TW201603871A - Enhanced capacity fluid storage, transport, and dispensing apparatus - Google Patents

Abstract

A fluid storage, transport, and dispensing apparatus is described, including a transport container configured to hold at least one fluid storage and dispensing vessel holding a storage medium for fluid to be stored on and desorptively dispensed therefrom, and a thermal management assembly constructed and arranged to maintain the vessel and storage medium in a chilled condition. Corresponding methods of supplying fluid are disclosed. The apparatus and methods of the disclosure enable enhanced capacity of fluid to be provided for fluids stored on and dispensed from storage media having increased capacity at decreased temperature, e.g., storage media such as solid phase physical adsorbents, ionic liquids, and reversible chemical reaction storage media.

Description

Enhanced capacity fluid storage, transport and distribution equipment

The disclosed invention relates to enhanced capacity fluid storage, transport and dispensing equipment and methods of supplying fluid therewith, for example, in the manufacture of semiconductor products, flat panel displays, solar panels, and the like.

In the form of a physical adsorption-based gas storage and distribution device disclosed in U.S. Patent No. 5,518,528 to Tom et al., the transportation, supply and use of harmful gases in the semiconductor industry has been revolutionized. The apparatus includes a container containing a physical adsorbent medium such as a mesh screen, activated carbon, or other adsorption medium having adsorption affinity that enables the gas to be stored therein and selectively dispensed from the container. The gas system is contained in the vessel under a reduced pressure in an adsorbed state on the adsorbent medium, the reduced pressure being relative to the equivalent amount of gas containing the "free" (unadsorbed) state (adsorbent) In the case of an empty container, the gas is desorbed from the adsorption medium under dispensing conditions.

In many applications in which the sorbent-based fluid supply device is utilized, the flow system is stored on the sorbent under negative pressure and can be distributed to the fluid utilization device at a corresponding low pressure level, like It is a semiconductor manufacturing tool that operates under negative pressure, such as an ion implant tool. When the fluid is maintained at a negative pressure level in the vessel under storage, transportation and use conditions, a high degree of safety is achieved with respect to conventional high pressure gas cylinders, for example, at a maximum of 2000 psig in a high pressure gas cylinder (pounds per square foot gauge) (13.8 MPa (million kPa)) or higher.

Although the sorbent-based fluid supply device is designed to maintain a negative pressure condition in the container at room temperature to provide a high degree of safety in storage, transportation, and use, the negative pressure conditions are limited. The total amount of fluid supplied to a fluid end user by the means can be utilized.

Accordingly, there is a need to improve the capacity of the sorbent-based fluid supply device so that a higher amount of fluid can be packaged, transported, and utilized economically.

The disclosed invention relates to enhanced capacity fluid storage, transportation and dispensing equipment and methods.

In one aspect, the present disclosure is related to a fluid storage, transport, and dispensing device that includes a shipping container and a thermal management assembly configured to receive at least one fluid storage and dispensing container, the fluid storage And the dispensing container holds a storage medium for storing fluid on and desorbing from the storage medium, the thermal management assembly being constructed and arranged to maintain the container and storage medium in a cooling condition.

Another aspect of the present disclosure relates to a method of supplying a fluid for use, the method comprising packaging the fluid in a fluid storage, transport, and dispensing device in accordance with the present disclosure.

A further aspect of the present disclosure relates to a method of supplying a fluid for use, the method comprising transporting the fluid in a fluid storage, transport and dispensing apparatus according to one of the disclosed inventions.

In another aspect, the present disclosure relates to a method of supplying a fluid, the method comprising introducing a fluid to a storage medium for storage in the storage medium, the storage medium having an increased capacity at a reduced temperature, and Cooling the fluid and the storage medium to a cooling temperature during the introducing, subsequently storing the fluid on the storage medium, and subsequently transporting the fluid on the storage medium, wherein the cooling temperature is at The flow system on the storage medium is at a negative pressure.

In a further aspect, the present disclosure relates to a method of supplying a fluid stored on a storage medium from a storage medium, the method comprising providing the fluid to the storage medium at a cooling temperature prior to fluid dispensing The fluid is then dispensed during or after warming of the fluid from the cooling temperature to the higher ambient temperature and the storage medium.

Other aspects, features, and embodiments of the present invention will be apparent from the following description and appended claims.

10‧‧‧Transport Container

12‧‧‧ upper part

14‧‧‧The lower part

16‧‧‧Internal space

18‧‧‧ Fluid storage and dispensing containers

20‧‧‧ Fluid storage and dispensing containers

22‧‧‧Fluid storage and distribution containers

24‧‧‧ Fluid storage and dispensing containers

26‧‧‧Cross-shaped containment room

28‧‧‧arms

30‧‧‧ modules

32‧‧‧ recesses

34‧‧‧ recess

36‧‧‧ recesses

38‧‧‧ recesses

1 is a schematic illustration of a shipping container, wherein the fluid storage and dispensing apparatus includes a source of coolant contained to maintain the adsorbent in the storage and dispensing container in the container at a predetermined cooling temperature condition.

The present disclosure relates to enhanced capacity fluid storage, transport, and dispensing apparatus and methods in which heat sensitive fluid storage and dispensing media can be maintained under appropriate conditions to enhance fluid supply capacity.

When used herein in such additional claims, the singular "a", "an", "the" and "the" refer to the plural referents unless the context clearly dictates otherwise.

As used herein, the term "cooling condition" means a temperature below ambient temperature, for example, at least 10 ° C below ambient temperature, preferably at least 25 ° C below ambient temperature and not exceeding 0 ° C. The temperature is optimal, and the temperature is in the range of -50 ° C to -80 ° C.

The enhanced capacity fluid storage, transport, and dispensing apparatus in a particular embodiment includes a shipping container and a thermal management component configured to receive at least one fluid storage and dispensing container, the fluid storage and The dispensing container holds an adsorbent having an adsorption affinity that enables the fluid to be stored on and desorbed from the adsorbent, the thermal management assembly being arranged to maintain the (and) container with the adsorbent therein in a cooling In the condition.

In the fluid storage and dispensing apparatus, the thermal management assembly can include a coolant medium, such as dry ice or other coolant, disposed within a compartment or chamber of the shipping container.

The shipping container can be configured to accommodate a plurality of fluid storage and dispensing containers, as described in further detail below.

In a specific embodiment, the thermal management component is actuated by the filling station, and the container is first filled with fluid at the filling station to cool the container and the adsorbent to increase relative to The amount of adsorbent loaded at ambient or other higher temperatures. Thereafter, the container in the fluid storage and dispensing device can be kept at a low temperature by the thermal management assembly, such as maintaining a low temperature during storage and transportation. The container may be filled with fluid for the first time while the container and/or flow system is in a cooled condition, and the formed fluid containing container may be packaged in an insulated or super insulated transport container with optional additional Cooling performance, such as dry ice, liquid nitrogen, or mechanical cooling components or additional sorption cooling components. In this method, the vessel and adsorbent can be maintained at a cooling temperature until fluid dispensing is desired, and during a subsequent selective dispensing operation.

As a specific example, a sorbent-based fluid storage and dispensing container having a 5 L (liter) internal space can be maintained at a cooling temperature using dry ice (eg, 30-35 kg of CO ₂ ) (eg, between -78 ° C and During the period of 60-100 days at a temperature between room temperatures, the fluid storage, transport and distribution equipment is capable of meeting the requirements for transportation, installation and use.

Although the storage medium for a fluid containing fluid in the broad implementation of the disclosed invention is herein generally described as including a solid phase physical adsorbent, it will be understood that the applicable scope of the disclosed invention is not thereby Limit, and can extend and cover the use of other storage media, such as ionic liquids, reversible chemical reaction storage media that are reactive with the fluid being stored, and have affinity for the fluid and are suitable for Other media and materials of the storage medium, and wherein the fluid loading capacity of the storage medium increases when the temperature is lowered, for example, to a temperature below the ambient (room temperature) temperature, such as 25 °C.

When in the form of a solid phase physical adsorbent, the storage medium can be in any suitable form and can, for example, include ceria, alumina, yttrium aluminate, molecular sieves, carbon, macroreticular polymers, and copolymers. and many more. In most embodiments, the storage medium can include a nanoporous carbon adsorbent having pore characteristics suitable for fluid storage to retain the fluid in a fluid storage and dispensing container containing the adsorbent, and Assigned from the container.

The solid phase physical adsorbent can be in any suitable form, including granular or particulate form, or in powder form, or in bulk form. As used herein, "blocky" means that the solid phase physical adsorbent is a single or like block in comparison to conventional finely divided forms such as beads, particles, particles, pellets, and the like. Form, for example In the form of a block, a brick, a dish, a column, or the like, the finely divided form of the adsorbent is generally used in the form of a bottom layer, which includes the multiplicity of the beads, particles, particles, pellets, and the like. Thus, in most of the underlying forms of finely divided physical adsorbent units, the major portion of the pore volume of the active adsorbent is present between the interstices or between the particles, the properties of which vary depending on the size, shape and packing density of the adsorbent particles. In contrast, in the bulk form, the pore volume of the active adsorbent is in the form of pores and pores inherent in the adsorbent material, which may have formed in the block during processing of the bulk adsorbent body. In the main body of the adsorbent.

In most embodiments, the solid phase physical adsorbent can be in the form of a block comprising a dish or a spherical adsorbent, such as a nanoporous carbon adsorbent.

The bulk adsorbent can be formed as a pyrolysis product of an organic resin, and more generally can be formed from any suitable pyrolyzable material such as polyvinylidene chloride, phenolic resin, polydecyl alcohol, coconut shell, Peanut shell, peach pit, olivine, polyacrylonitrile and polypropylene decylamine. The adsorbent can be formed in the fluid storage and dispensing container, wherein the fluid will be stored for subsequent dispensing, ie, in situ dispensing, or the adsorbent can be formed and subsequently introduced into the fluid storage and dispensing container. in. In a specific embodiment, the adsorbent has a porosity of at least 20% and a pore having a diameter of less than 2 nanometers.

The fluid storage and dispensing container is adsorbed on the adsorbent or stored on a storage medium, and is suitably The fluid desorbed for desorption under desorption conditions or released from the storage medium can be any suitable form of fluid, for example, a fluid useful in the manufacture of semiconductor products, flat panel displays or solar panels. Examples of such fluids include hydrides, halides, and organometallic gaseous reagents and other fluids such as decane, hydrazine, phosphine, phosgene, diborane, boron trichloride, boron trifluoride, decane, ammonia, hydrazine. Hydrogen, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydride, halogen (chlorine, bromine, fluorine and iodine) compounds, antimony tetrafluoride , ruthenium tetrafluoride, chlorine, carbon monoxide, ruthenium, osmium difluoride, hydrogen, and a gas mixture comprising one or more of the foregoing, or an isotope-concentrated gas such as the aforementioned gas species (for example, antimony tetrafluoride or An isotope-concentrated gas of antimony tetrafluoride) is provided as a single component gas or as a mixture with most other gases.

Accordingly, the fluid storage, transport, and dispensing apparatus contemplated by the present disclosure in many embodiments includes a shipping container and a thermal management assembly configured to receive at least one fluid storage and dispensing container, the fluid storage and The dispensing container houses a storage medium for storing fluid on and desorbing from the storage medium, the thermal management assembly being constructed and arranged to maintain the container and storage medium in a cooling condition.

The thermal management component in the apparatus can include a coolant medium such as dry ice (CO ₂ ). The shipping container can be configured to accommodate a plurality of fluid storage and dispensing containers. The thermal management assembly can be constructed and arranged to maintain the container and storage medium in a cooling condition for a period of at least 30 days, a period of 60 to 90 days, a period of 3 to 6 months, or other length of time.

The storage medium in the fluid storage and dispensing containers can include a solid phase physical adsorbent such as ceria, alumina, yttrium aluminate, molecular sieves, carbon, polymers, and copolymers. Highly advantageous adsorbents include carbon adsorbents, which may be in the form of blocks or other forms. In other embodiments, the storage medium can include an ionic liquid or a reversible chemical reaction storage medium.

In the disclosed invention, the thermal management assembly can include a thermal management component such as a thermal insulator, a super thermal insulator, dry ice, liquid nitrogen, a mechanical cooling assembly, an adsorption cooling assembly, or a combination of two or more of the foregoing.

The fluid stored on the storage medium can be in any suitable form and can be a fluid useful in the manufacture of semiconductor products, flat panel displays or solar panels, such as hydrides, halides, organometallic compounds, decane, ruthenium, phosphine. , phosgene, diborane, boron trichloride, boron trifluoride, decane, ammonia, hydrogen halide, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, epoxy Alkane, deuterated hydride, halogen (chlorine, bromine, fluorine and iodine) compounds, antimony tetrafluoride, antimony tetrafluoride, chlorine, carbon monoxide, antimony, antimony difluoride, hydrogen, gases comprising one or more of the foregoing And a mixture comprising one or more of the aforementioned isotopically concentrated gases and gas mixtures.

The shipping container in the apparatus of the present disclosure may include a heat insulating box. The insulated container may include a coolant receiving container including a central cooling compartment and a plurality of dividing arms radiating outwardly from the central cooling compartment, and defining a plurality of receiving for the at least one fluid storage and dispensing container region. For example, the coolant container can have a cross-shaped cross-section and be configured to receive a single fluid storage and dispensing container between each of its adjacent dividing walls. The coolant may include dry ice (CO ₂ ). In a particular embodiment, the insulated enclosure can contain four fluid storage and dispensing vessels, each containing a carbon adsorbent and having an absorbed fluid on the carbon adsorbent. The coolant container in a particular embodiment may comprise 30-35 kg of dry ice (CO ₂ ).

The present disclosure contemplates a method of supplying a fluid for use, the method comprising packaging the fluid in various fluid storage, transport, and dispensing devices as described herein. The disclosed invention also contemplates a method of supplying a fluid for use, the method comprising transporting the fluid among the various fluid storage, transport, and dispensing devices described herein.

In another aspect, the present disclosure relates to a method of supplying a fluid, the method comprising introducing a fluid to a storage medium for storage on the storage medium, the storage medium having an increased storage capacity at a reduced temperature, And the fluid and the storage medium during the introduction, subsequent storage of the fluid on the storage medium, and subsequent transport of at least one of the fluids on the storage medium The cooling is cooled to a cooling temperature wherein the flow system on the storage medium at the cooling temperature is at a negative pressure.

The method can further include cooling at least one of the fluid and the storage medium before the fluid is introduced into the storage medium for storage on the storage medium.

The foregoing method can further include stopping the cooling action to increase the pressure of the fluid.

The foregoing method can include dispensing at least a portion of the fluid from the storage medium, such as at super-atmospheric pressure, or alternatively at a vacuum or atmospheric pressure. The process can be carried out using a storage medium comprising a solid phase physical adsorbent, such as a sorbent selected from the group consisting of ceria, alumina, yttrium aluminate, molecular sieves, carbon, polymers and copolymers. As indicated previously, the adsorbent may comprise a carbon adsorbent, for example in the form of a block or a particle or other subtle form. The storage medium may alternatively comprise an ionic liquid or a reversible chemical reaction storage medium.

The cooling in the above described method is effected by a coolant medium such as dry ice (CO ₂ ) or by a mechanical cooling assembly or an adsorption cooling assembly. The fluid, as previously described, may include a fluid useful in the manufacture of semiconductor products, flat panel displays or solar panels, such as from hydrides, halides, organometallic compounds, decane, ruthenium, phosphine, phosgene, diborane, Boron trichloride, boron trifluoride, decane, ammonia, hydrogen halide, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydride, a halogen (chlorine, bromine, fluorine and iodine) compound, ruthenium tetrafluoride, ruthenium tetrafluoride, chlorine, carbon monoxide, ruthenium, ruthenium difluoride, hydrogen, a gas mixture comprising one or more of the foregoing, and one or more of the foregoing A fluid selected by a cluster of isotopically concentrated gases and gas mixtures.

Cooling in the above described method is performed during the introduction, and/or during the subsequent storage of the fluid on the storage medium, and/or subsequent transport of the fluid on the storage medium During the period.

In another aspect, the present disclosure relates to a method of supplying a fluid stored on a storage medium from a storage medium, the method comprising providing the fluid to the storage medium at a cooling temperature prior to fluid dispensing The fluid is then dispensed during or after warming of the fluid from the cooling temperature to the higher ambient temperature and the storage medium. In this method, the dispensing can include dispensing fluid from the storage medium at super-atmospheric pressure, or alternatively dispensing at a negative pressure or atmospheric pressure. The dispensing may be performed during warming of the fluid and storage medium from the cooling temperature to a higher ambient temperature, or the dispensing may be after the fluid and the storage medium are warmed from the cooling temperature to a higher ambient temperature get on. The storage medium, as in other embodiments, may comprise a solid phase physical adsorbent, such as those previously described, such as a block or other form of carbon adsorbent, or an ionic liquid or a reversible chemical reaction storage. Media Introduction. The fluid stored on the storage medium can be in any suitable form, including the fluid combinations previously described herein.

Referring now to the drawings, FIG. 1 is a schematic representation of an enhanced capacity fluid storage, transport, and dispensing apparatus including a shipping container in which the fluid transport and dispensing containers are provided and together provide the included cooling a source of agent that is effective to maintain the adsorbent and fluid in the fluid transport and dispensing container of the shipping container at predetermined cooling temperature conditions.

As depicted in Figure 1, the fluid storage and dispensing apparatus includes a shipping container 10 that includes an upper portion 12 that engages a lower portion 14 in a mating manner. Specific matable engagement formations on the respective upper and lower portions 12 and 14 of the shipping container may include pockets in the upper and lower portions in which the fluid storage and dispensing containers may be deposited, such that when the container is When installed in the transport container, the lower portions of the containers are placed in the pockets of the lower portion 14 and the upper portion of the containers are deposited in the pockets of the upper portion 12 when the transport container When the upper and lower portions are joined to each other, the upper and lower portions are positioned in alignment with each other.

In addition, the upper and lower portions 12 and 14 of the transport container may be provided with an interconnectable coupler, a locking member, etc. (not shown in FIG. 1), such that the upper and lower portions 12 and The 14 series are firmly fixed to each other.

Referring to the lower portion 14 of Figure 1, the lower portion 14 defines an interior space 16 in which four vertically elongated fluid storage and dispensing containers 18, 20, 22 and 24 are disposed, which are disposed The cross-shaped accommodation chamber 26 is divided into individual compartments of the internal space. The cross-shaped accommodating chamber 26 includes four arm portions extending radially outward from a central portion of the accommodating chamber. The wall portion and the central portion of the accommodating chamber define an X-shaped cross section. As shown in the perspective view of FIG. 1 , the upper end of the cross-shaped accommodating chamber 26 is openable, and the central portion and the central portion are An interior space is defined that is adapted to receive a coolant medium at the open upper end. Alternatively, the cruciform containment chamber 26 can include an upper cover that acts as a body for the containment chamber to provide a closed space for receiving the coolant medium.

Although having an X-shaped cross-section as illustrated in the illustrated embodiments, it will be appreciated that the coolant medium containment chamber can have other forms and shapes to accommodate a coolant medium and provide the transport container. The inner portion of the lower portion is divided, and the fluid storage and dispensing containers in which the adsorbent and the absorbed fluid are contained are placed in a corresponding recess or space region of the lower portion.

The upper portion 12 of the shipping container is provided with a plurality of pockets 32, 34, 36 and 38 therein as depicted, wherein the upper and lower portions of the shipping container match each other The upper portions of the fluid storage and dispensing containers 18, 20, 22 and 24 are separately positioned.

Associated with the upper portion 12 of the shipping container is a module 30 that includes a thermal management assembly for the shipping container. The module may additionally or alternatively include a compartment in which additional coolant medium or other cooling capacity may be provided.

When the module 30 includes a thermal management component for the shipping container, the component can be configured to monitor fluids in the containers and/or the containers and/or in the containers in the container The case of fluid storage media. For example, the assembly can include one or more thermocouples or other thermal sensors arranged to monitor the temperature of the container, the containers and/or container contents, and to output thermal sensing signals. The thermal sensing signal can be transmitted to a processor, display or other output device or medium to perform the monitoring operation.

In various embodiments, the signals can be transmitted to a processor, such as a microprocessor, programmable logic controller, central processing unit, special purpose programming computer, etc., which in turn is associated with one or more devices or components Connected to regulate the thermal conditions in the container or the container, or the contents of the container (fluid storage and dispensing containers, absorbent or other storage media in such containers, fluids in such containers, or combinations thereof). The thermal conditioning can be in any suitable form and can, for example, comprise a low temperature vapor release from a Dürr tube, which The Dürr tube contains liquid nitrogen or other cryogen disposed in the interior of the shipping container and is coupled to the processor to maintain a predetermined cooling temperature of the container and its contents in the shipping container.

In other embodiments, the thermal management module 30 can include a coolant compartment in which a source of coolant, such as dry ice, liquid nitrogen, or other coolant medium or component can be disposed.

The transport container disclosed in the present invention enables a plurality of fluid storage and transport containers to contain a storage medium on which a fluid is stored, wherein the fluid capacity for the storage medium increases with decreasing temperature to be maintained at a low temperature. The time period, for example 3-6 months. By maintaining the fluid storage medium at a lower temperature, a larger fluid inventory can be stored on the storage medium, thereby increasing the cost effectiveness of the fluid storage, transportation, and dispensing operations.

The transport container of the present disclosure correspondingly enables pressure regulation and control of the fluid in the fluid storage and dispensing container derived from thermal management of the fluid and storage medium, and storage on the fluid and storage medium There is this fluid. For example, the fluid storage and dispensing container can be cooled during transport and subsequent storage in the transport container, such that the gas inventory is maintained by the storage medium under negative pressure, thereby being relative to a conventional high pressure gas cylinder The high security of the transport operation is provided. After the container is installed in the fluid utilization facility, for example, in a semiconductor manufacturing facility, the coolant cooling effect of the container can be interrupted, so that once heated, the increased fluid inventory therein can be It then rises above atmospheric pressure, but then returns to negative pressure during use of the fluid dispensed from the container. This mode of operation thus provides enhanced safety of the fluid supply container during transport and storage of the container, where the container has been installed for fluid dispensing services (for example, in a gas box of an ion implanter) Thereafter, a subsequent rise in the fluid pressure in the vessel is adjusted, for example to reduce superatmospheric pressure, and a subsequent fluid dispensing operation involving a negative pressure in the fluid dispensing vessel.

The fluid storage and dispensing container and wherein the fluid storage medium can be cooled upon initial filling, and the fluid itself can be cooled to load the fluid storage medium relative to the container, storage medium and/or fluid cooling operation In this regard, the fluid storage medium can be provided with an increased fluid loading.

For example, a cooling fluid storage and dispensing container can be maintained at a cooling temperature during initial fluid filling, subsequent storage, and transportation, but once the container and the sorbent therein are cooled to a terminal using the fluid utilization facility, It is stopped so that the fluid storage and dispensing container is heated to ambient conditions in subsequent use, the pressure of the distributed gas rising as the temperature of the container and the adsorbent rises during the warming.

Alternatively, the fluid storage and dispensing container can be filled with fluid at super-atmospheric pressure and ambient temperature, maintaining the pressure and temperature conditions during storage and transportation, until the fluid storage and dispensing device is installed to the fluid utilization facility. .

Upon installation, the fluid storage and dispensing container and the adsorbent therein can be cooled for negative pressure distribution, and then the cooling is stopped to accommodate the warmth of the container and the adsorbent during a later phase of the dispensing operation, thus Maintaining the negative pressure of the dispensing fluid during a full dispensing operation, followed by warming at a subsequent stage of the dispensing operation to increase fluid pressure in the fluid supply container to assist in residual fluid distribution from the container, i.e., residual fluid .

The shipping container of the present disclosure can be utilized in a container array of suitable characteristics for single-array transport. For example, four transport containers having the form illustrated in Figure 1 may be provided on a 110 cm x 110 cm pallet, such that the pallet contains 16 containers in the four containers and is at -78 °C. Dry ice provides cooling. Most insulation plugs can be provided in such containers to control the degree of specific cooling and temperature degradation therein. In this manner, temperature adjustment of the vessel can be performed, for example, at a temperature ranging from about -20 ° C to -70 ° C to accommodate long term cooling storage and transportation of the fluid storage and dispensing apparatus.

In general, any suitable features and components can be utilized to ensure that the temperature within the shipping container is kept low. As indicated, most temperature sensors with thermal conditioning equipment or capabilities can be utilized. Scales can be used to measure the weight of the shipping container to establish the nature and scale of the coolant capacity required to maintain the fluid supply container and the fluid storage medium current collector contained therein at a desired temperature level. The specific design of the transport container can be changed To accommodate any suitable number of fluid storage and dispensing containers, for example, by dividing, forming a plurality of receiving pockets therein, and the like.

The shipping container itself may be formed from any suitable construction material, including metal, wood, ceramic, plastic, fibrous materials, woven or non-woven materials, composites, and the like. In various embodiments, the shipping container may be formed from a suitable insulating material, such as a polymeric rigid structural foam, to inhibit or prevent heat transfer from the surrounding environment to the fluid supply containers in the shipping container. The transport container can be displayed including a heat insulating material and a non-and swimming material, such as a molded or accommodating foam insulation material inside the outer sheet metal shell, so that one or more fluid supply containers can be introduced to Among the shipping containers. Ultra-insulating materials may be utilized to enhance cryogenic retention in the shipping container to accommodate storage and shipping duration associated with the fluid supply container prior to being placed for use to dispense fluid to a fluid utilization facility or tool. .

The transport containers of the present disclosure may be constructed and arranged to maintain the fluid supply during a prolonged period of time, such as 60 to 90 days, 3 to 6 months, at least 30 days, or The duration of other choices. This is appropriate for the particular fluid supply container, the fluid storage medium therein, and the fluid stored on the fluid storage medium in the container. The fluid storage medium can include a solid phase physical adsorbent medium, ions Liquid, reversible chemical reaction storage medium or storage medium for other materials.

Thus, the transport container containing one or more fluid storage and dispensing containers can be elastically cut to meet the needs of a particular application in which the fluid temperature and pressure in the fluid supply containers can be varied and replaced. / or additional methods to adjust.

These non-limiting examples of the features and advantages of the disclosed invention are more apparent.

Example 1

Providing a transport container in the form illustrated in Figure 1, an insulated container defining a fixed temperature tank to accommodate a plurality of adsorbent-based gas storage and dispensing containers, each containing an adsorbent, for example, porous carbon adsorption And an adsorbed gas thereon. The gas may be in any suitable form and may, for example, comprise rhodium, phosphine, boron trichloride, boron trifluoride, decane, antimony tetrafluoride, decane, antimony tetrafluoride, chlorine, carbon monoxide, hydrazine, difluorination. Helium, hydrogen, diborane, or other hydride gas, halide gas or organometallic precursor gas, and a gas mixture comprising one or more of the foregoing and an isotope-concentrated gas comprising, for example, the aforementioned gas species, for example, antimony tetrafluoride Or an isotope-concentrated gas of antimony tetrafluoride.

The cruciform containment chamber 26 (refer to Fig. 1) is filled with dry ice (CO ₂ ). Fluid supply vessel 18, 20 such lines are pre-cooled to a desired temperature, in order to reduce the capacity of the CO ₂ contained in the coolant. The fixed temperature chamber may contain a polyurethane insulation to assist in maintaining the desired temperature.

The polyurethane insulation material has an insulation value of 0.71 (W * in) / (m ² * ° K), wherein W is watt, "in" is thickness (inch), and m ² is area (m2), and ° K is the temperature (Kjeldahl temperature). According to this, for the polyurethane insulation material in the transportation container, it has an area of 0.1 m ² , a thickness of 3 in, and a temperature difference of 100 ° K between the fluid supply container and the environment around the transportation container, and is transmitted to the fixing. The heat of the coolant (CO ₂ ) in the temperature chamber was 2.36 watts. Since the heat of vaporization of CO ₂ is 574 kJ/kg, 1 kg of CO ₂ can be used at 2.36 W (J/sec) for 1.9 x ^{10 5} seconds (= 68 hours). In order to maintain this temperature for 90 days, 32 kg of CO _{2 is required} . For example, with a larger thickness of insulation, etc. in order to gain improved insulation super insulated degree range, longer in this case a given quantity of CO ₂ will be used. For example, in the transport container of Figure 1, the gas supply containers can be placed at a distance of 3 inches from the arms of the cruciform containment chamber to have a thickness of insulation greater than 3 inches. Maintaining the required temperature in this case will require less than 32 kg of CO ₂ .

As mentioned, a plurality of transport containers in the form illustrated in Figure 1 may be packaged for transport on a single pallet, and the arrangement will be further reduced to the respective transport containers in the arrangement. The heat inflow on the inner walls (that is, the inner walls are in close contact with the inner wall of the adjacent transport container to face Face contact). In addition, a majority of further insulation layers can be applied to the outside of the majority of the shipping container assembly array to further inhibit heat from flowing into the surrounding environment.

The equilibrium temperature of the fluid supply container in the transport container will be related to the distance between the coolant chamber (the cross-shaped containment chamber 26 in the transport container of Figure 1) and the container, for example, from the wall of the container to The linear temperature of the coolant drops. If it is desirable to maintain the fluid supply containers at the temperature of the coolant, then a plurality of open channels provided between the fluid supply and a central coolant chamber can be utilized to effect the temperature. maintain. For example, a cover of the cruciform containment chamber may be utilized, which essentially provides the open passage in a perforated manner, having a plurality of openings providing the coolant in the containment chamber and the interior space in the transport container The fluid communication between the contained devices.

The fluid supply container in the transport container described above can be initially loaded at a pressure of 1500 Torr at room temperature and subsequently cooled, so that the vapor pressure of the gas in the adsorbent-based container is lowered. To below 760 Torr, that is, to become a negative pressure, the container is thereafter maintained at a low temperature sufficient to maintain a negative gas pressure in the container during storage and transportation of the transport container before use of the fluid supply container therein. .

In use, the user will remove the fluid supply container from the fixed temperature chamber and quickly attach the container to the fluid using equipment or tools, such as with an ion implanter. If this The joining operation is performed fast enough that the gas in the fluid supply container is still maintained under a negative pressure. Once the container is heated to room temperature after installation of the container, the pressure rises above atmospheric pressure, and the user differs from the loading difference of 760 Torr when the container is loaded at ambient (room temperature) temperature. There will be an increased gas capacity so that in the absence of cooling of the vessel and the 1500 Torr fill pressure in the previous examples, the pressure in the vessel does not exceed the atmospheric pressure during subsequent storage and transportation.

By incorporating a thermally insulating outer casing around the body of the fluid supply container, the pressure can be increased during the time that the temperature of the fluid supply container can be maintained at a low temperature, and the outer casing can be pressurized during the transportation or installation process. The container remains on the container after it has been removed and during the subsequent use of the fluid supply. The outer casing can then be removed after the container is installed so that it does not interfere with the ability of the container to subsequently dispense fluid.

After the fluid has been dispensed from the fluid supply container, its internal pressure will again become a negative pressure and thus a safe condition for subsequent transportation for refilling or other placement.

It will be recognized that the costs associated with the packaging and shipping of most fluid supply containers in the shipping container of the presently disclosed invention are relatively low, which is related to the cost and value of the fluid provided by this means, and is therefore utilized. a coolant medium such as CO ₂ at low cost, the present invention discloses a method to increase the capacity of the fluid supply vessel can be reached in such a fluid enables the user to achieve a reduction of cost of ownership.

Although the present invention has been described herein with reference to specific aspects, features, and example embodiments, it is understood that the utility of the disclosed invention is not limited thereby, but rather, as described herein, Other variations, modifications, and alternative embodiments suggested by those of ordinary skill in the art to which the present invention pertains are contemplated. Accordingly, the invention in its broader aspects is intended to be construed as

10‧‧‧Transport Container

12‧‧‧ upper part

14‧‧‧The lower part

16‧‧‧Internal space

18‧‧‧ Fluid storage and dispensing containers

20‧‧‧ Fluid storage and dispensing containers

22‧‧‧Fluid storage and distribution containers

24‧‧‧ Fluid storage and dispensing containers

26‧‧‧Cross-shaped containment room

28‧‧‧arms

30‧‧‧ modules

32‧‧‧ recesses

34‧‧‧ recess

36‧‧‧ recesses

38‧‧‧ recesses

Claims (60)

A fluid storage, transport, and dispensing device comprising a transport container and a thermal management assembly configured to receive at least one fluid storage and dispensing container, the fluid storage and dispensing container containing a storage medium for fluid storage Dissociating the storage medium from the storage medium, the thermal management assembly is constructed and arranged to maintain the container and storage medium in a cooling condition. The apparatus of claim 1 wherein the thermal management component comprises a coolant medium. The apparatus of claim 2, wherein the coolant medium comprises dry ice (CO ₂ ). The device of claim 1 wherein the shipping container is configured to accommodate a plurality of fluid storage and dispensing containers. The apparatus of claim 1 wherein the thermal management component is constructed and arranged to maintain the container and storage medium for a period of at least 30 days in a cooling condition. The apparatus of claim 1 wherein the thermal management component is constructed and arranged to maintain the container and storage medium for a period of 60 to 90 days in a cooling condition. The device of claim 1 wherein the thermal management component is constructed and arranged to maintain the container and storage medium A period of 3 to 6 months in a cooling condition. The apparatus of claim 1 wherein the storage medium in the at least one fluid storage and dispensing container comprises a solid phase physical adsorbent. The apparatus of claim 8 wherein the solid phase physical adsorbent comprises a sorbent selected from the group consisting of ceria, alumina, yttrium aluminate, molecular sieves, carbon, polymers, and copolymers. The apparatus of claim 8 wherein the solid phase physical adsorbent comprises a carbon adsorbent. The apparatus of claim 10, wherein the carbon adsorbent is in the form of a block. The device of claim 1 wherein the storage medium comprises an ionic liquid. The apparatus of claim 1 wherein the storage medium comprises a reversible chemical reaction storage medium. The apparatus of claim 1, wherein the thermal management component comprises a heat selected from the group consisting of a thermal insulator, a super thermal insulator, dry ice, liquid nitrogen, a mechanical cooling component, an adsorption cooling component, and a combination of two or more of the foregoing. Management component. The apparatus of claim 1 further comprising a fluid stored on the storage medium. The device of claim 15 wherein the fluid stored on the storage medium comprises a fluid selected from the group consisting of a plurality of fluids useful in the manufacture of semiconductor products, flat panel displays or solar panels. The apparatus of claim 15 wherein the fluid stored on the storage medium comprises a hydride, a halide, an organometallic compound, decane, ruthenium, phosphine, phosgene, diborane, boron trichloride, three Boron fluoride, decane, ammonia, hydrogen halide, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydride, halogen (chlorine, bromine, Fluorine and iodine) compounds, antimony tetrafluoride, antimony tetrafluoride, chlorine, carbon monoxide, antimony, antimony difluoride, hydrogen, gas mixtures comprising one or more of the foregoing, and isotopically concentrated gases and gases comprising one or more of the foregoing The mixture constitutes a fluid selected by the cluster. The apparatus of claim 1 wherein the transport container comprises a heat insulating box. The apparatus of claim 18, wherein the heat insulating box comprises a coolant receiving container comprising a central cooling compartment and a plurality of dividing arms radiating outwardly from the central cooling compartment. The apparatus of claim 19, wherein the coolant container has a cross-shaped cross section and is configured to be adjacent thereto A single fluid storage and dispensing container is housed between each of the dividing walls. The apparatus of claim 20, wherein the coolant container contains dry ice (CO ₂ ). The apparatus of claim 20, wherein the insulated enclosure contains four fluid storage and dispensing containers. The apparatus of claim 22, wherein each of the four fluid storage and dispensing containers contains a carbon adsorbent having an adsorbent fluid thereon. The apparatus of claim 21, wherein the coolant container contains 30-35 kg (kg) of dry ice (CO ₂ ). A method of supplying a fluid for use, the method comprising the step of packaging the fluid in a fluid storage, transport and dispensing device according to any one of claims 1 to 24. A method of supplying a fluid for use, the method comprising the step of transporting the fluid in a fluid storage, transport and dispensing device according to any one of claims 1 to 24. A method of supplying a fluid for use, the method comprising the steps of: introducing a fluid to a storage medium for storage on the storage medium, the storage medium having an increased capacity at a reduced temperature, and at the introduction, subsequent Fluid is stored on the storage medium and subsequently transported on the storage medium During at least one of the fluids, the fluid and storage medium are cooled to a cooling temperature wherein the flow system at the cooling temperature on the storage medium is at a negative pressure. The method of claim 27, further comprising the step of cooling at least one of the fluid and the storage medium before the fluid is introduced into the storage medium for storage on the storage medium. The method of claim 27, further comprising the step of stopping the cooling action to increase the pressure of the fluid. The method of claim 29, comprising the step of dispensing at least a portion of the fluid from the storage medium. The method of claim 30, wherein the fluid is dispensed at a superatmospheric pressure upon dispensing. The method of claim 30, wherein the fluid is dispensed under negative pressure during dispensing. The method of claim 27, wherein the storage medium comprises a solid phase physical adsorbent. The method of claim 33, wherein the solid phase physical adsorbent comprises a sorbent selected from the group consisting of ceria, alumina, yttrium aluminate, molecular sieves, carbon, polymers, and copolymers. The method of claim 33, wherein the solid phase Physical adsorbents include carbon adsorbents. The method of claim 35, wherein the carbon adsorbent is in the form of a block. The method of claim 27, wherein the storage medium comprises an ionic liquid. The method of claim 27, wherein the storage medium comprises a reversible chemical reaction storage medium. The method of claim 27, wherein the cooling is effected by a coolant medium. The method of claim 39, wherein the coolant medium comprises dry ice (CO ₂ ). The method of claim 27, wherein the cooling is effected by a mechanical cooling assembly or an adsorption cooling assembly. The method of claim 27, wherein the fluid comprises a fluid selected from the group consisting of a plurality of fluids having utility in the manufacture of a semiconductor product, a flat panel display, or a solar panel. The method of claim 27, wherein the fluid comprises a hydride, a halide, an organometallic compound, decane, ruthenium, phosphine, phosgene, diborane, boron trichloride, boron trifluoride, decane, Ammonia, hydrogen halide, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydride, halogen (chlorine, bromine, fluorine and iodine) compounds, antimony tetrafluoride, antimony tetrafluoride, chlorine, carbon monoxide, antimony, antimony difluoride, hydrogen, gas mixtures comprising one or more of the foregoing, and isotopes comprising one or more of the foregoing A fluid selected from the group consisting of a concentrated gas and a gas mixture. The method of claim 27, wherein the cooling is performed during the introducing. The method of claim 27, wherein the cooling is performed during the subsequent storage of the fluid on the storage medium. The method of claim 27, wherein the cooling is performed during the subsequent transport of the fluid on the storage medium. A method of supplying a fluid stored on a storage medium from a storage medium, the method comprising the steps of: providing the fluid to the storage medium at a cooling temperature prior to fluid dispensing, and then heating from the cooling temperature The fluid is dispensed during or after warming of the fluid to a higher ambient temperature and storage medium. The method of claim 47, wherein the step of dispensing comprises the step of dispensing fluid from the storage medium under superatmospheric pressure. The method of claim 47, wherein the step of dispensing comprises the step of dispensing fluid from the storage medium under negative pressure. The method of claim 47, wherein the dispensing is performed during warming of the fluid and storage medium from the cooling temperature to a higher ambient temperature. The method of claim 47, wherein the dispensing is performed after the fluid heated from the cooling temperature to a higher ambient temperature is warmed with the storage medium. The method of claim 47, wherein the storage medium comprises a solid phase physical adsorbent. The method of claim 52, wherein the solid phase physical adsorbent comprises a sorbent selected from the group consisting of ceria, alumina, yttrium aluminate, molecular sieves, carbon, polymers, and copolymers. The method of claim 52, wherein the solid phase physical adsorbent comprises a carbon adsorbent. The method of claim 54, wherein the carbon adsorbent is in the form of a block. The method of claim 47, wherein the storage medium comprises an ionic liquid. The method of claim 47, wherein the storing The medium includes a reversible chemical reaction storage medium. The method of claim 47, wherein the fluid stored on the storage medium comprises a fluid selected from the group consisting of a plurality of fluids useful in the manufacture of semiconductor products, flat panel displays or solar panels. The method of claim 47, wherein the fluid stored on the storage medium comprises a hydride, a halide, an organometallic compound, decane, ruthenium, phosphine, phosgene, diborane, boron trichloride, three Boron fluoride, decane, ammonia, hydrogen halide, hydrogen sulfide, hydrogen selenide, hydrogen halide, nitrous oxide, hydrogen cyanide, ethylene oxide, deuterated hydride, halogen (chlorine, bromine, Fluorine and iodine) compounds, antimony tetrafluoride, antimony tetrafluoride, chlorine, carbon monoxide, antimony, antimony difluoride, hydrogen, gas mixtures comprising one or more of the foregoing, and isotopically concentrated gases and gases comprising one or more of the foregoing The mixture constitutes a fluid selected by the cluster. The method of claim 47 is carried out in a program for manufacturing a semiconductor product, a flat panel display or a solar panel.