TW201614764A - Carrying device having holding mechanism and holding mechanism thereof - Google Patents
Carrying device having holding mechanism and holding mechanism thereofInfo
- Publication number
- TW201614764A TW201614764A TW103134206A TW103134206A TW201614764A TW 201614764 A TW201614764 A TW 201614764A TW 103134206 A TW103134206 A TW 103134206A TW 103134206 A TW103134206 A TW 103134206A TW 201614764 A TW201614764 A TW 201614764A
- Authority
- TW
- Taiwan
- Prior art keywords
- carrying plate
- holding mechanism
- engaging
- rotating shaft
- ring frame
- Prior art date
Links
Abstract
A carrying device having a holding mechanism is used to carry and suck a to-be-processed object. The to-be-processed object includes a ring frame member and a wafer adhered to the ring frame member. The carrying device includes a carrying plate and a plurality of holding mechanisms surrounding the carrying plate. The carrying plate is configured to carry and suck the to-be-processed object. Each holding mechanism includes a support disposed at the periphery of the carrying plate and an engaging assembly disposed on the support. The engaging assembly includes a rotating shaft rotatably pivoted to the support, an engaging member disposed on the rotating shaft, and a windshield connected to the rotating shaft. When the carrying plate rotates, the windshield is driven by wind to drive the rotating shaft to rotate and further drive the engaging member to rotate to an engagement position for engaging the ring frame member. When the carrying plate stops rotating, the engaging member returns to a disengaging position.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103134206A TWI545686B (en) | 2014-10-01 | 2014-10-01 | A load bearing device having a holding mechanism and a cockerel mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW103134206A TWI545686B (en) | 2014-10-01 | 2014-10-01 | A load bearing device having a holding mechanism and a cockerel mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201614764A true TW201614764A (en) | 2016-04-16 |
TWI545686B TWI545686B (en) | 2016-08-11 |
Family
ID=56361282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW103134206A TWI545686B (en) | 2014-10-01 | 2014-10-01 | A load bearing device having a holding mechanism and a cockerel mechanism |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI545686B (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI626711B (en) * | 2017-04-14 | 2018-06-11 | Els System Technology Co Ltd | Clamping mechanism and carrying device having the same |
CN116598251A (en) * | 2023-06-09 | 2023-08-15 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
CN116598251B (en) * | 2023-06-09 | 2024-05-10 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
-
2014
- 2014-10-01 TW TW103134206A patent/TWI545686B/en active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI626711B (en) * | 2017-04-14 | 2018-06-11 | Els System Technology Co Ltd | Clamping mechanism and carrying device having the same |
CN116598251A (en) * | 2023-06-09 | 2023-08-15 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
CN116598251B (en) * | 2023-06-09 | 2024-05-10 | 大连皓宇电子科技有限公司 | Carrying frame for semiconductor equipment |
Also Published As
Publication number | Publication date |
---|---|
TWI545686B (en) | 2016-08-11 |
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