TW201842368A - Optical fiber component, optical circuit component and manufacturing for optical component - Google Patents

Optical fiber component, optical circuit component and manufacturing for optical component Download PDF

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Publication number
TW201842368A
TW201842368A TW107111980A TW107111980A TW201842368A TW 201842368 A TW201842368 A TW 201842368A TW 107111980 A TW107111980 A TW 107111980A TW 107111980 A TW107111980 A TW 107111980A TW 201842368 A TW201842368 A TW 201842368A
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Taiwan
Prior art keywords
position reference
optical
optical fiber
convex portion
optical circuit
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TW107111980A
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Chinese (zh)
Inventor
新海正博
佐藤裕三
小卷壮
中原基博
塩谷正博
大友克也
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日商Tdk股份有限公司
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Publication of TW201842368A publication Critical patent/TW201842368A/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device

Abstract

The present disclosure pertains to an optical fiber component in which an optical fiber is held inside each of one or more through-holes provided in a holding member, wherein one optical fiber is fixed to each of the through-holes in a state in which an end surface of each optical fiber is disposed on an end surface of the holding member. The outer peripheral surface, excluding the end surface, of the holding member has: a first position reference part that can configure a first position reference surface separated from the center of the outer diameter of each optical fiber by a distance determined by a first rule; and a second position reference part that can configure a second position reference surface that is perpendicular to the first position reference part and separated from the center of the outer diameter of each optical fiber by a distance determined by a second rule.

Description

光纖零件、光電路零件及光電路零件之製造方法Optical fiber component, optical circuit component, and manufacturing method of optical circuit component

本發明係關於一種將光纖連接於光電路所具備之波導之光纖零件、具備光纖零件之光電路零件、及光電路零件之製造方法。The present invention relates to an optical fiber component in which an optical fiber is connected to a waveguide provided in an optical circuit, an optical circuit component including the optical fiber component, and a method of manufacturing the optical circuit component.

業界曾提出在將複數條光纖連接於光電路時用於進行光纖之定位之技術(例如,參照專利文獻1)。專利文獻1之光電路採用將半導體層與絕緣層交替地形成至少2層之構造,藉由使用該等層精密地形成與光零件及光纖之形狀一致之凹部,而將光纖之位置對準。 為了以與光纖之形狀一致之方式形成凹部,而形成光電路之基板材料限定於能夠形成高精度之對準槽(例如V槽)之材料。因而,專利文獻1有基板材料限定光電路之問題。再者,專利文獻1有為了形成對準槽而須要複雜之蝕刻步驟之問題。 又,當就每條光纖進行光軸對準時須要進行調心之高精度之調心裝置,且調心亦耗費大量時間。因而,專利文獻1有為了就每條光纖進行光軸對準而須要高精度之調心裝置,且調心亦耗費大量時間之問題。 [先前技術文獻] [專利文獻] 專利文獻1:日本特開2016-014766號公報A technique for positioning an optical fiber when a plurality of optical fibers are connected to an optical circuit has been proposed in the industry (for example, refer to Patent Document 1). The optical circuit of Patent Document 1 has a structure in which at least two layers are formed by alternately forming a semiconductor layer and an insulating layer, and the positions of the optical fibers are aligned by precisely forming concave portions conforming to the shapes of the optical components and the optical fibers using the layers. In order to form the concave portion in conformity with the shape of the optical fiber, the substrate material forming the optical circuit is limited to a material capable of forming an alignment groove (for example, a V-groove) with high precision. Therefore, Patent Document 1 has a problem that the substrate material defines the optical circuit. Further, Patent Document 1 has a problem that a complicated etching step is required in order to form an alignment groove. Moreover, when the optical axis alignment is performed for each optical fiber, a high-precision alignment device for centering is required, and the alignment is also time consuming. Therefore, Patent Document 1 has a problem of requiring a high-precision centering device for optical axis alignment of each optical fiber, and it takes a lot of time to adjust the centering. [Prior Art Document] [Patent Document] Patent Document 1: JP-A-2016-014766

[發明所欲解決之問題] 本發明之目的在於提供一種在光電路之製造步驟中不追求高精度之形成技術,且並不須要就每條光纖進行光軸對準的光纖零件。 [解決問題之技術手段] 為了達成上述目的,本發明之光纖零件係於設置於保持構件之1個以上之各貫通孔內保持光纖者,且 在將各光纖之端面配置於前述保持構件之端面之狀態下,於各貫通孔各固著1條光纖; 除前述保持構件之前述端面以外之前述保持構件之外周面具有:可構成具有根據預設之第1規則之與各光纖之外徑中心之距離之第1位置基準面的第1位置基準部,及可構成具有根據預設之第2規則之與各光纖之外徑中心之距離且垂直於前述第1位置基準面之第2位置基準面的第2位置基準部。 本發明之光纖零件,可行的是,複數條光纖於複數個貫通孔彼此平行地各固著1條,前述第1位置基準面係與前述複數之光纖之各外徑中心之距離相等之平面。 本發明之光纖零件,可行的是,前述保持構件之前述端面相對於垂直於各光纖之長度方向之剖面傾斜。又,本發明之光纖零件,可行的是,前述保持構件具有配置於前述第1位置基準面之外周面作為前述第1位置基準部。又,本發明之光纖零件可在前述第1位置基準面設置有用於收容接著劑之接著劑收容部。 本發明之光纖零件,可行的是,前述保持構件具有T字形狀,該T字形狀具有朝相對之第1方向及第2方向突出之第1凸部及第2凸部、以及朝垂直於前述第1方向及第2方向之第3方向突出之第3凸部,且前述第3凸部收容於前述凹部,前述第1凸部及前述第2凸部作為前述第1位置基準部發揮功能,連接前述第1凸部及前述第2凸部之面作為前述第1位置基準面發揮功能。 本發明之光纖零件,可行的是,前述保持構件具有配置於前述第2位置基準面之外周面作為前述第2位置基準部。又,本發明之光纖零件,可行的是,前述保持構件之前述端面具有T字形狀,該T字形狀具有朝相對之第1方向及第2方向突出之第1凸部及第2凸部、以及朝垂直於前述第1方向及第2方向之第3方向突出之第3凸部,且在前述第1凸部或前述第2凸部中之配置於前述第3凸部側之面設置凹部,構成該凹部之面之至少一者係可構成前述第1位置基準面之前述第1位置基準部或可構成前述第2位置基準面之前述第2位置基準部。 本發明之光電路零件係將本發明之光纖零件搭載於具有波導之光電路者,且 前述光電路具有在內壁面配置有波導之端面之凹部; 前述光纖零件所具備之前述第1位置基準面及前述第2位置基準面係與前述光電路之外周面抵接而配置; 將前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面固定。 本發明之光電路零件,可行的是,前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面係使用折射率匹配劑而接著。又,本發明之光電路零件可在前述凹部之內壁面中之未配置有前述波導之端面之部分,設置有用於收容接著劑之接著劑收容部。 本發明之光電路零件之製造方法係將本發明之光纖零件搭載於具有波導之光電路者,且 前述光電路具有在內壁面配置有波導之端面之凹部; 以前述光纖零件所具備之前述第1位置基準面及前述第2位置基準面與前述光電路之外周面抵接之方式,將前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面固定。 此外,上述各揭示可儘可能地進行組合。 [發明之效果] 根據本發明能夠提供一種在光電路之製造步驟中不追求高精度之形成技術,且並不須要就每條光纖進行光軸對準的光纖零件。[Problem to be Solved by the Invention] An object of the present invention is to provide a fiber optic component that does not require high-precision formation techniques in the manufacturing steps of an optical circuit, and does not require optical axis alignment for each optical fiber. [Means for Solving the Problems] In order to achieve the above object, the optical fiber component of the present invention holds the optical fibers in one or more through holes provided in the holding member, and arranges the end faces of the respective optical fibers on the end faces of the holding members. In this state, one optical fiber is fixed to each of the through holes; the outer peripheral surface of the holding member other than the end surface of the holding member has: an outer diameter center of each of the optical fibers according to the preset first rule The first position reference portion of the first position reference surface of the distance and the second position reference having a distance from the center of the outer diameter of each of the optical fibers according to the predetermined second rule and perpendicular to the first position reference surface The second position reference portion of the surface. In the optical fiber component of the present invention, it is possible that a plurality of optical fibers are fixed to each other in parallel with a plurality of through holes, and the first position reference surface is a plane having a distance equal to a distance between respective outer diameter centers of the plurality of optical fibers. In the optical fiber component of the present invention, it is possible that the end face of the holding member is inclined with respect to a cross section perpendicular to the longitudinal direction of each of the optical fibers. Further, in the optical fiber component of the present invention, it is preferable that the holding member has a peripheral surface that is disposed on the outer surface of the first position reference surface as the first position reference portion. Further, in the optical fiber component of the present invention, an adhesive accommodating portion for accommodating an adhesive may be provided on the first position reference surface. In the optical fiber component of the present invention, it is preferable that the holding member has a T shape having first and second convex portions that protrude in the first direction and the second direction, and perpendicular to the foregoing a third convex portion that protrudes in the third direction of the first direction and the second direction, and the third convex portion is housed in the concave portion, and the first convex portion and the second convex portion function as the first position reference portion. The surface connecting the first convex portion and the second convex portion functions as the first position reference surface. In the optical fiber component of the present invention, it is preferable that the holding member has a peripheral surface that is disposed on the outer surface of the second position reference surface as the second position reference portion. Further, in the optical fiber component of the present invention, it is preferable that the end surface of the holding member has a T-shape, and the T-shape has a first convex portion and a second convex portion that protrude in the first direction and the second direction, And a third convex portion that protrudes in a third direction perpendicular to the first direction and the second direction, and a concave portion is provided on a surface of the first convex portion or the second convex portion that is disposed on the third convex portion side At least one of the surfaces constituting the concave portion may constitute the first position reference portion of the first position reference surface or the second position reference portion that can constitute the second position reference surface. In the optical circuit component of the present invention, the optical component of the present invention is mounted on an optical circuit having a waveguide, and the optical circuit has a concave portion in which an end surface of the waveguide is disposed on an inner wall surface; and the first position reference surface provided in the optical fiber component And the second position reference surface is disposed in contact with the outer circumferential surface of the optical circuit; and an inner wall surface of the end surface of the optical circuit in which the waveguide is disposed is fixed to the end surface of the holding member. In the optical circuit component of the present invention, it is possible that the inner wall surface of the end surface of the optical path in which the waveguide is disposed and the end surface of the holding member are followed by an index matching agent. Further, in the optical circuit component of the present invention, an adhesive accommodating portion for accommodating the adhesive agent may be provided in a portion of the inner wall surface of the concave portion where the end surface of the waveguide is not disposed. In the method of manufacturing an optical circuit component according to the present invention, the optical component of the present invention is mounted on an optical circuit having a waveguide, and the optical circuit has a concave portion in which an end surface of the waveguide is disposed on an inner wall surface; The inner wall surface of the end surface of the optical circuit in which the end face of the optical waveguide is disposed is fixed to the end surface of the holding member so that the first position reference surface and the second position reference surface abut against the outer peripheral surface of the optical circuit. Furthermore, the above disclosures can be combined as much as possible. [Effects of the Invention] According to the present invention, it is possible to provide a fiber optic component that does not require high-precision formation techniques in the manufacturing steps of an optical circuit, and does not require optical axis alignment for each optical fiber.

以下針對本發明之實施形態,一面參照圖式一面詳細地說明。此外,本發明並不限定於以下所示之實施形態。該等實施例僅為示例,本發明得以基於本領域技術人員之知識而施加各種變更、及改良之形態予以實施。此外,在本說明書及圖式中,符號相同之構成要素表示彼此相同之要素。 (基本構成) 圖1及圖2中顯示本實施形態之光電路零件之一例。光電路零件係於光電路30搭載有本發明之光纖零件。光電路30係例如具備波導32之平面光波電路(Planar Lightwave Circuit:PLC)。本發明之光纖零件在作為保持構件發揮功能之毛細管20中至少保持1條光纖50。亦可在毛細管20之貫通孔21中收容光纖50之被覆部(未圖示)。圖1及圖2中顯示光纖50為1條之情形,但光纖50亦可為複數條。該情形時,各光纖50較佳為平行地配置。 光纖50之端面50A配置於毛細管20之端面20A。光電路30具有作為凹部發揮功能之臺階31。在臺階31之內壁面即側面31A配置有波導32之端面32A。在光電路30形成有藉由壓抵毛細管20而確定毛細管20在光電路30上之位置之位置基準部。毛細管20以確定毛細管20在光電路30上之位置之方式搭載於臺階31。藉此,光纖50之端面50A連接於波導32之端面32A。 毛細管20之至少一部分接著於光電路30。接著較佳使用光固化接著。因而,毛細管20較佳由透明之玻璃構成。作為透明之玻璃,較佳為例如硼矽酸玻璃或石英玻璃。又,接著較佳的是側面31A與毛細管20之端面20A係使用折射率匹配劑而接著。 毛細管20之製作方法為任意。例如,將光纖50插入毛細管20之各貫通孔21,在貫通孔21之內壁面與光纖50之間隙填充接著劑並使接著劑固化,之後研磨或蝕刻底面20E及側面20C。蝕刻方法為任意,例如可使用反應性離子蝕刻(Reactive Ion Etching;RIE)。 臺階31之形成方法為任意。例如,如圖3所示,在較藉由芯層由包覆層33包圍而形成之波導32更靠基板34側積層蝕刻阻擋層35,並使用乾式蝕刻去除波導32及包覆層33。藉此,能夠形成平行於基板34之底面31E,且能夠形成彼此呈直角相交之側面31C及底面31E。此時,臺階31之底面31E由與形成包覆層33之材料不同之材料構成。 本發明藉由將毛細管20壓抵於臺階31,而能夠將光纖50之端面50A與波導32之端面32A之位置對準。因而,本發明能夠提供一種在光電路之製造步驟中不要求高精度之形成技術且並不須要就每條光纖進行光軸對準的光纖零件。尤其是,能夠將玻璃毛細管用作本發明之毛細管20,在成本、及可靠性上優異。又,藉由將光電路30之位置基準部與毛細管20之位置基準部壓抵(抵接或經由接著層抵接),而能夠簡單地將光電路之芯與光纖之位置對準。 (第1實施形態) 在本實施形態中,毛細管20係大致長方體,將毛細管20之外平面及臺階31之內壁面用作位置基準部。毛細管20與光電路之臺階31之至少2個內壁面抵接或經由接著層抵接而定位。 圖4及圖5係顯示毛細管之第1形態例之三視圖。圖4顯示光纖為1條之情形,圖5顯示光纖為複數條之情形。毛細管20為大致長方體,具備:作為第1位置基準面L1 而發揮功能之外周面即平坦之底面20E、及作為第2位置基準面L2 而發揮功能之外周面即平坦之側面20C。毛細管20至少具有1個貫通孔21。就各貫通孔21各固著有1條光纖50。在貫通孔21之一端21A配置有光纖50之端面50A。各光纖50之長度方向與側面20C平行。 在圖6中顯示光纖為複數條之情形下之毛細管20之端面20A之放大圖。底面20E與光纖50之外徑中心50G-1~50G-4之距離H50-1 、H50-2 、H50-3 、H50-4 係根據第1規則者。例如,距離H50-1 、H50-2 、H50-3 、H50-4 為預設之一定值。側面20C與光纖50-1、50-2、50-3、50-4之外徑中心50G-1~50G-4之距離W50-1 、W50-2 、W50-3 、W50-4 係根據預設之第2規則者。例如,光纖間隔df為預設之一定值。 在圖7及圖8中顯示光電路之俯視圖及側視圖之一例。圖7顯示波導為1條之情形,圖8顯示波導為複數條之情形。臺階31之側面31A至少配置有1個波導32之端面32A。波導32之長度方向與側面31C平行。 臺階31具有相鄰之面呈直角相交之形狀,具備作為光電路之外周面之一部分之平坦之底面31E、側面31C及31D。底面31E作為光電路30之第1位置基準面L1 而發揮功能。側面31C作為光電路30之第2位置基準面L2 而發揮功能。 在圖9中顯示波導為複數條之情形下之側面31A之放大圖。L1 表示當將底面20E壓抵於底面31E時的毛細管20之第1位置基準面之位置。L2 表示將側面20C壓抵於側面31C時的毛細管20之第2位置基準面之位置。第1位置基準面L1 與波導之外徑中心32G-1、32G-2、32G-3、32G-4之距離H32-1 、H32-2 、H32-3 、H32-4 係根據第1規則者。例如,距離H32-1 、H32-2 、H32-3 、H32-4 與距離H50-1 、H50-2 、H50-3 、H50-4 相等。第2位置基準面L2 與波導之外徑中心32G-1、32G-2、32G-3、32G-4之距離W32-1 、W32-2 、W32-3 、W32-4 係根據距離W50-1 、W50-2 、W50-3 、W50-4 之第2規則者。例如,距離W32-1 與距離W50-1 相等,波導間隔dc為與光纖間隔df相等之一定值。 在圖10中顯示光纖零件朝光電路之第1搭載例。本發明之光電路零件之製造方法以毛細管20之第1位置基準面L1 與光電路30之第1位置基準面L1 抵接,毛細管20之第2位置基準面L2 與光電路30之第2位置基準面L2 抵接之方式將臺階31之側面31A與毛細管20之端面20A固定。具體而言,以底面20E與底面31E抵接,側面20C與側面31C抵接之方式,將毛細管20壓抵於臺階31。而且,以接著劑將臺階31之側面31A與毛細管20之端面20A固定。藉此,藉由毛細管20與光電路30之臺階31之3個內壁面抵接或經由接著層抵接而定位,而能夠使光纖50之外徑中心50G與波導32之外徑中心32G一致。當經由接著層抵接時,加入接著層之厚度之位置成為位置基準面。例如,圖6之距離H50-1 、H50-2 、H50-3 、H50-4 係包含接著層之厚度之距離。 此處,毛細管20之側面20D與臺階31之側面31D之間較佳的是設置有空隙31S。藉此,由於容易施加朝方向DS 之按壓力,故能夠容易地進行側面20C朝側面31C之抵接。 又,如圖11所示,毛細管20之端面20A較佳的是相對於垂直於光纖50之長度方向之剖面傾斜角度α。此時,臺階31之側面31A相對於垂直於波導32之長度方向之剖面傾斜角度α。藉此,由於若對朝側面31A之方向DL 施加按壓力,則毛細管20朝側面31C被按壓,故能夠容易地進行側面20C朝側面31C之抵接。 如以上所說明般,本實施形態將位置基準部設為長方體等之單純之構成之平面。因而,能夠利用例如RIE等之蝕刻方法簡單且高精度地製作光電路30之臺階31。 此外,如圖12所示,可在作為第1位置基準面L1 而發揮功能之毛細管20之底面20E設置有成為接著劑積存處之槽部20H。又,如圖13所示,可在作為第1位置基準面L1 而發揮功能之臺階31之底面31E設置有成為接著劑積存處之槽部31H。 (第2實施形態) 在圖14中顯示光纖零件朝光電路之第2搭載例。在本實施形態中,毛細管20之端面20A採用具有凸部22、23、24之T字形狀,光電路30之上表面30F作為第1位置基準部而發揮功能,光電路30之側面31C作為第2位置基準部而發揮功能。 凸部22及凸部23配置於方向DS 之相對之方向。凸部24朝垂直於方向DS 之方向突出。在凸部24保持有光纖50。在臺階31收容有凸部24。 在本實施形態中,凸部22及凸部23作為第1位置基準部而發揮功能。具體而言,凸部23之側面23C與光電路30之上表面30F抵接。凸部22之側面22C與光電路30之上表面30F抵接。藉此,連接凸部22之側面22C及凸部23之側面23C之面作為第1位置基準面L1 而發揮功能。如在第1實施形態中所說明般,第1位置基準面L1 與光纖50之外徑中心50G-1~50G-4之距離為一定。 針對第2位置基準面L2 係與第1實施形態相同。亦即,毛細管20之側面20C作為第2位置基準面L2 而發揮功能。光電路30之側面31C係光電路30之第2位置基準面L2 。 本實施形態之光電路零件之製造方法係以凸部22之側面22C與光電路30之上表面30F抵接,凸部23之側面23C與光電路30之上表面30F抵接,側面20C與側面31C抵接之方式將毛細管20壓抵於臺階31。而且,以接著劑將臺階31之側面31A與毛細管20之端面20A固定。藉此,能夠使光纖50之外徑中心50G與波導32之外徑中心32G一致。 (第3實施形態) 圖15中顯示光纖零件對光電路之第3搭載例。本實施形態中,在第2實施形態中,在光電路30之上表面30F設置有凸部36及37,在凸部22及23設置有與凸部36及37大致互補形狀之凹部26及27。 在本實施形態中,凹部26及27作為毛細管20之第1位置基準部發揮功能,凸部36及37作為光電路30之第1位置基準部發揮功能。具體而言,凹部26與光電路30之凸部36抵接。凹部27與凸部37抵接。藉此,連接凹部26及凹部27之面作為毛細管20之第1位置基準面L1 而發揮功能。連接凸部36及凸部37之面作為光電路30之第1位置基準面L1 而發揮功能。 在本實施形態中,凹部27及凸部37作為第2位置基準面L2 而發揮功能。如在第1實施形態中所說明般,光纖50-1、50-2、50-3、及50-4之外徑中心50G-1~50G-4與第2位置基準面L2 之距離係根據預設之第2規則者。 本實施形態之光電路零件之製造方法係以毛細管20之凹部26與光電路30之凸部36抵接,毛細管20之凹部27與光電路30之凸部37抵接之方式將毛細管20壓抵。而且,以接著劑4將臺階31之側面31A與毛細管20之端面20A固定。藉此,能夠使光纖50之外徑中心50G與波導32之外徑中心32G一致。 在前述之實施形態中顯示了光纖50及波導32排列為1行之例,但本發明並不限定於此。例如,光纖50及波導32可排列為2行以上。 [產業上之可利用性] 本發明可應用於資訊通訊產業。Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Further, the present invention is not limited to the embodiments described below. The embodiments are merely examples, and the present invention can be implemented in various modifications and improvements based on the knowledge of those skilled in the art. In the specification and the drawings, constituent elements having the same reference numerals indicate the same elements. (Basic configuration) An example of the optical circuit component of the present embodiment is shown in Figs. 1 and 2 . The optical circuit component is mounted on the optical circuit 30 with the optical fiber component of the present invention. The optical circuit 30 is, for example, a Planar Lightwave Circuit (PLC) including a waveguide 32. The optical fiber component of the present invention holds at least one optical fiber 50 in the capillary 20 functioning as a holding member. A covering portion (not shown) of the optical fiber 50 may be housed in the through hole 21 of the capillary 20. 1 and 2 show the case where the optical fiber 50 is one, but the optical fiber 50 may also be a plurality of wires. In this case, each of the optical fibers 50 is preferably arranged in parallel. The end face 50A of the optical fiber 50 is disposed on the end face 20A of the capillary 20. The optical circuit 30 has a step 31 that functions as a recess. An end surface 32A of the waveguide 32 is disposed on the side surface 31A which is the inner wall surface of the step 31. A position reference portion for determining the position of the capillary 20 on the optical circuit 30 by pressing against the capillary 20 is formed in the optical circuit 30. The capillary 20 is mounted on the step 31 in such a manner as to determine the position of the capillary 20 on the optical circuit 30. Thereby, the end face 50A of the optical fiber 50 is connected to the end face 32A of the waveguide 32. At least a portion of the capillary 20 follows the optical circuit 30. It is then preferred to use photocuring followed by. Thus, the capillary 20 is preferably constructed of a transparent glass. As the transparent glass, for example, borosilicate glass or quartz glass is preferable. Further, it is preferable that the side surface 31A and the end surface 20A of the capillary 20 are followed by a refractive index matching agent. The method of manufacturing the capillary 20 is arbitrary. For example, the optical fiber 50 is inserted into each of the through holes 21 of the capillary 20, and a gap between the inner wall surface of the through hole 21 and the optical fiber 50 is filled with an adhesive to cure the adhesive, and then the bottom surface 20E and the side surface 20C are polished or etched. The etching method is arbitrary, and for example, reactive ion etching (RIE) can be used. The method of forming the step 31 is arbitrary. For example, as shown in FIG. 3, the etching stopper layer 35 is laminated on the substrate 34 side of the waveguide 32 formed by the cladding layer 33 surrounded by the core layer, and the waveguide 32 and the cladding layer 33 are removed by dry etching. Thereby, it is possible to form the side surface 31E parallel to the substrate 34, and it is possible to form the side surface 31C and the bottom surface 31E which intersect each other at right angles. At this time, the bottom surface 31E of the step 31 is made of a material different from the material forming the cladding layer 33. In the present invention, the end face 50A of the optical fiber 50 and the end face 32A of the waveguide 32 can be aligned by pressing the capillary 20 against the step 31. Accordingly, the present invention can provide an optical fiber component which does not require high-precision formation techniques in the manufacturing steps of the optical circuit and which does not require optical axis alignment for each optical fiber. In particular, a glass capillary tube can be used as the capillary tube 20 of the present invention, which is excellent in cost and reliability. Further, by pressing the position reference portion of the optical circuit 30 and the position reference portion of the capillary 20 against (contact or contact via the adhesive layer), the position of the optical circuit core and the optical fiber can be easily aligned. (First Embodiment) In the present embodiment, the capillary 20 is a substantially rectangular parallelepiped, and the outer surface of the capillary 20 and the inner wall surface of the step 31 are used as position reference portions. The capillary 20 is in contact with at least two inner wall surfaces of the step 31 of the optical circuit or is abutted via the adhesive layer. 4 and 5 are three views showing a first embodiment of a capillary tube. Figure 4 shows the case where the fiber is one, and Figure 5 shows the case where the fiber is a plurality of bars. The capillary tube 20 is substantially rectangular parallelepiped, comprising: a first reference surface position L to the functional play a circumferential surface of the flat bottom surface 20E i.e., reference plane and a second position L 2 play to the functions of the peripheral surface of the flat side surface i.e. 20C. The capillary 20 has at least one through hole 21 . One optical fiber 50 is fixed to each of the through holes 21 . An end surface 50A of the optical fiber 50 is disposed at one end 21A of the through hole 21. The longitudinal direction of each of the optical fibers 50 is parallel to the side surface 20C. An enlarged view of the end face 20A of the capillary tube 20 in the case where the optical fiber is a plurality of strips is shown in FIG. The distances H 50-1 , H 50-2 , H 50-3 , and H 50-4 of the bottom surface 20E and the outer diameter center 50G-1 to 50G-4 of the optical fiber 50 are based on the first rule. For example, the distances H 50-1 , H 50-2 , H 50-3 , and H 50-4 are preset values. The distance W 50-1 , W 50-2 , W 50-3 , W 50- between the side surface 20C and the outer diameter centers 50G-1 to 50G-4 of the optical fibers 50-1 , 50-2 , 50-3 , 50-4 4 is based on the preset second rule. For example, the fiber spacing df is a predetermined value. An example of a plan view and a side view of the optical circuit is shown in FIGS. 7 and 8. Fig. 7 shows the case where the waveguide is one, and Fig. 8 shows the case where the waveguide is a plurality of strips. At least one end face 32A of one waveguide 32 is disposed on the side surface 31A of the step 31. The length direction of the waveguide 32 is parallel to the side surface 31C. The step 31 has a shape in which adjacent surfaces intersect at right angles, and has a flat bottom surface 31E and side surfaces 31C and 31D which are a part of the outer peripheral surface of the optical circuit. The bottom surface 31E functions as the first position reference surface L 1 of the optical circuit 30. The side surface 31C functions as the second position reference surface L 2 of the optical circuit 30. An enlarged view of the side surface 31A in the case where the waveguide is a plurality of strips is shown in FIG. L 1 indicates the position of the first position reference surface of the capillary 20 when the bottom surface 20E is pressed against the bottom surface 31E. L 2 indicates the position of the second position reference surface of the capillary 20 when the side surface 20C is pressed against the side surface 31C. The distance H 32-1 , H 32-2 , H 32-3 , H 32-4 of the first position reference plane L 1 and the outer diameter centers 32G- 1 , 32G-2, 32G-3, 32G-4 of the waveguide According to the first rule. For example, the distances H 32-1 , H 32-2 , H 32-3 , H 32-4 are equal to the distances H 50-1 , H 50-2 , H 50-3 , and H 50-4 . The distance W 32-1 , W 32-2 , W 32-3 , W 32-4 of the second position reference plane L 2 and the outer diameter centers 32G-1, 32G- 2 , 32G- 3, and 32G-4 of the waveguide According to the second rule of distances W 50-1 , W 50-2 , W 50-3 , W 50-4 . For example, the distance W 32-1 is equal to the distance W 50-1 , and the waveguide interval dc is a certain value equal to the fiber spacing df. Fig. 10 shows an example of the first mounting of the optical fiber component toward the optical circuit. The method for producing an optical part of the circuit of the present invention to position the capillary tube 20 of the first reference plane and the position L 1 of the first light receiving circuit 30 of the reference surface abuts L 1, capillary 20 of the second plane position L 2 of the optical circuit 30 The side surface 31A of the step 31 is fixed to the end surface 20A of the capillary 20 so that the second position reference surface L 2 abuts. Specifically, the capillary 20 is pressed against the step 31 such that the bottom surface 20E abuts against the bottom surface 31E and the side surface 20C abuts against the side surface 31C. Further, the side surface 31A of the step 31 and the end surface 20A of the capillary 20 are fixed by an adhesive. Thereby, the capillary 20 can be positioned by abutting against the three inner wall surfaces of the step 31 of the optical circuit 30 or by the contact of the adhesive layer, whereby the outer diameter center 50G of the optical fiber 50 can be aligned with the outer diameter center 32G of the waveguide 32. When abutting through the adhesive layer, the position at which the thickness of the adhesive layer is added becomes the position reference surface. For example, the distances H 50-1 , H 50-2 , H 50-3 , and H 50-4 of FIG. 6 include the distance of the thickness of the subsequent layer. Here, it is preferable that a gap 31S is provided between the side surface 20D of the capillary 20 and the side surface 31D of the step 31. Thereby, since the pressing force in the direction D S is easily applied, the contact of the side surface 20C toward the side surface 31C can be easily performed. Further, as shown in FIG. 11, the end face 20A of the capillary 20 is preferably inclined at an angle α with respect to a cross section perpendicular to the longitudinal direction of the optical fiber 50. At this time, the side surface 31A of the step 31 is inclined by an angle α with respect to the cross section perpendicular to the longitudinal direction of the waveguide 32. As a result, when the pressing force is applied to the direction D L toward the side surface 31A, the capillary 20 is pressed toward the side surface 31C, so that the side surface 20C can be easily brought into contact with the side surface 31C. As described above, in the present embodiment, the position reference portion is a plane of a simple configuration such as a rectangular parallelepiped. Therefore, the step 31 of the optical circuit 30 can be easily and accurately fabricated by an etching method such as RIE. Further, as shown in FIG 12, the bottom surface can play a function of the capillary tube 20 is provided with a groove portion 20E at the adhesive reservoir 20H in the first position as a reference plane L. And, 13, may be used as the first reference surface position L exert a bottom surface 31E of the functions at the step 31 is provided with a groove portion 31H of the adhesive reservoir. (Second Embodiment) Fig. 14 shows an example of the second mounting of the optical fiber component toward the optical circuit. In the present embodiment, the end surface 20A of the capillary 20 has a T-shape having the convex portions 22, 23, and 24, and the upper surface 30F of the optical circuit 30 functions as the first position reference portion, and the side surface 31C of the optical circuit 30 serves as the first surface. The 2 position reference unit functions. The convex portion 22 and the convex portion 23 are disposed in the opposing direction of the direction D S . The convex portion 24 protrudes in a direction perpendicular to the direction D S . The optical fiber 50 is held at the convex portion 24. A convex portion 24 is accommodated in the step 31. In the present embodiment, the convex portion 22 and the convex portion 23 function as the first position reference portion. Specifically, the side surface 23C of the convex portion 23 abuts on the upper surface 30F of the optical circuit 30. The side surface 22C of the convex portion 22 abuts on the upper surface 30F of the optical circuit 30. Whereby, connected to the side surface 22C of the convex portion 22 and the side surface 23 of the convex portion 23C of the surface as a reference surface position L 1 of the first functions. As in the first embodiment as illustrated, the position of the first reference plane and the distance L 1 the center 50 of the outer diameter of the optical fiber 50G-1 ~ 50G-4 of the constant. The second position reference plane L 2 is the same as that of the first embodiment. That is, the side surface 20C of the capillary 20 functions as the second position reference surface L 2 . The side surface 31C of the optical circuit 30 is the second position reference surface L 2 of the optical circuit 30. In the method of manufacturing the optical circuit component of the present embodiment, the side surface 22C of the convex portion 22 is in contact with the upper surface 30F of the optical circuit 30, and the side surface 23C of the convex portion 23 abuts against the upper surface 30F of the optical circuit 30, and the side surface 20C and the side surface 20C The 31C abuts the capillary 20 against the step 31. Further, the side surface 31A of the step 31 and the end surface 20A of the capillary 20 are fixed by an adhesive. Thereby, the outer diameter center 50G of the optical fiber 50 can be made to coincide with the outer diameter center 32G of the waveguide 32. (Third Embodiment) Fig. 15 shows a third example of mounting an optical component to an optical circuit. In the second embodiment, the convex portions 36 and 37 are provided on the upper surface 30F of the optical circuit 30, and the concave portions 26 and 27 having substantially complementary shapes to the convex portions 36 and 37 are provided in the convex portions 22 and 23. . In the present embodiment, the concave portions 26 and 27 function as the first position reference portion of the capillary 20, and the convex portions 36 and 37 function as the first position reference portion of the optical circuit 30. Specifically, the concave portion 26 is in contact with the convex portion 36 of the optical circuit 30. The concave portion 27 is in contact with the convex portion 37. Accordingly, the surface of the connection recess 26 and the concave portion 27 of the first capillary tube 20 as the position of the reference plane L 1 functions. The surface connecting the convex portion 36 and the convex portion 37 functions as the first position reference surface L 1 of the optical circuit 30. In the present embodiment, the concave portion 27 and the convex portion 37 function as the second position reference surface L 2 . As described in the first embodiment, the distance between the outer diameter centers 50G-1 to 50G-4 of the optical fibers 50-1, 50-2, 50-3, and 50-4 and the second position reference plane L 2 is According to the preset second rule. In the method of manufacturing the optical circuit component of the present embodiment, the concave portion 26 of the capillary 20 abuts against the convex portion 36 of the optical circuit 30, and the concave portion 27 of the capillary 20 abuts against the convex portion 37 of the optical circuit 30 to press the capillary 20 against it. . Further, the side surface 31A of the step 31 and the end surface 20A of the capillary 20 are fixed by the adhesive 4. Thereby, the outer diameter center 50G of the optical fiber 50 can be made to coincide with the outer diameter center 32G of the waveguide 32. In the above embodiment, an example in which the optical fiber 50 and the waveguide 32 are arranged in one line is shown, but the present invention is not limited thereto. For example, the optical fiber 50 and the waveguide 32 may be arranged in two or more rows. [Industrial Applicability] The present invention can be applied to the information communication industry.

4‧‧‧接著劑4‧‧‧Binder

20‧‧‧毛細管20‧‧‧ Capillary

20A‧‧‧毛細管之端面20A‧‧‧ end face of capillary

20C‧‧‧毛細管之側面20C‧‧‧ side of the capillary

20D‧‧‧毛細管之側面20D‧‧‧ side of capillary

20E‧‧‧毛細管之底面20E‧‧‧Bottom of the capillary

20H‧‧‧槽部20H‧‧‧Slots

21‧‧‧貫通孔21‧‧‧through holes

21A‧‧‧一端21A‧‧‧End

22‧‧‧凸部22‧‧‧ convex

22C‧‧‧側面22C‧‧‧ side

23‧‧‧凸部23‧‧‧ convex

23C‧‧‧凸部之側面23C‧‧‧Side of the convex part

24‧‧‧凸部24‧‧‧ convex

26‧‧‧凹部26‧‧‧ recess

27‧‧‧凹部27‧‧‧ recess

30‧‧‧光電路30‧‧‧Optical circuit

30F‧‧‧光電路之上表面30F‧‧‧Top surface of optical circuit

31‧‧‧臺階31‧‧‧ steps

31A‧‧‧臺階之側面31A‧‧‧Side side of the stairs

31C‧‧‧臺階之側面31C‧‧‧Side side of the stairs

31D‧‧‧臺階之側面31D‧‧‧Side side

31E‧‧‧臺階之底面31E‧‧‧ underside of the steps

31H‧‧‧槽部31H‧‧‧Slots

31S‧‧‧空隙31S‧‧‧ gap

32‧‧‧波導32‧‧‧Band

32A‧‧‧波導之端面32A‧‧‧End of the waveguide

32G‧‧‧外徑中心32G‧‧‧ OD Center

32G-1‧‧‧外徑中心32G-1‧‧‧ OD Center

32G-2‧‧‧外徑中心32G-2‧‧‧ OD Center

32G-3‧‧‧外徑中心32G-3‧‧‧ OD Center

32G-4‧‧‧外徑中心32G-4‧‧‧ OD Center

33‧‧‧包覆層33‧‧‧Cladding

34‧‧‧基板34‧‧‧Substrate

35‧‧‧蝕刻阻擋層35‧‧‧ etching barrier

36‧‧‧凸部36‧‧‧ convex

37‧‧‧凸部37‧‧‧ convex

50‧‧‧光纖50‧‧‧ fiber

50A‧‧‧光纖之端面50A‧‧‧End face of fiber

50-1‧‧‧光纖50-1‧‧‧Fiber

50-2‧‧‧光纖50-2‧‧‧ fiber

50-3‧‧‧光纖50-3‧‧‧Fiber

50-4‧‧‧光纖50-4‧‧‧Fiber

50G‧‧‧外徑中心50G‧‧‧ OD Center

50G-1‧‧‧外徑中心50G-1‧‧‧ OD Center

50G-2‧‧‧外徑中心50G-2‧‧‧ OD Center

50G-3‧‧‧外徑中心50G-3‧‧‧ OD Center

50G-4‧‧‧外徑中心50G-4‧‧‧ OD Center

DL‧‧‧方向D L ‧‧‧ directions

DS‧‧‧方向D S ‧‧‧ Direction

dc‧‧‧波導間隔Dc‧‧‧Wave interval

df‧‧‧光纖間隔Df‧‧‧fiber spacing

H32-1‧‧‧距離H 32-1 ‧‧‧Distance

H32-2‧‧‧距離H 32-2 ‧‧‧Distance

H32-3‧‧‧距離H 32-3 ‧‧‧Distance

H32-4‧‧‧距離H 32-4 ‧‧‧Distance

H50-1‧‧‧距離H 50-1 ‧‧‧Distance

H50-2‧‧‧距離H 50-2 ‧‧‧Distance

H50-3‧‧‧距離H 50-3 ‧‧‧Distance

H50-4‧‧‧距離H 50-4 ‧‧‧Distance

L1‧‧‧第1位置基準面L 1 ‧‧‧1st position datum

L2‧‧‧第2位置基準面L 2 ‧‧‧2nd position datum

W32-1‧‧‧距離W 32-1 ‧‧‧Distance

W32-2‧‧‧距離W 32-2 ‧‧‧Distance

W32-3‧‧‧距離W 32-3 ‧‧‧Distance

W32-4‧‧‧距離W 32-4 ‧‧‧Distance

W50-1‧‧‧距離W 50-1 ‧‧‧Distance

W50-2‧‧‧距離W 50-2 ‧‧‧Distance

W50-3‧‧‧距離W 50-3 ‧‧‧Distance

W50-4‧‧‧距離W 50-4 ‧‧‧Distance

α‧‧‧角度‧‧‧‧ angle

圖1顯示本實施形態之光電路零件之一例。 圖2顯示本實施形態之光電路零件之一例之分解圖。 圖3係顯示臺階之形成方法之一例之說明圖。 圖4係顯示保持1條光纖之毛細管之第1形態例之三視圖。 圖5係顯示保持複數條光纖之毛細管之第1形態例之三視圖。 圖6顯示毛細管之端面之放大圖之一例。 圖7係顯示保持1條波導之光電路之第1形態例之俯視圖及側視圖。 圖8係顯示保持複數條波導之光電路之第1形態例之俯視圖及側視圖。 圖9顯示臺階之側面之放大圖之一例。 圖10顯示光纖零件朝光電路之第1搭載例。 圖11顯示光纖零件朝光電路之第2搭載例。 圖12顯示設置於毛細管之槽部之一例。 圖13顯示設置於臺階之槽部之一例。 圖14顯示光纖零件朝光電路之第3搭載例。 圖15顯示光纖零件朝光電路之第4搭載例。Fig. 1 shows an example of an optical circuit component of the embodiment. Fig. 2 is an exploded view showing an example of the optical circuit component of the embodiment. Fig. 3 is an explanatory view showing an example of a method of forming a step. Fig. 4 is a three-dimensional view showing a first embodiment of a capillary tube holding one optical fiber. Fig. 5 is a three-dimensional view showing a first embodiment of a capillary tube holding a plurality of optical fibers. Fig. 6 shows an example of an enlarged view of the end face of the capillary. Fig. 7 is a plan view and a side view showing a first embodiment of an optical circuit that holds one waveguide. Fig. 8 is a plan view and a side view showing a first embodiment of an optical circuit for holding a plurality of waveguides. Fig. 9 shows an example of an enlarged view of the side of the step. Fig. 10 shows an example of the first mounting of the optical fiber component toward the optical circuit. Fig. 11 shows an example of the second mounting of the optical fiber component toward the optical circuit. Fig. 12 shows an example of a groove portion provided in a capillary. Fig. 13 shows an example of a groove portion provided in a step. Fig. 14 shows an example of the third mounting of the optical fiber component toward the optical circuit. Fig. 15 shows an example of the fourth mounting of the optical fiber component toward the optical circuit.

Claims (12)

一種光纖零件,其係於設置於保持構件之1個以上之各貫通孔內保持光纖者,且 在各光纖之端面配置於前述保持構件之端面之狀態下,於各貫通孔各固著1條光纖; 除前述保持構件之前述端面以外之前述保持構件之外周面具有:可構成具有根據預設之第1規則之與各光纖之外徑中心之距離之第1位置基準面的第1位置基準部,及可構成具有根據預設之第2規則之與各光纖之外徑中心之距離且垂直於前述第1位置基準面之第2位置基準面的第2位置基準部。An optical fiber component in which a fiber is held in one or more through holes provided in a holding member, and one end of each of the optical fibers is placed on an end surface of the holding member, and one through-hole is fixed in each of the through holes. The outer peripheral surface of the holding member other than the end surface of the holding member has a first position reference capable of forming a first position reference surface having a distance from an outer diameter center of each optical fiber according to a predetermined first rule. And a second position reference portion having a second position reference surface having a distance from a center of an outer diameter of each of the optical fibers according to a predetermined second rule and perpendicular to the first position reference surface. 如請求項1之光纖零件,其中複數條光纖於複數個貫通孔彼此平行地各固著1條; 前述第1位置基準面係與前述複數條光纖之各外徑中心之距離相等之平面。The optical fiber component of claim 1, wherein the plurality of optical fibers are fixed to each other in parallel with the plurality of through holes; and the first position reference surface is a plane equal to a distance between the outer diameter centers of the plurality of optical fibers. 如請求項1或2之光纖零件,其中前述保持構件之前述端面相對於垂直於各光纖之長度方向之剖面傾斜。The optical fiber component of claim 1 or 2, wherein said front end surface of said holding member is inclined with respect to a cross section perpendicular to a longitudinal direction of each of the optical fibers. 如請求項1至3中任一項之光纖零件,其中前述保持構件具有配置於前述第1位置基準面之外周面作為前述第1位置基準部。The optical fiber component according to any one of claims 1 to 3, wherein the holding member has a peripheral surface that is disposed on the outer surface of the first position reference surface as the first position reference portion. 如請求項4之光纖零件,其中在前述第1位置基準面設置有用於收容接著劑之接著劑收容部。The optical fiber component according to claim 4, wherein an adhesive accommodating portion for accommodating the adhesive is provided on the first position reference surface. 如請求項1至3中任一項之光纖零件,其中前述保持構件具有T字形狀,該T字形狀具有朝相對之第1方向及第2方向突出之第1凸部及第2凸部、以及朝垂直於前述第1方向及第2方向之第3方向突出之第3凸部;且 前述第3凸部收容於前述凹部; 前述第1凸部及前述第2凸部作為前述第1位置基準部發揮功能; 連接前述第1凸部及前述第2凸部之面作為前述第1位置基準面發揮功能。The optical fiber component according to any one of claims 1 to 3, wherein the holding member has a T-shape, and the T-shape has a first convex portion and a second convex portion that protrude in the first direction and the second direction, And a third convex portion that protrudes in a third direction perpendicular to the first direction and the second direction; wherein the third convex portion is accommodated in the concave portion; and the first convex portion and the second convex portion serve as the first position The reference portion functions; the surface that connects the first convex portion and the second convex portion functions as the first position reference surface. 如請求項1至6中任一項之光纖零件,其中前述保持構件具有配置於前述第2位置基準面之外周面作為前述第2位置基準部。The optical fiber component according to any one of claims 1 to 6, wherein the holding member has a peripheral surface that is disposed on the outer surface of the second position reference surface as the second position reference portion. 如請求項1至6中任一項之光纖零件,其中前述保持構件之前述端面具有T字形狀,該T字形狀具有朝相對之第1方向及第2方向突出之第1凸部及第2凸部、以及朝垂直於前述第1方向及第2方向之第3方向突出之第3凸部;且 在前述第1凸部或前述第2凸部中之配置於前述第3凸部側之面設置凹部,構成該凹部之面之至少一者係可構成前述第1位置基準面之前述第1位置基準部或可構成前述第2位置基準面之前述第2位置基準部。The optical fiber component according to any one of claims 1 to 6, wherein the end surface of the holding member has a T-shape, and the T-shape has a first convex portion and a second protruding portion that protrude in the first direction and the second direction. a convex portion and a third convex portion that protrudes in a third direction perpendicular to the first direction and the second direction; and the first convex portion or the second convex portion is disposed on the third convex portion side The concave portion is provided on the surface, and at least one of the surfaces constituting the concave portion may constitute the first position reference portion of the first position reference surface or the second position reference portion that can constitute the second position reference surface. 一種光電路零件,其係將如請求項1至8中任一項之光纖零件搭載於具有波導之光電路者,且 前述光電路具有在內壁面配置有波導之端面之凹部; 前述光纖零件所具備之前述第1位置基準面及前述第2位置基準面係與前述光電路之外周面抵接而配置; 將前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面固定。An optical circuit component in which the optical fiber component according to any one of claims 1 to 8 is mounted on an optical circuit having a waveguide, and the optical circuit has a concave portion in which an end surface of the waveguide is disposed on an inner wall surface; The first position reference surface and the second position reference surface are disposed in contact with the outer circumferential surface of the optical circuit, and the inner wall surface of the end surface of the optical circuit in which the waveguide is disposed and the holding member are disposed. The aforementioned end faces are fixed. 如請求項9之光電路零件,其中前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面係使用折射率匹配劑而接著。The optical circuit component according to claim 9, wherein the inner wall surface of the end surface of the optical path in which the waveguide is disposed and the end surface of the holding member are followed by an index matching agent. 如請求項9或10之光電路零件,其中在前述凹部之內壁面中之未配置有前述波導之端面之部分,設置有用於收容接著劑之接著劑收容部。The optical circuit component according to claim 9 or 10, wherein an adhesive accommodating portion for accommodating the adhesive is provided in a portion of the inner wall surface of the concave portion where the end surface of the waveguide is not disposed. 一種光電路零件之製造方法,其係將如請求項1至8中任一項之光纖零件搭載於具有波導之光電路者,且 前述光電路具有在內壁面配置有波導之端面之凹部; 以前述光纖零件所具備之前述第1位置基準面及前述第2位置基準面與前述光電路之外周面抵接之方式,將前述光電路之前述凹部中之配置有波導之端面之內壁面與前述保持構件之前述端面固定。A method of manufacturing an optical circuit component, wherein the optical fiber component according to any one of claims 1 to 8 is mounted on an optical circuit having a waveguide, wherein the optical circuit has a concave portion in which an end surface of the waveguide is disposed on an inner wall surface; The first position reference surface and the second position reference surface of the optical fiber component are in contact with the outer circumferential surface of the optical circuit, and the inner wall surface of the end surface of the optical circuit in which the waveguide is disposed is formed in the concave portion The aforementioned end faces of the holding members are fixed.
TW107111980A 2017-04-07 2018-04-03 Optical fiber component, optical circuit component and manufacturing for optical component TW201842368A (en)

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