TW201741952A - Storage system and method for controlling the storage system - Google Patents

Abstract

The disclosure provides a storage system. The storage system includes a number of racks and a transferring module which are arranged to be moveable along an X axis. The racks are configured to store at least one element. The transferring module includes a platform which is arranged to be moveable along a Z axis. The platform is selectively positioned between two neighboring racks. The storage system also includes a handling module and a positioning module both disposed on the platform. The handling module includes a holder to secure the element. The positioning module is used to detect the position of the handling module relative to the racks. The control apparatus controls the storage system according to the detected results from the positioning module.

Description

Warehousing system and storage system control method

The present disclosure relates to a storage system and a method of controlling the same, and more particularly to a storage system for storing semiconductor processing equipment and a control method for the storage system.

Semiconductor devices are used in a variety of electronic applications, such as personal computers, mobile phones, digital cameras, and other electronic devices. The semiconductor device is generally fabricated by sequentially depositing an insulating or dielectric layer material, a conductive layer material, and a semiconductor layer material on a semiconductor substrate, and then patterning the various material layers formed using a lithography process to form circuit components and parts. Above the semiconductor substrate. Technological advances in the materials and design of integrated circuits have led to the development of integrated circuits for many generations. Each generation has smaller and more complex circuits than the previous generation. However, these developments have increased the complexity of processing and manufacturing integrated circuits. In order for these developments to be realized, similar developments in the manufacture and production of integrated circuits are also necessary.

In the fabrication of semiconductor devices, a variety of processing elements are used sequentially to fabricate integrated circuits over the semiconductor wafer. For example, reticles having different patterns are used in multiple light development steps. Before and after use, the reticle is usually stored in a storage system for storage and management. Continue to reuse. Since the existing methods and equipment still do not fully meet the above requirements for processing and storage of processing components, a new warehousing system is still needed to complete warehousing management with higher efficiency.

In view of this, one of the objects of the present disclosure is to provide a warehousing system that performs warehousing management with higher efficiency.

According to an embodiment of the disclosure, the storage system includes a plurality of storage cabinets and a mobile module. The storage cabinet and the moving module are arranged to be movable in an X-axis direction. The storage cabinets are each configured to store at least one component. The mobile module includes a lifting platform movable along a Z-axis direction and selectively disposed between adjacent storage cabinets. The storage system also includes a grab module and a positioning module. The grabbing module and the positioning module are disposed on the lifting platform. The grab module includes a gripping assembly for gripping the component. The positioning module is configured to detect the position of the grab module relative to the storage cabinet. In addition, the storage system includes a control device. The control device adjusts the operation of the first storage cabinet, the second storage cabinet, the mobile module, or the capture module according to the detection signal from the positioning module.

In the above embodiment, the positioning module includes a camera assembly, a laser ranging component, and a code scanning component. The photographic component is configured to capture an image of the first storage cabinet or the second storage cabinet. The laser ranging component is configured to detect a distance between the capture module and the first storage cabinet or the second storage cabinet. A bar code scanning component configured to read a bar code located at a location of the first storage bin or the second storage bin, or to read a bar code located at one of the components. The control device performs positioning of the capture module according to the obtained image and the detected distance.

In the above embodiment, the mobile module includes a lifting platform and a receiving slot. The gripping module is disposed on the lifting platform in such a manner as to be movable in a Y-axis direction. A receiving groove is disposed on the lifting platform and is used to place the component.

In the above embodiment, the gripping assembly includes two oppositely disposed lever members, a first clamping member and a second clamping member. The first clamping member and the second clamping member are respectively disposed on the two lever members and are used together for clamping the component. The angle of the second clamping member relative to the member is determined by the angle at which the member is placed.

Another object of the present disclosure is to provide a method of controlling a storage system. The method includes moving a first storage cabinet and a second storage cabinet. The method further includes moving a passenger device to the work space defined between the first storage cabinet and the second storage cabinet. The method also includes performing a position correction operation. Additionally, the method includes scanning a bar code located at a location of the first storage bin or the second storage bin. And, the method includes grabbing the component from the first storage bin or the second storage bin, or placing an element to the first storage bin or the second storage bin.

In the above embodiment, before the component is placed in the first storage cabinet or the second storage cabinet, the scanning is further performed on the first storage cabinet or the second storage cabinet to confirm the first storage cabinet or the Whether the relative position on the second storage cabinet is empty.

In the above embodiment, the method includes grabbing or placing the component through a grab module of the carrier device, and the method includes moving the Y-axis direction or a Z-axis direction in the workspace Grab the module. Before the grab module moves in the Z-axis direction, it is detected whether a predetermined distance below the grab module is clear, and if there is an obstacle, the movement in the Z-axis direction is stopped.

In the above embodiment, the component is placed to the first storage cabinet Or before the second storage cabinet, and after the component is picked up from the first storage cabinet or the second storage cabinet, the component is placed in a receiving slot of the loading device in the working space.

In the above embodiment, the position correction operation includes the first storage cabinet and the second storage cabinet according to an image and a detection distance between the loading device and the first storage cabinet or the second storage cabinet. Or adjust the position of the carrier device.

1‧‧ ‧ warehousing system

10‧‧‧First storage cabinet

110‧‧‧ cells

20‧‧‧Second storage cabinet

210‧‧‧ cells

30‧‧‧Loading equipment

31‧‧‧Mobile Module

311‧‧‧Longmen

312‧‧‧ Lifting platform

313‧‧‧ platform ontology

314‧‧‧ Track

315‧‧‧ accommodating slots

33‧‧‧Grab module

331‧‧‧ Robotic arm

332‧‧‧Grab components

333‧‧‧ rods

334‧‧‧ rods

335‧‧‧ drive unit

336‧‧‧First clamping part

337‧‧‧Second grip

338‧‧‧ pivot shaft

339‧‧‧Shell

35‧‧‧ Positioning Module

351‧‧‧Photographic components

353‧‧‧Laser ranging components

355‧‧‧Barcode scanning component

40‧‧‧Control equipment

50‧‧‧ components

60‧‧‧ method

61-66‧‧‧ operation

70‧‧‧ method

71-76‧‧‧ operations

S1-S5‧‧‧ arrow

The full disclosure is based on the following detailed description and in conjunction with the drawings. It should be noted that the illustrations are not necessarily drawn to scale in accordance with the general operation of the industry. In fact, it is possible to arbitrarily enlarge or reduce the size of the component for a clear explanation.

Figure 1 is a schematic illustration of a storage system of some embodiments of the present disclosure, wherein a ride device is located outside of the work space defined by the two storage cabinets.

Figure 2 is a schematic diagram showing the ride device of some embodiments of the present disclosure.

Figure 3 is a flow chart showing a method of performing a grab operation on a component in some embodiments of the present disclosure.

Figure 4 is a schematic illustration of a storage system of some embodiments of the present disclosure, wherein a loading device is located within the working space defined by the two storage cabinets.

Figure 5 is a diagram showing a method of performing a position correction operation in some embodiments of the present disclosure.

Figure 6 is a flow chart showing a method of performing a placement operation on a component in some embodiments of the present disclosure.

In the following, a number of specific preferred embodiments will be described in detail with reference to the accompanying drawings, which illustrate several embodiments. However, the present disclosure can be implemented in many different forms, and is not limited to the embodiments described below, and the embodiments provided herein may be made to provide a more thorough and complete disclosure of the scope of the disclosure. By.

Moreover, for convenience of description, spatially relative terms such as "under", "below", "lower", "above", "upper", etc. may be used herein. To describe the relationship of one element or component to another (or other) element or component as illustrated. Spatially relative terms are intended to encompass different orientations of the device in use or operation. The device may be otherwise oriented (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein may be interpreted accordingly. It should be understood that additional operations may be provided before, during, and after the method, and that some of the described operations may be substituted or eliminated for other embodiments of the method.

It is to be understood that the elements specifically described or illustrated may be in various forms well known to those skilled in the art. In addition, when an element is "on" another element, it may mean "directly" to the other element or the other element is interposed.

In addition, relative terms such as "lower" or "bottom" and "higher" or "top" may be used in the embodiments to describe the relative relationship of one element to another. It will be understood that if the illustrated device is flipped upside down, the component described on the "lower" side will be the component on the "higher" side.

Here, the terms "about" and "about" are usually expressed in a given Within 20% of the set value or range, preferably within 10%, and more preferably within 5%. The quantity given here is an approximate quantity, meaning that the meaning of "about" or "about" may be implied without specific explanation.

Figure 1 shows a schematic diagram of a storage system of some embodiments of the present disclosure. According to some embodiments of the present disclosure, the storage system 1 includes a plurality of storage cabinets, such as a first storage cabinet 10, a second storage cabinet 20, a passenger loading device 30, and a control device 40. The number of components of the warehousing system 1 can be increased or decreased, and is not limited to this embodiment.

The first storage cabinet 10 and the second storage cabinet 20 are respectively configured to store one or more components (for example, a photomask) for semiconductor wafer processing. The first storage cabinet 10 and the second storage cabinet 20 may respectively include a plurality of storage cells, such as the storage cells 110, 210, on opposite sides of the X-axis. The storage grids are arranged along the Y-axis and Z-axis matrix. Each cell is provided with at least one component disposed therein. The bottom surface of each cell can be tilted relative to the X direction to prevent components placed in the cell from falling due to accident. In some embodiments, the first storage cabinet 10 and the second storage cabinet 20 have the same height on the Z-axis.

In some embodiments, the first storage cabinet 10 and the second storage cabinet 20 are disposed along an X-axis direction, and the first storage cabinet 10 and the second storage cabinet 20 are respectively movable along the X-axis direction to change the distance between each other. . For example, in a storage state, there is a relatively small spacing between the first storage cabinet 10 and the second storage cabinet 20, for example, less than 10 cm. In a working state, a working space W is defined between the first storage cabinet 10 and the second storage cabinet 20, as shown in FIG. 1 to accommodate the loading device 30 to perform work therebetween.

In some embodiments, changing from the storage state to the operation state During the state, the first storage cabinet 10 is stationary, and the second storage cabinet 20 is away from the first storage cabinet 10 in the X-axis direction, as indicated by an arrow S1 in FIG. Alternatively, the second storage cabinet 20 is stationary, and the first storage cabinet 10 is separated from the second storage cabinet 20 in the X-axis direction. Alternatively, the first storage cabinet 10 and the second storage cabinet 20 are simultaneously moved in opposite directions away from each other. The bottom of the first storage cabinet 10 and the second storage cabinet 20 may include a drive assembly (eg, an electric motor). The driving component and the control device 40 are connected in a wired or wireless manner, and the first storage cabinet 10 and the second storage cabinet 20 are driven to move according to signals from the control device 40.

The carrier device 30 is configured to carry and dispense components between the storage cabinets 10, 20 and a work area (not shown). In some embodiments, the carrying device 30 includes a moving module 31, a grabbing module 33, and a positioning module 35 (Fig. 2). The number of components of the carrier device 30 can be increased or decreased, and is not limited to this embodiment.

In some embodiments, the mobile module 31 includes a gantry 311, a lifting platform 312, and at least one receiving slot 315. The gantry 311 is provided to be movable in the X-axis direction as indicated by an arrow S2 in FIG. In some embodiments, the gantry 311 includes two columnar structures, wherein the two columnar structures are spaced apart in the Y-axis direction by a width greater than the width of the first storage cabinet 10 or the second storage cabinet 20 in the Y-axis direction.

The lifting platform 312 is disposed above the gantry 311 in such a manner as to be movable in a Z-axis direction. The lifting platform 312 includes a platform body 313 and a track 314. The platform body 313 is coupled to the gantry 311. The track 314 extends above the platform body 313 in the Y-axis direction.

In some embodiments, the track 314 is divided into two sides in the X-axis direction. There is a plurality of accommodating grooves 315 arranged along the Y-axis direction. The accommodating groove 315 is configured to accommodate the component 50. Each of the accommodating grooves 315 may be the same size or different to accommodate different sized components. It should be noted that, in the embodiment shown in FIG. 1, the track 314 is provided with the receiving groove 315 on both sides of the X-axis direction, but the disclosure is not limited thereto. The accommodating groove 315 may be disposed only on a single side of the track 314. Alternatively, the two rows of receiving slots 315 are simultaneously disposed on a single side of the track 314.

The gripping module 33 is configured to transport the component 50 to move the component 50 between the receiving slot 315 and the first and second storage cabinets 10, 20. In some embodiments, the gripping module 33 is disposed above the rail 314 so as to be movable in the Y-axis direction, as indicated by arrow S3 in FIG.

Figure 2 is a schematic diagram showing the ride device of some embodiments of the present disclosure. In some embodiments, the gripping module 33 includes a robot arm 331 and a gripping assembly 332. The robotic arm 331 can be a six-axis robotic arm configured to change the position of the grasping assembly 332.

In some embodiments, the gripping assembly 332 includes a housing 339, two lever members 333, 334, a driving unit 335, a first clamping member 336, and a second clamping member 337.

The housing 339 is disposed at the end of the robot arm 331. The rods 333 and 334 are respectively connected to opposite sides of the casing 339, wherein the rod 333 is coupled to the casing 339 through the driving unit 335. The lever member 333 is moved relative to the housing 339 by the driving of the driving unit 335 to change the distance between the two lever members 333, 334 in the direction indicated by the arrow S4. The first and second clamping members 336 and 337 are respectively disposed at the ends of the two rod members 333 and 334, and the first and second clamping members 336 and 337 respectively include a stopping slider.

In some embodiments, in order to accommodate placement at different angles The component 50 of the storage cabinet, the gripping assembly 336 is coupled to the rod 333 via a pivot shaft 338 for pivoting relative to the rod 333 in the direction indicated by arrow S5. However, the present disclosure is not limited thereto, and the grasping assembly 336 may also be directly fixed to the end of the rod 333.

The positioning module 35 is configured to detect the position of the grab module 33 relative to the first storage cabinet 10 or the second storage cabinet 20. In some embodiments, the positioning module 35 is disposed on the capture module 33 and includes a camera assembly 351, a laser ranging component 353, and a code scanning component 355.

The photographing assembly 351 can include a Charge-coupled Device (CCD) and is configured to capture an image of the first storage cabinet 10 or the second storage cabinet 20. The laser ranging component 353 can include a laser emitter and a laser receiver. The laser emitter emits a laser signal toward a target, and the laser receiver receives a laser signal reflected from the target. The laser ranging component 353 calculates the distance between the grab module 33 and the first storage cabinet 10 or the second storage cabinet 20 according to the time of the laser signal transmission. The barcode scanning component 355 is configured to read a barcode.

The photographing component 351, the laser ranging component 353, and the barcode scanning component 355 can be connected to the control device 40 (Fig. 1) by wire or wirelessly to transmit the generated signal to the control device 40 or receive the control device. 40 control signals.

On the other hand, the photographing component 351, the laser ranging component 353, and the barcode scanning component 355 can be disposed on the casing 339 as shown in FIG. Alternatively, the photographing component 351, the laser ranging component 353, and the barcode scanning component 355 may be disposed on any one of the platform body 313, the robot arm 331, or the housing 339. Above.

3 is a flow chart showing a method 60 of controlling a storage system 1 to place an element in a storage cabinet in accordance with some embodiments. For purposes of illustration, the flowchart will be described in conjunction with the schematics shown in Figures 1, 2, 4, and 5. Some of the operations described may be replaced or eliminated for different embodiments. Additional components can be added to the storage system 1. Some of the components described may be replaced or eliminated for different embodiments.

The method 60 begins at operation 61 in which two adjacent storage cabinets (e.g., the first storage cabinet 10, the second storage cabinet 20) are moved to define a work space therebetween. For example, as shown in FIG. 1, the first storage cabinet 10 and/or the second storage cabinet 20 are moved in the X-axis direction to define a work space W therebetween. The above working space means that there is a distance between the first storage cabinet 10 and the second storage cabinet 20 for accommodating the lifting platform 312.

The method 60 continues to operation 62 by moving the ride device (e.g., the carrier device 30) into the workspace W described above. In some embodiments, the gantry 311 of the carrying device 30 is moved in the X-axis direction such that the lifting platform 312 is aligned above the working space W, as shown in FIG. Next, the lifting platform 312 descends in the Z-axis direction and enters the working space W as shown in FIG. The height at which the lifting platform 312 descends is determined by the location of the cell in which the component to be grasped/placed is located.

In some embodiments, during the execution of the operation of the descending lifting platform 312 or during the execution of the descending lifting platform 312, a detector disposed on the lifting platform 312 continuously detects a predetermined distance below the lifting platform 312 ( For example: 5 cm) Is there an obstacle? If the obstacle is detected, the operation of the descending lifting platform 312 is stopped to protect the lifting platform 312 and Other components create a collision or avoid injury to personnel located below the lifting platform 312.

The method 60 continues to operation 63 by performing a position correction operation to correct the position of the ride device 30 relative to the first and second storage cabinets 10, 20. In some embodiments, as shown in FIG. 5, the position correction operation includes photographing the camera unit 351 toward a target cell 110 and returning the image to the control device 40 (FIG. 1). The control device 40 compares the received image with a predetermined image to calculate the position of the grab module 33 in the Y-axis direction and the Z-axis direction. According to the calculation result, if the position of the gripping module 33 in the Y-axis direction and the Z-axis direction is different from the predetermined position, the lifting platform 312 is driven to move to adjust the position of the lifting platform 312 in the Z-axis direction, or to drive the gripping. The module 33 is moved to adjust the position of the gripping module 33 in the Y-axis direction.

In addition, the position correction operation further includes detecting the distance between the target cell 110 and the grab module 33 by the laser ranging component 353, and sending the detected distance back to the control device. The control device 40 compares the received detection distance with a predetermined distance. If the detection distance is different from the predetermined distance, the driving gantry 311 moves to adjust the position of the gantry 311 in the X-axis direction, or drives the first storage cabinet 10 and/or the second storage cabinet 20 to move to adjust the first storage cabinet 10 And/or the position of the second storage cabinet 20 in the X-axis direction.

Execution of the position correction job may be performed once each time the lifting platform 312 enters the work space W from above the work space W. Alternatively, the position correction work may be performed periodically when the lifting platform 312 is located within the working space W. Alternatively, the position correction job may be performed when the lifting platform 312 is located within the working space W and after grabbing/placement of a predetermined number of components.

The execution of the position correction operation can avoid the occurrence of the gripping module 33 colliding with the first storage cabinet 10 or the second storage cabinet 20 when the component is subsequently grasped/placed, and the efficiency of grasping/placement of the components can be increased.

The method 60 continues to operation 64 by scanning a location bar code located at the first storage cabinet 10 or the second storage cabinet 20 to confirm that the ride device 30 is in the work position. For example, as shown in FIG. 5, in order to confirm that the gripping module 33 of the carrying device 30 is located at the correct working position, the position bar code 112 corresponding to the storage cell 110 on the first storage cabinet 10 is scanned by the bar code. Component 355 scans. The barcode scanning component 355 sends the scan result back to the control device 40 (Fig. 1), and the control device 40 compares the received scan result with a data. If the two match, it is judged that the capture module 33 reaches the correct working position. On the other hand, if the two are different, it is judged that the capture module 33 reaches the wrong work position. This step prevents components from being placed in the wrong cell.

The method 60 continues to operation 65 by scanning a cell located on the first storage bin 10 or the second storage bin 20 to confirm whether the cell is empty. For example, barcode scanning component 355 scans for target cell 110. If a component is placed in the target cell, the identification bar code of the component placed in the target cell will be detected by the bar code scanning component 355. At this time, the barcode scanning component 355 sends back the scan result to the control device 40. The control device 40 stops the action of placing the components to avoid component collisions. In some embodiments, operation 65 is omitted. After the meta-construction is placed in the cell 110, the control device 40 has recorded whether there is a placement component 50 within the cell 110. After completing operation 64, the problem of generating duplicate elements in a single cell does not occur.

The method 60 continues to operation 66 by placing the component 50 to the cell 110 in. In some embodiments, the component 50 is placed in the receiving slot 315 before being grasped by the gripping assembly 332. Next, the gripping assembly 332 grips the component 50 from the receiving slot 315 and places the component 50 within the target cell 110. By the arrangement of the storage tank 315, the loading device 30 can move the plurality of components 50 into the working space W at a time, and after all the components 50 are placed behind the first storage cabinet 10 and/or the second storage cabinet 20, Then it is removed from the work space W. Thus, the efficiency of placing the component 50 can be improved.

Figure 6 is a flow chart showing a method 70 of controlling the storage system 1 to grab a component from a storage cabinet in accordance with some embodiments. For purposes of illustration, the flowchart will be described in conjunction with the schematics shown in Figures 1, 2, 4, and 5. Some of the operations described may be replaced or eliminated for different embodiments. Additional components can be added to the storage system 1. Some of the components described may be replaced or eliminated for different embodiments.

In method 70, operations 71-74 are similar to operations 61-64 of method 60, and operations 71-74 are omitted for simplicity of the description.

Operation 75 of method 70 continues after operation 74. In operation 75, the identification bar code of the component 50 located in the first storage cabinet 10 or the second storage cabinet 20 is scanned to confirm that the component 50 in the target storage cell is the target component to be captured. In some embodiments, the barcode scanning component 355 scans for a single cell 110. After the barcode is detected by the component 50, the barcode scanning component 355 sends the scan result back to the control device 40. The control device 40 compares the detected barcode with the data. If the two match, it is determined that the component 50 in the storage cell is the target component to be captured. Conversely, if the two are different, it is determined that the component 50 in the cell is not the target component to be captured. In some embodiments, operation 75 is omitted. Element 50 The bar code information and the bar code information of the cell 110 placed on the component 50 are recorded by the control device 40 when the component 50 is placed in the cell 110. After the operation 74 is completed, the capture of the wrong component will not occur.

The method 70 continues to operation 76 by grabbing the component 50 within the cell 110. In some embodiments, the component 50 is placed in the receiving slot 315 after being removed from the cell 110. After all the components 50 to be grasped are placed in the accommodating groove 315, the loading device 30 removes all the components 50 from the work space W at one time. Thus, the efficiency of the gripping element 50 can be improved.

In some embodiments, the operation of grasping or placing the component 50 is performed once after the loading device 30 enters the workspace W. The control method of the storage system 1 is not limited to the above method 60 or 70.

Embodiments of various warehousing systems and methods of controlling the same are disclosed above. In the warehousing system, the carrying device can selectively enter a work space between two adjacent storage cabinets to grab or place components to the storage cabinet. By performing the position correction operation, the relative position between the carrying device and the storage cabinet can be confirmed, and the collision between the devices due to misalignment is reduced. In addition, the storage system manages the bar code on the storage cabinet and components to effectively increase the correctness and efficiency of component movement. The above-mentioned storage system has the technology of automatic alignment correction and movement. Since no human intervention is required, the labor cost is greatly reduced and the mistakes caused by human factors are avoided.

The embodiments and their advantages are described in detail above, and it is understood that various changes, substitutions and modifications may be made in the present disclosure without departing from the spirit and scope of the disclosure. Moreover, the scope of the present application is not intended to be limited to the processes, machines, and systems described in the specification. Specific embodiments of construction, material composition, tools, methods, and procedures. It will be readily apparent to those skilled in the art from this disclosure that, in accordance with the present disclosure, substantially the same functions or implementations as those of the corresponding embodiments described herein may be utilized. The resulting process, machine, manufacturing, material composition, tool, method or procedure. Therefore, the scope of the appended claims is intended to cover such processes, machines, manufacture, compositions of matter, tools, methods or steps. In addition, each patent application scope constitutes a separate embodiment, and combinations of different application patent scopes and embodiments are within the scope of the disclosure.

1‧‧ ‧ warehousing system

10‧‧‧First storage cabinet

110‧‧‧ cells

20‧‧‧Second storage cabinet

210‧‧‧ cells

30‧‧‧Loading equipment

31‧‧‧Mobile Module

311‧‧‧Longmen

312‧‧‧ Lifting platform

313‧‧‧ platform ontology

314‧‧‧ Track

315‧‧‧ accommodating slots

33‧‧‧Grab module

40‧‧‧Control equipment

50‧‧‧ components

S1‧‧‧ arrow

S2‧‧‧ arrow

S3‧‧‧ arrow

W‧‧‧Workspace

Claims (10)

A storage system includes: a first storage cabinet; a second storage cabinet, wherein the first storage cabinet and the second storage cabinet are arranged to be movable along an X-axis direction, and each configured to store at least a moving module disposed in the X-axis direction and including a lifting platform movable along a Z-axis direction to be disposed between the first storage cabinet and the second storage cabinet a grabbing module disposed on the lifting platform and including at least one gripping component for gripping the component; a positioning module disposed on the lifting platform and configured to detect the grabbing module The first storage cabinet, the second storage cabinet, and the mobile module are configured to adjust the first storage cabinet, the second storage cabinet, and the mobile module according to the detection signal from the positioning module. Or the action of the capture module. The warehousing system of claim 1, wherein the positioning module comprises: a photographic component configured to capture an image of the first storage cabinet or the second storage cabinet; and a laser ranging component Configuring a distance between the capture module and the first storage cabinet or the second storage cabinet; wherein the control device executes the capture module according to the obtained image and the detected distance Positioning. The storage system of claim 1, wherein the positioning module comprises a code scanning component configured to read a bar code located at a position of the first storage cabinet or the second storage cabinet, or for reading Take one of the components to identify the barcode. The storage system of claim 1, wherein the mobile module comprises: a lifting platform, wherein the capturing module is disposed on the lifting platform in a manner movable in a Y-axis direction; and an accommodation a slot is provided on the lifting platform and is used to place the component. The storage system of claim 1, wherein the gripping assembly comprises: two oppositely disposed rod members; and a first clamping member and a second clamping member respectively disposed on the two rods And jointly used to clamp the component, wherein the angle of the second clamping member relative to the lever is determined according to the angle at which the component is placed. A storage system control method includes: moving a first storage cabinet and a second storage cabinet; moving a loading device to a working space defined between the first storage cabinet and the second storage cabinet; performing a position Correcting a job; scanning a bar code at a location of the first storage bin or the second storage bin; and grabbing a component from the first storage bin or the second storage bin, or placing a component to the first storage bin or The second storage cabinet. The method of claim 6, wherein before the component is placed in the first storage cabinet or the second storage cabinet, scanning is further performed on the first storage cabinet or the second storage cabinet to confirm Whether the relative position on the first storage cabinet or the second storage cabinet is empty. The method of claim 6, further comprising: grasping or placing the component through a grabbing module of the carrying device; and in the working space, along a Y-axis direction or along a Z-axis Moving the grabbing module in a direction, wherein before the grabbing module moves along the Z-axis direction, detecting whether a predetermined distance below the grabbing module is clear, and if there is an obstruction, stopping along the Z-axis direction Move. The method of claim 6, wherein the component is placed before the first storage cabinet or the second storage cabinet, and after the component is grasped from the first storage cabinet or the second storage cabinet The component is placed in a receiving slot of the carrying device in the working space. The method of claim 6, wherein the position correction operation comprises the first storage according to an image and a detection distance between the loading device and the first storage cabinet or the second storage cabinet The position of the cabinet, the second storage cabinet, or the carrying device is adjusted.