TW201900267A - Exhaust treatment method, exhaust treatment device, glass article manufacturing device, and glass article manufacturing method - Google Patents

Exhaust treatment method, exhaust treatment device, glass article manufacturing device, and glass article manufacturing method Download PDF

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TW201900267A
TW201900267A TW107112870A TW107112870A TW201900267A TW 201900267 A TW201900267 A TW 201900267A TW 107112870 A TW107112870 A TW 107112870A TW 107112870 A TW107112870 A TW 107112870A TW 201900267 A TW201900267 A TW 201900267A
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exhaust gas
cooling
liquid
contact
powder
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TW107112870A
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TWI796330B (en
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赤木亮介
田中俊幸
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日商Ａｇｃ股份有限公司
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8621—Removing nitrogen compounds
    • B01D53/8625—Nitrogen oxides
    • B01D53/8631—Processes characterised by a specific device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
    • B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B01D47/063—Spray cleaning with two or more jets impinging against each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/48—Sulfur compounds
    • B01D53/50—Sulfur oxides
    • B01D53/501—Sulfur oxides by treating the gases with a solution or a suspension of an alkali or earth-alkali or ammonium compound
    • B01D53/504—Sulfur oxides by treating the gases with a solution or a suspension of an alkali or earth-alkali or ammonium compound characterised by a specific device
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/79—Injecting reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8621—Removing nitrogen compounds
    • B01D53/8625—Nitrogen oxides
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B25/00—Annealing glass products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B01D2251/304—Alkali metal compounds of sodium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/40—Alkaline earth metal or magnesium compounds
    • B01D2251/402—Alkaline earth metal or magnesium compounds of magnesium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B01D2251/604—Hydroxides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0241—Other waste gases from glass manufacture plants
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Treating Waste Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Surface Treatment Of Glass (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Glass Compositions (AREA)

Abstract

The present invention provides an exhaust gas treatment method capable of sufficiently removing a sulfur component, a boron component, and the like in an exhaust gas and suppressing the investment cost and operation cost of a wet facility. The method for treating the exhaust gas of the present invention comprises: a glass melting step (ST1); a cooling step (ST2) of bringing a cooling water solution into contact with the exhaust gas to obtain an exhaust gas after cooling; a powder recovering step (ST3) of recovering a reaction product of the exhaust gas and the powder as a powder after cooling, while contacting the exhaust gas with a powder of an alkali metal salt or an alkaline earth metal salt after cooling to obtain an exhaust gas after contact; a drain treating step (ST5) of obtaining a clean gas by bringing the cooling liquid into contact with the exhaust gas after contact, and recovering the reaction solution of the exhaust gas after contact and the cooling liquid as a drain. In the drain treatment step (ST5), the treatment solution is prepared by adjusting the drain to pH 5 to 9 and the temperature to 40 DEG C or higher, and the treatment solution is returned to the cooling step (ST2). In the cooling step (ST2), the treatment solution is brought into contact with the exhaust gas.

Description

排氣處理方法、排氣處理裝置、玻璃物品之製造裝置及玻璃物品之製造方法Exhaust treatment method, exhaust treatment device, glass article manufacturing device, and glass article manufacturing method

本發明係關於一種排氣處理方法、排氣處理裝置、玻璃物品之製造裝置及玻璃物品之製造方法。The present invention relates to an exhaust gas treatment method, an exhaust gas treatment device, a glass article manufacturing device, and a glass article manufacturing method.

玻璃熔解爐中產生之排氣中包含用於熔解玻璃原料之燃料、及源自玻璃原料等之各種成分。例如，於藉由火焰熔解玻璃原料時使用重油之情形時，排氣中包含硫成分。又，於製造硼矽酸玻璃之情形時，排氣中包含硼成分。若該等成分直接釋放至大氣中，則有對環境造成不良影響之虞，故而對自排氣去除該等成分之方法進行各種研究。 於專利文獻1中記載有於含有硼成分之排氣添加固體鹼金屬碳酸鹽及/或固體鹼金屬碳酸氫鹽而將排氣中之硼成分去除之方法。 又，於專利文獻2中，作為去除排氣中之硫成分及硼成分之方法，記載有使冷卻用水及接觸用水與排氣接觸，使排氣中之硫成分及硼成分溶解於水而去除之方法。利用該方法所產生之包含硫成分及硼成分之排液可於中和後再利用作冷卻用水或接觸用水。 [先前技術文獻] [專利文獻] [專利文獻1]日本專利特開2003-10633號公報 [專利文獻2]國際公開2009/072612號The exhaust gas generated in the glass melting furnace includes fuel for melting glass raw materials, and various components derived from glass raw materials. For example, when heavy oil is used when melting glass raw materials by flame, the exhaust gas contains a sulfur component. When producing borosilicate glass, the exhaust gas contains a boron component. If these components are directly released into the atmosphere, they may cause adverse effects on the environment. Therefore, various methods for removing these components from exhaust gas have been studied. Patent Document 1 describes a method of removing a boron component in exhaust gas by adding a solid alkali metal carbonate and / or solid alkali metal bicarbonate to an exhaust gas containing a boron component. Further, in Patent Document 2, as a method for removing sulfur and boron components in exhaust gas, it is described that cooling water and contact water are brought into contact with the exhaust gas, and sulfur and boron components in the exhaust gas are dissolved in water and removed. Method. The drainage liquid containing sulfur component and boron component produced by this method can be reused as cooling water or contact water after neutralization. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2003-10633 [Patent Document 2] International Publication No. 2009/072612

[發明所欲解決之問題] 然而，專利文獻1中記載之方法為利用乾式之排氣處理設備進行之排氣處理方法，故而存在無法充分地去除排氣中之硼成分之情形。 又，專利文獻2中記載之方法可充分地去除排氣中之硼成分，可將排液再利用作冷卻用水或接觸用水，但存在過濾袋以後所設置之濕式設備龐大化從而投資費用、運轉費用增大之問題。 本發明係鑒於上述課題而成者，提供一種可充分地去除排氣中之硫成分、硼成分等且可抑制濕式設備之投資費用、運轉費用之排氣處理方法、排氣處理裝置、玻璃物品之製造裝置及玻璃物品之製造方法。 [解決問題之技術手段] 本發明係一種排氣處理方法，其特徵在於具備：玻璃熔解步驟，其將玻璃原料熔解；冷卻步驟，其使冷卻用水溶液與上述玻璃熔解步驟中產生之排氣接觸而獲得冷卻後排氣；粉體回收步驟，其一面使鹼金屬鹽或鹼土金屬鹽之粉末與上述冷卻後排氣接觸而獲得接觸後排氣，一面將上述冷卻後排氣與上述粉末之反應物作為粉體回收；及排液處理步驟，其一面使冷卻用液體與上述接觸後排氣接觸而獲得潔淨氣體，一面將上述接觸後排氣與上述冷卻用液體之反應液作為排液回收；上述排液處理步驟係藉由將上述排液之pH值調整為5～9且將溫度調整為40℃以上而製作處理液，並將上述處理液送回至上述冷卻步驟；且上述冷卻步驟係使上述處理液與上述排氣接觸。 又，本發明係一種排氣處理裝置，其特徵在於具備：產生排氣之玻璃熔解爐、冷卻塔、過濾袋、及洗滌器；上述冷卻塔具備對上述排氣以噴霧方式噴射冷卻用水溶液而獲得冷卻後排氣之噴嘴；上述過濾袋具備濾布、及粉體回收機構；上述濾布擔載鹼金屬鹽或鹼土金屬鹽之粉末，使上述冷卻後排氣與上述粉末接觸而製成接觸後排氣；上述粉體回收機構將上述冷卻後排氣與上述粉末之反應物作為粉體回收；上述洗滌器具備對上述接觸後排氣以噴霧方式噴射冷卻用液體而獲得潔淨氣體及排液之噴嘴、調整上述排液之pH值及溫度而製成處理液之調整機構、及用於向上述冷卻塔送出上述處理液之返回配管；且上述冷卻塔具備對上述排氣以噴霧方式噴射上述處理液之噴嘴。 [發明之效果] 根據本發明之排氣處理方法、排氣處理裝置、玻璃物品之製造裝置及玻璃物品之製造方法，可利用簡易之濕式設備充分地去除排氣中之硫成分、硼成分等且可再利用排液。[Problems to be Solved by the Invention] However, since the method described in Patent Document 1 is an exhaust gas treatment method using a dry exhaust gas treatment device, there is a case where the boron component in the exhaust gas cannot be sufficiently removed. In addition, the method described in Patent Document 2 can sufficiently remove the boron component in the exhaust gas, and the reused drainage liquid can be reused as cooling water or contact water. The problem of increased running costs. The present invention has been made in view of the above-mentioned problems, and provides an exhaust gas treatment method, an exhaust gas treatment device, and a glass which can sufficiently remove sulfur components, boron components, and the like in exhaust gas, and can suppress investment costs and operating costs of wet equipment. Article manufacturing device and glass article manufacturing method. [Technical means for solving the problem] The present invention is an exhaust gas treatment method, which is characterized by comprising: a glass melting step that melts glass raw materials; and a cooling step that contacts an aqueous cooling solution with the exhaust gas generated in the glass melting step. The exhaust gas after cooling is obtained; the powder recovery step, while contacting the powder of the alkali metal salt or the alkaline earth metal salt with the exhaust gas after cooling to obtain exhaust gas after contact, reacts the exhaust gas after cooling with the powder The substance is recovered as a powder; and the liquid discharge treatment step, while contacting the cooling liquid with the above-mentioned contact exhaust gas to obtain a clean gas, while recovering the reaction liquid of the above-mentioned contact exhaust gas and the cooling liquid as a drainage liquid; The above-mentioned liquid discharge treatment step is to prepare a treatment liquid by adjusting the pH value of the above-mentioned liquid discharge to 5 to 9 and to adjust the temperature to 40 ° C or higher, and return the treatment liquid to the above-mentioned cooling step; and the above-mentioned cooling step is The processing liquid is brought into contact with the exhaust gas. The present invention also relates to an exhaust gas treatment device, comprising: a glass melting furnace, a cooling tower, a filter bag, and a scrubber which generate exhaust gas; the cooling tower includes a spraying cooling aqueous solution for the exhaust gas; A nozzle for obtaining exhaust gas after cooling; the filter bag is provided with a filter cloth and a powder recovery mechanism; the filter cloth carries powder of an alkali metal salt or an alkaline earth metal salt, and the exhaust gas after cooling is brought into contact with the powder to make contact Rear exhaust; the powder recovery mechanism recovers the reacted exhaust after cooling and the powder as powder; the scrubber is provided with a spray liquid for cooling the exhaust gas after the contact to obtain clean gas and liquid discharge A nozzle, an adjusting mechanism for adjusting the pH and temperature of the discharged liquid to prepare a processing liquid, and a return pipe for sending the processing liquid to the cooling tower; and the cooling tower is provided with a spray method for spraying the exhaust gas to the exhaust gas. Nozzle of treatment liquid. [Effects of the Invention] According to the exhaust gas treatment method, the exhaust gas treatment device, the glass article manufacturing device, and the glass article manufacturing method of the present invention, it is possible to sufficiently remove sulfur components and boron components in the exhaust gas by using a simple wet type equipment. Wait and reuse for drainage.

以下，一面參照圖式一面說明本發明之一實施形態之排氣處理裝置、排氣處理方法、玻璃物品之製造裝置及玻璃物品之製造方法。再者，本發明之範圍並不限定於以下之實施形態，可於本發明之技術思想之範圍內進行任意變更。 [排氣處理裝置] 圖1係本發明之一實施形態之排氣處理裝置之概略圖。圖2係本發明之一實施形態之冷卻塔，(A)係放大冷卻塔之主要部分之剖面模式圖，(B)係冷卻塔之俯視圖。 使用圖1，說明本發明之一實施形態之排氣處理裝置1。 本實施形態之排氣處理裝置1具備：產生排氣G1之玻璃熔解爐10、冷卻塔20、過濾袋30、粉末供給裝置35、脫硝裝置40、洗滌器50、主風扇60、及煙囪70。 玻璃熔解爐10藉由將燃燒器之火焰朝向玻璃原料放射，而將玻璃原料加熱熔解，產生排氣G1。燃燒器係藉由將天然氣或重油等燃料與氣體混合進行燃燒而形成火焰。燃燒器使用主要將空氣用作氣體之空氣燃燒器、或主要將氧氣用作氣體之氧氣燃燒器。 藉由使用重油之燃燒器燃燒，排氣G1包含源自重油之硫成分。又，排氣G1包含源自玻璃原料所含之澄清劑之硫成分、氟成分、氯成分等。又，於製造硼矽酸玻璃之情形時，排氣G1包含易於自熔融玻璃揮發之硼成分。排氣G1中之硫成分主要為硫氧化物(SOX )，氯成分主要為氯化氫(HCl)，氟成分主要為氟化氫(HF)，硼成分主要為硼酸(H3 BO3 )。 其次，使用圖1、2，說明本發明之一實施形態之冷卻塔20。 冷卻塔20具備入口部21、擴徑部23、冷卻塔本體25、噴霧噴嘴26、固形物回收機構27、及出口部。 如圖2所示，冷卻塔本體25直立設置為圓筒狀。擴徑部23係與冷卻塔本體25之上部連結而設置。入口部21係與擴徑部23之上部連結而設置。入口部21將流入至冷卻塔20之排氣G1之流向自水平方向變更為鉛直方向朝下。 擴徑部23之橫剖面之直徑自入口部21朝向冷卻塔本體25逐漸擴大。擴徑部23之橫剖面典型而言為圓形狀，亦可為矩形狀等。擴徑部23降低通過入口部21之排氣G1之流速。 冷卻塔本體25於內部具備反應空間，藉由通過擴徑部23之排氣G1與冷卻用水溶液L21及處理液L22之反應而生成反應物。 噴霧噴嘴26設置於擴徑部23之側面，對排氣G1之流經方向以噴霧方式噴射冷卻用水溶液L21及處理液L22而使排氣G1冷卻。藉此，降低冷卻後排氣G2之溫度，可防止下述過濾袋30內之濾布因熱而損傷。又，使排氣G1與冷卻用水溶液L21及處理液L22反應而去除排氣G1中之硫成分及/或氯成分。 本實施形態之冷卻用水溶液L21係氫氧化鈉(NaOH)水溶液，處理液L22係以氫氧化鈉為主成分之水溶液。氫氧化鈉由於廉價且容易操作，因此用作一般之酸性排液之中和劑。 如圖2(A)所示，噴霧噴嘴26自噴嘴之噴射口放射狀地以噴霧方式噴射冷卻用水溶液L21及處理液L22。噴霧噴嘴26之噴射角α較佳為30～70°，更佳為40～60°。若噴射角α為30°以上，則冷卻用水溶液L21及處理液L22可遍及冷卻塔本體25之整體充分地去除排氣G1中之硫成分及/或氯成分。又，若噴射角α為70°以下，則可防止冷卻用水溶液L21及處理液L22與排氣G1之反應物大量附著於冷卻塔本體25之壁面。若反應物大量附著於壁面，則成為冷卻塔本體25堵塞之原因。 如圖2(B)所示，設置有複數根噴霧噴嘴26，分別於與擴徑部23之中心為同心圓上在圓周方向上空出間隔而設置。 本實施形態中，噴霧噴嘴26之根數為9根，但本發明並不限定於此，較佳為2～20根，更佳為2～15根。若噴霧噴嘴26之根數為2根以上，則可分別以噴霧方式噴射冷卻用水溶液L21與處理液L22。又，若噴霧噴嘴26之根數為20根以下，則各噴霧噴嘴26可於圓周方向上空出間隔而設置。於根數較多之情形時，可於與擴徑部23之中心為同心圓上在徑向上設置2行以上。 9根噴霧噴嘴26中，例如6根以噴霧方式噴射冷卻用水溶液L21，3根以噴霧方式噴射處理液L22。此處，如下所述，處理液L22包含四硼酸鈉(Na2 B4 O7 )或硼酸鎂(MgB2 O4 )，故而必須管理溫度以不使四硼酸鈉或硼酸鎂析出。因此，冷卻用水溶液L21與處理液L22較佳為不混合而分別以噴霧方式噴射。 噴霧噴嘴26之合計流量必須根據排氣G1之流量而適當調整，較佳為1000～5000 L/h，更佳為2000～4000 L/h。 再者，本實施形態中，以噴霧方式噴射冷卻用水溶液L21及處理液L22時使用噴霧噴嘴26，但本發明並不限定於此，只要為可對排氣G1噴霧或噴射液體之接觸機構即可。 冷卻塔20之固形物回收機構27設置於冷卻塔本體25之底部。固形物回收機構27將冷卻塔本體25中所生成之反應物作為固形物S2回收。固形物S2典型而言，包含源自排氣G1中之硫成分之硫酸鈉(Na2 SO4 )、及源自排氣G1中之氯成分之氯化鈉(NaCl)。 冷卻塔20之出口部係與冷卻塔本體25之下部側面連結而設置。出口部排出冷卻後排氣G2。 入口部21中之排氣G1之溫度T1較佳為700～900℃。若溫度T1為700℃以上，則排氣G1中之硫成分或氯成分與冷卻用水溶液L21及處理液L22充分反應。又，若溫度T1為900℃以下，則可防止冷卻塔20內之損傷。 本實施形態之冷卻用水溶液L21為氫氧化鈉(NaOH)水溶液，亦可為氫氧化鎂(Mg(OH)2 )水溶液。於該情形時，處理液L22為以氫氧化鎂為主成分之水溶液。排氣G1中之各成分與冷卻用水溶液L21及處理液L22反應，排氣G1中之硫成分成為硫酸鎂(MgSO4 )，排氣G1中之氯成分成為氯化鎂(MgCl2 )。 氫氧化鎂由於廉價且容易操作，故而用作一般之酸性排液之中和劑，但於水中之溶解度較低，通常為漿料狀態，故而於使液體循環而再利用之情形時擔心引起配管堵塞。然而，處理液L22包含硼成分，故而氫氧化鎂不會成為漿料狀態，可自洗滌器50送出至冷卻塔20而不引起堵塞問題。 冷卻用水溶液L21之濃度C21較佳為0.3%以上，更佳為0.5%以上。又，濃度C21較佳為2.0%以下，更佳為1.0%以下。若濃度C21為0.3%以上，則可充分地去除排氣G1中之硫成分及/或氯成分。又，若濃度C21為2.0%以下，則可防止因冷卻用水溶液L21之乾固化而堵塞噴霧噴嘴26，且可降低固形物S2之排出量。 圖1中之過濾袋30具備三個過濾袋本體31、及粉體回收機構37。 過濾袋本體31於內部具備濾布，與相鄰過濾袋本體31連結，形成使冷卻後排氣G2通過之流路。 濾布擔載鹼金屬鹽或鹼土金屬鹽之粉末，使冷卻後排氣G2與粉末接觸而製成接觸後排氣G3。冷卻後排氣G2與粉末反應而去除冷卻後排氣G2中之硫成分、氟成分或氯成分。又，冷卻後排氣G2中之煤灰由濾布捕集而被去除。 濾布之材質較佳為使用聚四氟乙烯(PTFE)樹脂。聚四氟乙烯化學上穩定，於耐熱性、耐化學品性之方面優異。 過濾袋本體31於濾布之上方具備氣體噴嘴。過濾袋本體31使用氣體噴嘴對濾布吹附壓縮空氣，而將濾布所擔載之粉末、及冷卻後排氣G2與粉末之反應物撣落。氣體噴嘴亦可使用氧氣或氮氣等氣體代替壓縮空氣。 粉體回收機構37將粉末及反應物作為粉體S3回收。粉體回收機構37例如將自三個過濾袋本體31之底部回收之粉體S3利用輸送機等輸送而匯集於一處。 過濾袋30可去除冷卻後排氣G2中之氟成分，故而可防止因接觸後排氣G3或G4而於洗滌器50混入氟成分。藉此，可於洗滌器50中防止氟成分與氫氧化鎂反應而漿料化。具體而言，可防止生成難溶於水之氟化鎂(MgF2 )。 圖1之過濾袋30具備3個過濾袋本體31，但本發明並不限定於此。過濾袋本體31之個數較佳為2～15，更佳為2～10。若過濾袋本體31之個數為2個以上，則可延長冷卻後排氣G2通過之流路之距離，可高效地去除冷卻後排氣G2中之硫成分、氟成分或氯成分。又，若過濾袋本體31之個數為15個以下，則可抑制設備之投資費用、運轉費用。過濾袋本體31之個數亦可為一個。 粉末供給裝置35具備三個粉末供給裝置本體36。 粉末供給裝置本體36經由配管將鹼金屬鹽或鹼土金屬鹽之粉末供給至過濾袋30。 粉末供給裝置本體36之個數較佳為與過濾袋本體31相同之個數。藉此，可獨立地調整對過濾袋本體31之粉末供給量。 粉末供給裝置35較佳為對1 Nm3 之冷卻後排氣G2供給1.0～5.0 g之粉末，更佳為供給2.0～3.0 g之粉末。 過濾袋本體31內之濾布上，由於自粉末供給裝置本體36供給之粉末之附著量緩緩增加，因此過濾袋30之入口與出口之壓力差增大。壓力差較佳為30～150 mmH2 O。若壓力差為30 mmH2 O以上，則粉末充分地附著於濾布，可充分地去除冷卻後排氣G2中之硫成分、氟成分或氯成分。又，若壓力差為150 mmH2 O以下，則冷卻後排氣G2易於流動。 過濾袋30之壓力差較佳為與各過濾袋本體31之壓力差一併調整。 鹼金屬鹽較佳為碳酸氫鈉(NaHCO3 )或碳酸鈉(Na2 CO3 )。又，鹼土金屬鹽較佳為氫氧化鈣(Ca(OH)2 )、碳酸鈣(CaCO3 )、或碳酸鈣與碳酸鎂(MgCO3 )之複鹽。複鹽例如為白雲石。 冷卻後排氣G2中之成分與鹼金屬鹽或鹼土金屬鹽之粉末反應。冷卻後排氣G2中之硫成分成為硫酸鈉(Na2 SO4 )或硫酸鈣(CaSO4 )，氟成分成為氟化鈉(NaF)或氟化鈣(CaF2 )，氯成分成為氯化鈉(NaCl)或氯化鈣(CaCl2 )。於使用白雲石等複鹽作為鹼土金屬鹽之粉末之情形時，硫成分亦生成硫酸鎂(MgSO4 )、氟成分亦生成氟化鎂(MgF2 )、氯成分亦生成氯化鎂(MgCl2 )。粉體S3為該等反應物混合而成者。 鹼金屬鹽或鹼土金屬鹽之粉末之平均粒徑較佳為1～100 μm，更佳為1～50 μm，進而較佳為1～30 μm。若平均粒徑為1 μm以上，則可藉由粉碎操作而廉價地製造粉末。又，若平均粒徑為100 μm以下，則冷卻後排氣G2中之硫成分、氯成分或氟成分與粉末充分反應而被去除。 此處，所謂平均粒徑係指利用雷射繞射散射式粒度分佈測定裝置(日機裝公司製之Microtrac FRA9220)測定粒徑並以總體積為100%求出累積曲線時，其累積體積成為50%之點之粒徑。 再者，粉體S3只要包含鈣成分及鎂成分且平均粒徑為30～100 μm，則適宜再利用作無鹼玻璃之玻璃原料。 冷卻後排氣G2之溫度T2於過濾袋30之入口較佳為180～250℃。若溫度T2為180℃以上，則冷卻後排氣G2中之硫成分、氯成分或氟成分與粉末充分反應而被去除。又，若溫度T2為250℃以下，則可防止過濾袋本體31內之濾布因熱而損傷。 接觸後排氣G3所含之硫成分之濃度以二氧化硫(SO2 )換算計較佳為100 mg/Nm3 以下，更佳為50 mg/Nm3 以下。又，接觸後排氣G3中之氟成分之濃度較佳為30 mg/Nm3 以下，更佳為10 mg/Nm3 以下，進而較佳為5 mg/Nm3 以下。又，接觸後排氣G3中之氯成分之濃度較佳為100 mg/Nm3 以下，更佳為50 mg/Nm3 以下。 硫成分之濃度係由利用紅外線吸收方式等之自動分析、或化學分析而求出。硫成分之濃度例如係藉由IC(ion chromatography，離子層析)而求出。氟成分之濃度係利用定量泵採取排氣，使其吸收於吸收液，利用ICP(inductively coupled plasma，感應耦合電漿)測定溶液中之氟成分之濃度，根據排氣每1 Nm3 之氟成分量求出。氯成分之濃度係利用與氟成分之濃度同樣之方法求出。 其次，使用圖1，對本發明之一實施形態之脫硝裝置40進行說明。 脫硝裝置40具備觸媒層、及氣體注入噴嘴。脫硝裝置40於接觸後排氣G3通過觸媒層之前，使用氣體注入噴嘴注入氨(NH3 )氣。藉此，去除接觸後排氣G3所含之氮氧化物(NOX )。通過脫硝裝置40之接觸後排氣G4流入至洗滌器50。 觸媒層較佳為使用以五氧化二釩(V2 O5 )為活性成分之觸媒，例如使用以氧化鈦(TiO2 )為載體之(TiO2 -V2 O5 -WO3 )觸媒。 氨氣之注入量較佳為5～20 Nm3 /h。若為5 Nm3 /h以上，則可充分地分解氮氧化物(NOx )。又，若注入量為20 Nm3 /h以下，則抑制接觸後排氣G3中之三氧化硫(SO3 )與氨(NH3 )之反應，可減少硫酸氫銨(NH4 HSO4 )之生成。硫酸氫銨使觸媒微孔堵塞，因此較理想為不生成。因此，如上所述，亦必須相應地調整接觸後排氣G3中所含之硫成分之濃度。因此，接觸後排氣G3中之硫成分之濃度以二氧化硫(SO2 )換算計較佳為100 mg/Nm3 以下。 接觸後排氣G3之溫度T3於脫硝裝置40之入口較佳為200～300℃。若溫度T3為200℃以上，則接觸後排氣G3中之氮氧化物(NOX )與氨(NH3 )氣充分地反應。又，若溫度T3為300℃以下，則可防止觸媒活性降低。較理想為於過濾袋30與脫硝裝置40之間之流路設置溫度調整機構(例如燃燒器)進行加熱而調整溫度T3。其原因在於，存在過濾袋30之出口之溫度降至200℃以下之情形。燃燒器之燃料例如使用天然氣。 通過脫硝裝置40之接觸後排氣G4較佳為氮氧化物(NOX )之濃度為800 mg/Nm3 以下，更佳為500 mg/Nm3 以下。氮氧化物之濃度係由利用化學發光方式等之自動測量而求出。再者，只要接觸後排氣G3之氮氧化物(NOX )之濃度為800 mg/Nm3 以下，則亦可不設置脫硝裝置40。於該情形時，接觸後排氣G3流入至洗滌器50。 圖3係本發明之一實施形態之洗滌器之概略圖。使用圖1、3，對本發明之一實施形態之洗滌器50進行說明。 洗滌器50具備預洗滌器510、與預洗滌器510連結而設置之洗滌器本體520、及設置於洗滌器本體520之底部之排液槽530。 洗滌器50使接觸後排氣G4及G41與冷卻用液體L51及L52以及處理液L22進行反應，獲得潔淨氣體G5及排液L55。冷卻用液體L51及L52係使用水或氫氧化鈉水溶液。 又，洗滌器50具備：調整排液L55之pH值及溫度而製成處理液L22之調整機構539、將排液槽530與冷卻塔20連結之返回配管550、及將排液槽530與洗滌器本體520連結之返回配管551。 預洗滌器510係使接觸後排氣G4自上部流入並向下部排出之構造，於上部設置有噴嘴511。噴嘴511係將冷卻用液體L51朝向接觸後排氣G4之流經方向噴霧。藉由冷卻用液體L51之流量調整，可適當調整接觸後排氣G41之溫度。與接觸後排氣G4接觸後之冷卻用液體L51於排液槽530中作為排液L55被回收。 圖3中，噴嘴511為1根，亦可設置複數根。又，噴嘴亦可設置於預洗滌器510之下部而向與接觸後排氣G4之流向相反之方向以噴霧方式噴射冷卻用液體L51。 又，雖未表示於圖3，但預洗滌器510亦可進而設置噴嘴而以噴霧方式噴射處理液L22。 又，預洗滌器510亦可於底部設置有排液槽。於該情形時，該排液槽將與接觸後排氣G4接觸後之冷卻用液體L51作為排液回收。 洗滌器本體520使自預洗滌器510排出之接觸後排氣G41自下部流入，向上部排出。洗滌器本體520於內部具備填充層521，於填充層521之上方具備噴嘴523、525。噴嘴523設置於填充層521與噴嘴525之間。 噴嘴523與返回配管551連結，將處理液L22向與接觸後排氣G41之流向相反之方向噴霧。噴嘴525將冷卻用液體L52向與接觸後排氣G41之流向相反之方向噴霧。 洗滌器本體520藉由使冷卻用液體L52、處理液L22與接觸後排氣G41接觸，而使接觸後排氣G41中之硼成分溶解於冷卻用液體L52及處理液L22。此時，接觸後排氣G41中之硼成分以外之成分亦可溶解於冷卻用液體L52及/或處理液L22。例如，溶解接觸後排氣G41中之硫成分或氯成分。藉由冷卻用液體L52及處理液L22之流量調整，可適當地調整接觸後排氣G41之溫度。與接觸後排氣G41接觸後之冷卻用液體L52於排液槽530中作為排液L55被回收。 填充層521於洗滌器本體520之上部與下部產生壓力差。藉此，接觸後排氣G41於洗滌器本體520內成為亂流狀態，接觸後排氣G41與冷卻用液體L52及處理液L22充分接觸，可促進接觸後排氣G41中之成分向冷卻用液體L52及處理液L22中之溶解。洗滌器50之入口與出口之壓力差較佳為50～200 mmH2 O。 填充層521使作為填充物之塑膠製之球浮動，藉由球表面之水膜促進反應。作為填充層521之填充物，較理想為表面積較大、容易形成水膜、對氣流之阻力較少、溢流或偏流較少、或輕而結實者。填充層521之填充物之材質較佳為聚丙烯。聚丙烯就輕量且廉價方面而言優異。又，構成填充物之粒子之直徑較佳為40～100 mm。 再者，預洗滌器510、洗滌器本體520內較佳為使用耐腐蝕性優異之纖維強化塑膠(FRP)。 於冷卻塔20中使用之冷卻用水溶液L21為氫氧化鎂水溶液之情形時，冷卻用液體L51、L52使用水或氫氧化鎂水溶液。該情形時，下述pH值調整用水溶液L54使用氫氧化鎂水溶液。 此處，若冷卻用液體L51及/或L52中包含Ca成分作為中和劑，則於排液槽530內生成硫酸鈣(CaSO4 )或硼酸鈣(CaB4 O7 )等沈澱物。此種沈澱物有堵塞返回配管550及551之可能性。因此，冷卻用液體L51、L52中較理想為不含Ca成分作為中和劑。 排液槽530收容排液L55。排液L55中溶解有接觸後排氣G4及G41中之硼成分。排液槽530內較佳為使用耐腐蝕性優異之纖維強化塑膠(FRP)。 又，排液槽530具備pH值測定計533、溫度計、冷卻噴嘴、及加熱器。冷卻噴嘴向排液槽530內注入冷卻水L53。 調整機構539具備注入槽540、循環泵541、及注入噴嘴。注入槽540貯留pH值調整用水溶液L54。注入噴嘴向排液槽530內自注入槽540經由循環泵541注入pH值調整用水溶液L54。pH值調整用水溶液L54使用氫氧化鈉水溶液。 pH值調整用水溶液L54之濃度C54較佳為20%以上，更佳為30%以上。若濃度C54為20%以上，則適於調節排液L55之pH值。 又，調整機構539將排液L55之pH值調整為5～9且將溫度調整為40℃以上。藉此製作包含硼成分、鈉成分或鎂成分之處理液L22。製作處理液L22之過程中，排液L55中之硼成分與氫氧化鈉或氫氧化鎂反應，生成四硼酸鈉(Na2 B4 O7 )或硼酸鎂(MgB2 O4 )。再者，存在處理液L22包含未反應之硼成分、氫氧化鈉或氫氧化鎂之情形。又，存在處理液L22微量包含氯、氟、鈣等之情形。 返回配管550經由循環泵531自排液槽530向冷卻塔20之噴霧噴嘴26送出處理液L22。 返回配管551經由循環泵531自排液槽530向洗滌器本體520之噴嘴523送出處理液L22。 較佳為於返回配管550及551設置用以調整處理液L22之溫度之加熱器。 氫氧化鈉或氫氧化鎂向排液槽530之注入量較佳為對使排液L55中之硼成分、硫成分或氯成分轉化為鈉鹽或鎂鹽充分之量。然而，若氫氧化鈉之供給量過多，則四硼酸鈉或硼酸鎂飽和析出。若析出四硼酸鈉或硼酸鎂，則存在堵塞返回配管550及551之虞，有難以對冷卻塔20之噴霧噴嘴26或洗滌器本體520之噴嘴523送出處理液L22之情況。 因此，利用pH值測定計533測定排液槽530內之處理液L22之pH值，將pH值保持為5～9之範圍內。此時，pH值及溫度之調整係調整冷卻水L53、pH值調整用水溶液L54之供給量而進行。 處理液L22之pH值較佳為6～8、更佳為6.5～7.5。若處理液L22之pH值為5以上，則可將處理液L22中之硼成分等良好地轉化為鈉鹽或鎂鹽，可減少處理液L22中殘留之未反應之硼成分等。又，若處理液L22之pH值為9以下，則可防止處理液L22中析出四硼酸鈉或硼酸鎂。 處理液L22之溫度T22係以保持為40℃以上之方式調整。溫度T22較佳為50℃以上，更佳為60℃以上。又，溫度T22較佳為90℃以下，更佳為80℃以下。藉由使溫度T22為40℃以上，可防止處理液L22中析出四硼酸鈉或四硼酸鎂。又，若溫度為90℃以下，則可防止因排液槽530內之熱引起之損傷。 本實施形態之排液槽530設置於洗滌器本體520之底部，但亦可經由配管設置於與洗滌器本體520不同之部位。該形態於在預洗滌器510之底部回收排液之情形，就預洗滌器510與洗滌器本體520之排液可匯集於一處進行處理之方面而言優異。 接觸後排氣G4之溫度T4於洗滌器50之入口較佳為200～300℃。若溫度T4為200℃以上，則可充分地去除接觸後排氣G4及G41中之硼成分。又，若溫度T4為300℃以下，則可防止因填充層521之熱引起之損傷。 接觸後排氣G41之溫度較佳為60～90℃，更佳為70～80℃。若接觸後排氣G41之溫度為60℃以上，則可削減冷卻用液體L51及L52之使用量。又，若接觸後排氣G41之溫度為90℃以下，則可使接觸後排氣G41中之硼成分溶解於冷卻用液體L52及處理液L22中而分離。 潔淨氣體G5中之硼成分之濃度以氧化硼(B2 O3 )換算計較佳為20 mg/Nm3 以下，更佳為10 mg/Nm3 以下。 其次，對本發明之一實施形態之主風扇60、煙囪70進行說明。 潔淨氣體G5藉由調整排氣之流量之主風扇60而被抽吸，通過主風扇60之潔淨氣體G6通過煙囪70而作為潔淨氣體G7釋放至大氣中。 潔淨氣體G5之溫度於剛通過洗滌器50之後，例如為60～90℃。可不進行溫度調整直接以主風扇60抽吸潔淨氣體G5，但若溫度較低，則煙囪70中之煙囪效應變小。因此，較佳為於洗滌器50與主風扇60之間之流路設置燃燒器進行加熱，流入至主風扇60之前之潔淨氣體G5之溫度T5較佳為100～130℃。 根據本實施形態之排氣處理裝置1，潔淨氣體G7可達成硫成分之濃度以二氧化硫(SO2 )換算計為100 mg/Nm3 以下、氮氧化物(NOX )之濃度為800 mg/Nm3 以下、氟成分之濃度為30 mg/Nm3 以下、氯成分之濃度為100 mg/Nm3 以下、硼成分之濃度以氧化硼(B2 O3 )換算計為20 mg/Nm3 以下。排氣處理裝置1適合於潔淨氣體G7之流量為5,000～40,000 Nm3 /h之排氣處理。 [排氣處理方法] 圖4係表示本發明之一實施形態之排氣處理方法的流程圖。使用圖4，對本發明之一實施形態之排氣處理方法進行說明。 本實施形態之排氣處理方法具備：玻璃熔解步驟ST1，其將玻璃原料熔解；冷卻步驟ST2，其使冷卻用水溶液與玻璃熔解步驟ST1中產生之排氣接觸而獲得冷卻後排氣；及粉體回收步驟ST3，其一面使鹼金屬鹽或鹼土金屬鹽之粉末與冷卻後排氣接觸而獲得接觸後排氣，一面將冷卻後排氣與粉末之反應物作為粉體回收。排氣處理方法進而具備：脫硝步驟ST4，其去除接觸後排氣所含之氮氧化物；及排液處理步驟ST5，其一面使冷卻用液體與接觸後排氣接觸而獲得潔淨氣體，一面將接觸後排氣與冷卻用液體之反應液作為排液回收。 排液處理步驟ST5係藉由將排液之pH值調整為5～9且將溫度調整為40℃以上而製作處理液，並將處理液送回至冷卻步驟。冷卻步驟ST2係使處理液與排氣接觸。 於冷卻步驟ST2中，冷卻用水溶液較佳為氫氧化鈉水溶液或氫氧化鎂水溶液。又，冷卻步驟ST2較佳為藉由排氣與冷卻用水溶液之反應而生成反應物，並將反應物作為固形物回收。 粉體回收步驟ST3中，鹼金屬鹽較佳為碳酸氫鈉或碳酸鈉。又，鹼土金屬鹽較佳為氫氧化鈣、碳酸鈣、或碳酸鈣與碳酸鎂之複鹽。 脫硝步驟ST4較佳為於接觸後排氣通過觸媒層之前注入氨氣。 如以上所述，根據本實施形態之排氣處理方法及排氣處理裝置1，可不使用複雜之濕式設備而將排氣中之硫成分、硼成分等充分地去除。因此，可抑制濕式設備(洗滌器50)之投資費用。又，根據本實施形態之排氣處理裝置1，可將洗滌器50中獲得之處理液L22再利用於冷卻塔20，因此可削減冷卻塔20之冷卻用水溶液L21之使用量，抑制運轉費用。 [玻璃物品之製造裝置及製造方法] 其次，對使用本實施形態之排氣處理裝置之玻璃物品之製造裝置及製造方法進行說明。 藉由將玻璃原料供給於玻璃熔解爐內，將燃燒器之火焰朝向玻璃原料放射，而將玻璃原料加熱、熔解。可一面藉由燃燒器之火焰進行加熱一面藉由對複數個通電電極施加電壓而通電，從而加熱玻璃原料。 熔解玻璃原料獲得之熔融玻璃係利用設置於較玻璃熔解爐靠下游側之位置之成形爐而成形。經成形之玻璃係利用設置於較成形爐靠下游側之位置之緩冷爐緩冷而成為玻璃物品。 於獲得玻璃板作為玻璃物品時，例如使用浮式法。浮式法係將導入至收容於浮拋窯內之熔融金屬(例如熔融錫)上之熔融玻璃製成帶板狀之玻璃帶的方法。自熔融金屬提拉玻璃帶，於緩冷爐內一面搬送一面緩冷而成為板玻璃。板玻璃自緩冷爐搬出後，利用切斷機切斷為特定之尺寸形狀而成為製品之玻璃板。 又，作為用以獲得玻璃板之其他之成形方法，可使用熔融法。熔融法係如下方法：使自U形構件之左右兩側之上緣溢出之熔融玻璃沿U形構件之左右兩側面流下，於左右兩側面相交之下緣匯合，藉此製成帶板狀之玻璃帶。熔融玻璃帶係一面向鉛直方向下方移動一面緩冷而成為板玻璃。板玻璃係利用切斷機切斷為特定之尺寸形狀而成為製品之玻璃板。 本實施形態之玻璃物品之製造方法對玻璃原料之組成並無特別限制，適宜用於含有硼之硼矽酸玻璃之製造方法。又，本實施形態之玻璃物品之製造方法適宜用於製造包含氟成分、氯成分作為澄清劑之玻璃原料組成、尤其是無鹼組成之鋁硼矽酸玻璃。無鹼組成之鋁硼矽酸玻璃適宜用於液晶顯示器(LCD)或有機發光二極體(OLED)用途。 本實施形態之玻璃物品於無鹼玻璃組成中，作為就提高應變點及熔解性之觀點而言較佳之例，以氧化物基準之質量百分率表示，包含SiO2 ：58～66%、Al2 O3 ：15～22%、B2 O3 ：5～12%、MgO：0.5～8%、CaO：0.5～9%、SrO：3～12.5%、BaO：0～2%、Cl：0.01～0.35%、F：0.01～0.15%、及SO3 ：0.0001～0.0025%，且MgO＋CaO＋SrO＋BaO：9～18%、MgO/(MgO＋CaO)：0.35～0.55。 作為尤其是就提高熔解性之觀點而言較佳之例，以氧化物基準之質量百分率表示，包含SiO2 ：50～61.5%、Al2 O3 ：10.5～18%、B2 O3 ：7～10%、MgO：2～5%、CaO：0.5～14.5%、SrO：0～24%、BaO：0～13.5%、Cl：0.01～0.35%、F：0.01～0.15%、及SO3 ：0.0001～0.0025%，且MgO＋CaO＋SrO＋BaO：16～29.5%、MgO/(MgO＋CaO)：0.3～0.5。 作為尤其是就提高應變點之觀點而言較佳之例，以氧化物基準之質量百分率表示，包含SiO2 ：54～73%、Al2 O3 ：10.5～22.5%、B2 O3 ：0.1～12%、較佳為0.3～12%、更佳為0.5～5.5%、MgO：0.5～10%、CaO：0.5～9%、SrO：0～16%、BaO：0～2.5%、Cl：0.01～0.35%、F：0.01～0.15%、及SO3 ：0.0001～0.0025%，且MgO＋CaO＋SrO＋BaO：8～26%、MgO/(MgO＋CaO)：0.3～0.8。 對本發明詳細地或參照特定之實施態樣進行了說明，但業者應明確只要不脫離本發明之精神及範圍，可加以各種變更或修正。 本申請案係基於2017年4月24日提出申請之日本專利申請2017-085491，其內容係作為參照引用於本文中。Hereinafter, an exhaust gas treatment apparatus, an exhaust gas treatment method, a glass article manufacturing apparatus, and a glass article manufacturing method according to an embodiment of the present invention will be described with reference to the drawings. The scope of the present invention is not limited to the following embodiments, and can be arbitrarily changed within the scope of the technical idea of the present invention. [Exhaust Gas Treatment Apparatus] FIG. 1 is a schematic diagram of an exhaust gas treatment apparatus according to an embodiment of the present invention. FIG. 2 is a cooling tower according to an embodiment of the present invention, (A) is a schematic cross-sectional view of a main part of the enlarged cooling tower, and (B) is a top view of the cooling tower. An exhaust treatment device 1 according to an embodiment of the present invention will be described with reference to FIG. 1. The exhaust gas treatment device 1 of this embodiment includes a glass melting furnace 10 that generates exhaust gas G1, a cooling tower 20, a filter bag 30, a powder supply device 35, a denitration device 40, a scrubber 50, a main fan 60, and a chimney 70 . The glass melting furnace 10 emits the flame of the burner toward the glass raw material, and heats and melts the glass raw material to generate exhaust gas G1. A burner forms a flame by mixing fuel such as natural gas or heavy oil with a gas and burning it. The burner uses an air burner mainly using air as a gas, or an oxygen burner mainly using oxygen as a gas. By burning with a burner using heavy oil, the exhaust gas G1 contains a sulfur component derived from the heavy oil. The exhaust gas G1 includes a sulfur component, a fluorine component, a chlorine component, and the like derived from a clarifier contained in a glass raw material. In the case of manufacturing borosilicate glass, the exhaust gas G1 contains a boron component that is easily volatilized from the molten glass. The sulfur component in the exhaust gas G1 is mainly sulfur oxides (SO X ), the chlorine component is mainly hydrogen chloride (HCl), the fluorine component is mainly hydrogen fluoride (HF), and the boron component is mainly boric acid (H 3 BO 3 ). Next, a cooling tower 20 according to an embodiment of the present invention will be described with reference to Figs. The cooling tower 20 includes an inlet portion 21, an enlarged diameter portion 23, a cooling tower body 25, a spray nozzle 26, a solid matter recovery mechanism 27, and an outlet portion. As shown in FIG. 2, the cooling tower body 25 is erected in a cylindrical shape. The enlarged diameter portion 23 is provided in connection with the upper portion of the cooling tower body 25. The entrance part 21 is provided in connection with the upper part of the enlarged diameter part 23. The inlet 21 changes the flow direction of the exhaust gas G1 flowing into the cooling tower 20 from a horizontal direction to a vertical direction downward. The diameter of the cross section of the enlarged diameter portion 23 gradually increases from the inlet portion 21 toward the cooling tower body 25. The cross section of the enlarged diameter portion 23 is typically a circular shape or a rectangular shape. The enlarged diameter portion 23 reduces the flow velocity of the exhaust gas G1 passing through the inlet portion 21. The cooling tower body 25 has a reaction space inside, and reacts with the exhaust gas G1 passing through the enlarged diameter section 23 and the cooling aqueous solution L21 and the processing liquid L22 to generate a reactant. The spray nozzle 26 is provided on the side of the enlarged diameter portion 23, and sprays the cooling aqueous solution L21 and the processing liquid L22 in a spraying manner on the flow direction of the exhaust G1 to cool the exhaust G1. Thereby, the temperature of the exhaust gas G2 after cooling is reduced, and the filter cloth in the filter bag 30 described below can be prevented from being damaged by heat. Further, the exhaust gas G1 is reacted with the cooling aqueous solution L21 and the treatment liquid L22 to remove a sulfur component and / or a chlorine component in the exhaust gas G1. The cooling aqueous solution L21 in this embodiment is an aqueous solution of sodium hydroxide (NaOH), and the treatment liquid L22 is an aqueous solution containing sodium hydroxide as a main component. Because sodium hydroxide is cheap and easy to handle, it is used as a general acidic neutralizer. As shown in FIG. 2 (A), the spray nozzle 26 sprays the cooling aqueous solution L21 and the processing liquid L22 in a spray manner from the spray nozzle's spray port radially. The spray angle α of the spray nozzle 26 is preferably 30 to 70 °, and more preferably 40 to 60 °. When the injection angle α is 30 ° or more, the cooling aqueous solution L21 and the treatment liquid L22 can sufficiently remove the sulfur component and / or the chlorine component in the exhaust gas G1 throughout the entire cooling tower body 25. Further, if the spray angle α is 70 ° or less, it is possible to prevent a large amount of the reactants of the cooling aqueous solution L21 and the processing liquid L22 and the exhaust gas G1 from adhering to the wall surface of the cooling tower body 25. If a large amount of the reactant adheres to the wall surface, the cooling tower body 25 may become clogged. As shown in FIG. 2 (B), a plurality of spray nozzles 26 are provided, which are provided at intervals in the circumferential direction on a concentric circle with the center of the enlarged diameter portion 23, respectively. In the present embodiment, the number of the spray nozzles 26 is nine, but the present invention is not limited to this, preferably 2 to 20, and more preferably 2 to 15. If the number of the spray nozzles 26 is two or more, the cooling aqueous solution L21 and the processing liquid L22 may be sprayed separately by a spray method. In addition, if the number of the spray nozzles 26 is 20 or less, each spray nozzle 26 may be installed with a space in the circumferential direction. When there are many roots, two or more rows may be provided in the radial direction on a concentric circle with the center of the enlarged diameter portion 23. Of the nine spray nozzles 26, for example, six spray the cooling aqueous solution L21 by spray, and three spray the treatment liquid L22 by spray. Here, as described below, the treatment liquid L22 contains sodium tetraborate (Na 2 B 4 O 7 ) or magnesium borate (MgB 2 O 4 ). Therefore, the temperature must be controlled so as not to precipitate sodium tetraborate or magnesium borate. Therefore, it is preferable that the cooling aqueous solution L21 and the processing liquid L22 are sprayed separately without being mixed. The total flow rate of the spray nozzle 26 must be appropriately adjusted according to the flow rate of the exhaust gas G1, and is preferably 1000 to 5000 L / h, and more preferably 2000 to 4000 L / h. Furthermore, in this embodiment, the spray nozzle 26 is used when spraying the cooling aqueous solution L21 and the processing liquid L22 by spraying, but the present invention is not limited to this, as long as it is a contact mechanism that can spray or spray the exhaust gas G1, can. The solids recovery mechanism 27 of the cooling tower 20 is provided at the bottom of the cooling tower body 25. The solid recovery mechanism 27 recovers the reactants generated in the cooling tower body 25 as the solid S2. The solid S2 typically includes sodium sulfate (Na 2 SO 4 ) derived from a sulfur component in the exhaust gas G1 and sodium chloride (NaCl) derived from a chlorine component in the exhaust gas G1. An outlet portion of the cooling tower 20 is provided to be connected to a lower side surface of the cooling tower body 25. The outlet portion discharges the cooled exhaust gas G2. The temperature T1 of the exhaust gas G1 in the inlet portion 21 is preferably 700 to 900 ° C. When the temperature T1 is 700 ° C or higher, the sulfur component or the chlorine component in the exhaust gas G1 sufficiently reacts with the cooling aqueous solution L21 and the processing liquid L22. In addition, if the temperature T1 is 900 ° C or lower, damage in the cooling tower 20 can be prevented. The cooling aqueous solution L21 in this embodiment is an aqueous solution of sodium hydroxide (NaOH), or an aqueous solution of magnesium hydroxide (Mg (OH) 2 ). In this case, the treatment liquid L22 is an aqueous solution containing magnesium hydroxide as a main component. Each component in the exhaust gas G1 reacts with the cooling aqueous solution L21 and the treatment liquid L22. The sulfur component in the exhaust gas G1 becomes magnesium sulfate (MgSO 4 ), and the chlorine component in the exhaust gas G1 becomes magnesium chloride (MgCl 2 ). Magnesium hydroxide is cheap and easy to handle, so it is used as a general acidic neutralizer. However, its solubility in water is low, and it is usually in a slurry state. Therefore, it may cause piping when the liquid is recycled and reused. Clogged. However, since the treatment liquid L22 contains a boron component, magnesium hydroxide does not become a slurry state, and can be sent from the scrubber 50 to the cooling tower 20 without causing a clogging problem. The concentration C21 of the cooling aqueous solution L21 is preferably 0.3% or more, and more preferably 0.5% or more. The concentration C21 is preferably 2.0% or less, and more preferably 1.0% or less. When the concentration C21 is 0.3% or more, the sulfur component and / or the chlorine component in the exhaust gas G1 can be sufficiently removed. In addition, if the concentration C21 is 2.0% or less, the spray nozzle 26 can be prevented from being clogged due to the dry solidification of the cooling aqueous solution L21, and the discharge amount of the solid S2 can be reduced. The filter bag 30 in FIG. 1 includes three filter bag bodies 31 and a powder recovery mechanism 37. The filter bag body 31 includes a filter cloth inside, and is connected to an adjacent filter bag body 31 to form a flow path through which the exhaust gas G2 passes after cooling. The filter cloth supports powder of an alkali metal salt or an alkaline earth metal salt, and the exhaust gas G2 after cooling is brought into contact with the powder to make the exhaust gas G3 after contact. The exhaust gas G2 after cooling reacts with the powder to remove the sulfur component, fluorine component or chlorine component in the exhaust gas G2 after cooling. In addition, the soot in the exhaust gas G2 after being cooled is collected by the filter cloth and removed. The material of the filter cloth is preferably a polytetrafluoroethylene (PTFE) resin. Polytetrafluoroethylene is chemically stable and excellent in heat resistance and chemical resistance. The filter bag body 31 includes a gas nozzle above the filter cloth. The filter bag main body 31 uses a gas nozzle to blow compressed air to the filter cloth, and the powder carried on the filter cloth and the reactants of the exhaust gas G2 and the powder after cooling down are collected. The gas nozzle can also use gas such as oxygen or nitrogen instead of compressed air. The powder recovery mechanism 37 recovers the powder and the reactant as powder S3. The powder recovery mechanism 37 collects, for example, the powder S3 recovered from the bottom of the three filter bag bodies 31 by a conveyor or the like in one place. The filter bag 30 can remove the fluorine component in the exhaust gas G2 after cooling, so that the fluorine component can be prevented from being mixed in the scrubber 50 due to the exhaust gas G3 or G4 after contact. This prevents the fluorine component from reacting with the magnesium hydroxide in the scrubber 50 to cause slurry formation. Specifically, it is possible to prevent generation of magnesium fluoride (MgF 2 ) which is hardly soluble in water. The filter bag 30 in FIG. 1 includes three filter bag bodies 31, but the present invention is not limited to this. The number of the filter bag bodies 31 is preferably 2 to 15, more preferably 2 to 10. If the number of the filter bag bodies 31 is two or more, the distance of the flow path through which the exhaust gas G2 after cooling can be extended, and the sulfur component, fluorine component, or chlorine component in the exhaust gas G2 after cooling can be efficiently removed. In addition, if the number of the filter bag bodies 31 is 15 or less, the investment cost and operating cost of the equipment can be suppressed. The number of the filter bag bodies 31 may be one. The powder supply device 35 includes three powder supply device bodies 36. The powder supply device main body 36 supplies powder of an alkali metal salt or an alkaline earth metal salt to the filter bag 30 through a pipe. The number of the powder supply device bodies 36 is preferably the same as the number of the filter bag bodies 31. Thereby, the powder supply amount to the filter bag body 31 can be adjusted independently. The powder supply device 35 preferably supplies 1.0 to 5.0 g of powder to the exhaust gas G2 after cooling at 1 Nm 3 , and more preferably supplies 2.0 to 3.0 g of powder. On the filter cloth in the filter bag body 31, since the amount of powder adhered from the powder supply device body 36 gradually increases, the pressure difference between the inlet and outlet of the filter bag 30 increases. The pressure difference is preferably 30 to 150 mmH 2 O. When the pressure difference is 30 mmH 2 O or more, the powder is sufficiently adhered to the filter cloth, and the sulfur component, fluorine component, or chlorine component in the exhaust gas G2 after cooling can be sufficiently removed. When the pressure difference is 150 mmH 2 O or less, the exhaust gas G2 easily flows after cooling. The pressure difference of the filter bag 30 is preferably adjusted together with the pressure difference of each filter bag body 31. The alkali metal salt is preferably sodium bicarbonate (NaHCO 3 ) or sodium carbonate (Na 2 CO 3 ). The alkaline earth metal salt is preferably calcium hydroxide (Ca (OH) 2 ), calcium carbonate (CaCO 3 ), or a double salt of calcium carbonate and magnesium carbonate (MgCO 3 ). The double salt is, for example, dolomite. After cooling, the components in the exhaust gas G2 react with the powder of an alkali metal salt or an alkaline earth metal salt. After cooling, the sulfur component in the exhaust gas G2 becomes sodium sulfate (Na 2 SO 4 ) or calcium sulfate (CaSO 4 ), the fluorine component becomes sodium fluoride (NaF) or calcium fluoride (CaF 2 ), and the chlorine component becomes sodium chloride. (NaCl) or calcium chloride (CaCl 2 ). When a double salt such as dolomite is used as a powder of an alkaline earth metal salt, sulfur component also generates magnesium sulfate (MgSO 4 ), fluorine component also generates magnesium fluoride (MgF 2 ), and chlorine component also generates magnesium chloride (MgCl 2 ). Powder S3 is a mixture of these reactants. The average particle diameter of the powder of the alkali metal salt or alkaline earth metal salt is preferably 1 to 100 μm, more preferably 1 to 50 μm, and even more preferably 1 to 30 μm. When the average particle diameter is 1 μm or more, powder can be produced inexpensively by a pulverization operation. When the average particle diameter is 100 μm or less, the sulfur component, chlorine component, or fluorine component in the exhaust gas G2 after cooling sufficiently reacts with the powder to be removed. Here, the average particle diameter refers to a laser diffraction diffraction scattering type particle size distribution measuring device (Microtrac FRA9220 manufactured by Nikkiso Co., Ltd.), and when the total volume is 100% to obtain a cumulative curve, the cumulative volume becomes Particle size at 50%. In addition, as long as the powder S3 contains a calcium component and a magnesium component and has an average particle diameter of 30 to 100 μm, it is suitable for reuse as a glass raw material for alkali-free glass. The temperature T2 of the exhaust gas G2 after cooling is preferably 180 to 250 ° C. at the inlet of the filter bag 30. If the temperature T2 is 180 ° C or higher, the sulfur component, chlorine component, or fluorine component in the exhaust gas G2 after cooling sufficiently reacts with the powder to be removed. If the temperature T2 is 250 ° C or lower, the filter cloth in the filter bag body 31 can be prevented from being damaged by heat. The concentration of the sulfur component contained in the exhaust gas G3 after the contact is preferably 100 mg / Nm 3 or less, more preferably 50 mg / Nm 3 or less in terms of sulfur dioxide (SO 2 ) conversion. The concentration of the fluorine component in the exhaust gas G3 after the contact is preferably 30 mg / Nm 3 or less, more preferably 10 mg / Nm 3 or less, and even more preferably 5 mg / Nm 3 or less. The concentration of the chlorine component in the exhaust gas G3 after the contact is preferably 100 mg / Nm 3 or less, and more preferably 50 mg / Nm 3 or less. The concentration of the sulfur component is obtained by an automatic analysis using an infrared absorption method or the like or a chemical analysis. The concentration of the sulfur component is obtained by, for example, IC (ion chromatography). The concentration of the fluorine component is that the exhaust gas is taken by a quantitative pump and absorbed in the absorption liquid. The concentration of the fluorine component in the solution is measured by ICP (inductively coupled plasma). According to the fluorine component per 1 Nm 3 of the exhaust gas Find out. The concentration of the chlorine component was determined by the same method as the concentration of the fluorine component. Next, a denitration device 40 according to an embodiment of the present invention will be described with reference to FIG. 1. The denitration device 40 includes a catalyst layer and a gas injection nozzle. The denitration device 40 injects ammonia (NH 3 ) gas using a gas injection nozzle before the exhaust gas G3 passes through the catalyst layer after the contact. Thereby, nitrogen oxides (NO X ) contained in the exhaust gas G3 after the contact are removed. After coming into contact with the denitration device 40, the exhaust gas G4 flows into the scrubber 50. The catalyst layer is preferably a catalyst using vanadium pentoxide (V 2 O 5 ) as an active ingredient, for example, a catalyst (TiO 2 -V 2 O 5 -WO 3 ) using titanium oxide (TiO 2 ) as a carrier. Media. The injection amount of ammonia gas is preferably 5 to 20 Nm 3 / h. When it is 5 Nm 3 / h or more, nitrogen oxides (NO x ) can be sufficiently decomposed. In addition, if the injection amount is 20 Nm 3 / h or less, the reaction between sulfur trioxide (SO 3 ) and ammonia (NH 3 ) in the exhaust gas G3 after contact can be suppressed, and the amount of ammonium hydrogen sulfate (NH 4 HSO 4 ) can be reduced. generate. Ammonium bisulfate blocks catalyst pores, so it is ideal not to generate. Therefore, as described above, the concentration of the sulfur component contained in the exhaust gas G3 after the contact must also be adjusted accordingly. Therefore, the concentration of the sulfur component in the exhaust gas G3 after the contact is preferably 100 mg / Nm 3 or less in terms of sulfur dioxide (SO 2 ) conversion. The temperature T3 of the exhaust gas G3 after the contact is preferably 200 to 300 ° C. at the inlet of the denitration device 40. When the temperature T3 is 200 ° C. or higher, nitrogen oxides (NO X ) and ammonia (NH 3 ) gas in the exhaust gas G3 after the contact fully react. In addition, if the temperature T3 is 300 ° C or lower, it is possible to prevent a decrease in catalyst activity. It is preferable to set a temperature adjustment mechanism (for example, a burner) in the flow path between the filter bag 30 and the denitration device 40 to adjust the temperature T3 by heating. The reason for this is that the temperature at the outlet of the filter bag 30 may drop to 200 ° C or lower. The burner fuel is, for example, natural gas. Preferably, the exhaust gas G4 after denitration by means of the contact 40 of nitrogen oxides (NO X) have a concentration of 800 mg / Nm 3 or less, more preferably 500 mg / Nm 3 or less. The concentration of nitrogen oxides is determined by automatic measurement using a chemiluminescence method or the like. In addition, as long as the concentration of nitrogen oxides (NO X ) in the exhaust gas G3 after the contact is 800 mg / Nm 3 or less, the denitration device 40 may not be provided. In this case, the exhaust gas G3 flows into the scrubber 50 after the contact. Fig. 3 is a schematic view of a scrubber according to an embodiment of the present invention. A scrubber 50 according to an embodiment of the present invention will be described with reference to Figs. The washer 50 includes a pre-washer 510, a washer body 520 provided in connection with the pre-washer 510, and a drain tank 530 provided at the bottom of the washer body 520. The scrubber 50 reacts the exhaust gases G4 and G41 after contact with the cooling liquids L51 and L52 and the treatment liquid L22 to obtain a clean gas G5 and a drain liquid L55. The cooling liquids L51 and L52 use water or an aqueous sodium hydroxide solution. In addition, the scrubber 50 includes an adjustment mechanism 539 that adjusts the pH and temperature of the liquid discharge L55 to make the processing liquid L22, a return pipe 550 that connects the liquid discharge tank 530 and the cooling tower 20, and a liquid discharge tank 530 and washing The return pipe 551 connected to the device body 520. The pre-washer 510 has a structure in which the exhaust gas G4 flows in from the upper part and is discharged to the lower part after the contact, and a nozzle 511 is provided at the upper part. The nozzle 511 sprays the cooling liquid L51 toward the flow direction of the exhaust gas G4 after contact. By adjusting the flow rate of the cooling liquid L51, the temperature of the exhaust gas G41 after contact can be appropriately adjusted. The cooling liquid L51 in contact with the post-contact exhaust gas G4 is recovered as the drain liquid L55 in the drain tank 530. In FIG. 3, the number of nozzles 511 is one, and plural nozzles 511 may be provided. Moreover, the nozzle may be provided in the lower part of the pre-washer 510, and sprays the cooling liquid L51 in a spray direction in the direction opposite to the flow direction of the exhaust gas G4 after contact. Although not shown in FIG. 3, the pre-washer 510 may further be provided with a nozzle to spray the treatment liquid L22 by a spray method. In addition, the pre-washer 510 may be provided with a drain tank at the bottom. In this case, the liquid discharge tank recovers the cooling liquid L51 after being in contact with the exhaust gas G4 after the contact. The scrubber body 520 allows the exhaust gas G41 flowing in from the lower part to be discharged to the upper part after the contact discharged from the pre-washer 510. The scrubber body 520 includes a filling layer 521 inside, and includes nozzles 523 and 525 above the filling layer 521. The nozzle 523 is provided between the filling layer 521 and the nozzle 525. The nozzle 523 is connected to the return pipe 551, and sprays the processing liquid L22 in a direction opposite to the flow of the exhaust gas G41 after the contact. The nozzle 525 sprays the cooling liquid L52 in a direction opposite to the flow of the exhaust gas G41 after the contact. The scrubber body 520 contacts the cooling liquid L52 and the processing liquid L22 with the exhaust gas G41 after the contact, so that the boron component in the exhaust gas G41 after the contact is dissolved in the cooling liquid L52 and the processing liquid L22. At this time, components other than the boron component in the exhaust gas G41 after the contact may be dissolved in the cooling liquid L52 and / or the processing liquid L22. For example, the sulfur component or the chlorine component in the exhaust gas G41 after the contact is dissolved. By adjusting the flow rates of the cooling liquid L52 and the processing liquid L22, the temperature of the exhaust gas G41 after the contact can be appropriately adjusted. The cooling liquid L52 in contact with the post-contact exhaust gas G41 is recovered as the drain liquid L55 in the drain tank 530. The filling layer 521 generates a pressure difference between the upper part and the lower part of the scrubber body 520. Thereby, the exhaust gas G41 becomes turbulent in the scrubber body 520 after the contact, and the exhaust gas G41 is in full contact with the cooling liquid L52 and the processing liquid L22 after the contact, which can promote the components in the exhaust G41 to the cooling liquid after the contact Dissolved in L52 and treatment liquid L22. The pressure difference between the inlet and the outlet of the scrubber 50 is preferably 50 to 200 mmH 2 O. The filling layer 521 floats a plastic ball as a filler, and promotes the reaction by a water film on the surface of the ball. As the filler of the filling layer 521, it is more preferable to have a large surface area, easy formation of a water film, less resistance to air flow, less overflow or bias flow, or light and strong. The material of the filler of the filling layer 521 is preferably polypropylene. Polypropylene is excellent in light weight and low cost. The diameter of the particles constituting the filler is preferably 40 to 100 mm. Furthermore, it is preferable to use a fiber-reinforced plastic (FRP) having excellent corrosion resistance in the pre-washer 510 and the scrubber body 520. When the cooling aqueous solution L21 used in the cooling tower 20 is a magnesium hydroxide aqueous solution, water or a magnesium hydroxide aqueous solution is used as the cooling liquids L51 and L52. In this case, a magnesium hydroxide aqueous solution is used as the pH-adjusting aqueous solution L54 described below. Here, if a Ca component is contained in the cooling liquid L51 and / or L52 as a neutralizing agent, a precipitate such as calcium sulfate (CaSO 4 ) or calcium borate (CaB 4 O 7 ) is generated in the liquid discharge tank 530. Such deposits may block the return pipes 550 and 551. Therefore, it is preferable that the cooling liquids L51 and L52 contain no Ca component as a neutralizing agent. The liquid discharge tank 530 contains a liquid discharge L55. In the discharge liquid L55, the boron components in the exhaust gas G4 and G41 after contact are dissolved. It is preferable to use a fiber-reinforced plastic (FRP) having excellent corrosion resistance in the liquid discharge tank 530. The liquid discharge tank 530 includes a pH measuring meter 533, a thermometer, a cooling nozzle, and a heater. The cooling nozzle injects cooling water L53 into the liquid discharge tank 530. The adjustment mechanism 539 includes an injection tank 540, a circulation pump 541, and an injection nozzle. The injection tank 540 stores the pH-adjusted aqueous solution L54. The injection nozzle injects the pH adjustment aqueous solution L54 into the liquid discharge tank 530 from the injection tank 540 via the circulation pump 541. As the pH adjusting aqueous solution L54, an aqueous sodium hydroxide solution was used. The concentration C54 of the pH-adjusted aqueous solution L54 is preferably 20% or more, and more preferably 30% or more. If the concentration C54 is more than 20%, it is suitable for adjusting the pH value of the discharged liquid L55. In addition, the adjustment mechanism 539 adjusts the pH of the discharged liquid L55 to 5 to 9 and adjusts the temperature to 40 ° C or higher. Thereby, a processing liquid L22 containing a boron component, a sodium component, or a magnesium component was prepared. During the preparation of the treatment liquid L22, the boron component in the drainage liquid L55 reacts with sodium hydroxide or magnesium hydroxide to form sodium tetraborate (Na 2 B 4 O 7 ) or magnesium borate (MgB 2 O 4 ). Furthermore, the treatment liquid L22 may contain an unreacted boron component, sodium hydroxide, or magnesium hydroxide. In addition, the treatment liquid L22 may contain chlorine, fluorine, calcium, and the like in a trace amount. The return pipe 550 sends the processing liquid L22 from the liquid discharge tank 530 to the spray nozzle 26 of the cooling tower 20 via the circulation pump 531. The return pipe 551 sends the processing liquid L22 from the liquid discharge tank 530 to the nozzle 523 of the scrubber body 520 via the circulation pump 531. It is preferable that a heater for adjusting the temperature of the processing liquid L22 is provided in the return pipes 550 and 551. The injection amount of sodium hydroxide or magnesium hydroxide into the drainage tank 530 is preferably an amount sufficient to convert a boron component, a sulfur component, or a chlorine component in the drainage liquid L55 into a sodium salt or a magnesium salt. However, if the supply amount of sodium hydroxide is too large, sodium tetraborate or magnesium borate is saturated to precipitate. If sodium tetraborate or magnesium borate is deposited, the return pipes 550 and 551 may be blocked, and it may be difficult to send the processing liquid L22 to the spray nozzle 26 of the cooling tower 20 or the nozzle 523 of the scrubber body 520. Therefore, the pH value of the treatment liquid L22 in the liquid discharge tank 530 is measured by the pH meter 533, and the pH value is kept in the range of 5-9. At this time, the pH and temperature are adjusted by adjusting the supply amounts of the cooling water L53 and the pH-adjusted aqueous solution L54. The pH of the treatment liquid L22 is preferably 6 to 8, more preferably 6.5 to 7.5. If the pH value of the processing liquid L22 is 5 or more, the boron component and the like in the processing liquid L22 can be well converted into sodium salts or magnesium salts, and the unreacted boron components and the like remaining in the processing liquid L22 can be reduced. In addition, if the pH value of the treatment liquid L22 is 9 or less, precipitation of sodium tetraborate or magnesium borate in the treatment liquid L22 can be prevented. The temperature T22 of the processing liquid L22 is adjusted so as to be maintained at 40 ° C or higher. The temperature T22 is preferably 50 ° C or higher, and more preferably 60 ° C or higher. The temperature T22 is preferably 90 ° C or lower, and more preferably 80 ° C or lower. By setting the temperature T22 to 40 ° C. or higher, precipitation of sodium tetraborate or magnesium tetraborate in the treatment liquid L22 can be prevented. In addition, if the temperature is 90 ° C or lower, damage due to heat in the liquid discharge tank 530 can be prevented. The liquid discharge tank 530 in this embodiment is provided at the bottom of the washer body 520, but may be provided at a different position from the washer body 520 via a pipe. This form is excellent in the case where the drain liquid is recovered at the bottom of the pre-washer 510, and the drain liquid of the pre-washer 510 and the scrubber body 520 can be collected in one place for processing. The temperature T4 of the exhaust gas G4 after the contact is preferably 200 to 300 ° C. at the inlet of the scrubber 50. If the temperature T4 is 200 ° C or higher, the boron components in the exhaust gases G4 and G41 after contact can be sufficiently removed. In addition, if the temperature T4 is 300 ° C or lower, damage caused by the heat of the filling layer 521 can be prevented. The temperature of the exhaust G41 after contact is preferably 60 to 90 ° C, and more preferably 70 to 80 ° C. If the temperature of the exhaust G41 after contact is 60 ° C or higher, the amount of the cooling liquids L51 and L52 can be reduced. In addition, if the temperature of the exhaust gas G41 after contact is 90 ° C. or lower, the boron component in the exhaust gas G41 after contact can be dissolved in the cooling liquid L52 and the treatment liquid L22 and separated. The concentration of the boron component in the clean gas G5 in terms of boron oxide (B 2 O 3 ) is preferably 20 mg / Nm 3 or less, and more preferably 10 mg / Nm 3 or less. Next, a main fan 60 and a chimney 70 according to an embodiment of the present invention will be described. The clean gas G5 is sucked by the main fan 60 which adjusts the flow rate of the exhaust gas, and the clean gas G6 passing through the main fan 60 passes through the chimney 70 and is released into the atmosphere as clean gas G7. The temperature of the clean gas G5 immediately after passing through the scrubber 50 is, for example, 60 to 90 ° C. It is possible to directly suck the clean gas G5 with the main fan 60 without performing temperature adjustment, but if the temperature is lower, the chimney effect in the chimney 70 becomes smaller. Therefore, it is preferable to set a burner for heating in the flow path between the scrubber 50 and the main fan 60, and the temperature T5 of the clean gas G5 before flowing into the main fan 60 is preferably 100 to 130 ° C. The exhaust gas treatment apparatus according to aspect 1 of this embodiment, purge gas G7 achievable concentration of the sulfur content of sulfur dioxide (SO 2) in terms of 100 mg / Nm 3 or less, the concentration of nitrogen oxides (NO X) of the 800 mg / Nm 3 or less, fluorine component concentration is 30 mg / Nm 3 or less, chlorine component concentration is 100 mg / Nm 3 or less, and boron component concentration is 20 mg / Nm 3 or less in terms of boron oxide (B 2 O 3 ) conversion. The exhaust gas treatment device 1 is suitable for exhaust gas treatment in which the flow rate of the clean gas G7 is 5,000 to 40,000 Nm 3 / h. [Exhaust Gas Treatment Method] FIG. 4 is a flowchart showing an exhaust gas treatment method according to an embodiment of the present invention. An exhaust treatment method according to an embodiment of the present invention will be described with reference to FIG. 4. The exhaust gas treatment method of this embodiment includes a glass melting step ST1 that melts glass raw materials, and a cooling step ST2 that brings the cooling aqueous solution into contact with the exhaust gas generated in the glass melting step ST1 to obtain cooled exhaust gas; and powder In the body recovery step ST3, while contacting the powder of the alkali metal salt or the alkaline earth metal salt with the exhaust gas after cooling to obtain the exhaust gas after contact, the reactant of the cooled exhaust gas and the powder is recovered as a powder. The exhaust gas treatment method further includes a denitration step ST4 to remove nitrogen oxides contained in the exhaust gas after the contact; and a liquid drainage treatment step ST5 to obtain a clean gas while bringing the cooling liquid into contact with the exhaust gas after the contact. The reaction liquid between the exhaust gas and the cooling liquid after the contact is recovered as the drain liquid. The liquid discharge treatment step ST5 is to prepare a treatment liquid by adjusting the pH of the liquid discharge to 5 to 9 and the temperature to 40 ° C or higher, and return the treatment liquid to the cooling step. The cooling step ST2 is to contact the treatment liquid with the exhaust gas. In the cooling step ST2, the cooling aqueous solution is preferably a sodium hydroxide aqueous solution or a magnesium hydroxide aqueous solution. In the cooling step ST2, it is preferable that a reactant is generated by a reaction between the exhaust gas and the cooling aqueous solution, and the reactant is recovered as a solid. In the powder recovery step ST3, the alkali metal salt is preferably sodium bicarbonate or sodium carbonate. The alkaline earth metal salt is preferably calcium hydroxide, calcium carbonate, or a double salt of calcium carbonate and magnesium carbonate. The denitration step ST4 is preferably injecting ammonia gas before the exhaust gas passes through the catalyst layer after the contact. As described above, according to the exhaust gas treatment method and the exhaust gas treatment device 1 of this embodiment, it is possible to sufficiently remove sulfur components, boron components, and the like in the exhaust gas without using complicated wet-type equipment. Therefore, the investment cost of the wet equipment (the scrubber 50) can be suppressed. Moreover, according to the exhaust gas treatment device 1 of this embodiment, the treatment liquid L22 obtained in the scrubber 50 can be reused in the cooling tower 20, so the amount of the cooling aqueous solution L21 used in the cooling tower 20 can be reduced, and the running cost can be suppressed. [Glass Article Manufacturing Apparatus and Manufacturing Method] Next, a glass article manufacturing apparatus and a manufacturing method using the exhaust treatment apparatus of this embodiment will be described. The glass raw material is supplied into a glass melting furnace, and the flame of the burner is radiated toward the glass raw material, thereby heating and melting the glass raw material. The glass raw material can be heated while being heated by the flame of a burner while being energized by applying a voltage to a plurality of energized electrodes. The molten glass obtained by melting the glass raw material is formed by a forming furnace provided at a position downstream of the glass melting furnace. The formed glass is gradually cooled by a slow-cooling furnace disposed downstream of the forming furnace to become a glass article. When obtaining a glass plate as a glass article, for example, a float method is used. The float method is a method in which a molten glass introduced into a molten metal (for example, molten tin) contained in a floating kiln is made into a plate-shaped glass ribbon. The glass ribbon is pulled from the molten metal and slowly cooled while being conveyed in the slow cooling furnace to become sheet glass. After the plate glass is carried out from the slow cooling furnace, it is cut into a specific size and shape by a cutting machine to become a glass plate of a product. Further, as another forming method for obtaining a glass plate, a melting method can be used. The melting method is as follows: The molten glass overflowing from the upper edges of the left and right sides of the U-shaped member flows down the left and right sides of the U-shaped member and merges at the lower edges where the left and right sides intersect, thereby forming a strip-shaped Glass ribbon. The molten glass ribbon is gradually cooled while moving downward in the vertical direction, and becomes a sheet glass. The sheet glass is a glass sheet cut into a specific size and shape by a cutter to form a product. The manufacturing method of the glass article of this embodiment is not particularly limited to the composition of the glass raw material, and is suitable for a manufacturing method of borosilicate glass containing boron. Moreover, the manufacturing method of the glass article of this embodiment is suitable for manufacturing the glass raw material composition which contains a fluorine component and a chlorine component as a clarifier, especially the aluminum borosilicate glass without alkali composition. Alkali-free aluminum borosilicate glass is suitable for liquid crystal display (LCD) or organic light emitting diode (OLED) applications. The glass article of this embodiment is an alkali-free glass composition. As an example preferable from the viewpoint of improving the strain point and the melting property, it is expressed in terms of an oxide-based mass percentage, and includes SiO 2 : 58 to 66%, Al 2 O. 3 : 15 to 22%, B 2 O 3 : 5 to 12%, MgO: 0.5 to 8%, CaO: 0.5 to 9%, SrO: 3 to 12.5%, BaO: 0 to 2%, Cl: 0.01 to 0.35 %, F: 0.01 to 0.15%, and SO 3 : 0.0001 to 0.0025%, and MgO + CaO + SrO + BaO: 9 to 18%, MgO / (MgO + CaO): 0.35 to 0.55. As a particularly preferable example from the viewpoint of improving the melting property, it is expressed in terms of an oxide-based mass percentage, and includes SiO 2 : 50 to 61.5%, Al 2 O 3 : 10.5 to 18%, and B 2 O 3 : 7 to 10%, MgO: 2 to 5%, CaO: 0.5 to 14.5%, SrO: 0 to 24%, BaO: 0 to 13.5%, Cl: 0.01 to 0.35%, F: 0.01 to 0.15%, and SO 3 : 0.0001 ～ 0.0025%, and MgO + CaO + SrO + BaO: 16-29.5%, MgO / (MgO + CaO): 0.3-0.5. As a particularly preferable example from the viewpoint of increasing the strain point, it is expressed as an oxide-based mass percentage and includes SiO 2 : 54 to 73%, Al 2 O 3 : 10.5 to 22.5%, and B 2 O 3 : 0.1 to 12%, preferably 0.3 to 12%, more preferably 0.5 to 5.5%, MgO: 0.5 to 10%, CaO: 0.5 to 9%, SrO: 0 to 16%, BaO: 0 to 2.5%, Cl: 0.01 -0.35%, F: 0.01-0.15%, and SO 3 : 0.0001-0.0025%, and MgO + CaO + SrO + BaO: 8-26%, and MgO / (MgO + CaO): 0.3-0.8. The present invention has been described in detail or with reference to specific implementation aspects, but it should be clear to those skilled in the art that various changes or modifications can be made without departing from the spirit and scope of the present invention. This application is based on Japanese Patent Application No. 2017-085491 filed on April 24, 2017, the contents of which are incorporated herein by reference.

1‧‧‧排氣處理裝置1‧‧‧ exhaust treatment device

10‧‧‧玻璃熔解爐10‧‧‧Glass melting furnace

20‧‧‧冷卻塔20‧‧‧ cooling tower

21‧‧‧入口部21‧‧‧Entrance

23‧‧‧擴徑部23‧‧‧Expansion Department

25‧‧‧冷卻塔本體25‧‧‧Cooling tower body

26‧‧‧噴霧噴嘴26‧‧‧ spray nozzle

27‧‧‧固形物回收機構27‧‧‧Solid matter recovery agency

30‧‧‧過濾袋30‧‧‧ filter bag

31‧‧‧過濾袋本體31‧‧‧Filter bag body

35‧‧‧粉末供給裝置35‧‧‧ powder supply device

36‧‧‧粉末供給裝置本體36‧‧‧ powder supply device body

37‧‧‧粉體回收機構37‧‧‧ Powder Recovery Agency

40‧‧‧脫硝裝置40‧‧‧Denitration device

50‧‧‧洗滌器50‧‧‧ scrubber

60‧‧‧主風扇60‧‧‧main fan

70‧‧‧煙囪70‧‧‧ Chimney

510‧‧‧預洗滌器510‧‧‧Pre-washer

511‧‧‧噴嘴511‧‧‧Nozzle

520‧‧‧洗滌器本體520‧‧‧washer body

521‧‧‧填充層521‧‧‧ Filler

523‧‧‧噴嘴523‧‧‧Nozzle

525‧‧‧噴嘴525‧‧‧Nozzle

530‧‧‧排液槽530‧‧‧Drain tank

531‧‧‧循環泵531‧‧‧Circulation pump

533‧‧‧pH值測定計533‧‧‧pH meter

539‧‧‧調整機構539‧‧‧ adjustment agency

540‧‧‧注入槽540‧‧‧injection tank

541‧‧‧循環泵541‧‧‧Circulation pump

550‧‧‧返回配管550‧‧‧ return piping

551‧‧‧返回配管551‧‧‧Back to piping

L21‧‧‧冷卻用水溶液L21‧‧‧ Cooling water solution

L22‧‧‧處理液L22‧‧‧treatment liquid

L51‧‧‧冷卻用液體L51‧‧‧cooling liquid

L52‧‧‧冷卻用液體L52‧‧‧cooling liquid

L53‧‧‧冷卻水L53‧‧‧cooling water

L54‧‧‧pH值調整用水溶液L54‧‧‧pH solution for pH adjustment

L55‧‧‧排液L55‧‧‧Drain

G1‧‧‧排氣G1‧‧‧Exhaust

G2‧‧‧冷卻後排氣G2‧‧‧Exhaust after cooling

G3‧‧‧接觸後排氣G3‧‧‧ Exhaust after contact

G4‧‧‧接觸後排氣G4‧‧‧ Exhaust after contact

G5‧‧‧潔淨氣體G5‧‧‧Clean gas

G6‧‧‧潔淨氣體G6‧‧‧clean gas

G7‧‧‧潔淨氣體G7‧‧‧clean gas

G41‧‧‧接觸後排氣G41‧‧‧Exhaust after contact

S2‧‧‧固形物S2‧‧‧Solid

S3‧‧‧粉體S3‧‧‧ Powder

ST1‧‧‧玻璃熔解步驟ST1‧‧‧Glass melting step

ST2‧‧‧冷卻步驟ST2‧‧‧Cooling steps

ST3‧‧‧粉體回收步驟ST3‧‧‧ Powder recovery steps

ST4‧‧‧脫硝步驟ST4‧‧‧Denitration steps

ST5‧‧‧排液處理步驟ST5‧‧‧Draining treatment steps

圖1係本發明之一實施形態之排氣處理裝置之概略圖。 圖2係本發明之一實施形態之冷卻塔，(A)係放大冷卻塔之主要部分之剖面模式圖，(B)係冷卻塔之俯視圖。 圖3係本發明之一實施形態之洗滌器之概略圖。 圖4係表示本發明之一實施形態之排氣處理方法的流程圖。FIG. 1 is a schematic diagram of an exhaust treatment apparatus according to an embodiment of the present invention. FIG. 2 is a cooling tower according to an embodiment of the present invention, (A) is a schematic cross-sectional view of a main part of the enlarged cooling tower, and (B) is a top view of the cooling tower. Fig. 3 is a schematic view of a scrubber according to an embodiment of the present invention. FIG. 4 is a flowchart showing an exhaust gas treatment method according to an embodiment of the present invention.

Claims (11)

一種排氣處理方法，其特徵在於包括： 玻璃熔解步驟，其將玻璃原料熔解； 冷卻步驟，其使冷卻用水溶液與上述玻璃熔解步驟中產生之排氣接觸而獲得冷卻後排氣； 粉體回收步驟，其一面使鹼金屬鹽或鹼土金屬鹽之粉末與上述冷卻後排氣接觸而獲得接觸後排氣，一面將上述冷卻後排氣與上述粉末之反應物作為粉體回收；及 排液處理步驟，其一面使冷卻用液體與上述接觸後排氣接觸而獲得潔淨氣體，一面將上述接觸後排氣與上述冷卻用液體之反應液作為排液回收； 上述排液處理步驟係藉由將上述排液之pH值調整為5～9且將溫度調整為40℃以上而製作處理液，並將上述處理液送回至上述冷卻步驟；且 上述冷卻步驟係使上述處理液與上述排氣接觸。An exhaust gas treatment method, comprising: a glass melting step that melts glass raw materials; a cooling step that contacts a cooling aqueous solution with the exhaust gas generated in the glass melting step to obtain exhaust gas after cooling; powder recovery A step of contacting the powder of the alkali metal salt or the alkaline earth metal salt with the exhaust gas after cooling to obtain the exhaust gas after the contact, and recovering the reactant of the cooled exhaust gas and the powder as a powder; and draining treatment In the step, while the cooling liquid is brought into contact with the exhaust gas after contacting to obtain a clean gas, the reaction liquid of the exhaust gas after contacting with the cooling liquid is recovered as a drainage liquid; the drainage processing step is performed by transferring The pH value of the discharged liquid is adjusted to 5 to 9 and the temperature is adjusted to 40 ° C. or higher to prepare a processing liquid, and the processing liquid is returned to the cooling step; and the cooling step is to contact the processing liquid with the exhaust gas. 如請求項1之排氣處理方法，其中上述冷卻用水溶液為氫氧化鈉水溶液或氫氧化鎂水溶液。The exhaust gas treatment method according to claim 1, wherein the cooling aqueous solution is a sodium hydroxide aqueous solution or a magnesium hydroxide aqueous solution. 如請求項1或2之排氣處理方法，其中上述鹼金屬鹽為碳酸氫鈉或碳酸鈉。The exhaust gas treatment method according to claim 1 or 2, wherein the alkali metal salt is sodium bicarbonate or sodium carbonate. 如請求項1或2之排氣處理方法，其中上述鹼土金屬鹽為氫氧化鈣、碳酸鈣、或碳酸鈣與碳酸鎂之複鹽。The exhaust gas treatment method according to claim 1 or 2, wherein the alkaline earth metal salt is calcium hydroxide, calcium carbonate, or a double salt of calcium carbonate and magnesium carbonate. 如請求項1或2之排氣處理方法，其中上述冷卻步驟係藉由上述排氣與上述冷卻用水溶液之反應而生成反應物，並將上述反應物作為固形物回收。The exhaust gas treatment method according to claim 1 or 2, wherein the cooling step generates a reactant by reacting the exhaust gas with the cooling aqueous solution, and recovers the reactant as a solid. 如請求項1或2之排氣處理方法，其中於上述粉體回收步驟與上述排液處理步驟之間具有將上述接觸後排氣所含之氮氧化物去除之脫硝步驟，且 上述脫硝步驟係於上述接觸後排氣通過觸媒層之前注入氨氣。The exhaust gas treatment method according to claim 1 or 2, wherein a denitration step for removing nitrogen oxides contained in the exhaust gas after the contact between the powder recovery step and the liquid drainage treatment step, and the denitration The step is to inject ammonia gas before the exhaust gas passes through the catalyst layer after the contact. 一種排氣處理裝置，其特徵在於：其係包含產生排氣之玻璃熔解爐、冷卻塔、過濾袋、及洗滌器者； 上述冷卻塔包含對上述排氣以噴霧方式噴射冷卻用水溶液而獲得冷卻後排氣之噴嘴； 上述過濾袋包含濾布、及粉體回收機構； 上述濾布擔載鹼金屬鹽或鹼土金屬鹽之粉末，使上述冷卻後排氣與上述粉末接觸而製成接觸後排氣； 上述粉體回收機構將上述冷卻後排氣與上述粉末之反應物作為粉體回收； 上述洗滌器包含對上述接觸後排氣以噴霧方式噴射冷卻用液體而獲得潔淨氣體及排液之噴嘴、調整上述排液之pH值及溫度而製成處理液之調整機構、及用於將上述處理液送出至上述冷卻塔之返回配管；且 上述冷卻塔包含對上述排氣以噴霧方式噴射上述處理液之噴嘴。An exhaust gas treatment device characterized by comprising a glass melting furnace, a cooling tower, a filter bag, and a scrubber that generates exhaust gas; the cooling tower includes cooling the exhaust gas by spraying an aqueous solution for cooling with the spray gas to obtain cooling The rear exhaust nozzle; the filter bag includes a filter cloth and a powder recovery mechanism; the filter cloth carries powder of an alkali metal salt or an alkaline earth metal salt, and the cooled exhaust gas contacts the powder to form a contact rear row The powder recovery mechanism recovers the reactant of the cooled exhaust gas and the powder as powder; the scrubber includes a nozzle for spraying the cooling liquid by spraying the exhaust gas after the contact to obtain a clean gas and a liquid discharge nozzle. An adjusting mechanism for adjusting the pH value and temperature of the discharged liquid to prepare a processing liquid, and a return pipe for sending the processing liquid to the cooling tower; and the cooling tower includes spraying the exhaust gas with the processing described above Liquid nozzle. 如請求項7之排氣處理裝置，其中上述洗滌器包含預洗滌器、及與上述預洗滌器連結而設置之洗滌器本體，且 上述洗滌器本體於內部包含填充層。The exhaust gas treatment device according to claim 7, wherein the scrubber includes a pre-washer and a scrubber body connected to the pre-washer, and the scrubber body includes a filling layer inside. 一種玻璃物品之製造裝置，其包含如請求項7或8之排氣處理裝置；成形爐，其設置於較上述玻璃熔解爐靠下游側之位置，使上述熔融玻璃成形；及緩冷爐，其設置於較上述成形爐靠下游之位置，使成形之玻璃緩冷。A manufacturing apparatus for a glass article, which includes an exhaust treatment device as claimed in claim 7 or 8; a forming furnace, which is disposed on the downstream side of the glass melting furnace to form the molten glass; and a slow cooling furnace, which It is set at a position lower than the forming furnace to cool the formed glass slowly. 一種玻璃物品之製造方法，其使用如請求項9之玻璃物品之製造裝置。A manufacturing method of a glass article using the manufacturing apparatus of the glass article of Claim 9. 如請求項10之玻璃物品之製造方法，其中上述玻璃物品為硼矽酸玻璃。The method for manufacturing a glass article according to claim 10, wherein the glass article is borosilicate glass.
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