TW201614764A - Carrying device having holding mechanism and holding mechanism thereof - Google Patents

Carrying device having holding mechanism and holding mechanism thereof

Info

Publication number
TW201614764A
TW201614764A TW103134206A TW103134206A TW201614764A TW 201614764 A TW201614764 A TW 201614764A TW 103134206 A TW103134206 A TW 103134206A TW 103134206 A TW103134206 A TW 103134206A TW 201614764 A TW201614764 A TW 201614764A
Authority
TW
Taiwan
Prior art keywords
carrying plate
holding mechanism
engaging
rotating shaft
ring frame
Prior art date
Application number
TW103134206A
Other languages
Chinese (zh)
Other versions
TWI545686B (en
Inventor
Chih-Ming Teng
Original Assignee
Els System Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Els System Technology Co Ltd filed Critical Els System Technology Co Ltd
Priority to TW103134206A priority Critical patent/TWI545686B/en
Publication of TW201614764A publication Critical patent/TW201614764A/en
Application granted granted Critical
Publication of TWI545686B publication Critical patent/TWI545686B/en

Links

Abstract

A carrying device having a holding mechanism is used to carry and suck a to-be-processed object. The to-be-processed object includes a ring frame member and a wafer adhered to the ring frame member. The carrying device includes a carrying plate and a plurality of holding mechanisms surrounding the carrying plate. The carrying plate is configured to carry and suck the to-be-processed object. Each holding mechanism includes a support disposed at the periphery of the carrying plate and an engaging assembly disposed on the support. The engaging assembly includes a rotating shaft rotatably pivoted to the support, an engaging member disposed on the rotating shaft, and a windshield connected to the rotating shaft. When the carrying plate rotates, the windshield is driven by wind to drive the rotating shaft to rotate and further drive the engaging member to rotate to an engagement position for engaging the ring frame member. When the carrying plate stops rotating, the engaging member returns to a disengaging position.
TW103134206A 2014-10-01 2014-10-01 A load bearing device having a holding mechanism and a cockerel mechanism TWI545686B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW103134206A TWI545686B (en) 2014-10-01 2014-10-01 A load bearing device having a holding mechanism and a cockerel mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW103134206A TWI545686B (en) 2014-10-01 2014-10-01 A load bearing device having a holding mechanism and a cockerel mechanism

Publications (2)

Publication Number Publication Date
TW201614764A true TW201614764A (en) 2016-04-16
TWI545686B TWI545686B (en) 2016-08-11

Family

ID=56361282

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103134206A TWI545686B (en) 2014-10-01 2014-10-01 A load bearing device having a holding mechanism and a cockerel mechanism

Country Status (1)

Country Link
TW (1) TWI545686B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI626711B (en) * 2017-04-14 2018-06-11 Els System Technology Co Ltd Clamping mechanism and carrying device having the same
CN116598251A (en) * 2023-06-09 2023-08-15 大连皓宇电子科技有限公司 Carrying frame for semiconductor equipment
CN116598251B (en) * 2023-06-09 2024-05-10 大连皓宇电子科技有限公司 Carrying frame for semiconductor equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI626711B (en) * 2017-04-14 2018-06-11 Els System Technology Co Ltd Clamping mechanism and carrying device having the same
CN116598251A (en) * 2023-06-09 2023-08-15 大连皓宇电子科技有限公司 Carrying frame for semiconductor equipment
CN116598251B (en) * 2023-06-09 2024-05-10 大连皓宇电子科技有限公司 Carrying frame for semiconductor equipment

Also Published As

Publication number Publication date
TWI545686B (en) 2016-08-11

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