TW201414856A - Titanium sheet - Google Patents

Titanium sheet Download PDF

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TW201414856A
TW201414856A TW102129119A TW102129119A TW201414856A TW 201414856 A TW201414856 A TW 201414856A TW 102129119 A TW102129119 A TW 102129119A TW 102129119 A TW102129119 A TW 102129119A TW 201414856 A TW201414856 A TW 201414856A
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thickness
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titanium
particle diameter
elongation
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TW102129119A
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TWI493048B (en
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Hidenori Takebe
Yoshihisa Shirai
Takashi Maeda
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Nippon Steel & Sumitomo Metal Corp
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • C22F1/183High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C14/00Alloys based on titanium
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12993Surface feature [e.g., rough, mirror]

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Heat Treatment Of Sheet Steel (AREA)

Abstract

A titanium sheet with its thickness below 0.2 mm is disclosed, whose main body contains Fe below 0.1 mass% and O (oxygen) below 0.1 mass%; it satisfies the sheet thickness (mm)/particle diameter (mm) >=3 and the particle diameter >=2.5 <mu>m; and its surface contains a cured layer; the depth from the surface of the region of the aforementioned cured layer is above 200 nm and below 2 <mu>m. A titanium sheet is endowed with the excellent processability and high surface hardness, for example, capable of being properly used in various applications particularly an acoustic member (a speaker vibration plate, etc.).

Description

鈦薄板 Titanium sheet 發明領域 Field of invention

本發明係有關於一種鈦薄板,更詳言之,係有關於一種具有優異的加工性及高表面硬度,即便揚聲器振動板等亦能夠適合使用之加工性優異的高強度鈦薄板。本申請係基於2012年8月14日在日本提出申請之特願2012-179861號而主張優先權,將其內容引用於此。 The present invention relates to a titanium thin plate, and more particularly to a high-strength titanium thin plate having excellent workability and high surface hardness, and which is excellent in workability even in a speaker diaphragm or the like. The present application claims priority based on Japanese Patent Application No. 2012-179861, filed on Jan.

發明背景 Background of the invention

鈦材料係比強度高且具有優異的耐蝕性,而被使用在作為化學工廠用、建築用、其他許多產業用材料,以及作為相機機身、鐘錶、運動用品等的民生用品的材料之廣泛的用途。箔等厚度0.2mm以下的薄板,係被使用在音響構件(揚聲器振動板等)、防蝕薄膜.薄片等等活用其特性之用途。 Titanium materials are used in chemical factories, construction, and many other industrial materials, as well as materials for consumer products such as camera bodies, clocks, sporting goods, etc., because of their high specific strength and excellent corrosion resistance. use. A thin plate having a thickness of 0.2 mm or less, such as a foil, is used for an acoustic member (a speaker diaphragm, etc.) and an anti-corrosion film. Sheets and the like are used for their characteristics.

通常,金屬材料係有被要求高強度之傾向,並且亦被要求加工性。在鈦材料亦不例外,不僅是加工性,多半亦被要求必須高強度。但是,因為通常高強度化時,加工性降低,所以在鈦材料,以往係嘗試進行藉由控制氧量、鐵量、結晶粒徑等來使強度與加工性的平衡最佳化。 In general, metallic materials have a tendency to be required to have high strength, and are also required to be processable. Titanium materials are no exception, not only processability, but also require high strength. However, since the workability is generally lowered when the strength is increased, it has been conventionally attempted to optimize the balance between strength and workability by controlling the amount of oxygen, the amount of iron, the crystal grain size, and the like in the titanium material.

例如,專利文獻1係揭示一種鈦板,其係藉由將鈦材料中的O(氧)含量設為預定值之同時,使Fe含量増大(Fe:0.1~0.6mass%),來謀求在抑制鈦板的延展性降低之同時,提升強度,而且使平均粒徑成為10μm以下來提升成形性。 For example, Patent Document 1 discloses a titanium plate which is suppressed by setting the O (oxygen) content in the titanium material to a predetermined value while increasing the Fe content (Fe: 0.1 to 0.6 mass%). When the ductility of the titanium plate is lowered, the strength is increased, and the average particle diameter is 10 μm or less to improve the formability.

專利文獻2係揭示一種成形加工性良好的Ti板材,該Ti板材之Fe含量為300ppm以上且[Fe+O+N+H]量為1500ppm以下,而且除了鐵量、氧量以外,亦限制氮量和氫量。 Patent Document 2 discloses a Ti plate material having excellent moldability, and the Ti plate material has an Fe content of 300 ppm or more and a [Fe+O+N+H] amount of 1500 ppm or less, and also limits nitrogen in addition to iron amount and oxygen amount. Quantity and amount of hydrogen.

又,專利文獻3係揭示一種純鈦板的製造方法,其係將鐵量、氧量、進而鎳及鉻量規規定在預定範圍,而且將平均粒徑設為20~80μm,使得即便使用純度低的廉價原料時,亦能夠維持成形性。 Further, Patent Document 3 discloses a method for producing a pure titanium plate by setting the amount of iron, the amount of oxygen, and further the nickel and chromium gauges to a predetermined range, and setting the average particle diameter to 20 to 80 μm so that even if purity is used. When the low-cost raw materials are low, the formability can be maintained.

但是,在該等專利文獻所記載之技術,任一者均是以廣泛應用之板厚度0.3~1mm的鈦材作為對象之技術。 However, any of the techniques described in the above-mentioned patent documents is a technique in which a widely used titanium material having a plate thickness of 0.3 to 1 mm is used.

另一方面,在揚聲器的振動板等所使用之板厚度0.2mm以下的薄板和箔,係比廣泛應用的材料薄且加工性較差。因此,即便應用上述專利文獻1~3所記載之技術,亦有產生加工不良之問題。 On the other hand, a thin plate and a foil having a plate thickness of 0.2 mm or less used in a diaphragm of a speaker or the like are thinner than a widely used material and have poor workability. Therefore, even if the techniques described in the above Patent Documents 1 to 3 are applied, there is a problem that processing defects occur.

針對板厚度0.2mm以下的鈦薄板之加工性,在專利文獻4係揭示一種成形性優異的鈦箔之製造方法。使用該技術時,關於25μm厚的鈦箔,藉由以預定輥軋條件進行輥軋且使結晶粒度成為以ASTM No.計為12~14之方式進行控制,能夠確保良好的艾里遜值(Erichsen value)。 In the case of the workability of the titanium thin plate having a plate thickness of 0.2 mm or less, Patent Document 4 discloses a method for producing a titanium foil excellent in moldability. When this technique is used, the 25 μm-thick titanium foil can be controlled by rolling under predetermined rolling conditions and the crystal grain size is controlled to be 14 to 14 in terms of ASTM No., thereby ensuring a good Allison value ( Erichsen value).

但是,在0.2mm厚以下的鈦箔,係被要求成形加工後之良好的形狀保持性。通常藉由使材料強度提升而能夠確保良好的形狀保持性,另一方面,有無法得到良好的加工性之問題。又,雖然接受重大加工的部分係藉由加工硬化使得強度,而能夠得到良好的形狀保持性,但是在加工率較低的部分係形狀保持性變差。 However, a titanium foil having a thickness of 0.2 mm or less is required to have good shape retention after molding. In general, it is possible to ensure good shape retention by increasing the strength of the material, and on the other hand, there is a problem that good workability cannot be obtained. Further, although the portion subjected to the major processing is subjected to work hardening to obtain strength, good shape retainability can be obtained, but the shape retainability is deteriorated in the portion where the work rate is low.

例如專利文獻5係揭示一種技術,其係藉由光輝退火或真空退火使含有鈦的碳化物及/或氮化物之層形成作為內面層之後,實施電解酸洗。該技術係藉由抑制軟質的鈦母材與模具接觸來防止鈦母材黏附在模具之同時,使鈦表面形成加壓時的潤滑性優異之氧化物層者。使用該技術時,能夠避免鈦的碳化物及/或氮化物與模具接觸而能夠防止模具磨耗。 For example, Patent Document 5 discloses a technique in which a layer containing a carbide and/or a nitride containing titanium is formed as an inner surface layer by glow annealing or vacuum annealing, followed by electrolytic pickling. This technique prevents the titanium base material from adhering to the mold by preventing the soft titanium base material from coming into contact with the mold, and forming the titanium surface with an oxide layer excellent in lubricity at the time of pressurization. When this technique is used, it is possible to prevent the carbide and/or nitride of titanium from coming into contact with the mold and preventing the mold from being worn.

但是0.2mm厚以下的鈦箔,係較少進行如專利文獻5所揭示之嚴酷的加工。例如,揚聲器的振動板等的加工係多半施加內壓而成形為圓頂狀,相較於使用通常的薄板加壓之成形,加工中與模具接觸為較少,材料本身的表面潤滑性係不太成為問題。因此,即便應用在專利文獻5所記載的技術,亦無法藉由氧化物的潤滑效果來發揮加工性提升效果。而且,因為在該技術,係進行電解酸洗,應用該技術於0.2mm厚以下的鈦箔材時,其產率的低落係無法忽視。不僅如此,亦有引起板厚度不均勻,致使無法作為製品而出貨之情況。 However, the titanium foil having a thickness of 0.2 mm or less is less severely processed as disclosed in Patent Document 5. For example, the processing of a vibrating plate or the like of a speaker is usually formed into a dome shape by applying an internal pressure, and the contact with the mold during processing is less than the molding using a normal thin plate press, and the surface lubricity of the material itself is not Too much a problem. Therefore, even if the technique described in Patent Document 5 is applied, the workability improving effect cannot be exhibited by the lubricating effect of the oxide. Moreover, since the technique is carried out by electrolytic pickling, and the technique is applied to a titanium foil of 0.2 mm or less, the yield drop is not negligible. Not only that, but also the uneven thickness of the board, which makes it impossible to ship as a product.

先前技術文獻 Prior technical literature 專利文獻 Patent literature

專利文獻1:日本國特許第4605514號公報 Patent Document 1: Japanese Patent No. 4605514

專利文獻2:日本國特開昭63-103043號公報 Patent Document 2: Japanese Patent Laid-Open Publication No. 63-103043

專利文獻3:日本國特許第3228134號公報 Patent Document 3: Japanese Patent No. 3228134

專利文獻4:日本國特許第2616181號公報 Patent Document 4: Japanese Patent No. 2616181

專利文獻5:日本國特開2009-97060號公報 Patent Document 5: Japanese Patent Laid-Open Publication No. 2009-97060

發明概要 Summary of invention

本發明係鑒於此種實際情況而進行,其目的係提供一種鈦薄板,其係板厚度0.2mm以下的鈦薄板,其形狀保持性及加工性優異。 The present invention has been made in view of such circumstances, and an object thereof is to provide a titanium thin plate having a titanium plate having a thickness of 0.2 mm or less, which is excellent in shape retainability and workability.

為了解決上述課題,本發明者等係著眼於鈦箔的表面硬度,考慮表面較硬而內部係相較於表面為軟質時,能夠使形狀保持性及加工性並存,而針對用以使鈦薄板的加工性及表面硬度提升之方法進行研討。 In order to solve the problem, the inventors of the present invention have focused on the surface hardness of the titanium foil, and in consideration of the fact that the surface is hard and the internal phase is softer than the surface, the shape retainability and the workability can be coherent, and the titanium thin plate can be used for the purpose. The method of improving the workability and surface hardness is discussed.

作為鈦薄板的加工性改善之有效的手段,首先所考慮的是減低鐵、氧等的元素。雖然該等元素係製造上不可避免地被帶入之元素,如前面所揭示的專利文獻1~3亦記載,必須限制在預定量以下。 As an effective means for improving the workability of the titanium thin plate, first, it is considered to reduce elements such as iron and oxygen. These elements are elements which are inevitably brought into the manufacture, and are also described in Patent Documents 1 to 3 disclosed above, and must be limited to a predetermined amount or less.

其次,所考慮的是結晶粒的粗大化。藉由粗粒化,能夠容易產生對鈦材料的加工性重要的雙晶變形而能夠改善加工性。因為結晶粒徑係藉由最後的精加工退火步 驟來控制,所以能夠藉由變更退火條件而容易地控制。 Secondly, it is considered that the crystal grains are coarsened. By coarsening, it is possible to easily produce twin crystal deformation which is important for the workability of the titanium material, and it is possible to improve workability. Because the crystal grain size is the final finishing annealing step Since it is controlled, it can be easily controlled by changing annealing conditions.

因此,使用板厚度0.2mm以下的鈦薄板而進行拉伸試驗,來調查伸長率。其結果,即便板厚度在0.2mm以下,亦與通常的知識同樣地,由於將結晶粒微細化,致使伸長率低落。但是,清楚明白板厚度0.2mm以下的鈦薄板時,結晶粒為過度粗大化亦有伸長率低落之情況。又,該現象是否發生係取決於板厚度與粒徑的比,清楚明白係發生於板厚度/粒徑<3之情況。又,板厚度0.3~1mm左右的薄板時,因為粒徑係大致為10~60μm的範圍內,所以因結晶粒粗大化所致之伸長率低落的現象係不產生。 Therefore, a tensile test was performed using a titanium thin plate having a plate thickness of 0.2 mm or less to investigate the elongation. As a result, even if the thickness of the sheet is 0.2 mm or less, as in the conventional knowledge, the crystal grains are made fine, and the elongation is lowered. However, when the titanium thin plate having a plate thickness of 0.2 mm or less is clearly understood, the crystal grains may be excessively coarsened and the elongation may be lowered. Moreover, whether or not this phenomenon occurs depends on the ratio of the thickness of the sheet to the particle diameter, and it is clearly understood that the thickness/particle diameter of the sheet is <3. Further, in the case of a thin plate having a thickness of about 0.3 to 1 mm, since the particle diameter is approximately in the range of 10 to 60 μm, the phenomenon in which the elongation due to coarsening of crystal grains is lowered does not occur.

從該調査結果,藉由依照製品板厚度而在板厚度/粒徑≧3的範圍使結晶粒粗大化,能夠使板厚度0.2mm以下的鈦薄板之加工性最大限度地發揮。 As a result of the investigation, the crystal grain size is coarsened in the range of the plate thickness/particle diameter ≧3 in accordance with the thickness of the product sheet, and the workability of the titanium thin plate having a plate thickness of 0.2 mm or less can be maximized.

在進一步調査之過程,在加壓加工時,有產生許多裂紋之情況,調查其原因時,清楚明白在產生裂紋的部分,其材料表面附近的碳量、氮量為較高。通常,製造板厚度0.2mm以下的薄板時,在冷軋後,係進行用以使其軟化而賦予成形性.加工性之光輝退火(BA=Bright Annealing)。但是在退火前的洗淨線,若是油的除去不充分時,在材料表面殘留許多輥軋油,致使材料在表面附近之碳的侵入量變多。氮係在退火爐的氣體取代時所殘留的氮氣,若是取代不充分時,殘留許多氮致使氮的侵入量變多。 In the course of further investigation, many cracks occurred during press working. When investigating the cause, it is clear that the amount of carbon and the amount of nitrogen in the vicinity of the material surface are higher in the portion where the crack occurs. Usually, when a sheet having a thickness of 0.2 mm or less is produced, after cold rolling, it is softened to impart formability. Processability glow annealing (BA = Bright Annealing). However, if the cleaning line before annealing is insufficient in oil removal, a large amount of rolling oil remains on the surface of the material, so that the amount of carbon intrusion in the vicinity of the surface of the material increases. When the nitrogen gas remaining in the annealing furnace is replaced with a nitrogen gas, if the substitution is insufficient, a large amount of nitrogen remains, which causes a large amount of nitrogen to enter.

所侵入的碳、氮係形成TiC、TiN,因為帶來固熔強化,使得表面硬度變高,即便厚度0.2mm以下之極薄形 狀的鈦薄板,形狀保持性亦變佳。但是,侵入至太深為止時,材料的伸長率係顯著地降低。為了使上述特性(亦即,表面硬度的提升及抑制伸長率的低落)並存,必須將碳、氮、氧的侵入深度設定為距離表面為200nm~2μm的範圍內。亦即,因碳、氮、氧的侵入而形成之硬化層的區域,必須是距離表面為200nm~2μm的範圍。 The invaded carbon and nitrogen form TiC and TiN, and the surface hardness is increased because of the solid solution strengthening, even if the thickness is 0.2 mm or less. The shape of the titanium sheet is also improved in shape retention. However, when the intrusion is too deep, the elongation of the material is remarkably lowered. In order to coexist the above characteristics (that is, the increase in surface hardness and the decrease in elongation inhibition), it is necessary to set the penetration depth of carbon, nitrogen, and oxygen to be in the range of 200 nm to 2 μm from the surface. That is, the region of the hardened layer formed by the intrusion of carbon, nitrogen, and oxygen must be in the range of 200 nm to 2 μm from the surface.

本發明係基於上述研討的知識而進行且將下述之加工性優異的高強度鈦薄板設為要旨。 The present invention has been made based on the knowledge of the above-described studies and has a high-strength titanium thin plate having excellent workability described below.

亦即,一種鈦薄板,係板厚度為0.2mm以下者;其主體的Fe為0.1mass%以下,O(氧)為0.1mass%以下;其滿足板厚度(mm)/粒徑(mm)≧3且粒徑≧2.5μm;且於表面具有硬化層,前述硬化層的區域係距離表面深度為200nm以上且2μm以下。 That is, a titanium thin plate having a thickness of 0.2 mm or less; a main body having Fe of 0.1 mass% or less and an O (oxygen) of 0.1 mass% or less; which satisfies the plate thickness (mm) / particle diameter (mm) ≧ 3 and having a particle diameter of μ2.5 μm; and having a hardened layer on the surface, and the region of the hardened layer has a depth from the surface of 200 nm or more and 2 μm or less.

本發明的鈦薄板係在冷軋後,因為藉由BAF(分批熱處理)或連續退火而在500℃以上且850℃以下施行精加工退火(光輝退火)時,能夠確保穩定的加工性,乃是較佳。 The titanium thin plate of the present invention can ensure stable processability by performing finish annealing (glow annealing) at 500 ° C or higher and 850 ° C or lower by BAF (batch heat treatment) or continuous annealing after cold rolling. It is better.

在此所稱「鈦薄板」,係指在JISH4600所規定的工業用純鈦且板厚度為0.2mm以下的薄板或箔。 The term "titanium sheet" as used herein refers to a sheet or foil having a pure titanium for industrial use specified in JISH 4600 and having a sheet thickness of 0.2 mm or less.

前述所謂「粒徑」,依意味著藉由在JISH0501所規定的求積分法(quadrature)所求取之平均粒徑。亦有強調其而記載為「平均粒徑」之情形。 The above-mentioned "particle diameter" means the average particle diameter obtained by the quadrature method defined by JISH0501. It is also emphasized that it is described as "average particle size".

又,所謂「硬化層」,係指藉由源自退火時在表面所殘留的輥軋油之碳和氮、氧、在退火爐的氣體環境所含有的氮及氧氣,而形成之氧、氮、碳的濃化層。 In addition, the term "hardened layer" refers to oxygen and nitrogen formed by carbon and nitrogen, oxygen, and nitrogen and oxygen contained in a gas atmosphere of an annealing furnace, which are derived from the surface of the rolling oil remaining on the surface during annealing. , a concentrated layer of carbon.

本發明的鈦薄板,係板厚度為0.2mm以下之被賦予優異的加工性及高表面硬度之鈦薄板,且係能夠適合使用在例如以音響構件(揚聲器振動板等)為首之各式各樣的用途之鈦薄板(箔)。 The titanium thin plate of the present invention has a thickness of 0.2 mm or less and a titanium thin plate which is excellent in workability and high surface hardness, and is suitable for use in various types including acoustic members (speaker vibrating plates, etc.). Titanium sheet (foil) for the purpose of use.

圖1係例示在鈦薄板的拉伸試驗中結晶粒徑與伸長率的關係之圖。 Fig. 1 is a graph showing the relationship between crystal grain size and elongation in a tensile test of a titanium thin plate.

圖2係例示在厚度25μm的鈦薄板(箔)的拉伸試驗中應力與應變的關係之圖。 Fig. 2 is a graph showing the relationship between stress and strain in a tensile test of a titanium thin plate (foil) having a thickness of 25 μm.

圖3係例示在鈦薄板的拉伸試驗中板厚度/粒徑與伸長率的關係之圖。 Fig. 3 is a graph showing the relationship between the sheet thickness/particle diameter and the elongation in the tensile test of the titanium sheet.

圖4係例示鈦薄板之硬化層厚度與表面硬度的關係之圖。 Fig. 4 is a view showing the relationship between the thickness of the hardened layer of the titanium thin plate and the surface hardness.

圖5係例示關於厚度100μm、板厚度/粒徑≧3的鈦薄板之硬化層厚度與伸長率的關係之圖。 Fig. 5 is a graph showing the relationship between the thickness of the hardened layer and the elongation of the titanium thin plate having a thickness of 100 μm and a sheet thickness/particle diameter of ≧3.

用以實施發明之形態 Form for implementing the invention

本發明的鈦薄板係如前述,係板厚度為0.2mm以下的鈦薄板,其主體的Fe為0.1mass%以下,O(氧)為0.1mass%以下;其滿足板厚度(mm)/粒徑(mm)≧3且粒徑≧2.5μm;且於表面具有硬化層,前述硬化層的區域係距離表面深度為200nm以上且2μm以下。 The titanium thin plate of the present invention is a titanium thin plate having a thickness of 0.2 mm or less as described above, and the main body has Fe of 0.1 mass% or less and O (oxygen) of 0.1 mass% or less; and the sheet thickness (mm)/particle diameter is satisfied. (mm) ≧3 and a particle diameter of μ2.5 μm; and having a hardened layer on the surface, and the region of the hardened layer has a depth from the surface of 200 nm or more and 2 μm or less.

在本發明,將板厚度為0.2mm以下的鈦薄板設作 對象,係為了提供一種例如揚聲器振動板等亦能夠適合使用之加工性優異的高強度鈦薄板。 In the present invention, a titanium thin plate having a plate thickness of 0.2 mm or less is used as The object is to provide a high-strength titanium thin plate which is excellent in workability, such as a speaker diaphragm or the like.

在本發明的鈦薄板,規定主體的Fe為0.1mass%以下係基於以下的理由。亦即,Fe係使β相安定化之元素,β相存在時,在退火中結晶粒的成長係被β相阻礙。因為含量大於0.1mass%時,其作用係變為顯著,所以Fe的含量係設為0.1mass%以下。下限係沒有特別限定,但是因為工業上製造時,Fe的混入係無法避免而含有0.01mass%以上,所以將較佳下限設為0.01mass%。 In the titanium thin plate of the present invention, the Fe of the predetermined main body is 0.1 mass% or less for the following reasons. That is, Fe is an element which stabilizes the β phase, and when the β phase exists, the growth of the crystal grain during annealing is hindered by the β phase. Since the content is more remarkable when the content is more than 0.1 mass%, the content of Fe is set to 0.1 mass% or less. The lower limit is not particularly limited. However, since industrially, the incorporation of Fe is unavoidable and contains 0.01 mass% or more. Therefore, the preferred lower limit is made 0.01 yen%.

又,規定主體的O(氧)為0.1mass%以下,係為了抑制加工性降低。雖然藉由添加O,鈦薄板係高強度化,但是加工性降低,含量大於0.1mass%時其傾向變為顯著。因此,O的含量係設為0.1mass%以下。下限係沒有特別限定,因為O亦與Fe同樣地,在工業上製造時混入係無法避免,所以將較佳下限設為0.01mass%。 Further, the O (oxygen) of the main body is set to be 0.1 mass% or less in order to suppress the decrease in workability. Although the titanium thin plate is increased in strength by the addition of O, the workability is lowered, and the tendency becomes remarkable when the content is more than 0.1 mass%. Therefore, the content of O is set to be 0.1 mass% or less. The lower limit is not particularly limited, and since O is similar to Fe, it is unavoidable in industrial production, and therefore the preferred lower limit is made 0.01 yen%.

又,所謂主體,係意味著將在鈦薄板的表面所形成之硬化層除去後之內部。在本發明,在主體之Fe濃度為0.1mass%以下,O濃度為0.1mass%以下。 Moreover, the term "main body" means the inside of the hardened layer formed on the surface of the titanium thin plate. In the present invention, the Fe concentration in the main body is 0.1 mass% or less, and the O concentration is 0.1 mass% or less.

在本發明的鈦薄板,設為必須滿足粒徑≧2.5μm,係因為如圖1所顯示,粒徑小於2.5μm時,伸長率係大幅度地低落且加工性低落。 In the titanium thin plate of the present invention, it is necessary to satisfy the particle diameter ≧2.5 μm because, as shown in Fig. 1, when the particle diameter is less than 2.5 μm, the elongation is drastically lowered and the workability is lowered.

圖1係例示在鈦薄板的拉伸試驗中結晶粒徑與伸長率的關係之圖。如同圖所顯示,結晶粒徑小於2.5μm時,即便不存在未再結晶粒,因為過度高強度化,伸長率亦大 幅度地低落。 Fig. 1 is a graph showing the relationship between crystal grain size and elongation in a tensile test of a titanium thin plate. As shown in the figure, when the crystal grain size is less than 2.5 μm, even if there is no non-recrystallized grain, the elongation is large because of excessively high strength. The amplitude is low.

在本發明的鈦薄板,設為必須滿足板厚度(mm)/粒徑(mm)≧3(以下,亦將「板厚度(mm)/粒徑(mm)」只記載為「板厚度/粒徑」),係基於以下的理由。 In the titanium thin plate of the present invention, it is necessary to satisfy the plate thickness (mm) / particle diameter (mm) ≧ 3 (hereinafter, "plate thickness (mm) / particle diameter (mm)" is also described only as "plate thickness / grain" The path is based on the following reasons.

圖2係例示在厚度25μm的鈦薄板(箔)的拉伸試驗中應力與應變的關係之圖。在同圖,「粒徑:5.3μm」及「粒徑:12.3μm」係針對各自平均粒徑為5.3μm及12.3μm的試片之測定結果。 Fig. 2 is a graph showing the relationship between stress and strain in a tensile test of a titanium thin plate (foil) having a thickness of 25 μm. In the same figure, "particle diameter: 5.3 μm" and "particle diameter: 12.3 μm" are measurement results for test pieces each having an average particle diameter of 5.3 μm and 12.3 μm.

如圖2所顯示,在任一試片均是經過均勻伸長的狀態之後,開始局部變形且達到斷裂。局部變形量係較小,而均勻變形量亦即均勻伸長係加工性的指標,其低落係表示加工性低落。 As shown in Fig. 2, after any of the test pieces was uniformly elongated, local deformation was started and fracture was reached. The amount of local deformation is small, and the amount of uniform deformation is an index of the workability of the uniform elongation system, and the low system indicates that the workability is low.

在多結晶材料的變形,1個晶粒變形時,因其周圍的結晶粒之變形而產生緩和。但是,對於板厚度方向之結晶粒為較少之情況,1個結晶粒對於變形之貢獻變大,因為藉由特定結晶粒進行變形,局部變形係早期開始進行。圖2係顯示該狀態。 In the deformation of the polycrystalline material, when one crystal grain is deformed, the deformation of the crystal grains around it is moderated. However, in the case where the number of crystal grains in the thickness direction of the sheet is small, the contribution of one crystal grain to the deformation becomes large, and since the deformation is performed by the specific crystal grain, the local deformation system starts early. Figure 2 shows this state.

因此,藉由在板厚度方向所存在之結晶粒的數目、亦即板厚度/粒徑之比,而決定藉由粗粒化能夠改善加工性之平均結晶粒徑範圍的上限。 Therefore, the upper limit of the average crystal grain size range in which workability can be improved by coarse granulation is determined by the ratio of the number of crystal grains present in the thickness direction of the sheet, that is, the sheet thickness/particle diameter.

圖3係例示在鈦薄板的拉伸試驗中板厚度/粒徑與伸長率的關係之圖。如圖3所顯示,從板厚度25μm至150μm的任一者,均是伸長率在板厚度/粒徑=3附近為顯著地低落,得知必須滿足板厚度(mm)/粒徑(mm)≧3。 Fig. 3 is a graph showing the relationship between the sheet thickness/particle diameter and the elongation in the tensile test of the titanium sheet. As shown in Fig. 3, from either of the plate thicknesses of 25 μm to 150 μm, the elongation was significantly lowered near the plate thickness/particle diameter = 3, and it was found that the plate thickness (mm) / particle diameter (mm) must be satisfied. ≧ 3.

而且,在本發明的鈦薄板,距離表面深度為200nm以上且2μm以下的區域具有硬化層係必要的。換言之,在表面附近必須具有200nm~2μm的厚度之硬化層。 Further, in the titanium thin plate of the present invention, a region having a depth of 200 nm or more and 2 μm or less is required to have a hardened layer. In other words, it is necessary to have a hardened layer having a thickness of 200 nm to 2 μm in the vicinity of the surface.

硬化層係藉由源自退火時在表面所殘留的輥軋油之碳和氮、氧、在退火爐的氣體環境所含有的氮及氧氣,而形成之氧、氮、碳的濃化層,其係含有氧0.5mass%以上之區域,含有氮0.5mass%以上之區域,含有碳0.5mass%以上之區域,或含有將氧、氮及碳合計為0.5mass%以上之區域。又,硬化層的厚度係能夠使用GDS(輝光放電發光分析裝置)來測定。 The hardened layer is a concentrated layer of oxygen, nitrogen, and carbon formed by carbon and nitrogen, oxygen derived from the rolling oil remaining on the surface during annealing, and nitrogen and oxygen contained in the gas atmosphere of the annealing furnace. It contains a region of 0.5 mass% or more of oxygen, a region containing 0.5 mass% or more of nitrogen, a region containing 0.5 mass% or more of carbon, or a region containing 0.5 mass% or more of oxygen, nitrogen, and carbon. Further, the thickness of the hardened layer can be measured using a GDS (Glow Discharge Luminescence Analyzer).

圖4係例示鈦薄板之硬化層厚度與表面硬度的關係之圖。如圖4所顯示、硬化層厚度越,厚表面硬度變為越高。硬化層的厚度比200nm更薄時,係與在材料剖面所測定的材料硬度(在圖4中顯示)相同程度,而無法觀察到硬度増加。又,表面硬度的増加不充分時,形狀保持性差。因此,硬化層的厚度係設為200nm以上。 Fig. 4 is a view showing the relationship between the thickness of the hardened layer of the titanium thin plate and the surface hardness. As shown in Fig. 4, the thicker the hardened layer, the higher the surface hardness becomes. When the thickness of the hardened layer is thinner than 200 nm, it is the same as the hardness of the material measured in the cross section of the material (shown in Fig. 4), and hardness increase cannot be observed. Further, when the surface hardness is insufficiently increased, the shape retention property is poor. Therefore, the thickness of the hardened layer is set to 200 nm or more.

圖5係例示關於厚度100μm、板厚度/粒徑≧3的鈦薄板之硬化層厚度與伸長率的關係之圖。如圖5所顯示,因為即便板厚度/粒徑≧3,硬化層厚度太厚時,伸長率低落而與加工性的低落有關聯,所以硬化層厚度係設為2000nm(2μm)以下。 Fig. 5 is a graph showing the relationship between the thickness of the hardened layer and the elongation of the titanium thin plate having a thickness of 100 μm and a sheet thickness/particle diameter of ≧3. As shown in Fig. 5, even if the thickness of the hardened layer is too thick even if the thickness of the hardened layer is ≧3, the elongation is low and the workability is lowered. Therefore, the thickness of the hardened layer is set to be 2000 nm (2 μm) or less.

本發明的鈦薄板,因在冷軋後藉由BAF或連續退火在500℃以上且850℃以下施行有精加工退火,而能夠確保穩定的加工性,乃是較佳。 The titanium thin plate of the present invention is preferably subjected to finishing annealing at 500 ° C or higher and 850 ° C or lower by BAF or continuous annealing after cold rolling to ensure stable workability.

退火溫度為較低時,未再結晶粒殘留且加工性低落。因為本發明的鈦薄板之再結晶溫度為500℃,所以精加工退火係在500℃以上進行。又,為了設為容易得到優異的強度及延展性(伸長率)的平衡之等軸組織,所以設為850℃以下。雖然在通常的操作,亦能夠依照退火處理的目的而進行操作,但是藉由在上述較佳溫度條件下進行精加工退火,能夠穩定地確保加工性。 When the annealing temperature is low, the recrystallized grains remain and the workability is low. Since the recrystallization temperature of the titanium thin plate of the present invention is 500 ° C, the finish annealing is performed at 500 ° C or higher. Moreover, in order to provide an equiaxed structure in which the balance of excellent strength and ductility (elongation) is easily obtained, it is set to 850 ° C or less. Although the operation can be performed in accordance with the purpose of the annealing treatment in the usual operation, the workability can be stably ensured by performing the finish annealing under the above-described preferable temperature conditions.

硬化層的厚度,係例如能夠藉由在冷軋後通常進行的洗淨步驟使輥軋油的殘留量變化;使光輝退火爐的殘留氮和氧量變化而使其成為目標厚度。 The thickness of the hardened layer can be changed, for example, by the washing step which is usually performed after cold rolling, and the residual nitrogen and oxygen amount of the bright annealing furnace are changed to have a target thickness.

[實施例] [Examples]

為了確保本發明的效果而進行以下的試驗。 The following tests were carried out in order to secure the effects of the present invention.

首先,針對在JISH4600所規定的1種純鈦(厚度0.5mm),經過冷軋及中間退火而製造25μm~150μm厚的冷軋板。接著,藉由在Ar環境(露點≦-40℃)中改變條件而進行精加工退火,使結晶粒徑各種變化。又,藉由在板的表面殘留的輥軋油、退火爐的氣體環境,在板的表面使氧、氮、碳的任一者濃化而形成硬化層。硬化層的厚度(深度)係使輥軋油的殘留量和光輝退火時之環境中的氮量及氧量變化而調整。 First, a cold-rolled sheet having a thickness of 25 μm to 150 μm was produced by cold rolling and intermediate annealing for one type of pure titanium (thickness: 0.5 mm) prescribed in JISH4600. Next, finishing annealing was performed by changing the conditions in the Ar environment (dew point ≦ -40 ° C) to change the crystal grain size. Moreover, any of oxygen, nitrogen, and carbon is concentrated on the surface of the plate by the rolling oil remaining on the surface of the plate or the atmosphere of the annealing furnace to form a hardened layer. The thickness (depth) of the hardened layer is adjusted by changing the residual amount of the rolling oil and the amount of nitrogen and oxygen in the environment during the annealing.

將該等精加工退火後的各冷軋板(各試片)加工成為平行部寬度6.25mm、平行部長度50mm的試片之後,進行拉伸試驗。又,針對各試片,測定板厚度、結晶粒徑、表面硬度及硬化層的厚度。將在實施例所使用的各試片之 Fe濃度(主體mass%)、O濃度(主體mass%)之各測定結果彙總而顯示在表1。 Each of the cold-rolled sheets (each test piece) subjected to the finishing annealing was processed into a test piece having a parallel portion width of 6.25 mm and a parallel portion length of 50 mm, and then subjected to a tensile test. Further, the thickness of the plate, the crystal grain size, the surface hardness, and the thickness of the hardened layer were measured for each test piece. Will be used in each test piece used in the examples. The measurement results of the Fe concentration (main body mass%) and the O concentration (main body mass%) are collectively shown in Table 1.

拉伸試驗係在與輥軋方向平行的方向(L方向),將應變速度,至0.2%屈服強度為止設為0.5%/min,隨後,至斷裂為止設為20%/min且以室溫條件進行。 The tensile test was set to 0.5%/min in the direction parallel to the rolling direction (L direction), and the strain rate was set to 0.2% yield strength, and then set to 20%/min until the break and at room temperature. get on.

結晶粒徑係針對試料表面之40,000μm2以上的區域,使用求積分法進行正方形近似而求取。 The crystal grain size is obtained by performing square approximation using an integration method for a region of 40,000 μm 2 or more on the surface of the sample.

表面硬度係使用維氏硬度計,以荷重0.245N(25gf)將維氏壓頭壓入試料表面且以10點的平均值進行評價。 The surface hardness was measured by using a Vickers hardness tester, and the Vickers indenter was pressed into the surface of the sample at a load of 0.245 N (25 gf) and evaluated at an average value of 10 points.

硬化層的厚度,係使用GDS在試料表面之直徑4mm的區域,藉由Ar離子濺鍍器進行氧、氮、碳、鈦、鐵的深度方向分析,而且設為氧、氮及碳之中的任一者的濃度、或該等的合計濃度成為0.5mass%以上之厚度。進行定量化時,係將各測定值各自如以下進行,關於氧係使用氧化鋅(含有19.8mass%氧),關於氮係使用沃斯田鐵系不鏽鋼(含有0.3mass%氮),關於碳係使用鈦合金(含有0.12mass%碳)來進行校正,藉由使其對應在純鈦(JIS1種)之測定部位(深度),來進行各元素的深度方向分析。 The thickness of the hardened layer is analyzed by using the GDS in the region of 4 mm in diameter on the surface of the sample, and the depth direction of oxygen, nitrogen, carbon, titanium, and iron is analyzed by an Ar ion sputter, and is set to be among oxygen, nitrogen, and carbon. The concentration of either of them or the total concentration of these is 0.5 mass% or more. In the case of quantification, each of the measured values is carried out as follows. Zinc oxide (containing 19.8 mass% of oxygen) is used for the oxygen system, and Worthite iron-based stainless steel (containing 0.3 mass% of nitrogen) is used for the nitrogen system. The titanium alloy (containing 0.12 mass% carbon) was used for the correction, and the depth direction analysis of each element was performed by corresponding to the measurement site (depth) of pure titanium (JIS type 1).

在表1,因為依照板厚度和Fe、O的含量(主體濃度)而鈦材的特性值產生變化,該等係在大致同樣的條件下各自進行比較。又,即便板厚度和Fe、O的含量為同樣,因為受到粒徑的影響,所以考慮粒徑而進行。又,形狀保持性,因為有由於在加工量小的部分變形致使形狀變形之問題,能夠藉由在各自的板壓之0.2%屈服強度的大小來評價。 In Table 1, since the characteristic values of the titanium materials vary depending on the thickness of the sheet and the contents of Fe and O (main body concentration), the respective ones are compared under substantially the same conditions. Moreover, even if the plate thickness and the content of Fe and O are the same, since it is influenced by the particle diameter, it is carried out in consideration of the particle diameter. Further, the shape retainability is evaluated by the fact that the shape is deformed due to the deformation of the portion having a small amount of processing, and can be evaluated by the magnitude of the 0.2% proof stress of the respective plate pressures.

比較例1及比較例4,係任一者殘留有未再結晶粒 時,伸長率為顯著地較低。 In Comparative Example 1 and Comparative Example 4, any of the unrecrystallized grains remained. The elongation is significantly lower.

比較例2、3、5、6、11、12、16、17係任一者(板厚度/粒徑)<3時,伸長率為顯著地較低。特別是比較例17係相較於本發明例18~23,伸長率為較低。 In any of Comparative Examples 2, 3, 5, 6, 11, 12, 16, and 17 (sheet thickness/particle diameter) <3, the elongation was remarkably low. In particular, Comparative Example 17 has a lower elongation than Comparative Examples 18 to 23 of the present invention.

比較例7及比較例13係任一者結晶粒徑為太微細時(小於2.5μm),伸長率為較低。 In any of Comparative Example 7 and Comparative Example 13, when the crystal grain size was too fine (less than 2.5 μm), the elongation was low.

比較例8、10、12之硬化層的厚度,相較於在本發明所規定的厚度(200nm以上且2μm以下)為較大時,伸長率為較低。特別是因為比較例12之板厚度/粒徑小於3且硬化層亦較厚,所以相較於本發明例11~17,伸長率為較低。因為比較例16係板厚度/粒徑小於3且硬化層亦較厚,所以相較於本發明例18~23,伸長率為較低。 The thickness of the hardened layer of Comparative Examples 8, 10, and 12 was lower than that of the thickness (200 nm or more and 2 μm or less) specified in the present invention. In particular, since the thickness/particle diameter of the comparative example 12 was less than 3 and the hardened layer was also thick, the elongation was lower than that of the inventive examples 11 to 17. Since Comparative Example 16 had a plate thickness/particle diameter of less than 3 and a hardened layer was also thick, the elongation was lower than that of Inventive Examples 18 to 23.

比較例9、14、15係硬化層的厚度為較薄(小於200nm),0.2%屈服強度為較低且形狀保持性不佳。特別是比較例14,相較於粒徑為大致相同之本發明例22,屈服強度為顯著地較低。比較例15係相較於粒徑為大致相同之本發明例23,屈服強度為顯著地較低。 The thicknesses of the hardened layers of Comparative Examples 9, 14, and 15 were thin (less than 200 nm), the 0.2% proof stress was low, and the shape retention was poor. In particular, in Comparative Example 14, the yield strength was remarkably low as compared with Example 22 of the present invention having substantially the same particle diameter. Comparative Example 15 showed that the yield strength was remarkably lower than that of Inventive Example 23, in which the particle diameter was substantially the same.

以相同板厚度彙總時,如以下。 When summarized in the same plate thickness, as below.

「關於25μm材」 "About 25μm material"

因為比較例1係未再結晶組織,所以伸長率為較低。 Since Comparative Example 1 was not recrystallized, the elongation was low.

比較例2、3之板厚度/粒徑為小於3,相較於本發明例1~5,伸長率、屈服強度、拉伸強度為較低。 The thicknesses/particle diameters of the sheets of Comparative Examples 2 and 3 were less than 3, and the elongation, yield strength, and tensile strength were lower than those of Examples 1 to 5 of the present invention.

「關於50μm材」 "About 50μm material"

因比較例4係未再結晶組織,所以伸長率為較低。 Since Comparative Example 4 was not recrystallized, the elongation was low.

比較例5、6之板厚度/粒徑為小於3,相較於本發明例6~10,伸長率、屈服強度、拉伸強度為較低。 The thicknesses/particle diameters of the sheets of Comparative Examples 5 and 6 were less than 3, and the elongation, yield strength, and tensile strength were lower than those of Examples 6 to 10 of the present invention.

「關於100μm材」 "About 100μm"

比較例7係過度細粒化,致使伸長率為較低。 Comparative Example 7 was excessively finely granulated, resulting in a low elongation.

雖然比較例8係滿足板厚度/粒徑≧3,但是硬化層為較厚,伸長率為較低。 Although Comparative Example 8 satisfied the sheet thickness/particle diameter ≧3, the hardened layer was thick and the elongation was low.

比較例9係硬化層為較薄,相較於粒徑為大致相同之本發明例17,屈服強度為顯著地較低。 In Comparative Example 9, the hardened layer was thin, and the yield strength was remarkably low as compared with Example 17 of the present invention having substantially the same particle diameter.

比較例10係硬化層為較厚,相較於本發明例11~17,伸長率為較低。 In Comparative Example 10, the hardened layer was thick, and the elongation was lower than in Examples 11 to 17 of the present invention.

比較例11係板厚度/粒徑為小於3,相較於本發明例11~17,伸長率為較低。 In Comparative Example 11, the thickness/particle diameter of the base plate was less than 3, and the elongation was lower than that of Examples 11 to 17 of the present invention.

因為比較例12係板厚度/粒徑為小於3,且硬化層亦較厚,相較於本發明例11~17,伸長率為較低。 Since Comparative Example 12 had a plate thickness/particle diameter of less than 3 and a hardened layer was also thick, the elongation was lower than that of Examples 11 to 17 of the present invention.

「關於150μm材」 "About 150μm"

比較例13係過度細粒化,致使伸長率為較低。 Comparative Example 13 was excessively finely granulated, resulting in a low elongation.

比較例14係硬化層為較薄,相較於粒徑為大致相同之本發明例22,屈服強度為顯著地較低。 In Comparative Example 14, the hardened layer was thin, and the yield strength was remarkably low as compared with Example 22 of the present invention having substantially the same particle diameter.

比較例15係硬化層為較薄,相較於粒徑為大致相同之本發明例23,屈服強度為顯著地較低。 In Comparative Example 15, the hardened layer was thin, and the yield strength was remarkably low as compared with Example 23 of the present invention having substantially the same particle diameter.

因為比較例16係板厚度/粒徑為小於3,且硬化層亦較厚,相較於本發明例18~23,伸長率為較低。 Since Comparative Example 16 had a plate thickness/particle diameter of less than 3 and a hardened layer was also thick, the elongation was lower than that of Inventive Examples 18 to 23.

比較例17係板厚度/粒徑為小於3,相較於本發明例18~23,伸長率為較低。 Comparative Example 17 had a plate thickness/particle diameter of less than 3, and the elongation was lower than that of Examples 18 to 23 of the present invention.

相對於此、本發明例1~23係任一者均滿足在本發明所規定的條件之情況,顯示高伸長率及表面硬度。 On the other hand, any of Examples 1 to 23 of the present invention satisfies the conditions specified in the present invention, and exhibits high elongation and surface hardness.

產業上之可利用性 Industrial availability

本發明的鈦薄板係具備優異的加工性及高表面硬度,能夠利用作為例如揚聲器振動板等民生用品及產業用的材料之廣泛的用途。 The titanium thin plate of the present invention has excellent workability and high surface hardness, and can be used as a wide range of applications such as consumer lighting products such as speaker diaphragms and industrial materials.

Claims (2)

一種鈦薄板,係板厚度為0.2mm以下者;其主體的Fe為0.1mass%以下,O(氧)為0.1mass%以下;其滿足板厚度(mm)/粒徑(mm)≧3且粒徑≧2.5μm;且於表面具有硬化層,前述硬化層的區域係距離表面深度為200nm以上且2μm以下。 A titanium thin plate having a thickness of 0.2 mm or less; a main body having Fe of 0.1 mass% or less and an O (oxygen) of 0.1 mass% or less; which satisfies a plate thickness (mm) / a particle diameter (mm) ≧ 3 and a particle The diameter ≧ is 2.5 μm; and has a hardened layer on the surface, and the region of the hardened layer has a depth from the surface of 200 nm or more and 2 μm or less. 如請求項1之鈦薄板,其在冷軋後,藉由BAF或連續退火在500℃以上且850℃以下施行有精加工退火。 The titanium sheet of claim 1 which, after cold rolling, is subjected to finishing annealing by BAF or continuous annealing at a temperature of 500 ° C or more and 850 ° C or less.
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