TW201821367A - Method of preparing metal oxide nanoparticles - Google Patents

Method of preparing metal oxide nanoparticles Download PDF

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TW201821367A
TW201821367A TW105140252A TW105140252A TW201821367A TW 201821367 A TW201821367 A TW 201821367A TW 105140252 A TW105140252 A TW 105140252A TW 105140252 A TW105140252 A TW 105140252A TW 201821367 A TW201821367 A TW 201821367A
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metal oxide
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oxide nanoparticles
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TWI603921B (en
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黃俊元
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國立臺東大學
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Abstract

A method of preparing metal oxide nanoparticles is disclosed. The method includes the following steps of: metal salts and ethanolamine compounds having one or more methyl groups dissolved in a first organic solvent so as to form a metal ion chelating solution via a metal chelation effect; preparing an ethanol solution with the tetramethylammonium hydroxide having a predetermined concentration; with a preset speed, adding the ethanol solution with tetramethylammonium hydroxide to the chelating metal ion solution at a predetermined speed so as to produce a plurality of metal oxide nanoparticles by a condensation reaction; and the condensate solution added to the second organic solvent slowly to quench the reaction. The metal oxide nanoparticles with smaller sizes and higher activity can be obtained. In addition, the yield can be increased, and thus the cost could be lowered. The method can be widely applied to photoelectric products.

Description

金屬氧化物奈米粒子之製備方法Method for preparing metal oxide nano particles

本發明是有關於一種金屬氧化物奈米粒子之製備方法,特別是有關於極小粒徑之金屬氧化物奈米粒子之製備方法。The invention relates to a method for preparing a metal oxide nano particle, in particular to a method for preparing a metal oxide nano particle having a very small particle size.

現行的金屬氧化物奈米粒子之水相化學合成方法主要係使用金屬醇鹽類作為前驅物,將該前驅物溶於有機溶劑中,經過水解反應,再加入適量的鹼性溶液即可於常溫下發生縮合反應生成奈米粒子。舉例來說,氧化鋅奈米粒子之合成方法如下:製備包含二水醋酸鋅(zinc acetate dehydrate)或硝酸鋅等前驅物,再將前驅物溶於包含甲醇、乙醇、或二甲基亞碸(dimethyl sulfoxide, DMSO)等有機溶劑,再加入包含氫氧化鈉、氫氧化鉀、四甲基氫氧化銨(tetramethylammonium hydroxide, TMAH)等鹼性溶液,進而製得氧化鋅奈米粒子。其反應過程中,甲醇、乙醇對於金屬醇鹽的溶解度低,因此需要在高溫(>80℃)且大量溶劑下進行反應,以增加金屬醇鹽的溶解度,此舉造成高製作成本。The current aqueous phase chemical synthesis method of metal oxide nano particles mainly uses metal alkoxide as a precursor, the precursor is dissolved in an organic solvent, and after hydrolysis, an appropriate amount of alkaline solution can be added to the room temperature. The condensation reaction takes place to form nanoparticles. For example, the method for synthesizing zinc oxide nanoparticles is as follows: preparing a precursor containing zinc acetate dehydrate or zinc nitrate, and dissolving the precursor in methanol, ethanol, or dimethyl hydrazine ( An organic solvent such as dimethyl sulfoxide or DMSO is added to an alkaline solution containing sodium hydroxide, potassium hydroxide or tetramethylammonium hydroxide (TMAH) to prepare zinc oxide nanoparticles. During the reaction, the solubility of methanol and ethanol to the metal alkoxide is low, so it is necessary to carry out the reaction at a high temperature (>80 ° C) and a large amount of solvent to increase the solubility of the metal alkoxide, which results in high production cost.

再者,依上述方法製得的氧化鋅奈米粒子之粒徑在4至7nm左右,無法應用於較大能隙之半導體元件製作,若欲製得較小粒徑之氧化鋅奈米粒子,一般作法可藉由減少反應時間或是控制溶液酸鹼度來達成。然而上述兩種作法都會大幅減少奈米粒子產量,造成生產成本增加,並且在後續純化的過程中,不容易沉澱分離,亦無法均勻地分散於溶劑中。Furthermore, the zinc oxide nanoparticle particles obtained by the above method have a particle diameter of about 4 to 7 nm, and cannot be applied to a semiconductor device having a large energy gap. If a small particle size of zinc oxide nanoparticle is to be produced, The general practice can be achieved by reducing the reaction time or controlling the pH of the solution. However, both of the above methods greatly reduce the production of nanoparticle, resulting in an increase in production cost, and in the subsequent purification process, it is not easy to precipitate and separate, and it is not uniformly dispersed in the solvent.

綜觀前述,本發明之發明人經苦心潛心研究、思索並設計一種金屬氧化物奈米粒子之製備方法,以針對現有技術之缺失加以改善,進而增進產業上之實施利用。In view of the foregoing, the inventors of the present invention have painstakingly studied, thought about, and designed a method for preparing a metal oxide nanoparticle, which is improved in view of the lack of the prior art, thereby enhancing the industrial use and utilization.

有鑑於上述習知之問題,本發明之目的係提出一種金屬氧化物奈米粒子之製備方法,可獲得粒徑小、活性大的金屬氧化物奈米粒子,並且可增加產量、降低生產成本,也能夠廣泛地作為光電元件之應用。In view of the above-mentioned problems, the object of the present invention is to provide a method for preparing metal oxide nanoparticles, which can obtain metal oxide nanoparticles having small particle size and high activity, and can increase the yield and reduce the production cost. Can be widely used as a photoelectric element.

基於上述目的,本發明係提供一種之金屬氧化物奈米粒子之製備方法,包含下列步驟:(a)將金屬鹽類及具有一個或多個甲基的乙醇胺類化合物溶於第一有機溶劑,進行金屬螯合作用,以形成螯合金屬離子溶液。(b)配製具有預設濃度的四甲基氫氧化銨乙醇溶液。 (c)將四甲基氫氧化銨乙醇溶液以預設速度加入螯合金屬離子溶液,進行縮合反應,而生成複數個金屬氧化物奈米粒子。以及 (d)將步驟(c)中進行縮合反應後的溶液緩慢倒入於第二有機溶劑中,終止反應。Based on the above object, the present invention provides a method for preparing a metal oxide nanoparticle, comprising the steps of: (a) dissolving a metal salt and an ethanolamine compound having one or more methyl groups in a first organic solvent, Metal chelation is performed to form a chelated metal ion solution. (b) preparing a solution of tetramethylammonium hydroxide in ethanol having a predetermined concentration. (c) adding a tetramethylammonium hydroxide ethanol solution to the chelate metal ion solution at a predetermined rate to carry out a condensation reaction to form a plurality of metal oxide nanoparticles. And (d) slowly pouring the solution after the condensation reaction in the step (c) into the second organic solvent to terminate the reaction.

較佳地,金屬鹽類為金屬醋酸鹽類或金屬硝酸鹽類。Preferably, the metal salt is a metal acetate or a metal nitrate.

較佳地,乙醇胺類化合物為單乙醇胺、二乙醇胺及三乙醇胺中的一種或其任意組合。Preferably, the ethanolamine compound is one of monoethanolamine, diethanolamine and triethanolamine or any combination thereof.

較佳地,第一有機溶劑為二甲基亞碸或四氫呋喃。Preferably, the first organic solvent is dimethyl hydrazine or tetrahydrofuran.

較佳地,第二有機溶劑為乙酸乙酯、丙酮、正己烷中的一種或其任意組合。Preferably, the second organic solvent is one of ethyl acetate, acetone, n-hexane or any combination thereof.

較佳地,金屬鹽類的當量與乙醇胺類化合物的當量比為1:0.9~1.1。Preferably, the equivalent ratio of the equivalent of the metal salt to the ethanolamine compound is from 1:0.9 to 1.1.

較佳地,金屬鹽類的當量與四甲基氫氧化銨乙醇溶液的當量比為1.5~2:1。Preferably, the equivalent ratio of the metal salt equivalent to the tetramethylammonium hydroxide ethanol solution is from 1.5 to 2:1.

較佳地,預設濃度為莫耳濃度為0.5~0.8M。Preferably, the preset concentration is a molar concentration of 0.5 to 0.8 M.

較佳地,預設速度為0.1至2ml/min。Preferably, the preset speed is from 0.1 to 2 ml/min.

較佳地,本發明之金屬氧化物奈米粒子之製備方法,其更包含步驟(e),係將步驟(d)進行離心、沉澱、分離及純化。Preferably, the method for preparing a metal oxide nanoparticle of the present invention further comprises the step (e) of subjecting the step (d) to centrifugation, precipitation, separation and purification.

為了讓上述目的、技術特徵以及實際實施後之增益性更為明顯易懂,於下文中將係以較佳實施範例輔佐對應相關之圖式來進行更詳細之說明。In order to make the above-mentioned objects, technical features, and gains after actual implementation more obvious, the detailed description of the preferred embodiments will be described below in the accompanying drawings.

請參閱第1圖,其係顯示本發明之金屬氧化物奈米粒子之製備方法的步驟示意圖。本發明之金屬氧化物奈米粒子之製備方法包括下列步驟:Please refer to Fig. 1, which is a schematic view showing the steps of a method for preparing a metal oxide nanoparticle of the present invention. The preparation method of the metal oxide nano particle of the invention comprises the following steps:

步驟100:將一金屬鹽類及具有一個或多個甲基的乙醇胺類化合物溶於第一有機溶劑,進行金屬螯合作用,並在室溫下攪拌溶液30分鐘,使金屬鹽類均勻溶解,以形成螯合金屬離子溶液。其中,金屬鹽類可為金屬醋酸鹽類或金屬硝酸鹽類。乙醇胺類化合物可為單乙醇胺、二乙醇胺或三乙醇胺。第一有機溶劑可為二甲基亞碸、四氫呋喃或其他非質子型的有機溶劑。金屬鹽類的當量與乙醇胺類化合物的當量比,較佳為1:0.9~1.1,更佳為1:1。Step 100: Dissolving a metal salt and an ethanolamine compound having one or more methyl groups in a first organic solvent, performing metal chelation, and stirring the solution at room temperature for 30 minutes to uniformly dissolve the metal salt. To form a chelated metal ion solution. Among them, the metal salts may be metal acetates or metal nitrates. The ethanolamine compound may be monoethanolamine, diethanolamine or triethanolamine. The first organic solvent may be dimethyl hydrazine, tetrahydrofuran or other aprotic organic solvent. The equivalent ratio of the equivalent of the metal salt to the ethanolamine compound is preferably from 1:0.9 to 1.1, more preferably 1:1.

步驟200:配製具有預設濃度的四甲基氫氧化銨乙醇溶液。其中,預設濃度較佳為莫耳濃度為0.5~0.8 M,較佳為0.55M。四甲基氫氧化銨乙醇溶液的當量與金屬鹽類的當量比,較佳為1:1.5~2,更佳為1:1.6。此外,配製的四甲基氫氧化銨乙醇溶液為鹼性溶液,因此,也可配製氫氧化鈉溶液或氫氧化鉀溶液來取代上述的四甲基氫氧化銨乙醇溶液。Step 200: Preparing a solution of tetramethylammonium hydroxide in ethanol having a preset concentration. The preset concentration is preferably a molar concentration of 0.5 to 0.8 M, preferably 0.55 M. The equivalent ratio of the equivalent of the tetramethylammonium hydroxide ethanol solution to the metal salt is preferably 1:1.5 to 2, more preferably 1:1.6. Further, the prepared tetramethylammonium hydroxide ethanol solution is an alkaline solution, and therefore, a sodium hydroxide solution or a potassium hydroxide solution may be prepared instead of the above tetramethylammonium hydroxide ethanol solution.

步驟300:使用滴定管將四甲基氫氧化銨乙醇溶液以0.1至2 ml/min的預設速度加入螯合金屬離子溶液,並且於常溫下反應1小時,進行縮合反應,生成複數個粒徑小於3nm的金屬氧化物奈米粒子。在步驟300中,若四甲基氫氧化銨乙醇溶液的滴入速度太快,會生成的粒徑大的金屬氧化物奈米粒子,並且造成金屬氧化物奈米粒子的聚集。因此,四甲基氫氧化銨乙醇溶液的滴入速度為步驟300之關鍵。此外,將反應後的溶液照射紫外光,可觀察到金屬氧化物奈米粒子的螢光現象,以確認金屬氧化物奈米粒子生成。特別說明,在步驟300中,螯合金屬離子溶液中的乙醇胺類可作為螯合劑,包覆生成的金屬氧化物奈米粒子,避免金屬氧化物奈米粒子快速成長,以獲得較佳的粒徑分布及較小的粒徑,亦同時可減少金屬氧化物奈米粒子產生聚集現象,而過多的反應物與螯合劑可在後續的步驟中去除。乙醇溶液中的四甲基氫氧化銨用以控制酸鹼值,讓生成之金屬氧化物奈米粒子懸浮,若溶液的酸鹼值太大,造成反應過快,金屬氧化物奈米粒子不易形成。Step 300: adding a tetramethylammonium hydroxide ethanol solution to the chelated metal ion solution at a preset speed of 0.1 to 2 ml/min using a burette, and reacting at normal temperature for 1 hour to carry out a condensation reaction to generate a plurality of particle diameters smaller than 3 nm metal oxide nanoparticles. In step 300, if the dropping rate of the tetramethylammonium hydroxide ethanol solution is too fast, metal oxide nanoparticles having a large particle diameter are formed, and aggregation of the metal oxide nanoparticles is caused. Therefore, the dropping rate of the tetramethylammonium hydroxide ethanol solution is the key to step 300. Further, when the solution after the reaction was irradiated with ultraviolet light, the fluorescence phenomenon of the metal oxide nanoparticles was observed to confirm the formation of the metal oxide nanoparticles. Specifically, in step 300, the ethanolamine in the chelated metal ion solution can be used as a chelating agent to coat the formed metal oxide nanoparticles to avoid rapid growth of the metal oxide nanoparticles to obtain a preferred particle size. The distribution and smaller particle size also reduce the aggregation of metal oxide nanoparticles, and excess reactants and chelating agents can be removed in subsequent steps. The tetramethylammonium hydroxide in the ethanol solution is used to control the pH value, and the generated metal oxide nanoparticles are suspended. If the pH value of the solution is too large, the reaction is too fast, and the metal oxide nanoparticles are not easily formed. .

步驟400:將步驟300進行縮合反應後的溶液緩慢倒入於第二有機溶劑中,終止反應,避免已形成的金屬氧化物奈米粒子持續反應。此時的溶液呈現混濁狀態,而第二有機溶劑可以為乙酸乙酯、丙酮、正己烷或是其它與金屬氧化物奈米粒子不相溶之有機溶劑,使金屬氧化物奈米粒子析出,沈澱於有機溶劑底部。Step 400: The solution after the condensation reaction in step 300 is slowly poured into the second organic solvent to terminate the reaction, thereby preventing the formed metal oxide nanoparticles from continuing to react. The solution at this time is in a turbid state, and the second organic solvent may be ethyl acetate, acetone, n-hexane or other organic solvent incompatible with the metal oxide nano particles, so that the metal oxide nanoparticles are precipitated and precipitated. At the bottom of the organic solvent.

步驟500:將上述混濁狀態的溶液進行離心及沉澱,並且分離獲得金屬氧化物奈米粒子固狀物及澄清液,倒掉澄清液中反應時添加過多的反應物及螯合劑,再加入乙醇溶劑於金屬氧化物奈米粒子固狀物中,並以超音波震盪,形成澄清的金屬氧化物奈米粒子溶液。待乙醇溶劑揮發後,可製得複數個金屬氧化物奈米粒子的粉末。其中,所製得的金屬氧化物奈米粒子之粒徑小於3nm。特別說明,此步驟中的乙醇溶液,常溫保存下金屬氧化物奈米粒子可超過15天不產生聚集或沈澱現象,藉此可直接應用於一般的元件製程,不需經由高溫退火的步驟,即可製作厚度均勻的金屬氧化物奈米粒子薄膜層。Step 500: centrifuging and precipitating the solution in the turbid state, and separating and obtaining the metal oxide nanoparticle solid and the clear liquid, and adding too much reactant and chelating agent when the reaction in the clear liquid is poured out, and then adding the ethanol solvent. The metal oxide nanoparticle solids are oscillated by ultrasonic waves to form a clear metal oxide nanoparticle solution. After the ethanol solvent is volatilized, a plurality of powders of metal oxide nanoparticles can be obtained. Wherein, the obtained metal oxide nanoparticles have a particle diameter of less than 3 nm. In particular, the ethanol solution in this step can store metal oxide nanoparticles at room temperature for more than 15 days without aggregation or precipitation, thereby being directly applicable to general component processes without the need for high temperature annealing. A thin film layer of a metal oxide nanoparticle having a uniform thickness can be produced.

舉例說明,本實施例之氧化鋅奈米粒子的製作流程,如下列步驟。首先,將330mg的醋酸鋅(zinc acetate dihydrate)和20mg的單乙醇胺(monomethylamine,MEA)共同溶於15mL的二甲基亞碸(dimethyl sulfoxide, DMSO)中,以磁性攪拌子常溫下攪拌30分鐘,使醋酸鋅(zinc acetate dehydrate)均勻溶解於二甲基亞碸(dimethyl sulfoxide, DMSO)。調配5mL且0.55M莫爾濃度的四甲基氫氧化銨之(tetramethylammonium hydroxide, TMAH)乙醇溶液,再使用滴定管將四甲基氫氧化銨(tetramethylammonium hydroxide, TMAH)乙醇溶液以0.5 mL/min的速率滴入醋酸鋅(zinc acetate dehydrate)溶液中,持續快速攪拌醋酸鋅(zinc acetate dehydrate)溶液,並於常溫下反應1小時,此時,將溶液照射紫外光,可觀察到氧化鋅奈米粒子的螢光反應。再將反應完成的氧化鋅奈米粒子溶液緩慢地倒入40mL之乙酸乙酯(Ethyl Acetate)中,此時,以肉眼觀察,溶液呈現混濁狀,即為氧化鋅奈米粒子析出。最後,將混濁狀溶液進行離心,製得氧化鋅奈米粒子固狀物於下層,澄清液於上層,再將上層的澄清液倒出,並且加入適量的乙醇於氧化鋅奈米粒子固狀物中,以超音波震盪,可得到澄清的氧化鋅奈米粒子溶液。同樣地,對澄清的氧化鋅奈米粒子溶液照射紫外光,可觀察到氧化鋅奈米粒子的螢光反應。請參閱第2A及2B圖,第2A圖顯示氧化鋅奈米粒子照射紫外光前,溶液呈現透明澄清狀態,第2B圖顯示溶液呈現透明澄清狀態照射紫外光,溶液呈現螢光反應。特別說明,以上述氧化鋅奈米粒子的製備方法,合成所得平均粒徑為2.9nm之奈米粒子粉末淨重為90mg,若不添加單乙醇胺而改以減少四甲基氫氧化銨溶液使用量的方式來降低奈米粒子成長速率,則同樣粒徑大小之氧化鋅奈米粒子粉末淨重約為30mg。For example, the production process of the zinc oxide nano particles of the present embodiment is as follows. First, 330 mg of zinc acetate dihydrate and 20 mg of monomethylamine (MEA) were co-dissolved in 15 mL of dimethyl sulfoxide (DMSO), and stirred at room temperature for 30 minutes with a magnetic stir bar. Zinc acetate dehydrate was uniformly dissolved in dimethyl sulfoxide (DMSO). 5 mL of a tetramethylammonium hydroxide (TMAH) ethanol solution of 0.55 M Mohr concentration was prepared, and a tetramethylammonium hydroxide (TMAH) ethanol solution was used at a rate of 0.5 mL/min using a burette. Drip into the zinc acetate dehydrate solution, continuously stir the zinc acetate dehydrate solution, and react at room temperature for 1 hour. At this time, the solution is irradiated with ultraviolet light, and zinc oxide nanoparticles can be observed. Fluorescent reaction. The reaction-completed zinc oxide nanoparticle solution was slowly poured into 40 mL of ethyl acetate (Ethyl Acetate). At this time, the solution was visually observed to be turbid, that is, zinc oxide nanoparticles were precipitated. Finally, the turbid solution is centrifuged to obtain a zinc oxide nanoparticle solid in the lower layer, the clear liquid is in the upper layer, the upper clear liquid is poured out, and an appropriate amount of ethanol is added to the zinc oxide nanoparticle solid. In the case of ultrasonic vibration, a clear solution of zinc oxide nanoparticle can be obtained. Similarly, the fluorescent reaction of the zinc oxide nanoparticles was observed by irradiating the clarified zinc oxide nanoparticle solution with ultraviolet light. Please refer to Figures 2A and 2B. Figure 2A shows that the solution is transparent and clear before the zinc oxide nanoparticles are irradiated with ultraviolet light. Figure 2B shows that the solution is in a transparent and clear state to illuminate the ultraviolet light, and the solution exhibits a fluorescent reaction. In particular, in the preparation method of the above zinc oxide nanoparticles, the net weight of the nanoparticle powder having an average particle diameter of 2.9 nm is 90 mg, and if no monoethanolamine is added, the amount of the tetramethylammonium hydroxide solution is reduced. In order to reduce the growth rate of the nanoparticles, the net weight of the zinc oxide nanoparticle powder of the same particle size is about 30 mg.

請參閱第3至5圖,為根據本發明金屬氧化物奈米粒子之製備方法所製作出的氧化鋅奈米粒子之物理特性。其中,第3圖為氧化鋅奈米粒子之穿透式電子顯微鏡照片圖,依比面積法並使用經驗公式,可得知氧化鋅奈米粒子平均粒徑為2.9nm。第4圖為氧化鋅奈米粒子之吸收及光激光譜圖,吸收光譜顯示第一吸收峰位於波長319nm,光激光譜顯示螢光主要來自於波長510nm的缺陷發光,亦可藉此光譜能階及能隙以回推氧化鋅奈米粒子的平均粒徑。第5圖為氧化鋅奈米粒子之X光繞射圖,其結晶方式為常見的纖鋅礦型結構,也就是說,雖然所合成的氧化鋅奈米粒子之粒徑及小,但仍具有晶體結構,因此,可更廣泛地作為光電元件之應用。Please refer to Figures 3 to 5 for the physical properties of zinc oxide nanoparticles prepared by the method for preparing metal oxide nanoparticles according to the present invention. Among them, Fig. 3 is a transmission electron micrograph of zinc oxide nanoparticles, and the average particle diameter of zinc oxide nanoparticles is 2.9 nm according to the area ratio method and using an empirical formula. Figure 4 is the absorption and optical laser spectrum of zinc oxide nanoparticles. The absorption spectrum shows that the first absorption peak is at a wavelength of 319 nm. The optical laser spectrum shows that the fluorescence mainly comes from the defect luminescence at a wavelength of 510 nm, and the spectral energy level can also be used. And the energy gap to push back the average particle size of the zinc oxide nanoparticles. Figure 5 is an X-ray diffraction diagram of zinc oxide nanoparticles, which is a common wurtzite structure, that is, although the particle size of the synthesized zinc oxide nanoparticles is small, it still has The crystal structure, therefore, can be more widely used as a photovoltaic element.

請參閱第6圖,其係根據本發明製作出的金屬氧化物奈米粒子,應用於二極體結構1之示意圖,其包含上電極層12、金屬氧化物層14、有機層16、導電高分子層18、及下電極層20,進一步形成發光二極體結構。其中,金屬氧化物層14以旋轉塗佈法塗佈於有機層16上。Please refer to FIG. 6 , which is a schematic diagram of a metal oxide nanoparticle prepared according to the present invention applied to a diode structure 1 including an upper electrode layer 12 , a metal oxide layer 14 , an organic layer 16 , and a high conductivity. The molecular layer 18 and the lower electrode layer 20 further form a light emitting diode structure. Among them, the metal oxide layer 14 is applied onto the organic layer 16 by a spin coating method.

實施上,將均勻懸浮的金屬氧化物奈米粒子溶液,利用一般的溶液製程,不需經由高溫退火的步驟,即可製作厚度均勻的金屬氧化物奈米粒子薄膜。而溶於有機溶劑的金屬氧化物奈米粒子,可相容於現行之高分子聚合物發光二極體(PLED)和量子點發光二極體(QLED)元件製程,並可使用於薄膜電晶體、電阻式記憶體中。另外,由於奈米粒子的活性與粒徑成反比,金屬氧化物奈米粒子亦可應用於光觸媒殺菌和特殊氣體偵測等應用中。In practice, the uniformly suspended metal oxide nanoparticle solution can be prepared into a uniform thickness metal oxide nanoparticle film by a general solution process without a high temperature annealing step. The metal oxide nano particles dissolved in the organic solvent are compatible with the current high molecular polymer light-emitting diode (PLED) and quantum dot light-emitting diode (QLED) device processes, and can be used in thin film transistors. In resistive memory. In addition, since the activity of the nanoparticles is inversely proportional to the particle size, the metal oxide nanoparticles can also be used in applications such as photocatalyst sterilization and special gas detection.

綜上所述,本發明之金屬氧化物奈米粒子之製備方法,為常溫水相化學的金屬氧化物奈米粒子合成方法,藉由螯合劑的配方及滴入速度來控制粒徑及較佳的粒徑分佈,不僅能獲得粒徑較小且活性較大的金屬氧化物奈米粒子,還可以增加產量、降低生產成本。此外,也能夠廣泛地作為光電元件之應用。In summary, the method for preparing the metal oxide nano particles of the present invention is a method for synthesizing metal oxide nanoparticles of normal temperature aqueous phase chemistry, and the particle size is controlled by the formulation and dropping speed of the chelating agent. The particle size distribution not only can obtain metal oxide nanoparticles with small particle size and high activity, but also increase the yield and reduce the production cost. In addition, it can also be widely used as a photovoltaic element.

以上所述僅為舉例性,而非為限制性者。任何未脫離本發明之精神與範疇,而對其進行之等效修改或變更,均應包含於後附之申請專利範圍中。The above is intended to be illustrative only and not limiting. Any equivalent modifications or alterations to the spirit and scope of the invention are intended to be included in the scope of the appended claims.

1‧‧‧二極體結構1‧‧‧Diode structure

12‧‧‧上電極層12‧‧‧Upper electrode layer

14‧‧‧金屬氧化物層14‧‧‧Metal oxide layer

16‧‧‧有機層16‧‧‧Organic layer

18‧‧‧導電高分子層18‧‧‧ Conductive polymer layer

20‧‧‧下電極層20‧‧‧ lower electrode layer

100‧‧‧步驟100‧‧‧ steps

200‧‧‧步驟200‧‧‧ steps

300‧‧‧步驟300‧‧‧Steps

400‧‧‧步驟400‧‧‧ steps

500‧‧‧步驟500‧‧‧ steps

第1圖係根據本發明之金屬氧化物奈米粒子之製備方法的步驟示意圖。Fig. 1 is a schematic view showing the steps of a method for producing metal oxide nanoparticles according to the present invention.

第2A及2B圖係根據第1圖所製作出的氧化鋅奈米粒子,顯示其照射紫外光前後的溶液外觀示意圖。2A and 2B are schematic views showing the appearance of a solution before and after irradiation with ultraviolet light, based on the zinc oxide nanoparticles prepared in Fig. 1.

第3圖係根據第1圖所製作出的氧化鋅奈米粒子,顯示其穿透式電子顯微鏡照片圖。Fig. 3 is a photomicrograph of a transmission electron microscope showing the zinc oxide nanoparticle produced according to Fig. 1.

第4圖係根據第1圖所製作出的氧化鋅奈米粒子,顯示其吸收光譜與光激光譜圖。Fig. 4 shows the absorption spectrum and the optical laser spectrum of the zinc oxide nanoparticles prepared according to Fig. 1.

第5圖係根據第1圖所製作出的氧化鋅奈米粒子,顯示其X光繞射圖。Fig. 5 is a view showing an X-ray diffraction pattern of zinc oxide nanoparticles prepared in accordance with Fig. 1.

第6圖係根據第1圖所製作出的金屬氧化物奈米粒子,應用於二極體結構之示意圖。Fig. 6 is a schematic view showing the structure of a diode structure according to the metal oxide nanoparticle produced in Fig. 1.

Claims (10)

一種金屬氧化物奈米粒子之製備方法,其包含下列步驟: (a)將一金屬鹽類及具有一個或多個甲基的一乙醇胺類化合物溶於一第一有機溶劑,進行金屬螯合作用,以形成一螯合金屬離子溶液; (b)配製具有一預設濃度的四甲基氫氧化銨乙醇溶液; (c)將四甲基氫氧化銨乙醇溶液以一預設速度加入該螯合金屬離子溶液,進行縮合反應,而生成複數個金屬氧化物奈米粒子;以及 (d)將步驟(c)中進行縮合反應後的溶液緩慢倒入於一第二有機溶劑中,終止反應。A method for preparing metal oxide nano particles, comprising the steps of: (a) dissolving a metal salt and a monoethanolamine compound having one or more methyl groups in a first organic solvent for metal chelation To form a chelated metal ion solution; (b) preparing a tetramethylammonium hydroxide ethanol solution having a predetermined concentration; (c) adding the tetramethylammonium hydroxide ethanol solution to the chelate at a preset rate The metal ion solution is subjected to a condensation reaction to form a plurality of metal oxide nanoparticles; and (d) the solution obtained by the condensation reaction in the step (c) is slowly poured into a second organic solvent to terminate the reaction. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該金屬鹽類為金屬醋酸鹽類或金屬硝酸鹽類。The method for preparing a metal oxide nanoparticle according to claim 1, wherein the metal salt is a metal acetate or a metal nitrate. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該乙醇胺類化合物為單乙醇胺、二乙醇胺及三乙醇胺中的一種或其任意組合。The method for producing a metal oxide nanoparticle according to claim 1, wherein the ethanolamine compound is one of monoethanolamine, diethanolamine and triethanolamine or any combination thereof. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該第一有機溶劑為二甲基亞碸或四氫呋喃。The method for preparing a metal oxide nanoparticle according to claim 1, wherein the first organic solvent is dimethyl hydrazine or tetrahydrofuran. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該第二有機溶劑為乙酸乙酯、丙酮、正己烷中的一種或其任意組合。The method for preparing a metal oxide nanoparticle according to claim 1, wherein the second organic solvent is one of ethyl acetate, acetone, n-hexane or any combination thereof. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該金屬鹽類的當量與該乙醇胺類化合物的當量比為1:0.9~1.1。The method for producing a metal oxide nanoparticle according to claim 1, wherein an equivalent ratio of the equivalent of the metal salt to the ethanolamine compound is 1:0.9 to 1.1. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該金屬鹽類的當量與四甲基氫氧化銨乙醇溶液的當量比為1.5~2:1。The method for preparing a metal oxide nanoparticle according to claim 1, wherein an equivalent ratio of the equivalent of the metal salt to the tetramethylammonium hydroxide ethanol solution is 1.5 to 2:1. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該預設濃度為莫耳濃度為0.5~0.8 M。The method for preparing a metal oxide nanoparticle according to claim 1, wherein the preset concentration is a molar concentration of 0.5 to 0.8 M. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其中該預設速度為0.1至2 ml/min。The method for preparing a metal oxide nanoparticle according to claim 1, wherein the preset speed is 0.1 to 2 ml/min. 如申請專利範圍第1項所述之金屬氧化物奈米粒子之製備方法,其更包含步驟(e),係將步驟(d)進行離心、沉澱、分離及純化。The method for preparing a metal oxide nanoparticle according to claim 1, further comprising the step (e) of performing the centrifugation, precipitation, separation and purification of the step (d).
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