TW201530256A - Photosensitive resin composition, dry film, cured product and printed wiring board - Google Patents

Photosensitive resin composition, dry film, cured product and printed wiring board Download PDF

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TW201530256A
TW201530256A TW103141385A TW103141385A TW201530256A TW 201530256 A TW201530256 A TW 201530256A TW 103141385 A TW103141385 A TW 103141385A TW 103141385 A TW103141385 A TW 103141385A TW 201530256 A TW201530256 A TW 201530256A
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epoxy
resin
carboxyl group
epoxy resin
photosensitive resin
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TW103141385A
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TWI566035B (en
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Eiji Harima
Tsuyoshi Mitani
Shinobu Kondo
Shinichiroh Fukuda
Kenji Kato
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Taiyo Ink Mfg Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/0275Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with dithiol or polysulfide compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)

Abstract

The present invention is to provide a technology to suppress generation of development residue in cavity portions of through holes in a solder photoresist composition containing titanium oxide. The present invention relates to a photosensitive resin composition containing (A) a resin containing carboxyl, (B) an epoxy-based thermosetting composition, (C) an inorganic filler, and (D) an photo-polymerization initiator. In relative to one equivalent of carboxyl contained in (A) resin containing carboxyl, the equivalent of epoxy contained in (B) epoxy-based thermosetting composition is less than 1.0, and (C) inorganic filler contains titanium oxide. The present invention further relates to a dry film and a cured product using the same.

Description

感光性樹脂組成物、乾膜、硬化物及印刷配線板 Photosensitive resin composition, dry film, cured product, and printed wiring board

本發明係關於感光性樹脂組成物(以下、亦僅稱「組成物」)、乾膜、硬化物及印刷配線板,詳細係關於光聚合起始劑改良之鹼顯影型感光性樹脂組成物、乾膜、硬化物及印刷配線板。 The present invention relates to a photosensitive resin composition (hereinafter, simply referred to as "composition"), a dry film, a cured product, and a printed wiring board, and is a composition of an alkali-developable photosensitive resin which is improved by a photopolymerization initiator. Dry film, hardened material and printed wiring board.

一般印刷配線板為將貼合於層合板的銅箔之不要部分以蝕刻除去而形成電路配線者,電子零件以焊接配置於指定的場所。在如此之印刷配線板中,作為用以防止焊料附著至必要部分同時防止電路之導體露出而因氧化或溼氣而被腐蝕之保護膜,在形成有電路圖型的基板上之接續孔外區域形成焊料光阻。焊料光阻亦有作為電路基板之永久保護膜的機能,故焊料光阻要求具備密著性、電絕緣性、焊料耐熱性、耐溶劑性、耐藥品性等之種種之性能。 In general, a printed wiring board is a circuit wiring in which an unnecessary portion of a copper foil bonded to a laminate is removed by etching, and the electronic component is placed in a designated place by soldering. In such a printed wiring board, a protective film which is etched by oxidation or moisture to prevent solder from adhering to a necessary portion while preventing exposure of a conductor of the circuit is formed in a region outside the splicing hole on the substrate on which the circuit pattern is formed. Solder photoresist. Solder photoresist also functions as a permanent protective film for a circuit board. Therefore, solder photoresist is required to have various properties such as adhesion, electrical insulation, solder heat resistance, solvent resistance, and chemical resistance.

作為於基板上形成期望圖型之焊料光阻的方法之一,可使用利用光微影技術的形成方法。例如將由鹼顯影型之感光性樹脂組成物所構成的感光性焊料光阻透過 圖型遮罩進行曝光後,藉由鹼顯影,利用曝光部與非曝光部產生的對鹼顯影液之溶解性差異而可形成圖型。 As one of the methods of forming a solder resist of a desired pattern on a substrate, a formation method using photolithography can be used. For example, a photosensitive solder resist composed of an alkali developing type photosensitive resin composition is transmitted through After exposure by the pattern mask, the pattern can be formed by alkali development using the difference in solubility to the alkali developer produced by the exposed portion and the non-exposed portion.

例如專利文獻1,揭示以提供含有白色顏料,同時可形成抑制曝光所需光量且具有高光反射性之焊料光阻層的焊料光阻組成物為目的,搭配有感光性樹脂、白色顏料、以波長400nm以上之光進行活性化之光聚合起始劑、及螢光染料的焊料光阻組成物。 For example, Patent Document 1 discloses a solder resist composition which provides a solder resist layer containing a white pigment and which can suppress the amount of light required for exposure and has high light reflectivity, and is provided with a photosensitive resin, a white pigment, and a wavelength. A photopolymerization initiator which activates light of 400 nm or more and a solder resist composition of a fluorescent dye.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]特開2011-227343號公報(申請專利範圍等) [Patent Document 1] JP-A-2011-227343 (Application for Patent, etc.)

[發明之概要] [Summary of the Invention]

然而,焊料光阻組成物中,為使組成物著色為白色,有含大量氧化鈦之情形。但是含大量氧化鈦之組成物因流動度低,而有一旦進入貫穿孔等之穴部則難以除去、殘留顯影殘渣之問題。 However, in the solder resist composition, in order to color the composition to white, a large amount of titanium oxide is contained. However, since the composition containing a large amount of titanium oxide has a low fluidity, it is difficult to remove and leave a development residue when it enters a hole portion such as a through hole.

本發明之目的在於提供於含有氧化鈦之焊料光阻組成物中,可抑制貫穿孔等之穴部中的顯影殘渣產生的技術。 An object of the present invention is to provide a technique for suppressing generation of development residue in a hole portion such as a through hole in a solder resist composition containing titanium oxide.

本發明者們努力檢討結果,發現相對於組成物中所含之羧基之1當量,藉由使組成物中所含之環氧基之當量在1.0以下,即使含大量氧化鈦之場合,仍可抑制貫穿孔等中的顯影殘渣產生,而完成本發明。 As a result of reviewing the results, the inventors of the present invention found that the equivalent of the epoxy group contained in the composition is 1.0 or less, even when a large amount of titanium oxide is contained, with respect to 1 equivalent of the carboxyl group contained in the composition. The present invention has been completed by suppressing generation of development residue in a through hole or the like.

即本發明之感光性樹脂組成物,為含有(A)含羧基之樹脂、(B)環氧系熱硬化性成分、(C)無機充填物、及(D)光聚合起始劑之感光性樹脂組成物,其特徵為相對前述(A)含羧基之樹脂所含之羧基之1當量,前述(B)環氧基系熱硬化性成分所含之環氧基之當量為1.0以下,且前述(C)無機充填物含有氧化鈦。 In other words, the photosensitive resin composition of the present invention is photosensitive containing (A) a carboxyl group-containing resin, (B) an epoxy thermosetting component, (C) an inorganic filler, and (D) a photopolymerization initiator. The resin composition is characterized by having 1 equivalent of the carboxyl group contained in the (A) carboxyl group-containing resin, and the equivalent of the epoxy group contained in the (B) epoxy group-based thermosetting component is 1.0 or less. (C) The inorganic filler contains titanium oxide.

本發明之組成物中,前述(B)環氧基系熱硬化性成分以含有在20℃為液狀的環氧樹脂及在40℃為固體狀的固形環氧樹脂中至少一種以上為佳。又,本發明之組成物中,前述(A)含羧基之樹脂所含之羧基之當量與前述(B)環氧基系熱硬化性成分所含之環氧基之當量之比,宜為0.8以下。進一步,本發明之組成物中,前述(A)含羧基之樹脂以由苯乙烯或苯乙烯衍生物所衍生者為佳。 In the composition of the present invention, the (B) epoxy group-based thermosetting component is preferably at least one selected from the group consisting of an epoxy resin which is liquid at 20 ° C and a solid epoxy resin which is solid at 40 ° C. Further, in the composition of the present invention, the ratio of the equivalent of the carboxyl group contained in the (A) carboxyl group-containing resin to the equivalent of the epoxy group contained in the (B) epoxy group-based thermosetting component is preferably 0.8. the following. Further, in the composition of the present invention, the (A) carboxyl group-containing resin is preferably derived from styrene or a styrene derivative.

又,本發明之乾膜之特徵為在載體薄膜上具有將上述本發明之感光性樹脂組成物塗佈、乾燥而得到的樹脂層。 Moreover, the dry film of the present invention is characterized in that it has a resin layer obtained by applying and drying the photosensitive resin composition of the present invention on a carrier film.

進一步,本發明之硬化物之特徵為將上述本發明之感光性樹脂組成物、或上述本發明之乾膜的前述樹 脂層以光照射進行硬化而得到。 Further, the cured product of the present invention is characterized by the aforementioned tree of the photosensitive resin composition of the present invention or the dry film of the present invention described above. The lipid layer is obtained by hardening by light irradiation.

又,本發明之印刷配線板之特徵為具有上述本發明之硬化物。 Moreover, the printed wiring board of the present invention is characterized by having the above-described cured product of the present invention.

根據本發明,可實現在含有氧化鈦之焊料光阻組成物中,可抑制貫穿孔等之穴部中的顯影殘渣產生的技術。 According to the present invention, it is possible to realize a technique for suppressing generation of development residue in a hole portion such as a through hole in a solder resist composition containing titanium oxide.

30a‧‧‧液狀判定用試驗管 30a‧‧‧Test tube for liquid determination

33a‧‧‧橡膠栓 33a‧‧‧Rubber bolt

33b‧‧‧橡膠栓 33b‧‧‧Rubber bolt

34‧‧‧溫度計 34‧‧‧ thermometer

31‧‧‧標線 31‧‧‧ marking

32‧‧‧標線 32‧‧‧ marking

30b‧‧‧溫度測定用試驗管 30b‧‧‧Test tube for temperature measurement

[圖1]表示環氧樹脂的液狀判定所使用的2枝試驗管之概略側面圖。 Fig. 1 is a schematic side view showing two test tubes used for liquid state determination of an epoxy resin.

[實施發明之最佳形態] [Best Mode for Carrying Out the Invention]

以下將本發明之實施形態詳細說明。 Embodiments of the present invention will be described in detail below.

首先,說明本發明之感光性樹脂組成物的各成分。又,本說明書中,(甲基)丙烯酸酯為總稱丙烯酸酯、甲基丙烯酸酯及彼等之混合物之用語,而其他類似表現亦相同。 First, each component of the photosensitive resin composition of the present invention will be described. Further, in the present specification, (meth) acrylate is a term generally referred to as acrylate, methacrylate, and a mixture thereof, and other similar expressions are also the same.

[(A)含羧基之樹脂] [(A) carboxyl group-containing resin]

本發明之感光性樹脂組成物含有(A)含羧基之樹 脂。作為(A)含羧基之樹脂,可使用含習知羧基之樹脂。因羧基之存在,可使組成物為鹼顯影性。又,由將本發明之組成物作成光硬化性或耐顯影性的觀點,除羧基外,以分子內具有乙烯性不飽和鍵為佳,但亦可僅使用不具有乙烯性不飽和雙鍵的含羧基之樹脂。(A)含羧基之樹脂可具有或不具有芳香環。(A)含羧基之樹脂具有芳香環之場合,可得到抑制因熱或光所致之劣化的效果而佳。 The photosensitive resin composition of the present invention contains (A) a carboxyl group-containing tree fat. As the (A) carboxyl group-containing resin, a resin containing a conventional carboxyl group can be used. The composition can be made alkali-developable due to the presence of a carboxyl group. Further, from the viewpoint of the photocurability or the development resistance of the composition of the present invention, it is preferable to have an ethylenically unsaturated bond in the molecule in addition to the carboxyl group, but it is also possible to use only an ethylenically unsaturated double bond. A resin containing a carboxyl group. (A) The carboxyl group-containing resin may or may not have an aromatic ring. (A) When the carboxyl group-containing resin has an aromatic ring, it is preferable to suppress the effect of deterioration due to heat or light.

本發明之組成物可使用的含羧基之樹脂之具體例,可舉例如以下列舉的化合物(寡聚物及聚合物皆可)。 Specific examples of the carboxyl group-containing resin which can be used in the composition of the present invention include, for example, the following compounds (oligomers and polymers).

(1)(甲基)丙烯酸等之不飽和羧酸與苯乙烯、α-甲基苯乙烯、低級烷基(甲基)丙烯酸酯、異丁烯等之含不飽和基化合物之共聚合所得到的含羧基之樹脂。該含羧基之樹脂具有芳香環之場合,不飽和羧酸及含不飽和基化合物的至少1種具有芳香環即可。 (1) A copolymer obtained by copolymerization of an unsaturated carboxylic acid such as (meth)acrylic acid with an unsaturated group-containing compound such as styrene, α-methylstyrene, lower alkyl (meth) acrylate or isobutylene Carboxyl resin. When the carboxyl group-containing resin has an aromatic ring, at least one of the unsaturated carboxylic acid and the unsaturated group-containing compound may have an aromatic ring.

(2)脂肪族二異氰酸酯、分枝脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯與二羥甲基丙酸、二羥甲基丁烷酸等之含羧基二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成體二醇、具有酚性羥基及醇性羥基的化合物等之二醇化合物的聚加成反應之含羧基之胺基甲酸乙酯樹脂。該含羧基之胺基甲酸乙酯樹脂具有芳香環之場合,二異氰酸 酯、含羧基二醇化合物及二醇化合物的至少1種具有芳香環即可。 (2) a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate or an aromatic diisocyanate, and a carboxyl group-containing diol such as dimethylolpropionic acid or dimethylolbutanoic acid a compound, a polycarbonate-based polyol, a polyether-based polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide addition diol, and a phenolic hydroxyl group; A carboxyl group-containing urethane resin obtained by polyaddition reaction of a diol compound such as an alcoholic hydroxyl group compound. Where the carboxyl group-containing urethane resin has an aromatic ring, diisocyanate At least one of the ester, the carboxyl group-containing diol compound, and the diol compound may have an aromatic ring.

(3)脂肪族二異氰酸酯、分枝脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯化合物與聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成體二醇、具有酚性羥基及醇性羥基的化合物等之二醇化合物的聚加成反應之胺基甲酸乙酯樹脂的末端,與酸酐反應而成的含末端羧基之胺基甲酸乙酯樹脂。該含羧基之胺基甲酸乙酯樹脂具有芳香環之場合,二異氰酸酯化合物、二醇化合物及酸酐的至少1種具有芳香環即可。 (3) a diisocyanate compound such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate or an aromatic diisocyanate, and a polycarbonate polyol, a polyether polyol, a polyester polyol, A metal urethane having a polyaddition reaction of a diol compound such as a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, or a compound having a phenolic hydroxyl group or an alcoholic hydroxyl group A terminal carboxyl group-containing urethane resin obtained by reacting an acid anhydride with an acid anhydride. When the carboxyl group-containing urethane resin has an aromatic ring, at least one of the diisocyanate compound, the diol compound and the acid anhydride may have an aromatic ring.

(4)二異氰酸酯、與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等之2官能環氧樹脂的(甲基)丙烯酸酯或者其部分酸酐改性物、含羧基二醇化合物及二醇化合物的聚加成反應之含感光性羧基之胺基甲酸乙酯樹脂。該含感光性羧基之胺基甲酸乙酯樹脂具有芳香環之場合,二異氰酸酯、2官能環氧樹脂的(甲基)丙烯酸酯或者其部分酸酐改性物、含羧基二醇化合物及二醇化合物的至少1種具有芳香環即可。 (4) Diisocyanate, bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bisphenol phenol epoxy resin, (meth)acrylate of a bifunctional epoxy resin such as a phenol type epoxy resin or a partial acid anhydride modified product thereof, a carboxyl group-containing diol compound, and a diol compound having a photosensitive carboxyl group-containing aminocarboxylic acid Ethyl resin. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, a diisocyanate, a bifunctional epoxy resin (meth) acrylate or a partial acid anhydride modified product thereof, a carboxyl group-containing diol compound, and a diol compound At least one of them has an aromatic ring.

(5)上述(2)或(4)之樹脂的合成中,加入羥基烷基(甲基)丙烯酸酯等之分子中具有1個羥基與1個以上之(甲基)丙烯醯基的化合物,末端(甲基)丙烯酸化的含羧基之胺基甲酸乙酯樹脂。該含感光性羧基之 胺基甲酸乙酯樹脂具有芳香環之場合,分子中具有1個羥基與1個以上之(甲基)丙烯醯基的化合物可具有芳香環。 (5) In the synthesis of the resin of the above (2) or (4), a compound having one hydroxyl group and one or more (meth)acryl fluorenyl groups in a molecule such as a hydroxyalkyl (meth) acrylate is added. A terminal (meth)acrylated carboxyl group-containing urethane resin. Photosensitive carboxyl group When the urethane resin has an aromatic ring, the compound having one hydroxyl group and one or more (meth) acryl fluorenyl groups in the molecule may have an aromatic ring.

(6)上述(2)或(4)之樹脂的合成中,加入異佛爾酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等、分子中具有1個異氰酸酯基與1個以上之(甲基)丙烯醯基之化合物,末端(甲基)丙烯酸化的含羧基之胺基甲酸乙酯樹脂。該含感光性羧基之胺基甲酸乙酯樹脂具有芳香環之場合,分子中具有1個異氰酸酯基與1個以上之(甲基)丙烯醯基之化合物可具有芳香環。 (6) In the synthesis of the resin of the above (2) or (4), a molar reaction product such as isophorone diisocyanate and pentaerythritol triacrylate is added, and one isocyanate group and one or more molecules are contained in the molecule ( A methyl (meth) acrylate group-based compound, a terminal (meth) acrylated carboxyl group-containing urethane resin. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one isocyanate group and one or more (meth) acrylonitrile groups in the molecule may have an aromatic ring.

(7)多官能環氧樹脂與(甲基)丙烯酸反應而於側鏈存在的羥基加成上無水苯二甲酸、四氫無水苯二甲酸、六氫無水苯二甲酸等之2元酸酐的含感光性羧基之樹脂。該含感光性羧基之樹脂具有芳香環之場合,多官能環氧樹脂及2元酸酐的至少1種具有芳香環即可。 (7) The addition of a polyfunctional epoxy resin to (meth)acrylic acid to form a hydroxyl group in the side chain, and the addition of a dibasic acid anhydride such as anhydrous phthalic acid, tetrahydroanhydrophthalic acid or hexahydroanhydrophthalic acid Photosensitive carboxyl resin. When the photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the polyfunctional epoxy resin and the dibasic acid anhydride may have an aromatic ring.

(8)將2官能環氧樹脂的羥基進而以表氯醇環氧化的多官能環氧樹脂,與(甲基)丙烯酸反應,於生成的羥基加成上2元酸酐的含感光性羧基之樹脂。該含感光性羧基之樹脂具有芳香環之場合,2官能環氧樹脂及2元酸酐的至少1種具有芳香環即可。 (8) A photosensitive resin-containing resin obtained by reacting a hydroxyl group of a bifunctional epoxy resin with a polyfunctional epoxy resin epoxidized with epichlorohydrin and (meth)acrylic acid to form a dibasic acid anhydride in the resulting hydroxyl group. . When the photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the bifunctional epoxy resin and the dibasic acid anhydride may have an aromatic ring.

(9)多官能氧雜環丁烷樹脂與二羧酸進行反應,於生成的1級羥基加成上2元酸酐的含羧基聚酯樹脂。該含感光性羧基之聚酯樹脂具有芳香環之場合,多官能氧雜環丁烷樹脂、二羧酸及2元酸酐的至少1種具有芳 香環即可。 (9) A polyfunctional oxetane resin is reacted with a dicarboxylic acid to form a carboxyl group-containing polyester resin of a dibasic acid anhydride in the resulting first-stage hydroxyl group. When the photosensitive carboxyl group-containing polyester resin has an aromatic ring, at least one of the polyfunctional oxetane resin, the dicarboxylic acid, and the dibasic acid anhydride has an aromatic group. Aroma ring can be.

(10)1分子中具有複數酚性羥基之化合物與環氧乙烷、環氧丙烷等之環氧烷反應而得到的反應生成物,與含不飽和基單羧酸進行反應,使得到的反應生成物與多元酸酐反應而得到的含羧基之感光性樹脂。 (10) a reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide or propylene oxide, and reacting with an unsaturated group-containing monocarboxylic acid to cause a reaction A carboxyl group-containing photosensitive resin obtained by reacting a product with a polybasic acid anhydride.

(11)1分子中具有複數酚性羥基之化合物與乙烯碳酸酯、丙烯碳酸酯等之環狀碳酸酯化合物反應而得到的反應生成物,與含不飽和基單羧酸進行反應,使得到的反應生成物與多元酸酐反應而得到的含羧基之感光性樹脂。 (11) a reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a cyclic carbonate compound such as ethylene carbonate or propylene carbonate, and reacting with an unsaturated group-containing monocarboxylic acid to obtain A carboxyl group-containing photosensitive resin obtained by reacting a reaction product with a polybasic acid anhydride.

(12)1分子中具有複數環氧基之環氧化合物、與p-羥基苯乙基醇等之1分子中具有至少1個醇性羥基與1個酚性羥基之化合物、與(甲基)丙烯酸等之含不飽和基單羧酸進行反應,得到的反應生成物的醇性羥基,與無水馬來酸、四氫無水苯二甲酸、無水偏苯三甲酸酸、無水均苯四甲酸、己二酸等之多元酸酐進行反應得到的含羧基之感光性樹脂。該含感光性羧基之聚酯樹脂具有芳香環之場合,環氧化合物、1分子中具有至少1個醇性羥基與1個酚性羥基之化合物、含不飽和基單羧酸及多元酸酐之至少1種具有芳香環即可。 (12) an epoxy compound having a plurality of epoxy groups in one molecule, and a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule such as p-hydroxyphenylethyl alcohol, and (meth) An unsaturated hydroxyl group-containing monocarboxylic acid such as acrylic acid is reacted to obtain an alcoholic hydroxyl group of the reaction product, and anhydrous maleic acid, tetrahydro anhydrous phthalic acid, anhydrous trimellitic acid, anhydrous pyromellitic acid, and A carboxyl group-containing photosensitive resin obtained by reacting a polybasic acid anhydride such as a diacid. When the photosensitive carboxyl group-containing polyester resin has an aromatic ring, the epoxy compound, at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule, and at least one unsaturated group-containing monocarboxylic acid and polybasic acid anhydride One type has an aromatic ring.

(13)上述(1)~(12)之任一樹脂進而加成上縮水甘油基(甲基)丙烯酸酯、α-甲基縮水甘油基(甲基)丙烯酸酯等之分子中具有1個環氧基與1個以上之(甲基)丙烯醯基之化合物而成的含感光性羧基之樹 脂。該含感光性羧基之胺基甲酸乙酯樹脂具有芳香環之場合,分子中具有1個環氧基與1個以上之(甲基)丙烯醯基之化合物可具有芳香環。 (13) The resin of any one of the above (1) to (12) further has a ring of a molecule such as glycidyl (meth) acrylate or α-methyl glycidyl (meth) acrylate. Photosensitive carboxyl-containing tree composed of an oxy group and one or more (meth) acrylonitrile-based compounds fat. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one epoxy group and one or more (meth) acryl fluorenyl groups in the molecule may have an aromatic ring.

上述般含羧基之樹脂因骨幹.聚合物的側鏈具有多數羧基,而可以稀鹼水溶液顯影。 The above-mentioned carboxyl-containing resin is due to the backbone. The side chain of the polymer has a plurality of carboxyl groups and can be developed with a dilute aqueous alkali solution.

又,上述中,使用由苯乙烯或苯乙烯衍生物所衍生的(A)含羧基之樹脂,則因可得到焊料耐熱性優異的組成物而佳。 Further, in the above, the use of the (A) carboxyl group-containing resin derived from styrene or a styrene derivative is preferable because a composition excellent in solder heat resistance can be obtained.

上述含羧基之樹脂的酸價以20~200mgKOH/g之範圍為佳、更佳為40~180mgKOH/g之範圍。在20~200mgKOH/g之範圍,則可得到塗膜的密著性,鹼顯影變容易、抑制顯影液所致之曝光部之溶解、不使線必要以上之變細,變得易描繪正常的阻劑圖型而佳。 The acid value of the carboxyl group-containing resin is preferably in the range of 20 to 200 mgKOH/g, more preferably 40 to 180 mgKOH/g. In the range of 20 to 200 mgKOH/g, the adhesion of the coating film can be obtained, the alkali development becomes easy, the dissolution of the exposed portion due to the developer is suppressed, and the line is not required to be thinned, and it is easy to draw normal. The resist pattern is good.

又,本發明使用的含羧基之樹脂的重量平均分子量雖因樹脂骨架而異,但以2,000~150,000之範圍為佳。若在該範圍,則不剝落性能良好、曝光後的塗膜的耐溼性佳、顯影時不易產生膜減薄。又,在上述重量平均分子量之範圍,則解像度提升、顯影性良好、儲藏安定性變佳。更佳為5,000~100,000。重量平均分子量可以膠體滲透層析法測定。 Further, although the weight average molecular weight of the carboxyl group-containing resin used in the present invention varies depending on the resin skeleton, it is preferably in the range of 2,000 to 150,000. When it is in this range, the peeling performance is good, the moisture resistance of the coating film after exposure is good, and film thinning is hard to occur at the time of image development. Moreover, in the range of the weight average molecular weight, the resolution is improved, the developability is good, and the storage stability is improved. More preferably 5,000 to 100,000. The weight average molecular weight can be determined by colloidal permeation chromatography.

[(B)環氧基系熱硬化性成分] [(B) Epoxy-based thermosetting component]

本發明之感光性樹脂組成物,為了賦予耐熱性,而含有(B)環氧基系熱硬化性成分。(B)環氧基系熱硬化 性成分方面,可使用熱硬化性樹脂組成物中用作為熱硬化性成分者,具體上,為分子中具有複數環氧基之化合物即習知多官能環氧化合物。 The photosensitive resin composition of the present invention contains (B) an epoxy-based thermosetting component in order to impart heat resistance. (B) epoxy-based thermosetting As the thermoplastic component, a thermosetting resin composition can be used as the thermosetting component, and specifically, a compound having a plurality of epoxy groups in the molecule, that is, a conventional polyfunctional epoxy compound.

上述多官能環氧化合物方面,可舉例如三菱化學(股)製之jER828等之雙酚A型環氧樹脂;溴化環氧樹脂;酚醛清漆型環氧樹脂;雙酚F型環氧樹脂;氫化雙酚A型環氧樹脂;縮水甘油基胺型環氧樹脂;乙內醯脲型環氧樹脂;脂環式環氧樹脂;三羥基苯基甲烷型環氧樹脂;三菱化學(股)製之YX-4000等之聯二甲酚型或者聯酚型環氧樹脂或彼等之混合物;雙酚S型環氧樹脂;雙酚A酚醛清漆型環氧樹脂;DIC(股)製之RN-695等之甲酚酚醛清漆型環氧樹脂;四羥苯酚(phenylol)乙烷型環氧樹脂;日產化學工業(股)製之TEPIC等之雜環式環氧樹脂;二縮水甘油基苯二甲酸酯樹脂;四縮水甘油基二甲苯醯基乙烷樹脂;含萘基環氧樹脂;具有二環戊二烯骨架之環氧樹脂;柔軟強靭環氧樹脂;縮水甘油基甲基丙烯酸酯共聚合系環氧樹脂;環己基馬來醯亞胺與縮水甘油基甲基丙烯酸酯之共聚合環氧樹脂等,但不限於此等者。此等之環氧樹脂可單獨或2種以上組合使用。此等之其中,為2官能之環氧樹脂由可撓性的觀點來看為佳。尤其,聯苯基酚醛清漆型環氧樹脂、聯二甲酚型環氧樹脂或彼等之混合物由難燃性的觀點來看為佳。 Examples of the polyfunctional epoxy compound include a bisphenol A type epoxy resin such as jER828 manufactured by Mitsubishi Chemical Corporation; a brominated epoxy resin; a novolak type epoxy resin; and a bisphenol F type epoxy resin; Hydrogenated bisphenol A type epoxy resin; glycidyl amine type epoxy resin; ethyl uret urea type epoxy resin; alicyclic epoxy resin; trishydroxyphenylmethane type epoxy resin; Mitsubishi Chemical Corporation YX-4000 and other bisphenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type epoxy resin; bisphenol A novolac type epoxy resin; DIC (share) RN- a cresol novolak type epoxy resin such as 695; a phenylol ethane type epoxy resin; a heterocyclic epoxy resin such as TEPIC manufactured by Nissan Chemical Industries Co., Ltd.; diglycidyl phthalic acid Acid ester resin; tetraglycidyl xylene decyl ethane resin; naphthyl containing epoxy resin; epoxy resin having dicyclopentadiene skeleton; soft and strong epoxy resin; glycidyl methacrylate copolymerization Epoxy resin; copolymerization of cyclohexylmaleimide with glycidyl methacrylate Epoxy resin, etc., but is not limited thereto and other persons. These epoxy resins may be used singly or in combination of two or more kinds. Among these, a bifunctional epoxy resin is preferred from the viewpoint of flexibility. In particular, a biphenyl novolac type epoxy resin, a bisxylenol type epoxy resin or a mixture thereof is preferred from the viewpoint of flame retardancy.

本發明中,(B)環氧基系熱硬化性成分的搭配量,相對(A)含羧基之樹脂所含之羧基之1當量, (B)環氧基系熱硬化性成分所含之環氧基之當量需要在1.0以下之範圍。較佳為(A)含羧基之樹脂所含之羧基之當量與(B)環氧基系熱硬化性成分所含之環氧基之當量之比為0.1以上0.8以下、尤其在0.2以上0.6以下之範圍。在此,本發明中,羧基及環氧基之當量係指各自作為反應基之羧基及環氧基之化學當量。即本發明中,使組成物(乾燥塗膜)中所含之(B)環氧基系熱硬化性成分之環氧基數比(A)含羧基之樹脂的羧基數少。 In the present invention, the amount of the (B) epoxy group-based thermosetting component is 1 equivalent to the carboxyl group contained in the (A) carboxyl group-containing resin. (B) The equivalent of the epoxy group contained in the epoxy group thermosetting component needs to be in the range of 1.0 or less. The ratio of the equivalent of the carboxyl group contained in the (A) carboxyl group-containing resin to the equivalent of the epoxy group contained in the (B) epoxy-based thermosetting component is preferably 0.1 or more and 0.8 or less, particularly preferably 0.2 or more and 0.6 or less. The scope. Here, in the present invention, the equivalents of the carboxyl group and the epoxy group refer to the chemical equivalents of the carboxyl group and the epoxy group each as a reactive group. In the present invention, the number of epoxy groups of the (B) epoxy group-containing thermosetting component contained in the composition (dry coating film) is smaller than the number of carboxyl groups of the (A) carboxyl group-containing resin.

通常(B)環氧基系熱硬化性成分的搭配量為可防止硬化被膜中的羧基之殘存的範圍,但本發明中,藉由使組成物中的(B)環氧基系熱硬化性成分的搭配量在上述範圍,相對羧基之數,使進行反應的環氧基之數少,可使賦予顯影性之羧基在熱硬化後中亦可大量殘存。藉由此,即使為含有氧化鈦之硬化被膜,可使對顯影液之溶解性提高,在貫穿孔等之穴部中亦可抑制顯影殘渣產生。又,本發明中,貫穿孔等之穴部不限於貫穿孔,為亦包含介層洞等之其他穴部者。穴部愈為小徑殘渣愈易阻塞,但根據本發明,即使為例如內徑300mm以下、具體上內徑200mm以上300mm以下之小徑穴部,亦可不產生殘渣而進行顯影。 In general, the amount of the (B) epoxy group-based thermosetting component is a range in which the carboxyl group in the cured film can be prevented from remaining. However, in the present invention, (B) epoxy group thermosetting property in the composition is obtained. When the amount of the component is in the above range, the number of the epoxy groups to be reacted is small relative to the number of carboxyl groups, and the carboxyl group imparting developability can be left in a large amount after thermal curing. As a result, even if it is a hardened film containing titanium oxide, the solubility in a developing solution can be improved, and generation of development residue can be suppressed in a hole portion such as a through hole. Further, in the present invention, the hole portion such as the through hole or the like is not limited to the through hole, and is a hole portion which also includes a via hole or the like. The more the small-diameter residue is more likely to be clogged, the smaller the diameter portion of the inner diameter of 300 mm or less, specifically the inner diameter of 200 mm or more and 300 mm or less, can be developed without causing residue.

本發明中,作為(B)環氧基系熱硬化性成分,以含有在20℃為液狀的環氧樹脂、及在40℃為固體狀的固形環氧樹脂中至少一種以上為佳。在此,本發明中固體狀係包含粉體之概念。作為(B)環氧基系熱硬化性 成分,含有在20℃為液狀的環氧樹脂,則因黏度低而變得易流動,故貫穿孔中的顯影殘渣變得不易產生。又,作為(B)環氧基系熱硬化性成分,含有在40℃為粉體的固形環氧樹脂,則因粒狀且不易阻塞於貫穿孔內,仍變得不易產生顯影殘渣。進一步,作為(B)環氧基系熱硬化性成分,含有在40℃為固體狀的固形環氧樹脂之場合,與粉體之場合相同地為粒狀且不易阻塞於貫穿孔內,故顯影殘渣變得不易產生。相對於此,含有顯影時之溫度中為半固形狀之環氧樹脂,則因係固形狀態與液體狀態中間之狀態且黏度高,故顯影殘渣易進入貫穿孔內,認為成為不易排出狀態者。在近年,伴隨基板之小型化,貫穿孔尺寸亦變得更小,故特別易產生如此之現象。 In the present invention, the (B) epoxy group-based thermosetting component is preferably at least one selected from the group consisting of an epoxy resin which is liquid at 20 ° C and a solid epoxy resin which is solid at 40 ° C. Here, the solid form in the present invention contains the concept of a powder. (B) epoxy-based thermosetting When the component contains an epoxy resin which is liquid at 20 ° C, the viscosity is low and it is easy to flow, so that the development residue in the through hole is less likely to occur. In addition, the (B) epoxy group-based thermosetting component contains a solid epoxy resin which is a powder at 40 ° C, and is in a granular form and is less likely to be clogged in the through-hole, and the development residue is less likely to occur. Further, when the (B) epoxy-based thermosetting component contains a solid epoxy resin which is solid at 40 ° C, it is granular like the powder and is not easily clogged in the through-hole, so development The residue becomes less likely to occur. On the other hand, in the case where the epoxy resin having a semi-solid shape in the temperature at the time of development is in a state of being between the solid state and the liquid state, and the viscosity is high, the development residue easily enters the through-hole and is considered to be in a state in which it is difficult to discharge. In recent years, with the miniaturization of the substrate, the size of the through hole has also become smaller, so that such a phenomenon is particularly likely to occur.

在此,說明本發明中的「液狀」的判定方法。 Here, a method of determining the "liquid state" in the present invention will be described.

液狀的判定依據危險物的試驗及性狀相關省令(平成元年自治省令第1號)之附件第2之「液狀的確認方法」進行。 The determination of the liquid state is carried out in accordance with the "Method for Confirming the Liquidity" in the second part of the annex to the "Procedures for the Test of the Hazardous Substances".

(1)裝置 (1) device 恆溫水槽: Constant temperature sink:

使用具備攪拌機、加熱器、溫度計、自動溫度調節器(可在±0.1℃控制溫度者)且深度150mm以上者。 Use a mixer, heater, thermometer, automatic temperature regulator (can control temperature at ±0.1 °C) and a depth of 150mm or more.

又,在後述實施例所使用的環氧樹脂的判定,皆使用Yamato科學(股)製之低溫恆溫水槽(型式BU300)與 投入式恆溫裝置溫度計(型式BF500)之組合,並將自來水約22公升置入低溫恆溫水槽(型式BU300),開啟組合於其中的溫度計(型式BF500)之電源,設定成設定溫度(20℃或40℃),使水溫在設定溫度±0.1℃以溫度計(型式BF500)進行微調整,但若為可同樣調整之裝置則皆可使用。 Moreover, in the determination of the epoxy resin used in the examples described later, a low-temperature constant temperature water tank (type BU300) manufactured by Yamato Scientific Co., Ltd. was used. Put the combination of the input thermostat thermometer (type BF500), and put about 22 liters of tap water into the low temperature constant temperature water tank (type BU300), and turn on the power supply of the thermometer (type BF500) combined with it, and set it to the set temperature (20 °C or 40). °C), the water temperature is finely adjusted with a thermometer (type BF500) at a set temperature of ±0.1 °C, but it can be used if it can be adjusted similarly.

試驗管: Test tube:

試驗管方面,如圖1所示,使用內徑30mm、高度120mm之平底圓筒型透明玻璃製者,且自管底的55mm及85mm之高度處各自設置標線31,32,並將試驗管口以橡膠栓33a進行密閉的液狀判定用試驗管30a、與相同尺寸且設置相同標線,且以於中央開有用以插入、支撐溫度計的孔之橡膠栓33b將試驗管口密閉,並於橡膠栓33b插入有溫度計34的溫度測定用試驗管30b。以下稱自管底55mm之高度的標線為「A線」、自管底85mm之高度的標線為「B線」。 As for the test tube, as shown in Fig. 1, a flat-bottom cylindrical transparent glass having an inner diameter of 30 mm and a height of 120 mm is used, and the marking lines 31, 32 are respectively set at the heights of 55 mm and 85 mm from the bottom of the tube, and the test tube is placed. The test tube 30a for liquid determination which is sealed by the rubber plug 33a is provided with the same size and the same reticle, and the test tube is sealed by a rubber plug 33b for inserting and supporting the hole of the thermometer at the center. The rubber plug 33b is inserted into the temperature measuring test tube 30b of the thermometer 34. Hereinafter, the line from the height of 55 mm at the bottom of the tube is "A line", and the line at the height of 85 mm from the bottom of the tube is "B line".

溫度計34方面,使用JIS B7410(1982)「石油類試驗用玻璃製溫度計」所規定之凝固點測定用者(SOP-58刻度範圍20~50℃),但可測定0~50℃之溫度範圍者即可。 In the case of the thermometer 34, the freeze point measurement target (SOP-58 scale range: 20 to 50 ° C) specified in JIS B7410 (1982) "Glass thermometer for petroleum test" is used, but the temperature range of 0 to 50 ° C can be measured. can.

(2)試驗之實施手段 (2) Means of implementation of the test

將在溫度20±5℃之大氣壓下放置24小時以上的試料,置入圖1(a)所示之液狀判定用試驗管30a與圖1 (b)所示之溫度測定用試驗管30b各自到A線為止。將2枝試驗管30a,30b於低溫恆溫水槽以B線在水面下之方式直立後進行靜置。溫度計,其下端比A線低30mm。 The sample which was allowed to stand at atmospheric pressure of 20 ± 5 ° C for 24 hours or more was placed in the test tube 30a for liquid determination shown in Fig. 1 (a) and Fig. 1 The temperature measuring test tubes 30b shown in (b) are each up to the A line. The two test tubes 30a and 30b were stood upright in a low-temperature constant temperature water tank so that the B line was below the water surface, and then allowed to stand. The thermometer has a lower end 30 mm lower than the A line.

試料溫度到達設定溫度±0.1℃後以該狀態維持10分鐘。10分後將液狀判斷用試驗管30a由低溫恆溫水槽取出,立刻水平倒於水平試驗台上,將試驗管內液面前端從A線移動至B線的時間以馬錶測定、記錄。試料,在設定溫度中,測定時聞在90秒以內者判定為液狀、超過90秒者判定為固體狀。 After the sample temperature reached the set temperature ±0.1 ° C, it was maintained in this state for 10 minutes. After 10 minutes, the liquid test tube 30a was taken out from the low-temperature constant temperature water tank, and immediately fell horizontally on the horizontal test stand. The time at which the liquid level front end of the test tube was moved from the A line to the B line was measured and recorded by a horse watch. The sample was judged to be in a liquid state within 90 seconds after the measurement at the set temperature, and was judged to be solid when it was over 90 seconds.

在20℃為液狀的環氧樹脂方面,可舉例如三菱化學(股)製之jER828等之雙酚A型環氧樹脂、雙酚F型環氧樹脂、苯酚酚醛清漆型環氧樹脂、tert-丁基-兒茶酚型環氧樹脂、縮水甘油基胺型環氧樹脂、胺基酚型環氧樹脂、脂環式環氧樹脂等。又,在20℃為液狀的環氧樹脂在未達20℃當然亦可為液狀。又,環氧樹脂方面,由硬化物較佳物性等之觀點,以芳香族系環氧樹脂為佳。又,本說明書中,芳香族系環氧樹脂係指於其分子內具有芳香環骨架的環氧樹脂。因此,在20℃為液狀的環氧樹脂方面,以在20℃為液狀的芳香族系環氧樹脂更佳。此等之環氧樹脂可單獨使用或2種以上組合使用。 Examples of the epoxy resin which is liquid at 20 ° C include bisphenol A type epoxy resin such as jER828 manufactured by Mitsubishi Chemical Corporation, bisphenol F type epoxy resin, phenol novolak type epoxy resin, tert a butyl-catechol type epoxy resin, a glycidyl amine type epoxy resin, an aminophenol type epoxy resin, an alicyclic epoxy resin, or the like. Further, the epoxy resin which is liquid at 20 ° C may of course be liquid at less than 20 ° C. Further, in terms of the epoxy resin, an aromatic epoxy resin is preferred from the viewpoint of preferable physical properties of the cured product and the like. In the present specification, the aromatic epoxy resin refers to an epoxy resin having an aromatic ring skeleton in its molecule. Therefore, in terms of a liquid epoxy resin at 20 ° C, an aromatic epoxy resin which is liquid at 20 ° C is more preferable. These epoxy resins may be used singly or in combination of two or more.

在40℃為固體狀的固形環氧樹脂方面,可舉例如4官能萘型環氧樹脂、含萘骨架多官能固形環氧樹脂等之萘型環氧樹脂;酚類與具有酚性羥基的芳香族醛之縮合物的環氧化物(三苯酚型環氧樹脂);含二環戊二烯骨 架多官能固形環氧樹脂等之二環戊二烯芳烷基型環氧樹脂;含聯苯基骨架多官能固形環氧樹脂等之聯苯基芳烷基型環氧樹脂;酚醛清漆型環氧樹脂;三菱化學(股)製之YX-4000等之聯二甲酚型或者聯酚型環氧樹脂或彼等之混合物;DIC(股)製之RN-695等之甲酚酚醛清漆型環氧樹脂;日產化學工業(股)製之TEPIC等之雜環式環氧樹脂等。此等之環氧樹脂可各自單獨使用或2種以上組合使用。尤其為了賦予低熱膨脹性,以使用含萘骨架之環氧樹脂為佳。 The solid epoxy resin which is solid at 40 ° C may, for example, be a tetrafunctional naphthalene type epoxy resin or a naphthalene type epoxy resin containing a naphthalene skeleton polyfunctional solid epoxy resin; a phenol and an aromatic having a phenolic hydroxyl group; Epoxide of a condensate of an aldehyde (trisphenol type epoxy resin); containing dicyclopentadiene bone a dicyclopentadiene aralkyl type epoxy resin such as a polyfunctional solid epoxy resin; a biphenyl aralkyl type epoxy resin containing a biphenyl skeleton polyfunctional solid epoxy resin; a novolac type ring Oxygen resin; a bisphenol type or a biphenol type epoxy resin such as YX-4000 manufactured by Mitsubishi Chemical Co., Ltd. or a mixture thereof; a cresol novolak type ring of RN-695 manufactured by DIC Co., Ltd. Oxygen resin; heterocyclic epoxy resin such as TEPIC manufactured by Nissan Chemical Industries Co., Ltd. These epoxy resins may be used singly or in combination of two or more kinds. In particular, in order to impart low thermal expansion properties, it is preferred to use an epoxy resin having a naphthalene skeleton.

在20℃為固體狀,且在40℃為液狀的半固形環氧樹脂(C)方面,可舉例如雙酚A型環氧樹脂;萘型環氧樹脂;苯酚酚醛清漆型環氧樹脂等。此等之環氧樹脂可各自單獨使用或2種以上組合使用。 The semi-solid epoxy resin (C) which is solid at 20 ° C and liquid at 40 ° C may, for example, be a bisphenol A epoxy resin; a naphthalene epoxy resin; a phenol novolak epoxy resin; . These epoxy resins may be used singly or in combination of two or more kinds.

[(C)無機充填物] [(C) Inorganic Filler]

本發明之鹼顯影型感光性樹脂組成物含有(C)無機充填物。(C)無機充填物方面,可舉例如碳酸鈣、碳酸鎂、飛塵、脫水污泥、天然二氧化矽、合成二氧化矽、高嶺土、黏土、氧化鈣、氧化鎂、氧化鈦、氧化鋅、硫酸鋇、氧化鋁、滑石、雲母、菱水鎂鋁石、矽酸鋁、矽酸鎂、矽酸鈣、燒成滑石、矽灰石、鈦酸鉀、硫酸鎂、硫酸鈣、磷酸鎂、海泡石、金蛭石、氮化硼、硼酸鋁、二氧化矽球、玻璃薄片、玻璃球、無定形二氧化矽、結晶性二氧化矽、熔融二氧化矽、球狀二氧化矽、製鐵熔渣、銅、 鐵、氧化鐵、碳黑、鋁矽鐵粉、鋁鎳鈷合金磁石、各種肥粒鐵等之磁性粉、水泥、玻璃粉末、Neuburg矽土、矽藻土、三氧化銻、硫酸氧化鎂、水合鋁、水合石膏、明礬等。此等之無機充填物可1種單獨使用或2種以上組合使用。 The alkali-developable photosensitive resin composition of the present invention contains (C) an inorganic filler. (C) inorganic fillers, for example, calcium carbonate, magnesium carbonate, fly ash, dewatered sludge, natural cerium oxide, synthetic cerium oxide, kaolin, clay, calcium oxide, magnesium oxide, titanium oxide, zinc oxide, Barium sulfate, alumina, talc, mica, magnesite, aluminum citrate, magnesium citrate, calcium citrate, calcined talc, ash, potassium titanate, magnesium sulfate, calcium sulfate, magnesium phosphate, sea Asphalt, ettringite, boron nitride, aluminum borate, cerium oxide sphere, glass flake, glass sphere, amorphous cerium oxide, crystalline cerium oxide, molten cerium oxide, spherical cerium oxide, iron making Slag, copper, Iron, iron oxide, carbon black, aluminum strontium iron powder, AlNiCo magnet, magnetic powder of various ferrite grains, cement, glass powder, Neuburg alumina, diatomaceous earth, antimony trioxide, magnesium sulfate sulfate, hydration Aluminum, hydrated gypsum, alum, etc. These inorganic fillers may be used alone or in combination of two or more.

上述中,本發明中,作為(C)無機充填物,含有氧化鈦。藉由含有氧化鈦作為(C)無機充填物,可使組成物的硬化物作成白色,且可得到高反射率。另一方面,如前述,含有氧化鈦之組成物因流動度降低,而有貫穿孔等中易產生顯影殘渣的問題,但本發明中,藉由使(A)含羧基之樹脂所含之羧基及(B)環氧基系熱硬化性成分所含之環氧基之當量比在上述指定的範圍,而可得到無顯影殘渣問題且反射率高的硬化被膜。 In the above, in the present invention, the inorganic filler (C) contains titanium oxide. By containing titanium oxide as the (C) inorganic filler, the cured product of the composition can be made white, and high reflectance can be obtained. On the other hand, as described above, the composition containing titanium oxide has a problem that development residue tends to occur in a through-hole or the like due to a decrease in fluidity, but in the present invention, a carboxyl group contained in (A) a carboxyl group-containing resin And the equivalent ratio of the epoxy group contained in the (B) epoxy-based thermosetting component is within the above-specified range, and a cured film having no problem of development residue and high reflectance can be obtained.

氧化鈦可為金紅石型、銳鈦礦型、直錳礦型之任一構造之氧化鈦。直錳礦型氧化鈦可藉由對直錳礦型Li0.5TiO2施以化學氧化之鋰脫離處理而得到。金紅石型氧化鈦因不易引起光照射造成的變色而佳。 The titanium oxide may be titanium oxide of any of a rutile type, an anatase type, and a stellite type. The smectite-type titanium oxide can be obtained by subjecting the smectite-type Li 0.5 TiO 2 to a chemical oxidative lithium detachment treatment. The rutile-type titanium oxide is excellent in discoloration caused by light irradiation.

含有如此之氧化鈦作為必須成分的(C)無機充填物的搭配量,相對感光性樹脂組成物中之固形分(感光性樹脂組成物含有有機溶劑時,除有機溶劑以外的成分),較佳為5~80質量%之範圍、更佳為10~70質量%之範圍。 The amount of the (C) inorganic filler containing the titanium oxide as an essential component is preferably a solid content in the photosensitive resin composition (a component other than the organic solvent when the photosensitive resin composition contains an organic solvent). It is in the range of 5 to 80% by mass, more preferably in the range of 10 to 70% by mass.

[(D)光聚合起始劑] [(D) Photopolymerization initiator]

本發明之鹼顯影型感光性樹脂組成物含有(D)光聚合起始劑。(D)光聚合起始劑方面,作為光聚合起始劑或光自由基產生劑為習知光聚合起始劑則皆可使用。 The alkali-developable photosensitive resin composition of the present invention contains (D) a photopolymerization initiator. (D) In terms of a photopolymerization initiator, a photopolymerization initiator or a photoradical generator can be used as a conventional photopolymerization initiator.

(D)光聚合起始劑方面,例如雙-(2,6-二氯苯甲醯基)苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-4-丙基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-1-萘基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)苯基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,4,6-三甲基苯甲醯基)-苯基膦氧化物(BASF Japan(股)製,IRGACURE819)等之雙醯基膦氧化物類;2,6-二甲氧基苯甲醯基二苯基膦氧化物、2,6-二氯苯甲醯基二苯基膦氧化物、2,4,6-三甲基苯甲醯基苯基膦酸甲基酯、2-甲基苯甲醯基二苯基膦氧化物、三甲基乙醯基苯基膦酸異丙基酯、2,4,6-三甲基苯甲醯基二苯基膦氧化物(BASF Japan(股)製,DAROCUR TPO)等之單醯基膦氧化物類;1-羥基-環己基苯基酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮等之羥基苯乙酮類;安息香、苄基酯、安息香甲基醚、安息香乙基醚、安息香n-丙基醚、安息香異丙基醚、安息香n-丁基醚等之安息香類;安息香烷基醚類;二苯甲酮、p-甲基二苯甲酮、米氏 酮、甲基二苯甲酮、4,4’-二氯二苯甲酮、4,4’-雙二乙基胺基二苯甲酮等之二苯甲酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉基-1-丙酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1、N,N-二甲基胺基苯乙酮等之苯乙酮類;硫基呫噸酮、2-乙基硫基呫噸酮、2-異丙基硫基呫噸酮、2,4-二甲基硫基呫噸酮、2,4-二乙基硫基呫噸酮、2-氯硫基呫噸酮、2,4-二異丙基硫基呫噸酮等之硫基呫噸酮類;蒽醌、氯蒽醌、2-甲基蒽醌、2-乙基蒽醌、2-tert-丁基蒽醌、1-氯蒽醌、2-戊基蒽醌、2-胺基蒽醌等之蒽醌類;苯乙酮二甲基縮酮、苄基二甲基縮酮等之縮酮類;乙基-4-二甲基胺基苯甲酸酯、2-(二甲基胺基)乙基苯甲酸酯、p-二甲基安息香酸乙基酯等之安息香酸酯類;1.2-辛烷二酮,1-[4-(苯基硫基)-,2-(O-苯甲醯基肟)]、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(0-乙醯基肟)等之肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙[2,6-二氟-3-(2-(1-吡咯-1-基)乙基)苯基]鈦等之二茂鈦類;苯基二硫化物2-硝基茀、丁偶姻、大茴香偶姻乙基醚、偶氮雙異丁腈、四甲基秋蘭姆二硫化物等。以上之光聚合起始劑皆可1種單獨使用或2種以上組合使用。 (D) Photopolymerization initiator, for example, bis-(2,6-dichlorobenzhydryl)phenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-2,5- Dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzylidene)-4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzhydryl)-1 -naphthylphosphine oxide, bis-(2,6-dimethoxybenzylidene)phenylphosphine oxide, bis-(2,6-dimethoxybenzylidene)-2,4, 4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzylidene)-2,5-dimethylphenylphosphine oxide, bis-(2,4,6- Trimethyl benzhydryl)-phenylphosphine oxide (bismuthylphosphine oxides such as BASF Japan, IRGACURE 819); 2,6-dimethoxybenzimidyl diphenylphosphine Oxide, 2,6-dichlorobenzhydryldiphenylphosphine oxide, 2,4,6-trimethylbenzimidylphosphonic acid methyl ester, 2-methylbenzhydryldiyl Phenylphosphine oxide, isopropyl trimethyl ethenylphenylphosphonate, 2,4,6-trimethylbenzimidyl diphenylphosphine oxide (manufactured by BASF Japan, DAROCUR TPO) And other monodecylphosphine oxides; 1-hydroxy-cyclohexyl phenyl ketone, 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2- Base-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propenyl)-benzyl]phenyl}-2-methyl-propane Hydroxyacetophenones such as 1-ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one; benzoin, benzyl ester, benzoin methyl ether, benzoin ethyl ether, benzoin n- Benzoin, benzoin isopropyl ether, benzoin n-butyl ether, etc.; benzoin alkyl ether; benzophenone, p-methylbenzophenone, Michler, methyl diphenyl a benzophenone such as a ketone, 4,4'-dichlorobenzophenone or 4,4'-bisdiethylaminobenzophenone; acetophenone, 2,2-dimethoxy- 2-Phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-1 -[4-(Methylthio)phenyl]-2-morpholinyl-1-propanone, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butyl Acetophenones such as ketone-1, N,N-dimethylaminoacetophenone, thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthene Sulphur-based xanthone ketones; hydrazine, chloranil, 2-methyl hydrazine, 2-ethyl hydrazine, 2-tert-butyl hydrazine, 1-chloroindole, 2-pentyl hydrazine Anthraquinones such as hydrazine, 2-aminoindole, etc.; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; ethyl-4-dimethylamino benzoate , benzoic acid esters such as 2-(dimethylamino)ethyl benzoate, ethyl p-dimethylbenzoate; 1.2-octanedione, 1-[4-(phenyl sulfonate) Base, -, 2-(O-benzylidene hydrazide)], ethyl ketone, 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl] - an oxime ester such as 1-(0-ethenylhydrazine); bis(η 5 -2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H) -pyrrol-1-yl)phenyl)titanium, bis(cyclopentadienyl)-bis[2,6-difluoro-3-(2-(1-pyrrol-1-yl)ethyl)phenyl] Titanium such as titanium; phenyl disulfide 2-nitroguanidine, butyl acetoin, fennel acetoyl ethyl ether, azobisisobutyronitrile, tetramethyl thiuram disulfide, and the like. The above photopolymerization initiators may be used alone or in combination of two or more.

(D)光聚合起始劑之搭配量以固形分換算, 相對(A)含羧基之樹脂100質量份,為0.1~50質量份。藉由(D)光聚合起始劑在該範圍搭配,則在銅上之光硬化性變得足夠、塗膜的硬化性變得良好、耐藥品性等之塗膜特性提升、又,深部硬化性亦提升。更佳為相對(A)含羧基之樹脂100質量份,為5~40質量份。 (D) The amount of photopolymerization initiator is converted in solid form, It is 0.1 to 50 parts by mass based on 100 parts by mass of the (A) carboxyl group-containing resin. When the (D) photopolymerization initiator is blended in this range, the photocurability on copper is sufficient, the curability of the coating film is improved, the coating properties such as chemical resistance are improved, and deep hardening is performed. Sex also improved. More preferably, it is 5 to 40 parts by mass based on 100 parts by mass of the (A) carboxyl group-containing resin.

(稀釋劑) (diluent)

本發明之感光性樹脂組成物可含有稀釋劑。本發明使用的稀釋劑用在調整組成物的黏度而使作業性提升,同時提升交聯密度、提升密著性等,且可使用光硬化性單體等之反應性稀釋劑或習知慣用的有機溶劑。 The photosensitive resin composition of the present invention may contain a diluent. The diluent used in the present invention is used to adjust the viscosity of the composition to improve the workability, to increase the crosslinking density, to improve the adhesion, and the like, and to use a reactive diluent such as a photocurable monomer or a conventional one. Organic solvents.

光硬化性單體方面,可舉例如2-乙基己基(甲基)丙烯酸酯、環己基(甲基)丙烯酸酯等之烷基(甲基)丙烯酸酯類;2-羥基乙基(甲基)丙烯酸酯、2-羥基丙基(甲基)丙烯酸酯等之羥基烷基(甲基)丙烯酸酯類;乙二醇、丙二醇、二乙二醇、二丙二醇等之環氧烷衍生物的單或二(甲基)丙烯酸酯類;己烷二醇、三羥甲基丙烷、季戊四醇、二三羥甲基丙烷、二季戊四醇、參羥基乙基異氰尿酸酯等之多元醇或此等之環氧乙烷或者環氧丙烷加成物的多價(甲基)丙烯酸酯類;苯氧基乙基(甲基)丙烯酸酯、雙酚A之聚乙氧基二(甲基)丙烯酸酯等之酚類之環氧乙烷或者環氧丙烷加成物的(甲基)丙烯酸酯類;甘油二縮水甘油基醚、三羥甲基丙烷三縮水甘油基醚、三縮水甘油基異氰尿酸酯等之環氧丙基醚之(甲基) 丙烯酸酯類;及三聚氰胺(甲基)丙烯酸酯等。 Examples of the photocurable monomer include alkyl (meth) acrylates such as 2-ethylhexyl (meth) acrylate and cyclohexyl (meth) acrylate; and 2-hydroxyethyl (methyl) a hydroxyalkyl (meth) acrylate such as acrylate or 2-hydroxypropyl (meth) acrylate; or a single alkylene oxide derivative such as ethylene glycol, propylene glycol, diethylene glycol or dipropylene glycol; Or di(meth)acrylates; polyols such as hexanediol, trimethylolpropane, pentaerythritol, ditrimethylolpropane, dipentaerythritol, hydroxyethyl isocyanurate or the like Polyvalent (meth) acrylates of ethylene oxide or propylene oxide adducts; phenoxyethyl (meth) acrylate, bisphenol A polyethoxy di(meth) acrylate, etc. (meth)acrylates of phenolic oxirane or propylene oxide adducts; glycerol diglycidyl ether, trimethylolpropane triglycidyl ether, triglycidyl isocyanuric acid Epoxy propyl ether of ester or the like (methyl) Acrylates; and melamine (meth) acrylates, and the like.

如此之光硬化性單體之搭配率相對含羧基之樹脂(A)100質量份,較佳為5~100質量份、更佳為5~70質量份之比例。在上述搭配率之範圍,光硬化性提升、圖型形成變容易、硬化膜的強度亦可提升。 The ratio of the photocurable monomer is preferably from 5 to 100 parts by mass, more preferably from 5 to 70 parts by mass, per 100 parts by mass of the carboxyl group-containing resin (A). In the range of the above matching ratio, the photocurability is improved, the pattern formation is easy, and the strength of the cured film can be improved.

有機溶劑方面,可使用甲基乙基酮、環己酮等之酮類;甲苯、二甲苯、四甲基苯等之芳香族烴類;溶纖劑、甲基溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三丙二醇單甲基醚等之二醇醚類;乙酸乙基酯、乙酸丁基酯、乳酸丁基酯、醋酸纖維素、丁基醋酸纖維素、卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯、二丙二醇單甲基醚乙酸酯、碳酸丙烯酯等之酯類;辛烷、癸烷等之脂肪族烴類;石油醚、石腦油、溶煤石油精等之石油系溶劑等習知慣用的有機溶劑。此等之有機溶劑可單獨或二種類以上組合使用。 As the organic solvent, a ketone such as methyl ethyl ketone or cyclohexanone; an aromatic hydrocarbon such as toluene, xylene or tetramethylbenzene; a cellosolve, a methyl cellosolve or a butyl cellosolve; Glycol ethers such as carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, tripropylene glycol monomethyl ether; acetic acid Ethyl ester, butyl acetate, butyl lactate, cellulose acetate, cellulose butyl acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, two An ester of propylene glycol monomethyl ether acetate or propylene carbonate; an aliphatic hydrocarbon such as octane or decane; a petroleum solvent such as petroleum ether, naphtha or petroleum scouring oil; Organic solvents. These organic solvents may be used singly or in combination of two or more kinds.

(其他任意成分) (other optional ingredients)

本發明之組成物可搭配電子材料領域中習知慣用的添加劑。添加劑方面,可舉例如熱硬化觸媒、熱聚合禁止劑、紫外線吸收劑、矽烷偶合劑、可塑劑、難燃劑、防靜電劑、老化防止劑、抗菌.防黴劑、消泡劑、平坦劑、上述以外之充填劑、增黏劑、密著性賦予劑、搖變性賦予劑、著色劑、光起始助劑、增感劑等。 The composition of the present invention can be used with additives conventionally used in the field of electronic materials. Examples of the additive include a thermosetting catalyst, a thermal polymerization inhibitor, a UV absorber, a decane coupling agent, a plasticizer, a flame retardant, an antistatic agent, an aging preventive agent, and an antibacterial agent. A mold inhibitor, an antifoaming agent, a flat agent, a filler other than the above, a tackifier, an adhesion imparting agent, a shake imparting agent, a coloring agent, a photoinitiating aid, a sensitizer, and the like.

(難燃劑) (flammable agent)

本發明之感光性樹脂組成物可含有含磷化合物等之難燃劑。在本發明之感光性樹脂組成物,即使含有固形難燃劑之場合,仍可抑制穴部中的顯影殘渣產生。難燃劑方面,可使用金屬氫氧化物、含磷化合物等之慣用習知者。金屬氫氧化物方面,例如氫氧化鋁、氫氧化鈣、氫氧化鎂等。含磷化合物方面,可舉例如磷酸酯、縮合磷酸酯、環狀膦氮烯化合物、具有酚性羥基的含磷化合物、寡聚物或者聚合物之含磷化合物、膦氮烯寡聚物、膦酸金屬鹽、下述一般式所表示之化合物等。 The photosensitive resin composition of the present invention may contain a flame retardant such as a phosphorus-containing compound. In the case where the photosensitive resin composition of the present invention contains a solid flame retardant, generation of development residue in the cavity portion can be suppressed. As the flame retardant, a conventional person such as a metal hydroxide or a phosphorus-containing compound can be used. As the metal hydroxide, for example, aluminum hydroxide, calcium hydroxide, magnesium hydroxide or the like. Examples of the phosphorus-containing compound include a phosphate ester, a condensed phosphate ester, a cyclic phosphazene compound, a phosphorus-containing compound having a phenolic hydroxyl group, a phosphorus-containing compound of an oligomer or a polymer, a phosphazene oligomer, and a phosphine. An acid metal salt, a compound represented by the following general formula, and the like.

上述一般式中,R7、R8及R9各自獨立,為鹵素原子以外之取代基。一般式中,R7、R8以氫原子或碳原子數1~4的烷基為佳,R9以氫原子、可以氰基取代的碳原子數1~4的烷基、2,5-二羥基苯基、或3,5-二-t-丁基-4-經基苯基為佳。 In the above general formula, R 7 , R 8 and R 9 are each independently a substituent other than a halogen atom. In the general formula, R 7 and R 8 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, and R 9 is a hydrogen atom, an alkyl group having 1 to 4 carbon atoms which may be substituted by a cyano group, 2,5- Dihydroxyphenyl or 3,5-di-t-butyl-4-phenylphenyl is preferred.

膦氮烯寡聚物方面,苯氧基膦氮烯化合物有效,且有取代或者無取代的苯氧基膦氮烯寡聚物、或3聚物、4聚物、5聚物的環狀物。 In the case of a phosphazene oligomer, a phenoxyphosphazene compound is effective, and a substituted or unsubstituted phenoxyphosphazene oligomer, or a ring of a 3mer, a 4mer, or a 5mer .

難燃劑之搭配量以固形分換算,相對上述(A)含羧基之樹脂100質量份,以5~50質量份之範圍為佳、尤佳為10~40質量份。 The amount of the flame retardant is preferably in the range of 5 to 50 parts by mass, more preferably 10 to 40 parts by mass, based on 100 parts by mass of the above (A) carboxyl group-containing resin.

本發明之乾膜於載體薄膜(支持體)上具有將本發明之組成物進行塗佈、乾燥而得到的樹脂層。乾膜的形成,除使本發明之組成物用上述有機溶劑稀釋調整為適當黏度外,並以缺角輪塗佈機、刮刀塗佈機、唇口塗佈機、棒式塗佈機、擠壓塗佈機、逆轉塗佈機、轉送輥塗佈機、凹版印刷塗佈機、噴塗機等在載體薄膜上塗佈成均勻厚度。之後,塗佈的組成物一般在50~130℃之溫度進行1~30分鐘乾燥,可形成樹脂層。塗佈膜厚雖未特別限制,一般乾燥後的膜厚為10~150μm、較佳為在20~60μm之範圍適宜選擇。 The dry film of the present invention has a resin layer obtained by coating and drying the composition of the present invention on a carrier film (support). The formation of the dry film is carried out by diluting the composition of the present invention with the above organic solvent to an appropriate viscosity, and using a notch wheel coater, a knife coater, a lip coater, a bar coater, and a squeeze. A press coater, a reverse coater, a transfer roll coater, a gravure coater, a spray coater or the like is applied to a carrier film to a uniform thickness. Thereafter, the applied composition is usually dried at a temperature of 50 to 130 ° C for 1 to 30 minutes to form a resin layer. The coating film thickness is not particularly limited, and the film thickness after drying is generally 10 to 150 μm, preferably 20 to 60 μm.

載體薄膜方面,可使用塑膠薄膜,以使用聚乙烯對苯二甲酸酯等之聚酯薄膜、聚醯亞胺薄膜、聚醯胺醯亞胺薄膜、聚丙烯薄膜、聚苯乙烯薄膜等之塑膠薄膜為佳。載體薄膜的厚度雖未特別限制,一般在10~150μm之範圍適宜選擇。 For the carrier film, a plastic film can be used, and a plastic film such as polyethylene terephthalate, a polyimide film, a polyimide film, a polypropylene film, a polystyrene film, or the like can be used. The film is preferred. The thickness of the carrier film is not particularly limited, and is generally selected in the range of 10 to 150 μm.

於載體薄膜上形成由本發明之組成物所構成的樹脂層後,以防止塵附著於膜的表面等之目的,進一步,以在膜的表面層合可剝離的覆蓋薄膜為佳。可剝離的覆蓋薄膜方面,可使用例如聚乙烯薄膜、聚四氟乙烯薄膜、聚丙烯薄膜、經表面處理的紙等。覆蓋薄膜方面,以將覆蓋薄膜剝離時,比樹脂層與載體薄膜之接著力小者為 宜。 After the resin layer composed of the composition of the present invention is formed on the carrier film, the dust is prevented from adhering to the surface of the film or the like, and further, a cover film which is peelable on the surface of the film is preferably laminated. As the peelable cover film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper, or the like can be used. In the case of covering the film, when the cover film is peeled off, the adhesion force between the resin layer and the carrier film is smaller. should.

又,將本發明之組成物使用例如上述有機溶劑調整為適合塗佈方法的黏度,於基材上以浸漬塗佈法、淋塗法、輥塗法、棒塗佈法、網版印刷法、淋幕塗佈法等之方法塗佈後,藉由在約60~100℃之溫度使組成物中所含之有機溶劑揮發乾燥(暫時乾燥),可形成不剝落之樹脂層。又,將上述組成物塗佈於載體薄膜上、使乾燥,捲取為薄膜的乾膜的場合,藉由以層合機等將本發明之組成物的層與基材接觸而貼合於基材上後,剝離載體薄膜,可形成樹脂層。 Further, the composition of the present invention is adjusted to have a viscosity suitable for the coating method using, for example, the above-mentioned organic solvent, and is subjected to a dip coating method, a shower coating method, a roll coating method, a bar coating method, a screen printing method, or the like on a substrate. After coating by a method such as a curtain coating method, the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C to form a resin layer which does not peel off. Further, when the composition is applied onto a carrier film, dried, and wound into a dry film of a film, the layer of the composition of the present invention is brought into contact with the substrate by a laminator or the like to be bonded to the substrate. After the material is applied, the carrier film is peeled off to form a resin layer.

上述基材方面,除預先形成有電路的印刷配線板或可撓性印刷配線板外,為紙酚、紙環氧基酯、玻璃布環氧基酯、玻璃聚醯亞胺、玻璃布/不織布環氧基酯、玻璃布/紙環氧基酯、合成纖維環氧基酯、利用使用氟.聚乙烯.聚伸苯基醚,聚伸苯基氧化物.氰酸酯等的高頻電路用貼銅層合板等之材質者,可舉例如全部等級(FR-4等)之貼銅層合板、其他聚醯亞胺薄膜、PET薄膜、玻璃基板、陶瓷基板、晶圓板等。 The substrate is a paper phenol, a paper epoxy ester, a glass epoxy ester, a glass polyimide, a glass cloth/non-woven fabric, in addition to a printed wiring board or a flexible printed wiring board in which a circuit is formed in advance. Epoxy esters, glass cloth / paper epoxy esters, synthetic fiber epoxy esters, using fluorine. Polyethylene. Polyphenylene ether, polyphenylene oxide. For the material such as a copper-clad laminate for a high-frequency circuit such as a cyanate ester, for example, a copper-clad laminate of all grades (such as FR-4), another polyimide film, a PET film, a glass substrate, or a ceramic substrate can be used. , wafer board, etc.

塗佈本發明之組成物後進行的揮發乾燥,可使用熱風循環式乾燥爐、IR爐、加熱板、對流烤箱等(使用具備蒸氣之空氣加熱方式的熱源者,使乾燥機內熱風進行逆流接觸之方法及以噴嘴吹支持體之方式)進行。 The volatilization drying after the application of the composition of the present invention can be carried out by using a hot air circulation type drying furnace, an IR furnace, a heating plate, a convection oven or the like (using a heat source having a vapor heating method to make the hot air in the dryer countercurrent contact) The method and the method of blowing the support by a nozzle are performed.

本發明之組成物,藉由例如加熱至約140~180℃之溫度使熱硬化,可形成耐熱性、耐藥品性、耐吸溼 性、密著性、電特性等之諸特性優異的硬化塗膜。 The composition of the present invention is heat-hardened by, for example, heating to a temperature of about 140 to 180 ° C to form heat resistance, chemical resistance, and moisture absorption resistance. A cured coating film excellent in properties such as properties, adhesion, and electrical properties.

又,藉由對塗佈本發明之組成物、使溶劑揮發乾燥後得到的樹脂層,進行曝光(光照射),曝光部(被光照射部分)硬化。具體上,以接觸式或非接觸方式,透過形成有圖型的光罩,選擇性以活性能量線進行曝光、或者以雷射直接曝光機進行直接圖型曝光,將未曝光部以稀鹼水溶液(例如0.3~3wt%碳酸鈉水溶液)進行顯影,形成阻劑圖型。 Moreover, the resin layer obtained by applying the composition of the present invention and evaporating and drying the solvent is exposed (light irradiation), and the exposed portion (light-irradiated portion) is cured. Specifically, in a contact or non-contact manner, through the formation of a pattern mask, selective exposure with an active energy line, or direct pattern exposure by a laser direct exposure machine, the unexposed portion is a dilute aqueous solution (for example, 0.3 to 3 wt% aqueous sodium carbonate solution) is developed to form a resist pattern.

上述活性能量線照射使用的曝光機方面,為搭載高壓水銀燈、超高壓水銀燈、金鹵燈、水銀短弧燈等,且在350~450nm之範圍照射紫外線之裝置即可,進一步,亦可使用直接描繪裝置(例如以來自電腦之CAD數據以直接雷射描繪圖像的雷射直接成像裝置)。直描機之雷射光源方面,使用最大波長在350~410nm之範圍的雷射光,則可為氣體雷射及固體雷射任一。圖像形成用的曝光量因膜厚等而異,一般為20~800mJ/cm2、較佳可為20~600mJ/cm2之範圍內。 The exposure machine used for the active energy ray irradiation is a device that is equipped with a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a metal halide lamp, a mercury short-arc lamp, and the like, and is irradiated with ultraviolet rays in the range of 350 to 450 nm. Further, it may be used directly. A rendering device (eg, a laser direct imaging device that draws images with direct lasers from CAD data from a computer). For the laser source of the direct-drawing machine, laser light with a maximum wavelength of 350-410 nm can be used for both gas laser and solid laser. The amount of exposure for image formation varies depending on the film thickness, etc., and is generally in the range of 20 to 800 mJ/cm 2 , preferably 20 to 600 mJ/cm 2 .

上述顯影方法方面,可使用浸漬法、淋洗法、噴霧法、毛刷法等,顯影液方面,可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等之鹼水溶液。 In the above development method, a dipping method, a rinsing method, a spraying method, a brush method, or the like can be used, and in terms of a developing solution, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium citrate, ammonia can be used. An aqueous solution of an alkali such as an amine.

本發明之組成物適合於印刷配線板或可撓性印刷配線板之焊料光阻或層間絕緣層等之硬化皮膜的形成。又,本發明之組成物藉由作成白色,在照明器具或行 動終端、電腦、電視等之液晶顯示器的背光等中,適用在反射由作為其光源使用的發光二極體(LED)或電致發光(EL)所發出的光之反射板。 The composition of the present invention is suitable for formation of a hard coat film such as a solder resist or an interlayer insulating layer of a printed wiring board or a flexible printed wiring board. Moreover, the composition of the present invention is made into a white, in a lighting fixture or line A backlight of a liquid crystal display such as a mobile terminal, a computer, or a television is applied to a reflector that reflects light emitted from a light-emitting diode (LED) or an electroluminescence (EL) used as a light source.

[實施例] [Examples]

以下將本發明使用實施例更詳細說明。 Hereinafter, the present invention will be described in more detail using an embodiment.

依據下述表中所示之搭配,搭配各成分,並以攪拌機進行預備混合後,以3輥磨機分散、混練,調製各自組成物。又,表中之搭配量為質量份。 According to the combination shown in the following table, each component was mixed and premixed with a stirrer, and then dispersed and kneaded in a 3-roll mill to prepare respective compositions. Also, the amount of matching in the table is parts by mass.

<合成例1(含羧基之樹脂的調製)> <Synthesis Example 1 (Preparation of a carboxyl group-containing resin)>

於裝設有迴流冷卻器、溫度計、氮取代用玻璃管及攪拌機的四口燒瓶,加入甲基丙烯酸42質量份、甲基丙烯酸甲酯43質量份、苯乙烯35質量份、苄基丙烯酸酯35質量份、卡必醇乙酸酯100質量份、月桂基硫醇0.5質量份及偶氮雙異丁腈4質量份,氮氣流下、75℃進行5小時加熱進行聚合反應,得到共聚物溶液(固形分濃度50質量%)。於其中,加入對苯二酚0.05質量份、縮水甘油基甲基丙烯酸酯23質量份及二甲基苄基胺2.0質量份,在80℃進行24小時加成反應後,加入卡必醇乙酸酯35質量份,得到具有芳香環之共聚合樹脂溶液(固形分濃度50質量%)。 In a four-necked flask equipped with a reflux condenser, a thermometer, a glass tube for nitrogen substitution, and a stirrer, 42 parts by mass of methacrylic acid, 43 parts by mass of methyl methacrylate, 35 parts by mass of styrene, and benzyl acrylate 35 were added. Parts by mass, 100 parts by mass of carbitol acetate, 0.5 parts by mass of lauryl mercaptan, and 4 parts by mass of azobisisobutyronitrile, heated under nitrogen flow at 75 ° C for 5 hours to obtain a copolymer solution (solid form) The concentration is 50% by mass). To the mixture, 0.05 parts by mass of hydroquinone, 23 parts by mass of glycidyl methacrylate, and 2.0 parts by mass of dimethylbenzylamine were added, and the addition reaction was carried out at 80 ° C for 24 hours, followed by the addition of carbitol acetic acid. 35 parts by mass of the ester gave a copolymerized resin solution having an aromatic ring (solid content concentration: 50% by mass).

<顯影性(貫穿孔顯影性)> <developability (through hole developability)>

於1.0mm厚的貼銅層合板以 300μm鑽孔器開孔,以規定法進行貫穿孔鍍敷,製作形成有實測值約 260μm之貫穿孔100穴的基板。於該基板,將各實施例及比較例的組成物以網版印刷印刷2次,在80℃之熱風循環式乾燥爐進行30分鐘乾燥,放冷至室溫。將該基板使用30℃之1質量%碳酸鈉水溶液,以噴灑壓力0.2MPa之條件進行90秒鐘顯影、水洗,得到顯影後的基板。將得到的基板之貫穿孔內以目視及顯微鏡觀察,進行貫穿孔內之顯影性的評估。無顯影殘渣場合評估為◎、稍有顯影殘渣場合評估為○、雖有顯影殘渣但貫穿孔貫通場合評估為△,貫穿孔有顯影殘渣而不貫通場合評估為×。 On a 1.0mm thick copper clad laminate 300μm drill hole is opened, and the through hole is plated by a prescribed method, and the formed value is formed. A substrate of 100 holes through a hole of 260 μm. The composition of each of the examples and the comparative examples was printed twice by screen printing on the substrate, and dried in a hot air circulating drying oven at 80 ° C for 30 minutes, and allowed to cool to room temperature. This substrate was developed using a 1% by mass aqueous sodium carbonate solution at 30 ° C for 90 seconds under the conditions of a spray pressure of 0.2 MPa, and washed with water to obtain a substrate after development. The inside of the through-hole of the obtained substrate was visually observed and observed under a microscope, and the developability in the through-hole was evaluated. The case where there is no development residue is evaluated as ◎, the case where the development residue is slightly evaluated is ○, and the development residue is evaluated as △ when the through-hole is penetrated, and the development residue is not penetrated when the through-hole is not penetrated.

<反射率> <reflectance>

將各實施例及比較例的組成物對100mm×150mm之大小且1.6mm厚度之FR-4貼銅層合板,以網版印刷法使膜厚成為40μm之方式,使用100網目聚酯(備爾司製)之版,在Beta(基板全面)印刷圖型。將此等在80℃花30分鐘以熱風循環式乾燥爐進行乾燥。進一步使用印刷配線板用曝光機HMW-680GW(ORC MANUFACTURING CO.,LTD.製),以殘留30mm方形負型圖型之方式,以900mJ/cm2之累積光量進行紫外線曝光。之後,在30℃,以1%之碳酸鈉水溶液作為顯影液,將此等以印刷配線板用顯影機進行60秒鐘顯影,接著在150℃、60分鐘、以熱風循環式乾燥爐進行熱硬化,製作特性試驗用的試驗片。 The composition of each of the examples and the comparative examples was applied to a FR-4 copper-clad laminate having a thickness of 100 mm × 150 mm and a thickness of 1.6 mm by using a screen printing method to have a film thickness of 40 μm, and 100 mesh polyester was used. The version of the system is printed in Beta (full substrate). These were dried at 80 ° C for 30 minutes in a hot air circulating drying oven. Further, ultraviolet light exposure was performed at a cumulative light amount of 900 mJ/cm 2 in a manner of leaving a 30 mm square negative pattern by using an exposure machine HMW-680GW (manufactured by ORC MANUFACTURING CO., LTD.). Thereafter, a 1% sodium carbonate aqueous solution was used as a developing solution at 30 ° C, and these were developed by a developing machine for 60 seconds in a printed wiring board, followed by thermal hardening in a hot air circulating drying oven at 150 ° C for 60 minutes. A test piece for the characteristic test was produced.

將得到的試驗片以色彩色差計CR-400(KONICA MINOLTA SENSING,INC.(股)製)進行測定,Y值之值為85以上之場合評估為○、80以上未達85之場合評估為△,未達80之場合評估為×。 The obtained test piece was measured by a color difference meter CR-400 (KONICA MINOLTA SENSING, INC.), and when the value of the Y value was 85 or more, it was evaluated as ○, and when it was 80 or more, the evaluation was △. If the number is less than 80, it is evaluated as ×.

<焊料耐熱性> <Solder heat resistance>

將塗佈有松香系助熔劑的試驗片在預先設定為260℃的焊料槽,30秒浸漬1次,以改性醇將助熔劑洗淨後,以目視評估阻劑層的剝離。無剝離的場合評估為○、產生若干剝離的場合評估為△,顯著有剝離的場合評估為×。 The test piece coated with the rosin-based flux was immersed once in a solder bath set at 260 ° C for 30 seconds, and the flux was washed with a modified alcohol, and the peeling of the resist layer was visually evaluated. The case where no peeling occurred was evaluated as ○, the case where some peeling occurred was evaluated as Δ, and the case where peeling was remarkably marked was evaluated as ×.

上述各評估結果如下述表中所示。 The above evaluation results are shown in the following table.

※1)合成例1所得到的苯乙烯所衍生的含羧基之樹脂(羧基當量=960)※2)以DPM(二丙二醇單甲基醚)稀釋為44質量%(DICEL化學工業(股)製)(含羧基之樹脂,羧基當量 =806)※3)雙酚A型環氧樹脂,三菱化學(股)製(在20℃為液狀,環氧基當量=185)※4)日產化學工業(股)製(在40℃為粉體(固體狀),環氧基當量=100)※5)聯苯基型環氧樹脂(三菱化學(股)製)(在40℃為粉體(固體狀),環氧基當量=182)※6)甲酚酚醛清漆型環氧樹脂(DIC(股)製)(在40℃為固體狀,環氧基當量=210)※7)石原產業(股)製※8)昭和電工(股)製※9)膦酸鋁鹽,Clariant Japan(股)製※10)單醯基膦氧化物系光聚合起始劑、Lucirin TPO(2,4,6-三甲基苯甲醯基-二苯基-膦氧化物),BASF Japan(股)製※11)雙醯基膦氧化物系光聚合起始劑、IRGACURE819(雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物),BASF Japan(股)製※12)咪唑系化合物、四國化成工業(股)製※13)二乙二醇單甲基醚乙酸酯※14)芳香族烴(SOLVESSO 150)※15)二季戊四醇六丙烯酸酯、共榮社化學(股)製※16)乾燥狀態(固形分換算)中的組成物中之(A)含羧基之樹脂所含之羧基之當量(數)與(B)環氧基系熱 硬化性成分所含之環氧基之當量(數)之比(環氧基數/羧基數)。 *1) The carboxyl group-containing resin (carboxy equivalent = 960)*2) derived from the styrene obtained in Synthesis Example 1 was diluted with DPM (dipropylene glycol monomethyl ether) to 44% by mass (DICEL Chemical Industry Co., Ltd.) (Resin containing carboxyl group, carboxyl equivalent = 806) *3) Bisphenol A type epoxy resin, manufactured by Mitsubishi Chemical Corporation (liquid at 20 ° C, epoxy equivalent = 185) *4) Nissan Chemical Industry (stock) system (powder (solid) at 40 ° C, epoxy equivalent = 100) * 5) biphenyl type epoxy resin (manufactured by Mitsubishi Chemical Corporation) ( powder at 40 ° C (solid) (form)), epoxy equivalent = 182) * 6) cresol novolac type epoxy resin (made by DIC) (solid at 40 ° C, epoxy equivalent = 210) * 7) Ishihara Industry Co., Ltd. *8) Showa Denko Electric Co., Ltd. ※9) Aluminum phosphonate, manufactured by Clariant Japan Co., Ltd. *10) Monodecylphosphine oxide photopolymerization initiator, Lucirin TPO (2,4,6- Trimethyl benzhydryl-diphenyl-phosphine oxide), manufactured by BASF Japan Co., Ltd. *11) bis-decylphosphine oxide photopolymerization initiator, IRGACURE 819 (double (2, 4, 6-three) Methyl benzhydryl)-phenylphosphine oxide, manufactured by BASF Japan Co., Ltd. *12) Imidazole compound, Shikoku Chemical Industry Co., Ltd.*13) Ethylene glycol monomethyl ether acetate ※14) Aromatic hydrocarbons (SOLVESSO 150) ※15) Dipentaerythritol hexaacrylate, Kyoeisha Chemical Co., Ltd. *16) Composition in dry state (solid content conversion) The ratio of the equivalent (number) of the carboxyl group contained in the (A) carboxyl group-containing resin to the equivalent (number) of the epoxy group contained in the epoxy group thermosetting component (the number of epoxy groups / carboxyl group) number).

由上述表中之結果,可知各實施例的組成物中,即使含有氧化鈦之場合,不產生貫穿孔中的顯影殘渣且焊料耐熱性亦為良好。藉由此,確認根據本發明,可得到確保良好的貫穿孔顯影性同時具有高反射率之感光性樹脂組成物。 From the results of the above-mentioned table, it is understood that the composition of each of the examples does not cause development residue in the through-holes even when titanium oxide is contained, and the solder heat resistance is also good. As a result, according to the present invention, it was confirmed that a photosensitive resin composition having good through-hole developability and high reflectance can be obtained.

Claims (7)

一種感光性樹脂組成物,其係含有(A)含羧基之樹脂、(B)環氧系熱硬化性成分、(C)無機充填物、及(D)光聚合起始劑之感光性樹脂組成物,其特徵係相對前述(A)含羧基之樹脂所含的羧基之1當量,前述(B)環氧系熱硬化性成分所含的環氧基的當量為1.0以下,且前述(C)無機充填物含有氧化鈦。 A photosensitive resin composition comprising (A) a carboxyl group-containing resin, (B) an epoxy thermosetting component, (C) an inorganic filler, and (D) a photopolymerization initiator And the equivalent of the epoxy group contained in the (B) epoxy group-containing thermosetting component is 1.0 or less, and the above (C) The inorganic filler contains titanium oxide. 如請求項1記載之感光性樹脂組成物,其中,前述(B)環氧系熱硬化性成分含有在20℃為液狀之環氧樹脂及在40℃為固體狀之固形環氧樹脂中之至少一種以上。 The photosensitive resin composition according to claim 1, wherein the (B) epoxy-based thermosetting component contains an epoxy resin which is liquid at 20 ° C and a solid epoxy resin which is solid at 40 ° C. At least one or more. 如請求項1或2記載之感光性樹脂組成物,其中,前述(A)含羧基之樹脂所含的羧基的當量與前述(B)環氧系熱硬化性成分所含的環氧基的當量之比為0.8以下。 The photosensitive resin composition according to claim 1 or 2, wherein the equivalent of the carboxyl group contained in the (A) carboxyl group-containing resin is equivalent to the epoxy group contained in the (B) epoxy-based thermosetting component. The ratio is 0.8 or less. 如請求項1~3中任一項記載之感光性樹脂組成物,其中,前述(A)含羧基之樹脂為苯乙烯或由苯乙烯衍生物所衍生者。 The photosensitive resin composition according to any one of claims 1 to 3, wherein the (A) carboxyl group-containing resin is styrene or a styrene derivative. 一種乾膜,其特徵係具有於載體薄膜上塗佈請求項1~4中任一項記載之感光性樹脂組成物、使乾燥而得到的樹脂層。 A dry film obtained by applying the photosensitive resin composition according to any one of claims 1 to 4 to a carrier film and drying the obtained resin layer. 一種硬化物,其特徵係藉由使請求項1~4中任一項記載之感光性樹脂組成物、或請求項5記載之乾膜的前述樹脂層進行光照射而硬化所得到。 A cured product obtained by curing the photosensitive resin composition according to any one of claims 1 to 4 or the resin layer of the dry film described in claim 5 by light irradiation. 一種印刷配線板,其特徵係具有請求項6記載之硬化物。 A printed wiring board characterized by having the cured product described in claim 6.
TW103141385A 2013-12-02 2014-11-28 A photosensitive resin composition, a dry film, a hardened product and a printed wiring board TWI566035B (en)

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