TW201615938A - Method for producing briquettes and briquettes produced using the same - Google Patents
Method for producing briquettes and briquettes produced using the same Download PDFInfo
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- TW201615938A TW201615938A TW104133194A TW104133194A TW201615938A TW 201615938 A TW201615938 A TW 201615938A TW 104133194 A TW104133194 A TW 104133194A TW 104133194 A TW104133194 A TW 104133194A TW 201615938 A TW201615938 A TW 201615938A
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21C—PROCESSING OF PIG-IRON, e.g. REFINING, MANUFACTURE OF WROUGHT-IRON OR STEEL; TREATMENT IN MOLTEN STATE OF FERROUS ALLOYS
- C21C5/00—Manufacture of carbon-steel, e.g. plain mild steel, medium carbon steel or cast steel or stainless steel
- C21C5/28—Manufacture of steel in the converter
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- C—CHEMISTRY; METALLURGY
- C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
- C10L—FUELS NOT OTHERWISE PROVIDED FOR; NATURAL GAS; SYNTHETIC NATURAL GAS OBTAINED BY PROCESSES NOT COVERED BY SUBCLASSES C10G, C10K; LIQUEFIED PETROLEUM GAS; ADDING MATERIALS TO FUELS OR FIRES TO REDUCE SMOKE OR UNDESIRABLE DEPOSITS OR TO FACILITATE SOOT REMOVAL; FIRELIGHTERS
- C10L5/00—Solid fuels
- C10L5/02—Solid fuels such as briquettes consisting mainly of carbonaceous materials of mineral or non-mineral origin
- C10L5/06—Methods of shaping, e.g. pelletizing or briquetting
- C10L5/10—Methods of shaping, e.g. pelletizing or briquetting with the aid of binders, e.g. pretreated binders
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- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21C—PROCESSING OF PIG-IRON, e.g. REFINING, MANUFACTURE OF WROUGHT-IRON OR STEEL; TREATMENT IN MOLTEN STATE OF FERROUS ALLOYS
- C21C7/00—Treating molten ferrous alloys, e.g. steel, not covered by groups C21C1/00 - C21C5/00
- C21C7/005—Treating molten ferrous alloys, e.g. steel, not covered by groups C21C1/00 - C21C5/00 using exothermic reaction compositions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/30—Wastewater or sewage treatment systems using renewable energies
- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/20—Waste processing or separation
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Abstract
Description
本發明係關於用於製作磚之一方法及以該方法製作之磚,且更具體而言係關於藉由純化在製造半導體或太陽能晶圓時生成之廢棄矽漿液用於製作用於一煉鋼製程中之磚之一方法。 The present invention relates to a method for making bricks and bricks produced by the method, and more particularly to a waste mash slurry produced by manufacturing a semiconductor or solar wafer by purification for use in a steelmaking process. One of the bricks in the process.
典型地,在一煉鋼製程中,生鐵中所含之雜質(包括碳)於大約1,500℃之溫度下在鋼液中氧化,且該等氧化物作為礦渣移除。在該煉鋼製程中,在引入氧且接著經過一預定時間之後出鋼。此時,將錳鐵、矽鐵等添加至該鋼液以調整組成並防止發生去氧化作用。此處,然而生產添加至鋼液之矽鐵需要大量矽,但由於大部分矽必須經輸入且因此昂貴,煉鋼製程之總成本增加。而且,具有一高熱值之矽(Si)在一鋼鐵煉製製程(iron & steel making process)(包括一普通煉鋼製程)期間用作一加熱劑用於升高鼓風爐內部之溫度。然而鋼鐵工業需要大量矽,由於用作加熱劑之矽昂貴,故製作鋼之總成本可增加。 Typically, in a steelmaking process, impurities (including carbon) contained in the pig iron are oxidized in the molten steel at a temperature of about 1,500 ° C, and the oxides are removed as slag. In the steel making process, steel is introduced after introduction of oxygen and then a predetermined time. At this time, ferromanganese, ferroniobium or the like is added to the molten steel to adjust the composition and prevent deoxidation from occurring. Here, however, the production of bismuth iron added to molten steel requires a large amount of ruthenium, but since most of the ruthenium must be input and thus expensive, the total cost of the steelmaking process increases. Moreover, bismuth (Si) having a high calorific value is used as a heating agent for raising the temperature inside the blast furnace during an iron & steel making process (including a common steel making process). However, the steel industry requires a large amount of antimony, and since the use as a heating agent is expensive, the total cost of producing steel can be increased.
眾所周知,矽在半導體工業中用作主要材料,且當藉助各種製程製造半導體產品時,將生成含有大量矽之廢棄物漿液作為副產物。若 僅僅將該廢棄物漿液燒掉或掩埋於地下,則可發生嚴重的空氣及土地污染。因此,已實施將廢棄物漿液凝固成經處理水泥漿液以儲存或掩埋該經處理水泥漿液廢棄物漿液之方法。 It is well known that ruthenium is used as a main material in the semiconductor industry, and when a semiconductor product is manufactured by various processes, a waste slurry containing a large amount of ruthenium is produced as a by-product. If Severe air and land contamination can occur if only the waste slurry is burned or buried underground. Accordingly, a method of solidifying a waste slurry into a treated cement slurry to store or bury the treated cement slurry waste slurry has been implemented.
排放含有大量矽之廢棄物漿液之一製程將詳細闡述如下。 One process for discharging a waste slurry containing a large amount of hydrazine will be described in detail below.
用於製造半導體-積體電路或太陽能電池之矽晶圓係藉助切割一矽晶錠之一製程產生。此一經切割矽晶圓亦藉助一表面拋光製程使其一表面經歷平面化。 A germanium wafer for fabricating a semiconductor-integrated circuit or a solar cell is produced by a process of cutting a germanium ingot. The cut wafer is also planarized by a surface polishing process.
在切割該矽晶錠之製程中(亦稱為一線鋸製程)中,使用混合為一切割劑之碳化矽(SiC)及為切割油之一冷卻劑(用於切割之水或油溶性油)之漿液。在該線鋸製程中,矽晶圓可藉由使用稱為一線鋸之一切割裝置切割一矽晶錠而產生,同時供應漿液。除碳化矽以外,亦可使用氧化鋁、金剛石、氧化矽等作為切割劑之材料。 In the process of cutting the twin ingot (also known as a wire saw process), a tantalum carbide (SiC) mixed as a cutting agent and a coolant for cutting oil (for cutting water or oil-soluble oil) are used. Slurry. In the wire sawing process, the ruthenium wafer can be produced by cutting a ruthenium ingot using a cutting device called a wire saw while supplying the slurry. In addition to niobium carbide, alumina, diamond, yttria or the like may be used as the material of the dicing agent.
由於切割矽晶錠之製程中所用之線鋸具有一預定厚度,因此在切割製程期間大量矽晶錠生成為鋸屑。矽晶圓及線鋸之厚度增加越多,鋸屑之量增加越多。 Since the wire saw used in the process of cutting the twin ingot has a predetermined thickness, a large number of twin ingots are generated as sawdust during the cutting process. The more the thickness of the wafer and wire saw increases, the more the amount of sawdust increases.
舉例而言,當矽晶圓具有大約0.1毫米之厚度,且線鋸具有大約0.1毫米之厚度時,大約50%之矽晶錠可生成為鋸屑。因此,於矽晶錠之切割或矽晶圓之拋光完成後,切割劑、切割油、鋸屑、自設備生成之細粉塵等等均可包含於廢棄物漿液中。 For example, when the tantalum wafer has a thickness of about 0.1 mm and the wire saw has a thickness of about 0.1 mm, about 50% of the twin ingots can be formed as sawdust. Therefore, after the cutting of the ingot or the polishing of the crucible wafer, the cutting agent, the cutting oil, the sawdust, the fine dust generated from the device, and the like can be contained in the waste slurry.
在製造矽晶圓期間以此方式生成之廢棄物漿液歸類為特殊廢棄物。當僅僅將廢棄物漿液燒掉或掩埋時,則可發生嚴重的空氣及土地污染。因此,將所生成之廢棄物漿液凝固成水泥且接著儲存或掩埋。 The waste slurry generated in this manner during the manufacture of the crucible wafer is classified as a special waste. Severe air and land contamination can occur when only the waste slurry is burned or buried. Therefore, the generated waste slurry is solidified into cement and then stored or buried.
然而,即使將廢棄物漿液凝固成水泥用於其處置,但廢棄物漿液之儲存或掩埋空間係有限的。此外,該處置方法可造成自然資源之浪費。因此,迫切需要用於再循環及回收廢棄物漿液之一方法。 However, even if the waste slurry is solidified into cement for its disposal, the storage or burial space of the waste slurry is limited. In addition, this disposal method can result in waste of natural resources. Therefore, there is an urgent need for a method for recycling and recycling waste slurry.
具體而言,由於在切割矽晶錠期間大量矽粉塵包含於廢棄物漿液中,則矽粉塵之有效分離及循環已變成資源再循環及工業廢棄物處理領域中之一重要問題。 Specifically, since a large amount of dust is contained in the waste slurry during the cutting of the twin ingot, the effective separation and recycling of the dust has become an important issue in the field of resource recycling and industrial waste disposal.
本揭示內容提供用於製作在煉鋼製程中用於升高鋼液之溫度及調整鋼液之組成之一磚之方法,藉由純化在半導體或太陽能晶圓之製造期間所生成之含矽廢棄物漿液實施;及以該方法製作之磚。 The present disclosure provides a method for fabricating a brick for increasing the temperature of molten steel and adjusting the composition of molten steel in a steelmaking process by purifying the waste containing ruthenium generated during the manufacture of the semiconductor or solar wafer The slurry is applied; and the brick produced by the method.
本揭示內容亦提供製作能夠在一煉鋼製程中以低成本及高效率升高鋼液之溫度及調整鋼液之組成之一磚之方法及以該方法製作之磚。 The present disclosure also provides a method of fabricating a brick capable of increasing the temperature of molten steel and adjusting the composition of molten steel at a low cost and high efficiency in a steelmaking process, and a brick produced by the method.
本揭示內容亦提供製作能夠降低造成環境污染之矽廢棄物漿液之處置成本之一磚之方法以該方法製作之磚。 The present disclosure also provides a method of fabricating bricks produced by this method which is capable of reducing the disposal cost of a waste slurry which causes environmental pollution.
本揭示內容亦提供製作能夠防止矽由於矽之氧化而使品質劣化之一磚之方法及以該方法製作之磚。 The present disclosure also provides a method of fabricating a brick capable of preventing deterioration of quality due to oxidation of niobium and a brick produced by the method.
根據一例示性實施例,一方法包括製備含矽廢棄物漿液;執行自該含矽廢棄物漿液分離含矽漿液及水溶性油之一初級油清洗製程;以及藉由使用其中一黏合劑與該含矽漿液混合之一混合物形成該磚。 According to an exemplary embodiment, a method includes preparing a ruthenium-containing waste slurry; performing a primary oil cleaning process for separating the mash-containing slurry and the water-soluble oil from the mash-containing waste slurry; and using one of the binders The mixture containing the mash slurry is mixed to form the brick.
該含矽廢棄物漿液可係在切割一矽晶錠、或拋光一矽晶圓之一表面時生成且含有該含矽漿液及該水溶性油。 The ruthenium-containing waste slurry may be formed when a ruthenium ingot is cut or polished on one surface of a wafer and contains the mash-containing slurry and the water-soluble oil.
該含矽廢棄物漿液含有至少矽(Si)及碳化矽(SiC)。 The cerium-containing waste slurry contains at least cerium (Si) and cerium carbide (SiC).
該初級油清洗製程可包括以一第一混合比率混合水與該含矽廢棄物漿液;攪拌該含矽廢棄物漿液及該水;以及過濾該含矽漿液及該水之該混合物以將該含矽廢棄物漿液、該水溶性油、及該水彼此分離。 The primary oil cleaning process may include mixing water and the cerium-containing waste slurry at a first mixing ratio; agitating the cerium-containing waste slurry and the water; and filtering the mash-containing slurry and the mixture of the water to include the mixture The mash waste slurry, the water-soluble oil, and the water are separated from each other.
水對含矽廢棄物漿液之體積之第一混合比率可對應於大約0.2倍至大約8倍。 The first mixing ratio of water to the volume of the mash-containing waste slurry may correspond to from about 0.2 times to about 8 times.
可更包括在形成該磚之前執行自該含矽漿液移除該水溶性油之一次級油清洗製程。 It may further comprise performing a secondary oil cleaning process for removing the water soluble oil from the mash containing slurry prior to forming the brick.
該次級油清洗製程可包括以一第二混合比率混合該水與該含矽漿液;攪拌該含矽漿液及該水;以及過濾該含矽漿液及該水之該混合物以分離該含矽漿液、該水溶性油、及該水。 The secondary oil cleaning process may include mixing the water and the mash-containing slurry at a second mixing ratio; agitating the mash-containing slurry and the water; and filtering the mash-containing slurry and the mixture of the water to separate the mash-containing slurry The water-soluble oil and the water.
水對含矽廢棄物漿液之體積之第二混合比率可對應於大約0.2倍至大約8倍。 The second mixing ratio of water to the volume of the mash-containing waste slurry may correspond to from about 0.2 times to about 8 times.
可更包括對在該初級油清洗製程中彼此分離之水溶性油及水執行分餾,以在該初級油清洗製程之後將該水溶性油與水分離。 It may further comprise performing fractionation on the water-soluble oil and water separated from each other in the primary oil cleaning process to separate the water-soluble oil from the water after the primary oil cleaning process.
可更包含在形成該磚之前執行一含矽漿液乾燥製程及一含矽漿液碾磨製程中之至少一者。 The method further includes performing at least one of a mash-containing slurry drying process and a mash-containing slurry milling process prior to forming the brick.
在該磚之形成中,一Fe源在該磚之該形成期間可選擇性添加至該含矽漿液及該黏合劑之混合物。 In the formation of the brick, a source of Fe may be selectively added to the mixture of the slurry containing the binder and the binder during the formation of the brick.
基於該混合物之總重量,該混合物可含有大約35重量%至大約97重量%之該含矽漿液、大約0重量%至大約50重量%之該Fe源、及大約3 重量%至大約15重量%之該黏合劑。 The mixture may contain from about 35% to about 97% by weight of the cerium-containing slurry, from about 0% to about 50% by weight of the Fe source, and about 3, based on the total weight of the mixture. From about 1% by weight to about 15% by weight of the binder.
該黏合劑可含有糖漿、澱粉、膨潤土(bentonite)及氫氧化鈣、及矽酸鈉中之至少一者。 The binder may contain at least one of syrup, starch, bentonite, calcium hydroxide, and sodium citrate.
該黏合劑可含有在該初級油清洗製程中分離之該水及水溶性油、在該次級油清洗製程中分離之該水及水溶性油、及在該分離製程中分離之該水溶性油及水中之至少一者。 The binder may comprise the water and water-soluble oil separated in the primary oil cleaning process, the water and water-soluble oil separated in the secondary oil cleaning process, and the water-soluble oil separated in the separation process And at least one of the waters.
根據一例示性實施例,可藉助製作磚之製作方法製作磚,該磚包括矽、碳化矽、及黏合劑。 According to an exemplary embodiment, the brick may be made by means of a method of making a brick comprising tantalum, niobium carbide, and a binder.
該磚可更包含一Fe源。 The brick may further comprise a source of Fe.
10‧‧‧第一攪拌器 10‧‧‧First stirrer
20‧‧‧第一過濾系統 20‧‧‧First filtration system
30‧‧‧分餾系統 30‧‧‧ fractionation system
40‧‧‧第二攪拌器 40‧‧‧Second stirrer
50‧‧‧第二過濾系統 50‧‧‧Second filtration system
60‧‧‧乾燥器 60‧‧‧Dryer
70‧‧‧磨機 70‧‧‧Milling machine
80‧‧‧磚形成裝置 80‧‧‧Brick forming device
310‧‧‧水/油儲存罐 310‧‧‧Water/Oil Storage Tank
320‧‧‧幫浦 320‧‧‧ pump
330‧‧‧蒸餾塔 330‧‧‧Distillation tower
340‧‧‧第一收集單元 340‧‧‧First collection unit
350‧‧‧第二收集單元 350‧‧‧Second collection unit
360‧‧‧第一熱交換器 360‧‧‧First heat exchanger
370‧‧‧第二熱交換器 370‧‧‧second heat exchanger
380‧‧‧水儲存罐 380‧‧‧Water storage tank
390‧‧‧油儲存罐 390‧‧‧oil storage tank
S10、S12、S14、S16、S20、S30、S32、S34、S36、S40、S50、S60、 S62、S64、S66‧‧‧步驟 S10, S12, S14, S16, S20, S30, S32, S34, S36, S40, S50, S60, S62, S64, S66‧‧‧ steps
結合附圖自以下描述可更詳細地瞭解本發明之例示性實施例,在附圖中:第1圖係為說明純化在製造半導體晶圓或太陽能晶圓時作為副產物生成之含矽廢棄物漿液之製程的視圖。 Exemplary embodiments of the present invention can be understood in more detail from the following description in conjunction with the accompanying drawings, in which: FIG. 1 is a diagram illustrating the purification of waste containing waste as a by-product in the manufacture of a semiconductor wafer or a solar wafer. A view of the process of the slurry.
第2圖係為說明根據一例示性實施例藉由純化含矽廢棄物漿液製作一磚之方法之流程圖,該磚用於在一煉鋼製程中升高溫度及改變組成。 2 is a flow chart illustrating a method of making a brick by purifying a slurry containing ruthenium according to an exemplary embodiment for raising temperature and changing composition in a steelmaking process.
第3圖係為說明第2圖中所圖解說明之一初級油清洗製程之流程圖。 Figure 3 is a flow chart illustrating one of the primary oil cleaning processes illustrated in Figure 2.
第4圖係為說明第2圖中所圖解說明之一次級油清洗製程之流程圖。 Figure 4 is a flow chart illustrating one of the secondary oil cleaning processes illustrated in Figure 2.
第5圖係為說明第2圖中所圖解說明之一磚形成製程之流程圖。 Figure 5 is a flow chart illustrating one of the brick forming processes illustrated in Figure 2.
第6圖係為說明實施一例示性實施例之一裝置的實例之視圖。 Figure 6 is a view illustrating an example of an apparatus for carrying out an exemplary embodiment.
第7圖係為說明第6圖之分餾系統之一實例的視圖。 Fig. 7 is a view for explaining an example of the fractionation system of Fig. 6.
在下文中,將參照附圖詳細闡述特定實施例。 Hereinafter, specific embodiments will be described in detail with reference to the accompanying drawings.
可能不必要地模糊本發明之基本特徵之相關功能或構形之詳細描述將被省略。 Detailed descriptions of related functions or configurations that may unnecessarily obscure the essential features of the present invention will be omitted.
第1圖係為說明純化在製造半導體晶圓或太陽能晶圓時作為副產物生成之含矽廢棄物漿液之製程的視圖。 Fig. 1 is a view for explaining a process for purifying a ruthenium-containing waste slurry which is produced as a by-product in the production of a semiconductor wafer or a solar wafer.
參見第1圖,一切割劑、鋸屑、切割油、及在其他切割製程中生成之來自線鋸之一切割劑或細粉塵等被包含於切割矽之一製程或拋光一矽晶圓之表面之一製程中生成之廢棄物漿液中。 Referring to Fig. 1, a cutting agent, sawdust, cutting oil, and a cutting agent or fine dust generated from a wire saw generated in other cutting processes are included in one of the cutting processes or the surface of a polished wafer. In the waste slurry generated in a process.
如第1圖中所示,對廢棄物漿液執行一油清洗製程以自廢棄物漿液分離可再循環矽及切割劑。藉助油清洗製程移除切割劑。在此處,將所生成之廢水轉移至一廢水處理系統且接著再循環。接著,對經歷該油清洗製程之廢棄物漿液執行矽分離製程以分離有效矽並使經分離矽再循環。在此處,可使用一離心製程用於分離矽。藉助一乾燥製程使經分離矽再循環。 As shown in Figure 1, an oil cleaning process is performed on the waste slurry to separate the recyclable crucible and the cutting agent from the waste slurry. The cutting agent is removed by means of an oil cleaning process. Here, the generated wastewater is transferred to a wastewater treatment system and then recycled. Next, a helium separation process is performed on the waste slurry subjected to the oil cleaning process to separate the effective helium and recycle the separated helium. Here, a centrifugation process can be used for separating the ruthenium. The separated helium is recycled by means of a drying process.
在矽分離製程中僅可分離具有大粒徑之矽,且因此大量微細 切割劑及雜質及微細矽在分離具有大粒徑之矽之後可留在廢棄物漿液中。 In the crucible separation process, only crucibles having a large particle size can be separated, and thus a large number of fine The cleavage agent and impurities and fine ruthenium may remain in the waste slurry after separation of the ruthenium having a large particle size.
第2圖係為說明根據一例示性實施例藉由純化含矽廢棄物漿液製作一磚之方法之流程圖,該磚用於在一煉鋼製程中升高溫度及改變組成,第3圖係為說明第2圖中所圖解說明之一初級油清洗製程之流程圖,第4圖係為說明第2圖中所圖解說明之一次級油清洗製程之流程圖,且第5圖係為說明第2圖中所圖解說明之一磚形成製程之流程圖。此外,第6圖係為說明實施一例示性實施例之一裝置的實例之視圖,且第7圖係為說明第6圖之分餾系統之一實例之視圖。 Figure 2 is a flow chart illustrating a method of making a brick by purifying a slurry containing ruthenium according to an exemplary embodiment for raising temperature and changing composition in a steelmaking process, Figure 3 To illustrate a flow chart of a primary oil cleaning process illustrated in FIG. 2, FIG. 4 is a flow chart illustrating a secondary oil cleaning process illustrated in FIG. 2, and FIG. 5 is a description 2 is a flow chart illustrating one of the brick forming processes illustrated in the figure. Further, Fig. 6 is a view for explaining an example of a device for carrying out an exemplary embodiment, and Fig. 7 is a view for explaining an example of the fractionation system of Fig. 6.
參見第2圖,一初級油清洗製程(S10)、一分離製程(S20)、一次級油清洗製程(S30)、一乾燥製程(S40)、一碾磨製程(S50)、及一磚形成製程(S60)。為一例示性實施例之最終產物之一磚(即,在一煉鋼製程中在鋼液生產期間用於升高鋼液之溫度及調整鋼液之組成)可藉助初級油清洗製程(S10)及磚形成製程(S60)來製作。在此處,次級油清洗製程(S30)、乾燥製程(S40)、及碾磨製程(S50)可視需要選擇性執行。因此,次級油清洗製程(S30)、乾燥製程(S40)、及碾磨製程(S50)中之至少一者可為能夠在磚製作製程中選擇性執行之一製程。在下文中,將闡述根據一例示性實施例製作磚之方法,其包括初級油清洗製程(S10)、分離製程(S20)、次級油清洗製程(S30)、乾燥製程(S40)、碾磨製程(S50)、及磚形成製程(S60)。 Referring to Fig. 2, a primary oil cleaning process (S10), a separation process (S20), a primary oil cleaning process (S30), a drying process (S40), a milling process (S50), and a brick forming process (S60). It is one of the final products of the exemplary embodiment (ie, used to raise the temperature of the molten steel during the production of molten steel in a steelmaking process and adjust the composition of the molten steel) by means of the primary oil cleaning process (S10) And brick forming process (S60) to make. Here, the secondary oil cleaning process (S30), the drying process (S40), and the milling process (S50) may be selectively performed as needed. Therefore, at least one of the secondary oil cleaning process (S30), the drying process (S40), and the milling process (S50) may be one of the processes that can be selectively performed in the brick making process. Hereinafter, a method of fabricating a brick according to an exemplary embodiment will be described, which includes a primary oil cleaning process (S10), a separation process (S20), a secondary oil cleaning process (S30), a drying process (S40), and a milling process. (S50), and brick forming process (S60).
首先,在初級油清洗製程(S10)中,可自含有矽(Si)、碳化矽(SiC)、及水溶性油之含矽廢棄物漿液(例如,初始廢棄物漿液)分離油。 First, in the primary oil cleaning process (S10), the oil may be separated from a cerium-containing waste slurry (for example, an initial waste slurry) containing cerium (Si), cerium carbide (SiC), and a water-soluble oil.
該含矽廢棄物漿液(即,初始廢棄物漿液)係作為在半導體 晶圓或太陽能晶圓製作製程中生成之副產物而生成。因此,初始廢棄物漿液可含有在切割一矽晶錠時生成之矽、及為一切割劑之碳化矽(SiC)、及為切割油之水溶性油。此外,亦可含有大約5%鐵(Fe)源及少量銅(Cu)等。分離初始廢棄物漿液中所含水溶性油之一製程可在初級油清洗製程(S10)中執行。在此處,由於該初始廢棄物漿液中所含之碳化矽具有各種粒徑,因此可在初級油清洗製程(S10)之前執行藉助離心製程分離具有相對較大粒徑之碳化矽之一製程。 The ruthenium-containing waste slurry (ie, the initial waste slurry) is used as a semiconductor Generated by by-products generated during wafer or solar wafer fabrication processes. Therefore, the initial waste slurry may contain niobium which is formed when the ingot is cut, and tantalum carbide (SiC) which is a cutting agent, and a water-soluble oil which is a cutting oil. In addition, it may contain about 5% iron (Fe) source and a small amount of copper (Cu). The process of separating one of the water-soluble oils contained in the initial waste slurry can be performed in the primary oil cleaning process (S10). Here, since the niobium carbide contained in the initial waste slurry has various particle diameters, one of the processes of separating the niobium carbide having a relatively large particle diameter by a centrifugal process can be performed before the primary oil cleaning process (S10).
初始廢棄物漿液為在線鋸等製程中所生成副產物,其含有大約10重量%至大約30重量%之水溶性油(例如,聚乙二醇(PEG)+二乙二醇(DEG))。因此,必須將初始廢棄物漿液中所含之水溶性油移除至一預定量以在煉鋼製程中使用該初始廢棄物漿液。可實施在一高溫下之燃燒製程及使用水之清洗製程以移除油。然而,當水溶性油在高溫下燃燒時,隨著水溶性油之含量增加空氣污染變得更嚴重,而且矽可在高溫下氧化。由於該初始廢棄物漿液含有大量水溶性油,故初始廢棄物漿液可利用水清洗。然而,在此情形中,水溶性油可溶於水中而增加廢水處理成本。 The initial waste slurry is a by-product produced in a process such as a wire saw, and contains from about 10% to about 30% by weight of a water-soluble oil (for example, polyethylene glycol (PEG) + diethylene glycol (DEG)). Therefore, the water-soluble oil contained in the initial waste slurry must be removed to a predetermined amount to use the initial waste slurry in the steelmaking process. A combustion process at a high temperature and a cleaning process using water can be performed to remove the oil. However, when the water-soluble oil is burned at a high temperature, air pollution becomes more serious as the content of the water-soluble oil increases, and helium can be oxidized at a high temperature. Since the initial waste slurry contains a large amount of water-soluble oil, the initial waste slurry can be washed with water. However, in this case, the water-soluble oil is soluble in water to increase the cost of wastewater treatment.
在此實例中,可將水溶性油自該初始廢棄物漿液分離且接著藉助下文將闡述之一製程再使用。而且,視需要,可另外自含矽漿液移除該水溶性油,在其中將水溶性油移除至預定量。因此,由於阻止了因油燃燒造成之空氣污染及矽氧化,且水溶性油再使用,故此存在一經濟益處。此外,如下文所述,由於水係藉助分餾自水溶性油分離出,因此在處理最終生成之廢水方面幾乎沒有成本。 In this example, the water soluble oil can be separated from the initial waste slurry and then reused by one of the processes set forth below. Moreover, the water-soluble oil may be additionally removed from the mash-containing slurry as needed, in which the water-soluble oil is removed to a predetermined amount. Therefore, there is an economic benefit in that air pollution and deuterium oxidation due to oil burning are prevented and water-soluble oil is reused. Further, as described below, since the water system is separated from the water-soluble oil by fractional distillation, there is almost no cost in processing the finally produced wastewater.
如上所述,在自初始廢棄物漿液分離水溶性油的同時生成之副產物(例如水溶性油或水)可重新用作在製作磚時之一黏合劑。 As described above, by-products (e.g., water-soluble oil or water) formed while separating the water-soluble oil from the initial waste slurry can be reused as one of the binders in the production of bricks.
為此,在水混於該初始廢棄物漿液中達足以攪拌及泵送之預定量之狀態下,藉助使用如一壓濾機實施一壓榨方法自該初始廢棄物漿液分離水溶性油及水。接著,藉由蒸發水重新使用該水溶性油,且使其中該水溶性油已減少至一預定量之漿液(即,含矽漿液)經歷乾燥製程且接著碾磨至一適宜大小。該經碾磨漿液形成用於在煉鋼製程中升高鋼液之溫度並調整鋼液組成之磚。 To this end, the water-soluble oil and water are separated from the initial waste slurry by a pressing method using a filter press, in a state where water is mixed in the initial waste slurry to a predetermined amount sufficient for stirring and pumping. Next, the water-soluble oil is reused by evaporating water, and the slurry in which the water-soluble oil has been reduced to a predetermined amount (i.e., the mash-containing slurry) is subjected to a drying process and then milled to a suitable size. The milled slurry forms a brick for raising the temperature of the molten steel in the steelmaking process and adjusting the composition of the molten steel.
參見第3圖,初級油清洗製程(S10)可包括製程(S12、S14、及S16)。 Referring to Fig. 3, the primary oil cleaning process (S10) may include processes (S12, S14, and S16).
首先,在製程(S12)中,將一廢棄物漿液儲存罐中儲存之初始廢棄物漿液供應至一第一攪拌器10,並將對應於一第一混合比率之量的水供應至第一攪拌器10以將初始廢棄物漿液與水混合。 First, in the process (S12), the initial waste slurry stored in a waste slurry storage tank is supplied to a first agitator 10, and the amount of water corresponding to a first mixing ratio is supplied to the first agitation. The vessel 10 mixes the initial waste slurry with water.
例如,廢棄物漿液儲存罐之內部可維持在一預定溫度以防止所儲存之初始廢棄物漿液黏度降低。而且,可以一預定循環執行該攪拌以防止所儲存之初始廢棄物漿液由於隨時間流逝而發生之沉澱而凝固。在此情形中,該廢棄物漿液儲存罐可支援一攪拌功能。 For example, the interior of the waste slurry storage tank can be maintained at a predetermined temperature to prevent the stored initial waste slurry from decreasing in viscosity. Moreover, the agitation can be performed in a predetermined cycle to prevent the stored initial waste slurry from solidifying due to precipitation which occurs over time. In this case, the waste slurry storage tank can support a stirring function.
初始廢棄物漿液可包括在製造半導體晶圓或太陽能晶圓之製程中生成之副產物。副產物可包括矽(Si)、碳化矽(SiC)、水溶性油、鐵(Fe)、銅(Cu)等等。 The initial waste slurry can include by-products generated in the process of manufacturing a semiconductor wafer or a solar wafer. By-products may include bismuth (Si), tantalum carbide (SiC), water-soluble oil, iron (Fe), copper (Cu), and the like.
初始廢棄物漿液與水之第一混合比率可設定在大約1:0.2至大約1:8(以體積比率計)之範圍內。換言之,該初始漿液可與水混合,以使得水的體積係初始廢棄物漿液之大約0.2倍至大約8倍。如上所述,該第一混合比率係考慮到該初始廢棄物漿液之攪拌及泵送而設定。 The first mixing ratio of the initial waste slurry to water can be set in the range of from about 1:0.2 to about 1:8 (by volume ratio). In other words, the initial slurry can be mixed with water such that the volume of water is from about 0.2 to about 8 times the initial waste slurry. As described above, the first mixing ratio is set in consideration of agitation and pumping of the initial waste slurry.
在製程(S14)中,係執行操作第一攪拌器10以攪拌初始廢棄物漿液與水之混合物之製程。 In the process (S14), a process of operating the first agitator 10 to agitate the mixture of the initial waste slurry and water is performed.
下文將詳細闡述初級油清洗製程(S10)。 The primary oil cleaning process (S10) will be described in detail below.
首先,在製程(S12)中,將一廢棄物漿液儲存罐中儲存之初始廢棄物漿液供應至一第一攪拌器10,並將對應於一第一混合比率之量的水供應至第一攪拌器以將初始廢棄物漿液與水混合。 First, in the process (S12), the initial waste slurry stored in a waste slurry storage tank is supplied to a first agitator 10, and the amount of water corresponding to a first mixing ratio is supplied to the first agitation. To mix the initial waste slurry with water.
例如,廢棄物漿液儲存罐之內部可維持在一預定溫度以防止所儲存之初始廢棄物漿液黏度降低。此外,可以一預定循環執行該攪拌以防止所儲存之初始廢棄物漿液由於隨時間流逝而發生之沉澱而凝固。在此情形中,該廢棄物漿液罐可支援一攪拌功能。 For example, the interior of the waste slurry storage tank can be maintained at a predetermined temperature to prevent the stored initial waste slurry from decreasing in viscosity. Further, the agitation may be performed in a predetermined cycle to prevent the stored initial waste slurry from solidifying due to precipitation which occurs over time. In this case, the waste slurry tank can support a stirring function.
初始廢棄物漿液包括在製造半導體晶圓或太陽能晶圓之製程中生成之副產物。副產物可特定包括矽(Si)、碳化矽(SiC)、水溶性油、鐵(Fe)、銅(Cu)等等。 The initial waste slurry includes by-products generated in the process of manufacturing a semiconductor wafer or a solar wafer. The by-products may specifically include cerium (Si), cerium carbide (SiC), water-soluble oil, iron (Fe), copper (Cu), and the like.
初始廢棄物漿液與水之第一混合比率可設定在大約1:0.2至大約1:8(以體積計)之範圍內。換言之,將該初始漿液與水混合,以使得水之體積係初始廢棄物漿液之大約0.2倍至大約8倍。如上所述,該第一混合比率係考慮到該初始廢棄物漿液之攪拌及泵送而設定。 The first mixing ratio of the initial waste slurry to water can be set in the range of from about 1:0.2 to about 1:8 by volume. In other words, the initial slurry is mixed with water such that the volume of water is from about 0.2 to about 8 times the initial waste slurry. As described above, the first mixing ratio is set in consideration of agitation and pumping of the initial waste slurry.
在製程(S14)中,係執行操作第一攪拌器10以攪拌初始廢棄物漿液與水之混合物之製程。 In the process (S14), a process of operating the first agitator 10 to agitate the mixture of the initial waste slurry and water is performed.
在製程(S16)中,經過預定攪拌時間之後,將初始廢棄物漿液與水之攪拌混合物供應至第一過濾系統20,並藉助過濾執行自初始廢棄物漿液與水之混合物分離該水及水溶性油之一製程。作為特定過濾方 法,可使用壓濾機實施一壓榨方法以將水與水溶性油分離。另一選擇為,可使用各種已知技術,例如離心。 In the process (S16), after a predetermined stirring time, the agitated mixture of the initial waste slurry and water is supplied to the first filtration system 20, and the water and water-soluble are separated from the mixture of the initial waste slurry and water by filtration. One of the oil processes. As a specific filter Alternatively, a press process can be performed using a filter press to separate water from the water soluble oil. Alternatively, various known techniques can be used, such as centrifugation.
經歷該過濾製程之後,可將該初始廢棄物漿液中所含之水溶性油移除至一預定量以獲得該含矽漿液。 After undergoing the filtration process, the water-soluble oil contained in the initial waste slurry can be removed to a predetermined amount to obtain the mash-containing slurry.
如下文所述,當將係為根據一例示性實施例所製作之一中間產物之含矽漿液被乾燥及碾磨時,可獲得含矽粉末。該含矽粉末含有大量矽及碳化矽且因此具有一極大熱值。因此,當將含矽粉末原樣插入至一轉爐等中時,可發生火災之風險。因此,該含矽粉末可經壓製且接著經處理以藉助磚形成製程(S60)形成具有一預定大小及形狀之磚塊。在此處,若係為製作用於升高溫度並調整組成之磚之中間產物的含矽粉末中所含油之量顯著不足,則可難以維持經壓縮磚之形式,且因此磚可易於破裂。因此,當一預定量之油被包含於該含矽粉末中時,該油可有助於磚之形成。當藉助初級油清洗製程(S10)所獲得之含矽漿液中所殘留之水溶性油的含量過量,則可藉助下文將闡述之次級油清洗製程(S30)另外移除水溶性油至一適當量。 As described below, when the mash-containing slurry which is an intermediate product produced according to an exemplary embodiment is dried and milled, a cerium-containing powder can be obtained. The cerium-containing powder contains a large amount of cerium and cerium carbide and thus has an extremely large heating value. Therefore, when the cerium-containing powder is inserted as it is into a converter or the like, there is a risk of fire. Therefore, the niobium-containing powder can be pressed and then processed to form a brick having a predetermined size and shape by means of a brick forming process (S60). Here, if the amount of the oil contained in the niobium-containing powder for making the intermediate product for raising the temperature and adjusting the composition is remarkably insufficient, it may be difficult to maintain the form of the compressed brick, and thus the brick may be easily broken. Therefore, when a predetermined amount of oil is contained in the niobium-containing powder, the oil can contribute to the formation of the brick. When the content of the water-soluble oil remaining in the mash-containing slurry obtained by the primary oil cleaning process (S10) is excessive, the water-soluble oil may be additionally removed by means of the secondary oil cleaning process (S30) which will be described later. the amount.
接下來,在分離製程(S20)中,藉助在初級油清洗製程(S10)中分離出之水溶性油及水之分餾執行水溶性油與水之分離製程。藉助此製程提取之水溶性油可在下文闡述之磚形成製程(S60)中再循環,且水可純化至不需要額外廢水處理製程之一程度。 Next, in the separation process (S20), the separation process of the water-soluble oil and water is performed by fractional distillation of the water-soluble oil and water separated in the primary oil cleaning process (S10). The water soluble oil extracted by this process can be recycled in the brick forming process (S60) set forth below, and the water can be purified to the extent that no additional wastewater treatment process is required.
將參照第7圖闡述在其中執行分離製程(S20)之分餾系統30之一特定組成之一實例。 An example of a specific composition of one of the fractionation systems 30 in which the separation process (S20) is performed will be explained with reference to FIG.
分餾系統30可包括一水/油儲存罐310、一幫浦320、一蒸餾 塔330、一第一收集單元340、一第二收集單元350、一第一熱交換器360、一第二熱交換器370、一水儲存罐380、及一油儲存罐390。 Fractionation system 30 can include a water/oil storage tank 310, a pump 320, a distillation The tower 330, a first collecting unit 340, a second collecting unit 350, a first heat exchanger 360, a second heat exchanger 370, a water storage tank 380, and an oil storage tank 390.
將藉助初級油清洗製程(S10)自初始廢棄物漿液與水之混合物分離之水溶性油及水供應至水/油儲存罐310並暫時儲存。 The water-soluble oil and water separated from the mixture of the initial waste slurry and water by the primary oil washing process (S10) are supplied to the water/oil storage tank 310 and temporarily stored.
在下文中,藉由使用其中水溶性油係由聚乙二醇(PEG)及二乙二醇(DEG)組成之一實例給出描述。以下描述中所揭示之溫度、壓力、流速等之值僅係實例且可根據具體需求而修改。 Hereinafter, the description is given by using an example in which the water-soluble oil system is composed of polyethylene glycol (PEG) and diethylene glycol (DEG). The values of temperature, pressure, flow rate, etc. disclosed in the following description are merely examples and may be modified according to specific needs.
在第7圖中,給出具體位置F、F1、F2、B1、B2、B3、W1、W2、及W3之溫度、壓力、及流速,在該等位置處,(例如)在構成該系統之組件之間之一供應流動途徑中安裝閥門。儲存於水/油儲存罐310中之水溶性油及水基於重量%具有大約20:13:67之PEG:DEG:水之混合比率。 In Figure 7, the temperatures, pressures, and flow rates for the specific locations F, F1, F2, B1, B2, B3, W1, W2, and W3 are given at which, for example, the system is constructed A valve is installed in one of the supply flow paths between the components. The water-soluble oil and water stored in the water/oil storage tank 310 have a mixing ratio of PEG:DEG:water of about 20:13:67 based on % by weight.
幫浦320在溫度大約20℃、壓力大約760mmHg、且流速大約300公斤/小時之條件下將水溶性油及水供應至蒸餾塔330。 The pump 320 supplies the water-soluble oil and water to the distillation column 330 at a temperature of about 20 ° C, a pressure of about 760 mmHg, and a flow rate of about 300 kg / hour.
蒸餾塔330係藉助分餾將水溶性油與水分離之一單元且可根據功能粗略地化分為一加熱單元、一冷卻單元、及一收集單元。 The distillation column 330 separates the water-soluble oil from the water by fractional distillation and can be roughly divided into a heating unit, a cooling unit, and a collecting unit according to functions.
例如,蒸餾塔330可在多個塔板(例如在10個塔板)中執行蒸餾。當將水溶性油及水加熱並藉由使用其鍋爐蒸汽具有大約150℃或以上之溫度之再沸器蒸餾時,溫度為大約51.5℃、壓力為大約100mmHg、且流速為大約200公斤/小時之水可收集於第一收集單元340中,且溫度為大約137℃、壓力為大約106mmHg、且流速為大約99.5公斤/小時之水溶性油(即,PEG/DEG)可收集於第二收集單元350中。 For example, distillation column 330 can perform distillation in a plurality of trays (eg, in 10 trays). When the water-soluble oil and water are heated and distilled by using a reboiler whose boiler steam has a temperature of about 150 ° C or higher, the temperature is about 51.5 ° C, the pressure is about 100 mmHg, and the flow rate is about 200 kg / hour. Water may be collected in the first collection unit 340, and a water soluble oil (ie, PEG/DEG) having a temperature of about 137 ° C, a pressure of about 106 mm Hg, and a flow rate of about 99.5 kg / hour may be collected in the second collection unit 350 in.
由第一收集單元340所供應之溫度為大約51.5℃、壓力為大 約100mmHg、且流速為大約200公斤/小時之水可穿過第一熱交換器360且然後在溫度為大約30℃、壓力為大約2967mmHg、且流速為大約200公斤/小時下供應至水儲存罐380。 The temperature supplied by the first collecting unit 340 is about 51.5 ° C, and the pressure is large. Water having a flow rate of about 200 kg/hr and having a flow rate of about 200 kg/hr may pass through the first heat exchanger 360 and then be supplied to the water storage tank at a temperature of about 30 ° C, a pressure of about 2967 mm Hg, and a flow rate of about 200 kg / hour. 380.
由第二收集單元350所供應之溫度為大約137℃、壓力為大約106mmHg、且流速為大約99.5公斤/小時之水溶性油穿過第二熱交換器370且接著在溫度為大約30℃、壓力為大約2967mmHg、及流速為大約99.5公斤/小時下供應至油儲存罐390。 The water-soluble oil supplied by the second collecting unit 350 having a temperature of about 137 ° C, a pressure of about 106 mmHg, and a flow rate of about 99.5 kg / hr passes through the second heat exchanger 370 and then at a temperature of about 30 ° C, pressure. It is supplied to the oil storage tank 390 at a rate of about 2967 mmHg and a flow rate of about 99.5 kg/hr.
水儲存罐380係用於儲存在穿過第一熱交換器360之後所供應水之一單元。所儲存水之溫度為大約30℃,壓力為大約760mmHg,且僅數PPM之化學需氧量(COD)(自模擬獲得)。因此,看起來幾乎不需要廢水處理。 The water storage tank 380 is for storing one unit of water supplied after passing through the first heat exchanger 360. The stored water has a temperature of about 30 ° C, a pressure of about 760 mm Hg, and a chemical oxygen demand (COD) of only a few PPM (obtained from the simulation). Therefore, it seems that almost no wastewater treatment is required.
油儲存罐390係用於儲存穿過第二熱交換器370之後所供應油之一單元。所儲存之油的溫度為大約30℃且壓力為大約760mmHg,並收集含有大約0.5重量%水分、大約60.3重量% PEG、及大約39.2重量% DEG(根據模擬結果)之油。 The oil storage tank 390 is for storing one unit of oil supplied after passing through the second heat exchanger 370. The stored oil was at a temperature of about 30 ° C and a pressure of about 760 mm Hg, and an oil containing about 0.5% by weight moisture, about 60.3 % by weight PEG, and about 39.2% by weight DEG (according to the simulation results) was collected.
接下來,在次級油清洗製程(S30)中,藉由將藉助初級油清洗製程(S10)自其分離水溶性油及水之漿液(即,藉由在攪拌之後在其中含矽漿液以一預定第二混合比率混合水之狀態下過濾)混合來執行清洗該含矽漿液中所殘留水溶性油之製程。 Next, in the secondary oil cleaning process (S30), the slurry of the water-soluble oil and water is separated therefrom by means of the primary oil cleaning process (S10) (ie, by containing the mash slurry therein after stirring) The process of washing the water-soluble oil remaining in the mash-containing slurry is performed by mixing and filtering in a state where the second mixing ratio is mixed with water.
例如,第二混合比率可經設定,以使得水之體積係含矽漿液之大約0.2至大約8倍,且次級油清洗製程(S30)可在大約50℃或以下之一低溫下執行。 For example, the second mixing ratio may be set such that the volume of water contains about 0.2 to about 8 times the mash slurry, and the secondary oil cleaning process (S30) can be performed at a low temperature of about 50 ° C or below.
如上所述,儘管藉助初級油清洗製程(S10)移除初始廢棄物漿液中所含之一預定量之水溶性油,但剩餘水溶性油可根據製程條件額外移除。為此,可執行次級油清洗製程(S30)。 As described above, although a predetermined amount of the water-soluble oil contained in the initial waste slurry is removed by the primary oil cleaning process (S10), the remaining water-soluble oil may be additionally removed according to the process conditions. To this end, a secondary oil cleaning process (S30) can be performed.
下文將詳細闡述次級油清洗製程S30。參見第4圖,次級油清洗製程(S30)可經構形以包括製程(S32、S34、及S36)。 The secondary oil cleaning process S30 will be described in detail below. Referring to Figure 4, the secondary oil cleaning process (S30) can be configured to include processes (S32, S34, and S36).
首先,在S32製程中,將來自藉助初級油清洗製程(S10)將水溶性油移除至一預定量之漿液(即,供應至一第二攪拌器40之含矽漿液)及一定量之水根據該預定第二混合比率供應至第二攪拌器40以執行將含矽漿液與水混合之製程。 First, in the S32 process, the water-soluble oil from the primary oil cleaning process (S10) is removed to a predetermined amount of slurry (i.e., the mash containing slurry supplied to a second agitator 40) and a certain amount of water. The second agitator 40 is supplied to the second agitator 40 in accordance with the predetermined second mixing ratio to perform a process of mixing the slurry containing the slurry with water.
含矽漿液與水之第二混合比率可設定在大約1:0.2至大約1:8(以體積比率計)之範圍內。換言之,該含係漿液可與水混合,以使得水的體積係該含矽漿液之大約0.2倍至大約8倍。 The second mixing ratio of the mash-containing slurry to water can be set in the range of from about 1:0.2 to about 1:8 (by volume ratio). In other words, the slurry containing the mixture can be mixed with water such that the volume of water is from about 0.2 times to about 8 times the volume of the mash containing slurry.
將含矽漿液及水以上述混合比率混合之原因係如下。 The reason why the mash-containing slurry and water are mixed at the above mixing ratio is as follows.
當考慮到含矽漿液之黏度時,在大約0.2倍或以下之混合比率之情形中,難以執行後續攪拌製程及泵送製程。在大約8或以上之混合比率之情形中,水溶性油之移除比率急劇增加而劣化隨後磚形成製程(S60)之成形性。 When the viscosity of the mash-containing slurry is taken into consideration, in the case of a mixing ratio of about 0.2 times or less, it is difficult to carry out the subsequent stirring process and the pumping process. In the case of a mixing ratio of about 8 or more, the removal ratio of the water-soluble oil sharply increases to deteriorate the formability of the subsequent brick forming process (S60).
換言之,與含矽漿液混合之水經歷攪拌及下文將闡述之過濾製程且接著與水溶性油混合,由此以廢水形式排放。廢水可為環境污染之一原因,且因此得執行一額外廢水處理製程。因此,增加水之量以易於執行廢水處理製程為有利的。此外,隨著水之量增加,油之清潔程度可增加,且因此自該含矽漿液移除之油的量亦可增加。 In other words, the water mixed with the mash-containing slurry is subjected to agitation and a filtration process as will be described later and then mixed with a water-soluble oil, thereby being discharged as waste water. Waste water can be one of the causes of environmental pollution, and thus an additional wastewater treatment process must be performed. Therefore, it is advantageous to increase the amount of water to facilitate the execution of the wastewater treatment process. Further, as the amount of water increases, the degree of cleanliness of the oil may increase, and thus the amount of oil removed from the mash-containing slurry may also increase.
如上所述,當將係根據一例示性實施例所產生之中間產物中之一者的含矽漿液被乾燥並碾磨時,可獲得含矽粉末。由於該含矽粉末具有一極大熱值,若該含矽粉末原樣插入至一轉爐等中時,可發生火災之風險。因此,該含矽粉末可經壓製且接著經處理以藉助磚形成製程(S60)形成具有一預定大小及形狀之磚塊。在此處,若係為製作用於升高溫度並調整組成之磚之中間產物的含矽粉末中所含油之量顯著不足,則可難以維持經壓縮磚之形式,且因此磚可易於破裂。因此,該含矽粉末可包含一預定量之油。 As described above, when the cerium-containing slurry which is one of the intermediate products produced according to an exemplary embodiment is dried and milled, a cerium-containing powder can be obtained. Since the niobium-containing powder has an extremely large calorific value, if the niobium-containing powder is inserted into a converter or the like as it is, a risk of fire may occur. Therefore, the niobium-containing powder can be pressed and then processed to form a brick having a predetermined size and shape by means of a brick forming process (S60). Here, if the amount of the oil contained in the niobium-containing powder for making the intermediate product for raising the temperature and adjusting the composition is remarkably insufficient, it may be difficult to maintain the form of the compressed brick, and thus the brick may be easily broken. Therefore, the cerium-containing powder may contain a predetermined amount of oil.
因此,含矽粉末及水之混合比率可如上所述設定以增加廢水處理製程及磚製作之效率。 Therefore, the mixing ratio of the cerium-containing powder and water can be set as described above to increase the efficiency of the wastewater treatment process and brick production.
接下來,在製程(S34)中,藉由驅使執行操作第二攪拌器40以促進含矽漿液中殘留之該水溶性油之溶解,由此執行與水混合之含矽漿液之攪拌。 Next, in the process (S34), the second stirrer 40 is operated to drive the dissolution of the water-soluble oil remaining in the mash-containing slurry, thereby performing the stirring of the mash-containing slurry mixed with water.
接下來,在製程(S36)中,當經過預設定攪拌時間之後,其中將與水一起攪拌之該含矽漿液供應至一第二過濾系統50以過濾溶於其中之水及水溶性油並自含矽漿液移除水及水溶性油之一製程。各種已知技術可作為特定過濾方法實施。 Next, in the process (S36), after a predetermined stirring time, the mash-containing slurry which is stirred with water is supplied to a second filtration system 50 to filter water and water-soluble oil dissolved therein. One of the processes for removing water and water-soluble oil from the slurry. Various known techniques can be implemented as specific filtration methods.
在藉由使用水清洗該含矽漿液之製程中,若水溫度過低,則油清洗能力可稍微有所劣化。另一方面,若水溫度過高,則可藉助矽與水反應產生二氧化矽(SiO2)而劣化放熱性質。因此,為防止此限制,根據一例示性實施例,整個或一部分次級油清洗製程(S30)可在50℃或以下之低溫下執行。 In the process of washing the mash containing slurry by using water, if the water temperature is too low, the oil cleaning ability may be slightly deteriorated. On the other hand, if the water temperature is too high, the antimony can be deteriorated by the reaction of hydrazine with water to produce cerium oxide (SiO 2 ). Therefore, to prevent this limitation, according to an exemplary embodiment, the entire or a portion of the secondary oil cleaning process (S30) can be performed at a low temperature of 50 ° C or below.
接下來,在乾燥製程(S40)中,執行其中將藉助次級油清洗製程(S30)清洗水溶性油之含矽漿液供應至一乾燥器60以在一預定乾燥溫度下乾燥該含矽漿液之製程。乾燥製程(S40)可視需要選擇性執行。舉例而言,乾燥製程(S40)可作為一自然乾燥製程執行或在200℃或以下之溫度下在一空氣或氮氣氛下執行。 Next, in the drying process (S40), the mash-containing slurry in which the water-soluble oil is washed by the secondary oil cleaning process (S30) is supplied to a dryer 60 to dry the mash-containing slurry at a predetermined drying temperature. Process. The drying process (S40) can be selectively performed as needed. For example, the drying process (S40) can be performed as a natural drying process or at an air or nitrogen atmosphere at a temperature of 200 ° C or below.
下文將詳細闡述乾燥製程S40。 The drying process S40 will be explained in detail below.
乾燥製程S40可為在碾磨之前乾燥該含矽漿液之一製程,而該含矽漿液中已將該水溶性油移除至一預定量。 The drying process S40 may be a process of drying the mash-containing slurry prior to milling, and the water-soluble oil has been removed to a predetermined amount in the mash-containing slurry.
在此處,當含矽漿液中所含之矽暴露於空氣狀態達一預定時間或更長時,矽被空氣中之氧氧化而產生二氧化矽。因此,可使加熱劑之放熱性質或鋼液之組成調整效率劣化。 Here, when the niobium contained in the niobium-containing slurry is exposed to the air state for a predetermined time or longer, the niobium is oxidized by oxygen in the air to generate cerium oxide. Therefore, the exothermic property of the heating agent or the composition adjustment efficiency of the molten steel can be deteriorated.
因此,為防止此限制,含矽漿液之乾燥製程係在200℃或以下之溫度下、或更特定而言在大約110℃至大約130℃之溫度下在空氣或氮氣氛下執行。當在氮氣氛下乾燥含矽漿液時,乾燥溫度可增加至一高溫而不會氧化矽,且因此乾燥速率可較快,且乾燥率可增加。 Therefore, to prevent this limitation, the drying process of the mash-containing slurry is carried out at a temperature of 200 ° C or below, or more specifically at a temperature of about 110 ° C to about 130 ° C under an air or nitrogen atmosphere. When the mash-containing slurry is dried under a nitrogen atmosphere, the drying temperature can be increased to a high temperature without ruthenium oxide, and thus the drying rate can be faster, and the drying rate can be increased.
在碾磨製程(S50)中,將藉助乾燥製程(S40)形成之呈塊狀形式之含矽漿液供應至一磨機70且接著碾磨。碾磨製程(S50)可視需要選擇性執行。 In the milling process (S50), the mash-containing slurry formed in the form of a block formed by the drying process (S40) is supplied to a mill 70 and then milled. The milling process (S50) can be selectively performed as needed.
例如,在碾磨製程(S50)中,可將經乾燥含矽漿液碾磨成直徑大約5公分或以下之粒子。碾磨製程(S50)之後,獲得為中間產物之一的含矽粉末。在此處,粉末可具有一規則或不規則形式。 For example, in the milling process (S50), the dried mash-containing slurry can be ground into particles having a diameter of about 5 cm or less. After the milling process (S50), a cerium-containing powder which is one of the intermediate products was obtained. Here, the powder may have a regular or irregular form.
接下來,在磚形成製程(S60)中,將一黏合劑添加至藉助 碾磨製程(S50)獲得之含矽粉末,以攪拌該混合物。接著,執行藉由使用一磚形成裝置80使混合物形成一磚之製程。在此處,儘管闡述藉助乾燥及碾磨含矽漿液並藉由使用含矽粉末形成磚之製程,但當不執行乾燥及碾磨製程時,該磚可藉由使用含矽漿液形成。 Next, in the brick forming process (S60), a binder is added to the aid The cerium-containing powder obtained by the milling process (S50) is stirred to agitate the mixture. Next, a process of forming the mixture into a brick by using a brick forming device 80 is performed. Here, although a process of forming a brick by drying and milling the mash-containing slurry and using the cerium-containing powder is described, the brick can be formed by using a mash-containing slurry when the drying and milling process is not performed.
下文將詳細闡述磚形成製程(S60)。 The brick forming process (S60) will be described in detail below.
參見第5圖,磚形成製程(S60)可包括製程(S62、S64、及S66)。 Referring to Fig. 5, the brick forming process (S60) may include processes (S62, S64, and S66).
在製程(S62)中,執行將Fe源及黏合劑添加至藉助碾磨製程(S50)獲得之含矽黏合劑之製程。 In the process (S62), a process of adding a Fe source and a binder to the ruthenium-containing binder obtained by the milling process (S50) is performed.
Fe源之添加係可選的,且添加該Fe源之原因之一係調節最後所製作磚之比重。在煉鋼製程之鋼液製作製程期間,將為根據一例示性實施例所製作之最終產物之用於升高溫度及調整組成之磚放入轉爐中。當磚之比重過低時,磚不能滲入至鋼液中且因此漂浮於鋼液之表面上而劣化溫度升高效率及組成調整效率。 The addition of the Fe source is optional, and one of the reasons for adding the Fe source is to adjust the specific gravity of the last fabricated brick. During the steel making process of the steelmaking process, the bricks used to raise the temperature and adjust the composition of the final product made according to an exemplary embodiment are placed in a converter. When the specific gravity of the brick is too low, the brick cannot penetrate into the molten steel and thus float on the surface of the molten steel to deteriorate the temperature increase efficiency and composition adjustment efficiency.
因此,將Fe源添加至該含矽粉末。在此處,該Fe源可選擇性添加,且Fe源可藉助一分選製程(例如磁性分離)自煉鋼礦渣分選。 Therefore, a Fe source is added to the cerium-containing powder. Here, the Fe source can be selectively added, and the Fe source can be sorted from the steel slag by means of a sorting process (eg, magnetic separation).
例如,在磚形成製程(S60)中,磚可經設定以基於含矽粉末、Fe源、及黏合劑之總重量具有大約35重量%至大約97重量%之含矽粉末、大約0重量%至50重量%之Fe源、及大約3重量%至大約15重量%之黏合劑。在此處,大約0重量%之Fe源指示不添加該Fe源。 For example, in the brick forming process (S60), the bricks may be set to have from about 35% by weight to about 97% by weight, based on the total weight of the cerium-containing powder, Fe source, and binder, of cerium-containing powder, about 0% by weight to 50% by weight of the Fe source, and from about 3% by weight to about 15% by weight of the binder. Here, about 0% by weight of the Fe source indicates that the Fe source is not added.
製程(S62)中所添加之黏合劑藉由將黏度賦予含矽粉末或含有矽及Fe源之粉末而用於形成磚且可包括糖漿、澱粉、膨潤土及氫氧化 鈣、及矽酸鈉中之至少一者。 The binder added in the process (S62) is used to form bricks by imparting viscosity to the cerium-containing powder or the powder containing cerium and Fe sources and may include syrup, starch, bentonite and hydroxide. At least one of calcium, and sodium citrate.
而且,黏合劑可更包含在初級或次級油清洗製程中分離之水及水溶性油或在分離製程中分離之水溶性油及水中之至少一者。 Moreover, the binder may further comprise at least one of water and water-soluble oil separated in the primary or secondary oil cleaning process or water-soluble oil and water separated in the separation process.
形成黏合劑之材料間之混合比率可根據情形而改變,且水、水溶性油、或該水及該水溶性油二者可與黏合劑混合。 The mixing ratio between the materials forming the binder may vary depending on the circumstances, and water, a water-soluble oil, or both of the water and the water-soluble oil may be mixed with the binder.
例如,當水及水溶性油二者混合且用於黏合劑中時,藉助初級油清洗製程(S10)自初始廢棄物漿液分離之水及水溶性油可作為包含於黏合劑中之材料重新使用。 For example, when water and a water-soluble oil are mixed and used in a binder, water and water-soluble oil separated from the initial waste slurry by the primary oil cleaning process (S10) can be reused as a material contained in the binder. .
在另一實例中,當藉由與水混合使用黏合劑時,藉助分離製程(S20)與水溶性油分離之水可作為包含於黏合劑中之材料重新使用。在此情形中,一部分Si可經氧化以變為SiO2,藉此劣化在最後製程中用於升高溫度及調整組成之磚的效率。當藉由與水混合使用黏合劑時,可將最少量之水與黏合劑混合以形成磚,藉此防止Si氧化。 In another example, when the binder is used by mixing with water, the water separated from the water-soluble oil by the separation process (S20) can be reused as a material contained in the binder. In this case, a part of Si may be oxidized to become SiO 2 , thereby deteriorating the efficiency of the brick for raising the temperature and adjusting the composition in the final process. When a binder is used by mixing with water, a minimum amount of water can be mixed with the binder to form a brick, thereby preventing oxidation of Si.
在另一實例中,當藉由與水溶性油混合使用黏合劑時,藉助分離製程(S20)與水分離之水溶性油可作為包含於黏合劑中之材料重新使用。如上所述,當黏合劑與水溶性油而非水混合時,可防止Si氧化。 In another example, when the binder is used by mixing with a water-soluble oil, the water-soluble oil separated from the water by the separation process (S20) can be reused as a material contained in the binder. As described above, when the binder is mixed with a water-soluble oil other than water, Si oxidation can be prevented.
在製程(S64)中,執行攪拌並充分混合添加黏合劑之含矽粉末或含有矽及Fe源之粉末之組合物之一製程。當然,對於攪拌,磚形成裝置80可具有一自我攪拌功能,或亦可使用一分離攪拌器作為磚形成裝置80。 In the process (S64), a process of stirring and sufficiently mixing one of the binder-containing cerium-containing powder or the composition containing the cerium and Fe source powder is performed. Of course, for agitation, the brick forming device 80 may have a self-stirring function, or a separate agitator may be used as the brick forming device 80.
在製程(S66)中,藉由使用磚形成裝置80執行使向其添加黏合劑並攪拌之含矽粉末或含有矽及Fe源之粉末形成具有一特定形式之一 磚之一製程。 In the process (S66), by using the brick forming device 80, the cerium-containing powder to which the binder is added and stirred, or the powder containing cerium and Fe source is formed to have one of the specific forms. One of the bricks.
根據上述之一實施例,在製造半導體或太陽能晶圓期間生成之含矽廢棄物漿液可經純化以形成粉末,且接著可將黏合劑添加至粉末以藉助壓塊形成該磚。在此處,可以低成本及高效率製作在煉鋼製程中用於升高鋼液之溫度並調整組成之磚。 According to one embodiment described above, the ruthenium-containing waste slurry produced during the manufacture of the semiconductor or solar wafer can be purified to form a powder, and then a binder can be added to the powder to form the brick by means of a compact. Here, the brick for raising the temperature of the molten steel and adjusting the composition in the steel making process can be produced at low cost and high efficiency.
此外,為環境污染之原因的矽廢棄物漿液可經再循環並在煉鋼廠之煉鋼設備中用於升高鋼液之溫度並調整組成而無需燃燒或掩埋。因此,可降低廢棄產物處理成本,且可藉助成本降低改良價格競爭力。此外,可最小化在煉鋼製程期間可發生之環境污染。 In addition, the waste slurry for environmental pollution can be recycled and used in steelmaking plants in steel mills to raise the temperature of the molten steel and adjust the composition without burning or burying. Therefore, the disposal cost of waste products can be reduced, and the price competitiveness can be improved by cost reduction. In addition, environmental pollution that can occur during the steelmaking process can be minimized.
含有在矽廢棄物漿液之粉化製程中所生成之水溶性油及水的廢水可作為製作磚所需之添加劑。因此,可不需要再處理所排放廢水,或廢水可在純化至不需要再處理之量後排放。因此,可提供製作在煉鋼製程中用於升高鋼液之溫度並調整組成之磚的環境友好且經濟之方法。 Waste water containing water-soluble oil and water formed in the pulverization process of the mash waste slurry can be used as an additive for making bricks. Therefore, it is not necessary to treat the discharged wastewater again, or the wastewater can be discharged after being purified to an amount that does not require further treatment. Thus, an environmentally friendly and economical method of making bricks for raising the temperature of the molten steel and adjusting the composition in the steelmaking process can be provided.
水溶性油可藉由添加水溶性油而非水至在磚製作製程期間維持含矽粉末之黏度所用之黏合劑來重新使用。因此,可提供製作用於升高溫度並調整組成之磚的方法,該磚可防止品質因矽氧化而劣化。 The water soluble oil can be reused by adding a water soluble oil rather than water to the binder used to maintain the viscosity of the cerium containing powder during the brick making process. Therefore, it is possible to provide a method of fabricating a brick for raising the temperature and adjusting the composition, which prevents deterioration of quality due to oxidation of ruthenium.
該矽廢棄物漿液可經粉末化且接著形成該磚。因此,該磚可容易地放入煉鋼製程中之轉爐中,並去除由粉末造成之火災或爆炸之危險。 The mash waste slurry can be pulverized and then formed into the brick. Therefore, the brick can be easily placed in a converter in a steelmaking process and removes the risk of fire or explosion caused by the powder.
而且,視為廢棄物之矽粉末可形成為用於在煉鋼製程中升高鋼液之溫度並調整組成之磚產物。因此,存在免於法規(例如關於廢棄產物在各地間之運轉等)束縛之作用。 Moreover, the tantalum powder regarded as waste can be formed into a brick product for raising the temperature of the molten steel in the steel making process and adjusting the composition. Therefore, there is a role of being free from regulations (for example, regarding the operation of waste products in various places, etc.).
根據例示性實施例,在製造半導體或太陽能晶圓期間生成之 含矽廢棄物漿液可經純化以形成粉末,且接著可將黏合劑添加至粉末以藉助壓塊形成在煉鋼製程中用於升高鋼液之溫度並調整組成之磚,藉此降低煉鋼成本。 According to an exemplary embodiment, generated during the manufacture of a semiconductor or solar wafer The cerium-containing waste slurry can be purified to form a powder, and then the binder can be added to the powder to form a brick in the steelmaking process for raising the temperature of the molten steel and adjusting the composition by means of the compact, thereby reducing the steelmaking cost.
而且,為環境污染之原因的矽廢棄物漿液可經再循環並在煉鋼廠之煉鋼設備中用於升高鋼液之溫度並調整組成而無需燃燒或掩埋。因此,可降低廢棄產物處理成本,且可藉助成本降低改良價格競爭力。此外,可最小化在煉鋼製程期間可發生之環境污染。 Moreover, the mash slurry for environmental pollution can be recycled and used in steelmaking plants in steel mills to raise the temperature of the molten steel and adjust the composition without burning or burying. Therefore, the disposal cost of waste products can be reduced, and the price competitiveness can be improved by cost reduction. In addition, environmental pollution that can occur during the steelmaking process can be minimized.
含有在矽廢棄物漿液之粉化製程中所生成之水溶性油及水的廢水可作為製作磚所需之添加劑。因此,可不需要再處理所排放廢水,或廢水可在純化至不需要再處理之量後排放。因此,在煉鋼製程中用於升高鋼液之溫度並調整組成之磚可環境友好且經濟地製作。 Waste water containing water-soluble oil and water formed in the pulverization process of the mash waste slurry can be used as an additive for making bricks. Therefore, it is not necessary to treat the discharged wastewater again, or the wastewater can be discharged after being purified to an amount that does not require further treatment. Therefore, bricks used to raise the temperature of the molten steel and adjust the composition in the steel making process can be produced environmentally friendly and economically.
水溶性油可藉由添加水溶性油而非水至用於在磚製作製程期間維持含矽粉末之黏度所用之黏合劑來重新使用以防止產物品質劣化。 The water-soluble oil can be reused by adding a water-soluble oil instead of water to the binder used to maintain the viscosity of the cerium-containing powder during the brick making process to prevent deterioration of product quality.
該矽廢棄物漿液可經粉末化且接著形成磚。因此,該磚可容易地放入煉鋼製程中之轉爐中,並去除由粉末造成之火災或爆炸之危險。 The mash slurry can be pulverized and then formed into bricks. Therefore, the brick can be easily placed in a converter in a steelmaking process and removes the risk of fire or explosion caused by the powder.
而且,視為廢棄物之矽粉末可形成為用於在煉鋼製程中升高鋼液之溫度並調整組成之磚產物。因此,存在免於法規(例如關於廢棄產物在各地間之運轉等)束縛之作用。 Moreover, the tantalum powder regarded as waste can be formed into a brick product for raising the temperature of the molten steel in the steel making process and adjusting the composition. Therefore, there is a role of being free from regulations (for example, regarding the operation of waste products in various places, etc.).
儘管已參照附圖闡述本發明之基本特徵,但其僅係例示性實施例且並非限制本發明。而且,應易於瞭解,可由熟悉此項技術者作出各種修改及改變而不背離本發明之精神及範圍。 Although the essential features of the invention have been described with reference to the drawings, they are merely exemplary embodiments and are not intended to limit the invention. In addition, it should be readily understood that various modifications and changes can be made by those skilled in the art without departing from the spirit and scope of the invention.
S10、S20、S30、S40、S50‧‧‧步驟 S10, S20, S30, S40, S50‧‧ steps
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