TW201929937A - Airborne molecular contamination acid removal filter using functionalized materials - Google Patents

Abstract

An airborne molecular contamination filter is herein disclosed. The airborne molecular contamination filter comprises a first filter medium that removes first airborne contaminants from a first air stream, and a second filter medium downstream of the first filter medium removing second airborne contaminants from a second air stream output from the first filter medium. At least one of the first filter medium and the second filter medium comprises a functionalized substantially non-carbon filter medium that removes a weak acid from at least one of the first air stream and the second air stream.

Description

Air molecularly contaminated acid removal filter using functional materials

In order to filter contamination from air, gas phase filtration is typically employed, typically using activated carbon produced in a variety of ways. Stacks of multiple filters in series are required in an attempt to achieve extremely high removal efficiency for air molecular contamination (AMC).

For many types of contamination, chemical species in the gas stream can be converted to other, more harmful contaminants on the filter media of the AMC filter. For example, nitrogen dioxide (NO ₂₎ may be converted to activated carbon filter media HN03 _x (where x is an integer), for example, nitrous acid or nitric acid. The converted product, such as a weak acid, can then be passed downstream of the AMC filter, which can potentially cause damage to the optics or other components downstream of the gas filter, and/or require more frequent replacement of the AMC filter.

Thus, conventionally, a series of filters are used to remove contamination and the converted product reacts as it passes through the AMC filter. A potential disadvantage of conventional filters is that the pressure drop across the filter is high and the filter media needs to be replaced relatively frequently to mitigate exposure of the downstream components to contamination.

In accordance with a version of the present invention, an air molecular contamination filter is provided which can potentially be used in weak acid applications, among other uses. The air molecular contamination filter includes a filter medium comprising a functional substantially non-carbon filter medium that removes weak acid from the air stream passing through the filter. The functional substantially non-carbon filter media can, for example, comprise a functional nonwoven media such as at least one adsorbent and a polymer based nonwoven media. The functional nonwoven fibrous medium can, for example, comprise at least one of the following: a polyester non-woven fibrous medium, a polypropylene non-woven fibrous medium, a nylon non-woven fibrous medium, and a glass fiber non-woven fibrous medium. In one example, the nonwoven fibrous medium can comprise a functional polyester nonwoven media and at least one adsorbent. The functional substantially non-carbon filter media can comprise a coating from a potassium containing solution. The functional substantially non-carbon filter media is used with at least one other filter media such as, but not limited to, an activated carbon media. The basic weight of the multi-layer functional substantially non-carbon filter media, the thickness/functional substantially non-carbon filter media layer, and the functional substantially non-carbon filter media can be configured to operate from the first air stream and the second The desired amount of weak acid is removed from at least one of the air streams. In a series of gas streams, two or more than two different types of filter media can be configured to remove the required amount of air pollution.

Other related versions of the invention are taught herein.

An illustrative embodiment of the invention is described below.

In accordance with a version of the present invention, an air molecular contamination filter is provided which can potentially be used in weak acid applications, among other uses. This air molecular contamination filter can provide advantages such as improved performance and useful life of the filter media in weak acid applications.

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic block diagram of an air molecular contamination filter in accordance with the present invention. The filter 10 includes a first filter medium 11 and a second filter medium 12. The first air stream 14 passes through the first medium 11 and the second air stream 15 passes through the second medium 12. One or more of the first filter media 11 and the second filter media 12 comprise a functional substantially non-carbon filter media, which may, for example, be a functional nonwoven fiber. The non-woven fibers can be functionalized, for example, by having been sprayed with a potassium-containing solution or immersed in a potassium-containing solution, or coated with a potassium-containing solution, and may contain one or more binders. In one version, the potassium containing solution is sprayed directly onto the nonwoven web, such as a polyester nonwoven web. In another version, the potassium-containing solution is applied to the non-woven fibers by spin coating. For example, the trans-coating of the potassium-containing solution can be applied to only one side of the nonwoven layer; or the same potassium-containing solution can be applied to both sides of the non-woven layer; or two different potassium species can be applied The solution is applied to the opposite side of the nonwoven layer. The functional substantially non-carbon filter media can further comprise one or more adsorbents. According to one version of the invention, the functional nonwoven fibrous medium can comprise at least one adsorbent and a polymer based nonwoven fibrous medium. The functional nonwoven fibrous medium can, for example, comprise at least one of the following: a polyester non-woven fibrous medium, a polypropylene non-woven fibrous medium, a nylon non-woven fibrous medium, and a glass fiber non-woven fibrous medium.

As used herein, "substantially non-carbon filter media" may, for example, comprise less than about 10% by weight carbon, or less than about 5% by weight carbon, or less than about 2% by weight carbon, or less than about 1% by weight. Carbon, or less than about 0.1% by weight carbon, or zero carbon (ie, only non-carbon materials).

In one version according to the invention, the functional substantially non-carbon filter media is functionalized to remove weak acids from the air stream passing through the filter. For example, in one version, the first filter media 11 is an activated carbon filter media. In some cases, the activated carbon filter medium itself, gases (such as NO ₂₎ can be converted to a weak acid, such as HN03 _x (where x is an integer). Thus, in order to prevent such weak acids from penetrating to downstream components, such as optical components, a functional substantially non-carbon filter media can be used in accordance with the present invention to remove weak acids. For example, the second filter media 12 can include a functional substantially non-carbon filter media to remove weak acids.

Alternatively, different types of filter media types may be used in accordance with one version of the present invention. For example, the first filter media 11 can include a functional substantially non-carbon filter media to remove weak acids, while the second filter media contains another filter media type, such as activated carbon. It will be appreciated that the first filter medium, the second filter medium, or both may include a plurality of different possible filter media in addition to the functional substantially non-carbon filter media; and additional filter media may be used, such as more than two filter media (figure Not shown in 1). For example, other possible filter media in the first, second, and/or other filter media can include activated carbon filter media, ion exchange filter media, and mixed sorbent filter media. In any of the foregoing, a functional substantially non-carbon filter media can be used to remove weak acids, while at least one other filter media can be used to remove other air pollution, such as organics, acids, and bases.

Additionally, in accordance with the form of the invention, the functional substantially non-carbon filter media can be disposed in a layer having one or more other filter media. Number of functionally substantially non-carbon filter media layers, thickness/functionality substantially non-carbon filter media layer and functional substantially non-carbon filter media on the basis weight of the adsorbent can be configured to remove from the air stream The amount of weak acid required. In a series of gas streams, two or more than two different types of filter media can be configured to remove the required amount of air pollution.

According to one version of the invention, the weak acid that can be removed can be any type of weak acid, such as a nitrogenous acid having the formula HNO _x , where x is an integer greater than one, or a carboxylic acid, such as acetic acid.

In another version of the invention, the filter may be made from a stack of replaceable filters, wherein the stacked first replaceable filter 11 comprises a first filter medium and the stacked second replaceable filter 12 comprises a second filter medium. Referring to FIG. 1, the stack may include at least one inner stack monitor 13 between filter stack layers (more than one for more than two filter layers) to measure from one filter 11 to the next filter 12 Air pollution.

In accordance with one form of the invention, the functional substantially non-carbon filter media can comprise any of a number of different types of media, including non-woven fibers, monolithic filter media, particulate media, and honeycomb filter media. Likewise, the first, second, third and other filter media used in the filter may comprise any of the different types of filter media previously described.

According to one version of the invention, the functionally substantially non-carbon filter media, such as a functional nonwoven media, from which weak acids are removed, may be used in any arrangement or combination of one or more filters and/or filter media in the order and configuration, such as (but not limited to) a plurality of filters and/or filter media configured to remove air molecular contamination. In particular, the functional substantially non-carbon filter media can be used in or as part of a SilverSet® chemical filter system (such as a filter media and/or filter therein) by Billerica, Sale by Entegris, Inc. of MA, USA. For example, such a system can contain a target and remove a combination of a molecular acid (such as HCl, H ₂ SO _{4 ,} and HNO ₃ ) and a polymeric chemical medium, an acid forming material (such as SO ₂ ), a molecular base (such as NH ₃ , NMP and amines) and condensable organic compounds. Symmetrical and asymmetrical filter configurations are available. In another example, one or more of the physically adsorbable and chemisorbable media configured to remove any combination or arrangement of air molecular contamination can be used. In other examples, a functional substantially non-carbon filter media can be used in or as part of any of the filtration systems and methods taught below, such as filter media and/or filters therein, The complete teachings are hereby incorporated by reference: U.S. Patent Nos. 6,447,584; 6,610,128; 7,022,164; 6,740,147; 6,761,753; 7,014,693; 7,540,901; and 7,922,791.

In accordance with one form of the invention, a functional substantially non-carbon filter media, such as a functional nonwoven media, can be used in systems that also treat any one or more of a variety of other air molecular contaminations. For example, the system prevents the conversion of hexamethyldioxane (HMDSO) to the contaminant trimethylstanol (TMS). HMDSO acid is converted to NH ₃ on TMS filter media, typically used for removal of ammonia (NH _3). TMS is a low molecular weight/low boiling Si-containing AMC that migrates rapidly via a standard AMC filter. HMDSO is preferably captured on a medium containing an activated carbon adsorbent. However, TMS can cause permanent optical damage in 193 nm and 248 nm exposed tool optics.

In accordance with one form of the invention, a functional substantially non-carbon filter media, such as a functional nonwoven media, can also be used in systems that also prevent the conversion of PGMEA to contaminant acetic acid. PGMEA into acetic acid in acidic NH ₃ filter medium, which is typically used to remove ammonia. Acetic acid helps to resist process variation and potential material corrosion in 193 nm and 248 nm lithography etch exposure tools.

The version of the present invention may be, for example, a filter system, the filter system also comprises one or more of the following, alone or in combination of two or more than two of: removing NH ₃ acidic medium, such as a sulfonic Or carboxylic acid medium; remove HMDSO medium; remove air alkaline pollutant medium; remove air acidic pollutant medium; remove air organic pollutant medium. In one version, the airborne organic contaminants removed by the one or more filters or filter media include airborne organic contaminants such as, but not limited to, hexamethyldioxane (HMDSO), propylene glycol monomethyl ether acetate (PGMEA) and toluene, either alone or in combination of two or more. It should be understood that two or more filters or filter media having a plurality of airborne organic contaminants removed are within the scope of the present invention and are included in the scope of the present invention, and the air organic contaminants may have different from each other. Or a similar variety of features. In one version according to the invention, the air alkaline contaminant removed by one or more filters or filter media in the filter system comprises a base such as, but not limited to, ammonia, an organic primary, secondary or tertiary amine. Etc., alone or in combination of two or more.

According to one version of the invention, a functional substantially non-carbon filter media, such as a functional nonwoven media, can also be used as one or more filters or filter media in the system according to the teachings of FIG. Referring to Figure 3, an asymmetric replaceable filter stack 300 is depicted in accordance with an embodiment of the present invention. The replaceable filter stack 300 includes a first filter 310, a second filter 320, and a third filter 330. The first filter 310 in the first filter position removes one or more air organic contaminants from the air stream passing through the first filter 310. A second filter 320 in the second position, downstream of the first filter, is physically and chemically exchangeable with the first filter and removes airborne organic contaminants from the air stream output from the first filter 310. The third filter 330 in the third position is located downstream of the second filter 320, is not exchangeable with the first filter 310 or the second filter 320, and removes one or more of the air streams output from the second filter 320. Air alkaline pollutants. In one embodiment, the initial capacity of the first filter 310 for removing organic contaminants and the initial capacity of the second filter 320 are within +/- 25%, such as at the same gas flow rate and contaminant input. The attack is measured in units of one billionth of an hour, and the second filter 320 has a capacity sufficient to permit exchange of airborne organic pollutants with the depleted first filter in the replaceable filter stack 300.

Each filter 310, 320, 330 has one or more dielectric layers. In an embodiment, the filters 310, 320, 330 comprise two dielectric layers. In one embodiment, the first filter 310 includes two dielectric layers 2, both of which are removed as one or more air contaminants of organic or acid. The second filter 320 also includes two dielectric layers 2, both of which are removed as one or more air contaminants of organic or acid. It should be appreciated that embodiments of the first filter 310 and the second filter 320 may include other dielectric layers that are symmetrical to one another or different from one another. The third filter 330 has two different dielectric layers. The two dielectric layers of the third filter 330 are a dielectric layer 1 that removes air pollutants that are organic or acid or alkali, and a dielectric layer 6 that removes air pollutants that are weak acids or bases. It should be appreciated that embodiments of the third filter 330 include other dielectric layers that are different from the dielectric layers in the first filter 310 and the second filter 320. It should also be appreciated that the filter stack can further include other filters, and the plurality of filters can have various characteristics.

The stack 300 of replaceable filters is asymmetrical because the first filter 310 and the second filter 320 are similar or interchangeable based on the symmetry or similarity of the dielectric layers, but the third filter 320 is different The first filter 310 and the second filter 320 are different from the dielectric layers of the first filter 310 and the second filter 320 because the dielectric layer of the third filter 330 is different. Therefore, the stack 300 of replaceable filters is asymmetrical because the third filter 320 is different from the first filter 310 and the second filter 320.

In one embodiment, the airborne organic contaminants removed by the first filter 310 and the second filter 320 include, for example, but not limited to, the following air organic pollutants: hexamethyldioxane (HMDSO), Propylene glycol monomethyl ether acetate (PGMEA) and toluene, either alone or in combination of two or more thereof. It should be understood that the first filter 310 and the second filter 320 having a plurality of air-organic contaminants that may have different or similar characteristics from each other are within the scope of the present invention and are included therein. In an embodiment, the airborne organic contaminants removed by the first filter 310 and the second filter 320 comprise HMDSO. In another embodiment, the airborne organic contaminants removed by the first filter 310 and the second filter 320 comprise PGMEA. In yet another embodiment, the airborne organic contaminants removed by the first filter 310 and the second filter 320 comprise toluene. It should be appreciated that embodiments include a first filter 310 and a second filter 320 that can remove a plurality of air organic contaminants that can have various features that are different or similar to one another. In one embodiment, the plurality of organic contaminants removed by the first filter 310 and the second filter 320 include HMDSO and PGMEA.

In another embodiment, the first filter 310 removes airborne organic contaminants and the second filter 320 removes less airborne organic contaminants than the first filter 310. In a particular embodiment, the first filter 310 has removed detectable air organic contaminants such as, but not limited to, HMDSO or PGMEA, and as compared to the first filter as detected, second Filter 320 has removed less organic contaminants such as, but not limited to, HMDSO or PGMEA.

In one embodiment, the air alkaline contaminant removed by the third filter 330 comprises a base such as, but not limited to, ammonia, an organic primary, secondary or tertiary amine, etc., either alone or in two Combination of more or more. It will be appreciated that a third filter 330 having a plurality of airborne alkaline contaminants that can have various features is within the scope of the invention and is included therein. In a particular embodiment, the air alkaline contaminants removed by the third filter 330 include a base such as ammonia.

In an embodiment, the replaceable filter stack 300 further includes a monitoring mechanism to measure the penetration of air contaminants through each of the filters in the stack, and the inlet stacking monitor at the entrance to the stack. One embodiment includes four monitor mechanisms to measure one or more AMC concentrations in the gas downstream of each filter: a first inner stacked monitor 312 in the first inner stack downstream of the first filter 310 And a second filter 320 upstream for measuring the penetration of air pollutants from the first filter 310; a second inner stacking monitor 322, which is upstream of the second filter 320 and upstream of the third filter 330. To measure the penetration of air contaminants from the second filter 320; an inlet stack monitor 302 at the inlet upstream of the stack of first filters; and an outlet stack monitor 332 at the third filter 330 Stack the downstream outlet. In a particular embodiment, the monitor includes a sensor. See, for example, the patent application WO/2001/085308, which is incorporated herein in its entirety by reference.

One embodiment of the invention includes a gas cabinet housing that includes one or more replaceable filter stacks 300. A particular embodiment includes two parallel filter stacks 300 stacked on top of each other in front and two other filter stacks 300 on the rear. Each filter stack 300 has an outlet filter and two upstream filters that can be exchanged with the rightmost first filter. Although described as having four filter stacks 300 in a gas cabinet, a smaller or larger number of filter stacks in different sized gas cabinets are within the scope of the present invention.

In another version of the invention, the air molecular contamination filter 10 includes a filter cartridge that includes a filter pleated package medium, wherein the pleated package media comprises a functional substantially non-carbon filter media. For example, the pleated package may comprise a functional nonwoven fibrous medium such as a polyester non-woven fibrous medium, a polypropylene non-woven fibrous medium, a nylon non-woven fibrous medium, and a glass fiber non-woven fibrous medium, either of which Can be pleated. The pleated package can include a pleated package separator. In one example, the functional nonwoven media is co-pleated with the screen, which can be positioned on either side of the functional nonwoven media. A pleated package having a functional nonwoven fibrous medium can include one or more of the following: another rigid structural material between the pleats of the pleated separator, the wire mesh, the corrugated aluminum, or the pleated package. The pleated package can include one or more layers of one or more high loft layers. Both the yarn and the high loft may comprise a nonwoven material such as polyester or other non-woven fibers as taught herein and a binder. The high loft material can include an adsorbent, such as a carbon or ion exchange adsorbent, and can include a mixed adsorbent. In other embodiments, the filter cartridge need not be pleated.

In accordance with the form of the present invention, the nonwoven material used in the filter pleated package can be any of a variety of different possible material types, fiber sizes, and bonding materials. For example, a polyester non-woven fabric medium, a polypropylene non-woven fabric medium, another polymer-based nonwoven fibrous medium, a nylon non-woven fibrous medium, and a glass fiber non-woven fibrous medium can be used. In one example, a varying size polyester fiber using ethylene-vinyl chloride as a binder can be used. The polyester fibers can be randomly oriented or mechanically oriented, such as by carding. Other types of fibers can be used, including bicomponent fibers, such as bicomponent fibers including a polyethylene outer shell and a polyester core. Bicomponent fibers can be used without the need for a binder.

According to one version of the invention, the adsorbent used in the filter pleated pack can be, for example, a single particulate material type or a mixture of different types of particulate material types. For example, activated carbon mixed with ion exchange can be used. Activated carbon can be treated with a variety of different possible chemical agents, each of which targets a different contaminant. Examples of mixing ratios that can be used are 87% particulate activated carbon and 13% ion exchange resin. Another mixing ratio that can be used is 60% alkali treated particulate activated carbon with 40% ion exchange.

In accordance with one aspect of the invention, the filter cartridge can include any of the materials taught in U.S. Patent No. 6,740,147, the entire disclosure of which is incorporated herein by reference in its entirety in The filter cartridge can include a non-woven material and an adsorbent as taught therein.

According to one version of the invention, the filter cartridge is a cartridge that achieves excellent degassing and particulate emissions results for applications such as reduced air molecular contamination (AMC). For example, the filter cartridge system can be a system that passes the International Standards Organization (ISO) 14644-1 clean room standard at a level of particulate emissions of Class 5, Level 4, Level 3, Level 2, or even Level 1. The complete teachings of the ISO 14644-1 Cleanroom Standard are hereby incorporated by reference, including the specific disclosure of the s s s s s s s s s s s s s s s s s s s s s s s s s s s s s s s s

Additionally, the filter cartridge can reduce the total air molecular contamination concentration from about 10 to about 50 ppb upstream of the filter cartridge system to less than about 1 ppb to about 5 ppb downstream of the filter cartridge system. Additionally, the filter cartridge can achieve a removal efficiency of at least about 90% or greater at inlet contamination concentrations of up to about 50 ppb, such as about 99.9% or greater for a particular contaminant.

2 is a schematic diagram illustrating the case in which an AMC filter system according to the type of the present invention can be used. The filter system can be used in semiconductor manufacturing and clean room situations; and can be used in the air chamber 21 as a clean room ceiling chemical air filter 22, and as a manufacturing level tool level AMC filter 23; and can be used in any tool ( Such as baking tools, etching tools, etc.).

Although various compositions and methods are described, it is to be understood that the invention is not limited to the particular compositions, designs, methods or arrangements described, as they may vary. It is also understood that the terminology used in the specification is for the purpose of describing the particular embodiments of the invention, and is not intended to limit the scope of the invention.

It must also be noted that the singular forms "a", "an" and "the" References. Thus, for example, reference to a "filter medium" is referred to one or more filter media and equivalents known to those skilled in the art. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the art. Methods and materials similar or equivalent to those described herein can be used in the practice or testing of the present invention. All publications mentioned herein are incorporated by reference in their entirety. In this document, nothing should be construed as an admission that the invention is not limited to such disclosure as prior invention. "Optional" or "optionally" means that the subsequently described event or circumstance may or may not occur, and that the description includes the circumstances in which the event occurred and the circumstances in which it did not occur. All numerical values herein may be modified by the term "about", whether or not explicitly indicated. The term "about" generally refers to a range of values that would be considered by those skilled in the art to be equivalent to the recited value (ie, having the same function or result). In some versions, the term "about" refers to ±10% of the stated value, and in other versions, the term "about" refers to ±2% of the stated value. When the composition and method are described in terms of "comprising" different components or steps (which are interpreted as meaning "including but not limited to"), the compositions and methods may also consist of "substantially" consisting of different components and steps. Or "by" different components and steps "composition", such terms should be interpreted as defining a substantially closed group of members.

While the invention has been shown and described with respect to the embodiments the embodiments The invention includes all such modifications and variations and is only limited by the scope of the appended claims. In addition, although certain features or aspects of the invention may be disclosed in accordance with only one of several implementations, such features or aspects may be in other embodiments as may be required and advantageous for any given or particular application. One or more other features or combinations of aspects. In addition, the terms "includes", "having", "has", "with" or variations thereof are used in the context of the embodiments or the scope of the claims. The term is intended to be inclusive in a manner similar to the term "comprising." In addition, the term "exemplary" is merely intended to mean an instance rather than an optimal one. It should also be appreciated that the features and/or elements described herein are described in terms of specific dimensions and/or orientations relative to one another for ease of understanding, and the actual size and/or orientation may be substantially different than that illustrated herein. Size and / or direction.

Although the invention has been described in considerable detail with reference to specific embodiments thereof, other forms are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description and the forms contained in the specification.

The teachings of all patents, published applications and references cited herein are hereby incorporated by reference in their entirety.

1‧‧‧ dielectric layer

2‧‧‧ dielectric layer

6‧‧‧ dielectric layer

10‧‧‧Filter

11‧‧‧First filter media

12‧‧‧Second filter media

13‧‧‧Stack monitor

14‧‧‧First air flow

15‧‧‧Second air flow

21‧‧‧Inflatable Room

22‧‧‧Chemical air filter

23‧‧‧Tool-level AMC filter

300‧‧‧Replaceable filter stack

302‧‧‧Inlet Stack Monitor

310‧‧‧First filter

312‧‧‧First internal stacking monitor

322‧‧‧Second internal stacking monitor

320‧‧‧Second filter

330‧‧‧ third filter

332‧‧‧Export stack monitor

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic block diagram of an air molecular contamination filter in accordance with the present invention.

2 is a schematic diagram illustrating the case in which an AMC filter system according to the type of the present invention can be used.

3 shows an asymmetric stack of replaceable filters in accordance with an embodiment of the present invention.

Claims (10)

An air molecular pollution filter, the filter comprising: a first filter medium that removes first air pollution from a first air flow passing through the first filter medium; and a second filter medium located in the first filter medium Downstream, the second filter medium removes second air pollution from the second air stream outputted from the first filter medium; at least one of the first filter medium and the second filter medium is included from the first A functional substantially non-carbon filter medium that removes weak acid from at least one of the air stream and the second air stream. The air molecule contaminating filter of claim 1 wherein the functional substantially non-carbon filter media comprises a functional nonwoven media. The air molecularly contaminated filter of claim 2, wherein the functional nonwoven fibrous medium comprises at least one adsorbent and a polymer-based nonwoven fibrous medium. The air molecule contaminating filter of claim 1 wherein the functional substantially non-carbon filter medium comprises a coating from a potassium containing solution. The air molecular contamination filter of claim 1, wherein the first filter medium comprises at least one of an activated carbon filter medium and an ion exchange filter medium. The air molecule contaminating filter of claim 1, wherein in the series of air streams, the series of the first filter medium, the second filter medium, and the at least one other filter medium are configured to follow at least the first air stream And removing the required amount of at least the first air pollution and the second air pollution from the at least the first air flow and the second air flow when the second air flow passes through the air molecular pollution filter. An air molecular contamination filter according to claim 1 comprising a stack of replaceable filters, the first replaceable filter of the stack comprising the first filter medium and the second replaceable filter of the stack comprising the second filter medium. The air molecular contamination filter of claim 7, further comprising at least one inner stacking monitor for measuring the penetration of the first air pollution from the first filter, the inner stacking monitor being at the first filter Downstream and upstream of the second filter. The air molecular contamination filter of claim 1, wherein the functional substantially non-carbon filter medium comprises at least one of: a nonwoven fiber, a monolithic filter media, a particulate media, and a honeycomb filter media. The air molecular contamination filter of claim 1, further comprising a filter cartridge comprising a filter pleated packaging medium comprising the functional substantially non-carbon filter media.