TW201424888A - A vibration processing apparatus and a vibration driving module thereof - Google Patents
A vibration processing apparatus and a vibration driving module thereof Download PDFInfo
- Publication number
- TW201424888A TW201424888A TW101150605A TW101150605A TW201424888A TW 201424888 A TW201424888 A TW 201424888A TW 101150605 A TW101150605 A TW 101150605A TW 101150605 A TW101150605 A TW 101150605A TW 201424888 A TW201424888 A TW 201424888A
- Authority
- TW
- Taiwan
- Prior art keywords
- frequency
- vibration
- driving
- driving voltage
- piezoelectric actuator
- Prior art date
Links
Abstract
Description
本發明是有關於一種加工裝置及其驅動模組,特別是指一種產生超音波振動的振動加工裝置及其振動驅動模組。 The invention relates to a processing device and a driving module thereof, in particular to a vibration processing device for generating ultrasonic vibration and a vibration driving module thereof.
參閱圖1,一種習知的超音振動加工裝置1包含一加工機11、一振動工作台12及一振動驅動模組13。 Referring to FIG. 1, a conventional ultrasonic vibration processing apparatus 1 includes a processing machine 11, a vibration table 12, and a vibration driving module 13.
當該加工機11用以對一設置於該振動工作台12上的一待加工件2加工,例如進行旋轉切削時,該振動工作台12的振動有助於延長該加工機11的刀具壽命及幫助排屑。 When the processing machine 11 is used to machine a workpiece 2 to be placed on the vibrating table 12, for example, when performing rotary cutting, the vibration of the vibrating table 12 helps to extend the tool life of the processing machine 11 and Help with chip removal.
該振動工作台12包括一壓電致動器121。該壓電致動器121是利用所接收到的一交流電壓產生振動,且該壓電致動器121的一振動頻率是正相關於該交流電壓的頻率,而當該壓電致動器121振動時,該振動工作台12的一固定基座以外的部分就會一起振動。 The vibrating table 12 includes a piezoelectric actuator 121. The piezoelectric actuator 121 generates vibration by using an AC voltage received, and a vibration frequency of the piezoelectric actuator 121 is a frequency positively correlated with the AC voltage, and when the piezoelectric actuator 121 vibrates At the time, portions of the vibrating table 12 other than a fixed base vibrate together.
當該加工機11用以對一設置於該振動工作台12上的一待加工件2加工,例如旋轉切削時,該振動工作台12的振動有助於延長該加工機11的刀具壽命及幫助排屑。 When the processing machine 11 is used to machine a workpiece 2 to be placed on the vibrating table 12, such as rotary cutting, the vibration of the vibrating table 12 helps to extend the tool life and help of the processing machine 11. Chip removal.
該振動驅動模組13包括一動力計131及一分析控制單元132。 The vibration driving module 13 includes a power meter 131 and an analysis control unit 132.
該動力計131固定於該振動工作台12以感測該振動工作台12的振動,並輸出一振動訊號。 The power meter 131 is fixed to the vibrating table 12 to sense the vibration of the vibrating table 12 and output a vibration signal.
該分析控制單元132電連接該壓電致動器121以提供 該交流電壓,並電連接該動力計131以接收該振動訊號,並根據該振動訊號判斷該壓電致動器121的振動頻率,且根據所判斷的該振動頻率調整該交流電壓的頻率,以期使該交流電壓的頻率操作於該壓電致動器121的一諧振頻率,其中,該壓電致動器121操作於該諧振頻率時會有最大的機械振幅。 The analysis control unit 132 is electrically connected to the piezoelectric actuator 121 to provide The AC voltage is electrically connected to the power meter 131 to receive the vibration signal, and the vibration frequency of the piezoelectric actuator 121 is determined according to the vibration signal, and the frequency of the AC voltage is adjusted according to the determined vibration frequency, with a view to The frequency of the alternating voltage is operated at a resonant frequency of the piezoelectric actuator 121, wherein the piezoelectric actuator 121 operates at the resonant frequency with a maximum mechanical amplitude.
該種超音振動加工裝置1的缺點在於: The disadvantages of this type of supersonic vibration processing device 1 are:
當該加工機11受該待加工件2拘束時,該振動工作台12的振動頻率就會偏離該壓電致動器121的該振動頻率,然而,該動力計131直接量到的並不是該壓電致動器121的振動而是該振動工作台12的振動,這會使該分析控制單元132無法將該交流電壓的頻率根據該振動訊號調整到等於該壓電致動器121的該諧振頻率,而導致該壓電致動器121無法達到最大的機械振幅。 When the processing machine 11 is restrained by the workpiece 2, the vibration frequency of the vibration table 12 deviates from the vibration frequency of the piezoelectric actuator 121. However, the power meter 131 does not directly measure the vibration frequency. The vibration of the piezoelectric actuator 121 is the vibration of the vibrating table 12, which causes the analysis control unit 132 to fail to adjust the frequency of the alternating voltage according to the vibration signal to be equal to the resonant frequency of the piezoelectric actuator 121. This causes the piezoelectric actuator 121 to fail to reach the maximum mechanical amplitude.
因此,本發明之一目的,即在提供一種可解決先前技術的缺點的振動加工裝置。 Accordingly, it is an object of the present invention to provide a vibration processing apparatus that can solve the disadvantages of the prior art.
於是,本發明振動加工裝置,包含一壓電致動器及一振動驅動模組。 Therefore, the vibration processing apparatus of the present invention comprises a piezoelectric actuator and a vibration driving module.
該壓電致動器接收一驅動電壓,並根據該驅動電壓的頻率產生振動,且產生一大小隨該驅動電壓的一頻率變化的驅動電流。 The piezoelectric actuator receives a driving voltage and generates vibration according to a frequency of the driving voltage, and generates a driving current whose magnitude varies with a frequency of the driving voltage.
該振動驅動模組電連接於該壓電致動器,並產生該驅動電壓,且包括一電流感測器及一分析控制單元。 The vibration driving module is electrically connected to the piezoelectric actuator and generates the driving voltage, and includes a current sensor and an analysis control unit.
該電流感測器用以感測多個不同頻率所一一對應的該驅動電流的大小,並根據感測到的每一驅動電流的大小輸出一感測值。 The current sensor is configured to sense a magnitude of the driving current corresponding to the plurality of different frequencies, and output a sensing value according to the sensed magnitude of each driving current.
該分析控制單元電連接於該電流感測器以接收每一感測值,並儲存每一感測值及每一感測值對應的該頻率,且該分析控制單元將所儲存的該等感測值中的最大一者所對應的該頻率設定為該驅動電壓的一工作頻率,以使該壓電致動器振動於一諧振頻率。 The analysis control unit is electrically connected to the current sensor to receive each sensed value, and stores each sensed value and the frequency corresponding to each sensed value, and the analysis control unit stores the sensed The frequency corresponding to the largest one of the measured values is set to an operating frequency of the driving voltage to cause the piezoelectric actuator to vibrate at a resonant frequency.
而本發明之另一目的,即在提供一種振動驅動模組,適用於一振動加工裝置,該振動加工裝置包含一壓電致動器,該壓電致動器接收一驅動電壓,並根據該驅動電壓的頻率產生振動,且該壓電致動器產生一大小隨該驅動電壓的一頻率變化的驅動電流。 Another object of the present invention is to provide a vibration driving module suitable for use in a vibration processing apparatus, the vibration processing apparatus comprising a piezoelectric actuator, the piezoelectric actuator receiving a driving voltage, and according to the The frequency of the driving voltage generates vibration, and the piezoelectric actuator generates a driving current whose magnitude varies with a frequency of the driving voltage.
該振動驅動模組電連接於該壓電致動器並產生該驅動電壓,且包括一電流感測器及一分析控制單元。 The vibration driving module is electrically connected to the piezoelectric actuator and generates the driving voltage, and includes a current sensor and an analysis control unit.
該電流感測器用以感測多個不同頻率所一一對應的該驅動電流的大小,並根據感測到的每一驅動電流的大小輸出一感測值。 The current sensor is configured to sense a magnitude of the driving current corresponding to the plurality of different frequencies, and output a sensing value according to the sensed magnitude of each driving current.
該分析控制單元電連接於該電流感測器以接收每一感測值,並儲存每一感測值及每一感測值對應的該頻率,且該分析控制單元將所儲存的該等感測值中的最大一者所對應的該頻率設定為該驅動電壓的一工作頻率,以使該壓電致動器振動於一諧振頻率。 The analysis control unit is electrically connected to the current sensor to receive each sensed value, and stores each sensed value and the frequency corresponding to each sensed value, and the analysis control unit stores the sensed The frequency corresponding to the largest one of the measured values is set to an operating frequency of the driving voltage to cause the piezoelectric actuator to vibrate at a resonant frequency.
而本發明之又另一目的,即在提供一種調頻方法,適 用於由一振動驅動模組執行,該振動驅動模組用以產生一驅動電壓提供至一壓電致動器,使該壓電致動器根據該驅動電壓的頻率產生振動,該調頻方法包含:(A)感測多個不同頻率所一一對應的該驅動電流的大小,並根據感測到的每一驅動電流的大小輸出一感測值;及(B)儲存每一感測值,及每一感測值對應的該頻率,且該分析控制單元將所儲存的該等感測值中的最大一者所對應的該頻率設定為該驅動電壓的一工作頻率。 Yet another object of the present invention is to provide a frequency modulation method suitable for For performing by a vibration driving module, the vibration driving module is configured to generate a driving voltage to be supplied to a piezoelectric actuator, so that the piezoelectric actuator generates vibration according to a frequency of the driving voltage, and the frequency modulation method includes : (A) sensing a magnitude of the driving current corresponding to the plurality of different frequencies, and outputting a sensing value according to the sensed magnitude of each driving current; and (B) storing each sensing value, And the frequency corresponding to each sensed value, and the analysis control unit sets the frequency corresponding to the largest one of the stored sensing values as an operating frequency of the driving voltage.
有關本發明之前述及其他技術內容、特點與功效,在以下配合參考圖式之一個較佳實施例的詳細說明中,將可清楚的呈現。 The above and other technical contents, features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments.
參閱圖2,本發明振動加工裝置之較佳實施例包含一壓電致動器3及一振動驅動模組4。 Referring to FIG. 2, a preferred embodiment of the vibration processing apparatus of the present invention comprises a piezoelectric actuator 3 and a vibration drive module 4.
該壓電致動器3適用設置於一刀具5,但不以此為限,也可以設置在一工作機台(圖未示出)。該壓電致動器3接收一驅動電壓,並根據該驅動電壓的頻率產生振動,且產生一大小隨該驅動電壓的一頻率變化的驅動電流。 The piezoelectric actuator 3 is preferably disposed on a tool 5, but is not limited thereto, and may be disposed on a working machine (not shown). The piezoelectric actuator 3 receives a driving voltage, generates vibration according to the frequency of the driving voltage, and generates a driving current whose magnitude varies with a frequency of the driving voltage.
當該壓電致動器3振動時該刀具5會一同連動,且當該驅動電壓的頻率實質地等同於該壓電致動器3的一諧振頻率時,該壓電致動器3就會產生最大的機械振幅,進而帶動該刀具5產生最大的機械振幅,而達到最佳的加工效果。 The cutter 5 is interlocked when the piezoelectric actuator 3 vibrates, and when the frequency of the driving voltage is substantially equal to a resonant frequency of the piezoelectric actuator 3, the piezoelectric actuator 3 The maximum mechanical amplitude is generated, which in turn drives the tool 5 to produce maximum mechanical amplitude for optimum machining results.
通常,該壓電致動器3出廠時會先以阻抗分析儀量得 如圖3所示之阻抗對頻率變化的一曲線圖,且該曲線的波谷所對應的一頻率就是該壓電致動器3出廠時的一原始諧振頻率,然而隨著時間增加或實際使用時該刀具5受到的外力拘束,該壓電致動器3當下的一諧振頻率就會偏離該原始諧振頻率,而本較佳實施例不但能避免先前技術的問題,還能執行一調頻方法以得知該壓電致動器3每次使用時的該諧振頻率,進而使該壓電致動器3得以諧振在使用當下的該諧振頻率而達到最大的機械振幅。 Usually, the piezoelectric actuator 3 is first measured by an impedance analyzer. A plot of impedance versus frequency as shown in FIG. 3, and a frequency corresponding to the valley of the curve is an original resonant frequency at which the piezoelectric actuator 3 is shipped, but as time increases or is actually used The external force of the tool 5 is restrained, and a current resonant frequency of the piezoelectric actuator 3 deviates from the original resonant frequency, and the preferred embodiment can not only avoid the problems of the prior art, but also perform a frequency modulation method. The resonant frequency of the piezoelectric actuator 3 at each use is known, which in turn causes the piezoelectric actuator 3 to resonate to achieve maximum mechanical amplitude using the current resonant frequency.
該振動驅動模組4電連接於該壓電致動器3,並產生該驅動電壓,且包括一電流感測器41、一分析控制單元42及一相差偵測器43。 The vibration driving module 4 is electrically connected to the piezoelectric actuator 3 and generates the driving voltage, and includes a current sensor 41, an analysis control unit 42, and a phase difference detector 43.
如圖4及圖5所示,該振動驅動模組4執行一種調頻方法,該調頻方法包含一掃描模式及一諧振模式,該掃描模式包含以下步驟: As shown in FIG. 4 and FIG. 5, the vibration driving module 4 performs a frequency modulation method, and the frequency modulation method includes a scanning mode and a resonance mode, and the scanning mode includes the following steps:
步驟51:利用該分析控制單元42先後地將該驅動電壓的頻率設定為多個不同的頻率。 Step 51: The frequency of the driving voltage is sequentially set to a plurality of different frequencies by the analysis control unit 42.
詳細地說明,該驅動電壓的該等頻率的選取是如圖4所示以該壓電致動器3出廠時的該原始諧振頻率起始,然後等差增減頻率選取產生。 Explain in detail that the selection of the frequencies of the driving voltage is started as shown in FIG. 4 with the original resonant frequency when the piezoelectric actuator 3 is shipped, and then the difference is added and subtracted.
舉例說明但不以此為限,若該原始諧振頻率為40.1 kHz,並等差間隔0.1 kHz取樣,則取樣產生的該等頻率f(i)=40.1±(0.1×i)kHz,其中,i=0、1、2、3…。 By way of example and not limitation, if the original resonant frequency is 40.1 kHz and the sampling is equally spaced at 0.1 kHz, the samples are generated by the frequency f(i)=40.1±(0.1×i) kHz, where i =0, 1, 2, 3...
步驟52:利用該電流感測器41感測多個不同頻率所一一對應的該驅動電流的大小,並根據感測到的每一驅動電 流的大小輸出一感測值,且該感測值的大小是同步追隨該驅動電流的大小做變化。 Step 52: The current sensor 41 is used to sense the magnitude of the driving current corresponding to the plurality of different frequencies, and according to each sensed driving power The magnitude of the stream outputs a sensed value, and the magnitude of the sensed value is changed synchronously following the magnitude of the drive current.
於本較佳實施例,該電流感測器41是一種霍爾電流感測器,該感測值是電壓,且當該電流感測器41所感測到的該驅動電流越大時,該感測值(電壓)也越高。 In the preferred embodiment, the current sensor 41 is a Hall current sensor, the sensing value is a voltage, and the sense is greater when the current sensed by the current sensor 41 is greater. The measured value (voltage) is also higher.
步驟53:利用該分析控制單元42電連接於該電流感測器41,並接收該電流感測器41輸出的每一感測值,且儲存每一感測值及每一感測值對應的該頻率。 Step 53: The analysis control unit 42 is electrically connected to the current sensor 41, and receives each sensed value output by the current sensor 41, and stores each sensed value and each sensed value corresponding to each The frequency.
步驟54:利用該分析控制單元42判斷所儲存的該等感測值中的最大一者為何。 Step 54: Using the analysis control unit 42 to determine why the largest one of the stored sensing values is stored.
步驟55:判斷最大的該感測值所對應的該頻率為何。以圖4舉例說明,最大的該感測值是1.2安培,該壓電致動器3的該諧振頻率為39.9 kHz。 Step 55: Determine the frequency of the maximum corresponding to the sensed value. As exemplified in Fig. 4, the maximum sensed value is 1.2 amps, and the resonant frequency of the piezoelectric actuator 3 is 39.9 kHz.
值得注意的是,該驅動電壓的頻率不必然需要依據步驟51選取產生的先後順序設定,且不同的該等頻率也可以是已預存於該分析控制單元42中,或是以檔案的型式輸入並儲存於該分析控制單元42中,或是經由該分析控制單元42以一輸入設定的掃描解析度及一掃描頻帶加以運算得到,且該掃描頻帶的一中心頻率為該原始諧振頻率。 It should be noted that the frequency of the driving voltage does not necessarily need to be set according to the sequence of steps selected in step 51, and different frequencies may also be pre-stored in the analysis control unit 42 or input in the file type. It is stored in the analysis control unit 42 or calculated by the analysis control unit 42 with an input set scan resolution and a scan frequency band, and a center frequency of the scan frequency band is the original resonance frequency.
於該諧振模式包含以下步驟: The resonant mode includes the following steps:
步驟56:利用該分析控制單元42將該驅動電壓的頻率設定為該工作頻率。 Step 56: The frequency of the driving voltage is set to the operating frequency by the analysis control unit 42.
參閱圖6,該調頻方法更包含一鎖相模式,且該鎖相模式與該掃描模式可以分時進行,也可以同時並行,該鎖相 模式包含以下步驟61至步驟64: Referring to FIG. 6, the frequency modulation method further includes a phase lock mode, and the phase lock mode and the scan mode can be performed in a time division manner, or can be simultaneously parallel. The pattern contains the following steps 61 through 64:
步驟61:利用該相差偵測器43電連接該分析控制單元42以接收該驅動電壓,及電連接該電流感測器41以接收該感測值,並輸出一指示該驅動電壓與該感測值之間的一相位差的相位比較訊號。在本較佳實施例中,該相差偵測器43是以德州儀器公司型號CD4046的晶片實現,但不以此為限。 Step 61: The phase difference detector 43 is electrically connected to the analysis control unit 42 to receive the driving voltage, and electrically connected to the current sensor 41 to receive the sensing value, and output an indication of the driving voltage and the sensing. A phase comparison signal of a phase difference between values. In the preferred embodiment, the phase difference detector 43 is implemented by a Texas Instruments model CD4046 chip, but is not limited thereto.
步驟62:利用該分析控制單元42接收該相位比較訊號。 Step 62: The phase comparison signal is received by the analysis control unit 42.
步驟63:利用分析控制單元42根據該相位比較訊號判斷該相位差是否實質地為零,若是,則結束,若否,則進行步驟64。 Step 63: The analysis control unit 42 determines whether the phase difference is substantially zero according to the phase comparison signal, and if so, ends, if not, proceeds to step 64.
步驟64:利用分析控制單元42根據該相位比較訊號調整該驅動電壓的一電壓相位,並回到步驟62。 Step 64: The analysis control unit 42 adjusts a voltage phase of the driving voltage according to the phase comparison signal, and returns to step 62.
藉由前述的步驟62至步驟64,當該相位差實質地不為零時,該分析控制單元42就持續調整該驅動電壓的該電壓相位,直到該相位差實質地為零時才停止調整該驅動電壓的該電壓相位。 By the foregoing steps 62 to 64, when the phase difference is substantially not zero, the analysis control unit 42 continuously adjusts the voltage phase of the driving voltage until the phase difference is substantially zero, and then stops adjusting. The voltage phase of the drive voltage.
當該相位差實質地為零時,該驅動電壓實質地與該感測值同相,又由於該感測值實質地正向追隨該驅動電流的大小做變化,所以該感測值可以視為與該驅動電流同相,也就是該驅動電壓與該驅動電流同相,這會使得該壓電致動器3所接收的一驅動電力具有最大的功率因素(power factor,PF),進而使該壓電致動器3及該振動驅動模組4 間達到最大的機電轉換效率而得以節能,且也可以使該壓電致動器3達到更大的機械振幅,其中,該驅動電力的電壓就是該驅動電壓,該驅動電力的電流就是該驅動電流。 When the phase difference is substantially zero, the driving voltage is substantially in phase with the sensing value, and since the sensing value substantially changes in accordance with the magnitude of the driving current, the sensing value can be regarded as The driving current is in phase, that is, the driving voltage is in phase with the driving current, which causes a driving power received by the piezoelectric actuator 3 to have a maximum power factor (PF), thereby causing the piezoelectric actuation 3 and the vibration driving module 4 The maximum electromechanical conversion efficiency is achieved to save energy, and the piezoelectric actuator 3 can also be brought to a greater mechanical amplitude, wherein the voltage of the driving power is the driving voltage, and the current of the driving power is the driving current. .
更詳細地說明,該分析控制單元42具有一控制器421、一壓控振盪器422、一功率放大器423及一阻抗匹配器424。 In more detail, the analysis control unit 42 has a controller 421, a voltage controlled oscillator 422, a power amplifier 423, and an impedance matcher 424.
該控制器421用以輸出一控制訊號,且電連接電流感測器41以接收該電流感測器41輸出的每一感測值,儲存每一感測值及其所對應的該頻率,判斷所儲存的該等感測值中的最大一者為何,及將判斷出之最大的該感測值所對應的該頻率作為該控制訊號的頻率。 The controller 421 is configured to output a control signal, and electrically connect the current sensor 41 to receive each sensed value output by the current sensor 41, store each sensed value and the corresponding frequency thereof, and determine The largest one of the stored sensing values, and the frequency corresponding to the largest determined sensing value is used as the frequency of the control signal.
該壓控振盪器422電連接該控制器421以接收該控制訊號,並受該控制訊號控制以輸出一振盪訊號,且該振盪訊號的頻率是受控於該控制訊號的頻率,於本較佳實施例,該振盪訊號的頻率等於該控制訊號的頻率。 The voltage controlled oscillator 422 is electrically connected to the controller 421 to receive the control signal, and is controlled by the control signal to output an oscillating signal, and the frequency of the oscillating signal is controlled by the frequency of the control signal. In an embodiment, the frequency of the oscillation signal is equal to the frequency of the control signal.
該功率放大器423電連接該壓控振盪器422以接收該振盪訊號,並將該振盪訊號的振幅放大成為一增強振盪訊號並輸出,且該增強振盪訊號的頻率等於該振盪訊號的頻率。 The power amplifier 423 is electrically connected to the voltage controlled oscillator 422 to receive the oscillating signal, and amplifies the amplitude of the oscillating signal into an enhanced oscillating signal and outputs the frequency of the oscillating signal equal to the frequency of the oscillating signal.
該阻抗匹配器424電連接於該功率放大器423以接收該增強振盪訊號,並將該增強振盪訊號轉換成該驅動電壓並輸出,且該驅動電壓的頻率等於該增強振盪訊號的頻率。簡而言之,該控制器421只要控制該控制訊號的頻率及相位,就可以連帶地控制該驅動電壓的頻率及相位,而執 行前述的調頻方法。 The impedance matching unit 424 is electrically connected to the power amplifier 423 to receive the enhanced oscillation signal, and converts the enhanced oscillation signal into the driving voltage and outputs the frequency of the driving voltage equal to the frequency of the enhanced oscillation signal. In short, the controller 421 can control the frequency and phase of the driving voltage by controlling the frequency and phase of the control signal. The aforementioned frequency modulation method is performed.
綜上所述,該較佳實施例具有以下優點: In summary, the preferred embodiment has the following advantages:
1.該振動驅動模組4執行該調頻方法以該感測值來判斷該壓電致動器3的該諧振頻率,從而避免先前技術因動力計131量測時的機械誤差而誤判該諧振頻率。 1. The vibration driving module 4 performs the frequency modulation method to determine the resonant frequency of the piezoelectric actuator 3 by using the sensing value, thereby avoiding the prior art misjudge the resonant frequency due to mechanical errors when the power meter 131 measures. .
2.該振動驅動模組4執行該掃頻方法得到使用當下該壓電致動器3的該諧振頻率,從而使該驅動電壓的頻率確實地操作在該壓電致動器3的該諧振頻率。 2. The vibration driving module 4 performs the frequency sweeping method to obtain the resonant frequency of the piezoelectric actuator 3, so that the frequency of the driving voltage is surely operated at the resonant frequency of the piezoelectric actuator 3. .
3.該掃頻方法其中的鎖相模式步驟能調整該驅動電壓的相位,使該驅動電壓與該驅動電流保持實質地同相,更可使該振動驅動模組4及該壓電致動器3之間達到最大的機電轉換效率。 3. The phase-locking mode step of the frequency sweeping method can adjust the phase of the driving voltage so that the driving voltage and the driving current remain substantially in phase, and the vibration driving module 4 and the piezoelectric actuator 3 can be further Maximum electromechanical conversion efficiency is achieved between.
綜上所述,上述較佳實施例確實能達成本發明之目的。 In summary, the above preferred embodiments can achieve the object of the present invention.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明申請專利範圍及發明說明內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 The above is only the preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent changes and modifications made by the scope of the invention and the description of the invention are All remain within the scope of the invention patent.
1‧‧‧超音振動加工裝置 1‧‧‧Supersonic vibration processing device
11‧‧‧加工機 11‧‧‧Processing machine
12‧‧‧振動工作台 12‧‧‧Vibration table
121‧‧‧壓電致動器 121‧‧‧ Piezoelectric Actuator
13‧‧‧振動驅動模組 13‧‧‧Vibration drive module
131‧‧‧動力計 131‧‧‧Power Meter
132‧‧‧分析控制單元 132‧‧‧Analytical Control Unit
2‧‧‧待加工件 2‧‧‧To be processed
3‧‧‧壓電致動器 3‧‧‧ Piezoelectric actuator
4‧‧‧振動驅動模組 4‧‧‧Vibration drive module
41‧‧‧電流感測器 41‧‧‧ Current Sensor
42‧‧‧分析控制單元 42‧‧‧Analytical Control Unit
421‧‧‧控制器 421‧‧‧ Controller
422‧‧‧壓控振盪器 422‧‧‧Variable Control Oscillator
423‧‧‧功率放大器 423‧‧‧Power Amplifier
424‧‧‧阻抗匹配器 424‧‧‧impedance matcher
43‧‧‧相差偵測器 43‧‧‧ phase difference detector
5‧‧‧刀具 5‧‧‧Tools
51~56‧‧‧步驟 51~56‧‧‧Steps
61~64‧‧‧步驟 61~64‧‧‧Steps
圖1是一種習知的超音振動加工裝置的示意圖;圖2是本發明振動加工裝置之較佳實施例的一方塊圖;圖3是一示意圖,說明一壓電致動器的阻抗隨頻率的變化關係; 圖4是一關係圖,說明該較佳實施例的一感測值對一驅動電壓的頻率的變化關係;圖5是一流程圖,說明該較佳實施例執行的一調頻方法包含一掃描模式及一諧振模式;及圖6是一流程圖,說明該較佳實施例執行的該調頻方法更包含一鎖相模式。 1 is a schematic view of a conventional ultrasonic vibration processing apparatus; FIG. 2 is a block diagram of a preferred embodiment of the vibration processing apparatus of the present invention; and FIG. 3 is a schematic diagram showing the impedance of a piezoelectric actuator with frequency Change relationship 4 is a diagram illustrating a variation of a sensed value versus a frequency of a driving voltage in the preferred embodiment; FIG. 5 is a flow chart illustrating a frequency modulation method performed by the preferred embodiment including a scan mode And a resonant mode; and FIG. 6 is a flow chart illustrating that the frequency modulation method performed by the preferred embodiment further includes a phase lock mode.
3‧‧‧壓電致動器 3‧‧‧ Piezoelectric actuator
4‧‧‧振動驅動模組 4‧‧‧Vibration drive module
41‧‧‧電流感測器 41‧‧‧ Current Sensor
42‧‧‧分析控制單元 42‧‧‧Analytical Control Unit
421‧‧‧控制器 421‧‧‧ Controller
422‧‧‧壓控振盪器 422‧‧‧Variable Control Oscillator
423‧‧‧功率放大器 423‧‧‧Power Amplifier
424‧‧‧阻抗匹配器 424‧‧‧impedance matcher
43‧‧‧相差偵測器 43‧‧‧ phase difference detector
5‧‧‧刀具 5‧‧‧Tools
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101150605A TWI480111B (en) | 2012-12-27 | 2012-12-27 | A vibration processing apparatus and a vibration driving module thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW101150605A TWI480111B (en) | 2012-12-27 | 2012-12-27 | A vibration processing apparatus and a vibration driving module thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201424888A true TW201424888A (en) | 2014-07-01 |
TWI480111B TWI480111B (en) | 2015-04-11 |
Family
ID=51725107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW101150605A TWI480111B (en) | 2012-12-27 | 2012-12-27 | A vibration processing apparatus and a vibration driving module thereof |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI480111B (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113386193B (en) | 2020-03-12 | 2022-11-22 | 台达电子工业股份有限公司 | Ultrasonic driver and method |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002219606A (en) * | 2001-01-22 | 2002-08-06 | Masao Murakawa | Ultrasonic milling device |
JP3766291B2 (en) * | 2001-05-21 | 2006-04-12 | 正夫 村川 | Ultrasonic milling equipment |
JP2006255506A (en) * | 2005-03-15 | 2006-09-28 | Fujitsu Ltd | Oscillator |
CN100408248C (en) * | 2005-10-24 | 2008-08-06 | 中国电子科技集团公司第四十五研究所 | High-accuracy self-adaptation driving power for ultrasonic transducer |
TW200932408A (en) * | 2008-01-25 | 2009-08-01 | Tai Yen Ind Co Ltd | Ultrasonic welder and controlling method thereof |
JP2009241225A (en) * | 2008-03-31 | 2009-10-22 | Masahiko Jin | Ultrasonic spindle apparatus |
CN101574757B (en) * | 2009-05-01 | 2013-05-22 | 台州巨龙超声设备有限公司 | Control system of ultrasonic welding machine |
-
2012
- 2012-12-27 TW TW101150605A patent/TWI480111B/en active
Also Published As
Publication number | Publication date |
---|---|
TWI480111B (en) | 2015-04-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107850484B (en) | Method and device for measuring the resonant frequency of a tool for ultrasonic vibration machining | |
US8009508B2 (en) | Ultrasonic generator system | |
RU2010118480A (en) | INHALATION DEVICE | |
CN100408248C (en) | High-accuracy self-adaptation driving power for ultrasonic transducer | |
JP4572789B2 (en) | Ultrasonic generator and ultrasonic beauty device | |
JP2008500904A (en) | Method and ultrasonic welding apparatus for measuring and / or adjusting vibration amplitude of an ultrasonic oscillator | |
CN103597327A (en) | Method for calculating the oscillation amplitude of a sonotrode | |
JP5815258B2 (en) | Method for measuring vibration characteristics of cantilevers | |
JP2002060041A (en) | Method and apparatus for controlling piezoelectric vibrating parts feeder | |
TWI480111B (en) | A vibration processing apparatus and a vibration driving module thereof | |
TWI632353B (en) | Method and circuit arrangement for determining the operating range of an ultrasonic oscillating system | |
Arnold et al. | A driver for piezoelectric transducers with control of resonance | |
JP4557792B2 (en) | Distance measuring device and machine tool | |
JP2002292337A (en) | Method and device for controlling part feeder | |
JP4891885B2 (en) | Resonance point tracking drive | |
TW201324499A (en) | Oscillating device for frequency detection, ultrasonic transceiver system and frequency detection method thereof | |
CN201742320U (en) | Vibrator capable of automatically tracking frequency | |
JP2019155346A (en) | Ultrasonic oscillation circuit | |
JP6220306B2 (en) | Cantilever vibration characteristic measurement method and vibration characteristic measurement program | |
Littmann et al. | Load-adaptive phase-controller for resonant driven piezoelectric devices | |
JP2011122887A5 (en) | ||
CN110545926B (en) | Ultrasonic machine tool comprising two ultrasonic probes and method for operating the same | |
JP3565063B2 (en) | Ultrasonic crimping apparatus and ultrasonic crimping method for electronic components | |
CN201892570U (en) | Contact resonance frequency detecting system for atomic force acoustic microscope cantilever beam | |
JPH0671226A (en) | Ultrasonic wave generator |