TW201512128A - Glass plate - Google Patents

Abstract

The present invention relates to a glass plate in which, in a depth-direction profile which is obtained using secondary ion mass spectrometry (SIMS), and in which the horizontal axis is set as depth, and the vertical axis is set as fluorine concentration (mol%), the depth-direction-profile average value of one surface at depths in the range of 0-20 [mu]m is greater than that of another surface at depths in the range of 0-20 [mu]m, the ratio of the former to the latter being greater than 1.4. The fluorine content in the glass, in the depth-direction profile which is obtained using SIMS, and in which the horizontal axis is set as depth, and the vertical axis is set as fluorine concentration (mol%), is more than 0.23 mol%.[mu]m but not more than 21 mol%.[mu]m. According to this glass plate, warpage after chemical strengthening can be effectively suppressed, and polishing processing or the like prior to chemical strengthening can be omitted or simplified.

Description

glass plate

The present invention relates to a glass sheet.

In recent years, in flat-panel display devices such as mobile phones, personal digital assistants (PDAs), personal computers, televisions, and car navigation display devices, in order to improve the protection and aesthetics of the display, it has become a part of the image display portion. The way of the area is to arrange the thinner plate-shaped cover glass on the front surface of the display.

Since such a flat panel display device is required to be lightweight and thin, it is required to also reduce the cover glass for display protection.

However, if the thickness of the cover glass is reduced, the strength is lowered, and the cover glass itself is broken due to dropping during use or during carrying, and there is a problem that the original function of the display device cannot be exhibited.

Therefore, the conventional cover glass is chemically strengthened by the glass produced by the floating method (hereinafter sometimes referred to as floating glass) to form a compressive stress layer on the surface, thereby improving the damage resistance of the cover glass.

It is reported that the floating glass is warped after chemical strengthening and the flatness is impaired (Patent Documents 1 to 3). It is considered that the warpage is caused by a glass surface (hereinafter also referred to as a top surface) which is not in contact with a molten metal such as molten tin at the time of floating molding, and a glass surface which is in contact with the molten metal (hereinafter also referred to as a bottom surface) The nature of the two is different, resulting in different degrees of chemical strengthening on both sides.

The stronger the degree of chemical strengthening, the greater the warpage of the above floating glass. Therefore, Yu Wei The problem of warpage becomes more conspicuous when the surface compressive stress is set to a level higher than the previous level, particularly 600 MPa or more, in order to satisfy the requirements for high scratch resistance.

Patent Document 1 discloses a method for strengthening a glass which is adjusted to an amount of ions entering the glass during chemical strengthening by chemical strengthening after forming a SiO ₂ film on the surface of the glass. Further, Patent Documents 2 and 3 disclose a method of reducing warpage after chemical strengthening by setting the surface compressive stress on the top surface side to a specific range.

Further, in order to alleviate the above problem of warpage, the following methods have been coped with: reducing the strengthening stress caused by chemical strengthening, or removing the surface heterogeneous layer by grinding or polishing the at least one side of the glass; Chemical strengthening.

[Previous Technical Literature] [Patent Literature]

Patent Document 1: US Patent Application Publication No. 2011/0293928

Patent Document 2: International Publication No. 2007/004634

Patent Document 3: Japanese Patent Laid-Open No. 62-191449

However, in the method of chemically strengthening the SiO ₂ film formed on the surface of the glass described in Patent Document 1, the preheating condition during chemical strengthening is limited, and the film quality of the SiO ₂ film is changed due to the condition. The possibility of affecting warpage. Further, in the method of setting the surface compressive stress on the top surface side to a specific range as described in Patent Documents 2 and 3, there is a problem in terms of the strength of the glass.

Further, in the method of performing a grinding treatment or a polishing treatment on at least one surface of the glass before chemical strengthening, there is a problem in terms of improving productivity, and it is preferable to omit such grinding treatment, polishing treatment, and the like.

Further, when a certain degree of warpage occurs after chemical strengthening, when the black frame covering the glass is printed, the gap between the glass and the mounting table becomes too large, so that In the case where the glass is not adsorbed to the mounting table. Further, when it is used for a touch panel integrated cover glass, film formation of ITO (Indium Tin Oxide) or the like may be performed in a state of a large plate in a subsequent step. In this case, the conveyance abnormality such as the contact of the glass with the chemical liquid treatment tank or the air knife of the cleaning tank may occur, or the warpage may increase in the ITO film formation, and the film formation state of the ITO in the peripheral portion of the substrate may not be appropriate. This causes defects such as peeling. Further, in the case where there is a space between the LCD (Liquid Crystal Display) and the cover glass to which the touch panel is attached, if the cover glass has a certain degree of warpage, uneven brightness may occur. Or the case of Newton's ring.

Accordingly, an object of the present invention is to provide a glass sheet which can effectively suppress warpage after chemical strengthening, and can omit or simplify the polishing treatment before chemical strengthening.

The inventors of the present invention have found that by subjecting the surface of the glass to fluorine treatment, it is possible to suppress the degree of chemical strengthening on one side and the other side of the glass, thereby reducing warpage after chemical strengthening, and completing the present invention based on the findings. .

That is, the present invention is as follows.

A glass plate which is in a depth direction distribution obtained by secondary ion mass spectrometry (SIMS) with a horizontal axis as a depth and a vertical axis as a fluorine concentration (mol%), and a depth of one side is 0 to 20 μm. The average value of the depth direction distribution is larger than the average value of the depth direction distribution at a depth of 0 to 20 μm of the other surface, and the ratio of the two is greater than 1.4; and the horizontal axis is the depth and the vertical axis is the fluorine concentration (mol%). The distribution of the depth in the glass by the SIMS is greater than 0.23 mol%. Mm and 21mol%. Below μm.

2. The glass plate according to the above item 1, wherein a ratio of an average value of the depth direction distribution at a depth of 0 to 20 μm on one side to an average value of a depth direction distribution at a depth of 0 to 20 μm on the other surface is 4 or more.

3. The glass plate according to the above item 1, which is manufactured by the floating method, wherein the average value of the depth direction distribution at a depth of 0 to 20 μm of the top surface is greater than the depth at a depth of 0 to 20 μm of the bottom surface. The average of the direction distribution.

4. The glass plate according to the above item 3, wherein a ratio of an average value of the depth direction distribution at a depth of 0 to 20 μm of the top surface to an average value of a depth direction distribution at a depth of 0 to 20 μm of the bottom surface is 4.9 or more.

A glass plate which is an average of a depth direction distribution at a depth of 0 to 20 μm on at least one side of a depth direction distribution obtained by SIMS with a horizontal axis as a depth and a vertical axis as a fluorine concentration (mol%). The value is greater than the average of the depth direction distribution at a depth of 50 to 70 μm; and in the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%), The amount of fluorine is greater than 0.23 mol%. Mm and 21mol%. Below μm.

6. The glass sheet according to any one of the preceding clauses 1 to 5, wherein the depth direction distribution of the at least one side is 0~ in the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The value (S ₁ /S ₄ ) obtained by dividing the average value (S ₁ ) of the depth direction distribution at 20 μm by the average value (S ₄ ) of the depth direction distribution at a depth of 50 to 70 μm observed from the same direction is 2.1 or more.

7. The glass sheet according to any one of the preceding clauses 1 to 6, wherein the depth direction distribution of at least one side is 0~ in the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The value (S ₁ /S ₄ ) obtained by dividing the average value (S ₁ ) of the depth direction distribution at 20 μm by the average value (S ₄ ) of the depth direction distribution at a depth of 50 to 70 μm observed from the same direction is 2.1 to 100. .

8. The glass sheet according to the above item 6 or 7, which is produced by a floating method.

The glass plate according to any one of items 1 to 8, which has a thickness of 1.5 mm or less.

The glass plate according to any one of items 1 to 9, which has a thickness of 0.8 mm or less.

The glass plate according to any one of items 1 to 10, which has a surface roughness Ra of 2.5 nm or less.

A chemically strengthened glass plate, which is a glass plate according to any one of items 1 to 11 above Obtained by chemical strengthening.

A flat panel display device comprising a cover glass, wherein the cover glass is a chemically strengthened glass plate according to the above item 12.

A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other side; and a which is represented by the following formula is less than -0.1, and has a depth on the horizontal axis and a fluorine concentration on the vertical axis. (mol%) of the depth direction distribution obtained by SIMS, the amount of fluorine contained in the glass is greater than 0.23 mol%. Mm and 21mol%. Below μm; a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine obtained by SIMS at a depth of 3 μm in the surface having a large fluorine concentration) / (the concentration of fluorine obtained by SIMS at a depth of 3 μm in the face having a small fluorine concentration).

A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other surface; and b represented by the following formula is 4 or more, and has a depth on the horizontal axis and a fluorine concentration on the vertical axis ( The amount of fluorine contained in the glass is greater than 0.23 mol% in the depth direction distribution obtained by SIMS. Mm and 21mol%. Below μm; b=F ₃ -3×a

a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine obtained by SIMS at a depth of 3 μm in the surface having a large fluorine concentration) / (the concentration of fluorine obtained by SIMS at a depth of 3 μm in the face having a small fluorine concentration).

A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other side; and F ₃ represented by the following formula is 4 or more, and has a depth on the horizontal axis and a fluorine concentration on the vertical axis. (mol%) of the depth direction distribution obtained by SIMS, the amount of fluorine contained in the glass is greater than 0.23 mol%. Mm and 21mol%. Below μm; F ₃ = (the concentration of fluorine obtained by SIMS at a depth of 3 μm in a surface having a large fluorine concentration) / (the concentration of fluorine obtained by SIMS at a depth of 3 μm in a face having a small fluorine concentration).

The glass plate of the present invention is subjected to fluorine treatment on the surface thereof to cause a difference in the degree of suppression of chemical strengthening on one side and the other side of the glass, and the stress value generated by chemical strengthening is set to a desired value. Moreover, even if the polishing treatment before chemical strengthening or the like is simplified or omitted, the warpage of the glass after chemical strengthening can be reduced, and excellent flatness can be obtained.

1‧‧‧Central slit

2‧‧‧outer slit

4‧‧‧flow path

5‧‧‧Exhaust slit

15‧‧‧Shell

20‧‧‧ glass plate

21‧‧‧The direction in which the glass plate travels

30‧‧‧ Covering glass

40‧‧‧ display device

41‧‧‧ functional film

42‧‧‧ functional film

44‧‧‧Black layer

45‧‧‧ display panel

101‧‧‧glass ribbon

102‧‧‧ beams

103‧‧‧radiation gate

110‧‧‧The width direction of the glass ribbon

111‧‧‧ gas system

112‧‧‧ gas system

113‧‧‧ gas system

114‧‧‧ partition wall

115‧‧‧ partition wall

116‧‧‧Blow holes

Y1‧‧‧ direction

Y2‧‧‧ direction

Y3‧‧‧ direction

Y4‧‧‧ direction

Y5‧‧‧ direction

Ya‧‧·glass belt travels in the floating kiln

Figure 1 is a schematic representation of a dual flow injector that can be used in the present invention.

Figure 2 is a diagrammatic representation of a single flow injector that can be used in the present invention.

Fig. 3 is a cross-sectional view showing a flat panel display used as a cover glass for a flat panel display after chemically strengthening the floating glass for chemical strengthening of the present invention.

Figure 4(a) shows a typical fluorine concentration profile obtained by SIMS for aluminum-bismuth glass. Fig. 4(b) is a diagram showing the depth on the horizontal axis and the slope on an arbitrary point x _i represented by the equation (a) on the vertical axis. Fig. 4(c) is a view showing an enlarged view of a broken line portion in Fig. 4(b).

Fig. 5 (a) is a schematic explanatory view showing a method of treating a surface of a glass ribbon by supplying a gas containing a molecule having a fluorine atom in its structure by a beam in the production of a glass sheet by a floating method. Figure 5 (b) is a cross-sectional view taken along line A-A of Figure 5 (a).

6(a) to 6(d) are cross-sectional views showing a beam which can be adjusted by dividing the amount of gas into three portions in the width direction of the glass ribbon.

Figures 7(a)-(c) show typical fluorine concentration profiles obtained by SIMS of fluorine-treated aluminosilicate glass.

Fig. 8 is a view showing a method of calculating the amount of fluorine contained in the glass based on the SIMS distribution.

Fig. 9 is a graph showing the relationship between the amount of fluorine contained in the glass of the glass plate (soda lime glass) of the present invention determined by SIMS and the amount of warpage displacement after chemical strengthening treatment of the glass.

Fig. 10 is a graph showing the relationship between the amount of fluorine contained in the glass of the glass plate (aluminum bismuth glass) of the present invention determined by SIMS and the amount of warpage displacement after chemical strengthening treatment of the glass.

Glass plate

In the present invention, the "glass plate" also includes a shape in which the molten glass is formed into a plate shape. For example, a so-called glass ribbon in a floating kiln is also a glass plate. The warpage after chemical strengthening of the glass sheet is caused by the degree of chemical strengthening of one side and the other side of the glass sheet. Specifically, for example, in the case of floating glass, the chemistry of the glass surface (top surface) which is not in contact with the molten metal (usually tin) at the time of floating molding and the glass surface (bottom surface) which is in contact with the molten metal The degree of strengthening is different, resulting in warpage after chemical strengthening.

According to the present invention, by subjecting the glass plate to fluorine treatment, the degree of fluorine treatment on one side is different from the degree of fluorine treatment on the other side, and the diffusion rate of ions in one side and the other side of the glass sheet can be adjusted, thereby Balance the degree of chemical strengthening on one side and the other. Therefore, the glass sheet of the present invention can reduce the warpage of the glass sheet after the chemical strengthening without adjusting the strengthening stress or performing the grinding and polishing treatment before the chemical strengthening treatment.

Further, by changing the degree of fluorine treatment on the glass plate on one side, the ion diffusion rate of the treated surface is adjusted to be the same as the ion diffusion rate of the non-treated surface, and the degree of chemical strengthening can be equalized.

As a mechanism by which the surface of the glass plate is subjected to fluorine treatment to reduce warpage after chemical strengthening, it is considered that the following phenomenon occurs.

(1) The relaxation is promoted by the fluorine introduced to the surface of the glass, so that the CS (compressive stress) of the fluorine-treated surface is lowered.

(2) The ion exchange is inhibited by the fluorine introduced to the surface of the glass, so that the DOL (depth of layer) of the fluorine-treated surface is lowered.

(3) De-alkali of glass is produced by fluorine treatment.

(4) The main component of the glass surface is changed by fluorine treatment, so that Si in the glass is reduced from the surface of the glass in the form of SiF ₄ or H ₂ SiF ₆ , so the degree of stress changes.

(5) Dehydration from the surface of the glass or intrusion of water is suppressed by fluorine treatment, thereby reducing warpage.

The glass plate of the present invention is such that the horizontal axis is a depth direction distribution obtained by SIMS when the horizontal axis is the depth at which the glass surface is set to zero and the vertical axis is the fluorine concentration (mol%). The average value of the depth direction distribution at 20 μm is larger than the average value of the depth direction distribution at a depth of 0 to 20 μm of the other surface. In other words, when the average value of the depth direction distribution at a depth of 0 to 20 μm on one surface is S ₁ and the average value of the depth direction distribution at a depth of 0 to 20 μm on the other surface is S ₂ , S ₁ / S ₂ ≠1.

Furthermore, in the case of a glass plate manufactured by a floating method, it is preferable that at least the depth of the top surface is 0 to 20 μm, and the average value of the depth direction distribution is larger than the depth of the bottom surface by 0 to 20 μm. The average of the distribution.

The glass plate of the present invention is obtained by dividing the average of the depth direction distribution at a depth of 0 to 20 μm on one side in the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The value obtained by the average value of the depth direction distribution at the depth of 0 to 20 μm of the other surface is preferably greater than 1.0×10 ⁰ and less than 1.0×10 ⁵ , more preferably greater than 1.1×10 ⁰ and less than 1.0×10 ⁴ . Further preferably, it is more than 1.3 × 10 ⁰ and not more than 1.0 × 10 ³ . Typically, it is greater than 7.22/5.19, i.e., greater than 1.4, preferably 4 or greater, and more preferably 4.9 or greater. Furthermore, the calculation is performed in such a manner that the division value is 1 or more.

The glass plate of the present invention is distributed in the depth direction obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%), so that the average value of the depth direction distribution at a depth of 0 to 20 μm is divided. The value obtained by the average value of the depth distribution at the depth of 0 to 20 μm of the other surface is less than 1.0 × 10 ⁵ , whereby the improvement of the warpage is prevented from being excessively performed and warped to a large extent along the opposite side. The effect of preventing the warpage can be reduced by dividing the average value of the depth direction distribution at a depth of 0 to 20 μm on one side by the average value of the depth direction distribution at a depth of 0 to 20 μm on the other side. .

In the case of the glass plate which is chemically strengthened, the glass plate of the present invention is also distributed in the depth direction obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The average value of the depth direction distribution at a depth of 0 to 20 μm on one side is larger than the average value of the depth direction distribution at a depth of 0 to 20 μm on the other side.

In the case where the glass plate of the present invention is a chemically strengthened glass plate, the depth of one side is 0 to the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The value S ₁ /S ₂ obtained by dividing the average value of the depth direction distribution at 20 μm by the average value of the depth direction distribution at the depth of 0 to 20 μm of the other surface is also preferably greater than 1.0 × 10 ⁰ and less than 1.0 × 10 ⁵ More preferably, it is more than 1.1 × 10 ⁰ and not more than 1.0 × 10 ⁴ , further preferably more than 1.3 × 10 ⁰ and less than 1.0 × 10 ³ . Further, S ₁ /S _{2 is} more than 1.4, more than 1.8, particularly preferably more than 2.1, more preferably 4 or more, still more preferably 4.9 or more.

Further, the glass plate of the present invention is a depth direction at a depth of 0 to 20 μm on at least one side of the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The average value of the distribution is larger than the average of the depth direction distribution at a depth of 50 to 70 μm. In other words, when the average value of the depth direction distribution at a depth of at least one surface of 0 to 20 μm is S ₁ and the average value of the depth direction distribution at a depth of 50 to 70 μm observed from the same direction is S ₄ , S ₁ /S ₄ > 1, preferably 2.1 or more, more preferably 2.1 or more and 100 or less.

Furthermore, in the case of a glass plate manufactured by a floating method, it is preferable that the average value of the depth direction distribution at a depth of 0 to 20 μm of the top surface is larger than the average of the depth direction distribution at a depth of 50 to 70 μm. Preferably, the average value of the depth direction distribution at a depth of at least the top surface of 0 to 20 μm is greater than the average value of the depth direction distribution at a depth of 50 to 70 μm.

The glass plate of the present invention is divided into the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%), and the average value of the depth direction distribution at the depth of at least one side of 0 to 20 μm is divided. The value obtained by the average value of the depth direction distribution at a depth of 50 to 70 μm is preferably greater than 1.0×10 ⁰ and less than 1.0×10 ⁵ , more preferably greater than 1.1×10 ⁰ and less than 1.0×10 ⁴ , and thus Preferably, it is greater than 1.3×10 ⁰ and less than 1.0×10 ³ . S ₁ /S _{4 is} further more than 1.4, more than 1.8, particularly preferably more than 2.1, more preferably 4 or more, still more preferably 4.8 or more.

In the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%), the average value of the depth direction distribution at the depth of at least one side of 0 to 20 μm is divided by the depth of 50 to 70 μm. The value obtained by the average value of the depth direction distribution is less than 1.0 × 10 ⁵ , whereby the improvement of the warpage is prevented from being excessively performed and warped to a large extent along the opposite side. Further, the effect of preventing the warpage can be reduced by dividing the average value of the depth direction distribution at a depth of at least one surface by 0 to 20 μm by the average value of the depth direction distribution at a depth of 50 to 70 μm. .

In the case of the glass plate which is chemically strengthened, the glass plate of the present invention is also distributed in the depth direction obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The average value of the depth direction distribution at a depth of at least one side of 0 to 20 μm is larger than the average value of the depth direction distribution at a depth of 50 to 70 μm.

In the case of the glass plate of the present invention, in the case of a chemically strengthened glass plate, at least one side of the depth is distributed in the depth direction obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%). The value obtained by dividing the average value of the depth direction distribution at ~20 μm by the average value of the depth direction distribution at a depth of 50 to 70 μm is also preferably greater than 1.0 × 10 ⁰ and less than 1.0 × 10 ⁵ , more preferably greater than 1.1 × 10 ⁰ and less than 1.0 × 10 ⁴ , further preferably more than 1.3 × 10 ⁰ and less than 1.0 × 10 ³ . S ₁ /S _{4 is} further more than 1.4, more than 1.8, particularly preferably more than 2.1, more preferably 4 or more, still more preferably 4.8 or more.

The glass plate of the present invention is one in which fluorine is present on both sides and the fluorine concentration on one side is greater than the fluorine concentration on the other side, and a represented by the following formula is less than -0.1, preferably -0.2 or less, more preferably -20 or more. -0.2 or less. By a not reaching -0.1, the warpage of the chemically strengthened glass sheet can be alleviated.

a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by SIMS) / (the concentration of fluorine in the surface of the smaller fluorine concentration of 3 μm by SIMS)

In the present specification, the "fluorine concentration of depth x μm" is calculated from the average fluorine concentration of depth (x - 0.5) - (x + 0.5) μm. For example, a fluorine concentration of 3 μm in depth is calculated from an average fluorine concentration of 2.5 to 3.5 μm in depth, and a fluorine concentration of 20 μm is calculated as an average fluorine concentration of 19.5 to 20.5 μm.

The glass plate of the present invention has a fluorine concentration on one side and a fluorine concentration on the other side, and b represented by the following formula is 4 or more, preferably 5 or more, more preferably 5 or more and 360 or less. By b being 4 or more, the warpage of the glass plate after chemical strengthening can be alleviated.

b=F ₃ -3×a

a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by SIMS) / (the concentration of fluorine in the surface of the smaller fluorine concentration of 3 μm by SIMS)

In the above, the reason why the fluorine concentration obtained by SIMS is 3 μm in depth when a and b are obtained is that, from the viewpoint of the history of the sample, it is considered that it is less susceptible to the fluorine concentration at a depth of 0 to 2 μm. The sample is affected by the fluorine treatment.

The glass plate of the present invention has a fluorine concentration on one side and a fluorine concentration on the other side, and F ₃ represented by the following formula is 4 or more, preferably 5 or more, more preferably 5 or more and 300 or less. . By F ₃ being 4 or more, the warpage of the glass plate can be alleviated.

F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by SIMS) / (the concentration of fluorine in the surface of the smaller fluorine concentration of 3 μm by SIMS)

The glass plate of the present invention is a depth direction distribution obtained by secondary ion mass spectrometry (SIMS) with the horizontal axis being the depth at which the glass surface is set to zero and the vertical axis being the fluorine concentration (mol%). Above, the amount of fluorine contained in the glass is greater than 0.23 mol%. Mm and 21mol%. Below μm.

The amount of fluorine contained in the glass is as shown in Fig. 8. The depth direction distribution in the SIMS is such that the horizontal axis is the depth (μm) at which the glass surface is set to zero, and the vertical axis is the fluorine concentration (mol). The integral (mol%.μm) at the time of %) was obtained. The method for calculating the fluorine concentration in SIMS is as follows.

The amount of fluorine contained in the glass is, although accurate, the amount of fluorine atoms contained in the entire glass sheet. However, since it is considered that there is a limit to the depth at which fluorine can be intruded into the glass by fluorine treatment, it is actually regarded as The same value as the integral value when measuring the depth direction distribution from the surface of the glass to a depth of 0 to 30 μm.

It is considered that the amount of fluorine (mol%. μm) contained in the glass is proportional to the amount of warpage displacement (μm) after chemical strengthening treatment of the glass (Fig. 9 and Fig. 10). Here, the amount of warping displacement can be obtained by the following formula.

Warpage displacement = △ X - △ Y

△X: the amount of warpage change caused by chemical strengthening of the untreated glass plate

△Y: the amount of warpage change caused by chemical strengthening of the treated glass plate

Here, the amount of warpage change is a value obtained by subtracting the amount of warpage of the glass plate before chemical strengthening from the amount of warpage of the glass plate after chemical strengthening. Regarding the amount of warpage change, ΔX>0 was set. When ΔY is warped in the same direction as ΔX, ΔY>0 is set, and when it is warped in the opposite direction to ΔX, ΔY<0 is set.

When the amount of fluorine contained in the glass is within the above range, the warpage after chemical strengthening can be improved regardless of the type of the glass. Among them, the glass produced by the floating method is preferable because it can see more warpage improving effect. The amount of fluorine contained in the glass is greater than 0.23 mol%. Mm, preferably 0.7 mol%. More than μm. If the amount of fluorine contained in the glass is 0.23 Mol%. Below μm, the displacement of the warpage cannot be observed to be meaningfully poor. Moreover, the amount of fluorine contained in the glass is 21 mol%. Below μm, in terms of practical use, it is preferably 9 mol%. Below μm.

The glass plate of the present invention is obtained by secondary ion mass spectrometry (SIMS) in the case of a chemically strengthened glass plate at a depth (μm) on the horizontal axis and a fluorine concentration (mol%) on the vertical axis. In the depth direction distribution, the amount of fluorine contained in the glass is also greater than 0.23 mol%. Mm and 21mol%. Below μm.

The glass plate of the present invention may contain fluorine on both sides, or may contain fluorine only on one side. Among them, the latter is preferable in terms of improving warpage.

In the present specification, the one side and the other side of the glass plate refer to one surface and the other surface in the thickness direction. Further, the two sides of the glass plate refer to two faces facing each other in the thickness direction.

Next, a method of determining the F concentration (mol%) in secondary ion mass spectrometry (SIMS) will be described.

The secondary ion intensity I _M1 of the isotope M ₁ of the element M in secondary ion mass spectrometry and the primary ion intensity I _P , the sputtering rate Y of the matrix, the concentration C _{M of the} element _M (relative to the total concentration), isotope the probability of the presence of ₁ M α _1, the secondary ionization of the element _M and M is the mass spectrometer beta] through the efficiency [eta] (including the detection efficiency of the detector) is proportional.

I _M1 = A. I _P . Y. C _M . α ₁ . β _M . η(式w)

Here, the ratio of the detection area of the secondary ion of the A system to the scanning range of the primary ion beam. In general, since it is difficult to obtain the η of the device, the absolute value of β _M cannot be obtained. Therefore, η is eliminated by using a principal component element or the like in the same sample as a reference element and using a ratio of (formula w).

Here, when the reference element is R and the isotope is R _j , (formula x) can be obtained.

I _M1 /I _Rj =(C _M .α ₁ .β _M )/(C _R .α _j .β _R )=C _M /K (Formula x)

Here, the relative sensitivity factor of the K-based element M relative to the element R.

K=(C _R .α _j .β _R )/(α ₁ .β _M ) (Formula y)

In this case, the concentration of the element M is determined by (formula z).

C _M = K. I _M1 /I _Rj (式z)

In the present invention, F corresponds to M ₁ and Si corresponds to R _j . Therefore, according to (Formula x), the intensity ratio (F/Si) of the two is equal to the fluorine concentration C _M divided by K.

The average fluorine concentration was measured by measuring the fluorine concentration distribution in the glass by a SIMS apparatus, and was calculated from the distribution by the following steps (a1) to (a3). Figures 7(a) to (c) show the typical fluorine concentration distribution obtained by SIMS of fluorine-treated aluminosilicate glass.

(a1) The fluorine concentration distribution obtained by SIMS was measured for a standard sample having a known concentration and a sample to be measured [Fig. 7 (a)].

(a2) A calibration curve is prepared based on the measurement result of the standard sample, and a coefficient for converting ¹⁹ F/ ³⁰ Si into a fluorine concentration (mol%) is calculated [Fig. 7(b)].

(a3) The fluorine concentration (mol%) of the sample to be measured is obtained from the coefficient calculated in the step (a2). For example, the average fluorine concentration (mol%) obtained by SIMS at a depth of 0 to 3 μm is a value obtained by dividing the fluorine concentration of the depth of 0 to 3 μm by the depth of 3 μm [Fig. 7(c)].

The average fluorine concentration (mol%) obtained by SIMS with a depth of 0 to 30 μm can also be obtained in the same manner.

The integral value when the fluorine concentration (mol%) is the vertical axis and the depth (μm) is the horizontal axis is defined as the amount of fluorine (mol%. μm) contained in the glass.

As the analysis conditions of SIMS, for example, the following conditions can be mentioned. In addition, the analysis conditions shown below are examples, and should be suitably changed according to a measuring device, a sample, etc. Further, the depth of the horizontal axis of the depth direction distribution obtained by SIMS can be obtained by measuring the depth of the analysis pit by a stylus type film thickness meter (for example, Dektak 150 manufactured by Veeco Co., Ltd.).

(analysis conditions)

Primary ion species: Cs ⁺

Primary ion incident angle: 60°

One acceleration voltage: 5kV

As a more specific analysis condition, the following conditions are mentioned, for example.

(analysis conditions)

Measuring device: secondary ion mass spectrometer with quadrupole mass spectrometer

Primary ion species: Cs ⁺

One acceleration voltage: 5.0kV

Primary ion current: 1μA

Primary ion incidence angle (angle from the vertical direction of the sample surface): 60°

Raster size: 200 × 200μm ²

Detection area: 40 × 40 μm ²

Secondary ion polarity: negative

Use of neutralizing electron guns: Yes

As the secondary ion mass spectrometer having a quadrupole mass spectrometer, for example, ADEPT 1010 manufactured by ULVAC-PHI Corporation can be cited.

The thickness of the glass plate is not particularly limited, and examples thereof include 2 mm, 0.8 mm, 0.73 mm, 0.7 mm, 0.56 mm, and 0.4 mm. In order to effectively carry out the chemical strengthening treatment described later, it is usually preferably 5 mm or less. It is preferably 3 mm or less, further preferably 1.5 mm or less, and particularly preferably 0.8 mm or less.

It is generally required that the amount of warpage after chemical strengthening of a glass plate having a thickness of 0.7 mm is 40 μm or less. When the CS is 750 MPa and the DOL is 40 μm in a 90 mm square glass plate, the amount of warpage after chemical strengthening is about 130 μm. On the other hand, since the amount of warpage of the glass plate after chemical strengthening is inversely proportional to the square of the plate thickness, the amount of warpage when the thickness of the glass plate is 2.0 mm is about 16 μm, and the warpage is not a problem. . Therefore, when the thickness of the glass plate is less than 2 mm, and typically 1.5 mm or less, there is a possibility that a problem of warpage after chemical strengthening occurs.

Although the warpage after chemical strengthening is improved by adding fluorine to the glass surface layer, the following parameters are set in consideration of the penetration depth of fluorine.

The glass plate of the present invention is one in which the fluorine concentration on one side in the thickness direction is larger than the fluorine concentration on the other side, and preferably satisfies the following formula (1).

1≦x...(1)

In the formula (1), x is in the fluorine concentration distribution obtained by SIMS, and the slope at an arbitrary depth x _i (μm) satisfies the maximum depth (μm) of the following formula (2).

[F(x _i +0.1)-F(x _i )]/0.1=-0.015...(2)

In the formula (2), F(x _i ) represents a fluorine concentration (mol%) obtained by SIMS at a depth x _i (μm).

Figure 4 (a) shows the fluorine concentration distribution obtained by SIMS of a typical soda lime glass. Fig. 4(b) is a graph in which the depth is plotted on the horizontal axis and the slope on an arbitrary point x _i represented by the following formula (a) is plotted on the vertical axis. In the following formula (a), F(x) represents the fluorine concentration (mol%) at the point x.

[F(x _i +Δx)-F(x _i )]/△x...(a)

When Δx is set to 0.1, the maximum depth x (μm) of the slope represented by the formula (a) of -0.015 is 1 or more, preferably 2 or more, more preferably 2.8 or more, and particularly preferably 3 or more. . If x does not reach 1, the displacement of the warpage cannot be observed to be meaningfully poor.

Fig. 4(c) is a view in which the broken line portion of the graph of Fig. 4(b) is enlarged. For example, in FIG. 4(c), when Δx is set to 0.1, the maximum depth x (μm) of the slope represented by the formula (a) of -0.015 becomes 6.5.

2. Method for manufacturing glass plate

In the present invention, the method of forming the molten glass into a plate-shaped glass plate is not particularly limited, and various components can be used as long as the glass has a composition capable of achieving reinforcement by chemical strengthening treatment. For example, it can be produced by blending various raw materials in an appropriate amount and heating and melting, and then homogenizing by defoaming or stirring, and by a known floating method, a down-draw method (for example, a melting method, etc.), a pressing method, or the like. Formed into a plate shape, cut after slow cooling For the desired size, a grinding process is performed. Among these manufacturing methods, the glass produced by the floating method is preferable because it is particularly easy to exhibit warpage after chemical strengthening which is an effect of the present invention.

Specific examples of the glass plate used in the present invention include glass plates generally composed of soda lime silicate glass, aluminum bismuth glass, borate glass, lithium aluminum bismuth glass, and borosilicate glass.

Among these, a glass containing a composition of Al is preferable. When Al and the alkali coexist, the four sites are formed and participate in the formation of the mesh which becomes the skeleton of the glass similarly to Si. If the Al in the 4-coordinate is increased, the movement of the alkali ions becomes easy, and ion exchange is facilitated in the chemical strengthening treatment.

The composition of the glass plate of the present invention is not particularly limited, and includes 50 to 80% of SiO ₂ , 0.1 to 25% of Al ₂ O ₃ , and 3 to 30% of Li, which is represented by the composition of Mohr%. ₂ O+Na ₂ O+K ₂ O, 0 to 25% of MgO, 0 to 25% of CaO, and 0 to 5% of ZrO ₂ glass. More specifically, the composition of the following glass can be mentioned. In addition, for example, "containing 0 to 25% of MgO" means that although it is not necessary, it may contain MgO within 25%. (i) The glass belongs to the soda-calcium silicate glass, and the glasses of (ii) and (iii) belong to the aluminum-bismuth glass.

(i) contains 63 to 73% of SiO ₂ , 0.1 to 5.2% of Al ₂ O ₃ , 10 to 16% of Na ₂ O, 0 to 1.5% of K ₂ O, 5 in terms of composition represented by mole % ~13% of MgO and 4~10% of CaO glass

(ii) containing 50 to 74% of SiO ₂ , 1 to 10% of Al ₂ O ₃ , 6 to 14% of Na ₂ O, 3 to 11% of K ₂ O, 2 in terms of composition represented by mole % ~15% of MgO, 0 to 6% of CaO and 0 to 5% of ZrO ₂ , and the total content of SiO ₂ and Al ₂ O ₃ is 75% or less, and the total content of Na ₂ O and K ₂ O is 12~25%, the total content of MgO and CaO is 7~15% glass

(iii) containing 68 to 80% of SiO ₂ , 4 to 10% of Al ₂ O ₃ , 5 to 15% of Na ₂ O, 0 to 1% of K ₂ O, 4 in terms of composition represented by mole % ~15% of MgO and 0~1% of ZrO ₂ glass

(iv) containing 67 to 75% of SiO ₂ , 0 to 4% of Al ₂ O ₃ , 7 to 15% of Na ₂ O, and 1 to 9% of K ₂ O, 6 in terms of composition represented by mole % ~14% of MgO and 0~1.5% of ZrO ₂ , and the total content of SiO ₂ and Al ₂ O ₃ is 71 to 75%, and the total content of Na ₂ O and K ₂ O is 12 to 20%. Glass containing less than 1% in the case of CaO

In the method for producing a glass sheet according to the present invention, a gas or a liquid (hereinafter referred to as a fluorine-containing fluid) containing a molecule having a fluorine atom in its structure is brought into contact with at least one surface of a glass plate or a glass ribbon to carry out a surface treatment.

When the fluorine-containing fluid is brought into contact with at least one surface of the glass ribbon to perform surface treatment, the surface temperature of the glass ribbon is preferably 600 ° C or higher, more preferably 650 ° C or higher. By setting it to more than 650 ° C, it is easy to apply a fluorine-containing fluid blowing treatment to the obtained glass with a total amount of fluorine sufficient to reduce the amount of warpage of the glass after chemical strengthening. In addition, hereinafter, the term "glass plate" may be used as a collective term for a glass plate and a glass ribbon.

Examples of the fluorine-containing fluid include hydrogen fluoride (HF), chlorofluorocarbons (for example, chlorofluorocarbon, fluorocarbon, hydrofluorocarbon, hydrofluorocarbon, and sea dragon), hydrofluoric acid, fluorine, and trifluorocarbon. Acetic acid, carbon tetrafluoride, antimony tetrafluoride, phosphorus pentafluoride, phosphorus trifluoride, boron trifluoride, nitrogen trifluoride, chlorine trifluoride, etc.; but not limited to such gases or liquids.

Among these, hydrogen fluoride, chlorofluorocarbon or hydrofluoric acid is preferred in terms of high reactivity with the surface of the glass plate. Further, two or more of these gases may be used in combination. Further, when the glass is produced by the floating method, when the fluorine-containing fluid is blown to the glass ribbon, since the oxidizing power in the floating kiln is too strong, it is preferred that no fluorine is used.

Further, when a liquid is used, it can be supplied to the surface of the glass plate in a liquid state, for example, by spray coating, and the liquid can be vaporized and supplied to the surface of the glass plate. Alternatively, it may be diluted with other liquids or gases as needed.

As the fluorine-containing fluid, a liquid or a gas other than the liquid or gas may be contained. It is preferably a liquid or a gas which does not react with a molecule having a fluorine atom at normal temperature.

Examples of the liquid or gas include N ₂ , air, H ₂ , O ₂ , Ne, Xe, CO ₂ , Ar, He, and Kr. However, the present invention is not limited thereto. Further, two or more of these gases may be used in combination.

As the carrier gas for the fluorine-containing fluid, an inert gas such as N ₂ or argon is preferably used. Further, the fluorine-containing fluid may further contain SO ₂ . SO ₂ is used when continuously producing a glass plate by a float method or the like, and has a function of preventing the transfer roller from coming into contact with the glass plate in the slow cooling region to cause damage to the glass. Further, it may contain a gas which is decomposed at a high temperature.

Further, the fluorine-containing fluid may also contain water vapor or water. The water vapor can be taken out by introducing an inert gas such as nitrogen, helium, argon or carbon dioxide into the heated water. In the case where a large amount of water vapor is required, a method of directly vaporizing water by feeding it to a vaporizer may also be employed.

By blowing a fluorine-containing fluid to a glass or glass ribbon, fluorine can be invaded from the surface of the glass to obtain a fluorine-containing glass. The fluorine contained in the obtained glass must be greater than 0.23 mol%. Mm and 21mol%. The conditions for blowing the fluorine-containing fluid are adjusted in a manner of less than μm.

For example, when a fluorine-containing fluid is blown into a glass ribbon in a floating method to invade fluorine, the concentration of fluorine atoms in the fluorine-containing fluid is preferably from 0.1% by volume to 15% in terms of load on the apparatus. %, more preferably from 0.1% by volume to 10% by volume. Further, the surface temperature of the glass ribbon is preferably 600 ° C or more in terms of invading fluorine to a deeper portion of the glass.

The surface temperature of the glass ribbon is preferably (Tg + 50 ° C) to (Tg + 460 ° C), more preferably (Tg + 150 ° C) when the glass transition temperature of the glass sheet is Tg. (Tg + 460 ° C), further preferably (Tg + 230 ° C) ~ (Tg + 460 ° C).

In the case where the fluorine-containing fluid is blown to the glass ribbon, fluorine is invaded into the glass by blowing the fluorine-containing fluid, but before the glass ribbon is slowly cooled to produce the floating glass sheet, There is a case where a part of the invaded fluorine escapes from the glass.

However, in the gist of the present invention, since the amount of escaped fluorine is a small amount, there is no technical necessity to distinguish the concentration of fluorine atoms in the glass ribbon from the concentration of fluorine atoms in the float glass after the forming step. Sex.

In the present invention, a floating method will be described in detail as a specific example of a method of forming a molten glass into a plate-shaped glass plate. In the floating method, a glass plate is produced by using a glass manufacturing apparatus having a melting furnace that melts a raw material of glass, and a floating kiln that floats molten glass on a molten metal (tin or the like) to make a glass a belt forming; and a slow cooling furnace which cools the glass ribbon.

When the glass is formed on a molten metal (tin) bath, the surface of the glass plate may be treated by supplying a fluorine-containing fluid to the glass plate conveyed on the molten metal bath from the side (top surface) not in contact with the metal surface. . In the slow cooling zone following the molten metal (tin) bath, the glass sheets are conveyed by rollers.

Here, the slow cooling zone. It is not only in the slow cooling furnace, but also includes those that have been carried out from the molten metal (tin) bath in the floating kiln until they are transported to the slow cooling furnace. In the slow cooling zone, the gas may also be supplied from the side not in contact with the molten metal (tin).

Fig. 5 (a) is a schematic explanatory view showing a method of supplying a fluorine-containing fluid to the surface of the glass in the production of a glass plate by a floating method.

The flocculation kiln in which the molten glass is floated on the molten metal (tin or the like) to shape the glass ribbon 101 is blown to the glass ribbon 101 by the beam 102 inserted into the floatation kiln. As shown in Fig. 5(a), the fluorine-containing fluid is preferably blown to the glass ribbon 101 from the side where the glass ribbon 101 is not in contact with the molten metal surface. Arrow Ya indicates the direction in which the glass ribbon 101 travels in the float bath.

When the glass transition point is 550 ° C or higher, the temperature of the glass ribbon 101 at the position where the glass ribbon 101 is blown by the beam 102 by the beam 102 is preferably (Tg + 50) ° C ~ (Tg + 460) ° C, More preferably (Tg + 150) ° C ~ (Tg + 460) ° C, and further preferably (Tg + 230) ° C ~(Tg+460) °C. Although the temperature of the preferred glass ribbon varies depending on the type of fluid being blown, in principle the amount of fluorine in the glass obtained can be increased by blowing a higher concentration and/or a larger amount of fluid at a higher temperature.

Also, the position of the beam 102 can be upstream of the radiant gate 103 or downstream. In the case of HF, the amount of the fluorine-containing fluid to be blown to the glass ribbon 101 is preferably 1 × 10 ^-6 to 5 × 10 ^-3 mol / glass ribbon 1 cm ² .

Fig. 5(b) is a cross-sectional view taken along line A-A of Fig. 5(a). The fluorine-containing fluid blown from the direction of Y1 to the glass ribbon 101 by the beam 102 flows in from "IN" and flows out in the direction of "OUT". That is, it is moved in the direction of the arrows Y4 and Y5 to be exposed to the glass ribbon 101. Further, the fluorine-containing fluid moving in the direction of the arrow Y4 flows out in the direction of the arrow Y2, and the fluorine-containing fluid moving in the direction of the arrow Y5 flows out in the direction of the arrow Y3.

There is also a case where the amount of warpage of the glass plate after chemical strengthening changes due to the position of the glass ribbon 101 in the width direction. In this case, it is preferred to adjust the amount of the fluorine-containing fluid. That is, it is preferable to increase the amount of the fluorine-containing fluid to be blown at a position where the amount of warpage is large, and to reduce the amount of the fluorine-containing fluid to be blown at a position where the amount of warpage is small.

When the amount of warpage of the glass sheet after the chemical strengthening is changed by the position of the glass ribbon 101, the structure of the beam 102 can be adjusted to adjust the amount of the fluorine-containing fluid in the width direction of the glass ribbon 101. The amount of warpage is adjusted in the width direction of the glass ribbon 101.

As a specific example, a cross-sectional view of the beam 102 in which the amount of the fluorine-containing fluid is divided into three portions of I to III in the width direction 110 of the glass ribbon 101 is adjusted as shown in Fig. 6(a). The gas systems 111 to 113 are divided by the partition walls 114 and 115, and flow out of the fluorine-containing fluid from the blow holes 116 to be blown to the glass.

The arrows in Fig. 6(a) indicate the flow of the fluorine-containing fluid. The arrows in Fig. 6(b) indicate the flow of the fluorine-containing fluid in the gas system 111. The arrows in Figure 6(c) indicate the flow of the fluorine-containing fluid in the gas system 112. The arrows in Fig. 6(d) indicate the flow of the fluorine-containing fluid in the gas system 113.

Examples of the method of supplying the fluorine-containing fluid to the glass surface of the glass plate include a method using an ejector, a method using an introduction tube, and the like.

A schematic diagram of an injector for surface treatment of a glass sheet which can be used in the present invention is shown in Figs. 1 and 2. Figure 1 is a schematic representation of a dual flow injector that can be used in the present invention. Figure 2 is a diagrammatic representation of a single flow injector that can be used in the present invention.

The fluorine-containing fluid is ejected from the center slit 1 and the outer slit 2 toward the glass sheet 20, flows through the flow path 4 on the glass sheet 20, and is discharged from the exhaust slit 5. Further, reference numeral 21 in FIGS. 1 and 2 is a direction in which the glass sheet 20 travels, and is parallel to the flow path 4.

When the fluorine-containing fluid supplied from the ejector is a gas, the distance between the gas discharge port of the ejector and the glass plate is preferably 50 mm or less.

By setting the above distance to 50 mm or less, it is possible to suppress the gas from diffusing into the atmosphere, and a sufficient amount of gas reaches the glass sheet with respect to the desired amount of gas. Conversely, if the distance from the glass sheet is too short, the glass sheet produced by the floating method, for example, may be in contact with the ejector due to fluctuations in the glass ribbon.

Further, when the fluorine-containing fluid supplied from the ejector is a liquid, the distance between the liquid discharge port of the ejector and the glass plate is not particularly limited as long as it is a configuration in which the glass plate can be uniformly processed.

The ejector can be used in any of a two-flow or a single-flow manner, and two or more surfaces can be arranged in series along the traveling direction of the glass sheet to treat the surface of the glass sheet. As shown in FIG. 1, the two-flow ejector is an ejector that is equally divided into a forward direction and a reverse direction with respect to a moving direction of the glass sheet from the discharge to the discharged gas.

The dual flow injector is a conventional injector and is also known as a manufacturer of low reflection glass. For example, it is sometimes used in the following manner: a soda lime silicate glass (glass transition point 560 ° C) manufactured by Asahi Glass having a thickness of 1.8 mm reheated to 600 ° C, and a heat transfer from the center slit 1 at a flow rate of 64 cm/s. A gas obtained by mixing HF gas 1.12 SLM (liters per minute in a standard state) with nitrogen (N ₂ ) 9 SLM to 150 ° C, and blowing N ₂ gas 45.5 SLM from the outer slit 2 . The surface roughness (arithmetic mean roughness) Ra of the glass surface on which the HF gas was blown in this manner was 30.6 nm, and the above x value was 2.5 μm.

As shown in FIG. 2, the single-flow ejector is an ejector that is fixed in either the forward direction or the reverse direction with respect to the moving direction of the glass to the discharged glass. When a single-flow ejector is used, in terms of gas flow stability, it is preferred that the flow of the gas on the glass plate is the same as the direction of movement of the glass plate.

Further, it is preferable that the supply port of the fluorine-containing fluid is present in the glass at the exhaust port of the unreacted fluorine-containing fluid and the gas generated by the reaction with the glass plate or the gas generated by the reaction of the gas or the fluorine-containing fluid. The same side of the board.

When the surface of the glass plate to be conveyed is supplied with a fluorine-containing fluid for surface treatment, for example, when the glass plate is traveling on the conveyor, it may be supplied from the side not in contact with the conveyor. Further, the web may be supplied from the side contacting the conveyor by using a web material which is not covered by a part of the glass sheet such as a mesh belt by the conveyor belt.

Further, by arranging two or more conveyors in series and providing an ejector between adjacent conveyors, the gas is supplied from the side contacting the conveyor to treat the surface of the glass sheet. Further, when the glass sheet is traveling on the roll, it may be supplied from the side not in contact with the roll, or may be supplied from the adjacent roll to the side contacting the roll.

The same or different gases may also be supplied from both sides of the glass sheet. For example, the glass sheet may be surface-treated by supplying gas from the side not contacting the roll and the side contacting the roll. For example, when the gas is supplied from both sides in the slow cooling zone, the ejector may be disposed so that the glass being continuously conveyed is opposed to each other via the glass plate, and from the side not contacting the roller and contacting the roller Gas is supplied to both sides of the side.

The ejector disposed on the side contacting the roller and the ejector disposed on the side not in contact with the roller may be disposed at different positions in the traveling direction of the glass sheet. When configured in different locations In any case, either one may be disposed upstream with respect to the traveling direction of the glass sheet, or may be disposed downstream.

The operation of fabricating a glass plate with a functional film on-line by a combination of a glass manufacturing technique of a floating method and a chemical vapor deposition technique by CVD (Chemical Vapor Deposition) is widely known. It is known that in this case, the transparent conductive film and its base film are formed on the glass plate by supplying a gas from a surface which is not in contact with the tin or which is not in contact with the surface of the roll.

For example, in the manufacture of a glass plate with a functional film using in-line CVD, an ejector may be disposed on a surface contacting the roll, and a surface of the glass plate may be treated by supplying a fluorine-containing fluid to the glass plate from the ejector. .

Further, the pressure of the surface of the glass plate when the fluorine-containing fluid is supplied to the surface of the glass plate is preferably an environment of a pressure ranging from atmospheric pressure to 100 Pa to atmospheric pressure + 100 Pa, more preferably an atmosphere having a pressure ranging from atmospheric pressure of -50 Pa to atmospheric pressure of +50 Pa.

Regarding the gas flow rate, a case where HF is used as the fluorine-containing fluid will be representatively described. When the glass sheet is treated with HF, the more the HF flow rate is, the greater the warpage improvement effect in the chemical strengthening treatment is. Therefore, it is preferable that the higher the HF concentration is, the higher the HF concentration is, the warpage in the chemical strengthening treatment. The greater the improvement.

When the total gas flow rate and the HF gas flow rate are fixed, the longer the time for processing the glass sheet, the greater the warpage improvement effect during the chemical strengthening treatment. For example, in the case where the surface of the glass plate is treated with HF gas after heating the glass plate, the lower the conveying speed of the glass plate, the more the warpage after chemical strengthening is improved. Even in the case where the apparatus for controlling the total gas flow rate or the HF flow rate cannot be preferably controlled, the warpage after chemical strengthening can be improved by appropriately controlling the conveying speed of the glass sheet.

3. Chemical strengthening

The chemical strengthening is carried out by exchanging alkali metal ions (typically Li ions or Na ions) having a smaller ionic radius on the surface of the glass to a base having a larger ionic radius by ion exchange at a temperature below the glass transition point. Metal ions (typically K ions), thereby A compressive stress layer is formed on the surface of the glass. The chemical strengthening treatment can be carried out by a previously known method.

In the present invention, it is possible to chemically strengthen a glass plate to which fluorine is introduced, and to obtain a glass plate in which warpage after chemical strengthening is improved. The amount of change in the warpage of the glass plate after chemical strengthening with respect to the glass plate before chemical strengthening (the amount of warpage change) can be measured by a three-dimensional shape measuring machine (for example, manufactured by Sanying Optical Co., Ltd.) or surface roughness-contour shape. The measurement was performed by a machine (for example, manufactured by Tokyo Precision Co., Ltd.).

In the present invention, the improvement in warpage after chemical strengthening is carried out in an experiment in which conditions other than the surface treatment by a fluorine-containing fluid are the same, and the amount of warping displacement obtained by the following formula is used. Evaluation.

Warpage displacement = △ X - △ Y

△X: the amount of warpage change caused by chemical strengthening of the untreated glass plate

△Y: the amount of warpage change caused by chemical strengthening of the treated glass plate

Here, the amount of warpage change is a value obtained by subtracting the amount of warpage of the glass plate before chemical strengthening from the amount of warpage of the glass plate after chemical strengthening. Regarding the amount of warpage change, ΔX>0 was set. When ΔY is warped in the same direction as ΔX, ΔY>0 is set, and when it is warped in the opposite direction to ΔX, ΔY<0 is set.

The amount of warpage change caused by chemical strengthening of the untreated glass plate depends on various conditions, and the deviation is large. The amount of warping displacement greater than a specific value means that the warpage can be controlled regardless of the above deviation. Therefore, a glass plate having a warpage displacement amount of a specific value, specifically, 10 μm or more can alleviate the warpage problem.

The CS (surface compressive stress) and DOL (depth of the compressive stress layer) of the glass plate can be measured by a surface stress meter. The surface of the chemically strengthened glass preferably has a compressive stress of 600 MPa or more, and the depth of the compressive stress layer is preferably 15 μm or more. By setting the surface compressive stress of the chemically strengthened glass and the depth of the compressive stress layer to this range, excellent strength and scratch resistance can be obtained.

4. Flat panel display device

Hereinafter, an example will be described in which the chemically strengthened glass is used as a cover glass of a flat panel display device after chemically strengthening the glass plate of the present invention. Figure 3 is a cross-sectional view of a display device equipped with a cover glass. In the following description, the front, back, left, and right are based on the orientation of the arrow in the figure.

As shown in FIG. 3, the display device 40 includes a display panel 45 disposed in the housing 15 and a cover glass 30 disposed to cover the entire surface of the display panel 45 and surrounding the front of the housing 15.

The cover glass 30 is mainly provided to improve the appearance and strength of the display device 40, prevent impact damage prevention, and the like, and is formed of one piece of plate glass whose overall shape is a substantially planar shape. The cover glass 30 may be provided to be spaced apart from the display side (front side) of the display panel 45 (having an air layer) as shown in FIG. 3, or may be provided via a translucent adhesive film (not shown). Attached to the display side of the display panel 45.

The functional film 41 is provided on the surface of the cover glass 30 before the light from the display panel 45 is emitted, and the functional film 42 is provided at a position corresponding to the display panel 45 on the back surface on which the light from the display panel 45 is incident. Further, the functional films 41 and 42 are provided on both sides in FIG. 3, but are not limited thereto, and may be provided on the front surface or the back surface, and may be omitted.

The functional films 41 and 42 have functions such as preventing reflection of ambient light, preventing impact damage, shielding electromagnetic waves, shielding near infrared rays, correcting color tone, and/or improving damage resistance, and the thickness, shape, and the like can be appropriately selected depending on the application. The functional films 41 and 42 are formed, for example, by attaching a resin film to the cover glass 30. Alternatively, it may be formed by a film formation method such as a vapor deposition method, a sputtering method, or a CVD method.

Reference numeral 44 is a black layer, for example, a coating film formed by applying an ink containing pigment particles to the cover glass 30 and irradiating with ultraviolet rays or heating and then cooling, so that a display panel or the like cannot be observed from the outside of the casing 15. And improve the aesthetics of the appearance.

Thus, in the case where the glass plate of the present invention is used as the cover glass of the display device In time, the surface roughness (arithmetic mean roughness) Ra is preferably 2.5 nm or less, and more preferably 1.5 nm or less. Thereby, it is possible to prevent the sharpness of the display image of the display device from being damaged by the cover glass. The surface roughness Ra of the glass plate can be measured in the following manner in accordance with JIS B0601 (2001). An AFM (Atomic Force Microscope), for example, XE-HDM manufactured by Park Systems, Inc., was used as a measuring device, and three measurements were performed at a scan size of 1 μm × 1 μm, and the average value of three points was taken as the Ra value of the glass plate.

Example

Hereinafter, the examples of the present invention will be specifically described, but the present invention is not limited thereto.

(composition of glass plates)

In the present embodiment, the glass sheets of the glass materials A and B of the following composition were used.

(Glass material A) glass containing 72.0% of SiO ₂ , 1.1% of Al ₂ O ₃ , 12.6% of Na ₂ O, 0.2% of K ₂ O, 5.5% of MgO, and 8.6% of CaO. (glass transition temperature 566 ° C)

(Glass material B) contains 64.3% of SiO ₂ , 8.0% of Al ₂ O ₃ , 12.5% of Na ₂ O, 4.0% of K ₂ O, 10.5% of MgO, 0.1% of CaO, 0.1. Glass of % SrO, 0.1% BaO and 0.5% ZrO ₂ (glass transition temperature 604 ° C)

(Measurement of warpage amount)

After the amount of warpage was measured by a Surfcom surface roughness-contour shape measuring machine (manufactured by Tokyo Seimitsu Co., Ltd.) before chemical strengthening, each glass was chemically strengthened, and the amount of warpage after chemical strengthening was measured in the same manner, and based on The above-described steps were used to calculate the amount of warping displacement.

(Secondary ion mass spectrometry: SIMS)

The analysis conditions of secondary ion mass spectrometry were set as follows.

Measuring device: ADEPT1010 manufactured by ULVAC-PHI

Primary ion species: Cs ⁺

One acceleration voltage: 5.0kV

Primary ion current: 1μA

Primary ion incidence angle (angle from the vertical direction of the sample surface): 60°

Raster size: 200 × 200μm ²

Detection area: 40 × 40 μm ²

Secondary ion polarity: negative

Use of neutralizing electron guns: Yes

From the results obtained, the intensity ratio (F/Si) was obtained by the above formulas 1 to 4, and further converted into a fluorine concentration (mol%). A depth direction distribution in which the horizontal axis is the depth and the vertical axis is the fluorine concentration (mol%) is prepared, and the integrated value is defined as the amount of fluorine (mol%. μm) contained in the glass.

Further, the depth of the horizontal axis of the depth direction distribution obtained by SIMS analysis was measured by using a stylus type film thickness meter (Dektak 150 manufactured by Veeco Co., Ltd.) to measure the depth of the pit.

(HF total contact amount)

The total amount of HF contact (mol/cm ² ) was determined by the following formula. The processing time in the equation is the time during which the HF gas comes into contact with the surface of the glass ribbon.

[HF total contact amount (mol/cm ² )] = [HF gas concentration (% by volume)] / 100 × [gas flow rate (mol / s / cm ² )] × [processing time (s)] (b)

[Example 1]

In the floatation kiln in which the glass ribbons of the glass materials A and B travel, fluorine treatment (hereinafter referred to as HF treatment) is performed using HF gas as a fluorine-containing fluid. The obtained glass was measured by the above procedure, and the amount of fluorine contained in the glass, the intrusion depth x of fluorine, the surface fluorine concentration, and the like were calculated.

The obtained glass having a thickness of 0.7 mm was cut into three pieces of 100 mm square, and two diagonal warpages of the portion corresponding to the 90 mm square portion of the substrate were measured, and the average value was used as the warpage before strengthening. the amount. Thereafter, the glass plate of the glass material B was immersed in a KNO ₃ molten salt heated to 450 ° C for 2 hours, and the glass plate of the glass material A was immersed in a KNO ₃ molten salt heated to 420 ° C for 2.5 hours to carry out chemistry. strengthen. Next, the warpage of the two diagonals of the portion corresponding to the 90 mm square portion of the substrate was measured, and the average value thereof was taken as the amount of warpage after the reinforcement.

The results are shown in Tables 1 to 3. Further, Comparative Examples 1-1 to 1-3 are not referred to for HF treatment.

The numerical values described in the column "a" of Table 3 are obtained by the following formula.

a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by SIMS) / (the concentration of fluorine in the surface of the smaller fluorine concentration of 3 μm from the SIMS)

The numerical values described in the column "b" of Table 3 are obtained by the following formula.

b=F ₃ -3×a

a=(F ₂₀ -F ₃ )/17

F ₂₀ = (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face with a large fluorine concentration) / (the concentration of fluorine obtained by SIMS with a depth of 20 μm in the face having a small fluorine concentration)

F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by SIMS) / (the concentration of fluorine in the surface of the smaller fluorine concentration of 3 μm by SIMS)

As shown in Tables 1 to 3, the glass sheets of Examples 1-1 to 1-37 which were surface-treated by HF were compared with those of Comparative Examples 1-1 to 1-3 which were not surface-treated with HF. Rear The warpage is improved. According to the above, as for the glass plate in which the average fluorine concentration in the SIMS analysis at a depth of 0 to 20 μm is larger than the average fluorine concentration at a depth of 0 to 20 μm on the other surface, the warpage displacement amount is 10 μm or more, and the warpage after chemical strengthening is increased. The song was improved.

Moreover, it can be seen that the ratio of the average value of the depth direction distribution at a depth of 0 to 20 μm on one side to the average value of the depth direction distribution at a depth of 0 to 20 μm on the other side is more than 1.4 and the amount of fluorine contained in the glass is more than 0.23 mol%. . Mm and 21mol%. Examples 1-1 to 1-37 below μm have a higher warpage improvement effect after chemical strengthening. Further, as shown in Tables 1 to 3, it was found that the warpage after chemical strengthening of Examples 1-1 to 1-37 in which x (μm) was 1 or more was effectively improved.

Further, as shown in Tables 1 to 3, it is understood that the warpage after chemical strengthening is improved by setting a to less than -0.1 and the warpage displacement amount to be 10 μm or more. In addition, it is understood that b is set to 4 or more, and the warpage displacement amount is 10 μm or more, and warpage after chemical strengthening is improved. Further, it is understood that when F _{3 is} 4 or more, the warpage displacement amount is 10 μm or more, and warpage after chemical strengthening is improved.

The present invention has been described in detail with reference to the specific embodiments thereof. It is understood that various changes and modifications may be made without departing from the spirit and scope of the invention.

Further, the present application is based on a Japanese patent application filed on Sep. 25, 2013 (Patent Application No. 2013-198472), the entire disclosure of which is incorporated herein by reference.

Claims (16)

A glass plate which is in a depth direction distribution obtained by secondary ion mass spectrometry (SIMS) with a horizontal axis as a depth and a vertical axis as a fluorine concentration (mol%), and a depth of one side at a depth of 0 to 20 μm The average value of the direction distribution is larger than the average value of the depth direction distribution at a depth of 0 to 20 μm of the other surface, and the ratio of the two is greater than 1.4; and the depth is the horizontal axis and the vertical axis is the fluorine concentration (mol%). The amount of fluorine contained in the glass is greater than 0.23 mol% in the depth direction distribution obtained by SIMS. Mm and 21mol%. Below μm. In the glass plate of claim 1, the ratio of the average value of the depth direction distribution at a depth of 0 to 20 μm on one side to the average value of the depth direction distribution at a depth of 0 to 20 μm on the other surface is 4 or more. The glass plate of claim 1 is manufactured by a floating method, and the average value of the depth direction distribution at a depth of 0 to 20 μm of the top surface is larger than the average value of the depth direction distribution at a depth of 0 to 20 μm of the bottom surface. . In the glass plate of claim 3, the ratio of the average value of the depth direction distribution at a depth of 0 to 20 μm of the top surface to the average value of the depth direction distribution at a depth of 0 to 20 μm of the bottom surface is 4.9 or more. A glass plate which is attached to a depth direction distribution obtained by SIMS with a horizontal axis as a depth and a vertical axis as a fluorine concentration (mol%), and an average value of a depth direction distribution at a depth of at least one side of 0 to 20 μm is larger than The average value of the depth direction distribution at a depth of 50 to 70 μm; and the amount of fluorine contained in the glass in the depth direction distribution obtained by SIMS with the horizontal axis as the depth and the vertical axis as the fluorine concentration (mol%) More than 0.23mol%. Mm and 21mol%. Below μm. The glass plate according to any one of claims 1 to 5, wherein at least one side has a depth of 0 to 20 μm in a depth direction distribution obtained by SIMS on a horizontal axis and a vertical axis as a fluorine concentration (mol%) The value (S ₁ /S ₄ ) obtained by dividing the average value (S ₁ ) of the depth direction distribution at the depth direction by the average value (S ₄ ) of the depth direction distribution at a depth of 50 to 70 μm observed from the same direction is 2.1 or more. The glass plate according to any one of claims 1 to 6, wherein at least one side has a depth of 0 to 20 μm in a depth direction distribution obtained by SIMS on a horizontal axis and a vertical axis as a fluorine concentration (mol%). The value (S ₁ /S ₄ ) obtained by dividing the average value (S ₁ ) of the depth direction distribution at the depth direction by the average value (S ₄ ) of the depth direction distribution at a depth of 50 to 70 μm observed from the same direction is 2.1 to 100. A glass sheet according to claim 6 or 7, which is produced by a floating method. The glass plate according to any one of claims 1 to 8, which has a thickness of 1.5 mm or less. The glass plate according to any one of claims 1 to 9, which has a thickness of 0.8 mm or less. The glass plate according to any one of claims 1 to 10, which has a surface roughness Ra of 2.5 nm or less. A chemically strengthened glass plate obtained by chemically strengthening a glass plate according to any one of claims 1 to 11. A flat panel display device comprising a cover glass and the cover glass is a chemically strengthened glass sheet of claim 12. A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other side; and a which is represented by the following formula is less than -0.1, with a depth on the horizontal axis and a fluorine concentration on the vertical axis (mol %) The distribution of the depth direction obtained by SIMS, the amount of fluorine contained in the glass is greater than 0.23 mol%. Mm and 21mol%. Μm or less; a=(F ₂₀ -F ₃ )/17 F ₂₀ =(the concentration of fluorine in the surface having a large fluorine concentration of 20 μm by SIMS)/(the depth in the surface having a small fluorine concentration is 20 μm) The fluorine concentration obtained by SIMS) F ₃ = (the concentration of fluorine in the surface of the larger fluorine concentration of 3 μm by the SIMS) / (the depth in the surface of the smaller fluorine concentration of 3 μm, the fluorine obtained by SIMS) concentration). A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other side; and b represented by the following formula is 4 or more, and is a depth on the horizontal axis and a fluorine concentration on the vertical axis (mol%) The distribution of the depth in the glass by the SIMS is greater than 0.23 mol%. Mm and 21mol%. Μm or less; b=F ₃ -3×aa=(F ₂₀ -F ₃ )/17 F ₂₀ =(the concentration of fluorine in the surface of the surface having a large fluorine concentration of 20 μm by SIMS) / (the fluorine concentration is small) The fluorine concentration obtained by SIMS with a depth of 20 μm in the surface) F ₃ = (the concentration of fluorine obtained by SIMS at a depth of 3 μm in the surface having a large fluorine concentration) / (the depth in the surface having a small fluorine concentration of 3 μm) The fluorine concentration obtained by SIMS). A glass plate which is a fluorine-containing glass plate having a fluorine concentration on one side larger than a fluorine concentration on the other side; and F ₃ represented by the following formula is 4 or more, and has a depth on the horizontal axis and a fluorine concentration on the vertical axis (mol) %) The distribution of the depth direction obtained by SIMS, the amount of fluorine contained in the glass is greater than 0.23 mol%. Mm and 21mol%. Below μm; F ₃ = (the concentration of fluorine obtained by SIMS at a depth of 3 μm in a surface having a large fluorine concentration) / (the concentration of fluorine obtained by SIMS at a depth of 3 μm in a face having a small fluorine concentration).