TW201438267A - Method for the edge isolation of solar cells and for the third step of a monolithic integration process - Google Patents
Method for the edge isolation of solar cells and for the third step of a monolithic integration process Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 38
- 230000010354 integration Effects 0.000 title claims abstract description 30
- 230000008569 process Effects 0.000 title abstract description 15
- 238000002955 isolation Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000004065 semiconductor Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000009413 insulation Methods 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 8
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 8
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims description 4
- 239000005083 Zinc sulfide Substances 0.000 claims description 4
- 150000004770 chalcogenides Chemical class 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 229910052717 sulfur Inorganic materials 0.000 claims description 4
- 239000011149 active material Substances 0.000 claims description 2
- AKUCEXGLFUSJCD-UHFFFAOYSA-N indium(3+);selenium(2-) Chemical compound [Se-2].[Se-2].[Se-2].[In+3].[In+3] AKUCEXGLFUSJCD-UHFFFAOYSA-N 0.000 claims description 2
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 2
- 239000010409 thin film Substances 0.000 abstract description 7
- 230000008030 elimination Effects 0.000 abstract description 6
- 238000003379 elimination reaction Methods 0.000 abstract description 6
- 230000004888 barrier function Effects 0.000 abstract description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 14
- 238000005520 cutting process Methods 0.000 description 8
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 7
- 239000011787 zinc oxide Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 239000011669 selenium Substances 0.000 description 4
- 230000005611 electricity Effects 0.000 description 3
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- CDZGJSREWGPJMG-UHFFFAOYSA-N copper gallium Chemical compound [Cu].[Ga] CDZGJSREWGPJMG-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910052950 sphalerite Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 150000001786 chalcogen compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 150000004771 selenides Chemical class 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004901 spalling Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Abstract
Description
本發明關於薄膜太陽能電池的邊緣絕緣和界定終點的方法。提出的發明可以用於微電子和光電領域。在光電領域裡,本發明在設計和製造薄膜光伏太陽能模組方面具有廣泛用途,其中邊緣絕緣和單片整合概念係用於太陽能電池的互連。 The present invention relates to edge insulation of thin film solar cells and methods of defining end points. The proposed invention can be used in the fields of microelectronics and optoelectronics. In the field of optoelectronics, the invention has a wide range of applications in the design and manufacture of thin film photovoltaic solar modules, wherein the concept of edge insulation and monolithic integration is used for the interconnection of solar cells.
進行對施加到薄膜太陽能電池的透明導電氧化物(transparent conductive oxide(TCO),其係太陽能電池的前接點)之消除以及對n型和p型半導體之消除,其有二個目的:一方面,它係用於接合電池並且形成光伏模組,而在產生電力方面達成更大的效率,因為將電池串聯連接則在光伏裝置中產生更大的功率(已知為單片整合處理的第三步驟或P3步驟);另一方面,參照電池本身,它係用來在界定電池終點的步驟中達成邊緣絕緣,而這是全然必須的,因為若非如此,則前接點(TCO)會有大到可能無法維持效率的層電阻。 The elimination of the transparent conductive oxide (TCO) applied to the thin film solar cell, which is the front contact point of the solar cell, and the elimination of the n-type and p-type semiconductors have two purposes: It is used to bond batteries and form photovoltaic modules, and achieve greater efficiency in generating electricity, because connecting the batteries in series produces more power in the photovoltaic device (known as the third in monolithic integration processing). Step or P3 step); on the other hand, referring to the battery itself, it is used to achieve edge insulation in the step of defining the battery end point, which is absolutely necessary, because otherwise, the front contact point (TCO) will be large To the layer resistance that may not be able to maintain efficiency.
於例如硒化銅銦科技(copper indium selenide(CIS),CuInSe2,其係p型半導體材料而形成了由銅、銦、硒所組成之太陽能電池的一部分)或硒化銅鎵科技(copper gallium selenide,CGS)之硫族化合物的單片整合技術 是由在選擇性材料中做出三個切割(P1、P2、P3)所構成,該等切割橫向於太陽能電池的層結構(見圖1)。 For example, copper indium selenide (CIS), CuInSe 2 , which is a part of a solar cell composed of copper, indium, and selenium, or copper gallium technology (copper gallium) The monolithic integration technique of the chalcogen compound of selenide, CGS) is composed of three cuts (P1, P2, P3) in the selective material, which are transverse to the layer structure of the solar cell (see Figure 1). .
傳統上,於形成在玻璃基板上的裝置,第一切割(P1)是在沉積了第一沉積層之後進行,直到抵達基板或基板和後接點之間的阻障層(如果存在的話)為止。也就是說,切割係進行於鉬層,其係電池的後接點(負極)。它的功能是標示出電池的起點。 Conventionally, in a device formed on a glass substrate, the first dicing (P1) is performed after depositing the first deposited layer until reaching the barrier layer (if present) between the substrate or the substrate and the back contact. . That is, the cutting system is performed on the molybdenum layer, which is the back contact point (negative electrode) of the battery. Its function is to indicate the starting point of the battery.
第二切割(P2步驟)進行在電池的吸收層和緩衝層上(分別是p型和n型半導體層)。這允許電流從電池的前接點(正極)通到使用作為相鄰電池之下電極的金屬層。 The second dicing (P2 step) is performed on the absorption layer and the buffer layer of the battery (p-type and n-type semiconductor layers, respectively). This allows current to pass from the front contact (positive) of the battery to the metal layer used as the electrode under the adjacent battery.
第三切割(P3步驟)進行在前接點層和半導體層上。它限制了電流通過電極,也就是說,它界定出太陽能電池的終點。 The third dicing (P3 step) is performed on the front contact layer and the semiconductor layer. It limits the passage of current through the electrodes, that is, it defines the end point of the solar cell.
於玻璃基板的情形,連接薄膜太陽能電池的傳統方法是藉由上述的單片整合處理,其使用奈秒紅外線(ns-IR)雷射來源於P1步驟並且使用機械雕刻於P2和P3步驟。 In the case of a glass substrate, the conventional method of joining thin film solar cells is by the monolithic integration process described above, which uses a nanosecond infrared (ns-IR) laser derived from the P1 step and mechanically engraved in the P2 and P3 steps.
迄今,在金屬或聚合物之可撓性基板上而利用單片整合來將電池互連的薄層模組並不存在。這是由於以下三個主要限制的緣故: To date, thin layer modules that interconnect monolithic on a metal or polymer flexible substrate using a monolithic integration do not exist. This is due to the following three main limitations:
i.科技限制,因為燒蝕沉積材料的雷射來源才剛發展:於此種不透明的基板(金屬和聚合物),必須燒蝕作用層那一側上的材料而非通常所燒蝕的玻璃基板。達成這燒蝕而不損傷鄰接材料則需要具有脈波比傳統奈秒脈波還短的雷射來源。 i. Technology limitations, as the laser source of ablated deposition material has only just developed: on such opaque substrates (metals and polymers), the material on the side of the active layer must be ablated instead of the glass substrate that is normally ablated . Achieving this ablation without damaging the adjacent material requires a laser source with a pulse wave that is shorter than the conventional nanosecond pulse.
ii.概念限制,因為缺乏介電材料以使金屬基板電絕緣於電池的後電極。 Ii. Conceptual limitations because of the lack of dielectric material to electrically insulate the metal substrate from the back electrode of the battery.
iii.科學限制,因為缺乏關於使用新來源(皮秒和飛秒)之材料一雷射交互作用的知識,該等來源正於光學產業中發展。 Iii. Scientific limitations because of the lack of knowledge about the use of new sources (picoseconds and femtoseconds) for material-laser interactions that are developing in the optical industry.
於薄膜電池生長在金屬基板上的情形,每對電池係藉由在二相鄰電池的正和負極之間使用連接器(匯流排)來焊接多點而單獨連接,其連接方式類似於結晶矽科技所進行者。由於上面所識別的科技阻障,這些類型的基板迄今還不可能做單片互連。 In the case where a thin film battery is grown on a metal substrate, each pair of cells is individually connected by soldering a plurality of dots between the positive and negative electrodes of two adjacent cells, and the connection is similar to that of crystallization technology. The person who performed it. Due to the technical barriers identified above, it has not been possible to make monolithic interconnections of these types of substrates to date.
如上面所提及,於傳統的單片整合方法,P1步驟藉由雷射來進行,而P2和P3步驟藉由機械以機械點來雕刻來進行,其涉及以下嚴重的缺點:電池的材料容易斷裂和剝落、進行切割或研磨的深度沒有受到控制、進行寬的切割而導致喪失了電池的有效面積、沒有產生乾淨的切割輪廓等。附帶而言,在可撓性基板的情形,由於這些基板會容易斷裂,故不可能使用機械點。 As mentioned above, in the conventional monolithic integration method, the P1 step is performed by laser, and the P2 and P3 steps are performed by mechanical engraving with mechanical dots, which involves the following serious drawbacks: the battery material is easy The depth of fracture and spalling, cutting or grinding is not controlled, wide cutting results in loss of effective area of the battery, no clean cut profile, and the like. Incidentally, in the case of a flexible substrate, since these substrates are easily broken, it is impossible to use mechanical points.
在P1步驟和P3步驟所進行的切割之間的距離是無作用的,也就是說,在半導體的那區域所吸收之光子不產生電子一電洞對,因此不產生電力。因而,這距離愈小,則光伏模組所產生的功率將會愈大。使用機械點則這距離為大,因為點需要更多的實體空間來進行切割,因此導致太陽能模組的功率較小。會想要能夠盡可能的窄來進行切割,藉此使其間的距離減到最小,因而增加模組的功率。 The distance between the cutting performed in the P1 step and the P3 step is inactive, that is, the photons absorbed in the region of the semiconductor do not generate an electron-hole pair and thus do not generate electricity. Therefore, the smaller the distance, the greater the power generated by the photovoltaic module. This distance is large when using mechanical points, because the points require more physical space for cutting, thus resulting in less power in the solar module. It would be desirable to be able to cut as narrow as possible, thereby minimizing the distance between them, thus increasing the power of the module.
另一方面,在製造太陽能電池期間,電池的邊緣絕緣是必須的,也就是說,以實體分開形成正和負極層的材料,如此以避免電池短路;否則半導體裝置將沒有作用。 On the other hand, during the manufacture of the solar cell, the edge insulation of the battery is necessary, that is, the material of the positive and negative electrode layers is physically separated, so as to avoid short-circuiting of the battery; otherwise the semiconductor device will have no effect.
從產品設計的觀點來看,這處理有多樣的可能性: From a product design point of view, there are multiple possibilities for this treatment:
‧以受控制的切割來消除所有太陽能電池層而直到基板,以致沒有任何類型的交互擴散,並且電池的接點或前和後電極沒有接觸。 • All solar cell layers are removed by controlled cutting up to the substrate so that there is no any type of interdiffusion and the contacts or front and back electrodes of the cell are not in contact.
‧除了接點或後電極以外,消除了所有的太陽能電池層,而不損傷後電極。以此方式,電池的前接點也不會接觸後接點。這是在商業層級之最常見的操作形式。這處理等同於單片整合P3步驟所進行者,即使它是為了不同目的而進行在電池上。界定電池終點之步驟所達成的邊緣絕緣可以採相同於單片整合處理之P3步驟的方式來進行。 • Eliminate all solar cell layers except the contacts or the back electrode without damaging the back electrode. In this way, the front contact of the battery will not touch the rear contact. This is the most common form of operation at the commercial level. This process is equivalent to the one-piece integration of the P3 step, even if it is performed on the battery for different purposes. The edge insulation achieved by the step of defining the end of the battery can be performed in the same manner as the P3 step of the monolithic integration process.
為了達成邊緣絕緣,傳統技術所使用的機械方法具有已經提過的缺點,如上面所已經解釋的。 In order to achieve edge insulation, the mechanical methods used in the conventional art have the disadvantages already mentioned, as already explained above.
本發明因此描述了能夠同時在界定太陽能電池終點之處理中做到邊緣絕緣以及於太陽能模組中進行單片整合處理之P3步驟的方法,其避免了機械技術的缺點,其中太陽能電池包括可撓性基板。 The present invention thus describes a method capable of simultaneously performing edge insulation in a process for defining a solar cell end point and a P3 step of monolithic integration processing in a solar module, which avoids the disadvantages of mechanical techniques in which the solar cell includes a flexible Substrate.
進行對施加到薄膜太陽能電池的透明導電氧化物(TCO,其係太陽能電池的前接點)之消除以及對n型半導體和p型半導體之消除,其有二個目的:一方面,它係用於接合電池並且形成光伏模組,而在產生電力方面達成更大的效率,因為將電池串聯連接則在光伏裝置中產生更大的功率(已知為單片整合處理的第三步驟或P3步驟);另一方面,參照電池本身,它係用來在界定電池終點的步驟中達成邊緣絕緣。 The elimination of the transparent conductive oxide (TCO, which is the front contact point of the solar cell) applied to the thin film solar cell and the elimination of the n-type semiconductor and the p-type semiconductor are performed for two purposes: on the one hand, it is used Bonding the battery and forming a photovoltaic module, achieving greater efficiency in generating electricity, because connecting the cells in series produces greater power in the photovoltaic device (known as the third or P3 step of the monolithic integration process) On the other hand, referring to the battery itself, it is used to achieve edge insulation in the step of defining the end of the battery.
根據本發明的方法,對於電池的邊緣絕緣和界定其終點二者而言,就如在單片整合處理中的P3步驟(第三步驟),係主要聚焦在硫族化合物電池上,例如CIS(包括CuInSe2半導體層的電池),其係由可撓性基板 和上面發現的金屬層(其為電池的後接點(負極))所形成。替代而言,在後接點和基板之間可以有阻障層。p型半導體材料層、n型半導體材料層和最後的透明導電氧化物層(其係電池的前接點(正極))轉而發現在金屬層或後接點上。 According to the method of the present invention, for both the edge insulation of the battery and the definition of its end point, as in the P3 step (third step) in the monolithic integration process, the focus is primarily on the chalcogenide battery, such as CIS ( A battery comprising a CuInSe 2 semiconductor layer) formed of a flexible substrate and a metal layer found above, which is a back contact (negative electrode) of the battery. Alternatively, there may be a barrier layer between the back contact and the substrate. The p-type semiconductor material layer, the n-type semiconductor material layer, and the final transparent conductive oxide layer (the front contact (positive electrode) of the battery) are instead found on the metal layer or the back contact.
根據本發明的方法包括由以下所構成的至少一步驟:消除了前接點和p型與n型半導體層,以在同一電池中分別以摻雜鋁的氧化鋅(AZO)層(後接點)和前層而使Mo層(前接點)絕緣。以此方式,達成了以下所列: The method according to the invention comprises at least one step consisting of eliminating the front contact and the p-type and n-type semiconductor layers to respectively dope the aluminum-doped zinc oxide (AZO) layer in the same cell (post-contact) ) and the front layer to insulate the Mo layer (front contact). In this way, the following are achieved:
一邊緣絕緣界定出太陽能電池的終點。 An edge insulation defines the end of the solar cell.
一在構成光伏太陽能模組的相鄰電池之間做到單片整合。 A monolithic integration is achieved between adjacent cells that make up the photovoltaic solar module.
維持了金屬層(其係後接點),因為使用雷射則允許以高精確度來控制切割的深度,避免電池的金屬層或後接點受到影響。金屬層或後接點保持對空氣開放的而未被消除的事實則能夠使電池的電連接做到在其連接盒中與光伏模組的正和負端子串聯互連。 The metal layer (which is the back contact) is maintained because the use of a laser allows the depth of the cut to be controlled with high precision, preventing the metal layer or the back contact of the battery from being affected. The fact that the metal layer or the back contact remains open to the air without being eliminated enables the electrical connection of the battery to be interconnected in series with the positive and negative terminals of the photovoltaic module in its junction box.
先前所提及的這選擇性消除電池的方法是藉由施加於皮秒(ps)範圍的紅外線(IR)脈波式雷射來源在作用材料層的那一側上來進行,也就是說,施加在前接點和p型與n型半導體層的那一側上(或者也在部分的正極上)。 The previously mentioned method of selectively eliminating the battery is carried out by applying an infrared (IR) pulsed laser source applied to the picosecond (ps) range on the side of the layer of active material, that is, applying On the side of the front contact and the p-type and n-type semiconductor layers (or also on the positive side of the portion).
有時必須重複這IR雷射施加步驟以使形成電池之正和負極的材料達成完全的邊緣絕緣或實體分離,如此以避免其短路。 This IR laser application step must sometimes be repeated to achieve complete edge insulation or physical separation of the material forming the positive and negative electrodes of the battery, thus avoiding short circuits.
可撓性基板可以是金屬、聚合物或可撓性玻璃,其厚度為20到700微米。於根據本發明的處理,為了達成單片整合的P3步驟,雷射打在透明金屬氧化物的那一側上,因為當使用非透明的基板(例如金屬基板) 時,則不可能使雷射打在基板的那一側上。 The flexible substrate can be a metal, polymer or flexible glass having a thickness of from 20 to 700 microns. In the process according to the invention, in order to achieve a monolithically integrated P3 step, the laser strikes the side of the transparent metal oxide because when a non-transparent substrate (for example a metal substrate) is used At this time, it is impossible to strike the laser on the side of the substrate.
金屬氧化物層可以是Al:ZnO、Ga:ZnO、SnO2:F、SnO2:In2O3或其組合。 The metal oxide layer may be Al:ZnO, Ga:ZnO, SnO 2 :F, SnO 2 :In 2 O 3 or a combination thereof.
電池的金屬層(後接點)是鉬(Mo)。 The metal layer (post joint) of the battery is molybdenum (Mo).
CIS(CuInSe2),其係來自CIGS(CuInGa(Se,S)2)或硫銅錫鋅礦(Cu2ZnSn(Se,S)4)家族的硫族化合物,係較佳使用作為p型半導體層。硫化鎘(CdS)、硫化鋅(ZnS或ZnS(O,H))、硒化銦(In2Se3)係較佳使用作為n型半導體層。 CIS (CuInSe 2 ), which is a chalcogenide from CIGS (CuInGa(Se,S) 2 ) or sulphide sulphide (Cu 2 ZnSn(Se,S) 4 ) family, preferably used as p-type semiconductor Floor. Cadmium sulfide (CdS), zinc sulfide (ZnS or ZnS (O, H)), and indium selenide (In 2 Se 3 ) are preferably used as the n-type semiconductor layer.
相對於基於機械點的古典方法,將IR雷射用於界定電池終點以供邊緣絕緣的步驟以及用於單片整合處理二者則涉及以下優點: The steps of using IR lasers to define the cell end point for edge insulation and for monolithic integration processing relate to the following advantages over classical methods based on mechanical points:
‧邊緣的品質較高(在生產線終點所拋棄的產物較少)。 ‧The quality of the edges is high (there are fewer products discarded at the end of the line).
‧製造速度更快。 ‧ Manufacturing speed is faster.
‧最終產品的成本較低。 ‧ The cost of the final product is lower.
‧材料消除得較少,因而作用面積更大(太陽能模組產生更多功率)。 ‧ The material is eliminated less and the area of action is larger (the solar module produces more power).
對於想要達成完全單片整合的特定情形而言,除了先前解釋之能夠界定每個電池終點的雷射施加步驟以外,還會須要進行二個先行的步驟:第一步驟係由在模組中界定太陽能電池的起點(P1步驟)所構成,為此則會消除既存於基板上的所有層,而不損傷基板。這第一步驟係藉由施加IR脈波式雷射達數個奈秒來進行;並且第二步驟(P2步驟)則會由將電池的前接點連接到相鄰電池的後接點所構成。它的功能是能讓電流從模組中的一太陽能電池通到相鄰太陽能電池。這P2步驟係藉由機械點來雕刻(機械雕刻)而進行。 For the specific case where a complete monolithic integration is desired, in addition to the previously explained laser application step that defines each battery end point, two first steps are required: the first step is in the module. The starting point of the solar cell is defined (P1 step), and for this purpose, all layers existing on the substrate are eliminated without damaging the substrate. This first step is performed by applying an IR pulsed laser for several nanoseconds; and the second step (P2 step) is formed by connecting the front contact of the battery to the rear contact of the adjacent battery. . Its function is to allow current to pass from a solar cell in the module to an adjacent solar cell. This P2 step is performed by mechanical engraving (mechanical engraving).
1‧‧‧基板 1‧‧‧Substrate
2‧‧‧電池的後接點(金屬層) 2‧‧‧Battery junction (metal layer)
3‧‧‧p型半導體層 3‧‧‧p-type semiconductor layer
4‧‧‧n型半導體層 4‧‧‧n type semiconductor layer
5‧‧‧電池的前接點(透明金屬氧化物層) 5‧‧‧ Front contact point of the battery (transparent metal oxide layer)
P1‧‧‧於單片整合處理中進行的第一切割 P1‧‧‧The first cut in a monolithic integration process
P2‧‧‧於單片整合處理中進行的第二切割 P2‧‧‧Second cutting in a monolithic integration process
P3‧‧‧於單片整合處理中進行的第三切割 P3‧‧‧ Third cut in monolithic integration
圖1:太陽能電池的單片整合處理之步驟P1、P2、P3的示意代表圖。 Figure 1: Schematic representation of the steps P1, P2, P3 of a monolithic integration process for a solar cell.
圖2:一旦藉由根據本發明的處理而已經進行太陽能電池的邊緣絕緣後之電流密度對電壓的曲線。 Figure 2: Current density versus voltage curve after solar cell edge insulation has been performed by the process according to the invention.
圖3:電池的掃描式電子顯微鏡(scanning electron microscope,SEM)影像,其中已經進行了根據本發明的方法。 Figure 3: Scanning electron microscope (SEM) image of a battery in which the method according to the invention has been carried out.
為了更了解本發明,以下將根據較佳的具體態樣來描述根據本發明的方法。 In order to better understand the present invention, the method according to the present invention will be described below in terms of preferred embodiments.
首先,於圖1的先前技藝,顯示的是由以下所形成之光伏太陽能電池的圖解:基板(1)、形成電池之後接點的金屬層(2)、p型半導體層(3)、n型半導體層(4)、形成電池之前接點的透明金屬氧化物層(5)。於該圖,顯示了單片整合處理之步驟1、2、3(分別為P1、P2、P3)的切割。 First, in the prior art of Fig. 1, an illustration of a photovoltaic solar cell formed by a substrate (1), a metal layer (2) forming a contact after the battery, a p-type semiconductor layer (3), an n-type is shown. a semiconductor layer (4), a transparent metal oxide layer (5) forming a junction before the battery. In the figure, the cutting of steps 1, 2, 3 (P1, P2, P3, respectively) of the monolithic integration process is shown.
於一特殊情形,硫族化合物太陽能電池,舉例而言是由CIS科技所做成,其由可撓性不鏽鋼基板、金屬鉬層(電池的後接點)、CIS(CuInSe2)的p型半導體層、硫化鎘(CdS)的n型半導體層、摻雜鋁的氧化鋅(Al:ZnO)所做成之透明導電氧化物層(電池的前接點)所形成,而照射了在1千赫茲的頻率、30毫瓦的功率、每秒40毫米的掃過速度之皮秒IR雷射。以Δx=50微米、Δy=22微米的線間位移來進行線性掃過。 In a special case, a chalcogenide solar cell, for example, made of CIS technology, consists of a flexible stainless steel substrate, a metal molybdenum layer (post-contact of the battery), and a CIS (CuInSe 2 ) p-type semiconductor. Layer, cadmium sulfide (CdS) n-type semiconductor layer, aluminum-doped zinc oxide (Al: ZnO) made of transparent conductive oxide layer (battery front contact), and irradiated at 1 kHz The picosecond IR laser with a frequency of 30 mW and a sweep speed of 40 mm per second. Linear sweeping was performed with an interline shift of Δx = 50 μm and Δy = 22 μm.
藉由這處理,達成了對摻雜鋁的氧化鋅(Al:ZnO)、CIS、硫化鎘(CdS)等層的消除,而留下對空氣開放的鉬層。以此方式進行的方法產 生了電池的邊緣絕緣,避免電池的前和後接點之間有連接,因而避免其短路,附帶也達成了界定電池的終點(單片整合處理的P3步驟)。 By this treatment, the elimination of layers of aluminum-doped zinc oxide (Al:ZnO), CIS, cadmium sulfide (CdS) and the like is achieved, leaving a molybdenum layer open to the air. Method of production in this way The edge insulation of the battery is generated, and the connection between the front and rear contacts of the battery is avoided, so that the short circuit is avoided, and the end point of defining the battery is also achieved (P3 step of monolithic integration processing).
於圖2,一旦藉由使用此較佳具體態樣所述之雷射的處理而已經進行太陽能電池的邊緣絕緣之後,呈現出電流密度對電壓的曲線。這結果是二極體所典型的,而在邊緣沒有觀察到短路。 In Figure 2, once the edge insulation of the solar cell has been performed by the treatment of the laser described using this preferred embodiment, a current density versus voltage curve is presented. This result is typical of a diode, and no short circuit is observed at the edge.
於圖3的掃描式電子顯微鏡(SEM)影像,顯示的是太陽能電池,上面已經進行了根據本發明的處理,其使用皮秒IR雷射而在1千赫茲的頻率、30毫瓦的功率、每秒40毫米的掃過速度來照射。於該圖,相較於藉由機械雕刻所達成的切割來看,觀察到較乾淨和較窄的切割以及消除較少的材料。 The scanning electron microscope (SEM) image of Figure 3 shows a solar cell on which the process according to the invention has been performed using a picosecond IR laser at a frequency of 1 kilohertz, 30 mW, Illuminated at a sweep speed of 40 mm per second. In this figure, a cleaner and narrower cut and less material is observed compared to the cut achieved by mechanical engraving.
也可以使用其他參數來進行處理,特定而言,它可以進行於0.1~100千赫茲的頻率範圍、5~500毫瓦的功率、每秒1~3000毫米的速度範圍。 Other parameters can also be used for processing. Specifically, it can be performed in a frequency range of 0.1 to 100 kHz, a power of 5 to 500 mW, and a speed range of 1 to 3000 mm per second.
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