TW201933947A - Mask, method for frabricating the same, and method for frabricating organic electro-luminancce device - Google Patents

Abstract

A mask includes a mask net and at least one covering glue. The mask net has a plurality of through openings. The covering glue covers part of surface of the mask net and part of the plurality of through openings. The hardness of the covering gel is less than the hardness of the mask net.

Description

Method for manufacturing mask and mask, and vapor deposition method for organic electroluminescent device using the same

The present invention relates to an evaporation technique, and more particularly to a mask, a method of manufacturing a mask, and an evaporation method of an organic electroluminescent device using the mask.

At present, a common organic light emitting display (OLED) is usually fabricated by depositing an organic light emitting material on a substrate through a mask. Generally, the mask has a plurality of fine openings for the organic light-emitting material to adhere to the substrate through the fine openings.

When the mask is applied to the evaporation process, the mask is fixed and tension is applied around the mask to flatten the surface of the mask. However, when tension is applied, the stress applied to the mask is unevenly distributed by the distribution of the fine openings, so that the solid region of the mask near the fine opening to which the tension is applied is likely to exhibit wrinkle deformation. As a result, the shape and position of the fine opening of the mask are easily shifted, so that the thickness unevenness of the plating film or the position of the coating film is likely to be deviated.

An embodiment of the invention provides a mask comprising a cover net and at least one masking gel. The cover mesh has a plurality of through openings. The surface of the cover mesh covering the colloid-covered portion and the plurality of such through-openings. Wherein, the hardness of the masking colloid is less than the hardness of the net.

An embodiment of the present invention provides a method of manufacturing a mask, comprising: providing a thin metal plate, forming a plurality of through openings in a spaced apart arrangement of the metal thin plates to form a cover mesh, and fixing at least one of the cover regions of the cover mesh. Here, the solid region of the metal thin plate surrounds the open area of the metal thin plate, and the through openings are formed in the open area, and the shielding gel covers a plurality of the through openings, and the hardness of the masking colloid is smaller than the hardness of the net.

An embodiment of the present invention provides a vapor deposition method for an organic electroluminescent device, comprising: covering a mask on a substrate and performing a vapor deposition process of the substrate through the mask. Here, the mask includes a cover net and at least one masking colloid. The cover mesh has a plurality of through openings, and the masking gel covers a plurality of such through openings. The vapor deposition material is deposited on the substrate through a plurality of through openings that are not covered by the masking gel through the mask.

In summary, the mask, the mask manufacturing method, and the vapor deposition method of the organic electroluminescent device according to the embodiment of the present invention are disposed inside the mask net by masking the vapor deposition opening (through opening) of the colloid mask net. An area where no vapor deposition opening is provided is added, and wrinkles are generated when the net is stretched. In some embodiments, the vapor deposition material of at least one color can be evaporated by the mask of the embodiment of the present invention, so that the arrangement of the sub-pixel arrays of the organic thin film display can be adjusted by the position and shape of the masking colloid.

1 is a schematic plan view of a mask according to an embodiment of the present invention. 2 is a schematic cross-sectional view of a mask corresponding to the line A-A of FIG. 1. Referring to FIGS. 1 and 2 , the mask 100 includes a cover net 110 and at least one masking colloid 120 . The cover net 110 has a plurality of through openings H. The masking colloid 120 covers the surface of the net 110 and a portion of the through opening H thereof. The hardness of the masking colloid 120 is less than the hardness of the net 110.

In one embodiment, the shroud 110 has a solid region 112 and an open region 114. The solid zone 112 surrounds the open area 114. The through openings H may be substantially a plurality of meshes arranged in an array form, and are arranged in an open area in an array of a one-dimensional array (not shown) or a two-dimensional array (as shown in FIG. 1 ). 114. The masking colloid 120 is located in the open area 114 and covers some of the through openings H. In an embodiment, as shown in FIG. 1 , the masking colloid 120 may cover a plurality of through openings H of a plurality of columns or rows passing through the array of openings H . In another embodiment, as shown in FIG. 1 , the masking colloid 120 is separated from the solid region 112 , that is, the masking colloid 120 is only located in the open region 114 and does not extend to the solid region 112 .

When the mask 100 is applied to the vapor deposition process of the organic electroluminescent device, the mask 100 is fixed to the substrate to be vapor-deposited, and tension is applied to the mask 100 to flatten the surface of the mask 100. Here, since the contrast of the shadow colloid 120 located in the open area 114 and the through opening H is relatively low with respect to the strength between the net 110 and the through opening H in the solid area 112, the open area 114 of the net 110 The contrast with the stress applied to the solid region 112 is reduced. Accordingly, the masking colloid 120 can buffer and disperse the tension received by the net 110, improve the problem of uneven stress distribution, and thereby improve the wrinkles of the net 110.

The position of the masking colloid 120 may depend on the arrangement of the sub-pixel arrays of the organic thin film display. In one embodiment, the arrangement of the through openings H corresponds to a sub-pixel array of the organic thin film display. Accordingly, when the mask 100 is applied to the vapor deposition process of the organic electroluminescent device, the masking body 120 can be shielded from the plurality of through openings H in the specific region to make the sub-paint of the vapor-deposited organic thin film display. The prime array can represent the arrangement of the particular sub-pixel arrays corresponding to the locations of the through openings H in a particular region.

In the vertical projection direction D1 of the cover net 110, the shape of the vertical projection range of the masking colloid 120 may also take a different shape depending on the arrangement of the pixel array of the organic thin film display, and the shape of the vertical projection range of each of the masking colloids 120 may be, for example, Yes, but not limited to, dots, strips, polygons, or irregular shapes.

As an example, as shown in FIG. 1 , the mask 100 includes a plurality of masking bodies 120 (eg, masking bodies 120a, 120b, and 120c), and the masking bodies 120 are separated from each other, that is, the masking bodies 120. Not connected. The masking body 120a has a long rectangular shape and one end of the long axis of the masking colloid 120a is coupled to the solid region 112 of the first side L1 of the opening region 114, and the other end of the long axis of the masking colloid 120a is coupled to the first region of the opening region 114. The solid region 112 of the second side L2 of the side L1. Here, the masking colloid 120a can substantially divide the open area 114 into two regions, and each of the two regions includes a plurality of through openings H. In addition, the masking colloid 120b and the shielding colloid 120c are all in a point shape (circular shape), and the shielding colloid 120b and the shielding colloid 120c respectively shield a plurality of through openings in the two regions defined by the shielding colloid 120a in the opening region 114. H.

As another example, as shown in FIG. 3, the mask 100 includes a plurality of masking colloids 120 (eg, masking bodies 120d, 120e, 120f, 120g) that are separated from each other. The masking body 120d and the masking body 120e each have a long rectangular shape, and both ends of the long axis are respectively coupled to the solid area 112 of the first side L1 and the second side L2 of the opening area 114. Here, the masking colloid 120d and the masking colloid 120e can substantially divide the open area 114 into three regions, and each of the three regions includes a plurality of through openings H. In addition, the masking colloid 120f is in an irregular shape, and the masking colloid 120g is in a dot shape (circular shape), and the masking colloid 120f and the masking colloid 120g respectively shield the region defined by the masking colloid 120d and the masking colloid 120e in the opening region 114. A plurality of through openings H.

It should be noted that the position, shape and number of the masking bodies 120 illustrated in FIG. 1 and FIG. 3 are only examples, which may be determined by the arrangement of the sub-pixel arrays of the organic thin film display to be applied, instead of Definition of inventive embodiments.

In an embodiment, the material of the net 110 is different from the material of the masking body 120. In one embodiment, the material of the net 110 is metal. The material of the masking colloid 120 is a polymer. In another embodiment, the material of the net 110 may be a single metal material or an alloy material, and the masking colloid 120 is a polymer material having adhesiveness and elasticity. In still another embodiment, the Young's modulus of the masking colloid 120 is smaller than the Young's modulus of the net 110. Here, the net 110 is more rigid (not easily deformed) than the masking colloid 120. The masking colloid 120 is more elastic (relatively deformable) than the shroud 110. Here, the masking colloid 120 can further buffer and disperse the tension, thereby improving the wrinkles of the net 110.

4 is a flow chart of a method of fabricating a mask in accordance with an embodiment of the present invention. 5 to 7 are schematic cross-sectional views showing a method of manufacturing a mask in each step according to an embodiment of the present invention. The manufacturing method of the mask includes providing the metal thin plate 111 (step S12), forming a plurality of through openings H in the spaced arrangement to the opening region 114 of the metal thin plate 111 to form the cover mesh 110 (step S14), and fixing at least one masking colloid 120 The open area 114 of the cover net (step S16).

In step S12, as shown in FIG. 5, the thin metal plate 111 is a plate which can pre-plan the area to be patterned. In one embodiment, the thin metal plate 111 may pre-plan the solid region 112 and the open region 114, and the solid region 112 surrounds the open region 114. The material of the metal thin plate 111 may be a single metal material or an alloy material.

In step S14, as shown in FIG. 6, through the lithography process, openings are formed in the pre-planned opening region 114 of the thin metal plate 111 to form a plurality of spaced-apart arrangements in the open region 114 of the thin metal plate 111. Through the opening H. Here, the cover net 110 is formed.

In step S16, as shown in FIG. 7, in this embodiment, a plurality of masking bodies 120 are fixed to the opening area 114 of the net 110. However, in other embodiments, a masking colloid 120 can be affixed to the open area 114 of the shroud 110. The masking colloid 120 covers some of the through openings H, and the position of the masking colloid 120 may correspond to the position of the specific through opening H depending on the arrangement of the pixel array of the organic thin film display. For example, the masking colloid 120 may cover a plurality of through openings H through one of the rows, one of the columns, or one of the specific regions. In this embodiment, the hardness of the masking colloid 120 is less than the hardness of the mask web 110.

Fig. 8 is a flow chart showing a vapor deposition method of an organic electroluminescent device according to an embodiment of the present invention. 9 to 10 are schematic cross-sectional views showing a vapor deposition method of an organic electroluminescent device according to an embodiment of the present invention, in each step. The vapor deposition method of the organic electroluminescence device includes covering the mask 100 on the substrate 200 (step S22) and performing a vapor deposition process of the substrate 200 through the mask 100 (step S24).

In step S22, as shown in FIG. 1 and FIG. 9, the mask 100 includes a cover net 110 and a masking colloid 120. The cover net 110 has a plurality of through openings H, and the masking colloid 120 covers some of the through openings H. The substrate 200 may be a substrate on which an evaporation process is to be performed. In one embodiment, the substrate 200 is a substrate for performing an organic material evaporation process, and the vapor deposition surface of the substrate 200 has an active device array layer, a pixel definition layer, and a sub-picture defined by the pixel definition layer. An electrode pattern layer (for example, an anode layer), a hole injection layer, and/or a hole transport layer (not shown) in the prime region P. The vapor deposition surface of the substrate 200 is placed facing the vapor deposition source S downward, and the mask 100 is positioned between the substrate 200 and the vapor deposition source S. The mask 100 is positioned on the vapor deposition surface of the substrate 200 through a fixed carrier (not shown). In one embodiment, each through opening H of the mask 100 may be each sub-pixel area P defined by a corresponding pixel definition layer.

Next, in step S24, as shown in FIG. 10, after the evaporation source S is heated, the evaporation material is evaporated by heat, and the mask 100 is deposited as a mask through the through opening H covered by the unmasked colloid 120. on. In one embodiment, the evaporation material may be an organic light-emitting material having different colors, such as, but not limited to, red, blue, and/or green organic light-emitting materials. The vapor deposition source S may first vaporize one of the organic light-emitting materials into the through-opening H covered by the masking colloid 120, and then the mask 100 and/or the substrate 200 may be displaced or not displaced depending on the evaporation conditions. Then continue to vaporize the organic light-emitting material. Accordingly, an organic light-emitting film R suitable for emitting red light, an organic light-emitting film G suitable for emitting green light, and an organic light-emitting film B suitable for emitting blue light are formed in the sub-pixel region P of the substrate 200, and the organic light-emitting films B are formed. The film constitutes a sub-pixel array of an organic thin film display.

In one embodiment, the mask 100 may be a mask corresponding to the vapor deposition material of one of the colors, and corresponding to the plurality of sub-pixel regions P of the plurality of through openings H covered by the masking colloid 120, ie, An organic light-emitting film corresponding to the color is deposited. For example, FIG. 11 is a sub-pixel array 300 of an organic thin film display, and the sub-pixel array 300 of FIG. 11 is a vapor-deposited green organic light-emitting material using the mask 100 of FIG. Here, the range of the sub-pixel array 300 of FIG. 11 corresponds to the range of the mask 100 of FIG. That is, the plurality of sub-pixel regions P in the region M1 of the sub-pixel array 300 of FIG. 11 correspond to the plurality of through-openings H blocked by the masking colloid 120b of the mask 100 of FIG. 1; and the sub-pixels of FIG. The plurality of sub-pixel regions P in the region M2 of the array 300 correspond to a plurality of through openings H corresponding to the masking colloid 120a of the mask 100 of FIG. 1; and the plurality of sub-pixels in the region M3 of the sub-pixel array 300 of FIG. The pixel region P corresponds to a plurality of through openings H that are shielded by the masking colloid 120c of the mask 100 of Fig. 1 .

The masking colloid 120 (shown in FIG. 1) of the mask 100 for evaporating the green organic light-emitting material (not shown) for evaporating the mask of the red organic light-emitting material and the blue organic light-emitting material The positions of the red organic light-emitting material and the blue organic light-emitting material corresponding to the regions M1 and M3 are not covered by the masking colloid 120, and the masks of the red organic light-emitting material and the blue organic light-emitting material are different. Corresponding to the area M2 is covered by the masking colloid 120. Here, in the regions M1 and M3 of the sub-pixel array 300, the plurality of sub-pixel regions P of the sub-pixel array 300 corresponding to the through-opening H covered by the masking colloids 120b and 120c are not deposited to be suitable for emitting green. The organic light-emitting film G of the light has only the organic light-emitting film R suitable for emitting red light and the organic light-emitting film B suitable for emitting blue light. In the region M2 of the sub-pixel array 300, the plurality of sub-pixel regions P of the sub-pixel array 300 corresponding to the through-opening H covered by the masking colloid 120a are not deposited with the organic light-emitting film R suitable for emitting red light. An organic light-emitting film B suitable for emitting blue light and an organic light-emitting film G suitable for emitting green light.

In another embodiment, the mask 100 is a mask corresponding to the vapor deposition material of each color, and the plurality of sub-pixel regions P corresponding to the through opening H covered by the masking colloid 120 are not deposited organically. Luminescent material. For example, FIG. 12 is a sub-pixel array 400 of an organic thin film display, and the sub-pixel array 400 of FIG. 12 is used to evaporate a red organic light-emitting material, a blue organic light-emitting material, and a green organic light-emitting material using the mask 100 of FIG. . Here, the range of the sub-pixel array 400 of FIG. 12 corresponds to the range of the mask 100 of FIG. That is, the plurality of sub-pixel regions P in the region M1 of the sub-pixel array 400 of FIG. 12 correspond to the plurality of through-openings H covered by the masking colloid 120b of the mask 100 of FIG. 1; and, the sub-pixels of FIG. The plurality of sub-pixel regions P in the region M2 of the array 400 correspond to a plurality of through openings H corresponding to the masking colloid 120a of the mask 100 of FIG. 1; and the plurality of sub-pixels in the region M3 of the sub-pixel array 400 of FIG. The pixel region P corresponds to a plurality of through openings H that are shielded by the masking colloid 120c of the mask 100 of Fig. 1 . Here, in the regions M1, M2, and M3 of the sub-pixel array 400, the plurality of sub-pixel regions P of the sub-pixel array 400 corresponding to the through-holes H covered by the masking colloids 120a, 120b, and 120c are not deposited. An organic light-emitting film R suitable for emitting red light, an organic light-emitting film B suitable for emitting blue light, and an organic light-emitting film G suitable for emitting green light.

In summary, the mask, the mask manufacturing method, and the vapor deposition method of the organic electroluminescent device according to the embodiment of the present invention are disposed inside the mask net by masking the vapor deposition opening (through opening) of the colloid mask net. An area where no vapor deposition opening is provided is added, and wrinkles are generated when the net is stretched. In some embodiments, the vapor deposition material of at least one color can be evaporated by the mask of the embodiment of the present invention, so that the arrangement of the sub-pixel arrays of the organic thin film display can be adjusted by the position and shape of the masking colloid.

Although the technical content of the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention, and any modifications and refinements made by those skilled in the art without departing from the spirit of the present invention are encompassed by the present invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.

100‧‧‧ mask

110‧‧‧ Cover net

111‧‧‧Metal sheet

112‧‧‧solid area

114‧‧‧Open area

120, 120a, 120b, 120c, 120d, 120e, 120f, 120g ‧ ‧ masking colloid

200‧‧‧Substrate

300, 400‧‧ ‧ subpixel array

A-A‧‧‧ cut line

D1‧‧‧Vertical projection direction

H‧‧‧through opening

L1‧‧‧ first side

L2‧‧‧ second side

M1, M2, M3‧‧‧ areas

P‧‧‧ sub-pixel area

R, G, B‧‧‧ organic light-emitting film

S‧‧‧ evaporation source

S12, S14, S16, S22, S24‧‧‧ steps

1 is a schematic plan view of a mask according to an embodiment of the present invention. 2 is a schematic cross-sectional view of a mask corresponding to the line A-A of FIG. 1. 3 is a schematic top plan view of a mask according to another embodiment of the present invention. 4 is a flow chart of a method of fabricating a mask in accordance with an embodiment of the present invention. 5 to 7 are schematic cross-sectional views showing a method of manufacturing a mask in each step according to an embodiment of the present invention. Fig. 8 is a flow chart showing a vapor deposition method of an organic electroluminescent device according to an embodiment of the present invention. 9 to 10 are schematic cross-sectional views showing a vapor deposition method of an organic electroluminescent device according to an embodiment of the present invention, in each step. Figure 11 is a sub-pixel array of an organic thin film display vapor-deposited using the mask of Figure 1. Figure 12 is a sub-pixel array of another organic thin film display that is vapor deposited using the mask of Figure 1.

Claims (10)

A mask comprising: a cover net having a plurality of through openings; and at least one masking gel covering a portion of the surface of the net and the plurality of through openings, wherein the at least one masking colloid has a hardness less than the The hardness of the net. The mask of claim 1, wherein the vertical projection range of the at least one masking colloid is a dot shape, a strip shape, a polygonal shape or an irregular shape in a vertical projection direction of the cover net. The mask of claim 1, wherein the at least one masking colloid has a plurality of layers, and the masking colloids are separated from each other. The mask of claim 1, wherein the cover net has a solid area and an open area, the solid area surrounds the open area, the through openings are arranged in an array in the open area, and the at least one masking body Located in the open area. The mask of claim 4, wherein one end of the at least one masking gel is coupled to the solid region on the first side of the open area, and the other end of the at least one masking body is coupled to the open area. The solid area on the second side of the first side. The mask of claim 4, wherein the at least one masking colloid is separated from the solid region. The mask of claim 1, wherein the material of the mask mesh is metal, and the material of the at least one masking gel is a polymer. The mask of claim 1, wherein the Young's modulus of the at least one masking colloid is less than the Young's modulus of the net. A manufacturing method of a mask, comprising: providing a metal thin plate, wherein the metal thin plate has a solid area and an open area, and the solid area surrounds the open area; forming a plurality of through openings opening in the metal sheet Opening area to form a cover net; and fixing at least one masking gel to the open area of the cover net, wherein the at least one masking body covers a plurality of the through openings, and the at least one masking colloid has a hardness less than The hardness of the net. An evaporation method of an organic electroluminescent device, comprising: covering a mask on a substrate, wherein the mask comprises a cover net and at least one masking colloid, the cover net having a plurality of through openings, the at least one masking colloid Covering a plurality of the through openings; and performing an evaporation process of the substrate through the mask to deposit an evaporation material on the substrate via the through openings not covered by the at least one masking paste.