TW201816531A - Numerically controlled machine tool with spatial positional error compensation - Google Patents

Abstract

A numerically controlled machine tool includes a cutter, a spindle, three axes movable stages, three axes positional sensing devices, three axes angle sensing modules, an error compensating element, and a controller. The three movable stages are used for gripping a work piece or carrying the spindle and the cutter, and moving along an x-axis, ay-axis or a z-axis. Each positional sensing device is equipped under the corresponding movable stage for sensing the position of the corresponding movable stage to emit a position sensing signal. Each angle sensing module is abutted on the corresponding movable stage for sensing the rotating angles of the corresponding movable stage to emit three angular errors information. The error compensating element is electrically connected to the three axes angle sensing modules and the three axes positional sensing devices for receiving the angular errors information and the position sensing signals to produce spatial positional error information of the cutting point. The controller is electrically connected to the spindle, three axes movable stages, three axes positional sensing device and the error compensating element to make the compensating cut of the work piece according the spatial positional error information.

Description

Numerical control machine tool with space position error compensation

The invention relates to a numerical control machine tool with a function of compensating for spatial position error, and more particularly to a numerical control machine tool for instantly compensating for a spatial processing position error.

In 1890, when Dr. Ernst Karl Abbé (1840 ~ 1905) worked at the Carl Zeiss factory in Germany, he proposed guiding principles for the design of measuring instruments: "On a displacement measuring instrument, the sensing The measurement axis of the position device must be consistent with the movement axis of the measurement probe, otherwise the measurement position error will be caused by the angular error of the movement axis. "This kind of error is called Abbe error, and this principle is also Called the Abbe Principle. The Abbe principle has been recognized as a design criterion for precision machinery, which can be applied to machine tools, measuring instruments, precision positioning platforms, etc.

Numerically controlled machine tools are precision machining equipment commonly used in industry. Any multi-axis numerically-controlled machine tool is constructed by using a basic linear motion axis as a base and a rotary axis. The numerically controlled machine tool's linear moving stage uses a displacement sensor installed under the linear moving stage and corresponding to its moving axis to measure the actual displacement of the linear moving stage to achieve precise positioning. However, due to the structural design limitation of a general linear mobile station, the displacement axis of the displacement sensor cannot be coaxial with its movement axis at the spatial processing point, that is, the structural design of a general numerical control machine is not In accordance with Abbe's principle, there is still a spatial position deviation between the sensing point of each axis mobile stage position sensor and the spatial processing point of the tool, which is commonly known as Abbe offset. As each axis moves with three types of Angular errors, they are defined in the international standard ISO230-1 as: Pitch, Yaw, and Roll. Each angle error will be due to Abbe's deviation. The position causes the actual spatial processing point position to be different from the position value displayed by the three-axis position sensor, which is the so-called spatial position error, which affects the machining accuracy of the numerical control machine tool.

The conventional machine tool space position error compensation method is to first correct and store the corresponding space position error value to establish a position error table, and then use software to modify the specified displacement amount for position error compensation. This is the so-called feedforward error compensation ( Feed-forward error compensation), such as US 4945501, US5021941, US7171320 B2, US6430465B2, US6164117 A. The feedforward error compensation method only senses and returns position information, and requires a lot of memory space to create an error table. This error table is not real-time data. This error value will change as the operating environment changes, so it can only compensate the previous correction. Passed spatial position error.

The invention provides an instant space error compensation method suitable for a machine tool, so as to solve the problem to be solved by the prior art. In more detail, it is to provide a method for compensating a spatial processing position error due to an angular error of a three-axis moving platform.

According to an embodiment of the present invention, it is disclosed that a machine tool includes a cutter, a main shaft, a three-axis moving platform, a three-axis sensing position device, a three-axis angle sensing module, an error compensation unit, and a controller. There are three moving platforms, which are respectively used to hold a processing workpiece or carry a spindle and a tool, and move along the X axis, Y axis, or Z axis. Each axis sensing position device is arranged below each axis moving platform, and is used for sensing the position of each axis moving platform, and transmitting position information of each axis moving platform. Each axis angle sensing module is next to each axis moving platform, and is used to sense the three rotation angles of each axis moving platform, such as pitch, sway and roll, to generate the error information of each axis angle. The error compensation unit is electrically connected to the three-axis angle sensing module and the three-axis sensing position device, and is used for receiving the position sensing information and the angle error information of each axis to generate a space processing position error compensation information. The controller is electrically connected to the main shaft, the three-axis moving platform, the three-axis sensing position device, and the error compensation unit, and is used for operating the three-axis moving platform to spatially process the workpiece according to the processing position error compensation information generated by the error compensation unit. Error-compensated cutting.

In an embodiment of the present invention, the angle sensing module may be an optical sensing module, but is not limited thereto. The three-axis angle sensing module includes an X-axis moving platform angle sensing module, a Y-axis moving platform angle sensing module, and a Z-axis moving platform angle sensing module. The X-axis moving platform angle sensing module is next to the axis-moving platform and is used to sense the three rotation angles of the X-axis moving platform, including: the rolling angle with the X axis as the rotation axis Pitch angle with Y axis as the rotation axis And the swing angle with the Z axis as the rotation axis , And three kinds of rotation angle error information of the X-axis moving platform are generated. The Y-axis moving platform angle sensing module is next to the moving platform and is used to sense the three rotation angles of the Y-axis moving platform, including: the pitch angle with the X axis as the rotation axis Rolling angle with Y axis as rotation axis And the swing angle with the Z axis as the rotation axis , And three kinds of rotation angle error information of the Y-axis moving platform are generated. The Z-axis moving platform angle sensing module is next to the moving platform and is used to sense the three rotation angles of the Z-axis moving platform, including: the pitch angle with the X axis as the rotation axis Swing angle with Y axis as the rotation axis , Rolling angle with Z axis as rotation axis , And three kinds of rotation angle error information of the Z-axis moving platform are generated.

In an embodiment of the present invention, the error compensation unit is configured to receive a total of nine types of rotation angle error information of the X-axis, Y-axis, and Z-axis moving platforms and the three-axis sensing position information to generate an error of the tool in the space processing position. Compensation information.

In an embodiment of the present invention, the three-dimensional rotation angle error information of the X-axis moving platform causes the tool space processing position error information to have three direction components, including the X-direction position error component as , Y-direction position error component is , And the position error component in the Z direction is , Respectively , Is the shortest linear distance between the sensing point of the X-axis moving platform sensing position device and the tool in parallel with the Z-axis, The shortest linear distance between the sensing point of the X-axis position sensing device and the tool in parallel with the Y-axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula 1)]. , The shortest straight line distance between the sensing point of the X-axis moving platform sensing position device and the tool in parallel with the X-axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (2)]. . Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (3)].

In an embodiment of the present invention, the three types of rotation angle error information of the Y-axis moving platform cause the tool space processing position error information to have three directional components, including the X-direction position error as Component, Y-direction position error component is , And the position error in the Z direction is , Respectively , The shortest straight line distance between the sensing point of the Y-axis moving platform sensing position device and the tool in parallel with the Z-axis, The shortest linear distance between the sensing point of the Y-axis moving platform sensing position device and the tool in parallel with the Y-axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (4)]. , The shortest linear distance between the sensing point of the Y-axis moving platform sensing position device and the tool parallel to the X-axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (5)]. . Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (6)].

In an embodiment of the present invention, the three rotation angle error information of the Z-axis moving platform causes the tool space processing position error information to have three directional components, including the X-direction position error as Component, Y-direction position error component is , And the position error in the Z direction is , Respectively , The shortest linear distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the Z-axis, The shortest linear distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the Y axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (7)]. , The shortest linear distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the X-axis. Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (8)]. . Generally, the rotation angle of each axis of the machine tool is very small, and the above formula can also be simplified to: [Formula (9)].

In an embodiment of the invention, the angle sensing module is an optical sensing module.

The machine tool error compensation unit according to the embodiment of the present invention can derive the error information about the positioning error of the three orthogonal directions of the X-axis, Y-axis, and Z-axis according to the sensing platform of the angle sensing module [formula (1) to [Formula (9)], and the controller can compensate in real time according to the error information, so that the controller can accurately adjust the spatial relative relationship between the mobile platform carrying the processing workpiece and the tool processing the workpiece to process the processing workpiece, which can increase the Machining accuracy of machine tool controllers.

Please refer to FIG. 1 and FIG. 2, which are three-dimensional schematic diagrams of a numerical control machine tool with Abbe error compensation according to an embodiment of the present invention. FIG. 2 is a side view showing an angular error of the X-axis moving platform when the machine tool of FIG. 1 processes a workpiece. As shown in FIG. 1 and FIG. 2, the machine tool 100 of this embodiment includes a tool 110, a three-axis moving platform (120a, 120b, 120c), an X-axis sensing position device 130, a three-axis angle sensing module 140, and an error. The compensation unit 150, the controller 160, and the main shaft 170.

The three-axis moving platform includes an X-axis moving platform 120a, a Y-axis moving platform 120b, and a Z-axis moving platform 120c. The X-axis moving platform 120a and the Y-axis moving platform 120b are disposed below the tool 110. The X-axis moving platform 120a is used to hold a workpiece 200 and move along the X-axis; the Y-axis moving platform 120b is used to carry the X-axis moving platform 120a And moves along the Y axis; the Z-axis moving platform 120a is used to carry the main shaft 170 and the tool 110, and moves along the Z axis, so that the tool 110 performs cutting processing on the workpiece 200. Further, the mobile platform (120a, 120b, 120c) and the tool 110 can be controlled by the controller 160 to be activated to perform cutting on the workpiece 200 to be processed.

The X-axis moving platform sensing position device 130a of the X-axis moving platform 120a is disposed below the moving platform. The sensing point 132a of the X-axis moving platform sensing position device 130a is used to sense the X-axis position of the tool 110, and is issued. X-axis senses position information. In this embodiment, the shortest straight line distance (L _xz ) between the X-axis position sensing point 132 a and the end of the tool 110 parallel to the Z axis is the distance from the sensing point 132 a to the point D1 in FIG. 2, where The end part refers to the machining position of the tool 110 for cutting and processing the workpiece 200. The height of the sensing point 132a in the Z direction is a known fixed value, and the point D1 is the machining position of the workpiece when the X-axis moving platform 120a rotates without a pitch angle. The 200 ideal processing position can be known from the Z-axis sensing position issued by the sensing position device of the Z-axis moving platform. On the other hand, the X-axis moving platform 120a can be moved along an X-axis slide rail 122a and an X-axis ball guide screw 124a, wherein the X-axis slide rail 122a and the X-axis ball guide screw 124a and the position sensing device as the X-axis mobile platform The sensing axis of 130a is substantially parallel.

However, although the X-axis slide rail 122a and the X-axis ball guide screw 124a are approximately parallel to the X-axis moving platform sensing position device 130a, there may still be a distance between the X-axis moving platform 120a and the X-axis moving platform sensing position device 130a. X, Y or Z rotation angle error. That is, the X-axis moving platform 120a has an angular error of a pitch angle, a roll angle, and a roll angle.

As described above, the Y-axis moving platform 120b and the Z-axis moving platform 120c of the machine tool 100 of this embodiment each have an angular error of a pitch angle, a roll angle, and a roll angle.

Therefore, the machine tool 100 of this embodiment is further provided with a three-axis angle sensing module 140 to sense the three angle errors of the aforementioned moving platforms of each axis. The three-axis angle sensing module 140 includes an X-axis angle sensing module. 144, a Y-axis angle sensing module 142, and a Z-axis angle sensing module 146. In detail, as shown in FIG. 1, the X-axis angle sensing module 144 is located next to the X-axis moving platform 120a, the Y-axis angle sensing module 142 is located next to the Y-axis moving platform 120b, and the Z-axis angle sensing module 146 is next to Z-axis moving platform 120c. As shown in FIG. 2, the pitch angle of the X-axis moving platform 120 a with the Y-axis as the rotation axis (x), and a Y-axis rotation pitch angle error information is generated. As shown in FIG. 3, the swing angle of the X-axis moving platform 120a with the Z-axis as the rotation axis (x), and a Z-axis rotation swing angle error information is generated. As shown in FIG. 3, the rolling angle of the X-axis moving platform 120a with the X-axis as the rotation axis (x), and an X-axis rotation and rolling angle error information is generated. According to the teachings in FIG. 2 and FIG. 3, it can be easily known that the pitch angle of the Y-axis moving platform 120 b with the X-axis as the rotation axis , And generate an X-axis rotation pitch angle error information, the Y-axis is the rolling angle of the rotation axis , And generate a Y-axis rotation and rolling angle error information, and the Z-axis is the swing angle of the rotation axis , And a Z-axis rotation swing angle error information is generated; and, the Z-axis moving platform 120c uses the X-axis as the rotation angle of the pitch angle , And generates an X-axis rotation pitch angle error information, and the Y-axis is the swing angle of the rotation axis , And produce a Y-axis rotation swing angle error information, and take the Z-axis as the rolling angle of the rotation axis , And produce a Z-axis rotation and rolling angle error information. In this embodiment, at least one of the X-axis moving platform 120a angle sensing module 144, the Y-axis moving platform 120b angle sensing module 142, and the Z-axis moving platform 120c angle sensing module 146 may be semiconductor lasers. (LD), four-quadrant light sensor (QPD), and optical components are combined to measure the pitch and swing angles of the mobile platform through the principle of an optical automatic collimator, which generates error information.

Further, the processing position error information of the X-axis moving platform in the X direction is , Can also be referred to as the X-direction positioning error, which means the relative displacement of the end 112 (processing point) of the tool 110 and the sensing point 132a of the sensing device 130a in the X-axis direction, and the positioning error information of the X-axis processing position Satisfy . As shown in Figure 3, The shortest linear distance between the sensing point 132a of the X-axis moving platform sensing device 130a and the end 112 (processing point) of the tool 110 parallel to the Z axis. Similarly, The shortest linear distance between the sensing point 132a of the X-axis sensing position device 130a and the end 112 (processing point) of the tool 110 is parallel to the Y-axis.

due to versus The angle of (x) is small. Therefore, in some embodiments, the positioning error information of the X-axis machining position is Which satisfies .

Similarly, the position error information of the X-axis moving platform in the Y direction is , Can also be referred to as the Y-direction position error, that is, the relative displacement of the end portion 112 (processing point) of the tool 110 and the sensing point 132a of the sensing device 130a in the Y direction, and the position error of the X-axis moving platform in the Y direction Information Satisfy . As shown in Figure 3, The shortest linear distance between the sensing point 132a of the X-axis moving platform sensing position device 130a and the end 112 (processing point) of the tool 110 parallel to the X-axis.

due to versus The angle of (x) is small. Therefore, in some embodiments, the position error information of the X-axis moving platform in the Y direction Which satisfies .

Similarly, the position error information of the X-axis moving platform in the Z direction is , Which can also be referred to as the position error in the Z direction, that is, the relative displacement of the sensing point 132a of the end position 112 (processing point) of the tool 110 and the X-axis moving platform 130a in the Z direction, and the X-axis moving platform Position error information in the Z direction Satisfy . due to versus The angle of (x) is small. Therefore, in some embodiments, the position error information of the X-axis moving platform in the Z direction Which satisfies .

Similarly, the position error information of the Y-axis moving platform in the X direction is , Also known as the position error of the Y-axis moving platform in the X direction, which satisfies . As shown in Figure 4, The shortest linear distance between the sensing point 132b of the Y-axis moving platform sensing position device 130b and the end 112 (processing point) of the tool 110 parallel to the Z axis. The shortest linear distance between the sensing point 132b of the Y-axis moving platform sensing position device 130b and the end 112 (processing point) of the tool 110 in parallel with the Y-axis.

due to versus The angle of (y) is small. Therefore, in some embodiments, the position error information of the Y-axis moving platform in the X direction Which satisfies .

Similarly, the position error information of the Y-axis moving platform in the Y direction is , Also known as the positioning error of the Y-axis moving platform, which satisfies . As shown in Figure 4, The shortest linear distance between the sensing point 132b of the Y-axis moving platform sensing position device 130b and the end 112 (processing point) of the tool 110 parallel to the X-axis.

due to versus The angle is very small. Therefore, in some embodiments, the positioning error information of the processing position of the Y-axis moving platform is Which satisfies .

Similarly, the position error information of the Y-axis moving platform in the Z direction is , Also known as the position error of the Y-axis moving platform in the Z direction, which satisfies . due to versus The angle is very small. Therefore, in some embodiments, the position error information of the Y-axis moving platform in the Z direction is Which satisfies .

Similarly, the position error information of the Z-axis moving platform in the X direction is , Also known as the position error of the Z-axis moving platform in the X direction, which satisfies . As shown in Figure 4, The shortest linear distance between the sensing point 132c of the Z-axis moving platform sensing position device 130c and the end 112 (processing point) of the tool 110 parallel to the Z axis. The shortest linear distance between the sensing point 132c of the Z-axis moving platform sensing position device 130c and the end 112 (processing point) of the tool 110 in parallel to the Y-axis.

due to versus The angle of (z) is small, so in some embodiments, the position error information of the Z-axis moving platform in the X direction Which satisfies .

Similarly, the position error information of the Z-axis moving platform in the Y direction is , Also known as the position error of the Z-axis moving platform in the Y direction, which satisfies . As shown in Figure 4, The shortest linear distance between the sensing point 132c of the Z-axis moving platform sensing position device 130c and the end 112 (processing point) of the tool 110 in the parallel X-axis.

due to versus The angle is very small. Therefore, in some embodiments, the processing position error information of the Z-axis moving platform in the Y direction is Which satisfies .

Similarly, the position error information of the Z-axis moving platform in the Z direction is , Also known as the positioning error of the Z-axis moving platform in the Z direction, which satisfies . due to versus The angle is very small. Therefore, in some embodiments, the positioning error information of the processing position of the Z-axis moving platform is Which satisfies .

In an embodiment of the present invention, the error information of the three-axis moving platform in the X-axis processing position is , and , The machining position error information in the Y axis is , and , And the error information of the machining position in the Z axis is , and , Can be Abbe error information, but not limited to this.

The error compensation unit 150 is electrically connected to the three-axis mobile platform angle sensing module 140 (including 142, 144, and 146) and the three-axis mobile platform sensing position device (including 130a, 130b, and 130c) to receive and sense each axis The position information and the angle error information generate a spatial processing position error compensation information. Since the processing workpiece 200 is disposed on the axis O of the X-axis moving platform 120a, the processing position information is the position information about the processing workpiece 200. Further, the error compensation unit 150 is configured to receive the pitch, yaw, and roll of the X-axis moving platform 120a ( , (x), ) Three rotation angle error information, pitch, yaw and roll of the Y-axis moving platform 120b ( , (y), ) Three rotation angle error information, pitch, yaw and roll of the Z-axis moving platform 120c ( , (z), ) Three-rotation angle error information and the three-axis mobile platform sensing position information to generate the three-axis mobile platform space processing position error information. Therefore, the error compensation unit 150 may provide the sensing point of the end portion 112 of the tool 110 with the three-axis moving platform sensing position device (including 132a, 130a, 130b, and 130c) 132b, 132c) Sensing information of the shortest linear distance (for example, as shown in FIG. 2, the processing position of the processing workpiece 200 sensed by the X-axis moving platform sensing position device 130a is D1) and the three-axis moving platform The error information of the angular error generated by the tilt, and the position information of the spatial position error information will be compensated in real time by sensing the position information. For example, as shown in FIG. The processing position provided by the X-axis moving platform sensing position information on the processing workpiece 200 should be D2). The controller 160 which is electrically connected to the main shaft 170, the three-axis mobile platform (including 120a, 120b, 120c), the three-axis mobile platform sensing position device (including 130a, 130b, 130c) and the error compensation unit 150 can be based on the three-axis mobile platform The position information and the spatial processing position error information operate the three-axis moving platform to perform precise spatial position error compensation cutting processing on the processing workpiece 200 provided on the X-axis moving platform 120a.

For example, when the X-axis moving platform 120a sensing position device senses that the position of the processing workpiece 200 on the X-axis moving platform 120a on the X-axis is X ', plus the tool caused by the rotation angle of the X-axis moving platform Spatial position error information of processing point That is, the spatial position information about the X-axis direction in the spatial position error information issued by the error compensation unit 150, and the controller 160 can accurately and accurately compensate the processed workpiece 200 on the X-axis moving platform 120a on the X axis according to the aforementioned position information. In the same way, the error compensation unit 150 can also send the spatial position error information about the Y-axis and the Z-axis so that the controller 160 can compensate the X-axis mobile platform 120a on the basis of the aforementioned spatial position error information immediately and accurately. The position of the workpiece 200 on the Y-axis and the Z-axis is processed.

In detail, the X-axis mobile platform angle sensor module 144, the Y-axis mobile platform angle sensor module 142, and the Z-axis mobile platform angle sensor module 146 of the three-axis angle sensor module 140 can measure in real time. Error information of each corresponding mobile platform (including 120a, 120b, 120c) in the X direction about the rotation angles of pitch, roll and roll at each position (including , , ), Error information in the Y direction (including , , ), Error information in the Z direction (including , , ), As a whole, it is the aforementioned nine kinds of rotation angle error information. After the nine kinds of rotation angle error information enter the error compensation unit 150 through the interface card, the error compensation unit 150 can refer to the received position information of each axis to calculate the spatial error value of the machining instruction's three orthogonal directions in real time, and control The device 160 can control the three-axis mobile platform (including 120a, 120b, 120c) according to the position information in real time, which makes the actual processing position more than the traditional machine tool 100 which only has a position sensing device (including 130a, 130b, 130c). For accuracy. In this embodiment, the aforementioned interface card may be a digital transmission of a network card, an analog / digital converter (A / D converter), or a USB, but is not limited thereto.

It can be known from the foregoing embodiments of the present invention that the application of the present invention has the following advantages. The machine tool error compensation unit of the present invention can derive error information about spatial processing position errors in the three orthogonal directions of the X-axis, Y-axis, and Z-axis according to the three-axis angle sensing module and the three-axis mobile platform sensing position device. And the controller can compensate in real time according to the spatial position error information, so that the controller can accurately adjust the spatial relative relationship between the mobile platform carrying the processing workpiece and the tool processing the processing workpiece to process the processing workpiece, and can increase the machine tool Processing accuracy.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention. Any person skilled in the art can make various modifications and retouches without departing from the spirit and scope of the present invention. Therefore, the protection of the present invention The scope shall be determined by the scope of the attached patent application.

100‧‧‧tool machine

110‧‧‧tool

112‧‧‧Tool end

120a‧‧‧X-axis moving platform

120b‧‧‧Y-axis moving platform

120c‧‧‧Z axis moving platform

122a‧‧‧X-axis mobile platform slide

124a‧‧‧X-axis mobile platform ball guide screw

130a‧‧‧X-axis moving platform position sensing device

130b‧‧‧Y-axis moving platform sensing position device

130c‧‧‧Z-axis mobile platform position sensing device

132a‧‧‧X-axis moving platform sensing position device sensing point

132b‧‧‧Y-axis moving platform sensing position device sensing point

132c‧‧‧Z-axis moving platform sensing position device sensing point

140‧‧‧Three-axis angle sensing module

142‧‧‧Y-axis angle sensing module

144‧‧‧X-axis angle sensing module

146‧‧‧Z-axis angle sensing module

150‧‧‧ Error Compensation Unit

160‧‧‧controller

170‧‧‧ Spindle

200‧‧‧Processed workpiece

The shortest linear distance between the sensing point of the sensing position device of the Lxx‧‧‧ X-axis moving platform and the tool parallel to the Z axis

The shortest linear distance between the sensing point of the Lxy‧‧‧X-axis position sensing device and the tool in parallel with the Y-axis

The shortest linear distance between the sensing point of the Lxz‧‧‧ X-axis position sensing device and the tool in parallel with the Z axis

The shortest linear distance between the sensing point of the Lyx‧‧Y-axis moving platform sensing position device and the tool parallel to the X-axis

The shortest linear distance between the sensing point of the Lyy‧‧Y-axis moving platform sensing position device and the tool in parallel with the Y-axis

The shortest linear distance between the sensing point of the Lyz‧‧Y-axis moving platform sensing position device and the tool in parallel with the Z axis

The shortest linear distance between the sensing point of the Lzx‧‧‧Z-axis moving platform sensing position device and the tool in parallel to the X axis

The shortest linear distance between the sensing point of the Lzy‧‧‧Z-axis moving platform sensing position device and the tool in parallel with the Y-axis

The shortest linear distance between the sensing point of the Lzz‧‧Z-axis moving platform sensing position device and the tool parallel to the Z-axis

O‧‧‧Axis

D1‧‧‧X-axis moving platform ideal processing position

D2‧‧‧ X-axis mobile platform actual machining position

θ _x (x) ‧‧‧ Rotation angle of X-axis moving platform with X axis as rotation axis

θ _y (x) ‧‧‧ Rotation angle of X-axis moving platform with Y-axis as rotation axis

θ _Z (x) ‧‧‧ Rotation angle of X-axis moving platform with Z axis as rotation axis

In order to make the description and other objects, features, advantages, and embodiments of the present invention more comprehensible, the description of the drawings is as follows: FIG. 1 illustrates numerical control with Abbe error compensation according to an embodiment of the present invention Schematic illustration of a machine tool. FIG. 2 is a side view showing an angular error of the X-axis moving platform when the machine tool of FIG. 1 processes a workpiece. FIG. 3 is a perspective view showing that the X-axis moving platform has an Abbe deflection when the machine tool of FIG. 1 processes a workpiece. FIG. 4 is a perspective view showing that the X-axis, Y-axis, and Z-axis moving platform of the machine tool of FIG. 1 has an Abbe deflection when processing a workpiece.

Claims (7)

A machine tool includes: a tool; an X-axis moving platform disposed below the tool, wherein the moving platform is used to clamp a processing workpiece and moves along the X axis so that the tool performs the X axis on the processing workpiece Cutting processing; A Y-axis moving platform is disposed below the X-axis moving platform, wherein the moving platform is used to clamp the X-axis moving platform and moves along the Y-axis, so that the tool performs Y-axis cutting processing on the workpiece ; A Z-axis moving platform is arranged at the side of the X-axis moving platform and the Y-axis moving platform, wherein the Z-axis moving platform is used to carry a spindle and a tool, and moves along the Z axis, so that the tool works on the workpiece Carry out Z-axis cutting; An X-axis mobile platform sensing position device is arranged below the mobile platform to sense the position of the tool in the mobile platform and send out an X-axis sensing position information; a Y-axis movement A platform-sensing position device is disposed below the mobile platform to sense the position of the tool on the mobile platform and sends out a Y-axis sensing position information; a Z-axis mobile platform sensing position device It is arranged below the mobile platform to sense the position of the tool on the mobile platform and sends out a Z-axis sensing position information; a three-axis angle sensing module is respectively adjacent to the X-axis mobile platform and the Y The X-axis moving platform and the Z-axis moving platform are respectively used to sense three rotation angles of the X-axis moving platform, the Y-axis moving platform, and each of the Z-axis moving platforms to generate nine types of angle error information; An error compensation unit electrically connected to the three-axis angle sensing module and the X-axis mobile platform sensing position device, the Y-axis mobile platform sensing position device and the Z-axis mobile platform sensing position device for receiving The three-axis sensing position information and the three-axis moving platform sensing position information generate a tool machining space position error information; a controller electrically connected to the tool, the X-axis moving platform, the Y-axis moving platform, the The Z-axis moving platform and the error compensation unit are configured to operate the tool and the X-axis moving platform, the Y-axis moving platform and the Z-axis moving platform according to the position information of the three-axis moving platform. The machining of the workpiece on the X-axis moving platform spatial position error compensation machining. The machine tool according to item 1 of the scope of patent application, wherein the three-axis angle sensing module includes: an X-axis moving platform angle sensing module, which is next to the X-axis moving platform for sensing the X-axis Rotation angle of moving platform with X axis as rotation axis Rotation angle with Y axis as the rotation axis And the rotation angle with the Z axis as the rotation axis , And generate three kinds of rotation angle error information of the X-axis mobile platform; a Y-axis mobile platform angle sensing module is next to the Y-axis mobile platform, and is used to sense the rotation of the Y-axis mobile platform with the X-axis as the rotation axis angle Rotation angle with Y axis as the rotation axis And the rotation angle with the Z axis as the rotation axis , And generates three kinds of rotation angle error information of the Y-axis mobile platform; and a Z-axis mobile platform angle sensing module, which is next to the Z-axis mobile platform, and is used to sense the Z-axis mobile platform with the X-axis as the rotation axis. Rotation angle Rotation angle with Y axis as the rotation axis And the rotation angle with the Z axis as the rotation axis , And three kinds of rotation angle error information of the Z-axis moving platform are generated. The machine tool according to item 2 of the scope of patent application, wherein the tool processing space position error information includes the X-direction tool processing space position error information of the X-axis moving platform as The position error information of the tool machining space in the Y direction is And the position error information of the tool machining space in the Z direction is , Which respectively meet ; ;as well as ; Is the shortest linear distance between the sensing point of the X-axis moving platform sensing position device and the tool in parallel with the Z-axis, Is the shortest linear distance between the sensing point of the X-axis position sensing device and the tool in parallel with the Y-axis, The shortest straight line distance between the sensing point of the X-axis moving platform sensing position device and the tool in parallel with the X-axis. The machine tool according to item 2 of the scope of patent application, wherein the tool processing space position error information includes the X-direction tool processing space position error information of the Y-axis moving platform as The position error information of the tool machining space in the Y direction is The position error information of the tool machining space in the Z direction is , Which respectively meet ; ;as well as ; The shortest straight line distance between the sensing point of the Y-axis moving platform sensing position device and the tool in parallel with the Z-axis, The shortest linear distance between the sensing point of the Y-axis moving platform sensing position device and the tool in parallel with the Y-axis, The shortest linear distance between the sensing point of the Y-axis moving platform sensing position device and the tool parallel to the X-axis. The machine tool according to item 2 of the scope of patent application, wherein the tool processing space position error information includes the X-direction tool processing space position error information of the Z-axis moving platform as The position error information of the tool machining space in the Y direction is The position error information of the tool machining space in the Z direction is , Which respectively meet ; ;as well as ; The shortest linear distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the Z-axis, The shortest straight line distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the Y-axis, The shortest linear distance between the sensing point of the Z-axis moving platform sensing position device and the tool in parallel with the X-axis. The machine tool according to item 1 of the scope of patent application, wherein the controller is electrically connected to the tool, the moving platform and the error compensation unit for operating the three-axis mobile platform according to the processing position error compensation information generated by the error compensation unit The workpiece is processed for spatial position error compensation cutting. The spatial position error compensation information of the X-axis moving platform is , The spatial position error compensation information of the Y-axis mobile platform is The spatial position error compensation information of the Z-axis mobile platform is . The machine tool according to item 1 of the scope of patent application, wherein the three-axis angle sensing module is an optical sensing module.