TW201617534A - Method of determining parallelism between two sliding rails of ball screw feeding system with embedded sensor module - Google Patents

Method of determining parallelism between two sliding rails of ball screw feeding system with embedded sensor module Download PDF

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TW201617534A
TW201617534A TW103139279A TW103139279A TW201617534A TW 201617534 A TW201617534 A TW 201617534A TW 103139279 A TW103139279 A TW 103139279A TW 103139279 A TW103139279 A TW 103139279A TW 201617534 A TW201617534 A TW 201617534A
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Taiwan
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parallelism
ball screw
feeding system
screw feeding
amplitude
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TW103139279A
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Chinese (zh)
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guo-hua Feng
Kui-Hua Huang
jia-jun Wang
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Nat Univ Chung Cheng
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Publication of TW201617534A publication Critical patent/TW201617534A/en

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Abstract

The present invention provides a method of determining parallelism between two sliding rails of ball screw feeding system with embedded sensor module, which includes the following steps: (A) preparing: configuring a plurality of vibration sensors at proper positions of a ball screw feeding system; (B) driving and capturing signals: driving the carrier in a reciprocal motion of a predetermined stroke and capturing the signals sensed by the vibration sensors; (C) low-pass filtering process: performing low-pass filtering process on the sensed signals; (D) common correlation analysis; (E) empirical mode decomposition: performing the empirical mode decomposition for the values obtained by the analysis in step (D) being larger than a predetermined critical value to obtain a plurality of sets of decomposition signal matrixes; and (F) parallelism determination: each of the plurality of sets of decomposition signal matrixes has one feature waveform signal, and the ratio of the amplitude in the initial section to the amplitude in the rear section for each of the feature waveform signals is employed to determine the parallelism between two sliding rails.

Description

利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法 Method for judging parallelism between two rails of a ball screw feeding system by using an in-line sensing module

本發明係與進給系統有關,特別是指一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法。 The invention relates to a feeding system, in particular to a method for determining the parallelism between two rails of a ball screw feeding system by using an in-line sensing module.

在滾珠螺桿的進給系統中,主要是由一螺桿、一載台、一螺帽、二滑軌以及一驅動馬達所組成,其中該載台設於該螺帽,該螺帽螺接於該螺桿,且該螺帽並於內部設有循環通道而可讓複數滾珠容置於該循環通道與該螺帽及該螺桿之間,且該載台係可滑動地樞設於二滑軌。前述之構造乃習知滾珠螺桿的基礎架構,為業界所屬技術人士所周知,容不以圖式表示之。 In the feed system of the ball screw, the screw is mainly composed of a screw, a loading platform, a nut, a second sliding rail and a driving motor, wherein the loading platform is disposed on the nut, and the nut is screwed to the a screw, and the nut is internally provided with a circulation passage for allowing a plurality of balls to be accommodated between the circulation passage and the nut and the screw, and the stage is slidably pivoted to the two slide rails. The foregoing construction is the basic structure of a conventional ball screw, which is well known to those skilled in the art and is not shown in the drawings.

然而,在前述的進給系統中,承載載台重量及負責引導直線運動的該二滑軌,對進給系統的品質扮演著關鍵的角色。此乃由於該二滑軌之間的平行度,對於該載台的移動狀況會產生直接的影響,進而影響到設於該載台上的刀具進給狀況,而影響到加工精準度以及加工產品的可靠度。長期使用不平行的滑軌,其對該載台或該二滑軌所造成的磨耗,除了會使得進給狀況更為惡化外,還會大幅地降低進給系統的使用壽命。 However, in the aforementioned feed system, the weight of the carrier and the two slides responsible for guiding the linear motion play a key role in the quality of the feed system. This is because the parallelism between the two slide rails has a direct influence on the movement condition of the stage, thereby affecting the feeding condition of the tool set on the stage, which affects the processing precision and the processed product. Reliability. Long-term use of non-parallel rails, the wear caused by the platform or the two rails, in addition to making the feed condition worse, will greatly reduce the service life of the feed system.

目前對於二滑軌之間平行度的調整,主要是在機台組裝時進行,或是在出廠時加以微調來達到客戶所要求的標準。精密等級要求高的系統,可透過雷射、千分儀等精密量測設備及對應的標準操作程序,來校正二滑軌之間的平行度。而精密等級要求較低的系統,受限於經費及調校設備的等級問題,其所調整的平行度往往會有一定程度的不準確,進而會造成前述因不平行而產生的精度及壽命問題。 At present, the adjustment of the parallelism between the two slide rails is mainly carried out during the assembly of the machine, or fine-tuned at the factory to meet the standards required by the customer. The system with high precision level can correct the parallelism between the two slide rails through precision measuring equipment such as laser and dial gauge and corresponding standard operating procedures. The system with lower precision level requirements is limited by the level of funding and adjustment equipment. The parallelism of the adjustment is often inaccurate, which will cause the above-mentioned precision and life problems caused by non-parallelism. .

此外,在機台出廠前雖已調校完成,但在出廠後使用一段時間,仍有可能因為外在因素而造成平行度改變,一般的做法是由外部架設量測設備來檢視並予調校,然而,在進行檢視及調校時必須停機,在停機期間所造成的生產停頓及維修成本恐會增加營運成本。 In addition, although the machine has been adjusted before leaving the factory, but after using it for a period of time after leaving the factory, it is still possible to change the parallelism due to external factors. The general practice is to monitor and adjust the external measuring equipment. However, there must be a downtime during inspections and adjustments, and production pauses and maintenance costs during downtime may increase operating costs.

本發明之主要目的在於提供一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其係在進給系統中安裝複數感測器並配合對應的分析技術,而可以在該進給系統運行的過程進行平行度的量測,並不需要外部量測設備。 The main object of the present invention is to provide a method for determining the parallelism between two slide rails of a ball screw feeding system by using an in-line sensing module, which is to install a plurality of sensors in a feed system and cooperate with corresponding analysis techniques. Parallelism can be measured during the operation of the feed system and no external measuring equipment is required.

本發明之次一目的在於提供一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其可以在幾乎不增加機台生產成本的情況下達到量測平行度的效果。 A second object of the present invention is to provide a method for discriminating the parallelism between two rails of a ball screw feeding system by using an in-line sensing module, which can achieve measurement parallelism without increasing the production cost of the machine. Effect.

本發明之又一目的在於提供一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其可以在進給系統運行的過程中進行平行度的量測,不需停機進行量測。 Another object of the present invention is to provide a method for discriminating the parallelism between two rails of a ball screw feeding system by using an in-line sensing module, which can measure the parallelism during the operation of the feeding system, Need to stop for measurement.

為了達成前述目的,本發明提供了一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,包含有下列步驟:A)備置:在一滾珠螺桿進給系統的螺帽及軸承座上設置一振動感測器,並且在該滾珠螺桿進給系統的載台上設置二振動感測器,而分別靠近該滾珠螺桿進給系統的二滑軌;B)驅動並擷取訊號:以不同的進給條件,驅動該載台進行一預定行程的往復運動,並持續一預定時間長度;在該載台往復運動的過程,以適當取樣頻率分別擷取該等振動感測器所感測到的訊號;C)低通濾波處理:對該等振動感測器所感測到的訊號分別進行低通濾波處理而取得對應於各該振動感測器的波形訊號,各該波形訊號中必然有多個兩兩相鄰的脈衝,這兩兩相鄰的脈衝即對應於該載台往復運動的轉折點,而在兩兩相鄰的脈衝之間的訊號即為單程運動所感測到的訊號,並定義為單程區段訊號;D)共同關聯分析:對各該單程區段訊號進行共同關聯分析(correlation analysis),分析所得的值若大於一預定臨界值時,則判定目前分 析的單程區段訊號足以進行步驟E),目前分析的單程區段訊號所得的值未大於該預定臨界值的,則在步驟E)中不予進行分析;E)經驗模態分解:將步驟D)中分析所得的值大於該預定臨界值的單程區段訊號進行經驗模態分解(Empirical Mode Decomposition),而得到複數組的分解訊號矩陣;以及F)判定平行度:該複數組的分解訊號矩陣分別具有一特徵波形訊號,各該特徵波形訊號主要區分為一初始區段及一後區段,於該初始區段中,各該特徵波形訊號的振幅定義為初始振幅,於該後區段中,各該特徵波形訊號的振幅定義為後區段振幅,依該初始振幅與該後區段振幅的比值來判定該二滑軌間的平行度。 In order to achieve the foregoing object, the present invention provides a method for determining the parallelism between two rails of a ball screw feeding system by using an in-line sensing module, comprising the following steps: A) preparing: in a ball screw feeding system A vibration sensor is disposed on the nut and the bearing seat, and two vibration sensors are disposed on the stage of the ball screw feeding system, respectively, adjacent to the two sliding rails of the ball screw feeding system; B) driving and Swapping signal: driving the stage to perform a predetermined stroke reciprocating motion under different feeding conditions for a predetermined length of time; during the reciprocating motion of the stage, the vibration sensations are respectively taken at an appropriate sampling frequency The signal sensed by the detector; C) low-pass filtering processing: the signals sensed by the vibration sensors are respectively subjected to low-pass filtering processing to obtain waveform signals corresponding to the vibration sensors, each of the waveforms There must be a plurality of adjacent pulses in the signal. The two adjacent pulses correspond to the turning point of the reciprocating motion of the stage, and the signal between two adjacent pulses is the feeling of one-way motion. To the signal, and the signal is defined as a one-way section; D) common correlation analysis: each of the way sections of the common signal for correlation analysis (correlation analysis), analysis if the resulting value is greater than a predetermined threshold value, it is determined that the current sub- The single-pass segment signal is sufficient to perform step E). If the value of the currently analyzed one-way segment signal is not greater than the predetermined threshold, then the analysis is not performed in step E); E) empirical mode decomposition: step D) the single-pass segment signal whose value is greater than the predetermined threshold value is subjected to Empirical Mode Decomposition, and the complex signal matrix of the complex array is obtained; and F) the parallelism is determined: the decomposition signal of the complex array The matrix has a characteristic waveform signal, and each of the characteristic waveform signals is mainly divided into an initial segment and a rear segment. In the initial segment, the amplitude of each of the characteristic waveform signals is defined as an initial amplitude, and the subsequent segment is defined. The amplitude of each of the characteristic waveform signals is defined as the amplitude of the rear section, and the parallelism between the two rails is determined according to the ratio of the initial amplitude to the amplitude of the rear section.

藉由該等振動感測器安裝於該進給系統上,可以在該進給系統運行的過程進行平行度的量測,並不需要外部量測設備,且也可以不需停機來進行量測。此外,由於僅是安裝振動感測器,因此幾乎不會增加機台生產成本。 By installing the vibration sensors on the feed system, the parallelism can be measured during the operation of the feed system, and no external measuring equipment is needed, and the measurement can be performed without stopping the machine. . In addition, since only the vibration sensor is installed, the production cost of the machine is hardly increased.

10‧‧‧滾珠螺桿進給系統 10‧‧‧Rolling screw feed system

11‧‧‧螺帽 11‧‧‧ Nuts

12‧‧‧螺桿 12‧‧‧ screw

13‧‧‧軸承座 13‧‧‧ bearing housing

15‧‧‧載台 15‧‧‧ stage

17‧‧‧滑軌 17‧‧‧Slide rails

19‧‧‧振動感測器 19‧‧‧Vibration sensor

FS‧‧‧特徵波形訊號 FS‧‧‧Characteristic Waveform Signal

RS‧‧‧後區段 After the RS‧‧‧ section

SS‧‧‧初始區段 SS‧‧‧ initial section

第1圖係本發明一較佳實施例之流程圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart of a preferred embodiment of the present invention.

第2圖係本發明一較佳實施例之位置示意圖,顯示振動感測器的安裝位置。 Figure 2 is a schematic view of the position of a preferred embodiment of the present invention showing the mounting position of the vibration sensor.

第3圖係第2圖轉向180度的位置示意圖,顯示振動感測器的安裝位置。 Fig. 3 is a schematic view showing the position of the second sensor turned to 180 degrees, showing the mounting position of the vibration sensor.

第4A圖係本發明一較佳實施例之訊號示意圖,顯示進給條件為20公尺/分鐘的訊號圖形。 Fig. 4A is a schematic diagram of a signal according to a preferred embodiment of the present invention, showing a signal pattern having a feed condition of 20 meters/minute.

第4B圖係本發明一較佳實施例之訊號示意圖,顯示進給條件為40公尺/分鐘的訊號圖形。 Figure 4B is a schematic diagram of a signal of a preferred embodiment of the present invention showing a signal pattern having a feed condition of 40 meters per minute.

第4C圖係本發明一較佳實施例之訊號示意圖,顯示進給條件為60公尺/分鐘的訊號圖形。 Figure 4C is a schematic diagram of a signal of a preferred embodiment of the present invention showing a signal pattern having a feed condition of 60 meters per minute.

第5圖係本發明一較佳實施例之訊號示意圖,顯示進行低通濾波處理後的 訊號圖形。 Figure 5 is a schematic diagram of a signal according to a preferred embodiment of the present invention, showing the low pass filtering process Signal graphic.

第6圖係本發明一較佳實施例之訊號示意圖,顯示分解訊號矩陣C9的特徵波形訊號。 FIG. 6 is a schematic diagram of a signal according to a preferred embodiment of the present invention, showing a characteristic waveform signal of the decomposed signal matrix C9.

為了詳細說明本發明之技術特點所在,茲舉以下之較佳實施 例並配合圖式說明如後,其中:如第1圖至第6圖所示,本發明一較佳實施例所提供之一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,主要具有下列步驟:A)備置:如第2圖及第3圖所示,在一滾珠螺桿進給系統10的螺帽11及一螺桿12的軸承座13上設置一振動感測器19,並且在該滾珠螺桿進給系統10的載台15上設置二振動感測器19,而分別靠近該滾珠螺桿進給系統10的二滑軌17。於本實施例中,各該振動感測器19係以加速度感測器為例。 In order to explain in detail the technical features of the present invention, the following preferred implementations are presented. For example, as shown in FIG. 1 to FIG. 6 , a preferred embodiment of the present invention provides an in-line sensing module for discriminating a two-slide of a ball screw feeding system. The method of parallelism between rails mainly has the following steps: A) preparation: as shown in Figs. 2 and 3, a vibration is set on a nut 11 of a ball screw feeding system 10 and a bearing seat 13 of a screw 12. The sensor 19 is provided with two vibration sensors 19 on the stage 15 of the ball screw feed system 10, respectively, adjacent to the two slide rails 17 of the ball screw feed system 10. In this embodiment, each of the vibration sensors 19 is exemplified by an acceleration sensor.

B)驅動並擷取訊號:以不同的進給條件,驅動該載台15進 行一預定行程的往復運動,並持續一預定時間長度;在該載台15往復運動的過程,以適當取樣頻率分別擷取該等振動感測器19所感測到的訊號。於本實施例中,該進給條件係與進給速度有關,包括加速、等速及減速三個部分,此外,該往復運動之行程(單一方向行進的距離)係不小於一該滑軌17之長度的二分之一。前述所指之不同的進給條件,係為不同的進給速度,例如20公尺/分鐘、40公尺/分鐘或60公尺/分鐘。此外,前述之取樣頻率必須不小於5kHz,而於本實施例中係以5kHz為例。又,前述之往復運動的行程係以890毫米為例,而該預定時間長度,主要是以使該載台往復運動3次以上的時間為主,一般操作上,4次的往復運動中所擷取的訊號筆數即足以做出正確的平行度的判別,於本實施例中係可達到8萬筆,然而,更長行程的滑軌將會在4次的往復運動中擷取到更多筆數的訊號。第4A圖、第4B圖及第4C圖係顯示該載台15上對應於該二滑軌17中的左滑軌 的該振動感測器19,以前述條件依不同進給速度(20公尺/分鐘、40公尺/分鐘或60公尺/分鐘)所擷取之訊號。 B) Drive and capture the signal: drive the stage 15 with different feed conditions The reciprocating motion of a predetermined stroke is continued for a predetermined length of time; during the reciprocating motion of the stage 15, the signals sensed by the vibration sensors 19 are respectively captured at appropriate sampling frequencies. In this embodiment, the feed condition is related to the feed speed, including acceleration, constant speed, and deceleration. In addition, the stroke of the reciprocating motion (the distance traveled in a single direction) is not less than one of the slide rails 17 One-half of the length. The different feed conditions referred to above are different feed rates, such as 20 meters/minute, 40 meters/minute or 60 meters/minute. In addition, the aforementioned sampling frequency must be not less than 5 kHz, and in the present embodiment, 5 kHz is taken as an example. Further, the above-described reciprocating stroke is exemplified by 890 mm, and the predetermined length of time is mainly based on the time during which the stage is reciprocated three times or more, and in general operation, four reciprocating motions are performed. The number of signals taken is sufficient to make the correct parallelism. In this embodiment, 80,000 pens can be achieved. However, the longer-stroke slides will capture more in 4 reciprocating motions. The number of signals. 4A, 4B, and 4C show that the stage 15 corresponds to the left rail in the two rails 17 The vibration sensor 19 picks up signals according to different feed rates (20 meters/minute, 40 meters/minute or 60 meters/minute) under the aforementioned conditions.

C)低通濾波處理:對該等振動感測器19所感測到的訊號分 別進行低通濾波處理而取得對應於各該振動感測器19的波形訊號,各該波形訊號中必然有多個兩兩相鄰的脈衝,這兩兩相鄰的脈衝即對應於該載台15往復運動的轉折點,而在兩兩相鄰的脈衝之間的訊號即為單程運動所感測到的訊號,並定義為單程區段訊號。於本實施例中,該低通濾波的截止頻率不小於50Hz,而以100Hz為例。第5圖係顯示依前述第4B圖之訊號進行低通濾波處理後的波形訊號。 C) Low-pass filter processing: the signal points sensed by the vibration sensors 19 The low-pass filtering process is performed to obtain the waveform signals corresponding to the vibration sensors 19, and each of the waveform signals necessarily has a plurality of adjacent pulses, and the two adjacent pulses correspond to the stage. 15 The turning point of the reciprocating motion, and the signal between the two adjacent pulses is the signal sensed by the one-way motion, and is defined as the one-way segment signal. In this embodiment, the cutoff frequency of the low pass filtering is not less than 50 Hz, and 100 Hz is taken as an example. Figure 5 shows the waveform signal after low-pass filtering processing according to the signal of Figure 4B.

D)共同關聯分析:對各該單程區段訊號進行共同關聯分析 (correlation analysis),分析所得的值若大於一預定臨界值時,則判定目前分析的單程區段訊號足以進行步驟E),目前分析的單程區段訊號所得的值未大於該預定臨界值的,則在步驟E)中不予進行分析。於本實施例中,該預定臨界值必須不小於0.8,而以0.8為例。 D) Common correlation analysis: co-correlation analysis of each one-way segment signal Correlation analysis, if the value obtained by the analysis is greater than a predetermined threshold, it is determined that the one-way segment signal currently analyzed is sufficient to perform step E), and the value of the currently analyzed one-way segment signal is not greater than the predetermined threshold value, Then no analysis is performed in step E). In this embodiment, the predetermined threshold value must be not less than 0.8, and 0.8 is taken as an example.

E)經驗模態分解:將步驟D)中其分析所得的值大於該預定 臨界值的單程區段訊號進行經驗模態分解(Empirical Mode Decomposition),而得到複數組的分解訊號矩陣(例如C1,C2,...,C16),其中經驗模態分解係為習知技術且非本案之技術重點,容不贅述。 E) empirical mode decomposition: the value of the analysis in step D) is greater than the predetermined The one-way segment signal of the critical value is subjected to Empirical Mode Decomposition, and a complex array of decomposed signal matrices (for example, C1, C2, ..., C16) is obtained, wherein the empirical mode decomposition is a conventional technique and The technical focus of this case is not to be described.

F)判定平行度:該複數組的分解訊號矩陣分別具有一特徵波 形訊號FS,各該特徵波形訊號FS主要區分為一初始區段SS及一後區段RS,於該初始區段SS中,各該特徵波形訊號FS的振幅定義為初始振幅,於該後區段RS中,各該特徵波形訊號FS的振幅定義為後區段RS振幅,依該初始振幅與該後區段RS振幅的比值來判定該二滑軌17間的平行度。 於本實施例中,各該特徵波形訊號FS在該初始區段SS之振幅較大,在該後區段RS之振幅較小。而於本實施例中,係以分解訊號矩陣C9為例而使用其對應之特徵波形訊號FS,其圖形如第6圖所示。其中,在初始區段SS的振幅較大而做為分子,在後區段RS的振幅較小而做為分母,因此,其比值愈大者即代表該二滑軌17的平行度愈佳,在判別平行度時即可以該比值來判斷。 F) determining parallelism: the complex signal matrix of the complex array has a characteristic wave The shape signal FS, each of the characteristic waveform signals FS is mainly divided into an initial segment SS and a rear segment RS. In the initial segment SS, the amplitude of each of the characteristic waveform signals FS is defined as an initial amplitude, in the rear region. In the segment RS, the amplitude of each of the characteristic waveform signals FS is defined as the amplitude of the rear segment RS, and the parallelism between the two slide rails 17 is determined according to the ratio of the initial amplitude to the amplitude of the rear segment RS. In this embodiment, each of the characteristic waveform signals FS has a larger amplitude in the initial segment SS, and the amplitude of the subsequent segment RS is smaller. In the present embodiment, the corresponding signal waveform signal FS is used as an example of the decomposed signal matrix C9, and the graph is as shown in FIG. 6. Wherein, the amplitude of the initial section SS is large as a numerator, and the amplitude of the back section RS is small as a denominator. Therefore, the greater the ratio, the better the parallelism of the two slide rails 17 is. This ratio can be judged when discriminating the parallelism.

藉由上述步驟可知,本發明乃是在進給系統10中安裝複數 振動感測器19並收集數據進行分析,而可以在該進給系統10運行的過程進行平行度的量測,並不需要外部量測設備,且也可以不需停機來進行量測。此外,由於僅是安裝振動感測器19,因此幾乎不會增加機台生產成本。 As can be seen from the above steps, the present invention installs plurals in the feed system 10. The vibration sensor 19 collects data for analysis, and the parallelism can be measured during the operation of the feed system 10, and no external measuring equipment is required, and the measurement can be performed without stopping. Further, since only the vibration sensor 19 is mounted, the machine production cost is hardly increased.

Claims (7)

一種利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,包含有下列步驟:A)備置:在一滾珠螺桿進給系統的螺帽及軸承座上設置一振動感測器,並且在該滾珠螺桿進給系統的載台上設置二振動感測器,而分別靠近該滾珠螺桿進給系統的二滑軌;B)驅動並擷取訊號:以不同的進給條件,驅動該載台進行一預定行程的往復運動,並持續一預定時間長度;在該載台往復運動的過程,以適當取樣頻率分別擷取該等振動感測器所感測到的訊號;C)低通濾波處理:對該等振動感測器所感測到的訊號分別進行低通濾波處理而取得對應於各該振動感測器的波形訊號,各該波形訊號中必然有多個兩兩相鄰的脈衝,這兩兩相鄰的脈衝即對應於該載台往復運動的轉折點,而在兩兩相鄰的脈衝之間的訊號即為單程運動所感測到的訊號,並定義為單程區段訊號;D)共同關聯分析:對各該單程區段訊號進行共同關聯分析(correlation analysis),分析所得的值若大於一預定臨界值時,則判定目前分析的單程區段訊號足以進行步驟E),目前分析的單程區段訊號所得的值未大於該預定臨界值的,則在步驟E)中不予進行分析;E)經驗模態分解:將步驟D)中分析所得的值大於該預定臨界值的單程區段訊號進行經驗模態分解(Empirical Mode Decomposition),而得到複數組的分解訊號矩陣;以及F)判定平行度:該複數組的分解訊號矩陣分別具有一特徵波形訊號, 各該特徵波形訊號主要區分為一初始區段及一後區段,於該初始區段中,各該特徵波形訊號的振幅定義為初始振幅,於該後區段中,各該特徵波形訊號的振幅定義為後區段振幅,依該初始振幅與該後區段振幅的比值來判定該二滑軌間的平行度。 A method for judging the parallelism between two rails of a ball screw feeding system by using an in-line sensing module comprises the following steps: A) preparing: setting a vibration on a nut and a bearing seat of a ball screw feeding system a sensor, and two vibration sensors are disposed on the stage of the ball screw feeding system, respectively, adjacent to the two slide rails of the ball screw feeding system; B) driving and capturing signals: with different feeds a condition of driving the stage to perform a reciprocating motion of a predetermined stroke for a predetermined length of time; during the reciprocating motion of the stage, respectively, the signals sensed by the vibration sensors are captured at an appropriate sampling frequency; a low-pass filtering process: the signals sensed by the vibration sensors are respectively subjected to low-pass filtering processing to obtain waveform signals corresponding to the vibration sensors, and each of the waveform signals necessarily has a plurality of two-phase phases Neighboring pulses, the two adjacent pulses correspond to the turning point of the reciprocating motion of the stage, and the signal between the two adjacent pulses is the signal sensed by the one-way motion, and is defined as a one-way section. News ; D) Common correlation analysis: Correlation analysis is performed on each of the one-way segment signals, and if the value obtained by the analysis is greater than a predetermined threshold, it is determined that the one-way segment signal currently analyzed is sufficient for step E), If the value obtained by the currently analyzed one-way segment signal is not greater than the predetermined threshold value, then no analysis is performed in step E); E) empirical mode decomposition: the value obtained by analyzing in step D) is greater than the predetermined threshold value. The one-way segment signal performs an Empirical Mode Decomposition to obtain a complex array of decomposed signal matrices; and F) determines the parallelism: the decomposed signal matrices of the complex array respectively have a characteristic waveform signal. Each of the characteristic waveform signals is mainly divided into an initial segment and a rear segment. In the initial segment, an amplitude of each of the characteristic waveform signals is defined as an initial amplitude, and in the subsequent segment, each of the characteristic waveform signals is The amplitude is defined as the amplitude of the rear section, and the parallelism between the two rails is determined according to the ratio of the initial amplitude to the amplitude of the rear section. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:在步驟B)中的進給條件係與進給速度有關,包括加速、等速及減速三個部分;該往復運動中在單一方向行進的距離係不小於一該滑軌之長度的二分之一。 The method for determining the parallelism between the two rails of the ball screw feeding system by using the in-line sensing module according to Item 1 of the patent application scope, wherein: the feeding condition in the step B) is related to the feed speed, including Three parts of acceleration, constant speed and deceleration; the distance traveled in a single direction in the reciprocating motion is not less than one-half of the length of one of the slide rails. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:在步驟B)中的取樣頻率係不小於5kHz。 The method for determining the parallelism between the two rails of the ball screw feeding system by using the in-line sensing module according to the first aspect of the patent application, wherein the sampling frequency in the step B) is not less than 5 kHz. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:在步驟C)中的低通濾波的截止頻率不小於50Hz。 The method for determining the parallelism between the two rails of the ball screw feeding system by using the in-line sensing module according to the first aspect of the patent application, wherein the cutoff frequency of the low-pass filtering in step C) is not less than 50 Hz. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:該預定臨界值不小於0.8。 The method for determining the parallelism between the two rails of the ball screw feeding system by using the in-line sensing module according to the first application of the patent scope, wherein the predetermined threshold is not less than 0.8. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:在步驟F)中,各該特徵波形訊號在該初始區段之振幅較大,在該後區段之振幅較小。 The method for determining the parallelism between two rails of a ball screw feeding system by using an in-line sensing module according to claim 1 of the patent application scope, wherein: in step F), each of the characteristic waveform signals is in the initial section The amplitude is large and the amplitude in the latter section is small. 依據申請專利範圍第1項之利用內嵌式感測模組判別滾珠螺桿進給系統之二滑軌間平行度的方法,其中:各該振動感測器係為一加速度感測器。 The method for determining the parallelism between the two rails of the ball screw feeding system by using the in-line sensing module according to the first aspect of the patent application, wherein each of the vibration sensors is an acceleration sensor.
TW103139279A 2014-11-12 2014-11-12 Method of determining parallelism between two sliding rails of ball screw feeding system with embedded sensor module TW201617534A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI648488B (en) * 2017-08-23 2019-01-21 上銀科技股份有限公司 Ball screw structure with detection function
CN112081898A (en) * 2019-06-14 2020-12-15 上银科技股份有限公司 Ball screw capable of feeding back stress state
US11268608B2 (en) 2019-07-22 2022-03-08 Hiwin Technologies Corp. Ball screw with a load condition feedback mechanism

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI648488B (en) * 2017-08-23 2019-01-21 上銀科技股份有限公司 Ball screw structure with detection function
CN112081898A (en) * 2019-06-14 2020-12-15 上银科技股份有限公司 Ball screw capable of feeding back stress state
US11268608B2 (en) 2019-07-22 2022-03-08 Hiwin Technologies Corp. Ball screw with a load condition feedback mechanism

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