TW201832629A - Printing complex electronic circuits using a printable solution defined by a patterned hydrophobic layer - Google Patents

Printing complex electronic circuits using a printable solution defined by a patterned hydrophobic layer Download PDF

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TW201832629A
TW201832629A TW107101133A TW107101133A TW201832629A TW 201832629 A TW201832629 A TW 201832629A TW 107101133 A TW107101133 A TW 107101133A TW 107101133 A TW107101133 A TW 107101133A TW 201832629 A TW201832629 A TW 201832629A
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electrical
circuit
substrate
devices
electrical devices
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TW107101133A
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TWI677270B (en
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威廉 約翰史東 瑞
理查 奧斯汀 布蘭查德
馬克 大衛 羅恩索
伯來迪 史帝芬 歐若
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美商尼斯迪格瑞科技環球公司
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2933/00Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
    • H01L2933/0008Processes
    • H01L2933/0033Processes relating to semiconductor body packages
    • H01L2933/0066Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/20Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Thin Film Transistor (AREA)

Abstract

A programmable circuit includes an array of printed groups of microscopic transistors or diodes. The devices are pre-formed and printed as an ink and cured. A patterned hydrophobic layer defines the locations of the printed dots of the devices. The devices in each group are connected in parallel so that each group acts as a single device. Each group has at least one electrical lead that terminates in a patch area on the substrate. An interconnection conductor pattern interconnects at least some of the leads of the groups in the patch area to create logic circuits for a customized application of the generic circuit. The groups may also be interconnected to be logic gates, and the gate leads terminate in the patch area. The interconnection conductor pattern then interconnects the gates for form complex logic circuits.

Description

使用由經圖案化疏水性層界定之可印刷溶液印刷複雜的電子電路Printing complex electronic circuits using a printable solution defined by a patterned hydrophobic layer

本發明係關於在一基板上以單獨群組印刷預成形微觀半導體裝置,諸如電晶體及二極體,其中各群組中之隨機分佈裝置經並聯連接且使群組互連以產生更複雜的電路,諸如邏輯電路。The present invention relates to printing preformed micro-semiconductor devices, such as transistors and diodes, in separate groups on a substrate, where randomly distributed devices in each group are connected in parallel and interconnect the groups to produce more complex A circuit, such as a logic circuit.

藉由本受讓人自身之工作瞭解如何以適當定向在一導電基板上形成及印刷微觀兩端垂直發光二極體(LED)及將LED並聯連接以形成一光板。可於標題為Method of Manufacturing a Printable Composition of Liquid or Gel Suspension of Diodes之美國申請公開案US 2012/0164796中找到LED之此印刷之細節,該案被讓渡給本受讓人且以引用的方式併入本文中。 圖1係可使用下列程序印刷之LED 16之一層之一截面圖。各LED 16包含標準半導體GaN層,包含一n層及主動層以及一p層。 一LED晶圓(含有數千個垂直LED)經製作使得各LED 16之底部金屬陰極電極18包含一反射層。各LED 16之頂部金屬陽極電極20係小的以允許幾乎所有LED光逸出陽極側。藉由一黏著層接合至LED晶圓之「頂部」表面之一載體晶圓可用於接達至LED之兩側以進行金屬化。隨後,諸如藉由圍繞各LED向下蝕刻溝槽至黏著層及溶解暴露黏著層或藉由薄化載體晶圓而單件化LED 16。 隨後,將微觀LED均勻浸透於包含一黏度改質聚合物樹脂之一溶劑中,以形成用於印刷(諸如網版印刷或膠版印刷)之一LED墨水。 若陽極電極20需在印刷後定向在與基板22相反之一方向上,則將電極20製成高使得LED 16在其等安定在基板表面上時藉由液壓而在溶劑中旋轉。LED 16旋轉至最小電阻之一定向。已達成超過90%類似定向。 在圖1中,提供一起始基板22。若基板22本身不導電,則諸如藉由印刷在基板22上沈積一反射導體層24(例如,鋁)。基板22可為薄及撓性的。 隨後,諸如藉由膠版印刷而在導體層24上印刷LED 16,其中一旋轉板上之一圖案判定用於捲軸式程序之沈積,或藉由使用一適當網進行網版印刷以允許LED穿過且控制層之厚度。由於相對較低濃度,LED 16將被印刷為一單層,且相當均勻地分佈在導體層24上方。 隨後,使用例如紅外線爐加熱而使溶劑蒸發。在固化後,LED 16保持附接至下伏導體層24,其中溶解在LED墨水中之少量殘餘樹脂作為一黏度改質劑。樹脂之黏著性質及在固化期間LED 16下方之樹脂之體積減小將底部LED電極18壓抵於下伏導體24,從而製成與其之歐姆接觸。 隨後,在表面上方印刷一介電層26以囊封LED 16且進一步將其等固定在適當位置中。 隨後,在介電層26上方印刷一頂部透明導體層28以電接觸電極20且在適於所使用之透明導體類型之爐中固化頂部透明導體層28。 若需要散佈電流,則金屬匯流排條30至33隨後沿著導體層24及28之相對邊緣印刷且分別電終接在陽極及陰極引線(未展示)用於供電給LED 16。匯流排條30至33最終將連接至一正或負驅動電壓。 圖2係圖1之俯視圖。圖2之截面係圖3之水平對分。LED 16在經印刷層中之位置係隨機的。 若將一適當電壓差施加至陽極及陰極引線,則具有適當定向之所有LED 16將被照明。圖1展示一光線38。 上述程序嚴格結合具有一頂部電極及一底部電極之兩端裝置使用,此係因為LED在基板上之位置係隨機的,且LED可僅藉由將LED夾置於任意厚度之兩個導電層之間而互連。此外,上述程序嚴格用於形成用於產生光之LED陣列。LED不旨在執行任意類型之邏輯功能,此係因為並聯連接之LED之陣列僅形成一單個二極體。 將期望調適上述印刷/固化程序以產生涉及三端電晶體、二極體及可能的額外類型之組件之複雜的印刷電路以執行邏輯功能。Through the work of the assignee himself, how to form and print microscopic vertical light emitting diodes (LEDs) on a conductive substrate with proper orientation and connect the LEDs in parallel to form a light plate. Details of this printing of LEDs can be found in US Application Publication US 2012/0164796, titled Method of Manufacturing a Printable Composition of Liquid or Gel Suspension of Diodes, which was assigned to the assignee and cited by reference Incorporated herein. FIG. 1 is a cross-sectional view of one layer of an LED 16 that can be printed using the following procedure. Each LED 16 includes a standard semiconductor GaN layer, including an n-layer, an active layer, and a p-layer. An LED wafer (containing thousands of vertical LEDs) is fabricated such that the bottom metal cathode electrode 18 of each LED 16 includes a reflective layer. The top metal anode electrode 20 of each LED 16 is small to allow almost all LED light to escape from the anode side. A carrier wafer bonded to the "top" surface of the LED wafer through an adhesive layer can be used to access both sides of the LED for metallization. Subsequently, the LED 16 is singulated, such as by etching the trench down to the adhesive layer around each LED and dissolving the exposed adhesive layer or by thinning the carrier wafer. Subsequently, the micro LED is uniformly impregnated in a solvent containing a viscosity-modified polymer resin to form an LED ink for printing, such as screen printing or offset printing. If the anode electrode 20 needs to be oriented in a direction opposite to the substrate 22 after printing, the electrode 20 is made high so that the LED 16 is rotated in a solvent by hydraulic pressure when they are stabilized on the substrate surface. The LED 16 is rotated to one of the smallest resistances. More than 90% of similar orientations have been reached. In FIG. 1, a starting substrate 22 is provided. If the substrate 22 itself is not conductive, a reflective conductor layer 24 (eg, aluminum) is deposited on the substrate 22, such as by printing. The substrate 22 may be thin and flexible. Subsequently, such as by printing the LED 16 on the conductor layer 24 by offset printing, one of the patterns on a rotating plate determines the deposition for the reel process, or by screen printing using an appropriate screen to allow the LED to pass And control the thickness of the layer. Due to the relatively low concentration, the LEDs 16 will be printed as a single layer and distributed fairly evenly over the conductor layer 24. Subsequently, the solvent is evaporated by heating using, for example, an infrared oven. After curing, the LED 16 remains attached to the underlying conductor layer 24, with a small amount of residual resin dissolved in the LED ink as a viscosity modifier. The adhesive properties of the resin and the reduction in volume of the resin under the LED 16 during curing press the bottom LED electrode 18 against the underlying conductor 24, thereby making an ohmic contact therewith. Subsequently, a dielectric layer 26 is printed over the surface to encapsulate the LED 16 and further secure it in place. Subsequently, a top transparent conductor layer 28 is printed over the dielectric layer 26 to electrically contact the electrode 20 and the top transparent conductor layer 28 is cured in an oven suitable for the type of transparent conductor used. If current needs to be spread, the metal bus bars 30 to 33 are then printed along the opposite edges of the conductor layers 24 and 28 and electrically terminated at the anode and cathode leads (not shown) for powering the LED 16 respectively. The bus bars 30 to 33 will eventually be connected to a positive or negative drive voltage. FIG. 2 is a top view of FIG. 1. The cross section of FIG. 2 is the horizontal bisect of FIG. 3. The positions of the LEDs 16 in the printed layer are random. If a proper voltage difference is applied to the anode and cathode leads, all LEDs 16 with the proper orientation will be illuminated. FIG. 1 shows a light beam 38. The above procedure is strictly used in combination with a two-terminal device having a top electrode and a bottom electrode. This is because the position of the LED on the substrate is random, and the LED can only be placed between two conductive layers of any thickness Occasionally interconnected. In addition, the above procedure is strictly used to form an LED array for generating light. LEDs are not intended to perform any type of logic function because the array of LEDs connected in parallel forms only a single diode. It would be desirable to adapt the printing / curing procedures described above to produce complex printed circuits involving three-terminal transistors, diodes, and possibly additional types of components to perform logic functions.

本發明大體上係關於在一基板(諸如一撓性電路)上以小的單獨群組印刷預成形微觀(例如,介於10微米至200微米之間之尺寸)電子裝置,包含電晶體及二極體。各群組可含有例如大約10個裝置。各群組中之裝置使用經印刷導體層並聯連接。 各群組充當一單個裝置(例如,一單個電晶體或一單個二極體),此係因為相同裝置在各群組中並聯連接。在群組形成後的任意時間,群組隨後經互連(程式化)以形成一客製化電路,諸如用於執行一指定功能之一邏輯電路。 在一項實施例中,印刷裝置係電晶體或二極體且程式化步驟形成複數個邏輯閘。在另一實施例中,基板經初步處理以從群組形成邏輯閘之一陣列,且一後續「程式化」步驟藉由使閘互連以形成一複雜的邏輯電路而客製化基板。因此,經印刷基板可形成一可程式化閘陣列。 在一項實施例中,「程式化」以形成電路係藉由以下步驟執行:在基板上形成一疏水性遮罩;界定互連圖案;及隨後沈積一導電材料以在基板上形成互連金屬跡線。在另一實施例中,互連跡線藉由膠版印刷或網版印刷直接印刷在基板上。 裝置之群組可皆為相同裝置(例如,電晶體)或多種裝置(例如,電晶體及二極體)。電路可為除邏輯電路以外之電路,諸如控制電路、切換電路、類比電路等。 許多類型之電組件使用三個端子,諸如MOSFET、雙極電晶體、JFET、閘流電晶體、矽控整流器等。此等組件之習知者通常針對橫向裝置在頂部上具有三個端子或,針對垂直裝置在頂部上具有兩個端子且在底部上具有一個端子。已知藉由在一基板上方印刷各種電晶體層而形成薄膜電晶體,但是此等經印刷電晶體之效能歸因於印刷一單晶體之困難而不良。若電晶體(或其他三端裝置)可更習知地形成在一半導體晶圓中且隨後經單件化以產生作為一墨水印刷之微觀裝置,則裝置之品質可為當前最先進技術。但是,迄今為止,未知如何設計此等裝置或在印刷後使此等三端微觀裝置互連以執行複雜的功能。 在一項實施例中,形成三端裝置(諸如電晶體)之一半導體(例如,矽)晶圓。電晶體經形成在晶圓中以具有一底部電極、一頂部電極及定位於裝置之頂部與底部之間之某處之一架子上之一中間電極。起始晶圓最終藉由一黏著劑貼附至一載體晶圓以在製作電晶體時接達至該等電晶體之兩個表面。 藉由圍繞各電晶體形成溝槽而將電晶體單件化為個別電晶體,諸如以形成六邊形裝置。溝槽向下延伸至黏著層且黏著層溶解在一溶液中,從而自載體晶圓釋放所有電晶體。 隨後,將電晶體均勻混合至一溶液中以形成一墨水。電晶體之形狀導致其等之大多數以所要定向印刷在一基板上。 隨後,將電晶體印刷在一基板上方之相關聯第一導體層部分上以形成電晶體之群組之一陣列,且使墨水固化(加熱及蒸發),使得各電晶體之底部電極歐姆接觸至此等第一導體層部分。歸因於溶液中電晶體之相對低密度,電晶體將被印刷為一鬆散單層。產品中之任意層之印刷可藉由膠版印刷(尤其適於捲軸式程序)、網版印刷(在形成平板時尤其適用)或其他類型之印刷。 隨後,在第一導體層部分上方印刷一第一介電層。第一介電層未覆蓋中間電極。隨後,印刷與第一導體層部分對準之第二導體層部分,其等接觸中間電極但未覆蓋頂部電極。各種薄的經印刷層藉由強表面張力而自平坦化,使得層未覆蓋「高於」層之厚度之任意特徵。或者,層可在固化後經毯覆式蝕刻以暴露任意電極。 隨後,在第二導體層部分上方印刷一第二介電層,但未覆蓋頂部電極。隨後,印刷頂部(第三)導體層部分以接觸各群組中之電晶體的頂部電極。 因此,使電晶體之頂部電極並聯連接,使底部電極並聯連接,且使中間電極(或其等之子集)並聯連接,以傳導廣泛範圍之電流。 如上所述,隨後,可在一程式化步驟中,使群組互連以形成邏輯閘或更複雜電路。 可印刷微觀垂直二極體來代替電晶體且僅需兩個導體層以使各群組中之二極體並聯連接。 對於簡單被動裝置(諸如電阻器),電阻材料本身(而非印刷含有個別電阻器之墨水)可被印刷在一小區域中,且藉由一導體沿著其長度在何處接觸電阻器來判定電阻。 基板之不同區域可印刷有不同裝置或相同裝置,且各區域中之裝置被並聯連接。因此,各區域本質上係一單個裝置。導體層終接在基板上緊鄰各區域之連接器區域中。 在一項實施例中,基板可具有一指定「補片(patch)」區域,其中製成群組或閘之互連。此簡化經程式化互連之設計,此係因為補片區域可針對程式化步驟而最佳化。 裝置經形成使得在一群組中之一些裝置經顛倒印刷或製成一不良連接的情況下對群組中之適當定向裝置的功能無不利影響。 印刷程序可使用大氣壓力下之捲軸式程序。經印刷可程式化基板的成本比使用習知技術形成之可比較可程式化基板的成本低得多。 在另一實施例中,藉由基板上之一經圖案化疏液層界定其中形成裝置墨水及導體之區域。此實現更精確印刷點形狀,而無墨水擴散,從而實現較小點及更密集點陣列。因此,可在一單元區域中印刷更多電組件以形成更複雜的電路。整個電路可藉由在大氣條件下印刷而形成。 揭示其他實施例。The present invention relates generally to printing preformed micro (e.g., sizes between 10 microns and 200 microns) electronic devices in small separate groups on a substrate (such as a flexible circuit), including transistors and two Polar body. Each group may contain, for example, about 10 devices. The devices in each group are connected in parallel via printed conductor layers. Each group acts as a single device (eg, a single transistor or a single diode) because the same device is connected in parallel in each group. At any time after the group is formed, the group is then interconnected (stylized) to form a customized circuit, such as a logic circuit for performing a specified function. In one embodiment, the printing device is a transistor or a diode and the programming step forms a plurality of logic gates. In another embodiment, the substrate is initially processed to form an array of logic gates from the group, and a subsequent "stylized" step customizes the substrate by interconnecting the gates to form a complex logic circuit. Therefore, a programmable gate array can be formed through the printed substrate. In one embodiment, "stylization" to form a circuit is performed by forming a hydrophobic mask on a substrate; defining an interconnect pattern; and subsequently depositing a conductive material to form an interconnect metal on the substrate Trace. In another embodiment, the interconnect traces are printed directly on the substrate by offset printing or screen printing. The group of devices may all be the same device (eg, a transistor) or multiple devices (eg, a transistor and a diode). The circuit may be a circuit other than a logic circuit, such as a control circuit, a switching circuit, an analog circuit, and the like. Many types of electrical components use three terminals, such as MOSFET, bipolar transistor, JFET, thyristor, silicon controlled rectifier, and so on. Those skilled in these components typically have three terminals on the top for horizontal devices or two terminals on the top and one terminal on the bottom for vertical devices. It is known to form thin film transistors by printing various transistor layers over a substrate, but the performance of these printed transistors is poor due to the difficulty of printing a single crystal. If a transistor (or other three-terminal device) can be more conventionally formed in a semiconductor wafer and then singulated to produce a micro device printed as an ink, the quality of the device can be the most advanced technology currently available. However, to date, it is unknown how to design such devices or interconnect these three-terminal micro devices to perform complex functions after printing. In one embodiment, a semiconductor (eg, silicon) wafer is formed as a three-terminal device (such as a transistor). The transistor is formed in the wafer to have a bottom electrode, a top electrode, and an intermediate electrode positioned on a shelf somewhere between the top and bottom of the device. The starting wafer is finally attached to a carrier wafer with an adhesive to access both surfaces of the transistors when making the transistors. The transistors are singulated into individual transistors by forming a trench around each transistor, such as to form a hexagonal device. The trench extends down to the adhesive layer and the adhesive layer is dissolved in a solution to release all transistors from the carrier wafer. Subsequently, the transistors are uniformly mixed into a solution to form an ink. The shape of the transistor causes most of them to be printed on a substrate in the desired orientation. Subsequently, the transistor is printed on an associated first conductor layer portion above a substrate to form an array of groups of transistors, and the ink is cured (heated and evaporated) so that the bottom electrode of each transistor is in ohmic contact there. Wait for the first conductor layer. Due to the relatively low density of the transistors in the solution, the transistors will be printed as a loose monolayer. Any layer of the product can be printed by offset printing (especially suitable for roll-type processes), screen printing (especially suitable when forming flat plates), or other types of printing. Subsequently, a first dielectric layer is printed over the first conductor layer portion. The first dielectric layer does not cover the intermediate electrode. Subsequently, a second conductor layer portion aligned with the first conductor layer portion is printed, which contacts the intermediate electrode but does not cover the top electrode. The various thin printed layers are self-planarized by strong surface tension, so that the layer does not cover any of the features of "higher" layer thickness. Alternatively, the layers may be blanket etched after curing to expose any electrodes. Subsequently, a second dielectric layer is printed over the second conductor layer portion but does not cover the top electrode. Subsequently, the top (third) conductor layer portion is printed to contact the top electrodes of the transistors in each group. Therefore, the top electrode of the transistor is connected in parallel, the bottom electrode is connected in parallel, and the middle electrode (or a subset thereof) is connected in parallel to conduct a wide range of current. As described above, the groups can then be interconnected to form a logic gate or more complex circuit in a stylization step. Microscopic vertical diodes can be printed instead of transistors and only two conductor layers are required to connect the diodes in each group in parallel. For simple passive devices (such as resistors), the resistive material itself (rather than printing ink containing individual resistors) can be printed in a small area and determined by where a conductor touches the resistor along its length resistance. Different areas of the substrate may be printed with different devices or the same device, and the devices in each area are connected in parallel. Therefore, each area is essentially a single device. The conductor layer is terminated in a connector area on the substrate next to each area. In one embodiment, the substrate may have a designated "patch" area in which interconnects of groups or gates are made. This simplifies the design of stylized interconnects because patch areas can be optimized for stylized steps. The devices are formed so that the functions of properly oriented devices in the group are not adversely affected if some of the devices in a group are printed upside down or made a poor connection. The printing procedure can use a reel-type procedure under atmospheric pressure. The cost of a printed programmable substrate is much lower than the cost of a comparable programmable substrate formed using conventional techniques. In another embodiment, a region on which a device ink and a conductor are formed is defined by a patterned lyophobic layer on the substrate. This enables more accurate dot shape printing without ink diffusion, enabling smaller dots and denser dot arrays. Therefore, more electrical components can be printed in a unit area to form more complicated circuits. The entire circuit can be formed by printing under atmospheric conditions. Other embodiments are disclosed.

相關申請案之交叉參考 本申請案係由William Johnstone Ray等人於2017年1月13日申請之美國申請案第15/405,601號(其係2014年3月11日申請之美國申請案第14/204,800號之部分接續案)之接續案,其經讓渡給本受讓人且係以引用的方式併入本文中。 本發明之經印刷可程式化電路可使用被動裝置(例如,電容器、電阻器)、兩端無機半導體裝置(例如,二極體)及三端無機半導體裝置(例如,電晶體)之任意組合。待印刷及電連接至之最複雜裝置係三端裝置。在一些情況中,三端裝置(諸如一雙極電晶體)可藉由僅使用兩個端子或將兩個端子連接至相同導體而用作二極體。 本發明之實施例中所使用之三端裝置可小於人類頭髮之直徑,從而使該等裝置在跨一基板稀疏散佈時對於裸眼本質上不可見。裝置之大小可在大約10微米至200微米之範圍內。每單位面積之微裝置之數目可在將微裝置施加至基板時自由調整。裝置可使用膠版印刷、網版印刷或其他形式之印刷而印刷為墨水。三端裝置之習知設計可易於經調適用於形成本發明之微裝置。光微影之精度恰好在形成微裝置所需之精度內。由於許多微裝置將平行操作,故各微裝置之效率並非至關重要。 圖3係可懸浮在一溶劑中且作為一墨水印刷在一基板上之三端裝置40之一透視圖。裝置40可為一雙極電晶體、一MOSFET、一JFET、三MOS裝置或任意其他三端裝置,大致包含兩個載流端子及一控制端子。裝置40可為一橫向或垂直電晶體,此係因為三個電極之位置未指示在裝置40內部之半導體層/區域或閘極之位置。電極可使用通孔接觸裝置40中之任意位置。 裝置40藉由在處理期間使用一或多個載體晶圓以接達至用於金屬化之兩個表面而完全形成在一半導體晶圓上(包含電極金屬化)。雖然生長晶圓可為矽,但是載體晶圓可為任意材料。矽晶圓使用一黏著劑或其他適當材料貼附至載體晶圓。各裝置40之形狀藉由遮罩及蝕刻界定。各種層或區域可使用經遮罩植入或藉由在磊晶生長的同時摻雜層而摻雜。在裝置形成在晶圓上之後,圍繞各裝置40在晶圓之前表面中光微影界定溝槽且向下蝕刻溝槽至黏著層。各裝置40之一較佳形狀係六邊形。溝槽蝕刻暴露下伏晶圓接合黏著劑。隨後,黏著劑溶解在一溶液中以自載體晶圓釋放裝置40。可代替性地藉由薄化載體晶圓之後表面直至單件化裝置40而執行單件化。隨後,微觀裝置40被均勻浸透在包含一黏度改質聚合物樹脂之一溶劑中,以形成用於印刷(諸如網版印刷或膠版印刷)之一墨水。 可使用一類似技術以形成兩端裝置,諸如一垂直二極體,其中一電極處於頂部上,且另一電極處於底部上。二極體可具有類似於圖3中所示之形狀之一形狀,但無中間電極。 有關在一晶圓中塑形垂直LED(兩端裝置)且隨後單件化LED用於作為墨水印刷的細節係描述於標題為Method of Manufacturing a Printable Composition of Liquid or Gel Suspension of Diodes之美國申請公開案US 2012/0164796中,該案經讓渡給本受讓人且係以引用的方式併入本文中。熟習此項技術者可調適此等程序用於形成三端裝置40及非LED二極體。 裝置40具有兩個區段:一下區段42(或基底部分)及一上區段44。上區段44被製成相對較高及窄,使得裝置40在其等安定於基板表面上時,藉由液壓在溶劑中旋轉。裝置40旋轉至最小電阻之一定向。已達成超過90%類似定向,但是令人滿意的效能可係在超過75%的裝置40處於相同定向的情況下達成。 下區段42應被塑形,使得裝置40在墨水固化後平放在基板上。圖4圖解說明三個經印刷裝置40,其中僅兩個經印刷裝置40係以正確定向印刷。 裝置40包含一金屬頂部電極46、一金屬中間電極48,及一金屬底部電極(圖3中未展示)。中間電極48的形狀提供一大的側表面積,用於與一中間導體層良好電接觸。 中間電極48應相對於裝置40的中間偏移,使得裝置40在印刷後之一不當定向導致中間電極48未電接觸中間導體層。在實例中,中間電極48處於裝置之中間下方(即,H2<½H1)。 在圖4中,提供一起始基板50。針對輕量、低成本、良好熱傳導至空氣或一散熱器,及便於處理,基板50宜係薄且撓性的。基板50可為一適當聚合物,諸如聚碳酸酯、PMMA或PET且可為撓性的,以自一輥施配。基板50可為適於最終產品之任意大小。基板50可為一習知撓性電路基板,其中金屬(例如,銅)跡線已在下文處理步驟之前,藉由習知方式形成於基板50上。 若基板50尚未如撓性電路般在其上形成金屬跡線,則諸如藉由印刷在基板50上沈積一導體層52(例如,銀、鋁、銅)。可使用穿過基板50之導電通孔54以將導體層52耦合至形成在基板50之底部表面上之一金屬層56。在各種實例中,導體層52被印刷為基板50上之圓點之一陣列(見圖11)。點彼此電隔離以允許裝置40之群組以任意方式互連以形成邏輯電路。代替圓點,導體層52可被印刷為方點或其他形狀的點。 隨後,諸如藉由膠版印刷或藉由使用一適當網進行網版印刷而將裝置40印刷在導體層52上以允許裝置40穿過且控制層之厚度。由於相對較低濃度,裝置40將被印刷為一鬆散單層,且相當均勻地分佈在導體層52上方。裝置40之經印刷位置與導體層52之經印刷點之位置對準。 隨後,藉由使用(例如)紅外線爐加熱而使溶劑蒸發。在固化後,裝置40保持附接至下伏導體層52,其中溶解在墨水中之少量殘餘樹脂作為一黏度改質劑。樹脂之黏著性質及在固化期間裝置40下方之樹脂之體積減小將底部電極58壓抵於下伏導體層52,從而製成與其之歐姆接觸。 隨後,印刷一薄介電層60以覆蓋導體層52,且進一步將裝置40固定在適當位置中。介電層60經設計以在固化期間藉由表面張力自平坦化,以拉離頂部電極46及中間電極48,或使其等去除潤濕。因此,無需蝕刻介電層60。若介電層60覆蓋電極46/48,則可使用一毯覆式蝕刻以暴露電極46/48。 隨後,在介電層60上方印刷與導電層52之點對準之一中間導體層62以電接觸中間電極48,且在適於所使用之導體之類型之一爐中固化中間導體層62。各種導體層可為金屬(或含有金屬)或可為任意其他類型之可印刷導體層。 在中間導體層62上方印刷另一薄介電層64以不覆蓋頂部電極46。 隨後,在介電層64上方印刷與中間導體層62之點對準之一頂部導體層66以電接觸頂部電極46,且在適於所使用之導體之類型之一爐中固化頂部導體層66。 隨後,可在導體層66上方印刷一較厚金屬層68,用於改良導電性及/或熱傳導。中間導體層62從點之邊緣延伸出以形成裝置40之群組之一端子。 圖4圖解說明形成圖4之結構所需之唯一步驟係印刷步驟67及固化步驟69。裝置40之隨機圖案可類似圖2中之LED 16之圖案。 圖4圖解說明最右裝置40A經定向在相反方向上。但是,中間電極48保持浮動,因此裝置40A並未操作且對所得電路無影響。 經印刷裝置40藉由導體層並聯連接。將適當的操作電壓及控制電壓施加至導體層以操作裝置40。在圖4之實例中,頂部電極46係裝置40之控制電極(例如,用於閘極或基極)。剩餘兩個電極係載流電極(例如,源極/汲極、射極/集極)。由於不當定向之裝置40A的中間電極48係浮動的,故裝置40保持關閉且為一開路。 圖5圖解說明裝置40如何可為一npn雙極電晶體40B,其中中間電極48係基極電極。中間電極48可使用一通孔連接至裝置40B中之任意其他半導體層。 圖6圖解說明裝置40如何可為一p通道MOSFET 40C,其中中間電極48係源極電極。中間電極48可使用一通孔連接至裝置40C中之任意其他層。 若裝置40將連接為二極體,則僅可使用導體層62及52或66及62。因此,可藉由哪兩個導體層係用以接觸二極體來選擇二極體的有效極性。或者,兩個導電層可經遠端連接以形成二極體。 任意數目個裝置40可並聯連接在一群組中,用於處置廣泛範圍之電流。在一項實施例中,大約10個裝置40被定位在各群組中。裝置40之群組係諸如藉由在一膠版印刷程序中使用一輥上之一圖案或藉由使用一網版印刷網上之一遮罩而印刷為群組之二維陣列,且各種導體層可經類似圖案化,使得各群組中之裝置40並聯連接,但各群組彼此電隔離。因此,各群組形成一單獨組件。隨後,可使用基板50上之「程式化」導體跡線來選擇性地使群組互連以形成更複雜電路,諸如邏輯電路。基板50上之一金屬撓性電路圖案可用於使裝置40之群組互連以形成邏輯電路。在一項實施例中,由於各群組可小至每側一毫米或直徑一毫米,故此等群組之二維陣列可超過數千個群組。一小區域內之群組可經互連以形成邏輯閘,且該等閘之端子可在程式化期間互連以執行任意邏輯功能。 圖7圖解說明圖4中之裝置40A之不當定向如何未不利影響群組中並聯連接之適當定向裝置40之操作。裝置40/40A被假設為一npn雙極電晶體,其具有用作基極之一頂部電極46、用作射極之一底部電極58及用作集極之一中間電極48。由於裝置40A在印刷期間非所要地顛倒定向(圖4中所示),故其基極短接至裝置40之射極且其射極短接至裝置40之基極。當裝置40之基極/射極接面經正向偏壓以開啟裝置40時,裝置40A保持關閉且對裝置40之操作無影響。注意,藉由使用自裝置40之中間偏移之一中間電極48(如圖3及圖4中所示),裝置40A之中間電極48將係浮動的,從而使其效應更加明顯。 圖8類似於圖9,但是裝置40及40A係MOSFET。 圖9係一表,其展示形成為一MOSFET或一雙極電晶體使得不當定向未不利影響並聯連接之適當定向裝置40之功能之裝置40之頂部電極、底部電極及中間電極之可能連接。 圖10圖解說明經印刷npn雙極電晶體(例如,裝置40)之兩個群組72及74,其中各群組中之電晶體經並聯連接,使得各群組充當一單個電晶體。裝置40及導體層之印刷圖案作為圓點形成群組,但可使用任意形狀之點。圖4中之群組之互連使電路成為一AND閘。導電跡線75針對各群組連接至圖4中之各種導體層。兩個電晶體(即,群組72及74)串聯連接在供應電壓端子76與78之間,電晶體之基極連接至輸入端子80及82,且輸出端子84連接至由群組74形成之電晶體之射極。各種端子可在基板50之邊緣附近或鄰近群組。 電阻器r1及r2被展示為連接在輸入端子80/82與基極之間用於電流控制。歸因於電阻器之簡單,電阻材料可運用一經圖案化輥使用膠版印刷或用於印刷電阻材料之一篩網上之一遮罩直接圖案化在基板上。電阻材料之形狀可判定電阻或連接器沿著其長度之位置可判定電阻。一電阻器亦可包含在各裝置40上。電容器亦可藉由印刷電容器之層而形成。 基板50可含有數百或數千個此等AND閘或其他閘,且該等閘可經互連以形成更複雜之功能。在此一情況中,該等閘等效於一可程式化閘陣列。對於一更可撓電路,群組最初可未連接,且互連之程式化遮罩可判定最終電路。三維程式化可用於允許跡線之交叉。可產生閘及其他邏輯電路之任意組合。一些群組可包含電晶體且其他群組可含有其他裝置,諸如二極體。類比電路亦可藉由使各種群組互連而形成。 歸因於裝置40在墨水中隨機但實質上均勻之分佈,相同面積之各群組將具有近似相同數目之裝置40。一群組中裝置40之數目之細微差異將不影響一邏輯電路之效能。在一項實施例中,歸因於所需之低電流,在各群組中可存在大約10個相同裝置。單個群組(其表示一單個電晶體)中之裝置40之成本為大約0.143美分。因此,所得電路板可製成相對廉價。 如圖11中所示,為了簡化可印刷為一有序二維陣列之群組之程式化,源於所有群組之導體層(圖4)之導電跡線85可終接在基板50之一補片區域86處,其中產品現為一可程式化電路板87。此等跡線85可為電路板87之「標準」設計之部分,其隨後接著經客製化用於一特定用途。此使得用於形成跡線85之印刷程序能夠經最佳化以連接至群組中之導體層且使程式化程序能夠經最佳化用於使端子88之末端互連。例如,程式化程序可在已製作電路板87之後之一時間執行且程式化步驟可由特殊設備在電腦控制下執行。此外,互連之圖案可比將電晶體端子電連接至補片區域86之跡線85複雜得多。 在圖11之實例中,補片區域86中之程式化形成圖10之AND閘。對於更複雜的電路,程式化跡線90可能需交叉且多個層可經形成以避免跡線之短路。 在另一實施例中,裝置40之群組最初可鄰近群組互連以形成單獨邏輯閘,諸如AND、NAND、NOR閘,且各閘之引線終接在補片區域86中用於隨後程式化以針對一特定客戶客製化基板。因此,通用電路形成一可程式化閘陣列。 複數個間隔之補片區域可被提供在電路板87上以簡化互連之佈線。在一項實施例中,針對所有輸入信號之端子被提供在一補片區域中之一層級上且輸出端子被提供在另一層級上。 若互連之程式化係複雜的,則將互連直接印刷在基板50上之一X-Y平面中可能係不夠的。導體直接印刷在基板上係受限的,此係因為導體之間之一最小間隔係大約30微米以避免交叉橋接,且薄導體具有藉由表面張力破裂之傾向。 在不期望直接印刷導體線之情況中,首先在基板上形成一遮罩層,接著如下般在遮罩層上方沈積導體墨水。 圖案化互連跡線或圖案化電路板87上之任意其他跡線或圖案化裝置40之群組之一途徑係形成疏水性遮罩。遮罩可藉由印刷(例如,使用一經圖案化輥或網版印刷)而沈積或可藉由一光微影程序(若印刷無法達成所要精度)圖案化。一適當遮罩物質係浸透於一溶液中作為墨水之經徹底清潔之矽藻土粒子。以相對於所要配接線/裝置圖案為凹之一圖案印刷墨水。在固化後,所得膜經由一氟化程序活化,從而產生一超疏水性表面(即,其不會被導體墨水或裝置墨水潤濕)。由膜暴露之基板之區域將適度親水或超親水(即,其會被導體墨水或裝置墨水潤濕)。 為形成跡線,一親水導電墨水經製備且沈積在疏水性遮罩上方。暴露之基板區域將被墨水覆蓋,且已沈積在疏水性遮罩表面上之導電墨水將堆積在暴露區域中。此產生導電墨水之更大截面積(針對良好導電性及機械強度)且防止交叉橋。 圖12係界定暴露基板之區域96之疏水性遮罩94之一俯視圖。圖13係展示形成在區域96之一者中之一單個導體98之一截面圖。注意,導體98比遮罩94厚。導體98之高度係由沈積在遮罩上方之導電墨水量判定。對於界定基板之一大暴露區域之遮罩,需沈積更多導電墨水以確保暴露區域被墨水完全覆蓋。在跡線之終接區域處,諸如為了將跡線之末端連接至其他導體,一擴大之襯墊區域應經形成以緩解針對一後續印刷層之對準容限且改良所得電連接。 在固化導電墨水之後,隨後在相同遮罩上方沈積一介電墨水,其中介電墨水含有足夠的表面活性劑以覆蓋遮罩表面及導體且中和遮罩之疏水性效應。額外遮罩及跡線層可經形成以產生互連之三維矩陣。垂直通孔可用於導體層之間之互連。 圖14圖解說明當產生群組72與74之間之互連以形成一AND閘時在圖11之電路板87上方使用一疏水性遮罩100。在另一實施例中,遮罩100僅用在補片區域86中用於程式化,且引至各種群組之跡線85在印刷群組之各種導體層時形成。 此一般遮罩程序亦可用於圖案化裝置40之群組及導體層。相同或不同裝置之群組可經堆疊以允許形成非常複雜的電路。 在已形成電路板87之標準特徵之後,可在捲軸式程序中對大量撓性電路板87廉價地執行程式化程序。在最終程式化之後,電路板87可從輥單件化。如所見,未使用真空處理或危險材料以製作電路板87及對其程式化。 圖15圖解說明圖14中之電阻器R1及R2可如何藉由將電阻材料膠版印刷或網版印刷在基板上而形成,其中篩網上之一遮罩界定電阻材料之形狀。可使用其他沈積技術。電阻材料之形狀(長度、寬度、高度)可判定電阻或連接器102或103沿著其長度之位置可判定電阻。若連接器之位置判定電阻,則所有電阻器可相同地形成。電阻亦可藉由將電阻器串聯及/或並聯互連而選擇。 圖16圖解說明一電路板106之一仰視圖及一截面圖,其中已在基板108之兩側上印刷裝置之群組,諸如底部上之群組72及74及頂部上之其他群組110及112。跡線114及116使群組互連。通孔118將一側上之電路連接至另一側上之電路。在印刷互連層之前,通孔在基板108中打孔且填充有例如UV固化之孔填充導體。若形成鏡像,則此簡化互連設計,此係因為兩側上之補片區域可相同。 取代通孔,可使用環繞式連接器。 由於基板108可為一非常薄及撓性的膜(如一撓性電路),故所得電路板106可被摺疊以減小其大小。由墨水形成之撓性的導體係可購得的。可在基板108上存在特殊區域,其等界定可摺疊電路板106而不損壞電路之位置。 為了改良電路板之使用之可靠性及靈活性,一「基底」電路板120(圖17)可經製作以具有特定基本特徵及連接端子。在電路板120已經測試及認可後,額外電路板122及124可被電附接至基底電路板120,以針對一特定應用客製化效能。 在圖17之實施例中,經測試及認可之電路板122及124具有經施加至其表面之一黏著劑,其將被黏著至基底電路板120。電路板122及124之端子126與基底電路板120上之端子對準。該等端子126經塗佈有一導電黏著劑。電路板122及124隨後與基底電路板120對準,且黏著至基底電路板120之表面。在一項實施例中,電路板122及124之「裝置側」面向基底電路板120之裝置側。藉由單獨形成各種功能單元,測試期間各單元之通過率將更高,且功能單元可係以各種組合連接以增加更多功能可能性。 在一項實施例中,電路板122/124係在一捲軸式程序中形成,且在測試之後,於最終站被施加黏著劑。電路板122/124可具有在單件化期間切割之測試突片。在單件化之後,電路板122/124被黏著至基底電路板120。作為一任意實例,一電路板122可為一A/D轉換器,且另一電路板可為一D/A轉換器。 圖18圖解說明用於將電路板122安裝至基底電路板120之另一技術。在圖18中,於區域128處之電連接位置處,對電路板122穿孔。隨後,使用一介電黏著劑來塗佈電路板122之底側(非裝置側),且將電路板122黏著至基底電路板120,因此穿孔係在基底電路板120上之連接端子上方。隨後,透過穿孔來沈積一導電黏著劑130,以將基底電路板120之端子連接至電路板122之頂部端子。例如,跡線132及134係藉由導電黏著劑l30連接。 此技術亦可結合圖16之雙側電路板使用。 使用裝置之大量冗餘陣列(例如,圖11中之裝置40)以及補片區域86中之標準被動裝置(例如,圖11中之電阻器R1至R3)允許電路板具有非常高的通過率且產生隨後可經程式化以根據需要製成獨有裝置之可程式化電路板。 對於更高密度之裝置群組,可印刷群組之多個絕緣層以形成三維結構。垂直通孔可用於接達至各種層。裝置之群組可使用垂直對準之群組串聯連接。 圖19示意圖解說明用於藉由在一捲軸式程序中印刷而製造電路之一可能組裝線。輥136含有基板材料且輥138係一捲取輥。標記各種站。程序依序印刷各種層並固化層。膠版印刷較佳用於使用一捲軸式程序印刷。層之數目取決於所印刷之電路及裝置之複雜性。取決於一特定客戶需求,捲軸式程序可產生未經程式化之電路板且一單獨系統可用於最終程式化步驟。 如本文中使用之各種方向屬性(諸如,底部、頂部及垂直)不應解釋為傳達相對於地球表面之絕對方向而是用於傳達當圖表被垂直固持時相對於附圖之定向。在一實際實施例中,此等術語仍適用於產品,而不管產品相對於地球表面之絕對定向。 對於需要大量電組件之複雜電路而言,可期望在高度界定區域(諸如一陣列中)印刷裝置之高密度的非常小點。各點充當一單個電組件。印刷點之一限制因素在於基板上存在液體(即,含有裝置之墨水)的一些擴散,而不管印刷圖案為何。用於裝置墨水之液體針對用於達成微觀電子裝置之適當定向所需的流體動力學設計,且未經最佳化以限制印刷於基板上後之擴散。此外,習知印刷遮罩(諸如網版印刷)具有有限解析度,其中解析度必須考慮遮罩必須通過電子裝置。下列方法可用於極大地減小點之大小,增大點之密度,且改良點之定位之精確度。 使用下列方法,點之分離可減小至約3微米,且點之直徑可小於使用裝置墨水之習知印刷方法可達成的點之直徑。 通常,方法需在基板上圖案化一疏水性(或疏液)層。圖案化可藉由使用高解析度印刷遮罩或甚至光微影圖案化。疏水性材料經最佳化用於印刷(例如,針對有限擴散之最佳化黏度),因此與裝置墨水印刷相比,可經圖案化至高得多的解析度及精確度。疏水性層經圖案化以形成暴露基板之極小且密集的開口。底部導體層可經印刷使得疏水性層中之各開口含有一裝置接觸墊,以及引至基板上之一補片區域之跡線。可跨導體層之表面塗刷以填充開口,或疏水性層可藉由其疏水性作用圖案化導體層,或兩者。因此,導體層及跡線與經圖案化疏水性層自對準。 裝置墨水可接著沈積於經圖案化疏水性層及導體層上方,且墨水將自疏水性層排斥且僅駐留在開口中。毛細管作用導致所有液體駐留在開口中,形成裝置點。因此,正是疏水性層之圖案化界定點而非一裝置墨水印刷遮罩。為更經濟使用墨水,墨水可在無印刷遮罩的情況下毯覆式沈積或一印刷遮罩可用於粗糙地圖案化點。亦可跨疏水性層塗抹裝置墨水以填充開口。裝置墨水接著固化,且電組件(諸如電晶體或二極體)具有適當定向,使得裝置之底部端子歐姆連接至底部導體層。 接著印刷介電層,之後在裝置上方印刷一頂部導體層以並聯連接各開口中的裝置。頂部導體層可包含延伸至補片區域之跡線。因此,頂部導體層亦可使用疏水性層自對準至裝置。疏水性層排斥所印刷之所有裝置及導電墨水。疏水性層亦可形成壁,因此一或多個印刷層可塗抹在表面上方以僅駐留在開口中。在任一情況中,所有層之解析度及定位由疏水性層界定。可圖案化多個疏水性層用於界定不同印刷層。 圖20係一可程式化電路150之一俯視圖,其中各點152表示一經印刷電裝置群組(例如,圖3中之裝置40),且其中點區域藉由一經圖案化疏液層154界定。疏液層154亦可界定導體區域及跡線156,該等跡線156引至補片區域158用於使各點152之頂部及底部導體互連以形成實際上任意類型之數位電路或甚至一類比電路。對於三端裝置(諸如電晶體),將存在三個或更多個導體層。點152之陣列可包含多種裝置,諸如雙極及MOS電晶體、電阻器、二極體等。電路之電端子可包含電源端子V+及接地、差分輸入端子In1及In2以及差分輸出端子Out1及Out2。整個電路150可藉由在大氣條件下印刷而形成。 圖21係在印刷疏液層154之後且在印刷一底部導體層160之後對分四個點152之圖20之電路150之一橫截面。疏液層154無需直接形成在基板162表面上。底部導體層160形成後續印刷裝置之經隔離接觸件,且可包含引至圖20中所示之補片區域158之跡線。疏液層可為使用網版印刷、膠版印刷或其他印刷方法印刷之習知疏液材料。此一材料可為氟基材料,諸如鐵氟龍或其他市售材料。已知排斥不同液體之各種材料,且此等疏液材料之選擇將取決於用於裝置墨水及導體墨水之溶液。溶液可係基於酒精的。疏液層154可為一疏水性層。疏液層154亦可為具有非常精細的粗糙化之一層,其導致上覆層本質上由一氣墊支撐以防止潤濕。疏液材料可經最佳化用於精細圖案化,其可比使用習知網版印刷及膠版印刷圖案化裝置墨水精細得多。例如,針對適當流體動力學選擇裝置墨水溶液以允許微觀裝置在其等沉澱於底部導體上時具有適當定向。裝置墨水溶液可具有極低黏度,其導致印刷點擴散,從而限制點的密度。此外,裝置墨水印刷解析度可歸因於墨水中之微觀裝置的大小而受限。相比之下,疏液材料無此等限制,且可經圖案化至僅幾微米之一解析度。此外,液體疏液層154之任意小擴散將可期望地使開口變小,且因此點大小變小,此係因為其係點圖案之負影像。 在一項實施例中,首先印刷且固化疏液材料以界定各種點區域及導體圖案。光微影亦可用於更精細的圖案化。基板162可為任意適當材料,諸如PMMA、FR-4、紙等。 接著印刷導體墨水,其可包括溶液中之金屬粒子。導體墨水可印刷在疏液層154之開口中,或可毯覆式沈積且塗抹在表面上方以填充疏液層154中之開口。在一項實施例中,導體墨水層在固化前延伸至疏液層154之高度,使得表面係平坦的。固化導體墨水層以形成底部導體層160將導致一些收縮。任意後續裝置墨水或導體墨水亦將自疏水表面排斥且累積在底部導體層160上方。因此,所有印刷層自對準。 圖22繪示印刷裝置墨水166之後之結構,其中疏液層154界定點152及導體之形狀。即使毯覆式印刷裝置墨水166,所有墨水仍將歸因於疏液層154之排斥而駐留在開口中。 圖23繪示在裝置墨水經固化以形成一單層電裝置170之後之結構,該單層電裝置170之底部端子電接觸(例如,歐姆接觸)底部導體層160。接著印刷一介電層(諸如圖4中之介電層60)以使底部導體層160絕緣。接著,印刷且固化一頂部導體層172以歐姆接觸電裝置170之頂部端子。若電裝置170具有三層端子,諸如圖4中所示之電晶體,則將印刷一額外導體層及介電層。 頂部導體層172可使用另一經圖案化疏液層(圖23之橫截面外部)界定,此使得頂部導體與底部導體重疊。在此一實施例中,可能需藉由電暈處理程序中和第一疏液層154之疏液性質以將另一疏液層沈積於其上方及表面之任意其他部分上方。一液體良好或不良地潤濕一材料主要取決於液體及表面兩者之化學性質。潤濕被定義為液體與表面之表面能量之間的比率。一般而言,下列規則適用:若一材料之表面能量(=dyn/cm)高於液體之表面能量,則該材料將被潤濕。若否,則將存在一黏著問題。可需要由電暈處理提供的預處理來獲得印刷之前的充分潤濕及黏著。電暈放電單元可最佳化潤濕及黏著。此電暈技術已被證實高度有效且具有成本效益並且可在線發生。此電暈處理係眾所周知的。 針對各點152區域之頂部導體層及底部導體層經電隔離且可具有延伸至圖20之補片區域158用於使用一程式化遮罩互連以客製化電路之跡線156(圖20)。程式化可藉由沈積一金屬或藉由其他技術執行。可形成之電路之實例包含狀態機、記憶體、時鐘、邏輯電路及甚至類比電路。一些電裝置群組可並聯連接用於傳導較高電流,諸如用於LED驅動器等。 對於大量點152之陣列,導體圖案可變得過度複雜,且可能發生上覆跡線之大寄生電容。 圖24繪示一替代實施例,其中針對各經隔離點152,底部導體層160藉由使用導電通孔174延伸至基板162之底側以方便跡線之佈線並且減小寄生電容效應。因此,基板162之底側將包含引至補片區域158之所有底部導體跡線(圖20)。 圖25繪示可程式化電路可如何包含任意數目個裝置層以增大裝置密度。在圖25中,在導體層174上方印刷一介電層178,接著印刷另一導體層180,然後印刷另一裝置層182,之後印刷另一導體層184。基本上,步驟與形成圖21至圖24之層相同。可針對任意電路複雜度形成任意數目個層。 圖26係識別用於形成圖20之可程式化電路150之步驟之一流程圖。 在步驟190中,提供一適當基板。 在步驟192中,依一圖案印刷疏液層以暴露其中將形成經隔離裝置點之基板表面之區域且亦界定導體圖案。導體圖案可包含引至一補片區域之跡線。 在步驟194中,印刷底部導體層,其中導體墨水僅駐留在疏液層中之開口中。導體墨水印刷程序可粗糙地界定導體圖案,且疏液層接著精確地界定導體圖案。接著固化導體墨水。 在步驟196中,在表面上方印刷裝置墨水,使得裝置墨水由疏液層之圖案化(開口)界定。 在步驟198中,固化裝置墨水以導致裝置之底部端子電(例如,歐姆)連接至底部導體層。 在步驟200中,疏液層之表面視需要經歷一電暈處理以中和表面。此允許後續層形成於經中和疏液層上方,諸如用於印刷用於界定後續層之一新疏液層。 在步驟202中,在底部導體層上方及電裝置之間印刷一介電層以用於使底部導體層絕緣。 在步驟204中,可印刷一第二疏液層以界定頂部導體層。 在步驟206中,印刷且固化頂部導體層以電(例如,歐姆)接觸電裝置之頂部端子且並聯連接一單個點中之所有電裝置,諸如圖4中所示。可程式化電路現完成,假設裝置僅需要兩個端子。 在步驟208中,諸如依據一客戶請求,藉由使底部及頂部導體層之各種引線互連以形成任意類型之邏輯電路或類比電路而執行電路之程式化。 雖然已展示並描述本發明之特定實施例,但是熟習此項技術者將瞭解可進行改變及修改而不脫離本發明之較寬泛態樣,且因此隨附發明申請專利範圍將在其等之範疇內涵蓋落在本發明之真實精神及範疇內之所有此等改變及修改。Cross-Reference to Related Applications This application is US Application No. 15 / 405,601 filed by William Johnstone Ray et al. On January 13, 2017 (which is US Application No. 14 / filed on March 11, 2014 Partial continuation case No. 204,800), which is assigned to the assignee and incorporated herein by reference. The printed programmable circuit of the present invention may use any combination of passive devices (eg, capacitors, resistors), two-terminal inorganic semiconductor devices (eg, diodes), and three-terminal inorganic semiconductor devices (eg, transistors). The most complex device to be printed and electrically connected to is a three-terminal device. In some cases, a three-terminal device, such as a bipolar transistor, can be used as a diode by using only two terminals or connecting the two terminals to the same conductor. The three-terminal device used in the embodiments of the present invention may be smaller than the diameter of human hair, so that the devices are essentially invisible to the naked eye when they are sparsely scattered across a substrate. The size of the device can range from about 10 microns to 200 microns. The number of microdevices per unit area can be freely adjusted when the microdevices are applied to the substrate. The device can be printed as ink using offset printing, screen printing, or other forms of printing. The conventional design of the three-terminal device can be easily adapted to form the microdevice of the present invention. The accuracy of photolithography is exactly within the accuracy required to form a microdevice. Since many microdevices will operate in parallel, the efficiency of each microdevice is not critical. FIG. 3 is a perspective view of one of the three-terminal devices 40 that can be suspended in a solvent and printed as an ink on a substrate. The device 40 may be a bipolar transistor, a MOSFET, a JFET, a three MOS device, or any other three-terminal device, and generally includes two current-carrying terminals and a control terminal. The device 40 may be a lateral or vertical transistor because the positions of the three electrodes do not indicate the position of the semiconductor layer / area or gate inside the device 40. The electrodes can use any position in the through-hole contact device 40. The device 40 is completely formed on a semiconductor wafer (including electrode metallization) by using one or more carrier wafers to access both surfaces for metallization during processing. Although the growth wafer may be silicon, the carrier wafer may be of any material. The silicon wafer is attached to the carrier wafer using an adhesive or other suitable material. The shape of each device 40 is defined by masking and etching. The various layers or regions can be doped using a mask implant or by doping the layer while epitaxially growing. After the devices are formed on the wafer, light lithography defines grooves around each device 40 in the front surface of the wafer and the grooves are etched down to the adhesion layer. One preferred shape of each device 40 is a hexagon. The trench etch exposes the underlying wafer bonding adhesive. Subsequently, the adhesive is dissolved in a solution to release the device 40 from the carrier wafer. Alternatively, the singulation can be performed by thinning the rear surface of the carrier wafer up to the singulation device 40. Subsequently, the micro device 40 is uniformly impregnated in a solvent containing a viscosity-modified polymer resin to form an ink for printing such as screen printing or offset printing. A similar technique can be used to form a two-terminal device, such as a vertical diode with one electrode on the top and the other electrode on the bottom. The diode may have a shape similar to one of the shapes shown in FIG. 3, but without an intermediate electrode. Details regarding the shaping of vertical LEDs (two-end devices) in a wafer and subsequent singulation of the LEDs for printing as inks are described in U.S. Application Publication entitled Method of Manufacturing a Printable Composition of Liquid or Gel Suspension of Diodes In case US 2012/0164796, the case was assigned to the assignee and incorporated herein by reference. Those skilled in the art can adapt these procedures to form a three-terminal device 40 and a non-LED diode. The device 40 has two sections: a lower section 42 (or base section) and an upper section 44. The upper section 44 is made relatively high and narrow, so that the device 40 is rotated in a solvent by hydraulic pressure while it is settled on the substrate surface. The device 40 is rotated to one of the minimum resistance orientations. More than 90% of similar orientations have been achieved, but satisfactory performance can be achieved with more than 75% of the devices 40 in the same orientation. The lower section 42 should be shaped so that the device 40 lies flat on the substrate after the ink is cured. FIG. 4 illustrates three printing devices 40, of which only two printing devices 40 are printed in the correct orientation. The device 40 includes a metal top electrode 46, a metal intermediate electrode 48, and a metal bottom electrode (not shown in FIG. 3). The shape of the intermediate electrode 48 provides a large side surface area for good electrical contact with an intermediate conductor layer. The middle electrode 48 should be offset relative to the middle of the device 40 so that one of the devices 40 is improperly oriented after printing, causing the middle electrode 48 not to make electrical contact with the middle conductor layer. In the example, the middle electrode 48 is below the middle of the device (ie, H2 <½H1). In FIG. 4, a starting substrate 50 is provided. For light weight, low cost, good heat conduction to air or a heat sink, and ease of handling, the substrate 50 should be thin and flexible. The substrate 50 may be a suitable polymer, such as polycarbonate, PMMA, or PET and may be flexible to be dispensed from a roll. The substrate 50 may be any size suitable for the final product. The substrate 50 may be a conventional flexible circuit substrate, in which metal (eg, copper) traces have been formed on the substrate 50 in a conventional manner before the following processing steps. If the substrate 50 has not yet formed metal traces thereon like a flexible circuit, a conductor layer 52 (eg, silver, aluminum, copper) is deposited on the substrate 50, such as by printing. A conductive via 54 passing through the substrate 50 may be used to couple the conductor layer 52 to a metal layer 56 formed on a bottom surface of the substrate 50. In various examples, the conductor layer 52 is printed as an array of dots on the substrate 50 (see FIG. 11). The dots are electrically isolated from each other to allow groups of devices 40 to be interconnected in any manner to form a logic circuit. Instead of dots, the conductor layer 52 may be printed as square dots or other shaped dots. Subsequently, the device 40 is printed on the conductor layer 52 such as by offset printing or by screen printing using a suitable screen to allow the device 40 to pass through and control the thickness of the layer. Due to the relatively low density, the device 40 will be printed as a loose single layer and distributed fairly evenly over the conductor layer 52. The printed position of the device 40 is aligned with the printed dot position of the conductor layer 52. Subsequently, the solvent is evaporated by heating using, for example, an infrared oven. After curing, the device 40 remains attached to the underlying conductor layer 52 with a small amount of residual resin dissolved in the ink as a viscosity modifier. The adhesive properties of the resin and the decrease in the volume of the resin under the device 40 during curing press the bottom electrode 58 against the underlying conductor layer 52, thereby making an ohmic contact therewith. Subsequently, a thin dielectric layer 60 is printed to cover the conductor layer 52, and the device 40 is further fixed in place. The dielectric layer 60 is designed to self-planarize by surface tension during curing to pull off the top electrode 46 and the middle electrode 48, or to remove wetting and the like. Therefore, there is no need to etch the dielectric layer 60. If the dielectric layer 60 covers the electrodes 46/48, a blanket etch may be used to expose the electrodes 46/48. Subsequently, an intermediate conductor layer 62 aligned with the point of the conductive layer 52 is printed over the dielectric layer 60 to electrically contact the intermediate electrode 48, and the intermediate conductor layer 62 is cured in one of the furnaces suitable for the type of conductor used. The various conductor layers may be metal (or contain metal) or may be any other type of printable conductor layer. Another thin dielectric layer 64 is printed over the intermediate conductor layer 62 so as not to cover the top electrode 46. Subsequently, one of the top conductor layers 66 aligned with the point of the intermediate conductor layer 62 is printed over the dielectric layer 64 to electrically contact the top electrode 46 and the top conductor layer 66 is cured in one of the furnaces suitable for the type of conductor used . Subsequently, a thicker metal layer 68 may be printed over the conductor layer 66 to improve electrical and / or thermal conductivity. The intermediate conductor layer 62 extends from the edge of the point to form one of the terminals of the group of the device 40. FIG. 4 illustrates that the only steps required to form the structure of FIG. 4 are a printing step 67 and a curing step 69. The random pattern of the device 40 may be similar to the pattern of the LED 16 in FIG. 2. FIG. 4 illustrates the rightmost device 40A oriented in the opposite direction. However, the intermediate electrode 48 remains floating, so the device 40A is not operated and has no effect on the resulting circuit. The printing device 40 is connected in parallel via a conductor layer. Appropriate operating voltages and control voltages are applied to the conductor layers to operate the device 40. In the example of FIG. 4, the top electrode 46 is a control electrode of the device 40 (eg, for a gate or a base). The remaining two electrodes are current-carrying electrodes (eg, source / drain, emitter / collector). Since the middle electrode 48 of the improperly oriented device 40A is floating, the device 40 remains closed and is an open circuit. FIG. 5 illustrates how the device 40 can be an npn bipolar transistor 40B, wherein the middle electrode 48 is a base electrode. The intermediate electrode 48 may be connected to any other semiconductor layer in the device 40B using a through hole. FIG. 6 illustrates how the device 40 may be a p-channel MOSFET 40C, wherein the middle electrode 48 is a source electrode. The intermediate electrode 48 may be connected to any other layer in the device 40C using a through hole. If the device 40 is to be connected as a diode, only the conductor layers 62 and 52 or 66 and 62 can be used. Therefore, the effective polarity of the diode can be selected by which two conductor layers are used to contact the diode. Alternatively, two conductive layers may be connected via a distal end to form a diode. Any number of devices 40 can be connected in parallel in a group for handling a wide range of currents. In one embodiment, approximately 10 devices 40 are positioned in each group. Groups of devices 40 are two-dimensional arrays printed in groups such as by using a pattern on a roller in an offset printing process or by using a mask on a screen printing screen, and various conductor layers Similar patterning can be used so that the devices 40 in each group are connected in parallel, but the groups are electrically isolated from each other. Therefore, each group forms a separate component. "Stylized" conductor traces on the substrate 50 can then be used to selectively interconnect groups to form more complex circuits, such as logic circuits. A metal flexible circuit pattern on the substrate 50 can be used to interconnect groups of devices 40 to form a logic circuit. In one embodiment, since the groups can be as small as one millimeter per side or one millimeter in diameter, the two-dimensional array of such groups can exceed thousands of groups. Groups within a small area can be interconnected to form logic gates, and the gates of the gates can be interconnected during programming to perform any logic function. FIG. 7 illustrates how the improper orientation of the device 40A in FIG. 4 does not adversely affect the operation of the appropriate orientation devices 40 connected in parallel in the group. The device 40 / 40A is assumed to be an npn bipolar transistor having a top electrode 46 serving as a base, a bottom electrode 58 serving as an emitter, and an intermediate electrode 48 serving as a collector. Since the device 40A is undesirably inverted during printing (shown in FIG. 4), its base is shorted to the emitter of the device 40 and its emitter is shorted to the base of the device 40. When the base / emitter junction of the device 40 is forward biased to turn on the device 40, the device 40A remains closed without affecting the operation of the device 40. Note that by using an intermediate electrode 48 (as shown in FIGS. 3 and 4) that is offset from the middle of the device 40, the intermediate electrode 48 of the device 40A will be floating, making its effect more obvious. FIG. 8 is similar to FIG. 9, but the devices 40 and 40A are MOSFETs. FIG. 9 is a table showing possible connections of the top, bottom, and middle electrodes of the device 40 formed as a MOSFET or a bipolar transistor such that improper orientation does not adversely affect the function of a properly oriented device 40 connected in parallel. FIG. 10 illustrates two groups 72 and 74 of a printed npn bipolar transistor (eg, device 40), where the transistors in each group are connected in parallel so that each group acts as a single transistor. The printed patterns of the device 40 and the conductor layer are grouped as dots, but dots of any shape can be used. The interconnection of the group in Figure 4 makes the circuit an AND gate. The conductive traces 75 are connected to various conductor layers in FIG. 4 for each group. Two transistors (ie, groups 72 and 74) are connected in series between the supply voltage terminals 76 and 78, the bases of the transistors are connected to the input terminals 80 and 82, and the output terminal 84 is connected to the group formed by the group 74 The emitter of a transistor. Various terminals may be near or near the edge of the substrate 50. The resistors r1 and r2 are shown as being connected between the input terminals 80/82 and the base for current control. Due to the simplicity of the resistor, the resistive material can be patterned directly on the substrate using an offset printing using a patterning roller or a mask on a screen used to print the resistive material. The shape of the resistance material can determine the resistance or the position of the connector along its length can determine the resistance. A resistor may also be included on each device 40. Capacitors can also be formed by printing capacitor layers. The substrate 50 may contain hundreds or thousands of these AND gates or other gates, and the gates may be interconnected to form more complex functions. In this case, the gates are equivalent to a programmable gate array. For a more flexible circuit, the group may initially be unconnected, and the interconnected stylized masks may determine the final circuit. 3D stylization can be used to allow the intersection of traces. Any combination of gates and other logic circuits can be generated. Some groups may contain transistors and other groups may contain other devices, such as diodes. Analog circuits can also be formed by interconnecting various groups. Due to the random but substantially uniform distribution of the devices 40 in the ink, each group of the same area will have approximately the same number of devices 40. A slight difference in the number of devices 40 in a group will not affect the performance of a logic circuit. In one embodiment, due to the required low current, there may be approximately 10 identical devices in each group. The cost of devices 40 in a single group, which represents a single transistor, is about 0.143 cents. Therefore, the resulting circuit board can be made relatively inexpensive. As shown in FIG. 11, in order to simplify the programming of groups that can be printed as an ordered two-dimensional array, the conductive traces 85 from the conductor layer (FIG. 4) of all the groups can be terminated on one of the substrates 50 At patch area 86, the product is now a programmable circuit board 87. These traces 85 may be part of the "standard" design of the circuit board 87, which is then subsequently customized for a specific use. This enables the printing procedure used to form the traces 85 to be optimized to connect to the conductor layers in the group and the stylization procedure to be optimized for interconnecting the ends of the terminals 88. For example, the stylized program may be executed at a time after the circuit board 87 has been fabricated and the stylized steps may be executed by a special device under the control of a computer. In addition, the interconnect pattern can be much more complicated than the trace 85 that electrically connects the transistor terminals to the patch area 86. In the example of FIG. 11, the stylization in patch area 86 forms the AND gate of FIG. 10. For more complex circuits, the stylized traces 90 may need to cross and multiple layers may be formed to avoid shorting the traces. In another embodiment, groups of devices 40 may initially be interconnected adjacent to the group to form separate logic gates, such as AND, NAND, NOR gates, and the leads of each gate are terminated in patch area 86 for subsequent programming To customize substrates for a specific customer. Therefore, the universal circuit forms a programmable gate array. A plurality of spaced apart patch areas may be provided on the circuit board 87 to simplify interconnection wiring. In one embodiment, terminals for all input signals are provided on one level in a patch area and output terminals are provided on another level. If the programming of the interconnect is complex, it may not be sufficient to print the interconnect directly in one of the X-Y planes on the substrate 50. The direct printing of conductors on the substrate is limited because one of the minimum gaps between the conductors is about 30 microns to avoid cross bridging, and thin conductors have a tendency to break by surface tension. In a case where it is not desired to directly print a conductor line, a mask layer is first formed on a substrate, and then a conductive ink is deposited over the mask layer as follows. One of the groups of patterned interconnect traces or any other traces on the patterned circuit board 87 or patterning device 40 is to form a hydrophobic mask. The mask can be deposited by printing (eg, using a patterned roller or screen printing) or can be patterned by a photolithography process (if printing cannot achieve the desired accuracy). A suitable masking substance is a thoroughly cleaned diatomaceous earth particle which is saturated with a solution as an ink. Print the ink with a pattern that is concave with respect to the wiring / device pattern to be matched. After curing, the resulting film is activated via a fluorination process, resulting in a superhydrophobic surface (ie, it is not wetted by conductor ink or device ink). The area of the substrate exposed by the film will be moderately hydrophilic or super-hydrophilic (ie, it will be wetted by the conductor ink or device ink). To form a trace, a hydrophilic conductive ink is prepared and deposited over a hydrophobic mask. The exposed substrate area will be covered with ink, and the conductive ink that has been deposited on the surface of the hydrophobic mask will accumulate in the exposed area. This results in a larger cross-sectional area of the conductive ink (for good conductivity and mechanical strength) and prevents cross-bridges. FIG. 12 is a top view of one of the hydrophobic masks 94 defining a region 96 of the exposed substrate. FIG. 13 is a cross-sectional view showing a single conductor 98 formed in one of the regions 96. Note that the conductor 98 is thicker than the shield 94. The height of the conductor 98 is determined by the amount of conductive ink deposited above the mask. For a mask that defines a large exposed area of the substrate, more conductive ink needs to be deposited to ensure that the exposed area is completely covered by the ink. At the termination area of the trace, such as to connect the ends of the trace to other conductors, an enlarged pad area should be formed to ease the alignment tolerance for a subsequent printed layer and improve the resulting electrical connection. After the conductive ink is cured, a dielectric ink is subsequently deposited over the same mask, where the dielectric ink contains sufficient surfactant to cover the surface of the mask and the conductor and neutralize the hydrophobic effect of the mask. Additional mask and trace layers can be formed to produce a three-dimensional matrix of interconnects. Vertical vias can be used for interconnections between conductor layers. FIG. 14 illustrates the use of a hydrophobic mask 100 over the circuit board 87 of FIG. 11 when interconnections between groups 72 and 74 are created to form an AND gate. In another embodiment, the mask 100 is used only in the patch area 86 for stylization, and the traces 85 leading to the various groups are formed when various conductor layers of the group are printed. This general masking procedure can also be used for groups and conductor layers of the patterning device 40. Groups of the same or different devices can be stacked to allow the formation of very complex circuits. After the standard features of the circuit board 87 have been formed, a stylized procedure can be performed inexpensively on a large number of flexible circuit boards 87 in a reel-type procedure. After final stylization, the circuit board 87 can be singulated from the roll. As can be seen, no vacuum processing or hazardous materials are used to make and program the circuit board 87. FIG. 15 illustrates how the resistors R1 and R2 in FIG. 14 can be formed by offset printing or screen printing a resistive material on a substrate, wherein a mask on the screen defines the shape of the resistive material. Other deposition techniques can be used. The shape (length, width, height) of the resistance material can determine the resistance or the position of the connector 102 or 103 along its length can determine the resistance. If the position of the connector determines the resistance, all the resistors can be formed identically. The resistance can also be selected by interconnecting the resistors in series and / or in parallel. 16 illustrates a bottom view and a cross-sectional view of a circuit board 106 in which groups of devices such as groups 72 and 74 on the bottom and other groups 110 and 110 on the top have been printed on both sides of the substrate 108. 112. Traces 114 and 116 interconnect the groups. The through-hole 118 connects a circuit on one side to a circuit on the other side. Prior to printing the interconnect layer, the vias are perforated in the substrate 108 and filled with, for example, UV-cured hole-filled conductors. If a mirror image is formed, this simplifies the interconnect design because the patch areas on both sides can be the same. Instead of a through hole, a wraparound connector can be used. Since the substrate 108 can be a very thin and flexible film (such as a flexible circuit), the resulting circuit board 106 can be folded to reduce its size. Flexible guides formed from ink are commercially available. There may be special areas on the substrate 108 that define the location of the foldable circuit board 106 without damaging the circuit. In order to improve the reliability and flexibility of the use of the circuit board, a "base" circuit board 120 (Fig. 17) can be made to have specific basic features and connection terminals. After the circuit board 120 has been tested and approved, the additional circuit boards 122 and 124 can be electrically attached to the base circuit board 120 to customize performance for a specific application. In the embodiment of FIG. 17, the tested and approved circuit boards 122 and 124 have an adhesive applied to their surfaces, which will be adhered to the base circuit board 120. The terminals 126 of the circuit boards 122 and 124 are aligned with the terminals on the base circuit board 120. The terminals 126 are coated with a conductive adhesive. The circuit boards 122 and 124 are then aligned with the base circuit board 120 and adhered to the surface of the base circuit board 120. In one embodiment, the "device side" of circuit boards 122 and 124 faces the device side of base circuit board 120. By forming various functional units individually, the pass rate of each unit during the test will be higher, and the functional units can be connected in various combinations to increase more functional possibilities. In one embodiment, the circuit boards 122/124 are formed in a reel-to-reel process, and after testing, an adhesive is applied to the final station. The circuit boards 122/124 may have test tabs cut during singulation. After singulation, the circuit boards 122/124 are adhered to the base circuit board 120. As an arbitrary example, one circuit board 122 may be an A / D converter, and the other circuit board may be a D / A converter. FIG. 18 illustrates another technique for mounting the circuit board 122 to the base circuit board 120. In FIG. 18, the circuit board 122 is perforated at the electrical connection position at the area 128. Subsequently, a dielectric adhesive is used to coat the bottom side (not the device side) of the circuit board 122 and the circuit board 122 is adhered to the base circuit board 120, so the perforations are above the connection terminals on the base circuit board 120. Subsequently, a conductive adhesive 130 is deposited through the through holes to connect the terminals of the base circuit board 120 to the top terminals of the circuit board 122. For example, the traces 132 and 134 are connected by a conductive adhesive 130. This technique can also be used in conjunction with the double-sided circuit board of FIG. 16. Using a large number of redundant arrays of devices (e.g., device 40 in FIG. 11) and standard passive devices in patch area 86 (e.g., resistors R1 to R3 in FIG. 11) allows the board to have very high throughput rates and Generate a programmable circuit board that can then be programmed to make unique devices as needed. For higher density device groups, multiple insulating layers of the group can be printed to form a three-dimensional structure. Vertical vias can be used to access various layers. Groups of devices can be connected in series using vertically aligned groups. FIG. 19 schematically illustrates one possible assembly line for manufacturing a circuit by printing in a reel process. The roll 136 contains a substrate material and the roll 138 is a take-up roll. Mark various stations. The program sequentially prints the various layers and cures the layers. Offset printing is preferably used for printing using a roll-to-roll process. The number of layers depends on the complexity of the printed circuit and device. Depending on a particular customer need, the reel-to-roll process can produce unprogrammed circuit boards and a separate system can be used for the final programming step. Various directional attributes (such as bottom, top, and vertical) as used herein should not be interpreted as conveying an absolute direction relative to the surface of the earth, but rather to convey the orientation relative to the drawing when the chart is held vertically. In a practical embodiment, these terms still apply to a product regardless of its absolute orientation relative to the surface of the earth. For complex circuits that require a large number of electrical components, very small dots with high density of printing devices in highly defined areas, such as in an array, may be desirable. Each point acts as a single electrical component. One of the limiting factors of the printed dots is the presence of some diffusion of the liquid (ie, the ink containing the device) on the substrate, regardless of the printed pattern. The liquid used in the device ink is designed for the hydrodynamics needed to achieve the proper orientation of the microelectronic device and has not been optimized to limit the diffusion after printing on the substrate. In addition, conventional printing masks, such as screen printing, have limited resolution, where the resolution must take into account that the mask must pass through an electronic device. The following methods can be used to greatly reduce the size of points, increase the density of points, and improve the accuracy of positioning of points. Using the following method, the separation of dots can be reduced to about 3 microns, and the diameter of the dots can be smaller than the diameter of dots that can be achieved using conventional printing methods using device inks. Generally, the method requires patterning a hydrophobic (or lyophobic) layer on a substrate. Patterning can be patterned by using high-resolution printed masks or even photolithography. Hydrophobic materials are optimized for printing (eg, optimized viscosity for limited diffusion), so they can be patterned to much higher resolution and accuracy than device ink printing. The hydrophobic layer is patterned to form extremely small and dense openings that expose the substrate. The bottom conductor layer can be printed so that each opening in the hydrophobic layer contains a device contact pad and a trace leading to a patch area on the substrate. The conductive layer can be painted across the surface to fill the opening, or the hydrophobic layer can pattern the conductive layer by its hydrophobic effect, or both. Therefore, the conductor layers and traces are self-aligned with the patterned hydrophobic layer. The device ink can then be deposited over the patterned hydrophobic layer and the conductor layer, and the ink will repel from the hydrophobic layer and only reside in the opening. Capillary action causes all liquid to reside in the opening, forming a device point. Therefore, it is the patterned defined points of the hydrophobic layer rather than a device ink printing mask. To use the ink more economically, the ink can be blanket-deposited without a printing mask or a printing mask can be used to pattern the dots coarsely. The device ink can also be applied across the hydrophobic layer to fill the opening. The device ink is then cured and the electrical components, such as transistors or diodes, are properly oriented so that the bottom terminal of the device is ohmically connected to the bottom conductor layer. A dielectric layer is then printed, and then a top conductor layer is printed over the device to connect the devices in each opening in parallel. The top conductor layer may include traces extending to the patch area. Therefore, the top conductor layer can also be self-aligned to the device using a hydrophobic layer. The hydrophobic layer repels all printed devices and conductive ink. The hydrophobic layer can also form a wall, so one or more printed layers can be applied over the surface to reside only in the opening. In either case, the resolution and positioning of all layers is defined by the hydrophobic layer. Multiple hydrophobic layers can be patterned to define different printed layers. FIG. 20 is a top view of a programmable circuit 150, where each point 152 represents a group of printed electrical devices (eg, device 40 in FIG. 3), and the mid-point area is defined by a patterned lyophobic layer 154. The lyophobic layer 154 may also define conductor areas and traces 156 that lead to the patch area 158 for interconnecting the top and bottom conductors of each point 152 to form virtually any type of digital circuit or even a digital circuit. Analog circuit. For a three-terminal device, such as a transistor, there will be three or more conductor layers. The array of dots 152 may include a variety of devices, such as bipolar and MOS transistors, resistors, diodes, and the like. The electrical terminals of the circuit may include a power supply terminal V + and ground, differential input terminals In1 and In2, and differential output terminals Out1 and Out2. The entire circuit 150 may be formed by printing under atmospheric conditions. FIG. 21 is a cross section of one of the circuits 150 of FIG. 20 divided into four points 152 after printing the lyophobic layer 154 and after printing a bottom conductor layer 160. The lyophobic layer 154 need not be formed directly on the surface of the substrate 162. The bottom conductor layer 160 forms an isolated contact for a subsequent printing device and may include traces leading to the patch area 158 shown in FIG. 20. The liquid-repellent layer may be a conventional liquid-repellent material printed using screen printing, offset printing, or other printing methods. Such a material may be a fluorine-based material such as Teflon or other commercially available materials. Various materials are known to repel different liquids, and the choice of these lyophobic materials will depend on the solution used for the device ink and the conductor ink. The solution may be alcohol-based. The lyophobic layer 154 may be a hydrophobic layer. The lyophobic layer 154 can also be a layer with very fine roughening, which causes the overlying layer to be essentially supported by an air cushion to prevent wetting. The lyophobic material can be optimized for fine patterning, which can be much finer than using conventional screen printing and offset printing patterning device inks. For example, the device ink solution is selected for proper fluid dynamics to allow microdevices to have proper orientation as they settle on the bottom conductor. The device ink solution may have an extremely low viscosity, which causes the dots to spread, thereby limiting the density of the dots. In addition, device ink printing resolution can be limited due to the size of the micro-devices in the ink. In contrast, lyophobic materials have no such restrictions and can be patterned to a resolution of only a few microns. In addition, any small diffusion of the liquid-lyophobic layer 154 will desirably make the openings smaller, and thus the dot size smaller, because it is a negative image of the dot pattern. In one embodiment, the lyophobic material is first printed and cured to define various dot areas and conductor patterns. Light lithography can also be used for finer patterning. The substrate 162 may be any suitable material, such as PMMA, FR-4, paper, and the like. A conductive ink is then printed, which may include metal particles in a solution. The conductive ink may be printed in the openings of the lyophobic layer 154, or may be blanket-deposited and applied over the surface to fill the openings in the lyophobic layer 154. In one embodiment, the conductive ink layer extends to the height of the lyophobic layer 154 before curing, so that the surface is flat. Curing the conductive ink layer to form the bottom conductive layer 160 will cause some shrinkage. Any subsequent device ink or conductor ink will also repel from the hydrophobic surface and accumulate above the bottom conductor layer 160. Therefore, all printed layers are self-aligned. FIG. 22 shows the structure after the printing device ink 166, in which the lyophobic layer 154 defines the shapes of the points 152 and the conductor. Even with the blanket printing device ink 166, all ink will remain in the opening due to the repellency of the liquid-repellent layer 154. FIG. 23 illustrates a structure after the device ink is cured to form a single-layer electrical device 170, and the bottom terminals of the single-layer electrical device 170 are in electrical contact (eg, ohmic contact) with the bottom conductor layer 160. A dielectric layer (such as dielectric layer 60 in FIG. 4) is then printed to insulate the bottom conductor layer 160. Next, a top conductor layer 172 is printed and cured to ohmically contact the top terminal of the electrical device 170. If the electrical device 170 has three layers of terminals, such as the transistor shown in FIG. 4, an additional conductor layer and a dielectric layer will be printed. The top conductor layer 172 may be defined using another patterned lyophobic layer (outside of the cross section of FIG. 23), which causes the top conductor to overlap the bottom conductor. In this embodiment, the liquid-repellent properties of the first liquid-repellent layer 154 may need to be neutralized by a corona treatment process to deposit another liquid-repellent layer above it and over any other portion of the surface. The good or poor wetting of a material by a liquid depends primarily on the chemical properties of both the liquid and the surface. Wetting is defined as the ratio between the surface energy of a liquid and a surface. In general, the following rules apply: If the surface energy (= dyn / cm) of a material is higher than the surface energy of a liquid, the material will be wetted. If not, there will be a sticking problem. Pretreatment provided by the corona treatment may be required to obtain sufficient wetting and adhesion before printing. Corona discharge unit optimizes wetting and adhesion. This corona technique has proven to be highly effective and cost-effective and can occur online. This corona treatment is well known. The top and bottom conductor layers for each point 152 area are electrically isolated and may have patch areas 158 extending to FIG. 20 for interconnecting with a stylized mask to customize the circuit traces 156 (FIG. 20 ). Programming can be performed by depositing a metal or by other techniques. Examples of circuits that can be formed include state machines, memories, clocks, logic circuits, and even analog circuits. Some groups of electrical devices can be connected in parallel for conducting higher currents, such as for LED drivers. For an array of large numbers of dots 152, the conductor pattern can become excessively complex, and large parasitic capacitances of the overlying traces can occur. FIG. 24 illustrates an alternative embodiment in which, for each isolated point 152, the bottom conductor layer 160 is extended to the bottom side of the substrate 162 by using a conductive via 174 to facilitate the wiring of the traces and reduce the parasitic capacitance effect. Therefore, the bottom side of the substrate 162 will contain all the bottom conductor traces leading to the patch area 158 (FIG. 20). FIG. 25 illustrates how a programmable circuit can include any number of device layers to increase device density. In FIG. 25, a dielectric layer 178 is printed over the conductor layer 174, then another conductor layer 180 is printed, then another device layer 182 is printed, and then another conductor layer 184 is printed. Basically, the steps are the same as forming the layers of FIGS. 21 to 24. Any number of layers can be formed for any circuit complexity. FIG. 26 is a flowchart identifying steps for forming the programmable circuit 150 of FIG. 20. In step 190, a suitable substrate is provided. In step 192, a lyophobic layer is printed in a pattern to expose a region of the substrate surface where the isolation device dots will be formed and also define a conductor pattern. The conductor pattern may include traces leading to a patch area. In step 194, a bottom conductor layer is printed, where the conductor ink resides only in the openings in the lyophobic layer. The conductor ink printing program can rough define the conductor pattern, and the lyophobic layer then accurately defines the conductor pattern. The conductive ink is then cured. In step 196, the device ink is printed over the surface so that the device ink is defined by the patterning (opening) of the lyophobic layer. In step 198, the device ink is cured to cause the bottom terminal of the device to be electrically (eg, ohmic) connected to the bottom conductor layer. In step 200, the surface of the lyophobic layer is optionally subjected to a corona treatment to neutralize the surface. This allows subsequent layers to be formed over the middle and lyophobic layers, such as for printing a new lyophobic layer that defines one of the subsequent layers. In step 202, a dielectric layer is printed over the bottom conductor layer and between the electrical devices for insulating the bottom conductor layer. In step 204, a second lyophobic layer may be printed to define a top conductive layer. In step 206, the top conductor layer is printed and cured to electrically (e.g., ohms) contact the top terminals of the electrical device and connect all electrical devices in a single point in parallel, such as shown in FIG. The programmable circuit is now complete, assuming the device requires only two terminals. In step 208, the programming of the circuit is performed, for example, by interconnecting various leads of the bottom and top conductor layers to form any type of logic circuit or analog circuit upon request from a customer. Although specific embodiments of the invention have been shown and described, those skilled in the art will understand that changes and modifications can be made without departing from the broader aspects of the invention, and therefore the scope of the accompanying patent application for invention will fall within their scope It is intended to cover all such changes and modifications that fall within the true spirit and scope of the invention.

16‧‧‧發光二極體(LED)16‧‧‧Light Emitting Diode (LED)

18‧‧‧底部金屬陰極電極/底部發光二極體(LED)電極18‧‧‧ bottom metal cathode electrode / bottom light emitting diode (LED) electrode

20‧‧‧頂部金屬陽極電極20‧‧‧ Top metal anode electrode

22‧‧‧基板22‧‧‧ substrate

24‧‧‧反射導體層/下伏導體24‧‧‧Reflective conductor layer / under conductor

26‧‧‧介電層26‧‧‧ Dielectric layer

28‧‧‧頂部透明導體層28‧‧‧ Top transparent conductor layer

30‧‧‧金屬匯流排條30‧‧‧Metal bus bar

31‧‧‧金屬匯流排條31‧‧‧Metal bus bar

32‧‧‧金屬匯流排條32‧‧‧Metal bus bar

33‧‧‧金屬匯流排條33‧‧‧Metal bus bar

38‧‧‧光線38‧‧‧light

40‧‧‧三端裝置/裝置40‧‧‧Three-terminal device / device

40A‧‧‧裝置40A‧‧‧device

40B‧‧‧npn雙極電晶體/裝置40B‧‧‧npn bipolar transistor / device

40C‧‧‧p通道MOSFET/裝置40C‧‧‧p-channel MOSFET / device

42‧‧‧下區段42‧‧‧ lower section

44‧‧‧上區段44‧‧‧ Upper Section

46‧‧‧金屬頂部電極46‧‧‧Metal top electrode

48‧‧‧金屬中間電極48‧‧‧metal intermediate electrode

50‧‧‧起始基板50‧‧‧ starting substrate

52‧‧‧導體層52‧‧‧conductor layer

54‧‧‧導電通孔54‧‧‧ conductive via

56‧‧‧金屬層56‧‧‧ metal layer

58‧‧‧底部電極58‧‧‧ bottom electrode

60‧‧‧介電層60‧‧‧ Dielectric layer

62‧‧‧中間導體層62‧‧‧Intermediate conductor layer

64‧‧‧介電層64‧‧‧ Dielectric layer

66‧‧‧頂部導體層66‧‧‧Top conductor layer

67‧‧‧印刷步驟67‧‧‧Printing steps

68‧‧‧金屬層68‧‧‧metal layer

69‧‧‧固化步驟69‧‧‧Cure step

72‧‧‧群組72‧‧‧group

74‧‧‧群組74‧‧‧group

75‧‧‧導電跡線75‧‧‧ conductive trace

76‧‧‧供應電壓端子76‧‧‧ supply voltage terminal

78‧‧‧供應電壓端子78‧‧‧ supply voltage terminal

80‧‧‧輸入端子80‧‧‧input terminal

82‧‧‧輸入端子82‧‧‧input terminal

84‧‧‧輸出端子84‧‧‧output terminal

85‧‧‧導電跡線/跡線85‧‧‧Conductive traces / traces

86‧‧‧補片區域86‧‧‧ Patch area

87‧‧‧可程式化電路板/電路板87‧‧‧ Programmable circuit board / circuit board

88‧‧‧端子88‧‧‧Terminal

90‧‧‧程式化跡線90‧‧‧ stylized trace

94‧‧‧疏水遮罩94‧‧‧ hydrophobic mask

96‧‧‧區域96‧‧‧ area

98‧‧‧導體98‧‧‧Conductor

100‧‧‧疏水遮罩100‧‧‧ hydrophobic mask

102‧‧‧連接器102‧‧‧Connector

103‧‧‧連接器103‧‧‧ Connector

106‧‧‧電路板106‧‧‧Circuit Board

108‧‧‧基板108‧‧‧ substrate

110‧‧‧群組110‧‧‧group

112‧‧‧群組112‧‧‧group

114‧‧‧跡線114‧‧‧trace

116‧‧‧跡線116‧‧‧trace

118‧‧‧通孔118‧‧‧through hole

120‧‧‧電路板120‧‧‧Circuit Board

122‧‧‧電路板122‧‧‧Circuit Board

124‧‧‧電路板124‧‧‧Circuit Board

126‧‧‧端子126‧‧‧Terminal

128‧‧‧區域128‧‧‧ area

130‧‧‧導電黏著劑130‧‧‧Conductive Adhesive

132‧‧‧跡線132‧‧‧trace

134‧‧‧跡線134‧‧‧trace

136‧‧‧輥136‧‧‧roller

138‧‧‧輥138‧‧‧roller

150‧‧‧可程式化電路150‧‧‧ programmable circuit

152‧‧‧點152‧‧‧ points

154‧‧‧疏液層154‧‧‧lyophobic layer

156‧‧‧導體區域/跡線/第二導體層/導電線/電連接器156‧‧‧Conductor area / trace / second conductor layer / conductive wire / electrical connector

158‧‧‧補片區域/第二導體層/互連區域/終接區域158‧‧‧ patch area / second conductor layer / interconnect area / termination area

160‧‧‧底部導體層160‧‧‧ bottom conductor layer

162‧‧‧基板162‧‧‧ substrate

166‧‧‧裝置墨水166‧‧‧device ink

170‧‧‧電裝置170‧‧‧Electric device

172‧‧‧頂部導體層172‧‧‧Top conductor layer

174‧‧‧導電通孔174‧‧‧ conductive via

178‧‧‧介電層178‧‧‧ Dielectric layer

180‧‧‧導體層180‧‧‧conductor layer

182‧‧‧裝置層182‧‧‧device level

184‧‧‧導體層184‧‧‧conductor layer

190‧‧‧步驟190‧‧‧step

192‧‧‧步驟192‧‧‧step

194‧‧‧步驟194‧‧‧step

196‧‧‧步驟196‧‧‧step

198‧‧‧步驟198‧‧‧step

200‧‧‧步驟200‧‧‧ steps

202‧‧‧步驟202‧‧‧step

204‧‧‧步驟204‧‧‧step

206‧‧‧步驟206‧‧‧step

208‧‧‧步驟208‧‧‧step

r1‧‧‧電阻器r1‧‧‧ resistor

r2‧‧‧電阻器r2‧‧‧ resistor

R1‧‧‧電阻器R1‧‧‧ resistor

R2‧‧‧電阻器R2‧‧‧ resistor

R3‧‧‧電阻器R3‧‧‧ resistor

圖1係可使用受讓人之先前技術程序形成之經印刷微觀垂直LED之一鬆散單層之一截面。 圖2係圖1之結構之一俯視圖,其中圖1係跨水平對分之圖2取得。 圖3係根據本發明之一實施例之已從一晶圓單件化之一單個三端電晶體之一透視圖。電晶體經混合至一溶液中以形成用於印刷在一基板上之一墨水。 圖4係使用導體層之三個平面並聯連接之圖3之電晶體之一經印刷層之一小部分之一截面。可在各單獨群組中印刷大約10個並聯連接電晶體,且在基板上方印刷群組之一陣列。 圖5圖解說明圖3之電晶體如何可為一npn雙極電晶體。 圖6圖解說明圖3之電晶體如何可為一p通道MOSFET。 圖7及圖8圖解說明一些電晶體在印刷時可如何藉由電晶體之不當定向而「不正確地」互連,其中互連未不利影響不當定向之電晶體之功能。 圖9係識別MOSFET及雙極電晶體之頂部電極、底部電極及中間電極之較佳功能之一圖表。 圖10圖解說明使電晶體之群組互連以形成一邏輯電路。 圖11圖解說明裝置之各種群組之引線可如何被帶至基板之一補片區域以用於使群組互連。在另一實施例中,可將由群組製成之邏輯閘(例如,NAND閘)之引線帶至補片區域。 圖12係使用一疏水性遮罩圖案化之導體之一俯視圖。 圖13係使用圖12之遮罩形成之導體線之一者之一截面圖。 圖14圖解說明疏水性遮罩可如何用於形成導體線以使裝置之群組互連以形成邏輯電路。 圖15圖解說明可如何藉由導體接觸經印刷電阻材料之位置判定電阻器值。 圖16圖解說明裝置可如何被印刷在一基板之兩側上且藉由一通孔互連。 圖17圖解說明電路可如何被印刷在相對較小基板上且經測試,隨後小基板在一客製化步驟期間附接至一較大「基底」基板。 圖18圖解說明圖17之小基板上之電極可如何接合至基底基板上之電極。 圖19圖解說明可用於形成電路之一捲軸式程序。 圖20係一可程式化電路之一俯視圖,其中各點表示一經印刷電裝置群組,且其中點區域藉由一經圖案化疏液層(或疏水性層)界定。 圖21係在印刷疏液層之後且在印刷一底部導體層之後對分四個點之圖20之電路之一橫截面。底部導體層形成用於後續印刷裝置之經隔離接觸件,且可包含引至圖20中所示之補片區域之跡線。 圖22繪示印刷裝置墨水之後之結構,其中疏液層界定點及導體之形狀。 圖23繪示裝置墨水固化之後及印刷介電層之後以及印刷頂部導體層之後之結構。 圖24繪示一替代實施例,其中針對各經隔離點,底部導體層延伸至基板之底側以方便跡線之佈線並且減小寄生電容效應。 圖25繪示可程式化電路可如何包任意數目個裝置層以增大裝置密度。 圖26係識別用於形成圖20之可程式化電路之步驟之一流程圖。 在各種圖中,類似或相同之元件用相同數字標記。Figure 1 is a cross-section of a loose monolayer of a printed micro vertical LED that can be formed using the assignee's prior art procedures. FIG. 2 is a top view of one of the structures of FIG. 1, where FIG. 1 is obtained across FIG. 3 is a perspective view of a single three-terminal transistor that has been singulated from a wafer according to an embodiment of the present invention. The transistor is mixed into a solution to form an ink for printing on a substrate. Fig. 4 is a cross section of a small portion of a printed layer of one of the transistors of Fig. 3 connected in parallel using three planes of a conductor layer. Approximately ten parallel-connected transistors can be printed in each individual group, and an array of one group can be printed above the substrate. FIG. 5 illustrates how the transistor of FIG. 3 can be an npn bipolar transistor. FIG. 6 illustrates how the transistor of FIG. 3 can be a p-channel MOSFET. Figures 7 and 8 illustrate how some transistors can be "incorrectly" interconnected by improper orientation of the transistors during printing, where the interconnection does not adversely affect the function of the improperly oriented transistors. FIG. 9 is a diagram for identifying one of the preferred functions of the top electrode, the bottom electrode, and the middle electrode of the MOSFET and the bipolar transistor. FIG. 10 illustrates interconnecting groups of transistors to form a logic circuit. FIG. 11 illustrates how the leads of various groups of a device can be brought to a patch area of a substrate for interconnecting the groups. In another embodiment, the leads of a logic gate (eg, a NAND gate) made of a group can be brought to the patch area. Figure 12 is a top view of one of the conductors patterned using a hydrophobic mask. FIG. 13 is a cross-sectional view of one of the conductor lines formed using the mask of FIG. 12. FIG. 14 illustrates how a hydrophobic mask can be used to form conductor lines to interconnect groups of devices to form a logic circuit. FIG. 15 illustrates how a resistor value can be determined by the position where a conductor contacts a printed resistive material. FIG. 16 illustrates how devices can be printed on both sides of a substrate and interconnected by a via. FIG. 17 illustrates how a circuit can be printed on and tested on a relatively small substrate, and the small substrate is then attached to a larger "base" substrate during a customization step. FIG. 18 illustrates how the electrodes on the small substrate of FIG. 17 can be bonded to the electrodes on the base substrate. FIG. 19 illustrates one of the scroll programs that can be used to form a circuit. FIG. 20 is a top view of a programmable circuit, in which each point represents a group of printed electrical devices, and a mid-point area is defined by a patterned lyophobic layer (or hydrophobic layer). Fig. 21 is a cross section of one of the circuits of Fig. 20 divided into four points after printing the lyophobic layer and after printing a bottom conductor layer. The bottom conductor layer forms isolated contacts for subsequent printing devices, and may include traces leading to the patch area shown in FIG. 20. FIG. 22 shows the structure after the ink of the printing device, where the lyophobic layer defines the points and the shape of the conductor. FIG. 23 shows the structures after the device ink is cured, after the dielectric layer is printed, and after the top conductor layer is printed. FIG. 24 illustrates an alternative embodiment in which for each isolated point, the bottom conductor layer extends to the bottom side of the substrate to facilitate the wiring of the traces and reduce the parasitic capacitance effect. FIG. 25 illustrates how a programmable circuit can include any number of device layers to increase device density. FIG. 26 is a flowchart identifying steps for forming the programmable circuit of FIG. 20. In the various figures, similar or identical elements are labeled with the same numerals.

Claims (25)

一種用於形成一電路(150)之方法,其包括: 圖案化上覆於一基板(162)之一第一材料(154),以界定一或多個開口; 在該第一材料上方沈積一第一溶液(166),該第一溶液含有經預成形、半導體電裝置(40),其中該第一材料阻止藉由該第一溶液潤濕,使得該第一溶液實質上僅駐留在該一或多個開口內; 固化該第一溶液,使得該一或多個開口內之該等電裝置之電端子(18、58)至少電接觸上覆於該基板之一第一導體層(160);及 形成至少一第二導體層(156、172),以使至少一些該等電裝置互連以達成一電功能。A method for forming a circuit (150), comprising: patterning a first material (154) overlying a substrate (162) to define one or more openings; and depositing a first material over the first material. A first solution (166) containing a pre-formed, semiconductor electrical device (40), wherein the first material prevents wetting by the first solution such that the first solution resides substantially only in the first Or the plurality of openings; curing the first solution so that the electrical terminals (18, 58) of the electrical devices in the one or more openings make at least electrical contact with a first conductor layer (160) overlying the substrate ; And forming at least a second conductor layer (156, 172) to interconnect at least some of these electrical devices to achieve an electrical function. 如請求項1之方法,進一步包括: 形成用於供應一輸入信號之一或多個輸入端子(In1、In2);及 形成用於供應一輸出信號之一或多個輸出端子(Out1、Out2),其中該輸入信號係藉由該等電裝置變換,且該經變換信號係在該一或多個輸出端子處輸出。The method of claim 1, further comprising: forming one or more input terminals (In1, In2) for supplying an input signal; and forming one or more output terminals (Out1, Out2) for supplying an output signal , Wherein the input signal is transformed by the electrical devices, and the transformed signal is output at the one or more output terminals. 如請求項1之方法,其中經定位於該一或多個開口之各者中之該等電裝置(40)形成該等電裝置之一單獨群組(152),各群組中之該等電裝置係藉由至少該第二導體層(172)並聯連接。The method of claim 1, wherein the electrical devices (40) positioned in each of the one or more openings form a separate group (152) of the electrical devices, the The electrical devices are connected in parallel by at least the second conductor layer (172). 如請求項3之方法,其中該等電裝置(40)係隨機分佈在該基板上之各群組(152)內。The method of claim 3, wherein the electric devices (40) are randomly distributed in each group (152) on the substrate. 如請求項3之方法,進一步包括: 形成至少該第二導體層(156、158),以使電裝置(40)之該等單獨群組(152)互連以達成該電功能。The method of claim 3, further comprising: forming at least the second conductor layer (156, 158) to interconnect the separate groups (152) of the electrical device (40) to achieve the electrical function. 如請求項5之方法,進一步包括形成該基板(162)上之一互連區域(158),其中至少該第二導體層提供從該等電裝置之該等單獨群組(152)引至該互連區域以用於使該等群組電互連以達成該電功能的導電線(156)。The method of claim 5, further comprising forming an interconnect region (158) on the substrate (162), wherein at least the second conductor layer provides lead from the separate groups (152) of the electrical devices to the Interconnected areas are conductive wires (156) for electrically interconnecting the groups to achieve the electrical function. 如請求項1之方法,進一步包括形成至少該第二導體層(156、172),以使該等電裝置(40)互連以形成邏輯閘。The method of claim 1, further comprising forming at least the second conductor layer (156, 172) to interconnect the electrical devices (40) to form a logic gate. 如請求項7之方法,進一步包括使該等邏輯閘電互連,以達成該電功能。The method of claim 7, further comprising interconnecting the logic gates to achieve the electrical function. 如請求項1之方法,其中該第一材料(154)係疏液的。The method of claim 1, wherein the first material (154) is lyophobic. 如請求項1之方法,其中該第一材料(154)係疏水性的。The method of claim 1, wherein the first material (154) is hydrophobic. 一種電路,其包括: 一基板(162); 一第一材料(154),其上覆於該基板,且經圖案化以界定一或多個開口; 經預成形、半導體電裝置(40)之複數個單獨群組(152),其等已經混合在一第一溶液(166)中,經沈積於該基板上方,且經固化, 其中該第一材料阻止藉由該第一溶液潤濕,使得該第一溶液僅駐留在該一或多個開口內; 至少一第一導體層(160),其上覆於藉由該一或多個開口暴露之該基板,使得該一或多個開口內之該等電裝置之第一電端子(18、58)係電接觸至少該第一導體層;及 至少一第二導體層(156、172),其接觸該等電裝置之第二電端子(20、46),以使至少一些該等電裝置互連以達成一電功能。A circuit includes: a substrate (162); a first material (154) overlying the substrate and patterned to define one or more openings; a preformed, semiconductor electrical device (40) A plurality of separate groups (152), which have been mixed in a first solution (166), deposited on the substrate, and cured, wherein the first material prevents wetting by the first solution such that The first solution resides only in the one or more openings; at least one first conductor layer (160) overlies the substrate exposed through the one or more openings so that the one or more openings The first electrical terminals (18, 58) of the electrical devices are in electrical contact with at least the first conductor layer; and at least one second conductive layer (156, 172), which contacts the second electrical terminals of the electrical devices ( 20, 46) to interconnect at least some of these electrical devices to achieve an electrical function. 如請求項11之電路,其中至少該第二導體層(172)並聯連接該一或多個開口之各者中之該等電裝置(40),以形成該等電裝置之單獨群組(152),該電路進一步包括使電裝置之該等單獨群組互連以達成該電功能之至少該第二導體層(158)。The circuit of claim 11, wherein at least the second conductor layer (172) connects the electrical devices (40) in each of the one or more openings in parallel to form a separate group (152) of the electrical devices ), The circuit further includes at least the second conductor layer (158) interconnecting the separate groups of electrical devices to achieve the electrical function. 如請求項12之電路,其中至少該第二導體層(158)形成一互連導體圖案,以使該等裝置(40)之至少一些該等群組(152)互連在一起,以達成該電功能。The circuit of claim 12, wherein at least the second conductor layer (158) forms an interconnected conductor pattern to interconnect at least some of the groups (152) of the devices (40) together to achieve the Electric function. 如請求項13之電路,進一步包括: 用於供應一輸入信號之一或多個輸入端子(In1、In2);及 用於供應一輸出信號之一或多個輸出端子(Out1、Out2),其中該輸入信號係在該互連導體圖案形成後藉由該等電裝置(40)變換,且該經變換信號係在該一或多個輸出端子處輸出。The circuit according to claim 13, further comprising: one or more input terminals (In1, In2) for supplying an input signal; and one or more output terminals (Out1, Out2) for supplying an output signal, wherein The input signal is transformed by the electrical devices (40) after the interconnection conductor pattern is formed, and the transformed signal is output at the one or more output terminals. 如請求項11之電路,其中該等電裝置(40)係隨機分佈在該基板(162)上之該第一材料(154)中之該一或多個開口之各者內。The circuit of claim 11, wherein the electrical devices (40) are randomly distributed in each of the one or more openings in the first material (154) on the substrate (162). 如請求項11之電路,其中該第一材料(154)係疏水性的。The circuit of claim 11, wherein the first material (154) is hydrophobic. 如請求項11之電路,其中該第一材料(154)係疏液的。The circuit of claim 11, wherein the first material (154) is lyophobic. 如請求項11之電路,其中該第一導體層(160)係由該第一材料(154)中之該一或多個開口界定。The circuit of claim 11, wherein the first conductor layer (160) is defined by the one or more openings in the first material (154). 如請求項11之電路,進一步包括: 一第二材料(204),其係沈積於該第一材料(154)上方,且經圖案化以具有第二開口;及 一導電材料(206),其經沈積於該等第二開口中,該導電材料係以一第二溶液沈積, 其中該第二材料阻止藉由該第二溶液潤濕,使得該第二溶液僅駐留在該等第二開口內,從而導致該導電材料係由該第二材料中之該等第二開口界定。The circuit of claim 11, further comprising: a second material (204), which is deposited over the first material (154) and is patterned to have a second opening; and a conductive material (206), which After being deposited in the second openings, the conductive material is deposited in a second solution, wherein the second material prevents wetting by the second solution, so that the second solution resides only in the second openings. Therefore, the conductive material is defined by the second openings in the second material. 如請求項11之電路,其中該一或多個開口之各者內之該等電裝置(40)形成該等電裝置之一群組(152),其中各群組具有自其相關聯群組延伸之至少一電連接器(156),其中各電連接器終接於一終接區域(158),且其中一互連導體圖案使該終接區域中之該等群組電互連。As claimed in the circuit of item 11, the electrical devices (40) within each of the one or more openings form a group (152) of the electrical devices, wherein each group has its own associated group The extended at least one electrical connector (156), wherein each electrical connector is terminated in a termination area (158), and an interconnecting conductor pattern electrically interconnects the groups in the termination area. 如請求項11之電路,其中該等電裝置(40)包括相同的第一裝置(16),該電路進一步包括: 經預成形、半導體第二電裝置(40)之複數個單獨群組,其等已經混合在一第二溶液中,經沈積於該基板(162)上方該一或多個開口中且經固化,該等第二電裝置係不同於該等第一電裝置;及 至少該第二導體層(156、172),其使該等第一電裝置及該等第二電裝置之群組互連以達成該電功能。If the circuit of claim 11, wherein the electrical devices (40) include the same first device (16), the circuit further includes: a plurality of separate groups of pre-formed, semiconductor second electrical devices (40), which After having been mixed in a second solution, deposited in the one or more openings above the substrate (162) and cured, the second electrical devices are different from the first electrical devices; and at least the first Two conductor layers (156, 172) that interconnect the groups of the first electrical devices and the second electrical devices to achieve the electrical function. 如請求項11之電路,其中該等電裝置(40)係隨機分佈在該基板(162)上之各群組(152)內。For example, the circuit of claim 11, wherein the electrical devices (40) are randomly distributed in each group (152) on the substrate (162). 如請求項11之電路,其中至少該第二導體層(156、172)使該等群組(152)互連,以形成邏輯閘及該等邏輯閘之間的互連以達成該電功能。The circuit of claim 11, wherein at least the second conductor layer (156, 172) interconnects the groups (152) to form a logic gate and an interconnection between the logic gates to achieve the electrical function. 如請求項11之電路,其中該等電裝置包括二極體(16)及電晶體(40)之至少一者。The circuit of claim 11, wherein the electric devices include at least one of a diode (16) and a transistor (40). 如請求項11之電路,進一步包括連接不同導電材料層以形成一3維結構之導電通孔(118、174)。The circuit of claim 11, further comprising connecting conductive conductive layers (118, 174) to form a three-dimensional structure.
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