TW201543642A - Metal pad for laser marking - Google Patents

Abstract

A package includes a device die, a molding material molding the device die therein, and a plurality of redistribution lines overlying the device die and the molding material. A laser mark pad is coplanar with one of the plurality of redistribution lines, wherein the laser mark pad and the one of the plurality of redistribution layers are formed of the same conductive material. A polymer layer is over the laser mark pad and the plurality of redistribution lines. A tape is attached over the polymer layer. A laser mark penetrates through the tape and the polymer layer. The laser mark extends to a top surface of the laser mark pad.

Description

Metal pad for laser marking

This invention relates to metal pads for laser marking in semiconductor packaging technology.

There are many forms of packaging methods and structures in integrated circuit packages. For example, in a conventional package-on-package (POP), the top package is bonded to the bottom package. The top package and the bottom package may also have device die encapsulated therein. Increase the integration level of the package by using the PoP process.

In existing PoP processes, a bottom package is first formed that includes device dies bonded to the package substrate. On the package substrate, a molding compound is formed, wherein the device die is encapsulated in the molding compound. The package substrate further includes a solder ball formed thereon, wherein the solder ball and the device die are on the same side of the package substrate. The solder ball is used to connect the top package to the bottom package.

Some embodiments of the present disclosure provide a package comprising: a first package comprising: device die; a molding compound encapsulating the device die therein; a plurality of rewirings located at the device a die and a top portion of the molding compound; the laser marking pad is flush with one of the plurality of rewirings, wherein the laser marking is overlapped with the plurality of One of the wires is formed from the same conductive material; a polymer layer is positioned over the laser marking pad and the plurality of redistributions; an adhesive tape is positioned over the polymer layer; and a laser marking is worn The tape and the polymer layer are passed through, wherein the laser marking extends to a top surface of the laser marking pad.

Some embodiments of the disclosure of the present application provide a package including: a first package including: at least one first dielectric layer; and a first plurality of redistributions disposed on the at least one first dielectric layer a device die positioned over the first plurality of redistributions and electrically coupled to the first plurality of redistributions; a molding compound encapsulating the device die therein; a through via that passes through the die Plastic; at least one second dielectric material over the die of the device; a second plurality of redistributions disposed in the at least one second dielectric layer, wherein one of the second plurality of redistributions Electrically coupled to one of the first plurality of redistributions via the through via; a metal pad disposed in the at least one second dielectric layer, wherein the metal pad is connected to the through via; An electrical layer positioned over the at least one second dielectric layer; and a laser mark extending from a top surface of the third dielectric layer to a top surface of the metal pad; and a second package located at Above the first package To the first package.

Some embodiments of the present disclosure provide a method comprising: forming a first package comprising: at least one first dielectric layer; a first plurality of redistributions disposed at the at least one first dielectric a layer of device disposed over the first plurality of redistributions and electrically coupled to the first plurality of redistributions; a molding compound encapsulating the device die therein; a through via that passes through the a molding compound; at least one second dielectric material located above the device die; a second plurality of rewirings in the at least one second dielectric layer, wherein the second plurality of rewiring lines are The through-via is electrically coupled to the first plurality of redistributions; and a metal pad is disposed in the at least one second dielectric layer; forming a polymer layer over the at least one second dielectric layer; Above the polymer layer, attaching a tape; and performing laser marking to form a laser mark in the polymer layer and the tape Note that part of the metal pad is exposed to the laser mark.

100‧‧‧Package

102‧‧‧ device grain

104‧‧‧Integrated circuit device

106‧‧‧Metal column/metal pad

108‧‧‧Semiconductor substrate

108A‧‧‧Back surface

110‧‧‧die-attach film

112‧‧‧Rewiring (RDL)

114‧‧‧Dielectric layer

116‧‧‧RDL

116’‧‧‧RDL mat

118‧‧‧ dielectric layer

118A‧‧‧ dielectric layer

120‧‧‧Molded plastic

120A‧‧‧ bottom surface

120B‧‧‧ top surface

122‧‧‧through path

122A‧‧‧through path

124‧‧‧Electrical connection device / metal pad

126‧‧‧ solder zone

128‧‧‧Laser marker pad

130‧‧‧Seal ring

131‧‧‧Dielectric/polymer layer

132‧‧‧Laser Mark

132’‧‧‧Laser Mark

133‧‧‧ Tape

134‧‧‧Laser beam

136‧‧‧ openings

138‧‧‧ solder zone

138’‧‧‧ solder zone

140‧‧‧ Underfill

142‧‧‧Metal traces

144‧‧‧Metal traces

146‧‧‧ slot

200‧‧‧Package

202‧‧‧Package substrate

204‧‧‧ device grain

The aspects of the disclosure of the present application are best understood from the following detailed description and the accompanying drawings. Note that various features are not drawn to scale in accordance with standard implementations of the industry. In fact, the dimensions of the various features may be arbitrarily increased or decreased for clarity of discussion.

1 through 7 illustrate cross-sectional views of intermediate stages of forming a package, in accordance with some embodiments.

8 is a top plan view of a package in which a plurality of laser marker pads are isolated from each other, in accordance with some embodiments.

9 is a top plan view of a package in which a laser marker pad is attached to a through via, in accordance with some embodiments.

10 is a top plan view of a package in which the laser markings are not aligned with the individual laser marking pads of the device die in the package, in accordance with some embodiments.

Figure 11 illustrates a top view of a package in which a plurality of laser marks are formed over a laser marking pad in accordance with some embodiments.

12 is a top plan view of a package in which a large laser marker pad includes a plurality of slots, in accordance with some embodiments.

The following disclosure provides many different embodiments or examples for implementing the various features of the present application. Specific examples of components and configurations are described below to simplify the disclosure of the present application. Of course, these are merely examples and are not intended to limit the application. For example, the following description of forming an initial feature on or over a second feature may include forming first and second features of direct contact, and may also include embodiments for forming other features between the first and second features. Thus, the first and second features are not in direct contact. In addition, this application The symbol symbols and/or letters can be repeated in different examples. This repetition is for the purpose of simplicity and clarity, and is not intended to govern the relationship between the various embodiments and/or the structures discussed.

Furthermore, the present application may use spatially corresponding words, such as "lower", "lower", "lower", "higher", "higher" and the like, to describe one of the patterns. The relationship of an element or feature to another element or feature. Spatially corresponding words are used to include different orientations of the device in use or operation in addition to the orientations depicted in the drawings. The device may be positioned (rotated 90 degrees or other orientations) and the spatially corresponding description used in this application may be interpreted accordingly.

According to various embodiments, the present application provides a method of packaging and forming a laser mark in a package. Variations of the embodiments are also discussed in this application. In the different figures and embodiments, the same element symbols are used to represent the same elements.

FIG. 1 is a cross-sectional view showing the package 100. In accordance with some embodiments of the present disclosure, package 100 includes device die 102 with the front side of device die 102 facing down and bonded to a redistribution line (RDL) 112. In other embodiments, package 100 includes more than one device die. The device die 102 can include a semiconductor substrate 108, and an integrated circuit device 104 on the front surface of the semiconductor substrate 108 (eg, an active device, which can include a metal oxide semiconductor (MOS) transistor or diode) ). Device die 102 may be a logic die, such as a central processing unit (CPU) die, a graphics processing unit (GPU) die, a mobile application die, or the like. In the disclosure of the present application, the downward side of the device die 102 in FIG. 1 refers to the front side of the device die 102, and the upward facing side of the device die 102 in FIG. 1 refers to the device die 102. Back side. The rear surface 108A of the semiconductor substrate 108 is also the rear surface of the device die 102.

The device die 102 is encapsulated in a molding compound 120 that surrounds the device die 102. The molding compound 120 may be a molding compound, a molding underfill, a resin or the like. The bottom surface 120A of the molding compound 120 can be flush with the bottom end of the device die 102. The top surface 120B of the molding compound 120 may be behind the semiconductor substrate 108 Surface 108A is flush or higher than rear surface 108A of semiconductor substrate 108. In accordance with an embodiment of the present disclosure, the back surface 108A of the semiconductor substrate 108 is overlapped and in contact with a die-attach film 110, which is a dielectric film that will The device die 102 is adhered to the upper dielectric layer 118. The device die 102 further includes a metal post/pad 106 that contacts and is bonded to the RDL 112 (eg, it can include a copper post). Metal posts 106 may be embedded in a surface dielectric layer (not labeled) of device die 102.

The package 100 includes an RDL 112 located below the device die 102 and an RDL 116 located above the device die 102. Since the RDL 112 is located on the front side of the device die 102, it is also referred to as the front side RDL. Since the RDL 116 is located on the back side of the device die 102, it is also referred to as the backside RDL. The front side RDL 112 is formed in one or more dielectric layers 114, and the back side RDL 116 is formed in one or more dielectric layers 118. Although FIG. 1 illustrates a back side RDL 116 and a plurality of layers of front side RDL 112, it will be appreciated that the number of layers that may differ from the illustrated RDLs 112 and 116 may be determined as desired. RDLs 112 and 116 can be made of copper, aluminum, nickel, titanium, tantalum, alloys thereof, and/or multilayers thereof.

In accordance with some embodiments of the present disclosure, dielectric layers 114 and 118 are made of an organic material, such as a polymer, which may further comprise polybenzoxazole (PBO), benzocyclobutene (benzocyclobutene). , BCB), polyamidamine, solder mask or the like. In other embodiments, dielectric layers 114 and 118 are made of an inorganic material such as hafnium oxide, tantalum nitride, hafnium oxynitride or the like. Moreover, some of the dielectric layers 114 and 118 can be a composite layer comprising a plurality of sub-layers formed of different materials. For example, an example of a dielectric layer 114 or 118 can include a hafnium oxide layer and a tantalum nitride layer.

According to some embodiments of the disclosure of the present application, forming each layer of RDL 116 and dielectric layer 118 includes forming a blanket seed layer (not shown in the drawings) using physical vapor deposition, forming and patterning a photoresist (not shown) to cover portions of the cladding seed layer, plating RDL in the opening in the photoresist, and then removing the photoresist, and And etching the seed layer of the portion previously covered by the removed photoresist.

A through passage 122 is formed through the molding compound 120. In accordance with an embodiment of the present disclosure, the through passage 122 has a top surface that is flush with the top surface 120B of the molding compound 120, and a bottom surface that is flush with the bottom surface 120A of the molding compound 120. The front side RDL 112 is electrically connected to the back side RDL 116 through the via 122. The through passage 122 may also be in substantial contact with the front side RDL 112 and the back side RDL 116. The through via 122 can be formed by forming a patterned mask (not shown) that is open therein and electroplating the through via 122 in the opening in the patterned mask. The through via 122 can comprise copper, aluminum, titanium, nickel, palladium, or alloys thereof.

A through via 122 near the periphery of the package 100 can be formed, as shown in FIGS. 8-12, although the via 122 can also be formed at any other location of the package 100. In accordance with an embodiment of the present disclosure, the through passage 122 can be aligned with the ring that surrounds the laser marker pad 128.

At the bottom surface of the package 100, an electrical connection 124 formed of a non-solder metal material is formed. In accordance with an embodiment of the present disclosure, the electrical connection device 124 includes an under-bump metallurgy (UBM) or a metal pad. In other embodiments, the electrical connection device 124 includes a metal post, such as a copper post. In the disclosure of the present application, the electrical connection device 124 is a metal pad 124, however it may have other forms. Metal pad 124 can comprise copper, aluminum, titanium, nickel, palladium, gold, or a multilayer thereof. In accordance with some embodiments of the present disclosure, as shown in FIG. 1, the bottom surface of the metal pad 124 protrudes beyond the bottom surface of the bottom dielectric layer 114. In other embodiments, the bottom surface of the metal pad 124 is flush with the bottom surface of the bottom dielectric layer 114. Solder region 126 may be attached to the bottom surface of metal pad 124.

On the back side of the device die 102, conductive features are formed, such as RDL 116 (including metal traces, metal pads and metal vias). In accordance with some embodiments of the present disclosure, the plurality of layers of RDLs 116 are interconnected via a plurality of vias. According to other embodiments, there is a single layer of RDL 116.

Referring again to Figure 1, a metal pad 128 is formed. Herein, since the metal pad 128 is used to form a laser mark, it is called a laser mark pad. In accordance with some embodiments of the present disclosure, in the top layer of the RDL 116, a laser marking pad 128 is formed. According to other embodiments, a laser marking pad 128 is formed in the non-top layer RDL layer. The laser marker pad 128 can be electrically floating. Alternatively, the laser marker pad 128 is electrically connected to other conductive features, such as RDL 116 and/or through via 122, via metal traces 144, which is part of RDL 116. For example, the laser marker pad 128 can be grounded. In the same metal layer, the laser mark pad 128 and the RDL 116 are simultaneously formed.

In some embodiments, a seal ring 130 is formed to enclose the laser marker pad 128, wherein the illustrated seal ring 130 can be found in FIG. As shown in FIG. 1, a seal ring 130 is formed in the same metal layer as the laser mark pad 128. In accordance with some embodiments of the present disclosure, in a single layer of RDL 116, a seal ring 130 is formed. In other embodiments, the seal ring 30 extends into the RDL 116 of the plurality of layers. The seal ring 130 can be electrically floated and can be completely surrounded by a dielectric material. In other embodiments, the seal ring 130 is electrically coupled to other conductive features, such as the RDL 116 and/or the through passage 122. When the laser marking pad 128 is formed, the sealing ring 130 can be formed at the same time. Thus, the seal ring 130, the RDL 116, and the laser marker pad 128 can be made of the same material and can have the same composition. Alternatively, a seal ring surrounding the laser marker pad 128 is not formed.

According to some embodiments, the bottom surface of the laser marker pad 128 and the seal ring 130 is higher than the top surface of the die attach film 110 and the top surface of the molding compound 120. One of the dielectric layers 118 (labeled 118A in FIG. 1) is formed below the laser marking pads 128 and the sealing ring 130, and the top surface of the individual dielectric layers 118A is in contact with the bottom surface of the laser marking pad 128. The bottom surface of the dielectric layer 118A may contact the top surface of the die attach film 110 and the top surface of the molding compound 120.

As also shown in FIG. 1, a dielectric layer 131 is formed. The bottom surface of the dielectric layer 131 contacts the top surface of the dielectric layer 118. Furthermore, the bottom surface of the dielectric layer 131 also contacts the RDL 116 and The top surface of the laser marking pad 128. In accordance with some embodiments of the present disclosure, dielectric layer 131 is formed from a polymer and is therefore also referred to as polymer layer 131 in this application. It should be understood that the dielectric layer 131 may be formed of a non-polymeric material. Exemplary materials for forming polymer layer 131 include, but are not limited to, PBO, BCB, polyamidoamine, and the like.

Referring to FIG. 2, the tape 133 is laminated on the polymer layer 131, and may be adhered to the polymer layer 131 via heat hardening. Tape 133 provides protection and strengthens the underlying package structure. The tape 133 also blocks light from penetrating into the underlying package structure, reducing its counter-effect. The tape 133 also assists in reducing chipping during subsequent cutting processes of the package. According to some embodiments, the tape 133 and the polymer layer 131 may be formed of different materials.

Referring to FIG. 3, a laser marking is performed to form a laser mark 132 in the tape 133 and the dielectric layer 131, wherein the laser mark 132 includes a trench formed in the tape 133 and the dielectric layer 131. The laser beam 134 is used to perform laser marking, which burns and removes portions of the tape 133 from the dielectric layer 131. In accordance with some embodiments of the present disclosure, the portion of tape 133 that is burned with dielectric layer 131 overlaps with laser marking pad 128. The laser marking pad 128 acts as a protective layer in which the laser beam 134 cannot penetrate the laser marking pad 128 to break the layers and devices beneath the laser marking pad 128. Thus, the laser marker pad 128 has the function of preventing the laser beam 134 from reaching the underlying device die 102 and the underlying RDL 116.

Laser marker 132 can contain letters, numbers, graphics, or any other symbol that can be used for identification. For example, Figure 8 illustrates some exemplary laser markers 134 that contain letters and numbers. The laser marker 132 can be used to identify the product, the process sequence, the batch number of the individual package, or any other information used to track individual packages. After the laser marking, portions of the laser marking pad 128 are exposed via the channels forming the laser markings 132.

4 illustrates the removal of tape 133 from portions of dielectric layer 131 to expose metal pad 116', which may be part of RDL 116. Therefore, an opening 136 is formed in the dielectric layer 131 and the tape 133. According to some embodiments, the formation of the opening 136 is achieved via the use of a laser beam to burn the tape 133 with the dielectric layer 118. According to other embodiments, the formation is performed via a photolithography process Opening 136, wherein tape 133 and dielectric layer 131 are etched. In the resulting construction, the opening 136 and the bottom surface of the laser marker 132 can be substantially flush, i.e., in the same plane as the top surface of the laser marker pad 128 and the RDL pad 116'.

FIG. 5 illustrates the formation of solder region 138. In accordance with some embodiments of the present disclosure, a ball placement step is performed to drop the solder balls in openings 136 (FIG. 3), followed by a reflow process to reflow the solder balls to form solder regions 138. . Solder region 138 includes portions that contact the top surface of RDL pad 116' and may also include portions outside of opening 136. In other embodiments, the solder zone forming step is skipped. Rather, as shown in FIG. 6, solder for forming solder regions 138' (FIG. 6) is provided by solder regions attached to package component 200.

FIG. 6 illustrates the bonding of package 200 to package 100. In accordance with some embodiments of the present disclosure, package 200 includes package substrate 202 and device die 204 that are bonded to package substrate 202. Bonding of the device die 204 to the package substrate 202 can be achieved via wire bonding, flip-chip bonding, or the like. In accordance with some embodiments, device die 204 includes memory die, such as static random access memory (SRAM) die, dynamic random access memory (DRAM) die, or the like.

In the bonding process, the solder region 138 shown in Fig. 5 is reflowed to form the solder region 138' shown in Fig. 6. After the bonding process, there is a gap between the package 200 and the package 100, and the laser mark 132 is exposed to the gap.

Referring to FIG. 7, in accordance with some embodiments of the present disclosure, after the bonding of the package 200, an underfill 140 is filled into the gap between the package 100 and the package 200. In these embodiments, the channels of the laser marker 132 are also filled with a primer fill 140 (Fig. 4). Accordingly, the portion of the primer fill 140 in the channel of the laser marker 132 is also referred to as the laser marker 132'. The laser marker 132' can extend from the top surface of the tape 133 to the top surface of the laser marker pad 128. Further, the laser marker 132' can be in substantial contact with the top surface of the laser marker pad 128. In other embodiments, the gap between the packages 100 and 200 is not filled with a fill Charge, so in the final package (eg, when using and driving the package), the laser marker 132 retains the channel (see Figure 6). In these embodiments, portions of the laser marker pad 128 may be exposed to air via the laser marker 132.

In the package shown in FIG. 7, the laser marker pad 128 can be completely surrounded by and in contact with a dielectric material comprising dielectric layers 118 and 131 and a primer fill 140.

FIG. 8 illustrates a top view of package 100 in accordance with some embodiments. As shown in FIG. 8, the laser marker 132 can overlap the laser marker pad 128, with all of the laser marker 132 being formed on the laser marker pad 128. In accordance with some embodiments of the present disclosure, a seal ring 130 is formed that forms a ring that surrounds the laser marker pad 128. In some embodiments, there are a plurality of separate laser marking pads 128 that are substantially separated from one another. According to some embodiments, the separate laser marking pads 128 may also be electrically isolated from one another. The size of the laser marker pad 128 is selected in accordance with the dimensions of the package 100 and the desired dimensions of the laser marker 132. For example, the length "a" and width "b" of the laser marking pad may range from about 1 mm to about 5 mm, and the spacing "S" between adjacent laser marking pads 128 may be greater than about 500 [mu]m. However, it is to be understood that the values described in this application are merely examples and may vary to different values.

According to some embodiments, as shown in connection with Figures 7 and 8, the various portions of the separated laser pad 128 are completely surrounded by a dielectric material, in these embodiments, the surface of the separate laser marking pad 128 is not Conductive material contact. For example, the bottom surface and sidewall surfaces of the separated laser marker pads 128 are in contact with the dielectric layer, as shown in FIG. The top surface of the separated laser marking pad 128 is in contact with the polymer layer 131. Moreover, portions of the top surface of the separated laser marker pad 128 are in contact with the primer fill 140 as shown in the embodiment of FIG. 7, or are in contact with air as shown in the embodiment of FIG.

During the laser marking process, heat is generated and causes the dielectric layer near the laser marking pad 128 to burn, causing deformation of the dielectric layer 118 and the RDL 116 and other reliability issues. Accordingly, it is desirable to quickly dissipate the heat generated in the laser marker pad 128 to other areas and features. The temperature of the laser marker pad 128 is thus limited below the combustion/deformation temperatures of the layers 118, 131 and 133. In some embodiments, the seal ring 130 can dissipate heat. In order to improve heat dissipation efficiency, the seal ring 130 may have a larger width W1, for example, greater than 20 μm, to provide low heat resistance, and thus the overheated portion of the seal ring 130 may be quickly dissipated to other portions of the seal ring 130. In other embodiments, the seal ring 130 is not formed.

Moreover, to improve heat dissipation efficiency, some or all of the laser marker pads 128 are interconnected via metal traces 142, as in the embodiment shown in FIG. Accordingly, when the laser marking is performed to form the laser mark 132 over one of the laser marking pads 128, heat can be dissipated to the adjacent laser marking pad 128. According to some embodiments, the width W2 of the metal traces 142 is greater than about 20 [mu]m or about 40 [mu]m or greater to provide better heat dissipation. The width W2 is less than the width b of the laser marking pad 128.

In addition to metal traces 142, other metal traces 144 may be formed to further dissipate heat to nearby features. For example, as shown in FIG. 9, metal traces 144 connect metal pads 128 to some through vias 122 (labeled 122A), such that in the laser marking process, through vias 122A act as heat sinks to assist in lowering The temperature of the laser marking pad 128. The illustrated metal traces 144 can also be found in Figure 7, which illustrates one of the laser marker pads 128 being coupled to the through via 122A. According to some embodiments, the through passage 122A is grounded. In other embodiments, the through-passage 122A is a signal path that carries a low-varying signal (having a low frequency, such as less than about 1 MHz or 1 kHz).

In FIGS. 8 and 9, the laser marker pad 128 and the laser marker 132 are formed directly over the device die 102 and overlap the device die 102. In other embodiments, as shown in FIG. 10, which also illustrates a top view of package 100, laser marking pad 128 and laser marking 132 are not aligned with device die 102. In these embodiments, the heat dissipated from the laser marker pad 128 is less likely to adversely affect the device die 102 due to the increased distance between the laser marker pad 128 and the device die 102.

11 and 12 illustrate a top view of package 100, in which Ray The shot marker pad 128 is a large laser marker pad that occupies a major area of the package 100, wherein the laser marker pad 128 can have a plurality of laser markers 132 formed thereon. As shown in FIG. 11, in these embodiments, the large laser marking pad 128 can be a solid metal pad. In the embodiment shown in FIG. 12, again a single laser marker pad 128 and a plurality of slots 146 formed in the laser marker pad 128. The slot 146 extends through the laser marking pad 128. The plurality of slots 146 help to reduce stress in the package 100, which is due to the difference between the coefficient of thermal expansion (CTE) of the laser marker pad 128 and the surrounding dielectrics 118, 131, and 140. In the embodiment of Figures 11 and 12, since the area of the laser marking pad 128 is large, it is an advantageous feature of good thermal dissipation in the laser marking.

The area of the laser marker pad 128 and the slot 146 can be adjusted such that the metal density of the metal layer of the laser marker pad 128 is not too high. The metal density is the ratio of the total area of all metal features (including RDL 116 and laser marking pad 128) divided by the area of package 100. In some embodiments, the metal density is controlled to be less than about 50 percent.

Embodiments of the disclosure of the present application have several advantageous features. The laser marking pad controls the depth of the laser marking by forming a laser marking pad. Protect the device die and rewiring in the package from damage that may be caused by laser marking. Embodiments of the disclosure of the present application do not incur additional manufacturing costs since the laser marking pads and rewiring can be formed simultaneously.

In accordance with some embodiments of the present disclosure, a package includes a device die, a molding compound in which the device die is packaged, and a plurality of redistributions over the device die and the molding compound. The laser marking pad is flush with one of the plurality of rewirings, wherein the laser marking pad and one of the plurality of rewirings are formed from the same conductive material. Adhesive tape is attached over the polymer layer. The laser is passed through the tape and the polymer layer. The laser marking extends to the top surface of the laser marking pad.

In accordance with other embodiments of the present disclosure, a package includes a first package including at least one first dielectric layer, a first plurality of redistributions in the at least one dielectric layer, a device die located above the first plurality of redistributions and electrically coupled to the first plurality of rewirings, a molding compound in which the device die is encapsulated, a through via through the molding compound, and a crystal in the device At least one second dielectric layer over the particles, and a second plurality of redistributions in the at least one second dielectric layer. One of the second plurality of redistributions is electrically coupled to one of the first plurality of redistributions via the through via. The package further includes a metal pad in the at least one second dielectric layer, wherein the metal pad is connected to the through via, a third dielectric layer over the at least one second dielectric layer, from the third A top surface of the dielectric layer extends to a laser mark on a top surface of the metal pad, and a second package over the first package and bonded to the first package.

In accordance with other embodiments of the present disclosure, a method includes forming a package including at least a first dielectric layer, a first plurality of redistributions in the at least one first dielectric layer, and the first plurality of a device die over the redistribution and electrically coupled to the first plurality of redistributed devices, a molding compound encapsulating the device die therein, a through via through the molding compound, and at least one portion above the die of the device a second dielectric layer, and a second plurality of rewirings in the at least one second dielectric layer, wherein the second plurality of rewirings are electrically coupled to the first plurality of rewirings via the through vias, and a metal pad in the at least one second dielectric layer. A polymer layer is formed over the at least one second dielectric layer, and an adhesive tape is attached over the polymer layer. The method further includes performing a laser marking to form a laser mark in the polymer layer and the tape, a portion of the metal pad being exposed to the laser mark.

The foregoing is a summary of the features of the embodiments, and those skilled in the art can understand the various aspects of the disclosure. Those skilled in the art will appreciate that the disclosure of the present application can be readily utilized as a basis for designing or modifying other processes and structures to achieve the same objectives and/or the same advantages as the embodiments described herein. It should be understood by those skilled in the art that the present invention is not limited by the spirit and scope of the present disclosure, and that various changes, substitutions and substitutions can be made by those skilled in the art without departing from the spirit of the disclosure. range.

100‧‧‧Package

102‧‧‧ device grain

122‧‧‧through path

128‧‧‧Laser marker pad

130‧‧‧Seal ring

132‧‧‧Laser Mark

Claims (10)

A package comprising: a first package comprising: device die; a molding compound encapsulating the device die therein; a plurality of rewirings located over the device die and the molding compound; a laser marking a pad, which is flush with one of the plurality of redistributions, wherein the laser mark and one of the plurality of redistributions are formed of the same conductive material; the polymer layer is located on the laser mark pad and Above the plurality of rewirings; a tape over the polymer layer; and a laser marking through the tape and the polymer layer, wherein the laser marking extends to a top surface of the laser marking pad. The package of claim 1, further comprising: a through via that passes through the molding compound; and a metal trace that connects the laser marking pad to the through via. The package of claim 2, wherein the through via is grounded. The package of claim 1, wherein the laser mark comprises a channel formed in the polymer layer and the tape, and the package further comprises: a second package located above the first package; a solder region, Bonding the first package to the second package; and underfill in a gap between the first package and the second package, wherein a portion of the polymer layer and the channel in the tape Primer filling system Into the laser mark. The package of claim 1 further comprising: other laser marking pads; other laser markings that pass through the tape and the polymer layer, wherein the other laser markings extend to the other laser a top surface of the marking pad; and a metal trace interconnected with the laser marking pad and the other laser marking pad, wherein the metal trace is narrower than the laser marking pad and the other laser marking . The package of claim 1, wherein the laser marking pad comprises a plurality of slots therein, the plurality of slots passing through the laser marking pad. A method comprising: forming a first package comprising: at least one first dielectric layer; a first plurality of redistributions disposed in the at least one first dielectric layer; a device die located at the a first plurality of rewirings and electrically coupled to the first plurality of rewirings; a molding compound encapsulating the device die therein; a through passage through which the molding compound; at least a second dielectric material, Located above the device die; a second plurality of redistributions disposed in the at least one second dielectric layer, wherein the second plurality of rewirings are electrically coupled to the first plurality of weights via the through via a wiring; and a metal pad in the at least one second dielectric layer; forming a polymer layer over the at least one second dielectric layer; attaching a tape over the polymer layer; and performing laser Marking to form a laser mark in the polymer layer and the tape, A portion of the metal pad is exposed to the laser marking. The method of claim 7, further comprising: forming an opening in the polymer layer and the tape to expose a plurality of metal pads; and forming a solder region extending into the opening to form the plurality of metal pads Combine. The method of claim 7, further comprising: bonding the second package to the first package; and filling a gap between the first package and the second package, wherein the underfill is filled It is located in the laser marker. The method of claim 7 wherein the metal pad blocks a laser beam for use in the laser marking.