TW201512120A - Scribing head, scribing device and scribing method - Google Patents

Abstract

The present invention not only inhibits damage of the cutter, but truly forms a starting-point crack. A cutter 120 is installed in the machine body part 110; the load part 130, including a first actuator 131 for generating the force LD, applies a continuous force LD on the machine body part 110 by means of pressing the cutter 120 against the top of the substrate 4; the impact part 140, including a hitting member 142, a second actuator 141 and a stopping member 144, applies an abrupt impact force on the machine body part 110 by means of pressing the cutter 120 against the top of the substrate 4, wherein the hitting pin 142 can displace by means of hitting the machine body part 110, the second actuator 141 can apply a continuous force against the hitting member 142 toward the machine body part 110, and the stopping member 144 cam temporarily stop the hitting pin 142 at a location separated from the machine body part 110.

Description

Dash head, scribing device and scribing method

The present invention relates to a scribing head, a scribing apparatus, and a scribing method, and more particularly to a scribing head and scribing apparatus including a cutter, and a scribing method using the scribing apparatus.

In the manufacture of electrical equipment such as flat display panels or solar cell panels, substrates made of brittle materials such as glass, semiconductor, sapphire, ceramics, etc. are often cut. In most cases, the scribing device is used to scribe the substrate. That is, a scribe line is formed on the surface of the substrate. The scribe line refers to a crack that extends linearly on the surface of the substrate and travels in the thickness direction of the substrate to a degree sufficient for breaking. The term "breaking" refers to a step of imparting stress to a substrate after forming a scribe line. The crack is completely traveled in the thickness direction by breaking, thereby completely cutting the substrate along the scribe line.

If the edge of the substrate is used as a starting point, the scribe line can be easily formed. The reason for this is that local damage is likely to occur at the edge of the substrate, and the damage can be used as a starting point to extend the scribe line. However, it is often desirable to begin forming a scribe line starting from a position spaced apart from the edge of the substrate. In this case, since the starting point is on the flat surface of the surface of the substrate instead of the edge of the substrate, the tip of the cutter is easy to slip. Therefore, it is difficult to generate damage (hereinafter referred to as a starting crack) which is used to start the formation of the scribe line. Therefore, the technique of forming a starting crack is studied.

A method of forming a scribe line on a surface of a workpiece is disclosed in Japanese Laid-Open Patent Publication No. 2000-264656 (Patent Document 1). The scribing device includes a scribing body, and the scribing body has a cut The knife and the vibration generating member that imparts vibration to the cutter. According to this method, the cutter is positioned directly above the starting point of the scribing line by relatively moving the scribing body along the workpiece surface in a state of being spaced apart from the workpiece. Then, the scribing body is lowered, whereby the front end of the cutter abuts on the starting point of the scribing line with the self-weight of the scribing body. Thereafter, by applying an impact to the scribe line body, a starting point crack is formed on the workpiece surface at a starting point of the scribe line spaced apart from the edge. By applying vibration to the workpiece, a scribe line is formed starting from the starting crack.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2000-264656

The starting point crack is formed by imparting an impact to the scribing body (the scribing head). Therefore, if the impact is too small, the starting point crack cannot be formed, and if the impact is too large, unnecessary damage to the cutter is caused. Therefore, it is required to precisely control the magnitude of the impact. However, in the technique described in the above publication, the variation in the magnitude of the impact is large.

The present invention has been made in order to solve the above problems, and an object of the invention is to provide a method for suppressing damage to a cutter and reliably forming a starting point crack when a scribe line is formed at a position spaced apart from an edge of the substrate. Head, scribing and scribing methods.

The scribing head of the present invention is for forming a scribing surface on the surface of the substrate, and includes a fuselage portion, a cutter, a load portion, and an impact portion. The cutter is mounted on the fuselage section. The load portion applies a continuous force to the body portion by pressing the cutter against the surface of the substrate. The load portion includes a first actuator for generating a force. The impact portion can apply an impact force to the body portion by pressing the cutter against the surface of the substrate. The impact portion includes a striking member, a second actuator, and a stopper. The striking member can be displaced in a manner that hits the fuselage portion. The second actuator can apply a continuous force to the striking member toward the fuselage portion. The stopping portion temporarily blocks the striking member from The position where the fuselage section is separated.

Preferably, the scribing head includes a base portion, and the base portion has a fulcrum that rotatably supports the body portion.

Preferably, the scribing head is configured to change the height of the fulcrum.

The scribing device of the present invention includes the scribing head and the driving portion. The driving portion relatively displaces the substrate and the scribing head.

The scribing method of one aspect of the present invention includes the following steps. Prepare the fuselage section with the cutter installed. The striking member is stopped at a position spaced apart from the body portion, and a continuous force is applied to the striking member toward the body portion. Release the struck member that is blocked. The striking member is struck by the released striking member, and the cutter is pressed against the surface of the substrate with an impact force, thereby forming a starting crack on the surface of the substrate. Applying a continuous force to the body portion by pressing the cutter against the surface of the substrate, the cutter is moved on the surface of the substrate by the relative displacement of the substrate and the body portion, thereby making the stroke The line extends from the starting point crack.

In the above-described one-line scribing method, it is preferred that the step of preparing the fuselage portion is performed by preparing a scribing head. The scribing head includes a fuselage portion and a base portion. A cutter is attached to the fuselage section. The base portion has a fulcrum that supports the body portion in a rotatable manner. The step of moving the cutter on the surface of the substrate may be performed in such a manner that the fulcrum is located on the rear side of the cutter, or the fulcrum may be located on the front side of the cutter.

Another aspect of the scribing method of the present invention includes the following steps. While the cutter is placed on the surface of the substrate, the cutter is pressed against the surface of the substrate by force F ₁ . Static disposed on the upper surface of the substrate with a force F ₁ and pressed against the cutter on the surface of the substrate than the force F ₁ is applied to a large force F _2, to form a starting point of cracking on the surface of the substrate. The cutter is moved on the surface of the substrate by the relative displacement of the substrate and the body portion, and the cutter is pressed against the surface of the substrate by a force F ₃ with a force F ₁ to make the line The starting crack is extended.

Another aspect of the above-described scribing method, a force F ₂ is preferably a force of impact.

According to the scribing head and scribing device of the present invention, and the scribing method of one aspect of the present invention, the striking member for forming the starting point crack is applied to the fuselage portion by being released from the actuator Forced and struck by the striking member. Thereby, the magnitude of the force from the actuator can be stabilized during the period in which the striking member is blocked. Therefore, the impact force applied to the cutter at the time of forming the starting crack can be accurately controlled to a desired sufficient size. Thereby, it is possible to avoid unnecessary damage to the cutter due to excessive impact force, or conversely, the impact crack force is too small to form a starting crack. Therefore, damage to the cutter can be suppressed and the starting crack can be surely formed.

According to another aspect of the present invention, when an impact force is applied to the cutter to form a starting crack, the cutter is preliminarily pressed against the surface of the substrate by a force exerted by the scribe line. . Thereby, when the scribe line is formed at a position spaced apart from the edge of the substrate, the blade can be sufficiently suppressed from rebounding on the surface of the substrate. Therefore, damage to the cutter can be suppressed and the starting crack can be surely formed.

As described above, according to the present invention, when the scribe line is formed at a position spaced apart from the edge of the substrate, damage to the cutter can be suppressed and the starting crack can be surely formed.

1‧‧‧ scribe device

4‧‧‧Substrate

10‧‧‧Holding unit

10a‧‧‧ base

11‧‧‧ platform

11a‧‧‧Adsorption Department

11b‧‧‧Rotary table

11c‧‧‧Mobile Station

11d‧‧‧Rotary axis

12‧‧‧Rolling screw mechanism

12a‧‧‧feed screw

12b‧‧‧Nuts

13‧‧‧Motor

14a‧‧‧Support Department

14b‧‧‧Support Department

15, 16‧‧‧ rails

17‧‧‧Sliding section

18‧‧‧Sliding section

20‧‧‧dotted unit

30‧‧‧Scribe head

30V‧‧‧Drawing head

70‧‧‧ Drive Department

71‧‧‧ pillar

72‧‧‧rails

73‧‧‧Motor

80‧‧‧ camera unit

85‧‧‧ camera

90‧‧‧Control unit

91‧‧‧ROM

91a‧‧‧Program

92‧‧‧RAM

93‧‧‧CPU

110‧‧‧Face Department

111‧‧‧ body body

112‧‧‧Retainer support member

113‧‧‧Rotating components

120‧‧‧Cutter

121‧‧‧Tool tip

122‧‧‧keeper

130‧‧‧Load Department

131‧‧‧Cylinder (1st actuator)

132‧‧‧ Press pin

140‧‧‧ Impact Department

141‧‧‧Cylinder (2nd actuator)

142‧‧‧ hitting pin (hitting component)

143‧‧‧ switch

144‧‧‧Baffle (stop)

150‧‧‧Base section

151‧‧‧Base body

152‧‧‧Restrictions

153‧‧‧Axis support members

AG‧‧‧ angle

AR1‧‧‧ arrow

AR2‧‧‧ arrow

AX‧‧‧ pivot

CT‧‧‧Extension direction

DR1‧‧‧direction of travel

DR2‧‧‧direction of travel

EG‧‧‧ edge

F‧‧‧ force

F ₁ ‧‧‧ force

F ₂ ‧‧‧ force

F ₃ ‧‧‧ force

FC‧‧‧ surface

HL‧‧‧ screw holes

HM‧‧‧ screw holes

IP‧‧‧ impact

LD‧‧‧ force

LD ₁ ‧‧‧ force

LD ₂ ‧‧‧ force

LE‧‧‧力

NM‧‧‧ normal direction

R1‧‧‧ arrow

SL‧‧‧

TG‧‧‧ starting crack

Fig. 1 is a side view schematically showing the configuration of a scribing head according to a first embodiment of the present invention.

Figure 2 is a partial enlarged view of the cutter of Figure 1.

Fig. 3 is a plan view schematically showing a scribe line formed by the scribing method according to the first embodiment of the present invention.

Fig. 4 is a side view schematically showing a first step of the scribing method according to the first embodiment of the present invention.

Fig. 5 is a side view schematically showing a second step of the scribing method according to the first embodiment of the present invention.

Fig. 6 is a side view schematically showing the third step of the scribing method according to the first embodiment of the present invention; view.

Fig. 7 is a flow chart schematically showing an aspect of the scribing method according to the first embodiment of the present invention.

Fig. 8 is a flow chart schematically showing another aspect of the scribing method according to the first embodiment of the present invention.

Fig. 9 is a view schematically showing the operation of the scribing method according to the first embodiment of the present invention.

Fig. 10 is a side view schematically showing a first step of the scribing method according to the second embodiment of the present invention.

Fig. 11 is a side view schematically showing a second step of the scribing method according to the second embodiment of the present invention.

Fig. 12 is a side view schematically showing a third step of the scribing method according to the second embodiment of the present invention.

Fig. 13 is a side view schematically showing the configuration of a scribing head according to a third embodiment of the present invention.

Fig. 14 is a side view schematically showing a state in which the fulcrum of the scribing head of Fig. 13 is changed.

Fig. 15 is a front elevational view schematically showing the configuration of a scribing apparatus according to a fourth embodiment of the present invention.

Fig. 16 is a side view schematically showing the configuration of a scribing apparatus according to a fourth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described based on the drawings. In the following drawings, the same or corresponding components are designated by the same reference numerals, and the description is not repeated.

(Embodiment 1)

Fig. 1 shows a stage 11 of a scribing head 30, a substrate 4, and a support substrate 4 of the present embodiment. The scribing head 30 of the present embodiment is used in combination with a mechanism (not shown in FIG. 1) for displacing the scribing head 30 with respect to the substrate 4, and is used in the scribing device. In the following, the case where the relative displacement is performed by moving the scribing head 30 while standing on the substrate 4 is described below. However, as long as the equivalent relative displacement can be obtained, the engraving may be performed. The wire head 30 moves while the substrate 4 is stationary, or both can be moved.

The scribing head 30 is used to form a scribe line on the surface FC of the substrate 4. The substrate 4 is made of a brittle material such as glass, semiconductor, sapphire or ceramic. The scribing head 30 includes a body portion 110, a cutter 120, a load portion 130, an impact portion 140, and a base portion 150.

The cutter 120 is attached to the body portion 110. The cutter 120 is pressed against the surface FC of the substrate 4 by the force F under the action of the body portion 110.

Furthermore, referring to FIG. 2, the cutter 120 has a blade edge 121 and a holder 122 that holds the blade tip 121. Preferably, the cutter 120 is a diamond point. That is, the blade tip 121 is preferably made of diamond. The diamond is a natural or synthetic single crystal diamond, a polycrystalline diamond, or a sintered diamond obtained by combining diamond particles using a bonding material such as an iron group element. In a plane formed by the following traveling direction DR1 of the scribing head 30 and the normal direction NM of the surface FC of the substrate 4, the traveling direction DR1 and the extending direction CT of the holder 122 extending toward the blade edge 121 preferably form over 90. ° and not at an angle of 180 ° AG.

Further, the holder 122 is, for example, a rod extending in a cylindrical shape or a columnar shape. The shape of the blade edge 121 may be determined by a scribe line, and is, for example, a quadrangular frustum shape. The retainer 122 preferably has a maximum dimension of about 2 mm to 6 mm (having a diameter dimension when the retainer 122 is cylindrical) in a cross section having a normal line along the extending direction CT. The length of the holder 122 along the extending direction CT is preferably about 10 to 70 mm. When the blade tip 121 has a quadrangular frustum shape, the dimension of the blade edge 121 near one side of the joint portion with the front end portion of the retainer 122 is preferably about 0.5 to 3.0 mm, more preferably about 0.8 to 2.0 mm. .

The body portion 110 has a body body 111 and a holder supporting member 112. Holder support The member 112 can support the retainer 122 in an extended direction CT (FIG. 2) in which the retainer 122 of the cutter 120 extends.

The base portion 150 has a base body 151 and a restricting portion 152. The base body 151 has a fulcrum AX that rotatably supports the body portion 110. The restricting portion 152 limits the range in which the body portion 110 is swung downward.

The load portion 130 is supported by the base portion 150. The load portion 130 can apply a continuous force LD to the body portion 110 in such a manner that the cutter 120 is pressed against the surface FC of the substrate 4. The load portion 130 has a cylinder 131 (first actuator) for generating a force LD, and a pressing pin 132 for transmitting a force.

The impact portion 140 is supported by the base portion 150. The impact portion 140 can apply an impact force to the body portion 110 in such a manner that the cutter 120 is pressed against the surface FC of the substrate 4. The impact portion 140 has a cylinder 141 (second actuator), a striking pin 142 (strike member), a switch 143, and a baffle 144 (stop portion).

The cylinder 141 can cause the striking pin 142 to protrude by applying a continuous force LE to the striking pin 142 toward the fuselage portion 110. The striking pin 142 is displaceable between the position of the return end and the position of the projecting end by the cylinder 141. The striking pin 142 is spaced from the fuselage portion 110 when in the return end, and the striking pin 142 is in contact with the fuselage portion 110 when in the protruding end. Thereby, the striking pin 142 can be displaced in such a manner as to hit the body portion 110.

Switch 143 is an actuator that switches the position of baffle 144 between a closed position and an open position, such as a cylinder. The baffle 144 (Fig. 1) in the closed position blocks the striking pin 142 from being projected toward the fuselage portion 110. In this case, the striking pin 142 is pressed against the baffle 144 to prevent the striking pin 142 from being displaced. That is, the flap 144 blocks the striking pin 142 from a position spaced apart from the body portion 110. If the flapper 144 is moved to the open position, i.e., the flapper 144 is retracted toward the upper side in FIG. 1, the flapper 144 does not stop the striker pin 142. As described above, the flapper 144 is configured to temporarily block the striking pin 142 from a position spaced apart from the body portion 110.

Referring to Fig. 3, in the scribing method of the present embodiment, the scribe line SL is made from the starting point crack TG. Extend. That is, the starting point crack TG is first formed, and then the scribe line SL is formed from the starting point crack TG. The starting crack TG is formed at a position spaced apart from the edge EG of the substrate 4. 4 to 6 show the first to third steps of the scribing method, respectively. In addition, FIG. 7 and FIG. 8 respectively show a schematic flow from a different viewpoint. Fig. 9 is a diagram showing the operation of the scribing device. Hereinafter, the scribing method will be specifically described.

Referring to FIG. 4, a scribing head 30 is prepared. The scribing head 30 includes a body portion 110 to which a cutter 120 is mounted, and a base portion 150 having a pivot point AX for pivotally supporting the body portion 110. (Fig. 7: Step S10). The scribing head 30 is horizontally moved and lowered in such a manner that the cutter 120 is disposed at a position where the surface FC of the substrate 4 is formed with the starting crack TG (Fig. 3).

Further, the shutter 144 is placed in the closed position (the position shown in FIG. 4) and the pressure of the cylinder 141 is increased. Thereby, the striking pin 142 is stopped at a position spaced apart from the body portion 110, and a continuous force LE is applied to the striking pin 142 (FIG. 7: step S20). The pressure of the cylinder 141 tends to become unstable at the moment when the pressure is increased, but is stabilized as time passes. Thereby, the final size of the force LE can be accurately set.

Further, while the cutter 120 is placed on the surface FC of the substrate 4, the cutter 120 is pressed against the surface FC of the substrate 4 by the force F ₁ by causing the cylinder 131 to generate a continuous force LD ₁ (Fig. 8). :Step T10).

Further, referring to Fig. 5, the shutter 144 is moved to the open position. Thereby, the striking pin 142 blocked by the flapper 144 is released (FIG. 7: step S30). As a result, after the striking pin 142 urged by the force LE (Fig. 4) is rapidly accelerated, the body portion 110 is struck with the impact force IP. Typically, the impact force IP lasts less than one second.

The cutter 120 (Fig. 4) resting on the surface FC of the substrate 4 and pressed against the surface FC of the substrate 4 by the force F ₁ hits the fuselage portion 110 (Fig. 5) by the hit pin 142, and is impacted The force F _{2 is} pressed against the surface FC of the substrate 4 (Fig. 8: step T20). The force F ₂ is generated by the force F ₁ generated by the cylinder 131 and the force of the striking pin 142, and is of course greater than the force F ₁ . By the force of impact F _2, to form a starting point of cracking TG (FIG. 3) (FIG. 7: Step S40) on the surface of the substrate 4 FC.

Referring to FIG. 6, after the hit pin 142 hits the body portion 110, the hit pin 142 is returned to a position spaced apart from the body portion 110. Also, the shutter 144 is moved to the closed position.

Continuous use of the force applied by the cylinder 131 pairs of body portion 110 LD _2, and the cutter 120 with a force F ₃ pressed against the upper surface of the substrate 4 FC. The force LD _{2 is} smaller than the above force LD ₁ (Fig. 4). Therefore, the force F _{3 is} smaller than the force F ₁ . Conversely, a force greater than the force F ₁ F _3, F ₃ preferably of less than about 2 times and about 5 times less force.

In a state where the force F ₃ is applied, the scribing head 30 is moved toward the traveling direction DR1, whereby the cutter 120 is moved on the surface FC of the substrate 4 (FIG. 8: Step T30). The traveling direction DR1 is along the direction from the fulcrum AX toward the cutter 120. Thereby, the transition of the cutter 120 on the surface FC of the substrate 4 is performed such that the fulcrum AX is located on the rear side of the cutter 120. Therefore, as shown in FIG. 3, the scribe line SL is extended from the starting point crack TG (FIG. 7: step S50).

According to the present embodiment, the striking pin 142 for forming the starting point crack TG strikes the body portion 110 by releasing the striking pin 142 by which the force is applied from the cylinder 141 and is blocked. Thereby, the magnitude of the force from the cylinder 141 can be stabilized during the period in which the hit pin 142 is blocked. Therefore, the impact force applied to the cutter 120 at the time of forming the starting crack TG can be accurately controlled to a desired sufficient size. Thereby, unnecessary damage to the cutter 120 due to excessive impact force can be avoided, or conversely, the starting point crack cannot be formed because the impact force is too small. Therefore, damage to the cutter 120 can be suppressed and the starting crack TG can be surely formed.

And, starting at ₂ to form cracks on the knife 120 exerts a force F., The force to advance the cutter 120 form a scribe line is applied more of a large force F ₃ F ₁ FC pressed against the upper surface of the substrate 4. Thereby, when the scribe line is formed at a position separated from the edge of the substrate 4, the cutter 120 can be sufficiently suppressed from rebounding on the surface FC of the substrate 4. Therefore, the damage to the cutter 120 can be suppressed and the starting point crack can be surely formed. Also, the force F ₂ is the force of impact. Thereby, the starting point crack can be formed more surely.

Further, the base portion 150 has a fulcrum AX that rotatably supports the body portion 110. borrow Thereby, the impact force of the impact portion 140 can be transmitted to the cutter 120 via the swirling motion. Further, the step of moving the cutter 120 on the surface FC of the substrate 4 is performed such that the fulcrum AX is located on the rear side of the cutter 120. Thereby, the cutter 120 easily bites into the substrate 4 at the time of formation of the scribe line.

Further, the cylinder 131 for applying a load to the cutter 120 at the time of forming the scribe line is used separately for the cylinder 141 for applying an impact force to the cutter 120 when the starting point crack is formed. Thereby, a cylinder suitable for applying a load and a cylinder suitable for applying an impact force can be individually selected.

Further, the force which is pressed against the cutter 120 at the time of forming the starting point crack and the force which is pressed against the cutter 120 when the scribe line is formed are generated by the cylinder 131. Thereby, the configuration of the scribing head can be made simpler than in the case of providing two cylinders each generating the same force.

(Embodiment 2)

In the first embodiment described above, when the scribe line SL is formed, the scribe head 30 is moved in the traveling direction DR1 (FIG. 6). On the other hand, in the present embodiment, the scribing head 30 is moved in the traveling direction DR2 (FIG. 12) opposite to the traveling direction DR1. More specifically, the steps of FIGS. 10 to 12 are performed in accordance with the respective steps of FIGS. 4 to 6 of the first embodiment. Further, as shown in the figures, the extending direction CT (Fig. 2) of the holder 122 of the cutter 120 is preferably inclined in the opposite direction to the first embodiment with respect to the normal direction NM of the surface FC of the substrate 4. .

The components other than the above are substantially the same as those of the above-described first embodiment, and the same or corresponding elements are designated by the same reference numerals, and the description thereof will not be repeated.

According to the present embodiment, the transition of the cutter 120 on the surface FC of the substrate 4 is performed such that the fulcrum AX is located on the front side of the cutter 120 (Fig. 12). Thereby, when the scribing SL (Fig. 3) is formed, the track of the cutter 120 is not easily displaced. In particular, it is possible to effectively suppress the orbital deviation of the cutter 120 caused by the intersection of the newly extended scribe line SL and the existing scribe line.

(Embodiment 3)

Referring to Figs. 13 and 14, the scribing head 30V of the present embodiment is configured to change the height of the fulcrum AX with respect to the height of the front end of the cutter 120. Specifically, the body portion 110 is additionally provided There is a rotation member 113 that is different from the body body 111. The turning member 113 is supported by the fulcrum AX of the base portion 150 to be rotatable. In the body body 111, screw holes HL for fixing the rotation member 113 are provided at different heights so that the height of the rotation member 113 can be selected. The base portion 150 additionally has a shaft support member 153 that is different from the base body 151. The fulcrum AX is disposed on the shaft support member 153. In the base body 151, screw holes HM for fixing the shaft support members 153 are provided at different heights so that the height of the shaft support members 153 can be selected.

The components other than the above are substantially the same as those of the above-described first or second embodiment, and the same or corresponding elements are denoted by the same reference numerals, and the description thereof will not be repeated.

According to this embodiment, the height of the center of the rotation of the body portion 110 with respect to the height of the front end of the cutter 120 can be adjusted. Thereby, the direction of the force F applied from the front end of the cutter 120 to the surface FC of the substrate 4 can be adjusted.

(Embodiment 4)

In the present embodiment, the details of the scribing device having the scribing head 30 described in the first and second embodiments will be described. Further, instead of the scribing head 30, the scribing head 30V described in the third embodiment may be used.

Referring to FIGS. 15 and 16 , the scribing device 1 includes a holding unit 10 , a scribing unit 20 , an imaging unit unit 80 , and a control unit 90 . In addition, in FIGS. 15 and 16, in order to clarify the direction relationship, an XYZ orthogonal coordinate system in which the Z-axis direction is the vertical direction and the XY plane is the horizontal plane is attached.

The holding unit 10 moves the substrate 4 relative to the scribing unit 20 by moving the substrate 4 while moving it. As shown in FIG. 15, the holding unit 10 is provided on the base 10a, and has a stage 11, a ball screw mechanism 12, and a motor 13. Here, the base portion 10a is formed, for example, by a substantially rectangular parallelepiped stone fixing plate, and its upper surface (surface facing the holding unit 10) is flattened.

The platform 11 adsorbs and holds the substrate 4 placed thereon. Moreover, the platform 11 causes the substrate 4 to be held along The direction of the arrow AR1 (the positive or negative direction of the X-axis, hereinafter also referred to as the "advance and retraction direction") is advanced and retracted, and is rotated in the direction of the arrow R1. The stage 11 has an adsorption unit 11a, a rotary table 11b, and a moving table 11c. The adsorption unit 11a is provided on the upper side of the rotary table 11b. The substrate 4 can be placed on the upper surface of the adsorption portion 11a. Further, a plurality of adsorption grooves (not shown) are arranged in a lattice on the upper surface of the adsorption portion 11a. Therefore, the gas in each adsorption tank is discharged while the substrate 4 is placed, and the substrate 4 is adsorbed to the adsorption portion 11a. The turntable 11b is provided below the suction portion 11a, and the adsorption portion 11a is rotated about the rotation shaft 11d substantially parallel to the Z axis. Further, the mobile station 11c is provided on the lower side of the turntable 11b, and moves the adsorption portion 11a and the rotary table 11b in the advancing and retracting direction. Therefore, the substrate 4 sucked and held by the stage 11 advances and retreats in the direction of the arrow AR1, and rotates around the rotating shaft 11d that moves in accordance with the forward and backward movement of the adsorption portion 11a.

The ball screw mechanism 12 is disposed on the lower side of the platform 11 to advance and retreat the platform 11 in the direction of the arrow AR1. The ball screw mechanism 12 has a feed screw 12a and a nut 12b. The feed screw 12a is a rod extending in the advancing and retracting direction of the stage 11. A spiral groove (not shown) is provided on the outer peripheral surface of the feed screw 12a. Further, one end of the feed screw 12a is rotatably supported by the support portion 14a, and the other end of the feed screw 12a is rotatably supported by the support portion 14b.

The motor 13 is coupled to the feed screw 12a. When the motor 13 rotates, the feed screw 12a also rotates in the rotational direction of the motor 13. The nut 12b advances and retreats in the direction of the arrow AR1 by the rolling motion of the balls (not shown) in accordance with the rotation of the feed screw 12a. The nut 12b is fixed to the lower portion of the moving table 11c. Therefore, when the motor 13 is driven and the rotational force of the motor 13 is transmitted to the feed screw 12a, the nut 12b advances and retreats in the direction of the arrow AR1. As a result, the stage 11 to which the nut 12b is fixed advances and retracts in the direction of the arrow AR1 in the same manner as the nut 12b.

A pair of guide rails 15, 16 limits the movement of the platform 11 in the direction of travel. As shown in Fig. 16, the pair of guide rails 15, 16 are fixed to the base portion 10a by a predetermined distance in the direction of the arrow AR2. Each of the sliding portions 17 is slidable along the guide rail 15 in the direction of the arrow AR1. Each of the sliding portions 17 is fixed to the lower portion of the moving table 11c by a predetermined distance in the direction of the arrow AR1. Each of the sliding portions 18 is slidable along the guide rail 16 in the direction of the arrow AR1. Similarly to the sliding portion 17, each of the sliding portions 18 is fixed to the lower portion of the moving table 11c by a predetermined distance in the direction of the arrow AR1.

When the rotational force of the motor 13 is imparted to the ball screw mechanism 12 as described above, the stage 11 moves along the pair of guide rails 15, 16. Therefore, the linearity of the platform 11 in the advancing and retracting direction can be ensured. Further, a linear guide (linear motor) may be provided instead of the ball screw mechanism 12.

The scribing unit 20 has a scribing head 30 and a driving portion 70. The drive unit 70 displaces the substrate 4 and the scribing head 30 relative to each other. Specifically, when the scribe line SL is formed, the drive unit 70 reciprocates the scribe head 30 in the direction of the arrow AR2 (the Y-axis negative direction or the positive direction). As shown in FIG. 16, the drive unit 70 has a support 71, a guide rail 72, and a motor 73.

Each of the pillars 71 extends in the vertical direction (Z-axis direction) from the base portion 10a. As shown in FIG. 16, each of the guide rails 72 is fixed to the pillars 71 in a state of being sandwiched between the pillars 71. The guide rail 72 limits the movement of the scribing head 30 when the scribe line SL is formed. As shown in Fig. 16, the guide rails 72 are fixed only at a predetermined distance in the vertical direction. The motor 73 is coupled to a feed mechanism (for example, a ball screw mechanism) (not shown). Thereby, when the motor 73 rotates, the scribing head 30 reciprocates along the guide rail 72 in the direction of the arrow AR2.

The imaging unit unit 80 captures the substrate 4 held by the holding unit 10. As shown in FIG. 16, the imaging unit unit 80 has a camera 85. Each camera 85 is disposed above the holding unit 10. The camera 85 captures an image of a feature portion (for example, an alignment mark) formed on the substrate 4. Then, based on the image captured by the camera 85, the position and posture of the substrate 4 are grasped.

The control unit 90 realizes the operation control and data calculation of each element of the scribing device 1. As shown in FIG. 15, the control unit 90 has a ROM 91, a RAM 92, and a CPU 93. A ROM (Read Only Memory) 91 is a so-called non-volatile memory unit, and for example, a program 91a is stored. Furthermore, the ROM 91 can also use a non-volatile memory that is freely readable and writable, that is, a flash memory. A RAM (Random Access Memory) 92 is a volatile memory unit, for example, stores data for calculation of the CPU 93. CPU (Central The processing unit (Central Processing Unit) 93 performs control according to the program 91a of the ROM 91 (for example, the advancement and retreat of the holding unit 10, the rotation operation; the reciprocation and lifting operation of the scribing head 30; and the control of the cooling operation of the diamond tip cooling mechanism 100 described later). ), and various data processing and so on.

According to the present embodiment, the scribing head 30 is provided in the scribing device 1 (Embodiment 1 or 2). Thereby, as described above, damage to the cutter can be suppressed and the starting point crack can be surely formed.

Further, the present invention can be freely combined with the respective embodiments within the scope of the present invention, or the respective embodiments can be appropriately changed or omitted. For example, the body portion of the scribing head does not necessarily have to be supported to be rotatable, and may be supported to be movable in parallel in the up and down direction. Further, other actuators may be used instead of the cylinder.

4‧‧‧Substrate

11‧‧‧ platform

30‧‧‧Scribe head

110‧‧‧Face Department

111‧‧‧ body body

112‧‧‧Retainer support member

120‧‧‧Cutter

130‧‧‧Load Department

131‧‧‧Cylinder (1st actuator)

132‧‧‧ Press pin

140‧‧‧ Impact Department

141‧‧‧Cylinder (2nd actuator)

142‧‧‧ hitting pin (hitting component)

143‧‧‧ switch

144‧‧‧Baffle (stop)

150‧‧‧Base section

151‧‧‧Base body

152‧‧‧Restrictions

AX‧‧‧ pivot

EG‧‧‧ edge

F‧‧‧ force

FC‧‧‧ surface

LD‧‧‧ force

LE‧‧‧力

Claims (10)

A scribing head for forming a scribing surface on a surface of a substrate, comprising: a fuselage portion; a cutter attached to the fuselage portion; and a load portion for pressing the cutter to the above a continuous force is applied to the body portion on the surface of the substrate; and the load portion includes a first actuator for generating a force, and the scribe head further includes an impact portion for cutting the portion The blade is pressed against the surface of the substrate to apply an impact force to the body portion, and the impact portion includes: a striking member that can be displaced in a manner of striking the fuselage portion; The actuator is capable of applying a continuous force to the striking member toward the body portion, and a stopping portion for temporarily blocking the striking member at a position spaced apart from the body portion. The scribe head of claim 1, further comprising a base portion, wherein the base portion has a fulcrum that rotatably supports the body portion. The scribe head of claim 2 is configured to change the height of the fulcrum. A scribing device comprising: a scribing head according to any one of claims 1 to 3; and a driving portion that relatively displaces the substrate and the scribing head. A scribing method comprising the steps of: preparing a body portion to which a cutter is mounted; and applying a striking member to a position spaced apart from the body portion, and applying the striking member toward the body portion a continuous force; releasing the struck member that is blocked; the striking member is struck by the released striking member, and the cutter is pressed against the surface of the substrate by an impact force, thereby Formed on the surface of the substrate a starting point crack; and applying a continuous force to the body portion such that the cutter is pressed against the surface of the substrate, and the cutter is displaced by the relative displacement of the substrate and the body portion The surface of the substrate is moved, whereby the scribe line is extended from the starting point crack. The method of scribing the item 5, wherein the step of preparing the body portion is performed by preparing a scribing head including the body portion and the base portion, wherein the cutter portion is attached with the cutter, the base The portion has a fulcrum that supports the above-described body portion in a rotatable manner. The method of scribing the item 6, wherein the step of moving the cutter on the surface of the substrate is performed such that the fulcrum is located on a rear side of the cutter. The method of scribing the item 6, wherein the step of moving the cutter on the surface of the substrate is performed such that the fulcrum is located on a front side of the cutter. One kind scribing method, comprising the steps of: one side of the stationary cutting blade placed on the surface of the substrate, one side of the cutting blade with a force F ₁ will be pressed against the upper surface of the substrate; to stand in the upper surface of the substrate and with The force F _{1 is} applied to the cutter on the surface of the substrate to apply a force F ₂ greater than the force F ₁ to form a starting crack on the surface of the substrate; and a relative movement of the substrate and the body portion by the substrate The cutter is moved over the surface of the substrate, and the cutter is pressed against the surface of the substrate with a force F ₃ smaller than the force F ₁ so that the scribe line extends from the starting point crack. The scribing method of claim 9, wherein the force F ₂ is an impact force.