TW201908233A - A carbon nanotube forest strain sensor and the forming method thereof - Google Patents

Abstract

The present invention is a highly sensitive and flexible carbon nanotube forest strain sensor, comprising: a first electrode, a second electrode, a same directory queue carbon nanotube forest, and a flexible support substrate. The present invention provides a method for manufacturing a carbon nanotube forest strain sensor, the same directory queue carbon nanotube forest can be directly grown on a flexible support substrate by a chemical vapor deposition method.

Description

 Nano carbon tube bundle strain sensor and forming method thereof  

The invention relates to a carbon nanotube bundle strain sensor and a forming method thereof, in particular to a high sensitivity flexible carbon nanotube bundle strain sensor and a forming method thereof.

The traditional "strain sensor" commonly used today is made of a metal film (or sheet), but its "strain gauge factor" is only 1 to 5 (the larger the strain gauge factor, the meaning Between the sensing sensitivity is higher, and there are strain sensors made by semiconductor process technology, the sensitivity has been improved, and the "strain gauge factor" is about 15 to 200, but the semiconductor process technology In addition to the high cost of using expensive process machines, the "strain sensors" are based on tantalum, resulting in a hard and brittle material, high manufacturing costs, and limited processing technology. The technical development of the "strain sensor".

Nano carbon nanotubes are popular sensing materials in recent years. They are fabricated into strain sensors using semiconductor process technology. The strain gauge factor can be as high as 1000 or more. However, if a germanium substrate is used, the strain sensor will be limited. development of. In addition, there are many studies on the manufacture of carbon nanotube sensors, but they are all manufactured by post-processing, which makes the manufacturing method quite complicated and the reproducibility of manufacturing is also affected.

In addition, the "flexible" characteristics are also the development demands of "strain sensors" in recent years. The "strain sensors" of "flexibility" are easy to process, easy to integrate, flexible design and simple manufacturing. It can reduce the complexity of component manufacturing and reduce the manufacturing cost of the strain sensor. However, because the "flexible" substrate can withstand high process temperatures, most flexible "strain sensors" are made by post-processing, that is, sensing components and senses. The materials are manufactured separately, but the manufacturing method increases the manufacturing cost and is affected by the environment and process technology, so that the reproducibility of the manufacturing technology cannot be improved.

Therefore, in order to reduce the manufacturing cost of the "strain sensor" and to be free from environmental and process technologies, and to improve the reproducibility of manufacturing technology, it is necessary to develop a new "flexible" strain sensor. In order to improve the sensing performance of the "strain sensor" and reduce the overall manufacturing cost of the "strain sensor".

The present invention is a high sensitivity flexible carbon nanotube forest strain sensor, comprising a first electrode, a second electrode, a carbon nanotube bundle arranged in a directional direction, and a Flexible support substrate. The first electrode and the second electrode are disposed above the carbon nanotube bundles arranged in the same direction, and the first electrode and the second electrode have a certain proper distance.

The carbon nanotube bundles of the same orientation of the carbon nanotube bundle strain sensor of the present invention can be directly (or indirectly) grown (or placed) on the flexible support substrate.

The flexible support substrate of the carbon nanotube strain sensor of the present invention comprises a soft material resistant to temperatures up to 600 ° C and a soft material resistant to temperatures up to 600 ° C.

When a uniform voltage is applied to both sides of the carbon nanotube bundle of the carbon nanotube bundle flexible strain sensor of the present invention, the carbon nanotube bundle flexible strain sensor can be generated when a small external force is deformed. High resistance change rate.

The invention provides a simple method for manufacturing a carbon nanotube bundle flexible strain sensor, which can directly grow the same direction aligned nano carbon on the flexible support substrate by chemical vapor deposition. Tube bundles.

The invention relates to a high-sensitivity flexible strain sensor and a manufacturing method thereof, which can use the same-directional arrangement of carbon nanotube bundles to manufacture a high-sensitivity flexible strain sensor, so that it can be made in a small In the state of strain and voltage input, a high resistance change rate is generated, which is applied to various types of objects to be sensed.

The invention provides a sensing method for a high sensitivity flexible carbon nanotube bundle strain sensor, comprising the steps of: providing an object to be sensed, the object being a point, a line or a surface, and then The high-sensitivity flexible strain sensor of the present invention is placed on the object to be sensed, and a small voltage is applied to the two electrodes of the flexible carbon nanotube strain sensor, and when the object to be sensed receives a When the strain is small, the flexible support substrate is deformed, thereby causing a high resistance change rate of the carbon nanotube bundle above the flexible support substrate to sense the strain of the object to be sensed. purpose.

Compared with the prior art, the present invention has a nano-carbon tube strain sensor with high sensitivity and flexibility and a manufacturing method thereof, which have the following advantages:

First, the invention can be manufactured by chemical vapor deposition method, and can synthesize the carbon nanotubes arranged in the same direction, so that any large area and small area can be manufactured, and uniform sensing sensitivity can be generated, so that it is suitable for application. On a variety of objects to be tested.

Second, when the carbon nanotubes of the present invention are subjected to slight strain, the contact area between the sides of the single carbon nanotubes may cause a change in contact resistance, and tens of millions of carbon nanotubes may Correspondingly, a high resistance change rate is generated, and thus the sensing sensitivity is high.

Third, the homogenous aligned carbon nanotube bundle of the present invention can be directly (or indirectly) transferred onto the flexible substrate by the flexible support substrate, so that the sensor has a simple structure and is suitable for Various flexible substrates and various objects to be sensed can reduce the limitation of the substrate, and can greatly improve its applicability and value.

Fourthly, in the same-directional arrangement of the carbon nanotubes of the present invention, since the carbon nanotubes have iron particles (or iron nanowires), the hindrance of electron transfer is increased, and the resistance thereof is changed. The rate is increased, which in turn increases the resistance and further improves the sensing sensitivity.

Fifth, the syndiotactic arrangement of the carbon nanotubes of the present invention is simple in that the ferrocene (or iron film) can be used as a catalyst, and the process gas of acetylene, ethylene and hydrogen can be used to grow. Save production time and cost.

Sixth, the present invention grows a carbon nanotube bundle strain sensor on a flexible support substrate, and because the process temperature is higher than 600 ° C, it is suitable for strain sensing in a high temperature environment, and can be greatly improved in various The use of environmental sensing.

Another advantage of the present invention is the advantages of high strain gauge factor, high sensing sensitivity, and high sensing efficiency.

10‧‧‧Nano carbon tube strain sensor

11‧‧‧Support substrate

12‧‧‧First electrode

13‧‧‧second electrode

14‧‧‧Nano Carbon Tubes

15‧‧‧Protective encapsulation layer

16‧‧‧Pre-force

20‧‧‧Nano carbon tube strain sensor

21‧‧‧Support substrate

22‧‧‧First electrode

23‧‧‧second electrode

24‧‧‧Nano Carbon Tubes

Fig. 1 is a perspective side view of a "nano carbon tube strain sensor" of the present invention.

Figure 2 is a cross-sectional side view of the "carbon nanotube strain sensor" of the present invention.

Fig. 3 is a perspective side elevational view of the "carbon nanotube bundle strain sensor" having an encapsulation layer of the present invention.

Fig. 4 is a view showing the preparation method of a "nano carbon tube bundle strain sensor" with high sensitivity and flexibility.

Fig. 5 is a view showing a method of preparing a "nano carbon tube bundle strain sensor" having a high sensitivity and flexibility of an encapsulation layer of the present invention.

Fig. 6 is an electron micrograph showing the growth of the "nano carbon tube bundle" of the present invention on a flexible "support substrate".

Fig. 7 is an electron micrograph of the "nanocarbon tube" of the present invention.

Figure 8 is a graph of strain/resistance change rate of the present invention.

In order to thoroughly understand the present invention, detailed steps and compositions thereof will be set forth in the following description. However, the preferred embodiments of the present invention will be described in detail below, but the present invention may be widely practiced in other embodiments, and the scope of the present invention is not limited, and The scope of the patents that follow will prevail.

The implementation of the present invention will be described in detail below with reference to the accompanying drawings, including a method of manufacturing a "carbon nanotube bundle strain sensor" and a method of sensing a strained object.

The present invention is a "nano carbon tube strain sensor 10" having high sensitivity and flexibility. Please refer to the "nano carbon tube strain sensor 10" of the present invention in Fig. 1 for a perspective side view. The "nano carbon tube strain sensor 10" includes a "first electrode 12", a "second electrode 13", a "nano carbon tube bundle 14" and a "support substrate 11" arranged in the same direction. . The "first electrode 12" and the "second electrode 13" are disposed above the "nanocarbon tube bundle 14" which is aligned in the same direction, and are disposed at the "first electrode 12" and the "second electrode 13" electrodes. The "nano carbon tube bundle 14" which is arranged in the same direction may be directly (or indirectly) formed (set or transferred) onto the "support substrate 11", that is, the same distance The directional arrangement of the "nano carbon tube bundle 14" is formed on the "support substrate 11".

Please refer to FIG. 1 for a perspective view of the present invention having high sensitivity and flexibility of "nano carbon tube strain sensor 10", further illustrating the same orientation of "nano carbon tube bundle 14" Each of the iron-filled (or unfilled) carbon nanotubes has the same orientation, and is uniformly grown on the "support substrate 11" which is heat-resistant to 600 ° C. The height of the "Nano Carbon Tubes 14" arranged in the same direction can be increased by the same direction of the "Nano Carbon Tubes 14" at different heights. And each of the iron-filled (or unfilled) carbon nanotubes has a diameter ranging from 5 nanometers (nm) to 20 nanometers, and the iron in the carbon nanotubes may be iron particles, or It is a iron nanowire, or other metal particles. Each of the carbon nanotubes of the "Nanocarbon tube bundle 14" arranged in the same direction is arranged in the same direction.

Still referring to FIG. 1 , the present invention has a high sensitivity and flexibility. The carbon nanotube bundle strain sensor 10 has a stereo side view. When a voltage is applied to the electrode, that is, a small stable voltage is input, and the flexibility is obtained. When the "nano carbon nanotube strain sensor 10" receives a slight external force and causes strain, the "carbon nanotube bundle 14" on the "support substrate 11" will be strained, resulting in the carbon nanotube. The change in the side contact area between the two causes a change in the rate of change of the electric resistance. Therefore, the "nano carbon tube strain sensor 10" of the present invention can produce a high resistance change rate under a small strain, and can have excellent strain sensing sensitivity. .

Referring to FIG. 1 again, the present invention has a high-sensitivity and flexibility "nano carbon tube strain sensor 10" stereoscopic side view, and the conductive of the "first electrode 12" and the "second electrode 13" The electrode material is not limited, and materials such as conductive metals such as gold, silver, copper, and aluminum, and conductive materials such as indium tin oxide (ITO) and carbon nanotubes may be selected. The adhesive material of the "first electrode 12" and the "second electrode 13" of the present invention is made of "metal silver paste" as a conductive adhesive, and can also be manufactured by using a metal sheet, a coating method or an electroplating method. The shape is not limited. The material types of the "first electrode 12" and the "second electrode 13" conductive electrodes are not limited, and in the embodiment of the present invention, "silver glue" is preferred.

Referring to FIG. 1 again, the present invention has a high-sensitivity and flexibility "nano carbon nanotube strain sensor 10" stereoscopic side view, wherein the "first electrode 12" and the "second electrode 13" are disposed on Above the "Nano Carbon Tubes 14" arranged in the same direction. However, the conductive electrodes between the "first electrode 12" and the "second electrode 13" need to be separated by an appropriate distance to avoid a short circuit when a current is applied. The "first electrode 12" and the "second electrode 13" are in contact with the upper side of the "carbon nanotube bundle 14", but are not in contact with the "support substrate 11".

The first aspect of the present invention has a high-sensitivity and flexibility "nano carbon tube strain sensor 10" side view, and the material of the "support substrate 11" can be "heat resistant temperature to 600 ° C. "Soft material" or "soft material with heat-resistant temperature up to 600 °C", including "soft material with heat resistance to 600 °C", including "aluminum foil", "copper foil", and "stainless steel foil" It allows the directional arrangement of "Nano Carbon Tubes 14" to grow directly on it. The "soft material with heat-resistant temperature up to 600 ° C" requires an additional layer of adhesive. The adhesive may be electrically conductive or non-conductive, and may be used to arrange the same directionality of growth. The carbon tube bundle 14" is transferred onto a soft material. In addition, the growing omnidirectional arrangement of "Nano Carbon Tubes 14" can also be directly transferred onto adhesive tape. The "support substrate 11" used in the present invention is a flexible "aluminum foil paper" which can be directly grown on the flexible "aluminum foil paper" and arranged in the same direction as "nano carbon tube bundle 14". "."

Please refer to FIG. 1 for a high-sensitivity and flexibility "nano carbon tube strain sensor 10" side view, the "support substrate 11" is not heat resistant (such as temperature heat to 600 ° C or more) ) viscous "tape", which can directly attach the adhesive "tape" to the omnidirectional arrangement of carbon nanotubes 14 on the "support substrate 11", and then by "tape" The adhesion is directly transferred to the "tape" in the same direction alignment "nano carbon tube bundle 14", and the two conductive electrodes are arranged and fixed in the same direction as that transferred to the "tape". Above the carbon tube bundle 14", the "nano carbon tube strain sensor 10" having high sensitivity and flexibility of the present invention is produced.

Still referring to Fig. 1, the present invention has a high sensitivity and flexibility "nano carbon tube strain sensor 10" stereoscopic side view, wherein "nano carbon tube strain sensor 10" can be exposed to the atmosphere Either sealed into an inert gas, and embodiments of the invention may be in an atmospheric environment. When the "nano carbon nanotube strain sensor 10" with high sensitivity and flexibility is connected to a supply voltage of 0.1 volt, it is highly sensitive and flexible when it is detected by a self-assembled cantilever strain device. The "Nano Carbon Tube Stress Sensor 10" has a strain gauge factor of 260 to 300.

Please also refer to Fig. 2 for a cross-sectional side view of the present invention having high sensitivity and flexibility "Nanocarbon tube strain sensor 20". The "nano carbon tube strain sensor 20" includes a "first electrode 22", a "second electrode 23", a "nano carbon tube bundle 24" and a "support substrate 21" arranged in the same direction. . The "first electrode 22" and the "second electrode 23" are disposed above the "nano carbon tube bundle 24" which is aligned in the same direction, and are disposed at the "first electrode 22" and the "second electrode 23" electrodes. The "nano carbon tube bundle 24" which is arranged in the same direction may be directly (or indirectly) formed (set or transferred) onto the "support substrate 21", that is, the same distance The directional arrangement of the "nano carbon tube bundle 24" is formed on the "support substrate 21".

Referring to the first aspect of the present invention, the present invention has a high sensitivity and flexibility "nano carbon tube strain sensor 10" stereo side view, and the second embodiment of the present invention has high sensitivity and flexibility "nano" A cross-sectional side view of the carbon tube strain sensor 20", in the embodiment of the present invention, the area of the same direction of the iron-filled "nano carbon tube bundle 14" or "nano carbon tube bundle 24" is 0.8 square centimeter To 0.2 square centimeters, the electrodes on the same direction of the iron-filled "nano carbon tube bundle 14" can be connected to the power supply voltage to obtain the "small carbon tube strain sensing" with high sensitivity and flexibility. 10".

Please refer to FIG. 3 for a high-sensitivity and flexible "carbon nanotube bundle strain sensor 10" side view of the present invention. The preferred embodiment of the present invention is based on "aluminum foil paper" and grows "nano". The carbon tube bundle 14" and the present invention can be transferred to various "support substrate 11". Therefore, the shape of the "support substrate 11" to be transferred can include various types such as a curved surface, a structural surface having a high and low undulations. The support substrate 11" can be within the scope of the present invention. If the flexible "support substrate 11" is a material that is not heat-resistant (for example, the temperature is heated to 600 ° C or higher), the transfer step is required. The material which is not heat-resistant (for example, the temperature is heated to 600 ° C or higher) can be classified into a material having a viscosity and a non-adhesive property. If the material is not viscous, it is first applied on the substrate having no adhesive material. a layer of adhesive, which can be electrically conductive or non-conductive, and then flip the same-directional arrangement of "nano carbon tube bundle 14" which has grown on the substrate onto the adhesive. After the adhesive is cured, it can be easily The "support substrate 11" is removed, and finally the conductive material is fixed on the transferred omnidirectional arrangement "nano carbon tube bundle 14", and separated by a suitable distance and covered with a "protective encapsulation layer 15". The "first electrode 12", the "second electrode 13", and the "nano carbon tube bundle 14" are covered by the "protective encapsulation layer 15" to form the high sensitivity of the "protective encapsulation layer 15" of the present invention. Flexible "Nano Carbon Tube Cluster Strain Sensor 10".

Please also refer to the perspective view of FIG. 3 for a high-sensitivity and flexible "carbon nanotube bundle strain sensor 10" having an encapsulation layer. The present invention can be supplemented with a "pre-force 16" to make "nano" After the carbon tube bundle of the carbon tube bundle 14" is subjected to the pre-force 16, the depression is generated, the number of contact points between the carbon tube bundles is increased, and the rate of resistance change during the micro deformation is improved, wherein the "first electrode" 12" and the "second electrode 13" will be in contact with the "nano carbon tube bundle 14", and the "nano carbon tube bundle 14" will not contact the "support substrate 11" (due to "nano" The carbon tube bundle 14" is in contact with the "support substrate 11", but the "support substrate 11" does not come into contact with the "first electrode 12" and the "second electrode 13".

Still referring to FIG. 3, a high-sensitivity and flexible "nano carbon tube strain sensor 10" side view of the present invention having an encapsulation layer, the "nano carbon tube bundle 14" of the present invention can be directly (or Indirectly) is provided on the flexible "support substrate 11", and if the flexible "support substrate 11" can withstand temperatures of up to 600 ° C, the "first electrode 12" and the "first" can be directly The two electrodes 13" are disposed above the "Nanocarbon tube bundle 14" in the same direction, thereby completing the "nano carbon tube strain sensor 10" having high sensitivity and flexibility.

The invention provides a sensing method for a high sensitivity and flexibility "carbon nanotube bundle strain sensor 10" having an encapsulation layer, comprising the steps of: providing a to-be-sensed object, the object to be sensed being one a point, a line or a face, and then placing the "nano carbon tube strain sensor 10" on the object to be sensed, at the two electrodes of the "nano carbon tube strain sensor 10" A small voltage is applied, and when the object to be sensed receives a slight "strain", the flexible "support substrate 11" is deformed, thereby making the upper portion of the flexible "support substrate 11" The carbon nanotube bundle 14" produces a high "resistance change rate" for the purpose of sensing the strain/resistance change rate of the object to be sensed.

Referring to FIG. 4, the present invention provides a method for forming a "nano carbon tube strain sensor" with high sensitivity and flexibility, and the specific steps thereof are as follows: first, as shown in step 401 of FIG. A flexible metal substrate (ie, a support substrate 11) resistant to a temperature of up to 600 ° C can be placed in a high temperature furnace tube capable of chemical vapor deposition by chemical vapor deposition, the flexible metal base The material is any flexible metal substrate that can withstand temperatures up to 600 ° C. The preferred flexible metal substrate of the present invention is "aluminum foil paper". In other words, "aluminum foil paper" is placed in a high temperature furnace tube. Carbon tube bundle 14" growth section. At this time, ferrocene is placed on the outside of the catalyst sublimation section.

Next, as shown in step 402 of FIG. 4, the carrier gas argon gas is introduced, and the first catalyst growth section, the middle buffer section, and the final growth section of the high temperature furnace tube are heated in an argon atmosphere. At this time, the ferrocene is still not heated outside the catalyst sublimation section.

Continuing as shown in step 403 of FIG. 4, the catalyst ferrocene is pushed into the first stage of the catalyst growth section at 250 ° C, and the first stage catalyst growth section is heated to 650 ° C, and the temperature rise time is 20 minutes. After a long period of 10 minutes, the ferrocene is sublimated and the process gas is also introduced.

Then, as shown in step 404 of FIG. 4, the carrying (process) gas is turned off to leave argon gas, and after cooling to cool to room temperature, the "nano carbon tube bundle 14" which grows in the same direction is removed from the flexible metal substrate. The height of the directional aligned iron-filled carbon nanotube bundle 14 ranges from several micrometers to several hundred micrometers.

Finally, as shown in step 405 of FIG. 4, "first electrode 12" and "second electrode 13" are provided, and are placed and fixed above the "nano carbon tube bundle 14" which has grown in the same direction and in the same direction. Sexually arranged "Nano Carbon Tubes 14" contact.

In the fifth aspect, the present invention provides a method for forming a "nano carbon tube strain sensor" having a high sensitivity and flexibility of an encapsulation layer, wherein the process gas is a carbon source gas and "hydrogen", wherein The carbon source gas may be a carbonaceous gas such as "acetylene" or "ethylene", but the preferred carbon source gas used in the present invention is "acetylene", and "hydrogen" is used as a gas for reducing carbon nanotube defects. Argon is an inert gas used primarily for carrying sublimated ferrocene gas molecules.

Referring to FIG. 5, the present invention provides a method for preparing a "nano carbon tube bundle strain sensor" having high sensitivity and flexibility, and the specific steps thereof are as follows: first, as shown in step 501 of FIG. It is shown that a flexible metal substrate (ie, a support substrate 11) resistant to a temperature of up to 600 ° C can be placed in a high temperature furnace tube capable of chemical vapor deposition by a chemical vapor deposition method, the flexible metal The substrate is any flexible metal substrate that can withstand temperatures up to 600 ° C. The preferred flexible metal substrate of the present invention is "aluminum foil paper", in other words, "aluminum foil paper" is placed in a high temperature furnace tube. Rice carbon tube bundle 14" growing section. At this time, ferrocene is placed on the outside of the catalyst sublimation section.

Next, as shown in step 502 of FIG. 5, the carrier gas argon gas is introduced, and in the argon atmosphere, the first catalyst growth section, the middle buffer section, and the final growth section of the high temperature furnace tube are heated. At this time, the ferrocene is still not heated outside the catalyst sublimation section.

Continuing as shown in step 503 of FIG. 5, the catalyst ferrocene is pushed into the first stage of the catalyst growth section at 250 ° C, and the first stage catalyst growth section is heated to 650 ° C, and the temperature rise time is 20 minutes. After a long period of 10 minutes, the ferrocene is sublimated and the process gas is also introduced.

Then, as shown in step 504 of FIG. 5, the carrying (process) gas is turned off to leave argon gas, and after cooling to cool to room temperature, the "nano carbon tube bundle 14" which grows in the same direction is removed from the flexible metal substrate. The height of the directional aligned iron-filled carbon nanotube bundle 14 ranges from several micrometers to several hundred micrometers.

Further, as shown in step 505 of FIG. 5, the "first electrode 12" and the "second electrode 13" are provided and placed and fixed above the "nano carbon tube bundle 14" which has grown in the same direction and in the same direction. Sexually arranged "Nano Carbon Tubes 14" contact.

Further, as shown in step 506 of FIG. 5, a "protective encapsulation layer 15" is provided above the electrodes of the "first electrode 12" and the "second electrode 13", and the "protective encapsulation layer 15" is a "tape". 15", that is, a viscous "tape 15" is used to seal and fix the "nano carbon tube bundle 14" in which the "first electrode 12" and the "second electrode 13" are arranged in the same direction. "." The "protective encapsulation layer 15" covers and seals the "first electrode 12", the "second electrode 13", the "carbon nanotube bundle 14", and the flexible "support substrate 11" The bottom back surface, that is, the upper and lower back surfaces of the "carbon nanotube strain sensor 10" are sealed and fixed by the "protective encapsulation layer 15" to provide a protective effect.

In the fifth aspect, the present invention provides a method for preparing a "nano carbon tube strain sensor" having high sensitivity and flexibility, wherein the process gas is a carbon source gas and "hydrogen", wherein the carbon source The gas may be a carbonaceous gas such as "acetylene" or "ethylene", but the preferred carbon source gas used in the present invention is "acetylene", and "hydrogen" is used as a gas for reducing carbon nanotube defects, "argon gas". It is an inert gas, mainly used as a ferrocene gas molecule carrying sublimation.

Fig. 6 is an electron microscope (SEM) image of the "nano carbon tube bundle 14" of the present invention grown on a flexible "support substrate 11", that is, "carbon nanotube 14" grows in Electron micrograph on flexible "Al foil".

Figure 7 is an electron micrograph of the "nanocarbon tube" of the present invention. The size ratio of a single "carbon nanotube" can be known from the figure. The size of a single "carbon nanotube" is not more than 50 nm. .

Figure 8 is a graph showing the strain/resistance change rate of the present invention, that is, when the present invention is subjected to a slight external force to cause strain, it is like the "strain (%)" of the horizontal axis of Fig. 8, and the "support" The "nano carbon tube bundle 14" on the body substrate 11" is strained, causing a change in the side contact area between the carbon nanotubes, so that the resistance change rate (ΔR) as shown in the vertical axis of Fig. 8 /R(%)))" becomes larger and exhibits a positive ratio relationship. Therefore, the "carbon nanotube bundle strain sensor 10" of the present invention can generate a high resistance change rate under a small strain, and can have excellent strain sensing. Sensitivity.

Compared with other sensors, the present invention has the advantages of broadness, such as high stability and high efficiency of the present invention, and the invention can simplify the process steps of the sensor and greatly reduce the manufacturing cost. Another advantage of the present invention is the advantages of high strain gauge factor, high sensing sensitivity, and high sensing efficiency.

The above is only the preferred embodiment of the present invention, and is not intended to limit the scope of the present invention; all other equivalent changes or modifications which are not departing from the spirit of the present invention should be included in the following. Within the scope of the patent application.

Claims (5)

 A carbon nanotube strain sensor includes at least: a support substrate; a first electrode; a second electrode; and a unidirectional carbon nanotube cluster; wherein the first electrode and the first The two electrodes are disposed above the carbon nanotube bundles arranged in the same direction, and the carbon nanotubes arranged in the same direction are separated by a specific distance between the first electrode and the electrodes of the second electrode. A bundle is formed on the support substrate.    A carbon nanotube bundle strain sensor having a protective encapsulation layer, comprising at least: a support substrate; a first electrode; a second electrode; a unidirectional carbon nanotube bundle arranged in the same direction; and a protective package a layer, wherein the first electrode and the second electrode are disposed above the carbon nanotube bundle arranged in the same direction, and spaced apart by a specific distance between the first electrode and the second electrode The carbon nanotube bundle arranged in the same direction is formed on the support substrate, the protective encapsulation layer covers the first electrode, the second electrode, the carbon nanotube bundle, and the support body The bottom back of the substrate.    A method for forming a carbon nanotube strain sensor comprises at least: placing a support substrate on a high temperature furnace tube capable of performing a chemical vapor deposition method, and placing ferrocene in a catalyst sublimation section On the outside; the carrier gas is introduced, and in the carrier gas environment, the first catalyst growth section, the middle buffer section, and the final growth section of the high temperature furnace tube are heated; the catalyst ferrocene is pushed to the temperature The first stage of the catalyst growth section, the ferrocene is sublimated and the process gas is also introduced; the carrier gas is turned off to leave argon gas and cooled to room temperature, and then the carbon nanotube bundle is taken out; An electrode and a second electrode are placed and fixed on the carbon nanotube bundles which have grown in the same direction and are in contact with the carbon nanotubes arranged in the same direction.    A method for forming a carbon nanotube bundle strain sensor having a protective encapsulation layer, comprising at least: placing a support substrate on a high temperature furnace tube capable of performing a chemical vapor deposition method, and placing the ferrocene a catalyst sublimation section outside; a carrier gas is introduced, and in the carrier gas environment, the first catalyst growth section, the middle buffer section, and the final growth section of the high temperature furnace tube are heated; push catalyst 2 The first stage of the catalyst growth section of the ferrocene is heated, and the ferrocene is sublimated and passed into the process gas; the carrier gas is turned off to leave argon gas and cooled to room temperature, and the carbon nanotube is taken out. a first electrode and a second electrode are disposed and fixed on the carbon nanotube bundles which have grown in the same direction and are in contact with the carbon nanotubes arranged in the same direction; and in a protective package A layer cover encloses and secures the first electrode, the second electrode, the carbon nanotube bundle, and the bottom back of the support substrate.    A sensing method for a carbon nanotube bundle strain sensor having a protective encapsulation layer, comprising: providing a body to be sensed; and placing a carbon nanotube strain sensor on the object to be sensed; Passing a small voltage to the two electrodes of the carbon nanotube strain sensor to cause a deformation of a flexible support substrate; causing the carbon nanotube bundle to generate a resistance change rate to form the protection Sensing method for the carbon nanotube bundle strain sensor of the encapsulation layer.