TW201634295A - Transfer apparatus and transfer method - Google Patents

Abstract

This invention makes a first plate body SB abut a second plate body BL. Being installed with an upper end abutting a lower surface of the second plate body BL in a portion that is closer to a center of the second plate body BL than a portion where a roller component 431 initially abuts, a supporting component 441 supports the second plate body BL from below. The supporting component 441 enables separate abutting with respect to a lower surface of the second plate body BL. As the supporting component 441 supports the second plate body BL, the roller component 431 abuts the second plate body BL to push the second plate body BL against the first plate body SB. The roller component 431 pushes the second plate body BL against the first plate body SB while moving along the lower surface of the second plate body BL.

Description

Transfer device and transfer method

The present invention relates to a transfer device and a transfer method in which two sheet-like members are brought into contact with each other to transfer a transfer object from one plate-like body to the other plate-like body.

As a technique for forming a pattern or a film on a plate-like body such as a glass substrate or a semiconductor substrate, there is a technique in which two plate-like bodies are brought into contact with each other, and a pattern or a film which is carried on a main surface of one plate-like body is The transfer material is transferred to another plate. For example, in the technique described in Japanese Laid-Open Patent Publication No. 2014-144628 (Patent Document 1), the blanket having a surface-supporting pattern is disposed opposite to the substrate, and the long roller is used. The component pushes up the blanket to abut the substrate. Further, while pushing the blanket, the roller member is moved along the blanket, whereby the blanket is in close contact with the substrate, and the pattern is transferred from the blanket to the substrate.

In the technique of abutting the two plate-like members held in a horizontal posture by the pressing of the roller member, in order to contact the roller member, it is necessary to open the center portion of the lower surface of the lower plate-shaped body. The state remains. However, in such a holding state, the plate-like body is deflected downward by its own weight, and a positional displacement occurs between the plate-like body and the other plate-like body, and it is difficult to accurately control the transfer position of the transferred object. In particular, in recent years, as the size of the plate body has increased, its self-weight has also increased, and such a problem has become more and more obvious.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a technique capable of suppressing a positional shift due to deflection of a plate-like body in a transfer device and a transfer method in which two plate-like members are in contact with each other. In addition, the position of the two plate-shaped bodies is accurately abutted.

In order to achieve the above object, an aspect of the present invention provides a transfer device including: a first holding mechanism that maintains a state in which a surface of a first plate-shaped body is open to a horizontal posture; and a second holding mechanism that holds a peripheral portion of the second plate-shaped body and the upper surface of the second plate-shaped body is adjacent to the lower surface of the first plate-shaped body and facing the upper surface of the second plate-shaped body a horizontal posture in which the side is open to a central portion of the lower surface of the first plate-shaped body, and the second plate-shaped body is held; and the roller member has a roll shape extending along a lower surface of the second plate-shaped body. The second plate-shaped body is pressed against the lower surface of the second plate-shaped body while being in contact with the lower surface of the second plate-shaped body, and the second plate-shaped body is pressed against the first plate-shaped body. Moving along a lower surface of the second plate-shaped body; and a supporting member configured to be separable from the lower surface of the second plate-shaped body and abutting against the second plate-shaped body by the upper end Supporting the second plate-shaped body from below on the lower surface; and far from the roller member In the state of the second plate-shaped body, the support member is in contact with the first portion of the lower surface of the second plate-shaped member at a position closer to the center of the second plate-shaped body than the portion where the roller member first abuts. The second plate-shaped body is supported by the lower surface of the plate-like body, and the roller member starts to abut against the second plate-shaped body supported by the support member, and moves along the lower surface of the second plate-shaped body.

Further, in order to achieve the above object, another aspect of the present invention is a transfer method comprising: a holding step of maintaining a state in which a surface of the first plate-shaped body is open to a horizontal posture to maintain a second plate shape a peripheral portion of the body and the upper surface of the second plate-shaped body is adjacent to and facing the lower surface of the first plate-shaped body, and the upper surface of the second plate-shaped body is on the upper surface side and the first surface a horizontal posture in which the plate-shaped body is open to the central portion of the lower surface to hold the second plate-shaped body; and a roller disposing step of disposing the roller member away from the second plate shape a position of the body, wherein the roller member has a roll shape extending along a lower surface of the second plate-shaped body, and is configured to be movable along a lower surface of the second plate-shaped body; and a supporting step for supporting the member The upper end abuts against the lower surface of the second plate-shaped body at a position closer to the center of the second plate-shaped body than the roller member, and supports the second plate-shaped body from below, and the support member is configured to be capable of being opposed to The lower surface of the second plate-shaped body is separated from the surface; and the transfer step is such that the roller member starts to abut against the second plate-shaped body supported by the support member, and the second plate-shaped body is pressed against The first plate-shaped body moves along the lower surface of the second plate-shaped body.

In the above-described configuration, the roller member is moved to the first plate-like body while the second plate-shaped body is pressed against the first plate-shaped body, whereby the first plate-shaped body and the second plate-shaped body are in close contact with each other. At this time, before the roller member abuts against the second plate-shaped body, the support member abuts against the lower surface of the second plate-shaped body at the side closer to the center of the second plate-shaped body than the roller member, thereby supporting the second Plate-like body. In this state, the roller member abuts against the second plate-shaped body and presses the second plate-shaped body against the first plate-shaped body.

The second plate-like body in which the peripheral edge portion is held and the central portion of the lower surface is opened is deflected downward by the central portion due to its own weight. As a result, the horizontal position of each of the second plate-shaped members tends to be shifted toward the center side of the second plate-shaped body as compared with the state of being held in the flat posture. In the above case, positional displacement occurs between the two plate-like bodies, and the transfer position of the transferred object is shifted.

According to the inventors of the present invention, the amount of shift of the transfer position is substantially determined by the amount of positional deviation between the first plate-shaped body and the second plate-shaped body in the region where the first plate-shaped body abuts. In other words, the positional deviation of the first plate-shaped body and the second plate-shaped body in the region where the first plate-shaped body is in contact with each other is sufficiently suppressed, and the positional shift can be suppressed over the entire transfer range.

Therefore, in the present invention, before the roller member abuts against the second plate-shaped body, the support member abuts against the second plate-like body on the center side of the second plate-shaped body with respect to the roller member, and supports the second plate shape from below. body. Therefore, the second plate-like system is supported by the support member from the second holding means that supports the peripheral edge portion of the second plate-like body so as to be spaced apart from the first position of the roller member. Therefore, at the position where the roller member first comes into contact, the deflection of the second plate-shaped body becomes small, and the horizontal direction The positional offset is also suppressed. In this state, the roller member abuts against the second plate-shaped body and presses against the first plate-like body, whereby the first plate-shaped body and the second plate can be suppressed even if the roller member moves later. The positional deviation of the horizontal direction of the shape increases. As a result, the transfer position shift can be suppressed over the entire transfer range.

According to the invention, the portion of the second plate-shaped body that is initially in contact with the roller member is supported by the second holding mechanism and the support member so as to sandwich the portion, thereby suppressing the deflection. In the state in which the positional deviation in the horizontal direction due to the deflection is suppressed, the roller member presses the second plate-shaped body against the first plate-shaped body, thereby suppressing the position of the subsequent roller member when the roller member is moved. The offset increases. As a result, the position of the two plate-like bodies can be accurately contacted, and the transferred object can be accurately transferred to a specific transfer position.

1‧‧‧Transfer device

2‧‧‧Upper platform block

3‧‧‧ Lower platform block

4‧‧‧Transfer roller block

5‧‧‧ Roller Drive Department

9‧‧‧Control unit

21‧‧‧Upper platform (1st holding institution)

21a‧‧‧ (on the platform) lower surface (abutment surface)

22‧‧‧ beam parts

23‧‧‧ platform lifting mechanism

31‧‧‧Under platform (2nd holding institution, support desk)

31a‧‧‧ (lower platform) upper surface (support surface)

32‧‧‧ pillar

33, 34‧‧‧ Lifting hand unit (auxiliary support organization)

36‧‧‧Alignment platform

37‧‧‧Alignment mechanism (alignment mechanism)

43‧‧‧roll unit

44‧‧‧ Lifter unit

45‧‧‧Board parts (moving parts)

46‧‧‧lift unit

51‧‧‧rails

52‧‧‧Rolling screw mechanism

91‧‧‧ Platform Lift Control Department

92‧‧‧Adsorption Control Department

93‧‧‧Hand Lift Control Department

94‧‧‧Alignment control unit (alignment mechanism)

95‧‧‧Roller Lift Control Department

96‧‧‧ Lifter Lift Control Department

97‧‧‧Rolling shift control department

231‧‧‧Support parts

232‧‧‧Support parts

233‧‧‧Rolling screw

234‧‧‧Motor

235‧‧‧ Nut Department

236‧‧‧Coupling

311‧‧‧ openings

312‧‧‧Adsorption tank

331~334, 341~344‧‧‧ Lifting hand (auxiliary support parts)

335‧‧‧ Drive Department

345‧‧‧ Drive Department

431‧‧‧Transfer roller (roller part)

441‧‧‧ Lifting piece (supporting parts)

441a‧‧‧ (lifting piece) upper surface (abutment part)

442‧‧‧Frame

443‧‧‧Rolling screw

444‧‧‧ Nut Department

445‧‧ ‧motor

446‧‧‧Gap sensor (gap detection mechanism)

461‧‧‧ Lifting film

462‧‧‧ Arm

463‧‧‧ Lifter lifting mechanism

471‧‧‧ Lifting roller (supporting parts)

521‧‧‧Support parts

522‧‧‧Support parts

523‧‧‧Ball screw

524‧‧ ‧motor

525‧‧‧ Nut Department

526‧‧‧Coupling

BL‧‧‧ blanket (2nd plate)

L1‧‧‧ Straight line

L2‧‧‧ Straight line

PT‧‧‧ pattern

PP‧‧ version

R1‧‧‧ area

SB‧‧‧Substrate (1st plate)

X, Y, Z‧‧‧ coordinate axis

Z1‧‧‧ deflection

Z2‧‧‧ deflection

△Z‧‧‧ deflection

Fig. 1 is a side view schematically showing an embodiment of a transfer device of the present invention.

Fig. 2 is a view showing the configuration of a main portion of the transfer device.

3A and 3B are views showing a transfer roller block.

4A and 4B are views showing the positional relationship between the transfer roller block and the elevator unit.

5A and 5B are views for explaining the problem of the deflection of the blanket.

6A to 6C are views showing the relationship between the flexing of the blanket and the shift of the transfer position.

Fig. 7 is a flow chart showing a transfer process by the transfer device.

8A to 8D schematically show first to fourth views of the positions of the respective portions during the transfer process.

9A to 9D schematically show fifth to eighth views of the positions of the respective portions in the transfer process.

10A and 10B are views showing a modified example of the lifter unit.

11A to 11C are views showing another modification of the lifter unit.

Fig. 1 is a side view schematically showing an embodiment of a transfer device of the present invention. 2 is a view showing the configuration of a main portion of the transfer device. In order to uniformly represent the directions in the respective figures, as shown in Fig. 1, the XYZ orthogonal coordinate axes are set. Here, the XY plane represents a horizontal plane, and the Z axis represents a vertical axis. In more detail, the (+Z) direction indicates the vertical direction.

This transfer device 1 has a structure in which an upper deck block 2, a lower deck block 3, and a transfer roller block 4 are attached to a main frame (not shown). Further, the transfer device 1 has a control unit 9, and the control unit 9 controls a specific operation of each unit in accordance with a processing program stored in advance.

First, the overall configuration of the device 1 will be described. In addition, as for the structure of the detail of the upper platform block 2 and the lower platform block 3, for example, the upper platform block and the lower platform block described in the above-mentioned Patent Document 1 (Japanese Patent Laid-Open Publication No. 2014-144628) can be used. Explain its outline.

The transfer device 1 is a device for patterning by abutting the blanket BL held by the lower deck block 3 and the plate PP or the substrate SB held by the upper deck block 2 against each other. The pattern forming process using the apparatus 1 is more specifically described below. First, the coating layer carried on the blanket BL is patterned by patterning the blanket PP which is uniformly coated with the pattern forming material against the pattern to be formed (patterning treatment) ). Then, by patterning the patterned blanket BL and the substrate SB, the pattern carried on the blanket BL is transferred to the substrate SB (transfer processing). Thereby, a desired pattern is formed on the substrate SB.

As described above, the transfer device 1 can be used for both the patterning process and the transfer process in the pattern forming process of forming a specific pattern on the substrate SB. However, it can also be used to take care of only one of these processes. Moreover, it can also be used for the purpose of transferring the film carried on the blanket BL to the substrate SB. Hereinafter, the configuration and operation of the apparatus will be described on the premise that the pattern or film formed on the surface of the blanket BL is transferred to the substrate SB. However, the operation in the patterning process can also be explained by replacing the substrate SB with the plate PP.

The upper stage block 2 is provided with a stage 21 above the substrate holding surface 21a whose lower surface is flat. The upper platform 21 is mounted on the lower portion of the beam member 22 extending in the Y direction, and the base member 22 is used. The board holding surface 21a is maintained in a horizontal posture. The beam member 22 is held up and down in the vertical direction (Z direction) by the pair of platform lifting mechanisms 23 and 23 disposed in the Y direction. Thereby, the upper platform 21 can move in the Z direction.

In the present embodiment, a ball screw mechanism is used as an example of the platform lifting mechanism 23, but the invention is not limited thereto. The platform lifting mechanism 23 includes a ball screw 233 that is rotatably supported by the main frame by the support members 231 and 232, a motor 234 that rotates the ball screw 233, and a nut portion 235 that is attached to the ball screw 233. The ball screw 233 and the motor 234 are coupled via a coupling 236. The motor 234 is controlled by a platform elevation control unit 91 provided in the control unit 9, and the motor 234 is rotated in accordance with a control signal from the platform elevation control unit 91, whereby the upper platform 21 is moved up and down.

Although not shown in the drawing, an adsorption groove or an adsorption hole is provided on the lower surface (substrate holding surface) 21a of the upper stage 21. The adsorption control unit 92 provided in the control unit 9 supplies a negative pressure to the adsorption tank or the adsorption hole as needed. Thereby, the upper stage 21 can adsorb and hold the upper surface of the substrate SB which is in contact with the substrate holding surface 21a. The planar size of the substrate holding surface 21a is formed to be slightly smaller than the size of the substrate SB to be held.

With the above-described upper platform block 2, the substrate SB is maintained in a horizontal posture. The substrate SB is carried into the apparatus 1 so that the transfer surface to be transferred or the transfer surface of the film faces downward. Further, the platform 21 is lifted and lowered by the platform elevating mechanism 23, and the gap between the blanket BL and the substrate SB held by the platform to be described next is adjusted to a predetermined value.

The lower deck block 3 includes a lower deck 31, and the lower deck 31 is provided with an opening 311 at the center, and the upper surface is a flat and horizontal blanket holding surface 31a. The lower platform 31 is supported by a plurality of struts 32 and is disposed below the upper platform 21. The plane size of the lower stage 31 is larger than the size of the blanket BL to be held, and the opening size of the opening 311 is larger than the plane size of the substrate SB. Thereby, the blanket BL is only in contact with the lower stage 31 at the peripheral edge portion of the lower surface, and the center portion is held by the lower stage 31 while the lower surface is open. An adsorption groove 312 is provided in a region of the upper surface (rubber holding surface) 31a of the lower stage 31 that abuts against the blanket BL. Self-control as needed The adsorption control unit 92 of the unit 9 supplies a negative pressure to the adsorption tank 312. Thereby, the blanket BL is adsorbed and held on the lower stage 31. The blanket BL is held in a horizontal posture so that the pattern to be transferred onto the substrate SB or the supporting surface of the film faces upward.

The struts 32 that hold the lower platform 31 are mounted to the alignment platform 36. The alignment platform 36 is mounted to the main frame via a plurality of alignment mechanisms 37. The alignment mechanism 37 has, for example, a crossed roller bearing mechanism that moves the alignment stage 36 in the horizontal direction (XY direction) and in the θ direction around the Z axis in accordance with a control signal from the alignment control portion 94 provided in the control unit 9. . Thereby, the lower stage 31 moves in the horizontal plane (XY plane), and the relative position of the substrate SB held by the upper stage 21 and the blanket BL held by the lower stage 31 is optimized.

The lower deck block 3 further includes a pair of lifter units 33 and 34, and the pair of lifter units 33 and 34 are disposed to face each other with an interval in the X direction. The lifter unit 33 and the lifter unit 34 have shapes that are symmetrical with respect to the YZ plane, and the configurations thereof are substantially the same.

The lifter unit 33 includes a plurality of (four, for example, four) lifters 331, 332, 333, and 334 that are disposed in the Y direction in order to face the opening 311 of the lower stage 31; and the drive unit 335, which causes the lifters to lift and lower individually. Similarly, the lifter unit 34 includes lifters 341, 342, 343, and 344 which are disposed in the Y direction in the opening portion 311 facing the lower platform 31, and a drive unit 345 which causes the lifters to individually Lifting and lowering. The drive units 335 and 345 are controlled by a hand lift control unit 93 provided in the control unit 9. The drive units 335 and 345 individually control the position in the vertical direction of each of the lifters based on the control signal from the hand lift control unit 93.

Each of the lifters is held at a position on the same plane as the substrate holding surface 31a of the lower stage 31, and is additionally supported by the lower surface of the central portion of the blanket BL of the lower stage 31 while the lower surface is supported. Thereby, it is possible to suppress the deflection of the blanket BL and to support it flat. Further, by retreating to the lower side as needed, interference with the migration of the transfer roller to be described later is avoided.

The transfer roller block 4 is provided with a roller unit 43 and a lifter unit 44. These units 43, 44 are mounted on the upper surface of the plate member 45. The plate member 45 is attached to the main frame via the roller transfer drive unit 5. The roller shift drive unit 5 includes a guide rail 51 that is fixed to the main frame below the lower stage 31 and extends in the Y direction, and a ball screw mechanism 52 that is provided along the guide rail 51. A plate member 45 is attached to the nut portion 525 of the ball screw mechanism 52.

3A and 3B are views showing a transfer roller block. More specifically, FIG. 3A is a perspective view showing the structure of the transfer roller block 4 and the roller shift driving portion 5, and FIG. 3B is a view showing the positional relationship between the transfer roller block 4 and the blanket BL. In the roller travel drive unit 5 that supports the transfer roller block 4, a ball screw mechanism 52 is provided along the guide rail 51. More specifically, the ball screw 523 is supported by the support members 521, 522 provided near the both ends of the guide rail 51, and the ball screw 523 is rotated by the motor 524 via the coupling 526. A nut portion 525 is attached to the ball screw 523. By rotating the motor 524, the nut portion 525 is horizontally moved in the Y direction along the guide rail 51. Accordingly, the transfer roller block 4 supported by the nut portion 525 is horizontally moved in the Y direction.

The roller unit 43 provided in the transfer roller block 4 is provided with a transfer roller 431 formed in a roll shape having a longitudinal direction in the X direction. The transfer roller 431 is supported by the support member 432 and is rotatable about a rotation axis parallel to the X direction. The surface of the transfer roller 431 is formed of an elastic body, for example, a rubber material, and the length of the transfer roller 431 in the X direction is longer than the length of the substrate SB in the X direction.

The arm 433 extends downward from the central portion of the support member 432 in the X direction. The arm 433 is attached to a roller elevating mechanism 434 that elevates and lowers the transfer roller 431. The structure of the roller elevating mechanism 434 is not particularly limited, and for example, a cylinder, a solenoid, a ball screw mechanism, or the like can be used. The roller elevating mechanism 434 is controlled by a roller elevating control unit 95 provided in the control unit 9. The roller elevating mechanism 434 is actuated by the control signal from the roller elevating control unit 95, whereby the transfer roller 431 moves up and down in the vertical direction (Z direction) with respect to the plate member 45.

As shown in FIG. 3B, the transfer roller 431 is moved by the roller elevating mechanism 434, and can be moved up and down between the retracted position indicated by the solid line and the pressed position indicated by the broken line. The retracted position is retracted to be held under the blanket BL of the lower platform 31 and the upper end of the roller is away from the blanket The location of BL. On the other hand, at the pressing position, the upper end of the roller abuts against the lower surface of the blanket BL to push up the blanket BL.

The lifter unit 44 includes a flat plate lifter 441 which extends in parallel with the XZ plane and has a longitudinal direction in the X direction. Regarding the lifter piece 441, the upper surface 441a is finished to be flat, and is supported by the lifter lifting mechanism attached to the plate member 45 to be lifted and lowered. Specifically, the ball screw 443 is attached to the frame 442 which is erected on the plate member 45, and the lift piece 441 is fixed to the nut portion 444 attached to the ball screw 443. The ball screw 443 is rotated by the operation of the motor 445 coupled via the coupling 447. Thereby, the nut portion 444 is moved up and down along the vertical direction (Z direction), and the lifter piece 441 is moved up and down.

The motor 445 is controlled by a lifter lifting control unit 96 provided in the control unit 9. The motor 445 is rotated in accordance with a control signal from the lifter elevation control unit 96, whereby the lifter 441 is moved up and down. Thus, the frame 442, the ball screw 443, the nut portion 444, the motor 445, and the coupling 447 constitute a ball screw mechanism that functions as a lifter lifting mechanism. Further, the lifter lifting mechanism is not limited to such a ball screw mechanism, and various types of drive mechanisms can be used.

As shown in FIG. 3B, the lifting piece 441 can be retracted to the retracted position (solid line) which is held below the blanket BL of the lower stage 31 and away from the blanket BL, and the upper surface 441a by the action of the lifter lifting mechanism. The lifting and lowering movement is performed between the abutting positions (dotted lines) of the lower surface of the blanket BL. The lifter 441 can be lifted and lowered independently of the transfer roller 431. In the abutting position, the upper surface 441a of the lifting piece 441 is positioned at substantially the same Z-direction height as the upper surface 31a of the lower stage 31. Therefore, when the lifting piece 441 is in the abutting position, the upper surface 441a of the lifting piece 441 is located in the same horizontal plane as the upper surface 31a of the lower stage 31. Thereby, the blanket BL in which the lower stage 31 and the lifting piece 441 abuts on the lower surface is supported in a horizontal posture.

A gap sensor 446 is attached to the vicinity of the center in the X direction of the side surface of the lifter 441. The gap sensor 446 measures the gap between the lower surface of the substrate SB and the upper surface of the blanket BL, and for example, an optical interference type distance detector can be used. Furthermore, in this case, The gap sensor 446 is raised and lowered together with the lifter 441. However, the above-described lifting and lowering is not essential as long as the gap between the lower surface of the substrate SB and the upper surface of the blanket BL can be measured in the vicinity of the transfer roller 431. Therefore, for example, a gap sensor can be attached to the plate member 45 or the frame 442, or it can be provided to the upper stage 21.

The roller unit 43 and the lifter unit 44 having the above configuration are attached to the plate member 45, and are integrally moved in the Y direction by the rotation of the motor 524. The motor 524 is controlled by a roller shift control unit 97 provided in the control unit 9. When the motor 524 is rotated in accordance with a control signal from the roller shift control unit 97, the nut portion 525 of the ball screw mechanism 52 moves in the Y direction along the guide rail 51. Therefore, as the nut portion 525 moves, the roller unit 43 and the lifter unit 44 move. As a result, the transfer roller 431 provided on the roller unit 43 travels in the Y direction along the lower surface of the blanket BL. As described above, the guide rail 51 and the ball screw mechanism 52 have a function of moving the transfer roller 431 in the Y direction as a roller transfer mechanism. Further, as described below, when the transfer roller block 4 is moved in the Y direction, the transfer roller 431 abuts against the lower surface of the blanket BL, and on the other hand, the lifter 441 is separated from the lower surface of the blanket BL.

In this way, the transfer roller 431 can perform the lifting operation in the Z direction by the roller lifting mechanism and the moving operation in the Y direction by the roller moving mechanism. Further, the lifting and lowering piece 441 can perform the lifting operation in the Z direction by the lifter lifting mechanism and the moving operation in the Y direction by the roller moving mechanism. When the transfer roller 431 (roller unit 43) and the lifter 441 (lifter unit 44) are moved in the Y direction, the lifter 331 and the like of the lifter units 33 and 34 and the roller unit 43 and the lifter unit 44 are provided. Interference is avoided as described below. In the following description, the positional relationship between the pair of lifters 331, 341 and the roller unit 43 provided in the lifter units 33 and 34 will be described as an example, and the other lifters are also the same.

4A and 4B are views showing the positional relationship between the transfer roller block and the lifter unit. More specifically, FIGS. 4A and 4B are views of the transfer roller block 4 and the lifter units 33 and 34 viewed in the Y direction and the X direction, respectively. As shown in the figure, the roller unit 43 and the lifter unit 44 are moved in the Y direction so that the transfer roller 431 is held along the lower surface of the blanket BL held by the lower stage 31. At X In the direction, the front ends of the oppositely disposed lifting hands 331, 341 are isolated from each other. Further, the arm 433 of the roller unit 43, the roller elevating mechanism 434, and the lifter lifting mechanism (the frame 442, the ball screw 443, the nut portion 444, the motor 445, and the coupling 447) of the lifter unit 44 are moved by the gaps. Therefore, the interference of the roller elevating mechanism 434 with the elevating hands 331, 341 is avoided in construction.

On the other hand, in a state in which the lifters 331, 341 abut or approach the lower surface of the blanket BL, the lifters 331, 341 may be in contact with the transfer roller 431, the support member 432, and the lifter 441. This problem is avoided by the fact that the lifting hands 331, 341 are integrally lowered to the upper surface below the lower surface of the lifting piece 441 and the support member 432. That is, in synchronization with the movement of the roller unit 43 in the Y direction, the lifter units 33 and 34 sequentially evacuate the lift hands 331 (341), 332 (342), and the like to the lower side. Thereby, the transfer roller 431, the support member 432, and the lifter 441 pass through the upper portion such as the lifter 331, and the roller unit 43 and the lifter unit 44 are prevented from interfering with the lifter 331 or the like.

In the present embodiment, the lifter unit 44 is newly provided as compared with the transfer device of the prior art (Japanese Laid-Open Patent Publication No. 2014-144628). The reason for this configuration is that, as described below, the transfer position of the pattern or the like is accurately controlled by suppressing the deflection of the blanket BL when the transfer roller 431 first comes into contact with the blanket BL.

5A and 5B are views for explaining the problem of flexing of the blanket. More specifically, FIG. 5A is a plan view showing the blanket BL supported by the lower stage 31, the lifter 331, and the like, and FIG. 5B is a view schematically showing the amount of deflection of the blanket BL. As shown in FIG. 5A, in the transfer device 1, a blanket BL is placed on the upper surface 31a of the frame-like lower stage 31 of the frame portion SB corresponding to the opening 311 corresponding to the substrate SB. The peripheral portion of the lower surface of the blanket BL abuts and is adsorbed and held on the upper surface 31a of the lower stage 31.

Further, the lifters 331 to 334 and 341 to 344 are brought into contact with the blanket BL having the lower surface of the center portion on the inner side of the peripheral portion from the lower surface, whereby the blanket BL is supported in a horizontal posture. However, the central portion of the blanket BL is only supported by the support hand 331, etc. Supported locally, so inevitably, the unsupported portion is deflected downward. In particular, in the blanket BL having a large planar size of a large substrate, the above problems are remarkable. The reason for this is that, on the principle of the transfer process, although the planar size of the blanket BL is increased, the thickness is not easily increased.

The inventors of the present invention measured the shift amount in the vertical direction (Z direction) of the blanket BL supported by the lower stage 31, the lifter 331, and the like at various positions in the Y direction. As a result, the following is understood. That is, on the straight line L1 of FIG. 5A partially supported by the lifters 331 to 334, as shown by the solid line in FIG. 5B, no displacement is observed at the position of the lifter 331 or the like, but away from the lifter 331 or the like. The position, the shift becomes larger, indicating that the blanket BL is deflected downward. However, the amount of shift is relatively small.

On the other hand, on the straight line L2 of FIG. 5A passing through the approximate center of the blanket BL in the X direction, the amount of deflection gradually increases toward the center portion of the blanket BL. At this time, the deflection amount Z1 at the position Y1 corresponding to the region R1 of the blanket BL that the transfer roller 431 initially abuts is relatively small, but the deflection amount Z2 of the central portion is particularly large.

In the experiment, the pair of lifting hands 331, 341 and the like are integrally formed along the X direction and supported by a continuous hand in the X direction, and the deflection is measured on the straight line L2. In the above case, the dotted line in Fig. 5B As shown, the amount of deflection is greatly reduced.

However, even with the above-described support pattern, the shift amount on the straight line L2 is larger than the measurement result on the straight line L1. It is presumed that the reason is that since the position of the straight line L1 is close to the side of the (+X) side of the lower stage 31, the blanket BL can be supported by the lifting hands 331 to 334 and the lower stage 31 (more specifically, one side) In contrast, the central portion of the blanket BL is not supported by the lower platform 31.

Thus, even in the case where a plurality of lifters 331 and the like which partially abut against the lower surface of the blanket BL are provided, the flexure of the blanket BL is generated in a portion not supported by the above-mentioned members. In particular, in order to make the transfer roller 431 abut, the lower surface of the blanket BL must be opened in advance, so that the position directly above the transfer roller 431 cannot be supported, and it is difficult to reduce the scratch of the portion. song.

6A to 6C are views showing the relationship between the flexing of the blanket and the shift of the transfer position. In the transfer device 1, as shown in FIG. 6A, in a state where the substrate SB is brought close to and in parallel with the blanket BL, the transfer roller 431 pushes up the blanket BL and presses it against the substrate SB. Thereby, the pattern PT on the blanket BL is transferred to the substrate SB. In order to ensure that the pattern transfer position to the substrate SB is appropriate, the alignment operation by the alignment mechanism 37 is performed.

However, when the blanket BL is deflected downward, as shown in FIG. 6B, the peripheral portion of the blanket BL is displaced so as to be pulled toward the center portion. Thereby, a certain point P of the surface of the blanket BL is located at a position shifted by ΔY in the Y direction as compared with the state of no deflection shown by a broken line in Fig. 6B. Since the transfer roller 431 pushes the blanket BL upward, it is in contact with the substrate SB in a state where the point P is shifted by ΔY from the original position. According to the findings of the inventors of the present invention, when the substrate SB and the blanket BL abut each other, the two are strongly adhered to each other via the pattern PT. Therefore, even if the transfer roller 431 moves in the horizontal direction, the level of the substrate SB and the blanket BL The relative position of the direction will hardly change.

Therefore, it can be said that the offset amount of the transfer position, that is, the positional deviation from the substrate SB due to the deflection of the blanket BL is substantially the position of the blanket BL which is initially abutted by the transfer roller 431. The shift is determined. In other words, as long as the positional shift of the blanket BL when the transfer roller 431 is initially contacted can be suppressed, it is possible to suppress the shift of the transfer position of the entire substrate SB. At a position directly above the transfer roller 431 where the transfer roller 431 initially abuts, by reducing the amount of deflection ΔZ of the blanket BL, the positional shift in the horizontal direction can be reduced.

As described above, the amount of deflection changes depending on the support state of the center portion of the blanket BL. Therefore, in the present embodiment, as shown in FIG. 6C, before the transfer roller 431 abuts on the blanket BL, the lifter 441 is placed closer to the (+Y) side of the central portion of the blanket BL than the transfer roller 431. Abuts against the lower surface of the blanket BL. Thereby, the blanket BL which is flexed downward is pushed up and maintained in a horizontal posture. Thereby, it is possible to reduce the deflection of the blanket BL when the transfer roller 431 abuts against the blanket BL, and to reduce the deviation in the Y direction of the abutment position of the substrate SB and the blanket BL. shift.

By causing the transfer roller 431 to abut against the blanket BL in a state where the blanket BL is supported by the lifter 441, the transfer position of the pattern PT of the substrate SB can be offset from the prior art in which the lifter unit 44 is not provided. The shift suppression is less than half.

The lifter piece 441 is a member for maintaining the blanket BL that is deflected downward in a horizontal state, and does not raise the blanket BL beyond the horizontal state. Therefore, when the lifting piece 441 supports the blanket BL, the upper surface 441a is substantially flush with the upper surface 31a of the lower stage 31, and is positioned to abut against the lower surface of the blanket BL.

The positioning control of the lifter 441 in the vertical direction may be set such that the upper surface 441a has the same height as the upper surface 31a of the lower stage 31 by mechanical contact or a teaching operation in advance. Further, the upper stage 21 and the lower stage 31 are adjusted in such a manner that the substrate SB and the blanket BL are opposed to each other with a certain gap therebetween. Thereby, the lifter elevation control unit 96 controls the height of the lifter 441 so that the gap between the substrate SB and the blanket BL at the position near the transfer roller 431 detected by the gap sensor 446 becomes a specific gap amount. The positional alignment of the lifter piece 441 and the lower stage 31 in the height direction can also be performed indirectly. In the operation described below, the output of the gap sensor 446 is used.

Next, a transfer process using the transfer device 1 configured as described above will be described. As described above, the transfer process of transferring a pattern or a film from the blanket BL to the substrate SB will be described here. However, the operation in the patterning process can also be explained by replacing the substrate SB with the plate PP.

Fig. 7 is a flow chart showing the transfer process by the transfer device. 8A to 8D and 9A to 9D schematically show the positions of the respective portions during the transfer process. In the transfer process, first, the substrate SB to be transferred or the film is carried into the apparatus, and is placed on the upper stage 21 (step S101). The upper stage 21 adsorbs and holds the substrate SB in such a manner that the transferred pattern or the transferred surface of the film faces downward. Then, the blanket BL carrying the pattern or film to be transferred to the substrate SB is carried into the apparatus and placed on the lower stage 31 (step S102). The lower stage 31 sucks and holds the blanket BL so that the supporting pattern or the supporting surface of the film faces upward.

Then, each part of the apparatus is positioned at a specific initial position (step S103). Fig. 8A shows the initial positions of the respective parts. The upper stage 21 and the lower stage 31 are close to each other and opposed to each other in such a manner that the substrate SB and the blanket BL are parallel to each other with a certain gap interposed therebetween. Further, the lifters 331, 341 and the like rise to a position where the upper surface is flush with the upper surface of the lower deck 31, and abuts against the lower surface of the blanket BL to support the blanket BL in a horizontal posture. The transfer roller 431 is positioned at a position directly below one end of the substrate SB in the Y direction and is a retracted position spaced downward from the lower surface of the blanket BL. The lifter 441 is also located adjacent to the (+Y) side of the transfer roller 431 and is a retracted position spaced apart from the lower surface of the blanket BL. Then, alignment processing is performed to adjust the horizontal position of the substrate SB and the blanket BL (step S104). That is, the alignment mechanism 37 moves the alignment stage 36 in the horizontal plane as needed, such that the pattern PT carried on the blanket BL or the film and the substrate SB have a predetermined positional relationship in the horizontal direction.

In this state, as shown in FIG. 8B, the lifter piece 441 is raised to the abutment position, and abuts against the lower surface of the blanket BL to support the blanket BL (step S105). Then, the transfer roller 431 is raised to abut against the lower surface of the blanket BL, and then further raised, and the blanket BL is pressed upward (step S106). In a state in which the blanket BL is supported by the lifter 441, the transfer roller 431 presses the blanket BL, thereby suppressing the positional shift of the blanket BL and the substrate SB in the horizontal direction.

By causing the transfer roller 431 to continue to rise after abutting against the lower surface of the blanket BL, as shown in FIG. 8C, the blanket BL is pushed up by the transfer roller 431, and finally the upper surface of the blanket BL abuts against the substrate SB. lower surface. Thereby, the pattern or film PT carried on the upper surface of the blanket BL is in close contact with the substrate SB. The pattern or film PT is pressed against the substrate SB by pushing the blanket BL up by the transfer roller 431. Thereby, the pattern or film PT is transferred to the substrate SB. Since the positional shift of the blanket BL in the horizontal direction is suppressed by the support of the lifter 441, the pattern or film PT is appropriately transferred to a specific position of the substrate SB.

When the substrate SB is brought into contact with the blanket BL by the pressing of the transfer roller 431, as shown in FIG. 8D The lifter piece 441 is moved downward and is separated from the blanket BL (step S107). Then, the transfer roller 431 starts to move in the (+Y) direction (step S108). As shown in FIG. 9A and FIG. 9B, the transfer roller 431 moves in the Y direction while pressing the blanket BL against the substrate SB, whereby the region where the blanket BL and the substrate SB are in close contact with each other via the pattern or the film PT is Y. The direction gradually expands. Thus, the pattern or film PT is sequentially transferred to the substrate SB (transfer process). The transfer roller 431 is raised to a pressing position at which the blanket BL can be pressed with a fixed pressing force, and is moved in the Y direction in this state.

At this time, in order to avoid interference between the lifter mechanisms 33, 34 and the traveling roller unit 43, the lifters 331 (341), 332 (342), 333 (343), and 334 (344) are moved along with the roller unit 43. Decrease in sequence. Further, since the lifter unit 44 moves in the Y direction together with the roller unit 43, it does not interfere with the roller unit 43.

The roller unit 43 continues to move until the transfer roller 431 reaches the end position directly below the other end portion of the substrate SB (step S109). Thereby, as shown in FIG. 9C, the substrate SB as a whole is in contact with the blanket BL, and the transfer of the pattern or the film PT to the substrate SB is completed. At this point of time, the roller unit 43 is stopped from moving, and as shown in FIG. 9D, the roller unit 43 is separated from the blanket BL and retracted to the lower side (step S110). The adhered blanket BL is carried out integrally with the substrate SB (step S111), and the transfer process of the transfer device 1 is completed.

As described above, in the transfer device 1 of the present embodiment, the blanket roller 431 is pushed up against the substrate SB by the transfer roller 431, and the transfer roller 431 is moved in the Y direction, whereby the blanket is used. The pattern or film PT on the BL is transferred to the substrate SB. At this time, before the transfer roller 431 first comes into contact with the blanket BL, the lifter 441 abuts against the lower surface of the blanket BL at a position closer to the center of the blanket BL than the transfer roller 431. Thereby, the deflection of the blanket BL is corrected to bring it close to the horizontal posture. Therefore, it is possible to suppress the position of the transfer roller 431 from being displaced from the position of the substrate SB when it first comes into contact with the blanket BL, thereby maintaining the pattern transfer position accuracy of the substrate SB favorably.

As described above, in the above embodiment, the substrate SB corresponds to the "first plate-shaped body" of the present invention, and the blanket BL corresponds to the "second plate-shaped body" of the present invention. Again, the above embodiment In the state, the upper stage 21 functions as the "first holding means" of the present invention, and the lower surface 21a corresponds to the "abutment surface" of the present invention. Further, the lower stage 31 functions as the "second holding means" and the "supporting table" of the present invention, and the upper surface 31a of the lower stage 31 corresponds to the "supporting surface" of the present invention.

Further, the transfer roller 431 functions as a "roller member" of the present invention, and the lifter 441 functions as a "support member" of the present invention. Further, the upper surface 441a of the lifter 441 corresponds to the "contact portion" of the present invention. Further, the plate member 45 functions as a "moving member" of the present invention, and the gap sensor 446 functions as a "gap detecting mechanism" of the present invention.

Further, in the above-described embodiment, the lifter units 33 and 34 function as the "auxiliary support means" of the present invention, and the lifters 331 to 334 and 341 to 344 each function as the "auxiliary support member" of the present invention. Further, the alignment control unit 94 and the alignment mechanism 37 function as an "alignment mechanism" of the present invention in an integrated manner.

The present invention is not limited to the above-described embodiments, and various modifications may be made in addition to the above embodiments without departing from the scope of the invention. For example, in the transfer device 1 of the above embodiment, the lifter unit 44 moves integrally with the roller unit 43. However, the lifter unit 44 is a mechanism for correcting the deflection of the blanket BL when the transfer roller 431 first comes into contact with the blanket BL, and does not play a special role after the blanket BL abuts against the substrate SB. In this sense, the elevator unit does not need to move integrally with the roller unit 43. For example, it may be configured as follows.

10A and 10B are views showing a modification of the lifter unit. More specifically, FIG. 10A is a view of the transfer roller block including the lifter unit of the modified example viewed from the X direction, and FIG. 10B is a view of the transfer roller block including the lifter unit of the modified example viewed from the Y direction. In FIGS. 10A and 10B, the same components as those in the above-described embodiment are denoted by the same reference numerals, and their description is omitted. The lifter unit 46 of this modification is arranged such that the two sets are different in position in the X direction and face each other. Each of the lifter units 46 includes a lifter 461 having a length in the X direction of about half of the transfer roller 431 and extending in the X direction, an arm 462 extending obliquely downward from the lifter 461, and a lifter lifting mechanism 463. It causes the arm 462 to move up and down in an oblique direction. Lifting The lifter mechanism 463 is fixed to the main frame and does not move together with the roller unit 43.

As shown by the solid line in FIGS. 10A and 10B, in the state where the lifter 461 is positioned at the lower position by the lifter lifting mechanism 463, the upper end of the lifter 461 is located on the lower surface of the support member 432 of the transfer roller 431. Below. Further, in the X direction, the two lifters 461, 461 are relatively spaced apart from each other. Therefore, the lifter unit 46 does not interfere with the movement of the roller unit 43.

On the other hand, when the lifter lifting mechanism 463 is actuated, as shown by the broken line in FIGS. 10A and 10B, the lifter 461 rises obliquely upward with the X-direction component and the Z-direction component, and finally the upper end abuts against the blanket BL. lower surface. At this time, the shape of the lifters 461 and 461 is set such that the heights of the upper ends of the two lifters 461 and 461 are the same, and the interval between the lifters 461 and 461 is extremely small in the X direction. Thereby, the lower stage 31 and the lifting pieces 461 and 461 support the blanket BL before the transfer roller 431 abuts, and the flexure of the blanket BL can be suppressed. Thus, even if a lifter unit that does not move together with the transfer roller 431 is used, the same effects as described above can be obtained.

Further, the lifter unit 46 of the above-described embodiment has a lifter piece 461 which is a sheet member whose upper surface serves as a contact surface. Further, in a state where the lifting sheet 461 supports the blanket BL from below, the blanket BL by the transfer roller 431 is pushed up. In order to prevent the lifting piece 461 from sliding against the lower surface of the blanket BL, the lifting piece 461 is separated from the blanket BL after the blanket BL is pushed up by the transfer roller 431. Alternatively, it may be configured as follows.

11A to 11C are views showing another modification of the lifter unit. More specifically, FIG. 11A is a view in which the transfer roller block including the lifter unit of the modification is viewed from the X direction. 11B and 11C are views showing the operation of the transfer roller block in the modification. In the description of the modifications, the same components as those in the above-described embodiments are denoted by the same reference numerals, and their description is omitted.

As shown in Fig. 11A, the lifter unit 47 of this modification is provided with a cylindrical roll-shaped lift roller 471 which is parallel to the XZ plane and extends in the X direction as a length direction. Stretch. The lift roller 471 is rotatably supported by the support frame 474 around a rotation axis parallel to the X direction, and is lifted and lowered by the lifter lifting mechanism attached to the plate member 45. Specifically, the ball screw 473 is attached to the frame 472 which is erected on the plate member 45, and the nut portion attached to the ball screw 473 is integrated with the support frame 474. The ball screw 473 is rotated by the operation of the motor 475 coupled via the coupling 477, whereby the support frame 474 is moved up and down in the vertical direction (Z direction) to raise and lower the lift roller 471.

The motor 475 is controlled by a lifter lifting control unit 96 provided in the control unit 9. The motor 475 is rotated in accordance with a control signal from the lifter elevation control unit 96, whereby the lift roller 471 moves up and down. As described above, the frame 472, the ball screw 473, the support frame 474, the motor 475, and the coupling 477 constitute a ball screw mechanism that functions as a lifter lifting mechanism. Further, the lifter lifting mechanism is not limited to the above-described ball screw mechanism, and various types of drive mechanisms can be used.

Similarly to the lifter 441 in the above embodiment, the lift roller 471 can be retracted to the retracted position and the upper end portion of the blanket BL held by the lower deck 31 and away from the blanket BL by the operation of the lifter lifting mechanism 441. Lifting and moving between the abutting positions of the lower surface of the blanket BL. The lift roller 471 can be lifted and lowered independently of the transfer roller 431. In the abutment position, the upper end portion of the elevation roller 471 is positioned at substantially the same Z-direction height as the upper surface 31a of the lower platform 31. Therefore, when the elevation roller 471 is in the abutment position, the upper end portion of the elevation roller 471 is located in the same horizontal plane as the upper surface 31a of the lower platform 31. Thereby, the blanket BL in which the lower stage 31 and the elevation roller 471 abuts on the lower surface is supported in a horizontal posture.

As shown in FIG. 11B, in the modified example, the transfer roller 431 performs the push-up of the blanket BL in a state where the lift roller 471 abuts against the lower surface of the blanket BL. Similarly to the lifter piece 441 in the above-described embodiment, the lift roller 471 has a function of holding the blanket BL in a horizontal posture when the blanket roller 431 pushes the blanket BL, thereby preventing the position of the blanket BL from shifting.

Similarly to the above-described embodiment, the transfer roller 431 pushes the blanket BL and presses it against the substrate SB, and then the transfer roller 431 moves in the Y direction. At this time, the same plate as the transfer roller 431 The elevation roller 471 supported by the member 45 also moves integrally with the transfer roller 431 in the Y direction. When the lifting roller 471 is moved away from the blanket BL before the transition, only the shape of the abutting portion of the lifting roller 471 to the blanket BL is different, and the action of the lifting roller 471 does not change in any manner as in the above-described embodiment.

On the other hand, in this modification, as shown in FIG. 11C, the elevation roller 471 can abut against the lower surface of the blanket BL and directly move in the Y direction. The sliding friction against the blanket BL is prevented by rotating the lift roller 471. Further, by supporting the blanket BL in the lift roller 471, even if the lifter 331 or the like is retracted to the lower side in order to perform the roller shift, the flexure of the blanket BL can be suppressed and the posture can be maintained. When the height of the upper end portion of the elevation roller 471 is maintained at the same height as the upper surface 31a of the lower stage 31, the horizontal posture of the blanket BL when the transfer roller 431 is moved can be more stably maintained.

The upper end portion of the elevation roller 471 may protrude slightly upward from the upper surface 31a of the lower stage 31. However, in order to perform the transfer well, it is preferable to prevent the blanket BL from abutting against the substrate SB by pushing up the elevation roller 471. . Therefore, the upper end portion of the elevation roller 471 is located at least below the upper end portion of the transfer roller 431 in the state of the upper push blanket BL, and preferably the elevation roller 471 abuts against the blanket BL at a position lower than the transfer roller 431.

As described above, the "support member" of the present invention may be, for example, a roll-shaped support member in addition to the sheet-shaped support member. In the case where the above-described roll-shaped support member is provided, after the support member is brought into contact with the lower surface of the blanket BL, it is not necessary to further ascend and descend. Thereby, there is no need to separately lift the support member. Therefore, for example, a combination of a mechanism for elevating and lowering the transfer roller 431 and the elevating roller 471 by moving the plate member 45 up and down, and a mechanism for elevating and lowering the transfer roller 431 with respect to the plate member 45 and the elevating roller 471 may be used. Forming a transfer roller block.

Further, in the above embodiment, the roller unit 43 and the lifter unit 44 (or the lifter unit 47) are supported by the roll elevating mechanism and the lifter elevating mechanism provided on the single plate member 45, respectively. The transfer roller 431 and the lifter 441 (or the lift roller 471) can be lifted and lowered independently. Alternatively, it may be constructed such that the roller unit does not have a lift The elevating piece (or the elevating roller) of the elevating mechanism is attached to a plate member that can be moved up and down, and the transfer roller 431 and the elevating piece 441 (or the elevating roller 471) are integrally moved up and down in a specific Z direction range.

Further, in the above embodiment, the gap sensor 446 is provided. However, as described above, the positioning of the lifter 441 can also be controlled by mechanical touch or a predetermined teaching operation, in which case the gap sensing can be omitted. 446.

Further, the lifter piece 441 of the above-described embodiment is a flat member having substantially the same length in the X direction as the transfer roller 431, and is a member covering the opening length of the platform 31 below the X direction. However, since the portion where the deflection of the blanket BL is large is the central portion of the X direction of the blanket BL, it is sufficient to support at least the portion. Therefore, the length of the lift piece 441 in the X direction can also be shorter than that of the transfer roller 431. However, from the viewpoint of preventing deflection between the pair of lifters 331, 341, it is preferable that the length of the lifter 441 is larger than the interval between the lifters 331, 341 in the X direction.

Further, in the above embodiment, the transfer device that transfers the transfer material such as the pattern of the blanket BL to the substrate SB is transferred. However, the technical idea of the present invention is not limited to the transfer device such as the transfer pattern described above, and may be applied to, for example, a technique in which two plate-like members are bonded without a pattern or the like.

In the above-described embodiment, the second holding mechanism has a frame-shaped support table that is open at the center portion corresponding to the central portion of the lower surface of the second plate-shaped body, and the support table is provided. The upper surface abuts against the lower surface of the peripheral edge portion of the second plate-shaped body to serve as a flat support surface for supporting the second plate-shaped body, and the upper surface of the support member is located at the same height as the support surface of the support table to support the second plate-shaped body. . According to the above configuration, since the second plate-shaped body is supported at the same height on both sides of the portion where the roller member first contacts, the horizontal posture of the second plate-shaped body can be maintained during this period, and the deflection can be minimized. .

Further, for example, the roller member may be brought into contact with the second plate-shaped body, and the second plate-shaped body may be pressed against the first plate-shaped body, and then the support member may be separated from the second plate-shaped body, and then the roller member may be configured. Moves along the lower surface of the second plate. The support member is when the roller member abuts against the second plate member The member that maintains the posture of the second plate-shaped body does not have to be in contact with the second plate-shaped body after the roller member abuts against the second plate-shaped body. After the support member is moved away from the second plate-shaped body, the roller member is moved, whereby the support member can be retracted to a position where it does not interfere with the roller member.

Further, for example, the roller member may be integrally moved with the support member. The support member located in front of the roller member in the moving direction of the roller member may become an obstacle when the roller member moves. The above problem does not occur by integrally moving the support member and the roller member. At this time, as long as the support member is separated from the second plate-shaped body, it is possible to prevent the support member from slidingly rubbing against the surface of the second plate-shaped body.

Alternatively, for example, the support member may have a roll shape including an axis parallel to the axis of the roller member, and may be in contact with the support member while being in contact with the lower surface of the second plate-like body at a position lower than the roller member. The ground moves along the lower surface of the second plate-shaped body. In the above configuration, the second plate-shaped body is prevented from sliding friction by rotating the roller member. Further, even when the roller member moves, the support member supports the second plate-shaped body, whereby the posture of the second plate-shaped body can be more stably maintained.

In such a case, for example, the roller member and the support member may be attached to the same moving member that moves along the lower surface of the second plate-shaped body, and the positions in the height direction can be changed independently of each other. According to the above configuration, by moving the single moving member, the roller member and the supporting member can be moved together, and the height direction positions of the two can be changed independently of each other, whereby the order can be achieved. Separation.

Further, for example, in the present invention, the support member may have an abutting portion extending at a direction parallel to a direction in which the roller member extends in the upper end. According to the above configuration, it is possible to effectively suppress the deflection along the extending direction of the roller member, and it is possible to further improve the positional accuracy.

Further, for example, the auxiliary support mechanism may be provided to be detachably provided to the central portion of the lower surface of the second plate-shaped body, and the auxiliary support mechanism may be a roller member along the lower surface of the second plate-shaped body. In the moving direction, the second plate-shaped body is supported from the lower side at the center of the lower surface of the second plate-shaped body in front of the roller member, and the roller member moves from the second member. 2 The plate-like body is separated to pass the roller member. According to the above configuration, the action of maintaining the posture of the second plate-shaped body is further improved, so that the positional deviation due to the deflection of the second plate-shaped body can be more effectively suppressed.

In this case, the auxiliary support mechanism may further include a plurality of auxiliary support members, and the auxiliary support members partially abut against the lower surface of the second plate-shaped body to support the second plate-shaped body. With such an arrangement assisting support member, the posture of the entire second plate-shaped body can be maintained, but slight deflection cannot be avoided in the unsupported portion. In the above case, by applying the present invention, the deflection of the second plate-shaped body can be reduced.

Further, for example, a gap detecting mechanism for detecting the amount of gap between the first plate-shaped body and the second plate-shaped body may be further provided, and the height of the supporting member is based on the amount of the gap detected by the gap detecting mechanism. Make settings. The amount of the gap between the first plate-shaped body and the second plate-shaped body is actually measured, and the height of the support member is set based on the result, whereby the posture of the second plate-shaped body can be more reliably maintained.

Further, for example, the first holding mechanism may have a flat abutting surface that abuts against the upper surface of the first plate-shaped body. The first plate-shaped body is pressed from the roller member via the second plate-shaped body. By bringing the first plate-shaped body into contact with the flat surface in advance, it is possible to prevent the first plate-shaped body from being deflected by the pressing from the roller member, and the transfer can be favorably performed.

Further, for example, an alignment mechanism may be further provided, and the alignment mechanism changes a relative position of the first holding mechanism and the second holding mechanism in the horizontal direction. By providing the alignment mechanism described above, the horizontal position of the first plate-shaped body and the second plate-shaped body can be adjusted. However, if a new positional shift occurs after the alignment is performed until the first plate-shaped body and the second plate-like body actually come into contact with each other, the effect is weakened. By applying the present invention to the above configuration, the transfer position can be controlled with higher precision.

[Industrial availability]

The present invention can be suitably applied to the treatment of a transfer material such as a transfer pattern or a film on various substrates such as a glass substrate or a semiconductor substrate. Moreover, two sheets are not formed without a pattern or the like. The technical idea of the present invention can also be applied when the body directly abuts.

21‧‧‧Upper platform (1st holding institution)

31‧‧‧Under platform (2nd holding institution, support desk)

331~334, 341~344‧‧‧ Lifting hand (auxiliary support parts)

431‧‧‧Transfer roller (roller part)

441‧‧‧ Lifting piece (supporting parts)

BL‧‧‧ blanket (2nd plate)

PT‧‧‧ pattern

SB‧‧‧ substrate (1st plate)

X, Y, Z‧‧‧ coordinate axis

Claims (15)

A transfer device comprising: a first holding mechanism that holds a lower surface of a first plate-shaped body in a horizontal posture; and a second holding mechanism that holds a peripheral edge portion of the second plate-shaped body and the second The upper surface of the plate-shaped body is adjacent to and opposite to the lower surface of the first plate-shaped body, and the lower surface of the second plate-shaped body is opposed to the first plate-shaped body on the upper surface side. The second plate-shaped body is held in a horizontal posture in which the center portion of the surface is open, and the roller member has a roll shape extending along a lower surface of the second plate-shaped body, and is configured to be movable with respect to the second plate-shaped body The lower surface is abutted against the lower surface of the second plate-shaped body, and the second plate-shaped body is pressed against the lower surface of the second plate-shaped body while being pressed against the first plate-shaped body. And a supporting member configured to be separable from the lower surface of the second plate-shaped body, and to support the second plate-shaped body from below by the upper end abutting against the lower surface of the second plate-shaped body And in the state in which the roller member is apart from the second plate-shaped body, the second a portion of the lower surface of the body that is closer to the center of the second plate-shaped body than the portion where the roller member first abuts, the support member abuts against the lower surface of the second plate-shaped body to support the second plate shape The roller member moves along the lower surface of the second plate-shaped body when the second plate-shaped body supported by the support member abuts. The transfer device according to claim 1, wherein the second holding mechanism has a frame-shaped support base that is open at a central portion corresponding to a central portion of the lower surface of the second plate-shaped body, and the upper surface of the support base is formed to abut Supporting the flat support surface of the second plate-shaped body on the lower surface of the peripheral portion of the second plate-shaped body, and the upper surface of the support member is located on the support surface of the support base The second plate-shaped body is supported by the height. The transfer device of claim 1, wherein the roller member starts to abut against the second plate-shaped body and presses the second plate-shaped body against the first plate-shaped body, and the support member is from the second plate. After the body is separated, the roller member moves along the lower surface of the second plate-shaped body. The transfer device of claim 1, wherein the roller member and the support member move integrally along a lower surface of the second plate-shaped body. The transfer device of claim 1, wherein the support member has a roll shape having an axis parallel to an axis of the roll member, and abuts against a lower surface of the second plate member at a position lower than the roll member And moving along the lower surface of the second plate-shaped body integrally with the roller member. The transfer device according to claim 4 or 5, wherein the roller member and the support member are attached to the same moving member that moves along a lower surface of the second plate-like body, and the positions in the height direction can be changed independently of each other. . The transfer device according to any one of claims 1 to 3, wherein the support member has an abutting portion extending in a direction parallel to an extending direction of the roller member at an upper end. The transfer device according to any one of claims 1 to 5, further comprising an auxiliary support mechanism, wherein the auxiliary support mechanism is provided separately from the central portion of the lower surface of the second plate-shaped body, and the auxiliary support The mechanism abuts the central portion of the lower surface of the second plate-shaped body at a position in front of the roller member in a moving direction of the roller member along a lower surface of the second plate-shaped member, and supports the first portion from below The plate-like body is separated from the second plate-shaped body as the roller member moves, and the roller member is passed. The transfer device of claim 8, wherein the auxiliary support mechanism has a plurality of auxiliary support members, and the plurality of auxiliary support members partially abut the second portion The second plate-shaped body is supported by the lower surface of the plate-like body. The transfer device according to any one of claims 1 to 5, further comprising: a gap detecting mechanism that detects a gap amount between the first plate-shaped body and the second plate-shaped body, based on The gap amount detected by the gap detecting means sets the height of the support member. The transfer device according to any one of claims 1 to 5, wherein the first holding means has a flat abutting surface that abuts against an upper surface of the first plate-shaped body. The transfer device according to any one of claims 1 to 5, further comprising: an alignment mechanism that changes a relative position of the first holding mechanism and the second holding mechanism in a horizontal direction. A transfer method comprising: a holding step of maintaining a state in which a surface of the first plate-shaped body is open to a horizontal position, and holding a peripheral portion of the second plate-shaped body and a surface of the second plate-shaped body and The lower surface of the first plate-shaped body is close to and opposed to each other, and is horizontally opened on the upper surface side of the lower surface of the second plate-shaped body and the lower surface of the lower surface of the first plate-shaped body. Holding the second plate-shaped body; the roller disposing step of disposing the roller member at a position away from the second plate-shaped body, wherein the roller member has a roller shape extending along a lower surface of the second plate-shaped body And being configured to be movable along a lower surface of the second plate-shaped body; and a supporting step of abutting the upper end of the support member at a position closer to a center side of the second plate-shaped body than the roller member a lower surface of the plate-like body, and supporting the second plate-shaped body from below, wherein the support member is configured to be separable from the lower surface of the second plate-shaped body; and a transfer step of the roller member The above second support by the above support components Shaped abuts Initially, the second plate-shaped body is pressed against to the first plate member, and is moved along under the surface of the second plate-like member. The transfer method of claim 13, wherein in the transferring step, after the roller member abuts against the second plate-shaped body and presses the second plate-shaped body against the first plate-shaped body, the support The member is separated from the second plate-shaped body, and then the roller member moves along the lower surface of the second plate-shaped body. The transfer method according to claim 13 or 14, wherein in the transferring step, the support member and the roller member integrally move along a lower surface of the second plate-shaped body.