TW201938470A - Suspended wafer cassette positioning device comprising a carrying unit, a fixing unit, a driving unit, a linking unit, and a locking unit - Google Patents

Abstract

A suspended wafer cassette positioning device, suitable for being mounted on an elevated rail, comprises a carrying unit, a fixing unit, a driving unit, a linking unit, and a locking unit. The carrying unit includes a main carrier fixed to the elevated rail; the fixing unit includes a first fixing seat and a second fixing seat that are fixed to the bottom side of the main carrier; the driving unit includes a power member fixed to the first fixing seat, the power member has a driving rod; the linking unit has two linkage rods driven by the driving rod; the locking unit includes a pivoting seat pivotally coupled to the second fixing seat and linked by the two linkage rods, and a crimping block that extends from the pivoting seat and moves between an unlocking position and a locking position with respect to a locking plate of the wafer cassette. Accordingly, the stability of the wafer cassette on the elevated rail can be improved to maintain the quality of the wafer.

Description

Hanging wafer box positioning device

The invention relates to a semiconductor device, in particular to a hanging wafer box positioning device.

In order to save space and improve operating efficiency, wafer fabs mainly use overhead rails to transport wafer boxes. Because wafer boxes are only temporarily placed on the elevated rails, the overall stability is poor, so they are impacted by external forces or filled with gas At this time, the wafer box is prone to shake, which seriously affects the quality of the wafer placed in the wafer box.

Therefore, an object of the present invention is to provide a suspension type wafer box positioning device which can improve the stability of a wafer box on an elevated rail to maintain the quality of wafers in the wafer box.

Therefore, the hanging wafer box positioning device of the present invention is suitable for being mounted on an elevated rail. The wafer box has a box body and a positioning plate fixed to the bottom of the box body and spaced from each other. The positioning device includes a A carrying unit, a fixed unit, a driving unit, a linkage unit and a locking unit.

The load-bearing unit includes a main load plate fixed on the elevated rail and located on the bottom side of the positioning plate; the fixation unit includes a first fixing seat and a first fixing seat arranged and fixed on the bottom side of the main load plate in a left-right direction. Two fixing bases, the second fixing base having a first body defining a first accommodating space open toward the first fixing base, and an extension from the first body in the left-right direction away from the first fixing base The driving unit includes a power piece fixed to the first fixing base, the power piece has a driving rod located in the first receiving space and linearly moving in the left-right direction; the link unit includes the driving unit The front and back sides of the two fixing bases are connected by two driving rods; the locking unit includes a pivot base pivotally connected to the pivot block and linked by the two links, and a pivot base A buckling block bent and extending toward the top and moving relative to the positioning plate between an unlocked position and a locked position.

The effect of the present invention is that locking the positioning plate by the buckling block can improve the stability of the wafer box on the elevated track, and can maintain the quality of the wafer placed in the box of the wafer box. .

The present invention will be described in detail below with reference to the drawings and embodiments. Before the present invention is described in detail, it should be noted that the relative position terms used in the following description, such as "front and back direction X", "left and right direction Y", The top-bottom direction Z "is based on the orientation shown in each figure and the normal use orientation, and similar components are represented by the same number.

1 to 4, the hanging wafer box positioning device according to the present invention is suitable for being mounted on an elevated rail 10. The wafer box 20 has a box body 21, and a spaced-apart one fixed to the bottom of the box body 21. A positioning plate 22 and a plurality of inflation nozzles 23 installed in the box body 21 for filling nitrogen into the box body 21. The positioning plate 22 has a slot 221 and a plurality of positioning holes 222 that are open to the left. The first embodiment of the invention includes a carrying unit 30, a fixing unit 40, a driving unit 50, a linkage unit 60, and a locking unit 70.

The carrying unit 30 includes a sub-carrier plate 31 fixed on the elevated rail 10 and a main carrier plate 32 fixed on the top side of the sub-carrier plate 31. The main carrier plate 32 is located on the positioning plate 22 and the sub-carrier. The plates 31 are spaced apart from each other and have an opening 321 aligned with the slot 221.

It is worth noting that the present invention can omit the sub-carrier plate 31 and directly fix the main carrier plate 32 on the elevated rail 10.

A plurality of shock-absorbing members 111 and a plurality of guide members 112 are installed on the sub-carrier plate 31. In addition to providing a shock-absorbing function, the shock-absorbing members 111 are also provided with the main carrier plate 32 separated from the sub-carrier plate 31. The guiding members 112 pass through the main carrier plate 32 for the positioning holes 222 of the positioning plate 22 to be nested, so that the positioning plate 22 can be accurately positioned. Since the structures of the shock absorbing members 111 and the guide members 112 are easily understood by those with ordinary knowledge in the technical field to which the present invention pertains, and they are not the features of the present invention, their detailed structures are not described herein.

Referring to FIG. 3 to FIG. 6, the fixing unit 40 includes a first fixing base 41 and a second fixing base 42, which are fixedly arranged on the bottom side of the main carrier plate 32 in an aligned manner along the left-right direction Y. The second fixing base 42 has a first body 422 defining a first receiving space 421 that is open toward the first fixing base 41, and two long bars disposed along the left-right direction Y on the first body 422 and communicating with the first receiving space 421. The guide hole 423 and a pivot block 424 extending from the first body 422 in the left-right direction Y away from the first fixing seat 41.

The driving unit 50 includes a power piece 51, a universal joint 52, and an adjusting nut 53. The power piece 51 in this embodiment is a hydraulic cylinder or a pneumatic cylinder. A cylinder 511 and a driving rod 512 assembled in the cylinder 511 and located in the first receiving space 421 and capable of linear movement in the left-right direction Y. The universal joint 52 is sleeved and connected to the driving rod 512 and is located in the In the first receiving space 421, the adjusting nut 53 is screw-locked outside the driving rod 512 and abuts against the universal joint 52, and the position of the universal joint 52 can be fine-tuned by rotating the adjusting nut 53.

The linkage unit 60 includes two links 61, a first connecting shaft 62, two second connecting shafts 63, and two first retaining rings 64. The two links 61 are located on the front side, the rear side of the second fixing base 42, and are The driving rod 512 is driven. Each link 61 has a driven section 611 connected to the driving rod 512 and a linking section 612 opposite to the driven section 611 and adjacent to the pivot block 424. The first connection The shaft 62 penetrates between the driven section 611 of the two connecting rods 61, the two elongated guide holes 423, and the universal joint 52 along the front-rear direction X, and the two first retaining rings 64 are buckled on the first The two ends of the shaft 62 are connected and the two driven sections 611 are blocked, whereby the two links 61 are connected to the driving rod 512 and can be driven by the driving rod 512. The first connecting rod 62 and the two The cooperation of the long guide hole 423 can improve the linear movement accuracy of the driving rod 512, and the universal joint 52 can improve the smooth driving of the first connecting shaft 62 and the two connecting rods 61 by the driving rod 512. With the two first retaining rings 64, the first connecting shaft 62 and the two connecting rods 61 can be prevented from disengaging.

The lock unit 70 includes a pivot base 71, a buckle pressing block 72, a pivot shaft 73, two positioning screws 74, and four second buckle rings 75.

The pivot base 71 is pivotally connected to the pivot block 424 and is linked by the two links 61. The pivot base 71 has a second body 712 defining a second receiving space 711 for accommodating the pivot block 424. The second body 712 communicates with two pivot holes 713, two perforations 714 of the second receiving space 711, and two screw holes 715 communicating with the two perforations 714. The second accommodation space 711 of the pivot base 71 houses the pivot. Block 424, the pivot shaft 73 is inserted between the two pivot holes 713 and the pivot block 424 along the front-rear direction X, thereby enabling the pivot base 71 to use the pivot shaft 73 as a support axis relative to the pivot block 424 turns, and then inserts the two second connecting shafts 63 between the linking section 612 of the two connecting rods 61 and the perforations 714 of the second body 712, so that the pivot base 71 and the two connecting rods can be made. 61 is connected and can be rotated by the two links 61. Locking the two positioning screws 74 into the two screw holes 715 and abutting the second second connecting shaft 63 can prevent the two second connecting shaft 63 from rotating. Improving the precision of the linkage of the two links 61 to the pivot base 71, placing two second retaining rings 75 on the second connecting shaft 63 and blocking the linkage section 612 of the two links 61, To prevent the two from the second connecting shaft 63 and the second link 61.

The buckling block 72 bends and extends from the second body 712 of the pivot base 71 toward the top, and moves between an unlocking position (see FIG. 7) and a locking position (see FIG. 8) relative to the positioning plate 22. In this embodiment, the buckling block 72 passes through the opening 321 of the second carrier plate 32 and the slot 221 of the positioning plate 22 and moves between the unlocked position and the locked position.

In use, referring to FIG. 7, when the retaining block 72 is located in the unlocked position, the driving lever 512 is in a retracted state and the retaining block 72 is located in the opening 321 of the main carrier board 32. Referring to FIGS. 1 and 8, If the wafer cassette 20 is to be locked, the stability of the wafer cassette 20 on the elevated rail 10 is improved, and the driving rod 512 is extended to drive the two links 61 to the left, and then the two links 61 push the pivot base 71, so that the pivot base 71 rotates clockwise with the pivot 73 as a supporting shaft, and then the buckle block 72 rotates synchronously and passes through the opening 321 and the slot 221 to buckle Pressing the positioning plate 22, that is, moving from the unlocked position to the locked position, so that the stability effect of the wafer cassette 20 on the elevated rail 10 can be improved, see FIG. 1, FIG. 8, and FIG. 7, To download the wafer cassette 20 from the elevated track 10 to the next work site, retract the drive rod 512 to drive the two links 61 to the right, and then the two links 61 pull the pivot seat 71, causing the pivoting base 71 to rotate counterclockwise with the pivot 73 as a supporting shaft, so that the buckle block 72 Synchronously rotate and pass through the opening 321 and the slot 221 to disengage from the positioning plate 22, that is, move from the locking position to the unlocking position.

It is worth noting that, to adjust the locking angle of the retaining block 72 to the positioning plate 22, simply turning the adjusting nut 53 can push the universal joint 52 to move relative to the driving rod 512, and through the The interlocking unit 60 interlocks the buckle block 72 to rotate, thereby generating the effect of adjusting the angular position of the buckle block 72.

In summary, according to the first embodiment of the hanging wafer box positioning device of the present invention, the buckling block 72 can lock or unlock the positioning plate 22 of the wafer box 20, which can improve the wafer box. The stable effect of 20 on the elevated rail 10 can maintain the quality of the wafers placed in the box 21 of the wafer box 20 even if the wafer box 20 is impacted by external forces or is filled with gas. At the same time, the wafer quality can be increased. Air tightness during inflation to improve inflation efficiency.

Referring to FIG. 9 to FIG. 12, the second embodiment of the hanging wafer box positioning device of the present invention is also installed on an elevated rail 10 and located on the bottom side of a wafer box 20. The wafer box 20 also includes a box body. 21. A positioning plate 22 and a plurality of inflatable nozzles 23.

The second embodiment also includes a carrying unit 30, a fixing unit 80, a driving unit 50, a linkage unit 90, and a locking unit 100.

The carrying unit 30 also includes a sub-carrier plate 31 and a main carrier plate 32. The main carrier plate 32 has an opening 321 aligned with a slot 221 of the positioning plate 22.

The fixing unit 80 includes a first fixing base 81 and two third fixing bases 82 which are aligned and locked on the bottom side of the main carrier plate 32 along the left-right direction Y. The two third fixing bases 82 are along the front-rear direction X Arranged and spaced from each other, each of the third fixing bases 82 is T-shaped when viewed from the front side, and has a lock block 821, a pivot block 822 extending from the lock block 821 toward the bottom side, and a pivot block 822 provided thereon. And a long guide hole 823 extending along the top-bottom direction Z.

The driving unit 50 also includes a power piece 51 fixed on the first fixing base 81 and extending in the left-right direction Y, a set of universal joints 52 of a driving rod 512 placed on the power piece 51, and a screw Locked on the driving rod 512 and abutting the adjusting nut 53 of the universal joint 52.

The linkage unit 90 includes two links 91, a first connecting shaft 92, a second connecting shaft 93, two first retaining rings 94, and two second retaining rings 95. The first connecting shaft 92 extends along the front-rear direction X. And has a body 921 connected to the universal joint 52 and two sets of posts 922 extending from the front end and the rear end of the body 921 to reduce the diameter. Each link 91 has a set of posts 922 The driven section 911 connected to the first connecting shaft 92 and a linked section 912 opposite to the driven section 911. The two first retaining rings 94 are respectively fastened to the two sets of posts 922 and block the two The driven section 911 is used to connect the two links 91 to the first connecting shaft 92 and can be driven by the driving rod 512.

The locking unit 100 includes a pivot base 101, a buckle block 102 extending from the pivot base 102 toward the top end and bent toward the right end, and a pivot shaft passing through the pivot base 101 along the front-rear direction X. 103.

The second connection shaft 93 of the linkage unit 90 is inserted into the pivot base 101 along the front-rear direction X and is located on the bottom side of the pivot shaft 103. The linkage section 912 of the two links 91 is sleeved and connected to the second connection shaft. The front and rear sections of 93, and then attaching the two second retaining rings 95 to the front and rear sections of the second connecting shaft 93 and blocking the two linking sections 912 can make the two links 91 through the second connection The shaft 93 is connected to the pivot base 101, and then the pivot shaft 103 is inserted into the long guide holes 823 of the second and third fixed bases 82 and the pivot base 101, so that the pivot base 101 can be pivoted by the pivot base 101. The shaft 103 is a rotating shaft that rotates relative to the second and third fixing bases 82 and moves the buckle block 102 relative to the positioning plate 22 between an unlocked position (see FIG. 12) and a locked position (see FIG. 13).

In use, referring to FIG. 12, when the withholding block 102 is in the unlocked position, the driving lever 512 is in a retracted state and the withholding block 102 is located in the opening 321 of the main carrier plate 32. Referring to FIGS. 9 and 13, If the wafer cassette 20 is to be locked, the stability of the wafer cassette 20 on the elevated rail 10 is improved, and the driving rod 512 can be extended to drive the two connecting rods 91 toward the first connecting shaft 92 Move to the left, then the two connecting rods 91 push the pivot base 101 through the second connecting shaft 93, so that the pivot base 101 rotates clockwise with the pivot 103 as the rotation axis, and then synchronize the buckle block 102 Rotate and pass through the opening 321 and the slot 221 to buckle the positioning plate 22, that is, move from the unlocked position to the locked position. In this way, the wafer cassette 20 can be raised on the elevated track 10 Refer to FIGS. 9, 13, and 12 for downloading and transferring the wafer cassette 20 from the elevated track 10 to the next operation site. The drive rod 512 can be retracted to drive the two connecting rods 91. Move to the right, and then the two connecting rods 91 pull the pivot base 101, so that the pivot base 101 uses the pivot axis. 103 generates a counterclockwise rotation for the rotation shaft, and then the buckle block 102 rotates synchronously and passes through the opening 321 and the slot 221 to disengage from the positioning plate 22, that is, moves from the lock position to the unlock position.

The second embodiment of the hanging wafer cassette positioning device of the present invention can produce the same functions and advantages as the first embodiment by different structures.

However, the above are only examples of the present invention. When the scope of implementation of the present invention cannot be limited in this way, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the content of the patent specification of the present invention are still Within the scope of the invention patent.

10‧‧‧ elevated track

20‧‧‧ Wafer Box

21‧‧‧Box

22‧‧‧ Positioning plate

221‧‧‧Slotted

23‧‧‧ inflatable mouth

30‧‧‧bearing unit

31‧‧‧ Sub Carrier Board

32‧‧‧ main carrier

321‧‧‧ opening

40‧‧‧Fixed unit

41‧‧‧First mount

42‧‧‧Second fixing seat

421‧‧‧First accommodation space

422‧‧‧First Body

423‧‧‧ long guide hole

424‧‧‧ Pivot Block

50‧‧‧Drive unit

51‧‧‧Power Parts

511‧‧‧cylinder

512‧‧‧Driver

52‧‧‧Universal joint

53‧‧‧adjust nut

60‧‧‧Linked unit

61‧‧‧ connecting rod

611‧‧‧Driven section

612‧‧‧linking section

62‧‧‧first connecting shaft

63‧‧‧Second connecting shaft

64‧‧‧First buckle

70‧‧‧Locking unit

71‧‧‧ Pivot Block

711‧‧‧Second accommodation space

712‧‧‧Second Ontology

713‧‧‧ Pivot

714‧‧‧perforation

715‧‧‧screw holes

72‧‧‧Deduction block

73‧‧‧ Pivot

74‧‧‧ Set screw

75‧‧‧Second buckle

80‧‧‧Fixed unit

81‧‧‧The first fixed seat

82‧‧‧third mount

821‧‧‧lock block

822‧‧‧ Pivot Block

823‧‧‧Long guide hole

90‧‧‧ linkage unit

91‧‧‧ connecting rod

911‧‧‧driven section

912‧‧‧linking section

92‧‧‧first connecting shaft

93‧‧‧Second connecting shaft

94‧‧‧First buckle

95‧‧‧Second buckle

100‧‧‧Locking unit

101‧‧‧ Pivot Block

102‧‧‧Deduction block

103‧‧‧ Pivot

111‧‧‧ Shock Absorber

112‧‧‧Guide

X‧‧‧ forward and backward direction

Y‧‧‧left and right

Z‧‧‧ Top and bottom direction

Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is a perspective view of a first embodiment of a hanging wafer box positioning device of the present invention, showing the first An embodiment is installed on an elevated rail; FIG. 2 is an incomplete partial combined bottom view of the first embodiment; FIG. 3 is an incomplete partially exploded perspective view of the first embodiment, showing a wafer cassette having A box body, a positioning plate and a number of inflatable nozzles; Figure 4 is an incomplete partially exploded perspective view of the first embodiment; Figure 5 is a combined perspective view of the first embodiment; Figure 6 is the first embodiment An exploded perspective view of FIG. 7; FIG. 7 is an incomplete cross-sectional view of the first embodiment, showing a buckle block of a lock unit in an unlocked position relative to a positioning plate; FIG. 8 is a view similar to FIG. 7, showing The buckle block is located at a lock position relative to the positioning plate; FIG. 9 is an incomplete partially exploded perspective view showing a second embodiment of the suspension wafer box positioning device of the present invention is mounted on the elevated track and is located at The wafer The bottom side of the box; Figure 10 is a combined perspective view of the second embodiment; Figure 11 is an exploded perspective view of the second embodiment; Figure 12 is an incomplete cross-sectional view of the second embodiment, showing a lock A snap block of the unit is located in an unlocked position relative to a positioning plate; and FIG. 13 is a view similar to FIG. 12, showing that the snap block is located in a locked position relative to the positioning plate.

Claims (10)

A suspension type wafer box positioning device is suitable for being installed on an elevated track. The wafer box has a box body and a positioning plate fixed to the bottom of the box body and spaced apart from each other. The positioning device includes: a carrying unit Includes a main carrier plate fixed on the elevated rail and located on the bottom side of the positioning plate; a fixing unit including a first fixed seat and a second fixed arrangement on the bottom side of the main carrier plate in a left-right direction; A fixing base, the second fixing base having a first body defining a first accommodating space opened toward the first fixing base, and a first body extending from the first body in the left-right direction away from the first fixing base A pivot block; a driving unit including a power piece fixed to the first fixing base, the power piece having a driving rod located in the first accommodation space and capable of linearly moving in the left-right direction; a linkage unit including Two connecting rods on the front and rear sides of the second fixing base and driven by the driving rod; and a locking unit including a pivoting base pivotally connected to the pivot block and linked by the two connecting rods, A pivot from the base toward the tip relative to the bending and extending positioning plate movable between a locking position and an unlocking position withhold block. The hanging wafer cassette positioning device according to claim 1, wherein each link has a driven section connected to the driving rod, and a linkage opposite to the driven section and adjacent to the pivot block. segment. The hanging wafer cassette positioning device according to claim 2, wherein the driving unit further includes a universal joint connected to the driving rod, and the second fixing base further has a position disposed on the first along the left and right directions. The body is connected with two elongated guide holes of the accommodating space, and the linkage unit further includes a driven section penetrating the two links, the two elongated guide holes, and the first joint between the universal joint in a front-rear direction. One connecting shaft. The hanging wafer cassette positioning device according to claim 3, wherein the pivot base has a second body rotatably sleeved outside the pivot block relative to the pivot block, and the lock unit is further It includes a pivot shaft passing between the second body and the pivot block along the front-rear direction, and the linkage unit further includes two second shafts respectively inserted between the linkage section of the two links and the pivot base. Connect the shaft. The hanging wafer cassette positioning device according to claim 4, wherein the second body further has two screw holes respectively communicating with the two perforations, and the linkage unit further includes locking the two screw holes and abutting against the two screw holes, respectively. Two positioning screws for two second connecting shafts. The hanging wafer cassette positioning device according to claim 5, wherein the positioning plate has a slot provided along a left-right direction, the main carrier plate has an opening aligned with the slot, and the holding block Pass through the opening and the slot, and move between the unlocked position and the locked position. A suspension type wafer box positioning device is suitable for being installed on an elevated track. The wafer box has a box body and a positioning plate fixed to the bottom of the box body and spaced apart from each other. The positioning device includes: a carrying unit Includes a main carrier plate fixed on the elevated rail and located on the bottom side of the positioning plate; a fixing unit including a first fixed seat and two thirds arranged in a left-right direction and fixed on the bottom side of the main carrier plate; A fixed base, each third fixed base has a pivot block extending toward the bottom side; a driving unit includes a power piece fixed to the first fixed base, the power piece has a power piece extended toward the two third fixed bases and A driving rod linearly moving in the left-right direction; a linkage unit including two links located at the front and rear sides of the two and third fixing bases and driven by the driving rod; and a locking unit including a second A pivot base between three fixed bases and pivotally connected to the pivot blocks and linked by the two links, and a pivot base extending from the pivot base toward the top A buckling block bent and moved relative to the positioning plate between an unlocked position and a locked position. The hanging wafer cassette positioning device according to claim 7, wherein each link has a driven section connected to the driving rod, and a driving section opposite to the driven section and adjacent to the pivot seat. In the linkage section, the driving unit further includes a universal joint connected to the driving rod, and the linkage unit further includes a first penetrating between the driven section of the two links and the universal joint along a front-rear direction. Connect the shaft. The hanging wafer cassette positioning device according to claim 8, wherein the locking unit further includes a pivot shaft penetrating between the pivot base and the two pivot blocks along the front-rear direction, and the linkage unit It also includes a second connecting shaft passing between the linkage section of the two connecting rods and the pivot seat along the front-rear direction. The hanging wafer cassette positioning device according to claim 9, wherein each third fixing base further has an elongated guide hole provided on the pivot block and extending along a top-bottom direction, and the pivot is penetrated Between the elongated guide holes and the pivot seat.