TW201839517A - Photosensitive film laminate and cured product formed by using same - Google Patents

Photosensitive film laminate and cured product formed by using same Download PDF

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TW201839517A
TW201839517A TW107101514A TW107101514A TW201839517A TW 201839517 A TW201839517 A TW 201839517A TW 107101514 A TW107101514 A TW 107101514A TW 107101514 A TW107101514 A TW 107101514A TW 201839517 A TW201839517 A TW 201839517A
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photosensitive
resin
film
photosensitive film
compound
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TW107101514A
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TWI696041B (en
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舟越千弘
岡田和也
北村太郎
佐藤和也
荒井康昭
伊藤信人
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日商太陽油墨製造股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/28Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00Layered products comprising a layer of synthetic resin
    • B32B27/18Layered products comprising a layer of synthetic resin characterised by the use of special additives
    • B32B27/20Layered products comprising a layer of synthetic resin characterised by the use of special additives using fillers, pigments, thixotroping agents
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Laminated Bodies (AREA)

Abstract

Provided is a photosensitive film laminate capable of barely affecting a surface of a photosensitive film even when the photosensitive film laminate is inflicted by strong impact or pressure due to being overlapped with laminated substrates. To this end, the photosensitive film laminate sequentially includes a support film, an intermediate layer, and a photosensitive film formed of a photosensitive resin composition. The intermediate layer comprises at least one of melamine and a melamine compound.

Description

感光性薄膜層合體及使用其所形成之硬化物Photosensitive film laminate and cured product formed by using same

本發明係關於感光性薄膜層合體及使用其所形成之硬化物。The present invention relates to a photosensitive film laminate and a cured product formed by using the same.

一般而言,於使用於電子機器等之印刷配線板中,於印刷配線板構裝電子零件時,為了防止於不必要的部分附著焊料,係於形成有電路圖型之基板上的除連接孔以外的區域形成防焊劑層。Generally, in printed wiring boards used in electronic equipment and the like, when mounting electronic components on printed wiring boards, in order to prevent solder from being attached to unnecessary portions, they are attached to substrates with circuit patterns except connection holes. Area forms a solder resist layer.

伴隨近年來電子機器之輕薄短小化所致之印刷配線板之高精度、高密度化,目前,防焊劑層,係以於基板塗佈感光性樹脂組成物並乾燥,且曝光、顯影藉以形成圖型後,將形成有圖型之樹脂藉由加熱或光照射予以正式硬化之所謂藉由光防焊劑所形成者為主流。With the recent increase in precision and density of printed wiring boards caused by the thinness and thinness of electronic devices in recent years, currently, solder resist layers are coated with a photosensitive resin composition on a substrate, dried, and exposed and developed to form a pattern. After the molding, the patterned resin is hardened by heating or light irradiation, so-called formed by a photo solder resist is the mainstream.

又,亦提出有不使用如上述之液狀感光性樹脂組成物,而使用具備感光性薄膜之所謂感光性薄膜層合體來形成防焊劑層。如此之感光性薄膜層合體,一般而言係貼合於支持膜上藉由感光性樹脂組成物所形成之感光性薄膜者,依需要亦可能於感光性薄膜表面貼合保護膜。如此之感光性薄膜層合體,使用時係將保護膜剝離而藉由加熱壓接層合於配線基板,於曝光前或由支持膜側進行曝光後,將支持膜剝離進行顯影。藉此可形成經形成圖型之防焊劑層。藉由使用感光性薄膜層合體,相較於濕式塗佈的情況,可不需要塗佈後之乾燥步驟,此外所得之防焊劑層的表面平滑性或表面硬度亦優良。再者近年來,由作業性之觀點,有使感光性薄膜薄化的傾向,不僅感光性薄膜,層合有感光性薄膜之支持膜亦有薄膜化之傾向(例如,參照國際公開2010/013623號小冊、日本特開2011-48270號公報等)。It is also proposed to form a solder resist layer using a so-called photosensitive film laminate including a photosensitive film instead of the liquid photosensitive resin composition as described above. Such a photosensitive film laminate is generally a photosensitive film formed by a photosensitive resin composition bonded to a supporting film, and a protective film may be bonded to the surface of the photosensitive film as needed. When such a photosensitive film laminate is used, the protective film is peeled off and laminated on the wiring substrate by heat and pressure bonding, and the supporting film is peeled off and developed before exposure or after exposure from the supporting film side. Thereby, a patterned solder resist layer can be formed. By using the photosensitive film laminate, compared with the case of wet coating, a drying step after coating is not required, and the surface smoothness or surface hardness of the obtained solder resist layer is also excellent. Furthermore, in recent years, from the viewpoint of workability, there has been a tendency to reduce the thickness of photosensitive films. Not only photosensitive films, but also support films laminated with photosensitive films tend to be thinner (for example, refer to International Publication 2010/013623). Booklet, Japanese Patent Laid-Open No. 2011-48270, etc.).

如上述般於配線基板上形成防焊劑層之步驟中,將感光性薄膜層合體層合於配線基板後,至進行到下一步驟之前的期間,可能有將經層合支配線基板依序重疊而一時保管的情況。此時,可能會因為將貼合有感光性薄膜層合體之配線基板重疊時的衝擊,或重疊時的本身重量,而傷及設於配線基板上之感光性薄膜層合體的表面。特別是因最近之感光性薄膜層合體之薄膜化的影響,起因於重疊時的衝擊或本身重量之按壓,不僅支持膜,連層合於支持膜之感光性薄膜表面亦可能損傷。In the step of forming a solder resist layer on the wiring substrate as described above, after the photosensitive thin film laminate is laminated on the wiring substrate and before the next step, the laminated support wiring substrate may be sequentially overlapped. And the case of temporary storage. At this time, the surface of the photosensitive film laminate provided on the wiring substrate may be damaged due to the impact when the wiring substrates to which the photosensitive film laminate is laminated are overlapped or the weight of the wiring substrate when it is overlapped. In particular, due to the recent thinning of the photosensitive film laminate, not only the support film, but also the surface of the photosensitive film laminated on the support film may be damaged due to the impact during the overlap or the pressing of the weight itself.

因此,本發明之目的,為提供即使因將層合有感光性薄膜層合體之基板等重疊時之強烈衝擊或按壓,亦可抑制對感光性薄膜表面之影響的感光性薄膜層合體。又,本發明之其他目的,為提供使用前述感光性薄膜層合體所形成之硬化物。Therefore, an object of the present invention is to provide a photosensitive film laminate which can suppress the influence on the surface of the photosensitive film even if the substrate is laminated with the photosensitive film laminate on a substrate or the like with strong impact or pressing. It is another object of the present invention to provide a cured product formed by using the photosensitive film laminate.

本發明者等人本次,發現將層合有感光性薄膜層合體之基板等重疊時的衝擊或按壓所致之感光性薄膜表面的損傷,不僅起因於感光性薄膜本身之耐衝擊性,亦與鄰接於感光性薄膜表面之層,亦即與感光性薄膜直接接觸之層的材質有大幅關聯。此外,本發明者等人得到如下見解:藉由於具備含有特定成分之中間層的支持膜與感光性薄膜之間所設置的層合體,即使因將層合有感光性薄膜層合體之基板等重疊時之強烈衝擊或按壓,亦可抑制對感光性薄膜表面之影響。進一步地,本發明者等人得到如下見解:使用具備含有如上述之特定成分的中間層之感光性薄膜層合體所形成的防焊劑層,對其表面不會因衝擊而造成影響,因此可改善良率。本發明係依該見解而為者。The present inventors have found that the damage to the surface of the photosensitive film caused by impact or pressing when a substrate or the like on which the photosensitive film laminate is laminated is superimposed, not only due to the impact resistance of the photosensitive film itself, but also It is largely related to the material of the layer adjacent to the surface of the photosensitive film, that is, the layer directly contacting the photosensitive film. In addition, the present inventors have found that the laminated body provided between the support film having the intermediate layer containing a specific component and the photosensitive film allows the substrates or the like on which the photosensitive film laminate is laminated to be overlapped. Strong impact or pressing at the same time can also suppress the effect on the surface of the photosensitive film. Furthermore, the present inventors have found that the use of a solder resist layer formed of a photosensitive film laminate having an intermediate layer containing a specific component as described above can improve the surface of the solder resist layer without being affected by impact. Yield. This invention is made based on this knowledge.

[1]本發明之第1實施形態之感光性薄膜層合體,為一種依序具備支持膜、中間層、與藉由感光性樹脂組成物所形成而成的感光性薄膜之感光性薄膜層合體,其特徵為   前述中間層含有三聚氰胺及三聚氰胺化合物之至少任1種而成。[1] The photosensitive film laminate according to the first embodiment of the present invention is a photosensitive film laminate including a support film, an intermediate layer, and a photosensitive film formed of a photosensitive resin composition in this order. It is characterized in that the intermediate layer contains at least any one of melamine and a melamine compound.

[2]本發明之第2實施形態之感光性薄膜層合體,為如[1]之感光性薄膜層合體,其中前述支持膜之厚度為10~150μm。[2] The photosensitive film laminate of the second embodiment of the present invention is the photosensitive film laminate of [1], wherein the thickness of the support film is 10 to 150 μm.

[3]本發明之第3實施形態之感光性薄膜層合體,為如[1]或[2]之感光性薄膜層合體,其中前述感光性樹脂組成物含有填料及交聯成分而成。[3] The photosensitive film laminate according to the third embodiment of the present invention is the photosensitive film laminate according to [1] or [2], wherein the photosensitive resin composition contains a filler and a crosslinking component.

[4]本發明之第4實施形態之感光性薄膜層合體,為如[1]~[3]中任一項之感光性薄膜層合體,其係於前述感光性薄膜之與前述中間層相反之面側進一步具備保護膜而成。[4] The photosensitive film laminate according to the fourth embodiment of the present invention is a photosensitive film laminate according to any one of [1] to [3], which is opposite to the intermediate layer of the photosensitive film The front side is further provided with a protective film.

[5]本發明之第5實施形態之硬化物,其特徵為使用如[1]~[4]中任一項之感光性薄膜層合體所形成。[5] A cured product according to a fifth embodiment of the present invention, which is formed using the photosensitive thin film laminate according to any one of [1] to [4].

依照本發明,藉由於感光性薄膜與支持膜之間設置有含有如上述之特定成分的中間層之感光性薄膜層合體,即使因將層合有感光性薄膜層合體之基板等重疊時的強烈衝擊或按壓,亦可抑制對感光性薄膜表面之影響。特別是將上述感光性薄膜層合體使用於形成防焊劑層時為有效。又,就上述支持膜即使為薄膜亦會發揮上述效果的觀點上為有效。進一步地,依照本發明之其他態樣,可實現使用前述感光性薄膜層合體所形成之硬化物。According to the present invention, since a photosensitive film laminate including an intermediate layer containing a specific component as described above is provided between the photosensitive film and the support film, even when a substrate or the like on which the photosensitive film laminate is laminated is strong, Impact or pressing can also suppress the effect on the surface of the photosensitive film. In particular, it is effective to use the said photosensitive thin film laminated body when forming a solder resist layer. Moreover, it is effective from a viewpoint that the said support film exhibits the said effect even if it is a thin film. Furthermore, according to another aspect of this invention, the hardened | cured material formed using the said photosensitive film laminated body can be implemented.

一邊參照圖式一邊說明本發明之感光性薄膜層合體。圖1係顯示本發明之感光性薄膜層合體之一實施形態的概略截面圖。本發明之感光性薄膜層合體1,具備將支持膜10、中間層20,與藉由感光性樹脂組成物所形成而成的感光性薄膜30依序層合之構造。此處,感光性薄膜,係指使感光性樹脂組成物成為膜形狀者,且係未層合有支持膜或保護膜等其他層者。又,本發明中,除了上述構成以外,亦可具備其他薄膜等。例如,防止於感光性薄膜之表面附著灰塵等,並且考慮感光性薄膜層合體之操作性,亦可如圖2所示般,對於感光性薄膜層合體1,於感光性薄膜30之與中間層20相反之面側進一步設置保護膜40。以下說明構成本發明之薄膜層合體的各構成要素。The photosensitive film laminated body of this invention is demonstrated, referring drawings. FIG. 1 is a schematic cross-sectional view showing an embodiment of a photosensitive film laminate according to the present invention. The photosensitive film laminate 1 of the present invention has a structure in which a support film 10, an intermediate layer 20, and a photosensitive film 30 formed of a photosensitive resin composition are sequentially laminated. Here, the photosensitive film refers to a person who makes the photosensitive resin composition into a film shape and does not have another layer such as a support film or a protective film laminated. In addition, in the present invention, in addition to the above configuration, other films and the like may be provided. For example, in order to prevent dust and the like from being attached to the surface of the photosensitive film, and considering the operability of the photosensitive film laminate, as shown in FIG. 2, the photosensitive film laminate 1 may be placed between the photosensitive film 30 and the intermediate layer. A protective film 40 is further provided on the opposite surface side. Hereinafter, each component which comprises the thin film laminated body of this invention is demonstrated.

[支持膜]   本發明之感光性薄膜層合體中之支持膜,係具有支持後述之感光性薄膜,並且如後述般於感光性薄膜之曝光、顯影時,對感光性薄膜之與支持膜鄰接之側的表面賦予特定之表面形態的角色者。[Support film] 支持 The support film in the photosensitive film laminate of the present invention has a support for a photosensitive film described below, and is adjacent to the support film when the photosensitive film is exposed and developed as described later. The side surface gives a character with a specific surface shape.

本發明之感光性薄膜層合體中之支持膜,只要係公知者則可無特殊限制地使用,例如可適合使用可適合地使用由聚對苯二甲酸乙二酯或聚萘二甲酸乙二酯等之聚酯薄膜、聚醯亞胺薄膜、聚醯胺醯亞胺薄膜、聚丙烯薄膜、聚苯乙烯薄膜等之熱可塑性樹脂所成之薄膜。又,使用前述熱可塑性樹脂薄膜時,可於使薄膜成膜時的樹脂中添加填料(揑合處理)、或進行消光塗覆(塗覆處理)、將薄膜表面進行如噴砂處理般之噴砂處理,或亦可為實施毛絲(hairline)加工或化學蝕刻等之處理者。此等之中,就耐熱性、機械強度、操作性等之觀點而言,尤可適合使用聚酯薄膜。支持膜可為單層、亦可層合2層以上。The support film in the photosensitive film laminate of the present invention can be used without any particular limitation as long as it is known, for example, it can be suitably used. Polyethylene terephthalate or polyethylene naphthalate can be suitably used. Polyester film, polyimide film, polyimide film, polypropylene film, polystyrene film and other thermoplastic resins. When the thermoplastic resin film is used, a filler may be added to the resin when the film is formed (kneading treatment), or a matte coating (coating treatment) may be performed, and the surface of the film may be subjected to a sandblasting treatment like a sandblasting treatment. Alternatively, it may be a processor that performs hairline processing or chemical etching. Among these, from the viewpoints of heat resistance, mechanical strength, workability, etc., a polyester film is particularly suitably used. The support film may be a single layer, or two or more layers may be laminated.

又,如上所述之熱可塑性樹脂薄膜,就提高強度之目的,較佳為使用於一軸方向或二軸方向延伸之薄膜。The thermoplastic resin film described above is preferably used for a film extending in one or two axial directions for the purpose of improving strength.

支持膜之厚度,由操作性之觀點,較佳為10~150μm之範圍、更佳為10~100μm之範圍、又更佳為10~50μm之範圍。From the viewpoint of operability, the thickness of the supporting film is preferably in a range of 10 to 150 μm, more preferably in a range of 10 to 100 μm, and even more preferably in a range of 10 to 50 μm.

又,亦可使用藉由塗覆而於支持膜上設有後述之中間層的支持膜與中間層經一體化者。In addition, a support film in which an intermediate layer described later is provided on the support film by coating and the intermediate layer is integrated may be used.

<中間層>   本發明之感光性薄膜層合體中之中間層,含有三聚氰胺及三聚氰胺化合物之至少任1種。本發明者等努力研究之結果,發現藉由於支持膜與感光性薄膜之間設置由特定材料所成之中間層,感光性薄膜之表面不會受到強烈衝擊之影響。其理由雖不一定明確,但推測係中間層,係保護經層合之感光性薄膜表面免受強烈衝擊影響,其結果,對感光性薄膜表面狀態不會造成影響,但僅不過是推測的範圍,並不一定限制於此。<Intermediate layer> The intermediate layer in the photosensitive film laminate of the present invention contains at least one of melamine and a melamine compound. As a result of diligent research by the inventors, it was found that the surface of the photosensitive film is not affected by a strong impact by providing an intermediate layer made of a specific material between the support film and the photosensitive film. Although the reason is not necessarily clear, it is presumed that the intermediate layer protects the surface of the laminated photosensitive film from strong impact. As a result, it does not affect the surface state of the photosensitive film, but it is only an estimated range. Is not necessarily limited to this.

中間層之厚度,由感光性薄膜保護之觀點,較佳為0.1~10μm之範圍、更佳為1~8μm之範圍。The thickness of the intermediate layer is preferably in the range of 0.1 to 10 μm, and more preferably in the range of 1 to 8 μm from the viewpoint of being protected by a photosensitive film.

中間層中所含有的三聚氰胺、三聚氰胺化合物可使用公知慣用者。又本發明中,三聚氰胺化合物,亦包含三聚氰胺化合物與其他物質之混合物。再者,本發明中「三聚氰胺」,係指藉由三聚氰胺(2,4,6-三胺基-1,3,5-三嗪)與甲醛之加成縮合而硬化之樹脂,但亦包含該三聚氰胺與甲醛之初期反應物的羥甲基三聚氰胺及其烷基化物的烷基化羥甲基三聚氰胺之概念。三聚氰胺,亦包含甲基化羥甲基三聚氰胺、丙基化羥甲基三聚氰胺、丁基化羥甲基三聚氰胺、異丁基化羥甲基三聚氰胺等之改質三聚氰胺。又,亦包含如三聚氰胺(甲基)丙烯酸酯之三聚氰胺改質物。As a melamine and a melamine compound contained in an intermediate layer, a well-known person can be used. In the present invention, the melamine compound also includes a mixture of the melamine compound and other substances. In addition, the "melamine" in the present invention refers to a resin hardened by the addition condensation of melamine (2,4,6-triamino-1,3,5-triazine) and formaldehyde, but also includes the resin The concept of methylol melamine and its alkylated alkylated methylol melamine as the initial reactants of melamine and formaldehyde. Melamine also includes modified melamine such as methylated methylol melamine, propylated methylol melamine, butylated methylol melamine, isobutylated methylol melamine, and the like. It also includes melamine modified products such as melamine (meth) acrylate.

又,三聚氰胺化合物,係指上述三聚氰胺,與丙烯酸樹脂、環氧樹脂、醇酸樹脂等之其他樹脂的混合物,例如可列舉丙烯酸三聚氰胺、醇酸三聚氰胺、聚酯三聚氰胺、環氧三聚氰胺等。此等之中,就得到更優良耐衝擊性而言,較佳為丙烯酸三聚氰胺、環氧三聚氰胺;更佳為丙烯酸三聚氰胺。再者,此處之丙烯酸三聚氰胺,係指丙烯酸樹脂與三聚氰胺樹脂之混合物,其係以三聚氰胺樹脂使丙烯酸樹脂硬化之形態者。又,環氧三聚氰胺,係指環氧樹脂與三聚氰胺樹脂之混合物,其係將環氧樹脂以三聚氰胺樹脂硬化的形態。三聚氰胺之具體例子,可列舉DIC股份有限公司製AMIDIR J-820-60、L-109-65、L-117-60、L-127-60、13-548、G-821-60、L-110-60G、L-125-60、L-166-60B、L-105-60、三井化學股份有限公司製U-VAN 20SE60、20SB、22R、125、132、62、60R、169等。又,丙烯酸樹脂或環氧樹脂,亦可無特殊限制地使用公知慣用者。丙烯酸樹脂之具體例子,可列舉DIC股份有限公司製ACRYDIC 54-172-60、A-322、A-405、A-452等。又,環氧樹脂之具體例子,可列舉三井化學股份有限公司製Epomik R301等。三聚氰胺樹脂之含量,相對於丙烯酸樹脂或環氧樹脂之合計量而言,較佳為0.1~50質量%、更佳為1~40質量%。The melamine compound refers to a mixture of the melamine and other resins such as an acrylic resin, an epoxy resin, and an alkyd resin, and examples thereof include acrylic melamine, alkyd melamine, polyester melamine, and epoxy melamine. Among these, in order to obtain more excellent impact resistance, melamine acrylic acid and epoxy melamine are preferred; melamine acrylic acid is more preferred. Furthermore, the melamine acrylic acid herein refers to a mixture of an acrylic resin and a melamine resin, and is a form in which an acrylic resin is hardened with a melamine resin. The epoxy melamine refers to a mixture of an epoxy resin and a melamine resin, and is a form in which an epoxy resin is hardened with a melamine resin. Specific examples of melamine include AMIDIR J-820-60, L-109-65, L-117-60, L-127-60, 13-548, G-821-60, and L-110 manufactured by DIC Corporation. -60G, L-125-60, L-166-60B, L-105-60, U-VAN 20SE60, 20SB, 22R, 125, 132, 62, 60R, 169, etc. manufactured by Mitsui Chemicals Corporation. In addition, an acrylic resin or an epoxy resin can be used by a publicly known person without particular limitation. Specific examples of the acrylic resin include ACRYDIC 54-172-60, A-322, A-405, and A-452 manufactured by DIC Corporation. Specific examples of the epoxy resin include Epomik R301 manufactured by Mitsui Chemicals Co., Ltd. and the like. The content of the melamine resin is preferably 0.1 to 50% by mass, and more preferably 1 to 40% by mass based on the total amount of the acrylic resin or epoxy resin.

如此之中間層中所含有的三聚氰胺及三聚氰胺化合物之摻合量,相對於層全體而言,較佳為10~90質量%、更佳為20~80質量%。The blending amount of the melamine and the melamine compound contained in such an intermediate layer is preferably 10 to 90% by mass and more preferably 20 to 80% by mass relative to the entire layer.

中間層,於不損及效果之範圍內亦可含有其他樹脂。特佳為於中間層中含有聚矽氧系樹脂,作為樹脂成分。本發明之感光性薄膜層合體,於使感光性薄膜硬化而形成硬化被膜時,必須將支持膜及中間層由感光性薄膜(硬化被膜)剝離,藉由於中間層中含有聚矽氧系樹脂,可容易將支持膜及中間層由感光性薄膜剝離,並且維持支持膜與中間層之密合性。又,藉由於中間層中含有上述三聚氰胺或三聚氰胺化合物與聚矽氧系樹脂,可更加抑制因衝擊或按壓而使感光性薄膜之表面損傷。作為聚矽氧系樹脂,可無特殊限制地使用,例如,可列舉東亞合成股份有限公司製之SYMACUS-120、US-150、US-270、US-350及Aron GS-30等。The intermediate layer may contain other resins as long as the effect is not impaired. It is particularly preferable that a silicone resin is contained in the intermediate layer as a resin component. When the photosensitive film laminate of the present invention hardens the photosensitive film to form a cured film, the supporting film and the intermediate layer must be peeled off from the photosensitive film (cured film). Since the intermediate layer contains a polysiloxane resin, The support film and the intermediate layer can be easily peeled from the photosensitive film, and the adhesion between the support film and the intermediate layer can be maintained. In addition, since the intermediate layer contains the melamine or melamine compound and a silicone resin, it is possible to further suppress the surface damage of the photosensitive film due to impact or pressing. The polysiloxane resin can be used without particular limitation, and examples thereof include SYMACUS-120, US-150, US-270, US-350, and Aron GS-30 manufactured by Toa Synthesis Co., Ltd.

又,中間層中,亦可適當含有填料、硬化促進劑、添加劑、抗靜電劑等,作為樹脂以外之成分。填料可無特殊限制地使用公知者,例如可列舉二氧化矽、碳酸鈣等。該等之中尤以二氧化矽為佳。填料之平均粒子徑並無特殊限定,較佳為1.0~5.5μm、更佳為2.0~4.5μm、又更佳為2.0~3.0μm。又,作為抗靜電劑,可使用以往公知之抗靜電劑,該等之中尤可適合使用以下述通式(I)表示之4級銨鹽為主成分之陽離子系界面活性劑。藉由於中間層中含有如下述式表示之陽離子系界面活性劑,可更加抑制因衝擊或按壓使感光性薄膜之表面損傷。In addition, the intermediate layer may suitably contain fillers, hardening accelerators, additives, antistatic agents, and the like as components other than resin. A known filler can be used without particular limitation, and examples thereof include silicon dioxide and calcium carbonate. Of these, silicon dioxide is particularly preferred. The average particle diameter of the filler is not particularly limited, but is preferably 1.0 to 5.5 μm, more preferably 2.0 to 4.5 μm, and still more preferably 2.0 to 3.0 μm. As the antistatic agent, a conventionally known antistatic agent can be used, and among these, a cationic surfactant having a quaternary ammonium salt represented by the following general formula (I) as a main component can be suitably used. Since the intermediate layer contains a cationic surfactant represented by the following formula, the surface damage of the photosensitive film due to impact or pressing can be further suppressed.

(式中,R表示碳原子數8以上之烷基,R1 表示低級烷基,R2 表示低級伸烷基)。 (In the formula, R represents an alkyl group having 8 or more carbon atoms, R 1 represents a lower alkyl group, and R 2 represents a lower alkylene group.)

上述式(I)之陽離子系界面活性劑當中,尤更佳可使用下述通式(II)表示者。(式中,R表示碳原子數8以上之烷基)。Among the above-mentioned cationic surfactants of the formula (I), it is particularly preferable to use those represented by the following general formula (II). (In the formula, R represents an alkyl group having 8 or more carbon atoms.)

<感光性薄膜>   構成本發明之感光性薄膜層合體之感光性薄膜,係藉由曝光、顯影而圖型化,成為設置於電路基板上之硬化被膜。硬化被膜,較佳為防焊劑層。如此之感光性薄膜係使用感光性樹脂組成物形成,感光性樹脂組成物可無限制地使用以往公知之防焊劑油墨等,以下,說明可較佳地使用於本發明之感光性薄膜的感光性樹脂組成物之一例。<Photosensitive film> The photosensitive film constituting the photosensitive film laminate of the present invention is patterned by exposure and development, and becomes a hardened film provided on a circuit board. The hardened film is preferably a solder resist layer. Such a photosensitive film is formed using a photosensitive resin composition, and the photosensitive resin composition can be used without limitation with a conventionally known solder resist ink. The following describes the sensitivity of the photosensitive film that can be preferably used in the present invention. An example of a resin composition.

本發明中,感光性樹脂組成物,較佳為含有交聯成分及填料。更佳為進一步含有光聚合起始劑。交聯成分較佳為含有羧基之感光性樹脂或感光性單體,進一步加熱的情況時,較佳為含有藉由熱而交聯之成分。以下說明各成分。In the present invention, the photosensitive resin composition preferably contains a crosslinking component and a filler. More preferably, it further contains a photopolymerization initiator. The crosslinking component is preferably a photosensitive resin or photosensitive monomer containing a carboxyl group, and when further heated, it is preferable to contain a component that is crosslinked by heat. Each component is explained below.

[交聯成分]   交聯成分只要係會交聯的成分則無特殊限制,可使用公知慣用者。特佳為含有羧基之感光性樹脂或感光性單體,進一步加熱的情況時,較佳為含有藉由熱而交聯之成分(以下稱熱交聯成分)。[Crosslinking component] The crosslinking component is not particularly limited as long as it is a component that can be crosslinked, and a publicly known one can be used. Particularly preferred is a photosensitive resin or a photosensitive monomer containing a carboxyl group. In the case of further heating, it is preferred to contain a component that is crosslinked by heat (hereinafter referred to as a thermal crosslinking component).

含有羧基之感光性樹脂,為藉由光照射聚合或交聯而硬化之成分,可藉由含有羧基而成為鹼顯影性。又,由光硬化性或耐顯影性之觀點而言,於羧基以外,較佳為於分子內具有乙烯性不飽和鍵。乙烯性不飽和雙鍵較佳為來自丙烯酸或甲基丙烯酸或該等之衍生物者。The photosensitive resin containing a carboxyl group is a component which is hardened by polymerization or crosslinking by light irradiation, and can be alkali developable by containing a carboxyl group. From the viewpoint of photocurability and development resistance, it is preferable to have an ethylenically unsaturated bond in the molecule other than the carboxyl group. The ethylenically unsaturated double bond is preferably one derived from acrylic acid or methacrylic acid or a derivative thereof.

又,含有羧基之感光性樹脂,較佳為使用不使用環氧樹脂作為起始原料之含有羧基之感光性樹脂。不使用環氧樹脂作為起始原料之含有羧基之感光性樹脂,鹵化物離子含量非常少,可抑制絕緣信賴性之劣化。含有羧基之感光性樹脂之具體例子,可列舉如以下所列舉之化合物(寡聚物或聚合物均可)。Moreover, it is preferable that the photosensitive resin containing a carboxyl group uses the photosensitive resin containing a carboxyl group without using an epoxy resin as a starting material. The photosensitive resin containing a carboxyl group, which does not use epoxy resin as a starting material, has very low halide ion content, and can suppress deterioration of insulation reliability. Specific examples of the carboxyl group-containing photosensitive resin include the following compounds (either oligomers or polymers).

可列舉:(1)使(甲基)丙烯酸與2官能或其以上之多官能(固體)環氧樹脂反應,於存在於側鏈之羥基上加成鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫鄰苯二甲酸酐等之2元酸酐而得的含有羧基之感光性樹脂、   (2)使(甲基)丙烯酸與將2官能(固體)環氧樹脂之羥基進一步經表氯醇環氧化而得之多官能環氧樹脂反應,且於所生成之羥基上加成2元酸酐而得的含有羧基之感光性樹脂、   (3)使1分子中具有至少1個醇性羥基與1個酚性羥基的化合物、及(甲基)丙烯酸等之含有不飽和基之單羧酸,與1分子中具有2個以上之環氧基的環氧化合物反應,且對所得之反應生成物的醇性羥基,使馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、苯均四酸酐、己二酸等之多元酸酐反應而得的含有羧基之感光性樹脂、   (4)使(甲基)丙烯酸等之含有不飽和基之單羧酸,與使雙酚A、雙酚F、雙酚S、酚醛清漆型酚樹脂、聚-p-羥基苯乙烯、萘酚與醛類之縮合物、二羥基萘與醛類之縮合物等之1分子中具有2個以上之酚性羥基的化合物及環氧乙烷、環氧丙烷等之環氧烷反應而得的反應生成物反應,且使所得的反應生成物與多元酸酐反應而得的含有羧基之感光性樹脂、   (5)使含有不飽和基之單羧酸,與使1分子中具有2個以上之酚性羥基的化合物及碳酸伸乙酯、碳酸伸丙酯等之環狀碳酸酯化合物反應而得的反應生成物反應,且使所得的反應生成物與多元酸酐反應而得的含有羧基之感光性樹脂、   (6)於使脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成體二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物進行加成聚合反應而得的胺基甲酸酯樹脂末端,再使酸酐反應而成之含有末端羧基之胺基甲酸酯樹脂、   (7)於使二異氰酸酯;二羥甲基丙酸、二羥甲基丁酸等之含有羧基之二醇化合物;與二醇化合物進行加成聚合反應而得的含有羧基之胺基甲酸酯樹脂之合成中,添加(甲基)丙烯酸羥基烷酯等之分子中具有1個羥基與1個以上之(甲基)丙烯醯基之化合物,經末端(甲基)丙烯酸化的含有羧基之胺基甲酸酯樹脂、   (8)於使二異氰酸酯、含有羧基之二醇化合物、與二醇化合物進行加成聚合反應而得的含有羧基之胺基甲酸酯樹脂之合成中,添加異佛酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等分子中具有1個異氰酸酯基與1個以上之(甲基)丙烯醯基的化合物,經末端(甲基)丙烯酸化的含有羧基之胺基甲酸酯樹脂、   (9)使己二酸、鄰苯二甲酸、六氫鄰苯二甲酸等之二羧酸與多官能氧雜環丁烷樹脂反應,於所生成的1級羥基上加成2元酸酐,再於前述加成所得的含有羧基之聚酯樹脂上進一步加成(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸α-甲基縮水甘油酯等之1分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物而成之含有羧基之感光性樹脂、   (10)於上述(1)~(9)中任一者之含有羧基之感光性樹脂上,加成1分子中具有環狀醚基與(甲基)丙烯醯基之化合物而得的含有羧基之感光性樹脂、   (11)對於藉由使(甲基)丙烯酸等之不飽和羧酸及苯乙烯、α-甲基苯乙烯、(甲基)丙烯酸低級烷酯、異丁烯等之含有不飽和基之化合物共聚合所得的含有羧基之樹脂,使甲基丙烯酸3,4-環氧基環己酯等之一分子中具有環狀醚基與(甲基)丙烯醯基的化合物進行反應而得的含有羧基之感光性樹脂等。再者,此處,(甲基)丙烯酸酯,係指總稱丙烯酸酯、甲基丙烯酸酯及該等之混合物的用語,以下其他類似表述亦相同。Examples include: (1) reacting (meth) acrylic acid with a polyfunctional (solid) epoxy resin having two or more functions, and adding phthalic anhydride and tetrahydrophthalic acid to hydroxyl groups present on a side chain; A carboxyl group-containing photosensitive resin obtained from a dibasic acid anhydride such as formic anhydride, hexahydrophthalic anhydride, etc. (2) The hydroxyl group of (meth) acrylic acid and a bifunctional (solid) epoxy resin is further subjected to epichlorine A polyfunctional epoxy resin obtained by epoxidation of an alcohol, and a photosensitive resin containing a carboxyl group obtained by adding a dibasic acid anhydride to the generated hydroxyl group, (3) has at least one alcoholic hydroxyl group in one molecule and One phenolic hydroxyl compound and (meth) acrylic acid-containing unsaturated monocarboxylic acid react with an epoxy compound having two or more epoxy groups in one molecule, and react with the obtained reaction product Hydroxy group, a carboxyl group-containing photosensitive resin obtained by reacting a polybasic acid anhydride such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic acid, etc., (4) using Unsaturated monocarboxylic acids such as (meth) acrylic acid, and bisphenol A, bis Phenol F, bisphenol S, novolac-type phenol resin, poly-p-hydroxystyrene, naphthol and aldehyde condensation products, dihydroxynaphthalene and aldehyde condensation products, etc. have more than two phenols in one molecule The hydroxy-containing compound reacts with a reaction product obtained by reacting an alkylene oxide such as ethylene oxide and propylene oxide, and a carboxyl group-containing photosensitive resin obtained by reacting the obtained reaction product with a polybasic acid anhydride. A reaction product obtained by reacting a monocarboxylic acid containing an unsaturated group with a compound having two or more phenolic hydroxyl groups and cyclic carbonate compounds such as ethyl carbonate and propyl carbonate in one molecule A photosensitive resin containing a carboxyl group obtained by reacting the obtained reaction product with a polybasic acid anhydride, and (6) reacting an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate, an aromatic diisocyanate, etc. Diisocyanate compounds and polycarbonate-based polyols, polyether-based polyols, polyester-based polyols, polyolefin-based polyols, acrylic-based polyols, bisphenol A-based alkylene oxide adducts, and phenols Sex A urethane resin terminal obtained by addition polymerization reaction of a diol compound such as a hydroxyl group, an alcoholic hydroxyl compound, and the like, and a terminal carboxyl group-containing urethane resin obtained by further reacting an acid anhydride with (7) in Diisocyanate; carboxyl-containing diol compounds such as dimethylolpropionic acid, dimethylolbutanoic acid; and carboxyl-containing urethane resins obtained by addition polymerization with diol compounds Add a compound with one hydroxy group and one or more (meth) acrylfluorenyl groups in the molecule such as hydroxyalkyl (meth) acrylate, and a terminal (meth) acrylated carboxyl group-containing urethane Resin, (8) In the synthesis of a diisocyanate, a diol compound containing a carboxyl group, and a carboxyl group-containing urethane resin obtained by addition polymerization with a diol compound, isophorone diisocyanate and pentaerythritol are added. Compounds with one isocyanate group and one or more (meth) acryl fluorene groups in molecules such as moire reactants such as triacrylates, and terminal (meth) acrylated carboxyl group-containing urethane resins , (9) Dicarboxylic acid such as adipic acid, phthalic acid, hexahydrophthalic acid and the like are reacted with a polyfunctional oxetane resin, and a dibasic acid anhydride is added to the generated primary hydroxyl group, and then Glycidyl (meth) acrylate, α-methylglycidyl (meth) acrylate and the like are further added to the carboxyl group-containing polyester resin obtained by the addition described above. A carboxyl group-containing photosensitive resin made of more than one (meth) acrylfluorenyl compound. (10) Add 1 to the carboxyl group-containing photosensitive resin in any one of (1) to (9) above. A carboxyl group-containing photosensitive resin obtained from a compound having a cyclic ether group and a (meth) acrylfluorene group in the molecule, (11) For unsaturated carboxylic acids such as (meth) acrylic acid, styrene, and α -A carboxyl group-containing resin obtained by copolymerizing an unsaturated group-containing compound such as methylstyrene, a lower alkyl (meth) acrylate, isobutylene, etc., to make one of 3,4-epoxycyclohexyl methacrylate, etc. A carboxyl group-containing compound obtained by reacting a compound having a cyclic ether group with a (meth) acryl group in the molecule Photosensitive resin and the like. Here, (meth) acrylate refers to a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions below.

上述含有羧基之感光性樹脂當中,尤可適合使用如上述般,不使用環氧樹脂作為起始原料之含有羧基之感光性樹脂或藉由合成環氧樹脂以外之樹脂所得之含有羧基之感光性樹脂。因此,上述含有羧基之感光性樹脂之具體例子當中,可適合使用(4)~(8)及(11)之任1種以上的含有羧基之感光性樹脂,特別可適合使用(4)~(8)所例示之樹脂。可具有半導體封裝用防焊劑所要求之特性,亦即PCT耐性、HAST耐性、冷熱衝擊耐性。Among the carboxyl group-containing photosensitive resins, a carboxyl group-containing photosensitive resin that does not use epoxy resin as a starting material or a carboxyl group-containing photosensitive resin obtained from a resin other than a synthetic epoxy resin can be suitably used as described above. Resin. Therefore, among the specific examples of the photosensitive resin containing a carboxyl group, any one or more of the photosensitive resins containing a carboxyl group (4) to (8) and (11) may be suitably used, and (4) to ( 8) Exemplified resin. It can have the characteristics required for solder resist for semiconductor packaging, that is, PCT resistance, HAST resistance, and thermal shock resistance.

如此地,藉由不使用環氧樹脂作為起始原料,可將氯離子雜質量抑制在非常少的例如100ppm以下。本發明中適合使用的含有羧基之感光性樹脂之氯離子雜質含量為0~100ppm、更佳為0~50ppm、又更佳為0~30ppm。In this way, by not using an epoxy resin as a starting material, the amount of chloride ions can be suppressed to a very small amount, for example, 100 ppm or less. The content of chloride ion impurities in the photosensitive resin containing a carboxyl group suitably used in the present invention is 0 to 100 ppm, more preferably 0 to 50 ppm, and still more preferably 0 to 30 ppm.

又,藉由不使用環氧樹脂作為起始原料,可容易地得到不含羥基(或減低羥基之量)的樹脂。一般而言,羥基的存在,亦具有氫鍵所致之密合性提高等優良特徵,但已知耐濕性會顯著降低,藉由成為不含羥基之含有羧基之感光性樹脂,可提高耐濕性。Further, by not using an epoxy resin as a starting material, a resin containing no hydroxyl group (or a reduced amount of hydroxyl group) can be easily obtained. In general, the presence of hydroxyl groups also has excellent characteristics such as improved adhesion caused by hydrogen bonding, but it is known that the moisture resistance will be significantly reduced. By becoming a photosensitive resin containing a carboxyl group that does not contain a hydroxyl group, the resistance can be improved. Wet.

再者,亦適合使用由不使用光氣作為起始原料之異氰酸酯化合物、不使用表鹵代醇之原料所合成,氯離子雜質量為0~30ppm的含有羧基之胺基甲酸酯樹脂。如此的胺基甲酸酯樹脂中,藉由配合羥基與異氰酸酯基之當量,可容易地合成不含羥基之樹脂。Furthermore, it is also suitable to use a carboxyl group-containing urethane resin synthesized from an isocyanate compound that does not use phosgene as a starting material and a raw material that does not use epihalohydrin, and has a chloride ion content of 0 to 30 ppm. In such a urethane resin, a resin having no hydroxyl group can be easily synthesized by blending the equivalents of a hydroxyl group and an isocyanate group.

又,合成胺基甲酸酯樹脂時,亦可使用丙烯酸環氧酯改質原料作為二醇化合物。氯離子雜質雖會混入,但由可控制氯離子雜質量的觀點來看係可使用。When synthesizing a urethane resin, an acrylic epoxy ester modified raw material may be used as the diol compound. Although chloride ion impurities are mixed in, they can be used from the viewpoint of controlling the amount of chloride ion impurities.

如上述之含有羧基之感光性樹脂,由於在骨架、聚合物側鏈具有多數羧基,因此能夠以鹼水溶液顯影。Since the photosensitive resin containing a carboxyl group as described above has a large number of carboxyl groups in a skeleton and a polymer side chain, it can be developed with an alkaline aqueous solution.

含有羧基之感光性樹脂之酸價,較佳為40~150mgKOH/g。藉由使含有羧基之感光性樹脂之酸價為40mgKOH/g以上,鹼顯影成為良好。又,藉由使酸價成為150mgKOH/g以下,可容易描繪正常的阻劑圖型。更佳為50~130mgKOH/g。The acid value of the photosensitive resin containing a carboxyl group is preferably 40 to 150 mgKOH / g. When the acid value of the photosensitive resin containing a carboxyl group is 40 mgKOH / g or more, alkali development becomes favorable. In addition, by setting the acid value to 150 mgKOH / g or less, a normal resist pattern can be easily drawn. More preferably, it is 50 to 130 mgKOH / g.

含有羧基之感光性樹脂之重量平均分子量,雖依樹脂骨架而異,但一般而言較佳為2,000~150,000。藉由使重量平均分子量成為2,000以上,可提高不黏性能或解像度。又,藉由使重量平均分子量成為150,000以下,可提高顯影性或儲存安定性。更佳為5,000~100,000。Although the weight average molecular weight of the photosensitive resin containing a carboxyl group varies depending on the resin skeleton, it is generally preferably 2,000 to 150,000. When the weight average molecular weight is 2,000 or more, non-stick performance or resolution can be improved. In addition, by setting the weight average molecular weight to 150,000 or less, developability and storage stability can be improved. More preferably, it is 5,000 to 100,000.

含有羧基之感光性樹脂之摻合量,以固體成分換算,於全部組成物中較佳為20~60質量%。藉由成為20質量%以上,可提高塗膜強度。又,藉由成為60質量%以下,黏性成為適當,加工性提高。更佳為30~50質量%。The blending amount of the photosensitive resin containing a carboxyl group is preferably 20 to 60% by mass based on the solid content. When it is 20% by mass or more, the coating film strength can be improved. Moreover, when it is 60% by mass or less, the viscosity becomes appropriate and the workability improves. More preferably, it is 30 to 50% by mass.

使用作為感光性單體之化合物,例如可列舉慣用公知之聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯、碳酸酯(甲基)丙烯酸酯、(甲基)丙烯酸環氧酯等。具體而言,可列舉丙烯酸2-羥基乙酯、丙烯酸2-羥基丙酯等之羥基烷基丙烯酸酯類;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等之二醇之二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲基胺基丙基丙烯醯胺等之丙烯醯胺類;丙烯酸N,N-二甲基胺基乙酯、丙烯酸N,N-二甲基胺基丙酯等之丙烯酸胺基烷酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、參-羥基乙基異三聚氰酸酯等之多元醇或此等之環氧乙烷加成物、環氧丙烷加成物、或ε-己內酯加成物等之多價丙烯酸酯類;丙烯酸苯氧酯、雙酚A二丙烯酸酯、及此等之酚類之環氧乙烷加成物或環氧丙烷加成物等之多價丙烯酸酯類;甘油二縮水甘油醚、甘油三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、異三聚氰酸三縮水甘油酯等之縮水甘油醚之多價丙烯酸酯類;不限於前述,可由將聚醚多元醇、聚碳酸酯二醇、羥基末端聚丁二烯、聚酯多元醇等之多元醇直接丙烯酸酯化,或透過二異氰酸酯而經胺基甲酸酯丙烯酸酯化之丙烯酸酯類及三聚氰胺丙烯酸酯,及對應於前述丙烯酸酯之各甲基丙烯酸酯類的任一者至少1種中適當選擇來使用。Examples of the compound used as the photosensitive monomer include conventionally known polyester (meth) acrylates, polyether (meth) acrylates, urethane (meth) acrylates, and carbonates (methyl ) Acrylate, (meth) acrylate epoxy, and the like. Specific examples include hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; glycols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol. Diacrylates; N, N-dimethyl acrylamide, N-methyl methacrylamide, N, N-dimethylaminopropylacrylamide and other acrylamides; acrylic N, N-dimethylaminoethyl acrylate, N, N-dimethylaminopropyl acrylate, and the like; amine alkyl acrylates; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, and p-hydroxyethyl Polyisocyanates such as polyisocyanates or polyvalent acrylates such as ethylene oxide adducts, propylene oxide adducts, or ε-caprolactone adducts; phenoxy acrylate Esters, bisphenol A diacrylates, and polyvalent acrylates such as ethylene oxide adducts or propylene oxide adducts of phenols; glycerol diglycidyl ether, glycerol triglycidyl ether, Polyvalent acrylic acid esters of glycidyl ethers such as trimethylolpropane triglycidyl ether, triglycidyl isocyanurate, and the like; Polyols such as polyols, polycarbonate diols, hydroxyl-terminated polybutadiene, polyester polyols, etc. are directly acrylated, or urethane acrylates and melamine acrylics are passed through diisocyanates An ester and at least one of each of the methacrylates corresponding to the above-mentioned acrylate are appropriately selected and used.

亦可使用使丙烯酸與甲酚酚醛清漆型環氧樹脂等之多官能環氧樹脂反應而得的丙烯酸環氧酯樹脂,或進一步使季戊四醇三丙烯酸酯等之羥基丙烯酸酯與異佛酮二異氰酸酯等之二異氰酸酯的半胺基甲酸酯化合物與該丙烯酸環氧酯樹脂之羥基反應而得的環氧基胺基甲酸酯丙烯酸酯化合物等,作為感光性單體。如此之丙烯酸環氧酯系樹脂,可在不降低指觸乾燥性下,提高光硬化性。An acrylic epoxy resin obtained by reacting acrylic acid with a polyfunctional epoxy resin such as a cresol novolac epoxy resin, or a hydroxy acrylate such as pentaerythritol triacrylate and isophorone diisocyanate may also be used. An epoxy urethane acrylate compound or the like obtained by reacting a bis-urethane compound of an isocyanate with a hydroxyl group of the acrylic epoxy resin as a photosensitive monomer. Such an acrylic epoxy resin can improve the photo-hardening property without reducing the touch dryness.

使用作為感光性單體的分子中具有乙烯性不飽和基之化合物的摻合量,當組成物中包含含有羧基之樹脂時,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為5~100質量份、更佳為5~70質量份之比例。藉由使具有乙烯性不飽和基之化合物的摻合量成為5質量份以上,會提高光硬化性樹脂組成物之光硬化性。又,藉由使摻合量成為100質量份以下,可提高塗膜硬度。此處所稱之含有羧基之樹脂,係指包含含有羧基之感光性樹脂及羧基非感光性樹脂之任意者。亦即,組成物中任一者單獨摻合時係指單獨、均有摻合時係指其合計(於之後的段落為相同)。When the amount of the compound having an ethylenically unsaturated group in the molecule as a photosensitive monomer is used, when a resin containing a carboxyl group is included in the composition, the solid content is converted to 100 parts by mass of the resin containing a carboxyl group. The ratio is preferably 5 to 100 parts by mass, and more preferably 5 to 70 parts by mass. When the compounding amount of the compound having an ethylenically unsaturated group is 5 parts by mass or more, the photocurability of the photocurable resin composition is improved. In addition, by setting the blending amount to 100 parts by mass or less, the hardness of the coating film can be increased. The carboxyl group-containing resin referred to herein means any of a photosensitive resin containing a carboxyl group and a non-photosensitive resin containing a carboxyl group. That is, when any one of the compositions is blended alone, it means alone, and when it is blended, it means its total (the same applies to the following paragraphs).

特別是使用不具有乙烯性不飽和雙鍵的含有羧基之非感光性樹脂時,由於組成物為光硬化性,故有必要合併使用分子中具有1個以上之乙烯性不飽和基的化合物(感光性單體),因此感光性單體為有效。In particular, when a non-photosensitive resin containing a carboxyl group having no ethylenically unsaturated double bond is used, since the composition is photocurable, it is necessary to use a compound having one or more ethylenically unsaturated groups in the molecule (photosensitive Photosensitive monomers), so photosensitive monomers are effective.

熱交聯成分可列舉熱硬化性樹脂等。熱硬化性樹脂,可使用異氰酸酯化合物、封端異氰酸酯化合物、胺基樹脂、馬來醯亞胺化合物、苯并噁嗪樹脂、碳二醯亞胺樹脂、環碳酸酯化合物、多官能環氧化合物、多官能氧雜環丁烷化合物、環硫樹脂等之公知慣用者。此等之中尤佳之熱交聯成分,為1分子中具有複數個環狀醚基及環狀硫醚基之至少任1種(以下略稱為環狀(硫)醚基)的熱交聯成分。此等具有環狀(硫)醚基之熱硬化性成分,市售之種類多,依其構造可賦予多樣的特性。Examples of the thermal crosslinking component include a thermosetting resin. As the thermosetting resin, an isocyanate compound, a blocked isocyanate compound, an amine resin, a maleimine compound, a benzoxazine resin, a carbodiimide resin, a cyclic carbonate compound, a polyfunctional epoxy compound, Polyfunctional oxetane compounds, episulfide resins, and the like are commonly known. Among these, a particularly preferable thermal cross-linking component is thermal cross-linking having at least any one of a plurality of cyclic ether groups and cyclic thioether groups in one molecule (hereinafter referred to as a cyclic (thio) ether group).联 组合。 Composition. These thermosetting components having a cyclic (thio) ether group are commercially available in many varieties, and various properties can be imparted depending on the structure.

分子中具有複數個環狀(硫)醚基之熱硬化性成分,為分子中具有複數個的3、4或5員環之環狀醚基,或環狀硫醚基之任一方或2種基的化合物,例如可列舉分子中具有複數個環氧基之化合物亦即多官能環氧化合物;分子中具有複數個氧雜環丁烷基之化合物亦即多官能氧雜環丁烷化合物;分子中具有複數個硫醚基之化合物亦即環硫樹脂等。The thermosetting component having a plurality of cyclic (thio) ether groups in the molecule is a cyclic ether group having a plurality of 3, 4 or 5 member rings, or any one or two of the cyclic thioether groups For example, a compound having a plurality of epoxy groups in a molecule is a polyfunctional epoxy compound; a compound having a plurality of oxetanyl groups in a molecule is a polyfunctional oxetane compound; a molecule The compound having a plurality of thioether groups is an episulfide resin and the like.

多官能環氧化合物,例如可列舉三菱化學股份有限公司製之jER828、jER834、jER1001、jER1004、DIC股份有限公司製之Epiclon 840、Epiclon 840-S、Epiclon 850、Epiclon 1050、Epiclon 2055、新日鐵住金股份有限公司製之Epotohto YD-011、YD-013、YD-127、YD-128、陶氏化學公司製之D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、住友化學工業股份有限公司製之Sumiepoxy ESA-011、ESA-014、ELA-115、ELA-128、旭化成工業股份有限公司製之A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(均為商品名)之雙酚A型環氧樹脂;三菱化學股份有限公司製之jERYL903、DIC股份有限公司製之Epiclon 152、Epiclon 165、新日鐵住金股份有限公司製之Epotohto YDB-400、YDB-500、陶氏化學公司製之D.E.R.542、住友化學工業股份有限公司製之Sumiepoxy ESB-400、ESB-700、旭化成工業股份有限公司製之A.E.R.711、A.E.R.714等(均為商品名)之溴化環氧樹脂;三菱化學股份有限公司製之jER152、jER154、陶氏化學公司製之D.E.N.431、D.E.N.438、DIC股份有限公司製之Epiclon N-730、Epiclon N-770、Epiclon N-865、新日鐵住金股份有限公司製之Epotohto YDCN-701、YDCN-704、日本化藥股份有限公司製之EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306、NC-3000H、住友化學工業股份有限公司製之Sumiepoxy ESCN-195X、ESCN-220、旭化成工業股份有限公司製之A.E.R.ECN-235、ECN-299等(均為商品名)之酚醛清漆型環氧樹脂;DIC股份有限公司製之Epiclon 830、三菱化學股份有限公司製jER807、新日鐵住金股份有限公司製之Epotohto YDF-170、YDF-175、YDF-2004等(均為商品名)之雙酚F型環氧樹脂;新日鐵住金股份有限公司製之Epotohto ST-2004、ST-2007、ST-3000(商品名)等之氫化雙酚A型環氧樹脂;三菱化學股份有限公司製之jER604、新日鐵住金股份有限公司製之Epotohto YH-434、住友化學工業股份有限公司製之Sumiepoxy ELM-120等(均為商品名)之縮水甘油胺型環氧樹脂;Daicel股份有限公司製之Celloxide 2021等(商品名)之脂環式環氧樹脂;三菱化學股份有限公司製之YL-933、陶氏化學公司製之T.E.N.、EPPN-501、EPPN-502等(均為商品名)之三羥基苯基甲烷型環氧樹脂;三菱化學股份有限公司製之YL-6056、YX-4000、YL-6121(均為商品名)等之聯二甲酚型或聯酚型環氧樹脂或該等之混合物;日本化藥股份有限公司製EBPS-200、旭電化工業股份有限公司製EPX-30、DIC股份有限公司製之EXA-1514(商品名)等之雙酚S型環氧樹脂;三菱化學股份有限公司製之jER157S(商品名)等之雙酚A酚醛清漆型環氧樹脂;三菱化學股份有限公司製之jERYL-931等(商品名)之四苯酚基乙烷型環氧樹脂;日產化學工業股份有限公司製之TEPIC等(商品名)之雜環式環氧樹脂;日本油脂股份有限公司製Blemmer DGT等之鄰苯二甲酸二縮水甘油酯樹脂;新日鐵住金股份有限公司製ZX-1063等之四縮水甘油基二甲酚乙烷樹脂;新日鐵化學股份有限公司製ESN-190、ESN-360、DIC股份有限公司製HP-4032、EXA-4750、EXA-4700等之含有萘基之環氧樹脂;DIC股份有限公司製HP-7200、HP-7200H等之具有二環戊二烯骨架之環氧樹脂、EXA-4816、EXA-4822、EXA-4850系列之柔軟強韌環氧樹脂;日本油脂股份有限公司製CP-50S、CP-50M等之甲基丙烯酸縮水甘油酯共聚合系環氧樹脂;尚有環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯之共聚合環氧樹脂等,但不限於此等。此等之環氧樹脂,可單獨或組合2種以上使用。Examples of the polyfunctional epoxy compound include jER828, jER834, jER1001, jER1004 manufactured by Mitsubishi Chemical Corporation, Epiclon 840, Epiclon 840-S, Epiclon 850, Epiclon 1050, Epiclon 2055, and Nippon Steel Co., Ltd. Epotohto YD-011, YD-013, YD-127, YD-128, manufactured by Sumitomo Corporation, DER317, DER331, DER661, DER664, manufactured by The Dow Chemical Company, Sumiepoxy, manufactured by Sumitomo Chemical Industry Co., Ltd. ESA-011, ESA-014, ELA-115, ELA-128, AER330, AER331, AER661, AER664, etc. (all trade names) made by Asahi Kasei Industrial Co., Ltd. JERYL903 manufactured by Mitsubishi Chemical Corporation, Epiclon 152, Epiclon 165 manufactured by DIC Corporation, Epotohto YDB-400, YDB-500 manufactured by Nippon Steel & Sumitomo Corporation, DER542 manufactured by Dow Chemical Co., Ltd., Sumitomo Chemical Brominated epoxy resins such as Sumiepoxy ESB-400, ESB-700 manufactured by Industrial Co., Ltd., and AER711, AER714, etc. (all trade names) manufactured by Asahi Kasei Industrial Co., Ltd .; Mitsubishi Chemical Corporation has Limited by jER152, jER154, Dow Chemical Co., DEN431, DEN438, DIC Corporation Epiclon N-730, Epiclon N-770, Epiclon N-865, Nippon Steel & Sumitomo Corporation Epotohto YDCN-701, YDCN-704, EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306, NC-3000H, Sumiepoxy manufactured by Sumitomo Chemical Industry Co., Ltd. ESCN-195X, ESCN-220, ARECEN-235, ECN-299, etc. (all trade names) manufactured by Asahi Kasei Industrial Co., Ltd. (both trade names) novolac-type epoxy resins; Epiclon 830 manufactured by DIC Corporation, Mitsubishi Chemical Corporation Bisphenol F-type epoxy resin manufactured by Nippon Steel & Sumitomo Metal Co., Ltd., and Epotohto YDF-170, YDF-175, YDF-2004 (all trade names) manufactured by Nippon Steel & Sumitomo Metal Co., Ltd .; manufactured by Nippon Steel & Sumitomo Metal Co., Ltd. Epotohto ST-2004, ST-2007, ST-3000 (brand name) and other hydrogenated bisphenol A epoxy resins; jER604 manufactured by Mitsubishi Chemical Corporation; Epotohto YH-434 manufactured by Nippon Steel & Sumikin Corporation Sumiepo, manufactured by Sumitomo Chemical Industries, Ltd. Glycidylamine type epoxy resins such as xy ELM-120, etc. (both trade names); alicyclic epoxy resins, such as Celloxide 2021, etc., manufactured by Daicel Corporation; YL- manufactured by Mitsubishi Chemical Corporation 933, TEN, EPPN-501, EPPN-502, etc. (all trade names) made of Dow Chemical Company, trihydroxyphenylmethane type epoxy resin; YL-6056, YX-4000, Mitsubishi Chemical Corporation, YL-6121 (both trade names) bixylenol-type or biphenol-type epoxy resins or mixtures thereof; EBPS-200 manufactured by Nippon Kayaku Co., Ltd. and EPX-30 manufactured by Asahi Kasei Kogyo Co., Ltd. And bisphenol S epoxy resins such as EXA-1514 (trade name) manufactured by DIC Corporation; bisphenol A novolac epoxy resins such as jER157S (trade name) manufactured by Mitsubishi Chemical Corporation; Mitsubishi Chemical Tetraphenol-based ethane type epoxy resins such as jERYL-931 (trade name) manufactured by a joint-stock company; Heterocyclic epoxy resins such as TEPIC (trade name) manufactured by Nissan Chemical Industry Co., Ltd .; Japan Grease Co., Ltd. Diglycidyl phthalate resins such as Blemmer DGT made by the company; Tetraglycidyl xylenol ethane resins such as ZX-1063 manufactured by Nippon Steel & Sumitomo Metal Co., Ltd .; ESN-190, ESN-360, HP-4032, EXA, manufactured by DIC Co., Ltd. -4750, EXA-4700 and other naphthyl-containing epoxy resins; HP-7200, HP-7200H and other dicyclopentadiene skeleton epoxy resins manufactured by DIC Corporation, EXA-4816, EXA-4822, EXA-4850 series of soft and strong epoxy resin; CP-50S, CP-50M and other glycidyl methacrylate copolymer epoxy resins made by Japan Oil Co., Ltd .; Cyclohexylmaleimide and Copolymerized epoxy resin and the like of glycidyl methacrylate, but are not limited thereto. These epoxy resins can be used alone or in combination of two or more.

多官能氧雜環丁烷化合物,可列舉雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]苯、丙烯酸(3-甲基-3-氧雜環丁烷基)甲酯、丙烯酸(3-乙基-3-氧雜環丁烷基)甲酯、甲基丙烯酸(3-甲基-3-氧雜環丁烷基)甲酯、甲基丙烯酸(3-乙基-3-氧雜環丁烷基)甲酯或該等之寡聚物或共聚物等之多官能氧雜環丁烷類,尚有氧雜環丁烷醇與酚醛清漆樹脂、聚(p-羥基苯乙烯)、Cardo型雙酚類、杯芳烴類、杯間苯二酚芳烴類或倍半矽氧烷等之具有羥基之樹脂的醚化物等。其他,亦可列舉具有氧雜環丁烷環之不飽和單體與(甲基)丙烯酸烷酯之共聚物等。Examples of the polyfunctional oxetane compound include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, and bis [(3-ethyl-3-oxetane Alkylmethoxy) methyl] ether, 1,4-bis [(3-methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl Methyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) acrylate, methyl (3-ethyl-3-oxetan) Butyl) methyl ester, (3-methyl-3-oxetanyl) methacrylate, (3-ethyl-3-oxetanyl) methacrylate, or the Polyfunctional oxetanes such as oligomers or copolymers, oxetanol and novolac resins, poly (p-hydroxystyrene), Cardo-type bisphenols, calixarene , Ethers of resins having a hydroxyl group, such as calorcinol aromatics or silsesquioxane. Other examples include copolymers of unsaturated monomers having an oxetane ring and alkyl (meth) acrylates.

環硫樹脂例如可列舉三菱化學股份有限公司製之YL7000(雙酚A型環硫樹脂)等。又,亦可使用利用同樣的合成方法,將酚醛清漆型環氧樹脂之環氧基的氧原子取代為硫原子之環硫樹脂等。Examples of the episulfide resin include YL7000 (bisphenol A episulfide resin) manufactured by Mitsubishi Chemical Corporation. In addition, an episulfide resin or the like in which an oxygen atom of an epoxy group of a novolak epoxy resin is replaced with a sulfur atom by a similar synthetic method can also be used.

當於組成物中含有分子中具有複數個環狀(硫)醚基之熱硬化性成分時,分子中具有複數個環狀(硫)醚基之熱硬化性成分的摻合量,以固體成分換算,相對於含有羧基之樹脂之羧基1當量而言,較佳為0.3~2.5當量、更佳為0.5~2.0當量之範圍。藉由使分子中具有複數個環狀(硫)醚基之熱硬化性成分的摻合量成為0.3當量以上,於硬化被膜中不殘存羧基,會提高耐熱性、耐鹼性、電絕緣性等。又,藉由成為2.5當量以下,於乾燥塗膜中不殘存低分子量之環狀(硫)醚基,會提高硬化被膜之強度等。When the composition contains a thermosetting component having a plurality of cyclic (thio) ether groups in the molecule, the blending amount of the thermosetting component having a plurality of cyclic (thio) ether groups in the molecule is a solid component The conversion is preferably in the range of 0.3 to 2.5 equivalents, and more preferably in the range of 0.5 to 2.0 equivalents with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin. By setting the blending amount of the thermosetting component having a plurality of cyclic (thio) ether groups in the molecule to 0.3 equivalent or more, the carboxyl group is not left in the hardened film, and heat resistance, alkali resistance, and electrical insulation properties are improved. . In addition, when the molecular weight is 2.5 equivalents or less, a cyclic (thio) ether group having a low molecular weight does not remain in the dry coating film, and the strength of the cured film is improved.

使用分子中具有複數個環狀(硫)醚基之熱硬化性成分時,較佳為摻合熱硬化觸媒。如此之熱硬化觸媒,例如可列舉咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等之咪唑衍生物;二氰二胺、苄基二甲胺、4-(二甲基胺基)-N,N-二甲基苄胺、4-甲氧基-N,N-二甲基苄胺、4-甲基-N,N-二甲基苄胺等之胺化合物;己二酸二醯肼、癸二酸二醯肼等之肼化合物;三苯基膦等之磷化合物等。又,市售者例如可列舉四國化成工業股份有限公司製之2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(均為咪唑系化合物之商品名)、San-Apro股份有限公司製之U-CAT(註冊商標)3503N、U-CAT3502T(均為二甲胺之封端異氰酸酯化合物之商品名)、DBU、DBN、U-CATSA102、U-CAT5002(均為二環式脒化合物及其鹽)等。不特別限制於此等,只要係環氧樹脂或氧雜環丁烷化合物之熱硬化觸媒,或會促進環氧基及/或氧雜環丁烷基與羧基之反應者即可,可單獨或混合2種以上使用亦可。又,亦可使用胍胺、乙醯胍胺、苯并胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪/異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪/異三聚氰酸加成物等之S-三嗪衍生物,較佳為將此等亦作為密合性賦予劑而發揮功能之化合物與熱硬化觸媒合併使用。When a thermosetting component having a plurality of cyclic (thio) ether groups in a molecule is used, a thermosetting catalyst is preferably blended. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, and 1-cyanide. Imidazole derivatives such as ethyl-2-phenylimidazole, 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamine, benzyldimethylamine, 4- (Dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N-dimethylbenzylamine, 4-methyl-N, N-dimethylbenzylamine, etc. Amine compounds; hydrazine compounds such as dihydrazine adipate, dihydrazine sebacate and the like; phosphorus compounds such as triphenylphosphine and the like. Examples of marketers include 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all are trade names of imidazole compounds) manufactured by Shikoku Chemical Industry Co., Ltd., and U-made by San-Apro Co., Ltd. -CAT (registered trademark) 3503N, U-CAT3502T (both trade names of dimethylamine-blocked isocyanate compounds), DBU, DBN, U-CATSA102, U-CAT5002 (both bicyclic hydrazone compounds and their salts) Wait. It is not particularly limited as long as it is a thermosetting catalyst of an epoxy resin or an oxetane compound, or one that can promote the reaction of an epoxy group and / or an oxetanyl group with a carboxyl group, may be alone Alternatively, two or more kinds may be used in combination. In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloxyethyl-S-triazine, and 2-vinyl-2 can also be used. 2,4-diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine / isotricyanic acid adduct, 2,4-diamino-6-formaldehyde S-triazine derivatives such as propylene ethoxyethyl-S-triazine / isocyanuric acid adducts, etc., are preferably compounds and heat which also function as adhesiveness imparting agents. The hardening catalyst is used in combination.

於組成物中含有分子中具有複數個環狀(硫)醚基之熱硬化性成分時,熱硬化觸媒之摻合量,以固體成分換算,相對於分子中具有複數個環狀(硫)醚基之熱硬化性成分100質量份而言,較佳為0.1~20質量份、更佳為0.5~15.0質量份。When the composition contains a thermosetting component having a plurality of cyclic (thio) ether groups in the molecule, the blending amount of the thermosetting catalyst is calculated based on the solid content, relative to the molecule having a plurality of cyclic (sulfur) groups. The amount of the thermosetting component of the ether group is preferably 0.1 to 20 parts by mass, and more preferably 0.5 to 15.0 parts by mass.

胺基樹脂可列舉三聚氰胺衍生物、苯并胍胺衍生物等之胺基樹脂。例如有羥甲基三聚氰胺化合物、羥甲基苯并胍胺化合物、羥甲基乙炔脲化合物及羥甲基尿素化合物等。進一步地,烷氧基甲基化三聚氰胺化合物、烷氧基甲基化苯并胍胺化合物、烷氧基甲基化乙炔脲化合物及烷氧基甲基化尿素化合物,可藉由將各自之羥甲基三聚氰胺化合物、羥甲基苯并胍胺化合物、羥甲基乙炔脲化合物及羥甲基尿素化合物之羥甲基轉換為烷氧基甲基而得到。該烷氧基甲基之種類並無特殊限定,例如可為甲氧基甲基、乙氧基甲基、丙氧基甲基、丁氧基甲基等。特佳為對人體或環境溫和之福馬林濃度為0.2%以下的三聚氰胺衍生物。Examples of the amine-based resin include amine-based resins such as melamine derivatives and benzoguanamine derivatives. For example, there are a methylol melamine compound, a methylol benzoguanamine compound, a methylol acetylene urea compound, and a methylol urea compound. Further, the alkoxymethylated melamine compound, the alkoxymethylated benzoguanamine compound, the alkoxymethylated acetylene urea compound, and the alkoxymethylated urea compound can be obtained by changing the respective hydroxyl groups. A methyl melamine compound, a methylol benzoguanamine compound, a methylol acetylene urea compound, and a methylol urea compound are converted into an alkoxymethyl group. The kind of the alkoxymethyl group is not particularly limited, and examples thereof include methoxymethyl, ethoxymethyl, propoxymethyl, and butoxymethyl. Particularly preferred is a melamine derivative that is mild to humans or the environment with a concentration of formalin of 0.2% or less.

胺基樹脂之市售品,例如可列舉Cymel 300、同301、同303、同370、同325、同327、同701、同266、同267、同238、同1141、同272、同202、同1156、同1158、同1123、同1170、同1174、同UFR65、同300(以上,三井Cyanamid股份有限公司製)、Nikalac Mx-750、同Mx-032、同Mx-270、同Mx-280、同Mx-290、同Mx-706、同Mx-708、同Mx-40、同Mx-31、同Ms-11、同Mw-30、同Mw-30HM、同Mw-390、同Mw-100LM、同Mw-750LM、(以上,三和化學股份有限公司製)等。Commercial products of amine resins include Cymel 300, same 301, same 303, same 370, same 325, same 327, same 701, same 266, same 267, same 238, same 1141, same 272, and 202, Same as 1156, Same as 1158, Same as 1123, Same as 1170, Same as 1174, Same as UFR65, Same as 300 (above, made by Mitsui Cyanamid Co., Ltd.), Nikalac Mx-750, Same as Mx-032, Same as Mx-270, Same as Mx-280 , Same Mx-290, same Mx-706, same Mx-708, same Mx-40, same Mx-31, same Ms-11, same Mw-30, same Mw-30HM, same Mw-390, same Mw-100LM , Same as Mw-750LM, (above, made by Sanwa Chemical Co., Ltd.) and so on.

異氰酸酯化合物,可使用分子中具有複數個異氰酸酯基之聚異氰酸酯化合物。聚異氰酸酯化合物例如可使用芳香族聚異氰酸酯、脂肪族聚異氰酸酯或脂環式聚異氰酸酯。芳香族聚異氰酸酯之具體例子,可列舉4,4’-二苯基甲烷二異氰酸酯、2,4-甲苯二異氰酸酯、2,6-甲苯二異氰酸酯、萘-1,5-二異氰酸酯、o-伸二甲苯二異氰酸酯、m-伸二甲苯二異氰酸酯及2,4-甲苯二聚物。脂肪族聚異氰酸酯之具體例子,可列舉四亞甲基二異氰酸酯、六亞甲基二異氰酸酯、亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、4,4-亞甲基雙(環己基異氰酸酯)及異佛酮二異氰酸酯。脂環式聚異氰酸酯之具體例子可列舉雙環庚烷三異氰酸酯。以及可列舉先前列舉之異氰酸酯化合物的加合物體、縮二脲體及異三聚氰酸酯體。As the isocyanate compound, a polyisocyanate compound having a plurality of isocyanate groups in the molecule can be used. As the polyisocyanate compound, for example, an aromatic polyisocyanate, an aliphatic polyisocyanate, or an alicyclic polyisocyanate can be used. Specific examples of the aromatic polyisocyanate include 4,4'-diphenylmethane diisocyanate, 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, naphthalene-1,5-diisocyanate, and o-diene Toluene diisocyanate, m-xylene diisocyanate and 2,4-toluene dimer. Specific examples of the aliphatic polyisocyanate include tetramethylene diisocyanate, hexamethylene diisocyanate, methylene diisocyanate, trimethylhexamethylene diisocyanate, and 4,4-methylenebis (cyclo Hexyl isocyanate) and isophorone diisocyanate. Specific examples of the alicyclic polyisocyanate include dicycloheptane triisocyanate. Examples of the adducts, biuret and isotricyanate of the isocyanate compounds mentioned above are also listed.

封端異氰酸酯化合物中所含有的封端化異氰酸酯基,為異氰酸酯基經與封端劑之反應而被保護,一時地不活化之基。當加熱至特定溫度時,該封端劑解離而生成異氰酸酯基。The blocked isocyanate group contained in the blocked isocyanate compound is a group in which the isocyanate group is protected by a reaction with the blocking agent and is not activated for a while. When heated to a specific temperature, the blocking agent dissociates to form an isocyanate group.

封端異氰酸酯化合物,可使用異氰酸酯化合物與異氰酸酯封端劑之加成反應生成物。可與封端劑反應之異氰酸酯化合物,可列舉異三聚氰酸酯型、縮二脲型、加合物型等。用以合成封端異氰酸酯化合物之異氰酸酯化合物,例如可列舉芳香族聚異氰酸酯、脂肪族聚異氰酸酯或脂環式聚異氰酸酯。芳香族聚異氰酸酯、脂肪族聚異氰酸酯、脂環式聚異氰酸酯之具體例子,可列舉先前所例示之化合物。As the blocked isocyanate compound, an addition reaction product of an isocyanate compound and an isocyanate blocking agent can be used. Examples of the isocyanate compound capable of reacting with the blocking agent include isocyanurate type, biuret type, and adduct type. Examples of the isocyanate compound used to synthesize the blocked isocyanate compound include aromatic polyisocyanate, aliphatic polyisocyanate, and alicyclic polyisocyanate. Specific examples of the aromatic polyisocyanate, aliphatic polyisocyanate, and alicyclic polyisocyanate include the compounds exemplified above.

異氰酸酯封端劑例如可列舉酚、甲酚、二甲酚、氯酚及乙基酚等之酚系封端劑;ε-己內醯胺、δ-戊內醯胺、γ-丁內醯胺及β-丙內醯胺等之內醯胺系封端劑;乙醯乙酸乙酯及乙醯丙酮等之活性亞甲基系封端劑;甲醇、乙醇、丙醇、丁醇、戊醇、乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丁基醚、二乙二醇單甲基醚、丙二醇單甲基醚、苄基醚、甘醇酸甲酯、甘醇酸丁酯、二丙酮醇、乳酸甲酯及乳酸乙酯等之醇系封端劑;甲醛肟、乙醛肟、丙酮肟、甲基乙基酮肟、二乙醯基單肟、環己烷肟等之肟系封端劑;丁基硫醇、己基硫醇、t-丁基硫醇、硫酚、甲基硫酚、乙基硫酚等之硫醇系封端劑;乙酸醯胺、苄醯胺等之酸醯胺系封端劑;琥珀酸醯亞胺及馬來酸醯亞胺等之醯亞胺系封端劑;二甲苯胺、苯胺、丁胺、二丁胺等之胺系封端劑;咪唑、2-乙基咪唑等之咪唑系封端劑;亞甲亞胺及伸丙亞胺等之亞胺系封端劑等。Examples of the isocyanate blocking agent include phenol-based blocking agents such as phenol, cresol, xylenol, chlorophenol, and ethylphenol; ε-caprolactam, δ-valprolactam, and γ-butyrolactam And β-propiolactam endogenous capping agents; active methylene-based end capping agents such as ethyl acetate and ethyl acetone; methanol, ethanol, propanol, butanol, pentanol, Ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, propylene glycol monomethyl ether, benzyl ether, methyl glycolate, ethylene glycol Alcohol-based capping agents such as butyl alkylate, diacetone alcohol, methyl lactate, and ethyl lactate; formaldehyde oxime, acetaldehyde oxime, acetone oxime, methyl ethyl ketoxime, diethylfluorenyl monooxime, cyclohexyl Oxime-based capping agents such as alkoxime; thiol-based capping agents such as butyl mercaptan, hexyl mercaptan, t-butyl mercaptan, thiophenol, methyl mercaptan, and ethyl mercaptan; acetamide Acid benzylamine-based end-capping agents such as benzamidine; acetonitrile succinate and maleimide-based imine based terminals; dimethyltoluidine, aniline, butylamine, dibutylamine, etc. Amine-based blocking agent; imidazole, 2-ethylimidazole, etc. Azole-based capping agent; imine-based capping agent such as methyleneimine and propyleneimine.

封端異氰酸酯化合物亦可為市售者,例如可列舉Sumidur BL-3175、BL-4165、BL-1100、BL-1265、Desmodur TPLS-2957、TPLS-2062、TPLS-2078、TPLS-2117、Desmotherm 2170、Desmotherm 2265(以上,住友拜耳胺基甲酸酯股份有限公司製,商品名)、Coronate 2512、Coronate 2513、Coronate 2520(以上,東曹股份有限公司公司製,商品名)、B-830、B-815、B-846、B-870、B-874、B-882(以上,三井武田化學股份有限公司製,商品名)、TPA-B80E、17B-60PX、E402-B80T(以上,旭化成化學股份有限公司製,商品名)等。再者,Sumidur BL-3175、BL-4265係使用甲基乙基肟作為封端劑所得者。The blocked isocyanate compound may also be commercially available, and examples thereof include Sumidur BL-3175, BL-4165, BL-1100, BL-1265, Desmodur TPLS-2957, TPLS-2062, TPLS-2078, TPLS-2117, and Desmotherm 2170. Desmotherm 2265 (above, manufactured by Sumitomo Bayer Carbamate Co., Ltd., trade name), Coronate 2512, Coronate 2513, Coronate 2520 (above, manufactured by Tosoh Corporation, trade name), B-830, B -815, B-846, B-870, B-874, B-882 (above, manufactured by Mitsui Takeda Chemical Co., Ltd., trade name), TPA-B80E, 17B-60PX, E402-B80T (above, Asahi Kasei Chemicals Co., Ltd. Limited company, trade name) and so on. In addition, Sumidur BL-3175 and BL-4265 are obtained by using methyl ethyl oxime as a capping agent.

為了促進羥基或羧基與異氰酸酯基之硬化反應,感光性樹脂組成物中,亦可摻合胺基甲酸酯化觸媒。胺基甲酸酯化觸媒,較佳為使用由錫系觸媒、金屬氯化物、金屬乙醯丙酮鹽、金屬硫酸鹽、胺化合物及胺鹽之至少任1種中選擇的胺基甲酸酯化觸媒。In order to promote the hardening reaction between the hydroxyl group or the carboxyl group and the isocyanate group, a urethane-forming catalyst may be added to the photosensitive resin composition. The urethane catalyst is preferably an amino formic acid selected from at least one of a tin-based catalyst, a metal chloride, a metal acetone acetone salt, a metal sulfate salt, an amine compound, and an amine salt. Esterification catalyst.

錫系觸媒,例如可列舉辛酸亞錫、二月桂酸二丁基錫等之有機錫化合物、無機錫化合物等。又,金屬氯化物,可列舉選自由Cr、Mn、Co、Ni、Fe、Cu及Al所成之群的金屬之氯化物,例如氯化鈷(III)、氯化鎳(II)、氯化鐵(III)等。又,金屬乙醯丙酮鹽,可列舉選自由Cr、Mn、Co、Ni、Fe、Cu及Al所成之群的金屬之乙醯丙酮鹽,例如乙醯丙酮鈷、乙醯丙酮鎳、乙醯丙酮鐵等。進一步地,金屬硫酸鹽,可列舉選自由Cr、Mn、Co、Ni、Fe、Cu及Al所成之群的金屬之硫酸鹽,例如硫酸銅等。Examples of the tin-based catalyst include organic tin compounds such as stannous octoate and dibutyltin dilaurate, and inorganic tin compounds. Examples of the metal chloride include chlorides of metals selected from the group consisting of Cr, Mn, Co, Ni, Fe, Cu, and Al, and examples thereof include cobalt (III) chloride, nickel (II) chloride, and chloride. Iron (III), etc. Examples of the metal acetoacetone salt include acetoacetone salts of metals selected from the group consisting of Cr, Mn, Co, Ni, Fe, Cu, and Al, such as cobalt acetoacetone, nickel acetoacetone, and acetone. Iron acetone etc. Furthermore, examples of the metal sulfate include sulfates of metals selected from the group consisting of Cr, Mn, Co, Ni, Fe, Cu, and Al, such as copper sulfate.

胺化合物,例如可列舉以往公知之三乙二胺、N,N,N’,N’-四甲基-1,6-己烷二胺、雙(2-二甲基胺基乙基)醚、N,N,N’,N”,N”-五甲基二乙三胺、N-甲基嗎啉、N-乙基嗎啉、N,N-二甲基乙醇胺、二嗎啉基二乙基醚、N-甲基咪唑、二甲基胺基吡啶、三嗪、N’-(2-羥基乙基)-N,N,N’-三甲基ー雙(2-胺基乙基)醚、N,N-二甲基己醇胺、N,N-二甲基胺基乙氧基乙醇、N,N,N’-三甲基-N’-(2-羥基乙基)乙二胺、N-(2-羥基乙基)-N,N’,N”,N”-四甲基二乙三胺、N-(2-羥基丙基)-N,N’,N”,N”-四甲基二乙三胺、N,N,N’-三甲基-N’-(2-羥基乙基)丙二胺、N-甲基-N’-(2-羥基乙基)哌嗪、雙(N,N-二甲基胺基丙基)胺、雙(N,N-二甲基胺基丙基)異丙醇胺、2-胺基奎寧環、3-胺基奎寧環、4-胺基奎寧環、2-奎寧醇、3-奎寧醇、4-奎寧醇、1-(2’-羥基丙基)咪唑、1-(2’-羥基丙基)-2-甲基咪唑、1-(2’-羥基乙基)咪唑、1-(2’-羥基乙基)-2-甲基咪唑、1-(2’-羥基丙基)-2-甲基咪唑、1-(3’-胺基丙基)咪唑、1-(3’-胺基丙基)-2-甲基咪唑、1-(3’-羥基丙基)咪唑、1-(3’-羥基丙基)-2-甲基咪唑、N,N-二甲基胺基丙基-N’-(2-羥基乙基)胺、N,N-二甲基胺基丙基-N’,N’-雙(2-羥基乙基)胺、N,N-二甲基胺基丙基-N’,N’-雙(2-羥基丙基)胺、N,N-二甲基胺基乙基-N’,N’-雙(2-羥基乙基)胺、N,N-二甲基胺基乙基-N’,N’-雙(2-羥基丙基)胺、三聚氰胺及苯并胍胺之任意至少1種等。Examples of the amine compound include conventionally known triethylenediamine, N, N, N ', N'-tetramethyl-1,6-hexanediamine, and bis (2-dimethylaminoethyl) ether. , N, N, N ', N ", N" -pentamethyldiethylenetriamine, N-methylmorpholine, N-ethylmorpholine, N, N-dimethylethanolamine, dimorpholinyl di Ethyl ether, N-methylimidazole, dimethylaminopyridine, triazine, N '-(2-hydroxyethyl) -N, N, N'-trimethylphosphonium bis (2-aminoethyl) ) Ether, N, N-dimethylhexanolamine, N, N-dimethylaminoethoxyethanol, N, N, N'-trimethyl-N '-(2-hydroxyethyl) ethyl Diamine, N- (2-hydroxyethyl) -N, N ', N ", N" -tetramethyldiethylenetriamine, N- (2-hydroxypropyl) -N, N', N ", N "-tetramethyldiethylenetriamine, N, N, N'-trimethyl-N '-(2-hydroxyethyl) propanediamine, N-methyl-N'-(2-hydroxyethyl ) Piperazine, bis (N, N-dimethylaminopropyl) amine, bis (N, N-dimethylaminopropyl) isopropanolamine, 2-aminoquinine ring, 3-amine Quinine ring, 4-aminoquinine ring, 2-quinol, 3-quinol, 4-quinol, 1- (2'-hydroxypropyl) imidazole, 1- (2'-hydroxy Propyl) -2-methylimidazole, 1- (2'-hydroxyethyl) imidazole, 1- (2'- Ethyl) -2-methylimidazole, 1- (2'-hydroxypropyl) -2-methylimidazole, 1- (3'-aminopropyl) imidazole, 1- (3'-aminopropyl) ) -2-methylimidazole, 1- (3'-hydroxypropyl) imidazole, 1- (3'-hydroxypropyl) -2-methylimidazole, N, N-dimethylaminopropyl- N '-(2-hydroxyethyl) amine, N, N-dimethylaminopropyl-N', N'-bis (2-hydroxyethyl) amine, N, N-dimethylaminopropyl -N ', N'-bis (2-hydroxypropyl) amine, N, N-dimethylaminoethyl-N', N'-bis (2-hydroxyethyl) amine, N, N- At least one of dimethylaminoethyl-N ', N'-bis (2-hydroxypropyl) amine, melamine, and benzoguanamine, and the like.

胺鹽例如可列舉DBU(1,8-二氮雜-雙環[5.4.0]十一烯-7)等之有機酸鹽系之胺鹽等。Examples of the amine salt include organic acid salt-based amine salts such as DBU (1,8-diaza-bicyclo [5.4.0] undecene-7).

[填料]   填料可使用公知慣用之無機或有機填料,特佳使用硫酸鋇、球狀二氧化矽、氧化鈦、新堡矽土粒子及滑石。又,亦可以賦予難燃性為目的,使用氫氧化鋁、氫氧化鎂、水鋁石等。進一步,亦可使用於具有1個以上之乙烯性不飽和基的化合物或前述多官能環氧樹脂中分散有奈米二氧化矽的Hanse-Chemie公司製之NANOCRYL(商品名) XP 0396、XP 0596、XP 0733、XP 0746、XP 0765、XP 0768、XP 0953、XP 0954、XP 1045(均為製品等級名),或Hanse-Chemie公司製之NANOPOX(商品名) XP 0516、XP 0525、XP 0314(均為製品等級名)。此等可單獨或摻合2種以上。藉由含有填料,可提高所得硬化物之物理強度等。[Filler] As the filler, well-known and commonly used inorganic or organic fillers can be used. Particularly preferred are barium sulfate, spherical silica, titanium oxide, Newcastle silica particles and talc. Further, for the purpose of imparting flame resistance, aluminum hydroxide, magnesium hydroxide, gibbsite, or the like may be used. Furthermore, it can also be used in a compound of one or more ethylenically unsaturated groups, or NANOCRYL (trade name) manufactured by Hanse-Chemie Co., Ltd., where nano silica is dispersed in the polyfunctional epoxy resin. XP 0396, XP 0596 , XP 0733, XP 0746, XP 0765, XP 0768, XP 0953, XP 0954, XP 1045 (all product grade names), or NANOPOX (trade name) manufactured by Hanse-Chemie Corporation XP 0516, XP 0525, XP 0314 ( (Both product grade names). These may be used alone or in combination of two or more. By including a filler, the physical strength etc. of the hardened | cured material obtained can be improved.

當組成物中包含含有羧基之樹脂時,填料之摻合量,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為500質量份以下、更佳為0.1~300質量份、特佳為0.1~150質量份。填料之摻合量為500質量份以下時,光硬化性熱硬化性樹脂組成物之黏度不會變得過高,印刷性良好,硬化物不易變脆。When the resin containing a carboxyl group is contained in the composition, the blending amount of the filler is, in terms of solid content, preferably 500 parts by mass or less, and more preferably 0.1 to 300 parts by mass relative to 100 parts by mass of the resin containing a carboxyl group. And particularly good for 0.1 to 150 parts by mass. When the blending amount of the filler is 500 parts by mass or less, the viscosity of the photocurable thermosetting resin composition does not become too high, the printability is good, and the cured product is not easily brittle.

[光聚合起始劑]   本發明中,用以使上述之含有羧基之感光性樹脂光聚合的光聚合起始劑,可使用公知者,其中尤以具有肟酯基之肟酯系光聚合起始劑、α-胺基苯乙酮系光聚合起始劑、醯基膦氧化物系光聚合起始劑為佳。光聚合起始劑可1種單獨使用、亦可合併使用2種以上。[Photopolymerization initiator] 中 In the present invention, known photopolymerization initiators for photopolymerizing the above-mentioned photosensitive resin containing a carboxyl group can be used. Among them, an oxime ester system having an oxime ester group is particularly used for photopolymerization. Initiators, α-aminoacetophenone-based photopolymerization initiators, and fluorenylphosphine oxide-based photopolymerization initiators are preferred. The photopolymerization initiator may be used singly or in combination of two or more kinds.

肟酯系光聚合起始劑,就市售品而言,可列舉BASF JAPAN公司製之CGI-325、Irgacure (註冊商標)OXE01、Irgacure OXE02、ADEKA股份有限公司製N-1919、Adeka Arkls(註冊商標)NCI-831等。The commercially available oxime ester-based photopolymerization initiators include CGI-325, Irgacure (registered trademark) OXE01, Irgacure OXE02, ADEKA Corporation N-1919, Adeka Arkls (registered trademark) manufactured by BASF JAPAN. Trademark) NCI-831, etc.

又,亦可適合使用分子內具有2個肟酯基之光聚合起始劑,具體而言,可列舉具有下述通式(III)表示之咔唑構造的肟酯化合物。(式中,X1 表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、苯基、苯基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具備碳數1~8之烷基的烷基胺基或二烷基胺基取代)、萘基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具備碳數1~8之烷基的烷基胺基或二烷基胺基取代),Y1 、Z係分別表示氫原子、碳數1~17之烷基、碳數1~8之烷氧基、鹵基、苯基、苯基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具備碳數1~8之烷基的烷基胺基或二烷基胺基取代)、萘基(經碳數1~17之烷基、碳數1~8之烷氧基、胺基、具備碳數1~8之烷基的烷基胺基或二烷基胺基取代)、蒽基、吡啶基、苯并呋喃基、苯并噻吩基,Ar表示碳數1~10之伸烷基、伸乙烯基、伸苯基、伸聯苯基、伸吡啶基、伸萘基、噻吩、伸蒽基、伸噻吩基、伸呋喃基、2,5-吡咯-二基、4,4’-二苯乙烯-二基、4,2’-苯乙烯-二基,n為0或1之整數)。In addition, a photopolymerization initiator having two oxime ester groups in the molecule can be suitably used, and specifically, an oxime ester compound having a carbazole structure represented by the following general formula (III) can be used. (Wherein X 1 represents a hydrogen atom, an alkyl group having 1 to 17 carbon atoms, an alkoxy group having 1 to 8 carbon atoms, a phenyl group, and a phenyl group (via an alkyl group having 1 to 17 carbon atoms and 1 to 8 carbon atoms) Alkoxy, amine, alkylamino or dialkylamino substituted with an alkyl group having 1 to 8 carbon atoms), naphthyl (using an alkyl group having 1 to 17 carbon atoms, 1 to 8 carbon atoms) (Alkoxy, amine, alkylamino or dialkylamino substituted with an alkyl group having 1 to 8 carbons), Y 1 and Z each represent a hydrogen atom, an alkyl group having 1 to 17 carbons, and carbon Alkoxy, halo, phenyl, and phenyl groups with 1 to 8 carbon atoms (via alkyl groups with 1 to 17 carbon atoms, alkoxy groups with 1 to 8 carbon atoms, amine groups, and alkyl groups with 1 to 8 carbon atoms Substituted with alkylamino or dialkylamino), naphthyl (via an alkyl group with 1 to 17 carbon atoms, alkoxy group with 1 to 8 carbon atoms, amine group, and an alkyl group with 1 to 8 carbon atoms Alkylamino or dialkylamino substituted), anthracenyl, pyridyl, benzofuranyl, benzothienyl, Ar represents alkylene, vinylidene, vinylidene, vinylidene Biphenyl, pyridyl, naphthyl, thiophene, anthracenyl, thienyl, furfuryl, 2,5-pyrrole-diyl, 4,4'-stilbyl-diyl, 4,2 '-Styrene-diyl, n is 0 Integers 1).

特佳係上述式中,X1 、Y1 分別為甲基或乙基,Z為甲基或苯基,n為0,Ar為伸苯基、伸萘基、噻吩或伸噻吩基之肟酯系光聚合起始劑。In the above formula, X 1 and Y 1 are methyl or ethyl, Z is methyl or phenyl, n is 0, and Ar is phenylene, naphthyl, thiophene, or thiophene oxime ester. Department of photopolymerization initiator.

較佳之咔唑肟酯化合物,亦可列舉可以下述通式(IV)表示之化合物。As a preferable carbazoxime ester compound, the compound which can be represented by following General formula (IV) is also mentioned.

(式中,R3 表示碳原子數1~4之烷基,或可經硝基、鹵素原子或碳原子數1~4之烷基取代之苯基。   R4 表示碳原子數1~4之烷基、碳原子數1~4之烷氧基,或可經碳原子數1~4之烷基或烷氧基取代之苯基。   R5 表示可經能夠以氧原子或硫原子連結且可經苯基取代之碳原子數1~20之烷基、碳原子數1~4之烷氧基取代的苄基。   R6 表示硝基或X2 -C(=O)-表示之醯基を表す。   X2 表示可經碳原子數1~4之烷基取代之芳基、噻吩基、嗎啉基、苯硫基,或下述式(V)表示之構造)。 (In the formula, R 3 represents an alkyl group having 1 to 4 carbon atoms, or a phenyl group which may be substituted by a nitro group, a halogen atom, or an alkyl group having 1 to 4 carbon atoms. R 4 represents an alkyl group having 1 to 4 carbon atoms. An alkyl group, an alkoxy group having 1 to 4 carbon atoms, or a phenyl group which may be substituted by an alkyl group or alkoxy group having 1 to 4 carbon atoms. R 5 means that it may be bonded via an oxygen atom or a sulfur atom and A benzyl group substituted by a phenyl substituted alkyl group having 1 to 20 carbon atoms and an alkoxy group substituted with 1 to 4 carbon atoms. R 6 represents a nitro group or a fluorenyl group represented by X 2 -C (= O)-. Table IX. X 2 represents an aryl group, a thienyl group, a morpholinyl group, a phenylthio group, or a structure represented by the following formula (V) which may be substituted with an alkyl group having 1 to 4 carbon atoms.

其他,可列舉日本特開2004-359639號公報、日本特開2005-097141號公報、日本特開2005-220097號公報、日本特開2006-160634號公報、日本特開2008-094770號公報、日本特表2008-509967號公報、日本特表2009-040762號公報、日本特開2011-80036號公報記載之咔唑肟酯化合物等。Other examples include Japanese Patent Laid-Open No. 2004-359639, Japanese Patent Laid-Open No. 2005-097141, Japanese Patent Laid-Open No. 2005-220097, Japanese Patent Laid-Open No. 2006-160634, Japanese Patent Laid-Open No. 2008-094770, and Japan The carbazoxime ester compounds described in Japanese Patent Application Publication No. 2008-509967, Japanese Patent Application Publication No. 2009-040762, and Japanese Patent Application Publication No. 2011-80036.

使用肟酯系光聚合起始劑時之摻合量,當組成物中包含含有羧基之樹脂時,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為0.01~5質量份。藉由成為0.01質量份以上,於銅上之光硬化性變得更確實,耐藥品性等之塗膜特性會提高。又,藉由成為5質量份以下,有於塗膜表面之光吸收被抑制,深部之硬化性亦提高的傾向。更佳為相對於含有羧基之樹脂100質量份而言,為0.5~3質量份。When the oxime ester-based photopolymerization initiator is used, when a resin containing a carboxyl group is included in the composition, it is preferably 0.01 to 5 mass based on 100 parts by mass of the resin containing a carboxyl group. Serving. When it is 0.01 parts by mass or more, the photocurability on copper becomes more reliable, and the coating film properties such as chemical resistance are improved. Moreover, when it is 5 parts by mass or less, the light absorption on the surface of the coating film is suppressed, and the hardenability at the deep part tends to be improved. More preferably, it is 0.5-3 mass parts with respect to 100 mass parts of resin containing a carboxyl group.

α-胺基苯乙酮系光聚合起始劑,具體而言,可列舉2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙酮-1、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、2-(二甲基胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等。市售品可列舉IGM Resins公司製Omnirad 907、Omnirad 369、Omnirad 379等。α-aminoacetophenone-based photopolymerization initiator, and specifically, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinylacetone-1, 2- Benzyl-2-dimethylamino-1- (4-morpholinylphenyl) -butane-1-one, 2- (dimethylamino) -2-[(4-methylphenyl ) Methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N, N-dimethylaminoacetophenone, and the like. Examples of commercially available products include Omnirad 907, Omnirad 369, and Omnirad 379 manufactured by IGM Resins.

醯基膦氧化物系光聚合起始劑,具體而言可列舉2,4,6-三甲基苯甲醯基二苯基膦氧化物、雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基-戊基膦氧化物等。市售品可列舉IGM Resins公司製Omnirad TPO、Omnirad 819等。A fluorenylphosphine oxide-based photopolymerization initiator, specifically, 2,4,6-trimethylbenzylfluorenyldiphenylphosphine oxide, and bis (2,4,6-trimethylbenzyl) (Fluorenyl) -phenylphosphine oxide, bis (2,6-dimethoxybenzylidene) -2,4,4-trimethyl-pentylphosphine oxide, and the like. Examples of commercially available products include Omnirad TPO, Omnirad 819, and the like manufactured by IGM Resins.

又,光聚合起始劑亦可適合使用Yueyang Kimoutain Sci-tech Co.,Ltd.製之JMT-784。As the photopolymerization initiator, JMT-784 manufactured by Yueyang Kimoutain Sci-tech Co., Ltd. can also be suitably used.

使用肟酯系光聚合起始劑以外之光聚合起始劑時的摻合量,當組成物中包含含有羧基之樹脂時,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為0.01~15質量份。藉由成為0.01質量份以上,於銅上之光硬化性變得更確實,耐藥品性等之塗膜特性會提高。又,藉由成為15質量份以下,可得到充分之出氣的減低效果,進一步地於硬化被膜表面之光吸收被抑制,深部之硬化性亦提高。更佳為相對於含有羧基之樹脂100質量份而言,為0.5~10質量份。When a photopolymerization initiator other than the oxime ester-based photopolymerization initiator is used, when a resin containing a carboxyl group is contained in the composition, the solid content is converted to 100 parts by mass of the resin containing a carboxyl group. It is preferably 0.01 to 15 parts by mass. When it is 0.01 parts by mass or more, the photocurability on copper becomes more reliable, and the coating film properties such as chemical resistance are improved. Moreover, when it is 15 parts by mass or less, a sufficient effect of reducing outgassing can be obtained, light absorption on the surface of the cured film is further suppressed, and hardenability in the deep portion is also improved. More preferably, it is 0.5-10 mass parts with respect to 100 mass parts of resin containing a carboxyl group.

亦可與上述光聚合起始劑合併地使用光起始助劑或增感劑。光起始助劑或增感劑,可列舉苯偶姻化合物、苯乙酮化合物、蒽醌化合物、噻噸酮化合物、縮酮化合物、二苯甲酮化合物、3級胺化合物及黃嘌呤酮化合物等。此等之化合物亦有可作為光聚合起始劑使用的情況,但較佳為與光聚合起始劑併用來使用。又,光起始助劑或增感劑可1種單獨使用,亦可合併使用2種以上。A photoinitiator or a sensitizer may be used in combination with the photopolymerization initiator. Photoinitiators or sensitizers include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketal compounds, benzophenone compounds, tertiary amine compounds, and xanthone compounds Wait. These compounds may be used as a photopolymerization initiator, but they are preferably used in combination with a photopolymerization initiator. Moreover, a photoinitiator or a sensitizer may be used individually by 1 type, and may use 2 or more types together.

苯偶姻化合物,例如可列舉苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚等。又,苯乙酮化合物,例如可列舉苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮等。又,蒽醌化合物,例如可列舉2-甲基蒽醌、2-乙基蒽醌、2-t-丁基蒽醌、1-氯蒽醌等。又,噻噸酮化合物,例如可列舉2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等。又,縮酮化合物,例如可列舉苯乙酮二甲基縮酮、苄基二甲基縮酮等。進一步地,二苯甲酮化合物,例如可列舉二苯甲酮、4-苯甲醯基二苯基硫醚、4-苯甲醯基-4’-甲基二苯基硫醚、4-苯甲醯基-4’-乙基二苯基硫醚、4-苯甲醯基-4’-丙基二苯基硫醚等。Examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether. Examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, and 1, 1-dichloroacetophenone and the like. Examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, and 1-chloroanthraquinone. Examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone. Wait. Examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal. Further, examples of the benzophenone compound include benzophenone, 4-benzylfluorenyldiphenyl sulfide, 4-benzylfluorenyl-4'-methyldiphenylsulfide, and 4-benzene Formamyl-4'-ethyldiphenylsulfide, 4-benzyl-4'-propyldiphenylsulfide, and the like.

3級胺化合物,例如可列舉乙醇胺化合物、具有二烷基胺基苯構造之化合物,例如市售品可列舉4,4’-二甲基胺基二苯甲酮(日本曹達股份有限公司製Nisso Cure(註冊商標)MABP)、4,4’-二乙基胺基二苯甲酮(保土谷化學工業股份有限公司製EAB)等之二烷基胺基二苯甲酮、7-(二乙基胺基)-4-甲基-2H-1-苯并吡喃-2-酮(7-(二乙基胺基)-4-甲基香豆素)等之含有二烷基胺基之香豆素化合物、4-二甲基胺基安息香酸乙酯(日本化藥股份有限公司製Kayacure(註冊商標)EPA)、2-二甲基胺基安息香酸乙酯(International Bio-Synthetics公司製Quantacure DMB)、4-二甲基胺基安息香酸(n-丁氧基)乙酯(International Bio-Synthetics公司製Quantacure BEA)、p-二甲基胺基安息香酸異戊基乙酯(日本化藥股份有限公司製Kayacure DMBI)、4-二甲基胺基安息香酸2-乙基己酯(Van Dyk公司製Esolol 507)等。3級胺化合物,較佳為具有二烷基胺基苯構造之化合物,其中尤以二烷基胺基二苯甲酮化合物、最大吸收波長為350~450nm之含有二烷基胺基之香豆素化合物及酮香豆素類特佳。Examples of tertiary amine compounds include ethanolamine compounds and compounds having a dialkylaminobenzene structure. Examples of commercially available products include 4,4'-dimethylaminobenzophenone (Nisso, manufactured by Soda Co., Ltd., Japan). Cure (registered trademark) (MABP), 4,4'-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Industry Co., Ltd.), and 7- (diethyl Diamino group) 4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin), etc. Coumarin compounds, ethyl 4-dimethylaminobenzoate (Kayacure (registered trademark) EPA, manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (manufactured by International Bio-Synthetics) Quantacure DMB), 4-dimethylaminobenzoic acid (n-butoxy) ethyl ester (Quantacure BEA, manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamyl ethyl ester (Japanese version) Kayacure DMBI), 4-dimethylaminobenzoic acid 2-ethylhexyl ester (Esolol 507, manufactured by Van Dyk), and the like. A tertiary amine compound, preferably a compound having a dialkylaminobenzene structure. Among them, a dialkylaminobenzophenone compound and a dialkylamino group-containing coumarin with a maximum absorption wavelength of 350 to 450nm Particularly preferred are vegetal compounds and ketocoumarins.

作為二烷基胺基二苯甲酮化合物,由於4,4’-二乙基胺基二苯甲酮毒性低故較佳。含有二烷基胺基之香豆素化合物,由於最大吸收波長位於350~410nm的紫外線區域,故當然為著色少、無色透明之感光性樹脂組成物,且可使用著色顏料,得到反映了著色顏料本身顏色的著色感光性薄膜。特別是7-(二乙基胺基)-4-甲基-2H-1-苯并吡喃-2-酮,由於對波長400~410nm之雷射光顯示優良之增感效果,故較佳。As the dialkylaminobenzophenone compound, 4,4'-diethylaminobenzophenone is preferred because of its low toxicity. Since the coumarin compound containing a dialkylamine group has a maximum absorption wavelength in the ultraviolet region of 350 to 410 nm, it is of course a light-colored, colorless and transparent photosensitive resin composition, and a coloring pigment can be used to reflect the coloring pigment. Color-sensitive photosensitive film. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferable because it exhibits excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.

此等之中,較佳為噻噸酮化合物及3級胺化合物。特別是藉由含有噻噸酮化合物,可提高深部硬化性。Among these, thioxanthone compounds and tertiary amine compounds are preferred. In particular, by containing a thioxanthone compound, deep hardenability can be improved.

當組成物中包含含有羧基之樹脂時,光聚合起始劑、光起始助劑及增感劑之總量,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為35質量份以下。藉由成為35質量份以下,此等之光吸收被抑制,深部之硬化性亦提高。When a carboxyl group-containing resin is included in the composition, the total amount of the photopolymerization initiator, the photoinitiator, and the sensitizer is, in terms of solid content, more preferably 100 parts by mass of the carboxyl group-containing resin. 35 parts by mass or less. By being 35 parts by mass or less, such light absorption is suppressed, and the hardenability at the deep portion is also improved.

再者,此等光聚合起始劑、光起始助劑及增感劑,由於吸收特定之波長,依情況可能感度變低,作為紫外線吸收劑而發揮功能。但是,此等不僅以提高組成物之感度為目的來使用。可依需要吸收特定波長之光,提高表面之光反應性,使阻劑之線形狀及開口變為垂直、錐狀、逆錐狀,並且提高線寬或開口直徑之加工精度。In addition, these photopolymerization initiators, photostarters, and sensitizers may have low sensitivity depending on the specific wavelength due to absorption of specific wavelengths, and function as ultraviolet absorbers. However, these are not only used for the purpose of improving the sensitivity of the composition. It can absorb light of specific wavelength according to the need, improve the light reactivity of the surface, make the line shape and opening of the resist become vertical, tapered, reverse tapered, and improve the processing precision of line width or opening diameter.

本發明之感光性薄膜所使用的感光性樹脂組成物,於上述成分以外,亦可含有嵌段共聚物、著色劑、彈性體、熱可塑性樹脂等之其他成分。以下,亦說明此等成分。The photosensitive resin composition used for the photosensitive film of the present invention may contain other components such as a block copolymer, a colorant, an elastomer, and a thermoplastic resin in addition to the above components. These components are also described below.

上述感光性樹脂組成物中,可適合地摻合嵌段共聚物。嵌段共聚物,係指性質相異之二種以上的聚合物,以共價鍵連結而成為長鏈之分子構造的共聚物。較佳為於20℃~30℃之範圍為固體者。只要於該範圍內為固體即可,於該範圍外之溫度亦可為固體。藉由於上述溫度範圍為固體,成為感光性薄膜時或塗佈於支持膜且臨時乾燥時的黏著性優良。The photosensitive resin composition may suitably contain a block copolymer. A block copolymer refers to a copolymer of two or more polymers having different properties and linked by a covalent bond to form a long-chain molecular structure. It is preferably a solid in a range of 20 ° C to 30 ° C. As long as it is solid within this range, it can be solid at temperatures outside this range. Since the above-mentioned temperature range is solid, the adhesiveness is excellent when it is a photosensitive film or when it is applied to a support film and temporarily dried.

嵌段共聚物較佳為XYX或XYX’型嵌段共聚物。XYX或XYX’型嵌段共聚物當中,中央之Y為軟嵌段,玻璃轉移點Tg低,較佳為未達0℃,其兩外側X或X’為硬嵌段,Tg高,較佳為0℃以上之聚合物單位所構成為佳。玻璃轉移點Tg係藉由示差掃描熱量測定(DSC)來測定。The block copolymer is preferably an XYX or XYX 'type block copolymer. Among XYX or XYX'-type block copolymers, Y in the center is a soft block, and the glass transition point Tg is low, preferably less than 0 ° C. Both outer X or X 'are hard blocks, and Tg is high, preferably A polymer unit having a temperature of 0 ° C or higher is preferred. The glass transition point Tg is measured by differential scanning calorimetry (DSC).

又,XYX或XYX’型嵌段共聚物當中,更佳為由X或X’之Tg為50℃以上之聚合物單位所成,Y之Tg為-20℃以下之聚合物單位所成的嵌段共聚物。又,XYX或XYX’型嵌段共聚物當中,X或X’較佳為與含有羧基之樹脂的相溶性高者,Y較佳為與含有羧基之樹脂的相溶性低者。如此地,可認為藉由成為兩端之嵌段與基質相溶,中央之嵌段與基質不相溶之嵌段共聚物,於基質中容易顯示特異性的構造。Among the XYX or XYX 'type block copolymers, it is more preferable that the copolymers are formed by polymer units having a Tg of X or X' being 50 ° C or higher, and polymer units having a Tg of Y or lower than -20 ° C. Paragraph copolymer. Among the XYX or XYX 'type block copolymers, X or X' is preferably one having high compatibility with a carboxyl group-containing resin, and Y is preferably one having low compatibility with a carboxyl group-containing resin. In this way, it can be considered that by becoming a block copolymer in which the blocks at both ends are compatible with the matrix, and the block at the center is incompatible with the matrix, it is easy to show a specific structure in the matrix.

再者,嵌段共聚物不僅XYX或XYX’型,只要係硬嵌段與軟嵌段成分各有至少一種以上則可無特殊限定地使用。The block copolymer is not limited to the XYX or XYX 'type, and may be used without particular limitation as long as the hard block and soft block components each have at least one type.

作為X或X’成分,較佳為聚甲基丙烯酸甲酯(PMMA)、聚苯乙烯(PS)等,作為Y成分,較佳為聚丙烯酸n-丁酯(PBA)、聚丁二烯(PB)等。又,可於X或X’成分之一部分導入以苯乙烯單元、含有羥基之單元、含有羧基之單元、含有環氧基之單元、N取代丙烯醯胺單元等為代表的與上述含有羧基之樹脂相溶性優良的親水性單元,進一步提高相溶性。本發明者等發現如此方式所得之嵌段共聚物,與上述含有羧基之樹脂的相溶性特別良好,此外令人驚訝地,可提高冷熱衝擊耐性,更令人驚訝地,添加了彈性體之物,有玻璃轉移溫度(Tg)下降的傾向,相對於此,添加了前述嵌段共聚物之物,有Tg不下降的傾向。As the X or X ′ component, polymethyl methacrylate (PMMA), polystyrene (PS), and the like are preferable, and as the Y component, poly n-butyl acrylate (PBA) and polybutadiene ( PB) and so on. In addition, a resin having a carboxyl group such as a styrene unit, a hydroxyl group-containing unit, a carboxyl group-containing unit, an epoxy group-containing unit, an N-substituted acrylamide unit, or the like may be introduced into a part of the X or X 'component A hydrophilic unit with excellent compatibility further improves compatibility. The present inventors have found that the block copolymer obtained in this way has particularly good compatibility with the carboxyl group-containing resin described above. Surprisingly, it can improve the resistance to cold and heat shock, and more surprisingly, an elastomer is added. On the other hand, the glass transition temperature (Tg) tends to decrease. On the other hand, in the case where the block copolymer is added, the Tg does not decrease.

嵌段共聚物之製造方法,例如可列舉日本特願2005-515281號、日本特願2007-516326號記載之方法。嵌段共聚物之市售品,可列舉使用Arkema公司製之活性聚合所製造的丙烯酸系三嵌段共聚物。可列舉以聚苯乙烯-聚丁二烯-聚甲基丙烯酸甲酯為代表之SBM型、以聚甲基丙烯酸甲酯-聚丙烯酸丁酯-聚甲基丙烯酸甲酯為代表之MAM型、進而經羧酸改質或親水基改質處理之MAM N型或MAM A型。SBM型可列舉E41、E40、E21、E20等,MAM型可列舉M51、M52、M53、M22等,MAM N型可列舉52N、22N,MAM A型可列舉SM4032XM10等。又,Kuraray股份有限公司製之Kurarity亦為由甲基丙烯酸甲酯與丙烯酸丁酯所衍生之嵌段共聚合。Examples of the method for producing the block copolymer include the methods described in Japanese Patent Application No. 2005-515281 and Japanese Patent Application No. 2007-516326. Examples of commercially available block copolymers include acrylic triblock copolymers produced by living polymerization by Arkema. Examples include SBM type represented by polystyrene-polybutadiene-polymethyl methacrylate, MAM type represented by polymethyl methacrylate-polybutyl acrylate-polymethyl methacrylate, and further MAM N type or MAM A type treated with carboxylic acid or hydrophilic group. Examples of the SBM type include E41, E40, E21, E20, etc., examples of the MAM type include M51, M52, M53, M22, etc., examples of the MAM N type include 52N, 22N, and types of the MAM A type include SM4032XM10. In addition, Kurarity manufactured by Kuraray Co., Ltd. is a block copolymer derived from methyl methacrylate and butyl acrylate.

嵌段共聚物,較佳為3元以上之嵌段共聚物,就得到本發明的效果方面,更佳為以活性聚合法合成之分子構造經精密控制的嵌段共聚物。此可認為係因以活性聚合法所合成之嵌段共聚物的分子量分布窄,各自之單元特徵變得明確之故。所使用之嵌段共聚物的分子量分布較佳為2.5以下、更佳為2.0以下。The block copolymer is preferably a ternary block copolymer or more. In order to obtain the effect of the present invention, it is more preferable that the molecular structure synthesized by the living polymerization method is a precisely controlled block copolymer. This is considered to be because the molecular weight distribution of the block copolymer synthesized by the living polymerization method is narrow, and the respective unit characteristics become clear. The molecular weight distribution of the block copolymer used is preferably 2.5 or less, and more preferably 2.0 or less.

嵌段共聚物之重量平均分子量一般而言為20,000~400,000、更以30,000~300,000之範圍者為佳。重量平均分子量未達20,000時,得不到作為目標之強韌性、柔軟性的效果,黏著性亦不良。另一方面,重量平均分子量超過400,000時,光硬化性樹脂組成物之黏度變高,印刷性、顯影性顯著惡化。The weight average molecular weight of the block copolymer is generally from 20,000 to 400,000, and more preferably from 30,000 to 300,000. When the weight-average molecular weight is less than 20,000, the intended effects of toughness and flexibility are not obtained, and the adhesiveness is also poor. On the other hand, when the weight average molecular weight exceeds 400,000, the viscosity of the photocurable resin composition becomes high, and printability and developability are significantly deteriorated.

嵌段共聚物之摻合量,當組成物中包含含有羧基之樹脂時,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為1~50質量份、更佳為5~35質量份。1質量份以上可期待其效果,50質量份以下則作為光硬化性樹脂組成物顯影性或塗佈性成為良好。When the blending amount of the block copolymer includes a resin containing a carboxyl group in the composition, it is preferably 1 to 50 parts by mass, more preferably 5 to 100 parts by mass of the resin containing a carboxyl group. ~ 35 parts by mass. The effect is expected to be 1 part by mass or more, and 50 parts by mass or less is good in developability or coatability as a photocurable resin composition.

感光性樹脂組成物中,亦可含有著色劑。著色劑可使用紅、藍、綠、黃等之公知之著色劑,顏料、染料、色素均可。惟,就減低環境負荷以及對人體之影響的觀點而言,較佳為不含有鹵素。The photosensitive resin composition may contain a colorant. As the colorant, known colorants such as red, blue, green, and yellow can be used, and pigments, dyes, and pigments can be used. However, from the standpoint of reducing the environmental load and the impact on the human body, it is preferable not to contain halogen.

紅色著色劑係有單偶氮系、雙偶氮系、偶氮色澱系、苯并咪唑酮系、苝系、二酮吡咯并吡咯系、縮合偶氮系、蒽醌系、喹吖酮系等,具體而言可列舉附有如以下之色指數(C.I.;The Society of Dyers and Colourists發行)編號者。Red colorants are monoazo, diazo, azo lake, benzimidazolone, hydrazone, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. Specific examples include those with a color index (CI; issued by The Society of Dyers and Colourists) as follows.

單偶氮系紅色著色劑,可列舉Pigment Red 1、2、3、4、5、6、8、9、12、14、15、16、17、21、22、23、31、32、112、114、146、147、151、170、184、187、188、193、210、245、253、258、266、267、268、269等。又,雙偶氮系紅色著色劑,可列舉Pigment Red 37、38、41等。又,單偶氮色澱系紅色著色劑,可列舉Pigment Red 48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、52:2、53:1、53:2、57:1、58:4、63:1、63:2、64:1、68等。又,苯并咪唑酮系紅色著色劑,可列舉Pigment Red 171、175、176、185、208等。又,苝系紅色著色劑,可列舉Solvent Red 135、179、Pigment Red 123、149、166、178、179、190、194、224等。又,二酮吡咯并吡咯系紅色著色劑,可列舉Pigment Red 254、255、264、270、272等。又,縮合偶氮系紅色著色劑,可列舉Pigment Red 220、144、166、214、220、221、242等。又,蒽醌系紅色著色劑,可列舉Pigment Red 168、177、216、Solvent Red 149、150、52、207等。又,喹吖酮系紅色著色劑,可列舉Pigment Red 122、202、206、207、209等。Monoazo-based red colorants include Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269, etc. Examples of the disazo red colorant include Pigment Red 37, 38, and 41. Examples of the monoazo lake-based red colorant include Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57: 1, 58: 4, 63: 1, 63: 2, 64: 1, 68, and so on. Examples of the benzimidazolone red colorant include Pigment Red 171, 175, 176, 185, and 208. Examples of the actinic red colorants include Solvent Red 135, 179, Pigment Red 123, 149, 166, 178, 179, 190, 194, and 224. The diketopyrrolopyrrole-based red colorants include Pigment Red 254, 255, 264, 270, and 272. Examples of the condensed azo-based red colorant include Pigment Red 220, 144, 166, 214, 220, 221, and 242. Examples of the anthraquinone-based red colorants include Pigment Red 168, 177, and 216, Solvent Red 149, 150, 52, and 207. Examples of the quinacridone-based red colorant include Pigment Red 122, 202, 206, 207, and 209.

藍色著色劑係有酞花青系、蒽醌系,顏料系可列舉分類為顏料(Pigment)之化合物,例如為Pigment Blue 15、15:1、15:2、15:3、15:4、15:6、16、60。染料系可使用Solvent Blue 35、63、68、70、83、87、94、97、122、136、67、70等。上述以外,亦可使用金屬取代或無取代之酞花青化合物。Blue colorants are phthalocyanine and anthraquinone. Pigments include compounds classified as pigments. For example, Pigment Blue 15, 15: 1, 15: 2, 15: 3, 15: 4, 15: 6, 16, 60. As the dye system, Solvent Blue 35, 63, 68, 70, 83, 87, 94, 97, 122, 136, 67, 70 and the like can be used. In addition to the above, metal-substituted or unsubstituted phthalocyanine compounds can also be used.

黃色著色劑可列舉單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚啉酮系、蒽醌系等,例如,蒽醌系黃色著色劑,可列舉Solvent Yellow 163、Pigment Yellow 24、108、193、147、199、202等。異吲哚啉酮系黃色著色劑,可列舉Pigment Yellow 110、109、139、179、185等。縮合偶氮系黃色著色劑,可列舉Pigment Yellow 93、94、95、128、155、166、180等。苯并咪唑酮系黃色著色劑,可列舉Pigment Yellow 120、151、154、156、175、181等。又,單偶氮系黃色著色劑,可列舉Pigment Yellow 1、2、3、4、5、6、9、10、12、61、62、62:1、65、73、74、75、97、100、104、105、111、116、167、168、169、182、183等。又,雙偶氮系黃色著色劑,可列舉Pigment Yellow 12、13、14、16、17、55、63、81、83、87、126、127、152、170、172、174、176、188、198等。Examples of the yellow colorant include monoazo-based, disazo-based, condensed azo-based, benzimidazolone-based, isoindolinone-based, and anthraquinone-based. For example, anthraquinone-based yellow colorants include Solvent Yellow 163, Pigment Yellow 24, 108, 193, 147, 199, 202, etc. Isoindolinone-based yellow colorants include Pigment Yellow 110, 109, 139, 179, 185, and the like. Examples of the condensed azo-based yellow colorant include Pigment Yellow 93, 94, 95, 128, 155, 166, 180, and the like. Examples of benzimidazolone yellow colorants include Pigment Yellow 120, 151, 154, 156, 175, and 181. Examples of the monoazo yellow colorant include Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116, 167, 168, 169, 182, 183, etc. Examples of the disazo yellow colorant include Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198 and so on.

其他,亦可添加紫色、橙色、棕色、黑色、白色等之著色劑。具體而言,可列舉Pigment Black 1、6、7、8、9、10、11、12、13、18、20、25、26、28、29、30、31、32;Pigment Violet 19、23、29、32、36、38、42;Solvent Violet 13、36;C.I.Pigment Orange 1、5、13、14、16、17、24、34、36、38、40、43、46、49、51、61、63、64、71、73;PigmentBrown 23、25;氧化鈦、碳黑等。In addition, you can add purple, orange, brown, black, white and other coloring agents. Specifically, Pigment Black 1, 6, 7, 8, 9, 10, 11, 12, 13, 18, 20, 25, 26, 28, 29, 30, 31, 32; Pigment Violet 19, 23, 29, 32, 36, 38, 42; Solvent Violet 13, 36; CIPigment Orange 1, 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 61 , 63, 64, 71, 73; Pigment Brown 23, 25; titanium oxide, carbon black, etc.

著色劑之摻合量並無特殊限制,組成物中包含含有羧基之樹脂時,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為10質量份以下、更佳為0.1~7質量份。惟,氧化鈦等之白色著色劑之摻合量,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為0.1~200質量份、更佳為1~100質量份、更佳為3~80質量份。The blending amount of the colorant is not particularly limited. When a resin containing a carboxyl group is contained in the composition, it is preferably 10 parts by mass or less, more preferably 0.1, based on 100 parts by mass of the resin containing a carboxyl group. ~ 7 parts by mass. However, the blending amount of the white colorant such as titanium oxide is in terms of solid content, and is preferably 0.1 to 200 parts by mass, more preferably 1 to 100 parts by mass, more based on 100 parts by mass of the carboxyl group-containing resin. It is preferably 3 to 80 parts by mass.

又,能夠以對所得硬化物賦予柔軟性、改善硬化物之脆度等為目的,於感光性樹脂組成物中摻合彈性體。彈性體例如可列舉聚酯系彈性體、聚胺基甲酸酯系彈性體、聚酯胺基甲酸酯系彈性體、聚醯胺系彈性體、聚酯醯胺系彈性體、丙烯酸系彈性體、烯烴系彈性體。又,亦可使用將具有各種骨架之環氧樹脂的一部分或全部之環氧基以兩末端羧酸改質型丁二烯-丙烯腈橡膠改質而得的樹脂等。進一步地,亦可使用含有環氧基之聚丁二烯系彈性體、含有壓克力之聚丁二烯系彈性體、含有羥基之聚丁二烯系彈性體、含有羥基之異戊二烯系彈性體等。彈性體可1種單獨使用、亦可作為2種以上之混合物使用。In addition, an elastomer can be blended into the photosensitive resin composition for the purpose of imparting flexibility to the obtained cured product, improving the brittleness of the cured product, and the like. Examples of the elastomer include polyester elastomers, polyurethane elastomers, polyester polyurethane elastomers, polyamide elastomers, polyester elastomers, and acrylic elastomers. Body, olefin-based elastomer. In addition, a resin obtained by modifying a part or all of epoxy groups of epoxy resins having various skeletons with both terminal carboxylic acid-modified butadiene-acrylonitrile rubbers and the like can also be used. Furthermore, a polybutadiene-based elastomer containing an epoxy group, a polybutadiene-based elastomer containing acrylic, a polybutadiene-based elastomer containing a hydroxyl group, and isoprene containing a hydroxyl group can also be used. Department of elastomers and so on. The elastomer may be used singly or as a mixture of two or more kinds.

又,能夠以提高所得硬化物之可撓性、指觸乾燥性為目的,來使用慣用公知之黏合劑聚合物。黏合劑聚合物較佳為纖維素系、聚酯系、苯氧基樹脂系聚合物。纖維素系聚合物,可列舉Eastman公司製纖維素乙酸酯丁酸酯(CAB)、纖維素乙酸酯丙酸酯(CAP)系列,聚酯系聚合物較佳為東洋紡股份有限公司製Vylon系列,苯氧基樹脂系聚合物較佳為雙酚A、雙酚F及該等之氫化化合物的苯氧基樹脂。Moreover, conventionally well-known adhesive polymers can be used for the purpose of improving the flexibility and touch-drying property of the obtained hardened | cured material. The binder polymer is preferably a cellulose-based, polyester-based, or phenoxy resin-based polymer. Examples of the cellulose-based polymer include cellulose acetate butyrate (CAB) and cellulose acetate propionate (CAP) series manufactured by Eastman. The polyester polymer is preferably Vylon manufactured by Toyobo Co., Ltd. In the series, the phenoxy resin-based polymer is preferably a phenoxy resin of bisphenol A, bisphenol F, and hydrogenated compounds thereof.

當組成物中包含含有羧基之樹脂時,黏合劑聚合物之摻合量,以固體成分換算,相對於含有羧基之樹脂100質量份而言,較佳為50質量份以下、更佳為1~30質量份、特佳為5~30質量份。黏合劑聚合物之摻合量為50質量份以下時,感光性樹脂組成物之鹼顯影性更優良,可顯影之可使時間變長。When a carboxyl group-containing resin is contained in the composition, the blending amount of the binder polymer is, in terms of solid content, preferably 50 parts by mass or less, more preferably 1 to 100 parts by mass of the carboxyl group-containing resin. 30 parts by mass, and particularly preferably 5 to 30 parts by mass. When the blending amount of the binder polymer is 50 parts by mass or less, the alkali-developability of the photosensitive resin composition is more excellent, and the development time can be lengthened.

又,感光性樹脂組成物中,可依需要進一步摻合密合促進劑、抗氧化劑、紫外線吸收劑等之成分。此等可使用於電子材料之領域中公知之物。又,可摻合微粉二氧化矽、水滑石、有機皂土、蒙脫土等之公知慣用之增黏劑;聚矽氧系、氟系、高分子系等之消泡劑及調平劑之至少任1種;咪唑系、噻唑系、三唑系等之矽烷偶合劑;防鏽劑、螢光增白劑等之公知慣用的添加劑類之至少任一種。Moreover, the photosensitive resin composition can further mix components, such as an adhesion promoter, an antioxidant, an ultraviolet absorber, as needed. These can be used in well-known fields in the field of electronic materials. In addition, it is possible to blend well-known and commonly used thickening agents such as fine powdered silica, hydrotalcite, organic bentonite, montmorillonite, etc .; polyfoam-based, fluorine-based, polymer-based antifoaming agents and leveling agents. At least any one of them; at least any one of well-known and commonly used additives such as imidazole-based, thiazole-based, triazole-based silane coupling agents, and rust inhibitors and fluorescent brighteners.

感光性薄膜,可於支持膜一方之面上塗佈上述感光性樹脂組成物並乾燥而形成。考慮感光性樹脂組成物之塗佈性,可將感光性樹脂組成物以有機溶劑稀釋,調整為適切黏度,以缺角輪塗佈器、刮刀塗佈器、唇口塗佈器、棒式塗佈器、擠壓塗佈器、逆向塗佈器、轉移輥塗佈器、凹版塗佈器、噴霧塗佈器等於支持膜一方之面上塗佈為均勻厚度,通常於50~130℃之溫度乾燥1~30分鐘使有機溶劑揮發,而得到不黏性之塗膜。塗佈膜厚並無特殊限制,一般而言,以乾燥後之膜厚計,係於5~150μm、較佳為於10~60μm之範圍適當選擇。The photosensitive film can be formed by coating the photosensitive resin composition on one side of the supporting film and drying it. Considering the applicability of the photosensitive resin composition, the photosensitive resin composition can be diluted with an organic solvent and adjusted to a suitable viscosity. The notch wheel applicator, doctor blade applicator, lip applicator, and rod coating can be used. Cloth spreader, squeeze coater, reverse coater, transfer roll coater, gravure coater, spray coater are applied on one side of the support film to a uniform thickness, usually at a temperature of 50 to 130 ° C Dry for 1 to 30 minutes to volatilize the organic solvent to obtain a non-sticky coating film. The coating film thickness is not particularly limited. Generally speaking, it is appropriately selected in a range of 5 to 150 μm, preferably 10 to 60 μm, based on the film thickness after drying.

可使用之有機溶劑並無特殊限制,例如可列舉酮類、芳香族烴類、二醇醚類、二醇醚乙酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體而言,係甲基乙基酮(MEK)、環己酮等之酮類;甲苯、二甲苯、四甲基苯等之芳香族烴類;賽珞蘇、甲基賽珞蘇、丁基賽珞蘇、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三乙二醇單乙基醚等之二醇醚類;乙酸乙酯、乙酸丁酯、二乙二醇單乙基醚乙酸酯、二丙二醇甲基醚乙酸酯、丙二醇甲基醚乙酸酯、丙二醇乙基醚乙酸酯、丙二醇丁基醚乙酸酯等之酯類;乙醇、丙醇、乙二醇、丙二醇等之醇類;辛烷、癸烷等之脂肪族烴;石油醚、石油腦、氫化石油腦、溶劑石油腦等之石油系溶劑等。如此之有機溶劑可1種單獨使用、亦可作為2種以上之混合物使用。The organic solvent that can be used is not particularly limited, and examples thereof include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, and petroleum-based solvents. More specifically, ketones such as methyl ethyl ketone (MEK) and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; Kisangsu, carbitol, methylcarbitol, butylcarbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether, etc. Glycol ethers; ethyl acetate, butyl acetate, diethylene glycol monoethyl ether acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate , Propylene glycol butyl ether acetate and other esters; alcohols, propanol, ethylene glycol, propylene glycol and other alcohols; aliphatic hydrocarbons such as octane, decane; petroleum ether, petroleum brain, hydrogenated petroleum brain, solvents Petroleum solvents such as petroleum brain. Such organic solvents may be used alone or as a mixture of two or more.

有機溶劑之揮發乾燥,可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(使用以蒸氣所為之空氣加熱方式之具備熱源者使乾燥機內之熱風逆流接觸的方法及由噴嘴對支持體吹送的方式)來進行。Volatile drying of organic solvents, such as hot air circulation drying furnace, IR furnace, heating plate, convection oven, etc. Support blowing method).

[保護膜]   本發明之感光性薄膜層合體,能夠以防止於上述感光性薄膜之表面附著灰塵等,並且提高操作性為目的,於感光性薄膜之與中間層相反的面設置保護膜。[Protective film] The photosensitive film laminate of the present invention can provide a protective film on the surface of the photosensitive film opposite to the intermediate layer for the purpose of preventing dust and the like from adhering to the surface of the photosensitive film and improving the operability.

保護膜例如可使用聚酯薄膜、聚乙烯薄膜、聚四氟乙烯薄膜、聚丙烯薄膜、經表面處理之紙等,較佳為選定保護膜與感光性樹脂層之接著力小於支持膜與感光性樹脂層之接著力的材料。又,於感光性薄膜層合體之使用時,為了容易剝離保護膜,亦可對保護膜之與感光性樹脂層鄰接的面施以如上述之脫模處理。The protective film can be, for example, a polyester film, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, or a surface-treated paper. The adhesive force between the selected protective film and the photosensitive resin layer is preferably smaller than that of the supporting film and the photosensitive property. Adhesive material for resin layer. When the photosensitive film laminate is used, in order to easily peel off the protective film, the surface of the protective film adjacent to the photosensitive resin layer may be subjected to the above-mentioned release treatment.

保護膜之厚度並無特殊限制,但大約在10~150μm之範圍依用途而適當選擇。The thickness of the protective film is not particularly limited, but is appropriately selected depending on the application in a range of about 10 to 150 μm.

<硬化物及印刷配線板之製造方法>   使用本發明之感光性薄膜或感光性薄膜層合體形成硬化物。說明該硬化物之形成方法及製造於形成有電路圖型之基板上具備上述硬化物(硬化被膜)的印刷配線板之方法。說明使用具備保護膜之感光性薄膜層合體來製造印刷配線板之方法作為一例。係藉由首先i)由上述感光性薄膜層合體將保護膜剝離,使感光性薄膜露出,ii)於形成有前述電路圖型之基板上,貼合前述感光性薄膜層合體之感光性薄膜,iii)由前述感光性薄膜層合體之支持膜上進行曝光,iv)由前述感光性薄膜層合體將支持膜剝離,進行顯影,藉以於前述基板上形成經圖型化之感光性薄膜,v)將前述經圖型化之感光性薄膜藉由光照射或熱予以硬化,形成硬化被膜;來形成印刷配線板。再者,使用未設置保護膜之感光性薄膜層合體時,當然即不需保護膜之剝離步驟(i步驟)。以下,說明各步驟。<The manufacturing method of a hardened | cured material and a printed wiring board> 硬化 The hardened | cured material is formed using the photosensitive film or photosensitive film laminated body of this invention. A method for forming the cured product and a method for producing a printed wiring board including the cured product (cured film) on a substrate on which a circuit pattern is formed will be described. A method of manufacturing a printed wiring board using a photosensitive film laminate having a protective film will be described as an example. First, i) the protective film is peeled from the photosensitive film laminate to expose the photosensitive film, ii) the photosensitive film of the photosensitive film laminate is bonded to the substrate on which the circuit pattern is formed, and iii ) Exposure is performed on the support film of the aforementioned photosensitive film laminate, iv) the support film is peeled off from the aforementioned photosensitive film laminate, and development is performed to form a patterned photosensitive film on the substrate, v) The patterned photosensitive film is hardened by light irradiation or heat to form a hardened film; thereby forming a printed wiring board. In addition, when a photosensitive film laminate without a protective film is used, the peeling step (i step) of the protective film is of course not required. Each step is described below.

首先,由感光性薄膜層合體將保護膜剝離,使感光性樹脂層露出,於形成有電路圖型之基板上,貼合感光性薄膜層合體之感光性樹脂層。作為形成有電路圖型之基板,可列舉預先形成有電路之印刷配線板或可撓印刷配線板,此外可列舉使用利用了紙酚、環氧紙、玻璃布環氧樹脂、玻璃聚醯亞胺、玻璃布/不織布環氧樹脂、玻璃布/環氧紙、合成纖維環氧樹脂、氟樹脂/聚乙烯/聚苯醚、聚苯醚/氰酸酯等之高頻電路用覆銅層合版等之材質者且為全部等級(FR-4等)之覆銅層合版、其他聚醯亞胺薄膜、PET薄膜、玻璃基板、陶瓷基板、晶圓板等。First, the protective film is peeled off from the photosensitive film laminate to expose the photosensitive resin layer, and the photosensitive resin layer of the photosensitive film laminate is bonded to a substrate on which a circuit pattern is formed. Examples of the substrate on which the circuit pattern is formed include a printed wiring board or a flexible printed wiring board in which a circuit is formed in advance. In addition, the use of paper phenol, epoxy paper, glass cloth epoxy resin, glass polyimide, Glass cloth / non-woven epoxy resin, glass cloth / epoxy paper, synthetic fiber epoxy resin, fluororesin / polyethylene / polyphenylene ether, polyphenylene ether / cyanate, etc. The materials are copper-clad laminates of all grades (FR-4, etc.), other polyimide films, PET films, glass substrates, ceramic substrates, wafer boards, etc.

欲將感光性薄膜層合體之感光性薄膜貼合於電路基板上,較佳為使用真空層合機等,於加壓及加熱下貼合。藉由使用如此之真空層合機,感光性樹脂組成物層會密合於電路基板,故無氣泡之混入,又,對基板表面之填孔性亦提高。加壓條件較佳為0.1~2.0MPa左右,又,加熱條件較佳為40~120℃。If the photosensitive film of the photosensitive film laminate is to be bonded to a circuit board, it is preferable to use a vacuum laminator or the like, and to bond them under pressure and heating. By using such a vacuum laminator, the photosensitive resin composition layer is closely adhered to the circuit board, so that no bubbles are mixed in, and the hole filling property to the substrate surface is also improved. The pressing conditions are preferably about 0.1 to 2.0 MPa, and the heating conditions are preferably 40 to 120 ° C.

接著,由感光性薄膜層合體之支持膜上進行曝光(活性能量線之照射)。藉此步驟,僅經曝光之感光性樹脂層會硬化。曝光步驟並無特殊限定,例如,可藉由接觸式(或非接觸方式),通過形成所期望之圖型的光罩選擇性地藉由活性能量線曝光,亦可藉由直接描繪裝置將所期望圖型以活性能量線曝光。Next, exposure is performed on the support film of the photosensitive thin film laminate (irradiation with active energy rays). With this step, only the exposed photosensitive resin layer is hardened. The exposure step is not particularly limited. For example, the contact (or non-contact) method can be used to selectively expose the active energy rays by forming a photomask with a desired pattern. It is desired that the pattern is exposed with active energy rays.

活性能量線照射所用之曝光機,只要係搭載高壓水銀燈、超高壓水銀燈、金屬鹵化物燈等,於350~450nm之範圍照射紫外線的裝置即可,進一步亦可使用直接描繪裝置(例如依來自電腦之CAD數據直接以雷射描繪影像的雷射直接成像裝置)。直描機之雷射光源,只要係使用最大波長350~410nm之範圍的雷射光,則氣體雷射、固體雷射均可。用以形成影像之曝光量雖依膜厚等而異,但一般而言可為20~800mJ/cm2 、較佳為20~600mJ/cm2 之範圍內。The exposure machine used for active energy ray irradiation may be a device equipped with a high-pressure mercury lamp, ultra-high pressure mercury lamp, metal halide lamp, etc., which irradiates ultraviolet rays in the range of 350 to 450 nm. Further, a direct drawing device (such as from a computer The CAD data is a laser direct imaging device that directly depicts the image with a laser). As long as the laser light source of the direct scan machine uses laser light with a maximum wavelength in the range of 350 to 410 nm, gas lasers and solid lasers can be used. Although the amount of exposure used to form an image varies depending on the film thickness, etc., it can generally be in the range of 20 to 800 mJ / cm 2 , preferably 20 to 600 mJ / cm 2 .

曝光後,由感光性薄膜層合體將支持膜及中間層剝離進行顯影,藉以於基板上形成經圖型化之感光性薄膜。剝離支持膜及中間層後,對經曝光而硬化之感光性薄膜表面,賦予中間層表面之形態。再者,只要係不損及特性之範圍,亦可於曝光前由感光性薄膜層合體將支持膜剝離,將露出之感光性薄膜進行曝光及顯影。After the exposure, the support film and the intermediate layer are separated and developed by the photosensitive film laminate to form a patterned photosensitive film on the substrate. After the support film and the intermediate layer are peeled off, the surface of the photosensitive film hardened by exposure is given the form of the surface of the intermediate layer. In addition, as long as it does not impair the characteristics, the support film may be peeled off from the photosensitive film laminate before exposure, and the exposed photosensitive film may be exposed and developed.

顯影步驟並無特殊限定,可使用浸漬法、噴淋法、噴霧法、毛刷法等。又,顯影液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等之鹼水溶液。The developing step is not particularly limited, and a dipping method, a spray method, a spray method, a brush method, or the like can be used. As the developing solution, an alkali aqueous solution such as potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, or amines can be used.

接著,將經圖型化之感光性薄膜,藉由活性能量線(光)照射或熱予以硬化,形成硬化物(硬化被膜)。該步驟係稱為正式硬化或追加硬化,可促進感光性薄膜中之未反應單體的聚合,進而使含有羧基之感光性樹脂與環氧樹脂熱硬化,減低殘存之羧基的量。活性能量線照射,可與上述曝光同樣地進行,但較佳以較曝光時之照射能量更強的條件進行。例如可為500~3000mJ/cm2 。又,熱硬化能夠以100~200℃、20~90分鐘左右的加熱條件進行。再者,正式硬化,較佳為於光硬化後進行熱硬化。藉由先進行光硬化,於加熱硬化時樹脂之流動亦被抑制,可能維持被賦予形態之表面。Next, the patterned photosensitive film is cured by irradiation with active energy rays (light) or heat to form a cured product (cured film). This step is called formal hardening or additional hardening, which can promote the polymerization of unreacted monomers in the photosensitive film, and then thermally harden the photosensitive resin containing carboxyl group and epoxy resin to reduce the amount of remaining carboxyl group. The active energy ray irradiation can be performed in the same manner as the above-mentioned exposure, but it is preferably performed under conditions that are stronger than the irradiation energy during exposure. For example, it may be 500 to 3000 mJ / cm 2 . In addition, heat curing can be performed under heating conditions of 100 to 200 ° C. for about 20 to 90 minutes. It is to be noted that the hardening is preferably performed after the light hardening. By performing light hardening first, the resin flow is also suppressed during heat hardening, and it is possible to maintain the surface given the shape.

本發明之感光性薄膜層合體,可適合地使用作為印刷配線板用,可更適合地使用於防焊劑層之形成,特別可適合地使用於IC封裝用之防焊劑層之形成。 [實施例]The photosensitive film laminate of the present invention can be suitably used as a printed wiring board, can be more suitably used for the formation of a solder resist layer, and can be particularly suitably used for the formation of a solder resist layer for IC packaging. [Example]

接著列舉實施例,以更詳細說明本發明,但本發明不限定於此等實施例。Examples are given next to explain the present invention in more detail, but the present invention is not limited to these examples.

<含有羧基之感光性樹脂之調製>   於具備溫度計、氮導入裝置兼環氧烷導入裝置及攪拌裝置的熱壓釜中,給入酚醛清漆型甲酚樹脂(昭和電工股份有限公司製Shonol CRG951、OH當量:119.4)119.4g、氫氧化鉀1.19g與甲苯119.4g,一邊攪拌一邊將系統內氮取代,進行加熱昇溫。接著,慢慢滴下環氧丙烷63.8g,於125~132℃、0~4.8kg/cm2 反應16小時。之後,冷卻至室溫,於該反應溶液中添加混合89%磷酸1.56g,中和氫氧化鉀,得到不揮發成分62.1%、羥基價182.2g/eq.之酚醛清漆型甲酚樹脂的環氧丙烷反應溶液。所得之酚醛清漆型甲酚樹脂,為酚性羥基每1當量,平均加成1.08莫耳環氧烷者。<Preparation of carboxyl group-containing photosensitive resin> A novolac-type cresol resin (Shonol CRG951 manufactured by Showa Denko Corporation, OH equivalent: 119.4) 119.4 g, 1.19 g of potassium hydroxide, and 119.4 g of toluene. The nitrogen in the system was replaced while stirring, and the temperature was raised by heating. Next, 63.8 g of propylene oxide was slowly dropped, and reacted at 125 to 132 ° C. and 0 to 4.8 kg / cm 2 for 16 hours. Thereafter, the mixture was cooled to room temperature, and 1.56 g of 89% phosphoric acid was added to the reaction solution to neutralize potassium hydroxide to obtain an epoxy of a novolac cresol resin having a nonvolatile content of 62.1% and a hydroxyl value of 182.2 g / eq. Propane reaction solution. The obtained novolac-type cresol resin was obtained by adding an average of 1.08 mole alkylene oxide per equivalent of phenolic hydroxyl group.

將所得之酚醛清漆型甲酚樹脂之環氧烷反應溶液293.0g、丙烯酸43.2g、甲烷磺酸11.53g、甲基氫醌0.18g與甲苯252.9g,給入具備攪拌機、溫度計及空氣吹入管的反應器,將空氣以10ml/分鐘之速度吹入,一邊攪拌,於110℃反應12小時。由反應所生成之水,係作為與甲苯之共沸混合物,而餾出了12.6g之水。之後,冷卻至室溫,將所得之反應溶液以15%氫氧化鈉水溶液35.35g中和,接著水洗。之後,以蒸發器將甲苯以二乙二醇單乙基醚乙酸酯118.1g取代並且餾去,得到酚醛清漆型丙烯酸酯樹脂溶液。接著,將所得之酚醛清漆型丙烯酸酯樹脂溶液332.5g及三苯基膦1.22g,給入具備攪拌器、溫度計及空氣吹入管的反應器,將空氣以10ml/分鐘之速度吹入,一邊攪拌,一邊慢慢添加四氫鄰苯二甲酸酐62.3g,於95~101℃反應6小時,得到酸價88mgKOH/g之作為不揮發成分71%的含有羧基之感光性樹脂塗漆1。293.0 g of the alkylene oxide reaction solution of the obtained novolac-type cresol resin, 43.2 g of acrylic acid, 11.53 g of methanesulfonic acid, 0.18 g of methylhydroquinone, and 252.9 g of toluene were fed into a container equipped with a stirrer, a thermometer, and an air blowing tube. In the reactor, air was blown in at a rate of 10 ml / minute, and the reaction was carried out at 110 ° C. for 12 hours while stirring. The water produced by the reaction was used as an azeotropic mixture with toluene, and 12.6 g of water was distilled off. After that, it was cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 g of a 15% sodium hydroxide aqueous solution, followed by washing with water. Thereafter, toluene was replaced with 118.1 g of diethylene glycol monoethyl ether acetate with an evaporator and distilled off to obtain a novolac type acrylate resin solution. Next, 332.5 g of the obtained novolak-type acrylate resin solution and 1.22 g of triphenylphosphine were fed into a reactor equipped with a stirrer, a thermometer, and an air blowing tube, and air was blown in at a rate of 10 ml / minute while stirring. While slowly adding 62.3 g of tetrahydrophthalic anhydride and reacting at 95 to 101 ° C. for 6 hours, a photosensitive resin paint 1 containing a carboxyl group with an acid value of 88 mgKOH / g as a non-volatile component and 71% was obtained.

<感光性樹脂組成物之調製>   將如上述方式般所得到的含有羧基之感光性樹脂塗漆1、作為丙烯酸酯化合物之感光性單體的二季戊四醇六丙烯酸酯(日本化藥股份有限公司製KAYARAD DPHA)、作為熱硬化性成分的環氧樹脂之雙酚A型環氧樹脂(DIC股份有限公司製EPICLON840-S)及聯酚酚醛清漆型環氧樹脂(日本化藥股份有限公司製NC-3000H)、作為光聚合起始劑之IGM Resins公司製Omnirad TPO或BASF JAPAN公司製IRGACURE OXE02、作為填料之硫酸鋇(堺化學工業股份有限公司製B-30)及/或球狀二氧化矽(Admatechs股份有限公司製Admafine SO-E2)、作為熱硬化觸媒之三聚氰胺、作為著色劑之由三菱化學股份有限公司製碳黑M-50、二噁嗪紫C.I.Pigment Violet 23、C.I.Pigment Yellow 147、C.I.Pigment Blue 15:3及C.I.Pigment Red 177中選擇的各成分,與作為有機溶劑之二乙二醇單乙基醚乙酸酯,以下述表1所示之比例(質量份)摻合,以攪拌機預備混合後,以3輥磨機混練,調製感光性樹脂組成物1及2。<Preparation of photosensitive resin composition> The photosensitive resin containing a carboxyl group obtained as described above is painted 1. Dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.) as a photosensitive monomer of an acrylate compound. KAYARAD DPHA), bisphenol A epoxy resin (EPICLON840-S, manufactured by DIC Corporation) as a thermosetting epoxy resin, and biphenol novolak epoxy resin (NC-made by Nippon Kayaku Co., Ltd.) 3000H), as a photopolymerization initiator, Omnirad TPO manufactured by IGM Resins, or IRGACURE OXE02 manufactured by BASF JAPAN, barium sulfate as a filler (B-30 manufactured by Sakai Chemical Industry Co., Ltd.), and / or spherical silica ( Admafine SO-E2, manufactured by Admatechs Co., Ltd.), melamine as a thermosetting catalyst, carbon black M-50 manufactured by Mitsubishi Chemical Co., Ltd., dioxazine violet CIPigment Violet 23, CIPigment Yellow 147, Each component selected in CIPigment Blue 15: 3 and CIPigment Red 177, and diethylene glycol monoethyl ether acetate as an organic solvent are used in a ratio (mass ratio) shown in Table 1 below. ) Blended in a mixer after preliminary mixing, kneading with a triple roll mill to prepare a photosensitive resin composition 1 and 2.

<丙烯酸三聚氰胺樹脂1之調製>   將DIC股份有限公司製AMIDIR G-821-60(iso-丁基化三聚氰胺樹脂、固體成分60%)及DIC股份有限公司製ACRYDIC A-405(三聚氰胺焙燒用丙烯酸樹脂、固體成分50%)以質量比例換算為固體成分計,成為25:75的方式摻合,以攪拌機預備攪拌後以3輥磨機混練,調製丙烯酸三聚氰胺樹脂1。<Preparation of acrylic melamine resin 1> Amidir G-821-60 (iso-butylated melamine resin, solid content 60%) manufactured by DIC Corporation and ACRYDIC A-405 (acrylic resin for melamine firing) manufactured by DIC Corporation (Solid content 50%) In terms of mass ratio converted to solid content, it is blended so that it becomes 25:75, and it is kneaded with a three-roll mill after preparation with a stirrer to prepare acrylic melamine resin 1.

<環氧三聚氰胺樹脂2之調製>   將三井化學股份有限公司製U-VAN 62(iso-丁基化三聚氰胺樹脂、固體成分60%)及三井化學股份有限公司製Epomik R301MIBK溶液(雙酚A型環氧樹脂、固體成分60%),以質量比例換算為固體成分成為25:75的方式摻合,以攪拌機預備攪拌後,以3輥磨機混練,調製環氧三聚氰胺樹脂2。<Preparation of Epoxy Melamine Resin 2> U-VAN 62 (iso-butylated melamine resin, solid content 60%) manufactured by Mitsui Chemical Co., Ltd. and Epomik R301MIBK solution (bisphenol A ring) manufactured by Mitsui Chemical Co., Ltd. Oxygen resin, solid content 60%), blended in such a way that the solid content becomes 25:75 in terms of mass ratio conversion. After preliminary stirring with a stirrer, it is kneaded with a 3-roll mill to prepare epoxy melamine resin 2.

<具有中間層1之支持膜1的製作>   將如上述方式般所得之丙烯酸三聚氰胺樹脂1以甲基乙基酮稀釋,調製固體成分濃度35質量%之樹脂溶液。於該樹脂液中,進一步添加甲基乙基酮,依塗膜之厚度而成為適當的固體成分濃度後,添加聚矽氧系樹脂(東亞合成股份有限公司製SYMACUS-270)與二氧化矽,使丙烯酸三聚氰胺樹脂1、聚矽氧系樹脂與平均粒子徑2.3μm之二氧化矽之各質量比例成為59.7:0.3:40,於室溫充分攪拌,得到均勻之塗佈液。將該塗佈液以凹版輥法塗佈於支持膜的聚對苯二甲酸乙二酯薄膜(東麗股份有限公司製Lumirror T60)之一方的面上,於130℃乾燥20秒,製作具有中間層1之支持膜1(中間層之厚度3μm、支持膜之厚度25μm、總厚28μm)。<Production of the support film 1 having the intermediate layer 1> (1) The acrylic melamine resin 1 obtained as described above was diluted with methyl ethyl ketone to prepare a resin solution having a solid content concentration of 35% by mass. To this resin solution, methyl ethyl ketone was further added to obtain a suitable solid content concentration according to the thickness of the coating film, and then a polysiloxane resin (SYMACUS-270 manufactured by Toa Synthesis Co., Ltd.) and silicon dioxide were added. The mass ratios of the acrylic melamine resin 1, the polysiloxane resin, and the silicon dioxide having an average particle diameter of 2.3 μm were set to 59.7: 0.3: 40, and the mixture was sufficiently stirred at room temperature to obtain a uniform coating solution. This coating liquid was applied to one side of a polyethylene terephthalate film (Lumirror T60 manufactured by Toray Co., Ltd.) on a support film by a gravure roll method, and dried at 130 ° C. for 20 seconds to produce an intermediate film. Support film 1 of layer 1 (thickness of the intermediate layer is 3 μm, thickness of the support film is 25 μm, and total thickness is 28 μm).

<具有中間層2之支持膜2之製作>   除了於具有中間層1之支持膜1的製作中,使用如上述般得到之環氧三聚氰胺樹脂2,以取代丙烯酸三聚氰胺樹脂1以外,係與上述同樣地製作具有中間層2之支持膜2(中間層之厚度3μm、支持膜之厚度25μm、總厚28μm)。<Production of the support film 2 having the intermediate layer 2> The same as the above except that the epoxy melamine resin 2 obtained as described above is used instead of the acrylic melamine resin 1 in the production of the support film 1 having the intermediate layer 1. A support film 2 having an intermediate layer 2 (thickness of the intermediate layer of 3 μm, thickness of the support film of 25 μm, and total thickness of 28 μm) was produced.

[表1] [Table 1]

實施例1 <感光性薄膜層合體之製作>   於如上述所得之感光性樹脂組成物1中添加甲基乙基酮300g進行稀釋,以攪拌機攪拌15分鐘得到塗覆液。將塗覆液塗佈於具有中間層1之支持膜1的中間層側之面,於80℃之溫度乾燥15分鐘,形成厚度20μm之感光性薄膜。接著,於感光性薄膜上,貼合厚度18μm之聚丙烯薄膜(Futamura 化學股份有限公司製OPP-FOA),製作感光性薄膜層合體。Example 1 <Production of photosensitive film laminate> 300 g of methyl ethyl ketone was added to the photosensitive resin composition 1 obtained as described above, diluted, and stirred with a stirrer for 15 minutes to obtain a coating solution. The coating liquid was applied to the surface on the intermediate layer side of the supporting film 1 having the intermediate layer 1 and dried at a temperature of 80 ° C. for 15 minutes to form a photosensitive film having a thickness of 20 μm. Next, a 18 μm-thick polypropylene film (OPP-FOA manufactured by Futaura Chemical Co., Ltd.) was bonded to the photosensitive film to prepare a photosensitive film laminate.

<試驗基板之製作>   將形成有電路之FR-4覆銅層合板(100mm×150mm×0.8mmt、兩面銅箔、銅箔之厚度兩面均為18μm)表面以MEC股份有限公司製之CZ8101進行化學研磨,於基板之經化學研磨的表面,貼合由如上述所得之感光性薄膜層合體將聚丙烯薄膜剝離所露出的感光性薄膜之露出面,接著,使用真空層合機(名機製作所製 MVLP-500)以加壓度:0.8Mpa、70℃、1分鐘、真空度:133.3Pa之條件加熱層合,使基板與感光性薄膜密合,製作試驗基板1。< Production of test substrate > 表面 The surface of FR-4 copper-clad laminate (100mm × 150mm × 0.8mmt, double-sided copper foil, and copper foil thickness 18μm) on which the circuit is formed is chemically treated with MEZ Co., Ltd. CZ8101 Polishing, bonding the exposed surface of the photosensitive film by peeling the polypropylene film from the photosensitive film laminate obtained as described above on the chemically polished surface of the substrate, and then using a vacuum laminator (manufactured by Meiki Seisakusho) MVLP-500) The laminate was heated and laminated under the conditions of pressure: 0.8Mpa, 70 ° C., 1 minute, and vacuum: 133.3 Pa to make the substrate and the photosensitive film adhere to each other to produce a test substrate 1.

實施例2   實施例1中,除了使用感光性樹脂組成物2以取代感光性樹脂組成物1以外,係與實施例1同樣地製作試驗基板2。Example 2 中 In Example 1, a test substrate 2 was produced in the same manner as in Example 1 except that the photosensitive resin composition 2 was used instead of the photosensitive resin composition 1.

實施例3   實施例1中,除了使用具有中間層2之聚對苯二甲酸乙二酯薄膜2以取代具有中間層1之支持膜1以外,係與實施例1同樣地製作試驗基板3。Example 3 中 In Example 1, a test substrate 3 was produced in the same manner as in Example 1 except that a polyethylene terephthalate film 2 having an intermediate layer 2 was used instead of the support film 1 having an intermediate layer 1.

實施例4   實施例3中,除了使用感光性樹脂組成物2以取代感光性樹脂組成物1以外,係與實施例3同樣地製作試驗基板4。Example 4: In Example 3, except that the photosensitive resin composition 2 was used instead of the photosensitive resin composition 1, a test substrate 4 was produced in the same manner as in Example 3.

比較例1   實施例1中,除了使用厚度25μm之聚對苯二甲酸乙二酯薄膜(東麗股份有限公司製Lumirror T60)以取代具有中間層1之支持膜1以外,係與實施例1同樣地製作試驗基板5。Comparative Example 1 Example 1 was the same as Example 1 except that a polyethylene terephthalate film (Lumirror T60, manufactured by Toray Industries, Ltd.) was used instead of the support film 1 having an intermediate layer 1 in a thickness of 25 μm. Ground test substrate 5 is produced.

比較例2   比較例1中,除了使用感光性樹脂組成物2以取代感光性樹脂組成物1以外,係與比較例1同樣地製作試驗基板6。Comparative Example 2 In Comparative Example 1, except that the photosensitive resin composition 2 was used instead of the photosensitive resin composition 1, a test substrate 6 was produced in the same manner as in Comparative Example 1.

比較例3   實施例1中,除了使用厚度38μm之聚對苯二甲酸乙二酯薄膜(東麗股份有限公司製Lumirror T60)以取代具有中間層1之支持膜1以外,係與實施例1同樣地製作試驗基板7。Comparative Example 3 Example 1 was the same as Example 1 except that a polyethylene terephthalate film (Lumirror T60 manufactured by Toray Industries, Ltd.) was used instead of the support film 1 having an intermediate layer 1 in a thickness of 38 μm. Ground test substrate 7 was produced.

比較例4   比較例3中,除了使用感光性樹脂組成物2以取代感光性樹脂組成物1以外,係與比較例3同樣地製作試驗基板8。Comparative Example 4: In Comparative Example 3, a test substrate 8 was produced in the same manner as in Comparative Example 3 except that the photosensitive resin composition 2 was used instead of the photosensitive resin composition 1.

<耐測錘落下性>   如上述般製作之實施例1~4及比較例1~4之各試驗基板置於混凝土之上,將作為測錘之直徑30mm、重120g的黃銅製之球,於垂直於聚對苯二甲酸乙二酯薄膜表面的方向由高30cm落下於前述各試驗基板之聚對苯二甲酸乙二酯薄膜的表面。接著,使用搭載短弧型高壓水銀燈之平行光曝光裝置,透過曝光遮罩,由聚對苯二甲酸乙二酯薄膜上進行均勻曝光後,將聚對苯二甲酸乙二酯薄膜及中間層剝離,使感光性薄膜露出。再者,曝光量,係由鄰接於感光性薄膜之聚對苯二甲酸乙二酯薄膜上使用Stouffer 41段進行曝光時作為7段的曝光量。以目視評估所露出的感光性薄膜之表面之落下測錘所形成的凹腔。測錘之落下,係對於實施例1~4及比較例1~4之各試驗基板,分別各實施10枚。評估基準如以下所述。再者,各試驗基板均於上述<試驗基板之製作>中的加熱層合起5分鐘後進行本試驗、評估。又,係於23℃、相對濕度50%之試驗環境下進行本試驗、評估。   ○:10枚之露出的感光性薄膜之表面均未確認到凹腔   ×:10枚之露出的感光性薄膜之表面中,1枚以上確認到凹腔   評估結果如下述表2所示。<Drop resistance of test hammer> The test substrates of Examples 1 to 4 and Comparative Examples 1 to 4 produced as described above were placed on concrete, and a brass ball having a diameter of 30 mm and a weight of 120 g was used as a test hammer. The direction perpendicular to the surface of the polyethylene terephthalate film dropped from the height of 30 cm on the surface of the polyethylene terephthalate film of each of the aforementioned test substrates. Next, a parallel light exposure device equipped with a short-arc high-pressure mercury lamp was used to uniformly expose the polyethylene terephthalate film through the exposure mask, and then the polyethylene terephthalate film and the intermediate layer were peeled off. To expose the photosensitive film. It should be noted that the exposure amount is a 7-segment exposure amount when a Stouffer 41-segment exposure is performed on a polyethylene terephthalate film adjacent to the photosensitive film. The cavity formed by the drop hammer was visually evaluated on the surface of the exposed photosensitive film. The drop of the hammer was performed on each of the test substrates of Examples 1 to 4 and Comparative Examples 1 to 4 by 10 pieces each. The evaluation criteria are as follows. In addition, each test substrate was subjected to this test and evaluation 5 minutes after the heating lamination in the above-mentioned <Preparation of a test substrate>. The test and evaluation were performed under a test environment of 23 ° C and a relative humidity of 50%. ○: No cavities were confirmed on the exposed surfaces of the 10 thin films ×: A cavity was confirmed on more than 10 of the exposed photosensitive films. The evaluation results are shown in Table 2 below.

作為簡易確認感光性薄膜表面之耐衝擊性的方法,係進行耐測錘落下性試驗來評估。由實施例明顯可知,本發明之藉由使用感光性薄膜層合體,可實現即使因將所層合之基板等重疊時的強烈衝擊,亦不會對感光性薄膜表面造成影響的感光性薄膜層合體。另一方面,由比較例明顯可知,使用不滿足本發明之要件的感光性薄膜層合體,亦完全無法實現上述效果。As a method for easily confirming the impact resistance of the surface of a photosensitive film, a hammer drop resistance test was performed to evaluate it. As is apparent from the examples, the use of the photosensitive film laminate in the present invention can realize a photosensitive film layer that does not affect the surface of the photosensitive film even if a strong impact is caused when the laminated substrates are overlapped. Fit. On the other hand, it is clear from the comparative example that the above-mentioned effects cannot be achieved at all even by using a photosensitive film laminate that does not satisfy the requirements of the present invention.

1‧‧‧感光性薄膜層合體1‧‧‧ photosensitive film laminate

10‧‧‧支持膜10‧‧‧ support film

20‧‧‧中間層20‧‧‧ middle layer

30‧‧‧感光性薄膜30‧‧‧ photosensitive film

40‧‧‧保護膜40‧‧‧ protective film

[圖1]係顯示本發明之感光性薄膜層合體之一實施形態的概略截面圖。   [圖2]係顯示本發明之感光性薄膜層合體之其他實施形態的概略截面圖。[Fig. 1] A schematic cross-sectional view showing an embodiment of a photosensitive film laminate according to the present invention. [FIG. 2] A schematic cross-sectional view showing another embodiment of the photosensitive film laminate of the present invention.

Claims (5)

一種感光性薄膜層合體,其係依序具備支持膜、中間層、與藉由感光性樹脂組成物所形成而成的感光性薄膜之感光性薄膜層合體,其特徵為   前述中間層含有三聚氰胺及三聚氰胺化合物之至少任1種而成。A photosensitive film laminate comprising a support film, an intermediate layer, and a photosensitive film laminated with a photosensitive film formed of a photosensitive resin composition in this order, wherein the intermediate layer contains melamine and It is made of at least any one kind of melamine compound. 如請求項1之感光性薄膜層合體,其中前述支持膜之厚度為10~150μm。For example, the photosensitive film laminate of claim 1, wherein the thickness of the support film is 10 to 150 μm. 如請求項1或2之感光性薄膜層合體,其中前述感光性樹脂組成物含有填料及交聯成分而成。The photosensitive film laminate according to claim 1 or 2, wherein the photosensitive resin composition contains a filler and a crosslinking component. 如請求項1或2之感光性薄膜層合體,其係於前述感光性薄膜之與前述中間層相反之面側進一步具備保護膜而成。The photosensitive film laminate according to claim 1 or 2, further comprising a protective film on the side of the photosensitive film opposite to the intermediate layer. 一種硬化物,其特徵為使用如請求項1~4中任一項之感光性薄膜層合體所形成。A cured product formed by using the photosensitive thin film laminate according to any one of claims 1 to 4.
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