TW201809549A - Inlet assembly and method - Google Patents

Inlet assembly and method Download PDF

Info

Publication number
TW201809549A
TW201809549A TW106123740A TW106123740A TW201809549A TW 201809549 A TW201809549 A TW 201809549A TW 106123740 A TW106123740 A TW 106123740A TW 106123740 A TW106123740 A TW 106123740A TW 201809549 A TW201809549 A TW 201809549A
Authority
TW
Taiwan
Prior art keywords
auxiliary gas
inlet
inlet assembly
auxiliary
throat
Prior art date
Application number
TW106123740A
Other languages
Chinese (zh)
Inventor
伊恩 大衛 班薩瓦
安德魯 詹姆斯 希利
馬克 理查 歐尼爾
Original Assignee
愛德華有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 愛德華有限公司 filed Critical 愛德華有限公司
Publication of TW201809549A publication Critical patent/TW201809549A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
    • B01F23/10—Mixing gases with gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/311—Injector mixers in conduits or tubes through which the main component flows for mixing more than two components; Devices specially adapted for generating foam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/30—Injector mixers
    • B01F25/31—Injector mixers in conduits or tubes through which the main component flows
    • B01F25/314—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit
    • B01F25/3142—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction
    • B01F25/31423—Injector mixers in conduits or tubes through which the main component flows wherein additional components are introduced at the circumference of the conduit the conduit having a plurality of openings in the axial direction or in the circumferential direction with a plurality of perforations in the circumferential direction only and covering the whole circumference
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/02—Premix gas burners, i.e. in which gaseous fuel is mixed with combustion air upstream of the combustion zone
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/46—Details, e.g. noise reduction means
    • F23D14/62—Mixing devices; Mixing tubes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • B01D53/70—Organic halogen compounds
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Combustion & Propulsion (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)

Abstract

An inlet assembly for an abatement apparatus and a method are disclosed. The inlet assembly for an abatement apparatus comprises: an inlet portion configured to receive an effluent stream to be treated; a throat portion fluidly coupled with the inlet portion; an outlet portion fluidly coupled with the throat portion; and a first secondary gas aperture and a second secondary gas aperture, each positioned proximate the throat portion and configured to deliver, respectively, a first secondary gas stream and a second secondary gas stream for mixing with the effluent stream to generate a mixed gas stream, the outlet portion being configured to deliver the mixed gas stream to a treatment chamber of the abatement apparatus. In this way, the mixing of the first secondary gas stream and the second secondary gas stream with the effluent gas stream occurs in the vicinity of the throat portion, which improves the pre-mixing of the secondary gas streams with the effluent gas stream prior to delivery of the mixed gas stream to the treatment chamber of the abatement apparatus, which improves the destruction rate efficiency of the abatement apparatus.

Description

入口總成及方法Entrance assembly and method

本發明係關於一種用於一減量裝置之入口總成及一種方法。The present invention relates to an inlet assembly and a method for a reduction device.

減量裝置(諸如輻射燃燒器)為人已知且通常用於處理來自用於(例如)半導體或平板顯示器製造產業中之一製程工具之一廢氣流。在此製造期間，自製程工具泵送之廢氣流中存在殘留全氟化合物(PFC)及其他化合物。難以自廢氣流移除PFC且不希望其等釋放至環境中，此係因為其等已知具有相對較高的溫室活性。 已知輻射燃燒器使用燃燒以自廢氣流移除PFC及其他化合物。通常，廢氣流係含有PFC及其他化合物之氮氣流。使輔助氣體(諸如燃料氣體及氧氣)與廢氣流混合且將該氣流混合物輸送至被一多孔式氣體燃燒器之離開表面橫向包圍之一燃燒腔室中。將燃料氣體及空氣同時供應給多孔式燃燒器以影響離開表面處之無焰燃燒，其中通過多孔式燃燒器之空氣量足以不僅消耗供應至燃燒器之燃料氣體而且消耗注入燃燒腔室中之氣流混合物中之所有可燃物。 廢氣流中存在之化合物範圍及該廢氣流之流動特性會隨不同製程工具而變動，故燃料氣體及空氣之範圍以及需被引入輻射燃燒器中之其他氣體或流體亦將變動。 雖然存在用於處理廢氣流之技術，但是其等各具有其等本身之缺點。因此，期望提供一種用於處理一廢氣流之改良技術。Reduction devices, such as radiant burners, are known and commonly used to treat an exhaust stream from a process tool used in, for example, the semiconductor or flat panel display manufacturing industry. During this manufacturing process, residual perfluorinated compounds (PFC) and other compounds were present in the exhaust stream pumped by the self-made process tool. It is difficult to remove the PFC from the exhaust stream and it is not desired to release it to the environment because they are known to have relatively high greenhouse activity. Radiant burners are known to use combustion to remove PFC and other compounds from the exhaust stream. Typically, the exhaust stream is a nitrogen stream containing PFC and other compounds. Auxiliary gases (such as fuel gas and oxygen) are mixed with the exhaust gas stream and the gas stream mixture is delivered to a combustion chamber which is laterally surrounded by the exit surface of a porous gas burner. The fuel gas and air are simultaneously supplied to the perforated burner to affect flameless combustion at the exit surface, where the amount of air passing through the perforated burner is sufficient to consume not only the fuel gas supplied to the burner but also the airflow injected into the combustion chamber All combustibles in the mixture. The range of compounds present in the exhaust gas stream and the flow characteristics of the exhaust gas stream will vary with different process tools, so the range of fuel gas and air and other gases or fluids to be introduced into the radiant burner will also vary. Although techniques exist for treating exhaust gas streams, each has its own disadvantages. Therefore, it is desirable to provide an improved technique for treating an exhaust gas stream.

根據一第一態樣，提供一種用於一減量裝置之入口總成，其包括：一入口部分，其經構形以接收待處理之一廢氣流；一喉部部分，其與該入口部分流體耦合；一出口部分，其與該喉部部分流體耦合；及一第一輔助氣體孔隙及一第二輔助氣體孔隙，其等各經定位為靠近該喉部部分且經構形以分別遞送一第一輔助氣流及一第二輔助氣流以用於與該廢氣流混合以產生一混合氣流，該出口部分經構形以將該混合氣流遞送至該減量裝置之一處理腔室。 該第一態樣認識到，為獲得一廢氣流中之化合物之一良好破壞去除效率(DRE)，在一減量裝置中需要高溫及/或良好混合。該第一態樣亦認識到，雖然可將輔助氣流引入至一廢氣流中以便改良破壞去除效率，但該破壞去除效率仍可小於可能的情況。特定言之，該第一態樣認識到，歸因於在引入至該減量裝置之前該輔助氣流與該廢氣流之不充分預混合，該破壞去除效率可小於可能的情況。因此，提供一種入口總成。該入口總成可為一減量裝置入口總成。該入口總成可包括一入口部分或區段，該入口部分或區段經構形、調適或定大小以接收待藉由一減量裝置處理之一廢氣流。該入口總成亦可包括一喉部部分、區段或節流口。該喉部部分可與該入口部分流體耦合或連接至該入口部分。該入口總成亦可包括一出口部分或區段。該出口部分可與該喉部部分流體耦合或連接至該喉部部分。該入口總成亦可包括一第一輔助氣體孔隙或入口。該入口總成亦可包括一第二輔助氣體孔隙或入口。該第一輔助氣體孔隙及該第二輔助氣體孔隙二者可經定位為靠近該喉部部分或在其附近。該第一輔助氣體孔隙可經構形或定位以遞送一第一輔助氣流以用於與該廢氣流混合。該第二輔助氣體孔隙可經構形或定位以遞送一第二輔助氣流以用於與該廢氣流混合。與該第一輔助氣流及該第二輔助氣流混合之該廢氣流可包括一混合氣流。該出口部分可經構形、調適或定大小以將該混合氣流遞送至該減量裝置之一處理腔室。如此，該第一輔助氣流及該第二輔助氣流與該廢氣流之該混合發生在該喉部部分之附近，其在將該混合氣流遞送至該減量裝置之該處理腔室之前，改良該輔助氣流與該廢氣流之該預混合，此改良該減量裝置之該破壞去除效率。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該入口部分內靠近該喉部部分。因此，該等孔隙之一或多者可位於該入口部分內，靠近、接近或鄰近該喉部部分，以便遞送該等輔助氣流之一或多者以用於與在該喉部部分之附近之該廢氣流混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該出口部分內靠近該喉部部分。因此，該等孔隙之一或多者可位於該出口部分內，靠近、接近或鄰近該喉部部分，以便遞送該等輔助氣流之一或多者以用於與在該喉部部分之附近之該廢氣流混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內。因此，該等輔助氣體孔隙之一或多者可經定位或可位於該喉部部分內以便該一或多個輔助氣流可與在該喉部部分之附近之該廢氣流混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙二者經定位於該喉部部分內。因此，該等氣體孔隙之二者可經定位或可位於該喉部部分內以便混合該等輔助氣流之二者與在該喉部部分之附近之該廢氣流。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內靠近該入口部分。因此，該等輔助氣體孔隙之一或多者可經定位或可位於該喉部部分內靠近、接近或鄰近該入口部分。此有助於確保將該等輔助氣流之至少一者遞送至該廢氣流中之一低壓位置以便促成該等輔助氣流之遞送且改良混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內靠近該出口部分。因此，該等輔助氣體孔隙之一或多者可經定位或可位於該喉部部分內靠近、接近或鄰近該出口部分。此有助於確保將該等輔助氣流之至少一者遞送至該廢氣流中之一低壓位置以便促成該等輔助氣流之遞送且改良混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之一者經定位於該喉部部分內靠近該入口部分，且該第一輔助氣體孔隙及該第二輔助氣體孔隙之另一者經定位於該喉部部分內靠近該出口部分。因此，該輔助氣體孔隙之一者可經定位或可位於該喉部部分內靠近、接近或鄰近該入口部分，且該輔助氣體孔隙之另一者可經定位或可位於該喉部部分內靠近、接近或鄰近該出口部分。此有助於確保將輔助氣流二者遞送至該廢氣流中之一低壓位置以便促成該等輔助氣流之遞送且改良混合。 在一項實施例中，該第一輔助氣體孔隙及該第二輔助氣體孔隙之二者經定位於該喉部部分內靠近該入口部分。因此，該等輔助氣體孔隙之二者可經定位或可位於該喉部部分內靠近、接近或鄰近該入口部分。此有助於確保將該等輔助氣流遞送至該廢氣流中之一低壓位置以便促成該等輔助氣流之遞送且改良混合。 在一項實施例中，該總成包括複數個第一輔助氣體孔隙及複數個第二輔助氣體孔隙。因此，可提供該等氣體孔隙之超過一者以便改良該等輔助氣體之遞送及分佈且改良混合。 在一項實施例中，該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙沿圓周定位。 在一項實施例中，該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙交替沿圓周定位。再次，此幫助改良該等輔助氣流與該廢氣流之混合。 在一項實施例中，該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙圍繞該喉部部分交替沿圓周定位。 在一項實施例中，該總成包括經構形以接收該第一輔助氣流之一第一耦合件及與該第一耦合件及該等第一輔助氣體孔隙流體耦合之一第一通道。該第一通道提供一方便結構來將該第一輔助氣流分佈至該等第一輔助氣體孔隙之各者。 在一項實施例中，該總成包括經構形以接收該第二輔助氣流之一第二耦合件及與該第二耦合件及該等第二輔助氣體孔隙流體耦合之一第二通道。該第二通道提供一方便結構來將該第二輔助氣流分佈至該等第二輔助氣體孔隙之各者。 在一項實施例中，該等第一輔助氣體孔隙及該等第二輔助氣體孔隙經定向以在橫向於該廢氣流之一流動方向之一方向上輸送該第一輔助氣流及該第二輔助氣流。因此，遞送該等輔助氣流以攔截該廢氣流以改良混合。 在一項實施例中，該第一耦合件在該入口總成之一長軸之一方向上與該第二耦合件偏移。此實現更輕易機械耦合至該總成。 在一項實施例中，該第一耦合件圍繞該入口總成之該長軸與該第二耦合件徑向偏移。此實現更輕易機械耦合至該總成。 在一項實施例中，該入口部分之一橫截面積朝向該喉部部分減小。因此，該入口部分包括一收斂、節流或成錐形圓錐導管。 在一項實施例中，該入口部分朝向該喉部部分成錐形。 在一項實施例中，該入口部分具有1º至60º且較佳地約為25º之一錐角。 在一項實施例中，該喉部部分之一橫截面積係恆定的。 在一項實施例中，該出口部分之一橫截面積遠離該喉部部分而增大。因此，該出口部分包括一發散、增大或成錐形圓錐導管。 在一項實施例中，該出口部分遠離該喉部部分而成錐形。 在一項實施例中，該出口部分具有1º至60º且較佳地約為3º之一錐角。 在一項實施例中，該入口部分具有經構形以接收該廢氣流之一入口孔隙且該出口部分具有經構形以遞送該混合氣流之一出口孔隙，且其中該喉部部分之一橫截面積小於該入口孔隙及該出口孔隙二者。 根據一第二態樣，提供一種方法，其包括：在與一喉部部分流體耦合之一入口部分處接收待處理之一廢氣流，該喉部部分與一出口部分流體耦合；及藉由用一第一輔助氣體孔隙遞送一第一輔助氣流且用一第二輔助氣體孔隙遞送一第二輔助氣流產生一混合氣流，各氣體孔隙經定位為靠近該喉部部分；及將該混合氣流從該出口部分遞送至該減量裝置之一處理腔室。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者定位於該入口部分內靠近該喉部部分。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者定位於該出口部分內靠近該喉部部分。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者定位於該喉部部分內。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之二者定位於該喉部部分內。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者定位於該喉部部分內靠近該入口部分。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者定位於該喉部部分內靠近該出口部分。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之一者定位於該喉部部分內靠近該入口部分，且將該第一輔助氣體孔隙及該第二輔助氣體孔隙之另一者定位於該喉部部分內靠近該出口部分。 在一項實施例中，該方法包括將該第一輔助氣體孔隙及該第二輔助氣體孔隙之二者定位於該喉部部分內靠近該入口部分。 在一項實施例中，該方法包括複數個第一輔助氣體孔隙及複數個第二輔助氣體孔隙。 在一項實施例中，該方法包括沿圓周定位該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙。 在一項實施例中，該方法包括沿圓周交替定位該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙。 在一項實施例中，該方法包括圍繞該喉部部分沿圓周交替定位該複數個第一輔助氣體孔隙及該複數個第二輔助氣體孔隙。 在一項實施例中，該方法包括在一第一耦合件處接收該第一輔助氣流且經由一第一通道，將該第一輔助氣流從該第一耦合件輸送至該等第一輔助氣體孔隙。 在一項實施例中，該方法包括在一第二耦合件處接收該第二輔助氣流且經由一第二通道，將該第二輔助氣流從該第二耦合件輸送至該等第二輔助氣體孔隙。 在一項實施例中，該方法包括定向該等第一輔助氣體孔隙及該等第二輔助氣體孔隙以在橫向於該廢氣流之一流動方向之一方向上輸送該第一輔助氣流及該第二輔助氣流。 在一項實施例中，該方法包括在該入口總成之一長軸之一方向上使該第一耦合件與該第二耦合件偏移。 在一項實施例中，該方法包括圍繞該入口總成之該長軸使該第一耦合件與該第二耦合件徑向偏移。 在一項實施例中，該方法包括使該入口部分之一橫截面積朝向該喉部部分減小。 在一項實施例中，該方法包括使該入口部分朝向該喉部部分成錐形。 在一項實施例中，該入口部分具有1º至60º且較佳地約為25º之一錐角。 在一項實施例中，該喉部部分之一橫截面積係恆定的。 在一項實施例中，該方法包括使該出口部分之一橫截面積遠離該喉部部分而增大。 在一項實施例中，該方法包括使該出口部分遠離該喉部部分成錐形。 在一項實施例中，該出口部分具有1º至60º且較佳地約為3º之一錐角。 在一項實施例中，該方法包括在該入口部分之一入口孔隙處接收該廢氣流且從該出口部分之一出口孔隙遞送該混合氣流，且其中該喉部部分之一橫截面積小於該入口孔隙及該出口孔隙二者。 根據一第三態樣，提供實質上在前文中參考附圖描述之一種入口總成或方法。 在隨附獨立技術方案及附屬技術方案中陳述進一步特定及較佳之態樣。該等附屬技術方案之特徵可視情況與該等獨立技術方案之特徵組合，且可為除在技術方案中明確陳述外之組合。 在一裝置特徵被描述為可操作以提供一功能的情況下，將瞭解此包含提供該功能或經調適或構形以提供該功能之一裝置特徵。According to a first aspect, there is provided an inlet assembly for a reducing device, comprising: an inlet portion configured to receive an exhaust gas stream to be treated; and a throat portion which is in fluid communication with the inlet portion. Coupling; an outlet portion fluidly coupled to the throat portion; and a first auxiliary gas aperture and a second auxiliary gas aperture, each of which is positioned adjacent to the throat portion and configured to deliver a first An auxiliary air stream and a second auxiliary air stream are used to mix with the exhaust gas stream to generate a mixed air stream, and the outlet portion is configured to deliver the mixed air stream to a processing chamber of the reduction device. This first aspect recognizes that in order to obtain a good destruction removal efficiency (DRE) of one of the compounds in an exhaust gas stream, high temperatures and / or good mixing are required in a reduction device. This first aspect also recognizes that, although auxiliary airflow can be introduced into an exhaust gas stream to improve damage removal efficiency, the damage removal efficiency can still be less than possible. In particular, the first aspect recognizes that the destruction removal efficiency may be less than possible due to insufficient pre-mixing of the auxiliary gas stream with the exhaust gas stream before introduction to the reduction device. Therefore, an inlet assembly is provided. The inlet assembly may be a reducing device inlet assembly. The inlet assembly may include an inlet portion or section that is configured, adapted, or sized to receive an exhaust gas stream to be processed by a reduction device. The inlet assembly may also include a throat section, section or throttle. The throat portion may be fluidly coupled to or connected to the inlet portion. The inlet assembly may also include an outlet portion or section. The outlet portion may be fluidly coupled to or connected to the throat portion. The inlet assembly may also include a first auxiliary gas aperture or inlet. The inlet assembly may also include a second auxiliary gas aperture or inlet. Both the first auxiliary gas pore and the second auxiliary gas pore may be positioned near or near the throat portion. The first auxiliary gas aperture may be configured or positioned to deliver a first auxiliary gas stream for mixing with the exhaust gas stream. The second auxiliary gas aperture may be configured or positioned to deliver a second auxiliary gas stream for mixing with the exhaust gas stream. The exhaust gas stream mixed with the first auxiliary air stream and the second auxiliary air stream may include a mixed air stream. The outlet portion may be shaped, adapted, or sized to deliver the mixed gas stream to a processing chamber of one of the reduction devices. As such, the mixing of the first auxiliary airflow and the second auxiliary airflow with the exhaust gas flow occurs near the throat portion, which improves the auxiliary airflow before delivering the mixed airflow to the processing chamber of the reduction device. The pre-mixing of the air stream with the exhaust gas stream improves the destruction removal efficiency of the reduction device. In one embodiment, at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the inlet portion near the throat portion. Accordingly, one or more of the pores may be located within the inlet portion, near, close to, or adjacent to the throat portion, so as to deliver one or more of the auxiliary airflows for use in the vicinity of the throat portion This exhaust gas stream is mixed. In one embodiment, at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the outlet portion near the throat portion. Therefore, one or more of the pores may be located within the exit portion, near, close to, or adjacent to the throat portion, so as to deliver one or more of the auxiliary airflows for use in the vicinity of the throat portion This exhaust gas stream is mixed. In one embodiment, at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the throat portion. Thus, one or more of the auxiliary gas pores may be positioned or may be located within the throat portion so that the one or more auxiliary gas flows may be mixed with the exhaust gas flow near the throat portion. In one embodiment, both the first auxiliary gas pore and the second auxiliary gas pore are positioned within the throat portion. Thus, both of the gas pores may be positioned or may be located within the throat portion in order to mix the two of the auxiliary gas flow with the exhaust gas flow near the throat portion. In one embodiment, at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the throat portion near the inlet portion. Thus, one or more of the auxiliary gas pores may be positioned or may be located within the throat portion near, near or adjacent to the inlet portion. This helps ensure that at least one of the auxiliary air streams is delivered to a low pressure location in the exhaust gas stream to facilitate the delivery of the auxiliary air streams and improve mixing. In one embodiment, at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the throat portion near the outlet portion. Thus, one or more of the auxiliary gas pores may be located or may be located within the throat portion near, near or adjacent to the exit portion. This helps ensure that at least one of the auxiliary air streams is delivered to a low pressure location in the exhaust gas stream to facilitate the delivery of the auxiliary air streams and improve mixing. In one embodiment, one of the first auxiliary gas pore and the second auxiliary gas pore is positioned in the throat portion near the inlet portion, and the first auxiliary gas pore and the second auxiliary gas pore The other is positioned within the throat portion near the exit portion. Thus, one of the auxiliary gas pores may be positioned or may be located near, near or adjacent to the inlet portion within the throat portion, and the other of the auxiliary gas pores may be located or may be located within the throat portion near , Near or near the exit. This helps to ensure that both auxiliary air streams are delivered to one of the low pressure locations in the exhaust stream to facilitate the delivery of the auxiliary air streams and improve mixing. In one embodiment, both the first auxiliary gas aperture and the second auxiliary gas aperture are positioned within the throat portion near the inlet portion. Thus, both of the auxiliary gas pores may be located or may be located within the throat portion near, near or adjacent to the inlet portion. This helps to ensure that the auxiliary airflow is delivered to a low pressure location in the exhaust gas stream to facilitate the delivery of the auxiliary airflow and improve mixing. In one embodiment, the assembly includes a plurality of first auxiliary gas pores and a plurality of second auxiliary gas pores. Therefore, more than one of the gas pores may be provided in order to improve the delivery and distribution of the auxiliary gas and improve mixing. In one embodiment, the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores are positioned along a circumference. In one embodiment, the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores are alternately positioned along the circumference. Again, this helps improve the mixing of the auxiliary gas streams with the exhaust gas stream. In one embodiment, the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores are alternately positioned circumferentially around the throat portion. In one embodiment, the assembly includes a first coupling member configured to receive the first auxiliary gas flow and a first channel fluidly coupled to the first coupling member and the first auxiliary gas pores. The first channel provides a convenient structure to distribute the first auxiliary gas flow to each of the first auxiliary gas pores. In one embodiment, the assembly includes a second coupling member configured to receive the second auxiliary gas flow and a second channel fluidly coupled to the second coupling member and the second auxiliary gas pores. The second channel provides a convenient structure to distribute the second auxiliary gas flow to each of the second auxiliary gas pores. In one embodiment, the first auxiliary gas pores and the second auxiliary gas pores are oriented to transport the first auxiliary gas flow and the second auxiliary gas flow in a direction transverse to one of the flow directions of the exhaust gas flow. . Therefore, the auxiliary gas streams are delivered to intercept the exhaust gas stream to improve mixing. In one embodiment, the first coupling member is offset from the second coupling member in a direction of a major axis of the inlet assembly. This implementation is more easily mechanically coupled to the assembly. In one embodiment, the first coupling member is radially offset from the second coupling member around the long axis of the inlet assembly. This implementation is more easily mechanically coupled to the assembly. In one embodiment, a cross-sectional area of one of the inlet portions decreases toward the throat portion. Therefore, the inlet portion includes a convergent, throttled or tapered conical conduit. In one embodiment, the inlet portion is tapered toward the throat portion. In one embodiment, the inlet portion has a cone angle of 1 ° to 60 ° and preferably about 25 °. In one embodiment, the cross-sectional area of one of the throat portions is constant. In one embodiment, a cross-sectional area of one of the outlet portions increases away from the throat portion. Therefore, the outlet portion includes a divergent, enlarged or tapered conical tube. In one embodiment, the exit portion is tapered away from the throat portion. In one embodiment, the exit portion has a cone angle of 1 ° to 60 ° and preferably about 3 °. In one embodiment, the inlet portion has an inlet aperture configured to receive the exhaust gas stream and the outlet portion has an outlet aperture configured to deliver the mixed gas stream, and wherein one of the throat portions is transverse The cross-sectional area is smaller than both the inlet pore and the outlet pore. According to a second aspect, a method is provided, comprising: receiving an exhaust gas stream to be treated at an inlet portion fluidly coupled to a throat portion, the throat portion being fluidly coupled to an outlet portion; and by A first auxiliary gas pore delivers a first auxiliary gas stream and a second auxiliary gas pore delivers a second auxiliary gas stream to produce a mixed air stream, each gas pore being positioned close to the throat portion; and the mixed air stream from the The exit portion is delivered to a processing chamber of one of the reduction devices. In one embodiment, the method includes positioning at least one of the first auxiliary gas aperture and the second auxiliary gas aperture within the inlet portion near the throat portion. In one embodiment, the method includes positioning at least one of the first auxiliary gas pore and the second auxiliary gas pore within the outlet portion near the throat portion. In one embodiment, the method includes positioning at least one of the first auxiliary gas aperture and the second auxiliary gas aperture within the throat portion. In one embodiment, the method includes positioning both the first auxiliary gas aperture and the second auxiliary gas aperture within the throat portion. In one embodiment, the method includes positioning at least one of the first auxiliary gas aperture and the second auxiliary gas aperture within the throat portion near the inlet portion. In one embodiment, the method includes positioning at least one of the first auxiliary gas aperture and the second auxiliary gas aperture within the throat portion near the outlet portion. In one embodiment, the method includes positioning one of the first auxiliary gas pore and the second auxiliary gas pore in the throat portion near the inlet portion, and the first auxiliary gas pore and the first The other of the two auxiliary gas pores is positioned within the throat portion near the outlet portion. In one embodiment, the method includes positioning both the first auxiliary gas aperture and the second auxiliary gas aperture within the throat portion near the inlet portion. In one embodiment, the method includes a plurality of first auxiliary gas pores and a plurality of second auxiliary gas pores. In one embodiment, the method includes positioning the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores along a circumference. In one embodiment, the method includes alternately positioning the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores along a circumference. In one embodiment, the method includes alternately positioning the plurality of first auxiliary gas pores and the plurality of second auxiliary gas pores circumferentially around the throat portion. In one embodiment, the method includes receiving the first auxiliary gas stream at a first coupling element and conveying the first auxiliary gas stream from the first coupling element to the first auxiliary gas via a first channel. Porosity. In one embodiment, the method includes receiving the second auxiliary gas stream at a second coupling element and conveying the second auxiliary gas stream from the second coupling element to the second auxiliary gas via a second channel. Porosity. In one embodiment, the method includes orienting the first auxiliary gas pores and the second auxiliary gas pores to transport the first auxiliary gas flow and the second auxiliary gas flow in a direction transverse to one of the flow directions of the exhaust gas flow. Auxiliary airflow. In one embodiment, the method includes offsetting the first coupling member from the second coupling member in a direction of a major axis of the inlet assembly. In one embodiment, the method includes radially offsetting the first coupling member from the second coupling member about the long axis of the inlet assembly. In one embodiment, the method includes reducing a cross-sectional area of one of the inlet portions toward the throat portion. In one embodiment, the method includes tapering the inlet portion toward the throat portion. In one embodiment, the inlet portion has a cone angle of 1 ° to 60 ° and preferably about 25 °. In one embodiment, the cross-sectional area of one of the throat portions is constant. In one embodiment, the method includes increasing a cross-sectional area of one of the outlet portions away from the throat portion. In one embodiment, the method includes tapering the exit portion away from the throat portion. In one embodiment, the exit portion has a cone angle of 1 ° to 60 ° and preferably about 3 °. In one embodiment, the method includes receiving the exhaust gas flow at an inlet aperture of the inlet portion and delivering the mixed gas flow from an outlet aperture of the outlet portion, and wherein a cross-sectional area of one of the throat portions is less than the Both the inlet aperture and the outlet aperture. According to a third aspect, there is provided an inlet assembly or method substantially as hereinbefore described with reference to the accompanying drawings. Further specific and preferred aspects are stated in the accompanying independent technical solution and the subsidiary technical solution. The features of the subsidiary technical solutions may be combined with the features of the independent technical solutions, and may be combinations other than those explicitly stated in the technical solutions. Where a device feature is described as being operable to provide a function, it will be understood that this includes providing a device feature or adapted or configured to provide one of the device features.

概述 在更詳細論述實施例之前，首先將提供一概述。實施例提供用於混合兩種或兩種以上輔助氣體與一廢氣流之一入口總成。通常，輔助氣體需要彼此良好混合且與廢氣流良好混合以改良一減量裝置之減量效能。又，通常，期望防止輔助氣體(其可包括一氧化劑及一燃料)預混合以便在遞送至減量裝置之前降低燃燒之風險。 入口總成具有定位於一入口部分與一出口部分之間的一喉部部分。輔助氣體孔隙經提供為靠近或接近喉部部分且遞送輔助氣流以與喉部部分之區中之廢氣流混合。此提供輔助氣流彼此之有效混合及與廢氣流之有效混合。壓力減小通常發生在入口部分與喉部部分之間及出口部分與喉部部分之間的過渡處。將輔助氣流遞送至該等低壓區之任一者或二者有助於促成遞送輔助氣體以用於與廢氣流混合。接著將混合氣流遞送至減量裝置。歸因於輔助氣流與廢氣流之改良混合，此配置導致減量裝置之破壞去除效率增大。入口總成 — 一般配置 圖1係根據一項實施例之一入口總成(整體標示為100)之一視圖。圖2係入口總成100之一端視圖。圖3係穿透圖2中所展示之平面之一橫截面視圖。圖4係圖2中所展示之平面上之一橫截面視圖。 如在圖1中可見，但在圖4中最佳繪示，入口總成100包括一長形、大致圓柱形管1。管1從一入口孔隙20延伸至一出口孔隙30。入口孔隙20從上游處理設備(未展示)接收待處理之一廢氣流。出口孔隙30將與輔助氣體混合之廢氣流遞送至一減量裝置(未展示)。因此，廢氣流在藉由箭頭展示之方向上從入口孔隙20流動至出口孔隙30。內部結構 管1界定三個主要區：一入口區段2、一喉部區段3及一出口區段4。入口區段2從入口孔隙20收斂至喉部區段3。即，入口區段2之大致圓形橫截面積在廢氣流之流動方向上從入口孔隙20減小至喉部區段3。在此實施例中，喉部區段3之大致圓形橫截面積在從入口區段2至出口區段4之廢氣流流動方向上係恆定的。出口區段4從喉部區段3發散至出口孔隙30。即，出口區段4之大致圓形橫截面積在從喉部區段3至出口孔隙30之廢氣流流動方向上增大。換言之：入口區段2係具有一固定錐角之一圓錐、收斂區段且從入口孔隙20延伸至喉部區段3；喉部區段3係從入口區段2延伸至出口區段4之一節流圓柱形區段；且出口區段4係具有一固定錐角之一圓錐、發散區段且從喉部區段3延伸至出口孔隙30。 如在圖3及圖4中最佳可見，孔隙12A及13A圍繞喉部區段3之表面沿圓周延伸以在入口區段2與喉部區段3之間的介面附近遞送輔助氣流。為促成輔助氣流之均勻遞送及混合，輔助氣體孔隙12A、13A圍繞喉部區段3之內部表面沿圓周延伸。輔助氣體耦合件 為使一第一輔助氣流能夠被遞送，提供與第一輔助氣流之一源耦合且延伸至一第一通道6之一第一輔助耦合件12，該第一通道6饋入第一導管7，該第一導管7終接於輔助氣體孔隙12A。在此實施例中，第一導管7正交於廢氣流之流動方向徑向延伸。然而，將瞭解，第一導管7可視需要按除正交於廢氣流之流動方向外之一角徑向延伸。 為使一第二輔助氣流能夠被遞送，提供與第二輔助氣流之一源耦合且延伸至一第二通道8之一第二輔助耦合件13，該第二通道8饋入第二導管9，該第二導管9終接於輔助氣體孔隙13A。在此實施例中，第二導管9與廢氣流之流動方向成角徑向延伸。然而，將瞭解，第二導管9可視需要正交於廢氣流之流動方向徑向延伸。 如在圖1至圖4中可見，第一通道6及第二通道8藉由在導管1之表面上成形之凹陷而形成且分別藉由環形套筒10及11圍封。 使第一通道6與第二通道8縱向偏移防止輔助氣體在遞送至廢氣流中之前預混合且促成彼此既縱向偏移又旋轉偏移之第一輔助氣體耦合件12及第二輔助氣體耦合件13之一簡單機械耦合件配置。操作 在操作中，經由入口孔隙20提供來自一處理工具之一廢氣流。廢氣流在其行進通過收斂入口區段2且傳遞至喉部區段3中時加速。 圖5係展示基於所展示之幾何結構之在廢氣流流動通過導管1時，廢氣流之壓力改變之一計算流體動力學模型。如可見，當廢氣流流動通過喉部區段3時，廢氣流內出現低壓之區3A、3B。 因此，當廢氣流進入喉部區段3時，廢氣流壓力減小，此有助於從輔助氣體孔隙12A、13A吸取輔助氣流。當混合氣流行進通過喉部區段3時且當其沿著發散出口區段4膨脹時，發生廢氣流與輔助氣流之混合。混合氣流接著透過出口孔隙30離開且被遞送至減量裝置。將瞭解，雖然在此實施例中，將輔助氣體遞送至區3A，但其等之任一者或二者可同樣地被遞送至區3B。模型化 如上文提及，為獲得CF4之良好DRE，需要高溫。現有入口總成通常由以下構成(每一入口總成(噴嘴))： •具有約1%之製程氣體(廢氣流)之50 SLM氮氣； •經由處理腔室之上游之一側部入口之18至20 SLM氧氣； •經由在入口總成中間(在尖端前方約5 cm)之一噴管之9 SLM甲烷； •在圍繞入口總成之一環帶中之2.5 SLM甲烷； •在圍繞甲烷環帶之一環帶中之25 SLM CDA (此提供額外氧氣以獲得一稍微稀薄之混合物)。 該現有總成之初始模型化已展示此等環帶未在點燃之前提供一燃料、氧化劑及製程氣體之完美混合物。因此，實施例之入口總成經配置以容許此數量之甲烷及氧氣在饋入至燃燒器中之噴嘴之前徹底預混合成一製程流。2D 模擬以識別最大壓力降 最初，執行一些2D軸對稱模擬，變動收斂角及發散角以識別最佳組合，其中最佳組合為產生最大壁上壓力降之組合。角從3°變動至25° (相對於管之軸)。 按變動的壁收斂角及發散角在喉部之表面上記錄之最大壓力降如下： 資料展示下列總體趨勢：隨著發散角減小，壓力降增大。相反地，隨著收斂角增大，壓力降增大。總之，為獲得喉部中之一高壁上壓力降，需要一高度傾斜入口及一明顯更緩和之出口。在所有例項中，緊接在收斂之後在喉部中觀察到峰值壓力降，因此，側部入口應放置為儘可能遠地朝向喉部之入口端。 因此，實施例提供用於將一燃料及一氧化劑二者引入至一製程流中之一器件。器件係容許在器件之喉部中將兩種不同氣體引入至一主製程流中之一混合器。通常，此等將係一燃料及一氧化劑，因此容許一經完全預混合之氣體被引入至一反應腔室中。 經由同軸噴嘴及噴管將額外燃料引入至一製程流中之當前方式未導致良好混合。理想地，燃料及氧化劑應在點燃之前與製程流徹底混合以達成更高之局部溫度以改良多氟烴之分解。此配置將兩種單獨氣體同時混合成一現有第三流。 在一項實施例中，器件包括一收斂入口區段，該收斂入口區段具有相對於長軸之25°之一角，饋入至20.0 mm長度及14.0 mm直徑之一圓柱形喉部。此接著饋入具有相對於長軸之4°之一角之一發散圓錐區段。在喉部內，在與喉部之入口相距3.0 mm之一徑向平面上，居中有圍繞圓周等距間隔之八個孔。藉由兩個不同環形通道饋入交替孔。因此，各通道具有在其與喉部之間依90°間隔的四個孔。兩組孔彼此分開45°，導致前述八個孔。第一通道在與至喉部中之孔相同之平面中，其中其與喉部之間的四個孔係徑向的。通道與喉部相距7.75 mm且具有10.0 mm (軸向方向)x2.5 mm (徑向方向)之一矩形橫截面。此四個孔直徑各為3.0 mm。此通道之外表面藉由一金屬套筒封閉，該金屬套筒經焊接在適當位置中，且藉由一入口管饋入。第二通道與喉部相距相同徑向距離，但經定位在第一通道之收斂側上。第二通道與喉部之間的四個孔因此相對於長軸呈一40°角且因此約為11 mm長。通道之橫截面類似於第一通道，但具有一倒角上游邊緣以容許四個孔被鑽孔。此四個孔直徑各為3.0 mm。此通道之外表面藉由一第二金屬套筒形成且藉由一第二入口管饋入。大宗氣體(bulk gas)經由收斂入口饋送至器件中且經由發散區段離開。輔助氣體同時經由饋送管饋送至喉部中。在引入此兩種額外氣體之後之發散區段之效應係確保良好混合。氧化劑及燃料至製程流中之改良混合具有改良DRE且降低燃料消耗的可能。 儘管本文已參考附圖詳細揭示本發明之繪示性實施例，但應理解，本發明不限於該精確實施例，且可在不脫離如由隨附發明申請專利範圍及其等等效物所定義之本發明之範疇之情況下，藉由熟習此項技術者實現其中之各種改變及修改。 Overview Before discussing the embodiments in more detail, an overview will first be provided. Embodiments provide an inlet assembly for mixing two or more auxiliary gases with one exhaust gas stream. Generally, the auxiliary gases need to be well mixed with each other and with the exhaust gas flow to improve the reducing performance of a reducing device. Also, in general, it is desirable to prevent auxiliary gases (which may include an oxidant and a fuel) from being premixed in order to reduce the risk of combustion before being delivered to the reduction device. The inlet assembly has a throat portion positioned between an inlet portion and an outlet portion. The auxiliary gas aperture is provided close to or close to the throat portion and delivers the auxiliary gas flow to mix with the exhaust gas flow in the region of the throat portion. This provides effective mixing of the auxiliary gas streams with each other and with the exhaust gas stream. The pressure reduction usually occurs at the transitions between the inlet and throat portions and between the outlet and throat portions. Delivering the auxiliary gas flow to either or both of these low pressure regions helps facilitate the delivery of auxiliary gas for mixing with the exhaust gas stream. The mixed gas stream is then delivered to a reduction device. Due to the improved mixing of the auxiliary air flow and the exhaust gas flow, this configuration results in increased destruction removal efficiency of the reduction device. Entrance Assembly - General Configuration Figure 1 is a view of an entrance assembly (collectively designated as 100) according to one embodiment. FIG. 2 is an end view of the inlet assembly 100. FIG. 3 is a cross-sectional view through one of the planes shown in FIG. 2. FIG. 4 is a cross-sectional view of the plane shown in FIG. 2. As can be seen in FIG. 1, but best shown in FIG. 4, the inlet assembly 100 includes an elongated, generally cylindrical tube 1. The tube 1 extends from an inlet aperture 20 to an outlet aperture 30. The inlet aperture 20 receives one of the exhaust gas streams to be treated from an upstream processing facility (not shown). The exit aperture 30 delivers an exhaust gas stream mixed with the auxiliary gas to a reduction device (not shown). Therefore, the exhaust gas flow flows from the inlet aperture 20 to the outlet aperture 30 in the direction shown by the arrow. Internal structure Tube 1 defines three main areas: an inlet section 2, a throat section 3, and an outlet section 4. The inlet section 2 converges from the inlet aperture 20 to the throat section 3. That is, the substantially circular cross-sectional area of the inlet section 2 decreases from the inlet aperture 20 to the throat section 3 in the flow direction of the exhaust gas flow. In this embodiment, the generally circular cross-sectional area of the throat section 3 is constant in the flow direction of the exhaust gas flow from the inlet section 2 to the outlet section 4. The exit section 4 diverges from the throat section 3 to the exit aperture 30. That is, the substantially circular cross-sectional area of the outlet section 4 increases in the exhaust gas flow direction from the throat section 3 to the outlet aperture 30. In other words: the entrance section 2 has a cone with a fixed cone angle, a convergent section, and extends from the entrance aperture 20 to the throat section 3; the throat section 3 extends from the entrance section 2 to the exit section 4 A throttling cylindrical section; and the exit section 4 has a cone with a fixed cone angle, a divergent section, and extends from the throat section 3 to the exit aperture 30. As best seen in FIGS. 3 and 4, the pores 12A and 13A extend circumferentially around the surface of the throat section 3 to deliver auxiliary airflow near the interface between the inlet section 2 and the throat section 3. To facilitate the uniform delivery and mixing of the auxiliary gas flow, the auxiliary gas pores 12A, 13A extend circumferentially around the inner surface of the throat section 3. In order to enable a first auxiliary gas flow to be delivered, the auxiliary gas coupling member provides a first auxiliary coupling member 12 coupled to a source of the first auxiliary gas flow and extending to a first channel 6, which is fed into the first channel. A duct 7 is connected to the auxiliary gas aperture 12A. In this embodiment, the first duct 7 extends radially orthogonal to the flow direction of the exhaust gas flow. However, it will be understood that the first duct 7 may extend radially at an angle other than the direction orthogonal to the flow direction of the exhaust gas flow as necessary. To enable a second auxiliary airflow to be delivered, a second auxiliary coupling 13 is provided which is coupled to a source of the second auxiliary airflow and extends to a second channel 8 which is fed into the second duct 9, The second conduit 9 terminates in the auxiliary gas aperture 13A. In this embodiment, the second duct 9 extends radially at an angle to the flow direction of the exhaust gas flow. However, it will be understood that the second duct 9 may extend radially orthogonally to the flow direction of the exhaust gas flow as necessary. As can be seen in FIGS. 1 to 4, the first channel 6 and the second channel 8 are formed by depressions formed on the surface of the catheter 1 and enclosed by annular sleeves 10 and 11, respectively. The first and second channels 6 and 8 are longitudinally offset to prevent the auxiliary gas from being premixed before being delivered into the exhaust gas flow and to promote the first auxiliary gas coupling 12 and the second auxiliary gas coupling to each other both longitudinally and rotationally. One of the pieces 13 is a simple mechanical coupling piece configuration. Operation In operation, an exhaust gas stream from one of the processing tools is provided via the inlet aperture 20. The exhaust gas flow accelerates as it travels through the convergent inlet section 2 and passes into the throat section 3. FIG. 5 shows a computational fluid dynamic model of the pressure change of the exhaust gas flow as it flows through the duct 1 based on the illustrated geometry. As can be seen, when the exhaust gas flow flows through the throat section 3, low-pressure regions 3A, 3B appear in the exhaust gas flow. Therefore, when the exhaust gas flow enters the throat section 3, the pressure of the exhaust gas flow is reduced, which helps to draw the auxiliary gas flow from the auxiliary gas pores 12A, 13A. Mixing of the exhaust gas flow with the auxiliary gas flow occurs when the mixed gas flows through the throat section 3 and when it expands along the divergent outlet section 4. The mixed gas stream then exits through the exit aperture 30 and is delivered to the reduction device. It will be understood that although in this embodiment, the auxiliary gas is delivered to zone 3A, either or both of them may be delivered to zone 3B as well. Modeling As mentioned above, high temperatures are required to obtain a good DRE for CF4. Existing inlet assemblies typically consist of the following (each inlet assembly (nozzle)): • 50 SLM nitrogen with approximately 1% of process gas (exhaust stream); • 18 via a side inlet upstream of the processing chamber To 20 SLM oxygen; • 9 SLM methane via a nozzle in the middle of the inlet assembly (approximately 5 cm in front of the tip); • 2.5 SLM methane in an endless belt around the inlet assembly; 25 SLM CDA in an endless belt (this provides extra oxygen to get a slightly thinner mixture). The initial modelling of the existing assembly has shown that these endless belts do not provide a perfect mixture of fuel, oxidant and process gas before ignition. Therefore, the inlet assembly of the embodiment is configured to allow this amount of methane and oxygen to be thoroughly premixed into a process stream before being fed to the nozzles in the burner. 2D simulation to identify the maximum pressure drop Initially, some 2D axisymmetric simulations were performed, and the convergence and divergence angles were varied to identify the best combination. The best combination was the combination that produced the largest pressure drop on the wall. The angle varies from 3 ° to 25 ° (relative to the axis of the tube). The maximum pressure drop recorded on the throat surface according to the varying wall convergence and divergence angles is as follows: The data shows the following general trend: As the divergence angle decreases, the pressure drop increases. Conversely, as the convergence angle increases, the pressure drop increases. In short, to obtain a pressure drop on one of the high walls in the throat, a highly inclined inlet and a significantly more moderate outlet are required. In all cases, a peak pressure drop was observed in the throat immediately after convergence, so the side inlet should be placed as far as possible towards the inlet end of the throat. Accordingly, embodiments provide a device for introducing both a fuel and an oxidant into a process stream. The device is a mixer that allows two different gases to be introduced into a main process stream in the throat of the device. Usually, these will be a fuel and an oxidant, thus allowing a gas that has been fully premixed to be introduced into a reaction chamber. Current methods of introducing additional fuel into a process stream via coaxial nozzles and nozzles do not result in good mixing. Ideally, the fuel and oxidant should be thoroughly mixed with the process stream before ignition to achieve higher local temperatures to improve the decomposition of the polyfluorocarbons. This configuration mixes two separate gases simultaneously into an existing third stream. In one embodiment, the device includes a convergent entry section having an angle of 25 ° with respect to the long axis, fed into a cylindrical throat having a length of 20.0 mm and a diameter of 14.0 mm. This then feeds in a divergent conical section with an angle of 4 ° to the major axis. In the throat, on a radial plane 3.0 mm away from the entrance of the throat, there are eight holes equally spaced around the circumference in the center. The alternating holes are fed through two different annular channels. Therefore, each channel has four holes spaced at 90 ° between it and the throat. The two sets of holes are separated by 45 ° from each other, resulting in the aforementioned eight holes. The first channel is in the same plane as the hole in the throat, where the four holes between it and the throat are radial. The channel is 7.75 mm from the throat and has a rectangular cross section of 10.0 mm (axial direction) x 2.5 mm (radial direction). The four holes are each 3.0 mm in diameter. The outer surface of this channel is closed by a metal sleeve, which is welded in place and fed through an inlet tube. The second channel is at the same radial distance from the throat, but is positioned on the converging side of the first channel. The four holes between the second channel and the throat are therefore at an angle of 40 ° with respect to the long axis and are therefore approximately 11 mm long. The cross section of the channel is similar to the first channel, but has a chamfered upstream edge to allow four holes to be drilled. The four holes are each 3.0 mm in diameter. The outer surface of this channel is formed by a second metal sleeve and is fed by a second inlet tube. Bulk gas is fed into the device via a convergent inlet and exits via a divergent section. The auxiliary gas is simultaneously fed into the throat via a feed tube. The effect of the divergent section after the introduction of these two additional gases is to ensure good mixing. Improved mixing of oxidant and fuel into the process stream has the potential to improve DRE and reduce fuel consumption. Although the illustrative embodiments of the present invention have been disclosed in detail herein with reference to the accompanying drawings, it should be understood that the present invention is not limited to this precise embodiment, and may be implemented without departing from the scope of the appended patent applications and their equivalents. In the case of defining the scope of the present invention, various changes and modifications can be implemented by those skilled in the art.

1‧‧‧長形、大致圓柱形管
2‧‧‧入口區段
3‧‧‧喉部區段
3A‧‧‧低壓之區
3B‧‧‧低壓之區
4‧‧‧出口區段
6‧‧‧第一通道
7‧‧‧第一導管
8‧‧‧第二通道
9‧‧‧第二導管
10‧‧‧環形套筒
11‧‧‧環形套筒
12‧‧‧第一輔助氣體耦合件
12A‧‧‧輔助氣體孔隙
13‧‧‧第二輔助氣體耦合件
13A‧‧‧輔助氣體孔隙
20‧‧‧入口孔隙
30‧‧‧出口孔隙
100‧‧‧入口總成1‧‧‧ long, roughly cylindrical tube
2‧‧‧ Entrance Section
3‧‧‧throat section
3A‧‧‧Low Voltage Zone
3B‧‧‧ Low Voltage Zone
4‧‧‧ exit section
6‧‧‧ the first channel
7‧‧‧ first catheter
8‧‧‧ second channel
9‧‧‧ second catheter
10‧‧‧ annular sleeve
11‧‧‧ annular sleeve
12‧‧‧ the first auxiliary gas coupling
12A‧‧‧Auxiliary gas pore
13‧‧‧Second auxiliary gas coupling
13A‧‧‧Auxiliary gas pore
20‧‧‧ entrance porosity
30‧‧‧Exit Pore
100‧‧‧ entrance assembly

現將參考附圖進一步描述本發明之實施例，在圖式中： 圖1繪示根據一項實施例之一入口總成； 圖2係入口總成之一端視圖； 圖3係穿透圖2中所展示之平面之一橫截面視圖； 圖4係圖2中所展示之平面上之另一橫截面視圖；及 圖5繪示入口總成內之幾何結構及模擬壓力位準。An embodiment of the present invention will now be further described with reference to the accompanying drawings. In the drawings: FIG. 1 shows an inlet assembly according to an embodiment; FIG. 2 is an end view of the inlet assembly; A cross-sectional view of one of the planes shown in FIG. 4; FIG. 4 is another cross-sectional view of the plane shown in FIG. 2; and FIG. 5 shows the geometry and simulated pressure levels in the inlet assembly.

1‧‧‧長形、大致圓柱形管 1‧‧‧ long, roughly cylindrical tube

10‧‧‧環形套筒 10‧‧‧ annular sleeve

11‧‧‧環形套筒 11‧‧‧ annular sleeve

12‧‧‧第一輔助氣體耦合件 12‧‧‧ the first auxiliary gas coupling

13‧‧‧第二輔助氣體耦合件 13‧‧‧Second auxiliary gas coupling

100‧‧‧入口總成 100‧‧‧ entrance assembly

Claims (26)

一種用於一減量裝置之入口總成，其包括： 一入口部分，其經構形以接收待處理之一廢氣流； 一喉部部分，其與該入口部分流體耦合； 一出口部分，其與該喉部部分流體耦合；及 一第一輔助氣體孔隙及一第二輔助氣體孔隙，其等各經定位為靠近該喉部部分且經構形以分別遞送一第一輔助氣流及一第二輔助氣流以用於與該廢氣流混合以產生一混合氣流，該出口部分經構形以將該混合氣流遞送至該減量裝置之一處理腔室。An inlet assembly for a reducing device includes: an inlet portion configured to receive an exhaust gas stream to be treated; a throat portion fluidly coupled to the inlet portion; an outlet portion and The throat portion is fluidly coupled; and a first auxiliary gas aperture and a second auxiliary gas aperture, each of which is positioned adjacent to the throat portion and is configured to deliver a first auxiliary gas flow and a second auxiliary gas, respectively. A gas stream is used to mix with the exhaust gas stream to produce a mixed gas stream, and the outlet portion is configured to deliver the mixed gas stream to a processing chamber of one of the reduction devices. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該入口部分內靠近該喉部部分。For example, the inlet assembly of claim 1, wherein at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the inlet portion near the throat portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該出口部分內靠近該喉部部分。As in the inlet assembly of claim 1, wherein at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the exit portion near the throat portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內。The inlet assembly of claim 1, wherein at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned in the throat portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之二者經定位於該喉部部分內。As in the inlet assembly of claim 1, wherein both the first auxiliary gas pore and the second auxiliary gas pore are positioned in the throat portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內靠近該入口部分。The inlet assembly of claim 1, wherein at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the throat portion near the inlet portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之至少一者經定位於該喉部部分內靠近該出口部分。The inlet assembly of claim 1, wherein at least one of the first auxiliary gas pore and the second auxiliary gas pore is positioned within the throat portion near the outlet portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之一者經定位於該喉部部分內靠近該入口部分，且該第一輔助氣體孔隙及該第二輔助氣體孔隙之另一者經定位於該喉部部分內靠近該出口部分。As in the inlet assembly of claim 1, wherein one of the first auxiliary gas pore and the second auxiliary gas pore is positioned in the throat portion near the inlet portion, and the first auxiliary gas pore and the second The other of the auxiliary gas pores is positioned within the throat portion near the outlet portion. 如請求項1之入口總成，其中該第一輔助氣體孔隙及該第二輔助氣體孔隙之二者經定位於該喉部部分內靠近該入口部分。As in the inlet assembly of claim 1, wherein both the first auxiliary gas pore and the second auxiliary gas pore are positioned within the throat portion near the inlet portion. 如請求項1之入口總成，其包括複數個該等第一輔助氣體孔隙及複數個該等第二輔助氣體孔隙。If the inlet assembly of claim 1, it includes a plurality of the first auxiliary gas pores and a plurality of the second auxiliary gas pores. 如請求項10之入口總成，其中該複數個該等第一輔助氣體孔隙及該複數個該等第二輔助氣體孔隙沿圓周定位。If the inlet assembly of claim 10, wherein the plurality of the first auxiliary gas pores and the plurality of the second auxiliary gas pores are positioned along the circumference. 如請求項10之入口總成，其中該複數個該等第一輔助氣體孔隙及該複數個該等第二輔助氣體孔隙交替沿圓周定位。If the inlet assembly of claim 10, wherein the plurality of the first auxiliary gas pores and the plurality of the second auxiliary gas pores are alternately positioned along the circumference. 如請求項10之入口總成，其中該複數個該等第一輔助氣體孔隙及該複數個該等第二輔助氣體孔隙圍繞該喉部部分交替沿圓周定位。If the inlet assembly of claim 10, wherein the plurality of the first auxiliary gas pores and the plurality of the second auxiliary gas pores are alternately positioned along the circumference around the throat portion. 如請求項1之入口總成，其包括經構形以接收該第一輔助氣流之一第一耦合件及與該第一耦合件及該等第一輔助氣體孔隙流體耦合之一第一通道。The inlet assembly of claim 1, comprising a first coupling member configured to receive the first auxiliary gas flow and a first channel fluidly coupled to the first coupling member and the first auxiliary gas pores. 如請求項1之入口總成，其包括經構形以接收該第二輔助氣流之一第二耦合件及與該第二耦合件及該等第二輔助氣體孔隙流體耦合之一第二通道。The inlet assembly of claim 1, comprising a second coupling member configured to receive the second auxiliary gas flow and a second channel fluidly coupled to the second coupling member and the second auxiliary gas pores. 如請求項1之入口總成，其中該等第一輔助氣體孔隙及該等第二輔助氣體孔隙經定向以在橫向於該廢氣流之一流動方向之一方向上輸送該第一輔助氣流及該第二輔助氣流。If the inlet assembly of claim 1, wherein the first auxiliary gas pores and the second auxiliary gas pores are oriented to transport the first auxiliary gas flow and the first auxiliary gas flow in a direction transverse to one of the flow directions of the exhaust gas flow Two auxiliary airflows. 如請求項14之入口總成，其中該第一耦合件在該入口總成之一長軸之一方向上與該第二耦合件偏移。For example, the inlet assembly of claim 14, wherein the first coupling member is offset from the second coupling member in a direction of a long axis of the inlet assembly. 如請求項15之入口總成，其中該第一耦合件圍繞該入口總成之該長軸與該第二耦合件徑向偏移。The inlet assembly of claim 15, wherein the first coupling member is radially offset from the second coupling member around the long axis of the inlet assembly. 如請求項1之入口總成，其中該入口部分之一橫截面積朝向該喉部部分減小。As in the inlet assembly of claim 1, wherein a cross-sectional area of one of the inlet portions decreases toward the throat portion. 如請求項1之入口總成，其中該入口部分朝向該喉部部分成錐形。The inlet assembly of claim 1, wherein the inlet portion is tapered toward the throat portion. 如請求項1之入口總成，其中該入口部分具有1º至60º且較佳地約為25º之一錐角。The inlet assembly of claim 1, wherein the inlet portion has a cone angle of 1 ° to 60 ° and preferably about 25 °. 如請求項1之入口總成，其中該喉部部分之一橫截面積係恆定的。As in the inlet assembly of claim 1, wherein the cross-sectional area of one of the throat portions is constant. 如請求項1之入口總成，其中該出口部分之一橫截面積遠離該喉部部分而增大。For example, the inlet assembly of claim 1, wherein a cross-sectional area of one of the outlet portions increases away from the throat portion. 如請求項1之入口總成，其中該出口部分遠離該喉部部分而成錐形。The inlet assembly of claim 1, wherein the exit portion is tapered away from the throat portion. 如請求項1之入口總成，其中該出口部分具有1º至60º且較佳地約為3º之一錐角。As in the inlet assembly of claim 1, wherein the outlet portion has a cone angle of 1 ° to 60 ° and preferably about 3 °. 如請求項1之入口總成，其中該入口部分具有經構形以接收該廢氣流之一入口孔隙且該出口部分具有經構形以遞送該混合氣流之一出口孔隙，且其中該喉部部分之一橫截面積小於該入口孔隙及該出口孔隙二者。The inlet assembly of claim 1, wherein the inlet portion has an inlet aperture configured to receive the exhaust gas stream and the outlet portion has an outlet aperture configured to deliver the mixed gas stream, and wherein the throat portion One of the cross-sectional areas is smaller than both the inlet aperture and the outlet aperture.
TW106123740A 2016-07-18 2017-07-17 Inlet assembly and method TW201809549A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1612400.0A GB2552321A (en) 2016-07-18 2016-07-18 Inlet assembly and method
??1612400.0 2016-07-18

Publications (1)

Publication Number Publication Date
TW201809549A true TW201809549A (en) 2018-03-16

Family

ID=56890545

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106123740A TW201809549A (en) 2016-07-18 2017-07-17 Inlet assembly and method

Country Status (3)

Country Link
GB (1) GB2552321A (en)
TW (1) TW201809549A (en)
WO (1) WO2018015713A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110270240A (en) * 2019-06-06 2019-09-24 常州瑞凯化工装备有限公司 Dilution steam generation mixer
CN114392631A (en) * 2022-01-17 2022-04-26 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment efficiency adjustment method and exhaust gas treatment equipment

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2619697A (en) * 2022-05-18 2023-12-20 Greener Blue Ltd Passive blender
GB2629623A (en) * 2023-05-04 2024-11-06 Edwards Ltd Plasma foreline

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3306034A (en) * 1965-05-17 1967-02-28 Boyd Clarence Method and device for exhaust gas purification
US4123220A (en) * 1976-03-31 1978-10-31 Ford, Bacon & Davis Texas, Inc. Gas mixer and reactor
US4900246A (en) * 1977-05-25 1990-02-13 Phillips Petroleum Company Apparatus for burning nitrogen-containing fuels
US5009174A (en) * 1985-12-02 1991-04-23 Exxon Research And Engineering Company Acid gas burner
US4725223A (en) * 1986-09-22 1988-02-16 Maxon Corporation Incinerator burner assembly
US5338113A (en) * 1990-09-06 1994-08-16 Transsonic Uberschall-Anlagen Gmbh Method and device for pressure jumps in two-phase mixtures
US5241992A (en) * 1992-07-14 1993-09-07 Eastman Kodak Company Apparatus and method for distributing fluids
DE19705861A1 (en) * 1997-02-15 1998-08-20 Henkel Ecolab Gmbh & Co Ohg Device for admixing additives and method for cleaning and / or disinfecting carried out therewith

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110270240A (en) * 2019-06-06 2019-09-24 常州瑞凯化工装备有限公司 Dilution steam generation mixer
CN110270240B (en) * 2019-06-06 2024-05-24 常州瑞凯化工装备有限公司 Dilution steam mixer
CN114392631A (en) * 2022-01-17 2022-04-26 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment efficiency adjustment method and exhaust gas treatment equipment
CN114392631B (en) * 2022-01-17 2022-12-09 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment efficiency adjustment method and exhaust gas treatment equipment

Also Published As

Publication number Publication date
GB201612400D0 (en) 2016-08-31
GB2552321A (en) 2018-01-24
WO2018015713A1 (en) 2018-01-25

Similar Documents

Publication Publication Date Title
TW201809549A (en) Inlet assembly and method
JP4426631B2 (en) Exhaust gas recirculation device
US10865983B2 (en) Inlet assembly
US20160238255A1 (en) Enhanced turbulent mixing
JP6839696B2 (en) Entrance assembly and its operation method
EP1592495B1 (en) Mixer
JP6797118B2 (en) Exhaust gas inlet assembly of radiant burner
JP5872703B2 (en) Improved vortex combustion mixture torch
JP7037176B2 (en) Premixed gas burner
CN105582808A (en) SCR denitration device and method
US20160102857A1 (en) Swirl jet burner
US20230213186A1 (en) Inlet assembly for an abatement assembly and method of conveying an effluent to an abatement chamber
CN110836379B (en) Exhaust gas introduction device
JP7325780B1 (en) waste treatment equipment
GB2559732A (en) Wet blasting machines
JP2024074691A (en) Combustion nozzle and combustion type exhaust gas treatment apparatus
JP2005288596A (en) Blasting nozzle
GB2588909A (en) Inlet assembly for an abatement apparatus