TW201723364A - Throttle valve - Google Patents

Abstract

A throttle valve is provided. The throttle valve includes a valve body, a valve plug, a hollow seal, a cover, a spring and a bush. A flow path is formed in the valve body. The valve plug is disposed in the valve body. The degree of opening of the flow path is controlled by rotating the valve plug. The hollow seal is disposed in the valve body. The hollow seal abuts the valve plug. The cover is connected to the valve body. An outlet is formed on the cover. The cover includes a flange. The flange surrounds the outlet. The spring abuts the flange and applies an elastic force to the hollow seal, and the hollow seal therefore tightly contacts the valve plug. The spring is telescoped one bush. A first end of the bush pushes the hollow seal.

Description

Throttle valve

The present invention relates to a throttle valve, and more particularly to a throttle valve that prevents particulate contamination.

In a vapor deposition process, a deposited layer is deposited over a semiconductor wafer (or substrate), typically comprising heating the substrate and holding the substrate to maintain a short distance from the deposition gas ( A supply source of the process gas, a deposition gas (process gas) flows toward the substrate. The deposition gas stream produces a reaction and forms a deposited layer on the heated substrate.

At some point on the vacuum line between the chamber and the vacuum pump, a vacuum shut-off valve or throttle valve is typically provided to provide a limit to the process chamber when closed. Volatile contaminants remain in the vapor state at high temperatures in the reaction chamber and will not be desirably condensed on the inner wall of the cooled vacuum line. There is some distance between the reaction zone and the reaction zone, but it is still Within the containment limits of the process chamber defined by the vacuum valve. In the absence of airflow, these contaminants can return to the reaction zone of the chamber and cause undesired contamination. In an attempt to avoid this problem, the inner surface within the containment limits of the process chamber is periodically cleaned by etching (and/or plasma cleaning), etc., through a cleaning gas to remove the dielectric material deposited by the deposition gas.

However, the throttle valve is limited by its structural design, and contaminants are deposited on the internal parts of the throttle valve and affect the airflow control effect of the throttle valve. fruit. Since the throttle valve is generally controlled by a stepping motor, when the contaminant is deposited on the internal parts of the throttle valve, the stepping motor will repeatedly adjust the opening of the throttle valve, thereby affecting the pressure in the reaction chamber and reducing the pressure. The life of the throttle valve.

The present invention provides a throttle valve for solving the problems of the prior art, including a throttle body, a valve stem, a gasket, a bottom cover, a spring, and a bushing. The first-class track is formed in the throttle body. The valve stem is disposed in the throttle body, wherein the opening degree of the flow passage is adjusted by rotating the valve stem. A gasket is disposed in the throttle body, and the gasket abuts the valve stem. The bottom cover is coupled to the throttle body, wherein an air outlet is formed on the bottom cover, and the bottom cover includes a bottom cover flange surrounding the air outlet. The spring abuts the bottom cover flange and applies an elastic force to the gasket to cause the gasket to abut the valve stem. The spring sleeve is disposed on the bushing, and the first end of the bushing pushes the gasket.

In one embodiment, the bushing includes a bushing flange with one end of the spring abutting the bottom cap flange and the other end of the spring abutting the bushing flange.

In an embodiment, the bushing flange is formed at the first end.

In an embodiment, the bushing includes a second end that extends through the air outlet.

In one embodiment, the bushing has a bushing through hole having a bore diameter smaller than an aperture of the air outlet.

In an embodiment, the bushing is made of an aluminum alloy.

In an embodiment, the throttle body includes an air inlet that is located in line with the air outlet.

The invention also relates to a throttle valve comprising a throttle body, a valve stem, a gasket, a bottom cover and a spring. The first-class track is formed in the throttle body. The valve stem is disposed in the throttle body, wherein the opening degree of the flow passage is adjusted by rotating the valve stem. A gasket is disposed in the throttle body, and the gasket abuts the valve stem. The bottom cover is coupled to the throttle body, wherein an air outlet is formed on the bottom cover, and the bottom cover includes a bottom cover flange surrounding the air outlet. The spring abuts the bottom cover flange and applies an elastic force to the gasket to cause the gasket to abut the valve stem.

In an embodiment, a notch is formed in the valve stem, and the position of the notch is adjusted by rotating the valve stem, and the opening degree of the flow channel is adjusted. The sealing pad is formed with an abutting portion, and the abutting portion is formed. The portion abuts the valve stem in a sealable manner.

With the throttle valve of the embodiment of the present invention, since the air flow is separated from the spring and the bottom cover flange by using the bushing, the particles are not deposited on the spring and the bottom cover flange. Therefore, the outlet of the throttle valve is no longer blocked by the deposition of particles, so that the adjustment of the opening of the throttle valve can be reduced. This provides stable chamber pressure and increases the life of the throttle.

1, 2‧‧‧ throttle valve

10‧‧‧First connection assembly

11‧‧‧O-ring

12‧‧‧ Seal

13‧‧‧Apartment

14‧‧‧O-ring

20‧‧‧Second connection assembly

21‧‧‧O-ring

22‧‧‧ Seal

23‧‧‧Apartment

24‧‧‧O-ring

30‧‧‧ throttle body

31‧‧‧Air inlet

40‧‧‧Valve unit

41‧‧‧ valve stem

42‧‧‧ gap

50‧‧‧ bottom cover

51‧‧‧ gas outlet

52‧‧‧Bottom cover flange

60‧‧‧ Spring

70‧‧‧ bushing

71‧‧‧ first end

72‧‧‧ second end

73‧‧‧ bushing flange

74‧‧‧Blinded through hole

Fig. 1 is a view showing a throttle valve according to a first embodiment of the present invention.

Fig. 2 is a view showing a bottom cover flange of the first embodiment of the present invention.

Fig. 3 is a view showing a throttle valve of a second embodiment of the present invention.

Fig. 4 is a view showing a bushing of a second embodiment of the present invention.

Figure 5 is a view showing the second end of the bushing of the second embodiment of the present invention.

Referring to FIG. 1 , a throttle valve 1 according to a first embodiment of the present invention includes a first connecting component 10 , a second connecting component 20 , a throttle body 30 , a valve stem unit 40 , and a bottom cover . 50. The first connecting component 10 includes an O-ring 11 , a gasket 12 , and an O-ring 14 . The second connecting component 20 includes an O-ring 21, a gasket 22, and an O-ring 24. The throttle body 30 includes an air inlet 31. The valve stem unit 40 includes a valve stem 41, and a notch 42 is formed in the valve stem 41. An air outlet 51 is formed on the bottom cover 50, and the bottom cover 50 is coupled to the throttle body 30.

A first-class track is formed in the throttle body 30 (from the intake port 31 to the air outlet 51). In this embodiment, the flow path is linear, and the air inlet 31 is located on the same line as the air outlet 51. The valve stem 41 is disposed in the throttle body 30. The position of the notch 42 is adjusted by rotating the valve stem 41, and the opening degree of the flow passage is adjusted. O-ring 11 is disposed between the gasket 12 and an external conduit (not shown). An O-ring 14 is disposed between the throttle body 30 and the external conduit (not shown). The O-ring 21 is disposed between the gasket 22 and the bottom cover 50. The O-ring 24 is disposed between the throttle body 30 and the bottom cover 50.

The gasket 12 has an abutting portion 13 having an uneven shape, and the abutting portion 13 abuts against the valve stem 41 in a sealable manner. The gasket 22 has an abutting portion 23 having an uneven shape, and the abutting portion 23 abuts against the valve stem 41 in a sealable manner.

Referring to Figures 1 and 2, in the first embodiment, the bottom cover 50 includes a bottom cover flange 52 that surrounds the air outlet, thereby preventing particulates from depositing on the bottom cover flange 52. Above. Therefore, the air outlet of the throttle valve is less blocked by the deposition of particles, so that the adjustment of the opening of the throttle valve can be reduced. So can Provides stable chamber pressure and increases the life of the throttle.

Referring to FIG. 3, a throttle valve 2 according to a second embodiment of the present invention includes a first connecting component 10, a second connecting component 20, a throttle body 30, a valve stem unit 40, and a bottom cover. 50. A spring 60 and a bushing 70. The first connecting component 10 includes an O-ring 11 , a gasket 12 , and an O-ring 14 . The second connecting component 20 includes an O-ring 21, a gasket 22, and an O-ring 24. The throttle body 30 includes an air inlet 31. The valve stem unit 40 includes a valve stem 41, and a notch 42 is formed in the valve stem 41. An air outlet 51 is formed on the bottom cover 50, and the bottom cover 50 is coupled to the throttle body 30.

A first-class track is formed in the throttle body 30 (from the intake port 31 to the air outlet 51). In this embodiment, the flow path is linear, and the air inlet 31 is located on the same line as the air outlet 51. The valve stem 41 is disposed in the throttle body 30. The position of the notch 42 is adjusted by rotating the valve stem 41, and the opening degree of the flow passage is adjusted. O-ring 11 is disposed between the gasket 12 and an external conduit (not shown). An O-ring 14 is disposed between the throttle body 30 and the external conduit (not shown). The O-ring 21 is disposed between the gasket 22 and the bottom cover 50. The O-ring 24 is disposed between the throttle body 30 and the bottom cover 50.

The gasket 12 has an abutting portion 13 having an uneven shape, and the abutting portion 13 abuts against the valve stem 41 in a sealable manner. The gasket 22 has an abutting portion 23 having an uneven shape, and the abutting portion 23 abuts against the valve stem 41 in a sealable manner.

The spring 60 abuts the bottom cover flange 52 and applies an elastic force to the gasket 22 so that the gasket 22 abuts the valve stem 41. The spring 60 is sleeved over the bushing 70, and a first end 71 of the bushing 70 pushes the gasket 22. In this embodiment, the first end 71 abuts the O-ring 21.

Referring to Figures 3 and 4, in this embodiment, the bushing 70 includes a bushing flange 73 formed at the first end 71, one end of the spring 60 abutting the bottom cover The flange 52, the other end of the spring 60 abuts the bushing flange 73. The bushing further includes a second end 72. Referring to Figure 5, in an embodiment, the second end 72 extends through the air outlet 51. In one embodiment, the bushing 70 has a bushing through bore 74 having an aperture that is smaller than the bore of the air outlet 51.

In one embodiment, the bushing 70 is made of an aluminum alloy to resist ozone attack. The above disclosure does not limit the present invention, and the bushing 70 may also be Teflon or other materials.

As with the first embodiment, in this embodiment, by appropriately designing the width of the bottom cover flange 52, the aperture of the air outlet 51 can be maximized and the spring 60 can still be provided with sufficient support.

With the throttle valve of the second embodiment of the present invention, since the air flow is separated from the spring and the bottom cover flange by using the bushing, the particles are not deposited on the spring and the bottom cover flange. Therefore, the outlet of the throttle valve is no longer blocked by the deposition of particles, so that the adjustment of the opening of the throttle valve can be reduced. This provides stable chamber pressure and increases the life of the throttle.

While the present invention has been described above in terms of the preferred embodiments thereof, it is not intended to limit the invention, and may be modified and modified without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

2‧‧‧ throttle valve

10‧‧‧First connection assembly

11‧‧‧O-ring

12‧‧‧ Seal

13‧‧‧Apartment

14‧‧‧O-ring

20‧‧‧Second connection assembly

21‧‧‧O-ring

22‧‧‧ Seal

23‧‧‧Apartment

24‧‧‧O-ring

30‧‧‧ throttle body

31‧‧‧Air inlet

40‧‧‧Valve unit

41‧‧‧ valve stem

42‧‧‧ gap

50‧‧‧ bottom cover

60‧‧‧ Spring

70‧‧‧ bushing

71‧‧‧ first end

Claims (9)

A throttle valve includes: a throttle body, wherein a first-stage valve is formed in the throttle body; a valve stem is disposed in the throttle body, wherein the flow is rotated through the valve stem The opening degree of the track is adjusted; a gasket is disposed in the throttle body, the gasket abuts the valve stem; a bottom cover is connected to the throttle body, wherein an air outlet is formed in the Above the bottom cover, the bottom cover includes a bottom cover flange surrounding the air outlet; a spring abutting the bottom cover flange and applying an elastic force to the sealing gasket to seal the seal a gasket is attached to the valve stem; and a bushing is sleeved on the bushing, and a first end of the bushing pushes the gasket. The throttle valve of claim 1, wherein the bushing includes a bushing flange, one end of the spring abuts the bottom cover flange, and the other end of the spring abuts the bushing flange . The throttle valve of claim 2, wherein the bushing flange is formed at the first end. The throttle valve of claim 2, wherein the bushing includes a second end extending through the air outlet. The throttle valve of claim 1, wherein the bushing has a bushing through hole having a hole diameter smaller than an aperture of the air outlet. The throttle valve according to claim 1, wherein the bushing is made of an aluminum alloy. The throttle valve according to claim 1, wherein the throttle body An air inlet is included, and the air inlet is located on the same line as the air outlet. A throttle valve includes: a throttle body, wherein a first-stage valve is formed in the throttle body; a valve stem is disposed in the throttle body, wherein the flow is rotated through the valve stem The opening degree of the track is adjusted; a gasket is disposed in the throttle body, the gasket abuts the valve stem; a bottom cover is connected to the throttle body, wherein an air outlet is formed in the Above the bottom cover, the bottom cover includes a bottom cover flange surrounding the air outlet; and a spring abutting the bottom cover flange and applying an elastic force to the sealing The gasket fits snugly against the valve stem. The throttle valve of claim 8, wherein the valve stem is formed with a notch, and by rotating the valve stem, the position of the notch is adjusted, and the opening degree of the flow passage is adjusted, the seal is An abutment portion is formed on the pad, and the abutment portion abuts the valve stem in a sealable manner.