TW201510244A - Method for preparing platinum-rhodium-oxide based alloy - Google Patents

Method for preparing platinum-rhodium-oxide based alloy Download PDF

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TW201510244A
TW201510244A TW102142953A TW102142953A TW201510244A TW 201510244 A TW201510244 A TW 201510244A TW 102142953 A TW102142953 A TW 102142953A TW 102142953 A TW102142953 A TW 102142953A TW 201510244 A TW201510244 A TW 201510244A
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alloy
platinum
alloy sheet
oxide
temperature
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Won-Kyu Yoon
Seung-Ho Yang
Jae-Soung Park
Byeong-Hoon Yeon
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Hee Sung Metal Ltd
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    • C22C32/001Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides
    • C22C32/0015Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with only oxides with only single oxides as main non-metallic constituents
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    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
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    • BPERFORMING OPERATIONS; TRANSPORTING
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    • B22F2201/00Treatment under specific atmosphere
    • B22F2201/03Oxygen
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00Supplementary information concerning processes or compositions relating to powder metallurgy
    • B22F2998/10Processes characterised by the sequence of their steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
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Abstract

The present disclosure provides a method for preparing a high-density dispersion strengthening type platinum-rhodium-oxide based alloy.

Description

鉑銠氧化物系合金材料之製備方法 Method for preparing platinum-rhodium oxide alloy material

本發明係關於一種高密度氧化物分散強化型鉑銠氧化物系合金之製備方法。 The present invention relates to a process for preparing a high-density oxide dispersion-strengthened platinum-rhodium oxide-based alloy.

分散強化(dispersion strengthening)為一種強化金屬材料之方法,並藉由分散由其他金屬之碳化物、氮化物、及氧化物所構成之分散顆粒於母相金屬(parent phase metal)中,並使用分散顆粒之作用以增加母相金屬之機械性質。 Dispersion strengthening is a method of strengthening a metal material by dispersing dispersed particles composed of carbides, nitrides, and oxides of other metals in a parent phase metal and using dispersion. The action of the particles increases the mechanical properties of the parent metal.

關於該母相金屬,通常使用鉑,儘管其價格昂貴,但鉑具有高熔點,鉑在室溫及高溫下容易進行處理,且鉑具有優異的耐化學性、抗腐蝕性及揮發性。 Regarding the parent phase metal, platinum is usually used, and although it is expensive, platinum has a high melting point, platinum is easily handled at room temperature and high temperature, and platinum has excellent chemical resistance, corrosion resistance, and volatility.

在相關技術中,為了增加鉑的強度,通常使用了固溶強化鉑材料(solid-solution strengthened platinum material),藉由將鉑與元素(例如,金(Au)及銠(Rh))進行合金而獲得。然而,近來由於使用強化元素的合金元素(例如,金、銠等)價格上漲,因此,為了取代合金材料(例如,鉑-金及鉑-銠),已發展出使用具有優異的氧化力之元素,以形成氧化 物並分散於鉑合金材料中。 In the related art, in order to increase the strength of platinum, a solid-solution strengthened platinum material is generally used, by alloying platinum with an element such as gold (Au) and rhodium (Rh). obtain. However, recently, due to the increase in the price of alloying elements (for example, gold, rhodium, etc.) using strengthening elements, in order to replace alloy materials (for example, platinum-gold and platinum-ruthenium), it has been developed to use an element having excellent oxidizing power. To form oxidation And dispersed in the platinum alloy material.

例如,在鉑合金中之金屬(例如,鋯)之氧化物顆粒分散於鉑中作為母相金屬。已知即使在1,200℃以上的高溫下長時間使用鉑合金,該鉑合金表現出輕微的晶粒生長及小變形,且當藉由金屬氧化物阻礙再結晶進行時,該鉑合金具有強化的晶粒,以致於具有較大高溫潛變強度(creep strength),且也降低其價格。 For example, oxide particles of a metal (for example, zirconium) in a platinum alloy are dispersed in platinum as a parent phase metal. It is known that even when a platinum alloy is used for a long time at a high temperature of 1,200 ° C or higher, the platinum alloy exhibits slight grain growth and small deformation, and the platinum alloy has a strengthened crystal when the recrystallization is inhibited by the metal oxide. The granules have a large high temperature creep strength and also lower their price.

藉由高溫及高壓輕易地將該分散強化型合金變形,且該分散型合金具有優異的高溫潛變特性,因此,可使用該合金作為用於製造LCD高品質玻璃及裝置之材料。 The dispersion-strengthened alloy is easily deformed by high temperature and high pressure, and the dispersion-type alloy has excellent high-temperature latent characteristics, and therefore, the alloy can be used as a material for manufacturing high-quality LCD glass and devices.

在相關領域中,氧化物分散強化型合金之製造方法如下述:製備具有一靶組成物(target composition)之合金錠,接著使用電漿來製備鉑合金粉末。該製備方法之優點為可輕易地控制氧化物元素的含量,但其缺點為由於散射的粉末而造成產率些微地減少,且由於製備時間的增加,因此需要價格也較高。 In the related art, a method for producing an oxide dispersion-strengthened alloy is as follows: an alloy ingot having a target composition is prepared, and then a plasma is used to prepare a platinum alloy powder. An advantage of this preparation method is that the content of the oxide element can be easily controlled, but the disadvantage is that the yield is slightly reduced due to the scattered powder, and since the preparation time is increased, the price is also required to be high.

[專利文件] [Patent Document]

韓國專利第1,288,592號。 Korean Patent No. 1,288,592.

本發明致力於提供一種具有優異的高溫潛變強度之高密度氧化物分散強化型鉑-銠氧化物系合金之製備 方法。 The present invention is directed to providing a high-density oxide dispersion-strengthened platinum-rhodium oxide alloy having excellent high temperature latent strength. method.

本發明之一範例性實施例提供一種鉑-銠氧化物系合金之製備方法,包括:形成一合金錠,該合金錠包括(i)鉑、(ii)銠及(iii)一種以上的金屬係選自由:鋯、釤、釔及鉿所組成之群組;以及形成一合金薄板,其係藉由熔融旋淬(melt-spinning)該合金錠而形成;內氧化該合金薄板,其係在空氣氣氛下藉由熱處理該合金薄板而進行;層積或研磨該內氧化合金薄板,且使該內氧化合金薄板進行高溫加壓成型;熱加工該高溫加壓成型的合金薄板;冷加工該熱加工的合金薄板;以及熱處理該冷加工的合金薄板。 An exemplary embodiment of the present invention provides a method for preparing a platinum-rhenium oxide-based alloy, comprising: forming an alloy ingot comprising (i) platinum, (ii) antimony, and (iii) one or more metal systems Freely selected: a group consisting of zirconium, hafnium, niobium and tantalum; and an alloy thin plate formed by melt-spinning the alloy ingot; internally oxidizing the alloy sheet, which is tied to the air Performing heat treatment of the alloy sheet in an atmosphere; laminating or grinding the inner oxide alloy sheet, and subjecting the inner oxide alloy sheet to high temperature press forming; thermally processing the high temperature press formed alloy sheet; cold working the hot worked An alloy sheet; and heat treating the cold worked alloy sheet.

以100重量百分比之該合金錠為基準,該合金錠可包含5至20重量百分比之銠;0.02至0.8重量百分比氧化物之金屬;以及其餘為鉑。 The alloy ingot may comprise from 5 to 20 weight percent bismuth; from 0.02 to 0.8 weight percent oxide metal; and the balance platinum, based on 100 weight percent of the alloy ingot.

該所形成的合金薄板可包含:形成一熔融物,其係在10-4Torr至10-3Torr之高真空下藉由熔融該合金錠而形成;以及噴塗該熔融物於500rpm至3,000rpm旋轉之銅輪的表面上,其係藉由在0.1至1.0MPa下加壓一惰性氣體於該熔融物。 The formed alloy sheet may include: forming a melt formed by melting the alloy ingot under a high vacuum of 10 -4 Torr to 10 -3 Torr; and spraying the melt at 500 rpm to 3,000 rpm The surface of the copper wheel is pressurized with an inert gas at 0.1 to 1.0 MPa.

藉由自800℃至1,000℃之溫度下實施1至5小時之熱處理,可進行該內氧化。 This internal oxidation can be carried out by performing a heat treatment at a temperature of from 800 ° C to 1,000 ° C for 1 to 5 hours.

該高溫加壓成型可為一熱壓或一熱等靜壓,且可在在0MPa至50MPa的壓力下,於1,200℃至1,400℃之溫度下進行1至5小時。 The high temperature press molding may be a hot pressing or a hot isostatic pressing, and may be carried out at a temperature of 1,200 ° C to 1,400 ° C for 1 to 5 hours under a pressure of 0 MPa to 50 MPa.

較佳地,在1,000℃至1,400℃的溫度下進行該 熱加工。 Preferably, the temperature is carried out at a temperature of from 1,000 ° C to 1,400 ° C. Thermal processing.

較佳地,在40%至90%的冶煉率(reduction ratio)下進行冷加工。 Preferably, the cold working is carried out at a reduction ratio of 40% to 90%.

在1,200℃至1,400℃的溫度下可進行1至5小時的該熱處理。 This heat treatment can be carried out at a temperature of 1,200 ° C to 1,400 ° C for 1 to 5 hours.

根據本發明之鉑-銠氧化物系合金之製備方法,可藉由使用熔融旋淬方法以製備該金屬薄板,接著在空氣中僅以一熱處理以內氧化該金屬薄板,而減少製程數目及製備時間,藉此增加價格的競爭力。 According to the method for producing a platinum-ruthenium oxide-based alloy of the present invention, the number of processes and the preparation time can be reduced by using a melt-spinning method to prepare the metal thin plate, followed by oxidizing the metal thin plate in a heat treatment only in the air. To increase the competitiveness of the price.

可增加該鉑-銠氧化物系合金之密度,且可增加該高溫潛變強度。 The density of the platinum-rhenium oxide-based alloy can be increased, and the high-temperature creep strength can be increased.

前述摘要僅用以說明並未企圖限制成任何方法。除了上述的說明性態樣、具體實施例及特徵之外,藉由參考圖示及下述實施方式,進一步的態樣、具體實施例及特徵將變成顯而易見。 The foregoing summary is for illustrative purposes only and is not intended to be limiting. Further aspects, specific embodiments, and features of the invention will become apparent from the Detailed Description of the Drawing.

圖1係在先前技術中之鉑-銠氧化物系合金之製備方法之步驟流程圖。 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing the steps of a method for preparing a platinum-rhenium oxide alloy in the prior art.

圖2係根據本發明之鉑-銠氧化物系合金之製備方法之步驟流程圖。 Figure 2 is a flow chart showing the steps of a method for preparing a platinum-rhenium oxide-based alloy according to the present invention.

圖3係實施例1所製備的合金薄板之穿透式電子顯微鏡(TEM)照片。 3 is a transmission electron microscope (TEM) photograph of the alloy sheet prepared in Example 1.

圖4係顯示在實施例1及比較例1之每一製程中製備鉑 -銠氧化物系合金之照片。 4 shows the preparation of platinum in each of the processes of Example 1 and Comparative Example 1. - Photograph of bismuth oxide alloy.

圖5係在實施例1中所製備的鉑-銠氧化物系合金之EBSD分析照片。 Fig. 5 is a EBSD analysis photograph of the platinum-rhenium oxide-based alloy prepared in Example 1.

圖6係在比較例1中所製備的鉑-銠氧化物系合金之EBSD分析照片。 Fig. 6 is a EBSD analysis photograph of the platinum-rhenium oxide-based alloy prepared in Comparative Example 1.

在下述實施方式中,參照附加圖示,係為本發明的一部分。不意謂為限制於實施方式、圖示及申請專利範圍中所描述的說明性實施例。只要不偏離本發明的標的的精神及範圍,可使用其它實施例及其它變更。 In the following embodiments, reference to the additional drawings is part of the present invention. It is not intended to be limited to the illustrative embodiments described in the embodiments, the drawings, and the claims. Other embodiments and other changes may be made without departing from the spirit and scope of the invention.

之後,參照圖2將說明本發明。 Hereinafter, the present invention will be described with reference to Fig. 2 .

本發明提供一種鉑-銠氧化物系合金之製備方法包括:形成一合金錠,該合金錠包括(i)鉑、(ii)銠及(iii)一種以上的氧化物之金屬係選自由:鋯、釤、釔及鉿所組成之群組;以及形成一合金薄板,其係藉由熔融旋淬該合金錠而形成;內氧化該合金薄板,其係在空氣氣氛下藉由熱處理該合金薄板而進行;層積或研磨該內氧化合金薄板,且使該內氧化合金薄板進行高溫加壓成型;熱加工該高溫加壓成型的合金薄板;冷加工該熱加工的合金薄板;以及熱處理該冷加工的合金薄板。 The present invention provides a method for preparing a platinum-rhenium oxide-based alloy comprising: forming an alloy ingot comprising (i) platinum, (ii) antimony, and (iii) one or more oxides selected from the group consisting of zirconium a group consisting of ruthenium, osmium, and iridium; and forming an alloy sheet formed by melt-spinning the alloy ingot; internally oxidizing the alloy sheet by heat-treating the alloy sheet under an air atmosphere Performing; laminating or grinding the inner oxidized alloy sheet, and subjecting the inner oxidized alloy sheet to high temperature press forming; thermally processing the high temperature press formed alloy sheet; cold working the hot worked alloy sheet; and heat treating the cold worked alloy sheet.

之後,將描述該製備方法之每一步驟。 Hereinafter, each step of the preparation method will be described.

首先,形成包含(i)鉑(Pt)、(ii)銠(Rh)及(iii)一種以上的金屬係選自由:鋯(Zr)、釤(Sm)、釔(Y)及鉿(Hf)所組 成之群組(步驟S100)。 First, forming a metal containing (i) platinum (Pt), (ii) ruthenium (Rh), and (iii) one or more selected from the group consisting of zirconium (Zr), strontium (Sm), ytterbium (Y), and yttrium (Hf) Group A group is formed (step S100).

於一實施例中,在步驟S100中,藉由混合及熔融鉑、銠、及一種以上的金屬係選自由:鋯、釤、釔及鉿所組成之群組;熔融該金屬;接著注入該熔融物於一具有預定的形狀之模型,以形成該合金錠。 In one embodiment, in step S100, by mixing and melting platinum, rhodium, and one or more metals selected from the group consisting of: zirconium, hafnium, tantalum, and niobium; melting the metal; and then injecting the melt The object has a model having a predetermined shape to form the alloy ingot.

鉑的含量沒有特別地限制,但可為一維持的數量,以得到該合金錠的總重量為100重量百分比。 The content of platinum is not particularly limited, but may be a maintained amount to obtain a total weight of the alloy ingot of 100% by weight.

銠為一元素,其係為了固溶強化而添加。 Antimony is an element that is added for solid solution strengthening.

銠的含量沒有特別地限制,但當該含量為5至20重量百分比時,可獲得一優異的固-溶強化效果。當銠的含量小於5重量百分比時,由於銠而不能獲得該固-溶強化效果,且當該含量超過20重量百分比時,由於銠而藉由固溶強化以增加該強度,但在後處理期間產生破裂,以致於在鉑-銠氧化物系合金中所增加的高溫強度產生破壞。 The content of cerium is not particularly limited, but when the content is 5 to 20% by weight, an excellent solid-solution strengthening effect can be obtained. When the content of cerium is less than 5% by weight, the solid-solution strengthening effect cannot be obtained due to cerium, and when the content exceeds 20% by weight, the strength is increased by solid solution strengthening due to cerium, but during post-treatment Cracking occurs so that the high temperature strength increased in the platinum-rhenium oxide-based alloy causes damage.

該合金錠包含一種以上的金屬係選自由:鋯、釤、釔及鉿所組成之群組。 The alloy ingot comprises more than one metal selected from the group consisting of zirconium, hafnium, tantalum and niobium.

如上所述的該金屬沒有降低抗腐蝕性,由於高於鉑及銠的氧化度(oxidation degree)而可輕易地轉換成氧化物,且由於在1,400℃以上的高溫之穩定性,可增加分散強化效果。 The metal as described above does not reduce corrosion resistance, can be easily converted into an oxide due to an oxidation degree higher than platinum and rhodium, and can be increased in dispersion due to stability at a high temperature of 1,400 ° C or higher. effect.

該金屬的含量沒有特別地限制,但當該含量為0.02至0.8重量百分比時,可獲得該合金之優異的分散強化效果。當氧化物的合金元素之含量小於0.02重量百分比時,不能獲得該鉑-銠氧化物系合金之分散強化效果。當該含量超 過0.8重量百分比時,增加該合金之潛變強度,但由於藉由維持分散顆粒而增加分散強化效果,因此可能破壞加工性能。 The content of the metal is not particularly limited, but when the content is 0.02 to 0.8% by weight, an excellent dispersion strengthening effect of the alloy can be obtained. When the content of the alloying element of the oxide is less than 0.02% by weight, the dispersion strengthening effect of the platinum-rhenium oxide-based alloy cannot be obtained. When the content is super When the amount exceeds 0.8% by weight, the latent strength of the alloy is increased, but since the dispersion strengthening effect is increased by maintaining the dispersed particles, the processability may be deteriorated.

因此,較佳地,銠及一種以上的金屬之含量係選自能夠實施加工性能之範圍,同時最大化固溶強化及分散強化效果。 Therefore, preferably, the content of cerium and one or more metals is selected from a range capable of performing processability while maximizing solid solution strengthening and dispersion strengthening effects.

在步驟S100中,因為氧化物之該合金元素比鉑或銠具有較佳的氧化性,因此,當在空氣中熔融氧化物之合金元素時,由於氧化及蒸發的關係,將不易控制氧化物之該合金元素之含量。因此,較佳地,在真空或在惰性氣體環境下,將氧化物之該合金元素熔融。 In step S100, since the alloying element of the oxide has better oxidation property than platinum or rhodium, when the alloying element of the oxide is melted in the air, it is difficult to control the oxide due to the relationship between oxidation and evaporation. The content of the alloying element. Therefore, it is preferred to melt the alloying element of the oxide under vacuum or in an inert gas atmosphere.

該熔融溫度沒有特別地限制,但較佳為在1,200℃至1,400℃進行熔融。 The melting temperature is not particularly limited, but it is preferably melted at 1,200 ° C to 1,400 ° C.

之後,藉由熔融旋淬在步驟S100中所獲得的該合金錠以形成合金薄板(步驟S200)。 Thereafter, the alloy ingot obtained in the step S100 is spin-quenched to form an alloy sheet (step S200).

因為經由步驟S200形成具有一小厚度的合金薄板,因此,即使在下列步驟S300中,在空氣下進行熱處理,可在短時間內充分地進行氧化。 Since the alloy sheet having a small thickness is formed through the step S200, even in the following step S300, the heat treatment is performed under air, and the oxidation can be sufficiently performed in a short time.

該合金錠嵌入至設置於一熔融旋淬設備之一噴嘴,且該合金錠在10-4Torr至10-3Torr之高真空下完全地熔融以形成一熔融物。接著在0.1MPa至1.0MPa下加壓一惰性氣體並噴塗於該熔融物中,該噴塗的熔融物開始與一旋轉銅輪之表面接觸,該銅輪係垂直設置在該噴嘴下並遠離該噴嘴,且快速冷卻該噴塗的熔融物,藉此形成一合金薄板。 The alloy ingot is embedded in a nozzle provided in a melt quenching apparatus, and the alloy ingot is completely melted under a high vacuum of 10 -4 Torr to 10 -3 Torr to form a melt. Next, an inert gas is pressurized at 0.1 MPa to 1.0 MPa and sprayed onto the melt, and the sprayed melt begins to contact the surface of a rotating copper wheel that is vertically disposed under the nozzle and away from the nozzle. And rapidly spraying the sprayed melt, thereby forming an alloy sheet.

該惰性氣體沒有特別地限制,但較佳為氬氣。 The inert gas is not particularly limited, but is preferably argon.

該銅輪的旋轉速度沒有特別地限制,但當該速度為500rpm至3,000rpm時,該熔融物與該銅輪的表面接觸並快速冷卻,且可調整所形成的合金之厚度。然而,因為該金屬薄板為薄的,因此,在下列步驟S300中,在短時間內可充分地獲得氧化。因此,可調整該薄板的厚度。該厚度較佳為約50μm至約200μm。可藉由調整該熔融物之缺口以控制該金屬薄板的厚度,其中,該熔融物與該銅輪接觸。 The rotation speed of the copper wheel is not particularly limited, but when the speed is 500 rpm to 3,000 rpm, the melt contacts the surface of the copper wheel and is rapidly cooled, and the thickness of the formed alloy can be adjusted. However, since the metal thin plate is thin, in the following step S300, oxidation can be sufficiently obtained in a short time. Therefore, the thickness of the sheet can be adjusted. The thickness is preferably from about 50 μm to about 200 μm. The thickness of the metal sheet can be controlled by adjusting the gap of the melt, wherein the melt contacts the copper wheel.

石英、石墨等為具有比鉑高的熔點之材料,因為鉑具有高熔點,因此可使用作為噴嘴。 Quartz, graphite, etc. are materials having a higher melting point than platinum, and since platinum has a high melting point, it can be used as a nozzle.

之後,在步驟S200中所獲得的該合金薄板係在空氣下進行熱處理,並進行內氧化(步驟S300)。 Thereafter, the alloy sheet obtained in step S200 is subjected to heat treatment under air and subjected to internal oxidation (step S300).

在空氣下,藉由進行熱處理在短時間內可均相地形成金屬氧化物,該金屬選自由鋯、釤、釔及鉿所組成之群組。 The metal oxide is uniformly formed in a short time by heat treatment under air, and the metal is selected from the group consisting of zirconium, hafnium, tantalum and niobium.

熱處理之溫度及時間沒有特別地限制,但溫度較佳在800℃至1,200℃之範圍,且該時間較佳為1至12小時。當該熱處理溫度小於800℃、或該熱處理時間小於1小時時,可能未充分地獲得該合金元素之氧化物。當該溫度超過1,200℃、或時間超過12小時時,由於合金元素的粗化,因此,可破壞分散效果。 The temperature and time of the heat treatment are not particularly limited, but the temperature is preferably in the range of 800 ° C to 1,200 ° C, and the time is preferably from 1 to 12 hours. When the heat treatment temperature is less than 800 ° C, or the heat treatment time is less than 1 hour, the oxide of the alloying element may not be sufficiently obtained. When the temperature exceeds 1,200 ° C or the time exceeds 12 hours, the alloying element is coarsened, so that the dispersion effect can be broken.

之後,層積或研磨在步驟S300中所獲得的該內氧化合金薄板,並進行高溫加壓成型(步驟S400)。 Thereafter, the inner oxide alloy sheet obtained in step S300 is laminated or ground, and subjected to high temperature press molding (step S400).

經由步驟S400之內氧化合金薄板之一相對密度 可調整至80%以上。 Relative density of one of the oxidized alloy sheets in step S400 Can be adjusted to more than 80%.

該高溫加壓成型包括:例如,熱壓(hot press、HP)或熱等靜壓(hot isostatic press、HIP),但本發明不侷限於此。 The high temperature press molding includes, for example, hot press (HP) or hot isostatic press (HIP), but the present invention is not limited thereto.

該高溫加壓成型之溫度與時間沒有特別地限制。但較佳為在10MPa至50MPa的壓力下於1,200℃ to 1,400℃的溫度範圍下進行該製備1至5小時。當高溫加壓成型之溫度小於1,200℃時,該時間小於1小時、或該壓力小於10MPa時,將無法獲得一高密度燒結體。當溫度超過1,400℃或時間超過5小時時,由於該氧化物之粗化,因此很有可能破壞該分散強化效果。超過50MPa之壓力可造成所使用的模型與設備的危險。 The temperature and time of the high temperature press molding are not particularly limited. However, it is preferred to carry out the preparation for 1 to 5 hours at a temperature ranging from 1,200 ° C to 1,400 ° C under a pressure of 10 MPa to 50 MPa. When the temperature of the high-temperature press molding is less than 1,200 ° C, when the time is less than 1 hour, or the pressure is less than 10 MPa, a high-density sintered body cannot be obtained. When the temperature exceeds 1,400 ° C or the time exceeds 5 hours, the dispersion strengthening effect is likely to be broken due to the coarsening of the oxide. Pressures in excess of 50 MPa can pose a hazard to the models and equipment used.

之後,在步驟S400中所獲得的該合金薄板係為熱加工(步驟S500)。 Thereafter, the alloy sheet obtained in step S400 is subjected to hot working (step S500).

在步驟S500中之熱加工係為用於獲得一高密度合金,且經由該熱加工在步驟S400中所獲得的相對密度可調整為98%以上。該熱加工包括:例如,熱輥、熱鍛等,但不侷限於此。 The hot working in step S500 is for obtaining a high-density alloy, and the relative density obtained in step S400 via the hot working can be adjusted to 98% or more. The thermal processing includes, for example, hot rolls, hot forging, and the like, but is not limited thereto.

當該相對密度小於98%時,即使由於之後的冷加工,而將相對密度改變成99%或以上,也沒有移除在熱加工期間所維持的孔洞。因此,藉由之後的熱處理或內鍵結等很有可能產生將氣泡產生在該合金的表面上。 When the relative density is less than 98%, even if the relative density is changed to 99% or more due to the subsequent cold working, the pores maintained during the hot working are not removed. Therefore, it is highly likely that bubbles are generated on the surface of the alloy by heat treatment or internal bonding or the like.

該熱加工之溫度沒有特別地限制,較佳為1,000℃至1,400℃之溫度範圍。當溫度小於1,000℃時,在熱 加工期間容易產生破裂,且不易確保合金高密度之安全。當溫度超過1,400℃時,由於氧化物的合金元件之粗化,因此可惡化該合金的分散強化效果。 The temperature of the hot working is not particularly limited, and is preferably in the range of 1,000 ° C to 1,400 ° C. When the temperature is less than 1,000 ° C, in the heat Cracking is likely to occur during processing, and it is difficult to ensure the high density of the alloy. When the temperature exceeds 1,400 ° C, the alloying element of the oxide is coarsened, so that the dispersion strengthening effect of the alloy can be deteriorated.

同時,在下述步驟S600之前,可熱處理在步驟S500中所獲得的該合金薄板。藉此,在冷加工期間可避免破裂產生。 Meanwhile, the alloy sheet obtained in the step S500 may be heat treated before the step S600 described below. Thereby, cracking can be avoided during cold working.

在熱加工之後,進行冷加工以控制厚度(步驟S600)。 After the hot working, cold working is performed to control the thickness (step S600).

該冷加工之非限定之實施例包括:冷輥(cold-rolling)、冷鍛(cold-forging)等,較佳為冷輥。 Non-limiting examples of the cold working include: cold-rolling, cold-forging, etc., preferably a chill roll.

冷輥之形變率沒有特別地限制,但較佳為40%至90%。當該形變率小於40%時,即使在之後的熱處理之後,該加工應力(work stress)很低以至於不能產生再結晶。當該形變率超過90%時,由於高工作應力,因此很有可能分解該合金。 The deformation rate of the cold roll is not particularly limited, but is preferably 40% to 90%. When the deformation rate is less than 40%, even after the subsequent heat treatment, the work stress is so low that recrystallization cannot be produced. When the deformation rate exceeds 90%, it is highly likely to decompose the alloy due to high working stress.

在冷加工之後,進行熱處理以使微細結構再結晶(步驟S700)。 After the cold working, heat treatment is performed to recrystallize the fine structure (step S700).

熱處理之溫度與時間條件沒有特別地限制,但較佳為在1,200℃至1,400℃溫度範圍進行熱處理1至5個小時。當溫度小於1,200℃或時間小於1小時時,可禁止微細結構之再結晶。當溫度超過1,400℃或時間超過5小時時,由於晶粒與氧化物,因此可破壞硬度。 The temperature and time conditions of the heat treatment are not particularly limited, but it is preferably heat-treated at a temperature ranging from 1,200 ° C to 1,400 ° C for 1 to 5 hours. When the temperature is less than 1,200 ° C or the time is less than 1 hour, recrystallization of the fine structure can be inhibited. When the temperature exceeds 1,400 ° C or the time exceeds 5 hours, the hardness can be broken due to crystal grains and oxides.

之後,藉由實施例將具體地描述本發明,但下列的實施例與實驗性實施例僅說明本發明之一形式。本發明 的範圍不限制於下列的實施例及實驗性實施例。 Hereinafter, the present invention will be specifically described by way of examples, but the following examples and experimental examples illustrate only one form of the invention. this invention The scope of the invention is not limited to the following examples and experimental examples.

實施例1Example 1

藉由嵌入99.7重量百分比之PtRh10與0.3重量百分比之Zr至真空高頻感應熔融爐(vacuum high frequency induction melting furnace)中,其中,該PtRh10具有3N5的純度,且該Zr具有3N的純度;熔融該混合物;接著固化該熔融物,以獲得一合金錠。之後,藉由嵌入該合金錠至熔煉設備(melt-spinning equipment)中,加壓氬氣氣體於0.3MPa至0.5MPa,且噴塗該熔融物於銅輪之表面上,以獲得合金薄板。在此情況下,銅輪的旋轉速度設定為500rpm至3,000rpm。藉由於空氣下在800℃至1,000℃熱處理所獲得的合金薄板1至5小時,以製備內氧化合金薄板。 By embedding 99.7 weight percent of PtRh10 and 0.3 weight percent of Zr into a vacuum high frequency induction melting furnace, wherein the PtRh10 has a purity of 3N5, and the Zr has a purity of 3N; The mixture is then cured to obtain an alloy ingot. Thereafter, by embedding the alloy ingot into a melt-spinning equipment, the argon gas was pressurized at 0.3 MPa to 0.5 MPa, and the melt was sprayed on the surface of the copper wheel to obtain an alloy sheet. In this case, the rotational speed of the copper wheel is set to 500 rpm to 3,000 rpm. The inner oxidized alloy sheet is prepared by an alloy sheet obtained by heat treatment at 800 ° C to 1,000 ° C under air for 1 to 5 hours.

之後,層積或研磨該內氧化合金薄板,並於20MPa的壓力下於1,400℃加壓燒結2小時。接著,所量測的該合金薄板的相對密度為86.5%。之後,在1,200℃的溫度進行熱鍛。接著,所量測的該合金薄板的相對密度為98.0%。之後,在40%的形變率進行冷輥。其次,所量測的該合金薄板的相對密度為99.9%。接著,藉由在空氣中於1,200℃下進行熱處理鉑-銠-氧化物系合金1小時。 Thereafter, the inner oxide alloy sheet was laminated or ground, and pressure-sintered at 1,400 ° C for 2 hours under a pressure of 20 MPa. Next, the measured alloy sheets had a relative density of 86.5%. Thereafter, hot forging was performed at a temperature of 1,200 °C. Next, the measured alloy sheets had a relative density of 98.0%. Thereafter, the chill roll was carried out at a deformation rate of 40%. Next, the measured relative density of the alloy sheet was 99.9%. Next, the platinum-rhodium-oxide-based alloy was heat-treated at 1,200 ° C for 1 hour in the air.

圖3說明該內氧化的合金薄板之穿透是顯微鏡(transmission electron microscope,TEM)照片。可知具有約200nm大小的Zr金屬氧化物均勻地分散並沿著晶粒邊界(grain boundary)形成。 Figure 3 illustrates the penetration of the internally oxidized alloy sheet as a transmission electron microscope (TEM) photograph. It is known that the Zr metal oxide having a size of about 200 nm is uniformly dispersed and formed along a grain boundary.

比較例1Comparative example 1

藉由嵌入99.7重量百分比之PtRh10與0.3重量百分比之Zr至真空高頻感應熔融爐,其中,該PtRh10具有3N5的純度,且該Zr具有3N的純度;熔融該混合物;接著固化該熔融物,以獲得一合金錠。之後,使用一附加至電漿裝置之真空泵將降低壓力至10-3Torr,接著,藉由使用氬氣氣體做為反應氣體形成電漿;熔融該合金錠;並增加電漿電力以製備粉末。藉由導入所獲得的粉末於一正方形成型體碳模型中;及在1,300℃於氬氣環境下熱處理該粉末2小時以製備一成型體;以及藉由在空氣下於1400℃進行熱處理2小時,以製備一內氧化成型體。 By embedding 99.7 weight percent PtRh10 and 0.3 weight percent Zr into a vacuum high frequency induction melting furnace, wherein the PtRh10 has a purity of 3N5, and the Zr has a purity of 3N; melting the mixture; then solidifying the melt to An alloy ingot is obtained. Thereafter, a vacuum pump attached to the plasma device is used to lower the pressure to 10 -3 Torr, and then, plasma is formed by using argon gas as a reaction gas; the alloy ingot is melted; and plasma power is increased to prepare a powder. By introducing the obtained powder into a square molded body carbon model; and heat-treating the powder at 1,300 ° C for 2 hours under an argon atmosphere to prepare a molded body; and heat-treating at 1400 ° C for 2 hours under air, To prepare an internal oxidation molded body.

之後,在20MPa壓力下於1,400℃,將該內氧化成型體進行加壓燒結2小時。在加壓燒結之後,所量測的該成型體之相對密度為93.4%。之後,在1,200℃的溫度下進行熱鍛。在熱鍛之後,所量測的該成型體之相對密度為97.6%。之後,在40%的形變率進行冷輥。其次,所量測的該成型體之相對密度為99.2%。接著,藉由在空氣下於1,200℃之溫度進行熱處理1小時,以製備鉑-銠-氧化物系合金。 Thereafter, the thus-oxidized molded body was pressure-sintered at 1,400 ° C for 2 hours under a pressure of 20 MPa. After the pressure sintering, the relative density of the molded body measured was 93.4%. Thereafter, hot forging was performed at a temperature of 1,200 °C. After hot forging, the relative density of the molded body measured was 97.6%. Thereafter, the chill roll was carried out at a deformation rate of 40%. Next, the relative density of the molded body measured was 99.2%. Next, a platinum-rhenium-oxide-based alloy was prepared by heat-treating at a temperature of 1,200 ° C for 1 hour under air.

實驗例:合金元素含量之證實Experimental example: Confirmation of alloying element content

藉由ICP分析方法,來確認在實施例1中該錠之元素與合金薄板之含量。其結果分別地顯示於下述表1及2中。 The content of the element and the alloy sheet of the ingot in Example 1 was confirmed by an ICP analysis method. The results are shown in Tables 1 and 2 below, respectively.

從表1可知,在鉑-銠-氧化物系錠之情況下,作為氧化物合金元素之鋯含量表示為0.2156重量百分比,其相似於靶組成物。即使在顯示於表2中之鉑-銠-氧化物系合金薄板中,鋯之含量表示為0.2444重量百分比。 As is apparent from Table 1, in the case of the platinum-rhodium-oxide-based ingot, the zirconium content as an oxide alloying element is represented by 0.2156% by weight, which is similar to the target composition. Even in the platinum-iridium-oxide-based alloy sheet shown in Table 2, the content of zirconium was expressed as 0.2444% by weight.

實驗例2:相對密度之量測Experimental Example 2: Measurement of relative density

在加壓燒結、熱鍛及冷輥之後,分別量測在實施例1及比較例1中的鉑-銠-氧化物系合金之相對密度。其結果顯示於圖4中。 After the pressure sintering, the hot forging, and the chill roll, the relative densities of the platinum-rhodium-oxide-based alloys in Example 1 and Comparative Example 1 were measured, respectively. The result is shown in Fig. 4.

如圖4的說明,在將鉑-銠-氧化物系合金加壓燒 結之情況下,將發現比較例1之合金具有高於實施例1的合金之相對密度,但在將該合金進行熱鍛與冷輥步驟之情況下,將發現實施例1之合金具有高於比較例1之合金之相對密度。進行冷輥,使用阿基米德方法量測實施例1之合金之相對密度,且該密度為99.9%,其係相當高的值。 As illustrated in Figure 4, the platinum-bismuth-oxide alloy is pressure-burned. In the case of the junction, it was found that the alloy of Comparative Example 1 had a higher relative density than the alloy of Example 1, but in the case where the alloy was subjected to the hot forging and cold rolling steps, the alloy of Example 1 was found to have higher The relative density of the alloy of Comparative Example 1. A cold roll was carried out, and the relative density of the alloy of Example 1 was measured using the Archimedes method, and the density was 99.9%, which was a relatively high value.

實驗例3:EBSD分析Experimental Example 3: EBSD Analysis

將在實施例1與比較例1中所製備的該鉑-銠-氧化物系合金之截面進行EBSD分析,且其結果分別地顯示於圖5及6中。 The cross section of the platinum-rhodium-oxide-based alloy prepared in Example 1 and Comparative Example 1 was subjected to EBSD analysis, and the results are shown in Figs. 5 and 6, respectively.

如圖5之說明,可得知當在冷輥之後可觀察到合金之結構時,晶粒沿著輥方向配置。可得知即使在1,500℃的高溫進行熱處理之後,藉由微細ZrO2氧化物的分布而禁制晶粒的生長,並維持等軸晶粒(equiaxed grain)。然而,在比較例1的合金之條件下,可得知在高溫下進行熱處理之後,藉由該結構的再結晶而將晶粒粗化。 As illustrated in Fig. 5, it can be understood that when the structure of the alloy can be observed after the chill roll, the crystal grains are arranged along the roll direction. It can be seen that even after heat treatment at a high temperature of 1,500 ° C, the growth of crystal grains is inhibited by the distribution of fine ZrO 2 oxide, and equiaxed grains are maintained. However, under the conditions of the alloy of Comparative Example 1, it was found that the crystal grains were coarsened by recrystallization of the structure after the heat treatment was performed at a high temperature.

從上述,可領會到在本文中所描述之本發明之各式各樣的實施例係用於說明本發明之目的,且在不偏離本發明的範圍及精神下,可進行各式各樣的修飾。因此,在本文中所揭示的各式各樣的實施例並未企圖用來限制本發明,藉由下述的申請專利範圍以指明本發明的真實範圍與精神。 In view of the foregoing, it will be appreciated that the various embodiments of the invention are described herein, Modification. Therefore, the various embodiments of the invention are not intended to be limited to the scope of the invention.

Claims (9)

一種鉑銠氧化物系合金之製備方法,包括:形成一合金錠,該合金錠包括(i)鉑、(ii)銠及(iii)一種以上的金屬係選自由:鋯、釤、釔及鉿所組成之群組;以及形成一合金薄板,其係藉由熔融旋淬該合金錠而形成;內氧化該合金薄板,其係在空氣氣氛下藉由熱處理該合金薄板而進行;層積或研磨該內氧化合金薄板,且將該內氧化合金薄板進行高溫加壓成型;熱加工該高溫加壓成型的合金薄板;冷加工該熱加工的合金薄板;以及熱處理該冷加工的合金薄板。 A method for preparing a platinum-rhodium oxide-based alloy, comprising: forming an alloy ingot comprising (i) platinum, (ii) antimony, and (iii) one or more metals selected from the group consisting of zirconium, hafnium, tantalum, and niobium a group formed; and forming an alloy sheet formed by melt-spinning the alloy ingot; internally oxidizing the alloy sheet by heat-treating the alloy sheet under an air atmosphere; laminating or grinding The inner oxide alloy sheet is subjected to high temperature press forming of the inner oxide alloy sheet; the high temperature press formed alloy sheet is thermally processed; the hot worked alloy sheet is cold worked; and the cold worked alloy sheet is heat treated. 如申請專利範圍第1項所述之方法,其中,以100重量百分比之該合金錠為基準,該合金錠包括:5至20重量百分比之銠;0.02至0.8重量百分比以上之金屬;以及其餘為鉑。 The method of claim 1, wherein the alloy ingot comprises: 5 to 20% by weight of bismuth; 0.02 to 0.8% by weight or more of metal based on 100% by weight of the alloy ingot; platinum. 如申請專利範圍第1項所述之方法,其中,該合金薄板之形成包括:形成一熔融物,其係在10-4Torr至10-3Torr之高真空下藉由熔融該合金錠而形成;以及藉由在0.1至1.0MPa下加壓一惰性氣體於該熔融物,以噴塗該熔融物於500rpm至3,000rpm旋轉之銅輪的表面上。 The method of claim 1, wherein the forming of the alloy sheet comprises: forming a melt which is formed by melting the alloy ingot under a high vacuum of 10 -4 Torr to 10 -3 Torr. And spraying the molten material onto the surface of the copper wheel rotated at 500 rpm to 3,000 rpm by pressurizing an inert gas at 0.1 to 1.0 MPa. 如申請專利範圍第1項所述之方法,其中,在800℃至1,000℃下進行該內氧化1至5小時。 The method of claim 1, wherein the internal oxidation is carried out at 800 ° C to 1,000 ° C for 1 to 5 hours. 如申請專利範圍第1項所述之方法,其中,該高溫加壓成型係為一熱壓或一熱等靜壓。 The method of claim 1, wherein the high temperature press molding is a hot pressing or a hot isostatic pressing. 如申請專利範圍第1項所述之方法,其中,該高溫加壓成型係在10MPa至50MPa之壓力下於1,200℃至1,400℃的溫度,進行高溫加壓成型1至5小時。 The method according to claim 1, wherein the high-temperature press molding is performed at a temperature of 1,200 ° C to 1,400 ° C under a pressure of 10 MPa to 50 MPa for 1 to 5 hours at a high temperature. 如申請專利範圍第1項所述之方法,其中,該熱加工係在1,000℃至1,400℃的溫度下進行。 The method of claim 1, wherein the hot working is performed at a temperature of from 1,000 ° C to 1,400 ° C. 如申請專利範圍第1項所述之方法,其中,該冷加工係在40%至90%的冶煉(reduction)率下進行。 The method of claim 1, wherein the cold working is performed at a reduction rate of 40% to 90%. 如申請專利範圍第1項所述之方法,其中,該熱處理係在1,200℃至1,400℃的溫度下進行1至5小時。 The method of claim 1, wherein the heat treatment is carried out at a temperature of 1,200 ° C to 1,400 ° C for 1 to 5 hours.
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