TW202016535A - Gas sensor - Google Patents

Abstract

This invention provides a gas sensor that capable of generating a large induced current at a small applied voltage and which includes a first electrode, at least one of insulators, a sensing layer, and a second electrode unit. The at least one of insulators is disposed on the surface of the first electrode. The sensing layer covers first electrode, is used for detecting specific gas molecular. Said second electrode unit comprising at least one of second electrodes and an electric current assisted layer and said at least one of second electrodes are disposed on top surface of said at least one of insulators or said sensing layer. Said electric current assisted layer is made of conductive polymer and can cooperate with the second electrodes to conduct current. This invention also provides another gas sensor.

Description

Gas sensor

The invention relates to a sensor, in particular to a gas sensor.

In recent years, due to the increasingly serious air pollution problems, more and more attention has been paid to high-efficiency gas sensors. Among them, gas sensors with nanostructures have excellent gas sensing properties and can not only be applied to daily life , Such as carbon monoxide detectors or smoke detectors, etc., can also be used in factories to detect explosive or harmful gases, the scope of use is quite wide. The action of the gas sensor is most likely to be the result of measurement through the change of the resistance value after the material reacting with the gas to be sensed and the gas to be sensed are used.

The existing multi-layer sidewall gas sensor can accurately sense the gas to be measured by changing the material of the sensing layer. However, the sensitivity of this multi-layer sidewall sensor still needs to be improved to enhance the effectiveness of the gas sensor, so How to improve the sensing efficiency of the gas sensor is one of the problems to be solved by those skilled in the art.

In order to increase the available area between the sensing material and the gas to be sensed and improve the sensing efficiency of the gas sensor, the inventor previously used nano-pores formed on the electrode to allow the gas to be sensed to penetrate The micropores also interact with the sensing material to increase the sensitivity of the gas sensor.

However, the aforementioned electrode with nanopores is manufactured by attaching most of the nanospheres to the semi-finished product of the sensor, then plating the metal layer by means of a coating, and then removing the nanospheres . However, it is not easy to control the stable distribution and attachment of the nanospheres. The uneven distribution of the nanospheres will affect the number and distribution of the nanopores of the subsequently produced electrodes, which will affect the sensing results. This makes the gas sensor face great difficulties in mass production. In addition, the coating and subsequent removal steps of the nanospheres also make the production process of the gas sensor more lengthy, which is not conducive to mass production. produce.

Therefore, the object of the present invention is to provide a gas sensor which has a simple manufacturing process and can have a large induced current under a small voltage.

Therefore, the gas sensor of the present invention includes a first electrode, at least one insulating block, a sensing layer, and a second electrode unit.

The at least one insulating block is disposed on one surface of the first electrode.

The sensing layer is disposed on the first electrode and can interact with a predetermined gas molecule to be measured.

The second electrode unit is electrically connected to the first electrode in cooperation with the sensing layer, and includes at least a second electrode portion and a current auxiliary layer. The at least one second electrode portion is disposed on the sensing layer and the at least one insulating block On one of them, the current auxiliary layer is composed of a conductive organic material, and at least part of the sensing layer contacts and overlaps with each other, and can cooperate with the at least one second electrode portion and the sensing layer to conduct current.

In addition, another object of the present invention is to provide another aspect of the gas sensor.

Therefore, the gas sensor of the present invention includes a sensing layer, a first electrode, a second electrode unit, and a current auxiliary layer.

The sensing layer can interact with predetermined gas molecules to be measured.

The first electrode is disposed on one surface of the sensing layer.

The second electrode unit is disposed on the surface of the sensing layer opposite to the first electrode, and can be electrically connected with the first electrode, including a plurality of surfaces disposed on the sensing layer away from the first electrode and forming a gap between them The second electrode part is provided.

The current auxiliary layer covers the sensing layer and the exposed surfaces of the second electrode parts, and is composed of a conductive organic material, and the gas molecules to be measured can pass through the current auxiliary layer.

In addition, another object of the present invention is to provide another type of gas sensor.

Therefore, the gas sensor of the present invention includes a first electrode, at least one insulation, a second electrode, an interface layer, and a sensing layer.

The at least one insulating block is disposed on one surface of the first electrode. The at least one insulating block includes an insulating body, and a plurality of surfaces extending from the insulating body away from the first electrode toward the first electrode, and allowing the The groove exposed by the first electrode.

The second electrode is made of metal or alloy metal as a material, is disposed on the surface of the at least one insulating block away from the first electrode, and can be electrically connected with the first electrode, including a second electrode portion, and a plurality of The surface of the second electrode portion is a downwardly perforated recess, and at least part of the perforation communicates with the grooves.

The interface layer is connected to at least one of the first electrode and the second electrode.

The sensing layer covers the interface layer and is electrically connected to the first electrode and the second electrode. It is composed of an organic material and can interact with a predetermined gas molecule and produce electrical changes.

The interface layer is selected from organic carrier transport materials. When the carrier transport material is a hole transport material, the work function of the highest filled rail is between the first and second electrodes and the sensing layer When the carrier transport material is an electron transport material, the work function of the lowest unfilled rail is between the first and second electrodes and the sensing layer.

In addition, another object of the present invention is to provide another type of gas sensor.

Therefore, the gas sensor of the present invention includes a first electrode, a sensing layer, an adhesion layer, and a second electrode.

The sensing layer is disposed on one surface of the first electrode and is composed of an organic material, which can interact with a predetermined gas molecule and produce electrical changes.

The adhesion layer covers the surface of the sensing layer away from the first electrode, and is selected from a polar polymer material that can generate hydrogen bonds and can pass gas molecules and current.

The second electrode is disposed on the adhesion layer and includes an electrode portion and a plurality of through holes recessed from the surface of the electrode portion toward the adhesion layer and exposing the adhesion layer.

The effect of the present invention lies in that, by the spaced-apart second electrode parts and the current auxiliary layer, the induced current of the gas sensor can be effectively improved, and the overall manufacturing process is simpler, and mass production can be easier. In addition, the present invention also increases the carrier injection efficiency by introducing the dielectric layer, and can further increase the current value.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numbers.

Referring to FIGS. 1 and 2, a first embodiment of the gas sensor of the present invention includes a substrate 2, at least one insulating block 3 provided on the substrate 2, a second electrode unit 4, and a sensing layer 5.

In detail, the substrate 2 includes a body 21 and a first electrode 22 formed on the surface of the body 21. The body 21 is a supporting substrate and can be selected from insulating materials such as polymers, glass, or ceramics. The first electrode 22 is used as one of the electrodes of the gas sensor and has an upper surface 221 away from the body 21 , Can be selected from metals, conductive metal compounds, or organic conductive materials and other conductive materials, for example, the first electrode 22 can be selected from gold, aluminum, silver, calcium, zinc oxide, indium tin oxide, molybdenum oxide, or fluoride Lithium, etc. In the first embodiment, the material of the first electrode 22 is indium tin oxide (ITO) for example.

It should be noted that, in some embodiments, when the first electrode 22 has supportive properties, the substrate 2 does not need to have the body 21 but is directly constituted by the first electrode 22.

The at least one insulating block 3 is spaced from each other on the upper surface 221 of the substrate 2. In this embodiment, a plurality of insulating blocks 3 are taken as an example for illustration, and each insulating block 3 includes an insulating body 31 and a plurality of grooves 32.

Specifically, the insulating bodies 31 are disposed on the upper surface 221 of the first electrode 22 away from the body 21, interposed between the first electrode 22 and the second electrode unit 4, to make the first The electrode 21 and the second electrode unit 4 are spaced apart from each other. The grooves 32 extend from the surface of the insulating body 31 away from the first electrode 22 toward the first electrode 22, and expose the first electrode 22, and the grooves 32 will pass through the insulating body 31 to each other interval. The material of the insulating body 31 can be selected from insulating materials such as poly (4-vinylphenol (PVP) or polymethylmethacrylate (PMMA)).

The sensing layer 5 is disposed on the first electrode 22 and can generate electrical changes after interacting with a predetermined gas molecule to be measured. The first electrode 22 and the first electrode can be electrically connected to the sensing layer 5 The two-electrode unit 4 measures the result of this electrical change. In the present embodiment, the sensing layer 5 takes an example of changing the magnitude of the sensing current of the sensing layer 5 by generating a resistance change after interacting with the molecules to be sensed.

More specifically, the material of the sensing layer 5 may be an organic material, an inorganic material, or a composite material composed of a mixture of organic materials or inorganic materials. For example, the material of the sensing layer 5 may be selected from, but not limited to, dithienobenzo-thieno[3,4-b]thiophene copolymer (Poly[[4,8-bis[(2-ethylhexyl)oxy]benzo [1,2-b:4,5-b']dithiophene-2,6-diyl][3-fluoro-2-[(2-ethylhexyl)carbonyl]thieno[3,4-b]thiophenediyl]], abbreviated PTB7), 9,9-dioctylfluorene-N-(4-butylphenyl) diphenylamine copolymer (Poly((9,9-dioctylfluorenyl-2,7-diyl)-alt-(4,4' -(N-(4-butylphenyl), TFB for short), poly(9,9-dioctylfluorene), PFO for short, 9,9-dioctylfluorene-2, 1,3-benzothiadiazole copolymer (9,9-Dioctylfluorene-2,1,3-benzothiadiazole copolymer, referred to as F8BT), poly{4,8-bis(5-(2-ethylhexyl)thiophene- 2-yl)benzo[1,2-b;4,5-b']dithiophene-2,6-diyl-alternating-4-(2-ethylhexyl)-thieno[3,4 -b]thiophene-2,6-diyl}(poly[4,8-bis(5-(2-ethylhexyl) thiophene-2-yl)-benzo[1,2-b;4,5-b'] dithiophene-2,6-diyl-alt-4-(2-ethylhexyloxycarbonyl)-3-fluoro-thieno[3,4-b]-thiophene))-2,6-diyl], referred to as PBDTTT-EFT), poly{ 4,8-bis(5-(2-ethylhexyl)thiophen-2-yl)benzo[1,2-b;4,5-b']dithiophene-2,6-diyl-alternate-4 -(2-ethylhexyloxycarbonyl)-3-fluoro-thieno[3,4-b]thiophene-2,6-diyl)}(poly[4,8-bis(5-(2- ethylhexyl) thiophene-2-yl)-benzo[1,2-b;4,5-b']dithiophene-2,6-diyl-alt-4-(2-ethylhexanoyl)-thieno[3,4-b] -thiophene)-2,6-diyl], referred to as PBDTTT-CT], or organic materials such as Poly(3-hexylthiophene-2,5-diyl, referred to as P3HT), or carbon, silicon , Zinc oxide (ZnO ), tungsten oxide (WO ₃ ), titanium dioxide (TiO ₂ ), indium gallium oxide (IGZO) and other inorganic materials.

The second electrode unit 4 is electrically connected to the first electrode 22 in cooperation with the sensing layer, and includes a plurality of second electrodes 41 and a current auxiliary layer 42.

In detail, the second electrodes 41 are respectively arranged corresponding to the insulating blocks 3. Each second electrode 41 has a first electrode portion 411 and at least one second electrode portion 412 extending from the first electrode portion 411. In this embodiment, the second electrode 41 has a plurality of second electrode portions 412 as an example, and the second electrode portions 412 are correspondingly disposed on the surface of one of the corresponding insulating bodies 31 away from the substrate 2 and arranged in the same direction The gap d is spaced apart from each other to form a grid-like structure, and at least part of the gaps d communicate with the grooves 32.

The material of the second electrode 41 can be selected from metals, conductive metal compounds, or organic conductive materials and other conductive materials and can be a single layer or multiple layers. The metal such as aluminum, gold, silver, or nickel, the metal compound such as indium tin oxide, zinc oxide, molybdenum oxide, or lithium fluoride, etc. The organic conductive material such as polydioxyethylthiophene-polystyrenesulfonic acid (PEDOT:PSS), since the conductive materials that can be used for the electrodes are well known in the art, they will not be described in detail. In the first embodiment, the material of the second electrode 41 is aluminum as an example.

The current auxiliary layer 42 is composed of a conductive organic material, and at least part of the sensing layer 5 is in contact with and overlaps with each other, and can cooperate with the second electrode portions 412 and the sensing layer 5 to conduct current, and the sensing layer 5 At least a part of the top surface of the area where the current auxiliary layer 42 contacts and overlaps each other has a height difference with the adjacent surface to form a sidewall structure.

In more detail, the current auxiliary layer 42 is selected from organic materials that do not affect the passage of gas molecules to be sensed, for example: poly(3,4-ethylenedioxythiophene, PEDOT), polypyrrole (Polypyrrole, PPY), polythiophene (PT), polyphenylene sulfide (PPS), polyaniline (PANI), polyacetylene (PAC), and polyphenylene At least one conductive organic material such as acetylene (Poly (p-phenylene vinylene), PPV for short).

In the first embodiment, the sensing layer 5 covers the exposed surfaces of the second electrode portions 412, the insulating blocks 3, and the first electrode 22, and simultaneously passes through the gaps of the second electrode 41 d extends into the grooves 32 and is connected to the first electrode 22. The current auxiliary layer 42 fully covers the surface of the sensing layer 5 away from the substrate 2 and is located in the outermost layer, and the overlapping area with the sensing layer 5 can be generated by the insulating blocks 3 and the grooves 32. A sidewall structure that can be used for sensing gas, and the current auxiliary layer 42 can cooperate with the second electrodes 41 to conduct the induced current generated by the sensing layer 5.

It should be noted that the purpose of the foregoing second electrode portions 412 is to cooperate with the current auxiliary layer 42 to conduct the induced current generated by the sensing layer 5. Therefore, the positions of the second electrode portions 412 are as follows 1 may be directly disposed outside the surface of the insulating body 31, or may be disposed between the sensing layer 5 and the current auxiliary layer 42, or as shown in FIG. 3, disposed in the current auxiliary The layer 42 is located at the outermost layer away from the surface of the substrate 2, which can also achieve the purpose of the invention.

In the present invention, by providing the current auxiliary layer 42 and matching the second electrode 41 into a grid structure, since the current auxiliary layer 42 is composed of a conductive polymer, when a voltage is applied to the gas sensor , The current auxiliary layer 42 can cooperate with the second electrode 41, so that the current auxiliary layer 42 and the second electrodes 41 can be used together as an electrode, therefore, the current can be sensed by the second electrodes 41 Collecting and conducting, in addition, the sensing current can not only circulate in the region of the sensing layer 5 adjacent to the insulating bodies 31, but also in the region of the sensing layer 5 adjacent to the current auxiliary layer 42 to make the sensing The flow area of the current in the sensing layer 5 increases, so the sensed current can be increased and the sensitivity of the sense can be improved.

In addition, since the second electrode portions 412 can be manufactured by coating and lithography processes, compared with conventional gas sensors that use nanospheres to fabricate upper electrodes with nanopores, not only is the manufacturing cost low and easy The gap d of the second electrode portions 412 is controlled to make the difference in sensing gas between the subsequently fabricated devices smaller, and the manufacturing process is simpler, which is more conducive to mass production.

The aforementioned first embodiment is manufactured by sequentially manufacturing the first electrode 22 and the insulating blocks 3 on the body 21, and then using a lithography and coating method to obtain the second electrode 41 with a grid structure Finally, the sensing layer 5 and the current auxiliary layer 42 are coated in sequence to obtain the gas sensor as shown in FIG. 1.

In addition, it should be noted that FIG. 1 is an example in which the grooves 32 are spaced apart from each other via the insulating body 31, however, the grooves 32 may also communicate with each other, so that the insulating body 31 is formed as shown in FIG. A plurality of insulating body portions 311 shown in FIG. 4, and the insulating body portions 311 are spaced apart from each other via the groove 32.

It should be further explained that since the second electrode portions 412 can be manufactured by lithography and coating, the size of the gap d can be adjusted according to the size and design of the device, for example, the gap d can be between 1 micron and 1 Cm, as long as the sensing current can be conducted between the second electrode portions 412 and the first electrode 22, there is no limit, in some embodiments, the gap d between the second electrode portions 412 is used The control is not greater than 300 microns, so that the distance between the second electrode portions 412 is closer, therefore, when applying a smaller voltage to the gas sensor, the current assist layer 42 and the second electrode portions 412 can have a good coupling effect, and can have a higher sense current. Preferably, the gap d of the second electrode portions 412 is between 1 μm and 200 μm, preferably, the gap d of the second electrode portions 412 is between 5 μm and 80 μm, preferably, the The gap d of the second electrode portion 412 is between 10 μm and 80 μm. More preferably, the gap d of the second electrode portions 412 is between 5 μm and 30 μm. More preferably, the gap d of the second electrode portions 412 is between 10 μm and 30 μm.

In some embodiments, the insulating blocks 3 may not have the grooves 32. At this time, the sensing layer 5 may directly cover the surfaces of the insulating blocks 3 and extend to the surface of the first electrode 22.

Referring to FIG. 5, in some embodiments, the sensing layer 5 and the current auxiliary layer 42 cover the at least one insulating block 3 and extend to the surface of the first electrode 22, the second electrodes 41 are provided with the sensing layer 5 and spaced apart from the at least one insulating block 3 along a horizontal direction. In FIG. x, taking each second electrode 41 having a second electrode portion 412 as an example, however, each second electrode 41 may also be provided with a plurality of grid-like structures as described above Second electrode portion 412.

Referring to FIG. 6, a second embodiment of the gas sensor of the present invention includes the sensing layer 5, the first electrode 22 and the second electrode 41 respectively disposed on two opposite surfaces of the sensing layer 5, and the cover The current auxiliary layer 42 of the second electrode 41, the first electrode 22 and the second electrode 41 described above, and the current auxiliary layer 42 and the first electrode 22 and the second electrode 41 of the first embodiment , And the detailed structure, material and function of the current auxiliary layer 42 are the same, so no more explanation is needed. Only the sensing layer 5 will be described below.

Specifically, in the second embodiment, the sensing layer 5 is composed of a supporting adsorbent and a gas sensing material adsorbed on the adsorbent, the sensing layer 5 has a first The surface 511 and a second surface 512 opposite to the first surface 511. The first electrode 22 and the second electrode unit 4 are respectively disposed on the first surface 511 and the second surface 512 and are electrically connected to each other. The current auxiliary layer 42 covers the second surface 512 exposed by the sensing layer 5 And the exposed surfaces of the second electrode portions 412.

Preferably, the adsorbent has porosity.

In the production of the second embodiment, the gas sensing material is first adsorbed by the adsorbent, the gas sensing material is adsorbed on the adsorbent and then the sensing layer 5 is made, and then the coating and lithography processes are used in the process The first surface 511 and the second surface 512 of the sensing layer 5 form the first electrode 22 and the second electrode 41 respectively, and finally the second surface 512 exposed on the sensing layer 5 and the second The exposed surface of the electrode portion 412 covers the current auxiliary layer 42 to obtain a gas sensor as shown in FIG. 5. It should be noted that the adsorbent may be, for example, oil-absorbing paper or cotton paper, as long as it has support and can adsorb the gas sensing material, and is not limited. In the second embodiment, the adsorbent is the adsorbent Take oil-absorbing paper as an example.

It should be further explained that, since the sensing layer 5 is made by adsorbing a gas sensing material with an adsorbent, therefore, in addition to being used for sensing gas molecules, it also has a supporting effect. According to this, the first electrode 22 and The second electrode 41 can be directly fabricated on the sensing layer 5 to make the overall process of the gas sensor simpler.

Referring to FIGS. 7-9, in FIGS. 7-9, the gap d of the second electrode portions 412 of the gas sensors is 10 μm, 20 μm, and 80 μm in sequence, (I) indicates the first type The current/voltage measurement result of the gas sensor, (II) represents the current/voltage measurement result of the second type gas sensor, wherein the first type gas sensor is the gas sensor of the first embodiment Sensor, the current auxiliary layer 42 is PEDOT, and the material of the sensing layer 5 is PTB7; the structure and material of the second type gas sensor and the first type gas sensor are substantially the same, the only difference is that The second type gas sensor does not cover the current auxiliary layer 42.

Referring to FIGS. 10-12, in FIGS. 10-12, the gap d of the second electrode portions 412 of the gas sensors is 10 μm, 20 μm, and 80 μm in sequence, (III) indicates the third type The current/voltage measurement result of the gas sensor, (IV) represents the current/voltage measurement result of the fourth type gas sensor, wherein the third type gas sensor is the gas sensor of the first embodiment Sensor (the current auxiliary layer 42 is PEDOT), and the material of the sensing layer 5 is P3HT, the structure and material of the fourth type gas sensor and the third type gas sensor are substantially the same, the only difference is that The fourth type gas sensor does not cover the current auxiliary layer 42.

It should be noted that the aforementioned multiple experimental curves (I) to (IV) in FIG. 7 to FIG. 12 respectively represent the current versus voltage measured by multiple gas sensors manufactured under the same process under the same conditions. As a result, from the results of FIG. 7 to FIG. 12, it can be known that under the same applied voltage, regardless of the material of the sensing layer 5, the first-type and third-type gas sensors can have higher currents, showing that the current assist The layer 42 can indeed cooperate with the second electrode 41 to increase the sensing current. In addition, as can be seen from FIG. 7 to FIG. 12, the measurement results between the gas sensors manufactured by the lithography and coating methods and having the same gap d are not different from each other, which is beneficial to mass production.

Referring to FIGS. 13 to 18, FIGS. 13 to 18 are graphs of current changes using the third type gas sensor and the fourth type gas sensor for different concentrations of ammonia gas sensing, in which the gases of FIGS. 13 and 14 The gap d of the second electrode portions 412 of the sensor is 10 microns, and the voltage applied during sensing is 5 volts; the gap d of the second electrode portions 412 of the gas sensor of FIGS. 15 and 16 is 20 microns, The voltage applied during sensing is 5 volts; the gap d of the second electrode portions 412 of the gas sensors of FIGS. 17 and 18 is 80 microns, and the applied voltage during sensing is 10 volts, the difference between FIGS. 13-18 Lies in: the material of the sensing layer 5 of the gas sensor of FIGS. 13, 15 and 17 is P3HT and is covered with the current auxiliary layer 42 (the third type gas sensor); the gas sensor of FIGS. 14, 16 and 18 The material of the sensing layer 5 of the sensor is P3HT, but it does not cover the current auxiliary layer 42 (the fourth type gas sensor).

From the comparison of the sensing currents in FIGS. 13 to 18, it can be seen that the current auxiliary layer 42 can indeed cooperate with the second electrode portions 412 to increase the sensing current, which can make the gas sensor of the present invention at a low voltage It can have a larger sensing current.

Referring to FIGS. 19-24, FIGS. 19-24 are graphs showing the current changes of the first-type gas sensor and the second-type gas sensor for different concentrations of ammonia gas sensing. Among them, the gap d of the second electrode portions 412 of the gas sensor of FIGS. 19 and 20 is 10 μm, and the voltage applied during sensing is 5 volts. The gap d of the second electrode portions 412 of the gas sensor of FIGS. 21 and 22 is 20 μm, and the voltage applied during sensing is 5 volts. The gap d of the second electrode portions 412 of the gas sensor of FIGS. 23 and 24 is 80 μm, and the applied voltage during sensing is 10 volts. The difference between FIGS. 19 to 24 is that: the gas of FIGS. 19, 21, and 23 The material of the sensing layer 5 of the sensor is PTB7, and it covers the current auxiliary layer 42 (the first type gas sensor), and the sensing layer 5 of the gas sensor of FIGS. 20, 22, 24 The material is PTB7, but it does not cover the current auxiliary layer 42 (second type gas sensor).

It can be seen from the comparison of the sensing currents in FIGS. 19 to 24 that under different applied voltages and different gaps d, the current auxiliary layer 42 can cooperate with the second electrode portions 412 to increase the sensing current, and The gas sensor of the present invention can have a larger sensing current at low voltage.

Referring to FIG. 25, a third embodiment of the gas sensor of the present invention includes a substrate 2, at least one insulating block 3, a second electrode 43, a sensing layer 5, and an interface layer 6.

The substrate 2 includes a body 21 and a first electrode 22 formed on the surface of the body 21. The at least one insulating block 3 is disposed on the upper surface 221 of the substrate 2. In the third embodiment, an insulating block 3 is used as an example.

The insulating block 3 includes an insulating body 31 and a plurality of grooves 32. The second electrode 43 is disposed on the surface of the insulating body 31 away from the substrate 2. The interface layer 6 is connected to at least one of the first electrode 22 and the second electrode 41. In the third embodiment, the interface layer 6 covers the second electrode portion 431 and the second electrode 43 at the same time. For example, the insulating body 31 and the exposed surface of the first electrode 22 and the sensing layer 5 will cover the interface layer 6.

Since the materials of the substrate 2, the insulating block 3, the second electrode 43 and the sensing layer 5 of the third embodiment are the same as those of the first embodiment, and the structures of the substrate 2 and the insulating block 3 are also the same as The first embodiment is almost the same, so no more explanation will be given, and only the differences between the third embodiment and the first embodiment will be described below.

In the third embodiment, the second electrode 43 is disposed on the surface of the insulating body 31 away from the first electrode 22 and includes a continuous second electrode portion 431 and a plurality of second electrode portions 431 The surface has a through hole 432 recessed downward, and at least a portion of the through hole 432 communicates with the grooves 32 of the insulating body 31. The interface layer 6 covers the surface of the second electrode portion 431 and extends into the through holes 432, and at the same time extends through the through holes 432 to the grooves 32 and the surface of the first electrode 22 exposed from the grooves 32 In connection, the sensing layer 5 covers the surface of the interface layer 6 and is electrically connected to the first electrode 22 and the second electrode 43.

In the third embodiment of the present invention, by introducing the interface layer 6 between the sensing layer 5 and the first electrode 22 and/or the second electrode 43, the carrier is lifted from the first electrode 22 and/or the second The electrode 43 is injected into the sensing layer 5 and helps the carrier transfer ability, which can effectively reduce the voltage and increase the current.

The material of the interface layer 6 can be selected from poly3-hexylthiophene (P3HT), polydioxyethylthiophene: polyphenylene sulfide (PEDOT: PSS), polydodecyl tetrahydrothiophene (Poly[bis(3- dodecyl-2-thienyl)-2,2'-dithiophene-5,5'-diyl], PQT-12), Polyvinylpyrrolidone (PVP), or a combination of the foregoing.

The carrier transport material may be selected from hole transport materials or electron transport materials, such as but not limited to: poly(3-hexylthiophene-2,5-diyl) (Poly(3-hexylthiophene-2, 5-diyl), referred to as P3HT), poly(3,4-Ethylenedioxythiophene, referred to as PEDOT), polystyrene sulfonate (PSS), 2-(4 -Biphenyl)-5-(-4-tert-butylphenyl)-1,3,4-oxadiazole)( [2-(4-biphenylyl)-5-phenyl-1,3,4-oxadiazole ], referred to as PBD), diphenyldinaphthyl diphenyldiamine (N,N′-Di(1-naphthyl)-N,N′-diphenyl-(1,1′-biphenyl)-4,4′- diamine (NPB), phenyl-C61-butyric acid methyl ester (PCBM), or a combination of the foregoing. The electron transport material is, for example but not limited to: 2,2'-(1,3-phenyl)bis[5-(4-tert-butylphenyl)-1,3,4-oxadiazole (2,2' -(1,3-Phenylene)bis[5-(4-tert-butylphenyl)-1,3,4-oxadiazole], referred to as OXD-7), 8-hydroxyquinolinaluminum (Tris(8-hydroxyquinolinato)aluminium, Referred to as Alq3), 1,3,5-tris(N-phenyl-benzimidazole-2)benzene (2,2',2''-(1,3,5-benzinetriyl)-tris(1-phenyl- 1-H-benzimidazole (TPBi), or 4,7-diphenyl-1,10-phenanthroline (4,7-diphenyl-1,10-phenanthroline, Bphen), triphenylamine derivatives (triphenylamine derivatives , TPD), triazole derivatives (TAZ), or a combination of the foregoing.

The aforementioned third embodiment is manufactured by coating and drying an insulating material 31 on the surface of the first electrode 22 of the substrate 2 before forming a layer on the surface of the insulating block 3 away from the substrate 2 After the nanosphere layer composed of most nanospheres, a conductive layer is formed on the surface of the insulating block 3 forming the nanosphere layer by coating, and then the nanosphere is removed to make the conductive layer A plurality of nano-level through holes 432 are formed to obtain the second electrode 43, and the grooves 32 are formed by etching the insulating body 31. Then, the interface layer 6 is coated on the surface of the second electrode 43, and finally the sensing layer 5 covering the interface layer 6 is formed to obtain the gas sensor.

It should be noted that the interface layer 6 of the present invention can be disposed only between the sensing layer 5 and the second electrode 43 as shown in FIG. 25, or can be disposed only between the sensing layer 5 and the first electrode Between the electrodes 22 (not shown), or between the sensing layer 5 and the first electrode 22 and the second electrode 43 (not shown), as long as they are in accordance with the position of the interface layer 6 Just select the matching carrier transmission material, and its installation position does not need to be particularly limited.

Referring to FIG. 26, in some embodiments, when the second electrode 43 is disposed on the surface of the insulating block 3, an adhesion layer 7 may be further provided between the second electrode 43 and the insulating body 31. The adhesion layer 7 is selected from polymer materials that are polar, can generate hydrogen bonds, and can pass gas molecules and current.

Since the perforations 432 of the second electrode 43 are caused by the nanospheres in the manufacturing process, however, the nanospheres are generally made of polystyrene (PS) or PMMA (polymethyl methacrylate) It is composed of low-polarity polymer materials such as these and has poor adsorption to the insulating block 3. Therefore, it is difficult to control the number of nanospheres formed on the surface of the insulating block 3, resulting in a problem of poor process stability. Therefore, in the present invention, an adhesion layer 7 made of a polar and hydrogen-bonding polymer material is coated on the surface of the insulating block 3 first, and the adhesion layer 7 has the characteristics of polarity and hydrogen bonding. Therefore, The nano-balls can be effectively adsorbed and fixed on the surface of the insulating block 3, and the number of nano-vias 432 formed on the adhesion layer 7 can be stabilized to stabilize the coating process of the subsequent metal layer.

Preferably, the material of the adhesion layer 7 can be selected from poly3-hexylthiophene (P3HT), polydioxyethylthiophene: polyphenylene sulfide (PEDOT: PSS), polydodecyl tetrahydrothiophene (Poly[ bis(3-dodecyl-2-thienyl)-2,2'-dithiophene -5,5'-diyl], PQT-12), Polyvinylpyrrolidone (PVP), or a combination of the foregoing, and the adhesion layer The thickness of 7 is not more than 1 μm.

Referring to FIGS. 27 and 28, FIGS. 26 and 27 are optical micrographs of the holes 432 formed in the second electrode 43 with and without the adhesion layer 7 to form the second electrode 43, respectively. As can be seen from FIG. 27, when the adhesion layer 7 (using P3HT as a material) is present, since the adhesion layer 7 can effectively adsorb the nanospheres, the number of subsequent through holes 432 formed by the second electrode 43 can be effectively increased When forming nanospheres directly on the surface of the insulating block 3, since the nanospheres are not easily adsorbed on the insulating block 3, it can be clearly seen from FIG. 27 that the number of the through holes 432 of the second electrode is obviously insufficient.

Referring to FIG. 29, a fourth embodiment of the gas sensor of the present invention, wherein the relevant materials of the fourth embodiment and the third embodiment are the same, the difference is that the gas sensor has a planar structure. Only the structure of the fourth embodiment is explained as follows.

The fourth embodiment includes the substrate 2, the sensing layer 5, the adhesion layer 7, and the second electrode 43. The sensing layer 5 is directly disposed on the surface of the first electrode 22, the adhesion layer 7 covers the surface of the sensing layer 5 away from the substrate 2, and the second electrode 43 is formed on the surface of the adhesion layer 7 It has a continuous second electrode portion 431 and a plurality of through holes 432 formed downward from the surface of the second electrode portion 431. Since the manufacturing method of each film layer of the fourth embodiment is substantially the same as that of the third embodiment, it will not be repeated here. When using the fourth embodiment for gas sensing, the gas molecules to be sensed can pass through the through holes 432 and be measured by the action of the adhesion layer 7 and the sensing layer 5.

The fourth embodiment of the present invention can also assist the adsorption stability of the nanospheres during the manufacturing process by the adhesion layer 7, so the number of the through holes 432 and the through holes 432 formed by the second electrode 43 can be more stabilized , And the sensing sensitivity of the gas sensor can be more stable.

In addition, it should be noted that, when the constituent material of the adhesion layer 7 is selected from polar materials that can generate hydrogen bonds and the lowest unfilled orbital (LUMO) work function of the material is between the first electrode 22, Between the second electrode 43 and the sensing layer 5, the adhesion layer 7 also has the ability to enhance carrier injection from the second electrode 43 into the sensing layer 5 and help carrier transmission, which can further reduce the voltage and Increase current.

In some embodiments, the second electrodes 41 and 43 may be composed of a single layer of metal or alloy metal conductive material (such as a single layer of aluminum metal), or may be composed of multiple layers as shown in FIG. 30 The conductive material is stacked. FIG. 30 illustrates the second electrode 43 as a double-layer structure having a first electrode layer 433 and a second electrode layer 434 using the fourth embodiment as an example. The first electrode layer 433 is interposed between the sensing layer 5 and the second electrode layer 434, and the material is selected from the transparent conductive metal oxide having a work function between the first electrode 22 and the second electrode layer 434 Conductive material between different metals. For example, when the second electrode layer 434 is aluminum, the material of the first electrode layer 433 may be molybdenum trioxide (MoO ₃ ). By providing the first electrode layer 434 composed of molybdenum trioxide, the work function difference between the second electrode layer 434 (aluminum) and the second electrode 22 (conductive metal oxide) can be reduced to increase current injection The efficiency of the gas sensor further improves the efficiency of the gas sensor.

Referring to FIGS. 31 to 33, FIGS. 31 to 33 are the current-voltage measurement results of the gas sensor mainly based on the structure of the gas sensor of the third embodiment. In FIGS. 31 to 33, the interface layer 6 of the specific examples 1, 2, and 3 is 3-hexylthiophene (P3HT), and the difference is that the materials of the sensing layer 5 are TFB, PBDTTT-CT, and PBDTTT-FET respectively, and the comparison Examples 1, 2, and 3 are different from the specific examples 1, 2, and 3 in that these comparative examples do not have the interface layer 6.

As can be seen from FIGS. 31 to 33, when the interface layer 6 is introduced into the gas sensor (specific examples 1 to 3), no matter what the material of the sensing layer 5 is, the interface layer 6 is not present (Comparative Example 1 ~3) The gas sensor can measure a large current under a small driving voltage.

In addition, referring again to FIGS. 34 and 35, FIGS. 34 and 35 respectively store the gas sensors of the specific example 2 and the comparative example 2 under air for different times (2, 7, 9, 15, 19, 23 days) The result of ammonia gas sensing. As can be seen from the results of Figs. 34 and 35, the sensing current of Comparative Example 1 (single-layer device) will continue to decrease with the storage time of the device, while the current sense of Specific Example 1 (double-layer device) The measured value can maintain stable IV characteristics between 7-22 days of storage, showing that the double-layer device is relatively stable under air and is not easy to deteriorate, and can maintain stable electrical characteristics.

Next, referring again to FIGS. 36 to 39, FIGS. 36 and 37 are the specific example 2 (sensing layer: PBDTTT-CT, interface layer P3HT) of the third embodiment and comparative example 2 (sensing layer: PBDTTT- CT) gas sensor is stored in the air under different time (2, 7, 9, 15, 19, 23 days) to different concentrations (100, 300, 500, 1000ppb) ammonia gas reaction results. 38 and 39 use the gas sensors of the specific example 2 and the comparative example 2 after different storage times (2, 7, 9, 15, 19, 23 days) to different concentrations (100, 300, 500 , 1000ppb) Ammonia gas reaction with time calibration curve. It can be seen from the results of Figs. 36-39 that the sensing current of the single-layer device (Comparative Example 1, Figs. 37 and 39) for different concentrations of gas will continue to decrease as the storage time of the device becomes longer. However, the current sensing value of the double-layer device (specific example 2, Figures 36 and 38) after 7 days of storage (between 22 days) maintains a consistent response to different concentrations of ammonia gas and has a stable IV The characteristics also further confirm that the double-layer element is relatively stable under air and is not easily deteriorated.

Referring to FIGS. 40 to 45, FIGS. 40 to 42 respectively use the specific examples 1 to 3 of the third embodiment to sense different concentrations of ammonia gas (100ppb, 300ppb, 500ppb) under the condition of a driving voltage of 5V. Measurement results of the sensed current. Figs. 43-45 are the results of sensing currents using the comparative examples 1~3, respectively, under the condition of a driving voltage of 8V to sense different concentrations of ammonia gas (100ppb, 300ppb, 500ppb). As can be seen from the results of FIGS. 40 to 45, compared with the comparative examples 1 to 3, the gas sensor of the present invention can effectively increase the electron injection efficiency by adding the interface layer 6, therefore, it can be used under different active layer materials. By increasing the operating current, the gas sensor of the present invention can measure a good sensing current at a lower driving voltage.

Referring again to FIGS. 46 to 49, FIGS. 46 to 49 are planar gas sensors shown in FIG. 30, which sense different concentrations of ammonia gas (100ppb, 300ppb, 500ppb) under an applied voltage of 5V. The measured current measurement results, and the multiple experimental curves of each graph respectively represent the results of measuring the current versus voltage of the multiple gas sensors manufactured under the same process under the same conditions. The materials of the first electrode layer 433 and the second electrode layer 434 of the second electrode 43 are molybdenum oxide and aluminum, respectively, and the material of the adhesion layer 7 is P3HT. The difference is that the material of the sensing layer 5 is P64, respectively. PBDTTT-CT, TFB, and PTB7.

Since the fourth embodiment has the adhesion layer 7, and the adhesion layer 7 is selected from P3HT materials that can simultaneously enhance the adsorption of nanospheres and have a work function between the first electrode layer 431 and the sensing layer 5 And the second electrode 43 is composed of a structure of two electrode layers, therefore, by providing the adhesion layer 7 and the second electrode 43 composed of aluminum and molybdenum trioxide, the current value can be further improved Therefore, from the results of FIG. 46 to FIG. 49, it can be known that the gas sensor of the fourth embodiment can also measure a large current value even when the voltage is low. In addition, as can be seen from FIGS. 46 to 49, the current response values measured by different gas sensors are not significantly different, indicating that the gas sensor in this case also has good process stability.

In summary, the gas sensor of the present invention not only improves the current during sensing and increases the sensitivity of the sensing by using the second electrode portions 412 with the grid structure and the current auxiliary layer 42 Compared with conventional gas sensors that use nanospheres to make porous electrodes, the present invention not only has a simpler manufacturing process and is easier to control, but is also beneficial to mass production. In addition, the present invention also forms a gas sensor with a double-layer structure by providing the interface layer 6, in addition to using the interface layer 6 to increase carrier injection efficiency, and to increase the operating current of the gas sensor, The double-layer structure achieves the characteristics of being more stable under air and less susceptible to deterioration, thereby improving the stability of the sensing element. Moreover, the adhesion layer 7 can be further utilized to enhance the ability to adsorb nano-microspheres, which not only improves the stability of the process but also makes the second electrode 43 subsequently made more porous. Moreover, the second electrode is used The structure and material selection of 41 and 43 can also further increase the current value to improve the sensing efficiency of the gas sensor, so it can indeed achieve the purpose of cost invention.

However, the above are only examples of the present invention, and should not be used to limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still classified as This invention covers the patent.

2: substrate 42: current auxiliary layer 21: Body 43: Second electrode 22: First electrode 431: Second electrode part 221: upper surface 432: perforation 3: Insulation block 433: first electrode layer 31: Insulating body 434: Second electrode layer 311: Insulation body 5: Sensing layer 32: groove 511: first surface 4: Second electrode unit 512: Second surface 41: Second electrode 6: Interface layer 411: first electrode part 7: adhesion layer 412: second electrode part d: gap

Other features and functions of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a schematic side sectional view illustrating a first embodiment of the gas sensor of the present invention; FIG. 2 is a A schematic top view illustrating one of the second electrodes of the first embodiment; FIG. 3 is a schematic side sectional view illustrating another positional relationship between the sensing layer, the current auxiliary layer, and the second electrode; FIG. 4 is a perspective view , To illustrate other implementations of the insulating blocks in the gas sensor; FIG. 5 is a schematic cross-sectional view illustrating another configuration of the second electrode; FIG. 6 is a schematic illustrating the gas sensor of the present invention A second embodiment of the sensor; FIG. 7 is a current-voltage relationship diagram illustrating the first type gas sensor and the second type gas sensor, where the gap between the second electrode portions is 10 microns , The current changes when different voltages are applied; FIG. 8 is a current-voltage relationship diagram illustrating the first type gas sensor and the second type gas sensor, wherein the gap between the second electrode portions is 20 microns Figure 9 is a current vs. voltage relationship diagram illustrating the first type gas sensor and the second type gas sensor, wherein the gap between the second electrode portions is 80 In the case of micrometers, the current changes when different voltages are applied; FIG. 10 is a current-voltage relationship diagram illustrating the third type gas sensor and the fourth type gas sensor, in which the gap between the second electrode portions is At 10 microns, the current changes when different voltages are applied; FIG. 11 is a current-voltage relationship diagram illustrating the third type gas sensor and the fourth type gas sensor, wherein the gaps between the second electrode portions When it is 20 microns, the current changes when different voltages are applied; FIG. 12 is a current-voltage relationship diagram illustrating the third type gas sensor and the fourth type gas sensor, in which the second electrode When the gap is 80 microns, the current changes when different voltages are applied; FIG. 13 is a graph of current versus time, illustrating a gas sensor covering the current assist layer, and the gap distance between the second electrode portions is 10 microns, When the sensing layer is P3HT, the current change sensed by ammonia gas; FIG. 14 is a graph of current versus time, illustrating a gas sensor without a current auxiliary layer, and the gap between the second electrode portions is 10 μm 1. When the sensing layer is P3HT, the current change sensed by ammonia gas; FIG. 15 is a current vs. time diagram illustrating a gas sensor covering the current auxiliary layer, and the gap distance between the second electrode portions is 20 When the micron and the sensing layer are P3HT, the current change sensed by ammonia gas; FIG. 16 is a current vs. time diagram illustrating the gas sensor without covering the current auxiliary layer, and the gap distance between the second electrode portions is When the sensing layer is P3HT at 20 microns, the current change sensed by the ammonia gas; FIG. 17 is a current vs. time diagram illustrating the gas sensor covering the current auxiliary layer, and the gap between the second electrode portions When the sensing layer is 80 microns and the sensing layer is P3HT, the current change sensed by ammonia gas; FIG. 18 is a graph of current versus time, illustrating When there is no gas sensor covering the current auxiliary layer, and the gap distance between the second electrode portions is 80 microns, and the sensing layer is P3HT, the current change to the ammonia gas is sensed; FIG. 19 is a graph of current versus time, Explain that there is a gas sensor covering the current auxiliary layer, and when the gap distance between the second electrode parts is 10 microns, and the sensing layer is PTB7, the current change of the ammonia gas sensing; FIG. 20 is a current vs. time diagram , Illustrating a gas sensor without a current auxiliary layer, and when the gap distance between the second electrode portions is 10 μm and the sensing layer is PTB7, the current change for ammonia gas sensing; FIG. 21 is a current versus time relationship Fig. 2 shows the current sensor for ammonia gas covered by a gas sensor covering the current auxiliary layer, and the gap distance between the electrode parts is 20 microns and the sensing layer is PTB7; Fig. 22 is a graph of current versus time , Explain that there is no gas sensor covering the current auxiliary layer, and the gap distance between the electrode parts is 20 microns, and the sensing layer is PTB7, the current change of the ammonia gas sensing; FIG. 23 is a graph of current versus time, Explain that there is a gas sensor covering the current auxiliary layer, and the gap distance between the electrode parts is 80 microns, and the sensing layer is PTB7, the current change of the ammonia gas sensing; FIG. 24 is a graph of current versus time, illustrating There is no gas sensor covering the current auxiliary layer, and the gap distance between the electrode parts is 80 microns, and the sensing layer is PTB7, the current change for ammonia gas sensing; FIG. 25 is a schematic diagram illustrating the gas sensing of the present invention A third embodiment of the device; FIG. 26 is a schematic diagram illustrating other embodiments of the gas sensor of the present invention; FIG. 27 is an optical microscope photograph illustrating the results of adsorption of nanospheres using an adhesion layer; FIG. 28 Is an optical microscope photograph illustrating the adsorption results of nanospheres without the use of an adhesion layer; FIG. 29 is a schematic diagram illustrating a fourth embodiment of the gas sensor of the present invention; FIG. 30 is a schematic diagram illustrating the gas sensing of the present invention Other implementations of the second electrode of the detector; FIG. 31 is a current-voltage relationship diagram illustrating the current changes of the specific example 1 and the comparative example 1. FIG. 32 is a current-voltage relationship diagram illustrating the specific example 2 and the current change of the comparative example 2; FIG. 33 is a current-voltage relationship diagram illustrating the current change of the specific example 3 and the comparative example 3; FIG. 34 is a current-voltage relationship diagram illustrating the specific example 2 of Changes in current for different storage days; Figure 35 is a graph of current versus voltage, illustrating the current variation of Comparative Example 2 during different storage days; Figure 36 is a graph of storage days vs. response rate, illustrating the difference between this specific example 2 Response rate of storage days to different concentrations of gas; Figure 37 is a relationship between storage days and reaction rate, illustrating the reaction rate of Comparative Example 2 to different concentrations of gases at different storage days; Figure 38 is a response of gas concentration to reaction Rate diagram, illustrating the response rate of this specific example 2 to gases of different concentrations at different storage days; Figure 39 is a graph of gas concentration versus response rate, illustrating the comparison example 2 to different concentrations of gas at different storage days Fig. 40 is a graph of current versus time, illustrating the use of the specific example 1 of the third embodiment to sense the current change of ammonia; Fig. 41 is a graph of current versus time, illustrating the use of the third embodiment The specific example 2 of the example senses the current change of ammonia gas; FIG. 42 is a graph of current versus time, illustrating that the specific example 3 of the third embodiment senses the current change of ammonia gas; FIG. 43 is a current pair A time-dependent diagram illustrating the current change of the ammonia gas sensed by the comparative example 1 of the third embodiment; FIG. 44 is a current-time diagram illustrating the sensed ammonia gas by the comparative example 2 of the third embodiment FIG. 45 is a graph of current versus time, illustrating the current variation of sensing ammonia gas using the comparative example 3 of the third embodiment; FIG. 46 is a graph of current versus time, illustrating the use of the fourth embodiment. Example structure, the sensing layer material is P64, and the current change of the ammonia gas is sensed; FIG. 47 is a diagram of current versus time, illustrating the structure of the fourth embodiment, the sensing layer material is PBDTTT-CT, which senses ammonia gas. FIG. 48 is a current-time relationship diagram illustrating the use of the structure of the fourth embodiment, the sensing layer material is TFB, sensing ammonia current changes; and FIG. 49 is a current-time relationship diagram illustrating the use of In the structure of the fourth embodiment, the sensing layer material is PTB7, which senses the current change of ammonia gas.

2: substrate

21: Ontology

22: First electrode

221: upper surface

3: Insulation block

31: Insulation body

32: groove

4: Second electrode unit

41: Second electrode

412: Second electrode part

42: Current auxiliary layer

5: Sensing layer

d: clearance

Claims (21)

A gas sensor includes: a first electrode; at least one insulating block provided on one surface of the first electrode; a sensing layer provided on the first electrode, which can communicate with a predetermined gas to be measured Molecular action; and a second electrode unit, which is electrically connected to the first electrode in cooperation with the sensing layer, includes at least a second electrode portion and a current auxiliary layer, the at least one second electrode portion is disposed on the sensing layer and On one of the at least one insulating block, the current auxiliary layer is composed of a conductive organic material, at least partially in contact with and overlaps with the sensing layer, and can cooperate with the at least one second electrode portion and the sensing layer To conduct current. The gas sensor according to claim 1, wherein the at least one insulating block includes an insulating body, and at least one surface extending from the insulating body away from the first electrode toward the first electrode, and causing the first In the groove exposed by the electrode, the sensing layer extends into the at least one groove and is connected to the first electrode. The gas sensor according to claim 2, wherein the at least one insulating block has a plurality of grooves, and the grooves are spaced apart from each other via the insulating body. The gas sensor according to claim 2, wherein the at least one insulating block has a plurality of grooves, the insulating body has a plurality of insulating body parts, the grooves communicate with each other, and the insulating body parts pass through the The grooves are spaced from each other. The gas sensor according to claim 1 or 2, wherein the second electrode unit has a plurality of second electrode portions disposed at a gap from each other. The gas sensor according to claim 5, wherein the at least one second electrode portion is located on a surface of the at least one insulating block away from the first electrode. The gas sensor according to claim 2, wherein the second electrode unit has a plurality of second electrode portions disposed on the surface of the insulating body away from the first electrode with a gap therebetween, and the second electrode portions At least a part of the gap communicates with the at least one groove. The gas sensor according to claim 7, wherein the sensing layer and the current auxiliary layer cover the at least one insulating block and extend to the surface of the first electrode, and the sensing layer and the current auxiliary layer will Extend to the grooves. The gas sensor according to claim 1 or 2, wherein the second electrode portions are located on the surface of the insulating block, the sensing layer covers the second electrode portions, and the current auxiliary layer covers the sensing Floor. The gas sensor according to claim 1 or 2, wherein the sensing layer directly covers the at least one insulating block and the surface of the first electrode, the current auxiliary layer covers the sensing layer, and the second electrodes The portion is disposed on the surface of the current auxiliary layer away from the at least one insulating block. The gas sensor according to claim 1 or 2, wherein the sensing layer and the current auxiliary layer cover the at least one insulating block and extend to the surface of the first electrode, and the at least one second electrode portion is provided with the The sensing layer is spaced apart from the at least one insulating block in the horizontal direction. A gas sensor includes: a sensing layer that can interact with a predetermined gas molecule to be measured; a first electrode formed on one surface of the sensing layer; a second electrode unit formed on the sensor The measurement layer reverses the surface of the first electrode, and can be electrically connected with the first electrode, including a plurality of second electrode portions provided on the surface of the sensing layer away from the first electrode and spaced apart from each other in a gap; and A current auxiliary layer covering the sensing layer and the exposed surfaces of the second electrode parts is composed of a conductive organic material, and the gas molecules to be measured can pass through the current auxiliary layer. The gas sensor according to claim 1 or 12, wherein the gap between the second electrode portions is between 1 micron and 200 microns. The gas sensor according to claim 1 or 12, wherein the material of the current auxiliary layer is selected from polydioxyethylthiophene, polyphenyl polystyrene sulfonic acid, polypyrrole, polythiophene, poly Phenyl sulfide, polyaniline, polyacetylene, or polyphenylacetylene. A gas sensor includes: a first electrode; at least one insulating block disposed on one surface of the first electrode, the at least one insulating block includes an insulating body, and a plurality of insulating bodies away from the first The surface of the electrode extends toward the first electrode and exposes the groove of the first electrode; a second electrode, made of metal or alloy metal, is disposed on the surface of the at least one insulating block away from the first electrode, And can be electrically connected with the first electrode, including a second electrode part, and a plurality of perforations recessed downward from the surface of the second electrode part, and at least part of the perforations communicate with the grooves; an interface Layer, connected to at least one of the first electrode and the second electrode; and a sensing layer, covering the interface layer, and electrically connected to the first electrode and the second electrode, made of organic materials, can It interacts with a predetermined gas molecule and produces an electrical change. The interface layer is selected from organic carrier transport materials. When the carrier transport material is a hole transport material, the highest work function filled in the rail Between the first and second electrodes and the sensing layer, when the carrier transport material is an electron transport material, the work function of the lowest unfilled rail is between the first and second electrodes and the sensing layer . The gas sensor according to claim 15, wherein the grooves are spaced apart from each other via the insulating body. The gas sensor according to claim 15, wherein the grooves communicate with each other, the insulating body has a plurality of insulating body portions, and the insulating body portions are spaced apart from each other via the grooves. The gas sensor according to claim 15, wherein the material of the interface layer is selected from P3HT, PQT-12, PEDOT:PSS, or a combination of the foregoing. A gas sensor includes: a first electrode; a sensing layer, which is provided on one surface of the first electrode, is composed of an organic material, and can interact with a predetermined gas molecule and produce electrical changes; an adhesion A layer covering the surface of the sensing layer away from the first electrode, selected from a polar polymer material capable of generating hydrogen bonds and allowing gas molecules and current to pass through; and a second electrode disposed on the adhesion layer, including An electrode portion and a plurality of through holes recessed from the surface of the electrode portion toward the adhesion layer and exposing the adhesion layer. The gas sensor according to claim 19, wherein the thickness of the adhesion layer is not more than 1 μm. The gas sensor according to claim 19, wherein the material of the adhesion layer is selected from P3HT, PQT-12, PEDOT: PSS, or a combination of the foregoing.

Images