TW201507142A - Substrate for organic electronics and method for manufacturing organic electronics - Google Patents

Substrate for organic electronics and method for manufacturing organic electronics Download PDF

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TW201507142A
TW201507142A TW103116712A TW103116712A TW201507142A TW 201507142 A TW201507142 A TW 201507142A TW 103116712 A TW103116712 A TW 103116712A TW 103116712 A TW103116712 A TW 103116712A TW 201507142 A TW201507142 A TW 201507142A
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organic
substrate
layer
electronic device
liquid
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TW103116712A
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Chinese (zh)
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Masahiro Kawasaki
Shingo Ishihara
Sukekazu Aratani
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Hitachi Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • H10K30/88Passivation; Containers; Encapsulations
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

To provide, at low cost, organic electronics, wherein luminance unevenness generated in organic electroluminescent elements formed by print coating is reduced, and power generation unevenness of organic solar cells is reduced, and to provide a substrate for manufacturing the organic electronics at low cost. Provided is a substrate for organic electronics, said substrate having a base substrate, and an organic layer and a terminal section, which are provided on the base substrate. The substrate has a liquid repellent section on the terminal section, and a liquid absorbing section at the periphery of the terminal section.

Description

有機電子設備用基板及有機電子設備之製造方法 Substrate for organic electronic device and method for manufacturing organic electronic device

本發明係關於以低成本製造高性能的有機電致發光元件之用的元件構造、以及其製造方法或基板。 The present invention relates to an element structure for manufacturing a high-performance organic electroluminescence device at low cost, a method for producing the same, or a substrate.

作為先前例,於專利文獻1揭示了如下所述的技術。記載於專利文獻1的有機電致發光元件,係在影像顯示區域排列設置複數畫素的有機電致發光裝置,特徵為在包圍各畫素的畫素電極的位置,被設置依序層積無機絕緣膜與金屬薄膜與包含含氟的硫化合物之撥液膜而成的堤部,在藉由此堤部包圍的畫素電極上的位置被配置包含發光層的機能層,同時以覆蓋前述堤部及機能層的方式設置對向電極。藉此,改善了因為無法嚴密地控制有機堤層的尺寸或膜厚,所以會因為堤的厚度、堤開口部側面之傾斜角、開口尺寸之些微的差異,而使得被形成於畫素內的正孔注入層或發光層的層厚發生變動,從而在畫素間或者面板間無法得到均一的顯示特性的問題。 As a prior example, Patent Document 1 discloses the following technique. The organic electroluminescence device described in Patent Document 1 is an organic electroluminescence device in which a plurality of pixels are arranged in a video display region, and is characterized in that a layer of inorganic elements is sequentially arranged at a position of a pixel electrode surrounding each pixel. a bank portion formed of an insulating film, a metal thin film, and a liquid-repellent film containing a fluorine-containing sulfur compound is disposed at a position on the pixel electrode surrounded by the bank portion, and a functional layer including the light-emitting layer is disposed while covering the bank The opposite electrode is provided in the manner of the part and the functional layer. Thereby, since the size or film thickness of the organic bank layer cannot be strictly controlled, the thickness of the bank, the inclination angle of the side surface of the bank opening, and the difference in the size of the opening are improved, so that it is formed in the pixel. The layer thickness of the positive hole injection layer or the light-emitting layer fluctuates, so that uniform display characteristics cannot be obtained between pixels or between panels.

但是,記載於專利文獻1的有機電致發光元件,係以顯示器為前提,在有機層的形成,使用著可以形 成細微圖案的噴墨裝置。相對於此,在適用於照明之用的有機電致發光元件,或是有機太陽電池,因為有機層的面積變大,所以有機層不採用噴墨,而使可以高速塗布大面積的狹縫塗布器或凹版印刷為主流。在本方式,會有在印刷開始部分與印刷結束部分,膜厚比設定值更厚,或者更薄的問題,進行僅在有機電致發光元件的發光部分或有機太陽電池的發電部形成有機層,而於其周邊不形成有機層之間歇塗布的話,在發光層或發電層的周邊,會有發生亮度不均或者發電不均的問題。此外,為了解消前述之亮度不均或發光不均,在基板全面連續地塗布有機層的話,於周邊配線或電極的端子上也被形成有機層,所以在有機層形成後除去被形成於端子上部的有機層的步驟變成是必要的。此步驟,導入根據氧電漿或者雷射之除去處理,所以會產生有機層的性能劣化或者成為往基板上發生異物的原因等新的問題。 However, the organic electroluminescence device described in Patent Document 1 is based on a display, and can be formed by forming an organic layer. A fine-patterned inkjet device. On the other hand, in an organic electroluminescence device suitable for illumination or an organic solar cell, since the area of the organic layer is increased, the organic layer is not coated with ink, and a large-area slit coating can be applied at a high speed. Or gravure printing is the mainstream. In the present embodiment, there is a problem that the film thickness is thicker or smaller than the set value at the printing start portion and the printing end portion, and the organic layer is formed only in the light-emitting portion of the organic electroluminescence device or the power generation portion of the organic solar cell. On the other hand, when intermittent coating is not formed around the organic layer, there is a problem that luminance unevenness or power generation unevenness occurs around the light-emitting layer or the power generation layer. In addition, in order to eliminate the uneven brightness or unevenness of light, when the organic layer is applied continuously on the substrate, the organic layer is also formed on the terminals of the peripheral wiring or the electrode. Therefore, after the organic layer is formed, the removal is formed on the upper portion of the terminal. The steps of the organic layer become necessary. In this step, since the removal process by the oxygen plasma or the laser is introduced, there is a new problem that the performance of the organic layer is deteriorated or the foreign matter is generated on the substrate.

〔先前技術文獻〕 [Previous Technical Literature] 〔專利文獻〕 [Patent Document]

[專利文獻1]日本特開2005-116313號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-116313

本發明以低成本提供可以減低產生於印刷塗布形成的有機電致發光元件的亮度不均或者減低有機太陽 電池的發電不均之有機電子設備,此外提供廉價地製作該有機電子設備之用的基板。 The present invention provides low-cost unevenness or reduced organic sun for reducing the organic electroluminescent element formed by printing coating at a low cost. An organic electronic device in which power generation of a battery is uneven, and a substrate for producing the organic electronic device at low cost is provided.

本發明係具有母體基板,與設於前述母體基板上的有機層及端子部之有機電子設備用基板,於前述端子部之上部具有撥液部,於前述端子部的周圍具有吸液部。 The present invention has a mother substrate, and an organic electronic device substrate provided on the organic substrate and the terminal portion provided on the mother substrate, and has a liquid-repellent portion on an upper portion of the terminal portion, and a liquid-absorbent portion around the terminal portion.

藉由使用本發明之有機電子設備用基板、有機電致發光裝置之製造方法,可以減低產生於有機電致發光裝置的亮度不均或發光不均。因此,有機發光元件,及使用彼之光源裝置,保持著有機發光元件的特色之超薄型/重量輕,同時可以達成無縫整合(seamless)(沒有電路/配線繞回框)。 By using the substrate for an organic electronic device and the method for producing an organic electroluminescence device of the present invention, unevenness in luminance or unevenness in light emission caused by the organic electroluminescence device can be reduced. Therefore, the organic light-emitting element, and the light source device using the same, maintains the ultra-thin/light weight of the organic light-emitting element, and at the same time achieves seamless seamlessness (no circuit/wiring wraparound frame).

100‧‧‧有機電子設備基板 100‧‧‧Organic electronic device substrate

101‧‧‧母體基板 101‧‧‧ mother substrate

102‧‧‧下部電極 102‧‧‧lower electrode

103‧‧‧輔助配線 103‧‧‧Auxiliary wiring

104‧‧‧堤 104‧‧‧

105‧‧‧端子 105‧‧‧terminal

106‧‧‧吸液墊 106‧‧‧Sucking pad

108‧‧‧撥液層 108‧‧ ‧ liquid layer

601‧‧‧有機層 601‧‧‧ organic layer

602‧‧‧上部電極 602‧‧‧ upper electrode

604‧‧‧正孔輸送層 604‧‧‧Positive hole transport layer

605‧‧‧電子阻止層 605‧‧‧Electronic blocking layer

606‧‧‧藍色發光層 606‧‧‧Blue light layer

607‧‧‧綠色發光層 607‧‧‧Green luminescent layer

608‧‧‧紅色發光層 608‧‧‧Red light layer

609‧‧‧正孔阻止層 609‧‧‧Right hole blocking layer

610‧‧‧電子輸送層 610‧‧‧Electronic transport layer

611‧‧‧緩衝層 611‧‧‧buffer layer

圖1係於上方俯瞰有機電子設備用基板之構造圖。 Fig. 1 is a structural view of a substrate overlooking an organic electronic device above.

圖2為圖1之(A)-(A')之剖面圖。 Figure 2 is a cross-sectional view of (A) - (A') of Figure 1.

圖3為圖1之(B)-(B')之剖面圖。 Figure 3 is a cross-sectional view of (B) - (B') of Figure 1.

圖4係於上方俯瞰有機電子設備用基板之構造圖。 Fig. 4 is a structural view of the substrate overlooking the organic electronic device above.

圖5係堤的形狀與圖1不同的構造圖。 Fig. 5 is a structural view showing a shape of a bank different from that of Fig. 1.

圖6係顯示有機發光元件的剖面之說明圖。 Fig. 6 is an explanatory view showing a cross section of an organic light emitting element.

以下,使用圖式等,說明本發明的有機電致發光元件之實施型態。以下之說明係顯示本發明的內容之具體例,但本發明並不以這些說明為限,於本說明書所揭示的技術思想的範圍內可以根據熟悉該項技藝者進行種種變更以及修正。此外,供說明本發明之用的所有圖式,對於具有同一機能者會賦予相同符號,而省略其反覆的說明。此外,針對有機太陽電池,與在本實施型態說明的有機電致發光元件構造上相同,但可以藉由使用一般用於有機太陽電池的材料來置換有機層或電極、配線材料。 Hereinafter, an embodiment of the organic electroluminescence device of the present invention will be described using a drawing or the like. The following description is a specific example of the present invention, but the present invention is not limited to the description, and various modifications and changes can be made by those skilled in the art within the scope of the technical idea disclosed in the present specification. In addition, all the drawings for explaining the present invention will be given the same reference numerals to those having the same functions, and the description thereof will be omitted. Further, the organic solar cell is the same as the organic electroluminescent element described in the present embodiment, but the organic layer, the electrode, and the wiring material can be replaced by using a material generally used for an organic solar cell.

〔實施例1〕 [Example 1]

使用圖1至圖4,說明在實施例1使用於本發明的有機電子設備的有機電子設備用基板100之製作方法。圖1係由上方俯瞰有機電子設備用基板100的構造圖,圖2為圖1之(A)-(A')之剖面圖,圖3為圖1之(B)-(B')之剖面圖。圖4與圖1同樣係由上方俯瞰有機電子設備用基板100之構造圖,顯示複數個圖1所示的有機電子設備用基板100。圖5係堤的形狀與圖1不同的構造圖。 A method of fabricating the substrate 100 for an organic electronic device used in the organic electronic device of the present invention in the first embodiment will be described with reference to Figs. 1 to 4 . 1 is a structural view of the substrate 100 for an organic electronic device viewed from above, FIG. 2 is a cross-sectional view of (A)-(A') of FIG. 1, and FIG. 3 is a cross-sectional view of (B)-(B') of FIG. Figure. 4 is a structural view of the substrate 100 for an organic electronic device viewed from above, and a plurality of substrates 100 for an organic electronic device shown in FIG. 1 are displayed. Fig. 5 is a structural view showing a shape of a bank different from that of Fig. 1.

有機電子設備用基板100,設置母體基板101、下部電極102、輔助配線103、堤104、端子105、 吸收多餘的溶液之吸液墊106。 The substrate 100 for an organic electronic device is provided with a mother substrate 101, a lower electrode 102, an auxiliary wiring 103, a bank 104, and a terminal 105. Absorbent pad 106 that absorbs excess solution.

母體基板101,只要是絕緣性材料即可,可由寬廣的範圍來選擇。具體而言,可以使用玻璃、石英、藍寶石等無機基板,丙烯酸酯、環氧樹脂、聚碳酸酯、聚醯胺、聚醯亞胺、聚降冰片烯、聚氧化二甲苯、聚二羧酸萘二甲酸丁二酯、聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚丙烯酸酯、聚醚酮、聚醚碸、聚酮、聚苯硫醚等有機塑膠基板。此外,亦可使用於這些母體基板101表面,設有氧化矽、氟樹脂等膜者。 The mother substrate 101 may be selected from a wide range as long as it is an insulating material. Specifically, an inorganic substrate such as glass, quartz or sapphire may be used, acrylate, epoxy resin, polycarbonate, polyamide, polyimide, polynorbornene, polyoxyxylene, polydicarboxylic acid naphthalene. An organic plastic substrate such as butylene dicarboxylate, polyethylene terephthalate, polyethylene naphthalate, polyacrylate, polyether ketone, polyether oxime, polyketone, polyphenylene sulfide. Further, it may be used on the surface of these mother substrates 101, and a film such as ruthenium oxide or fluororesin may be provided.

於母體基板101上形成下部電極102。作為下部電極102的材料,只要是透明性與具有高工作函數之材料即可使用。具體而言,可以舉出ITO、IZO、銀奈米薄膜、石墨烯、PEDOT等導電性物質。電極的圖案形成,一般可以在玻璃基板或膜基板上使用光蝕刻法等來進行。 The lower electrode 102 is formed on the mother substrate 101. The material of the lower electrode 102 can be used as long as it is transparent and has a high work function. Specific examples thereof include conductive materials such as ITO, IZO, silver nanofilm, graphene, and PEDOT. The pattern formation of the electrode can be generally performed by photolithography or the like on a glass substrate or a film substrate.

前述下部電極材料之ITO、IZO、銀奈米薄膜、石墨烯、PEDOT等,與金屬材料相比為高電阻。因此,發光部會因為電壓降低而產生電場不均,而這導致發光的亮度不均。為了減低此電壓降低,會在下部配線上使用Ag,Al、Cu、Au等金屬形成輔助配線103。輔助配線103的圖案形成,一般可以使用光蝕刻法等來進行,但也可以藉由網版印刷等各種印刷法,使用金屬油墨來形成。 The ITO, IZO, silver nanofilm, graphene, PEDOT, and the like of the lower electrode material are higher in electrical resistance than the metal material. Therefore, the light-emitting portion generates electric field unevenness due to a voltage drop, which causes uneven brightness of the light. In order to reduce this voltage drop, the auxiliary wiring 103 is formed using Ag, Al, Cu, Au or the like on the lower wiring. The pattern formation of the auxiliary wiring 103 can be generally performed by photolithography or the like, but it can also be formed by using a metal ink by various printing methods such as screen printing.

其次,形成堤104。堤104,係把具有正型感光性的聚醯亞胺膜旋轉塗布為1.5μm厚之後,把輔助配線作為光罩使用,由基板的背面曝光,進而藉由進行顯影, 於輔助配線上,形成與那些平面圖案的形狀約略一致的堤104。堤104的厚度由印刷時的溶液的厚度來決定,可以在數百nm到數μm為止進行調整。堤104的形狀如圖1所示,以包圍發光區域的方式形成。此外,堤104係以供在發光區域形成剩餘的有機層601之用的溶液不會再發光區域多餘地殘留的方式,以開放至少1邊的一部份或者全部的方式形成。又,如圖1所示,於堤104將開口部設於2處所亦可,如圖5那樣於堤104僅設置1處開口部亦可。此外,開口部藉由設在接近於端子105及吸液墊106之側,可以使多餘的溶液往吸液墊106所在的方向誘導而流動,有效率地吸收溶液(供形成有機層之用的溶液)。結果,可以減低產生於有機電致發光元件的亮度不均或者發光不均。 Next, the bank 104 is formed. In the bank 104, a polyimide film having a positive photosensitive property is spin-coated to a thickness of 1.5 μm, and the auxiliary wiring is used as a mask, and the back surface of the substrate is exposed, and further development is performed. On the auxiliary wiring, banks 110 which are approximately identical in shape to those of the planar pattern are formed. The thickness of the bank 104 is determined by the thickness of the solution at the time of printing, and can be adjusted from several hundred nm to several μm. The shape of the bank 104 is formed as shown in FIG. 1 so as to surround the light-emitting region. Further, the bank 104 is formed such that a solution for forming the remaining organic layer 601 in the light-emitting region does not excessively remain in the light-emitting region, and is opened at least one or all of the sides. Moreover, as shown in FIG. 1, the opening of the bank 104 may be provided in two places, and as shown in FIG. 5, only one opening part may be provided in the bank 104. Further, by providing the opening portion on the side close to the terminal 105 and the liquid-absorbent pad 106, the excess solution can be induced to flow in the direction in which the liquid-absorbent pad 106 is located, and the solution can be efficiently absorbed (for the formation of the organic layer). Solution). As a result, unevenness in luminance or unevenness in light emission which is generated in the organic electroluminescence element can be reduced.

於端子105的上部被形成撥液層108。作為撥液層108的材料,滴下形成作為含氟化合物為人所熟知的Optool。除此以外,還適合使用氫硫基(thiol)(具有巰基(-SH)的有機化合物(R~SH;R為烷基等烴基)的總稱)。氫硫基(thiol)化合物吸附於金屬上而形成自己組織化單分子膜。於氫硫基(thiol)包含氟原子的話,藉由氟的物性使氫硫基膜的下部電極102,以及輔助配線103的表面呈現撥液性。在本步驟,把這樣的含氟之硫化合物以0.1~1mM的濃度溶解於酒精,使滴下於作為端子利用的部分。藉由此步驟,於下部電極的表面,前述氫硫基之單分子膜被選擇性地形成,此金屬薄膜表面呈現撥液 性。 A liquid-repellent layer 108 is formed on the upper portion of the terminal 105. As a material of the liquid-repellent layer 108, Optool which is well known as a fluorine-containing compound is formed by dropping. In addition to this, it is also suitable to use a thiol (general name of an organic compound having a mercapto group (-SH) (R to SH; R is a hydrocarbon group such as an alkyl group). The thiol compound is adsorbed on the metal to form a self-organized monomolecular film. When the thiol contains a fluorine atom, the surface of the lower electrode 102 of the hydrogen sulfide-based film and the auxiliary wiring 103 exhibit liquid repellency by the physical properties of fluorine. In this step, such a fluorine-containing sulfur compound is dissolved in alcohol at a concentration of 0.1 to 1 mM, and is dropped to a portion used as a terminal. By this step, on the surface of the lower electrode, the monothiol film of the above-mentioned hydrogenthio group is selectively formed, and the surface of the metal film exhibits liquid dispensing Sex.

如圖1、圖2、圖4所示,在有機電子設備用基板100上,形成將於稍後形成的吸收有機層601的多餘的印刷溶液的吸液墊106。吸液墊106,因為要在有機層601形成時吸收以撥液層108彈往端子105的外側的溶液(供形成有機層之溶液),以設置在接近於端子105的位置為較佳。 As shown in FIG. 1, FIG. 2, and FIG. 4, on the substrate 100 for an organic electronic device, a liquid-absorbent pad 106 of an excess printing solution which will be formed later to absorb the organic layer 601 is formed. The liquid absorbing pad 106 is preferably provided at a position close to the terminal 105 because the solution for displacing the liquid-repellent layer 108 toward the outside of the terminal 105 (the solution for forming the organic layer) is absorbed when the organic layer 601 is formed.

於本發明,在有機電子設備用基板100設置複數有機層601及端子105。對於1個有機層601對應設置1個以上之端子部105。吸液墊106,位於對應於第1有機層601的第1端子部105,與對應於相鄰此第1有機層601之第2有機層601的第2端子部105之間。 In the present invention, a plurality of organic layers 601 and terminals 105 are provided on the substrate 100 for an organic electronic device. One or more terminal portions 105 are provided corresponding to one organic layer 601. The liquid absorbing pad 106 is located between the first terminal portion 105 corresponding to the first organic layer 601 and the second terminal portion 105 corresponding to the second organic layer 601 adjacent to the first organic layer 601.

成為以1個有機層601,以及對應於該有機層601而設置的端子105來構成1個有機電子設備的單位區域。吸液墊106位於單位區域的外側。由有機電子設備用基板100製造1個有機電子設備時,為了於各個單位區域進行切離,吸液墊106是最終要捨棄的構成。 A unit area of one organic electronic device is formed by one organic layer 601 and a terminal 105 provided corresponding to the organic layer 601. The soaker pad 106 is located outside the unit area. When one organic electronic device is manufactured from the substrate 100 for an organic electronic device, the liquid-absorbent pad 106 is finally disposed of in order to perform separation in each unit region.

吸液墊106,係把接枝聚合(graft polymerization)系的澱粉系吸水性樹脂、羧甲基化系之澱粉系吸水性樹脂等澱粉系吸水性樹脂、接枝聚合系的纖維素系吸水性樹脂、羧甲基化系的纖維素系吸水性樹脂等纖維素系吸水性樹脂,聚丙烯酸酯系樹脂、聚乙烯醇系樹脂、聚丙烯醯胺(polyacrylamide)系樹脂、聚氧乙烯(polyoxyethylene)系等吸水性合成樹脂等化學架橋型吸 水性樹脂、接枝聚合系的澱粉系吸水性樹脂、羧甲基化系的澱粉系吸水性樹脂等澱粉系吸水性樹脂、接枝聚合系纖維素系吸水性樹脂、羧甲基化系的纖維素系吸水性樹脂等纖維素系吸水性樹脂;聚丙烯酸酯系樹脂、聚乙烯醇系樹脂、聚丙烯醯胺(polyacrylamide)系樹脂、聚氧乙烯(polyoxyethylene)系等吸水性合成樹脂等化學架橋型吸水性樹脂等,在母體基板101上,以網版印刷來成膜使用。但是吸液墊106的形成法不限於印刷法,使用凹版印刷等其他成膜法亦可。 The liquid-absorbent pad 106 is a starch-based water-absorbent resin such as a graft polymerization type starch-based water-absorbent resin or a carboxymethylated starch-based water-absorbent resin, or a graft-polymerized cellulose-based water-absorbing property. A cellulose-based water-absorbent resin such as a resin or a carboxymethylated cellulose-based water-absorbent resin, a polyacrylate-based resin, a polyvinyl alcohol-based resin, a polyacrylamide-based resin, or a polyoxyethylene. Chemical bridging type absorption such as water-absorbent synthetic resin Starch-based water-absorbent resin such as water-based resin, graft-polymerized starch-based water-absorbent resin, carboxymethylated starch-based water-absorbent resin, graft-polymerized cellulose-based water-absorbent resin, and carboxymethylated fiber A cellulose-based water-absorbent resin such as a water-absorbent resin; a chemical bridge such as a polyacrylate-based resin, a polyvinyl alcohol-based resin, a polyacrylamide-based resin, or a polyoxyethylene-based water-absorbent synthetic resin. A water-absorbent resin or the like is formed on the mother substrate 101 by screen printing. However, the method of forming the liquid-absorbent pad 106 is not limited to the printing method, and other film forming methods such as gravure printing may be used.

如以上所述地進行,完成有機電子設備用基板100。有機電子設備用基板100也可以形成為叢集用,如圖4所示做成卷狀,可以使其成為使用卷對卷裝置的印刷電子學(printed electronics)用基板100。 The substrate 100 for an organic electronic device is completed as described above. The substrate 100 for an organic electronic device may be formed into a cluster, and may be formed into a roll shape as shown in FIG. 4, and may be used as a printed electronic substrate 100 using a roll-to-roll apparatus.

〔實施例2〕 [Example 2]

於實施例2,說明形成於實施例1所記載的有機電子設備基板100之有機電致發光元件之製作方法。 In the second embodiment, a method of fabricating the organic electroluminescence device formed in the organic electronic device substrate 100 described in the first embodiment will be described.

於具有母體基板101,與設於母體基板101上的端子部105之有機電子設備用基板100上,塗布供形成有機層601之用的溶液。溶液被塗布後,於母體基板101的特定位置形成有機層601。另一方面,溶液被塗布於端子105的上部,但於端子105的上部有撥液層108,所以溶液的一部份被彈到端子部105的外側。使被彈開的溶液的一部份藉由設在端子部105周圍的吸液墊106吸收。其 後,由有機電子設備用基板100於各個單位區域切離1個個的有機電子設備。此時,吸液墊106變成不需要的部分而被廢棄。藉由以上的步驟,製造有機電子設備。 A solution for forming the organic layer 601 is applied onto the substrate 100 for an organic electronic device having the mother substrate 101 and the terminal portion 105 provided on the mother substrate 101. After the solution is applied, the organic layer 601 is formed at a specific position of the mother substrate 101. On the other hand, the solution is applied to the upper portion of the terminal 105, but the liquid-repellent layer 108 is provided on the upper portion of the terminal 105, so that a part of the solution is bounced to the outside of the terminal portion 105. A portion of the solution that is bounced is absorbed by the liquid absorbing pad 106 provided around the terminal portion 105. its Thereafter, the organic electronic device substrate 100 is separated from one individual organic electronic device in each unit area. At this time, the liquid suction pad 106 becomes an unnecessary portion and is discarded. Through the above steps, an organic electronic device is manufactured.

圖6係相關於本發明的一實施例之有機發光元件的剖面圖。有機發光元件,具有有機電子設備用基板100、有機層601、上部電極602。 Fig. 6 is a cross-sectional view showing an organic light emitting element according to an embodiment of the present invention. The organic light-emitting element includes a substrate 100 for an organic electronic device, an organic layer 601, and an upper electrode 602.

於有機層601,包含正孔輸送層604、電子阻止層605、發光層(藍色發光層606、綠色發光層607、紅色發光層608)、正孔阻止層609、電子輸送層610及緩衝層611等。構成有機層601的各層亦可相接,亦可使中介著其他層,亦可使其混合,或者省略一部分之層亦可。藉由在下部電極102或上部電極602之中的某一方電極具有反射機能,使其成為有機發光元件的光取出為單面方向的構造亦可。此外,藉由使上部電極602、下部電極102都是透明的材料,使其成為有機發光元件的光取出為雙面方向的構造亦可。有機發光裝置,例如被期待作為薄型照明裝置、液晶顯示裝置之背光。藉由對下部電極102與上部電極602之間施加電壓,由下部電極102及上部電極602注入的正孔與電子在發光層再結合而發光。 The organic layer 601 includes a positive hole transport layer 604, an electron blocking layer 605, a light emitting layer (blue light emitting layer 606, a green light emitting layer 607, a red light emitting layer 608), a hole preventing layer 609, an electron transporting layer 610, and a buffer layer. 611 and so on. The layers constituting the organic layer 601 may be in contact with each other, or may be interposed with other layers, or may be mixed, or a part of the layers may be omitted. One of the lower electrode 102 or the upper electrode 602 may have a reflection function, and the light of the organic light-emitting element may be taken out in a single-sided direction. In addition, the upper electrode 602 and the lower electrode 102 may be made of a transparent material, and the light of the organic light-emitting element may be taken out in a double-sided direction. The organic light-emitting device is expected to be, for example, a backlight of a thin illumination device or a liquid crystal display device. By applying a voltage between the lower electrode 102 and the upper electrode 602, the positive holes injected from the lower electrode 102 and the upper electrode 602 are recombined with electrons in the light-emitting layer to emit light.

有機層601主要把材料溶解於甲苯等溶媒,使用模具塗布機進行印刷形成,但也可以使用微凹版印刷,或是以真空蒸鍍法形成,組合這些方法而形成亦可。使用於各層的材料具體說明如下。 The organic layer 601 is mainly formed by dissolving a material in a solvent such as toluene and printing using a die coater. However, it may be formed by microgravure printing or vacuum deposition, or may be formed by combining these methods. The materials used for the respective layers are specifically described below.

<正孔輸送層> <Positive hole transport layer>

正孔輸送層604係輸送正孔,往發光層注入者。因此,正孔輸送層604由正孔移動度高的正孔輸送性材料來構成為佳。此外,做為正孔輸送層604,最好是化學上安定,離子化位能很小,電子親和力小,而玻璃移轉溫度高。做為正孔輸送層604,例如,以N,N’-bis(3-methyl phenyl)-N,N’-diphenyl-[1,1’-biphenyl]-4,4’diamine(TPD)、4,4’-bis[N-(1-naphthyl)-N-phenyl amino]biphenyl(α-NPD)、4,4’,4”-tri(N-carbazolyl)triphenyl amine(TCTA)、1,3,5-tris[N-(4-diphenyl amino phenyl)phenyl amino]benzene(p-DPA-TDAB)、4,4’,4”-tris(N-carbazole)triphenylamine(TCTA)、1,3,5-tris[N,N-bis(2-methyle phenyl)-amino]-benzene(o-MTDAB)、1,3,5-tris[N,N-bis(3-methyl phenyl)-amino]-benzene(m-MTDAB)、1,3,5-tris[N,N-bis(4-methyl phenyl)-amino]-benzene(p-MTDAB)、4,4’,4”-tris[1-naphthyl(phenyl)amino]triphenyl amine(1-TNATA)、4,4’,4”-tris[2-naphthyl(phenyl)amino]triphenyl amine(2-TNATA)、4,4’,4”-tris[biphenyl-4-yl-(3-methyl phenyl)amino]triphenyl amine(p-PMTDATA)、4,4’,4”-tris[9,9-dimethyl fluoren-2-yl(phenyl)amino]triphenyl amine(TFATA)、4,4’,4”-tris(N-carbazolyl)triphenyl amine(TCTA)、1,3,5-tris-[N-(4-diphenyl amino phenyl)phenyl amino]benzene(p-DPA-TDAB)、1,3,5-tris{4-[methyl phenyl(phenyl)amino]phenyl} benzene(MTDAPB)、N,N’-di(biphenyl-4-yl)-N,N’-diphenyl[1,1’-biphenyl]-4,4’-diamine(p-BPD)、N,N’-bis(9,9-dimethyl fluoren-2-yl)-N,N’-diphenyl fluoren-2,7-diamine(PFFA)、N,N,N’,N’-tetrakis(9,9-dimethyl fluoren-2-yl)-[1,1-biphenyl]-4,4’-diamine(FFD)、(NDA)PP、4-4’-bis[N,N’-(3-tolyl)amino]-3-3’-dimethyl biphenyl(HMTPD)等為佳,可以單獨使用1種,或者併用2種以上亦可。 The positive hole transport layer 604 is a positive hole that is injected into the luminescent layer. Therefore, the positive hole transport layer 604 is preferably constituted by a positive hole transporting material having a high positive hole mobility. Further, as the positive hole transport layer 604, it is preferable to be chemically stable, the ionization potential energy is small, the electron affinity is small, and the glass transition temperature is high. As the positive hole transport layer 604, for example, N, N'-bis(3-methyl phenyl)-N, N'-diphenyl-[1,1'-biphenyl]-4,4'diamine (TPD), 4 , 4'-bis[N-(1-naphthyl)-N-phenyl amino]biphenyl(α-NPD), 4,4',4"-tri(N-carbazolyl)triphenyl amine(TCTA), 1,3, 5-tris[N-(4-diphenyl amino phenyl)phenyl amino]benzene(p-DPA-TDAB), 4,4',4"-tris(N-carbazole)triphenylamine(TCTA), 1,3,5- Tris[N,N-bis(2-methyle phenyl)-amino]-benzene(o-MTDAB), 1,3,5-tris[N,N-bis(3-methyl phenyl)-amino]-benzene(m -MTDAB), 1,3,5-tris[N,N-bis(4-methyl phenyl)-amino]-benzene(p-MTDAB), 4,4',4"-tris[1-naphthyl(phenyl) Amino]triphenyl amine(1-TNATA), 4,4',4"-tris[2-naphthyl(phenyl)amino]triphenyl amine(2-TNATA), 4,4',4"-tris[biphenyl-4- Y-(3-methyl phenyl)amino]triphenyl amine(p-PMTDATA), 4,4',4"-tris[9,9-dimethyl fluoren-2-yl(phenyl)amino]triphenyl amine(TFATA), 4 , 4', 4"-tris (N-carbazolyl) triphenyl amine (TCTA), 1,3,5-tris-[N-(4-diphenyl amino phenyl)phenyl amino]benzene (p-DPA-TDAB), 1 ,3,5-tris{4-[methyl phen Yl(phenyl)amino]phenyl} Benzene (MTDAPB), N, N'-di(biphenyl-4-yl)-N, N'-diphenyl[1,1'-biphenyl]-4,4'-diamine(p-BPD), N,N' -bis(9,9-dimethyl fluoren-2-yl)-N,N'-diphenyl fluoren-2,7-diamine(PFFA), N,N,N',N'-tetrakis(9,9-dimethyl fluoren -2-yl)-[1,1-biphenyl]-4,4'-diamine (FFD), (NDA)PP, 4-4'-bis[N,N'-(3-tolyl)amino]-3 -3'-dimethyl biphenyl (HMTPD) or the like is preferable, and one type may be used alone or two or more types may be used in combination.

因應需要,在下部電極102與正孔輸送層604之間配置正孔注入層亦可。為了降低下部電極102與正孔輸送層604之注入障壁,正孔注入層以藉由具有接近於下部電極102的工作函數的離子化電位的材料來形成為佳。此外,正孔注入層以能夠發揮掩埋下底層表面的凹凸的責任為佳。做為正孔注入層,例如可以舉出copper phthalocyanine、星形(starburst)胺化合物、聚苯胺、聚噻吩、氧化釩、氧化鉬、氧化釕、氧化鋁等。此外,形成電荷2重層的八癸基三氯矽烷、七氟異丙氧基丙基甲基二氯矽烷、三氟丙基甲基二氯矽烷、六甲基二矽氮烷、乙烯基三乙氧基矽烷、γ-甲基丙烯醯氧基丙基三甲氧基矽烷、γ-胺基丙基三乙氧基矽烷、N-苯基-γ-胺基丙基三甲氧基矽烷、γ-巰基丙基三甲氧基矽烷、Heptadecafluoro-1,1,2,2-tetra-hydrodecyl-1-trimethoxysilane、Octadecyl trietoxysilane、癸基三氯矽烷、癸基三乙氧基矽烷、苯基三氯矽烷那樣的矽烷系化合物,或者是1-膦酸辛烷、1-膦 酸己烷、1-膦酸十六烷、1-膦酸-3,7,11,15-四甲基十六烷、1-膦酸-2-乙基己烷、1-膦酸-2,4,4-三甲基戊烷、1-膦酸-3,5,5-三甲基己烷那樣的膦酸(phosphonic acid)系化合物等自己組織化單分子膜亦可。 A positive hole injection layer may be disposed between the lower electrode 102 and the positive hole transport layer 604 as needed. In order to reduce the injection barrier of the lower electrode 102 and the positive hole transport layer 604, the positive hole injection layer is preferably formed by a material having an ionization potential close to the work function of the lower electrode 102. Further, the positive hole injection layer is preferably responsible for burying the unevenness of the underlying surface. As the positive hole injection layer, for example, copper phthalocyanine, starburst amine compound, polyaniline, polythiophene, vanadium oxide, molybdenum oxide, cerium oxide, aluminum oxide, or the like can be given. In addition, an octadecyltrichlorodecane, heptafluoroisopropoxypropylmethyldichlorodecane, trifluoropropylmethyldichlorodecane, hexamethyldioxane, vinyl triethyl, which forms a double layer of charge 2, is formed. Oxydecane, γ-methylpropenyloxypropyltrimethoxydecane, γ-aminopropyltriethoxydecane, N-phenyl-γ-aminopropyltrimethoxydecane, γ-mercapto a decane such as propyltrimethoxydecane, Heptadecafluoro-1,1,2,2-tetra-hydrodecyl-1-trimethoxysilane, Octadecyl trietoxysilane, decyltrichlorodecane, decyltriethoxydecane, or phenyltrichloromethane Compound, or 1-phosphonic acid octane, 1-phosphine Acid hexane, 1-hexadecane hexadecane, 1-phosphonic acid-3,7,11,15-tetramethylhexadecane, 1-phosphonic acid-2-ethylhexane, 1-phosphonic acid-2 A monomolecular film may be self-organized such as a phosphonic acid compound such as 4,4-trimethylpentane or 1-phosphonic acid-3,5,5-trimethylhexane.

<電子阻止層> <Electronic blocking layer>

電子阻止層605,負有把傳搬於發光層的電子封入發光層內的任務。因此,與構成發光層的有機材料相比,以電子親和力小為較佳。此外,負有輸送由正孔輸送層604注入的正孔,往發光層注入的任務。由以上所述,電子阻止層605由正孔移動度高,電子親和力小的正孔輸送性材料來構成為佳。例如,可以舉出di-[4-(N,N-diethyl-amino)-phenyl]cyclohexane(TAPC)、2,2’,7,7’-tetrakis(N,N-diphenylamino)-9,9-spirobifluorene(sp-TAD)、Tris(phenyl pyrazole)iridium(III)(Ir(ppz)3)等,可以單獨使用其中1種,亦可併用2種以上。 The electron blocking layer 605 has a task of encapsulating electrons transferred to the light-emitting layer into the light-emitting layer. Therefore, it is preferable that the electron affinity is small as compared with the organic material constituting the light-emitting layer. In addition, there is a task of transporting the positive holes injected by the positive hole transport layer 604 to the luminescent layer. As described above, the electron blocking layer 605 is preferably formed of a positive hole transporting material having a high positive hole mobility and a small electron affinity. For example, di-[4-(N,N-diethyl-amino)-phenyl]cyclohexane (TAPC), 2,2',7,7'-tetrakis(N,N-diphenylamino)-9,9- One of them may be used alone or two or more kinds may be used in combination, such as spirobifluorene (sp-TAD) or Tris (phenyl pyrazole) iridium (III) (Ir (ppz) 3).

<發光層> <Light Emitting Layer>

藍色發光層606,綠色發光層607,紅色發光層608,有形成發光層的主體材料自體發光的場合,以及由微量添加於主體的摻雜物材料進行發光的場合。把發光頻譜的中心波長在430~490nm的範圍者定義為發藍色光,在500~550nm之範圍者定義為發綠色光,在580~650nm之範圍者定義為發紅色光。 The blue light-emitting layer 606, the green light-emitting layer 607, and the red light-emitting layer 608 are used when the host material forming the light-emitting layer emits light by itself, and when a dopant material added to the main body is light-emitting. The center wavelength of the luminescence spectrum is defined as blue light in the range of 430 to 490 nm, green light is defined in the range of 500 to 550 nm, and red light is defined in the range of 580 to 650 nm.

作為主體材料,例如可以舉出聯苯乙烯(distyrylarylene)誘導體(DPVBi),於骨架具有苯環的Silole誘導體(2PSP),於兩端具有三苯胺構造的氧二唑誘導體(EM2),具有菲(phenanthrene)基的迫位酮(perinone)誘導體(P1),於兩端具有三苯胺構造的低聚噻吩誘導體(BMA-3T),苝(perylene)誘導體(tBu-PTC),tris(8-quinolinol)aluminium,polyparaphenylene vinylene(PPV)誘導體,聚噻吩(thiophene)誘導體,poly(p-phenylene),誘導體,聚矽烷誘導體,聚乙炔誘導體,咔唑誘導體,芴(fluorene)誘導體或者芳基矽烷誘導體等,可以單獨使用其中1種,亦可併用2種以上。 Examples of the host material include a distyrylarylene inducer (DPVBi), a Silole inducer (2PSP) having a benzene ring in the skeleton, and an oxydiazole inducer (EM2) having a triphenylamine structure at both ends. a perinone inducer (P1) having a phenanthrene group, an oligothiophene inducer (BMA-3T) having a triphenylamine structure at both ends, and a perylene inducer (tBu-PTC), Tris(8-quinolinol)aluminium, polyparaphenylene vinylene (PPV) inducer, thiophene inducer, poly(p-phenylene), inducer, polydecane inducer, polyacetylene inducer, carbazole inducer, 芴The fluorene-inducing body or the aryl decane-inducing body may be used alone or in combination of two or more.

作為發光層包含的摻雜物材料,例如可以舉出喹吖酮(quinacridone)、香豆素(coumarin)6,尼羅紅(Nile red),紅螢烯(rubrene),4-(dicyanomethylene)-2-methyl-6-(p-dimethylamino styryl)-4H-pyran(DCM),二咔唑誘導體,卟啉(porphyrin)白金錯合物(PtOEP),銥錯合物(Ir(ppy)3)等,可以單獨使用其中1種,亦可併用2種以上。 Examples of the dopant material contained in the light-emitting layer include quinacridone, coumarin 6, Nile red, rubrene, and 4-(dicyanomethylene)- 2-methyl-6-(p-dimethylamino styryl)-4H-pyran (DCM), dioxazole inducer, porphyrin platinum complex (PtOEP), ruthenium complex (Ir(ppy) 3 ) Alternatively, one type may be used alone or two or more types may be used in combination.

此外,發光層之藍色發光層606、綠色發光層607,亦可配置於同一層,亦可配置於2層。藍色發光層606,綠色發光層607,紅色發光層608亦可替換分別的配置。 Further, the blue light-emitting layer 606 and the green light-emitting layer 607 of the light-emitting layer may be disposed in the same layer or in two layers. The blue light-emitting layer 606, the green light-emitting layer 607, and the red light-emitting layer 608 may also be replaced by separate configurations.

<正孔阻止層> <Positive hole blocking layer>

正孔阻止層609,負有把傳搬於發光層的正孔封入發光層內的任務。因此,與構成發光層的有機材料相比,以離子化電位大為較佳。此外,負有輸送由後述的電子輸送層610注入的電子,往發光層注入的任務。由以上可知,正孔阻止層609以電子移動度高,離子化電位大的電子輸送性材料所構成為佳。例如,可以舉出Bathocuproine(BCP),雙(2-甲基-8-羥基喹啉)-4-(苯基苯酚)鋁(BAlq),Tris(2,4,6-trimethyl-3-(pyridin-3-yl)phenyl)borane(3TPYMB)等,可以單獨使用其中1種,亦可併用2種以上。 The positive hole preventing layer 609 has a task of enclosing the positive hole transferred to the light emitting layer into the light emitting layer. Therefore, the ionization potential is preferably larger than that of the organic material constituting the light-emitting layer. Further, there is a task of transporting electrons injected from the electron transport layer 610 to be described later into the light-emitting layer. As described above, the positive hole preventing layer 609 is preferably composed of an electron transporting material having a high electron mobility and a large ionization potential. For example, Bathocuproine (BCP), bis(2-methyl-8-hydroxyquinoline)-4-(phenylphenol)aluminum (BAlq), Tris (2,4,6-trimethyl-3-(pyridin) -3-yl)phenyl)borane (3TPYMB), etc., may be used alone or in combination of two or more.

<電子輸送層> <Electronic transport layer>

電子輸送層610係輸送電子,往發光層注入者。因此,電子輸送層610由電子移動度高的電子輸送性材料來構成為佳。作為電子輸送層610,例如可以舉出tris(8-quinolinol)aluminium,噁二唑(oxadiazole)誘導體,Silole誘導體,苯幷噻唑(benzothiazole)鋅錯合物或者用於前述正孔阻止層的有機材料為佳,可以單獨使用其中1種,亦可併用2種以上。 The electron transport layer 610 transports electrons to the luminescent layer. Therefore, the electron transport layer 610 is preferably composed of an electron transporting material having high electron mobility. The electron transport layer 610 may, for example, be a tris (8-quinolinol) aluminum, an oxadiazole inducer, a Silole inducer, a benzothiazole zinc complex or a pore-preventing layer. The organic material is preferably used alone or in combination of two or more.

電子輸送層610,最好是在前述電子輸送性材料含有還原劑,使緩衝層611與電子輸送層610之障壁降低,或者是提高電子輸送層610的電氣傳導度為較佳。作 為還原劑,可以舉出例如鹼金屬,鹼土類金屬,鹼金屬氧化物,鹼土類氧化物,稀土類氧化物,鹼金屬鹵化物,鹼土類鹵化物,稀土類鹵化物,以鹼金屬,芳香族化合物等所形成的錯合物。特別是較佳的鹼金屬為Cs,Li,Na,K。但不限於這些材料,可以單獨使用1種這些材料,或者併用2種以上亦可。 Preferably, the electron transporting layer 610 preferably contains a reducing agent in the electron transporting material to lower the barrier layer of the buffer layer 611 and the electron transporting layer 610, or to improve the electrical conductivity of the electron transporting layer 610. Make Examples of the reducing agent include alkali metals, alkaline earth metals, alkali metal oxides, alkaline earth oxides, rare earth oxides, alkali metal halides, alkaline earth halides, rare earth halides, alkali metals, and aromatics. A complex formed by a compound or the like. Particularly preferred alkali metals are Cs, Li, Na, K. However, it is not limited to these materials, and one type of these materials may be used alone or two or more types may be used in combination.

此外,把電子注入層插入上部電極602或緩衝層611與電子輸送層610之間,提高電子注入效率亦可。作為電子注入層,較佳為使用例如氟化鋰、氟化鎂、氟化鈣、氟化鍶、氟化鋇、氧化鎂、氧化鋁等。但不限於這些材料,可以單獨使用1種這些材料,或者併用2種以上亦可。 Further, the electron injecting layer is inserted between the upper electrode 602 or the buffer layer 611 and the electron transporting layer 610 to improve electron injection efficiency. As the electron injecting layer, for example, lithium fluoride, magnesium fluoride, calcium fluoride, barium fluoride, barium fluoride, magnesium oxide, aluminum oxide or the like is preferably used. However, it is not limited to these materials, and one type of these materials may be used alone or two or more types may be used in combination.

<緩衝層> <buffer layer>

緩衝層611,在形成透明電極時,為了不使成為下底層的有機膜產生損傷,而被形成於成為下底層的有機膜與透明電極之間的層。緩衝層611以無機系的材料來形成。作為圖1所示的頂陰極構造之緩衝層611的材料,以鎂、銀等金屬材料為較佳。此外,這些材料可以單獨使用1種,或者是使其成為併用2種以上的合金狀態。此外,把上部電極602作為陽極使用的頂陽極構造的緩衝層611的材料,可以舉出氧化釩、氧化鉬、氧化鎢等。 The buffer layer 611 is formed in a layer between the organic film serving as the lower underlayer and the transparent electrode in order to prevent damage to the organic film which becomes the lower underlayer when the transparent electrode is formed. The buffer layer 611 is formed of an inorganic material. As a material of the buffer layer 611 of the top cathode structure shown in Fig. 1, a metal material such as magnesium or silver is preferable. Further, these materials may be used singly or in combination of two or more alloys. Further, examples of the material of the buffer layer 611 of the top anode structure in which the upper electrode 602 is used as an anode include vanadium oxide, molybdenum oxide, tungsten oxide, and the like.

<反射電極> <reflective electrode>

作為反射電極,可以舉出Al,Au,Ag,Cu,銦、鉬、鎳膜等金屬,這些的合金,多晶矽、非晶質矽等無機材料,石墨烯等。此外,還可以舉出在前述金屬或合金之上,形成錫氧化物、氧化銦、銦錫氧化物(ITO)、銦鋅氧化物(IZO)等透明導電膜之層積膜。 Examples of the reflective electrode include metals such as Al, Au, Ag, Cu, indium, molybdenum, and nickel films, alloys thereof, inorganic materials such as polycrystalline germanium and amorphous germanium, and graphene. Further, a laminated film of a transparent conductive film such as tin oxide, indium oxide, indium tin oxide (ITO) or indium zinc oxide (IZO) may be formed on the above metal or alloy.

101‧‧‧母體基板 101‧‧‧ mother substrate

104‧‧‧堤 104‧‧‧

106‧‧‧吸液墊 106‧‧‧Sucking pad

108‧‧‧撥液層 108‧‧ ‧ liquid layer

602‧‧‧上部電極 602‧‧‧ upper electrode

Claims (9)

一種有機電子設備用基板,係具有母體基板,與設於前述母體基板之上的有機層及端子部;其特徵為:於前述端子部的上部具有撥液部,於前述端子部的周圍具有吸液部。 A substrate for an organic electronic device, comprising: a mother substrate; and an organic layer and a terminal portion provided on the mother substrate; wherein the terminal portion has a liquid-repellent portion at an upper portion thereof, and has a suction around the terminal portion Liquid department. 如申請專利範圍第1項之有機電子設備用基板,其中具有複數前述有機層及前述端子部,前述端子部係對應於各前述有機層而設置,前述吸液部,位於對應於第1有機層的第1端子部,以及對應於與前述第1有機層相鄰的第2有機層的第2端子部之間。 The substrate for an organic electronic device according to claim 1, comprising a plurality of the organic layer and the terminal portion, wherein the terminal portion is provided corresponding to each of the organic layers, and the liquid absorbing portion is located corresponding to the first organic layer The first terminal portion and the second terminal portion corresponding to the second organic layer adjacent to the first organic layer. 如申請專利範圍第2項之有機電子設備用基板,其中具有以前述有機層,以及對應於前述有機層而設置的端子構成1個有機電子設備的單位區域,前述吸液部位於前述單位區域的外側。 The substrate for an organic electronic device according to claim 2, wherein the organic layer and the terminal provided corresponding to the organic layer constitute a unit region of one organic electronic device, and the liquid absorbing portion is located in the unit region. Outside. 如申請專利範圍第1項之有機電子設備用基板,其中於前述母體基板上,具有包圍前述有機層,而且開放一部分而形成的堤。 The substrate for an organic electronic device according to claim 1, wherein the mother substrate has a bank formed by surrounding the organic layer and opening a part thereof. 如申請專利範圍第4項之有機電子設備用基板,其中前述堤,被形成為開放接近於前述吸液部之側。 The substrate for an organic electronic device according to claim 4, wherein the bank is formed to be open to the side close to the liquid-absorbent portion. 如申請專利範圍第1項之有機電子設備用基板,其中前述撥吸液具有硫化合物或氟化合物。 The substrate for an organic electronic device according to the first aspect of the invention, wherein the absorbing liquid has a sulfur compound or a fluorine compound. 如申請專利範圍第1項之有機電子設備用基板,其中係供製造有機電致發光元件或者有機太陽電池之用的基板。 The substrate for an organic electronic device according to claim 1, wherein the substrate for producing an organic electroluminescence device or an organic solar cell is used. 一種有機電子設備之製造方法,其特徵為具有:供在具有母體基板,與設於前述母體基板上的端子部之有機電子設備用基板上,塗布供形成有機層之用的溶液之塗布步驟,使被塗布於前述端子部的溶液的一部分,藉由在前述端子部的上部具有的撥液部彈往前述端子部的外側之撥液步驟,以及使藉由前述撥液步驟彈跳之溶液的一部分藉由設在前述端子部的周圍的吸液部吸收的吸液步驟。 A method of producing an organic electronic device, comprising: a coating step of applying a solution for forming an organic layer on a substrate for an organic electronic device having a mother substrate and a terminal portion provided on the mother substrate; a part of the solution applied to the terminal portion, a liquid-repellent step of the liquid-repellent portion provided on the upper portion of the terminal portion to the outside of the terminal portion, and a portion of the solution bounced by the liquid-repellent step The liquid absorbing step is absorbed by the liquid absorbing portion provided around the terminal portion. 如申請專利範圍第8項之有機電子設備之製造方法,其中前述有機電子設備用基板,係供製造有機電致發光元件或者有機太陽電池之用的基板。 The method for producing an organic electronic device according to the eighth aspect of the invention, wherein the substrate for an organic electronic device is a substrate for manufacturing an organic electroluminescence device or an organic solar cell.
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