TW201931014A - Exposure assembly and exposure device - Google Patents

Abstract

An exposure device comprise an exposure assembly. The exposure assembly comprise a base and a vacuum suction plate. The base connect with a vacuum pumping module. The vacuum suction plate have a plurality of vacuum suction hole. When the vacuum pumping module operates, the vacuum suction holes formed in the suction pressure, so that a circuit board to be exposed positioned on the vacuum suction plate. The vacuum suction plate can absorb reflected light from the base.

Description

Exposure assembly and exposure device

The invention relates to an exposure assembly and an exposure device, in particular to an exposure assembly and an exposure device for adsorbing an object to be exposed through a suction module.

The existing exposure apparatus has various exposure modes depending on the member to be exposed. One of the common patterns is that the object to be exposed is disposed on a glass plate, and the exposure light source is disposed above the glass plate, and during the exposure operation, the exposure light source will project an exposure beam from above the object to be exposed to illuminate the object to be exposed. However, in practical applications, such an exposure apparatus is prone to the problem of overexposure in a partial area, which in turn leads to a problem of low exposure yield. Accordingly, the inventors have diligently studied and cooperated with the application of the theory, and proposed a present invention which is rational in design and effective in improving the above problems.

SUMMARY OF THE INVENTION A primary object of the present invention is to provide an exposure assembly and an exposure apparatus for improving the prior art that the exposure unit and the exposure apparatus are prone to overexposure of a partial area of the member to be exposed.

In order to achieve the above object, the present invention provides an exposure assembly comprising: a base and an adsorption plate. The base is used to connect with a suction module. The adsorption plate is used for carrying an object to be exposed, the adsorption plate is disposed on the base, the adsorption plate comprises a plurality of perforations, and the suction module can adhere the object to be exposed to the adsorption plate through the perforation; the adsorption plate can absorb the absorption part through the adsorption The exposure beam reflected by the base.

In order to achieve the above object, the present invention also provides an exposure apparatus comprising: an exposure light source, an exposure component, and an air extraction module. Exposure source to produce exposure beam. The exposure component comprises: a base and an adsorption plate. The base includes a plurality of gas flow channels and at least one air vent. The adsorption plate is configured to carry an object to be exposed, the adsorption plate is disposed on the base, and the plurality of gas flow channels are correspondingly located below the adsorption plate, the adsorption plate comprises a plurality of perforations, and the plurality of perforations are connected to the plurality of gas flow channels; The adsorption plate can absorb the exposure beam reflected by the substrate through the adsorption plate. The air suction module is connected to the air suction hole, and when the air suction module is controlled to be actuated, the gas to be exposed and the plurality of perforations are transmitted through the plurality of gas flow channels and the plurality of perforations, so that the object to be exposed is attached to the adsorption plate.

The beneficial effects of the present invention may be that the design of the exposure beam reflected by the base through the adsorption plate can be absorbed by the adsorption plate, and the exposure of the exposure beam reflected by the base can be greatly reduced, and the partial exposure of the partial region occurs. .

For a better understanding of the features and technical aspects of the present invention, reference should be made to the accompanying drawings.

100‧‧‧Exposure device

1‧‧‧Exposure components

10‧‧‧Adsorption plate

10A, 10B, 10C‧‧‧ empty area

101‧‧‧Perforation

20, 20" ‧ ‧ base

201‧‧‧ Groove

202‧‧‧Pumping holes

203, 203'‧‧‧ support ribs

204‧‧‧Support bumps

201B, 201C, 201D‧‧‧ gas flow channels

201B1, 201B2‧‧‧ gas flow channel

201C1, 201C2‧‧‧ gas flow channel

201D1, 201D2‧‧‧ gas flow path

21‧‧‧Light absorbing layer

30‧‧‧Base

2‧‧‧Exposure source

3‧‧‧Exhaust module

4‧‧‧Conveyor

41‧‧‧Conveying unit

A‧‧‧To be exposed

Figure 1 is a schematic view of an exposure apparatus of the present invention.

2 is an exploded perspective view of the exposure assembly of the present invention.

Figure 3 is a schematic view showing the combination of the exposure assembly of the present invention.

4 is a schematic view of a first embodiment of a base of an exposure assembly of the present invention.

Figure 5 is a cross-sectional view taken along line IV of Figure 3;

Figure 6 is a schematic cross-sectional view showing the base of the exposure module of the present invention having a light absorbing layer.

Figure 7 is a top view of Figure 4.

Figure 8 is a schematic illustration of a second embodiment of the base of the exposure assembly of the present invention.

Figure 9 is a schematic illustration of a third embodiment of the base of the exposure assembly of the present invention.

The embodiments of the exposure module and the exposure apparatus of the present invention are described below by way of specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the disclosure of the present specification. The present invention may also be implemented or applied by other different specific examples, and the details in this specification may also be based on different Various modifications and changes can be made without departing from the spirit and scope of the invention. Further, the drawings of the present invention are merely illustrative, and are not depicted in actual dimensions, that is, the actual dimensions of the related structures are not reflected, which will be described first. The following embodiments are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention.

Please refer to FIG. 1, which is a schematic view of an exposure apparatus of the present invention. The exposure device 100 includes an exposure component 1, an exposure light source 2, and an air extraction module 3. The exposure light source 2 is fixedly disposed on the exposure unit 1. The exposure unit 1 and the air extraction module 3 are fixedly disposed in a machine unit (not shown). The exposure light source 2 can emit an exposure beam to expose the object to be exposed disposed on the exposure component 1; wherein the wavelength of the exposure beam can be, for example, between 365 and 435 nm, that is, ultraviolet light, but not limit. The air suction module 3 is configured to perform a pumping operation on the exposure unit 1 so that the object to be exposed A can be closely attached to the exposure unit 1 during the exposure operation. The exposure device 100 may further include a conveying device 4, which may be adjacent to the machine equipment provided in the exposure unit 1 and the air suction module 3. The conveying device 4 may further include a conveying unit 41 (for example, a plurality of rollers), and the conveying device 4 may move the member A to be exposed to the exposure unit 1 through the conveying unit 41; of course, the conveying device 4 may be The crawler belt, the roller group, the robot arm, and the like are not limited thereto, or the conveying device 4 may be equipped with a mechanical arm to carry the conveyance of the member to be exposed A. In different applications, the exposure device 100 may include a plurality of transport devices 4, or include a transport device 4 and a robot arm to feed the member to be exposed A into the exposure assembly 1 and complete the exposure. The object to be exposed A is subjected to a carrying operation.

Please refer to FIG. 2 and FIG. 3 together, which are schematic exploded and combined views of the exposure assembly of the present invention. As shown in the figure, the exposure unit 1 includes an adsorption plate 10, a base 20 and a base 30. The adsorption plate 10 is fixedly disposed on the base 20, and the base 20 is fixedly disposed on the base 30. The suction plate 10 is used to carry the to-be-exposed part A, and the adsorption plate 10 includes a plurality of perforations 101. The base 20 is connected to a pumping module 3, and when the pumping module 3 is actuated, the pumping module 3 passes through the plurality of perforations 101. The member to be exposed A disposed on the adsorption plate 10 can be attached to the adsorption plate 10. In practical applications, the perforation 101 of the adsorption plate 10 The number and the appearance of each of the perforations 101 may be varied according to requirements, and are not limited to those shown in the drawings.

In a specific application, the adsorption plate 10 may be made of glass, the base 20 may be made of acrylic material, and the base 30 may be made of aluminum, and the base 30 is used to strengthen the structural strength of the base 20. Specifically, when the pumping module 3 performs the pumping operation, the base 20 may be slightly deformed to affect the exposure result of the member A to be exposed. Therefore, by designing the base 20 to be fixed to the base 30, The structural strength of the base 20 is strengthened, thereby improving the problem that the base 20 is slightly deformed when the air suction module performs the pumping operation. Of course, depending on the quality requirements of the actual exposure member A, the exposure unit 1 may not include the susceptor 30, or the base 20 of the exposure unit 1 may be made of a relatively hard material, which is not limited herein.

Specifically, the adsorption plate 10 of the exposure module 1 of the present invention can absorb an exposure beam partially reflected by the adsorption plate 10 and reflected by the base 20, so that the partial exposure of the portion A to be exposed can be greatly reduced. The problem. In practical applications, the adsorption plate 10 may be a colored plate, according to which an exposure beam partially reflected by the base 20 may be adsorbed; the colored plate is, for example, glass, acrylic or any composite. material. In addition, in different embodiments, it is also possible to change the material of the adsorption plate 10, for example, a composite material made of glass, acrylic and other materials, or to participate in a specific glass or acrylic material. The material of the exposure beam can be absorbed to enable the adsorption plate 10 to adsorb the exposure beam reflected by the base 20.

Furthermore, please refer to FIG. 3 to FIG. 5 together. FIG. 5 is a cross-sectional view taken along line IV of FIG. 3 . In practical applications, in order to fix the adsorption plate 10 to the base 20, the perforation 101 included in the adsorption plate 10 does not cover the entire adsorption plate 10, and the adsorption plate 10 is formed correspondingly around the plurality of perforations 101. At least three empty areas 10A, 10B, 10C, the empty areas 10A, 10B, 10C may include a plurality of locking holes, and the adsorption plate 10 may be matched with a locking hole (such as a screw) to The bases 20 are fixed to each other. As shown in FIG. 1 and FIG. 5, when the exposure light beam emitted from the exposure light source 2 is irradiated from the upper side of the adsorption plate 10 to the exposure member A, the portion The portion of the exposure beam will be reflected by the substrate 20 and reflected to the adsorption plate 10 through the region where the adsorption plate 10 is not blocked by the member A to be exposed and any of the empty regions 10A (10B, 10C). At this time, the adsorption plate 10 The exposure beam reflected by the base 20 can be adsorbed, so that the exposure beam reflected by the base 20 will not easily pass through the adsorption plate 10 again, and the exposure beam A to be exposed by the base 20 can be greatly reduced. The problem of overexposed areas.

As shown in FIG. 6, in different embodiments, the base 20 faces one side of the adsorption plate 10, and may have a light absorbing layer 21 capable of adsorbing an exposure beam passing through the adsorption plate 10, thus passing through the adsorption plate 10. The exposure beam is mostly absorbed by the light absorbing layer 21 and is not easily reflected back to the adsorption plate 10. The light absorbing layer 21 may be fixedly formed on the adsorption plate 10 by coating, or the light absorbing layer 21 may be a separate structure and fixedly disposed on the adsorption plate 10 by any means. In addition, it is also possible to fill and incorporate a specific particle or material capable of absorbing an exposure beam at a portion of the adsorption plate 10 to form the light absorbing layer 21. Of course, in another embodiment, the base 20 may also be made of a material that can absorb the exposure beam as a whole, and thus the probability of the exposure beam reflected by the base 20 through the adsorption plate 10 can be greatly reduced.

Referring to FIG. 4, FIG. 5 and FIG. 7, FIG. 7 is a top view showing the first embodiment of the base 20 of the exposure module 1 of the present invention. As shown in the figure, a side of the base 20 facing the adsorption plate 10 may be concavely formed with a recess 201, and at least a portion of the three air suction holes 202 of the base 20 may be correspondingly located in the recess 201, three The air vent 202 is used to interconnect with the air extraction module 3 (shown in FIG. 1). The groove 201 and the three air venting holes 202 are correspondingly located below the adsorption plate 10, and the area of the groove 201 and the position of the three air venting holes 202 may be substantially below the plurality of perforations 101 formed by the adsorption plate 10, and The plurality of perforations 101, the grooves 201, and the three suction holes 202 of the adsorption plate 10 are in communication with each other. Thus, when the air suction module 3 is actuated, the air suction module 3 can pass through the air vent 202, the recess 201 and the plurality of through holes 101, so that the member A to be exposed disposed above the adsorption plate 10 is closely attached. On the adsorption plate 10.

In practical applications, the base 20 may also be formed with three gas in the groove 201. The body flow paths 201B, 201C, and 201D and the three gas flow paths 201B, 201C, and 201D are used to guide and restrict the flow direction of the gas. For example, the bottom wall of the groove 201 may be provided with two supporting ribs 203 protruding toward the adsorption plate 10, and the two supporting ribs 203 correspondingly partition the groove 201 into three gas flow paths 201B. 201C and 201D, through the arrangement of the three gas flow passages 201B, 201C, and 201D, when the air suction module 3 is actuated, substantially equal adsorption force is formed in each region of the adsorption plate 10, and the adsorption plate can be avoided. The adsorption force of each region of 10 is different, and the member A to be exposed (shown in FIG. 3) disposed on the adsorption plate 10 is slightly deformed, which may affect the quality of exposure. In addition, each of the supporting ribs 203 can also be used to support the adsorption plate 10 to prevent the adsorption plate 10 from being slightly deformed when the suction module 3 is actuated, thereby affecting the quality of the exposure.

The two supporting ribs 203 may be in a ring shape, and the two supporting ribs 203 appearing in a ring shape may correspondingly divide the grooves 201 into three gas flow paths 201B, 201C, and 201D that are not in communication with each other. And the three exhaust holes 202 may be correspondingly located in the three gas flow passages 201B, 201C, and 201D that are not in communication with each other. In this way, the suction module 3 can cause substantially equal adsorption force to each region of the adsorption plate 10. In other implementations, a plurality of support protrusions 204 may be protruded in the groove 201 for assisting in supporting the adsorption plate 10. Of course, in practical applications, depending on the size of the adsorption plate 10, the number of the suction holes 202, the number of the support ribs 203, and the number of the gas flow paths 201B, 201C, and 201D can be correspondingly increased or decreased, and similarly, the support bumps are supported. The number of 204 and its appearance can also be varied according to requirements, not limited to the one shown in the figure.

As shown in FIG. 8, it is shown as a top view of a second embodiment of the base 20. The base 20 may include a plurality of support ribs 203 that are not annular, but not a ring-shaped support rib 203 and a plurality of support ribs 203 that are formed in a ring shape. The support bumps 204 may then be interspersed among the three gas flow paths 201B, 201C, 201D. The support ribs 203, which are not annular, may also be used to support the adsorption plate 10; of course, in special applications, some of the support ribs 203 may not be used to support the adsorption plate 10, but only Guide and limit gas flow Component to. It is worth mentioning that when the support ribs 203 which are not formed in a ring shape are disposed in the three gas flow paths 201B, 201C, and 201D, the gas flow paths 201B, 201C, and 201D may be further divided into smaller flow paths. In this way, the gas flow paths 201B1, 201B2, 201C1, 201C2, 201D1, and 201D2 can cause the suction module 3 to generate substantially equal adsorption force to each region of the adsorption plate 10. As shown in Figure 9, another embodiment of the base 20 of the exposure assembly of the present invention is shown. In each of the annular support ribs 203 of the base 20, a plurality of support ribs 203 which are not annularly formed may be densely arranged, so that the pumping module 3 can be applied to each area of the adsorption plate 10. Produces a roughly equal adsorption force. Of course, the shape, the distance and the number of the support ribs 203 that are not in the form of a ring may be changed according to requirements, and are not limited to those shown in the drawings.

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Therefore, equivalent technical changes made by using the present specification and the contents of the drawings are included in the protection scope of the present invention. .

Claims (12)

An exposure assembly comprising: a base for connecting with an air suction module; and an adsorption plate for carrying an object to be exposed, the adsorption plate being disposed on the base, the adsorption plate Including a plurality of perforations, the air suction module can adhere the object to be exposed to the adsorption plate through the perforation; the adsorption plate can absorb a portion of the absorption plate and be reflected by the base Exposure beam. The exposure unit of claim 1, wherein the base comprises a plurality of gas flow channels and at least one air vent, the air vents are connected to the air suction module, and the plurality of gas flow channels are corresponding to Located below the adsorption plate, a plurality of the perforations are in communication with a plurality of the gas flow channels. The exposure unit of claim 2, wherein the base has a recess, and a bottom of the recess is formed with a plurality of support ribs, and the plurality of support ribs respectively partition the recess And a plurality of the gas flow channels; wherein the plurality of the support protrusions are used to support the adsorption plate disposed on the base. The exposure module of claim 3, wherein the base comprises three of the air venting holes, wherein two of the supporting ribs are formed in a ring shape, and the two supporting ribs that are annular are presented The groove segments are three gas channels that are not in communication with each other, and the three of the gas holes correspond to three gas channels that are not in communication with each other. The exposure module of claim 4, wherein at least one of the support ribs and the at least one support bump are respectively disposed in three of the gas flow paths that are not in communication with each other. The exposure unit of claim 1, wherein the base has a groove, and a bottom of the groove is formed with a plurality of support protrusions, and the plurality of the support protrusions The block is for supporting the adsorption plate disposed on the base. The exposure unit of claim 1, wherein the base surface forms a light absorbing layer on one side of the adsorption plate, and the light absorbing layer can absorb an exposure light beam partially passing through the adsorption plate. An exposure apparatus comprising: an exposure light source for generating an exposure beam; an exposure assembly comprising: a base comprising a plurality of gas flow channels and at least one air vent; and an adsorption plate for Carrying an object to be exposed, the adsorption plate is disposed on the base, and a plurality of the gas flow channels are correspondingly located below the adsorption plate, the adsorption plate comprises a plurality of perforations, and the plurality of perforations are a plurality of the gas flow channels are in communication; the adsorption plate can absorb an exposure beam reflected by the base through the adsorption plate; and an air extraction module connected to the air suction hole, the air pumping When the module is controlled to be actuated, the plurality of the gas flow channels and the plurality of the perforations are transmitted through the plurality of the perforations, and the member to be exposed is attached to the adsorption plate. The exposure apparatus of claim 8, wherein the base has a groove forming a bottom of the groove, and a plurality of support protrusions are disposed; wherein the plurality of the support protrusions are supported for being disposed on The adsorption plate on the base. The exposure apparatus of claim 8, wherein the base has a recess forming a bottom of the recess, and a plurality of support ribs are disposed, and the plurality of support ribs corresponding to the recessed area Separating into a plurality of the gas flow channels; wherein the plurality of the support protrusions are for supporting the adsorption plate disposed on the base. The exposure apparatus of claim 10, wherein the base comprises three of the air venting holes, wherein two of the supporting ribs are formed in a ring shape, and the two supporting ribs that are formed in a ring shape are The groove partition is three that are not connected to each other The gas flow passages, and the three of the suction holes correspond to three of the gas flow passages that are not in communication with each other. The exposure apparatus according to claim 8, wherein the base surface is formed with a light absorbing layer on one side of the adsorption plate, and the light absorption layer can absorb an exposure light beam partially passing through the adsorption plate.