TW201823763A - Method and device for automatic detection and correction of probe card capable of shortening the time required for detection and correction, so as to reduce maintenance cost and labor cost while increasing the working efficiency - Google Patents

Abstract

A method for automatically detecting and correcting a probe card, comprising: identifying a position of each pin of the probe card by a measuring unit; comparing the position of each of the above positions with a standard position to determine a deviation between the two; marking a pin of deviation as an erroneous pin; calculating the displacement vector between the position of the erroneous pin and the standard position; feeding the probe card to a correction unit, wherein the correction unit has a working position, and the erroneous pin of the probe card is directly sent to the working position of the correction unit; controlling the erroneous pin by the correction unit, and correcting the erroneous pin by the relative movement of the displacement vector between a transport unit and the correction unit; after completing the correction of an erroneous pin, directly transporting the next erroneous pin to the working position. This invention also provides an automatic detection and correction device for a probe card.

Description

Method and device for automatically detecting and correcting probe card

The invention relates to the detection of a probe card, and more particularly to a device and method for automatically detecting and correcting a probe card.

According to the applicant, the applicant of this case has previously applied for an invention patent on the detection method of the probe card and the device applying the method, and has now been approved as the patent of I525327. The technical content of the patent discloses a detection device, which includes a working platform. The working platform is provided with a measuring section, a calibration section and a conveying section, and the probe card to be tested is first identified and marked by the measuring section. When the wrong pin is found, the probe card is moved to the correction section by the conveying section, and then the wrong pin is corrected by the correction section. There is no need to disassemble the probe card in the process, which saves time and improves detection accuracy Good advantages.

However, in the above-mentioned conventional device, the correction unit still needs to be operated manually, so in addition to the maintenance cost of the machine, it also needs to expend manpower costs, which relatively reduces the commercial profit space. In view of this, the development of a probe card detection device and method that can take into account both automatic detection and calibration is the primary problem to be solved by the present invention.

One object of the present invention is to provide a method and device for detecting a probe card, which uses a measuring unit to detect the probe card, and then marks the feet that are out of position, and then directly conveys the marked feet to the calibration unit. Calibration to shorten the time of detection and calibration and improve work efficiency.

The second purpose of the present invention is to make the detection and calibration of the probe card an automated operation, thereby reducing the cost and increasing the profit.

In order to achieve the foregoing object, the present invention provides a method for automatically detecting and correcting a probe card, which includes: 辨识 identifying a position of each foot of a probe card by a measuring unit; comparing the position of each of the above foot positions with a Standard position to determine the deviation between the two; If the two mentioned above have a deviation, mark the foot with the deviation as an incorrect foot; Calculate a displacement vector of the difference between the position of the wrong foot and the standard position; A conveying part conveys the probe card to a correction part; wherein the correction part has a working position, and the wrong foot position of the probe card is directly conveyed by the conveying part to the working position of the correction part; Control the wrong foot, and correct the wrong foot by the relative movement between the conveying part and the correction part according to the displacement vector; 后 After the correction of one wrong foot of the probe card, the next wrong foot The position is directly conveyed to the working position of the correction part by the conveying part.

In an embodiment, the method further includes: if the position of the pin of the probe card deviates from the standard position, and the deviation exceeds the tolerance value, marking the pin as an incorrect pin.

In one embodiment, the standard position is provided by a teaching file pre-built in the measuring section, and includes position and height information of each foot position.

In an embodiment, the method further includes: after the correction of the incorrect pin position of the probe card is completed, the probe card is returned to the measuring section for re-detection, and only the previously marked incorrect pin position is detected.

The invention further provides a probe card automatic detection and calibration device applying the above method, which includes: (1) a working platform provided with a column, the column provided with a slider that can be moved in a height direction; (1) a measurement section, which The measuring unit includes an image capture unit and an image comparison unit, wherein the image capture unit is used to capture an image of a probe card, and the image comparison unit has a built-in A teaching file containing the standard positions of the pins of the probe card. The image comparison unit identifies the pins of the probe card according to the image. The measurement unit further includes a labeling unit and a computing unit. The labeling unit The unit is used to mark the position of the foot of the probe card, and the calculation unit is used to compare the position of each foot with the standard position, and calculate a displacement vector of the difference between the two projected on the working platform; The control unit is provided on the slider; the correction unit is provided with a control member that can generate a displacement in the height direction with the slider to control the foot position of the probe card; the control member is on the working platform There should be a work position; (1) a conveying section, which is set on the working platform; the conveying section is provided with a carrier for carrying the probe card; the conveying section can drive the carrier to perform two-dimensional direction along the work platform; Displacement to directly transport the position where the probe card is marked by the marking unit to the working position, and a relative movement can be generated between the conveying part and the correction part according to the displacement vector, thereby correcting the foot of the probe card Bit.

In an embodiment, the working platform is provided with an optical ruler for generating the coordinates of the position marked by the marking unit, and using the coordinates to cause the conveying section to directly transfer the position of the probe card to the position marked by the marking unit to The working position of the correction section.

The above-mentioned objects and advantages of the present invention can be easily understood from the detailed description and accompanying drawings of selected embodiments below.

Please refer to FIG. 1, which shows the probe card automatic detection and calibration method provided by the present invention. This method is implemented by a probe card automatic detection and calibration device, which is shown in FIGS. 2 and 3. It includes a work platform 1 and a post 12 is provided on the work platform 1, wherein the post 12 is provided with a slider 13 capable of moving in the height direction, and a measurement section 2 and a correction section 4 are provided on the slider 13. . The measuring section 2 includes an image capturing unit 21 and an image comparing unit 22, wherein the image capturing unit 21 is directly opposite to the work platform 1 for capturing an image of the probe card 5, and the image is compared The unit 22 is set in the measuring unit 2. It has a built-in teaching file containing the standard position of each foot of the probe card, including the position and height information of each foot. The image comparison unit 22 is based on the image. The image captured by the capturing unit 21 identifies the positions of the pins of the probe card 5. According to this, the image comparison unit 22 can compare the position of each foot to the teaching file, and then identify whether there is a deviation in the position of each foot; among them, the position of each foot can be observed by observing whether each foot in the image is It is obtained by deviating from the standard position in the teaching file, and the height of each foot position can be determined by observing whether each foot position in the image is in the focus of the image focus. For example, as shown in Figure 4, there is a pin that deviates from the standard position in block A of the probe card 5 (hereinafter referred to as the wrong pin 51). This pin 51 can be compared with the image comparison unit through It can be identified by the teaching file, which is conducive to subsequent calibration operations.

The measuring unit 2 further includes a marking unit 23 for marking the position of the foot of the probe card 5. In the present invention, the labeling unit 23 is used to mark the pin identified by the image comparison unit 22 as an error. In this embodiment, the working platform 1 is provided with an optical ruler 11 for generating coordinates of the position marked by the marking unit 23, and the working platform 1 is provided with extending along the mutually perpendicular and defined as the X axis and the Z axis. The two optical scales 11 respectively generate coordinate information of the two axes, and the coordinates of the wrong foot positions are recorded by the marking unit 23.

In addition, the measuring unit 2 is provided with a calculation unit 24 for comparing the position of the foot identified as an error by the image comparison unit 22 with the standard position, and calculating the projection of the two onto the work. The displacement vector of the gap on platform 1. As shown in FIG. 4, the calculation unit can calculate the position difference between the wrong foot position 51 and the standard position to obtain a displacement vector D.

On the other hand, the correction section 4 is provided on the slider 13, and the correction section 4 is provided with a control member 41 for controlling the foot position of the probe card 5, which can generate a height along the slider 13 along the height direction. Displacement. The tip of the control member 41 has a structure that can abut the 5-pin position of the probe card and can control it, and has a working position corresponding to the working platform 1.

Furthermore, the work platform 1 is provided with a conveying section 3, and the conveying section 3 is provided with a carrier 31 for carrying the probe card 5, and the conveying section 3 can drive the carrier 31 to be carried on the work platform 1. The two-dimensional displacement along the X-axis and the Z-axis causes the probe card 5 on the stage 31 to move between the measurement section 2 and the correction section 4. In this embodiment, after the marking unit 23 marks the wrong pin position on the probe card 5 and records its coordinates, the conveying unit 3 uses this coordinate to directly convey the marked position of the probe card 5 to the correcting unit 4 The working position allows the correction section 4 to immediately correct the wrong foot position.

The probe card detection method of the present invention applies the above-mentioned device, and the steps thereof are as shown in FIG. 1, including: placing the probe card on a stage and moving it to the measuring section; 撷 capturing with an image capturing unit The image of the probe card, and the position of the foot of the probe card is identified by the image comparison unit; the marking unit is used to mark the positions of the feet that deviate from the standard position; the calculation unit is used to calculate the deviated feet and the standard position The displacement vector of the gap; The probe card on the stage is conveyed to the correction section by the conveying section; wherein the conveyance section directly conveys the position marked by the labeling unit of the probe card to the working position of the correction section; 控制 is controlled by the correction section The wrong foot position is corrected by the relative movement of the displacement vector between the conveying part and the correction part according to the displacement vector; The conveying part directly conveys another position of the probe card marked by the marking unit to the The working position of the correction unit, and the marked foot position is corrected by the correction unit.

In this embodiment, before the above detection method is started, the method further includes inputting a teaching file about the standard position of the probe card pin position before the measurement section as the comparison basis of the image comparison unit, so as to follow up After capturing the image of the probe card to be detected, the image comparison unit will compare it to the teaching file, and then identify whether the position of the probe card's foot position is misaligned. If there is an incorrect foot as shown in Figure 4 In the case of bit 51, the marking unit is marked. It is further defined that the marking unit marks the positions of the feet whose positions deviate from the standard position and exceed the tolerance value, and then conveyed to the correction section for correction by the conveying section. When the marking unit marks the wrong pin position, its position will be recorded. In this embodiment, the coordinate information of the position can be generated by an optical ruler, and the conveyance unit uses this coordinate to mark the probe card with The position is directly transferred to the working position of the correction section, so that the correction section can immediately correct the wrong foot position.

The above-mentioned correction of the foot position of the probe card is shown in FIG. 5. After the wrong foot position 51 of the probe card 5 is moved to the working position of the correction part by the conveying part 3, the slider drives the control. The piece 41 moves downwards, so that the control piece 41 abuts the wrong foot position 51 and controls it, and then the wrong foot position 51 is performed by the relative movement between the conveying part 3 and the correction part 4 according to the displacement vector D. In this embodiment, the conveyance unit 3 calculates the displacement vector D of the difference between the wrong foot position 51 and the standard position according to the calculation unit to drive the stage 31 and the probe card 5 to move, and the correction The control part 41 of the part 4 does not move, so that the wrong foot position 51 is relatively pulled to return it to the standard position to complete the correction.

Next, the above-mentioned detection method further includes the step of transporting the probe card to the measuring section and re-detecting it after the calibration section corrects the foot position of the probe card. This step is only for the probe card that was previously The feet of the marking unit mark are tested, thereby reducing the detection range to shorten the time required for the detection, while taking into account the accuracy of the detection results. The method will continue to be performed in a loop until the error-free pins on the probe card are marked, and then the detection of the probe card can be completed.

However, the disclosure of the above embodiments is only used to illustrate the present invention and is not intended to limit the present invention. Therefore, the replacement of equivalent components should still belong to the scope of the present invention.

In summary, those skilled in the art can understand that the present invention can indeed achieve the aforementioned purpose, and it has indeed complied with the provisions of the Patent Law, and filed an application in accordance with the law.

‧‧‧Working Platform

11‧‧‧ optical ruler

12‧‧‧ post

13‧‧‧ slider

‧‧‧Measurement Department

21‧‧‧Image Acquisition Unit

22‧‧‧Image Comparison Unit

23‧‧‧Marking unit

24‧‧‧ Computing Unit

‧‧‧ Conveying Department

31‧‧‧ carrier

4‧‧‧ Calibration Department

41‧‧‧Control

5‧‧‧ Probe Card

51 · ‧‧ wrong foot position

D‧‧‧ displacement vector

Figure 1 is a flowchart of the method of the present invention; Figure 2 is a schematic perspective view of the device of the present invention; Figure 3 is a schematic block diagram of the device of the present invention; Figure 4 is a probe card with an incorrect pin position Schematic diagram; Figure 5 is a schematic diagram of the use of the device calibration probe card of the present invention.

Claims (7)

An automatic detection and calibration method for a probe card, comprising: 辨识 identifying a position of each foot of a probe card by a measuring unit; comparing the position of each foot with a standard position, and judging the deviation between the two ; If the foregoing two have a deviation, mark the foot with the deviation as an incorrect foot; Calculate a displacement vector of the difference between the position of the incorrect foot and the standard position with a calculation unit; The probe card is conveyed to a correction part; wherein the correction part has a working position, and the wrong foot position of the probe card is directly conveyed to the work position by the conveying part; the correction part controls the wrong foot position, and borrows The correction of the wrong foot position is performed by the relative movement between the conveying part and the correction part according to the displacement vector; 后 After the correction of one wrong foot position of the probe card, the next wrong foot position is directly conveyed by the conveying part to The working position of the correction section. The method for automatically detecting and correcting a probe card according to claim 1, wherein the correction of the wrong foot position is achieved by the conveying part driving the probe card according to the displacement vector. The automatic detection and correction method for a probe card according to claim 1, wherein if the position of the foot of the probe card deviates from the standard position and the deviation exceeds the tolerance value, the foot is marked as a Wrong foot position. The automatic detection and calibration method of the probe card according to claim 1, wherein the standard position is provided by a pre-built teaching file in the measuring section, including position and height information of each foot position. The automatic detection and correction method of the probe card as described in claim 1, which further includes: after the correction of the wrong foot position of the probe card is completed, return the probe card to the measurement department for re-examination, and only Detection of previously marked incorrect pins. A probe card automatic detection and calibration device applying the probe card automatic detection and calibration method according to claim 1 includes: (1) a work platform provided with a column, and the column is provided with a movable member in a height direction; A slider; (1) a measuring section provided on the slider; the measuring section includes an image capture unit and an image comparison unit, wherein the image capture unit is used to capture an image of a probe card, The image comparison unit includes a teaching file including the standard positions of the pins of the probe card. The image comparison unit identifies the pins of the probe card according to the image. The measurement unit further includes a label. Unit and a calculation unit, wherein the marking unit is used to mark the position of the foot of the probe card, the calculation unit is used to compare the position of each foot with the standard position, and calculate the projection of the two on the work platform A displacement vector of the gap; a correction section provided on the slider; the correction section is provided with a control member that can generate a displacement in the height direction with the slider to control the foot position of the probe card ; The The workpiece corresponds to a working position on the work platform; 输送 A conveying section is provided on the work platform; the conveying section is provided with a carrier for carrying the probe card; the conveying section can drive the carrier along the The work platform is displaced in a two-dimensional direction to directly convey the position marked by the marking unit to the work position, and the relative movement between the conveying part and the correction part according to the displacement vector can be performed, thereby Correct the foot position of the probe card. The probe card automatic detection and calibration device according to claim 6, wherein the working platform is provided with an optical ruler for generating the coordinates of the position marked by the marking unit, and using the coordinates to instruct the conveying section to detect the probe. The position where the needle card is marked by the marking unit is directly transferred to the working position of the correction unit.