TW201607000A - Organic light-emitting display and method for forming the same - Google Patents

Organic light-emitting display and method for forming the same Download PDF

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TW201607000A
TW201607000A TW103126713A TW103126713A TW201607000A TW 201607000 A TW201607000 A TW 201607000A TW 103126713 A TW103126713 A TW 103126713A TW 103126713 A TW103126713 A TW 103126713A TW 201607000 A TW201607000 A TW 201607000A
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layer
electrode layer
organic light
light emitting
emitting display
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TW103126713A
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陳韻升
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群創光電股份有限公司
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Abstract

An organic light-emitting display (OLED) is provided. The OLED includes a substrate and a plurality of first electrode layers on the substrate. An auxiliary electrode layer is on the substrate and has a sidewall. An insulating layer is on the first electrode layers and has at least one opening to expose at least a portion of the sidewall of the auxiliary electrode layer. A second electrode layer is on the insulating layer and is electrically connected to the auxiliary electrode layer. A method for forming an OLED is also provided.

Description

有機發光顯示器及其製造方法 Organic light emitting display and method of manufacturing same

本發明係有關一種顯示裝置,且特別有關一種有機發光顯示器(OLED)及其製造方法。 The present invention relates to a display device, and more particularly to an organic light emitting display (OLED) and a method of fabricating the same.

由於厚度薄、重量輕、及低耗電的特色,平面顯示裝置取代了陰極射線管(cathode ray tube,CRT)顯示技術而廣泛使用於電子裝置中,例如手提電腦、個人數位助理(PDA)、電子書(electronic books)、投影機、及手機等。一般而言,平面顯示裝置包括主動式陣列液晶顯示(active matrix liquid crystal display,AMLCD)裝置或主動式陣列有機發光顯示(active matrix organic light-emitting display,AMOLED)裝置。不同於主動式陣列液晶顯示裝置,主動式陣列有機發光顯示裝置為一種使用有機材料的自發光型元件,其不需要背光(backlight)模組,因此可簡化製程並可進一步縮減平面顯示裝置的厚度。典型地,主動式陣列有機發光顯示裝置的畫素結構包括一薄膜電晶體(thin film transistor,TFT)陣列基板及設置於其上的複數個有機發光二極體。每一有機發光二極體包括一上電極(陰極或陽極)、一下電極(陽極或陰極)以及設置於二電極之間的有機發光層。 Due to its thin thickness, light weight, and low power consumption, flat panel display devices are widely used in electronic devices, such as laptop computers and personal digital assistants (PDAs), instead of cathode ray tube (CRT) display technology. Electronic books, projectors, and mobile phones. In general, the flat display device includes an active matrix liquid crystal display (AMLCD) device or an active matrix organic light-emitting display (AMOLED) device. Unlike the active array liquid crystal display device, the active array organic light emitting display device is a self-luminous type element using an organic material, which does not require a backlight module, thereby simplifying the process and further reducing the thickness of the flat display device. . Typically, the pixel structure of the active array organic light emitting display device includes a thin film transistor (TFT) array substrate and a plurality of organic light emitting diodes disposed thereon. Each of the organic light emitting diodes includes an upper electrode (cathode or anode), a lower electrode (anode or cathode), and an organic light emitting layer disposed between the two electrodes.

在主動式陣列有機發光顯示裝置中,通常在顯示區(或稱為主動區)外側設置電極接觸窗(electrode contact via)並電性連接至上電極,以將電源傳送至顯示區中。然而,電壓壓降(voltage drop)效應會導致顯示區內中心畫素區與周圍畫素區的亮度產生差異(即,亮度均勻性(brightness uniformity)不佳)。由於上發光型有機發光顯示裝置通常會搭配阻值高於一般金屬的透明導電氧化物(例如,氧化銦錫(ITO)、氧化銦鋅(IZO)等)作為其上電極,因此電壓壓降效應將更為明顯。再者,對於大尺寸的有機發光顯示器而言,電壓壓降與亮度均勻性不佳的問題會更為嚴重。 In an active array organic light emitting display device, an electrode contact via is generally disposed outside the display region (or referred to as an active region) and electrically connected to the upper electrode to transfer power to the display region. However, the voltage drop effect causes a difference in brightness between the central pixel region and the surrounding pixel region in the display region (i.e., poor brightness uniformity). Since the upper-emitting organic light-emitting display device generally has a transparent conductive oxide having a higher resistance than a general metal (for example, indium tin oxide (ITO), indium zinc oxide (IZO), etc.) as its upper electrode, the voltage drop effect is caused. Will be more obvious. Furthermore, for large-sized organic light-emitting displays, the problem of voltage drop and poor brightness uniformity is more serious.

為了改善電壓壓降與亮度均勻性不佳的問題,顯示區內可設置多個輔助電極來與上電極形成電性連接。然而,為了避免有機發光層在沉積時遮蔽輔助電極,習知技術需要在有機發光層的沉積階段使用精密的金屬遮罩。上述金屬遮罩的製作不易且成本昂貴。再者,由於大尺寸的金屬遮罩在使用時容易有彎曲的問題,故其無法應用於大尺寸的顯示裝置製作。 In order to improve the voltage drop and the brightness uniformity, a plurality of auxiliary electrodes may be disposed in the display region to form an electrical connection with the upper electrode. However, in order to prevent the organic light-emitting layer from shielding the auxiliary electrode during deposition, the prior art requires the use of a precise metal mask in the deposition stage of the organic light-emitting layer. The above metal mask is not easy to manufacture and expensive. Furthermore, since a large-sized metal mask is liable to be bent at the time of use, it cannot be applied to a large-sized display device.

因此,需要一種新穎的有機發光顯示器及其製造方法,以期能解決或減輕上述問題。 Therefore, there is a need for a novel organic light emitting display and a method of fabricating the same, with a view to solving or alleviating the above problems.

本發明之實施例係揭示一種有機發光顯示器,包括:一基板;複數個第一電極層,位於基板上;一輔助電極層,位於基板上且具有一側壁;一絕緣層,位於該些第一電極層上;一第二電極層,位於該絕緣層上,電性連接至輔助電極層;其中,絕緣層具有至少一開口露出輔助電極層的至少部分的側壁。 An embodiment of the present invention discloses an organic light emitting display comprising: a substrate; a plurality of first electrode layers on the substrate; an auxiliary electrode layer on the substrate and having a sidewall; and an insulating layer located at the first On the electrode layer, a second electrode layer is disposed on the insulating layer and electrically connected to the auxiliary electrode layer; wherein the insulating layer has at least one opening to expose at least a portion of the sidewall of the auxiliary electrode layer.

本發明之另一實施例係揭示一種有機發光顯示器的製造方法,包括:提供一基板;於基板上形成複數個第一電極層及一輔助電極層,其中輔助電極層具有一側壁;於第一電極層上形成一絕緣層;於該絕緣層內形成至少一開口,以露出輔助電極層的至少部分的側壁;以及於絕緣層上形成一第二電極層,電性連接至輔助電極層。 Another embodiment of the present invention discloses a method of fabricating an organic light emitting display, comprising: providing a substrate; forming a plurality of first electrode layers and an auxiliary electrode layer on the substrate, wherein the auxiliary electrode layer has a sidewall; Forming an insulating layer on the electrode layer; forming at least one opening in the insulating layer to expose at least a portion of the sidewall of the auxiliary electrode layer; and forming a second electrode layer on the insulating layer electrically connected to the auxiliary electrode layer.

為讓本發明之上述和其他目的、特徵、和優點能更明顯易懂,下文特舉出較佳實施例,並配合所附圖式,作詳細說明如下: The above and other objects, features and advantages of the present invention will become more <RTIgt;

100‧‧‧基板 100‧‧‧Substrate

101、103‧‧‧側壁 101, 103‧‧‧ side wall

102‧‧‧金屬化層 102‧‧‧metallization

104‧‧‧第一電極層 104‧‧‧First electrode layer

106‧‧‧輔助電極層 106‧‧‧Auxiliary electrode layer

108‧‧‧絕緣層 108‧‧‧Insulation

110‧‧‧第一開口 110‧‧‧ first opening

112‧‧‧第二開口 112‧‧‧ second opening

114‧‧‧金屬化合物 114‧‧‧Metal compounds

116‧‧‧有機層 116‧‧‧Organic layer

118‧‧‧第二電極層 118‧‧‧Second electrode layer

第1A至1D圖為根據本發明一實施例之有機發光顯示器的製造方法的剖面示意圖。 1A to 1D are schematic cross-sectional views showing a method of fabricating an organic light emitting display according to an embodiment of the present invention.

第2圖為根據本發明第一實施例之有機發光顯示器的平面示意圖。 Fig. 2 is a plan view showing an organic light emitting display according to a first embodiment of the present invention.

第3圖為根據本發明第二實施例之有機發光顯示器的平面示意圖。 Fig. 3 is a plan view showing an organic light emitting display according to a second embodiment of the present invention.

以下說明本發明實施例之有機發光顯示器及其製造方法。然而,可輕易瞭解本發明所提供的實施例僅用於說明以特定方法製作及使用本發明,並非用以侷限本發明的範圍。再者, 在本發明實施例之圖式及說明內容中係使用相同的標號來表示相同或相似的部件。 Hereinafter, an organic light emitting display and a method of manufacturing the same according to embodiments of the present invention will be described. However, the present invention is to be understood as being limited to the details of the present invention. Furthermore, In the drawings and the description of the embodiments of the present invention, the same reference numerals are used to refer to the same or similar parts.

請參照第1D圖,第1D圖為根據本發明一實施例之有機發光顯示器的剖面示意圖。有機發光顯示器包括一基板100、位於基板100上的第一電極層104與輔助電極層106、以及覆蓋基板100、,位於該些第一電極層上的絕緣層108,第二電極層,位於該絕緣層上,電性連接至輔助電極層,其中輔助電極層106具有一側壁101,而絕緣層108具有至少一第一開口110露出輔助電極層106至少部分的側壁101。在本實施例中,基板100上方具有複數個第一電極層104,且輔助電極層106係對應於一個或多個第一電極層104。此處為求簡化圖式,僅繪示出一第一電極層104。 Please refer to FIG. 1D. FIG. 1D is a schematic cross-sectional view of an organic light emitting display according to an embodiment of the invention. The organic light emitting display includes a substrate 100, a first electrode layer 104 and an auxiliary electrode layer 106 on the substrate 100, and a cover substrate 100, an insulating layer 108 on the first electrode layers, and a second electrode layer. The insulating layer is electrically connected to the auxiliary electrode layer, wherein the auxiliary electrode layer 106 has a sidewall 101, and the insulating layer 108 has at least one first opening 110 exposing at least a portion of the sidewall 101 of the auxiliary electrode layer 106. In the present embodiment, the substrate 100 has a plurality of first electrode layers 104 thereon, and the auxiliary electrode layer 106 corresponds to the one or more first electrode layers 104. Here, for the sake of simplicity, only a first electrode layer 104 is shown.

在本實施例中,輔助電極層106與第一電極層104各自包括依序堆疊的一第一透明導電層、一金屬層與一第二透明導電層(未繪示),其中第一與第二透明導電層可包括氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銦錫鋅(ITZO),而金屬層可包括銀、銀合金、鋁合金等。 In this embodiment, the auxiliary electrode layer 106 and the first electrode layer 104 respectively include a first transparent conductive layer, a metal layer and a second transparent conductive layer (not shown) stacked in sequence, wherein the first and the first The two transparent conductive layers may include indium tin oxide (ITO), indium zinc oxide (IZO), or indium tin zinc oxide (ITZO), and the metal layer may include silver, a silver alloy, an aluminum alloy, or the like.

在本實施例中,一或多個金屬化合物114係位於輔助電極層106露出於絕緣層108外的側壁101上。金屬化合物114可包括硫化物或氧化物。舉例來說,金屬化合物可為硫化銀或氧化銀。 In the present embodiment, one or more metal compounds 114 are located on the sidewall 101 of the auxiliary electrode layer 106 exposed outside the insulating layer 108. Metal compound 114 can include a sulfide or an oxide. For example, the metal compound can be silver sulfide or silver oxide.

在本實施例中,絕緣層108具有對應於第一電極層104的其中一者的一第二開口112,以露出第一電極層104。再者,一有機層116係位於絕緣層108上且順應性填入第一開口110與第二開口112,使有機層116接觸第一電極層104及輔助電極層106。在一實施例中,有機層116為一單層結構,其可為發光層(emitting layer,EML)、電洞注入層(hole injection layer,HIL)、電洞傳輸層(hole transport layer,HTL)、電子注入層(electron injection layer,EIL)與電子傳輸層(electron transport layer,ETL)的其中一者。在另一實施例中,有機層116可為一多層結構,其由電洞注入層、電洞傳輸層、電子注入層、電子傳輸層所構成。在又另一實施例中,有機層116亦可由發光層、電洞注入層、電洞傳輸層、電子注入層、電子傳輸層所構成。 In the present embodiment, the insulating layer 108 has a second opening 112 corresponding to one of the first electrode layers 104 to expose the first electrode layer 104. Furthermore, an organic layer 116 is disposed on the insulating layer 108 and compliantly fills the first opening 110 and the second opening 112 such that the organic layer 116 contacts the first electrode layer 104 and the auxiliary electrode layer 106. In an embodiment, the organic layer 116 is a single layer structure, which may be a light emitting layer (emitting Layer, EML), hole injection layer (HIL), hole transport layer (HTL), electron injection layer (EIL), and electron transport layer (ETL) One of them. In another embodiment, the organic layer 116 may be a multilayer structure composed of a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer. In still another embodiment, the organic layer 116 may also be composed of a light emitting layer, a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer.

在本實施例中,一第二電極層118係位於有機層116上並填入第一開口110與第二開口112。在本實施例中,第二電極層118為透明材料。舉例來說,第二電極層118可包括薄金屬如MgAg合金或Ag合金、氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銦錫鋅(ITZO)。需注意的是第一開口110內的第二電極層118係透過金屬化合物114電性連接至輔助電極層106。 In this embodiment, a second electrode layer 118 is disposed on the organic layer 116 and fills the first opening 110 and the second opening 112. In the present embodiment, the second electrode layer 118 is a transparent material. For example, the second electrode layer 118 may include a thin metal such as MgAg alloy or Ag alloy, indium tin oxide (ITO), indium zinc oxide (IZO), or indium tin zinc oxide (ITZO). It should be noted that the second electrode layer 118 in the first opening 110 is electrically connected to the auxiliary electrode layer 106 through the metal compound 114.

第1A-1D圖為根據本發明一實施例之有機發光顯示器的製造方法的剖面示意圖。請參照第1A圖,提供一基板100。基板100可由玻璃、石英或塑膠所構成。在本實施例中,基板100上方具有複數個薄膜電晶體(未繪示),其用於控制有機發光顯示器的不同畫素結構。再者,薄膜電晶體上方具有至少一金屬化層,其可包括金屬導線、內層介電層(inter-layer dielectric,ILD)及接觸窗(contact via)等部件。此處為求簡化圖式,僅以一平整的金屬化層102表示。 1A-1D is a schematic cross-sectional view showing a method of fabricating an organic light emitting display according to an embodiment of the present invention. Referring to FIG. 1A, a substrate 100 is provided. The substrate 100 may be composed of glass, quartz or plastic. In this embodiment, a plurality of thin film transistors (not shown) are disposed above the substrate 100 for controlling different pixel structures of the organic light emitting display. Furthermore, the thin film transistor has at least one metallization layer thereon, which may include metal wires, an inter-layer dielectric (ILD), and a contact via. Here, for the sake of simplicity, only a flat metallization layer 102 is shown.

接著,於基板100上形成複數個第一電極層104以及一輔助電極層106,其中輔助電極層106具有一側壁101。此處為求簡化圖式,僅繪示出一第一電極層104。第一電極層104與輔助電 極層106可藉由化學氣相沉積(chemical vapor deposition,CVD)、濺鍍或任何適當的沉積技術來形成。在一實施例中,第一電極層104與輔助電極層106可藉由相同的沉積步驟及圖案化步驟同時形成。在另一實施例中,第一電極層104與輔助電極層106可藉由不同的沉積步驟分別形成。在本實施例中,第一電極層104與輔助電極層106各自包括依序堆疊的一第一透明導電層、一金屬層與一第二透明導電層(未繪示)。舉例來說,第一透明導電層與第二透明導電層可為氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銦錫鋅(ITZO),且金屬層可為銀。再者,在本實施例中,每一第一電極層104與輔助電極層106下方可分別形成一接觸窗(未繪示),藉此電性連接至金屬化層102或薄膜電晶體。 Next, a plurality of first electrode layers 104 and an auxiliary electrode layer 106 are formed on the substrate 100, wherein the auxiliary electrode layer 106 has a sidewall 101. Here, for the sake of simplicity, only a first electrode layer 104 is shown. First electrode layer 104 and auxiliary electricity The pole layer 106 can be formed by chemical vapor deposition (CVD), sputtering, or any suitable deposition technique. In an embodiment, the first electrode layer 104 and the auxiliary electrode layer 106 can be simultaneously formed by the same deposition step and patterning step. In another embodiment, the first electrode layer 104 and the auxiliary electrode layer 106 may be separately formed by different deposition steps. In this embodiment, the first electrode layer 104 and the auxiliary electrode layer 106 each include a first transparent conductive layer, a metal layer and a second transparent conductive layer (not shown) stacked in sequence. For example, the first transparent conductive layer and the second transparent conductive layer may be indium tin oxide (ITO), indium zinc oxide (IZO) or indium tin zinc oxide (ITZO), and the metal layer may be silver. Moreover, in this embodiment, a contact window (not shown) may be respectively formed under each of the first electrode layer 104 and the auxiliary electrode layer 106, thereby being electrically connected to the metallization layer 102 or the thin film transistor.

請同時參照第1B圖與第2圖,第2圖為本發明第一實施例之有機發光顯示器的平面示意圖,第1B圖為第2圖中A-A’線段的剖面示意圖。第一電極層上形成一絕緣層108以覆蓋第一電極層104與輔助電極層106。絕緣層118可透過適當的沉積技術,例如化學氣相沉積、物理氣相沉積(physical vapor deposition,PVD)或濕式製程(solution process)來形成,且絕緣層118可由有機材料(例如,光阻材料)或其他適當的絕緣材料所構成。在本實施中,絕緣層108係作為有機發光顯示器的畫素定義層(pixel define layer,PDL),藉此定義出有機發光顯示器的不同畫素區。 Referring to FIG. 1B and FIG. 2 simultaneously, FIG. 2 is a plan view schematically showing an organic light emitting display according to a first embodiment of the present invention, and FIG. 1B is a schematic cross-sectional view showing a line A-A' in FIG. An insulating layer 108 is formed on the first electrode layer to cover the first electrode layer 104 and the auxiliary electrode layer 106. The insulating layer 118 can be formed by a suitable deposition technique such as chemical vapor deposition, physical vapor deposition (PVD) or a wet process, and the insulating layer 118 can be made of an organic material (for example, a photoresist). Material) or other suitable insulating material. In the present embodiment, the insulating layer 108 is used as a pixel define layer (PDL) of an organic light emitting display, thereby defining different pixel regions of the organic light emitting display.

接著,藉由顯影與蝕刻製程,於絕緣層108內形成一第一開口110,以露出輔助電極層106的至少部分的側壁101,並於絕緣層108內形成對應於第一電極層104之其中一者的一第二開口112,以露出第一電極層104的上表面。需注意的是此時絕緣層108 仍覆蓋第一電極層104的整個側壁103。 Next, a first opening 110 is formed in the insulating layer 108 by the developing and etching processes to expose at least a portion of the sidewall 101 of the auxiliary electrode layer 106, and is formed in the insulating layer 108 corresponding to the first electrode layer 104. A second opening 112 of one of the first openings 112 exposes the upper surface of the first electrode layer 104. It should be noted that the insulating layer 108 at this time The entire sidewall 103 of the first electrode layer 104 is still covered.

如第2圖所示,在第一實施例中,輔助電極層106係對應於一第一電極層104,且第一開口110係露出輔助電極層106的整個側壁101。然而,第一開口110的位置不侷限於此。在其他實施例中,第一開口110亦可僅露出輔助電極層106一部份的側壁101,而無需露出整個側壁101。 As shown in FIG. 2, in the first embodiment, the auxiliary electrode layer 106 corresponds to a first electrode layer 104, and the first opening 110 exposes the entire sidewall 101 of the auxiliary electrode layer 106. However, the position of the first opening 110 is not limited thereto. In other embodiments, the first opening 110 may also expose only a portion of the sidewall 101 of the auxiliary electrode layer 106 without exposing the entire sidewall 101.

請同時參照第1B圖與第3圖,第3圖為本發明第二實施例之有機發光顯示器的平面示意圖,第1B圖為第3圖中A-A’線段的剖面示意圖。第二實施例與第一實施例的差異在於輔助電極層106係對應於多個第一電極層104,且絕緣層108內具有多個第一開口110,其分別露出輔助電極層106的一部份的側壁101。應理解的是雖然第3圖所繪示為輔助電極層106對應於3個第一電極層104,但本發明不侷限於此。在其他實施例中,輔助電極層106可對應於更少或更多個第一電極層104,其取決於設計需求。再者,第一開口110的數目及位置亦可依設計需求而變化,其不侷限於第3圖所繪示的樣態。 Please refer to FIG. 1B and FIG. 3 simultaneously. FIG. 3 is a plan view of the organic light emitting display according to the second embodiment of the present invention, and FIG. 1B is a schematic cross-sectional view of the line A-A' in FIG. The second embodiment differs from the first embodiment in that the auxiliary electrode layer 106 corresponds to the plurality of first electrode layers 104, and the insulating layer 108 has a plurality of first openings 110 therein, respectively exposing a portion of the auxiliary electrode layer 106. Part of the side wall 101. It should be understood that although FIG. 3 illustrates that the auxiliary electrode layer 106 corresponds to the three first electrode layers 104, the present invention is not limited thereto. In other embodiments, the auxiliary electrode layer 106 may correspond to fewer or more first electrode layers 104, depending on design requirements. Moreover, the number and position of the first openings 110 may also vary according to design requirements, and are not limited to the state illustrated in FIG.

請參照第1C圖,實施一退火製程,以於輔助電極層106露出的側壁101上形成一或多個金屬化合物114。在本實施例中,退火製程可在含有氧氣環境的氛圍下進行,且退火溫度可介於110至350℃之間。在本實施例中,金屬化合物114可為硫化物或氧化物。舉例來說,金屬化合物114可為硫化銀或氧化銀。需注意到由於此時第一電極層104的整個側壁103均被絕緣層108所覆蓋,因此金屬化合物114僅會形成於輔助電極層106露出的金屬層側壁101上。在本實施例中,金屬化合物114的高度介於1μm-3μm 之間。 Referring to FIG. 1C, an annealing process is performed to form one or more metal compounds 114 on the exposed sidewalls 101 of the auxiliary electrode layer 106. In this embodiment, the annealing process can be performed in an atmosphere containing an oxygen atmosphere, and the annealing temperature can be between 110 and 350 °C. In the present embodiment, the metal compound 114 may be a sulfide or an oxide. For example, the metal compound 114 can be silver sulfide or silver oxide. It should be noted that since the entire sidewall 103 of the first electrode layer 104 is covered by the insulating layer 108 at this time, the metal compound 114 is formed only on the metal layer sidewall 101 exposed by the auxiliary electrode layer 106. In the present embodiment, the height of the metal compound 114 is between 1 μm and 3 μm. between.

請參照第1D圖,形成一有機層116並順應性填入第一開口110與第二開口112,使有機層116接觸第一電極層104及輔助電極層106。有機層116可藉由適當的沉積技術,例如蒸鍍來形成,且有機層116的厚度介於50nm至400nm之間。在一實施例中,有機層116為一單層結構,其可為發光層、電洞注入層、電洞傳輸層、電子注入層與電子傳輸層的其中一者。在另一實施例中,有機層116可為一多層結構,其由電洞注入層、電洞傳輸層、電子注入層、電子傳輸層所構成。在又另一實施例中,有機層116亦可由發光層、電洞注入層、電洞傳輸層、電子注入層、電子傳輸層所構成。需注意的是在有機層116的沉積階段,由於有機層116的階梯覆蓋率不佳而無法完全覆蓋金屬化合物114,金屬化合物114會突出於有機層116外。 Referring to FIG. 1D, an organic layer 116 is formed and compliantly filled into the first opening 110 and the second opening 112 such that the organic layer 116 contacts the first electrode layer 104 and the auxiliary electrode layer 106. The organic layer 116 can be formed by a suitable deposition technique, such as evaporation, and the organic layer 116 has a thickness of between 50 nm and 400 nm. In an embodiment, the organic layer 116 is a single layer structure, which may be one of a light emitting layer, a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer. In another embodiment, the organic layer 116 may be a multilayer structure composed of a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer. In still another embodiment, the organic layer 116 may also be composed of a light emitting layer, a hole injection layer, a hole transport layer, an electron injection layer, and an electron transport layer. It should be noted that in the deposition stage of the organic layer 116, since the metal layer 114 cannot be completely covered due to the poor step coverage of the organic layer 116, the metal compound 114 may protrude outside the organic layer 116.

接著,藉由適當的沉積技術,例如物理氣相沉積,於有機層116上形成一第二電極層118並填入第一開口110與第二開口112。在本實施例中,第二電極層118可為薄金屬如MgAg合金或Ag合金、或透明導電材料,例如氧化銦錫(ITO)、氧化銦鋅(IZO)或氧化銦錫鋅(ITZO)。需注意的是在第二電極層118的沉積階段,由於部分的金屬化合物114突出於有機層116外,第二電極層118因此可接觸金屬化合物114,並藉由金屬化合物114與輔助電極層106電性連接。 Next, a second electrode layer 118 is formed on the organic layer 116 by a suitable deposition technique, such as physical vapor deposition, and fills the first opening 110 and the second opening 112. In the present embodiment, the second electrode layer 118 may be a thin metal such as MgAg alloy or Ag alloy, or a transparent conductive material such as indium tin oxide (ITO), indium zinc oxide (IZO) or indium tin zinc oxide (ITZO). It should be noted that in the deposition phase of the second electrode layer 118, since a portion of the metal compound 114 protrudes beyond the organic layer 116, the second electrode layer 118 may thus contact the metal compound 114 and pass through the metal compound 114 and the auxiliary electrode layer 106. Electrical connection.

根據以上實施例,即便有機發光顯示器的輔助電極層上存在有機層,第二電極層仍可透過形成於輔助電極層側壁的金屬化合物電性連接至輔助電極層。換句話說,在有機層的製造 階段,無需使用成本昂貴且製造不易的精密金屬遮罩來遮蔽輔助電極層,而可進一步簡化製程並降低製造成本。 According to the above embodiment, even if an organic layer exists on the auxiliary electrode layer of the organic light emitting display, the second electrode layer can be electrically connected to the auxiliary electrode layer through the metal compound formed on the sidewall of the auxiliary electrode layer. In other words, in the manufacture of organic layers In this stage, it is not necessary to use a precision metal mask which is expensive and difficult to manufacture to shield the auxiliary electrode layer, which further simplifies the process and reduces the manufacturing cost.

雖然本發明已以數個較佳實施例揭露如上,然其並非用以限定本發明。任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作任意之更動與潤飾。因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 Although the invention has been disclosed above in several preferred embodiments, it is not intended to limit the invention. Anyone skilled in the art can make any changes and refinements without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

100‧‧‧基板 100‧‧‧Substrate

101、103‧‧‧側壁 101, 103‧‧‧ side wall

102‧‧‧金屬化層 102‧‧‧metallization

104‧‧‧第一電極層 104‧‧‧First electrode layer

106‧‧‧輔助電極層 106‧‧‧Auxiliary electrode layer

108‧‧‧絕緣層 108‧‧‧Insulation

110‧‧‧第一開口 110‧‧‧ first opening

112‧‧‧第二開口 112‧‧‧ second opening

114‧‧‧金屬化合物 114‧‧‧Metal compounds

116‧‧‧有機層 116‧‧‧Organic layer

118‧‧‧第二電極層 118‧‧‧Second electrode layer

Claims (10)

一種有機發光顯示器,包括:一基板;複數個第一電極層,位於該基板上;一輔助電極層,位於該基板上且具有一側壁;一絕緣層,位於該些第一電極層上;一第二電極層,位於該絕緣層上,電性連接至該輔助電極層;其中,該絕緣層具有至少一第一開口露出該輔助電極層的至少部分的該側壁。 An organic light emitting display comprising: a substrate; a plurality of first electrode layers on the substrate; an auxiliary electrode layer on the substrate and having a sidewall; an insulating layer on the first electrode layers; The second electrode layer is disposed on the insulating layer and electrically connected to the auxiliary electrode layer; wherein the insulating layer has at least one first opening exposing the sidewall of the auxiliary electrode layer. 如申請專利範圍第1項所述之有機發光顯示器,更包括一金屬化合物,位於該輔助電極層露出的該側壁上。 The organic light emitting display according to claim 1, further comprising a metal compound on the sidewall of the auxiliary electrode layer exposed. 如申請專利範圍第2項所述之有機發光顯示器,其中該金屬化合物包括硫化物或氧化物。 The organic light emitting display of claim 2, wherein the metal compound comprises a sulfide or an oxide. 如申請專利範圍第2項所述之有機發光顯示器,其中該第二電極層係透過該金屬化合物電性連接至該輔助電極層。 The organic light emitting display according to claim 2, wherein the second electrode layer is electrically connected to the auxiliary electrode layer through the metal compound. 如申請專利範圍第4項所述之有機發光顯示器,其中該第二電極層為透明材料。 The organic light emitting display of claim 4, wherein the second electrode layer is a transparent material. 如申請專利範圍第1項所述之有機發光顯示器,其中該絕緣層具有對應於該些第一電極層之其中一者的一第二開口以露出該第一電極層,且該有機發光顯示器更包括一有機層,其位於該絕緣層上且填入該第一開口與該第二開口。 The OLED display of claim 1, wherein the insulating layer has a second opening corresponding to one of the first electrode layers to expose the first electrode layer, and the organic light emitting display further An organic layer is disposed on the insulating layer and fills the first opening and the second opening. 如申請專利範圍第6項所述之有機發光顯示器,其中該有機層為一發光層、一電子傳輸層、一電子注入層、一電洞傳輸層與一電洞注入層的其中一者或上述之組合。 The organic light emitting display according to claim 6, wherein the organic layer is one of a light emitting layer, an electron transporting layer, an electron injecting layer, a hole transporting layer and a hole injecting layer or the above The combination. 一種有機發光顯示器的製造方法,包括:提供一基板;於該基板上形成複數個第一電極層及一輔助電極層,其中該輔助電極層具有一側壁;於該些第一電極層上形成一絕緣層;於該絕緣層內形成至少一第一開口,以露出該輔助電極層的至少部分的該側壁;以及於該絕緣層上形成一第二電極層,電性連接至該輔助電極層。 A method for manufacturing an organic light emitting display, comprising: providing a substrate; forming a plurality of first electrode layers and an auxiliary electrode layer on the substrate, wherein the auxiliary electrode layer has a sidewall; forming a first electrode layer An insulating layer; at least one first opening is formed in the insulating layer to expose at least a portion of the sidewall of the auxiliary electrode layer; and a second electrode layer is formed on the insulating layer to be electrically connected to the auxiliary electrode layer. 如申請專利範圍第8項所述之有機發光顯示器的製造方法,更包括在形成該第一開口之後實施一退火製程,以於該輔助電極層露出的該側壁上形成一金屬化合物。 The method for fabricating an organic light emitting display according to claim 8, further comprising performing an annealing process after forming the first opening to form a metal compound on the sidewall of the auxiliary electrode layer exposed. 如申請專利範圍第8項所述之有機發光顯示器的製造方法,更包括:於該絕緣層內形成對應於該些第一電極層之其中一者的一第二開口,以露出該第一電極層的上表面;以及於該絕緣層上形成一有機層,以填入該第一開口與該第二開口。 The method for fabricating an organic light emitting display according to claim 8, further comprising: forming a second opening corresponding to one of the first electrode layers in the insulating layer to expose the first electrode An upper surface of the layer; and an organic layer formed on the insulating layer to fill the first opening and the second opening.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI671898B (en) * 2017-10-16 2019-09-11 南韓商樂金顯示科技股份有限公司 Organic light-emitting diode display

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI671898B (en) * 2017-10-16 2019-09-11 南韓商樂金顯示科技股份有限公司 Organic light-emitting diode display

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