TW201513935A - Noble metal catalyst and controlled potential electrolysis gas sensor - Google Patents

Noble metal catalyst and controlled potential electrolysis gas sensor Download PDF

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TW201513935A
TW201513935A TW103121133A TW103121133A TW201513935A TW 201513935 A TW201513935 A TW 201513935A TW 103121133 A TW103121133 A TW 103121133A TW 103121133 A TW103121133 A TW 103121133A TW 201513935 A TW201513935 A TW 201513935A
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electrode
metal catalyst
gold
gas
noble metal
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TW103121133A
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Chise MINAGOSHI
Toru Maekawa
Kenji Ishibashi
Hiroshi Miyazaki
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New Cosmos Electric Co
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Priority claimed from JP2013127648A external-priority patent/JP6326670B2/en
Priority claimed from JP2013127650A external-priority patent/JP6233562B2/en
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Publication of TW201513935A publication Critical patent/TW201513935A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403Cells and electrode assemblies
    • G01N27/404Cells with anode, cathode and cell electrolyte on the same side of a permeable membrane which separates them from the sample fluid, e.g. Clark-type oxygen sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/308Electrodes, e.g. test electrodes; Half-cells at least partially made of carbon

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Abstract

A noble metal catalyst causing metal nanoparticles to be supported on carbon particles acting as a carrier, said metal nanoparticles having an average particle diameter of no more than the average particle diameter of the carbon particles. The noble metal catalyst is used for each electrode in a constant potential electrolyte gas sensor (X) comprising: a working electrode (11), as a gas electrode that detects gas, that causes detected gas to chemically react; a counter electrode (12) for the working electrode (11); and a reference electrode (13) controlling the potential of the working electrode. Said electrodes face an electrolyte housing section (31) of an electrolytic cell (30) housing electrolyte (20).

Description

貴金屬觸媒及定電位電解式氣體感測器 Precious metal catalyst and constant potential electrolytic gas sensor

本發明係有關定電位電解式氣體感測器中所使用之貴金屬觸媒、及該定電位電解式氣體感測器,該定電位電解式氣體感測器中,在容納電解液之電解槽的電解液容納部臨近,具備:作用電極,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極,與前述作用電極相對;及參照電極,控制前述作用電極的電位。 The present invention relates to a noble metal catalyst used in a constant potential electrolytic gas sensor, and the constant potential electrolytic gas sensor, in the constant potential electrolytic gas sensor, in an electrolytic cell containing an electrolyte The electrolyte storage portion is adjacent to each other, and includes: a working electrode for electrochemically reacting the gas to be detected as a gas electrode for detecting a gas; and a counter electrode opposite to the working electrode; and a reference electrode for controlling the potential of the working electrode.

習知之定電位電解式氣體感測器,係構成為將電極設置於緊密容納著電解液之電解槽的電解液容納部內的臨近,而例如作為電極,設有:作用電極,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極,與作用電極相對;及參照電極,控制作用電極的電位;等3個電極,此外還連接有:電解槽,容納與該些電極接觸自如之電解液;及恆電位器(potentiostat)電路,設定各電極的電位等等。前述3個電極的材料,是在具有疏水性之透氣性多孔質PTFE膜上塗佈白金或金、鈀等貴 金屬觸媒等而成,而電解液以往則使用硫酸或磷酸等酸性水溶液等。 A conventional constant-potential electrolytic gas sensor is configured such that an electrode is disposed adjacent to an electrolyte containing portion of an electrolytic cell in which an electrolytic solution is closely accommodated, and for example, as an electrode, a working electrode is provided to cause a gas to be detected An electrochemical reaction occurs as a gas electrode for detecting a gas; and a counter electrode is opposite to the working electrode; and a reference electrode controls the potential of the working electrode; and three electrodes are connected, and an electrolytic cell is also connected to accommodate the electrodes Contact with the electrolyte; and potentiostat circuit, set the potential of each electrode and so on. The material of the above three electrodes is coated with platinum, gold, palladium, etc. on a hydrophobic gas permeable porous PTFE film. A metal catalyst or the like is used, and an acidic aqueous solution such as sulfuric acid or phosphoric acid is used in the electrolyte.

此外,定電位電解式氣體感測器,係相對於周圍環境變化而言將作用電極的電位控制以維持一定,藉此在作用電極與對極之間產生和周圍環境變化相當之電流。又,作用電極的電位不變化,或氧化還原電位會因氣體種類而有不同,藉由利用這一特性,便可依恆電位器電路的設定電位不同來選擇性地偵測氣體。此外,藉由改變氣體電極所使用之觸媒,能使其對於目的氣體具有高選擇性。 Further, the constant-potential electrolytic gas sensor controls the potential of the working electrode to be constant with respect to changes in the surrounding environment, thereby generating a current equivalent to a change in the surrounding environment between the working electrode and the counter electrode. Further, the potential of the working electrode does not change, or the oxidation-reduction potential varies depending on the type of gas. By utilizing this characteristic, the gas can be selectively detected depending on the set potential of the potentiostat circuit. Further, by changing the catalyst used for the gas electrode, it is possible to have high selectivity to the target gas.

塗佈於電極之貴金屬觸媒,例如會使用使數百nm左右的金微粒子擔持於粒徑數十nm的碳而成之物。為了像這樣使金微粒子擔持於碳,例如會使用浸漬擔持法。該浸漬擔持法中,當使貴金屬粒子擔持於擔體的情形下,會將該擔體浸於金屬鹽的水溶液中,使金屬成分吸附於擔體表面,並進行乾燥、燒成、還原。以該浸漬擔持法製作出金附著碳後,塗佈於多孔質PTFE膜以製作出電極。 The noble metal catalyst applied to the electrode is, for example, a material in which gold fine particles of several hundreds of nm or so are supported on carbon having a particle diameter of several tens of nm. In order to hold the gold fine particles on the carbon as described above, for example, an immersion holding method is used. In the immersion holding method, when the noble metal particles are supported on the support, the support is immersed in an aqueous solution of the metal salt, and the metal component is adsorbed on the surface of the support, and dried, calcined, and reduced. . After the gold-adhering carbon was produced by the immersion-holding method, it was applied to a porous PTFE film to prepare an electrode.

另,本發明中作為習知技術之上述定電位電解式氣體感測器,係為一般性的技術,故無揭示專利文獻等習知技術文獻。 Further, the above-described constant potential electrolytic gas sensor which is a conventional technique in the present invention is a general technique, and thus a conventional technical document such as a patent document is not disclosed.

以上述手法製作出的金附著碳,金微粒子的粒徑係比擔體即碳的粒徑還大,在水溶液中有容易凝集的傾向,故難以使金微粒子均一地分散。若將像這樣金微粒子在不均一狀態下製作出之金附著碳使用作為貴金屬觸媒,則會對氣體偵測性能造成不一致等影響。 The gold-attached carbon produced by the above method has a particle diameter larger than that of the carrier, that is, carbon, and tends to aggregate in an aqueous solution. Therefore, it is difficult to uniformly disperse the gold fine particles. When the gold-attached carbon produced by the gold fine particles in a non-uniform state is used as the noble metal catalyst, the gas detection performance may be inconsistent.

此外,浸漬擔持法中燒成溫度係訂為600℃左右,但以碳為擔體的情形下,若燒成溫度如此高溫,則擔體即碳恐有燃燒之虞。 Further, in the immersion holding method, the firing temperature is set to about 600 ° C. However, when carbon is used as the carrier, if the firing temperature is so high, the carbon which is the carrier may be burned.

是故,本發明之目的在於提供一種貴金屬觸媒,當使用作為定電位電解式氣體感測器中的前述各電極之貴金屬觸媒時,氣體偵測性能不易發生不一致;及提供一種具備貴金屬觸媒之定電位電解式氣體感測器,其氣體偵測性能不易發生不一致,且製作時能將燒成溫度抑制得較低。 Therefore, the object of the present invention is to provide a noble metal catalyst which is inconsistent in gas detection performance when using a noble metal catalyst as the above-mentioned electrodes in a constant potential electrolytic gas sensor; and provides a precious metal contact The constant-potential electrolysis gas sensor of the medium is incapable of inconsistent gas detection performance, and can suppress the firing temperature to be low during production.

為達成上述目的,本發明之貴金屬觸媒的第一特徵構成在於,使作為擔體之碳粉末擔持金奈米粒子,該金奈米粒子係具有前述碳粉末的平均粒徑以下之平均粒徑。 In order to achieve the above object, the noble metal catalyst of the present invention is characterized in that carbon powder as a support is used to hold gold nanoparticles, and the gold nanoparticles have an average particle diameter of the carbon powder or less. The average particle size.

本構成之貴金屬觸媒,藉由使其擔持具有碳粉末的平均粒徑以下之平均粒徑的金奈米粒子,能夠使金奈米粒子在分散的狀態下擔持於擔體即碳,故能使金奈米粒子的分散程度成為大致均一的狀態。因此,若將這樣的 金擔持碳例如使用作為氣體感測器中的貴金屬觸媒,則便能將氣體偵測性能發生不一致這種情況防患於未然。 In the noble metal catalyst of the present configuration, by holding the gold nanoparticles having an average particle diameter equal to or less than the average particle diameter of the carbon powder, the gold nanoparticles can be supported on the carbon which is a carrier in a dispersed state. Therefore, the degree of dispersion of the gold nanoparticles can be made to be substantially uniform. So if you like this Gold-supporting carbon, for example, can be used as a noble metal catalyst in a gas sensor to prevent inconsistencies in gas detection performance.

另,本說明書中所稱「擔持」是使具有碳粉末的平均粒徑以下之平均粒徑的金奈米粒子附著,以便區別習知金附著碳是由具有比碳粉末的平均粒徑還大之平均粒徑的金奈米粒子附著而成。 In addition, the term "holding" as used in the present specification is to attach gold nanoparticles having an average particle diameter below the average particle diameter of the carbon powder so as to distinguish the conventional gold-attached carbon from the average particle having a specific carbon powder. The gold nanoparticles with an average diameter of a large diameter are attached.

本發明之貴金屬觸媒的第二特徵構成在於,前述金奈米粒子,係5~50nm的粒子以5~50重量%被擔持。 A second characteristic feature of the noble metal catalyst of the present invention is that the gold nanoparticles are supported by 5 to 50% by weight of 5 to 50% by weight.

按照本構成,能使金奈米粒子以良好地分散於碳粉末的狀態下擔持於碳粉末。 According to this configuration, the gold nanoparticles can be supported on the carbon powder in a state of being well dispersed in the carbon powder.

此外,後述實施例中,係將各電極所使用之金擔持碳中金奈米粒子的含有量從5~50重量%做各種變更,針對各者製作出定電位電解式氣體感測器。其結果,只要該金奈米粒子的添加量為5重量%以上便能獲得穩定的氣體靈敏度,鑑於金擔持碳的製造成本,認為金擔持碳中金奈米粒子的添加量較佳是抑制至50重量%為止。 Further, in the examples described later, the content of the gold nanoparticles in the gold-supporting carbon used in each electrode was changed from 5 to 50% by weight, and a constant potential electrolytic gas sensor was produced for each. As a result, as long as the amount of the gold nanoparticles added is 5% by weight or more, stable gas sensitivity can be obtained, and in view of the manufacturing cost of gold-supporting carbon, it is considered that the amount of gold nanoparticles in the gold-supporting carbon is preferably It is suppressed to 50% by weight.

本發明之貴金屬觸媒的第三特徵構成在於,將前述碳粉末的粒徑訂為5~300nm之範圍。 A third characteristic feature of the noble metal catalyst of the present invention is that the particle diameter of the carbon powder is set to be in the range of 5 to 300 nm.

本構成中,能夠將碳粉末的粒徑設定成5~300nm範圍中的任意粒徑,並將金奈米粒子的粒徑設定為該任意粒徑以下。具體而言,例如能夠將碳黑的粒度調整成具有這樣的粒徑範圍來使用。 In the present configuration, the particle diameter of the carbon powder can be set to any particle diameter in the range of 5 to 300 nm, and the particle diameter of the gold nanoparticles can be set to be equal to or less than the arbitrary particle diameter. Specifically, for example, the particle size of carbon black can be adjusted to have such a particle size range and used.

本發明之定電位電解式氣體感測器的第一特 徵構成在於,定電位電解式氣體感測器中,在容納電解液之電解槽的電解液容納部臨近,具備:作用電極,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極,與前述作用電極相對;及參照電極,控制前述作用電極的電位;其中,作為前述各電極,係具備第一~三特徵構成任一項所述之貴金屬觸媒。 The first special of the constant potential electrolytic gas sensor of the present invention In the constant potential electrolytic gas sensor, the electrolyte storage unit of the electrolytic cell containing the electrolytic solution is adjacent to each other, and includes a working electrode for electrochemically reacting the detected gas to serve as a gas electrode for detecting the gas. And the counter electrode is opposed to the working electrode; and the reference electrode controls the potential of the working electrode; and each of the electrodes includes the noble metal catalyst according to any one of the first to third features.

本構成之貴金屬觸媒,能夠使金奈米粒子在分散的狀態下擔持於擔體即碳,故能使金奈米粒子的分散程度成為大致均一的狀態。因此,若將這樣的金擔持碳使用作為貴金屬觸媒,則便能將定電位電解式氣體感測器中氣體偵測性能發生不一致這種情況防患於未然。 In the noble metal catalyst of the present configuration, the gold nanoparticles can be supported on the carbon which is a carrier in a dispersed state, so that the degree of dispersion of the gold nanoparticles can be made substantially uniform. Therefore, if such a gold-bearing carbon is used as a noble metal catalyst, it is possible to prevent the gas detection performance from being inconsistent in the constant-potential electrolytic gas sensor.

本發明之定電位電解式氣體感測器的第二特徵構成在於,前述貴金屬觸媒,係進行下述步驟而製作出:碳粉末添加工程,於溶媒中添加碳粉末並攪拌;及金奈米粒子添加工程,添加分散有金奈米粒子之膠體(colloid)溶液;及乾燥工程,在維持前述溶媒的沸點以下之狀態下使其乾燥;及燒成工程,將乾燥而得到之擔持有金奈米粒子的碳粉末以250~450℃進行燒成。 According to a second aspect of the present invention, in the constant-potential electrolytic gas sensor, the noble metal catalyst is produced by the following steps: a carbon powder addition process, adding carbon powder to a solvent and stirring; and gold Nanoparticle addition engineering, adding a colloid solution in which gold nanoparticles are dispersed; drying and drying, maintaining the boiling point of the solvent below the boiling point; and baking, drying and obtaining The carbon powder having the gold nanoparticles is fired at 250 to 450 °C.

本發明之定電位電解式氣體感測器,能夠將使金奈米粒子在分散的狀態下予以擔持之金擔持碳,使用作為貴金屬觸媒。該金擔持碳係在製作過程中使用膠體溶液,故能夠使金奈米粒子在分散的狀態下擔持於擔體即碳,故能使金奈米粒子的分散程度成為大致均一的狀態。因此,若將這樣的金擔持碳使用作為貴金屬觸媒,則便能 將定電位電解式氣體感測器中氣體偵測性能發生不一致這種情況防患於未然。 In the constant potential electrolytic gas sensor of the present invention, carbon supported by gold nanoparticles in a dispersed state can be used as a noble metal catalyst. Since the gold-supporting carbon system uses a colloidal solution in the production process, the gold nanoparticles can be supported on the carbon which is a carrier in a dispersed state, so that the degree of dispersion of the gold nanoparticles can be made substantially uniform. Therefore, if such gold is used as a precious metal catalyst, then Inconsistent gas detection performance in a constant potential electrolytic gas sensor is prevented.

此外,本構成之金擔持碳,在製作過程中能將燒成溫度抑制在250~450℃,故擔體即碳不會有燃燒之虞。 In addition, the gold of this structure can support the carbon, and the firing temperature can be suppressed to 250 to 450 ° C during the production process, so that the carbon, which is the support, does not burn.

本發明之定電位電解式氣體感測器的第三特徵構成在於,前述碳粉末添加工程中係添加界面活性劑。 A third feature of the constant potential electrolytic gas sensor of the present invention is that a surfactant is added to the carbon powder addition process.

按照本構成,藉由添加界面活性劑,能夠提升碳對於溶媒的分散性。 According to this configuration, by adding a surfactant, the dispersibility of carbon with respect to the solvent can be improved.

A‧‧‧碳粉末添加工程 A‧‧‧carbon powder addition project

B‧‧‧金奈米粒子添加工程 B‧‧‧Ginnel Particle Addition Project

C‧‧‧乾燥工程 C‧‧‧Drying Engineering

D‧‧‧燒成工程 D‧‧‧Burning Engineering

X‧‧‧定電位電解式氣體感測器 X‧‧‧Constant potential electrolytic gas sensor

11‧‧‧作用電極 11‧‧‧Working electrode

12‧‧‧對極 12‧‧‧ pole

13‧‧‧參照電極 13‧‧‧ reference electrode

20‧‧‧電解液 20‧‧‧ electrolyte

30‧‧‧電解槽 30‧‧‧electrolyzer

31‧‧‧電解液容納部 31‧‧‧Electrolyte accommodation

[圖1]本發明之定電位電解式氣體感測器示意截面圖。 Fig. 1 is a schematic cross-sectional view of a constant potential electrolytic gas sensor of the present invention.

[圖2]金擔持碳的製作概要示意流程圖。 [Fig. 2] A schematic flow chart showing the production of gold-bearing carbon.

[圖3]金奈米粒子的粒度分布示意圖表。 [Fig. 3] Schematic diagram of particle size distribution of the gold nanoparticles.

[圖4]金擔持碳的電子顯微鏡照片圖(本發明例)。 Fig. 4 is an electron micrograph of gold-bearing carbon (an example of the present invention).

[圖5]金擔持碳的電子顯微鏡照片圖(比較例)。 Fig. 5 is an electron micrograph of a gold-bearing carbon (comparative example).

[圖6]定電位電解式氣體感測器中,對於膦(phosphine)氣體1ppm、0.5ppm進行氣體靈敏度測定之結果示意圖表。 Fig. 6 is a graph showing the results of gas sensitivity measurement of phosphine gas at 1 ppm and 0.5 ppm in a constant potential electrolytic gas sensor.

[圖7]定電位電解式氣體感測器中,對於矽烷(silane)、膦、鍺烷(germane)、胂(arsine)、二硼烷(diborane)1ppm進行氣體靈敏度測定之結果示意圖表。 Fig. 7 is a graph showing the results of gas sensitivity measurement of 1 ppm of silane, phosphine, germane, arsine, and diborane in a constant potential electrolytic gas sensor.

以下依據圖面,說明本發明之實施形態。 Embodiments of the present invention will be described below based on the drawings.

本發明之貴金屬觸媒,係使用作為定電位電解式氣體感測器中各電極的貴金屬觸媒。 The noble metal catalyst of the present invention uses a noble metal catalyst as each electrode in a constant potential electrolytic gas sensor.

該貴金屬觸媒,使作為擔體之碳粉末擔持金奈米粒子,該金奈米粒子係具有前述碳粉末的平均粒徑以下之平均粒徑。 In the noble metal catalyst, the carbon powder as the support is used to hold the gold nanoparticle, and the golden nanoparticle has an average particle diameter equal to or less than the average particle diameter of the carbon powder.

如圖1所示,定電位電解式氣體感測器X中,在容納電解液20之電解槽30的電解液容納部31臨近,具備:作用電極11,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極12,與該作用電極11相對;及參照電極13,控制作用電極的電位。 As shown in FIG. 1, in the constant-potential electrolytic gas sensor X, the electrolyte solution accommodating portion 31 of the electrolytic cell 30 containing the electrolytic solution 20 is adjacent to each other, and includes a working electrode 11 for electrochemically reacting the gas to be detected. As a gas electrode for detecting a gas; and a counter electrode 12 opposed to the working electrode 11, and a reference electrode 13, a potential of the working electrode is controlled.

作用電極11、對極12及參照電極13,是在具有疏水性之多孔質的氣體透過膜14表面,將藉由周知電極材料所製作之膏予以塗佈、燒成而形成。作用電極11,與對極12及參照電極13係相向配置。 The working electrode 11, the counter electrode 12, and the reference electrode 13 are formed by coating and baking a paste made of a known electrode material on the surface of the porous gas permeable membrane 14 having a hydrophobic property. The working electrode 11 is disposed to face the counter electrode 12 and the reference electrode 13 .

電解槽30係形成有朝側方開口之開口部32以便形成氣體導通部33。氣體透過膜14設有二片,一方的氣體透過膜14上配設有作用電極11,另一方的氣體透過膜14上配設有對極12及參照電極13。配設於作用電極11側之氣體透過膜14,是以臨近開口部32的方式裝配於電解槽30。被偵測氣體藉由氣體導通部33而導入,在作用電極11上反應。 The electrolytic cell 30 is formed with an opening portion 32 that opens to the side to form a gas conducting portion 33. Two gas permeable membranes 14 are provided, one of the gas permeable membranes 14 is provided with the working electrode 11, and the other gas permeable membrane 14 is provided with the counter electrode 12 and the reference electrode 13. The gas permeable membrane 14 disposed on the side of the working electrode 11 is attached to the electrolytic cell 30 so as to be adjacent to the opening 32. The detected gas is introduced through the gas conduction portion 33 and reacted on the working electrode 11.

各個氣體透過膜14與O型環15係藉由蓋構件16而被固定。在電解槽30的底面,形成有電解液注入口34以進行電解液20的注入等維護。 Each of the gas permeable membranes 14 and the O-ring 15 is fixed by the cover member 16. An electrolyte injection port 34 is formed on the bottom surface of the electrolytic cell 30 to perform maintenance such as injection of the electrolytic solution 20.

這樣的定電位電解式氣體感測器X,會與氣體偵測電路(未圖示)連接而用作為氣體偵測裝置,該氣體偵測電路具備:電流測定部,可自由偵測因被偵測氣體的反應而在作用電極11上產生之電子所造成的電流;及電位控制部,可自由控制作用電極11的電位。本發明之定電位電解式氣體感測器X,例如用於偵測矽烷、膦、鍺烷、胂、二硼烷等氫化物氣體。 Such a constant potential electrolytic gas sensor X is connected to a gas detecting circuit (not shown) and used as a gas detecting device. The gas detecting circuit is provided with a current measuring unit, which is freely detectable due to being detected. The current caused by the electrons generated on the working electrode 11 by the reaction of the gas is measured; and the potential control unit can freely control the potential of the working electrode 11. The constant potential electrolytic gas sensor X of the present invention is used, for example, to detect a hydride gas such as decane, phosphine, decane, hydrazine or diborane.

如圖2所示,本發明之定電位電解式氣體感測器X中,各電極10具備貴金屬觸媒,該貴金屬觸媒,係進行下述步驟而製作出:碳粉末添加工程A,於溶媒中添加碳粉末並攪拌;及金奈米粒子添加工程B,添加分散有金奈米粒子之膠體溶液;及乾燥工程C,在維持前述溶媒的沸點以下之狀態下使其乾燥;及燒成工程D,將乾燥而得到之擔持有金奈米粒子的碳粉末以250~450℃進行燒成。 As shown in Fig. 2, in the constant potential electrolytic gas sensor X of the present invention, each electrode 10 is provided with a noble metal catalyst, and the noble metal catalyst is produced by the following steps: carbon powder addition engineering A, a carbon powder is added to the solvent and stirred; and the gold nanoparticle is added to the engineering B to add a colloidal solution in which the gold nanoparticles are dispersed; and the drying process C is dried while maintaining the boiling point of the solvent; and burning In the process D, the carbon powder obtained by drying and holding the gold nanoparticles is baked at 250 to 450 °C.

碳粉末添加工程A中,將碳粉末秤量規定量,加入溶媒即水並使其充分攪拌。 In the carbon powder addition project A, the carbon powder was weighed to a predetermined amount, and water was added as a solvent, and the mixture was sufficiently stirred.

碳粉末能夠使用周知之碳粉末,例如碳黑(粒徑5~300nm左右),特別是使用將乙炔氣體熱分解而得之乙炔碳黑較佳,但並不限定於此。 As the carbon powder, a known carbon powder such as carbon black (having a particle diameter of about 5 to 300 nm) can be used, and in particular, acetylene black obtained by thermally decomposing an acetylene gas is preferably used, but it is not limited thereto.

本工程亦可添加界面活性劑來進行。藉由添 加該界面活性劑,能夠提升碳對於溶媒的分散性。界面活性劑能夠使用陰離子(anion)系、陽離子(cation)系、非離子(nonion)系、甜菜鹼(betaine)系界面活性劑的任一種。為了提升碳對於溶媒的分散性,除了添加界面活性劑外,例如當溶媒為水的情形下亦可進行在碳表面附上羥基以提高親水性這類的表面處理,或是亦可進行超音波處理以作為前置處理。 This project can also be carried out by adding a surfactant. By adding The addition of the surfactant enhances the dispersibility of the carbon for the solvent. As the surfactant, any of an anion type, a cation type, a nonion type, and a betaine type surfactant can be used. In order to improve the dispersibility of carbon to the solvent, in addition to adding a surfactant, for example, when the solvent is water, surface treatment may be performed by attaching a hydroxyl group to the carbon surface to improve hydrophilicity, or may also perform ultrasonic treatment. Processed as pre-processing.

金奈米粒子添加工程B中,係在碳粉末添加工程A所得到之溶液中,添加分散有金奈米粒子之膠體溶液。 In the gold nanoparticle addition engineering B, a colloidal solution in which gold nanoparticles are dispersed is added to a solution obtained by carbon powder addition engineering A.

分散有金奈米粒子之膠體溶液,係呈具有上述粒度之金奈米粒子分散於溶液中之狀態。該膠體溶液中,視必要亦可添加保護劑等添加劑。 The colloidal solution in which the gold nanoparticles are dispersed is in a state in which the gold nanoparticles having the above particle size are dispersed in the solution. In the colloidal solution, an additive such as a protective agent may be added as necessary.

金膠體溶液,例如能夠在四氯金酸三水合物(hydrogen tetrachloroaurate(III))等氯化金酸溶液中加入檸檬酸鹽溶液以作為還原劑並加熱,藉此利用將金屬離子還原並成為膠體之溶液內還原反應而製作出來,但並不限定於這類手法。該方法中,藉由增減對於氯化金酸之還原劑添加量,便能使金膠體粒子的大小變化。金奈米粒子可為具有約5~50nm左右粒徑之粒子,但並不限定於該範圍。在此情形下,可將粒度分布做成5~50nm粒子的比例為90重量%以上。 A gold colloid solution, for example, can be added to a chlorinated gold acid solution such as hydrogen tetrachloroaurate (III) to be used as a reducing agent and heated, thereby reducing metal ions and forming a colloid It is produced by a reduction reaction in a solution, but is not limited to such a method. In this method, the size of the gold colloidal particles can be changed by increasing or decreasing the amount of the reducing agent added to the gold chloride acid. The gold nanoparticles may be particles having a particle diameter of about 5 to 50 nm, but are not limited to this range. In this case, the particle size distribution can be made into a ratio of 5 to 50 nm particles of 90% by weight or more.

乾燥工程C中,將金奈米粒子添加工程B所得到之溶液,在維持溶媒(水)的沸點以下之狀態下使其 乾燥。設定成為溶媒的沸點以下之溫度並無特別限定,但當溶媒為水時,可訂為80~100℃左右。乾燥的手法例如能夠運用減壓乾燥、真空乾燥、抽氣乾燥、熱風乾燥等周知手法。該些乾燥手法中的乾燥條件,可運用周知條件。 In the drying process C, the gold nanoparticle is added to the solution obtained in the engineering B, and the solution is maintained at a temperature lower than the boiling point of the solvent (water). dry. The temperature below the boiling point of the solvent is not particularly limited, but when the solvent is water, it can be set to about 80 to 100 °C. The drying method can be, for example, a known method such as vacuum drying, vacuum drying, air drying, or hot air drying. Known conditions can be applied to the drying conditions in the drying methods.

燒成工程D中,將乾燥得到的粉末以250~450℃進行燒成。 In the firing process D, the dried powder is fired at 250 to 450 °C.

本實施形態中的燒成溫度,是訂為在空氣環境、大氣壓下不會促進碳氧化之溫度,且所使用之界面活性劑等有機物會蒸發之溫度(250~450℃)。 The firing temperature in the present embodiment is a temperature (250 to 450 ° C) at which the temperature at which carbon oxidation does not occur in an air atmosphere or atmospheric pressure is promoted, and an organic substance such as a surfactant used is evaporated.

燒成時間可適當設定為界面活性劑、膠體的保護劑等藉由蒸發、昇華、熱分解而完全消失所需之時間。因此,可視欲燒成之粉體量來隨時縮短、延長燒成時間。但,考量因金奈米粒子的晶粒成長、燒結所造成之活性降低等,例如亦可將該燒成時間的上限訂為3小時左右。此外,亦可不設定燒成時間,而是設定成當達到規定溫度便結束燒成工程D。 The firing time can be appropriately set to a time required for the surfactant, the protective agent for the colloid, and the like to completely disappear by evaporation, sublimation, or thermal decomposition. Therefore, it is possible to shorten and extend the firing time at any time by the amount of powder to be fired. However, considering the growth of the crystal grains of the gold nanoparticles and the decrease in activity due to sintering, for example, the upper limit of the firing time may be set to about 3 hours. Further, instead of setting the firing time, it is also possible to set the firing process D to be completed when the predetermined temperature is reached.

藉由上述手法,能夠製作出使金奈米粒子在分散的狀態下予以擔持之金擔持碳。亦即,本發明之定電位電解式氣體感測器X,能夠將使金奈米粒子在分散的狀態下予以擔持之金擔持碳,使用作為貴金屬觸媒。該金擔持碳係在製作過程中使用膠體溶液,故能夠使金奈米粒子在分散的狀態下擔持於擔體即碳,故能使金奈米粒子的分散程度成為大致均一的狀態。因此,若將這樣的金擔持碳使用作為貴金屬觸媒,則便能將定電位電解式氣體感測器 X中氣體偵測性能發生不一致這種情況防患於未然。 According to the above method, it is possible to produce gold-supporting carbon which allows the gold nanoparticles to be held in a dispersed state. In other words, the constant potential electrolytic gas sensor X of the present invention can hold carbon as a gold metal supported by the gold nanoparticles in a dispersed state, and can be used as a noble metal catalyst. Since the gold-supporting carbon system uses a colloidal solution in the production process, the gold nanoparticles can be supported on the carbon which is a carrier in a dispersed state, so that the degree of dispersion of the gold nanoparticles can be made substantially uniform. Therefore, if such a gold-bearing carbon is used as a noble metal catalyst, a constant potential electrolytic gas sensor can be used. Inconsistent gas detection performance in X prevents this from happening.

此外,本構成之金擔持碳,在製作過程中能將燒成溫度抑制在250~450℃,故擔體即碳不會有燃燒之虞。 In addition, the gold of this structure can support the carbon, and the firing temperature can be suppressed to 250 to 450 ° C during the production process, so that the carbon, which is the support, does not burn.

又,以上述手法製作出之金擔持碳中,可使金奈米粒子以約5~50nm左右的粒徑分散。其結果,相較於以習知手法製作出之金擔持碳中金微粒子的添加量是多於50重量%,以上述手法製作出之金擔持碳中能將金奈米粒子的添加量減至5~50重量%左右。是故,本發明之定電位電解式氣體感測器X,能夠減少貴金屬觸媒中金奈米粒子的添加量,故能減低感測器的製造成本。 Further, in the gold-supporting carbon produced by the above method, the gold nanoparticles can be dispersed in a particle diameter of about 5 to 50 nm. As a result, the amount of gold nanoparticles supported by gold by the above-mentioned method is more than 50% by weight, and the amount of gold nanoparticles which can be produced by the above-mentioned method is high. Reduce it to about 5~50% by weight. Therefore, the constant potential electrolytic gas sensor X of the present invention can reduce the amount of gold nanoparticles added to the noble metal catalyst, thereby reducing the manufacturing cost of the sensor.

〔實施例〕 [Examples] 〔實施例1〕 [Example 1]

將本發明之定電位電解式氣體感測器X的電極中使用作為貴金屬觸媒之金擔持碳,依以下方式製作出來。調整各試藥,使得對於該金擔持碳而言,金奈米粒子的含有量成為25重量%。 The electrode of the constant potential electrolytic gas sensor X of the present invention is used as a gold-supporting carbon as a noble metal catalyst, and is produced in the following manner. Each of the reagents was adjusted so that the content of the gold nanoparticles was 25% by weight for the gold-supporting carbon.

將乙炔碳黑粉末3g、及界面活性劑(十二烷基苯磺酸鈉(sodium dodecylbenzenesulfonate))2mL添加於水600mL並充分攪拌(碳粉末添加工程A)。 3 g of acetylene black powder and 2 mL of a surfactant (sodium dodecylbenzenesulfonate) were added to 600 mL of water and stirred well (carbon powder addition engineering A).

在該攪拌溶液中,添加分散有金奈米粒子之膠體水溶液(3重量%)33.3g(金奈米粒子添加工程B)。 To the stirring solution, 33.3 g of a colloidal aqueous solution (3 wt%) in which gold nanoparticles were dispersed was added (Gold Nanoparticle Addition Engineering B).

其後,一面持續攪拌一面保持80℃,再使其減壓乾燥(100hpa、80℃)(乾燥工程C)。 Thereafter, the mixture was kept at 80 ° C while stirring, and then dried under reduced pressure (100 hPa, 80 ° C) (drying process C).

乾燥後,將取出的試料粉末於大氣壓、空氣環境下進行400℃、1小時之燒成(燒成工程D),得到金擔持碳的粉末(本發明例1)。 After drying, the sample powder to be taken out was fired at 400 ° C for 1 hour under atmospheric pressure and in an air atmosphere (baking engineering D) to obtain a gold-bearing carbon powder (Inventive Example 1).

本發明例1之金奈米粒子粉末的粒度分布(以小角度X光散射法測定)如圖3所示,金擔持碳的電子顯微鏡照片如圖4所示。圖5中揭示習知之金擔持碳(比較例)的電子顯微鏡照片以作為比較。 The particle size distribution of the gold nanoparticle powder of Example 1 of the present invention (measured by a small angle X-ray scattering method) is shown in Fig. 3, and an electron micrograph of the gold-bearing carbon is shown in Fig. 4 . An electron micrograph of a conventional gold-bearing carbon (comparative example) is shown in Fig. 5 for comparison.

由圖3證實該金奈米粒子的粉末具有5~50nm左右的粒徑。此外,本發明例1之金擔持碳中,證實金奈米粒子係分散而被擔持於碳(圖4)。另一方面,比較例之金擔持碳中,證實金微粒子係凝集(圖5)。 It is confirmed from Fig. 3 that the powder of the gold nanoparticles has a particle diameter of about 5 to 50 nm. Further, in the gold-supporting carbon of Example 1 of the present invention, it was confirmed that the gold nanoparticles were dispersed and supported on carbon (Fig. 4). On the other hand, in the gold of the comparative example, it was confirmed that the gold fine particles were aggregated (Fig. 5).

〔實施例2〕 [Example 2]

將定電位電解式氣體感測器X的各電極依以下方式製作出來。各電極所使用之金擔持碳中,將金奈米粒子的含有量從5~50重量%做各種變更,針對各者製作出定電位電解式氣體感測器X。 The electrodes of the constant potential electrolytic gas sensor X were produced in the following manner. In the gold-supporting carbon used for each electrode, the content of the gold nanoparticles is changed from 5 to 50% by weight, and a constant potential electrolytic gas sensor X is produced for each.

分別加入金擔持碳的粉末0.1g、界面活性劑(十二烷基苯磺酸鈉)0.1mL、PTFE(聚四氟乙烯;鐵氟龍)分散液(含有PTFE微粒子之膠體溶液,比重1.5)0.35mL,予以混煉而調製出電極材料膏。將得到的電極材料膏印刷於PTFE片上,乾燥後,以280℃燒成8小時, 而得到各電極10。將得到的各電極10,分別作為作用電極11、對極12及參照電極13,並將電解液20訂為42重量%之硫酸水溶液,而製作出定電位電解式氣體感測器X。 Add 0.1g of gold-supported carbon powder, 0.1mL of surfactant (sodium dodecylbenzenesulfonate), PTFE (polytetrafluoroethylene; Teflon) dispersion (colloidal solution containing PTFE microparticles, specific gravity 1.5 0.35 mL was kneaded to prepare an electrode material paste. The obtained electrode material paste was printed on a PTFE sheet, dried, and fired at 280 ° C for 8 hours. Each electrode 10 is obtained. Each of the obtained electrodes 10 was used as the working electrode 11, the counter electrode 12, and the reference electrode 13, and the electrolytic solution 20 was set to a 42% by weight sulfuric acid aqueous solution to prepare a constant potential electrolytic gas sensor X.

在得到的各個定電位電解式氣體感測器X中,於20℃、50%RH環境下,對於膦氣體1ppm、0.5ppm進行氣體靈敏度測定(圖6)。同樣地,對於矽烷、膦、鍺烷、胂、二硼烷等各氣體1ppm進行氣體靈敏度測定(圖7)。 In each of the obtained constant potential electrolytic gas sensors X, gas sensitivity measurement was performed for phosphine gas at 1 ppm and 0.5 ppm in an environment of 20 ° C and 50% RH ( FIG. 6 ). Similarly, gas sensitivity measurement was performed for 1 ppm of each gas such as decane, phosphine, decane, hydrazine or diborane (Fig. 7).

另,氣體靈敏度是定義為,在對象氣體環境中,從作用電極11流向氣體偵測電路40之電流值大小。 Further, the gas sensitivity is defined as the magnitude of the current flowing from the working electrode 11 to the gas detecting circuit 40 in the target gas atmosphere.

其結果,證實只要是金擔持碳中金奈米粒子的添加量為5重量%以上、尤其是20重量%以上之定電位電解式氣體感測器X,則便是對於氣體的反應性足夠高之作用電極。此外,鑑於金擔持碳的製造成本,較佳是將金擔持碳中金奈米粒子的添加量抑制為至多50重量%、較佳為30重量%。是故,考量氣體靈敏度及製造成本,可將金擔持碳中金奈米粒子的添加量訂為5~50重量%左右。 As a result, it was confirmed that the reactivity of the gas is sufficient as long as it is a fixed potential electrolytic gas sensor X in which the amount of gold nanoparticles in the gold is 5 wt% or more, particularly 20 wt% or more. High acting electrode. Further, in view of the manufacturing cost of the carbon-supporting carbon, it is preferred to suppress the addition amount of the gold-bearing gold nano-particles in the gold-supporting carbon to at most 50% by weight, preferably 30% by weight. Therefore, considering the gas sensitivity and the manufacturing cost, the amount of gold nanoparticles in the gold-bearing carbon can be set to about 5 to 50% by weight.

〔產業利用性〕 [Industry Utilization]

本發明能夠利用於定電位電解式氣體感測器中所使用之貴金屬觸媒、及該定電位電解式氣體感測器,該定電位電解式氣體感測器中,在容納電解液之電解槽的 電解液容納部臨近,具備:作用電極,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極,與前述作用電極相對;及參照電極,控制前述作用電極的電位。 The present invention can be utilized in a noble metal catalyst used in a constant potential electrolytic gas sensor, and the constant potential electrolytic gas sensor, in the electrolytic cell containing the electrolyte in the constant potential electrolytic gas sensor of The electrolyte storage portion is adjacent to each other, and includes: a working electrode for electrochemically reacting the gas to be detected as a gas electrode for detecting a gas; and a counter electrode opposite to the working electrode; and a reference electrode for controlling the potential of the working electrode.

X‧‧‧定電位電解式氣體感測器 X‧‧‧Constant potential electrolytic gas sensor

10‧‧‧電極 10‧‧‧ electrodes

11‧‧‧作用電極 11‧‧‧Working electrode

12‧‧‧對極 12‧‧‧ pole

13‧‧‧參照電極 13‧‧‧ reference electrode

14‧‧‧氣體透過膜 14‧‧‧ gas permeable membrane

15‧‧‧O型環 15‧‧‧O-ring

16‧‧‧蓋構件 16‧‧‧Caps

20‧‧‧電解液 20‧‧‧ electrolyte

30‧‧‧電解槽 30‧‧‧electrolyzer

31‧‧‧電解液容納部 31‧‧‧Electrolyte accommodation

32‧‧‧開口部 32‧‧‧ openings

33‧‧‧氣體導通部 33‧‧‧Gas Conduction

34‧‧‧電解液注入口 34‧‧‧ electrolyte injection port

Claims (6)

一種貴金屬觸媒,其特徵為:使作為擔體之碳粉末擔持金奈米粒子,該金奈米粒子係具有前述碳粉末的平均粒徑以下之平均粒徑。 A noble metal catalyst characterized in that carbon powder as a support is used to hold gold nanoparticles, and the gold nanoparticles have an average particle diameter of not less than an average particle diameter of the carbon powder. 如申請專利範圍第1項所述之貴金屬觸媒,其中,前述金奈米粒子,係5~50nm的粒子以5~50重量%被擔持。 The noble metal catalyst according to claim 1, wherein the gold nanoparticles are supported by 5 to 50% by weight of 5 to 50% by weight. 如申請專利範圍第1或2項所述之貴金屬觸媒,其中,前述碳粉末,粒徑為5~300nm之範圍。 The noble metal catalyst according to claim 1 or 2, wherein the carbon powder has a particle diameter of 5 to 300 nm. 一種定電位電解式氣體感測器,其特徵為:在容納電解液之電解槽的電解液容納部臨近,具備:作用電極,使被偵測氣體發生電化學反應以作為偵測氣體的氣體電極;及對極,與前述作用電極相對;及參照電極,控制前述作用電極的電位;該定電位電解式氣體感測器中,作為前述各電極,係具備申請專利範圍第1至3項任一項所述之貴金屬觸媒。 A constant potential electrolytic gas sensor characterized in that: in an electrolyte storage portion of an electrolytic cell containing an electrolyte, a working electrode is provided to electrochemically react a gas to be detected as a gas electrode for detecting a gas And the counter electrode, opposite to the working electrode; and the reference electrode, controlling the potential of the working electrode; the constant potential electrolytic gas sensor, as the above-mentioned respective electrodes, having any one of the first to third patent claims The precious metal catalyst described in the item. 如申請專利範圍第4項所述之定電位電解式氣體感測器,其中,前述貴金屬觸媒,係進行下述步驟而製作出:碳粉末添加工程,於溶媒中添加碳粉末並攪拌;金奈米粒子添加工程,添加分散有金奈米粒子之膠體(colloid)溶液;乾燥工程,在維持前述溶媒的沸點以下之狀態下使其乾燥;及 燒成工程,將乾燥而得到之擔持有金奈米粒子的碳粉末以250~450℃進行燒成。 The constant potential electrolytic gas sensor according to claim 4, wherein the noble metal catalyst is produced by the following steps: carbon powder addition engineering, adding carbon powder to the solvent and stirring a gold nanoparticle addition process, adding a colloid solution in which gold nanoparticles are dispersed; drying work, drying it while maintaining the boiling point of the solvent; and In the firing process, the carbon powder obtained by drying and holding the gold nanoparticles is baked at 250 to 450 °C. 如申請專利範圍第5項所述之定電位電解式氣體感測器,其中,前述碳粉末添加工程中,係添加界面活性劑。 The constant potential electrolytic gas sensor according to claim 5, wherein in the carbon powder addition engineering, a surfactant is added.
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