TW201641416A - Method of manufacturing metallic oxide particles - Google Patents

Method of manufacturing metallic oxide particles Download PDF

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TW201641416A
TW201641416A TW105100537A TW105100537A TW201641416A TW 201641416 A TW201641416 A TW 201641416A TW 105100537 A TW105100537 A TW 105100537A TW 105100537 A TW105100537 A TW 105100537A TW 201641416 A TW201641416 A TW 201641416A
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gas
oxide particles
merging
temperature
metal oxide
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杉下紀之
黒田靖
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昭和電工股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00Catalysts, in general, characterised by their form or physical properties
    • B01J35/30Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/14Methods for preparing oxides or hydroxides in general
    • C01B13/20Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state
    • C01B13/22Methods for preparing oxides or hydroxides in general by oxidation of elements in the gaseous state; by oxidation or hydrolysis of compounds in the gaseous state of halides or oxyhalides
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01GCOMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
    • C01G23/00Compounds of titanium
    • C01G23/04Oxides; Hydroxides
    • C01G23/047Titanium dioxide
    • C01G23/07Producing by vapour phase processes, e.g. halide oxidation

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  • Life Sciences & Earth Sciences (AREA)
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  • General Life Sciences & Earth Sciences (AREA)
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Abstract

A method of manufacturing metallic oxide particles of the present application includes steps in which a first merging gas is formed by merging a preheated metallic chloride-free first gas with a preheated metallic chloride containing gas at a first merging point, and a second merging gas is formed by merging a preheated metallic chloride-free second gas with the first merging gas at a second merging point separated from the first merging point toward a downstream side and is characterized in that neither metallic chloride containing gas nor the first gas contain oxygen or water vapor; the second gas contains at least oxygen; the first gas is heated so as to be the preheated temperature of the metallic chloride containing gas or more, is merged with the preheated metallic chloride containing gas, and thereby heats the preheated metallic chloride containing gas; and the second gas is heated so as to be the temperature of the first merging gas or more, is merged with the first merging gas, and thereby heats the first merging gas at the downstream side of the second merging point.

Description

金屬氧化物粒子之製造方法 Method for producing metal oxide particles

本發明係有關金屬氧化物粒子之製造方法,特別是未閉塞原料氣體流路狀態,長時間製造金屬氧化物粒子之金屬氧化物粒子之製造方法。 The present invention relates to a method for producing metal oxide particles, and particularly to a method for producing metal oxide particles of metal oxide particles for a long period of time without blocking the state of the material gas flow path.

本發明係依據2015年1月14日在日本申請之特願2015-005149號主張優先權,在此援用其內容。 The present invention claims priority based on Japanese Patent Application No. 2015-005149, filed on Jan.

近年,於光觸媒領域,氧化鈦粒子受矚目。例如,專利文獻1、2及非專利文獻1~3中揭示具有十面體之箱型形狀,主要由銳鈦礦型結晶所構成之氧化鈦粒子(以下,亦稱為「十面體氧化鈦粒子」)。 In recent years, titanium oxide particles have attracted attention in the field of photocatalysts. For example, Patent Documents 1 and 2 and Non-Patent Documents 1 to 3 disclose a titanium oxide particle having a box-shaped shape of a decahedron and mainly composed of anatase crystal (hereinafter, also referred to as "decahedral titanium oxide". particle").

專利文獻1、2及非專利文獻1、3中,十面體氧化鈦粒子之每單位質量之表面積大,高結晶性,同時內部缺陷也少,故具有作為光觸媒之高活性。又,非專利文獻2中亦記載十面體氧化鈦粒子因高反應性之(001)面的比例高,故可望作為光觸媒。 In Patent Documents 1 and 2 and Non-Patent Documents 1 and 3, the decahedral titanium oxide particles have a large surface area per unit mass, high crystallinity, and low internal defects, so that they have high activity as a photocatalyst. Further, Non-Patent Document 2 also discloses that the decahedral titanium oxide particles are expected to be a photocatalyst because of the high ratio of the (001) surface having high reactivity.

十面體氧化鈦粒子之製造方法,例如有非專 利文獻2所記載之利用氟酸之水熱反應的方法。但氟酸具有強酸性,使用困難的物質,故使用此物質之非專利文獻2之製造方法,故不適於工業上的用途。 a method for producing decahedral titanium oxide particles, for example, non-specialized A method for hydrothermal reaction using hydrofluoric acid described in Document 2. However, since hydrofluoric acid has a strong acidity and is difficult to use, the production method of Non-Patent Document 2 using this material is not suitable for industrial use.

專利文獻1、2及非專利文獻1、3所記載之十面體氧化鈦粒子之製造方法係將四氯化鈦(TiCl4)蒸氣與氧(O2)氣體導入反應管內後,由反應管之外部加熱此等氣體,藉由下述反應式(1)所示之反應,製造氧化鈦粒子(TiO2)的方法。 The method for producing decahedral titanium oxide particles described in Patent Documents 1 and 2 and Non-Patent Documents 1 and 3 is a reaction in which titanium tetrachloride (TiCl 4 ) vapor and oxygen (O 2 ) gas are introduced into a reaction tube. A method of producing titanium oxide particles (TiO 2 ) by the reaction of the following reaction formula (1) by heating these gases outside the tube.

TiCl4+O2→TiO2+2Cl2…(1) TiCl 4 +O 2 →TiO 2 +2Cl 2 ...(1)

藉由使用上述製造方法,可於反應管之下游側,得到含有氧化鈦粒子之粉末產物。此粉狀產物中,含有許多十面體氧化鈦粒子。 By using the above production method, a powder product containing titanium oxide particles can be obtained on the downstream side of the reaction tube. This powdery product contains many decahedral titanium oxide particles.

專利文獻1、2及非專利文獻1、3所記載之上述製造方法係將原料氣體急遽升溫至四氯化鈦進行熱氧化反應的溫度時,採取將成為原料之四氯化鈦與氧氣由反應管之外部加熱的方式。因此,含有四氯化鈦與氧化性氣體之原料氣體的流量較多的情形,由反應管外部之熱源,對於反應管內之原料氣體,無法確保原料氣體中之四氯化鈦因熱氧化反應被完全消耗所需之熱傳導,使反應無法結束,於比反應區更下游側,殘留未反應四氯化鈦的結果,會產生所得之粉末產物之產率降低的問題。 In the above-described production method described in Patent Documents 1 and 2 and Non-Patent Documents 1 and 3, when the raw material gas is rapidly heated to a temperature at which titanium tetrachloride is subjected to thermal oxidation reaction, titanium tetrachloride which is a raw material is reacted with oxygen. The way the tube is heated externally. Therefore, when the flow rate of the raw material gas containing titanium tetrachloride and an oxidizing gas is large, the heat source outside the reaction tube does not ensure the thermal oxidation reaction of titanium tetrachloride in the raw material gas with the raw material gas in the reaction tube. The heat conduction required is completely consumed, so that the reaction cannot be completed, and as a result of remaining unreacted titanium tetrachloride on the downstream side of the reaction zone, there is a problem that the yield of the obtained powder product is lowered.

此外,專利文獻3所記載的製造方法係藉由將成為原料之四氯化鈦與經預熱後之第1氣體、第2氣體,以2階段合流、加熱,即使原料氣體的流量較多的情 形,也可以高收率製造光觸媒活性高的氧化鈦粒子。 Further, in the production method described in Patent Document 3, the titanium tetrachloride which is a raw material and the first gas and the second gas which have been preheated are combined and heated in two stages, and the flow rate of the material gas is large. situation In the form of a titanium oxide particle having high photocatalytic activity, it is also possible to produce a high yield.

但是專利文獻3所記載的製造方法中,因經預熱後之含有四氯化鈦氣體及經預熱後之第1氣體之至少一方含有氧,故在導入含有四氯化鈦氣體之石英玻璃製第1中空內筒之前端、內表面、外表面、導入第1氣體之石英玻璃製第2中空內筒之前端、內表面,在初期幾乎不會附著氧化鈦之黏著物、膜狀產物、附著物,但是欲長時間生產氧化鈦粒子時,會慢慢蓄積,最終阻塞原料氣體流路,產生第1中空內筒或第2中空內筒破損的問題。 However, in the production method described in Patent Document 3, since at least one of the titanium tetrachloride-containing gas and the preheated first gas contains oxygen after the preheating, the quartz glass containing the titanium tetrachloride gas is introduced. The front end, the inner surface, the outer surface of the first hollow inner cylinder, and the front end and the inner surface of the second hollow inner cylinder made of quartz glass into which the first gas is introduced do not adhere to the adhesion of the titanium oxide or the film-like product in the initial stage. When the titanium oxide particles are to be produced for a long period of time, the deposits are gradually accumulated, and finally the raw material gas flow path is blocked, causing a problem that the first hollow inner cylinder or the second hollow inner cylinder is broken.

蓄積於上述第1中空內筒之前端、內表面、外表面、導入第1氣體之石英玻璃製第2中空內筒之前端、內表面之黏著物、膜狀產物、附著物在阻塞原料氣體流路之前,即使中斷生產,並以冶具等刮除此等,也會牢固黏著於玻璃上,有時會使玻璃破損。 Adhesives, film-like products, and deposits accumulated in the front end, the inner surface, the outer surface of the first hollow inner cylinder, and the second hollow inner cylinder of the quartz glass into which the first gas is introduced are blocked in the raw material gas flow. Before the road, even if the production is interrupted and scraped off with a metallurgy or the like, it will adhere to the glass firmly, and sometimes the glass will be damaged.

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Document]

[專利文獻1]日本專利第4145923號公報 [Patent Document 1] Japanese Patent No. 4145923

[專利文獻2]日本特開2006-52099號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2006-52099

[專利文獻3]日本特開2011-184235號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2011-184235

〔非專利文獻〕 [Non-patent literature]

[非專利文獻1]草野大輔、寺田佳弘、阿部龍、大谷文章、第98回觸媒討論會(平成18年9月)、討論會A 預稿集、234頁 [Non-Patent Document 1] Kosuke Daisuke, Terada Kazuo, Abe Ryu, Otani, and the 98th Catalyst Workshop (September, 1999), Seminar A Pre-collection, 234 pages

[非專利文獻2]Hua Gui Yang et al., Nature, Vol.453, p.638~p.641 [Non-Patent Document 2] Hua Gui Yang et al., Nature, Vol. 453, p. 638~p.641

[非專利文獻3]Amano F.et al., Chem.Mater., 21, 2601~2603 (2009) [Non-Patent Document 3] Amano F. et al., Chem. Mater., 21, 2601~2603 (2009)

〔發明之概要〕 [Summary of the Invention]

本發明有鑑於上述情事而完成者,以提供長時間製造光觸媒活性高之金屬氧化物粒子之金屬氧化物粒子之製造方法為目的。 The present invention has been made in view of the above circumstances, and an object of the invention is to provide a method for producing metal oxide particles of metal oxide particles having high photocatalytic activity for a long period of time.

在反應管內,藉由使經預熱後之含有金屬氯化物之含有金屬氯化物的氣體與以含有此金屬氯化物之氣體之預熱溫度以上的溫度之經預熱後的第1氣體合流,加熱含有金屬氯化物之氣體,加熱後,成為含有金屬氯化物之氣體之預熱溫度以上之溫度的合流氣體,再與以此合流氣體之溫度以上的溫度預熱後之第2氣體合流,再加熱氣體之製造方法中,藉由使含有前述金屬氯化物之氣體及前述第1氣體之兩方均不含氧、水蒸氣,發現可長時間製造光觸媒活性高的金屬氧化物粒子,而完成以下發明。 In the reaction tube, the pre-heated metal chloride-containing gas containing the metal chloride is combined with the preheated first gas at a temperature higher than the preheating temperature of the gas containing the metal chloride. a gas containing a metal chloride is heated, and after heating, a combined gas having a temperature higher than a preheating temperature of the metal chloride-containing gas is combined with the second gas which is preheated at a temperature equal to or higher than the temperature of the combined gas. In the method for producing a reheated gas, it is found that the metal oxide particles having high photocatalytic activity can be produced for a long period of time without containing oxygen or water vapor in both of the gas containing the metal chloride and the first gas. The following invention.

為了達成上述目的,因此本發明採用以下之 構成。亦即, In order to achieve the above object, the present invention adopts the following Composition. that is,

(1)一種金屬氧化物粒子之製造方法,其係含有下述步驟之金屬氧化物粒子之製造方法,前述步驟係在反應管內,使經預熱後之含有金屬氯化物之氣體與不含前述金屬氯化物之經預熱後之第1氣體在第1合流地點合流,作為第1合流氣體,使不含前述金屬氯化物之經預熱後之第2氣體與該第1合流氣體,在離開比前述第1合流地點更下游側之第2合流地點合流,作為第2合流氣體的步驟,含有前述金屬氯化物之氣體及前述第1氣體之兩方均不含氧、水蒸氣,前述第2氣體至少含有氧,藉由將前述第1氣體之預熱溫度設為含有前述金屬氯化物之氣體之預熱溫度以上的溫度,使前述第1氣體在前述第1合流地點合流,由前述第1合流地點至前述第2合流地點之間(稱為第1區)中,再加熱經預熱後之含有前述金屬氯化物之氣體,藉由將前述第2氣體之預熱溫度設為前述第1合流氣體之溫度以上的溫度,與前述第1合流氣體合流,由前述第2合流地點在下游側,再加熱前述第1合流氣體。 (1) A method for producing metal oxide particles, which comprises a method for producing metal oxide particles according to the following steps, wherein the step is carried out in a reaction tube, and the preheated metal chloride-containing gas is not contained The first gas after the preheating of the metal chloride is merged at the first junction point, and the second gas which is preheated without the metal chloride and the first condensed gas is used as the first merging gas. The second confluence point on the downstream side of the first confluence point is merged, and as the second confluent gas, both the metal chloride-containing gas and the first gas do not contain oxygen or water vapor. (2) the gas contains at least oxygen, and the first gas is merged at the first junction point by setting the preheating temperature of the first gas to a temperature equal to or higher than a preheating temperature of the gas containing the metal chloride. 1 merging point to the second merging point (referred to as the first zone), reheating the preheated gas containing the metal chloride, and setting the preheating temperature of the second gas to the foregoing 1 combined gas Temperature or higher, and the first merged gas confluence by the second merging point on the downstream side, the first reheat merged gas.

(2)如前項(1)之金屬氧化物粒子之製造方法,其中前述金屬氯化物為四氯化鈦,前述金屬氧化物粒子為氧化鈦粒子。 (2) The method for producing metal oxide particles according to the above (1), wherein the metal chloride is titanium tetrachloride, and the metal oxide particles are titanium oxide particles.

(3)如前項(2)之金屬氧化物粒子之製造方法,其中前述氧化鈦粒子為十面體氧化鈦粒子。 (3) The method for producing metal oxide particles according to the above item (2), wherein the titanium oxide particles are decahedral titanium oxide particles.

(4)如前項(1)~(3)項中任一項之金屬氧化物粒 子之製造方法,其中含有前述金屬氯化物之氣體之預熱溫度為600℃以上1000℃以下。 (4) A metal oxide grain according to any one of items (1) to (3) above. In the method for producing a gas, the preheating temperature of the gas containing the metal chloride is 600 ° C or more and 1000 ° C or less.

(5)如前項(1)~(4)項中任一項之金屬氧化物粒子之製造方法,其中前述第1合流氣體之溫度為800℃以上1050℃以下。 (5) The method for producing a metal oxide particle according to any one of the preceding claims, wherein the temperature of the first merging gas is 800 ° C or more and 1050 ° C or less.

(6)如前項(1)~(5)項中任一項之金屬氧化物粒子之製造方法,其中前述第2合流氣體之溫度為800℃以上1100℃以下。 (6) The method for producing a metal oxide particle according to any one of the preceding claims, wherein the temperature of the second merging gas is 800 ° C or more and 1100 ° C or less.

(7)如前項(1)~(6)項中任一項之金屬氧化物粒子之製造方法,其中前述第1氣體之預熱溫度為800℃以上1050℃以下。 (7) The method for producing a metal oxide particle according to any one of the preceding claims, wherein the preheating temperature of the first gas is 800 ° C or more and 1050 ° C or less.

(8)如前項(1)~(7)項中任一項之金屬氧化物粒子之製造方法,其中前述第2氣體之預熱溫度為900℃以上1100℃以下。 The method for producing a metal oxide particle according to any one of the preceding claims, wherein the second gas has a preheating temperature of from 900 ° C to 1100 ° C.

(9)如前項(1)~(8)項中任一項之金屬氧化物粒子之製造方法,其中含有前述金屬氯化物之氣體含有氮氣。 (9) The method for producing a metal oxide particle according to any one of the items (1) to (8), wherein the gas containing the metal chloride contains nitrogen.

(10)如前項(1)~(9)項中任一項之金屬氧化物粒子之製造方法,其中前述第1氣體含有選自由氮氣及氬所成群之1種以上的氣體。 (10) The method for producing a metal oxide particle according to any one of the preceding claims, wherein the first gas contains one or more gases selected from the group consisting of nitrogen gas and argon.

(11)如前項(1)~(10)項中任一項之金屬氧化物粒子之製造方法,其中前述第2氣體含有氧氣體及選自由氮氣、氬及水蒸氣所成群之1種以上的氣體。 The method for producing a metal oxide particle according to any one of the preceding claims, wherein the second gas contains an oxygen gas and one or more selected from the group consisting of nitrogen gas, argon gas and water vapor. gas.

(12)如前項(2)~(11)項中任一項之金屬氧化物 粒子之製造方法,其中前述第1合流氣體所含有之前述四氯化鈦之濃度設為0.1~20體積%。 (12) A metal oxide according to any one of items (2) to (11) above. In the method for producing particles, the concentration of the titanium tetrachloride contained in the first merging gas is 0.1 to 20% by volume.

(13)如前項(1)~(12)項中任一項之金屬氧化物粒子之製造方法,其中前述第1合流氣體在前述第1區滯留的時間設為2~100毫秒。 The method for producing metal oxide particles according to any one of the preceding claims, wherein the time during which the first merging gas stays in the first region is 2 to 100 milliseconds.

(14)如前項(1)~(13)項中任一項之金屬氧化物粒子之製造方法,其中前述第2合流氣體之雷諾數設為10~10000。 The method for producing metal oxide particles according to any one of the preceding claims, wherein the Reynolds number of the second merging gas is from 10 to 10,000.

依據上述之構成時,可提供長時間製造光觸媒活性高之金屬氧化物粒子之金屬氧化物粒子之製造方法。 According to the above configuration, it is possible to provide a method for producing metal oxide particles of metal oxide particles having high photocatalytic activity for a long period of time.

本發明之金屬氧化物粒子之製造方法係含有下述步驟之金屬氧化物粒子之製造方法,前述步驟係在反應管內,使經預熱後之含有金屬氯化物之氣體與不含前述金屬氯化物之經預熱後之第1氣體在第1合流地點合流,作為第1合流氣體,使不含前述金屬氯化物之經預熱後之第2氣體與該第1合流氣體,在離開比前述第1合流地點更下游側之第2合流地點合流,作為第2合流氣體的步驟, The method for producing a metal oxide particle according to the present invention is a method for producing a metal oxide particle having the following steps, wherein the step is carried out in a reaction tube, and the preheated metal chloride-containing gas and the metal chloride are not contained therein. The first gas after the preheating of the compound is merged at the first joining point, and the second combined gas which is not preheated without the metal chloride is separated from the first combined gas as the first combined gas. a second confluence point on the downstream side of the first confluence point merges as a second confluent gas step,

藉由使含有前述金屬氯化物之氣體及前述第1氣體之兩方均不含氧、水蒸氣,將前述第1氣體之預熱溫度設為含有前述金屬氯化物之氣體之預熱溫度以上的溫度,使前 述第1氣體在前述第1合流地點合流,由前述第1合流地點至前述第2合流地點之間,再加熱經預熱後之含有前述金屬氯化物之氣體,將前述第2氣體之預熱溫度設為前述第1合流氣體之溫度以上的溫度,藉由與前述第1合流氣體合流,由前述第2合流地點在下游側,再加熱前述第1合流氣體,可長時間製造光觸媒活性高之金屬氧化物粒子。 When both the gas containing the metal chloride and the first gas do not contain oxygen or water vapor, the preheating temperature of the first gas is equal to or higher than the preheating temperature of the gas containing the metal chloride. Temperature, make the front The first gas merges at the first junction point, and the preheating of the second gas is performed by heating the preheated gas containing the metal chloride from the first junction point to the second junction point. When the temperature is equal to or higher than the temperature of the first merging gas, the first merging gas is merged with the second merging point, and the first merging gas is heated on the downstream side to produce a high photocatalytic activity for a long period of time. Metal oxide particles.

本發明之金屬氧化物粒子之製造方法中,前述金屬氯化物使用四氯化鈦,製造之前述金屬氧化物粒子為氧化鈦粒子較佳,此情形,藉由使含有前述金屬氯化物之氣體及前述第1氣體之兩方均不含氧、水蒸氣將前述第1氣體之預熱溫度設為含有前述金屬氯化物之氣體之預熱溫度以上的溫度,藉由使前述第1氣體在前述第1合流地點合流,由前述第1合流地點至前述第2合流地點之間,再加熱經預熱後之含有前述金屬氯化物之氣體,將前述第2氣體之預熱溫度設為前述第1合流氣體之溫度以上的溫度,藉由與前述第1合流氣體合流,由前述第2合流地點在下游側,再加熱前述第1合流氣體,可長時間製造光觸媒活性高之氧化鈦粒子。 In the method for producing metal oxide particles of the present invention, the metal chloride is titanium tetrachloride, and the metal oxide particles produced are preferably titanium oxide particles. In this case, the gas containing the metal chloride and Each of the first gas does not contain oxygen or water vapor, and the preheating temperature of the first gas is a temperature equal to or higher than a preheating temperature of a gas containing the metal chloride, and the first gas is in the first a confluence point merges between the first confluence point and the second confluence point, and further heats the preheated gas containing the metal chloride, and sets a preheating temperature of the second gas as the first confluence The temperature above the temperature of the gas is merged with the first merging gas, and the first merging gas is heated on the downstream side from the second merging point, whereby the titanium oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之一種金屬氧化物粒子之製造裝置具備:反應管,與分別預熱含有金屬氯化物之氣體、第1之氣體及第2之氣體的預熱部,前述反應管具備:中空外筒、由該中空外筒之上游側插入至該中空外筒之途中所成之第2中空內筒及由該第2中空內筒之上游側插入該第2 中空內筒之途中所成之第1中空內筒,前述第2中空內筒具備:將經預熱後之前述第1氣體導入其上游側的第1導管,前述中空外筒具備:將經預熱後之前述第2氣體導入於其上游側之第2導管,藉由經預熱後之含有前述金屬氯化物之氣體由第1中空內筒之上游側導入,被導入之含有前述金屬氯化物之氣體在前述第1中空內筒的下游端與經預熱後之前述第1氣體合流,該合流之氣體可於前述第2中空內筒的下游端,與經預熱後之前述第2氣體再合流,可長時間製造光觸媒活性高之金屬氧化物粒子。 An apparatus for producing a metal oxide particle according to the present invention includes: a reaction tube; and a preheating unit that preheats a metal chloride-containing gas, a first gas, and a second gas, respectively, wherein the reaction tube includes a hollow outer tube, a second hollow inner cylinder formed by inserting the upstream side of the hollow outer cylinder into the hollow outer cylinder and inserting the second one from the upstream side of the second hollow inner cylinder a first hollow inner cylinder formed in the middle of the hollow inner cylinder, wherein the second hollow inner cylinder includes a first duct that introduces the preheated first gas to the upstream side thereof, and the hollow outer cylinder includes: The second conduit introduced into the upstream side of the second gas after the heat is introduced from the upstream side of the first hollow inner cylinder by the preheated gas containing the metal chloride, and introduced into the metal chloride The gas merges with the preheated first gas at a downstream end of the first hollow inner cylinder, and the merged gas may be at a downstream end of the second hollow inner cylinder and the preheated second gas By recombining, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

1‧‧‧中空外筒 1‧‧‧ hollow outer cylinder

1a‧‧‧上游側 1a‧‧‧ upstream side

1b‧‧‧下游側 1b‧‧‧ downstream side

2‧‧‧隔熱材(陶瓷纖維) 2‧‧‧Insulation material (ceramic fiber)

3‧‧‧產物回收部 3‧‧‧Product Recycling Department

3a‧‧‧排氣幫浦 3a‧‧‧Exhaust pump

3b‧‧‧壓力調整閥 3b‧‧‧Pressure adjustment valve

4‧‧‧第1中空內筒 4‧‧‧1st hollow inner tube

4a‧‧‧上游側 4a‧‧‧ upstream side

4b‧‧‧下游端(第1合流地點) 4b‧‧‧ downstream end (1st junction location)

5‧‧‧第2中空內筒 5‧‧‧2nd hollow inner tube

5a‧‧‧上游側 5a‧‧‧ upstream side

5b‧‧‧下游端(第2合流地點) 5b‧‧‧ downstream end (2nd merge point)

6‧‧‧排出管 6‧‧‧Draining tube

11‧‧‧反應管 11‧‧‧Reaction tube

15‧‧‧第1導管 15‧‧‧1st catheter

16‧‧‧第2導管 16‧‧‧2nd catheter

24‧‧‧第1中空內筒開口部 24‧‧‧1st hollow inner tube opening

25、26‧‧‧環狀開口部 25, 26‧‧‧ annular opening

27‧‧‧第2中空內筒開口部 27‧‧‧2nd hollow inner cylinder opening

28‧‧‧中空外筒開口部 28‧‧‧ hollow outer cylinder opening

101‧‧‧金屬氧化物粒子之製造裝置 101‧‧‧Manufacturing device for metal oxide particles

A‧‧‧第2反應區 A‧‧‧2nd reaction zone

B‧‧‧第1區 B‧‧‧District 1

G1‧‧‧含有金屬氯化物之氣體 G1‧‧‧Gas containing metal chlorides

G2‧‧‧第1氣體 G2‧‧‧1st gas

G3‧‧‧第2氣體 G3‧‧‧2nd gas

X‧‧‧預熱區域 X‧‧‧Preheating area

Y‧‧‧預熱區域 Y‧‧‧Preheating area

Z‧‧‧預熱區域 Z‧‧‧Preheating area

[圖1]表示本發明之金屬氧化物粒子之製造裝置之一例的示意圖。 Fig. 1 is a schematic view showing an example of a production apparatus of metal oxide particles of the present invention.

[圖2]實施例1之金屬氧化物粒子(氧化鈦粒子)之掃描型電子顯微鏡照片,100k倍的照片。 Fig. 2 is a scanning electron micrograph of metal oxide particles (titanium oxide particles) of Example 1, taken at 100k magnification.

以下,使用圖面詳細說明適用本發明之一實施形態之金屬氧化物粒子的製造方法及製造裝置。又,以下說明所使用的圖面,為了使特徵更容易瞭解,而以簡潔示意表示,各構成要件之尺寸比例等並非與實際者相同。 Hereinafter, a method and a production apparatus for producing metal oxide particles to which an embodiment of the present invention is applied will be described in detail using the drawings. In addition, in the following description, the drawing used is not shown to be the same as the actual size in order to make the feature easier to understand, and to show it in a simplified manner.

<金屬氧化物粒子之製造裝置> <Manufacturing device for metal oxide particles>

圖1表示本發明之實施形態之金屬氧化物粒子之製造方法所使用之製造裝置之一例的示意圖。 Fig. 1 is a schematic view showing an example of a production apparatus used in a method for producing metal oxide particles according to an embodiment of the present invention.

如圖1所示,本發明之實施形態之金屬氧化物粒子之製造方法所用的製造裝置101為具備:由中空外筒1、由中空外筒1之上游側(上游部)1a插入至中空外筒1之途中所成之第2中空內筒5、由第2中空內筒5之上游側5a插入至第2中空內筒5之途中所成之第1中空內筒4所構成的反應管11,同時於反應管11之外部配置隔熱材2,使反應管11之一部份保溫所概略構成者。 As shown in Fig. 1, the manufacturing apparatus 101 used in the method for producing metal oxide particles according to the embodiment of the present invention includes a hollow outer cylinder 1 and an outer side (upstream portion) 1a of the hollow outer cylinder 1 inserted into the hollow outer portion. The second hollow inner cylinder 5 formed in the middle of the cylinder 1 and the reaction tube 11 formed of the first hollow inner cylinder 4 formed by the upstream side 5a of the second hollow inner cylinder 5 inserted into the second hollow inner cylinder 5 At the same time, the heat insulating material 2 is disposed outside the reaction tube 11, and a part of the reaction tube 11 is thermally insulated.

<反應管> <reaction tube>

如圖1所示,反應管11具有中空外筒1、第1中空內筒4、第2中空內筒5所構成。反應管11由例如石英等而成之圓筒管所構成。 As shown in FIG. 1, the reaction tube 11 has a hollow outer cylinder 1, a first hollow inner cylinder 4, and a second hollow inner cylinder 5. The reaction tube 11 is composed of a cylindrical tube made of, for example, quartz.

第2中空內筒5係由中空外筒1之上游側1a插入至途中而成,其下游端5b係配置於中空外筒1之長度方向的中心附近。第1中空內筒4係由第2中空內筒5之上游側5a插入至途中而成,其下游端4b為配置於第2中空內筒5之長度方向的中心附近。 The second hollow inner cylinder 5 is formed by inserting the upstream side 1a of the hollow outer cylinder 1 in the middle, and the downstream end 5b is disposed in the vicinity of the center of the hollow outer cylinder 1 in the longitudinal direction. The first hollow inner cylinder 4 is formed by inserting the upstream side 5a of the second hollow inner cylinder 5 in the middle, and the downstream end 4b is disposed in the vicinity of the center in the longitudinal direction of the second hollow inner cylinder 5.

<含有金屬氯化物之氣體> <Gas containing metal chloride>

於預熱區域(預熱部)X預熱後之含有金屬氯化物之氣體G1流入第1中空內筒4之上游側4a的第1中空內筒開口部24。 The metal chloride-containing gas G1 that has been preheated in the preheating zone (preheating section) X flows into the first hollow inner cylinder opening portion 24 of the upstream side 4a of the first hollow inner cylinder 4.

在圖中省略,但是於預熱區域X之上游側,設置有使四氯化鈦(TiCl4)等之金屬氯化物蒸發用的氣化器,於該氣化器之上游側,將液體之金屬氯化物導入氣化器用之導入管,與供給含氮之氣體用的導入管,分別經由閥與氣化器連接。氣化器係例如有溫度為165℃,具有使液體之金屬氯化物氣化形成金屬氯化物蒸氣的功能。藉此,可為將由含有金屬氯化物蒸氣與氮之混合氣體所形成之含有金屬氯化物之氣體G1供給至預熱區域X之構成。 Although omitted in the drawing, a gasifier for evaporating metal chloride such as titanium tetrachloride (TiCl 4 ) is provided on the upstream side of the preheating zone X, and on the upstream side of the gasifier, liquid is used. The metal chloride is introduced into the inlet pipe for the gasifier, and the introduction pipe for supplying the nitrogen-containing gas is connected to the vaporizer via a valve. The gasifier has, for example, a temperature of 165 ° C, and has a function of vaporizing a metal chloride of a liquid to form a metal chloride vapor. Thereby, it is possible to supply the metal chloride-containing gas G1 formed of a mixed gas containing a metal chloride vapor and nitrogen to the preheating zone X.

含有金屬氯化物之氣體G1係含有四氯化鈦等之蒸氣的氣體。具體而言,含有此金屬氯化物之氣體G1可使用由四氯化鈦等之蒸氣與氮氣之混合氣體、四氯化鈦等之蒸氣與含有氮之惰性氣體的混合氣體。 The metal chloride-containing gas G1 is a gas containing a vapor such as titanium tetrachloride. Specifically, as the gas G1 containing the metal chloride, a mixed gas of a vapor of nitrogen tetrachloride or the like and a mixed gas of nitrogen, a vapor such as titanium tetrachloride, and an inert gas containing nitrogen can be used.

<第1氣體> <1st gas>

於第1中空內筒4之下游側4b與第2中空內筒5之上游側5a之間的環狀(ring-shaped)開口部25中,流入以預熱區域(預熱部)Y預熱後的第1氣體G2。 In the ring-shaped opening 25 between the downstream side 4b of the first hollow inner cylinder 4 and the upstream side 5a of the second hollow inner cylinder 5, the inflow preheating zone (preheating section) Y is preheated. After the first gas G2.

第1氣體G2為不含四氯化鈦等之金屬氯化物或氧、水蒸氣的氣體。具體而言,此第1氣體G2係配置氮氣、氬氣等之惰性氣體,此等可單獨使用或混合使用。因此,可使用僅由氮氣所成之氣體、僅由氬氣所成之氣體、氮與氬等之惰性氣體之混合氣體等。 The first gas G2 is a gas containing no metal chloride such as titanium tetrachloride or oxygen or water vapor. Specifically, the first gas G2 is provided with an inert gas such as nitrogen or argon, and these may be used singly or in combination. Therefore, a gas formed only of nitrogen gas, a gas formed only of argon gas, a mixed gas of inert gas such as nitrogen and argon, or the like can be used.

<第2氣體> <2nd gas>

以預熱區域(予熱部)Z預熱後之第2氣體G3流入於第2中空內筒5之下游側5b與中空外筒1之上游側1a之間的環狀開口部26。 The second gas G3 preheated in the preheating zone (preheating zone) Z flows into the annular opening portion 26 between the downstream side 5b of the second hollow inner cylinder 5 and the upstream side 1a of the hollow outer cylinder 1.

第2氣體G3為不含四氯化鈦等之金屬氯化物的氣體。具體而言,第2氣體G3至少含有氧(O2)。又,第2氣體G3可含有氧及氮氣、氬氣等之惰性氣體、水蒸氣及臭氧(O3)或此等之混合物。因此,第2氣體G3可使用僅氧之狀態、氮氣或氬氣等之惰性氣體與氧之混合氣體狀態、水蒸氣與氧之混合氣體狀態、惰性氣體與水蒸氣與氧之混合氣體之狀態等。又,惰性氣體與氧之混合氣體也可使用空氣。 The second gas G3 is a gas containing no metal chloride such as titanium tetrachloride. Specifically, the second gas G3 contains at least oxygen (O 2 ). Further, the second gas G3 may contain an inert gas such as oxygen, nitrogen or argon, water vapor, ozone, or ozone (O 3 ) or a mixture thereof. Therefore, the second gas G3 can be in a state of only oxygen, a mixed gas state of an inert gas such as nitrogen or argon, a mixed gas state of water vapor and oxygen, a state of a mixed gas of an inert gas and steam and oxygen, and the like. . Further, air may be used as the mixed gas of the inert gas and oxygen.

第1中空內筒4與第2中空內筒5,以同軸構造為佳。藉此,可使含有金屬氯化物之氣體G1集中於中心軸側,抑制四氯化鈦蒸氣擴散至第2中空內筒5的內壁面,可抑制產生黏著於第2中空內筒5之內壁面之膜狀產物(副產物)。 It is preferable that the first hollow inner cylinder 4 and the second hollow inner cylinder 5 have a coaxial structure. Thereby, the metal chloride-containing gas G1 can be concentrated on the central axis side, and the titanium tetrachloride vapor can be prevented from diffusing to the inner wall surface of the second hollow inner cylinder 5, and adhesion to the inner wall surface of the second hollow inner cylinder 5 can be suppressed. Membrane product (by-product).

又,第2中空內筒5與中空外筒1,以同軸構造為佳。藉此,抑制四氯化鈦蒸氣之擴散至中空外筒1之內壁面,可抑制產生黏著於第1中空外筒1之內壁面膜狀產物(副產物)。 Further, it is preferable that the second hollow inner cylinder 5 and the hollow outer cylinder 1 have a coaxial structure. Thereby, the diffusion of the titanium tetrachloride vapor to the inner wall surface of the hollow outer cylinder 1 is suppressed, and the film-like product (by-product) adhering to the inner wall surface of the first hollow outer cylinder 1 can be suppressed.

<隔熱材> <Insulation material>

如圖1所示,反應管11之外部,配置有對反應管內之氣體保溫用的隔熱材2。隔熱劑使用通常之陶瓷纖維。 As shown in Fig. 1, a heat insulating material 2 for heat-insulating the gas in the reaction tube is disposed outside the reaction tube 11. The insulating agent uses a usual ceramic fiber.

<第1合流地點> <1st merge point>

含有金屬氯化物之氣體G1與第1氣體G2係於第1中空內筒4之下游端4b合流。此兩者之合流地點稱為第1合流地點。 The metal chloride-containing gas G1 and the first gas G2 are joined to the downstream end 4b of the first hollow inner cylinder 4. The confluence of the two is called the first confluence location.

<第1合流氣體> <1st merged gas>

於第1合流地點合流的氣體稱為第1合流氣體。 The gas merged at the first junction site is referred to as a first merged gas.

<第2合流地點> <2nd merge point>

第1合流氣體與第2氣體G3係於第2中空內筒5之下游端5b合流。此兩者之合流地點稱為第2合流地點。 The first merging gas and the second gas G3 are joined to the downstream end 5b of the second hollow inner cylinder 5. The confluence of the two is called the second confluence location.

<第2合流氣體> <2nd merged gas>

於第2合流地點合流之氣體稱為第2合流氣體。 The gas merged at the second junction site is referred to as a second junction gas.

<第1區(zone)> <zone 1>

由第1合流地點(第1中空內筒4之下游端4b)至第2合流地點(第2中空內筒5之下游端5b)之間,第1合流氣體通過之區域稱為第1區。 Between the first joining point (the downstream end 4b of the first hollow inner cylinder 4) and the second joining point (the downstream end 5b of the second hollow inner cylinder 5), the region through which the first merged gas passes is referred to as the first region.

<第2反應區> <2nd reaction zone>

由第2合流地點(第2中空內筒5之下游端5b)至隔熱材2之下游端之間,第2合流氣體通過之區域稱為第2反應區。第2反應區中,第2合流氣體中之四氯化鈦蒸 氣藉由氧化反應而被消耗。 The region where the second merged gas passes between the second joining point (the downstream end 5b of the second hollow inner cylinder 5) and the downstream end of the heat insulating material 2 is referred to as a second reaction zone. In the second reaction zone, the titanium tetrachloride in the second combined gas is steamed Gas is consumed by the oxidation reaction.

<預熱區域> <preheating area>

本發明之實施形態之金屬氧化物粒子之製造裝置101中,設置有3個預熱區域X、Y、Z。 In the apparatus 101 for manufacturing metal oxide particles according to the embodiment of the present invention, three preheating zones X, Y, and Z are provided.

預熱區域X、Y、Z係各自之氣體流路之外部配置有電加熱器(圖示省略)等所構成。預熱區域X、Y、Z中,含有金屬氯化物之氣體G1、第1氣體G2、第2氣體G3各自為特定之預熱溫度。 An electric heater (not shown) or the like is disposed outside the gas flow path of each of the preheating zones X, Y, and Z. In the preheating zone X, Y, and Z, each of the metal chloride-containing gas G1, the first gas G2, and the second gas G3 is a specific preheating temperature.

預熱區域X之預熱溫度(含有金屬氯化物之氣體G1的預熱溫度),較佳為600℃以上1000℃以下之溫度範圍,更佳為650℃以上950℃以下之溫度範圍,又更佳為800℃以上950℃以下之溫度範圍。 The preheating temperature of the preheating zone X (the preheating temperature of the metal chloride-containing gas G1) is preferably a temperature range of 600 ° C or more and 1000 ° C or less, more preferably a temperature range of 650 ° C or more and 950 ° C or less, and further It is preferably in the temperature range of 800 ° C or more and 950 ° C or less.

因預熱區域X之預熱溫度之範圍設為未達600℃之範圍,最終所得之粉末產物之光觸媒活性會降低。又,因預熱區域X之預熱溫度之範圍設為1000℃以上之範圍,金紅石(rutile)比例高,十面體比例降低的結果,最終的所得之粉末產物之光觸媒活性會降低。 Since the range of the preheating temperature of the preheating zone X is set to be less than 600 ° C, the photocatalytic activity of the finally obtained powder product is lowered. Further, since the range of the preheating temperature of the preheating zone X is set to be in the range of 1000 ° C or more, the ratio of rutile is high, and the ratio of the decahedron is lowered, the photocatalytic activity of the finally obtained powder product is lowered.

藉由將預熱區域X之預熱溫度之範圍設為600℃以上1000℃以下,最終所得之粉末產物中之十面體氧化鈦粒子之比例高,結果可得到具有光觸媒活性高的十面體氧化鈦粒子。 By setting the preheating temperature range of the preheating zone X to 600 ° C or more and 1000 ° C or less, the ratio of the decahedral titanium oxide particles in the finally obtained powder product is high, and as a result, a decahedron having high photocatalytic activity can be obtained. Titanium oxide particles.

預熱區域Y之預熱溫度(第1氣體G2之預熱溫度)係預熱區域X之預熱溫度(含有金屬氯化物之氣體 G1之預熱溫度)以上之溫度,較佳為800℃以上1050℃以下之範圍,更佳為850℃以上1050℃以下之溫度範圍。 Preheating temperature of preheating zone Y (preheating temperature of first gas G2) is preheating temperature of preheating zone X (gas containing metal chloride) The temperature above the preheating temperature of G1 is preferably in the range of 800 ° C or more and 1050 ° C or less, more preferably 850 ° C or more and 1050 ° C or less.

將第1氣體G2之預熱溫度設為含有金屬氯化物之氣體G1之預熱溫度以上之溫度使合流,藉由在第1區中,以預熱區域X預熱後之含有金屬氯化物之氣體G1再加熱,最終所得之粉末產物中之十面體氧化鈦粒子之比例高,光觸媒活性升高。相反地,將第1氣體G2之預熱溫度設為比含有金屬氯化物之氣體G1之預熱溫度更低的溫度時,最終所得之粉末產物中之十面體氧化鈦粒子之比例低,光觸媒活性降低。 The preheating temperature of the first gas G2 is set to a temperature equal to or higher than the preheating temperature of the metal chloride-containing gas G1, and the metal chloride is preheated in the preheating zone X by the preheating zone X in the first zone. The gas G1 is reheated, and the ratio of the decahedral titanium oxide particles in the finally obtained powder product is high, and the photocatalytic activity is increased. On the contrary, when the preheating temperature of the first gas G2 is set to be lower than the preheating temperature of the metal chloride-containing gas G1, the ratio of the decahedral titanium oxide particles in the finally obtained powder product is low, and the photocatalyst is low. Reduced activity.

預熱區域Y之預熱溫度為未達800℃之溫度範圍時,所得之粉末產物之十面體氧化鈦粒子之比例低,光觸媒活性低。預熱區域Y之預熱溫度為高於1050℃之溫度範圍時,所得之粉末產物之金紅石比例升高,十面體氧化鈦粒子之比例低,光觸媒活性降低。藉由將第1氣體G2之預熱溫度設為含有金屬氯化物之氣體G1之預熱溫度以上為800℃以上1050℃以下之溫度範圍,最終所得之粉末產物中之金紅石比例降低,十面體氧化鈦粒子之比例升高,結果可得到具有光觸媒活性高的十面體氧化鈦粒子。 When the preheating temperature of the preheating zone Y is in the temperature range of less than 800 ° C, the ratio of the decahedral titanium oxide particles of the obtained powder product is low, and the photocatalytic activity is low. When the preheating temperature of the preheating zone Y is higher than 1050 ° C, the rutile ratio of the obtained powder product is increased, the proportion of the decahedral titanium oxide particles is low, and the photocatalytic activity is lowered. When the preheating temperature of the first gas G2 is set to a temperature range of 800 ° C or more and 1050 ° C or less above the preheating temperature of the metal chloride-containing gas G1, the ratio of the rutile in the finally obtained powder product is lowered, and the ten sides are reduced. The proportion of the bulk titanium oxide particles is increased, and as a result, decahedral titanium oxide particles having high photocatalytic activity can be obtained.

預熱區域Z之預熱溫度(第2氣體G3之預熱溫度)為預熱區域Y之預熱溫度(第1氣體G2之預熱溫度)以上之溫度,較佳為900℃以上1100℃以下之溫度範圍,更佳為950℃以上1050℃以下之溫度範圍。將第2氣體G3之預熱溫度設為第1合流氣體溫度以上之溫度,在 第2合流地點使兩者合流,藉由在第2反應區中,將第1合流氣體再加熱,可得到十面體比例高,光觸媒活性高的粒子。 The preheating temperature of the preheating zone Z (preheating temperature of the second gas G3) is a temperature equal to or higher than the preheating temperature of the preheating zone Y (preheating temperature of the first gas G2), preferably 900 ° C or more and 1100 ° C or less. The temperature range is more preferably in the range of 950 ° C to 1050 ° C. The preheating temperature of the second gas G3 is set to a temperature equal to or higher than the temperature of the first merging gas, The second merging point merges the two, and by heating the first merging gas in the second reaction zone, particles having a high decahedron ratio and high photocatalytic activity can be obtained.

預熱區域Z之預熱溫度為比900℃更低的溫度範圍時,第2合流氣體之溫度,亦即,第2反應區之溫度降低,在第2反應區反應未完結,有時所得之粉末產物之收率會降低的情形。預熱區域Z之預熱溫度為高於1100℃之溫度範圍時,最終所得之粉末產物中之金紅石比例升高,十面體氧化鈦粒子之比例降低,結果光觸媒活性降低。 When the preheating temperature of the preheating zone Z is lower than 900 ° C, the temperature of the second merging gas, that is, the temperature of the second reaction zone is lowered, and the reaction in the second reaction zone is not completed, and sometimes the result is obtained. The case where the yield of the powder product is lowered. When the preheating temperature of the preheating zone Z is higher than the temperature range of 1100 ° C, the proportion of rutile in the finally obtained powder product increases, and the proportion of the decahedral titanium oxide particles decreases, and as a result, the photocatalytic activity decreases.

<第1合流氣體溫度> <1st merged gas temperature>

反應管11中,由第1合流地點(第1中空內筒4之下游端4b)至第2合流地點(第2中空內筒5之下游端5b)之間,設置有第1區B。第1區B係經預熱後之含有金屬氯化物之氣體G1與經預熱後之第1氣體G2合流,形成第1合流氣體,至與第2氣體G3合流為止,為第1合流氣體流動的區域。 In the reaction tube 11, the first region B is provided between the first merging point (the downstream end 4b of the first hollow inner cylinder 4) and the second merging point (the downstream end 5b of the second hollow inner cylinder 5). In the first zone B, the pre-heated metal chloride-containing gas G1 merges with the preheated first gas G2 to form a first merged gas, and the first merged gas flows until it merges with the second gas G3. Area.

第1合流氣體溫度較佳為800℃以上1050℃以下之溫度範圍,更佳為850℃以上1000℃以下,又更佳為900℃以上1000℃以下。藉由將第1合流氣體溫度設為800℃以上1050℃以下之溫度範圍,最終所得之粉末產物中之十面體氧化鈦粒子之比例升高,可得到高的光觸媒活性。 The temperature of the first merging gas is preferably a temperature range of 800 ° C or more and 1050 ° C or less, more preferably 850 ° C or more and 1000 ° C or less, and still more preferably 900 ° C or more and 1000 ° C or less. By setting the temperature of the first merging gas to a temperature range of 800 ° C or more and 1050 ° C or less, the ratio of the decahedral titanium oxide particles in the finally obtained powder product is increased, and high photocatalytic activity can be obtained.

第1合流氣體溫度為未達800℃的情形,最終 所得之粉末產物中之十面體氧化鈦粒子之比例降低,光觸媒活性降低。第2合流氣體溫度為高於1050℃之溫度的情形,最終所得之粉末產物之金紅石比例升高,光觸媒活性降低。 The temperature of the first merged gas is less than 800 ° C, and finally The proportion of the decahedral titanium oxide particles in the obtained powder product is lowered, and the photocatalytic activity is lowered. When the temperature of the second merging gas is higher than 1050 ° C, the rutile ratio of the finally obtained powder product is increased, and the photocatalytic activity is lowered.

第1合流氣體溫度T1[℃]之算出方法,以含有金屬氯化物之氣體G1使用四氯化鈦與氮,第1氣體G2使用氮,第2氣體G3使用氧的情形為例進行說明。 In the method of calculating the first merging gas temperature T 1 [° C.], titanium tetrachloride and nitrogen are used for the gas G1 containing metal chloride, nitrogen is used for the first gas G2, and oxygen is used for the second gas G3 as an example.

以T1=Q1/C1、Q1=QR,T+QR,N+Q1G,N、QR,T=GR、T×CpT×TR、QR,N=GR,N×CpN×TR、Q1G,N=G1G,N×CpN×T1G、G1=GR、T×CpT+GR、N×CpN+G1G,N×CpN的式子計算。 Let T 1 =Q 1 /C 1 , Q 1 =Q R,T +Q R,N +Q 1G,N ,Q R,T =G R, T ×Cp T ×T R ,Q R,N =G R, N × Cp N × T R , Q 1G, N = G 1G, N × Cp N × T 1G , G 1 = G R, T × Cp T + G R, N × Cp N + G 1G, N × Formula calculation of Cp N.

在此,Q1係藉由含有金屬氯化物之氣體G1與第1氣體G2帶入第1合流地點之熱量之合計量[kcal],C1係第1合流氣體之熱容量[kcal/℃],QR,T係藉由含有金屬氯化物之氣體G1中之四氯化鈦帶入第1合流地點之熱量[kcal],QR,N係藉由含有金屬氯化物之氣體G1中之氮帶入第1合流地點之熱量[kcal],Q1G,N係藉由第1氣體G2中之氮帶入第1合流地點之熱量[kcal],GR、T係含有金屬氯化物之氣體G1中之四氯化鈦之質量流量[kg/h],CpT係四氯化鈦之比熱[kcal/(kg‧℃)],TR係含有金屬氯化物之氣體G1之預熱溫度,GR、N係含有金屬氯化物之氣體G1中之氮的 質量流量[kg/h],CpN係氮之比熱[kcal/(kg‧℃)],G1G,N係第1氣體G2中之氮之質量流量[kg/h],CpN係氮之比熱[kcal/(kg‧℃)],T1G係第1氣體G2之預熱溫度[℃]。以CpT=0.6[kcal/(kg‧℃)]、CpN=1.2[kcal/(kg‧℃)]來計算。 Here, Q 1 G1-based metal chloride-containing gas by the gas G2 into the first sum of the amount of heat of the first merging point [kcal], C 1 based on heat capacity of the gas merging [kcal / ℃], Q R, T by containing titanium-based metal chlorides in the gas G1 tetrachloride into the merging point of the first heat [kcal], Q R, N G1-based metal chloride-containing gas by the nitrogen in the strip The heat entering the first junction (kcal), Q 1G, N is the heat brought into the first junction by the nitrogen in the first gas G2 [kcal], and the G R and T are contained in the gas G1 containing the metal chloride. The mass flow rate of titanium tetrachloride [kg/h], the specific heat of Cp T- based titanium tetrachloride [kcal/(kg‧°C)], the preheating temperature of T R- based gas G1 containing metal chloride, G R N- type mass flow rate of nitrogen in gas G1 containing metal chloride [kg/h], specific heat of Cp N-type nitrogen [kcal/(kg‧°C)], G 1G, nitrogen in N-type first gas G2 the mass flow rate [kg / h], the specific heat Cp N lines of N [kcal / (kg‧ ℃)] , T 1G -based gas G2 of the first preheating temperature [deg.] C]. Calculated by Cp T = 0.6 [kcal / (kg ‧ ° C)], Cp N = 1.2 [kcal / (kg ‧ ° C)]

<第2合流氣體溫度> <2nd merged gas temperature>

反應管11中,由第2中空內筒5之下游端5b至隔熱材2之下游端之間,設置第2反應區A。第2反應區A係第1合流氣體與經預熱後之第2氣體G3合流,形成第2合流氣體,為第2合流氣體流通的區域,本實施形態中,中空外筒1之外側被隔熱材2捲繞的區域,藉由捲繞隔熱材,在第2反應區A中,可將反應管11內之氣體保溫。第2合流氣體溫度較佳為800℃以上1100℃以下之溫度範圍,更佳為800℃以上1050℃以下之溫度範圍,又更佳為850℃以上1050℃以下之溫度範圍。藉由將第2合流氣體溫度設為800℃以上1100℃以下之溫度範圍,最終所得之粉末產物中之十面體氧化鈦粒子之比例升高,可得到高的光觸媒活性。 In the reaction tube 11, a second reaction zone A is provided between the downstream end 5b of the second hollow inner cylinder 5 and the downstream end of the heat insulating material 2. In the second reaction zone A, the first merged gas merges with the preheated second gas G3 to form a second merged gas, and is a region where the second merged gas flows. In the present embodiment, the outer side of the hollow outer cylinder 1 is separated. In the region where the hot material 2 is wound, the gas in the reaction tube 11 can be kept warm in the second reaction zone A by winding the heat insulating material. The temperature of the second merging gas is preferably a temperature range of 800 ° C or more and 1100 ° C or less, more preferably a temperature range of 800 ° C or more and 1050 ° C or less, and still more preferably a temperature range of 850 ° C or more and 1050 ° C or less. By setting the temperature of the second merging gas to a temperature range of 800 ° C or more and 1100 ° C or less, the ratio of the decahedral titanium oxide particles in the finally obtained powder product is increased, and high photocatalytic activity can be obtained.

第1合流氣體溫度為未達800℃的情形,最終所得之粉末產物中之十面體氧化鈦粒子之比例降低,光觸媒活性降低。第2合流氣體溫度為高於1100℃之溫度的情形,最終所得之粉末產物之金紅石比例升高,光觸媒活性降低。 When the temperature of the first merging gas is less than 800 ° C, the ratio of the decahedral titanium oxide particles in the finally obtained powder product is lowered, and the photocatalytic activity is lowered. When the temperature of the second merging gas is higher than 1100 ° C, the rutile ratio of the finally obtained powder product is increased, and the photocatalytic activity is lowered.

第2合流氣體溫度T2[℃]之算出方法,以含有金屬氯化物之氣體G1使用四氯化鈦與氮,第1氣體G2使用氮,第2氣體G3使用氧的情形為例進行說明。 In the method of calculating the second combined gas temperature T 2 [° C.], titanium tetrachloride and nitrogen are used for the gas G1 containing metal chloride, nitrogen is used for the first gas G2, and oxygen is used for the second gas G3 as an example.

以T2=Q2/C2、Q2=Q1,T+Q1,N+Q2G,O、Q1,T=G1、T×CpT×T1、Q1,N=G1,N×CpN×T1、Q2G,O=G2G,O×CpO×T2G、C2=G1、T×CpT+G1、N×CpN+G2G,O×CpO的式子計算。 Let T 2 =Q 2 /C 2 , Q 2 =Q 1,T +Q 1,N +Q 2G,O ,Q 1,T =G 1 , T ×Cp T ×T 1 ,Q 1,N =G 1, N × Cp N × T 1 , Q 2G, O = G 2G, O × Cp O × T 2G , C 2 = G 1 , T × Cp T + G 1 , N × Cp N + G 2G, O × Formula calculation of Cp O.

在此,Q2係藉由第1合流氣體與第2氣體G3帶入第2合流地點之熱量之合計量[kcal],C2係第2合流氣體之熱容量[kcal/℃],Q1,T係藉由第1合流氣體中之四氯化鈦帶入第2合流地點之熱量[kcal],Q1,N係藉由第1合流氣體中之氮帶入第2合流地點之熱量[kcal],Q2G,O係藉由第2氣體G3中之氧帶入第2合流地點之熱量[kcal],G1、T係第1合流氣體中之四氯化鈦之質量流量[kg/h],G1、N係第1合流氣體中之氮之質量流量[kg/h],G2G,O係第2氣體G3中之氧之質量流量[kg/h],T2G係第2氣體G3之預熱溫度[℃]。以CpT=0.60[kcal/(kg‧℃)]、CpO=1.1[kcal/(kg‧℃)]、CpN=1.2[kcal/(kg‧℃)]進行計算。 Here, Q 2 is a total amount of heat taken by the first merging gas and the second gas G3 to the second merging point [kcal], and C 2 is a heat capacity of the second merging gas [kcal/°C], Q 1, T is the heat [kcal] brought into the second junction by the titanium tetrachloride in the first merging gas, and Q 1, N is the heat brought into the second junction by the nitrogen in the first merging gas [kcal] ], Q 2G, O is the amount of heat brought into the second junction by the oxygen in the second gas G3 [kcal], and the mass flow rate of titanium tetrachloride in the first confluent gas of G 1 and T is [kg/h] ], G 1 , N is the mass flow rate of nitrogen in the first combined gas [kg / h], G 2G, O is the mass flow rate of oxygen in the second gas G3 [kg / h], T 2G based second gas Preheating temperature of G3 [°C]. The calculation was carried out with Cp T = 0.60 [kcal / (kg ‧ ° C)], Cp O = 1.1 [kcal / (kg ‧ ° C)], Cp N = 1.2 [kcal / (kg ‧ ° C)]

<產物回收部> <Product Recycling Department>

中空外筒1之下游側1b經由排出管6,連接有回收金屬氧化物粒子等之產物的產物回收部3。產物回收部3係由袋過濾器等所構成,可回收生成之金屬氧化物粒子。 The downstream side 1b of the hollow outer cylinder 1 is connected to a product recovery part 3 that recovers a product such as metal oxide particles via a discharge pipe 6. The product recovery unit 3 is composed of a bag filter or the like, and the generated metal oxide particles can be recovered.

又,產物回收部3之下游側連接有排氣幫浦3a與壓力調整閥3b。通常,產物回收部3中蓄積產物,隨著過濾器阻塞,反應管11之內部壓力上昇。藉由排氣幫浦3a吸引,可抑制此壓力上昇,在常壓附近,可對金屬氧化物產生氧化反應。又,此時,調整壓力調整閥3b,調節排氣幫浦3a之吸引力為佳。藉此,可更有效率生成金屬氧化物粒子。 Further, an exhaust pump 3a and a pressure regulating valve 3b are connected to the downstream side of the product recovery unit 3. Usually, the product is accumulated in the product recovery unit 3, and as the filter is clogged, the internal pressure of the reaction tube 11 rises. By the suction of the exhaust pump 3a, the pressure rise can be suppressed, and an oxidation reaction can be generated to the metal oxide in the vicinity of the normal pressure. Further, at this time, it is preferable to adjust the pressure adjusting valve 3b and adjust the suction force of the exhaust pump 3a. Thereby, metal oxide particles can be produced more efficiently.

金屬氯化物使用四氯化鈦的情形,以產物回收部3回收的金屬氧化物粒子成為十面體氧化鈦粒子或該粒子以外的氧化鈦粒子。十面體氧化鈦粒子係指與專利文獻1之定義同樣,具有十面體之箱型形狀的氧化鈦粒子。 When titanium tetrachloride is used as the metal chloride, the metal oxide particles recovered by the product recovery unit 3 are decahedral titanium oxide particles or titanium oxide particles other than the particles. The decahedral titanium oxide particles are titanium oxide particles having a decahedral box shape as in the definition of Patent Document 1.

又,十面體氧化鈦粒子以外之氧化鈦粒子係指以本實施形態之製造方法所得之氧化鈦粒子之中,未以上述十面體氧化鈦粒子定義者。 Further, the titanium oxide particles other than the decahedral titanium oxide particles are those defined by the above-described decahedral titanium oxide particles among the titanium oxide particles obtained by the production method of the present embodiment.

<金屬氧化物粒子之製造方法> <Method for Producing Metal Oxide Particles>

其次,使用圖1所示金屬氧化物粒子之製造裝置101說明本發明之實施形態之金屬氧化物粒子之製造方法。 Next, a method for producing metal oxide particles according to an embodiment of the present invention will be described using a manufacturing apparatus 101 for metal oxide particles shown in Fig. 1 .

本發明之實施形態之金屬氧化物粒子之製造方法具有分別將含有金屬氯化物之含有金屬氯化物之氣體G1、不含前述金屬氯化物之第1氣體G2、不含前述金屬氯化物 之第2氣體G3進行預熱的步驟(以下稱為預熱步驟)、及使含有前述金屬氯化物之氣體G1與前述第1氣體G2合流形成第1合流氣體,使前述第1合流氣體與前述第2氣體G3合流,形成第2合流氣體,在第2反應區使前述金屬氯化物反應的步驟。 The method for producing metal oxide particles according to the embodiment of the present invention includes a metal chloride-containing gas G1 containing a metal chloride, a first gas G2 not containing the metal chloride, and a metal chloride-free a step of preheating the second gas G3 (hereinafter referred to as a preheating step), and combining the gas G1 containing the metal chloride with the first gas G2 to form a first merging gas, and the first merging gas and the The second gas G3 merges to form a second merging gas, and the metal chloride is reacted in the second reaction zone.

以下說明使用作為金屬氯化物之四氯化鈦,生成作為金屬氧化物粒子之氧化鈦的情形。 The case of using titanium tetrachloride as a metal chloride to form titanium oxide as a metal oxide particle will be described below.

<預熱步驟> <Preheat step>

在預熱區域X以特定之預熱溫度預熱後之含有金屬氯化物之氣體G1,由第1中空內筒4之上游側4a流入。 The metal chloride-containing gas G1 which is preheated in the preheating zone X at a predetermined preheating temperature flows in from the upstream side 4a of the first hollow inner cylinder 4.

在預熱區域Y以特定之預熱溫度預熱後之由氮所構成之混合氣體(第1氣體G2)流入第1中空內筒與第2中空內筒之間的環狀開口部25中。 The mixed gas (first gas G2) composed of nitrogen which is preheated in the preheating zone Y at a predetermined preheating temperature flows into the annular opening portion 25 between the first hollow inner cylinder and the second hollow inner cylinder.

在預熱區域Z以特定之預熱溫度預熱後之由氧、氮及水蒸氣所構成之混合氣體(第2氣體G3)流入第2中空內筒與中空外筒1之間的環狀開口部26中。 The mixed gas (second gas G3) composed of oxygen, nitrogen, and water vapor which is preheated in the preheating zone Z at a predetermined preheating temperature flows into the annular opening between the second hollow inner cylinder and the hollow outer cylinder 1. In section 26.

由第1中空內筒4之下游端4b噴出之含有金屬氯化物之氣體G1係與由環狀開口部25噴出之第1氣體G2,在第1中空內筒4之下游端4b合流形成第1合流氣體。換言之,第1中空內筒4之下游端4b成為合流地點(第1合流地點)。 The metal chloride-containing gas G1 discharged from the downstream end 4b of the first hollow inner cylinder 4 and the first gas G2 discharged from the annular opening 25 merge at the downstream end 4b of the first hollow inner cylinder 4 to form the first Confluence gas. In other words, the downstream end 4b of the first hollow inner cylinder 4 serves as a joining point (first joining point).

<反應步驟> <Reaction step>

第2反應區A中,以第2合流氣體溫度,反應式(1)之氧化反應進行,使四氯化鈦轉變成氧化鈦。第2合流氣體通過第2反應區A時,合流氣體中之金屬氧化物被急速冷卻,生成氧化鈦粒子所成之粉末產物。 In the second reaction zone A, the oxidation reaction of the reaction formula (1) is carried out at the temperature of the second combined gas, and the titanium tetrachloride is converted into titanium oxide. When the second merging gas passes through the second reaction zone A, the metal oxide in the merging gas is rapidly cooled to form a powder product of the titanium oxide particles.

第2合流氣體滯留於第2反應區A之時間範圍,較佳為未達300毫秒,更佳為未達200毫秒,又更佳為未達150毫秒。隔熱材2之反應管軸方向之距離變長,第2合流氣體滯留於保溫區域之第2反應區A的時間為300毫秒以上時,粒子間產生凝聚,比表面積降低,所得之粉末產物之光觸媒活性降低。 The second confluent gas is retained in the second reaction zone A for a period of time, preferably less than 300 milliseconds, more preferably less than 200 milliseconds, and even more preferably less than 150 milliseconds. When the distance of the heat insulating material 2 in the direction of the reaction tube axis becomes long, and the time when the second condensed gas stays in the second reaction zone A of the heat retention zone is 300 msec or more, aggregation occurs between the particles, and the specific surface area is lowered, and the obtained powder product is obtained. Photocatalytic activity is reduced.

顯示第2合流氣體滯留於第2反應區之時間t2之算出方法。以t2=L2/Ve2、T2、Ve2、T2=Vo2、T2/S2R、Vo2、T2=Vo2、0℃×(273.15+T2)/273.15、Vo2、0℃=Vo1、0℃+Vo2G、0℃、Vo1、0℃=VoR、0℃+Vo1G、0℃的式子計算。 A method of calculating the time t 2 at which the second merging gas is retained in the second reaction zone is shown. Let t 2 = L 2 /Ve 2, T2 , Ve 2, T2 = Vo 2, T2 / S 2R , Vo 2, T2 = Vo 2, 0 ° C × (273.15 + T 2 ) / 273.15, Vo 2, 0 ° C =Vo 1 , 0° C +Vo 2G, 0°C, Vo 1 , 0° C =Vo R, 0°C +Vo 1G, 0°C .

在此,L2為第2反應區之反應管軸方向之長度[m]、Ve2、T2為第2合流氣體之線速度之第2合流氣體溫度換算值[m/s]、Vo2、T2為第2合流氣體流量之第2合流氣體溫度換算值[m3/s]、S2R為第2反應區之剖面積[m2]、Vo2、0℃為第2合流氣體流量之0℃換算值、T2為第2合流氣體溫度、Vo1、0℃為第1合流氣體流量之0℃換算值、Vo2G、0℃為第2氣體G3流量之0℃換算值、VoR、0℃為含有金屬氯化物之氣體G1流量之0℃換算值、Vo1G、0℃為第1氣體G2流量之0℃換算值。 Here, L 2 is the length [m] of the reaction tube axis direction of the second reaction zone, and Ve 2 and T2 are the second combined gas temperature conversion values [m/s] and Vo 2 of the linear velocity of the second merged gas . T2 is the second combined gas temperature conversion value [m 3 /s] of the second combined gas flow rate, S 2R is the sectional area of the second reaction zone [m 2 ], and Vo 2 and 0 ° C are 0 of the second combined gas flow rate. °C converted value, T 2 is the second combined gas temperature, Vo 1 , 0 ° C is the 0 ° C converted value of the first combined gas flow rate, Vo 2G, 0 ° C is the 0 ° C converted value of the second gas G3 flow rate, Vo R, 0 ° C is a 0 ° C converted value of the flow rate of the gas G1 containing the metal chloride, and Vo 1G and 0 ° C are converted values of 0 ° C of the flow rate of the first gas G2.

在隔熱材2之下游側,為了抑制粒子間之凝 聚,有效地冷卻反應管內之氣體較佳。該方法例如有由反應管壁面之自然散熱、由反應管外部之冷卻空氣吹送、冷卻空氣導入反應管內等的方法。 On the downstream side of the heat insulating material 2, in order to suppress coagulation between particles It is preferred to effectively cool the gas in the reaction tube. The method includes, for example, a method of naturally dissipating heat from the wall surface of the reaction tube, blowing cooling air outside the reaction tube, and introducing cooling air into the reaction tube.

[四氯化鈦之濃度] [concentration of titanium tetrachloride]

在由第1中空內筒4之下游端4b至第2中空內筒5之下游端4b之區域27,於第1合流地點,含有金屬氯化物之氣體G1與第1氣體G2合流形成之第1合流氣體中之四氯化鈦的濃度,較佳為0.1~20體積%,更佳為0.5~10體積%,又更佳為0.5~5體積%。藉由將第1合流氣體中之四氯化鈦的濃度設為上述範圍內,可得到具有光觸媒活性高之十面體氧化鈦粒子。 In the region 27 from the downstream end 4b of the first hollow inner cylinder 4 to the downstream end 4b of the second hollow inner cylinder 5, the metal chloride-containing gas G1 and the first gas G2 merge at the first junction point. The concentration of titanium tetrachloride in the combined gas is preferably from 0.1 to 20% by volume, more preferably from 0.5 to 10% by volume, still more preferably from 0.5 to 5% by volume. By setting the concentration of titanium tetrachloride in the first merging gas to the above range, decahedral titanium oxide particles having high photocatalytic activity can be obtained.

又,在上述區域27,流通第1區之第1合流氣體中之四氯化鈦濃度越低,構成最終所得之粉末產物之氧化鈦粒子之一次粒徑變越小,比表面積增大。藉由將流通第1區之第1合流氣體中之四氯化鈦濃度設為上述範圍內,可得到具有光觸媒活性高之粉末產物。 Further, in the region 27, the lower the concentration of titanium tetrachloride in the first merging gas flowing through the first region, the smaller the primary particle diameter of the titanium oxide particles constituting the finally obtained powder product, and the larger the specific surface area. By setting the concentration of titanium tetrachloride in the first merging gas flowing through the first zone to the above range, a powder product having high photocatalytic activity can be obtained.

[滯留時間] [stagnation time]

第1合流氣體滯留於第1區之時間(以下稱為「滯留時間」),較佳為2~100毫秒之範圍內,更佳為2~75毫秒之範圍內,又更佳為20~50毫秒之範圍內。 The time during which the first merging gas stays in the first zone (hereinafter referred to as "stagnation time") is preferably in the range of 2 to 100 milliseconds, more preferably in the range of 2 to 75 milliseconds, and more preferably 20 to 50. Within the range of milliseconds.

藉由將第2合流地點離開第1合流地點之下游側設置,設置第1區,產生第1合流氣體滯留於第1區 的時間。 By setting the second junction point away from the downstream side of the first junction point, the first zone is provided, and the first merged gas is retained in the first zone. time.

此時,微量之第2氣體(第2可燃性(burnability)氣體)產生逆流。因此,前述滯留時間超過100毫秒的情形,第1區中,在第2中空內筒內壁面(特別是下游端5b之邊緣)變得容易生成氧化鈦黏著物或膜狀產物、附著物,最終所得之粉末產物之收率降低,或流路阻塞、石英玻璃破損。又,金紅石比例增加,光觸媒活性降低。 At this time, a trace amount of the second gas (second flammability gas) is reversed. Therefore, in the case where the residence time exceeds 100 msec, in the first zone, the titanium oxide adherend, the film-like product, and the deposit are easily formed on the inner wall surface of the second hollow inner cylinder (particularly, the edge of the downstream end 5b). The yield of the obtained powder product was lowered, or the flow path was blocked, and the quartz glass was broken. Also, the rutile ratio increases and the photocatalytic activity decreases.

相反地,前述滯留時間未達2毫秒的情形,第1中空內筒石英管之前端或周圍變得容易產生若干氧化鈦黏著物,最終流路阻塞、石英玻璃破損。金紅石比例雖降低,但是最終所得之氧化鈦粒子之光觸媒活性降低。 On the other hand, when the residence time is less than 2 milliseconds, a plurality of titanium oxide adherends are likely to be generated at the front end or the periphery of the first hollow inner cylinder quartz tube, and eventually the flow path is clogged and the quartz glass is broken. Although the rutile ratio is lowered, the photocatalytic activity of the finally obtained titanium oxide particles is lowered.

藉由將第1合流氣體滯留第1區之時間設為2~100毫秒之範圍內,在第1、第2中空內筒石英管未發生氧化鈦黏著物或膜狀產物、附著物,可以95%以上的高收率長時間生產。 When the time during which the first confluent gas is retained in the first region is in the range of 2 to 100 msec, the titanium oxide adherend, the film-like product, and the deposit are not generated in the first and second hollow inner cylinder quartz tubes. More than % of the high yield is produced for a long time.

又,最終所得之氧化鈦粒子之金紅石比例低,粉末產物中之十面體氧化鈦粒子之比例升高,光觸媒活性升高。 Further, the ratio of the rutile of the titanium oxide particles finally obtained is low, and the proportion of the decahedral titanium oxide particles in the powder product is increased, and the photocatalytic activity is increased.

顯示第1合流氣體滯留第1區之時間t1之算出方法。以t1=L1/Ve1、T1、Ve1、T1=Vo1、T1/S1G、Vo1、T1=Vo1、0℃×(273.15+T1)/273.15、Vo1、0℃=VoR、0℃+Vo1G、0℃的式子計算。 A method of calculating the time t 1 at which the first merging gas stays in the first region is displayed. Let t 1 = L 1 /Ve 1 , T1 , Ve 1 , T1 = Vo 1 , T1 / S 1G , Vo 1 , T1 = Vo 1 , 0 ° C × (273.15 + T 1 ) / 273.15, Vo 1, 0 ° C =Vo R, 0°C +Vo 1G, 0°C formula calculation.

在此,L1為第1區之反應管軸方向之長度[m]、Ve1、T1為第1合流氣體之線速度之第1合流氣體溫度換算值[m/s]、Vo1、T1為第1合流氣體流量之第1合流氣體溫 度換算值[m3/s]、S1G為第1區之剖面積[m2]、Vo1、0℃為第1合流氣體流量之0℃換算值、T1為第1合流氣體溫度、VoR、0℃為含有金屬氯化物之氣體G1流量之0℃換算值、Vo1G、0℃為第1氣體G2流量之0℃換算值。 Here, L 1 is the length [m] of the reaction tube axis direction of the first zone, and Ve 1 and T1 are the first combined gas temperature conversion values [m/s], Vo 1 and T1 of the linear velocity of the first merged gas . The first combined gas temperature conversion value [m 3 /s] of the first combined gas flow rate, the S 1G is the first area sectional area [m 2 ], Vo 1 , and 0 ° C is the first combined gas flow rate of 0 ° C conversion. The value, T 1 is the first combined gas temperature, Vo R, 0 ° C is a 0 ° C converted value of the metal chloride-containing gas G1 flow rate, and Vo 1G and 0 ° C are 0 ° C converted values of the first gas G2 flow rate.

[雷諾數] [Reynolds number]

第2合流氣體之雷諾數,以10~10000之範圍為佳,以1000~4000之範圍為較佳,以2100~3000之範圍為更佳。 The Reynolds number of the second merging gas is preferably in the range of 10 to 10,000, preferably in the range of 1000 to 4,000, and more preferably in the range of 2100 to 3,000.

雷諾數超過10000的情形,合流氣體之亂流狀態變得明顯,會失去抑制四氯化鈦蒸氣由反應管11之中心軸附近向擴散至內壁面側之氧化性氣體的效果,於反應管11之內壁面之膜狀產物黏著量增加。第2合流氣體之雷諾數未達10時,因層流而為微小流量條件的情形,或超過10000之成為顯著亂流條件的情形,粉末產物中之十面體粒子之比例會降低,光觸媒活性也會降低。藉由將第2合流氣體之雷諾數設為10~10000之範圍內,粉末產物中的十面體粒子之比例升高,光觸媒活性升高。 When the Reynolds number exceeds 10,000, the turbulent flow state of the merged gas becomes conspicuous, and the effect of suppressing the oxidizing gas which diffuses the titanium tetrachloride vapor from the vicinity of the central axis of the reaction tube 11 to the inner wall surface side is lost in the reaction tube 11 The amount of film-like product adhesion on the inner wall surface increases. When the Reynolds number of the second merging gas is less than 10, the case of a small flow rate due to laminar flow, or the case where the turbulent flow condition exceeds 10000, the proportion of the decahedral particles in the powder product is lowered, and the photocatalytic activity is decreased. Will also decrease. By setting the Reynolds number of the second merging gas to be in the range of 10 to 10,000, the proportion of the decahedral particles in the powder product is increased, and the photocatalytic activity is increased.

雷諾數Re係以Re=D×u×ρ/μ之計算式計算。其中,D為中空外筒1之內徑(m),u為線速度(m/s),ρ為密度(kg/m3),μ為黏度[kg/(m×s)]。 The Reynolds number Re is calculated by the calculation formula of Re = D × u × ρ / μ. Where D is the inner diameter (m) of the hollow outer cylinder 1, u is the linear velocity (m/s), ρ is the density (kg/m 3 ), and μ is the viscosity [kg/(m × s)].

本實施形態中,使用中空外筒1之內徑D之值為126(mm)者。又,u之值為使用第2反應區中之反應後之合流氣體(Cl2+O2)的線速度(第2合流氣體溫度換算 值)。ρ之值為使用反應後之合流氣體(Cl2+O2)之密度(第2合流氣體溫度換算值)。此外,μ之值為使用反應後之合流氣體的黏度(第2合流氣體溫度換算值)。 In the present embodiment, the value of the inner diameter D of the hollow outer cylinder 1 is 126 (mm). Further, the value of u is the linear velocity (converted value of the second combined gas temperature) of the combined gas (Cl 2 + O 2 ) after the reaction in the second reaction zone. The value of ρ is the density of the combined gas (Cl 2 + O 2 ) after the reaction (the converted value of the second combined gas temperature). Further, the value of μ is the viscosity of the combined gas after the reaction (the second combined gas temperature conversion value).

[合流氣體之線速度u] [Line speed of confluent gas u]

第2反應區中之反應後的合流氣體(Cl2+O2+N2)之線速度u之值,可使用第2合流氣體(TiCl4+O2+N2)之線速度u(第2合流氣體溫度換算值)。 The linear velocity u of the second combined gas (TiCl 4 + O 2 + N 2 ) can be used as the value of the linear velocity u of the combined gas (Cl 2 + O 2 + N 2 ) after the reaction in the second reaction zone. 2 Confluent gas temperature conversion value).

藉由前記載之反應式(1)之反應,含有金屬氯化物之氣體G1所含有之TiCl4全部被消耗的情形,除會生成TiCl4之2倍(流)量的Cl2,同時,O2僅TiCl4之分量被消耗,O2流量減少。但是生成之TiO2為粒子而非氣體,結果此反應前後所流通之氣體整體的流量並未改變。 By reaction of Formula (1) described before, the case of TiCl 4 gas G1 containing the metal chlorides contained in the entire consumed, addition of TiCl 4 generates a 2-fold (flow) of the amount of Cl 2, at the same time, O 2 Only the component of TiCl 4 is consumed, and the flow of O 2 is reduced. However, the generated TiO 2 is a particle rather than a gas, and as a result, the flow rate of the gas flowing before and after the reaction does not change.

[合流氣體之密度ρ] [density of gas ρ]

為了計算在第2反應區反應後之合流氣體(Cl2+O2+N2)之密度ρ之值,使用每單位時間所流通之反應後之合流氣體的流量(即,第2合流氣體之流量)。 In order to calculate the value of the density ρ of the combined gas (Cl 2 + O 2 + N 2 ) after the reaction in the second reaction zone, the flow rate of the combined gas after the reaction per unit time is used (that is, the second combined gas is used. flow).

首先,將第2反應區中之反應後之合流氣體之流量以第2合流氣體溫度換算的流量作為X2T(m3/h)。使用反應後之合流氣體之流量X2T(m3/h)之標準狀態(0℃、1atm)下的流量,求合流氣體之質量流量Y0℃,1atm(kg/h)。此時,第2反應區中之反應後之合流氣體的密度ρ=Y0℃,1atm(kg)/X2T(m3)。 First, the flow rate of the flow rate of the combined gas after the reaction in the second reaction zone is converted into the temperature of the second combined gas temperature as X 2T (m 3 /h). Using the flow rate in the standard state (0 ° C, 1 atm) of the flow rate of the combined gas after the reaction, X 2T (m 3 /h), the mass flow rate of the combined gas Y 0 ° C, 1 atm (kg / h). At this time, the density of the combined gas after the reaction in the second reaction zone is ρ = Y 0 ° C, 1 atm (kg) / X 2T (m 3 ).

為了計算第2反應區中之反應後之合流氣體(Cl2+O2+N2)之黏度μ,而使用μ=exp{a+b×ln(t+273)}的計算式。上述計算式中,t為溫度(℃),在此為第2合流氣體溫度。又,a、b係因使用之氣體的種類所決定的常數,關於Cl2為a=0.015、b=0.864,關於O2為a=1.289、b=0.711,關於N2為a=1.388、b=0.668的值。又,a、b之此等之值係由已知之t與μ之組合,解a與b之連立方程式而得的值。 In order to calculate the viscosity μ of the combined gas (Cl 2 + O 2 + N 2 ) after the reaction in the second reaction zone, a calculation formula of μ = exp{a + b × ln(t + 273)} was used. In the above calculation formula, t is the temperature (° C.), and here is the temperature of the second merging gas. And, a, the constant b was due to the type of use of the gas to be determined, on Cl 2 as a = 0.015, b = 0.864, on O 2 as a = 1.289, b = 0.711, on N 2 as a = 1.388, b A value of =0.668. Further, the values of a and b are values obtained by combining the known t and μ, and solving the cubic equation of a and b.

藉由以下之式子,將反應後之合流氣體(Cl2+O2+N2)之黏度μ進行平均化,求得反應後之合流氣體之黏度μ(第2合流氣體溫度換算)。 The viscosity μ of the combined gas (Cl 2 +O 2 +N 2 ) after the reaction is averaged by the following formula, and the viscosity μ of the combined gas after the reaction (calculated as the second combined gas temperature) is obtained.

反應後之合流氣體之黏度μ(第2合流氣體溫度換算值)={(Cl2流量之第2合流氣體溫度換算值)×(第2合流氣體溫度換算之Cl2之黏度)+(O2流量之第2合流氣體溫度換算值)×(第2合流氣體溫度換算之O2之黏度)+(N2流量之第2合流氣體溫度換算值)×(第2合流氣體溫度換算之N2之黏度)}/{反應後之合流氣體(Cl2+O2+N2)之流量} The viscosity μ of the combined gas after the reaction (the converted value of the second combined gas temperature) = {(the converted value of the second combined gas temperature of the flow rate of Cl 2 ) × (the viscosity of the Cl 2 converted by the temperature of the second combined gas) + (O 2 the second merged gas temperature conversion value of the flow of) × (the second junction temperature of the gas in terms of O viscosity 2 of) + (second merged gas temperature conversion value of N 2 flow rate of) × (the second junction temperature of the gas in terms of N 2 of Viscosity)}/{Flow of combined gas (Cl 2 +O 2 +N 2 ) after reaction}

以上為以作為金屬氧化物粒子之氧化鈦粒子為例進行說明,但並不限定於此,例如,前述金屬氧化物粒子亦可為氧化矽粒子、氧化錫粒子等。製造此等金屬氧化物粒子的情形,使用分別含有四氯化矽蒸汽及四氯化錫蒸氣之含有金屬氯化物之氣體。 The titanium oxide particles as the metal oxide particles are described above as an example. However, the metal oxide particles may be cerium oxide particles or tin oxide particles, for example. In the case of producing such metal oxide particles, a metal chloride-containing gas containing ruthenium tetrachloride vapor and tin tetrachloride vapor, respectively, is used.

又,生成作為金屬氧化物粒子之氧化鈦粒子 的情形,使用作為含有金屬氯化物之氣體之由四氯化鈦之蒸氣與氮氣所構成之混合氣體,最佳為第1氣體使用氮氣,第2氣體G3使用氧氣。藉由使用此組合,可長時間生產具有光觸媒活性高的粒子。 Further, titanium oxide particles are generated as metal oxide particles In the case of using a mixed gas composed of a vapor of titanium tetrachloride and nitrogen as a gas containing a metal chloride, it is preferable to use nitrogen gas for the first gas and oxygen gas for the second gas G3. By using this combination, particles having high photocatalytic activity can be produced for a long period of time.

依據本發明之實施形態之金屬氧化物粒子之製造方法時,可長時間製造光觸媒活性高的金屬氧化物粒子。特別是使用作為金屬氯化物之四氯化鈦,製造作為金屬氧化物粒子之氧化鈦粒子的情形,該效果顯著。 According to the method for producing metal oxide particles according to the embodiment of the present invention, metal oxide particles having high photocatalytic activity can be produced for a long period of time. In particular, when titanium tetrachloride particles as metal oxide particles are produced using titanium tetrachloride as a metal chloride, the effect is remarkable.

本發明之實施形態之金屬氧化物粒子之製造方法,氧化鈦粒子為十面體氧化鈦粒子的構成,故可長時間製造光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the titanium oxide particles are composed of decahedral titanium oxide particles, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因含有金屬氯化物之氣體G1之預熱溫度為600℃以上1000℃以下的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the preheating temperature of the metal chloride-containing gas G1 is 600° C. or higher and 1000° C. or lower, metal oxide particles having high photocatalytic activity can be produced for a long period of time. .

本發明之實施形態之金屬氧化物粒子之製造方法係因第1合流氣體之溫度為800℃以上1050℃以下的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the temperature of the first merging gas is 800° C. or higher and 1050° C. or lower, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因第2合流氣體之溫度為800℃以上1100℃以下的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the temperature of the second merging gas is 800° C. or higher and 1100° C. or lower, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造 方法係因第1氣體G2之預熱溫度為800℃以上1050℃以下的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 Manufacture of metal oxide particles according to an embodiment of the present invention In the method, since the preheating temperature of the first gas G2 is 800° C. or higher and 1050° C. or lower, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因第2氣體G3之預熱溫度為800℃以上1100℃以下的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing the metal oxide particles according to the embodiment of the present invention, since the preheating temperature of the second gas G3 is 800° C. or higher and 1100° C. or lower, the metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因含有金屬氯化物之氣體G1為含有氮氣之特徵的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the gas G1 containing a metal chloride is a characteristic containing nitrogen gas, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因第1氣體G2為含有選自由氮氣、氬所成群之1種以上之氣體的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing a metal oxide particle according to the embodiment of the present invention, since the first gas G2 is composed of a gas selected from the group consisting of nitrogen gas and argon, it is possible to produce a metal oxide having high photocatalytic activity for a long period of time. Particles.

本發明之實施形態之金屬氧化物粒子之製造方法係因第2氣體G3為含有選自由氧氣體、氮氣、氬及水蒸氣所成群之1種以上之氣體的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing a metal oxide particle according to the embodiment of the present invention, since the second gas G3 is composed of a gas selected from the group consisting of oxygen gas, nitrogen gas, argon gas, and water vapor, it can be produced for a long period of time. Metal oxide particles with high photocatalytic activity.

本發明之實施形態之金屬氧化物粒子之製造方法係因第1合流氣體所含有之前述四氯化鈦之濃度設為0.1~20體積%的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the concentration of the titanium tetrachloride contained in the first merging gas is 0.1 to 20% by volume, a metal having high photocatalytic activity can be produced for a long period of time. Oxide particles.

本發明之實施形態之金屬氧化物粒子之製造 方法係因第1合流氣體滯留於前述第1區之時間設為2~100毫秒的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 Manufacture of metal oxide particles according to an embodiment of the present invention In the method, since the time during which the first merging gas stays in the first region is 2 to 100 milliseconds, the metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造方法係因第2合流氣體之雷諾數設為10~10000的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 In the method for producing metal oxide particles according to the embodiment of the present invention, since the Reynolds number of the second merging gas is 10 to 10,000, metal oxide particles having high photocatalytic activity can be produced for a long period of time.

本發明之實施形態之金屬氧化物粒子之製造裝置係具備反應管11、將含有金屬氯化物之氣體G1、第1氣體及第2氣體之各自進行預熱之預熱部X,Y,Z,其中前述反應管11係由中空外筒1、由該中空外筒1之上游側1a插入至該中空外筒1之途中所成之第2中空內筒5及由該第2中空內筒5之上游側5a插入該第2中空內筒5之途中所成之第1中空內筒4所構成,前述第2中空內筒5具備:將經預熱後之前述第1氣體導入其上游側5a的第1導管15,前述中空外筒1具備:將經預熱後之前述第2氣體導入於其上游側1a之第2導管16,藉由經預熱後之含有前述金屬氯化物之氣體G1由第1中空內筒4之上游側4a導入,被導入之含有前述金屬氯化物之氣體G1在前述第1中空內筒4的下游端4b與經預熱後之前述第1氣體合流,該合流之氣體可於前述第2中空內筒5的下游端5b,與經預熱後之前述第2氣體再合流的構成,故可長時間製造具有光觸媒活性高的金屬氧化物粒子。 The apparatus for producing metal oxide particles according to the embodiment of the present invention includes a reaction tube 11 and preheating portions X, Y, and Z for preheating each of the metal chloride-containing gas G1, the first gas, and the second gas. The reaction tube 11 is a hollow outer cylinder 1, a second hollow inner cylinder 5 formed by inserting the upstream side 1a of the hollow outer cylinder 1 into the hollow outer cylinder 1, and a second hollow inner cylinder 5 The first hollow inner cylinder 4 formed by inserting the upstream side 5a into the second hollow inner cylinder 5, and the second hollow inner cylinder 5 is provided with the preheated first gas introduced into the upstream side 5a thereof. In the first duct 15, the hollow outer cylinder 1 includes a second duct 16 that introduces the preheated second gas to the upstream side 1a thereof, and the gas G1 containing the metal chloride after being preheated is used. The upstream side 4a of the first hollow inner cylinder 4 is introduced, and the introduced gas chloride G1 containing the metal chloride merges with the preheated first gas at the downstream end 4b of the first hollow inner cylinder 4, and the combined flow The gas may be recombined with the second gas after the preheating at the downstream end 5b of the second hollow inner cylinder 5 , It can be manufactured for a long time with high photocatalytic activity of metal oxide particles.

〔實施例〕 [Examples]

以下,依據實施例具體說明本發明。但是本發明並不僅限定於此等實施例者。於未變更其主旨之範圍內皆可適當變更作為實施例。 Hereinafter, the present invention will be specifically described based on examples. However, the present invention is not limited to the embodiments. The embodiment can be appropriately changed as long as it is not changed.

(實施例1) (Example 1) <裝置準備> <Device preparation>

首先,中空外筒1使用內徑126.0mm之石英管,第1中空內筒4使用外徑27.0mm、內徑21.0mm、厚度3.0mm之石英管,第2中空內筒5使用外徑61.0mm、內徑55.0mm、厚度3.0mm之石英管,將中空外筒1與第1中空內筒4與第2中空內筒5成為同軸予以配置,製作反應管11。 First, the hollow outer cylinder 1 uses a quartz tube having an inner diameter of 126.0 mm, and the first hollow inner cylinder 4 uses a quartz tube having an outer diameter of 27.0 mm, an inner diameter of 21.0 mm, and a thickness of 3.0 mm, and the second hollow inner cylinder 5 has an outer diameter of 61.0 mm. A quartz tube having an inner diameter of 55.0 mm and a thickness of 3.0 mm is disposed coaxially with the hollow outer cylinder 1 and the first hollow inner cylinder 4 and the second hollow inner cylinder 5 to produce a reaction tube 11.

其次,將反應管11之一部分以隔熱材(陶瓷纖維)2捲繞50cm,設定第2反應區A。在隔熱材2之下游側,反應管11內之氣體溫度因散熱至反應管11外而降低。因此,藉由設定隔熱材之長度,設定第2反應區A之長度。 Next, one part of the reaction tube 11 was wound with a heat insulating material (ceramic fiber) 2 by 50 cm, and the second reaction zone A was set. On the downstream side of the heat insulating material 2, the temperature of the gas in the reaction tube 11 is lowered by heat radiation to the outside of the reaction tube 11. Therefore, the length of the second reaction zone A is set by setting the length of the heat insulating material.

其次,配置第2中空內筒5,使第2中空內筒5之下游端5b成為第2反應區A之上游端的位置。因比第2中空內筒5之下游端5b為上游,故在預熱區域Z藉由電加熱器預熱後之第2氣體G3被導入於中空外筒1之上游側1a中。 Next, the second hollow inner cylinder 5 is disposed such that the downstream end 5b of the second hollow inner cylinder 5 becomes the upstream end of the second reaction zone A. Since the downstream end 5b of the second hollow inner cylinder 5 is upstream, the second gas G3 preheated by the electric heater in the preheating zone Z is introduced into the upstream side 1a of the hollow outer cylinder 1.

其次,配置第1中空內筒4,使第1中空內筒4之下游端4b成為比第2中空內筒之下游端5b為上游之位置。 因比第1中空內筒4之下游端4b為上游,故在預熱區域Y藉由電加熱器預熱後之第1氣體G2被導入於第2中空內筒5之上游側5a中。在預熱區域X藉由電加熱器預熱後之含有金屬氯化物之氣體G1被導入於第1中空內筒4之上游側4a中。第1區B之長度為14.0cm。第2反應區A之長度為50.0cm。 Next, the first hollow inner cylinder 4 is disposed such that the downstream end 4b of the first hollow inner cylinder 4 is positioned upstream of the downstream end 5b of the second hollow inner cylinder. Since the downstream end 4b of the first hollow inner cylinder 4 is upstream, the first gas G2 preheated by the electric heater in the preheating zone Y is introduced into the upstream side 5a of the second hollow inner cylinder 5. The metal chloride-containing gas G1 which is preheated by the electric heater in the preheating zone X is introduced into the upstream side 4a of the first hollow inner cylinder 4. The length of the first zone B is 14.0 cm. The length of the second reaction zone A was 50.0 cm.

如上述,準備圖1所示之金屬氧化物粒子之製造裝置101 As described above, the apparatus 101 for manufacturing metal oxide particles shown in Fig. 1 is prepared.

<製造步驟> <manufacturing step>

其次,使由氮(N2)氣體所構成之第1氣體G2通過以電加熱器保溫於1010℃之預熱區域Y成為1010℃後,由第2中空內筒5之上游側5a導入。又,第1氣體G2之流量為6.5Nm3/h。 Then, the first gas G2 composed of nitrogen (N 2 ) gas is introduced into the preheating zone Y at 1010 ° C by an electric heater to be 1010 ° C, and then introduced from the upstream side 5 a of the second hollow inner cylinder 5 . Further, the flow rate of the first gas G2 was 6.5 Nm 3 /h.

其次,使由氧(O2)氣體所成之第2氣體G3通過藉由電加熱器保溫於1030℃之預熱區域Z,成為1030℃後,由中空外筒1之上游側1a導入。又,第2氣體G3之流量為32Nm3/h。 Next, the second gas G3 made of oxygen (O 2 ) gas is passed through a preheating zone Z of 1030 ° C by an electric heater to be 1030 ° C, and then introduced from the upstream side 1 a of the hollow outer cylinder 1 . Further, the flow rate of the second gas G3 was 32 Nm 3 /h.

其次,將由四氯化鈦(TiCl4)與氮(N2)氣體所成之含有金屬氯化物之氣體G1通過藉由電加熱器保溫於880℃之預熱區域X成為880℃後,由第1中空內筒4之上游側4a導入。又,含有金屬氯化物之氣體G1之流量為1.3Nm3/h。 Next, the metal chloride-containing gas G1 made of titanium tetrachloride (TiCl 4 ) and nitrogen (N 2 ) gas is heated at 880 ° C in the preheating zone X by an electric heater to become 880 ° C. The upstream side 4a of the hollow inner cylinder 4 is introduced. Further, the flow rate of the metal chloride-containing gas G1 was 1.3 Nm 3 /h.

含有金屬氯化物之氣體G1與第1氣體G2與第2氣 體G3之合計流量(原料氣體流量)為39.8Nm3/h。 The total flow rate (feed gas flow rate) of the metal chloride-containing gas G1 and the first gas G2 and the second gas G3 was 39.8 Nm 3 /h.

將第1合流氣體之第1區B的滯留時間設為32毫秒。將第2合流氣體之第2反應區A之滯留時間設為118毫秒。又,第1區B中之第1合流氣體中之四氯化鈦的濃度設為3.8體積%(vol%)。第1合流氣體溫度為979℃。第2合流氣體溫度為1020℃。又,第2反應區A之第2合流氣體的雷諾數設為2800。 The residence time of the first zone B of the first merged gas was set to 32 milliseconds. The residence time of the second reaction zone A of the second merging gas was set to 118 msec. Further, the concentration of titanium tetrachloride in the first merging gas in the first zone B was set to 3.8% by volume (vol%). The first combined gas temperature was 979 °C. The second combined gas temperature was 1020 °C. Further, the Reynolds number of the second merging gas in the second reaction zone A was 2,800.

此外,此雷諾數係假定比第2中空內筒5之下游端5b更下游側中,第2合流氣體成為1020℃的情形之值。又,第1區中之滯留時間假定為比第1中空內筒4之下游端4b更下游側中,第1合流氣體成為979℃的情形之值。第2反應區中之滯留時間假定為比第2中空內筒5之下游端5b更下游側中,第2合流氣體成為1020℃,算出第2合流氣體由第2中空內筒5之下游端5b至隔熱材2之下游端之滯留時間的值。 In addition, this Reynolds number is assumed to be a value on the downstream side of the downstream end 5b of the second hollow inner cylinder 5, and the second merging gas is 1020 °C. In addition, the residence time in the first zone is assumed to be a value on the downstream side of the downstream end 4b of the first hollow inner cylinder 4, and the first merged gas is 979 °C. The residence time in the second reaction zone is assumed to be further downstream than the downstream end 5b of the second hollow inner cylinder 5, and the second merged gas is 1020 ° C, and the second merged gas is calculated from the downstream end 5b of the second hollow inner cylinder 5. The value of the residence time to the downstream end of the heat insulating material 2.

最後,在產物回收部3回收粉末產物所成之金屬氧化物粒子(實施例1)。 Finally, metal oxide particles obtained by the powder product were recovered in the product recovery section 3 (Example 1).

<特性評價> <Feature evaluation>

如以下進行金屬氧化物粒子(實施例1)之特性評價。 The property evaluation of the metal oxide particles (Example 1) was carried out as follows.

首先,對原料之粉末產物之收率為97%。又,所得之粉末產物為氧化鈦粒子。 First, the yield of the powder product of the raw material was 97%. Further, the obtained powder product was titanium oxide particles.

「粉末產物之收率」係指使用之四氯化鈦全部,相對 於藉由先前記載之反應式(1)之反應轉變成氧化鈦產物的情形之氧化鈦產物的質量,實際製造的粉末產物,亦即氧化鈦粒子之質量之比例。 "Yield of powder product" means all titanium tetrachloride used, relative The ratio of the mass of the titanium oxide product in the case where the reaction of the reaction formula (1) described above is converted into a titanium oxide product, and the mass of the actually produced powder product, that is, the mass of the titanium oxide particles.

其次,藉由以掃描型電子顯微鏡觀察,得知粉末產物中之十面體氧化鈦的比例為70%。 Next, the ratio of the decahedral titanium oxide in the powder product was found to be 70% by observation with a scanning electron microscope.

十面體氧化鈦粒子之比例(以下稱為「十面體比例」)係指以掃描型電子顯微鏡,在5處以上的視野,觀察氧化鈦粒子(任意取樣之粉末產物),算出氧化鈦粒子中所含有之十面體氧化鈦粒子之比例者。 The ratio of the decahedral titanium oxide particles (hereinafter referred to as "decahedral ratio") means that titanium oxide particles (arbitrarily sampled powder products) are observed in five or more fields by a scanning electron microscope to calculate titanium oxide particles. The proportion of decahedral titanium oxide particles contained in the material.

又,圖2為將實施例1之金屬氧化物粒子(氧化鈦粒子)放大100k倍的掃描型電子顯微鏡照片。 Moreover, FIG. 2 is a scanning electron micrograph in which the metal oxide particles (titanium oxide particles) of Example 1 were magnified 100 k times.

又,所得之粒子的比表面積(BET)為14m2/g。 Further, the obtained particles had a specific surface area (BET) of 14 m 2 /g.

其次,藉由X光繞射測量得知金紅石比例為4%。此金紅石比例之數值係由以X光繞射測量所得之波峰強度,推測金紅石型結晶構造之氧化鈦粒子之比例(%)所得之結果。 Secondly, the rutile ratio was found to be 4% by X-ray diffraction measurement. The numerical value of the rutile ratio is a result obtained by estimating the ratio (%) of the titanium oxide particles of the rutile crystal structure by the peak intensity measured by X-ray diffraction.

其次,對於製造後之氧化鈦之光觸媒活性,使用氣體層析法進行評價。 Next, the photocatalytic activity of the titanium oxide after the production was evaluated by gas chromatography.

首先,將氧化鈦粉末10mg置入內徑27mm的盤(Schale)中,加水分散後,以110℃乾燥。 First, 10 mg of titanium oxide powder was placed in a disk (Schale) having an inner diameter of 27 mm, and water-dispersed, followed by drying at 110 °C.

其次,將此盤置入500ml腔內中,以合成空氣取代內部後,於置入有相當乙醛500ppm分量、水5.8μl(相當25℃中之相對濕度50%份量)的狀態下,照射氙光源之0.2mW/cm2的光射,以氣體層析法定量每1小時所發生之 二氧化碳(CO2)量。結果作為光觸媒活性之二氧化碳(CO2)之發生量為120ppm/h。 Next, the disk was placed in a 500 ml chamber, and after replacing the inside with synthetic air, the irradiance was carried out under the condition of placing 500 ppm of acetaldehyde and 5.8 μl of water (corresponding to a relative humidity of 50% in 25 ° C). A light source of 0.2 mW/cm 2 of the light source was used to quantify the amount of carbon dioxide (CO 2 ) generated per hour by gas chromatography. As a result, the amount of carbon dioxide (CO 2 ) which is photocatalytic activity is 120 ppm/h.

(實施例2~4) (Examples 2 to 4)

將第1氣體G2之流量、第1合流氣體中之四氯化鈦濃度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作實施例2~4之金屬氧化物粒子。 The flow rate of the first gas G2, the concentration of titanium tetrachloride in the first merging gas, the residence time of the first merging gas in the first zone B, and the residence time of the second merging gas in the second reaction zone A, The metal oxide particles of Examples 2 to 4 were produced in the same manner as in Example 1 except that the reciprocating gas temperature, the second merging gas temperature, and the Reynolds number of the second merging gas in the second reaction zone A were changed as shown in Tables 1 and 2. .

(實施例5~7) (Examples 5 to 7)

將四氯化鈦供給量、第1合流氣體中之四氯化鈦濃度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作實施例5~7之金屬氧化物粒子。 The amount of titanium tetrachloride supplied, the concentration of titanium tetrachloride in the first merging gas, the residence time of the first merging gas in the first zone B, and the residence time of the second merging gas in the second reaction zone A, The metal oxide particles of Examples 5 to 7 were produced in the same manner as in Example 1 except that the reciprocating gas temperature, the second merging gas temperature, and the Reynolds number of the second merging gas in the second reaction zone A were changed as shown in Tables 1 and 2. .

(實施例8) (Example 8)

將第1氣體G2之預熱溫度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與 實施例1同樣製作實施例8之金屬氧化物粒子。 The preheating temperature of the first gas G2, the residence time of the first merging gas in the first zone B, the residence time of the second merging gas in the second reaction zone A, the first merging gas temperature, and the second merging gas temperature The Reynolds number of the second merging gas in the second reaction zone A is changed as shown in Tables 1 and 2, and In the same manner as in Example 1, the metal oxide particles of Example 8 were produced.

(實施例9) (Example 9)

將第1氣體G2之預熱溫度、第2氣體G3之預熱溫度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作實施例9之金屬氧化物粒子。 The preheating temperature of the first gas G2, the preheating temperature of the second gas G3, the residence time of the first merging gas in the first zone B, and the residence time of the second merging gas in the second reaction zone A, the first The metal oxide particles of Example 9 were produced in the same manner as in Example 1 except that the merging gas temperature, the second merging gas temperature, and the Reynolds number of the second merging gas in the second reaction zone A were changed as shown in Tables 1 and 2.

(實施例10) (Embodiment 10)

將第2氣體G3之預熱溫度、第2反應區A中之第2合流氣體之滯留時間、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作實施例10之金屬氧化物粒子。 The preheating temperature of the second gas G3, the residence time of the second condensed gas in the second reaction zone A, the temperature of the second merging gas, and the Reynolds number of the second merging gas of the second reaction zone A are as shown in Tables 1 and 2. The metal oxide particles of Example 10 were produced in the same manner as in Example 1 except that the change was shown.

(實施例11) (Example 11)

將含有金屬氯化物之氣體G1之預熱溫度、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作、實施例11之金屬氧化物粒子。 The preheating temperature of the metal chloride-containing gas G1, the first merging gas temperature, the second merging gas temperature, and the Reynolds number of the second merging gas of the second reaction zone A are changed as shown in Tables 1 and 2, and are implemented. The metal oxide particles of Example 11 were produced in the same manner as in Example 1.

(實施例12) (Embodiment 12)

將含有金屬氯化物之氣體G1之預熱溫度、第1區B 中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作實施例12之金屬氧化物粒子。 The preheating temperature of the gas chloride G1 containing the metal chloride, the first zone B Residual time of the first merging gas, retention time of the second merging gas in the second reaction zone A, temperature of the first merging gas, temperature of the second merging gas, and Reynolds number of the second merging gas of the second reaction zone A The metal oxide particles of Example 12 were produced in the same manner as in Example 1 except that the changes are shown in Tables 1 and 2.

(比較例1) (Comparative Example 1)

比較例1之製造裝置係與實施例1之製造裝置101相同的構成。將第1氣體G2之種類、第1合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作比較例1之金屬氧化物粒子。 The manufacturing apparatus of Comparative Example 1 has the same configuration as the manufacturing apparatus 101 of the first embodiment. The metal oxide of Comparative Example 1 was produced in the same manner as in Example 1 except that the type of the first gas G2, the temperature of the first merging gas, and the Reynolds number of the second merging gas of the second reaction zone A were changed as shown in Tables 1 and 2. particle.

(比較例2) (Comparative Example 2)

比較例2之製造裝置也與實施例1之製造裝置101相同的構成。將四氯化鈦供給量、第1氣體G2之種類、第1合流氣體中之四氯化鈦濃度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作比較例2之金屬氧化物粒子。 The manufacturing apparatus of Comparative Example 2 also has the same configuration as the manufacturing apparatus 101 of the first embodiment. The amount of titanium tetrachloride supplied, the type of the first gas G2, the concentration of titanium tetrachloride in the first merging gas, the residence time of the first merging gas in the first zone B, and the second in the second reaction zone A The retention time of the merging gas, the temperature of the first merging gas, the temperature of the second merging gas, and the Reynolds number of the second merging gas of the second reaction zone A were changed as shown in Tables 1 and 2, and Comparative Example 2 was produced in the same manner as in Example 1. Metal oxide particles.

(比較例3) (Comparative Example 3)

比較例3之製造裝置也與實施例1之製造裝置101相同的構成。將第1氣體G2之種類、第1區B中之第1合 流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作比較例3之金屬氧化物粒子。 The manufacturing apparatus of Comparative Example 3 also has the same configuration as the manufacturing apparatus 101 of the first embodiment. The type of the first gas G2 and the first one of the first region B The retention time of the flowing gas, the residence time of the second merged gas in the second reaction zone A, the temperature of the first merged gas, the temperature of the second merged gas, and the Reynolds number of the second merged gas of the second reaction zone A are shown in Table 1. The metal oxide particles of Comparative Example 3 were produced in the same manner as in Example 1 except for the change shown in Table 2.

(比較例4) (Comparative Example 4)

比較例4之製造裝置也與實施例1之製造裝置101相同的構成。將第1氣體G2之流量、第1合流氣體中之四氯化鈦濃度、第1區B中之第1合流氣體之滯留時間、第2反應區A中之第2合流氣體之滯留時間、第1合流氣體溫度、第2合流氣體溫度、第2反應區A之第2合流氣體之雷諾數如表1、2所示變更外,與實施例1同樣製作比較例4之金屬氧化物粒子。 The manufacturing apparatus of Comparative Example 4 also has the same configuration as the manufacturing apparatus 101 of the first embodiment. The flow rate of the first gas G2, the concentration of titanium tetrachloride in the first merging gas, the residence time of the first merging gas in the first zone B, and the residence time of the second merging gas in the second reaction zone A, The metal oxide particles of Comparative Example 4 were produced in the same manner as in Example 1 except that the merging gas temperature, the second merging gas temperature, and the Reynolds number of the second merging gas in the second reaction zone A were changed as shown in Tables 1 and 2.

(比較例5) (Comparative Example 5)

為了特性比較,購入市售光觸媒用氧化鈦粒子。此氧化鈦粒子(比較例5)係以火焰法合成的粒子,使用電子顯微鏡觀察的結果,粒子形狀為不定形,一次粒徑為20~60nm。又,藉由X光繞射測量的結果,得知混有銳鈦礦與金紅石的粒子。 For the purpose of comparison, commercially available titanium oxide particles for photocatalysts were purchased. The titanium oxide particles (Comparative Example 5) were particles synthesized by a flame method, and as a result of observation with an electron microscope, the particle shape was amorphous, and the primary particle diameter was 20 to 60 nm. Further, as a result of X-ray diffraction measurement, particles in which anatase and rutile were mixed were known.

又,表3記載實施例1~12、比較例1~5之粉末產物之收率與粉末產物中之十面體比例、光觸媒活性、比表面積(BET測量值、m2/g)、金紅石比例。 Further, Table 3 shows the yields of the powder products of Examples 1 to 12 and Comparative Examples 1 to 5, the decahedral ratio in the powder product, the photocatalytic activity, the specific surface area (BET measurement value, m 2 /g), and rutile. proportion.

將氧流通於第1可燃性氣體之方式之比較例1~3,在生產初期,於第1、第2中空內筒石英管幾乎未產生氧化鈦附著物,但是繼續生產時,氧化鈦附著物慢慢蓄積,在生產時間總共5~20小時之範圍內,流路阻塞, 石英玻璃破損。因此,得知無法長時間生產。 In Comparative Examples 1 to 3 in which oxygen was circulated to the first flammable gas, titanium oxide deposits were hardly generated in the first and second hollow inner cylinder quartz tubes at the initial stage of production, but titanium oxide deposits were continued during production. Accumulate slowly, and the flow path is blocked within a total of 5 to 20 hours of production time. The quartz glass is broken. Therefore, it is known that production cannot be performed for a long time

比較例3係依據專利文獻3(日本特開2011-184235號公報)記載的製造方法,光觸媒活性與粉末產物之收率高。 In Comparative Example 3, the photocatalyst activity and the yield of the powder product were high in accordance with the production method described in Patent Document 3 (JP-A-2011-184235).

比較例1、2係較日本特開2011-184235號公報之製造方法,第1可燃性氣體之溫度高,故金紅石比例升高,光觸媒活性低。 In Comparative Examples 1 and 2, the manufacturing method of the Japanese Laid-Open Patent Publication No. 2011-184235, the temperature of the first combustible gas is high, so the rutile ratio is increased and the photocatalytic activity is low.

比較例4係完全未流通第1可燃性氣體,故第2可燃性氣體之氧之一部份逆流至第2中空內筒開口部27,變得容易流入,第1、第2中空內筒石英管產生氧化鈦附著物,因流路阻塞而石英玻璃破損。 In the comparative example 4, the first flammable gas is not circulated at all, and therefore, one of the oxygen of the second flammable gas flows back to the second hollow inner cylinder opening 27, and it is easy to flow, and the first and second hollow inner cylinders are quartz. The tube produces titanium oxide deposits, and the quartz glass is broken due to blockage of the flow path.

對此,經預熱後之含有四氯化鈦氣體及第1氣體G2中不含氧、水蒸氣之實施例1~12,在第1、第2中空內筒石英管未發生氧化鈦附著物,得知可以95%以上之高收率,長時間至少總共100小時生產。 On the other hand, in Examples 1 to 12 in which the titanium tetrachloride gas and the first gas G2 were not contained in the first gas G2, the titanium oxide deposits did not occur in the first and second hollow inner cylinder quartz tubes. It is known that it can be produced in a high yield of 95% or more and at least 100 hours in a long time.

實施例1~4中,藉由改變第1氣體G2之流量,改變第1區B中之第1合流氣體之滯留時間,進行所得之氧化鈦粒子之特性比較。 In Examples 1 to 4, by changing the flow rate of the first gas G2, the residence time of the first merging gas in the first region B was changed, and the characteristics of the obtained titanium oxide particles were compared.

相對於實施例1之32毫秒,增長為47毫秒(實施例3)、75毫秒(實施例4)時,金紅石比例由4%若干增加為6%,光觸媒活性若干降低。相反地,縮短為27毫秒(實施例2)時,金紅石比例若干降低,但是光觸媒活性若干降低。 With respect to 32 milliseconds of Example 1, when the growth was 47 milliseconds (Example 3) and 75 milliseconds (Example 4), the rutile ratio was increased from 4% to 6%, and the photocatalytic activity was somewhat lowered. Conversely, when shortened to 27 milliseconds (Example 2), the rutile ratio decreased somewhat, but the photocatalytic activity decreased somewhat.

實施例1、5~7中,藉由改變四氯化鈦之流量,改變 第1合流氣體中之四氯化鈦濃度(體積%),進行所得之氧化鈦粒子之特性比較。相對於實施例1之3.8%,第1合流氣體中之四氯化鈦濃度為0.6%的實施例5之BET值增加,光觸媒活性若干升高。相對於實施例1之3.8%,第1合流氣體中之四氯化鈦濃度為5.9%(實施例6)、13.6%(實施例7)提高濃度時,BET值由14m2/g降低至9m2/g,金紅石比例由4%上升至8%的結果,光觸媒活性降低。藉此,第1合流氣體中之四氯化鈦濃度較佳為0.1~20體積%,更佳為0.5~10體積%,又更佳為0.5~5體積%。 In Examples 1 and 5 to 7, the concentration of titanium tetrachloride in the first merging gas was changed by changing the flow rate of titanium tetrachloride, and the characteristics of the obtained titanium oxide particles were compared. With respect to 3.8% of Example 1, the BET value of Example 5 in which the concentration of titanium tetrachloride in the first merging gas was 0.6% was increased, and the photocatalytic activity was somewhat increased. With respect to 3.8% of Example 1, when the concentration of titanium tetrachloride in the first merging gas was 5.9% (Example 6) and 13.6% (Example 7), the BET value was lowered from 14 m 2 /g to 9 m. 2 / g, the rutile ratio increased from 4% to 8%, and the photocatalytic activity decreased. Thereby, the concentration of titanium tetrachloride in the first merging gas is preferably from 0.1 to 20% by volume, more preferably from 0.5 to 10% by volume, still more preferably from 0.5 to 5% by volume.

實施例1、8中,改變第1氣體G2之預熱溫度,進行所得之氧化鈦粒子之特性比較。相對於第1氣體G2之預熱溫度設為1010℃的實施例1,設為900℃的實施例8,金紅石比與實施例1相同,可得到光觸媒活性比較高的結果。 In Examples 1 and 8, the preheating temperature of the first gas G2 was changed, and the characteristics of the obtained titanium oxide particles were compared. In Example 1 in which the preheating temperature of the first gas G2 was 1010 ° C and the example 8 was 900 ° C, the rutile ratio was the same as in Example 1, and the photocatalytic activity was relatively high.

欲由實施例1、8得到高的光觸媒活性時,第1氣體G2之預熱溫度較佳為800℃以上1050℃以下之範圍,更佳為850℃以上1050℃以下之範圍。 In order to obtain high photocatalytic activity from Examples 1 and 8, the preheating temperature of the first gas G2 is preferably in the range of 800 ° C to 1050 ° C, more preferably in the range of 850 ° C to 1050 ° C.

使用實施例1、8~10,改變第2氣體G3之預熱溫度,進行所得之氧化鈦粒子之特性比較。相對於第1氣體G2之預熱溫度設為900℃、第2氣體G3之預熱溫度設為1030℃的實施例8,而將第1氣體G2之預熱溫度設為900℃、第2氣體G3之預熱溫度設為950℃的實施例9,金紅石比例有若干降低,但是光觸媒活性若干降低。 將第2氣體G3之預熱溫度設為1100℃的實施例10,相較於設為1030℃的實施例1時,金紅石比例升高的結果,十面體比例降低,光觸媒活性降低。 Using Examples 1 and 8 to 10, the preheating temperature of the second gas G3 was changed, and the characteristics of the obtained titanium oxide particles were compared. The preheating temperature of the first gas G2 is 900 ° C, the preheating temperature of the second gas G3 is 1030 ° C, and the preheating temperature of the first gas G2 is 900 ° C and the second gas. In Example 9, in which the preheating temperature of G3 was set to 950 ° C, the rutile ratio was somewhat lowered, but the photocatalytic activity was somewhat lowered. In Example 10 in which the preheating temperature of the second gas G3 was 1100 ° C, the ratio of rutile was lowered as compared with Example 1 at 1030 ° C, and the photocatalytic activity was lowered.

因此,第2氣體G3之預熱溫度較佳為900℃以上1100℃以下之範圍,更佳為950℃以上1050℃以下之範圍。 Therefore, the preheating temperature of the second gas G3 is preferably in the range of 900 ° C to 1100 ° C, more preferably in the range of 950 ° C to 1050 ° C.

使用實施例1、11、12,改變含有金屬氯化物之氣體G1之溫度,進行所得之氧化鈦粒子之特性比較。相對於實施例1之880℃,提高至980℃(實施例11)時,金紅石比例由4%若干增加至5%,光觸媒活性降低。 Using Examples 1, 11, and 12, the temperature of the metal chloride-containing gas G1 was changed, and the characteristics of the obtained titanium oxide particles were compared. With respect to 880 ° C of Example 1, when the temperature was increased to 980 ° C (Example 11), the rutile ratio was increased from 4% to 5%, and the photocatalytic activity was lowered.

相反地,降至650℃時,金紅石比例由4%降至3%,可得到光觸媒活性較高的結果。 Conversely, when the temperature is lowered to 650 ° C, the rutile ratio is reduced from 4% to 3%, and the photocatalytic activity is higher.

因此,含有金屬氯化物之氣體G1之預熱溫度較佳為600℃以上1000℃以下之範圍,更佳為600℃以上950℃以下之範圍,又更佳為800℃以上950℃以下之範圍。 Therefore, the preheating temperature of the metal chloride-containing gas G1 is preferably in the range of 600 ° C to 1000 ° C, more preferably in the range of from 600 ° C to 950 ° C, still more preferably in the range of from 800 ° C to 950 ° C.

使用實施例1、8、11、12,改變第1合流氣體之溫度,進行所得之氧化鈦粒子之特性比較。 Using Examples 1, 8, 11, and 12, the temperature of the first merging gas was changed, and the characteristics of the obtained titanium oxide particles were compared.

實施例8係藉由將第1氣體G2之預熱溫度降至比實施例1低,以降低第1合流氣體之溫度。具體而言,實施例1中,相對於第1合流氣體之溫度設為979℃,而實施例8中,第1合流氣體之溫度降至895℃,但是可得到比較高的光觸媒活性。 In the eighth embodiment, the temperature of the first merging gas is lowered by lowering the preheating temperature of the first gas G2 to be lower than that of the first embodiment. Specifically, in Example 1, the temperature of the first merging gas was 979 ° C, and in Example 8, the temperature of the first merging gas was lowered to 895 ° C, but a relatively high photocatalytic activity was obtained.

實施例12係藉由將含有金屬氯化物之氣體G1之預熱溫度降至比實施例1低,以降低第1合流氣體 之溫度。具體而言,實施例1中,相對於第1合流氣體之溫度設為979℃,而實施例12中,將第1合流氣體之溫度設為925℃,但是可得到比較高的光觸媒活性。 Embodiment 12 reduces the first combined gas by lowering the preheating temperature of the metal chloride-containing gas G1 to be lower than that of the first embodiment. The temperature. Specifically, in Example 1, the temperature of the first merging gas was 979 ° C, and in Example 12, the temperature of the first merging gas was 925 ° C, but a relatively high photocatalytic activity was obtained.

實施例11係藉由將含有金屬氯化物之氣體G1之預熱溫度提高至比實施例1高,以提高第1合流氣體之溫度。相對於實施例1中,第1合流氣體之溫度設為979℃的情形,金紅石比例為4%,而實施例11中,第1合流氣體之溫度提高至1003℃的情形,金紅石比例也上升至5%,光觸媒活性降低。 In the eleventh embodiment, the preheating temperature of the metal chloride-containing gas G1 is raised to be higher than that of the first embodiment to increase the temperature of the first merging gas. In the first embodiment, when the temperature of the first merging gas is 979 ° C, the rutile ratio is 4%, and in the eleventh embodiment, the temperature of the first merging gas is increased to 1003 ° C, and the rutile ratio is also When it rises to 5%, the photocatalytic activity decreases.

因此,第1合流氣體之溫度較佳為800℃以上1050℃以下之溫度範圍,更佳為850℃以上1000℃以下之溫度範圍,又更佳為900℃以上1000℃以下。 Therefore, the temperature of the first merging gas is preferably a temperature range of 800 ° C or more and 1050 ° C or less, more preferably 850 ° C or more and 1000 ° C or less, and still more preferably 900 ° C or more and 1000 ° C or less.

實施例1、9、10中,改變第2合流氣體之溫度,進行所得之氧化鈦粒子之特性比較。相對於實施例1中,第2合流氣體之溫度設為1020℃,而實施例9中,將第2合流氣體之溫度降至939℃,但是光觸媒活性有若干降低。 In Examples 1, 9, and 10, the temperature of the second merging gas was changed, and the characteristics of the obtained titanium oxide particles were compared. In the first embodiment, the temperature of the second merging gas was set to 1020 ° C, and in the ninth embodiment, the temperature of the second merging gas was lowered to 939 ° C, but the photocatalytic activity was somewhat lowered.

又,相對於實施例1中,第2合流氣體之溫度設為1020℃的情形,金紅石比例為4%,而實施例10中,第2合流氣體之溫度提高至1076℃的情形,金紅石比例上升至12%,光觸媒活性大幅降低。 Further, in the first embodiment, when the temperature of the second merging gas is 1020 ° C, the rutile ratio is 4%, and in the case 10, the temperature of the second merging gas is increased to 1076 ° C, rutile. The proportion rose to 12% and the photocatalytic activity was greatly reduced.

因此,第2合流氣體之溫度較佳為800℃以上1100℃以下之溫度範圍,更佳為800℃以上1050℃以下之溫度範圍,又更佳為850℃以上1050℃以下。 Therefore, the temperature of the second merging gas is preferably a temperature range of 800 ° C or more and 1100 ° C or less, more preferably a temperature range of 800 ° C or more and 1050 ° C or less, and still more preferably 850 ° C or more and 1050 ° C or less.

〔產業上之可利用性〕 [Industrial Applicability]

本發明係有關金屬氧化物粒子之製造方法及其之製造裝置,特別是有關可長時間生產具有光觸媒活性高的氧化鈦之氧化鈦粒子之製造方法者,在光觸媒產業等,具有可利用性。 The present invention relates to a method for producing a metal oxide particle and a device for producing the same, and particularly to a method for producing a titanium oxide particle having a high photocatalytic activity of titanium oxide for a long period of time, and having availability in a photocatalyst industry or the like.

1‧‧‧中空外筒 1‧‧‧ hollow outer cylinder

1a‧‧‧上游側 1a‧‧‧ upstream side

1b‧‧‧下游側 1b‧‧‧ downstream side

2‧‧‧隔熱材(陶瓷纖維) 2‧‧‧Insulation material (ceramic fiber)

3‧‧‧產物回收部 3‧‧‧Product Recycling Department

3a‧‧‧排氣幫浦 3a‧‧‧Exhaust pump

3b‧‧‧壓力調整閥 3b‧‧‧Pressure adjustment valve

4‧‧‧第1中空內筒 4‧‧‧1st hollow inner tube

4a‧‧‧上游側 4a‧‧‧ upstream side

4b‧‧‧下游端(第1合流地點) 4b‧‧‧ downstream end (1st junction location)

5‧‧‧第2中空內筒 5‧‧‧2nd hollow inner tube

5a‧‧‧上游側 5a‧‧‧ upstream side

5b‧‧‧下游端(第2合流地點) 5b‧‧‧ downstream end (2nd merge point)

6‧‧‧排出管 6‧‧‧Draining tube

11‧‧‧反應管 11‧‧‧Reaction tube

15‧‧‧第1導管 15‧‧‧1st catheter

16‧‧‧第2導管 16‧‧‧2nd catheter

24‧‧‧第1中空內筒開口部 24‧‧‧1st hollow inner tube opening

25、26‧‧‧環狀開口部 25, 26‧‧‧ annular opening

27‧‧‧第2中空內筒開口部 27‧‧‧2nd hollow inner cylinder opening

28‧‧‧中空外筒開口部 28‧‧‧ hollow outer cylinder opening

101‧‧‧金屬氧化物粒子之製造裝置 101‧‧‧Manufacturing device for metal oxide particles

A‧‧‧第2反應區 A‧‧‧2nd reaction zone

B‧‧‧第1區 B‧‧‧District 1

G1‧‧‧含有金屬氯化物之氣體 G1‧‧‧Gas containing metal chlorides

G2‧‧‧第1氣體 G2‧‧‧1st gas

G3‧‧‧第2氣體 G3‧‧‧2nd gas

X‧‧‧預熱區域 X‧‧‧Preheating area

Y‧‧‧預熱區域 Y‧‧‧Preheating area

Z‧‧‧預熱區域 Z‧‧‧Preheating area

Claims (14)

一種金屬氧化物粒子之製造方法,其係含有下述步驟之金屬氧化物粒子之製造方法,前述步驟係在反應管內,使經預熱後之含有金屬氯化物之氣體與不含前述金屬氯化物之經預熱後之第1氣體在第1合流地點合流,作為第1合流氣體,使不含前述金屬氯化物之經預熱後之第2氣體與該第1合流氣體,在離開比前述第1合流地點更下游側之第2合流地點合流,作為第2合流氣體的步驟,含有前述金屬氯化物之氣體及前述第1氣體之兩方均不含氧、水蒸氣,前述第2氣體至少含有氧,藉由將前述第1氣體之預熱溫度設為含有前述金屬氯化物之氣體之預熱溫度以上的溫度,使前述第1氣體在前述第1合流地點合流,由前述第1合流地點至前述第2合流地點之間(稱為第1區)中,再加熱經預熱後之含有前述金屬氯化物之氣體,藉由將前述第2氣體之預熱溫度設為前述第1合流氣體之溫度以上的溫度,與前述第1合流氣體合流,由前述第2合流地點在下游側,再加熱前述第1合流氣體。 A method for producing metal oxide particles, comprising a method for producing a metal oxide particle having a step of: preheating a metal chloride-containing gas after preheating and not containing the metal chloride The first gas after the preheating of the compound is merged at the first joining point, and the second combined gas which is not preheated without the metal chloride is separated from the first combined gas as the first combined gas. The second merging point merges at the second merging point on the downstream side, and as the second merging gas, the gas containing the metal chloride and the first gas do not contain oxygen or water vapor, and the second gas is at least The first gas is merged at the first junction point by the preheating temperature of the first gas, and the temperature of the preheating temperature of the first gas is equal to or higher than the preheating temperature of the gas containing the metal chloride, and the first confluence point is Reheating the preheated gas containing the metal chloride to the second merging point (referred to as the first zone), and setting the preheating temperature of the second gas to the first merging gas It Degrees above the temperature, and the first merged gas confluence by the second merging point on the downstream side, the first reheat merged gas. 如申請專利範圍第1項之金屬氧化物粒子之製造方法,其中前述金屬氯化物為四氯化鈦,前述金屬氧化物粒子為氧化鈦粒子。 The method for producing a metal oxide particle according to the first aspect of the invention, wherein the metal chloride is titanium tetrachloride, and the metal oxide particles are titanium oxide particles. 如申請專利範圍第2項之金屬氧化物粒子之製造方法,其中前述氧化鈦粒子為十面體氧化鈦粒子。 The method for producing metal oxide particles according to the second aspect of the invention, wherein the titanium oxide particles are decahedral titanium oxide particles. 如申請專利範圍第1~3項中任一項之金屬氧化物 粒子之製造方法,其中含有前述金屬氯化物之氣體之預熱溫度為600℃以上1000℃以下。 Metal oxides as claimed in any of claims 1 to 3 In the method for producing particles, the preheating temperature of the gas containing the metal chloride is 600 ° C or more and 1000 ° C or less. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第1合流氣體之溫度為800℃以上1050℃以下。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the temperature of the first merging gas is 800 ° C or more and 1050 ° C or less. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第2合流氣體之溫度為800℃以上1100℃以下。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the temperature of the second merging gas is 800 ° C or more and 1100 ° C or less. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第1氣體之預熱溫度為800℃以上1050℃以下。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the preheating temperature of the first gas is 800 ° C or more and 1050 ° C or less. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第2氣體之預熱溫度為900℃以上1100℃以下。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the preheating temperature of the second gas is 900 ° C or more and 1100 ° C or less. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中含有前述金屬氯化物之氣體含有氮氣。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the gas containing the metal chloride contains nitrogen. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第1氣體含有選自由氮氣及氬所成群之1種以上的氣體。 The method for producing a metal oxide particle according to any one of claims 1 to 3, wherein the first gas contains one or more gases selected from the group consisting of nitrogen gas and argon gas. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第2氣體含有氧氣體及選自由氮氣、氬及水蒸氣所成群之1種以上的氣體。 The method for producing a metal oxide particle according to any one of claims 1 to 3, wherein the second gas contains an oxygen gas and one or more gases selected from the group consisting of nitrogen gas, argon gas and water vapor. 如申請專利範圍第2或3項之金屬氧化物粒子之 製造方法,其中前述第1合流氣體所含有之前述四氯化鈦之濃度設為0.1~20體積%。 Metal oxide particles as claimed in claim 2 or 3 In the production method, the concentration of the titanium tetrachloride contained in the first merging gas is 0.1 to 20% by volume. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第1合流氣體在前述第1區滯留的時間設為2~100毫秒。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the time during which the first merging gas stays in the first region is 2 to 100 milliseconds. 如申請專利範圍第1~3項中任一項之金屬氧化物粒子之製造方法,其中前述第2合流氣體之雷諾數設為10~10000。 The method for producing metal oxide particles according to any one of claims 1 to 3, wherein the Reynolds number of the second merging gas is 10 to 10,000.
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