料將於下文敍述。於圖2中,於芯部23、24與非磁性基板21之間介存有非磁性(介電體等)層,但芯部23、24與非磁性基板21亦可接觸。The cores 23 and 24 each have a column shape and are respectively arranged on the shafts of the coil structures of the inductors 11 and 12. The cores 23 and 24 are connected to the magnetic layer 22. In this specification, "the cores 23, 24 are connected to the magnetic layer 22" refers to the state where the cores 23, 24 and the magnetic layer 22 are directly connected (contact), and the cores 23, 24 and the magnetic layer 22 are not directly connected. It is connected (contacted) but magnetically connected via a non-magnetic (dielectric, etc.) layer with a thickness of about 0.1-10 μm. In FIG. 2, the cores 23 and 24 are in contact with the magnetic layer 22. The material of the core will be described below. In FIG. 2, a non-magnetic (dielectric body, etc.) layer is interposed between the cores 23 and 24 and the non-magnetic substrate 21, but the cores 23, 24 and the non-magnetic substrate 21 may also be in contact.

如圖2所示,當將垂直於非磁性基板21之第1面21a之方向上之芯部23、24之厚度設為T1,並且將垂直於非磁性基板21之第1面21a之方向上之磁性層22之厚度設為T2時,芯部23、24之厚度T1相對於磁性層22之厚度T2,為1.0倍以上,較佳為2.0倍以上,更佳為3.0倍以上。芯部23、24之厚度T1相對於磁性層22之厚度T2可為10倍以下。 藉此,能夠降低LC複合零件中之未達截止頻率時之插入損耗,又,能夠使超過截止頻率之插入損耗增加。作為其理由,認為係藉由抑制電感器芯之損耗並且將電感器之電感變大,從而降低了電感器中之損耗。As shown in Figure 2, when the thickness of the cores 23, 24 in the direction perpendicular to the first surface 21a of the non-magnetic substrate 21 is set to T1, and the direction perpendicular to the first surface 21a of the non-magnetic substrate 21 When the thickness of the magnetic layer 22 is set to T2, the thickness T1 of the cores 23 and 24 relative to the thickness T2 of the magnetic layer 22 is 1.0 times or more, preferably 2.0 times or more, more preferably 3.0 times or more. The thickness T1 of the cores 23 and 24 may be 10 times or less relative to the thickness T2 of the magnetic layer 22. Thereby, the insertion loss when the cut-off frequency in the LC composite component is not reached can be reduced, and the insertion loss beyond the cut-off frequency can be increased. As the reason, it is considered that the loss in the inductor is reduced by suppressing the loss of the inductor core and increasing the inductance of the inductor.

芯部23及24之厚度並無特別限制,例如,為了使所得之LC複合零件之形狀實用,又容易製造,可為30~200 μm,較佳為100~150 μm。再者,芯部23及24之厚度較佳為設為電感器11及12之線圈構造之軸向長度以上。The thickness of the cores 23 and 24 is not particularly limited. For example, in order to make the shape of the obtained LC composite part practical and easy to manufacture, it can be 30-200 μm, preferably 100-150 μm. Furthermore, the thickness of the cores 23 and 24 is preferably set to be greater than the axial length of the coil structure of the inductors 11 and 12.

藉由LC複合零件1之電感器11、12分別具備芯部23、24,與LC複合零件1之電感器11、12不具備芯部之情形相比,能夠使該電感器之電感變大。Since the inductors 11 and 12 of the LC composite part 1 have cores 23 and 24, respectively, the inductance of the inductor can be increased compared to the case where the inductors 11 and 12 of the LC composite part 1 do not have a core.

(磁性層及芯部之材料) 磁性層22以及芯部23及24包含樹脂及具有磁性之磁性金屬粒子。(Material of magnetic layer and core) The magnetic layer 22 and the cores 23 and 24 include resin and magnetic metal particles having magnetism.

於本實施形態中,磁性金屬粒子之粒徑並無特別限定。磁性金屬粒子之平均長軸徑較佳為120 nm以下。In this embodiment, the particle diameter of the magnetic metal particles is not particularly limited. The average major axis diameter of the magnetic metal particles is preferably 120 nm or less.

藉由滿足此條件,未達截止頻率時之LC複合零件之插入損耗容易被抑制,另一方面,容易提高超過截止頻率時之插入損耗。 作為其理由,認為一種原因在於,例如當磁性金屬粒子之平均長軸徑為120 nm以下時,磁性層22以及芯部23及芯部24中之磁性金屬粒子之填充性提高,獲得高導磁率,藉此能夠使電感器之電感變大,同時能夠抑制電感器芯之渦電流。 於磁性金屬粒子之平均長軸徑超過120 nm之情形時,認為由磁性金屬粒子之多磁區化引起磁壁共振之損耗增加,並且電感器芯之渦電流損耗增加。By satisfying this condition, the insertion loss of LC composite parts when the cut-off frequency is not reached is easily suppressed, and on the other hand, it is easy to increase the insertion loss when the cut-off frequency is exceeded. As the reason, one reason is considered to be that, for example, when the average major axis diameter of the magnetic metal particles is 120 nm or less, the filling properties of the magnetic metal particles in the magnetic layer 22 and the core portion 23 and the core portion 24 are improved, and high magnetic permeability is obtained. Therefore, the inductance of the inductor can be increased while suppressing the eddy current of the inductor core. When the average major axis diameter of the magnetic metal particles exceeds 120 nm, it is believed that the multi-magnetic region of the magnetic metal particles causes the loss of magnetic wall resonance to increase, and the eddy current loss of the inductor core increases.

從同樣之觀點出發,磁性金屬粒子之平均長軸徑更佳為100 nm以下,進而較佳為80 nm以下。於本實施形態中,磁性金屬粒子之平均長軸徑可為30 nm以上。從同樣之觀點出發,磁性金屬粒子之平均長軸徑較佳為40 nm以上。又,磁性金屬粒子4之平均短軸徑例如可為大約5~50 nm,可為7~30 nm。From the same viewpoint, the average major axis diameter of the magnetic metal particles is more preferably 100 nm or less, and still more preferably 80 nm or less. In this embodiment, the average major axis diameter of the magnetic metal particles may be 30 nm or more. From the same viewpoint, the average major axis diameter of the magnetic metal particles is preferably 40 nm or more. In addition, the average minor axis diameter of the magnetic metal particles 4 may be, for example, about 5-50 nm, and may be 7-30 nm.

磁性金屬粒子之平均縱橫比較佳為1.2~6。於本實施形態中,平均縱橫比係磁性金屬粒子之長軸徑相對於短軸徑之比(縱橫比)之平均值。 當平均縱橫比未達1.2時,則形狀各向異性變得過小,自然共振頻率變得相當小,可能會導致因自然共振引起之電感器芯中之損耗變大。又,當縱橫比超過6時,由於形狀各向異性變得過大及因填充性惡化導致之密度降低,故而亦可能導致導磁率變小,難以增大電感器之電感。The average aspect ratio of the magnetic metal particles is preferably 1.2-6. In the present embodiment, the average aspect ratio is the average value of the ratio (aspect ratio) of the major axis diameter to the minor axis diameter of the magnetic metal particles. When the average aspect ratio is less than 1.2, the shape anisotropy becomes too small and the natural resonance frequency becomes quite small, which may cause the loss in the inductor core due to natural resonance to increase. In addition, when the aspect ratio exceeds 6, the shape anisotropy becomes too large and the density decreases due to the deterioration of the filling property, which may also cause the permeability to decrease, making it difficult to increase the inductance of the inductor.

從同樣之觀點出發,磁性金屬粒子之平均縱橫比較佳為1.3以上,4以下,亦較佳為1.5以上,3以下。進而,縱橫比較佳為2以上。From the same viewpoint, the average aspect ratio of the magnetic metal particles is preferably 1.3 or more and 4 or less, and more preferably 1.5 or more and 3 or less. Furthermore, the aspect ratio is preferably 2 or more.

於本實施形態中,磁性金屬粒子之縱橫比之CV值可為0.4以下。CV表示變異係數,可從以下之式中求得。 變異係數(CV)=標準偏差值/平均值In this embodiment, the CV value of the aspect ratio of the magnetic metal particles may be 0.4 or less. CV represents the coefficient of variation and can be obtained from the following formula. Coefficient of Variation (CV) = standard deviation value/average value

由於磁性金屬粒子之縱橫比之CV值為0.4以下,因此能夠抑制反磁場係數之偏差。由於自然共振頻率與反磁場係數之差(短軸-長軸)成比例,因此結果能夠抑制自然共振頻率之偏差,使自然共振峰之線寬變窄。因此,能夠降低因自然共振導致之電感器芯中之損耗,並且增大電感器之電感,能夠降低LC複合零件之未達截止頻率時之插入損耗,並且提高超過截止頻率時之插入損耗。從同樣之觀點出發,磁性金屬粒子之縱橫比之CV值較佳為0.3以下。磁性金屬粒子之縱橫比之CV值可為0.10以上。Since the CV value of the aspect ratio of the magnetic metal particles is 0.4 or less, the deviation of the diamagnetic field coefficient can be suppressed. Since the natural resonance frequency is proportional to the difference (short axis-long axis) of the diamagnetic field coefficient, as a result, the deviation of the natural resonance frequency can be suppressed, and the line width of the natural resonance peak can be narrowed. Therefore, the loss in the inductor core caused by natural resonance can be reduced, and the inductance of the inductor can be increased. The insertion loss of the LC composite part before the cutoff frequency can be reduced, and the insertion loss when the cutoff frequency is exceeded can be increased. From the same viewpoint, the CV value of the aspect ratio of the magnetic metal particles is preferably 0.3 or less. The CV value of the aspect ratio of the magnetic metal particles can be 0.10 or more.

磁性金屬粒子較佳為包含選自由Fe、Co及Ni所組成之群中之至少1種作為主成分,更佳為包含選自由Fe及Co所組成之群中之至少1種作為主成分。於本說明書中,主成分係指佔有50質量%以上之成分。藉由磁性金屬粒子含有選自由具有高飽和磁化之Fe、Co及Ni所組成之群中之至少1種作為主成分,磁性層22以及芯部23及24能夠具有高導磁率。磁性金屬粒子較佳為含有Fe、Fe及Co或Fe及Ni作為主成分,更佳為含有Fe或Fe及Co作為主成分,特佳為含有Fe及Co作為主成分。藉由磁性金屬粒子含有選自由具有高飽和磁化之Fe、Fe及Co或Fe及Ni作為主成分,磁性層22及芯部23及24能夠具有高磁導率。磁性層22以及芯部23及24可含有各不相同之磁性金屬粒子,亦可含有相同之磁性金屬粒子。主成分係指具有最大重量比之成分。藉由此種組成,亦能夠實現自然共振頻率之高頻化。The magnetic metal particles preferably include at least one selected from the group consisting of Fe, Co, and Ni as a main component, and more preferably include at least one selected from the group consisting of Fe and Co as a main component. In this specification, the main ingredient refers to an ingredient that occupies more than 50% by mass. Since the magnetic metal particles contain at least one selected from the group consisting of Fe, Co, and Ni having high saturation magnetization as a main component, the magnetic layer 22 and the cores 23 and 24 can have high magnetic permeability. The magnetic metal particles preferably contain Fe, Fe and Co or Fe and Ni as main components, more preferably contain Fe or Fe and Co as main components, and particularly preferably contain Fe and Co as main components. Since the magnetic metal particles contain Fe, Fe and Co or Fe and Ni which have high saturation magnetization as main components, the magnetic layer 22 and the cores 23 and 24 can have high magnetic permeability. The magnetic layer 22 and the cores 23 and 24 may contain different magnetic metal particles or the same magnetic metal particles. The main component refers to the component with the largest weight ratio. With this composition, the natural resonance frequency can also be increased.

磁性金屬粒子可具備金屬中心部及被覆金屬中心部之氧化金屬膜。金屬中心部具有導電性,但氧化金屬膜具有絕緣性。藉由磁性金屬粒子具有氧化金屬膜,能夠獲得磁性金屬粒子間之絕緣性,並且能夠降低伴隨著粒子間之渦電流產生之磁損耗。The magnetic metal particles may have a metal center and a metal oxide film covering the metal center. The metal center has conductivity, but the oxide metal film has insulation. Since the magnetic metal particles have a metal oxide film, the insulation between the magnetic metal particles can be obtained, and the magnetic loss caused by the eddy current between the particles can be reduced.

於磁性金屬粒子中,金屬中心部含有磁性金屬粒子中所包含之上述之元素作為金屬(0價)。由於金屬中心部被氧化金屬膜被覆,因此即便於大氣中亦可不氧化而存在。金屬中心部較佳為Fe、Fe-Ni合金或Fe-Co合金,更佳為Fe或Fe-Co合金,進而較佳為Fe-Co合金。於金屬中心部為Fe、Fe-Ni合金或Fe-Co合金之情形時,由於磁性金屬粒子之飽和磁化提高,從而成為高磁導率。於磁性金屬粒子中,氧化金屬膜含有磁性金屬粒子中所包含之元素作為氧化物。In the magnetic metal particles, the metal center part contains the above-mentioned elements contained in the magnetic metal particles as a metal (zero valence). Since the center of the metal is covered with an oxide metal film, it can exist without being oxidized even in the atmosphere. The metal center is preferably Fe, Fe-Ni alloy or Fe-Co alloy, more preferably Fe or Fe-Co alloy, and even more preferably Fe-Co alloy. When the metal center is Fe, Fe-Ni alloy, or Fe-Co alloy, the saturation magnetization of the magnetic metal particles increases, resulting in high magnetic permeability. In the magnetic metal particles, the metal oxide film contains the elements contained in the magnetic metal particles as oxides.

於本實施形態中,磁性層22以及芯部23及24中之磁性金屬粒子之體積比率分別例如可為30~60體積%,較佳為40~50體積%。當磁性金屬粒子之體積比率為30體積%以上時,於磁性層22以及芯部23及24中容易獲得期望之磁特性。當磁性金屬粒子之比例為60體積%以下時,加工時之處理變得容易。再者,於本說明書中,磁性層22以及芯部23及24中之體積比率係在除了空隙之外之磁性層22以及芯部23及24中所占之比率。In this embodiment, the volume ratio of the magnetic metal particles in the magnetic layer 22 and the cores 23 and 24 can be, for example, 30-60% by volume, and preferably 40-50% by volume. When the volume ratio of the magnetic metal particles is 30% by volume or more, it is easy to obtain desired magnetic properties in the magnetic layer 22 and the cores 23 and 24. When the proportion of the magnetic metal particles is less than 60% by volume, handling during processing becomes easy. Furthermore, in this specification, the volume ratio of the magnetic layer 22 and the cores 23 and 24 is the ratio of the magnetic layer 22 and the cores 23 and 24 excluding the voids.

樹脂係具有電絕緣性之樹脂(絕緣性樹脂),並且係於磁性層22以及芯部23及24中存在於磁性金屬粒子間並將其等結合,能夠進一步使磁性金屬粒子間之絕緣性提高之材料。作為絕緣性樹脂,例如可列舉矽酮樹脂、酚樹脂、丙烯酸系樹脂、環氧樹脂及其等之固化物等。其等可單獨地使用1種,亦可組合2種以上使用。又,根據需要,亦可使用偶合劑、分散劑等表面處理劑、熱穩定劑、可塑劑等添加劑等。The resin is an electrically insulating resin (insulating resin), and it is present between the magnetic metal particles in the magnetic layer 22 and the cores 23 and 24 and combined with them, which can further improve the insulation between the magnetic metal particles的材料。 The material. Examples of insulating resins include silicone resins, phenol resins, acrylic resins, epoxy resins, and cured products thereof. These may be used individually by 1 type, and may be used in combination of 2 or more types. Furthermore, if necessary, additives such as surface treatment agents such as coupling agents and dispersants, heat stabilizers, and plasticizers, etc. may be used.

於本實施形態中,磁性層22以及芯部23及24中之樹脂之體積比率分別可為例如40~70體積%,較佳為50~60體積%。當樹脂之體積比率為40體積%以上時,變得容易獲得磁性金屬粒子間之絕緣性及結合力。當樹脂之體積比率為70體積%以下時,使基於磁性金屬粒子之特性於磁性層22以及芯部23及24中亦變得容易發揮。In this embodiment, the volume ratio of the resin in the magnetic layer 22 and the cores 23 and 24 may be, for example, 40 to 70% by volume, and preferably 50 to 60% by volume. When the volume ratio of the resin is more than 40% by volume, it becomes easy to obtain insulation and bonding force between the magnetic metal particles. When the volume ratio of the resin is 70% by volume or less, the characteristics based on the magnetic metal particles can be easily utilized in the magnetic layer 22 and the cores 23 and 24.

磁性層22以及芯部23及24之飽和磁化並無特別限定,例如可為90 emu/g以上。藉由飽和磁化為90 emu/g以上,能夠使磁性層22以及芯部23及24之導磁率提高。又,能夠實現自然共振頻率之高頻化。從同樣之觀點出發,飽和磁化較佳為100 emu/g以上,更佳為110 emu/g以上。飽和磁化可為200 emu/g以下。The saturation magnetization of the magnetic layer 22 and the cores 23 and 24 is not particularly limited, and may be 90 emu/g or more, for example. When the saturation magnetization is 90 emu/g or more, the permeability of the magnetic layer 22 and the cores 23 and 24 can be improved. In addition, it is possible to increase the frequency of the natural resonance frequency. From the same viewpoint, the saturation magnetization is preferably 100 emu/g or more, and more preferably 110 emu/g or more. The saturation magnetization can be less than 200 emu/g.

參照圖3A~3C及圖4A~4C,對介電積層體37、電容器13~16及電感器11、12、17之詳細構成進行說明。於本實施形態中,LC複合零件1之介電積層體37具備6個介電層31、32、33、34、35及36。介電層31~36配置於非磁性基板21與磁性層22之間,從非磁性基板21之第1面21a側起依序配置。介電層31~36分別具有朝向與非磁性基板21之第1面21a相同之方向之第1面及朝向與非磁性基板21之第2面21b相同之方向之第2面。再者,於圖3A~3C及圖4A~4C中,省略芯部23及24。3A to 3C and FIGS. 4A to 4C, the detailed configuration of the dielectric laminate 37, the capacitors 13 to 16, and the inductors 11, 12, and 17 will be described. In this embodiment, the dielectric laminate 37 of the LC composite component 1 includes six dielectric layers 31, 32, 33, 34, 35, and 36. The dielectric layers 31 to 36 are arranged between the non-magnetic substrate 21 and the magnetic layer 22, and are arranged in order from the first surface 21 a side of the non-magnetic substrate 21. The dielectric layers 31 to 36 respectively have a first surface facing the same direction as the first surface 21a of the nonmagnetic substrate 21 and a second surface facing the same direction as the second surface 21b of the nonmagnetic substrate 21. In addition, in FIGS. 3A to 3C and FIGS. 4A to 4C, the core portions 23 and 24 are omitted.

圖3A示出了介電層31之第1面。於介電層31之第1面,形成有電感器11用之導體部311及電感器12用之導體部312、電容器13、14用之導體部313、電容器15用之導體部315及電容器16用之導體部316、以及端子用導體部31T1、31T2、31T3及31T4。再者,圖3A表示從介電層31之第2面側觀察上述複數個導體部所得之狀態。上述複數個導體部之圖3A中之配置如下。電感器11用之導體部311配置於左右方向之較中心更左側之區域。電感器12用之導體部312配置於左右方向之較中心更右側之區域。電容器16用之導體部316配置於電感器11用之導體部311與電感器12用之導體部312之間。電容器13、14用之導體部313配置於電感器11用之導體部311及電感器12用之導體部312、以及電容器16用之導體部316之下側之位置。電容器15用之導體部315配置於電容器13、14用之導體部313之下側之位置。端子用導體部31T1配置於左下之角部之附近。端子用導體部31T2配置於右下之角部之附近。端子用導體部31T3配置於左上之角部之附近。端子用導體部31T4配置於右上之角部之附近。FIG. 3A shows the first side of the dielectric layer 31. On the first surface of the dielectric layer 31, a conductor portion 311 for the inductor 11 and a conductor portion 312 for the inductor 12, a conductor portion 313 for the capacitors 13, 14 and a conductor portion 315 for the capacitor 15 and a capacitor 16 are formed The conductor part 316 for use, and the conductor parts 31T1, 31T2, 31T3, and 31T4 for terminals. In addition, FIG. 3A shows a state of the plurality of conductor portions as seen from the second surface side of the dielectric layer 31. The arrangement of the above-mentioned plural conductor parts in Fig. 3A is as follows. The conductor portion 311 for the inductor 11 is arranged in an area on the left side of the center in the left-right direction. The conductor portion 312 for the inductor 12 is arranged in an area on the right side of the center in the left-right direction. The conductor part 316 for the capacitor 16 is arranged between the conductor part 311 for the inductor 11 and the conductor part 312 for the inductor 12. The conductor portions 313 for the capacitors 13 and 14 are arranged below the conductor portion 311 for the inductor 11, the conductor portion 312 for the inductor 12, and the conductor portion 316 for the capacitor 16. The conductor portion 315 for the capacitor 15 is arranged at a position below the conductor portion 313 for the capacitors 13 and 14. The terminal conductor portion 31T1 is arranged near the lower left corner. The terminal conductor part 31T2 is arranged near the lower right corner part. The terminal conductor portion 31T3 is arranged near the upper left corner. The terminal conductor portion 31T4 is arranged near the upper right corner.

電容器13、14用之導體部313連接於電感器11用之導體部311及電感器12用之導體部312、以及電容器16用之導體部316之各一端。於圖3A中,將2個導體部之邊界由虛線表示。於以下之說明中使用之與圖3A同樣之圖中,亦由與圖3A同樣之表示方法來表示。電感器11之用導體部311及電感器12用之導體部312均為從其一端朝向另一端環狀地延伸之線狀之導體部。The conductor portion 313 for the capacitors 13 and 14 is connected to each end of the conductor portion 311 for the inductor 11, the conductor portion 312 for the inductor 12, and the conductor portion 316 for the capacitor 16. In FIG. 3A, the boundary between the two conductor parts is indicated by a broken line. The same figure as FIG. 3A used in the following description is also represented by the same representation method as FIG. 3A. The conductor portion 311 for the inductor 11 and the conductor portion 312 for the inductor 12 are both linear conductor portions extending annularly from one end to the other end.

圖3B示出了介電層32之第1面。於介電層32之第1面,形成電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B及電容器16用之導體部326。再者,圖3B示出了從介電層32之第2面側觀察上述複數個導體部所得之狀態。上述複數個導體部之圖3B中之配置如下。即,電容器16用之導體部326配置於左右方向之大致中央之位置。電容器13用之導體部323及電容器14用之導體部324於電容器16用之導體部326之下側之位置處,從左側起依序配置。電容器15用之導體部325A、325B於電容器13用之導體部323及電容器14用之導體部324之下側之位置處,從左側起依序配置。FIG. 3B shows the first side of the dielectric layer 32. On the first surface of the dielectric layer 32, the conductor portion 323 for the capacitor 13, the conductor portion 324 for the capacitor 14, the conductor portions 325A and 325B for the capacitor 15, and the conductor portion 326 for the capacitor 16 are formed. In addition, FIG. 3B shows a state of the plurality of conductor portions as viewed from the second surface side of the dielectric layer 32. The arrangement of the above-mentioned plural conductor parts in Fig. 3B is as follows. That is, the conductor 326 for the capacitor 16 is arranged at a substantially center position in the left-right direction. The conductor portion 323 for the capacitor 13 and the conductor portion 324 for the capacitor 14 are arranged in order from the left side at a position below the conductor portion 326 for the capacitor 16. The conductor portions 325A and 325B for the capacitor 15 are arranged at positions below the conductor portion 323 for the capacitor 13 and the conductor portion 324 for the capacitor 14 in order from the left.

電容器13用之導體部323及電容器14用之導體部324介隔介電層32與圖3A所示之電容器13、14用之導體部313對向。圖5中之電容器13由電容器13、14用之導體部313及電容器13用之導體部323、與位於其等之間之介電層32之一部分構成。圖5中之電容器14由電容器13、14用之導體部313及電容器14用之導體部324、與位於其等之間之介電層32之一部分構成。又,電容器15用之導體部325A及325B介隔介電層32與圖3A所示之電容器15用之導體部315對向。圖5中之電容器15由電容器15用之導體部315、325A及325B以及位於其等之間之介電層32之一部分構成。又,電容器16用之導體部326介隔介電層32與圖3A所示之電容器16用之導體部316對向。圖5中之電容器16由電容器16用之導體部316及326、與位於其等之間之介電層32之一部分構成。The conductor portion 323 for the capacitor 13 and the conductor portion 324 for the capacitor 14 are opposed to the conductor portion 313 for the capacitors 13 and 14 shown in FIG. 3A through the dielectric layer 32. The capacitor 13 in FIG. 5 is composed of a conductor portion 313 for the capacitors 13, 14 and a conductor portion 323 for the capacitor 13, and a part of the dielectric layer 32 between them. The capacitor 14 in FIG. 5 is composed of a conductor portion 313 for the capacitors 13, 14 and a conductor portion 324 for the capacitor 14, and a part of the dielectric layer 32 between them. In addition, the conductor portions 325A and 325B for the capacitor 15 are opposed to the dielectric layer 32 of the capacitor 15 shown in FIG. 3A. The capacitor 15 in FIG. 5 is composed of the conductor portions 315, 325A, and 325B for the capacitor 15 and a part of the dielectric layer 32 between them. In addition, the conductor portion 326 for the capacitor 16 intersects the dielectric layer 32 and faces the conductor portion 316 for the capacitor 16 shown in FIG. 3A. The capacitor 16 in FIG. 5 is composed of the conductor portions 316 and 326 for the capacitor 16, and a part of the dielectric layer 32 between them.

LC複合零件1包含貫通介電層32及33之導體部33V1、33V2、33V3、33V4、33V5及33V6。於圖3B中,對導體部33V1~33V6標附陰影。於圖3A中示出之端子用導體部31T1~31T4以及電感器11用之導體部311及電感器12用之導體部312,分別連接有導體部33V1~33V6之一端。The LC composite component 1 includes conductor portions 33V1, 33V2, 33V3, 33V4, 33V5, and 33V6 penetrating through the dielectric layers 32 and 33. In Fig. 3B, the conductor portions 33V1 to 33V6 are hatched. The conductor portions 31T1 to 31T4 for the terminals, the conductor portion 311 for the inductor 11, and the conductor portion 312 for the inductor 12 shown in FIG. 3A are respectively connected to one end of the conductor portions 33V1 to 33V6.

圖3C示出了介電層33之第1面。於介電層33之第1面,形成有電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337、連接用導體部333、334、335A、335B及336、以及端子用導體部33T1、33T2、33T3及33T4。圖3C示出了從介電層33之第2面側觀察上述複數個導體部所得之狀態。圖3C中之上述複數個導體部之配置如下。電感器11用之導體部331配置於左右方向之較中心更左側之區域。連接用導體部336配置於電感器11用之導體部331及電感器12用之導體部332之間。連接用導體部333及334於電感器11用之導體部331及電感器12用之導體部332、以及連接用導體部336之下側之位置處,從左側起依序配置。連接用導體部335A、335B於連接用導體部333及334之下側之位置處,從左側起依序配置。電感器17用之導體部337配置於電感器11用之導體部331及電感器12用之導體部332、以及連接用導體部336之上側之位置。端子用導體部33T1配置於左下之角部之附近。端子用導體部33T2配置於右下之角部之附近。端子用導體部33T3配置於左上之可動部之附近。端子用導體部33T4配置於右上之角部之附近。FIG. 3C shows the first side of the dielectric layer 33. On the first surface of the dielectric layer 33, a conductor portion 331 for the inductor 11, a conductor portion 332 for the inductor 12, a conductor portion 337 for the inductor 17, and conductor portions 333, 334, 335A, and 335B for connection are formed And 336, and terminal conductor portions 33T1, 33T2, 33T3, and 33T4. FIG. 3C shows a state of the plurality of conductor portions as viewed from the second surface side of the dielectric layer 33. FIG. The arrangement of the plurality of conductor parts in Fig. 3C is as follows. The conductor portion 331 for the inductor 11 is arranged in an area on the left side of the center in the left-right direction. The connecting conductor portion 336 is arranged between the conductor portion 331 for the inductor 11 and the conductor portion 332 for the inductor 12. The connection conductor portions 333 and 334 are arranged in order from the left side at positions below the conductor portion 331 for the inductor 11, the conductor portion 332 for the inductor 12, and the connection conductor portion 336. The connection conductor portions 335A and 335B are arranged in order from the left side at positions below the connection conductor portions 333 and 334. The conductor part 337 for the inductor 17 is arranged at a position above the conductor part 331 for the inductor 11, the conductor part 332 for the inductor 12, and the conductor part 336 for connection. The terminal conductor 33T1 is arranged near the lower left corner. The terminal conductor 33T2 is arranged near the lower right corner. The terminal conductor portion 33T3 is arranged near the movable portion on the upper left. The terminal conductor 33T4 is arranged near the upper right corner.

端子用導體部33T1連接於連接用導體部333及335A之各一端。端子用導體部33T2連接於連接用導體部334及335B之各一端。電感器17用之導體部337連接於連接用導體部336之一端。電感器11用之導體部331及電感器12用之導體部332均係從一端朝向多端環狀地延伸之線狀之導體部。The terminal conductor portion 33T1 is connected to each end of the connection conductor portions 333 and 335A. The terminal conductor part 33T2 is connected to each end of the connection conductor parts 334 and 335B. The conductor portion 337 for the inductor 17 is connected to one end of the connecting conductor portion 336. The conductor portion 331 for the inductor 11 and the conductor portion 332 for the inductor 12 are both linear conductor portions extending annularly from one end to multiple ends.

電感器11用之導體部331及電感器12用之導體部332、以及端子用導體部33T1~33T4分別當從垂直於非磁性基板21之第1面21a之方向(與垂直於介電層33之第1面之方向相同)觀察時,配置於與圖3A中示出之電感器11用之導體部311及電感器12用之導體部312以及端子用導體部31T1~31T4重合之位置。連接用導體部333、334、335A、335B及336分別係當從垂直於非磁性基板21之第1面21a之方向觀察時,配置於與圖3B中示出之電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B及電容器16用之導體部326重合之位置。The conductor portion 331 for the inductor 11, the conductor portion 332 for the inductor 12, and the conductor portions 33T1 to 33T4 for the terminals shall be viewed from the direction perpendicular to the first surface 21a of the non-magnetic substrate 21 (and perpendicular to the dielectric layer 33). When viewed in the same direction on the first surface, it is arranged at a position overlapping with the conductor portion 311 for the inductor 11, the conductor portion 312 for the inductor 12, and the conductor portions 31T1 to 31T4 for terminals shown in FIG. 3A. The connecting conductor portions 333, 334, 335A, 335B, and 336 are respectively arranged in the same as the conductor portions 323, 323 and 336 for the capacitor 13 shown in FIG. 3B when viewed from a direction perpendicular to the first surface 21a of the non-magnetic substrate 21. The position where the conductor part 324 for the capacitor 14, the conductor parts 325A and 325B for the capacitor 15 and the conductor part 326 for the capacitor 16 overlap.

LC複合零件1包含貫通介電層33之導體部33V7、33V8、33V9、33V10及33V11。於圖3C中,導體部33V1~33V11由兩點鏈線表示。於端子用導體部33T1~33T4、以及電感器11用之導體部331及電感器11用之導體部332,分別連接有導體部33V1~33V6之另一端。於圖3B中示出之電容器13用之導體部323、電容器14用之導體部324、電容器15用之導體部325A、325B及電容器16用之導體部326,分別連接有導體部33V7~33V11之一端。於連接用導體部333、334、335A、335B及336,分別連接有導體部33V7~33V11之另一端。The LC composite component 1 includes conductor portions 33V7, 33V8, 33V9, 33V10, and 33V11 penetrating through the dielectric layer 33. In FIG. 3C, the conductor portions 33V1 to 33V11 are represented by two-dot chain lines. The other ends of the conductor portions 33V1 to 33V6 are connected to the conductor portions 33T1 to 33T4 for terminals, the conductor portion 331 for the inductor 11, and the conductor portion 332 for the inductor 11, respectively. The conductor portion 323 for the capacitor 13, the conductor portion 324 for the capacitor 14, the conductor portions 325A and 325B for the capacitor 15 and the conductor portion 326 for the capacitor 16 shown in FIG. 3B are respectively connected to the conductor portions 33V7 to 33V11 One end. The other ends of the conductor portions 33V7 to 33V11 are connected to the connection conductor portions 333, 334, 335A, 335B, and 336, respectively.

圖4A示出了介電層34之第1面。於介電層34之第1面,形成有電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347、以及端子用導體部34T1、34T2、34T3及34T4。圖4A示出了從介電層34之第2面側觀察上述複數個導體部所得之狀態。圖4A中之上述複數個導體部之配置如下。電感器11用之導體部341配置於左右方向之較中心更左側之區域。電感器12用之導體部342配置於左右方向之較中心更右側之區域。電感器17用之導體部347配置於電感器11用之導體部341及電感器12用之導體部342之上側之位置。端子用導體部34T1配置於左下之角部之附近。端子用導體部34T2配置於右下之角部之附近。端子用導體部34T3配置於左上之角部之附近。端子用導體部34T4配置於右上之角部之附近。FIG. 4A shows the first side of the dielectric layer 34. On the first surface of the dielectric layer 34, there are formed a conductor portion 341 for the inductor 11, a conductor portion 342 for the inductor 12, a conductor portion 347 for the inductor 17, and conductor portions 34T1, 34T2, 34T3 and 34T4. FIG. 4A shows the state of the plurality of conductor portions as viewed from the second surface side of the dielectric layer 34. FIG. The arrangement of the plurality of conductor parts in FIG. 4A is as follows. The conductor portion 341 for the inductor 11 is arranged in an area on the left side of the center in the left-right direction. The conductor portion 342 for the inductor 12 is arranged in an area on the right side of the center in the left-right direction. The conductor portion 347 for the inductor 17 is arranged at a position above the conductor portion 341 for the inductor 11 and the conductor portion 342 for the inductor 12. The terminal conductor portion 34T1 is arranged near the lower left corner. The terminal conductor 34T2 is arranged near the lower right corner. The terminal conductor part 34T3 is arranged near the upper left corner part. The terminal conductor part 34T4 is arranged near the upper right corner part.

電感器11用之導體部341及電感器12用之導體部342均係從其一端朝向另一端環狀地延伸之線狀之導體部。電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347、以及端子用導體部34T1~34T4分別從垂直於非磁性基板21之第1面21a之方向(與垂直於介電層34之第1面之方向相同)觀察時,配置於與圖3C所示之電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337、以及端子用導體部33T1~33T4重合之位置。The conductor portion 341 for the inductor 11 and the conductor portion 342 for the inductor 12 are both linear conductor portions extending annularly from one end to the other end. The conductor portion 341 for the inductor 11, the conductor portion 342 for the inductor 12, the conductor portion 347 for the inductor 17, and the terminal conductor portions 34T1 to 34T4 are respectively from a direction perpendicular to the first surface 21a of the non-magnetic substrate 21 (The same as the direction perpendicular to the first surface of the dielectric layer 34) When viewed, it is arranged in the conductor portion 331 for the inductor 11, the conductor portion 332 for the inductor 12, and the inductor 17 shown in FIG. 3C The position where the conductor part 337 and the terminal conductor parts 33T1 to 33T4 overlap.

LC複合零件1包含貫通介電層34之導體部34V1、34V2、34V3、34V4、34V5、34V6及34V7。於圖4A中,導體部34V1~34V7由兩點鏈線表示。於圖3C所示之端子用導體部33T1~33T4、以及電感器11用之導體部331、電感器12用之導體部332及電感器17用之導體部337,分別連接有導體部34V1~34V7之一端。於端子用導體部34T1~34T4、以及電感器11用之導體部341、電感器12用之導體部342及電感器17用之導體部347,分別連接有導體部34V1~34V7之另一端。The LC composite component 1 includes conductor portions 34V1, 34V2, 34V3, 34V4, 34V5, 34V6, and 34V7 penetrating through the dielectric layer 34. In FIG. 4A, the conductor portions 34V1 to 34V7 are represented by two-dot chain lines. In the terminal conductor portions 33T1 to 33T4 shown in FIG. 3C, the conductor portion 331 for the inductor 11, the conductor portion 332 for the inductor 12, and the conductor portion 337 for the inductor 17 are respectively connected to the conductor portions 34V1 to 34V7 One end. The other ends of the conductor portions 34V1 to 34V7 are connected to the terminal conductor portions 34T1 to 34T4, the conductor portion 341 for the inductor 11, the conductor portion 342 for the inductor 12, and the conductor portion 347 for the inductor 17, respectively.

圖4B示出了介電層35之第1面。於介電層35之第1面,形成有電感器11用之導體部351、電感器12用之導體部352、電感器17用之導體部357A及357B、以及端子用導體部35T1、35T2、35T3及35T4。再者,圖4B示出了從介電層35之第2面側觀察上述複數個導體部所得之狀態。上述複數個導體部之圖4B中之配置如下。電感器11用之導體部351配置於左右方向之較中心更左側之區域。電感器12用之導體部352配置於左右方向之較中心更右側之區域。電感器17用之導體部357A及357B於電感器11用之導體部351及電感器12用之導體部352之上側之位置處,從左側起依序配置。端子用導體35T1配置於左下之角部之附近。端子用導體35T2配置於右下之角部之附近。端子用導體35T3配置於左上之角部之附近。端子用導體35T4配置於右上之角部之附近。FIG. 4B shows the first side of the dielectric layer 35. On the first surface of the dielectric layer 35, a conductor portion 351 for the inductor 11, a conductor portion 352 for the inductor 12, conductor portions 357A and 357B for the inductor 17, and conductor portions 35T1, 35T2 for terminals are formed 35T3 and 35T4. Furthermore, FIG. 4B shows a state of the plurality of conductor portions as seen from the second surface side of the dielectric layer 35. The arrangement of the above-mentioned plural conductor parts in Fig. 4B is as follows. The conductor portion 351 for the inductor 11 is arranged in an area on the left side of the center in the left-right direction. The conductor portion 352 for the inductor 12 is arranged in an area on the right side of the center in the left-right direction. The conductor portions 357A and 357B for the inductor 17 are arranged at positions above the conductor portion 351 for the inductor 11 and the conductor portion 352 for the inductor 12 in order from the left side. The terminal conductor 35T1 is arranged near the lower left corner. The terminal conductor 35T2 is arranged near the lower right corner. The terminal conductor 35T3 is arranged near the upper left corner. The terminal conductor 35T4 is arranged near the upper right corner.

端子用導體部35T1~35T4分別連接於電感器11用之導體部351、電感器12用之導體部352及電感器17用之導體部357A及357B之一端。電感器11用之導體部351及電感器12用之導體部352均係從其一端朝向另一端環狀地延伸之線狀之導體部。The terminal conductor portions 35T1 to 35T4 are respectively connected to one ends of the conductor portion 351 for the inductor 11, the conductor portion 352 for the inductor 12, and the conductor portions 357A and 357B for the inductor 17. The conductor portion 351 for the inductor 11 and the conductor portion 352 for the inductor 12 are both linear conductor portions extending annularly from one end to the other end.

電感器11用之導體部351及電感器12用之導體部352、以及端子用導體部35T1~35T4分別當從垂直於非磁性基板21之第1面21a之方向(與垂直於介電層35之第1面之方向相同)觀察時,配置於與圖4A中示出之電感器11用之導體部341及電感器12用之導體部342、以及端子用導體部34T1~34T4重合之位置。電感器17用之導體部357A及357B從垂直於非磁性基板21之第1面21a之方向觀察時,配置於與圖4A中示出之電感器17用之導體部347重合之位置。The conductor portion 351 for the inductor 11, the conductor portion 352 for the inductor 12, and the conductor portions 35T1 to 35T4 for the terminals shall be viewed from the direction perpendicular to the first surface 21a of the non-magnetic substrate 21 (and perpendicular to the dielectric layer 35). When viewed in the same direction on the first surface, it is arranged at a position overlapping the conductor part 341 for the inductor 11, the conductor part 342 for the inductor 12, and the terminal conductor parts 34T1 to 34T4 shown in FIG. 4A. When viewed from a direction perpendicular to the first surface 21a of the non-magnetic substrate 21, the conductor portions 357A and 357B for the inductor 17 are arranged at positions overlapping the conductor portion 347 for the inductor 17 shown in FIG. 4A.

LC複合零件1包含貫通介電層35之導體部35V1、35V2、35V3、35V4、35V5、35V6、35V7及35V8。於圖4B中,導體部35V1~35V8由兩點鏈線表示。於圖4A中示出之端子用導體部34T1~34T4、以及電感器11用之導體部341及電感器12用之導體部342,分別連接有導體部35V1~35V6之一端。於圖4A中示出之電感器17用之導體部347,連接有導體部35V7及35V8之各一端。於端子用導體部35T1~35T4、以及電感器用導體部351、352、357A及357B,分別連接有導體部35V1~35V8之另一端。The LC composite component 1 includes conductor portions 35V1, 35V2, 35V3, 35V4, 35V5, 35V6, 35V7, and 35V8 penetrating through the dielectric layer 35. In FIG. 4B, the conductor portions 35V1 to 35V8 are represented by two-dot chain lines. The conductor portions 34T1 to 34T4 for the terminals, the conductor portion 341 for the inductor 11 and the conductor portion 342 for the inductor 12 shown in FIG. 4A are connected to one end of the conductor portions 35V1 to 35V6, respectively. The conductor portion 347 for the inductor 17 shown in FIG. 4A is connected to each end of the conductor portions 35V7 and 35V8. The other ends of the conductor portions 35V1 to 35V8 are connected to the conductor portions 35T1 to 35T4 for terminals and the conductor portions 351, 352, 357A, and 357B for inductors, respectively.

圖4C示出了貫通磁性層22及介電層36、以及磁性層22及介電層36之端子用導體部41、42、43及44。LC複合零件1包含貫通磁性層22及介電層36之端子用導體部41、42、43及44。於圖4C中,對端子用導體部41~44標附陰影。於圖4B中示出之端子用導體部35T1~35T4,分別連接有端子用導體部41~44之一端。4C shows the conductor portions 41, 42, 43, and 44 for terminals penetrating through the magnetic layer 22 and the dielectric layer 36, and the magnetic layer 22 and the dielectric layer 36. The LC composite component 1 includes conductor portions 41, 42, 43, and 44 for terminals penetrating through the magnetic layer 22 and the dielectric layer 36. In FIG. 4C, the terminal conductor parts 41 to 44 are hatched. Terminal conductor parts 35T1 to 35T4 shown in FIG. 4B are connected to one end of terminal conductor parts 41 to 44, respectively.

其次,參照圖5之電路圖,對本實施形態之LC複合零件1之電路構成進行說明。於本實施形態中,LC複合零件1具有低通濾波器之功能。如圖5所示,LC複合零件1具備供輸入信號之輸入端子2、輸出信號之輸出端子3、3個電感器11、12及17、以及4個電容器13、14、15及16。Next, referring to the circuit diagram of FIG. 5, the circuit configuration of the LC composite component 1 of this embodiment will be described. In this embodiment, the LC composite component 1 has the function of a low-pass filter. As shown in FIG. 5, the LC composite component 1 includes an input terminal 2 for input signals, an output terminal 3 for output signals, three inductors 11, 12, and 17, and four capacitors 13, 14, 15, and 16.

電感器11之一端、電容器13之一端及電容器15之一端電性連接於輸入端子2。電感器12之一端、電容器14之一端及電容器16之一端電性連接於電感器11之另一端及電容器13之另一端。電感器12之另一端、電容器14之另一端及電容器15之另一端電性連接於輸出端子3。電感器17之一端電性連接於電容器16之另一端。電感器17之另一端接地。One end of the inductor 11, one end of the capacitor 13 and one end of the capacitor 15 are electrically connected to the input terminal 2. One end of the inductor 12, one end of the capacitor 14 and one end of the capacitor 16 are electrically connected to the other end of the inductor 11 and the other end of the capacitor 13. The other end of the inductor 12, the other end of the capacitor 14 and the other end of the capacitor 15 are electrically connected to the output terminal 3. One end of the inductor 17 is electrically connected to the other end of the capacitor 16. The other end of the inductor 17 is grounded.

以下,對圖1、圖2、圖3A~3C及圖4A~4C中所示之LC複合零件1之具體構成與圖5中所示之電路構成之關係進行進一步說明。圖5中之輸入端子2由圖4C中之端子用導體部41之另一端構成。圖5中之輸出端子3由圖4C中之端子用導體42之另一端構成。圖4C中之端子用導體部43及44之各另一端構成圖5中接地之接地端子。Hereinafter, the relationship between the specific configuration of the LC composite part 1 shown in FIGS. 1, 2 and 3A to 3C and FIGS. 4A to 4C and the circuit configuration shown in FIG. 5 will be further described. The input terminal 2 in FIG. 5 is constituted by the other end of the terminal conductor 41 in FIG. 4C. The output terminal 3 in FIG. 5 is constituted by the other end of the terminal conductor 42 in FIG. 4C. The other ends of the conductor portions 43 and 44 for terminals in FIG. 4C constitute the grounding terminal in FIG. 5.

圖5中之電感器11由圖3A~3C及圖4A~4C中之電感器11用之導體部311、331、341及351、以及導體部33V5、34V5及35V5構成,且具有線圈構造。如圖2所示,芯部23貫通介電層32~36,並且位於電感器11用之導體部311、331、341及351、以及導體部33V5、34V5及35V5形成之線圈構造之內周部之內側。電感器11用之導體部311、331、341及351均係沿芯部23之外周延伸之線狀之導體部。The inductor 11 in FIG. 5 is composed of conductor parts 311, 331, 341, and 351, and conductor parts 33V5, 34V5, and 35V5 for the inductor 11 in FIGS. 3A to 3C and FIGS. 4A to 4C, and has a coil structure. As shown in FIG. 2, the core 23 penetrates through the dielectric layers 32 to 36 and is located at the inner periphery of the coil structure formed by the conductor portions 311, 331, 341, and 351 for the inductor 11 and the conductor portions 33V5, 34V5, and 35V5的内。 The inside. The conductor parts 311, 331, 341 and 351 for the inductor 11 are all linear conductor parts extending along the outer circumference of the core part 23.

圖5中之電感器12由圖3A~3C及圖4A~4C中之電感器12用之導體部312、332、342及352、以及導體部33V6、34V6及35V6構成,並且具有線圈構造。如圖2所示,芯部24貫通介電層32~36,並且位於電感器12用之導體部312、332、342及352、以及導體部33V6、34V6及35V6形成之線圈構造之內周部之內側。電感器12用之導體部312、332、342及352均係沿芯部24之外周延伸之線狀之導體部。The inductor 12 in FIG. 5 is composed of conductor parts 312, 332, 342, and 352, and conductor parts 33V6, 34V6, and 35V6 for the inductor 12 in FIGS. 3A to 3C and FIGS. 4A to 4C, and has a coil structure. As shown in FIG. 2, the core 24 penetrates through the dielectric layers 32 to 36 and is located at the inner periphery of the coil structure formed by the conductor parts 312, 332, 342, and 352 for the inductor 12, and the conductor parts 33V6, 34V6, and 35V6的内。 The inside. The conductor portions 312, 332, 342, and 352 used for the inductor 12 are all linear conductor portions extending along the outer circumference of the core portion 24.

圖5中之電感器17由圖3A~3C及圖4A~4C中之電感器17用之導體部337、347、357A及357B、以及導體部34V7、35V7及35V8構成,並且具有線圈構造。The inductor 17 in FIG. 5 is composed of conductor portions 337, 347, 357A, and 357B, and conductor portions 34V7, 35V7, and 35V8 for the inductor 17 in FIGS. 3A to 3C and FIGS. 4A to 4C, and has a coil structure.

(作用效果) 根據本實施形態之LC複合零件,能夠降低未達截止頻率之低頻信號之插入損耗,並且能夠提高超過截止頻率之高頻信號之插入損耗。因此,作為低通濾波器之特性優異。特別是,適合於截止頻率為1.1~1.6 GHz之低通濾波器。截止頻率可定義為-3dB點。該LC複合零件除了作為低通濾波器使用之外,還可作為高通濾波器、帶通濾波器等使用。(Effect) According to the LC composite component of this embodiment, the insertion loss of low-frequency signals that do not reach the cutoff frequency can be reduced, and the insertion loss of high-frequency signals that exceed the cutoff frequency can be improved. Therefore, it has excellent characteristics as a low-pass filter. In particular, it is suitable for low-pass filters with a cutoff frequency of 1.1 to 1.6 GHz. The cut-off frequency can be defined as the -3dB point. In addition to being used as a low-pass filter, this LC composite part can also be used as a high-pass filter, band-pass filter, etc.

(製造方法之一例) 接下來,參照圖1,對本實施形態之LC複合零件1之製造方法進行說明。於本實施形態之LC複合零件1中,於包含成為複數個LC複合零件1之非磁性基板21之部分之晶圓上,形成LC複合零件1之除了非磁性基板21以外之複數個構成要素。藉此,製作LC複合零件1之零件本體20排列成複數行之基礎構造物。並且,藉由切斷該基礎構造物而將複數個零件本體20互相分離。藉此,製造出複數個LC複合零件1。(An example of manufacturing method) Next, referring to Fig. 1, a method of manufacturing the LC composite component 1 of this embodiment will be described. In the LC composite component 1 of the present embodiment, a plurality of constituent elements of the LC composite component 1 other than the nonmagnetic substrate 21 are formed on a wafer including a portion that becomes the non-magnetic substrate 21 of the plurality of LC composite components 1. Thereby, a basic structure in which the part body 20 of the LC composite part 1 is arranged in a plurality of rows is produced. And, by cutting the basic structure, a plurality of component bodies 20 are separated from each other. In this way, a plurality of LC composite parts 1 are manufactured.

以下,參照圖2、圖3A~3C及圖4A~4C,關注於1個LC複合零件1,對本實施形態之LC複合零件1之製造方法更詳細地進行說明。再者,於以下之說明中,為了方便起見,稱成為晶圓中之非磁性基板21之部分為非磁性基板21。於本實施形態之製造方法中,首先,於非磁性基板21之上,使用薄膜形成技術,形成複數個介電層及複數個導體部。具體而言,首先,於非磁性基板21之第1面21a之上形成介電層31。其次,於介電層31之上形成圖3A中所示之複數個導體部31T1~31T4、311~316。複數個導體部之形成方法可為於形成了未圖案化之導體層之後,藉由使用遮罩之蝕刻將導體層圖案化之方法,亦可為使用遮罩來形成經圖案化之導體層之方法。作為導體層之形成方法,可使用濺鍍法及鍍覆法等各種薄膜形成法。以下說明之其他複數個導體部之形成方法亦與此相同。Hereinafter, referring to FIGS. 2, 3A to 3C and FIGS. 4A to 4C, focusing on one LC composite component 1, the manufacturing method of the LC composite component 1 of this embodiment will be described in more detail. Furthermore, in the following description, for convenience, the part that becomes the non-magnetic substrate 21 in the wafer is referred to as the non-magnetic substrate 21. In the manufacturing method of this embodiment, first, a plurality of dielectric layers and a plurality of conductor portions are formed on the non-magnetic substrate 21 using a thin film forming technique. Specifically, first, the dielectric layer 31 is formed on the first surface 21 a of the non-magnetic substrate 21. Next, a plurality of conductor portions 31T1 to 31T4, 311 to 316 shown in FIG. 3A are formed on the dielectric layer 31. The method of forming a plurality of conductor parts can be a method of patterning the conductor layer by etching using a mask after the unpatterned conductor layer is formed, or a method of using a mask to form a patterned conductor layer method. As a method of forming the conductor layer, various thin film forming methods such as sputtering and plating can be used. The method of forming other plural conductor parts described below is also the same.

其次,藉由例如濺鍍法等,於介電層31及導體部31T1~31T4、311~316之上形成介電層32。其次,於介電層32之上,形成圖3B中所示之電容器用之導體部323、324、325A、325B及326。其次,形成介電層33。其次,於介電層32、33形成導體部33V1~33V6用之6個孔,並且於介電層33形成導體部33V7~33V11用之5個孔。其次,形成圖3B及C中所示之複數個導體部33V1~33V6、331、332、337、333、334、335A、335B、336、33T1、33T2、33T3及33T4。Next, the dielectric layer 32 is formed on the dielectric layer 31 and the conductor portions 31T1 to 31T4, 311 to 316 by, for example, sputtering. Next, on the dielectric layer 32, the conductor portions 323, 324, 325A, 325B, and 326 for the capacitor shown in FIG. 3B are formed. Next, the dielectric layer 33 is formed. Next, 6 holes for the conductor portions 33V1 to 33V6 are formed in the dielectric layers 32 and 33, and 5 holes for the conductor portions 33V7 to 33V11 are formed in the dielectric layer 33. Next, a plurality of conductor portions 33V1 to 33V6, 331, 332, 337, 333, 334, 335A, 335B, 336, 33T1, 33T2, 33T3, and 33T4 shown in FIGS. 3B and C are formed.

其次,於介電層33及導體部上形成介電層34。其次,於介電層34形成導體部34V1~34V7用之7個孔。其次,形成圖4A中所示之複數個導體部341、342、347、34T1、34T2、34T3及34T4。其次,於介電層34形成介電層35。其次,於介電層35形成導體部35V1~35V8用之8個孔。其次,形成圖4B中所示之複數個導體部351、352、357A、357B,35T1、35T2、35T3及35T4。其次,於介電層35及導體部上形成介電層36。Next, a dielectric layer 34 is formed on the dielectric layer 33 and the conductor portion. Next, 7 holes for the conductor portions 34V1 to 34V7 are formed in the dielectric layer 34. Next, a plurality of conductor portions 341, 342, 347, 34T1, 34T2, 34T3, and 34T4 shown in FIG. 4A are formed. Next, a dielectric layer 35 is formed on the dielectric layer 34. Next, 8 holes for the conductor portions 35V1 to 35V8 are formed in the dielectric layer 35. Next, a plurality of conductor portions 351, 352, 357A, 357B, 35T1, 35T2, 35T3, and 35T4 shown in FIG. 4B are formed. Next, a dielectric layer 36 is formed on the dielectric layer 35 and the conductor portion.

其次,於介電層36形成端子導體部41~44用之4個孔。其次,藉由例如鍍覆法形成圖4C中所示之端子導體部41~44。Next, four holes for the terminal conductor portions 41 to 44 are formed in the dielectric layer 36. Next, the terminal conductor portions 41 to 44 shown in FIG. 4C are formed by, for example, a plating method.

其次,於介電層32~36形成芯部23及24用之2個孔。其次,以埋入上述之2個孔內並且覆蓋端子導體部41~44之方式,形成之後成為磁性層22、芯部23及24之預備磁性層。其次,研磨預備磁性層,直到端子用導體部41~44露出為止。藉此,於預備磁性層中,殘留於芯部23及24用之2個孔內之部分成為芯部23及24,其餘部分成為磁性層22。藉由形成磁性層22、芯部23及24,完成基礎構造物。其次,以切出複數個零件本體20之方式,切斷基礎構造物。 再者,為了形成芯部23、24及磁性層(預備磁性層)22,塗佈包含上述之磁性金屬粒子及樹脂之固化性組成物並使之固化即可。Next, two holes for the cores 23 and 24 are formed in the dielectric layers 32 to 36. Next, by filling the above-mentioned two holes and covering the terminal conductor portions 41 to 44, a preliminary magnetic layer that becomes the magnetic layer 22, the core portions 23 and 24 is formed. Next, the preliminary magnetic layer is polished until the terminal conductor portions 41 to 44 are exposed. Thereby, in the preliminary magnetic layer, the portions remaining in the two holes for the core portions 23 and 24 become the core portions 23 and 24, and the remaining portion becomes the magnetic layer 22. By forming the magnetic layer 22, the cores 23 and 24, the basic structure is completed. Next, the basic structure is cut by cutting out a plurality of component bodies 20. Furthermore, in order to form the cores 23 and 24 and the magnetic layer (preparatory magnetic layer) 22, it is only necessary to apply and cure a curable composition containing the above-mentioned magnetic metal particles and resin.

本發明不限定於上述實施形態,可採用各種變化方式。 例如,LC複合零件中之電容器、電感器及芯部之數量分別為1個以上即可。又,電容器、電感器及芯部之形態亦可根據用途適當地變更。又,電感器及電容器之配置亦可任意地變更。例如,當從垂直於第1面21a之方向觀察時,電容器可與其他電感器重疊。The present invention is not limited to the above-mentioned embodiment, and various modifications can be adopted. For example, the number of capacitors, inductors, and cores in the LC composite part may be one or more. In addition, the shapes of capacitors, inductors, and cores can also be appropriately changed according to applications. In addition, the arrangement of inductors and capacitors can also be changed arbitrarily. For example, when viewed from a direction perpendicular to the first surface 21a, the capacitor may overlap with other inductors.

又,於磁性層之厚度不均勻之情形時,作為磁性層之厚度採用平均之厚度即可。於芯部之厚度不均勻之情形時,作為芯部之厚度採用平均之厚度即可。於LC複合零件具有複數個芯部時,至少一個芯部之厚度與磁性層之厚度滿足上述之關係即可。In addition, when the thickness of the magnetic layer is not uniform, the average thickness may be used as the thickness of the magnetic layer. When the thickness of the core is not uniform, the average thickness may be used as the thickness of the core. When the LC composite part has a plurality of cores, the thickness of at least one core and the thickness of the magnetic layer may satisfy the above relationship.

又,本實施形態之LC複合零件1之製造方法不限於上述方法。例如,於LC複合零件1中,至少非磁性基板21與磁性層22之間之複數個介電層及複數個導體部例如可藉由低溫同時焙燒法等形成。 實施例In addition, the manufacturing method of the LC composite component 1 of this embodiment is not limited to the above-mentioned method. For example, in the LC composite component 1, at least the plurality of dielectric layers and the plurality of conductor portions between the non-magnetic substrate 21 and the magnetic layer 22 can be formed by, for example, a low-temperature simultaneous firing method. Example

以下,根據實施例對本發明更詳細地進行說明,但本發明不限定於以下之實施例。Hereinafter, the present invention will be described in more detail based on examples, but the present invention is not limited to the following examples.

(實施例1) 藉由以下所示之方法,調整了用於形成磁性層及芯部之固化性之樹脂組合物。即,將硫酸亞鐵及硫酸鈷之水溶液以磁性金屬粒子中之Fe及Co之質量比為7:3之方式調配,並且用鹼性水溶液將其等之一部分中和。在中和後之水溶液中進行起泡而通氣,攪拌上述水溶液,藉此獲得了含有Co之針狀之針鐵礦粒子。於將過濾水溶液而獲得之含有Co之針鐵礦粒子用離子交換水清洗並乾燥之後,進而於空氣中加熱,藉此獲得了含有Co之赤鐵礦粒子。(Example 1) The curable resin composition used to form the magnetic layer and the core was adjusted by the method shown below. That is, an aqueous solution of ferrous sulfate and cobalt sulfate is formulated such that the mass ratio of Fe and Co in the magnetic metal particles is 7:3, and a part of them is neutralized with an alkaline aqueous solution. The neutralized aqueous solution was bubbled and ventilated, and the aqueous solution was stirred, thereby obtaining needle-shaped goethite particles containing Co. The Co-containing goethite particles obtained by filtering the aqueous solution were washed with ion-exchanged water and dried, and then heated in the air, thereby obtaining Co-containing hematite particles.

將所得之含Co之赤鐵礦粒子於氫氣環境中之爐內以550℃之溫度加熱。其後,將爐內氣體切換為氬氣,並冷卻至大約200℃。進而,藉由花費24小時將氧分壓增加至21%,並冷卻至室溫,而獲得了具備金屬芯部及氧化金屬膜並且以Fe及Co為主成分之磁性金屬粒子。The obtained Co-containing hematite particles are heated at a temperature of 550°C in a furnace in a hydrogen atmosphere. After that, the gas in the furnace was switched to argon and cooled to about 200°C. Furthermore, it took 24 hours to increase the oxygen partial pressure to 21% and cool to room temperature to obtain magnetic metal particles with a metal core and a metal oxide film and containing Fe and Co as the main components.

於所得之磁性金屬粒子中,以樹脂組合物之固化物中之磁性金屬粒子之體積比率為40體積%之方式添加環氧樹脂及固化劑,並且藉由使用混合輥於室溫進行混練,將樹脂組合物製成漿料狀,而獲得了磁性層及芯部形成用之固化性之樹脂組合物。 其次,應用公知之薄膜形成方法,製作了圖1~圖5所示之LC複合零件1。此處,使用了非磁性鐵氧體作為非磁性基板21之材料,使用了上述之樹脂組合物之固化物作為磁性層22及芯部23、24之材料,使用了Cu作為電感器11、12、17及電容器13~16之導電材料,使用了聚醯亞胺樹脂作為介電層31及33~36之材料,及使用了氮化矽作為介電層32之材料。芯部之厚度為100 μm,磁性層之厚度為50 μm,從厚度方向觀察LC複合零件所得之尺寸為650 μm×500 μm。LC複合零件之截止頻率設為了1.2 GHz。In the obtained magnetic metal particles, epoxy resin and curing agent are added in such a way that the volume ratio of the magnetic metal particles in the cured resin composition is 40% by volume, and the mixture is kneaded at room temperature using a mixing roller. The resin composition was made into a slurry form, and a curable resin composition for forming the magnetic layer and core was obtained. Next, using a known thin film forming method, the LC composite part 1 shown in FIGS. 1 to 5 was produced. Here, non-magnetic ferrite is used as the material of the non-magnetic substrate 21, the cured product of the above-mentioned resin composition is used as the material of the magnetic layer 22 and the cores 23, 24, and Cu is used as the inductor 11, 12 , 17 and capacitors 13-16 conductive materials, polyimide resin is used as the material of the dielectric layers 31 and 33-36, and silicon nitride is used as the material of the dielectric layer 32. The thickness of the core is 100 μm, the thickness of the magnetic layer is 50 μm, and the size of the LC composite part viewed from the thickness direction is 650 μm×500 μm. The cut-off frequency of LC composite parts is set to 1.2 GHz.

(實施例2~5) 除了如表1所示地變更芯部之厚度、磁性層之厚度以外,其餘與實施例1同樣地製造了實施例2~5之LC複合零件。再者,於實施例2中,對應於使芯部之厚度變小,維持電感器11、12之線圈構造之匝數,並且縮短導體部33V5、34V5及35V5、以及導體部33V6、34V6及35V6之長度,縮小了線圈構造之軸向長度。又,於實施例4、5中,對應於使芯部之厚度變大,維持電感器11、12之線圈構造之匝數,並且增長導體部33V5、34V5及35V5、以及導體部33V6、34V6及35V6之長度,加大了線圈構造之軸向長度。於任一實施例中,芯部23及24之厚度均設為電感器11及12之線圈構造之軸向長度以上。(Examples 2~5) Except that the thickness of the core and the thickness of the magnetic layer were changed as shown in Table 1, the LC composite parts of Examples 2 to 5 were produced in the same manner as in Example 1. Furthermore, in the second embodiment, corresponding to reducing the thickness of the core, the number of turns of the coil structure of the inductors 11 and 12 is maintained, and the conductor portions 33V5, 34V5, and 35V5, and the conductor portions 33V6, 34V6, and 35V6 are shortened The length reduces the axial length of the coil structure. In addition, in Embodiments 4 and 5, corresponding to increasing the thickness of the core, the number of turns of the coil structure of the inductors 11 and 12 is maintained, and the conductor portions 33V5, 34V5, and 35V5, and the conductor portions 33V6, 34V6, and The length of 35V6 increases the axial length of the coil structure. In any embodiment, the thickness of the cores 23 and 24 is set to be greater than the axial length of the coil structure of the inductors 11 and 12.

(實施例6) 除了於中和工序中,降低了基於鹼性水溶液之中和率,降低了於氧化工序中供給之中和後之金屬(Fe及Co)離子濃度,如表1所示地變更了磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,其餘與實施例1同樣地,獲得了實施例6之LC複合零件。(Example 6) In addition to the neutralization process, the neutralization rate based on the alkaline aqueous solution was reduced, and the metal (Fe and Co) ion concentration after neutralization during the oxidation process was reduced. The magnetic metal particles were changed as shown in Table 1. Except for the average major axis diameter, aspect ratio value, and CV value, the rest was the same as in Example 1, and the LC composite part of Example 6 was obtained.

(實施例7) 除了在中和工序中,提高了基於鹼性水溶液之中和率,提高了於氧化工序中供給之中和後之金屬(Fe及Co)離子濃度,如表1所示地變更了磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,其餘與實施例1同樣地,獲得了實施例7之LC複合零件。(Example 7) In addition to the neutralization process, the neutralization rate based on the alkaline aqueous solution was increased, and the metal (Fe and Co) ion concentration after the neutralization during the oxidation process was increased. The magnetic metal particles were changed as shown in Table 1. Except for the average major axis diameter, aspect ratio value, and CV value, the rest was the same as in Example 1, and the LC composite part of Example 7 was obtained.

(實施例8) 除了於中和工序中,提高了基於鹼性水溶液之中和率,提高了於氧化工序中供給之中和後之金屬(Fe及Co)離子濃度,如表1所示地變更了磁性金屬粒子之平均長軸徑、縱橫比值及CV值以外,其餘與實施例1同樣地,獲得了實施例8之LC複合零件。(Example 8) In addition to the neutralization process, the neutralization rate based on the alkaline aqueous solution was increased, and the metal (Fe and Co) ion concentration after neutralization during the oxidation process was increased. The magnetic metal particles were changed as shown in Table 1. Except for the average major axis diameter, aspect ratio value, and CV value, the rest was the same as in Example 1, and the LC composite part of Example 8 was obtained.

(實施例9、10) 除了以樹脂組合物之固化物中之磁性金屬粒子之體積比率分別為30體積%及50體積%之方式製備了固化性之樹脂組合物以外,其餘與實施例1同樣地,獲得了實施例9、10之LC複合零件。(Example 9, 10) Except that the curable resin composition was prepared so that the volume ratio of the magnetic metal particles in the cured resin composition was 30% by volume and 50% by volume, respectively, in the same manner as in Example 1, Example 9 was obtained. , 10 LC composite parts.

(實施例11) 除了於磁性金屬粒子之製造中未添加Co以外,其餘與實施例1同樣地,獲得了實施例11之LC複合零件。(Example 11) The LC composite part of Example 11 was obtained in the same manner as Example 1, except that Co was not added in the manufacture of the magnetic metal particles.

(實施例12) 除了於磁性金屬粒子之製造中添加Ni以取代Co,並且以樹脂組合物之固化物中之磁性金屬粒子之體積比率為50體積%之方式製備了固化性之樹脂組合物以外,其餘與實施例1同樣地,獲得了實施例12之LC複合零件。(Example 12) Except that Ni was added to replace Co in the manufacture of magnetic metal particles, and the curable resin composition was prepared with the volume ratio of the magnetic metal particles in the cured resin composition being 50% by volume, the rest is the same as the examples 1 Similarly, the LC composite part of Example 12 was obtained.

(比較例1) 除了將芯部之厚度設為30 μm以外,其餘與實施例1同樣地,獲得了比較例1之LC複合零件。再者,對應於使芯部之厚度變小,維持電感器11、12之線圈構造之匝數,並且縮短導體部33V5、34V5及35V5、以及導體部33V6、34V6及35V6之長度,縮小了線圈構造之軸向長度。即,芯部23及24之厚度為電感器11及12之線圈構造之軸向長度以上。(Comparative example 1) The LC composite part of Comparative Example 1 was obtained in the same manner as in Example 1, except that the thickness of the core was 30 μm. Furthermore, corresponding to the reduction of the thickness of the core, the number of turns of the coil structure of the inductors 11 and 12 is maintained, and the lengths of the conductor portions 33V5, 34V5, and 35V5, and the conductor portions 33V6, 34V6, and 35V6 are reduced, thereby reducing the coil The axial length of the structure. That is, the thickness of the cores 23 and 24 is greater than the axial length of the coil structure of the inductors 11 and 12.

[磁性金屬粒子之評價方法] (磁性金屬之尺寸及縱橫比) 藉由透過型電子顯微鏡(TEM)以倍率50萬倍觀察各實施例及比較例中所得之LC複合零件之磁性層之剖面中之磁性金屬粒子,測定磁性金屬粒子之長軸及短軸方向之尺寸(長軸徑及短軸徑)(nm),求得了縱橫比。同樣地,觀察200~500個磁性金屬粒子,計算了長軸徑、短軸徑及縱橫比之平均值。磁性金屬粒子之縱橫比之平均值及CV值、以及磁性金屬粒子之長軸徑之平均值於表1中示出。[Evaluation method of magnetic metal particles] (Size and aspect ratio of magnetic metal) Observe the magnetic metal particles in the cross section of the magnetic layer of the LC composite parts obtained in each of the Examples and Comparative Examples with a transmission electron microscope (TEM) at a magnification of 500,000 times, and measure the long axis and short axis directions of the magnetic metal particles Dimensions (major axis diameter and minor axis diameter) (nm), and the aspect ratio was obtained. Similarly, 200 to 500 magnetic metal particles were observed, and the average values of the major axis diameter, minor axis diameter, and aspect ratio were calculated. The average value of the aspect ratio and the CV value of the magnetic metal particles, and the average value of the major axis diameter of the magnetic metal particles are shown in Table 1.

(飽和磁化) 將實施例及比較例所得之樹脂組合物之固化物加工成1 mm×1 mm×3 mm,並且使用振動試樣型磁力計(VSM,玉川製作所股份有限公司製造),測定了加工後之複合磁性體之飽和磁化(emu/g)。結果示於表1。(Saturation magnetization) The cured product of the resin composition obtained in the Examples and Comparative Examples was processed into 1 mm×1 mm×3 mm, and the composite after processing was measured using a vibration sample magnetometer (VSM, manufactured by Tamagawa Manufacturing Co., Ltd.) The saturation magnetization of the magnetic body (emu/g). The results are shown in Table 1.

(LC複合零件之插入損耗之最大值及最小值) 使用網路分析儀(N5230A,Keysight Technologies),求得於各實施例及比較例中所得之LC複合零件中插入損耗之頻率特性。並且,求得了0.824-0.960 GHz中之插入損耗之最大值、及1.648-1.920 GHz中之插入損耗之最小值。結果示於表1。又,示出實施例1、實施例5及比較例1之插入損耗之頻率特性之特性圖分別於圖6~圖8中示出。(Maximum and minimum insertion loss of LC composite parts) A network analyzer (N5230A, Keysight Technologies) was used to obtain the frequency characteristics of insertion loss in the LC composite parts obtained in each embodiment and comparative example. In addition, the maximum value of insertion loss in 0.824-0.960 GHz and the minimum value of insertion loss in 1.648-1.920 GHz are obtained. The results are shown in Table 1. In addition, characteristic diagrams showing the frequency characteristics of the insertion loss of Example 1, Example 5, and Comparative Example 1 are shown in FIGS. 6 to 8 respectively.

[表1]    金屬粒子 固化物中之金屬粒子 長軸徑(nm) 縱橫比 縱橫比 CV値 金屬粒子 體積比率 (vol%) 固化物 飽和磁化 (emu/g) 芯部 厚度 T1(μm) 磁性層 厚度T2 (μm) T1/T2 插入損耗 最大值 (dB) 插入損耗 最小值 (dB) 實施例1 FeCo 48 2.3 0.25 40 121 100 50 2.0 0.50 33.0 實施例2 FeCo 47 2.2 0.25 40 121 50 50 1.0 0.60 31.2 實施例3 FeCo 48 2.2 0.24 40 121 100 83 1.2 0.58 32.4 實施例4 FeCo 50 2.5 0.26 40 121 150 30 5.0 0.47 33.8 實施例5 FeCo 49 2.4 0.24 40 121 150 50 3.0 0.45 34.2 實施例6 FeCo 35 1.3 0.21 40 125 100 50 2.0 0.53 30.3 實施例7 FeCo 118 5.9 0.35 40 114 100 50 2.0 0.54 30.7 實施例8 FeCo 58 4.8 0.45 40 118 100 50 2.0 0.55 29.8 實施例9 FeCo 46 2.3 0.26 30 116 100 50 2.0 0.53 31.6 實施例10 FeCo 49 2.6 0.25 50 140 100 50 2.0 0.50 31.8 實施例11 Fe 36 1.5 0.20 40 102 100 50 2.0 0.56 30.9 實施例12 FeNi 37 1.4 0.22 50 91 100 50 2.0 0.56 30.6 比較例1 FeCo 49 2.4 0.26 40 121 30 50 0.6 0.78 27.0 根據實施例1~5及比較例1之結果可知,於T1/T2為1.0以上之情形(實施例1~5)時,與T1/T2未達1.0之情形(比較例1)相比,插入損耗特性進一步提高。[Table 1] Metal particles The long axis diameter of the metal particles in the cured product (nm) aspect ratio Aspect ratio CV value Metal particle volume ratio (vol%) Cured material saturation magnetization (emu/g) Core thickness T1 (μm) Magnetic layer thickness T2 (μm) T1/T2 Maximum insertion loss (dB) Minimum insertion loss (dB) Example 1 FeCo 48 2.3 0.25 40 121 100 50 2.0 0.50 33.0 Example 2 FeCo 47 2.2 0.25 40 121 50 50 1.0 0.60 31.2 Example 3 FeCo 48 2.2 0.24 40 121 100 83 1.2 0.58 32.4 Example 4 FeCo 50 2.5 0.26 40 121 150 30 5.0 0.47 33.8 Example 5 FeCo 49 2.4 0.24 40 121 150 50 3.0 0.45 34.2 Example 6 FeCo 35 1.3 0.21 40 125 100 50 2.0 0.53 30.3 Example 7 FeCo 118 5.9 0.35 40 114 100 50 2.0 0.54 30.7 Example 8 FeCo 58 4.8 0.45 40 118 100 50 2.0 0.55 29.8 Example 9 FeCo 46 2.3 0.26 30 116 100 50 2.0 0.53 31.6 Example 10 FeCo 49 2.6 0.25 50 140 100 50 2.0 0.50 31.8 Example 11 Fe 36 1.5 0.20 40 102 100 50 2.0 0.56 30.9 Example 12 FeNi 37 1.4 0.22 50 91 100 50 2.0 0.56 30.6 Comparative example 1 FeCo 49 2.4 0.26 40 121 30 50 0.6 0.78 27.0 According to the results of Examples 1 to 5 and Comparative Example 1, when T1/T2 is 1.0 or more (Examples 1 to 5), compared with the case where T1/T2 is less than 1.0 (Comparative Example 1), insert The loss characteristics are further improved.

1:LC複合零件 1b:底面 1s:側面 1t:上表面 2:輸入端子 3:輸出端子 11:電感器 12:電感器 13:電容器 14:電容器 15:電容器 16:電容器 17:電感器 20:零件本體 21:非磁性基板 21a:第1面 21b:第2面 22:磁性層 22a:第1面 22b:第2面 23:芯部 24:芯部 31:介電層 31T1~31T4:端子用導體部 32:介電層 33:介電層 33T1~33T4:端子用導體部 33V1~33V11:導體部 34:介電層 34T1~34T4:端子用導體部 34V1~34V7:導體部 35:介電層 35T1~35T4:端子用導體部 35V1~35V8:導體部 36:介電層 37:介電積層體 41~44:端子用導體部 311:電感器用之導體部 312:電感器用之導體部 313:電容器用之導體部 315:電容器用之導體部 316:電容器用之導體部 323:電容器用之導體部 324:電容器用之導體部 325A:電容器用之導體部 325B:電容器用之導體部 326:電容器用之導體部 331:電感器用之導體部 332:電感器用之導體部 335A, 335B:連接用導體部 336:連接用導體部 337:電感器用之導體部 341:電感器用之導體部 342:電感器用之導體部 347:電感器用之導體部 351:電感器用之導體部 352:電感器用之導體部 357A:電感器用之導體部 357B:電感器用之導體部 T1:厚度 T2:厚度1: LC composite parts 1b: bottom surface 1s: side 1t: upper surface 2: Input terminal 3: output terminal 11: Inductor 12: Inductor 13: capacitor 14: capacitor 15: capacitor 16: capacitor 17: Inductor 20: Part body 21: Non-magnetic substrate 21a: side 1 21b: Side 2 22: Magnetic layer 22a: side 1 22b: Side 2 23: Core 24: core 31: Dielectric layer 31T1~31T4: Conductor part for terminal 32: Dielectric layer 33: Dielectric layer 33T1~33T4: Conductor part for terminal 33V1~33V11: Conductor part 34: Dielectric layer 34T1~34T4: Conductor part for terminal 34V1~34V7: Conductor part 35: Dielectric layer 35T1~35T4: Conductor part for terminal 35V1~35V8: Conductor part 36: Dielectric layer 37: Dielectric laminate 41~44: Conductor part for terminal 311: Conductor part for inductor 312: Conductor part for inductor 313: Conductor part for capacitor 315: Conductor part for capacitor 316: Conductor part for capacitor 323: Conductor part for capacitor 324: Conductor part for capacitor 325A: Conductor part for capacitor 325B: Conductor part for capacitor 326: Conductor part for capacitor 331: Conductor part for inductor 332: Conductor part for inductors 335A, 335B: connecting conductor 336: Connection conductor part 337: Conductor part for inductors 341: Conductor part for inductor 342: Conductor part for inductor 347: Conductor part for inductor 351: Conductor part for inductor 352: Conductor part for inductor 357A: Conductor part for inductor 357B: Conductor part for inductor T1: thickness T2: thickness

圖1係示出本發明之一實施形態之LC複合零件之構成之立體圖。 圖2係示出本發明之一實施形態之LC複合零件之構成之剖視圖。 圖3A係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖3B係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖3C係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖4A係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖4B係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖4C係用於說明本發明之一實施形態之LC複合零件之介電層之構成之說明圖。 圖5係示出本發明之一實施形態之LC複合零件之電路構成之電路圖。 圖6係示出第1實施例之LC複合零件中之插入損耗之頻率特性之特性圖。 圖7係示出第5實施例之LC複合零件中之插入損耗之頻率特性之特性圖。 圖8係示出第1比較例之LC複合零件中之插入損耗之頻率特性之特性圖。Fig. 1 is a perspective view showing the structure of an LC composite component in one embodiment of the present invention. Fig. 2 is a cross-sectional view showing the structure of an LC composite part according to an embodiment of the present invention. FIG. 3A is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. FIG. 3B is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. FIG. 3C is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 4A is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. FIG. 4B is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 4C is an explanatory diagram for explaining the structure of the dielectric layer of the LC composite component in one embodiment of the present invention. Fig. 5 is a circuit diagram showing the circuit configuration of an LC composite component according to an embodiment of the present invention. 6 is a characteristic diagram showing the frequency characteristics of insertion loss in the LC composite part of the first embodiment. Fig. 7 is a characteristic diagram showing the frequency characteristics of the insertion loss in the LC composite part of the fifth embodiment. Fig. 8 is a characteristic diagram showing the frequency characteristics of the insertion loss in the LC composite part of the first comparative example.

1:LC複合零件 1: LC composite parts

1b:底面 1b: bottom surface

1s:側面 1s: side

1t:上表面 1t: upper surface

11,12,17:電感器 11, 12, 17: inductor

13~16:電容器 13~16: capacitor

20:零件本體 20: Part body

21:非磁性基板 21: Non-magnetic substrate

21a:第1面 21a: side 1

21b:第2面 21b: Side 2

22:磁性層 22: Magnetic layer

22a:第1面 22a: side 1

22b:第2面 22b: Side 2

23,24:芯部 23, 24: Core

37:介電積層體 37: Dielectric laminate

41,42,44:端子用導體部 41, 42, 44: conductor part for terminal

Claims (6)

一種LC複合零件, 具備: 非磁性基板、 具有磁性之磁性層、 1個以上之電容器、 1個以上之電感器、及 具有磁性之1個以上之芯部, 上述非磁性基板具有第1面及與上述第1面為相反側之第2面, 上述磁性層以與上述非磁性基板之第1面對向之方式配置, 上述1個以上之電感器、及上述1個以上之電容器配置於上述非磁性基板之第1面與上述磁性層之間, 上述芯部配置於上述非磁性基板之第1面與上述磁性層之間並且連接於上述磁性層, 在垂直於上述非磁性基板之第1面之方向,上述芯部之厚度相對於上述磁性層之厚度為1.0倍以上, 上述磁性層及上述芯部分別包含磁性金屬粒子及樹脂。An LC composite part, have: Non-magnetic substrate, Magnetic layer with magnetism, 1 or more capacitors, 1 or more inductors, and More than one core with magnetism, The non-magnetic substrate has a first surface and a second surface opposite to the first surface, and The magnetic layer is arranged to face the first surface of the non-magnetic substrate, The one or more inductors and the one or more capacitors are arranged between the first surface of the non-magnetic substrate and the magnetic layer, The core is arranged between the first surface of the non-magnetic substrate and the magnetic layer and connected to the magnetic layer, In the direction perpendicular to the first surface of the non-magnetic substrate, the thickness of the core is 1.0 times or more relative to the thickness of the magnetic layer, The magnetic layer and the core each include magnetic metal particles and resin. 如請求項1之LC複合零件,其中 上述磁性金屬粒子之平均長軸徑為120 nm以下。Such as the LC composite part of claim 1, where The average major axis diameter of the magnetic metal particles is 120 nm or less. 如請求項1或2之LC複合零件,其中 上述磁性金屬粒子之平均縱橫比為1.2~6。Such as the LC composite parts of claim 1 or 2, where The average aspect ratio of the magnetic metal particles is 1.2-6. 如請求項1至3中任一項之LC複合零件,其中 上述磁性層及上述芯部之飽和磁化分別為90 emu/g以上。Such as the LC composite parts of any one of claims 1 to 3, where The saturation magnetization of the magnetic layer and the core is 90 emu/g or more. 如請求項1至4中任一項之LC複合零件,其中 上述磁性金屬粒子包含選自由Fe、Co及Ni所組成之群中之至少1種作為主成分。Such as the LC composite parts of any one of claims 1 to 4, where The above-mentioned magnetic metal particles contain at least one selected from the group consisting of Fe, Co, and Ni as a main component. 如請求項1至5中任一項之LC複合零件,其中 上述磁性金屬粒子之縱橫比之CV值為0.4以下。Such as the LC composite parts of any one of claims 1 to 5, where The CV value of the aspect ratio of the magnetic metal particles is 0.4 or less.
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