TW201511037A - Aluminum paste for silicon solar cell and method for manufacturing silicon solar cell - Google Patents
Aluminum paste for silicon solar cell and method for manufacturing silicon solar cell Download PDFInfo
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本發明是有關於一種鋁漿,且特別是有關於一種矽晶太陽能電池用的鋁漿。 This invention relates to an aluminum paste, and more particularly to an aluminum paste for a twinned solar cell.
太陽能電池是一種能量轉換的光電元件(photovoltaic device)。典型的太陽能電池基本的結構可分為基板、P-N二極體、抗反射層以及金屬電極四個主要部分。簡單來說,太陽能電池的工作原理是P-N二極體將太陽光能轉換成電子電洞對,再經正、負電極傳導出電能。 A solar cell is an energy-converting photovoltaic device. The basic structure of a typical solar cell can be divided into four main parts: a substrate, a P-N diode, an anti-reflection layer, and a metal electrode. Simply put, the working principle of a solar cell is that the P-N diode converts solar energy into an electron hole pair, and then conducts electric energy through the positive and negative electrodes.
在習知技術中,提出一種具有高效率的鈍化發射極背電極矽晶太陽能電池(passivated emitter and rear contact solar cell,PERC),其主要是在基板背面形成鈍化層,且經圖案化之區域形成鋁矽共晶(Al/Si alloy)。然而,鋁矽共晶中卻存在不易填滿而造成孔洞問題。具體而言,太陽能電池的轉換效率(η)為開路電壓(open circuit voltage,Voc)、短路電流(short circuit current,Isc)以及填充 因子(fill factor,FF)之乘積,並且填充因子與孔洞填充率呈現正相關。若鋁矽共晶中存在孔洞,則孔洞填充率較低,將使太陽能電池的轉換效率降低。 In the prior art, a passivated emitter and rear contact solar cell (PERC) having high efficiency is proposed, which mainly forms a passivation layer on the back surface of the substrate, and the patterned region is formed. Al/Si alloy. However, in the aluminum bismuth eutectic, there is a problem that it is difficult to fill and cause voids. Specifically, the conversion efficiency (η) of the solar cell is an open circuit voltage (Voc), a short circuit current (Isc), and a fill. The product of the fill factor (FF), and the fill factor is positively correlated with the hole fill rate. If there is a hole in the aluminum ruthenium eutectic, the hole filling rate is low, which will lower the conversion efficiency of the solar cell.
此外,太陽能電池隨著技術的發展而有薄形化的趨勢。但在薄形化的過程中,導電電極的製造常因其會造成電池翹曲,而影響電池及電池模組的製造良率。一般應用傳統網版印刷製程製造電極時,會使用高溫共燒(co-firing)製程,將導電漿燒製成固化的電極。然而,在共燒後的冷卻過程中,由於矽基材與電極熱膨脹係數的差異,會使電池發生翹曲(warpage)。翹曲量超過2mm的太陽能電池容易於後續封裝製程中破裂,影響生產良率。 In addition, solar cells tend to be thinner as technology advances. However, in the process of thinning, the manufacture of the conductive electrode is often caused by the warpage of the battery, which affects the manufacturing yield of the battery and the battery module. Generally, when a conventional screen printing process is used to manufacture an electrode, a high-temperature co-firing process is used to burn the conductive paste into a cured electrode. However, during the cooling process after co-firing, the battery warps due to the difference in thermal expansion coefficient between the crucible substrate and the electrode. Solar cells with a warpage of more than 2 mm are prone to cracking in subsequent packaging processes, affecting production yield.
本發明提供一種矽晶太陽能電池用的鋁漿,其可以有效提高鈍化發射極背電極矽晶太陽能電池之鋁矽共晶的孔洞填充率,並可降低薄化矽晶太陽能電池的翹曲。 The invention provides an aluminum paste for a twinned solar cell, which can effectively improve the hole filling rate of the aluminum-bismuth eutectic of the passivated emitter back electrode twin solar cell, and can reduce the warpage of the thinned twin solar cell.
本發明提供一種鈍化發射極背電極矽晶太陽能電池的製作方法,藉此所形成之矽晶太陽能電池中的鋁矽共晶結構的孔洞填充率可以有效被提高,並且可減輕燒結後矽晶太陽能電池翹曲的問題。 The invention provides a method for fabricating a passivated emitter back electrode twinned solar cell, whereby the hole filling rate of the aluminum germanium eutectic structure in the formed twin solar cell can be effectively improved, and the post-sintering twin solar energy can be alleviated The problem of battery warpage.
本發明提出一種矽晶太陽能電池用的鋁漿,其包含鋁粉、玻璃粉、有機載體(organic vehicle)以及有機含矽添加劑(organic silicon-containing additive),其中有機含矽添加劑具有至少一矽烷 醇(silanol,-SiOH)官能基。 The present invention provides an aluminum paste for a twinned solar cell comprising aluminum powder, glass frit, an organic vehicle, and an organic silicon-containing additive, wherein the organic germanium-containing additive has at least one decane An alcohol (silanol, -SiOH) functional group.
本發明提出一種鈍化發射極背電極矽晶太陽能電池用的鋁漿,其包含鋁粉、玻璃粉、有機載體以及有機含矽添加劑,其中有機含矽添加劑具有至少一矽烷醇官能基。 The present invention provides an aluminum paste for passivating an emitter back electrode twinned solar cell comprising aluminum powder, glass frit, an organic vehicle, and an organic cerium-containing additive, wherein the organic cerium-containing additive has at least one stanol functional group.
在本發明的一實施例中,上述的有機含矽添加劑的結構式例如是以式(1)表示:
式(1)中,R1、R2、R3中的至少一者表示羥基,R4表示特定取代基團,例如噻吩(thiophene)、乙烯基(vinyl)、苯基(phenyl)、異丙氧基(isopropoxy)、甲苯基(tolyl)、第三級丁基引朵羧酸酯(tert-butyl-indole-1-carboxylate)、丙基胺(propyl amine)或N-(2-胺乙基)-3-胺丙基(N-(2-aminoethyl)-3-aminopropyl)。上述所列之特定取代基團僅屬範例,並非用以限制本發明所使用之有機含矽添加劑。具體而言,在本發明的一實施例中,上述的有機含矽添加劑可選自式(2)至式(9)中的至少一種:
在本發明的一實施例中,上述的有機含矽添加劑的添加量為0.001%~40%。 In an embodiment of the invention, the organic cerium-containing additive is added in an amount of 0.001% to 40%.
在本發明的一實施例中,上述的玻璃粉為無鉛材料,且包含氧化鉍。 In an embodiment of the invention, the glass frit is a lead-free material and comprises cerium oxide.
在本發明的一實施例中,上述的玻璃粉為有鉛材料,且包含氧化鉛。 In an embodiment of the invention, the glass frit is a leaded material and comprises lead oxide.
本發明另提出一種鈍化發射極背電極(PERC)矽晶太陽能電池的製作方法,其包含下列步驟。於P型矽晶片的受光面進行N型摻雜,以於受光面上形成N型摻雜層;於受光面的N型摻雜層上形成第一介電層;於P型矽晶片的背面形成第二介電層;圖案化背面上的第二介電層,以暴露出P型矽晶片的背面;於受光面上形成第一電極組成物;於第二介電層以及P型矽晶片的背面上形成第二電極組成物與第三電極組成物,其中第二電極組成物包含鋁粉、玻璃粉、有機載體以及有機含矽添加劑,且有機含矽添加劑包括至少一矽烷醇官能基;以及進行高溫共燒製程,以使受光面上的第一電極組成物形成正面電極,並使背面的第二電極組成物與第三電極組成物形成背面電極。 The invention further provides a method for fabricating a passivated emitter back electrode (PERC) twinned solar cell comprising the following steps. N-type doping on the light-receiving surface of the P-type germanium wafer to form an N-type doped layer on the light-receiving surface; forming a first dielectric layer on the N-type doped layer on the light-receiving surface; on the back surface of the P-type germanium wafer Forming a second dielectric layer; patterning a second dielectric layer on the back surface to expose a back surface of the P-type germanium wafer; forming a first electrode composition on the light receiving surface; and forming a first dielectric layer on the second dielectric layer and the P-type germanium wafer Forming a second electrode composition and a third electrode composition on the back surface, wherein the second electrode composition comprises aluminum powder, glass frit, organic carrier and organic cerium-containing additive, and the organic cerium-containing additive comprises at least one stanol functional group; And performing a high-temperature co-firing process such that the first electrode composition on the light-receiving surface forms a front electrode, and the second electrode composition on the back surface and the third electrode composition form a back electrode.
在本發明的一實施例中,上述的鈍化發射極背電極(PERC)矽晶太陽能電池的製作方法中的第一電極組成物與第三電極組成 物為銀漿。 In an embodiment of the invention, the first electrode composition and the third electrode in the method for fabricating the passivated emitter back electrode (PERC) twinned solar cell are The material is silver paste.
在本發明的一實施例中,在上述的鈍化發射極背電極矽晶太陽能電池的製作方法中進行高溫共燒製程後所形成的背面電極包括銀電極、鋁電極、鋁矽共晶層以及P+矽層,其中鋁矽共晶層位於P+矽層與鋁電極之間,且背面的銀電極與鋁電極電性連接。 In an embodiment of the invention, the back electrode formed after the high temperature co-firing process in the method for fabricating the passivated emitter back electrode twinned solar cell comprises a silver electrode, an aluminum electrode, an aluminum germanium eutectic layer, and a P layer. a germanium layer, wherein the aluminum germanium eutectic layer is between the P + germanium layer and the aluminum electrode, and the silver electrode on the back side is electrically connected to the aluminum electrode.
基於上述,藉由在鋁漿中添加具有至少一矽烷醇官能基的有機含矽添加劑,利用矽烷醇官能基可以使有機含矽添加劑充分地發揮作為密著劑的功能,並可抑制有機含矽添加劑在矽晶太陽能電池製程中與有機載體過度反應,而導致黏度升高等不穩定現象,因此本發明的矽晶太陽能電池用鋁漿可以有效提高鈍化發射極背電極矽晶太陽能電池之鋁矽共晶的孔洞填充率。此外,本發明的矽晶太陽能電池用鋁漿可以有效降低熱膨脹係數,從而減輕高溫燒結後矽晶太陽能電池翹曲的問題。 Based on the above, by adding an organic cerium-containing additive having at least one stanol function to the aluminum paste, the cerium-containing functional group can fully utilize the organic cerium-containing additive as a binder and can inhibit the organic cerium. The additive reacts excessively with the organic vehicle in the process of the twinned solar cell, resulting in an unstable phenomenon such as an increase in viscosity. Therefore, the aluminum paste for the twinned solar cell of the present invention can effectively improve the aluminum lanthanum of the passivated emitter back electrode twin solar cell. The hole filling rate of the crystal. In addition, the aluminum paste for a twinned solar cell of the present invention can effectively reduce the coefficient of thermal expansion, thereby alleviating the problem of warpage of the twinned solar cell after high temperature sintering.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。 The above described features and advantages of the invention will be apparent from the following description.
100‧‧‧矽晶太陽能電池 100‧‧‧Silver solar cells
200‧‧‧鈍化發射極背電極矽晶太陽能電池 200‧‧‧ Passivated emitter back electrode twin solar cell
110、210‧‧‧P型矽晶片 110, 210‧‧‧P type silicon wafer
110a、210a‧‧‧P+矽層 110a, 210a‧‧‧P + layer
120、220‧‧‧N型摻雜層 120, 220‧‧‧N type doped layer
130、230‧‧‧第一介電層 130, 230‧‧‧ first dielectric layer
240‧‧‧第一電極組成物 240‧‧‧First electrode composition
140a、240a‧‧‧正面電極 140a, 240a‧‧‧ front electrode
250‧‧‧第二電極組成物 250‧‧‧Second electrode composition
150a、250a‧‧‧背面電極 150a, 250a‧‧‧ back electrode
152、252‧‧‧鋁矽共晶層 152, 252‧‧‧ aluminum eutectic layer
154、254‧‧‧鋁電極 154, 254‧‧‧ aluminum electrodes
256‧‧‧銀電極 256‧‧‧ Silver electrode
260‧‧‧第二介電層 260‧‧‧Second dielectric layer
260a‧‧‧圖案化第二介電層 260a‧‧‧ patterned second dielectric layer
270‧‧‧第三電極組成物 270‧‧‧ third electrode composition
L‧‧‧線段 L‧‧‧ line segment
Op‧‧‧開口 Op‧‧‧ openings
B‧‧‧背面 B‧‧‧Back
R‧‧‧受光面 R‧‧‧Glossy surface
圖1是依照本發明的一實施例的一種傳統矽晶太陽能電池的結構剖面示意圖。 1 is a cross-sectional view showing the structure of a conventional twinned solar cell in accordance with an embodiment of the present invention.
圖2A與圖2B是分別依照本發明的一實施例的一種鈍化發射極背電極矽晶太陽能電池在不同位置處的結構示意圖。 2A and 2B are schematic diagrams showing the structure of a passivated emitter back electrode twin solar cell at different positions, respectively, according to an embodiment of the invention.
圖3是依照本發明的一實施例的一種鈍化發射極背電極矽晶太陽能電池的背面上視圖。 3 is a top plan view of a passivated emitter back electrode twinned solar cell, in accordance with an embodiment of the present invention.
圖4是沿著圖3中的A-A'剖面的示意圖。 Fig. 4 is a schematic view taken along line AA' of Fig. 3.
圖5是沿著圖3中的B-B'剖面的示意圖。 Fig. 5 is a schematic view taken along line BB' of Fig. 3.
圖6A至圖6C是依照本發明的一實施例的一種鈍化發射極背電極矽晶太陽能電池的製作方法的示意圖。 6A-6C are schematic diagrams showing a method of fabricating a passivated emitter back electrode twinned solar cell, in accordance with an embodiment of the invention.
在本發明的下述實施例中,是將本發明之鋁漿應用於傳統矽晶太陽能電池為例來進行說明,然而本發明的應用並不限定於此,本發明之鋁漿亦可以用於不同型態的太陽能電池(例如:鈍化發射極背電極矽晶太陽能電池)中。當然,本發明之鋁漿除了可使用在太陽能電池外,亦可應用於各式元件中,本發明於此不做特別之限定。 In the following embodiments of the present invention, the aluminum paste of the present invention is applied to a conventional twinned solar cell as an example. However, the application of the present invention is not limited thereto, and the aluminum paste of the present invention can also be used. Different types of solar cells (eg, passivated emitter back electrode twinned solar cells). Of course, the aluminum paste of the present invention can be applied to various types of elements in addition to the solar cell, and the present invention is not particularly limited herein.
本發明的鋁漿可應用於各種型態的矽晶太陽能電池中。舉例來說,圖1是一種傳統矽晶太陽能電池(鋁背面電場(Al-BSF(back surface field))太陽能電池),利用本發明之鋁漿來形成所述結構中的電極可降低薄化矽晶太陽能電池的翹曲。下文詳述所述矽晶太陽能電池的各部結構以及鋁漿的組成。 The aluminum paste of the present invention can be applied to various types of twinned solar cells. For example, FIG. 1 is a conventional twin solar cell (Al-BSF (back surface field) solar cell), and the aluminum paste of the present invention is used to form an electrode in the structure to reduce thinning. Warpage of crystalline solar cells. The structure of each part of the twinned solar cell and the composition of the aluminum paste are detailed below.
圖1是依照本發明的一實施例的一種傳統矽晶太陽能電池的立體示意圖。請參照圖1,本實施例之傳統矽晶太陽能電池100包含矽晶片110、N型摻雜層120、第一介電層130以及正面 電極140a以及背面電極150a,其中矽晶片110例如是P型矽晶片110。詳言之,P型矽晶片110具有彼此相對的受光面R及背面B,在受光面R(以下亦稱為正面)上自P型矽晶片110起依序包含N型摻雜層120、第一介電層130與正面電極140a,而背面電極150a位於在背面B上。 1 is a perspective view of a conventional twinned solar cell in accordance with an embodiment of the present invention. Referring to FIG. 1, the conventional twinned solar cell 100 of the present embodiment includes a germanium wafer 110, an N-type doped layer 120, a first dielectric layer 130, and a front surface. The electrode 140a and the back surface electrode 150a, wherein the germanium wafer 110 is, for example, a P-type germanium wafer 110. In detail, the P-type germanium wafer 110 has a light-receiving surface R and a back surface B facing each other, and sequentially includes an N-type doping layer 120 from the P-type germanium wafer 110 on the light-receiving surface R (hereinafter also referred to as a front surface). A dielectric layer 130 is on the front side of the electrode 140a and the back side electrode 150a is on the back side B.
在本實施例中,背面電極150a包括鋁矽共晶層152以及鋁電極154,且第二電極組成物250在經燒結製程後可進一步形成背面電極150a以及於背面電極150a與矽晶片110之間形成P+矽層110a,以增加載子的收集,提高轉換效率。此外,如圖1所示,兩條正面電極140a互相地平行,且設置於N型摻雜層120上。 In the present embodiment, the back surface electrode 150a includes an aluminum germanium eutectic layer 152 and an aluminum electrode 154, and the second electrode composition 250 can further form the back surface electrode 150a and between the back surface electrode 150a and the germanium wafer 110 after the sintering process. The P + germanium layer 110a is formed to increase the collection of carriers and improve conversion efficiency. Further, as shown in FIG. 1, the two front electrodes 140a are parallel to each other and are disposed on the N-type doping layer 120.
如圖1所示,在本實施例的結構中,P型矽晶片110的受光面R上具有例如粗糙表面、金字塔型(pyramid texturing)或倒金字塔型(inverted-pyramid texturing)的結構,以降低太陽光或光線進入矽晶太陽能電池100時的反射率,可增加太陽光的利用率。N型摻雜層120可藉由在P型矽晶片110中摻雜V族元素(例如:磷(P)、砷(As))來形成。第一介電層130可以是SiO2、SixNy、SixNyHz、SixOyNz、SiC或其組合的單層或多層結構。 As shown in FIG. 1, in the structure of the present embodiment, the light-receiving surface R of the P-type germanium wafer 110 has a structure such as a rough surface, a pyramid texturing or an inverted-pyramid texturing to reduce The reflectivity of sunlight or light entering the twin solar cell 100 increases the utilization of sunlight. The N-type doped layer 120 can be formed by doping a P-type germanium wafer 110 with a group V element such as phosphorus (P) or arsenic (As). The first dielectric layer 130 may be a single layer or a multilayer structure of SiO 2 , Si x N y , Si x N y H z , Si x O y N z , SiC, or a combination thereof.
值得注意的是,背面電極150a與P+矽層110a是利用本發明之鋁漿經高溫共燒製程所形成的,藉此可使轉換效率更加提升。以下進一步說明本發明之鋁漿。 It is to be noted that the back electrode 150a and the P + germanium layer 110a are formed by the high temperature co-firing process of the aluminum paste of the present invention, whereby the conversion efficiency can be further improved. The aluminum paste of the present invention is further explained below.
具體而言,矽晶太陽能電池100用的鋁漿包含鋁粉、玻璃粉、有機載體以及有機含矽添加劑,其中有機含矽添加劑具有至少一矽烷醇官能基。將各個成份分別詳述於下。 Specifically, the aluminum paste for the twinned solar cell 100 comprises aluminum powder, glass frit, an organic vehicle, and an organic cerium-containing additive, wherein the organic cerium-containing additive has at least one stanol functional group. The individual components are detailed below.
[1]鋁粉 [1] aluminum powder
鋁漿中之鋁粉的材質選自鋁,其可為單一金屬所構成之鋁粒子的集合,或是使鋁與其他元素(如鎵、鋅、鎂、矽…等)形成鋁合金後所構成之鋁合金粒子的集合,或是更進一步與其他金屬粒子相組合,本發明並不以此為限。對鋁漿燒結後,鋁粒子彼此相接以構成電極中主要傳輸電能的部分。一般金屬粒子粒徑大小為0.1~20um。 The material of the aluminum powder in the aluminum paste is selected from aluminum, which may be a collection of aluminum particles composed of a single metal, or may be formed by forming aluminum with other elements (such as gallium, zinc, magnesium, bismuth, etc.). The collection of aluminum alloy particles, or further combined with other metal particles, is not limited thereto. After the aluminum paste is sintered, the aluminum particles are in contact with each other to constitute a portion of the electrode that mainly transfers electrical energy. Generally, the particle size of the metal particles is 0.1 to 20 um.
[2]玻璃粉 [2] Glass powder
鋁漿中之玻璃粉包括含鉛、含鉍或其組合之無機玻璃材料。具體而言,上述的玻璃粉可以是包括含有硼(B)、鋁(Al)、Ga(鎵)、In(銦)及Tl(鉈)中的至少其中之一的無機玻璃,也可以是包括含有N(氮)、P(磷)、As(砷)、Sb(銻)及Bi(鉍)中的至少其中之一的無機玻璃。在本實施例中,玻璃粉可為不含鉛的無鉛材料,其材質例如是氧化鉍。當然,玻璃粉也可是含鉛的有鉛材料,其材質例如是氧化鉛。玻璃粉會在高溫燒結的過程中軟化,提供電極中的鋁與矽晶片的矽維持良好的附著力。 The glass frit in the aluminum paste includes an inorganic glass material containing lead, antimony or a combination thereof. Specifically, the above glass frit may be an inorganic glass including at least one of boron (B), aluminum (Al), Ga (gallium), In (indium), and Tl (铊), or may include An inorganic glass containing at least one of N (nitrogen), P (phosphorus), As (arsenic), Sb (bismuth), and Bi (bismuth). In the present embodiment, the glass frit may be a lead-free material containing no lead, and the material thereof is, for example, cerium oxide. Of course, the glass frit may also be a lead-containing lead material, such as lead oxide. The glass frit softens during high temperature sintering, providing a good adhesion of the aluminum in the electrode to the crucible of the germanium wafer.
[3]有機載體 [3] Organic carrier
鋁漿中之有機載體可以包括溶劑、黏著劑(binder)或有機添加劑,其中有機添加劑例如是搖變助劑(觸變劑)、增稠劑、 抗沉降劑等。有機載體之作用在於可以均勻混合鋁粉、玻璃粉、以及有機含矽添加劑。此外,有機載體可幫助網版印刷(screen printing)較為順利地進行,並且有機載體可在燒結後揮發或燒除。換言之,有機載體可在常溫下作為鋁漿中各成份的黏著劑,並在高溫燒結後被移除。 The organic vehicle in the aluminum paste may include a solvent, a binder or an organic additive, wherein the organic additive is, for example, a rocking aid (thixotropic agent), a thickener, Anti-settling agent, etc. The organic carrier functions to uniformly mix the aluminum powder, the glass powder, and the organic cerium-containing additive. Further, the organic carrier can help screen printing to proceed smoothly, and the organic carrier can be volatilized or burned off after sintering. In other words, the organic vehicle can be used as an adhesive for each component in the aluminum paste at normal temperature and is removed after sintering at a high temperature.
[4]有機含矽添加劑 [4] Organic antimony additive
本發明的有機含矽添加劑與一般無機矽的添加劑不同,使用有機含矽添加劑相較於無機矽添加劑具有可進一步增加鋁、矽之間密著性的效果。另外,本發明的有機含矽添加劑具有至少一矽烷醇官能基,而與一般的矽氧烷(siloxane)或未經水解的矽烷(silane)或其衍生物並不同。具有至少一矽烷醇官能的有機含矽添加劑相較於未經水解的矽烷(silane)具有可防止鋁漿在後續矽晶太陽能電池製程中黏度升高導致網印性不佳等問題。 The organic cerium-containing additive of the present invention is different from the general inorganic cerium additive, and the use of the organic cerium-containing additive has an effect of further increasing the adhesion between aluminum and cerium compared to the inorganic cerium additive. Further, the organic cerium-containing additive of the present invention has at least one stanol functional group and is different from a general siloxane or an unhydrolyzed silane or a derivative thereof. The organic cerium-containing additive having at least one stanol function has problems such as preventing the aluminum paste from increasing in viscosity in the subsequent twinned solar cell process, resulting in poor screen printing, compared to the unhydrolyzed silane.
具體而言,本發明的有機含矽添加劑的結構式是以式(1)表示:
以式(3)表示的有機含矽添加劑:
以式(4)表示的有機含矽添加劑:
以式(5)表示的有機含矽添加劑:
以式(6)表示的有機含矽添加劑:
以式(7)表示的有機含矽添加劑:
以式(8)表示的有機含矽添加劑:
以式(9)表示的有機含矽添加劑:
在本實施例之鋁漿的組成物中,以鋁漿中的組成的總量為100%的基準,有機含矽添加劑在鋁漿中的添加量為0.001%~40%。 In the composition of the aluminum paste of the present embodiment, the organic cerium-containing additive is added in an amount of 0.001% to 40% in terms of the total amount of the composition in the aluminum paste of 100%.
值得說明的是,藉由在鋁漿中添加具有至少一矽烷醇官能基的有機含矽添加劑,可以將有機含矽添加劑與鋁粉、玻璃粉以及有機載體充分地且均勻地混合,藉此充分地發揮作為密著劑的功能。此外,有機含矽添加劑乃在添加入鋁漿前已預先經水解,以產生具有至少一矽烷醇官能基。藉由使有機含矽添加劑具有至少一矽烷醇官能基,可抑制有機含矽添加劑在矽晶太陽能電池製 程中與有機載體過度反應,而導致黏度升高等不穩定現象。具體而言,若使用未經水解的具有甲氧基或乙氧基的矽氧烷或矽烷來做為有機含矽添加劑,則會使未經水解的有機含矽添加劑與例如是乙基纖維素(ethyl cellulose)的有機載體過度地聚合,導致鋁漿黏度增加與不穩定的情形。因此,本發明之鋁漿中因使用了具有至少一矽烷醇官能基的有機含矽添加劑,因此可以避免上述黏度上升的問題。 It is worth noting that by adding an organic cerium-containing additive having at least one stanol function to the aluminum paste, the organic cerium-containing additive can be sufficiently and uniformly mixed with the aluminum powder, the glass powder and the organic vehicle, thereby sufficiently It functions as a sealant. In addition, the organic rhodium-containing additive has been previously hydrolyzed prior to addition to the aluminum paste to produce a functional group having at least one stanol. By making the organic cerium-containing additive have at least one stanol functional group, the organic cerium-containing additive can be inhibited from being formed in a twin solar cell. The process reacts excessively with the organic carrier, resulting in instability such as increased viscosity. Specifically, if an unhydrolyzed methoxy or methoxy alkoxysilane or decane is used as the organic cerium-containing additive, the unhydrolyzed organic cerium-containing additive is, for example, ethyl cellulose. The organic carrier of (ethyl cellulose) is excessively polymerized, resulting in an increase in viscosity and instability of the aluminum paste. Therefore, in the aluminum paste of the present invention, since the organic cerium-containing additive having at least one stanol function is used, the above problem of an increase in viscosity can be avoided.
基於上述,本發明的矽晶太陽能電池用鋁漿可以有效增加電極與基板附著力與降低熱膨脹係數,從而減輕高溫燒結後矽晶太陽能電池翹曲的問題。 Based on the above, the aluminum paste for a twinned solar cell of the present invention can effectively increase the adhesion between the electrode and the substrate and reduce the coefficient of thermal expansion, thereby alleviating the problem of warpage of the twinned solar cell after high temperature sintering.
當然,本發明的鋁漿不僅可應用於如前述圖1的傳統矽晶太陽能電池100,也可將其應用於圖2A與圖2B所示之鈍化發射極背電極矽晶太陽能電池200(以下稱為矽晶太陽能電池200),本發明並不以此為限。 Of course, the aluminum paste of the present invention can be applied not only to the conventional twinned solar cell 100 as in the foregoing FIG. 1, but also to the passivated emitter back electrode twinned solar cell 200 shown in FIGS. 2A and 2B (hereinafter referred to as For the twinned solar cell 200), the invention is not limited thereto.
圖2A與圖2B是分別依照本發明的一實施例的一種鈍化發射極背電極矽晶太陽能電池在不同位置處的的結構示意圖,其中圖2A是沿著正面電極之匯流電極(bus bar)的剖面示意圖,而圖2B是未通過匯流電極的剖面示意圖。圖3為圖2A與圖2B之矽晶太陽能電池背面的俯視圖。請參照圖2A、圖2B以及圖3。矽晶太陽能電池200的構成與傳統矽晶太陽能電池100類似。詳言之,在受光面R(以下亦稱為正面)上自P型矽晶片210起依序包含N型摻雜層220、第一介電層230與正面電極240a,而在背 面B上自P型矽晶片210起依序包含圖案化第二介電層260a、背面電極250a與P+矽層210a。其中背面電極250a包括鋁矽共晶層252、鋁電極254以及銀電極256,而圖2B的背面電極250a僅有鋁矽共晶層252以及鋁電極254。 2A and FIG. 2B are schematic diagrams showing the structure of a passivated emitter back electrode twin solar cell at different positions according to an embodiment of the present invention, wherein FIG. 2A is a bus bar along the front electrode. FIG. 2B is a schematic cross-sectional view of the bus electrode. 3 is a top plan view of the back side of the twinned solar cell of FIGS. 2A and 2B. Please refer to FIG. 2A, FIG. 2B and FIG. The structure of the twinned solar cell 200 is similar to that of the conventional twinned solar cell 100. In detail, the N-type doping layer 220, the first dielectric layer 230 and the front surface electrode 240a are sequentially included on the light-receiving surface R (hereinafter also referred to as the front surface) from the P-type germanium wafer 210, and on the back surface B. The P-type germanium wafer 210 sequentially includes a patterned second dielectric layer 260a, a back surface electrode 250a, and a P + germanium layer 210a. The back electrode 250a includes an aluminum germanium eutectic layer 252, an aluminum electrode 254, and a silver electrode 256, and the back electrode 250a of FIG. 2B has only an aluminum germanium eutectic layer 252 and an aluminum electrode 254.
具體而言,如圖2A及圖2B所示,P型矽晶片210的背面B包括背面電極250a以及位於P型矽晶片210與背面電極250a之間的圖案化第二介電層260a。如圖2A與圖2B所示,圖案化第二介電層260a具有開口Op,背面電極250a的一部份在圖案化第二介電層260a的開口Op內與P型矽晶片210形成鋁矽共晶層252以與P型矽晶片210連接,並且於鋁矽共晶層252與P型矽晶片210之間形成P+矽層210a。 Specifically, as shown in FIGS. 2A and 2B, the back surface B of the P-type germanium wafer 210 includes a back surface electrode 250a and a patterned second dielectric layer 260a between the P-type germanium wafer 210 and the back surface electrode 250a. As shown in FIG. 2A and FIG. 2B, the patterned second dielectric layer 260a has an opening Op, and a portion of the back surface electrode 250a forms an aluminum crucible with the P-type germanium wafer 210 in the opening Op of the patterned second dielectric layer 260a. The eutectic layer 252 is connected to the P-type germanium wafer 210, and a P + germanium layer 210a is formed between the aluminum germanium eutectic layer 252 and the p-type germanium wafer 210.
銀電極256與鋁電極254的相對位置關係如圖3所示,在本實施例中,銀電極256與一部分的鋁電極254電性連接。銀電極256被形成為多條線段L。 The relative positional relationship between the silver electrode 256 and the aluminum electrode 254 is as shown in FIG. 3. In the present embodiment, the silver electrode 256 is electrically connected to a part of the aluminum electrode 254. The silver electrode 256 is formed as a plurality of line segments L.
值得注意的是,銀電極256所構成的線段L之間具有一定間距,藉此避免在高溫共燒後的冷卻過程中,由於矽基板與電極熱膨脹係數的差異而使電池發生翹曲。 It is worth noting that the line segments L formed by the silver electrodes 256 have a certain spacing, thereby avoiding warpage of the battery due to the difference in thermal expansion coefficient between the ruthenium substrate and the electrodes during the cooling process after high temperature co-firing.
以下將詳細說明有關於矽晶太陽能電池200的剖面結構。 The cross-sectional structure of the twinned solar cell 200 will be described in detail below.
更詳細而言,請參照圖4及圖5,圖4是沿著圖3中的A-A'剖面的示意圖。圖5是沿著圖3中的B-B'剖面的示意圖。 More specifically, please refer to FIG. 4 and FIG. 5, which is a schematic view taken along line AA' of FIG. Fig. 5 is a schematic view taken along line BB' of Fig. 3.
在矽晶太陽能電池200的受光面R上,經高溫燒結後的正面電極240a會因燒結而穿過第一介電層230(以虛線表示)與N 型摻雜層220接觸。 On the light-receiving surface R of the twinned solar cell 200, the high-temperature sintered front electrode 240a passes through the first dielectric layer 230 (indicated by a broken line) and N due to sintering. The doped layer 220 is in contact.
鋁電極254覆蓋在圖案化第二介電層260a上覆蓋有銀電極256以外的其他部份。具體而言,鋁電極254覆蓋在圖案化第二介電層260a暴露出的部份,並且鄰接於鋁矽共晶層252。 The aluminum electrode 254 covers the portion of the patterned second dielectric layer 260a that is covered with the silver electrode 256. Specifically, the aluminum electrode 254 covers the exposed portion of the patterned second dielectric layer 260a and is adjacent to the aluminum germanium eutectic layer 252.
鋁矽共晶層252位於P+矽層210a與鋁電極254之間,並且鋁矽共晶層252與鋁電極254一同沿著對應於圖案化第二介電層260a的暴露部分的位置來分佈。 The aluminum germanium eutectic layer 252 is located between the P + germanium layer 210a and the aluminum electrode 254, and the aluminum germanium eutectic layer 252 is distributed along with the aluminum electrode 254 along the position corresponding to the exposed portion of the patterned second dielectric layer 260a. .
特別的是,鋁電極254、鋁矽共晶層252以及P+矽層210a皆是由本發明之第二電極組成物250經由高溫燒結後所形成。 In particular, the aluminum electrode 254, the aluminum ruthenium eutectic layer 252, and the P + ruthenium layer 210a are all formed by sintering the second electrode composition 250 of the present invention at a high temperature.
圖6A至圖6C是依照本發明的上述實施例的一種矽晶太陽能電池200的製作方法的示意圖。請參照圖6A,首先,提供一P型矽晶片210,其中P型矽晶片210例如是硼摻雜或鎵摻雜的晶片。接著,以例如熱擴散(thermal diffusion)或離子植入法(ion implantation)於P型矽晶片210的受光面R進行摻雜(例如磷摻雜或砷摻雜),藉此於受光面R上形成N型摻雜層220。 6A through 6C are schematic views of a method of fabricating a twinned solar cell 200 in accordance with the above-described embodiments of the present invention. Referring to FIG. 6A, first, a P-type germanium wafer 210 is provided, wherein the P-type germanium wafer 210 is, for example, a boron doped or gallium doped wafer. Then, doping (for example, phosphorus doping or arsenic doping) on the light receiving surface R of the P-type germanium wafer 210 by, for example, thermal diffusion or ion implantation, thereby being applied to the light receiving surface R An N-type doped layer 220 is formed.
然後,於受光面R的N型摻雜層220上形成第一介電層230,並於P型矽晶片210相對於受光面R的背面B上形成第二介電層260。具體而言,第一介電層230可以是SiO2、SixNy、SixNyHz、SixOyNz、SiC或其組合的單層或多層結構,而第二介電層260可以是AlxOy、SiO2、SixNy、SixNyHz、SixOyNz、SiC組合的單層或 多層結構。此外,用來形成第一介電層230以及第二介電層260的方法例如是化學氣相沉積法(Chemical Vapor Deposition,CVD)或電漿增強式化學氣相沉積法(Plasma Enhanced Chemical Vapor Deposition,PECVD)或高溫氧化法(Thermal oxidation)或原子層沉積法(Atomic Layer Deposition,ALD)。 Then, a first dielectric layer 230 is formed on the N-type doped layer 220 of the light receiving surface R, and a second dielectric layer 260 is formed on the back surface B of the P-type germanium wafer 210 with respect to the light receiving surface R. Specifically, the first dielectric layer 230 may be a single layer or a multilayer structure of SiO 2 , Si x N y , Si x N y H z , Si x O y N z , SiC, or a combination thereof, and the second dielectric Layer 260 may be a single layer or a multilayer structure of a combination of Al x O y , SiO 2 , Si x N y , Si x N y H z , Si x O y N z , SiC. In addition, the method for forming the first dielectric layer 230 and the second dielectric layer 260 is, for example, a chemical vapor deposition (CVD) or a plasma enhanced chemical vapor deposition (Plasma Enhanced Chemical Vapor Deposition). , PECVD) or Thermal oxidation or Atomic Layer Deposition (ALD).
接下來,請參照圖6B,對第二介電層260進行圖案化步驟,以暴露出P型矽晶片210的背面B來形成圖案化第二介電層260a。圖案化步驟可藉由黃光顯影蝕刻(photolithography)、直接使用蝕刻膠(etching paste)或以雷射蝕刻(laser etch)等移除方法來形成。 Next, referring to FIG. 6B, the second dielectric layer 260 is patterned to expose the back surface B of the P-type germanium wafer 210 to form the patterned second dielectric layer 260a. The patterning step can be formed by photolithography, directly using an etching paste, or by a laser etch.
然後,請參照圖6C,於P型矽晶片210的受光面R上形成第一電極組成物240,舉例而言,例如是網印一第一電極組成物240,其中第一電極組成物240例如是銀漿,當然亦可以使用上述本發明之鋁漿或將鋁漿與銀漿組合來製作正面電極,本發明並不以此為限。 Then, referring to FIG. 6C, a first electrode composition 240 is formed on the light receiving surface R of the P-type germanium wafer 210, for example, a screen printing first electrode composition 240, wherein the first electrode composition 240 is, for example, It is a silver paste. Of course, the aluminum paste of the present invention or the aluminum paste and the silver paste may be used to form the front electrode, and the invention is not limited thereto.
接著,於圖案化第二介電層260a以及P型矽晶片210的背面B上形成第二電極組成物250與第三電極組成物270,特別的是,第二電極組成物250使用了本發明之上述的鋁漿,藉此可以提供轉換效率並降低薄化矽晶太陽能電池翹曲的現象。此外,第三電極組成物270例如是藉由網印方式來形成銀漿。 Next, a second electrode composition 250 and a third electrode composition 270 are formed on the patterned second dielectric layer 260a and the back surface B of the P-type germanium wafer 210. In particular, the second electrode composition 250 uses the present invention. The above aluminum paste can thereby provide conversion efficiency and reduce the phenomenon of thinning of the twinned solar cell. Further, the third electrode composition 270 is formed, for example, by screen printing to form a silver paste.
具體而言,將上述的第二電極組成物250以及第三電極組成物270網印於圖案化第二介電層260a以及P型矽晶片210的 背面B,藉此第二電極組成物250可覆蓋在圖案化第二介電層260a以及P型矽晶片210的暴露部分。 Specifically, the second electrode composition 250 and the third electrode composition 270 described above are screen printed on the patterned second dielectric layer 260a and the P-type germanium wafer 210. The back side B, whereby the second electrode composition 250 can cover the exposed portions of the patterned second dielectric layer 260a and the P-type germanium wafer 210.
再接著,對已形成有第一電極組成物240、第二電極組成物250以及第三電極組成物270的上述結構進行高溫共燒製程,形成正面電極240a、背面電極250a與P+矽層210a,構成前述圖2-5所示的矽晶太陽能電池200的整體結構。值得注意的是,高溫製程的最高溫度例如是大於600℃,藉此,第一電極組成物240經高溫燒結後形成正面電極240a,並且正面電極240a因高溫燒結而穿越第一介電層230(以虛線表示)與N型摻雜層220接觸。此外,由於鋁-矽共晶溫度(eutectic temperature)約為577℃,因此在P型矽晶片210與鋁電極254之間會形成一層鋁矽共晶層252。 此外,III族元素的鋁很容易擴散進入IV族元素的矽。因此,在高溫燒結後冷卻至室溫過程中,在P型矽晶片210的背面B可以產生一層P+矽層210a(如圖4所示),此P+矽層210a可與P型矽晶片210形成高低濃度差P+-P接面(junction),而產生局部背面電場(local back surface field,LBSF),增加P型矽晶片210內載子的收集,減少了載子在背表面再結合的機會,提升矽晶太陽能電池200的轉換效率。並且,由於第二電極組成物250之鋁漿中含有具有至少一矽烷醇官能基的有機含矽添加劑,因此可以使鋁矽共晶的孔洞填充率維持高水準,有效提升轉換效率,並避免翹曲等問題。 Then, the above structure in which the first electrode composition 240, the second electrode composition 250, and the third electrode composition 270 have been formed is subjected to a high-temperature co-firing process to form the front surface electrode 240a, the back surface electrode 250a, and the P +矽 layer 210a. The overall structure of the twinned solar cell 200 shown in the above FIGS. 2-5 is constructed. It is to be noted that the highest temperature of the high temperature process is, for example, greater than 600 ° C, whereby the first electrode composition 240 is sintered at a high temperature to form the front electrode 240a, and the front electrode 240a traverses the first dielectric layer 230 due to high temperature sintering ( Indicated by a broken line) is in contact with the N-type doping layer 220. In addition, since the aluminum-germanium eutectic temperature is about 577 ° C, a layer of aluminum germanium eutectic layer 252 is formed between the p-type germanium wafer 210 and the aluminum electrode 254. In addition, the aluminum of the group III element easily diffuses into the lanthanum of the group IV element. Therefore, during cooling to room temperature after high-temperature sintering, a P + germanium layer 210a (shown in FIG. 4) may be formed on the back surface B of the P-type germanium wafer 210, and the P + germanium layer 210a may be bonded to the P-type germanium wafer. 210 forms a high-low concentration difference P + -P junction, and generates a local back surface field (LBSF), which increases the collection of carriers in the P-type wafer 210, and reduces the recombination of carriers on the back surface. The opportunity to increase the conversion efficiency of the twin solar cell 200. Moreover, since the aluminum paste of the second electrode composition 250 contains an organic antimony additive having at least one stanol function, the hole filling rate of the aluminum eutectic eutectic can be maintained at a high level, the conversion efficiency is effectively improved, and the warpage is avoided. Qu and other issues.
[效率與填充因子] [efficiency and fill factor]
使用太陽電池效率量測機台,針對不同實施例之矽晶太陽能電池進行電池效率與填充因子量測。太陽電池效率量測機台為endeas所製造之QuickSun-120CA型太陽電池效率量測機。 Cell efficiency and fill factor measurements were performed on twin solar cells of different embodiments using a solar cell efficiency measuring machine. The solar cell efficiency measuring machine is a QuickSun-120CA solar cell efficiency measuring machine manufactured by Endeas.
[翹曲量] [warpage amount]
將燒結後不同實施例的矽晶太陽電池,以受光面朝上方式放置於平台上,然後使用不同厚度之厚薄規,量測矽晶太陽電池邊緣中間翹曲最高處與平台間的縫隙大小。 The twinned solar cells of different embodiments after sintering are placed on the platform with the light-receiving surface facing up, and then the thickness gauges of the edges of the twin crystal solar cells are measured at the highest warpage between the edges of the twin crystal solar cells.
[填充率] [filling rate]
將高溫燒結後不同實施例的鈍化發射極背電極矽晶太陽能電池,利用掃描式電子顯微鏡(SEM),觀察鋁矽共晶層有完全填滿,即無孔洞的鋁矽共晶層所佔的比例。 After passivating the emitter back electrode twin crystal solar cell of different examples after high temperature sintering, the scanning electron microscope (SEM) was used to observe that the aluminum ruthenium eutectic layer was completely filled, that is, the non-porous aluminum ruthenium eutectic layer occupied. proportion.
在以下實例中,本發明的鋁漿可分別應用於前述圖1的傳統矽晶太陽能電池以及前述圖2A與2B的鈍化發射極背電極矽晶太陽能電池中。並且,鋁漿的成份比例以及評價結果分別如表1及表2所示。值得注意的是,表1與表2的實驗數值已經分別對比較例1及比較例2進行正規化,亦即將比較例1、2中的各項評價數值設為1,來換算各實施例中的各項目的數值。 In the following examples, the aluminum paste of the present invention can be applied to the conventional twinned solar cell of FIG. 1 described above and the passivated emitter back electrode twinned solar cell of FIGS. 2A and 2B, respectively. Further, the composition ratios and evaluation results of the aluminum paste are shown in Tables 1 and 2, respectively. It is to be noted that the experimental values of Tables 1 and 2 have been normalized to Comparative Example 1 and Comparative Example 2, respectively, that is, the evaluation values in Comparative Examples 1 and 2 are set to 1, and the respective examples are converted. The value of each item.
詳言之,表1繪示改變有機含矽添加劑的種類以及在鋁漿中的含量,對矽晶太陽能電池之效率、以及翹曲量的影響。值 得注意的是,在實施例1至實施例13中,均於鋁漿中添加矽烷醇作為有機含矽添加劑,因此可有效地減少矽晶太陽能電池的翹曲量,並且增加矽晶太陽能電池的效率。並且,當有機含矽添加劑為三(異丙氧基)矽烷醇時,翹曲量隨著有機含矽添加劑的含量越高而降低,尤以含量為30%時,矽晶太陽能電池的翹曲量降低為未添加有機含矽添加劑的比較例1的六成左右;此外,矽晶太陽能電池的轉換效率可藉由改變有機含矽添加劑的含量來有效地控制,其中尤以含量為1%時,矽晶太陽能電池的轉換效率可以有效被提升。 In detail, Table 1 shows the effect of changing the type of organic cerium-containing additive and its content in the aluminum paste on the efficiency of the twinned solar cell and the amount of warpage. value It is to be noted that in each of the first to the thirteenth embodiments, decyl alcohol is added as an organic cerium-containing additive to the aluminum paste, so that the amount of warpage of the twinned solar cell can be effectively reduced, and the twinned solar cell can be increased. effectiveness. Moreover, when the organic cerium-containing additive is tris(isopropoxy) decyl alcohol, the amount of warpage decreases as the content of the organic cerium-containing additive increases, especially when the content is 30%, the warpage of the twinned solar cell The amount is reduced to about 60% of Comparative Example 1 in which no organic cerium-containing additive is added; in addition, the conversion efficiency of the twinned solar cell can be effectively controlled by changing the content of the organic cerium-containing additive, especially when the content is 1%. The conversion efficiency of the twin solar cell can be effectively improved.
表2繪示為改變有機含矽添加劑在鋁漿中的含量,對鋁矽共晶的孔洞填充率、鈍化發射極背電極矽晶太陽能電池之填充因子、以及轉換效率的影響。值得注意的是,在實施例1至實施例4中,由於鋁漿中含有三(異丙氧基)矽烷醇作為有機含矽添加劑,因此可增加鋁矽共晶的孔洞填充率,其中填充因子亦隨之增加,進而增加鈍化發射極背電極矽晶太陽能電池的效率。 Table 2 shows the effect of changing the content of the organic cerium-containing additive in the aluminum paste, the hole filling ratio of the aluminum bismuth eutectic, the filling factor of the passivated emitter back electrode twin solar cell, and the conversion efficiency. It is worth noting that in Examples 1 to 4, since the aluminum paste contains tris(isopropoxy) stanol as an organic cerium-containing additive, the void filling ratio of the aluminum cerium eutectic can be increased, wherein the filling factor It also increases, which in turn increases the efficiency of the passivated emitter back electrode twinned solar cell.
綜上所述,本發明的鋁漿以及使用此鋁漿的鈍化發射極背電極矽晶太陽能電池的製造方法具有以下優點: In summary, the aluminum paste of the present invention and the method of manufacturing the passivated emitter back electrode twinned solar cell using the aluminum paste have the following advantages:
(一)藉由在鋁漿中添加具有至少一矽烷醇官能基的有機含矽添加劑,可以使有機含矽添加劑與玻璃粉、鋁粉以及有機載體充分地且均勻地混合,藉此發揮作為密著劑的功能,因此本發明的矽晶太陽能電池用鋁漿可以有效提高矽晶太陽能電池之鋁矽共晶的孔洞填充率,以致提升電池效率。 (1) By adding an organic cerium-containing additive having at least one stanol function to an aluminum paste, the organic cerium-containing additive can be sufficiently and uniformly mixed with the glass powder, the aluminum powder, and the organic vehicle, thereby functioning as a dense The function of the agent, therefore, the aluminum paste for the twinned solar cell of the present invention can effectively increase the hole filling rate of the aluminum-bismuth eutectic of the twinned solar cell, so as to improve the cell efficiency.
(二)藉由在鋁漿中添加具有至少一矽烷醇官能基的有機含矽添加劑,還可抑制有機含矽添加劑在矽晶太陽能電池製程中與有機載體過度反應,而導致黏度升高等不穩定現象。 (2) By adding an organic antimony additive having at least one stanol function to the aluminum paste, the organic antimony additive can also be inhibited from excessively reacting with the organic vehicle in the process of the twin solar cell, resulting in instability such as an increase in viscosity. phenomenon.
(三)藉由本發明的矽晶太陽能電池用鋁漿可以有效增加電極與基板附著力,從而減輕高溫燒結後矽晶太陽能電池翹曲的問題。 (3) The aluminum paste for a twinned solar cell of the present invention can effectively increase the adhesion between the electrode and the substrate, thereby alleviating the problem of warpage of the twinned solar cell after high temperature sintering.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。 Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.
100‧‧‧矽晶太陽能電池 100‧‧‧Silver solar cells
110‧‧‧P型矽晶片 110‧‧‧P type silicon wafer
110a‧‧‧P+矽層 110a‧‧‧P + layer
120‧‧‧N型摻雜層 120‧‧‧N-doped layer
130‧‧‧第一介電層 130‧‧‧First dielectric layer
140a‧‧‧正面電極 140a‧‧‧front electrode
150a‧‧‧背面電極 150a‧‧‧ back electrode
152‧‧‧鋁矽共晶層 152‧‧‧Aluminum bismuth eutectic layer
154‧‧‧鋁電極 154‧‧‧Aluminum electrode
B‧‧‧背面 B‧‧‧Back
R‧‧‧受光面 R‧‧‧Glossy surface
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US11251109B2 (en) | 2016-11-18 | 2022-02-15 | Samtec, Inc. | Filling materials and methods of filling through holes of a substrate |
US12009225B2 (en) | 2018-03-30 | 2024-06-11 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
US12100647B2 (en) | 2019-09-30 | 2024-09-24 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
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CN102592704B (en) * | 2012-02-13 | 2013-10-23 | 江苏瑞德新能源科技有限公司 | Aluminum paste for solar energy battery and preparation method thereof |
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US11251109B2 (en) | 2016-11-18 | 2022-02-15 | Samtec, Inc. | Filling materials and methods of filling through holes of a substrate |
US11646246B2 (en) | 2016-11-18 | 2023-05-09 | Samtec, Inc. | Method of fabricating a glass substrate with a plurality of vias |
US12009225B2 (en) | 2018-03-30 | 2024-06-11 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
US12100647B2 (en) | 2019-09-30 | 2024-09-24 | Samtec, Inc. | Electrically conductive vias and methods for producing same |
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