TW201610410A - Liquid sample drying device, dried sample specimen and the preparation method for the dried sample specimen - Google Patents

Abstract

A liquid sample drying device, dried sample specimen and the preparation method for the dried sample specimen by applying the liquid sample drying device are provided. The liquid sample drying device includes two bases, at least one spacer, and a clamping member. Each of the two bases includes a surface. The two surfaces face each other. Said at least one spacer is located in between the bases so as to form a sample region between the surfaces for receiving a liquid sample. The clamping member touches the two bases so as to temporarily clamp and fix the two bases and said at least one spacer together.

Description

Liquid sample drying device, dry sample test piece and dry sample test piece preparation method

The invention relates to a liquid sample drying device, in particular to a liquid sample drying device which can be used for microscopic observation, a dry sample test piece preparation method using a liquid sample drying device, and a drying method prepared by a dry sample test piece preparation method. Sample test piece.

With the advancement of microscopy technology, various microscopes have been developed, such as optical microscopes, Atomic Force Microscopes (AFMs), electron microscopes such as Transmission Electron Microscopes (TEM), and scanning electrons. Microscope (Scanning Electron Microscope, SEM) and the like.

In general, in order to cooperate with the observation of the microscope, various sample test devices for carrying the sample are correspondingly produced, for example, a liquid sample test piece and a dry sample test piece.

Please refer to FIGS. 1A to 1E for a schematic flow chart of a liquid sample to be prepared into a dry sample test piece. The user places the liquid sample 11 containing the suspended particles 11C and the suspended particles 11N on the test piece substrate 10 (as shown in FIGS. 1A and 1B). Next, the liquid sample 11 is dried. However, as shown in Fig. 1B, since the liquid sample 11 is affected by the surface tension, it is suspended. The external force received by the floating particles 11C and the suspended particles 11N is unbalanced, and the suspended particles 11C and the suspended particles 11N are caused to flow and aggregate during the drying process. Therefore, the suspended particles 11C and the suspended particles 11N are caused to form an aggregation phenomenon as shown in FIGS. 1C to 1E. For example, after the suspended particles 11N in the partial liquid sample 13 of FIG. 1C are dried, they are aggregated to form a 1D pattern and Poly group A1 in Fig. 1E. The agglomeration phenomenon described above will cause the user to be able to confirm that the aggregation of the liquid sample 11 after drying is caused by the characteristics of the sample itself when the sample is observed by the microscope. Or is it caused by the aggregation caused by the drying process?

Therefore, how to prepare a uniform dry sample test piece which can eliminate the aggregation phenomenon caused by the surface tension of the liquid is one of the problems to be solved by those skilled in the art.

A dry liquid sample device and method have been disclosed in US Application No. US 2014/0007709 A1, but the disclosed dry liquid sample device comprises two upper and lower substrates and the two substrates cannot be easily opened, so that the observation instrument cannot be directly contacted. The surface of the substrate. Therefore, the aforementioned apparatus for drying a liquid sample can be applied only to a specific microscope such as an electron microscope. However, for example, an atomic force microscope requires a close proximity of the probe tip to a dry sample (nano-scale distance), which would not allow the use of a dry liquid sample as described in the previous section.

Therefore, it is a problem to be solved by the present invention how to simultaneously prepare a dry sample test piece capable of overcoming the aggregation phenomenon caused by the surface tension of the liquid and forming an unmasked sample.

In view of the above problems, the present invention provides a liquid sample drying device and a method for preparing a dry sample test piece which is performed by using the liquid sample drying device, thereby obtaining a dry sample test piece which can be uniformly affected by the surface tension of the liquid, Overcome the aggregation phenomenon during the drying process. In addition, the liquid sample drying device can be easily opened, so the user can take the dried sample. This is exposed on the surface of the dried sample test piece. Thus, in addition to the electron microscope, the unmasked dry sample test piece can greatly increase the applicable analytical observation range of the test piece. Analytical methods such as atomic force microscopy, matrix-assisted laser desorption mass spectrometry (MALDI-TOF-MS), and even probe contact for electrical testing.

Based on the above object, a liquid sample drying device according to the present invention comprises: two substrates, each substrate has a surface, and two surfaces are oppositely disposed; at least one spacer is disposed between the two substrates so as to form between the two surfaces. a sample receiving area for accommodating a liquid sample; and a clamping member contacting the two substrates such that the two substrates and the spacer are temporarily clamped and fixed.

Based on the above liquid sample drying device and its possible variations, the present invention provides a method for preparing a dried sample test piece, comprising the steps of: obtaining a liquid sample drying device as described above or a variation thereof; receiving a liquid sample to a sample a receiving area; drying the liquid sample such that a portion of the dried liquid sample adheres to a surface of the at least one substrate, wherein the substrate is the first substrate and the surface is the first surface, or the substrate is the second substrate and the surface is the second surface And forming at least one dry sample test piece; and removing the clamping member to obtain the separated dry sample test piece.

In at least one embodiment of the present invention, the step of removing the clamping member further comprises a cutting and splitting step of cutting and separating the dried sample test piece from the liquid sample drying device to facilitate the removal of the clamping member.

Based on the above preparation method, the present invention also provides a dried sample test piece obtained by the method for preparing a dried sample test piece. Wherein the dried sample test piece has a liquid sample after drying A part of the product and the substrate, and a part of the liquid sample after drying is attached to the surface of the substrate. For example, a portion of the liquid sample after drying is attached to the first surface of the first substrate, or a portion of the liquid sample is attached to the second surface of the second substrate after drying.

In another aspect, the present invention provides another liquid sample drying device, comprising two substrates, each substrate having a surface, two surfaces are oppositely disposed; and at least one bonding member bonded and fixed between the two substrates, and then two surfaces A sample receiving area is formed therebetween; wherein the substrate is provided with at least one cutting and cracking zone, and the cutting and cracking zone extends in the thickness direction of the substrate and is located between the sample receiving area and the joint. For example, the two substrates are respectively a first substrate and a second substrate. The first substrate is provided with at least one first cutting and cracking region in the bonding member, and the second substrate is provided with at least one second cutting and cracking in the bonding member. The first cutting split zone and the second cutting splitting zone extend vertically and are located between the sample receiving area and the at least one engaging member. Vertical extension means extending to the thickness direction of the substrate.

In at least one embodiment of the present invention, the another liquid sample drying device further comprises at least one spacer, the spacer is placed between the two substrates and the spacer and the sample receiving area are located on the same side of the cutting and cracking region, To avoid direct contact between the two surfaces, protect the dried sample.

Based on the above another liquid sample drying device and its possible variations, the present invention provides another method for preparing a dry sample test piece, comprising the steps of: obtaining a liquid sample drying device of the foregoing another and its possible variations; Receiving a liquid sample to the sample receiving area; drying the liquid sample such that a portion of the dried liquid sample adheres to a surface of the at least one substrate; along at least one of the cutting cracking regions (eg, the first cutting cracking zone and the second cutting crack A portion of the substrate (eg, the first substrate and the second substrate) is cut or fractured to cause removal of the joint, thereby obtaining a separate dried sample test piece. Wherein the substrate is the first substrate and the surface is the first surface, or the base The plate is a second substrate and the surface is a second surface, thereby forming at least one dry sample test piece.

Based on the above other preparation method, the present invention also provides a dried sample test piece obtained by the method for preparing a dry sample of the other. Wherein, the dried sample test piece has a part of the liquid sample after drying and the substrate. A portion of the liquid sample adhered to the surface of the substrate after drying. For example, a portion of the liquid sample after drying adheres to the second surface of the second substrate or to the first surface of the first substrate.

In another aspect, the present invention provides another liquid sample drying apparatus, comprising: two substrates, each substrate has a surface, and two surfaces are oppositely disposed; at least one bonding member is bonded and fixed between the two substrates, and further A sample receiving area is formed between the two surfaces and the at least one bonding member for accommodating a liquid sample; and at least one spacer is disposed between the two substrates.

In at least one embodiment of the invention, the spacer and the sample receiving area are on the same side of the joint.

In still another liquid sample drying apparatus according to at least one embodiment of the present invention, the substrate, such as the first substrate or the second substrate, is provided with at least one cutting and cracking region in the joint member, and the cutting and cracking region extends to The thickness direction of the substrate is between the sample receiving area and the at least one joint. For example, the first substrate is provided with at least one first cutting and cracking region in the joint member, and the second substrate is provided with at least one second cutting and cracking region, the first cutting and cracking region and the second cutting crack in the joint member. The system extends vertically between the sample receiving area and the at least one engaging member.

Based on the above another liquid sample drying device and its possible variations, the present invention provides yet another method for preparing a dry sample test piece, comprising the steps of: obtaining a liquid sample drying device of the foregoing or another variation thereof. Receiving a liquid sample to the sample receiving area; drying the liquid sample such that a portion of the dried liquid sample adheres to at least one a surface of the substrate, wherein the substrate is the first substrate and the surface is the first surface or the substrate is the second substrate and the surface is the second surface, thereby forming at least one dry sample test strip; and removing at least one joint member to The dried test piece of the dried sample was obtained.

In at least one embodiment of the present invention, the manner of removing the at least one engaging member is selected to be one of a combination of stress applying, laser cutting, cutter cutting, grinding removal, and laser stealth cutting, or a combination thereof. Cracking or cutting a portion of the substrate having the joint.

In at least one embodiment of the invention, the manner in which the liquid sample is dried is, for example, natural evapotranspiration, vacuum drying, low humidity environment drying, heat drying, low temperature drying, nitrogen environment drying, or dry air drying. Of course, it can also be combined.

Based on still another preparation method described above, the present invention also provides a dried sample test piece obtained by the method for preparing a dried sample of the other. Wherein, the dried sample test piece has a part of the liquid sample after drying and a substrate. A portion of the liquid sample adhered to the surface of the substrate after drying. For example, a portion of the liquid sample after drying adheres to the second surface of the second substrate or to the first surface of the first substrate.

Based on the foregoing liquid sample drying device, in at least one embodiment of the present invention, the second substrate is provided with a groove, the second surface is a bottom surface of the groove, and at least one spacer is a sidewall of the groove, and the sample receiving area is located Inside the groove.

In at least one embodiment of the present invention, at least one spacer can be bonded and fixed to one of the first substrate and the second substrate.

In at least one embodiment of the present invention, the second substrate is provided with a recess, the second surface is the bottom surface of the recess, and the at least one spacer is disposed beside the recess.

In other embodiments, the recess may also be provided on the first substrate or even on both sides of the substrate. Both are set, if the grooves on both sides correspond, the height of the sample receiving area becomes the sum of the groove depths.

In at least one embodiment of the invention, wherein the sample receiving area has a height of between 0.1 microns and 10 microns.

In at least one embodiment of the invention, an observation window is disposed within the substrate. For example, a first observation window is disposed in the first substrate. In another embodiment, a second viewing window is disposed in the second substrate. In still another embodiment, a first observation window is disposed in the first substrate and a second observation window is disposed in the second substrate. If the two observation windows correspond, it can also be used for observation by a transmission electron microscope before drying.

Through the liquid sample drying device of the present invention and the dry sample test piece preparation method performed by using the liquid sample drying device, a spacer or a joint member having a function as a spacer can provide a height to allow a liquid sample to pass through The adsorption force of the capillary phenomenon is adsorbed in the liquid sample region. In addition, since the heights of the first and second substrates are limited by the spacer or the joint member having the function of the spacer, the thickness of the liquid sample is substantially uniform, thereby suppressing the flow of the liquid sample during the drying process, so the suspended particles are suspended. In the drying process, the original distribution and the aggregation or non-aggregation characteristics are maintained, and the problem that the conventional dry sample test piece is formed during the drying process is solved.

It is worth noting that after the drying, since the spacer is only placed between the two substrates (between the first substrate and the second substrate), the first substrate and the second substrate are not bonded to each other, so The first substrate and the second substrate containing the dried liquid sample can be separated by temporarily holding the holding member having the fixed joining function or the joining member having the function of holding the relative positions of the upper and lower substrates as the holding member.

In addition, based on the characteristics of the spacers, it can be understood that the adhesion (adhesion or bonding) of the spacers is relatively stated. "Non-adhesive" or "not bonding to each other" is "temporarily spaced without any Bonded or bonded design, even deliberately avoiding adhesion (such as reserving gaps, using non-adhesive materials or reducing contact area), but van der Waals is a natural phenomenon, at the micron scale, as long as there is a close distance, there is Attraction, there may be adhesion (or adsorption) when exposed to liquids. Therefore, "not sticking to each other" can be defined as "by design, the separated locations are not bonded to each other, for example, when the separation is removed, the structure of other places is not destroyed." Thereby, a uniform and dry sample piece which is separated and unobscured is obtained. Further, the "uniform dry sample test piece" according to the present invention refers to a dry sample test piece obtained by the fact that suspended particles in the liquid sample do not aggregate due to drying during the drying process. In addition, due to the non-adhesive nature of the spacer, the dried sample can be exposed on the surface of the dried sample test piece. The unmasked dry sample test piece greatly increases the applicable analytical observation range of the dried sample test piece in addition to the electron microscope. Analytical methods such as atomic force microscopy, matrix-assisted laser desorption mass spectrometry (MALDI-TOF-MS), and even probe contact for electrical testing.

10‧‧‧Test substrate

11, 13, 8‧‧‧ liquid samples

11C, 11N, 81‧‧‧ suspended particles

A1‧‧‧Gathering Group

100, 200, 300, 400, 500‧‧‧ liquid sample drying device

100a, 100b, 300a, 300b‧‧‧ dry sample test piece

21‧‧‧First substrate

210‧‧‧First film

2101, 2111‧‧‧ first surface

211‧‧‧First base

212‧‧‧First protective layer

22‧‧‧second substrate

220‧‧‧Second film

2201, 2211‧‧‧ second surface

221‧‧‧Second base

222‧‧‧Second protective layer

24, 24'‧‧‧ spacers

24a, 24b‧‧‧ first spacer

24c, 24d‧‧‧second spacer

26‧‧‧Clamping members

261‧‧‧First clamping section

262‧‧‧Second clamping section

26’‧‧‧Joint parts

30‧‧‧First observation window

301‧‧‧ openings

32‧‧‧Second observation window

34‧‧‧sample receiving area

36‧‧‧ Groove

40, 40’‧‧‧First cutting zone

42. 42'‧‧‧Second cutting zone

90‧‧‧Microscope

91‧‧‧Electronic gun

99‧‧‧Atomic Force Microscope

H1‧‧‧ Height

H2, h3, h4, h5‧‧‧ thickness

Y‧‧‧ separation direction

A-a’‧‧‧ cross-section

B-b’‧‧‧ cross-section

D‧‧‧depth

W‧‧‧Width

1A to 1E are schematic views showing a conventional liquid sample drying process.

Fig. 2A is a perspective view showing the liquid sample drying device of the first embodiment of the present invention.

Fig. 2B is a schematic cross-sectional view showing the cross-sectional direction of a-a' based on the embodiment shown in Fig. 2A.

3A to 3C are schematic cross-sectional views showing the steps of the method for preparing a dried sample test piece performed by the liquid sample drying device of the first embodiment, respectively.

3D is a schematic cross-sectional view of a dry sample test piece prepared by the liquid sample drying device of the first embodiment according to the method for preparing a dry sample test piece.

FIG. 3E is a schematic cross-sectional view of another dry sample test piece prepared by the liquid sample drying device of the first embodiment according to the method for preparing a dry sample test piece.

Figure 4 is a perspective view showing a liquid sample drying device according to a second embodiment of the present invention.

Fig. 5A is a perspective view showing a liquid sample drying device according to a third embodiment of the present invention.

Fig. 5B is a schematic cross-sectional view showing the cross-sectional direction of a-a' based on the embodiment shown in Fig. 5A.

6A to 6D are respectively schematic cross-sectional views showing the steps of the method for preparing a dried sample test piece performed by the liquid sample drying device of the third embodiment.

FIG. 6E is a schematic cross-sectional view of a dry sample test piece prepared by the method for preparing a liquid sample drying device according to the third embodiment.

FIG. 6F is a schematic cross-sectional view of another dry sample test piece prepared by the liquid sample drying device of the third embodiment according to the method for preparing a dry sample test piece.

Figure 7 is a perspective view showing a liquid sample drying device according to a fourth embodiment of the present invention.

8A to 8C are schematic cross-sectional views showing various embodiments of the spacer of the present invention, respectively.

Figure 9 is a schematic perspective view showing another embodiment of the spacer of the present invention.

Figure 10 is a side view and a plan view of an embodiment of the cutting and cracking zone of the present invention. Figure.

Figure 11 is a schematic cross-sectional view showing another embodiment of the holding member of the present invention.

In order to more clearly understand the concept of the present invention, several embodiments of the present invention are described in detail below. The same symbols represent components or devices that have the same or similar functions. The shapes, dimensions, proportions, and the like of the elements shown in the drawings are merely illustrative and are not intended to limit the scope of the invention. In addition, any of the embodiments described in the following descriptions simultaneously disclose a plurality of technical features, and does not mean that all the technical features in any of the embodiments must be simultaneously implemented. Further, the manufacturing method of the liquid sample drying device of the present invention can be mass-produced through the existing semiconductor process and/or MEMS process. The substrate is, for example, the first substrate 21 or the second substrate 22. The surface is, for example, a first surface 2101 or a second surface 2201. The observation window is, for example, a first observation window 30 or a second observation window 32.

Please refer to Figures 2A and 2B first. The liquid sample drying device 100 of the first embodiment of the present invention has a three-dimensional structure and a cross-sectional view (a-a' cross-sectional direction). The liquid sample drying device 100 has a first substrate 21, a second substrate 22, and at least one. Spacer 24 and a removable gripping member 26.

The first substrate 21 has a first surface 2101. In this embodiment, the first substrate 21 has a first film 210 and a first base portion 211. The first film 210 is deposited on the first substrate portion 211, and the surface of the first film 210 is the first surface 2101. The first base portion 211 of the first substrate 21 is further provided with a first observation window 30 opposite to the back surface of the first film 210.

More specifically, the opening 301 of the first observation window 30 has a large bottom window area. It is about 1 square micron to 1 square inch. The first observation window 30 can be obtained by performing a etching process on the first substrate portion 211 by using a lithography and etching process and using the patterned etch barrier layer as a mask. The etching process is, for example, wet etching, such as non-isotropic etching of the first substrate portion 211 to the first film 210 by using a potassium hydroxide etching solution, thereby obtaining the first observation window 30, or by dry etching, for example, by plasma etching. The first base portion 211 is etched to the first film 210 to obtain the first observation window 30. The foregoing manufacturing method is an existing semiconductor process and a micro-electromechanical process technology, and will not be described again.

In this embodiment, the manner in which the first film 210 is deposited on the first substrate portion 211 includes chemical vapor deposition, acid rinsing, surface material deposition, polymer deposition, wherein the chemical vapor deposition method is, for example, plasma chemistry. PECVD plasma enhanced chemical vapor deposition, which is a part of the existing semiconductor process and microelectromechanical process technology, will not be described again.

The material of the first film 210 may be selected from the group consisting of tantalum, tantalum nitride, hafnium oxide, hafnium oxide, niobium oxynitride, carbon, diamond film, graphene, tantalum carbide, aluminum oxide, titanium nitride, titanium oxide, carbon nitride. Or a group of combinations thereof. In addition, the first film 210 is required to allow electron beam penetration of the electron microscope, for example, a material having a high electron transmittance, and the thickness h2 thereof may be changed according to design, for example, about 2 nanometers in this embodiment. The meter is up to 200 nm and can be subsequently applied to a transmission electron microscope. The foregoing is an example of a silicon wafer process, but the present invention can also be applied to other substrate materials, but considering the mechanical strength, compactness, light transmittance, electron transmittance, and process integration of the film and the substrate. Residual stress, surface characteristics.

The surface of the first film 210 of the present example is the first surface 2101, which may be a hydrophilic material or a water repellent material. If a hydrophilic material is selected, the adsorption force of the polar liquid sample can be enhanced. If a water repellent material is selected, the adsorption force of the non-polar liquid sample can be enhanced. Surface properties can be modified via physical modification such as UV ozone or plasma repair Modifications such as plasma or chemical modification such as pickling, etching, anodizing, and functional groups. In other embodiments, the first surface may also be the surface of the base portion, as described later.

The material of the first base portion 211 is, for example, a semiconductor material or a metal oxide material. The semiconductor material is, for example, a double polished or single polished single crystal germanium. The metal oxide is, for example, alumina. The thickness h4 of the first base portion 211 can be modified according to design, for example, it can be designed to be 0.2 to 0.8 mm for use in a transmission electron microscope.

The second substrate 22 has a second surface 2201 corresponding to and facing the first surface 2101. More specifically, the second substrate 22 of the present embodiment has a second film 220 and a second base portion 221 , the material, design and preparation manner thereof, and the thickness h3 of the second film 220 and the second substrate portion 221 . For the thickness h5, please refer to the first film 210 and the first base portion 211, and details are not described herein again. Further, the surface of the second film 220 is the second surface 2201 and the first surface 2101 is substantially parallel to the second surface 2201.

The liquid sample drying apparatus 100 of the present embodiment has at least one spacer 24, which is designed with two spacers 24 in this embodiment. Each of the spacers 24 is disposed between the first substrate 21 and the second substrate 22, and a sample receiving area 34 is formed between the first surface 2101, the second surface 2201 and the at least one spacer 24 for receiving one Liquid sample 8 (as shown in Figure 3A). More specifically, the spacer 24 of the present example is made of a non-adhesive material such as ruthenium oxide or ruthenium. In addition, the spacer 24 in this embodiment has a gasket shape, and is independently and detachably disposed on one of the first substrate 21 or the second substrate 22. In other embodiments, the spacers 24 can also be metal, ceramic, or polymeric micro-nanoparticles, spheres, or cylinders. The height h1 of the spacer 24 is a height designed to generate an adsorption force similar to a capillary phenomenon. In one embodiment, the height h1 of the spacers 24 is generally between 0.1 microns and 20 microns, and preferably between 0.1 microns and 10 microns. With this, The height of the sample receiving area 34 is between 0.1 micrometers and 10 micrometers, which is advantageous in that suspended particles 81 of more than 10 micrometers in the partial liquid sample 8 can be excluded from the sample receiving area 34, for example, can be applied to blood cells in the blood and Separation observation of plasma. The spacers 24 are disposed on the first substrate 21 or the second substrate 22 by, for example, depositing growth spacers and/or leaving spacers after etching, or spreading the spacers 24 of the micro-nano particles through a ball sprinkler. On the first substrate 21 or the second substrate 22. Other processes such as nano imprint, screen printing, transfer, inkjet, etc. can also be applied. In this embodiment, the spacers 24 in the form of two spacers are taken as an example, but are not limited thereto. In another embodiment, only a single spacer 24 may be provided. In other words, as long as the first substrate 21 can be The sample receiving area 34 between the second substrates 22 is formed with a height and height sufficient for the liquid sample 8 to adsorb into the sample receiving area 34 by the adsorption force such as capillary phenomenon, i.e., to achieve the basic effect of the spacer 24.

The removable clamping member 26 contacts the first substrate 21, the second substrate 22, or the first substrate 21 and the second substrate 22 to cause the first substrate 21, the second substrate 22, and the at least one spacer 24 to be temporary. The ground is clamped and fixed. The "contact" may be a direct contact or an inter-contact to provide a temporary clamping and fixing function to the first substrate 21 and the second substrate 22. In the present embodiment, the removable clamping member 26 has a first clamping portion 261 and a second clamping portion 262. The first clamping portion 261 is a clamping arm and directly contacts the back surface of the first base portion 211 of the first substrate 21 with respect to the first surface 2101. The second clamping portion 262 is a clamping arm and directly contacts the back surface of the second base portion 221 of the second substrate 22 opposite to the second surface 2202. Since the spacer 24 is only disposed between the first substrate 21 and the second substrate 22 to maintain the height of the sample receiving area 34, the capillary phenomenon is indirectly provided, and the first substrate and the second substrate are not bonded to each other. Or stick. Therefore, at least one clamping and fixing function is provided through the removable clamping member 26, in this embodiment, through the first clamping portion 261 and a second clamping portion. The portions 262 respectively provide a clamping and fixing function to temporarily sandwich the first substrate 21, the spacers 24, and the second substrate 22 with each other. In other embodiments, the clamping portion does not need two pieces, and may be integrally formed, for example, a C-shaped spring (for example, a dovetail clip) or a clamping block using a groove, which will be described later.

Based on the above, the present invention proposes a method for preparing a dry sample test piece using the liquid sample drying device 100 and its possible variations. Please refer to FIG. 3A to FIG. 3C , wherein FIG. 3A and FIG. 3B are respectively a cross-sectional view taken along line b-b′ of the liquid sample drying device 100 according to FIG. 2A, and FIG. 3C is a view of FIG. 2A. A schematic cross-sectional view of the a-a' cross-section of the liquid sample drying apparatus 100.

First, as shown in Fig. 3A, the liquid sample drying apparatus 100 as in the first embodiment or its possible variations are obtained.

Next, as shown in FIG. 3A, the liquid sample 8 containing the suspended particles 81 is adsorbed into the sample containing portion 34 by the capillary phenomenon formed by the first substrate 21 and the second substrate 22 and the spacer 24. In addition to the capillary phenomenon, the liquid sample drying device 100 can receive the liquid sample 8 to the sample receiving area 34 by means of suction suction or pressure injection.

Next, as in FIG. 3B, the liquid sample 8 is dried such that a portion of the dried liquid sample 8 (ie, a portion of the suspended particles 81) is attached to a surface of a substrate, such as the first film 210 of the first substrate 21. On one surface 2101, a dried sample test piece 100a as shown in Fig. 3D is formed. Further, another portion of the dried liquid sample 8 (i.e., another portion of the suspended particles 81) is attached to the second surface 2201 of the second film 220 of the second substrate 22, thereby forming a dried sample test piece 100b as shown in Fig. 3E. . Among them, the drying method is natural evapotranspiration, vacuum drying, low-humidity environment drying, heat drying, low-temperature drying, nitrogen environment drying or dry air drying. The purpose of drying is to remove components (such as moisture) that have a higher vapor pressure in the liquid sample and to make the rest of the sample The component is attached to the surface without fluidity, and the upper and lower surfaces can be separated. The sample after drying may still retain some liquid components or properties, such as a macromolecular component with a lower vapor pressure, or adsorbed, chimeric or coated on the residue. Moisture in particulate matter and so on. Vapor pressure refers to the saturated vapor pressure at a certain temperature (such as room temperature).

After the drying step, the liquid sample drying device 100 is temporarily held because the spacer 24 of the liquid sample drying device 100 is placed between the first substrate 21 and the second substrate 22 and passes through the removable clamping member 26. fixed. Therefore, as shown in Fig. 3C, the sandwiching member 26 is removed, and the dried sample test piece 100a as shown in Fig. 3D and the dried sample test piece 100b as shown in Fig. 3E can be separated by the separation force Y. The manner in which the grip member 26 is removed, for example, the slitting step, the dry sample coupon 100a or the dried sample coupon 100b is cut and separated from the liquid sample drying device 100. In the present embodiment, the spacers 24 may remain on the first substrate 21 or the second substrate 22. Based on the foregoing, the "spacer" of the present invention is "a non-bonding member that maintains the height of the liquid sample zone and can be easily separated at least on one side." The spacer may have a shape such as a sheet shape or a column shape.

Through the liquid sample drying device 100 and the dry sample test piece preparation method performed by the liquid sample drying device 100, the separated and unshielded dried sample test piece 100a and the dried sample as shown in FIGS. 3D and 3E are obtained. Test strip 100b. The dried sample test piece 100a shown in FIG. 3D includes a portion of the liquid sample 8 after drying and the first substrate 21 composed of the first film 210, the first base portion 211, and the first observation window 30 (please synchronize) Refer to Figure 2A). A portion of the liquid sample after drying is the dried partially suspended particles 81 attached to the first surface 2101 of the first film 210 of the first substrate 21. Since the thickness of the liquid sample 8 is limited by the height of the sample receiving area 34, the suspended particles 81 are restricted from moving during the drying process, and And a portion of the suspended particles 81 adhere to the first surface 2101. Therefore, it is possible to solve the aggregation phenomenon of the suspended particles 81 as shown in FIGS. 1A to 1E due to drying, and to achieve the effect that the partially suspended particles 81 are uniformly attached to the first surface 210 of the first substrate 21, thereby maintaining the original liquid sample. Part of the suspended particles 81 in 8 are dispersed and distributed.

Further, since the separated and unshielded dry sample test piece 100a has an extremely small overall thickness and the first observation window 30 is formed on the first substrate 21. Therefore, the dried sample test piece 100a can be applied to the microscope 90, such as an optical microscope or a scanning electron microscope, and the sample thickness of the sample test piece having a low thickness limit can be as shown in the 3D image, and the dried sample test piece 100a can also be placed. Above the path of the electron gun 91 of the transmission electron microscope, the electron beam is passed through the dried sample test piece 100a to achieve the effect of observation under a transmission electron microscope.

Referring to FIG. 3E, the separated and unshielded dry sample test piece 100b includes a portion of the liquid sample 8 after drying and a second substrate 22 composed of the second film 220 and the second base portion 221 (please refer to the second reference simultaneously) Figure). After drying, a part of the liquid sample 8 is a dried partial suspended particle 81 attached to the second surface 2202 of the second film 220 of the second substrate 22. For the effect, please refer to the separated and unshielded dry sample test piece 100a. I will not go into details here.

The difference between the dried sample test piece 100b and the dry sample test piece 100a is that the second base base portion 221 is not provided with the second observation window. The dried sample test piece 100b can be applied to observation by a microscope 90 having a low sample thickness limit such as an optical microscope or a scanning electron microscope, and can also be directly observed by an atomic force microscope 99. The above-mentioned separated and unshielded dry sample test piece 100a and dry sample test piece 100b can reduce the problem of absorption and scattering (SCATTERING) more than the masked test piece.

The present invention is not limited to the liquid sample drying device 100 and the application liquid of the first embodiment. The dried sample test piece preparation method performed by the sample drying apparatus 100 and the dried sample test piece prepared therefrom. In other words, as long as the height h1 is temporarily formed between the first substrate 21 and the second substrate 22 through the spacer 24 and the like, and the height h1 is sufficient to cause an adsorption phenomenon such as a capillary phenomenon and the liquid sample 8 does not cause a drying process. The phenomenon of aggregation. In addition, the first substrate 21, the second substrate 22, and the spacer 24 are temporarily clamped and fixed through the clamping member 26 and the like, so that the liquid sample drying device can finally form a separate and unshielded dry sample test piece. The basic concept of the invention is achieved.

Please refer to FIG. 4, which is a perspective view of a liquid sample drying device 200 according to a second embodiment of the present invention. The difference between the liquid sample drying device 200 of the second embodiment and the liquid sample drying device 100 of the first embodiment is:

1. The spacer 24 is disposed between the first surface 2101 and the second surface 2201.

2. The first protective layer 212 is further disposed at a position of the first substrate portion 211 of the first substrate 21 facing away from the first film 210. The second substrate portion 221 of the second substrate 22 is further provided with a second protective layer 222 facing away from the second film 220. The material of the first protective layer 212 and the second protective layer 222 is not limited as long as it can provide an effect of protecting the first base portion 211 and the second base portion 22 from being damaged when the sandwiching member 26 is provided.

3. The first observation window 30 of the liquid sample drying device 200 is etched through the first protective layer 212 and the first substrate portion 211 until the first film 210 stops. In addition, the second substrate 22 of the sample drying device 200 is further provided with a second observation window 32, penetrates the second protective layer 222 and the second substrate portion 221 and is etched until the second film 220 stops. Therefore, the dry sample test piece formed by the liquid sample drying apparatus 200 performing the dry sample test piece preparation method of the liquid sample drying apparatus 100 of the first embodiment can be applied to the application of the transmission electron microscope. In addition, due to the first observation window 30 and the second view The measurement window 32 corresponds to each other, so that the liquid sample drying device 200 containing the liquid sample 8 can be directly placed under the microscope 90, particularly under a transmission electron microscope, before performing the dry sample test piece preparation method. Thereby, the user can observe the liquid sample 8 before drying through the same liquid sample drying device, and the observation manner can be as disclosed in the Taiwan Patent No. I330380, and the opening of the liquid sample drying device can be observed to be unobstructed. The effect of evenly drying the sample test piece after drying.

Please refer to Figures 5A and 5B again. Fig. 5A is a perspective view showing a liquid sample drying device according to a third embodiment of the present invention. Fig. 5B is a schematic cross-sectional view showing the cross-sectional direction of a-a' based on the embodiment shown in Fig. 5A. The liquid sample drying device 300 of the third embodiment has a first substrate 21, a second substrate 22, at least one spacer 24', and at least one bonding member 26'. The first substrate 21 has a first surface 2101. More specifically, the first substrate 21 has a first film 210 and a first base portion 211 and is provided with a first observation window 30. For details, please refer to the first embodiment.

The second substrate 22 has a second surface 2201 corresponding to the first surface 2101. More specifically, the second substrate 22 has a second film 220 and a second substrate portion 221. For details, please refer to the first embodiment. The difference between the liquid sample drying device 300 and the liquid sample drying device 100 is:

1. The liquid sample drying device 300 is provided with a plurality of small-area spacers 24' spaced apart between the first substrate 21 and the second substrate 22. The spacers 24', such as the spacers 24, differ only in shape configuration, and the formation, materials, and the like of the spacers 24 are referred to the spacers 24 of the first embodiment. In other words, the spacers can be open, such as spacers 24', such that the area between the spacers also falls within the scope of the sample receiving area 34. The spacer may also be a closed type such as the two spacers 24 of the first embodiment. The closed spacer may have a gap, but may be spaced apart from the sample receiving area 34, or even spaced. The space formed by the sample receiving area 34 can maintain air. Further, when the opening of the sample receiving area 34 is closed, the pressure balance buffering action of the liquid sample 81 is provided. From the application surface, the opening of the sample receiving area 34 formed by the spacer 24 may also be closed first, and enter an electric observation process (for example, electron beam reduction metal ions, direct writing pattern), and then opened, and will be processed. The sample is exposed and subjected to further processing or analysis, such as electrical measurement with a probe, or subsequent electrical connection using a Focused Ion Beam (FIB) microscope machine.

2. The liquid sample drying device 300 is provided with at least one joining member 26', and the drawing discloses two joining members 26' which are joined and fixed between the first substrate 21 and the second substrate 22. The engagement member 26' provides a clamping and fixing function similar to the clamping member 26. The bonding material 26' is made of an adhesive material such as any bonding material such as epoxy resin, ultraviolet glue or silicone material. In other embodiments, for example, anodic bonding between germanium and germanium oxide, The first substrate 21 and the second substrate are obtained by fusion welding or metal bond bonding or direct bond bonding, metal-to-semiconductor bonding, glass frit fusion, etc., to obtain an adhesive effect. 22 are fixed to each other. The bonding material 26' may be adhered between the first substrate 21 and the second substrate 22 by a coating method such as screen printing or frame glue. The bonding method of the above wafer level is well known in the MEMS process, and will not be described herein.

3. The first substrate 21 is provided with at least one cleavage zone within the engagement member 26', the cleavage zone extending vertically between the sample accommodating zone 34 and the engagement member 26'. It should be noted that "vertical extension" means extending in the direction of the substrate thickness h4 or h5 (or depth d). For example, the first base portion 211 of the first substrate 21 of the liquid sample drying device 300 of the present embodiment is provided with the first cutting and cracking regions 40, 40' corresponding to the back surface of the first film 210. The second base portion 220 of the second substrate 22 is provided with a second cut-and-split region 42, 42' corresponding to the back surface of the second film 221. The first cutting cracking zone 40, 40' and the second cutting cracking zone 42, 42' are respectively grooved structures, and only the first cutting cracking zone 40 and the second cutting crack are hereinafter. Zone 42 is illustrated. The first cutting and cracking region 40 and the second cutting and cracking region 42 are vertically extended between the sample receiving area 34 and the at least one engaging member 26', and are prepared in such a manner as to be prepared by the first observation window 30, but the difference is The depth d of the first cutting cracking zone 40 and the second cutting cracking zone 42 is smaller than the depth of the first observation window 30 or the second observation window 32 (ie, the thickness h4 of the first base portion 211 or the second base portion 221). Thickness h5). The depth d is prepared by controlling the opening of the first cutting cracking zone 40 and the second cutting cracking zone 42 to be smaller than the width W of the opening 301 by, for example, wet etching of potassium hydroxide, thereby controlling the depth d.

In another embodiment, the dicing cracking zone can also be made by a stealth laser cutting technique as developed by US Pat. No. 6,992,026, which moderately weakens the interior of the crystal, requiring removal of the joint 26' or as first In the case of the holding member 26 of the embodiment, stress is applied to separate it. In other embodiments, the cut-and-split zone can also be "half-cut" cut by dry etching, force wheel or laser.

An advantage of the liquid sample drying apparatus provided with the cutting cracking zone is that the joining member 26' can be removed as long as it is broken or cut from the cutting cracking zone. At this time, since the spacer 24' provides only the spacing effect, the first substrate 21 and the second substrate 22 are not bonded to each other. Therefore, the first substrate 21 or the second substrate 22 which is separated and unobscured can be obtained.

More specifically. Please refer to FIGS. 6A to 6D, which are respectively schematic cross-sectional views showing the steps of the method for preparing a dried sample test piece performed by the liquid sample drying device 300 of the third embodiment. Here, Fig. 6A and Fig. 6B are partial cross-sectional views showing the b-b' cross-sectional direction of the liquid sample drying device 300 as shown in Fig. 5A. Fig. 6C and Fig. 6D are partial cross-sectional views showing the a-a' cross-sectional direction of the liquid sample drying device 300 as shown in Fig. 5A.

First, as shown in FIG. 6A, a liquid sample drying device 300 or a possible state is obtained. kind. Next, referring to the description of the first embodiment, the liquid sample 8 is supplied, and the liquid sample 8 is received into the sample receiving area 34 through the adsorption force formed by the spacer 24' on the first substrate 21 and the second substrate 22.

Next, as shown in FIG. 6B, the liquid sample 8 is dried so that a part of the dried liquid sample 8 is attached to the surface of a substrate, for example, the first surface 2101 of the first substrate 21, thereby forming a pattern as shown in FIG. 6E. The dried sample test piece 300a is described. Or, a part of the liquid sample 8 after drying is attached to the second surface 2201 of the second substrate 22, thereby forming a dried sample test piece 300b as shown in Fig. 6F. For details, please refer to the dry liquid sample 8 step of the first embodiment.

Similar to the first embodiment, after the drying step, the liquid sample drying device 300 is disposed because the spacer 24' of the liquid sample drying device 300 is placed between the first substrate 21 and the second substrate 22 and passes through the bonding member 26'. Clamped and fixed. Therefore, as shown in FIGS. 6C and 6D, at least one of the engaging members 26' is removed to obtain the separated and unshielded dry sample test piece 300a and the dry sample test as shown in FIGS. 6E and 6F. Sheet 300b. More specifically, in the third embodiment, since the first cutting splitting zone 40, the first cutting and cracking zone 40', and the corresponding second cutting and cracking zone 42 and the second cutting and cracking zone are provided 42'. Therefore, as shown in FIG. 6C, the user can break a part of the first substrate 21 and the second substrate 22 along the first cutting and cracking region 40' and the second cutting and cracking region 42', and remove one end. Engagement member 26'. Next, as shown in FIG. 6D, another portion of the first substrate 21 and the second substrate 22 are broken along the first cutting and cracking region 40 and the second cutting and cracking region 42, thereby removing the joint member 26' at the other end. . In other embodiments, the engagement member 26' can also be removed by laser cutting, cutter wheel removal along the first cutting and cracking zone 40 and the second cutting and cracking zone 42. Thereby, the dried and unmasked dry sample test piece 300a and the dry sample test piece 300b are obtained.

In this embodiment, the spacer 24' is a second bonded and fixed to the second substrate 22. The base portion 221 can also be designed to be bonded to the first base portion 211 of the first substrate 21 in another embodiment. In this embodiment, the spacer 24' can also be removed as shown in Fig. 6F.

Referring to FIGS. 6E and 6F, the dry sample test piece 300a as shown in FIG. 6E and the 6F as shown in FIG. 6E can be obtained by the dry sample test piece preparation method performed by the liquid sample drying device 300 of the third embodiment described above. The sample is dried sample coupon 300b. The dry sample test piece 300a and the dry sample test piece 300b have a structure similar to that of the dry sample test piece 100a and the dry sample test piece 100b prepared by the liquid sample drying device 100 of the first embodiment. Please refer to the description of the first embodiment. .

Please refer to FIG. 5A, FIG. 6C and FIG. 6D again. In another embodiment, the liquid sample drying apparatus 300 can also be designed to provide only the spacers 24' and the joint members 26' which have a single side as shown in the right side of Fig. 5A and Fig. 6C. Therefore, the user only needs to apply stress along the first cutting and cracking region 40 and the second cutting and cracking region 42 to break a part of the first substrate 21 and the second substrate 22, thereby removing the single-sided joint member 26'. Further, dry sample test piece 300a and dry sample test piece 300b as shown in Fig. 6E and Fig. 6F are obtained. It is of course also possible to directly cut the joint member 26' by laser cutting or cutter wheel cutting along the first cutting cracking zone 40 and the second cutting cracking zone 42.

From another point of view, please refer to FIG. 5A and FIG. 5B again. In still another embodiment, the liquid sample drying device 300 may not design the first cutting cracking zone 40, 40', and the second cutting crack. Zones 42, 42'. Therefore, when the dry sample test piece preparation method is performed, the manner of removing the joint member 26' can be directly removed by laser cutting, cutter wheel removal or grinding removal.

From another point of view, referring again to FIGS. 5A and 5B, the liquid sample drying device 300 may not be provided with the spacer 24', but the engaging member 26' may be provided with the clamping member 26 and the spacer 24 at the same time. 'Effect. In other words, the bonding member 26' is bonded and fixed between the first substrate 21 and the second substrate 22, and a sample is formed between the first surface 210, the second surface 220 and the bonding member 26'. The accommodation area 34. The height of the engaging member 26' is designed such as the height h1 of the spacer 24 or the spacer 24', and the height of the sample receiving portion 34 is between 0.1 micrometer and 10 micrometers to achieve the capillary phenomenon and the material is adhesive. A material such as silicone is used to achieve the effect of temporary clamping and fixing of the holding member 26. Further, since the first cutting split region and the second cutting split region are provided, the bonding member 26' temporarily sandwiches and fixes the first substrate 21 and the second substrate 22. If the user wants to obtain the separated and unshielded dry sample test piece 300a and the dry sample test piece 300b as shown in FIG. 6E and FIG. 6F, it is only necessary to break the first substrate along the first cutting cracking zone and the second cutting cracking zone. 21 and a part of the second substrate 22 may be used. In addition, in another embodiment, a spacer 24' may be provided, the purpose of which is that the height h1 can also avoid the first surface 2101 and the second surface, in addition to the height h1 at which the engaging member 26' provides a capillary phenomenon. 2201 contact. Therefore, when the user needs to remove the engaging member 26', the sample receiving portion 34 is protected from the stable state by the spacer 24', and the first surface 210 and the second surface 220 are prevented from coming into contact, thereby achieving the effect of protecting the dried sample test piece.

The present invention is not limited to the above embodiment, please refer to FIG. 7, which is a perspective view of a liquid sample drying device 400 according to a fourth embodiment of the present invention. The liquid sample drying device 400 differs from the liquid sample drying device 300 in that the second substrate 22 of the liquid sample drying device 400 is further provided with a second observation window 32 of the liquid sample drying device 200 of the second embodiment, which penetrates the second The base portion 221 and the second surface 2201 are stopped. For the preparation method and opening size of the second observation window 32, please refer to the first observation window 30. The liquid sample drying device 400 performs the dry sample test piece preparation method of the liquid sample drying device 300 of the third embodiment, and the uniformly dried sample test piece formed is applicable to the application of the transmission electron microscope. In addition, since the first observation window 30 and the second observation window 32 correspond to each other, the liquid sample drying device 400 containing the liquid sample 8 can be directly placed under the microscope 90 before performing the dry sample test piece preparation method. Especially transmissive electronic display Microscopic observation. Thereby, the user can observe the liquid sample 8 before drying through the same liquid sample drying device, and through the opening of the liquid sample drying device, the effect of uniformly drying the unmasked sample test piece after drying can be observed.

In the liquid sample drying apparatus of the first to fourth embodiments, the first substrate 21 or the second substrate 22 is in a planar state, and the spacer 24, the spacer 24' or the spacer function is provided. The bonding member 26' is a separate member and is protruded from the first substrate 21 or the second substrate 22. The present invention is not limited thereto, and reference is made to Figs. 8A to 8C, which are schematic cross-sectional views showing various embodiments of the spacer or the joint member having the spacer function, respectively, which can be applied to the foregoing embodiments.

As shown in FIG. 8A, the second base portion 221 of the second substrate 21 is provided with a recess 36. The groove 36 can be prepared through an etching process and will not be described again. The second film 220 is deposited on the bottom surface of the recess 36, and the surface of the second film is the second surface 2201. In another embodiment, the bottom surface of the recess 36 is the second surface. At least one spacer 24 is defined as the sidewall of the recess 36. Thereby, the sample receiving area 34 is defined within the recess 36.

As shown in FIG. 8B, the difference between FIG. 8B and FIG. 8A is that the second base portion 221 of the second substrate 22 first forms the recess 36, and an independent spacer 24 is additionally disposed beside the recess 36, for example. Micro-nano particles, etc. Thereby, the sample receiving area 34 includes the space formed by the spacer 24 and the recess 36.

Referring to FIG. 8C, the second base portion 221 of the second substrate 21 is provided with a recess 36. The second surface 220 is deposited on the bottom surface of the recess 36. The spacer 24' and the engaging member 26' are disposed beside the recess 36. Thereby, the sample receiving area 34 contains the space formed by the spacer 24', the engaging member 26' and the recess 36.

In the embodiment of the prior embodiment, the spacers 24, the spacers 24 ′ or the bonding members 26 ′ can be formed by etching the substrate, and the substrate, such as the first substrate 21 or the second substrate 21 , is etched into a recess 36 to A sample receiving area 34 is formed. The unetched area beside the sample receiving area 34 serves as a spacer 24, 24' or a joint 26'. The spacers 24, 24' may be small in area, the surface does not form a bond with the opposite substrate, and the bonding member 26' is bonded to the opposite substrate, which may be achieved using different surface heights or materials. For example, if the surface of the spacer 24 is tantalum, it may be difficult to form a direct bond with the crucible. Conversely, the surface of the joint member 26' may be tantalum oxide, which may be joined by conventional anodic bonding techniques, or for example, the surface height of the spacer 24' may be slightly lower than the surface height of the joint member 26'. If the opposite substrate is not directly contacted, no bonding will be formed.

Please refer to FIG. 9 again, which is another embodiment of the spacer. The first substrate 21 has a first surface 2111 which is a part of the surface directly of the first base portion 211. The second substrate 22 has a second surface 2211 corresponding to and facing the first surface 2111. The second surface 2211 is a part of the surface of the second base portion 221. The aforementioned surface modification manner is as the first surface 2101 and the second surface 2201. The first base portion 211 is formed with at least one spacer, as shown by a first spacer 24a and a first spacer 24b, which are respectively a columnar bump and a C-shaped bump. The second base portion 221 is formed with at least one spacer, as shown by a second spacer 24c and a second spacer 24d, which are respectively a columnar bump and a C-shaped bump. When the first substrate 21 is turned into a face with the second substrate in the direction of the arrow, the first surface 2111 corresponds to and is substantially parallel to the second surface 2211. Further, the first spacer 24a and the second spacer 24d are coupled to each other but Do not overlap. The first spacer 24b and the second spacer 24c are just coupled to each other but do not overlap. Thereby, the parallel displacement spaces of the first substrate 21 and the second substrate 22 are reduced.

Referring again to FIG. 10, the first cutting cracking zone and the second cutting of the embodiment The cracking zone (the figure only indicates the first cutting crack zone 40, 40') can also be cut by a laser, a cutter wheel, a hidden laser to form a single straight dent as shown in FIG. Type.

Referring again to Figure 11, another aspect of the removable clamping member 26 is disclosed. The clamping member 26 has a first clamping portion 261 and a second clamping portion 262, which are respectively platform structures. The first clamping portion 261 is provided to the first base portion 211 of the first substrate 21 by the clamping and holding function, and the first substrate 21, the second substrate 221 and the spacer 24 are temporarily sandwiched. fixed.

Although the liquid sample drying device of the foregoing embodiment is exemplified as being designed to be subsequently applied to a transmission electron microscope, the liquid sample drying device of the present invention can also be applied to applications such as atomic force microscopy, scanning electron microscopy such as EDX. Or a microscope such as an optical microscope.

The above is only a preferred embodiment of the present invention. The scope of the invention is not limited to the above embodiments. Equivalent modifications or variations made by persons skilled in the art in light of the teachings of the present invention are intended to be included within the scope of the following claims.

100‧‧‧Liquid sample drying device

21‧‧‧First substrate

22‧‧‧second substrate

24‧‧‧ spacers

26‧‧‧Clamping members

261‧‧‧First clamping section

262‧‧‧Second clamping section

30‧‧‧First observation window

34‧‧‧sample receiving area

90‧‧‧Microscope

A-a’‧‧‧ cross-section

B-b’‧‧‧ cross-section

Claims (28)

A liquid sample drying device comprising: two substrates, each of the substrates has a surface, the two surfaces are oppositely disposed; at least one spacer is disposed between the two substrates such that a sample is formed between the two surfaces a region for accommodating a liquid sample; and a clamping member contacting the two substrates such that the two substrates and the spacer are temporarily clamped and fixed. The liquid sample drying device of claim 1, wherein the substrate is provided with a groove, the surface is a bottom surface of the groove, and the spacer is a side wall of the groove, and the sample receiving area is located Inside the groove. The liquid sample drying device of claim 1, wherein the spacer is bonded and fixed to one of the two substrates. The liquid sample drying device of claim 1, wherein the sample receiving area has a height of between 0.1 micrometers and 10 micrometers. The liquid sample drying device of claim 1, wherein an observation window is disposed in the substrate. A liquid sample drying device comprising: two substrates, each of the substrates having a surface, the two surfaces are oppositely disposed; and at least one engaging member bonded and fixed between the two substrates, wherein a sample is formed between the two surfaces The substrate is provided with at least one cutting and cracking region extending in a thickness direction of the substrate and located between the sample receiving region and the joint member. The liquid sample drying device of claim 6, comprising at least one spacer disposed between the two substrates, and the spacer and the sample receiving area are located on the same side of the cutting and cracking region . The liquid sample drying device of claim 7, wherein the spacer is bonded and fixed to one of the two substrates. The liquid sample drying device of claim 6, wherein the substrate is provided with a groove, the surface is a bottom surface of the groove, and the spacer is a side wall of the groove, and the sample receiving area is located Inside the groove. The liquid sample drying device of claim 6, wherein an observation window is disposed in the substrate. The liquid sample drying apparatus of claim 6, wherein the sample receiving area has a height of from 0.1 μm to 10 μm. A liquid sample drying device includes: two substrates, each of the substrates has a surface, the two surfaces are oppositely disposed; at least one bonding member is bonded and fixed between the two substrates, and the two surfaces and the at least one bonding member Forming a sample receiving area for accommodating a liquid sample; and at least one spacer disposed between the two substrates. The liquid sample drying device of claim 12, wherein the spacer and the sample receiving area are on the same side of the at least one engaging member. The liquid sample drying device of claim 12, wherein the substrate is provided with a groove, the surface is a bottom surface of the groove, and the spacer is a side wall of the groove, and the sample receiving area is located Inside the groove. The liquid sample drying device of claim 12, wherein the spacer is bonded and fixed to one of the two substrates. The liquid sample drying device of claim 12, wherein the sample receiving area has a height of between 0.1 micrometers and 10 micrometers. The liquid sample drying device of claim 12, wherein the substrate has a view Measuring window. A method for preparing a dry sample test piece, comprising the steps of: obtaining a liquid sample drying device according to any one of claims 1 to 5; receiving a liquid sample to the sample receiving area; drying the liquid sample A portion of the dried liquid sample is attached to a surface of a substrate to form a dry sample test piece; and the holding member is removed to obtain the separated dried sample test piece. The method for preparing a dry sample test piece according to claim 18, wherein the step of removing the clamping member further comprises a cutting and cleaving step of cutting and separating the dried sample test piece from the liquid sample drying device. . The method for preparing a dried sample test piece according to claim 18, wherein the method for drying the liquid sample is selected from the group consisting of a natural evapotranspiration, a vacuum drying, a low-humidity environment drying, a heat drying, and a low-temperature drying. One of or a combination of drying in a nitrogen atmosphere and drying in a dry atmosphere. A dried sample test piece obtained by the method for preparing a dry sample test piece according to claim 18, comprising a part of the liquid sample after the drying and the substrate, and a part of the liquid sample is attached to the substrate after the drying On the surface. A method for preparing a dry sample test piece, comprising the steps of: obtaining a liquid sample drying device according to any one of claims 6 to 11; receiving a liquid sample to the sample receiving area; drying the liquid sample Depositing a portion of the dried liquid sample on a surface of a substrate to form a dry sample test piece; and cutting or folding a portion of the substrate along a cutting and cracking region to cause the joint to be removed, thereby further removing the joint member The separated dried sample test piece was obtained. The method for preparing a dried sample test piece according to Item 22, wherein the drying the liquid The mode of the sample is selected from one of natural evapotranspiration, one vacuum drying, one low-humidity environment drying, one heat drying, one low-temperature drying, one nitrogen gas environment drying, and one dry gas environment drying. A dry sample test piece obtained by the method for preparing a dry sample test piece according to claim 22, comprising a part of the liquid sample after drying and the substrate, wherein a part of the liquid sample is attached to the substrate after the drying On the surface. A method for preparing a dry sample test piece, comprising the steps of: obtaining a liquid sample drying device according to any one of claims 12 to 17; receiving a liquid sample to the sample receiving area; drying the liquid sample, So that a portion of the dried liquid sample adheres to a surface of at least one substrate to form at least one dry sample test strip; and the at least one joint member is removed to obtain the separated dry sample test piece. The method for preparing a dry sample test piece according to claim 25, wherein the method for drying the liquid sample is selected from the group consisting of a natural evapotranspiration, a vacuum drying, a low-humidity environment drying, a heat drying, and a low-temperature drying. One of or a combination of drying in a nitrogen atmosphere and drying in a dry atmosphere. The method for preparing a dry sample test piece according to claim 25, wherein the removing the at least one joint member is selected by applying stress, laser cutting, cutter cutting, grinding removal, and laser invisibility. One of or a combination thereof is cut to fracture or cut a portion of the substrate having the joint. A dry sample test piece obtained by the method for preparing a dry sample test piece according to claim 25, comprising a part of the liquid sample after drying and the substrate, wherein a part of the liquid sample is attached to the substrate after the drying On the surface.