TW201643421A - Glass capillary structure and glass capillary processing method thereof - Google Patents

Abstract

A glass capillary processing method comprises the steps: providing a glass capillary body, the glass capillary body comprises a first body layer, a second body layer, a first pre-modified layer and a second pre-modified layer. The first pre-modified layer and the second pre-modified layer are located between the first body layer and the second body layer, and the first body layer, the second body layer, the first pre-modified layer and the second pre-modified layer has a first index of refraction; proceeding for the first pre-modified layer to make the first pre-modified layer modify to be a waveguide layer having a second index of refraction; proceeding for the second pre-modified layer to make the second pre-modified layer modify to be a light input layer, a light output layer and a spacing layer, the light input layer has a third index of refraction and the light output layer has a fourth index of refraction; and proceeding for a part of the waveguide layer to make the part of the waveguide layer modify to be an interference section having a fifth index of refraction, the interference section is located between the first body layer and the spacing layer. The first index of refraction, the second index of refraction, the third index of refraction are different, and the second index of refraction and the fifth index of refraction are different.

Description

Glass capillary structure and processing method thereof

The present invention relates to a glass capillary structure and a method of processing the same, and more particularly to a method of fabricating a Mach-Zehnder interferometer (MZI) sensor structure inside a glass capillary.

In recent years, with the increasing demand for biochemical sensing platforms developed by biosensing technology, the biochemical-related detection technology industry has been rapidly developed. Currently, there are market value of several trillion US dollars per year, and it is clinically related to food, environment, chemistry and medicine. The development of testing continues to grow. For the pharmaceutical industry and biochemical sensing applications, the physicochemical properties of all potential elements need to be analyzed in the development of new drugs, biological and food testing. The analysis of these properties must be in high throughput ( High throughput conditions are performed, so many analytical instruments are separated by capillary electrophoresis (CE) techniques .

Commonly used in capillary electrophoresis detection methods include absorbance detectors, ultraviolet light, ultraviolet-visible light detectors, fluorescent detectors, etc. However, these optical systems are difficult to directly convert microfluidic wafers fabricated on glass substrates. In the system or capillary, plus the analytical instrument does need to detect the change of the refractive index of the solution, and thus the amount of change for analysis, it is necessary to introduce a new optical sensing technology to detect the refractive index change of the solution in the capillary, overcoming the long-standing The technical bottleneck of the biochemical sensing system. As mentioned above, the current mainstream optical design techniques for refractive index detection are broadly classified into Surface Plasmon Resonance (SPR) sensors and Fiber Optics Particles Plasmon Resonance (FO-PPR). Sensors and Fiber Optics Mach-Zehnder Interferometer (FO-MZI) sensors, surface-plasma resonance sensors and fiber-optic particle resonator resonance sensors Rate detection techniques are limited by the need to modify appropriate materials on the surface of the sensing element to induce optical resonance, and therefore cannot be fabricated inside the capillary.

The main object of the present invention is to provide a method for processing a glass capillary by modifying a refractive index inside a glass capillary by making a Mach-Zehnder interferometer (MZI) sensor structure inside the glass capillary, thereby inducing optical interference. And carry out the test.

A glass capillary processing method of the present invention provides a glass capillary body, the tube wall of the glass capillary body comprising a first body layer, a second body layer, a first pre-modification layer and a second pre-modification The first pre-modification layer and the second pre-modification layer are located between the first body layer and the second body layer, and the first pre-modification layer is located at the first body layer and the second Between the pre-modified layers, the first body layer, the second body layer, the first pre-modification layer and the second pre-modification layer extend along an axial direction of the glass capillary body, the first body layer, The second body layer, the first pre-modification layer and the second pre-modification layer have a first refractive index; the first pre-modification layer is processed to modify the first pre-modification layer Is a waveguide, and the waveguide layer has a second refractive index; processing the second pre-modification layer along the axial direction of the glass capillary body to modify the second pre-modification layer into a a light introduction layer, a light derivation layer, and a compartment layer between the light introduction layer and the light derivation layer, The introduction layer has a third refractive index, the light derivation layer has a fourth refractive index; and the waveguide layer is locally processed to modify a local segment of the waveguide layer into an interference segment, the interference segment Located between the first body layer and the compartment layer, the interference section includes at least one coupling point, and the interference section has a fifth refractive index, the first refractive index, the second The refractive index and the third refractive index are all different, and the second refractive index and the fifth refractive index are different. . According to the present invention, the first pre-modified layer of the glass capillary body is modified into the waveguide layer by modifying the interior of the glass capillary body, and the second pre-modified layer is modified into the light-introducing layer. The light-derived layer, the first grating layer, the second grating layer, and finally the partial section of the waveguide layer is modified into the interference section to form a Mach-Zehnder interferometer (MZI) inside the glass capillary body The sensor structure is obtained to obtain a novel refractive index sensor.

The main object of the present invention is to provide a glass capillary structure by fabricating a Mach-Zehnder interferometer (MZI) sensor structure inside a glass capillary to modify the refractive index inside the glass capillary, thereby inducing optical interference and performing Detection.

A glass capillary structure of the present invention comprises a first body layer, a second body layer opposite to the first body layer, a waveguide layer, a light inducing layer, a light deriving layer with respect to the light introducing layer, a first spacer layer and a second body layer having a first index of refraction, the waveguide layer being located between the first body layer and the second body layer, the waveguide layer having a second refractive index, the light introducing layer has a third refractive index, the waveguide layer is located between the light introducing layer and the first body layer, the light guiding layer has a fourth refractive index, and the waveguide layer is located at the Between the light-derived layer and the first body layer, the partition layer is located between the light-introducing layer and the light-derived layer, the interference segment is located between the first body layer and the partition layer, the interference region The segment includes at least one coupling point, and the interference segment has a fifth refractive index, the first refractive index, the second refractive index, and the third refractive index are all different, and the second refractive index is different And the fifth refractive index is different.

Please refer to FIGS. 1 and 2A to 2D, which are a preferred embodiment of the present invention. A method for processing a glass capillary comprises the following steps: First, please refer to step 11 and FIG. 2A of FIG. 1 to provide a glass capillary. The body of the glass capillary body 110 can be selected from a circular or square shape. The wall of the glass capillary body 110 includes a first body layer 111, a second body layer 112, a first pre-modified layer 113 and a a second pre-modified layer 114, the first pre-modified layer 113 and the second pre-modified layer 114 are located between the first body layer 111 and the second body layer 112, and the first pre-modified layer 113 is located between the first body layer 111 and the second pre-modification layer 114. The first body layer 111 has a first surface 111a and the first surface 111a of the first body layer 111 is the glass capillary body. The second body layer 112 has a second surface 112a, and the second surface 112a of the second body layer 112 is an outer wall surface of the glass capillary body 110, the first body layer 111, the second The body layer 112, the first pre-modification layer 113 and the second pre-modification layer 114 Glass capillary body extending axially of X 110, the first body layer 111, the second body layer 112, the first pre-modified layer 113 and the second pre-modified layer 114 having a first index of refraction.

Next, referring to step 12 and FIG. 2B of FIG. 1 , the first pre-modification layer 113 is processed to modify the first pre-modification layer 113 into a waveguide layer 113a (waveguide), and the The waveguide layer 113a has a second refractive index. In the embodiment, the step of processing the first pre-modified layer 113 is performed by using a femtosecond laser machine (not shown). The modified layer 113 performs a thermal effect accumulated across pulse processing such that the second refractive index of the waveguide layer 113 and the first refractive index of the first pre-modified layer 113 before the modification is performed. There is a difference. Preferably, the second refractive index is greater than the first refractive index, so that light can be totally reflected in the waveguide layer 113 to transmit light.

Thereafter, referring to step 13 and FIG. 2C of FIG. 1 , the second pre-modification layer 114 is processed along the axial direction of the glass capillary body to modify the second pre-modification layer 114 into a light. The introduction layer 114a, a light derivation layer 114b, and a compartment layer 114c between the light introduction layer 114a and the light derivation layer 114b. In this embodiment, the compartment layer 114c is the second pre-modified layer. The unmodified region 114 is used to partition the light introducing layer 114a and the light guiding layer 114b.

In this embodiment, when the second pre-modified layer 114 is modified into the light-introducing layer 114a, a first grating layer 114d can be simultaneously formed between the partition layer 114c and the light-introducing layer 114a, and The first grating layer 114d and the light introducing layer 114a have a first spacing D1 between them, or, in different embodiments, when the second pre-modifying layer 114 is modified into the light introducing layer 114a, the light The introduction layer 114a may be of a barrier type so that light can be more easily introduced into the waveguide layer 113a from the light introduction layer 114a and the first grating structure 114d.

In this embodiment, when the second pre-modified layer 114 is modified into the light-derived layer 114b, a second grating layer 114e can be simultaneously formed between the partition layer 114c and the light-derived layer 114b, and The second grating layer 114e and the light-derived layer 114b have a second spacing D2 between them, or, in different embodiments, when the second pre-modifying layer 114 is modified to the light-derived layer 114b, the light The derivation layer 114b can be of a barrier type such that light can be more easily derived from the waveguide layer 113a via the light derivation layer 114b and the second grating structure 114e.

In this embodiment, the light introducing layer 114a is connected to the waveguide layer 113a, and the light guiding layer 114b is also connected to the waveguide layer 113a. Preferably, the light introducing layer 114a and the first grating layer 114d are formed in one dimension. The micro-nano periodic structure (transmission grating), and the light-derived layer 114b and the second grating layer 114e are also formed as a one-dimensional micro-nano periodic structure (transmission grating). In this embodiment, the second In the step of processing the pre-modified layer 114, the second pre-modified layer 114 is subjected to a two-beam interference interference processing (Two-Laser Beam Interference Technique) by using a femtosecond laser machine (not shown). The introduction layer 114a has a third refractive index, the light derivation layer 114b has a fourth refractive index, and the spacer layer 114c has a sixth refractive index, the sixth refractive index being the same as the first refractive index, wherein the light The third refractive index of the introduction layer 114a is different from the second refractive index of the waveguide layer 113a, and the fourth refractive index of the light extraction layer 114b is different from the second refractive index of the waveguide layer 113a.

Finally, referring to step 14 and FIG. 2D of FIG. 1, the waveguide layer 113a is locally processed to modify a partial section of the waveguide layer 113a into an interference section 115 to form a Mach-Zander a glass capillary tube 100 of the interferometer (MZI) sensor structure, the interference section 115 is located between the first body layer 111 and the compartment layer 114c, and the interference section 115 includes at least one coupling point 115a (coupling point) And the interference section 115 has a fifth index of refraction which is different from the second index of refraction of the waveguide layer 113a. In this embodiment, the step of locally processing the waveguide layer 113a is performed. The partial section of the waveguide layer 113a is subjected to pulse cumulative thermal effect or double beam interference processing using a femtosecond laser machine (not shown).

Since the Mach-Zehnder Interferometer (MZI) sensor is characterized in that the optical splitting element or structure is used to split the incident light into multiple beams, when the multiple beams are propagated in different paths, and then the optical coupling elements or structures are used. After the coincidence, the optical path difference between the beams is generated, and the interference phenomenon is formed, so that the object to be tested can be detected. Therefore, in the present invention, the glass capillary body 110 is modified by the inside of the glass capillary body 110. The first pre-modification layer 113 between the first body layer 111 and the second body layer 112 is modified into the waveguide layer 113a, and the second pre-modification layer 114 is modified into the light introduction layer. 114a, the light deriving layer 114b, the first grating layer 114d, the second grating layer 114e, and finally modifying a partial section of the waveguide layer 113a into the interference section 115 to form a Mach inside the glass capillary body 110 The Zander Interferometer (MZI) sensor structure is such that the glass capillary 100 produced by the processing method of the glass capillary 100 becomes a novel refractive index sensor.

Please refer to FIG. 2D, which is a glass capillary tube 100 prepared by the method for processing a glass capillary of the present invention, which comprises a first body layer 111, a second body layer 112, a waveguide layer 113a, and a light introduction. The layer 114a, a light-derived layer 114b, a spacer layer 114c, and an interference section 115, the waveguide layer 113a, the light-introducing layer 114a, the light-derived layer 114b, and the compartment layer 114c are located in the first body layer 111. And the second body layer 112, and the waveguide layer 113a is located between the first body layer 111, the light introducing layer 114a, the light guiding layer 114b and the partition layer 114c, and the light introducing layer 114a is connected The waveguide layer 113a is also connected to the waveguide layer 113a. The spacer layer 114c is located between the light introducing layer 114a and the light guiding layer 114b. The interference section 115 is located in the first body layer 111 and Between the compartments 114c, the interference section 115 includes at least one coupling point 115a (coupling point).

The first body layer 111 and the second body layer 112 have a first index of refraction, the waveguide layer 113a has a second index of refraction, the light-introducing layer 114a has a third index of refraction, and the light-derived layer 114b has a a fourth refractive index, the spacer layer 114c has a sixth refractive index, the first refractive index is the same as the sixth refractive index, and the interference segment 115 has a fifth refractive index, the first refractive index, the first refractive index The second refractive index and the third refractive index are all different, and the second refractive index is different from the fifth refractive index, and the second refractive index and the fourth refractive index are different.

In this embodiment, the glass capillary tube 100 further includes a first grating layer 114d and a second grating layer 114e. The first grating layer 114d is formed between the partition layer 114c and the light introducing layer 114a, and the The light-introducing layer 114a and the first grating layer 114d are formed as a one-dimensional micro-period, and the second grating layer 114e is formed between the interlayer 114c and the light-extracting layer 114b, and the The light-derived layer 114b and the second grating layer 114e are formed as a one-dimensional micro-period. The first grating layer 114d and the light-introducing layer 114a have a first spacing D1. A grating pitch 114e and the light deriving layer 114b have a second pitch D2 therebetween.

Please refer to FIG. 3 , which is a schematic diagram of the glass capillary tube 100 of the present invention applied to a capillary electrophoresis structure. One end of the glass capillary tube 100 is disposed in a first container C1 , and the other end of the glass capillary tube 100 is disposed in a first In the second container C2, the first container C1, the glass capillary tube 100 and the second container C2 are provided with an electrolyte S, and a power supply E is respectively used in the first container C1 and the second container C2. A positive voltage and a negative voltage are applied to enable the sample to be tested to be freely pulled by the electromotive force in the electrolyte, and pass through a detecting device B to perform analysis and detection of the sample to be tested.

Please refer to FIG. 4 , which is a schematic diagram of the path and sensing principle of the light inside the glass capillary tube 100 when the sample to be tested passes through the detecting device B. When the light passes through the glass capillary tube 100, the light is introduced from the light introducing layer 114a. And when the one-dimensional micro-nano periodic structure formed by the first grating layer 114d is incident, the diffraction angle of the n-th order (n=1, 2, 3...) diffracted light satisfies the total reflection condition of the waveguide layer 113a. The diffraction mode can be propagated in the waveguide layer 113a. When the mode propagated through the waveguide layer 113a passes through a coupling point 115a (coupling point) in the interference section 115, part of the mode is coupled to The glass capillary tube 100 propagates. When passing through another coupling point 115b in the interference section 115, the mode propagated in the first body layer 111 is coupled back to the waveguide layer 113a to form an optical path difference. The interference phenomenon, when the interference light passes through the one-dimensional micro-period periodic structure formed by the light-derived layer 114b and the second grating layer 114e, the diffraction mode thereof just satisfies the leakage mode of the waveguide layer 113a Leakage mode, so it can be obtained by an optical spectrum analyzer A Reflection spectrum of interference fringes, thereby detecting the refractive index.

The scope of the present invention is defined by the scope of the appended claims, and any changes and modifications made by those skilled in the art without departing from the spirit and scope of the invention are within the scope of the present invention. .

11‧‧‧ Providing a glass capillary body
12‧‧‧Processing the first pre-modified layer
13‧‧‧Processing the second pre-modified layer
14‧‧‧Local processing of the waveguide layer
100‧‧‧ glass capillary structure
110‧‧‧ glass capillary body
111‧‧‧First body layer
111a‧‧‧ first surface
112‧‧‧Second body layer
112a‧‧‧ second surface
113‧‧‧First pre-modified layer
113a‧‧‧Wave layer
114‧‧‧Second pre-modified layer
114a‧‧‧Light introduction layer
114b‧‧‧Light export layer
114c‧‧‧ compartment
114d‧‧‧First grating layer
114e‧‧‧second grating layer
115‧‧‧Interference section
115a‧‧‧ coupling point
115b‧‧‧ another coupling point
A‧‧‧Spectrum Analyzer
B‧‧‧Detection device
C1‧‧‧ first container
C2‧‧‧ second container
E‧‧‧Power supply
S‧‧‧ electrolyte
D1‧‧‧first spacing
D2‧‧‧second spacing
X‧‧‧ axial

Figure 1 is a flow chart showing a method of processing a glass capillary tube in accordance with an embodiment of the present invention. 2A to 2D are schematic cross-sectional views showing a wall of a glass capillary tube according to an embodiment of the present invention. Figure 3 is a schematic illustration of a capillary electrophoresis architecture in accordance with an embodiment of the present invention. Figure 4 is a schematic diagram showing the path and sensing principle of the capillary electrophoresis architecture in accordance with an embodiment of the present invention.

100‧‧‧ glass capillary

111‧‧‧First body layer

111a‧‧‧ first surface

112‧‧‧Second body layer

112a‧‧‧ second surface

113a‧‧‧Wave layer

114a‧‧‧Light introduction layer

114b‧‧‧Light export layer

114c‧‧‧ compartment

114d‧‧‧First grating layer

114e‧‧‧second grating layer

115‧‧‧Interference section

115a‧‧‧ coupling point

Claims (21)

A glass capillary structure comprising: a first body layer; a second body layer opposite to the first body layer, the first body layer and the second body layer having a first refractive index; a waveguide, which is located between the first body layer and the second body layer, the waveguide layer has a second refractive index; a light-introducing layer having a third refractive index, the waveguide layer being located at the light-introducing layer And the first body layer; a light-extracting layer with respect to the light-introducing layer, having a fourth refractive index, the waveguide layer being located between the light-derived layer and the first body layer; a spacer between the light-introducing layer and the light-extracting layer; and an interference section between the first body layer and the compartment, the interference section including at least one coupling point ( a coupling point, and the interference segment has a fifth refractive index, the first refractive index, the second refractive index, and the third refractive index are all different, and the second refractive index and the fifth refractive index are different . The glass capillary structure of claim 1, wherein the spacer layer has a sixth index of refraction, the first index of refraction being the same as the sixth index of refraction. The glass capillary structure of claim 1, wherein the light inducing layer is connected to the waveguide layer. The glass capillary structure of claim 1, wherein the light-derived layer is connected to the waveguide layer. The glass capillary structure of claim 1, further comprising a first grating layer, the first grating layer being formed between the interlayer and the light introducing layer, and the first grating layer and the There is a first spacing between the light directing layers. The glass capillary structure of claim 1, further comprising a second grating layer formed between the compartment layer and the light deriving layer, and the second grating layer and the There is a second spacing between the light deriving layers. The glass capillary structure according to claim 5, wherein the light introducing layer and the first grating layer are formed as a one-dimensional micro-period. The glass capillary structure of claim 6, wherein the light-derived layer and the second grating layer are formed as a one-dimensional micro-period. The glass capillary structure of claim 1, wherein the second refractive index of the waveguide layer and the fourth refractive index of the light-derived layer are different. A method for processing a glass capillary, comprising: providing a glass capillary body, the wall of the glass capillary body comprising a first body layer, a second body layer, a first pre-modified layer and a second pre-modification The first pre-modification layer and the second pre-modification layer are located between the first body layer and the second body layer, and the first pre-modification layer is located at the first body layer and the second Between the pre-modified layers, the first body layer, the second body layer, the first pre-modification layer and the second pre-modification layer extend along an axial direction of the glass capillary body, the first body layer, The second body layer, the first pre-modification layer and the second pre-modification layer have a first refractive index; processing the first pre-modification layer to modify the first pre-modification layer Is a waveguide layer, and the waveguide layer has a second refractive index; processing the second pre-modification layer along the axial direction of the glass capillary body to modify the second pre-modification layer into a a light introduction layer, a light derivation layer, and a compartment layer between the light introduction layer and the light derivation layer, The light introducing layer has a third refractive index, the light guiding layer has a fourth refractive index; and the waveguide layer is locally processed to modify a partial section of the waveguide layer into an interference section, the interference zone a segment is located between the first body layer and the compartment layer, the interference section includes at least one coupling point, and the interference section has a fifth refractive index, the first refractive index, the first The second refractive index and the third refractive index are all different, and the second refractive index and the fifth refractive index are different. The method for processing a glass capillary according to claim 10, wherein the spacer layer has a sixth index of refraction, the first index of refraction being the same as the sixth index of refraction. The method of processing a glass capillary according to claim 10, wherein the light introducing layer is connected to the waveguide layer. The method of processing a glass capillary according to claim 10, wherein the light-derived layer is connected to the waveguide layer. The method for processing a glass capillary according to claim 10, wherein the second pre-modified layer is processed to modify the second pre-modified layer to the light-introducing layer, and simultaneously form a first A grating layer is between the interlayer and the light introducing layer, and the first grating layer and the light introducing layer have a first spacing. The method for processing a glass capillary according to claim 10, wherein the second pre-modified layer is processed to modify the second pre-modified layer to the light-derived layer, and simultaneously form a first The second grating layer is between the interlayer and the light-derived layer, and the second grating layer and the light-derived layer have a second spacing therebetween. The method for processing a glass capillary according to claim 14, wherein the light introducing layer and the first grating layer are formed as a one-dimensional micro-period. The method for processing a glass capillary according to claim 15, wherein the light-derived layer and the second grating layer are formed as a one-dimensional micro-period. The method for processing a glass capillary according to claim 10, wherein the second refractive index of the waveguide layer and the fourth refractive index of the light-derived layer are different. The method for processing a glass capillary according to claim 10, wherein the step of processing the first pre-modified layer is performed by using a femtosecond laser machine to pulse accumulate the first pre-modified layer. Thermal effect accumulated across pulses. The method for processing a glass capillary according to claim 10, wherein the step of processing the second pre-modified layer is performed by using a femtosecond laser machine to double-beam the second pre-modified layer. Two-Laser Beam Interference Technique. The method for processing a glass capillary according to claim 10, wherein the step of locally processing the waveguide layer is performed by using a femtosecond laser machine to perform pulse cumulative thermal effect or double on a partial section of the waveguide layer. Beam interference processing.