TW201506030A - Producing method of organometallic compound - Google Patents

Producing method of organometallic compound Download PDF

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TW201506030A
TW201506030A TW102128864A TW102128864A TW201506030A TW 201506030 A TW201506030 A TW 201506030A TW 102128864 A TW102128864 A TW 102128864A TW 102128864 A TW102128864 A TW 102128864A TW 201506030 A TW201506030 A TW 201506030A
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organometallic compound
metal
reaction
compound
group iii
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TW102128864A
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TWI499593B (en
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Wen-Che Kuo
Kuo-Chou Yeh
Shun-Fa Chuang
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Pentapro Chemical Inc
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Abstract

A producing method of an organometallic compound is provided. A reactant is firstly provided and the reactant is performed a synthesis reaction in an inert gas. The reactant is consisting of an alkyl halide compound, magnesium and a III group metal. The alkyl halide compound is methyl iodide, methyl bromide, ethyl iodide or ethyl bromide. The III group metal is gallium, indium or aluminum. Trimethyl gallium, triethyl gallium, trimethyl indium, triethyl indium, trimethyl aluminum or triethyl aluminum is synthesized by controlling reaction temperature and reaction pressure.

Description

有機金屬化合物之製造方法 Method for producing organometallic compounds

本發明是有關於一種製造方法,且特別是有關於一種有機金屬化合物的製造方法。 The present invention relates to a method of manufacture, and more particularly to a method of making an organometallic compound.

有機金屬化學氣相沉積法(metal-organic chemical vapor deposition;MOCVD)常用以形成光電元件中之化合物半導體薄膜,其中化合物半導體薄膜又以銦鎵砷氮(InGaAsN)、銦鎵砷(InGaAs)及銦鎵磷(InGaP)等薄膜最為常見。 Metal-organic chemical vapor deposition (MOCVD) is commonly used to form compound semiconductor thin films in photovoltaic elements, which are indium gallium arsenide (InGaAsN), indium gallium arsenide (InGaAs), and indium. Films such as gallium phosphorus (InGaP) are the most common.

化合物半導體薄膜之原料係利用有機金屬化合物作為氣相沉積之原料。一般常見之有機金屬化合物(例如:三甲基鎵、三乙基鎵、三甲基銦或三乙基銦等)的製備方法則係先利用醚類溶劑、鎂金屬及鹵化烷基化合物製備成格林納試劑(grignard reagent)。然後,使用格林納試劑與上述原料之金屬(例如:鎵或鎂或鋁)來進行合成反應,或利用格林納試劑與鹵化金屬化合物(例如:三氯化鎵)來進行反應,以合成出對應之有機金屬化合物。 The raw material of the compound semiconductor film utilizes an organometallic compound as a raw material for vapor phase deposition. The preparation method of a common common organometallic compound (for example, trimethylgallium, triethylgallium, trimethylindium or triethylindium) is prepared by using an ether solvent, a magnesium metal, and a halogenated alkyl compound. Grignard reagent. Then, a Grenner reagent is used to carry out a synthesis reaction with a metal of the above-mentioned raw material (for example, gallium or magnesium or aluminum), or a reaction is carried out by using a Grignard reagent and a metal halide compound (for example, gallium trichloride) to synthesize a corresponding reaction. An organometallic compound.

然而,此方法需花費超過24小時以上的時間,且反應須添加醚類等溶劑,而增加有機金屬化合物之製造成本。再者,此方法之鹵化金屬化合物的成本較高,而增加有機金屬化合物之原料成本。 However, this method takes more than 24 hours, and the reaction requires the addition of a solvent such as an ether to increase the manufacturing cost of the organometallic compound. Moreover, the cost of the metal halide compound of this method is higher, and the raw material cost of the organometallic compound is increased.

有鑑於此,亟須提供一種有機金屬化合物之製造方法,以改進習知之有機金屬化合物之製造方法的缺陷。 In view of the above, it is not necessary to provide a method for producing an organometallic compound to improve the defects of the conventional method for producing an organometallic compound.

因此,本發明之一態樣是在提供一種有機金屬化合物之製造方法,其係利用鹵化烷基化合物、鎂金屬和III族金屬來合成有機金屬化合物。 Accordingly, an aspect of the present invention provides a method for producing an organometallic compound which utilizes a halogenated alkyl compound, a magnesium metal, and a Group III metal to synthesize an organometallic compound.

根據本發明之上述態樣,提出一種有機金屬化合物。在一實施例中,此方法係先提供反應物,並於惰性氣體存在下,進行合成反應。前述之反應物係由鹵化烷基化合物、鎂金屬及III族金屬所組成,其中鹵化烷基化合物係碘甲烷、溴甲烷、碘乙烷或溴乙烷,而III族金屬係鎵金屬、銦金屬或鋁金屬。基於上述之III族金屬的莫耳數為1莫耳,鹵化烷基化合物、鎂金屬及III族金屬之莫耳比係3:1.5:1至6:3:1。 According to the above aspect of the invention, an organometallic compound is proposed. In one embodiment, the process provides the reactants and the synthesis reaction is carried out in the presence of an inert gas. The foregoing reactants are composed of a halogenated alkyl compound, a magnesium metal and a group III metal, wherein the halogenated alkyl compound is methyl iodide, methyl bromide, ethyl iodide or ethyl bromide, and the group III metal is a gallium metal, an indium metal or Aluminum metal. The molar number of the group III metal based on the above is 1 mole, and the molar ratio of the halogenated alkyl compound, the magnesium metal and the group III metal is 3:1.5:1 to 6:3:1.

前述之合成反應之壓力為3大氣壓(atm)至10atm,溫度為90℃至180℃,且反應時間為6小時至10小時。反應結束後,分離出液相產物,以獲得有機金屬化合物。此有機金屬化合物係三甲基鎵、三乙基鎵、三甲基銦、三乙基銦、三甲基鋁或三乙基鋁,且此製造方法之產物的產率 係55%至65%。 The pressure of the aforementioned synthesis reaction is from 3 atm to 10 atm, the temperature is from 90 ° C to 180 ° C, and the reaction time is from 6 hours to 10 hours. After the reaction is completed, the liquid phase product is separated to obtain an organometallic compound. The organometallic compound is trimethylgallium, triethylgallium, trimethylindium, triethylindium, trimethylaluminum or triethylaluminum, and the yield of the product of the production method It is 55% to 65%.

依據本發明一實施例,前述之惰性氣體係氮氣、氦氣或氬氣。 According to an embodiment of the invention, the inert gas system described above is nitrogen, helium or argon.

應用本發明之有機金屬化合物之製造方法,其係藉由鹵化烷基化合物、鎂金屬及III族金屬來進行合成反應,而可快速獲得有機金屬化合物。 The method for producing an organometallic compound of the present invention is carried out by subjecting a halogenated alkyl compound, a magnesium metal and a Group III metal to a synthesis reaction, whereby an organometallic compound can be obtained quickly.

100‧‧‧方法 100‧‧‧ method

110‧‧‧提供反應物 110‧‧‧ Providing reactants

120‧‧‧進行合成反應 120‧‧‧Synthesis reaction

130‧‧‧純化有機金屬化合物 130‧‧‧ Purified organometallic compounds

第1圖係繪示依照本發明之一實施例之有機金屬化合物之製造方法的流程圖。 BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart showing a method of producing an organometallic compound according to an embodiment of the present invention.

以下仔細討論本發明實施例之製造和使用。然而,可以理解的是,實施例提供許多可應用的發明概念,其可實施於各式各樣的特定內容中。所討論之特定實施例僅供說明,並非用以限定本發明之範圍。 The making and using of the embodiments of the invention are discussed in detail below. However, it will be appreciated that the embodiments provide many applicable inventive concepts that can be implemented in a wide variety of specific content. The specific embodiments discussed are illustrative only and are not intended to limit the scope of the invention.

本發明下述所稱之「反應釜」係一可耐高壓且具備攪拌功能之反應容器,且具有一溫度控制系統及冷凝系統,藉以控制本發明之有機金屬化合物的製造方法之溫度,而可反應合成出有機金屬化合物。 The "reactor" as hereinafter referred to as a "reactor" is a reaction vessel which is resistant to high pressure and has a stirring function, and has a temperature control system and a condensation system for controlling the temperature of the method for producing the organometallic compound of the present invention. The reaction synthesizes an organometallic compound.

請參照第1圖,其係繪示依照本發明之一實施例的有機金屬化合物之製造方法的流程圖。在一實施例中,有機金屬化合物之製造方法100係先進行提供反應物之步驟110。反應物係由鹵化烷基化合物、鎂金屬及III族金屬所 組成,其中鹵化烷基化合物係碘甲烷、溴甲烷、碘乙烷或溴乙烷,而III族金屬係鎵金屬、銦金屬或鋁金屬。基於上述之III族金屬的莫耳數為1莫耳,反應物中之鹵化烷基化合物、鎂金屬及III族金屬之莫耳比係3:1.5:1至6:3:1。 Please refer to FIG. 1 , which is a flow chart showing a method of manufacturing an organometallic compound according to an embodiment of the present invention. In one embodiment, the method of making an organometallic compound 100 is followed by a step 110 of providing a reactant. The reactants are from halogenated alkyl compounds, magnesium metals and Group III metals. The composition wherein the halogenated alkyl compound is methyl iodide, methyl bromide, ethyl iodide or ethyl bromide, and the group III metal is a gallium metal, an indium metal or an aluminum metal. Based on the above-mentioned Group III metal, the molar number is 1 mole, and the molar ratio of the halogenated alkyl compound, the magnesium metal and the Group III metal in the reactant is 3:1.5:1 to 6:3:1.

然後,於惰性氣體之存在下,進行合成反應之步驟120。步驟120係於常溫常壓下(例如25℃至1atm)將上述之反應物放入反應釜中,並開始加熱,以使反應物開始反應。合成反應之壓力為3atm至10atm,溫度為90℃至180℃,且反應6小時至10小時。在一實施例中,惰性氣體為氮氣、氦氣、氬氣或其他合適之惰性氣體。於本發明中,合成反應之壓力的高或低會相對應地縮短或延長反應時間。若合成反應之壓力小於3atm時,反應時間會大於10小時,而增加有機金屬化合物之製造成本。若前述之壓力大於10atm時,過大之壓力則會使得反應無法合成出有機金屬化合物。 Step 120 of the synthesis reaction is then carried out in the presence of an inert gas. In step 120, the above reactant is placed in a reaction vessel under normal temperature and normal pressure (for example, 25 ° C to 1 atm), and heating is started to start the reaction. The pressure of the synthesis reaction is from 3 atm to 10 atm, the temperature is from 90 ° C to 180 ° C, and the reaction is carried out for 6 hours to 10 hours. In one embodiment, the inert gas is nitrogen, helium, argon or other suitable inert gas. In the present invention, the high or low pressure of the synthesis reaction correspondingly shortens or lengthens the reaction time. If the pressure of the synthesis reaction is less than 3 atm, the reaction time will be more than 10 hours, and the manufacturing cost of the organometallic compound is increased. If the aforementioned pressure is more than 10 atm, an excessive pressure causes the reaction to fail to synthesize an organometallic compound.

此外,本發明之合成反應係一放熱反應,因此上述之反應釜須注意加熱溫度,以避免反應失控,而無法合成出有機金屬化合物。然而,若反應溫度小於90℃時,過低之反應溫度會延長反應時間,而增加合成反應之時間成本,進而降低反應之產率。若反應溫度大於180℃時,前述之合成反應易產生副反應,而產生大量低沸點之氣體,進而無法合成出有機金屬化合物。 Further, the synthesis reaction of the present invention is an exothermic reaction, so that the above reaction vessel should pay attention to the heating temperature to avoid uncontrolled reaction, and it is impossible to synthesize an organometallic compound. However, if the reaction temperature is less than 90 ° C, too low a reaction temperature will prolong the reaction time, and increase the time cost of the synthesis reaction, thereby lowering the yield of the reaction. When the reaction temperature is more than 180 ° C, the above-mentioned synthesis reaction tends to cause a side reaction, and a large amount of a gas having a low boiling point is generated, so that an organometallic compound cannot be synthesized.

反應完成後,分離出反應釜中之液相產物,並進行步驟130,以純化有機金屬化合物並計算產率。在一實施例 中,利用上述之製造方法100來製備有機金屬化合物,其產物之產率係55%至65%。再者,藉由本發明之有機金屬化合物的製造方法可合成出三甲基鎵、三乙基鎵、三甲基銦、三乙基銦、三甲基鋁或三乙基鋁等有機金屬化合物。 After the reaction is completed, the liquid phase product in the reaction vessel is separated and subjected to step 130 to purify the organometallic compound and calculate the yield. In an embodiment The organometallic compound is prepared by the above-described production method 100, and the yield of the product is 55% to 65%. Further, an organometallic compound such as trimethylgallium, triethylgallium, trimethylindium, triethylindium, trimethylaluminum or triethylaluminum can be synthesized by the method for producing an organometallic compound of the present invention.

以下利用實施例以說明本發明之應用,然其並非用以限定本發明,任何熟習此技藝者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。 The following examples are used to illustrate the application of the present invention, and are not intended to limit the present invention, and various modifications and refinements can be made without departing from the spirit and scope of the invention.

實施例1Example 1

將碘甲烷150ml、鎂金屬30克及鎵金屬50克置入充滿惰性氣體之反應釜中進行合成反應,並控制反應釜之溫度不超過120℃,且壓力不高於6kg。反應10小時後,分離出反應釜中之液相產物,並藉由化學蒸餾法純化上述之液相產物,以獲得三甲基鎵(48.74克,產率約為58.96%)。 150 ml of methyl iodide, 30 g of magnesium metal and 50 g of gallium metal were placed in a reaction vessel filled with an inert gas to carry out a synthesis reaction, and the temperature of the reaction vessel was controlled not to exceed 120 ° C, and the pressure was not higher than 6 kg. After reacting for 10 hours, the liquid phase product in the reaction vessel was separated, and the above liquid phase product was purified by chemical distillation to obtain trimethylgallium (48.74 g, yield: about 58.96%).

實施例2Example 2

將碘甲烷225ml、鎂金屬45克及鎵金屬75克置入充滿惰性氣體之反應釜中進行合成反應,並控制反應釜之溫度不超過127℃,且壓力不高於8.5kg。反應10小時後,分離出反應釜中之液相產物,並藉由化學蒸餾法純化上述之液相產物,以獲得三甲基鎵(68.99克,產率約為55.64%)。 225 ml of methyl iodide, 45 g of magnesium metal and 75 g of gallium metal were placed in a reaction vessel filled with an inert gas to carry out a synthesis reaction, and the temperature of the reaction vessel was controlled not to exceed 127 ° C, and the pressure was not higher than 8.5 kg. After reacting for 10 hours, the liquid phase product in the reaction vessel was separated, and the above liquid phase product was purified by chemical distillation to obtain trimethylgallium (68.99 g, yield: about 55.64%).

實施例3Example 3

將碘甲烷150ml、鎂金屬30克及鎵金屬50克置入充滿惰性氣體之反應釜中進行合成反應,並控制反應釜之溫度不超過122℃,且壓力不高於8.2kg。反應10小時後, 分離出反應釜中之液相產物,並藉由化學蒸餾法純化上述之液相產物,以獲得三甲基鎵(42.62克,產率約為51.56%)。 150 ml of methyl iodide, 30 g of magnesium metal and 50 g of gallium metal were placed in a reaction vessel filled with an inert gas to carry out a synthesis reaction, and the temperature of the reaction vessel was controlled not to exceed 122 ° C, and the pressure was not higher than 8.2 kg. After 10 hours of reaction, The liquid phase product in the autoclave was separated and the above liquid phase product was purified by chemical distillation to obtain trimethylgallium (42.62 g, yield: about 51.56%).

實施例4Example 4

將碘甲烷150ml、鎂金屬30克及鎵金屬50克置入充滿惰性氣體之反應釜中進行合成反應,並控制反應釜之溫度不超過112℃,且壓力不高於6.5kg。反應12小時後,分離出反應釜中之液相產物,並藉由化學蒸餾法純化上述之液相產物,以獲得三甲基鎵(40.76克,產率約為49.31%)。 150 ml of methyl iodide, 30 g of magnesium metal and 50 g of gallium metal were placed in a reaction vessel filled with an inert gas to carry out a synthesis reaction, and the temperature of the reaction vessel was controlled not to exceed 112 ° C, and the pressure was not higher than 6.5 kg. After 12 hours of reaction, the liquid phase product in the reaction vessel was separated, and the above liquid phase product was purified by chemical distillation to obtain trimethylgallium (40.76 g, yield: about 49.31%).

由本發明上述實施例可知,本發明之有機金屬化合物之製造方法之優點在於選用鹵化烷基化合物、鎂金屬及III族金屬作為有機金屬化合物之反應物,並利用高壓高溫之反應條件及鎂金屬與鹵化物之高活性來進行有機金屬化合物之合成反應,而可快速合成出有機金屬化合物。 It can be seen from the above embodiments of the present invention that the method for producing the organometallic compound of the present invention has the advantages of using a halogenated alkyl compound, a magnesium metal and a group III metal as a reactant of an organometallic compound, and utilizing high pressure and high temperature reaction conditions and magnesium metal and The high activity of the halide is used for the synthesis reaction of the organometallic compound, and the organometallic compound can be rapidly synthesized.

雖然本發明已以實施方式揭露如上,然其並非用以限定本發明,在本發明所屬技術領域中任何具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。 The present invention has been disclosed in the above embodiments, and is not intended to limit the present invention. Any one of ordinary skill in the art to which the present invention pertains can make various changes without departing from the spirit and scope of the invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.

100‧‧‧方法 100‧‧‧ method

110‧‧‧提供反應物 110‧‧‧ Providing reactants

120‧‧‧進行合成反應 120‧‧‧Synthesis reaction

130‧‧‧純化有機金屬化合物 130‧‧‧ Purified organometallic compounds

Claims (2)

一種有機金屬化合物之製造方法,包含:提供一反應物,其中該反應物係由以下成份所組成:鹵化烷基化合物,其中該鹵化烷基化合物係碘甲烷、溴甲烷、碘乙烷或溴乙烷;鎂金屬;以及一III族金屬,其中該III族金屬係鎵金屬、銦金屬或鋁金屬,且其中基於該III族金屬之莫耳數為1莫耳,該鹵化烷基化合物、該鎂金屬及該III族金屬之莫耳比係3:1.5:1至6:3:1;於一惰性氣體之存在下,進行一合成反應,其中該合成反應之壓力為3大氣壓(atm)至10atm,溫度為90℃至180℃,且反應6小時至10小時;以及分離一液相產物,以獲得該有機金屬化合物,其中該有機金屬化合物係三甲基鎵、三乙基鎵、三甲基銦、三乙基銦、三甲基鋁或三乙基鋁,且其中該有機金屬化合物之製造方法之一產物之產率係55%至65%。 A method for producing an organometallic compound, comprising: providing a reactant, wherein the reactant is composed of a halogenated alkyl compound, wherein the halogenated alkyl compound is methyl iodide, methyl bromide, ethyl iodide or ethyl bromide. a magnesium metal; and a group III metal, wherein the group III metal is a gallium metal, an indium metal or an aluminum metal, and wherein the halogenated alkyl compound, the magnesium metal is based on the molar amount of the group III metal of 1 mole And the molar ratio of the group III metal is from 3:1.5:1 to 6:3:1; in a presence of an inert gas, a synthesis reaction is carried out, wherein the pressure of the synthesis reaction is from 3 atm to 10 atm, a temperature of 90 ° C to 180 ° C, and a reaction time of 6 hours to 10 hours; and separation of a liquid phase product to obtain the organometallic compound, wherein the organometallic compound is trimethylgallium, triethylgallium, trimethylindium And triethylindium, trimethylaluminum or triethylaluminum, and wherein the yield of the product of one of the methods for producing the organometallic compound is from 55% to 65%. 如請求項1所述之有機金屬化合物之製造方法,其中該惰性氣體係氮氣、氦氣或氬氣。 The method for producing an organometallic compound according to claim 1, wherein the inert gas system is nitrogen, helium or argon.
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* Cited by examiner, † Cited by third party
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CN109369697A (en) * 2018-12-30 2019-02-22 江西石华精细化工科技协同创新有限公司 A kind of production method preparing trimethyl aluminium
CN110828623A (en) * 2019-11-15 2020-02-21 芜湖德豪润达光电科技有限公司 Light-emitting diode preparation method and light-emitting diode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109369697A (en) * 2018-12-30 2019-02-22 江西石华精细化工科技协同创新有限公司 A kind of production method preparing trimethyl aluminium
CN110828623A (en) * 2019-11-15 2020-02-21 芜湖德豪润达光电科技有限公司 Light-emitting diode preparation method and light-emitting diode
CN110828623B (en) * 2019-11-15 2020-10-02 芜湖德豪润达光电科技有限公司 Light-emitting diode preparation method and light-emitting diode

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