TW201918440A - Wafer storage moving machine structure moving in a unidirectional or bidirectional manner - Google Patents

Abstract

A wafer storage moving machine structure is provided with a first layer platform, a second layer platform, and a movable lifting platform. The movable lifting platform is mounted on one side of the first layer platform and the second layer platform. The movable lifting platform is provided thereon with a carrying platform, a servo lifting mechanism, and a sliding rail mechanism. The slide rail mechanism is located on both sides of the servo lifting mechanism, and the slide rail mechanism and the servo lifting mechanism are respectively provided with corresponding joint portions, and are coupled to the carrying platform through the corresponding joint portions, so that the carrying platform can move back and forth between the first layer platform and the second layer platform through the servo lifting mechanism. Therefore, the invention has the effect of one-way and two-way movements.

Description

Wafer storage mobile structure

The invention relates to a wafer storage mobile machine structure, in particular to a storage operation capable of single and two-way movement, and is suitable for inventory management of storage and production storage and product storage.

In conventional wafer operations, since the wafer is very thin and easily broken, it is loaded by a box during the transport process to protect the wafer from collision and damage.

When the wafer-loaded box is to be stored for storage, or to be taken out of the warehouse for shipment or to the production line, it is mostly carried by hand, especially in order to save space. The boxes loaded with wafers are often placed on different shelves, and the box needs to be moved frequently for easy access, so that it can conform to the first-in first-out management mode.

However, because of the need to move, it is easy to cause collisions and damage the wafer.

Therefore, in view of the above-mentioned deficiencies, the present inventors have been able to propose a wafer storage mobile machine structure with automatic performance, so that the user can easily operate the assembly, and the research and design system is designed to provide user convenience. The inventors of the present invention have been motivated by the inventors.

The main object of the present invention is to provide a wafer storage mobile machine structure, which is provided with a first platform, a second platform and a movable lifting platform, and the movable lifting platform is set on the first platform and the first a side of the second floor platform, wherein the movable lifting platform is provided with a carrying platform, a servo lifting mechanism and a sliding rail mechanism, the sliding rail mechanism is located on both sides of the servo lifting mechanism, and the sliding rail mechanism and the servo lifting mechanism Corresponding joints are respectively provided and coupled with the bearing platform through the corresponding joint portion, so that the load platform can move back and forth between the first layer platform and the second layer platform through the servo lifting mechanism. The invention has the effect of single and two-way movement, thereby increasing the overall utility.

A second object of the present invention is to provide a wafer storage moving machine structure, wherein a belt mechanism is coupled to a carrying platform of the movable lifting platform, and the conveyor belt mechanism is provided with a plurality of rollers on both sides. And the plurality of rollers on each side are driven by a leather belt sleeve, and the rollers on the two sides are provided with a rod body to be connected to each other, and the belt mechanism of the carrying platform moves along the movable lifting platform. Between a platform and the second platform, the at least one box can be moved to the platform of the first platform or the platform of the second platform through the conveyor mechanism, so as to be formed The efficiency of automation, which in turn increases the overall mobility.

The wafer storage mobile machine structure of the present invention is provided with a first layer platform, a second layer platform and a movable lifting platform. The first layer platform is located on the upper layer, and the first layer platform is composed of a plurality of platforms. The second layer platform is located on the lower layer, and the second layer platform is composed of a plurality of platforms; and the movable lifting platform is disposed on one side of the first layer platform and the second layer platform, and The movable lifting platform is provided with a carrying platform, a servo lifting mechanism and a sliding rail mechanism. The sliding rail mechanism is located at two sides of the servo lifting mechanism, and the sliding rail mechanism and the servo lifting mechanism are respectively provided with corresponding joint portions. And engaging with the carrying platform through the corresponding joint portion, so that the carrying platform can move back and forth between the first layer platform and the second layer platform through the servo lifting mechanism.

The above and other objects and advantages of the present invention will be readily understood from

Of course, the invention may be varied on certain components, or in the arrangement of the components, but the selected embodiments are described in detail in the specification and their construction is shown in the drawings.

Please refer to FIGS. 1-7, which are schematic diagrams of embodiments of the present invention, and the preferred embodiment of the wafer storage mobile machine structure of the present invention is applied to warehouse inventory management and storage operations such as production preparation and product storage, and has Single, two-way mobile performance.

The wafer storage mobile phone structure of the present invention is composed of a first platform 10, a second platform 20 and a movable lifting platform 30 (as shown in FIGS. 1 and 2). The 30 series is disposed on one side of the first layer platform 10 and the second layer platform 20, and the movable lifting platform 30 is provided with a carrying platform 31, a servo lifting mechanism 32 and a sliding rail mechanism 33 (as shown in FIG. 3) The slide rail mechanism 33 is located on both sides of the servo lift mechanism 32. The slide rail mechanism 33 and the servo lift mechanism 32 are respectively provided with corresponding joint portions 321 and 331 and are transmitted through the corresponding joint portions 321, 331 In combination with the carrying platform 31, the carrying platform 31 can be moved back and forth between the first layer platform 10 and the second layer platform 20 through the servo lifting mechanism 32.

The first platform 10 and the second platform 20 are each composed of a plurality of stations 11 and 21 (the drawings of the present invention are described by two stations 11 and 21, respectively, and the platform of the present invention. The number of 11, 21 can be adjusted according to the actual situation and the size of the space, not limited to the illustration of the present invention, and the platform 11 of the first platform 10 and the platform 21 of the second platform 20 are each set. There are conveyor belt mechanisms 12, 22, wherein the conveyor belt mechanisms 12, 22 are capable of transporting at least one casing 40 (as shown in Fig. 4), and the conveyor belt mechanisms 12, 22 are each provided with a plurality of sides The rollers 121 and 221 are disposed on the plurality of rollers 121 and 221 of the respective sides by belts 122 and 222, and the rollers 121 and 221 on the two sides are provided with rods 123 and 223 to be connected to each other for transmission. The driving of the rollers 121 and 221 on the two sides facilitates movement of the at least one case 40 between the stations 11 and 21.

In addition, the carrying platform 31 of the movable lifting platform 30 is coupled with a conveyor belt mechanism 311 (as shown in FIG. 3), wherein the conveyor belt mechanism 311 can transport at least one casing 40, and the conveyor belt mechanism 311 The inner side is provided with a plurality of rollers 3111 on both sides, and the plurality of rollers 3111 on the respective sides are sleeved by the belt 3112, and the rollers 3111 on the two sides are provided with the rod body 3113 to be connected to each other, and the activity is connected. The servo lifting mechanism 32 of the lifting platform 30 is provided with a servo motor 322 and a screw 323, and the screw 323 is connected to the servo motor 322, so that the screw 323 can be rotated by the actuation of the servo motor 322. The conveyor belt mechanism 311 of the carrying platform 31 can be moved through the conveyor belt mechanism 311 when the servo lifting mechanism 32 of the movable lifting platform 30 moves between the first platform 10 and the second platform 20 A case 40 is moved to the platform 11 of the first floor platform 10 or the second floor is flat 20 of the platform 21, can be formed so as to have the automated performance.

Furthermore, the lower layer of the second layer platform 20 of the present invention is provided with at least one electronic control wiring box 50 (as shown in FIG. 2), and the electronic control wiring box 50 is connected to the first layer platform 10, The second platform 20 and the movable lifting platform 30 are electrically connected to provide power usage. In addition, in conjunction with the embodiment of the present invention, the first platform 10 is attached to the outermost platform 11 and is provided with a wireless radio frequency transceiver ( An RFID (not shown) and a display screen 60, wherein the wireless radio frequency transceiver is electrically connected to the display screen 60 to display the received radio frequency transceiver data through the display screen 60, or The radio frequency transceiver (not shown) and the display screen 60 are also disposed on the outermost platform 21 of the second layer platform 20 (not shown), wherein the radio frequency transceiver is also provided. The device is electrically connected to the display screen 60 to display the received radio frequency transceiver data through the display screen 60, so as to improve the visibility during use.

The main embodiment of the present invention (as shown in FIG. 4, FIG. 5, FIG. 6 and FIG. 7) is to first move the case 40 to the first layer platform through a robot arm (not shown). After the topmost platform 11 on the top of the platform 11, the cabinet 40 is lowered onto the platform 11, wherein the housing 40 is provided with a radio frequency chip (not shown), and the radio frequency chip is provided with the radio frequency chip. The information of the box 40 enables the radio frequency transceiver (RFID) in the station 11 to detect the information of the radio frequency chip on the box 40, and the information of the box 40 is presented through the display screen 60. The box 40 can be transported through the conveyor mechanism 12 in the platform 11 of the first platform 10, and the casing 40 is transported down to the first through the carrying platform 31 of the movable platform 30. The platform 21 of the second floor platform 20 is then passed through the conveyor mechanism 22 in the platform 21 to transport the casing 40 to the outermost platform 21 of the second platform 20 for the operator or warehouse personnel. Come and take it.

For the same reason (not shown), the casing 40 can also be transported from the platform 21 of the second platform 20 to the platform 11 of the first platform 10 through the operation of the loading platform 31 of the movable platform 30. The outermost platform 21 of the second layer platform 20 may also be provided with a radio frequency transceiver (RFID) (not shown) and a display screen 60 to place the cabinet 40 on the second platform 20 At the time of the outermost station 21, the information of the box 40 can be presented, thereby enabling the present invention to have the performance of single and two-way movement.

Furthermore, a pair of sensors (such as an infrared sensor) (not shown) are disposed on the left and right sides of the front end of the platform 11 on the outermost layer of the first layer platform 10, and a set of sensors are arranged on the left and right sides of the rear end. (For example, an infrared sensor) (not shown), the two sets of sensors are electrically connected to the display screen 60, and are electrically connected to a sounder (such as a horn), and the two sets of sensors are sensed. At the position of the box 40, when the robot arm moves the box 40 to the platform 11 on the outermost layer of the first layer platform 10, if the box 40 is not in the correct position, the front end protrudes to shield the front end sensor. When the signal, or the signal that causes the rear end to protrude from the rear end sensor, the sounder will sound an alarm, and the display 60 will display an image of the alarm to prompt the user to adjust the position of the box 40.

Referring to FIG. 8, as shown in the schematic diagram of the operation flow of the present invention, when the at least one box 40 is moved between the stations 11, 21, the following steps are performed: (101) The judgment is made by the platform. 11 Move to station 21, or move from station 21 to station 11? If the station 11 moves to the station 21, the following step (102) is performed; if the station 21 moves to the station 11, the step (106) is performed. (102) Starting the loading platform 31 to move to the first floor platform 10. (103) The tank 40 is transported to the carrying platform 31 by the conveyor belt mechanisms 12, 311. (104) The loading platform 31 is activated to move to the second level platform 20. (105) The tank 40 is transported to the platform 21 by the conveyor belt mechanisms 311, 22, and then the step (101) is continued. (106) Starting the carrier platform 31 to the second layer platform 20. (107) The tank 40 is transported to the carrying platform 31 by the conveyor belt mechanisms 22, 311. (108) The loading platform 31 is activated to move to the first floor platform 10. (109) The tank 40 is transported to the platform 11 by the conveyor belt mechanisms 311, 12, and then the step (101) is continued.

From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the foregoing objects and is in accordance with the provisions of the Patent Law.

However, the above is only the preferred embodiment of the present invention, and the scope of the present invention is not limited thereto; therefore, equivalent changes and modifications made by the scope of the invention and the contents of the invention are It should remain within the scope of this invention.

10‧‧‧First floor platform

11‧‧‧ Platform

12‧‧‧Conveyor belt mechanism

121‧‧‧Roller

122‧‧‧Land

123‧‧‧ rod body

20‧‧‧Second level platform

21‧‧‧ Platform

22‧‧‧Conveyor belt mechanism

221‧‧‧Roller

222‧‧‧Land

223‧‧‧ rod body

30‧‧‧ activity lift

31‧‧‧Loading platform

311‧‧‧Conveyor belt mechanism

3111‧‧‧Roller

3112‧‧‧Land

3113‧‧‧ rod body

32‧‧‧Servo lifting mechanism

321‧‧‧corresponding joint

322‧‧‧Servo motor

323‧‧‧ screw

33‧‧‧Slide rail mechanism

331‧‧‧corresponding joint

40‧‧‧ cabinet

50‧‧‧Electric control wiring box

60‧‧‧ display

Figure 1 is a schematic view of the appearance of the present invention. Figure 2 is a schematic view of another appearance of the present invention. Figure 3 is a schematic view of the movable lifting platform of the present invention. Figure 4 is a schematic view of the first operation of the main embodiment of the present invention. Figure 5 is a schematic view of the second operation of the main embodiment of the present invention. Figure 6 is a schematic view of the third operation of the main embodiment of the present invention. Figure 7 is a schematic view of the fourth operation of the main embodiment of the present invention. Figure 8 is a schematic diagram of the action flow of the present invention.

Claims (10)

A wafer storage mobile machine structure is provided with: a first layer platform, the first layer platform is located at an upper layer, and the first layer platform is composed of a plurality of platforms; a second layer platform, the second layer platform The second floor platform is composed of a plurality of platforms; and a movable lifting platform is disposed on one side of the first floor platform and the second floor platform, and the activity is The lifting platform is provided with a carrying platform, a servo lifting mechanism and a sliding rail mechanism. The sliding rail mechanism is located on both sides of the servo lifting mechanism, and the sliding rail mechanism and the servo lifting mechanism are respectively provided with corresponding joint portions, and are transmitted through The corresponding joint portion is combined with the carrying platform to enable the carrying platform to move back and forth between the first layer platform and the second layer platform through the servo lifting mechanism. The wafer storage mobile phone structure according to claim 1, wherein the platform of the first platform and the platform of the second platform are further provided with a conveyor belt mechanism, and the conveyor belt mechanism further A plurality of rollers are arranged on each side, and the plurality of rollers on the sides are driven by a sheath, and the rollers on the two sides are provided with a rod body to connect with each other. The wafer storage mobile phone structure according to claim 1, wherein the carrying platform of the movable lifting platform is further combined with a conveyor belt mechanism, and the conveyor belt mechanism further comprises a plurality of rollers on both sides And the plurality of rollers on each side are driven by a sheath, and the rollers on the two sides are provided with a rod body to connect with each other. The wafer storage mover structure of claim 2, wherein the conveyor belt mechanism further transports at least one of the cabinets. The wafer storage mobile phone structure of claim 4, wherein the box is further provided with a radio frequency radio chip, and the radio frequency chip is provided with information for interpretation. The wafer storage mobile phone structure of claim 1, wherein the second layer platform is further provided with at least one electronic control wiring box, and the electronic control wiring box is connected to the first layer platform. The second platform and the movable lifting platform are electrically connected to provide a power user. The wafer storage mobile phone structure of claim 1, wherein the first layer platform further comprises a wireless radio frequency transceiver and a display screen on the outermost station platform, and the wireless radio frequency transceiver system is The display is electrically connected to display the data of the received radio frequency transceiver through the display. The wafer storage mobile phone structure according to claim 1, wherein the second layer platform further comprises a wireless radio frequency transceiver and a display screen on the outermost station platform, and the wireless radio frequency transceiver system is The display is electrically connected to display the data of the received radio frequency transceiver through the display. The wafer storage mobile phone structure of claim 1, wherein the servo lifting mechanism is further provided with a servo motor and a screw, and the screw is electrically connected to the servo motor, so that the screw can be used by the screw The servo motor is actuated to rotate. The wafer storage mobile phone structure of claim 1, wherein the outermost platform on the first layer platform is provided with a set of sensors on the left and right sides of the front end, the two sets of sensors and the display The screen is electrically connected and electrically connected to a sounder. The two sets of sensors sense the position of the box. When the robot moves the box to the outermost platform on the first floor platform, When the cabinet is not in the correct position, causing the front end to protrude from the signal shielding the front end sensor, or causing the rear end to protrude from the signal shielding the rear end sensor, the sounder will sound an alarm and the display will display an alarm map. Text.