TW201400801A - Device and method for detecting mobile micro-articles based on chromatic aberration effect - Google Patents

Abstract

A device for detecting mobile micro-articles based on chromatic aberration effect and a method therefor are provided. The device includes a chromatic aberration lens with a low Abbe number for generating a chromatic aberration beam which passes through an emission lens for observing a mobile micro-article moving within a miniature transportation device. Scattering images of the mobile micro-article will be analyzed by a spectrometer unit and a calculation processing unit to obtain an intensity ratio of short/long wavelength lights in the scattering images. The intensity ratio is then rapidly compared to a predefined linear relationship curve between an axial depth of the mobile micro-article and the intensity ratio of short/long wavelength lights, so as to obtain a depth parameter (and the amount) of the mobile micro-article. Thus, the operation of detecting mobile micro-articles can be accelerated, and the device cost thereof can be lowered.

Description

Device and method for detecting dynamic miniature object by using light dispersion effect

The present invention relates to an apparatus and method for detecting a dynamic miniature object, and more particularly to an apparatus and method for detecting a dynamic miniature object using a light dispersion effect.

Existing optical detection methods are commonly used to detect the number, surface profile or position of various precision micro-components, such as surface defect detection using semiconductor wafers or cell counting of biomedical cytometers.

For example, U.S. Patent No. 7,224,540 discloses a field imaging system using chromatic aberrations that utilizes a plurality of monochromatic light-emitting diode (LED) sources to create an axial source, which is then performed. Dispersion and enhance its depth of field to increase imaging resolution. In addition, U.S. Patent No. 5,785,651 discloses a conjugate focal length microscope for ranging, which uses multi-monochromatic mixed light as a light source on the principle of a conjugate focal microscope, followed by dispersion and a pinhole size. To control the resolution parameters to use the dispersion of light for object depth measurement; the above invention patent also uses the dispersion method for imaging improvement or depth sensing, but since the light is designed in the latter part of the light path, the dispersion element is used. Dispersion, so that the overall optical component group can not be erected based on the existing optical microscope, resulting in an overly complex structure of the overall optical component group and high production cost. Furthermore, the problem of constituting the entire optical component group by the principle of conjugate focal microscope In the conjugated focus microscope, only a single point scan can be performed, which also results in a time-consuming inspection operation.

Therefore, it is necessary to provide a device and method for detecting dynamic micro-objects by using the light dispersion effect to solve the problems of the conventional technology.

The main object of the present invention is to provide an apparatus and method for detecting a dynamic micro object by using a light dispersion effect, which uses a low Abbe number dispersion lens to generate a dispersive beam that passes through an existing microlens group ( The transmitting end objective lens can be used to observe the moving dynamic micro object; and the spectral analysis unit and the arithmetic processing unit are used to analyze the short/long wavelength intensity ratio of the scattered light image of the dynamic micro object, so that the intensity ratio is A linear comparison of the axial depth of the pre-drawn micro-objects with the short/long wavelength intensity ratio is performed for quick comparison analysis to obtain the depth parameters (and quantities) of each dynamic micro object, so it is indeed beneficial to accelerate the detection of dynamic micro Work on objects and reduce the cost of equipment required.

In order to achieve the above object, the present invention provides a device for detecting a dynamic micro object by using a light dispersion effect, comprising: a light source group, providing an axial beam comprising at least a first wavelength light and a second wavelength light; a dispersion lens having a low Abbe number, the axial beam passing through the dispersing lens becomes a dispersive beam; and an emitting end objective lens for focusing the first and second wavelengths of the dispersive beam respectively on the same axial direction Spot position to illuminate a transport device laterally moves through at least one micro object near the two spots, and correspondingly generates at least one scattered light image; a receiving end objective lens for receiving the scattered light image; and a spectral analysis unit for analyzing the scattering An individual intensity of the first and second wavelengths of light in the optical image; and an arithmetic processing unit pre-stored a linear relationship between an axial depth of the micro object and an intensity ratio of the first/second wavelength, And calculating an intensity ratio of the first and second wavelengths of the scattered light image and comparing the linear relationship with the linear relationship to obtain an actual depth parameter of the miniature object.

In one embodiment of the invention, the Abbe number of the dispersive lens is between 45 and 55.

In an embodiment of the invention, the dispersive lens is a lenticular lens made of an acrylic resin, a polycarbonate (PC) or a polyethylene terephthalate (PET). .

In an embodiment of the invention, the wavelength of the first wavelength light ranges from 450 to 460 nanometers (nm); and the wavelength of the second wavelength light ranges from 670 to 680 nanometers.

In an embodiment of the invention, a beam guiding group is further disposed between the dispersing lens and the objective lens of the transmitting end.

In an embodiment of the invention, the beam guiding group comprises: a pinhole baffle having a pinhole, the dispersive beam is focused on the pinhole and passes through the pinhole; a mirror for reflecting the dispersion beam passing through the pinhole; a light field lens, the reflected dispersion beam passing through the light field lens becomes an axially parallel transmission of the dispersion beam; and an optical baffle having at least A slit through which the axially parallel transmitted dispersive light beam passes to change a cross-sectional shape of the dispersive light beam.

In an embodiment of the invention, the slit of the optical baffle is at least one arcuate slit, and the axially parallel transmitted dispersive light beam passes through the arcuate slit to generate at least one curved in the lateral direction. Curved dispersion beam.

In another aspect, the present invention also provides a method for detecting a dynamic miniature object by using a light dispersion effect, comprising the steps of: providing an axial beam comprising at least a first wavelength light and a second wavelength light; The light beam passes through a low Abbe number dispersion lens to become a dispersive light beam; the first and second wavelength lights of the dispersive light beam are respectively focused by two emitters at two different spot positions in the same axial direction to illuminate Moving at least one micro object in the vicinity of the two light spots in a transport device, and correspondingly generating at least one scattered light image; analyzing the individual intensity of the first and second wavelength lights in the scattered light image by using a spectral analysis unit; And calculating, by an operation processing unit, an intensity ratio of the first and second wavelength lights in the scattered light image, and pre-storing the axial depth of the micro object with the operation processing unit and the first/second Wavelength intensity A linear relationship between the ratios is compared to obtain the actual depth parameters of the miniature object.

In an embodiment of the invention, the number of the miniature objects is simultaneously obtained when the actual depth parameter of the miniature object is obtained.

In one embodiment of the invention, the micro-object is selected from the group consisting of bio-particles, semiconductor wafer/wafer surfaces, or other tiny electronic components.

The above and other objects, features and advantages of the present invention will become more <RTIgt; Furthermore, the directional terms mentioned in the present invention, such as "upper", "lower", "before", "after", "left", "right", "inside", "outside" or "side", etc. Just refer to the direction of the additional schema. Therefore, the directional terminology used is for the purpose of illustration and understanding of the invention.

Please refer to FIG. 1 , which illustrates a device for detecting a dynamic micro object using a light dispersion effect according to a preferred embodiment of the present invention. The device can be applied to a cell counting of a flow cytometer, a surface profile of a micro flow channel wafer, and Defect detection, surface profile of semiconductor wafers and defect detection or other dynamic micro-objects detection, the following will be described as an example of a flow cytometer made by MEMS process technology, but its application is not limited to this. . According to the embodiment, the device mainly comprises: a light source group 11, a low Abbe number dispersion lens 12, a beam guiding group 13, a transmitting end objective lens 14, a receiving end objective lens 15, a multimode optical fiber 16, One spectrum The analyzing unit 17 and an arithmetic processing unit 18 are provided. The present invention will be described in detail below with reference to Figures 1 and 2A through 2C in detail to explain the basic construction and functions of the above-described elements of the preferred embodiment.

Referring to FIG. 1, the light source group 11 of the preferred embodiment of the present invention may be selected from a white neon light source having a continuous spectrum or a light source having at least two different long and short wavelength light emitting diodes (LEDs). Group, but not limited to this. In the present embodiment, the light source group 11 is, for example, selected from a white xenon light source that provides white light in the visible wavelength range, that is, a wavelength range of 380 to 760 nanometers (nm). Thereby, the light source group 11 can provide an axial beam 21 which is emitted parallel to each other in the horizontal direction (lateral direction), and the axial beam 21 includes at least a first wavelength light and a second wavelength light, which respectively refer to The short-wavelength light and the long-wavelength light are, for example, a visible blue light and a visible red light. The first wavelength light and the second wavelength light may respectively refer to a specific wavelength range or a specific wavelength value. For example, the wavelength of the first wavelength light may range from 450 to 460 nanometers (nm), and preferably is 450 nanometers, but is not limited thereto; and the wavelength range of the second wavelength light may be It is between 670 and 680 nm, and preferably 670 nm, but is not limited thereto.

Referring to FIG. 1 again, the low Abbe number dispersion lens 12 of the preferred embodiment of the present invention is a lenticular lens and is made of a material having an Abbe number between 45 and 55. For example, a lenticular lens made of an acrylic resin, a polycarbonate (PC) or a polyethylene terephthalate (PET). In this embodiment, the low Abbe number material can be taken from Poly(methyl methacrylate) (PMMA) having an Abbe number of about 52, but is not limited thereto. The low Abbe number dispersion lens 12 functions to pass the axially parallel transmitted axial beam 21 through the dispersing lens 12 to become an axially focused transmitted dispersive beam 22, that is, in the original axial beam 21 If all the beams pass through a lens without dispersion, they should have the same focal position (ie, spot position); but if they pass through the dispersive lens 12, they will be different after being converted into the dispersive beam 22. Wavelength beams (such as first and second wavelengths of light) are scattered to focus on different focal length positions (spot position).

Referring to FIG. 1 again, the beam guiding group 13 of the preferred embodiment of the present invention is disposed between the dispersing lens 12 and the transmitting end objective lens 14 for guiding the traveling direction of the dispersive light beam 22, wherein The beam guiding group 13 includes a pinhole baffle 131, a mirror 132, a light field lens 133 and an optical baffle 134. In this embodiment, the pinhole baffle 131 is a light-tight baffle and has a pinhole 131a, wherein the pinhole 131a has a diameter of between 0.1 and 2 millimeters (mm), for example, 1 mm. . The dispersive light beam 22 from the dispersing lens 12 is focused on the plane of the pinhole 131a due to the lenticular characteristics of the dispersing lens 12, and passes through the pinhole 131a and is radiated onto the mirror 132. By adjusting the size of the pinhole 131a of the pinhole shutter 131, the diameter of the subsequent detection spot can be quickly changed. Furthermore, the mirror 132 is configured to reflect the dispersion beam 22 passing through the pinhole 131a, and the dispersion beam 22 is changed from a horizontal direction (lateral direction) to a vertical direction (longitudinal direction). Towards, and directed downward toward the light field lens 133. The light field lens 133 is a lenticular lens, and the position of the pinhole 131a is located on a focal plane of both the dispersion lens 12 and the light field lens 133. The light field lens 133 is such that the reflected dispersed light beam 22 is changed to a dispersive light beam 22 that is axially transmitted and substantially parallel to each other as it passes through the light field lens 133.

In addition, as shown in FIGS. 2A, 2B, and 2C, the optical baffle 134 is an opaque baffle and has at least one slit 134a. The slit 134a may be a symmetrically arranged arc. A slit, a single curved slit or a pinhole, but is not limited thereto. Based on the different shape design of the slits 134a of FIGS. 2A, 2B, and 2C, the axially parallel transmitted dispersive light beam 22 further passes through the slit 134a to change a cross section of the dispersive light beam 22 in the horizontal direction (lateral direction). The shape is to regulate the optical path when entering the objective lens 14 of the transmitting end. For example, in FIG. 2A, the slit 134a of the optical baffle 134 is a two-arc slit, and the arrangement direction of the two arc-shaped slits is parallel to a conveying device 30 to laterally move the conveying direction of the micro-object 40. (as in the right-to-left direction of Fig. 1), the axially parallel transmitted dispersive beam 22 passes through the two arcuate slits 134a to produce at least one arc-shaped dispersive beam that is curved in the lateral direction (not drawn) Shown, but the arc-shaped dispersive beam maintains the characteristics of axial parallel transmission in the vertical direction (longitudinal direction).

Referring to FIG. 1 again, the transmitting end objective lens 14 of the preferred embodiment of the present invention preferably has a high numerical aperture (NA) microscope objective lens. In the present embodiment, the numerical aperture value (NAvalue) of the transmitting end objective lens 14 is set to be between 0.7 and 1.2, for example, preferably 0.75. The entrance pupil of the transmitting end objective lens 14 is between 10 millimeters (mm) and 20 millimeters, for example, preferably 15 millimeters. Furthermore, the emission end objective lens 14 has a magnification of 4 to 100 times, for example 20 times; its working distance (WD) is 1 mm; and its focal length ( f0 ) is, for example, 10 mm, but Not limited to this. The transmitting end objective lens 14 is configured to convert the axially parallel transmitted arc-shaped dispersive light beam (not shown) into an axially focused transmitted conical dispersion beam 23.

Referring to Figures 1 and 3A, it is assumed that the original dispersion beam 22 is dispersed by white light into a plurality of different wavelengths of color light (for example, red light R, orange light O, yellow light Y, green light G, blue light B, violet light V, etc.) ), these different wavelengths of color light will be respectively focused on several different spot (focal length) positions in the same axial direction. At this time, a distance defined between the uppermost and lowermost spots on the same axial direction can be set as an effective axial detection area 24 (ie, the vicinity of the spot of all color lights), the axial detection The region 24 is exactly corresponding to the lateral movement path of the delivery device 30 for transporting the at least one micro-object 40, so that the plurality of spots of the different wavelengths of color light can be used to illuminate the micro-just moving through an axial position. The object 40, and correspondingly generates at least one scattered light image 25. The micro object 40 may refer to biological particles, semiconductor wafer/wafer surface or other tiny electronic components (such as wafer resistors, etc.), such as cells, biological particles, compounds, microcapsules, liposomes, DNA fragments or protein fragments, etc. In this embodiment, for example, a cell selected from a particle size of between 2 and 200 micrometers (μm) or other The biological particles have a particle diameter of, for example, 2, 5, 10, 20, 30, 50, 70, 80, 100, 125, 150, 175, 200 μm or the like.

Referring to Figures 1, 3A and 3B again, the receiving end objective lens 15 of the preferred embodiment of the present invention has a relatively low numerical aperture which is smaller than the numerical aperture value of the transmitting end objective lens 14, for example, preferably 0.45. The exit pupil of the receiving end objective lens 15 is between 10 millimeters (mm) and 20 millimeters, for example, preferably 15 millimeters. Further, the magnification of the receiving end objective lens 4 is, for example, 20 times, the working distance (WD) is 1 mm, and the focal length ( f0 ) is 10 mm, but is not limited thereto. The receiving end objective lens 15 is configured to receive the scattered light image 25, and the scattered light image 25 can be transmitted to the spectrum analyzing unit 17 via the multimode optical fiber 16 to perform spectral analysis of the scattered light image 25 for analysis and obtaining Each of the color light components (including the first/second wavelength light) carried by the scattered light image 25 generated by the micro object 40 of the axial detection region 24 at different axial positions (+50 μm~-50 μm) Strength value.

As shown in FIG. 3A, according to the difference in the axial position (+50 μm~-50 μm) of the axial detecting region 24 according to the micro object 40 (particle size 20 μm), the colored light of the scattered light image 25 is Ingredients (such as red light R, orange light O, yellow light Y, green light G, blue light B, violet light V, etc.) and the intensity of each color light component are also different. As shown in FIG. 3B, the spectral analysis unit 17 can analyze and obtain the scattered light image 25 generated by the micro object 40 passing through different axial positions (+20 μm~-20 μm) of the axial detection region 24. A graph of the intensity values of all the color components (including the first/second wavelength light) (color wavelength vs standard intensity) Value), wherein the intensity of the first/second wavelength light (450 and 670 nm, respectively) carried by the scattered light image 25 generated by the micro object 40 at different axial positions (+20 μm~-20 μm) The value has a significant intensity difference, so the intensity ratio of the first/second wavelength light can be used as a reference for calculating the axial position (ie, the axial depth) of the micro-object 40.

Referring to Figures 1, 4A, 4B and 4C again, the arithmetic processing unit 18 of the preferred embodiment of the present invention is preferably a computer of a suitable type, such as a desktop computer, a notebook computer, or a server computer. , personal digital assistant (PDA) or tablet. The operation processing unit 18 is configured to pre-record the first/first of the scattered light image 25 generated by the micro object 40 passing through the known axial position (+50 μm~-50 μm) of the axial detection region 24. The intensity value data of the two-wavelength light (450/670 nm) (as shown in FIG. 4A) can then be predefined to determine the axial depth of the micro object 40 and the intensity of the first/second wavelength light. A linear relationship between them (as shown in Figure 4B).

It is to be noted that the linear relationship between the axial depth and the intensity ratio as shown in Fig. 4B is a result obtained in the case where the particle size of the micro object 40 is maintained at a fixed value (20 μm). As shown in Fig. 4C, if the scattered light image 25 of the micro object 40 of different particle sizes (7, 15, 20 μm) is observed, a linear relationship between different axial depths and intensity ratios can be obtained, wherein in Fig. 4C The medium material (air) of the conveying device 30 used in the experiment is different from the material of FIG. 4B (glass), so the linear relationship data of the obtained micro-object 40 having a particle diameter of 20 μm is therefore not matched with the line of FIG. 4B. Sexual relationship data.

Furthermore, referring to FIGS. 5A and 5B, the arithmetic processing unit 18 of the preferred embodiment of the present invention can record each of the miniature objects 40 passing through the axial detection region 24 at each time point during actual operation. The total intensity of the light (as shown in Figure 5A), and then the actual intensity ratio of the first/second wavelength light is analyzed from the total color intensity; subsequently, the actual intensity ratio of the first/second wavelength light is used According to the linear relationship between the axial depth and the intensity ratio shown in FIG. 4B or 4C, the axial position of each of the micro-objects 40 passing through the axial detection region 24 (ie, the axial direction) is calculated correspondingly. Depth) (as shown in Figure 5B). At the same time, the number of miniature objects 40 passing through the axial detection region 24 can also be known from each intensity ratio peak of FIG. 5A.

Therefore, according to the apparatus for detecting a dynamic micro object using the light dispersion effect according to the first to fifth embodiments, the preferred embodiment of the present invention also provides a method for detecting a dynamic micro object by using a light dispersion effect, which comprises the following steps: (S10) providing an axial beam 21 comprising at least a first wavelength light and a second wavelength light; (S20), passing the axial beam 21 through a low Abbe number dispersion lens 12 to become a Dispersing the light beam 22; (S30), focusing the first and second wavelengths of the dispersive light beam 22 on two different spot positions in the same axial direction by a transmitting end objective lens 14 to illuminate a lateral movement in a conveying device 30 Passing at least one micro object 40 in the vicinity of the two spots, and correspondingly generating at least one scattered light Image 25; (S40) analyzing the individual intensity of the first and second wavelength lights in the scattered light image 25 by using a spectral analysis unit 17; and (S50) calculating the scattered light image by an arithmetic processing unit 18 The intensity ratio of the first and second wavelengths of light, and the intensity ratio is a line between the axial depth of the micro object 40 and the intensity ratio of the first/second wavelength stored in advance by the arithmetic processing unit 18. The sexual relationships are compared to obtain the actual depth parameters of the miniature object 40 (and the total number of miniature objects 40 passing through the delivery device 30).

As described above, the field imaging system using the light dispersion and the conjugate focal length microscope for ranging have disadvantages such as a complicated structure, an excessive cost, a single point scanning, and a time-consuming detection, and the present invention of FIG. 1 A dispersion lens 12 having a low Abbe number is used to generate a dispersive beam that can be used to observe moving micro-objects (eg, biological particles) through an existing microlens group (including at least the emitter objective 14). And a semiconductor wafer/wafer surface or other tiny electronic component, etc.; and subsequently cooperate with the spectral analysis unit 17 and the arithmetic processing unit 18 to analyze the intensity ratio of the short/long wavelength in the scattered light image of the dynamic micro object 40, so that the intensity Fast comparison analysis with a linear relationship between the axial depth and the short/long wavelength intensity ratio of a pre-drawn micro object to obtain the depth parameter (and quantity) of each dynamic micro object 40, thus indeed facilitating the acceleration detection Measure dynamic miniature object operations and reduce the cost of equipment required.

Although the present invention has been disclosed in its preferred embodiments, it is not intended to limit the invention, and those skilled in the art, without departing from the invention The scope of the present invention is defined by the scope of the appended claims.

11‧‧‧Light source group

12‧‧‧Dispersion lens

13‧‧‧beam guiding group

131‧‧‧ pinhole baffle

131a‧‧ pinhole

132‧‧‧Mirror

133‧‧‧Light field lens

134‧‧‧ optical baffle

134a‧‧‧slit

14‧‧‧transmitting objective

15‧‧‧ receiving end objective

16‧‧‧Multimode fiber

17‧‧‧Spectral Analysis Unit

18‧‧‧Operation Processing Unit

21‧‧‧Axial beam

22‧‧‧Dispersed light beam

23‧‧‧Cone dispersive beam

24‧‧‧Axial detection area

25‧‧‧scattered light image

30‧‧‧Conveyor

40‧‧‧Micro Objects

Figure 1 is a schematic illustration of an apparatus for detecting dynamic miniature objects using light dispersion effects in accordance with a preferred embodiment of the present invention.

2A, 2B, and 2C are top views of various types of optical baffles in accordance with a preferred embodiment of the present invention.

Figure 3A is a photomicrograph of a scattered light image produced by a miniature object of the preferred embodiment of the present invention through different axial positions (+50 μm - 50 μm) of the axial detection region.

FIG. 3B is a graph showing the intensity values of all the color components of the scattered light image generated by the miniature objects of different axial positions (+20 μm to -20 μm) according to a preferred embodiment of the present invention (color wavelength vs standard intensity value) ).

Fig. 4A is a view showing a first/second wavelength light (450/670 nm) carried by a scattered light image produced by a micro object having a known axial position (+50 μm to 50 μm) according to a preferred embodiment of the present invention. Intensity value graph (axial depth vs intensity value).

Fig. 4B is a graph showing the linear relationship between the axial depth of the micro object (particle size 20 μm) and the intensity ratio of the first/second wavelength light (axial depth v.s. intensity ratio) of the preferred embodiment of the present invention.

Figure 4C: between the axial depth of the miniature object (particle size 7, 15, 20 μm) and the intensity ratio of the first/second wavelength light of the preferred embodiment of the present invention Linear relationship (axial depth v.s. intensity ratio).

Figure 5A: A preferred embodiment of the present invention records a statistical graph (intensity v.s. time) of the total color intensity of each of the miniature objects passing through the axial detection zone at each point in time.

Figure 5B is a graph (axial depth v.s. time) of the axial position of each of the miniature objects in the preferred embodiment of the present invention as it passes through the axial detection region.

11‧‧‧Light source group

12‧‧‧Dispersion lens

13‧‧‧beam guiding group

131‧‧‧ pinhole baffle

131a‧‧ pinhole

132‧‧‧Mirror

133‧‧‧Light field lens

134‧‧‧ optical baffle

14‧‧‧transmitting objective

15‧‧‧ receiving end objective

16‧‧‧Multimode fiber

17‧‧‧Spectral Analysis Unit

18‧‧‧Operation Processing Unit

21‧‧‧Axial beam

22‧‧‧Dispersed light beam

23‧‧‧Cone dispersive beam

24‧‧‧Axial detection area

25‧‧‧scattered light image

30‧‧‧Conveyor

40‧‧‧Micro Objects

Claims (10)

A device for detecting a dynamic micro object by using a light dispersion effect, comprising: a light source group, providing an axial beam, comprising at least a first wavelength light and a second wavelength light; and a low Abbe number dispersion lens, The axial beam passes through the dispersing lens to form a dispersive beam; a transmitting end objective lens is used to focus the first and second wavelengths of the dispersive beam respectively at two different spot positions in the same axial direction to illuminate a conveying device Moving laterally through at least one micro object near the two spots, and correspondingly generating at least one scattered light image; a receiving end objective for receiving the scattered light image; and a spectral analyzing unit for analyzing the scattered light image An individual intensity of the first and second wavelengths of light; and an arithmetic processing unit pre-stored a linear relationship between an axial depth of the micro object and an intensity ratio of the first/second wavelength, and Calculating an intensity ratio of the first and second wavelengths of light in the scattered light image and comparing the linear relationship to the linear relationship to obtain an actual depth parameter of the miniature object. The apparatus for detecting a dynamic micro object using the light dispersion effect according to the first aspect of the patent application, wherein the dispersion lens has an Abbe number of between 45 and 55. A device for detecting a dynamic micro object using a light dispersion effect as described in claim 2, wherein the dispersive lens is made of an acrylic tree A lenticular lens made of grease, polycarbonate or polyethylene terephthalate. The apparatus for detecting a dynamic micro object by using a light dispersion effect according to claim 1, wherein the wavelength of the first wavelength light ranges from 450 to 460 nm; and the wavelength range of the second wavelength light Between 670 and 680 nm. A device for detecting a dynamic micro object by using a light dispersion effect according to the first aspect of the invention, wherein a beam guiding group is further disposed between the dispersing lens and the transmitting end objective lens. The apparatus for detecting a dynamic micro object by using a light dispersion effect according to claim 5, wherein the beam guiding group comprises: a pinhole baffle having a pinhole, wherein the dispersive beam is focused on the pinhole Passing through the pinhole; a mirror for reflecting the dispersive light beam passing through the pinhole; a light field lens, the reflected dispersive light beam passing through the optical field lens to become an axially parallel dispersed dispersive light beam; and an optical The baffle has at least one slit through which the axially parallel transmitted dispersive light beam passes to change a cross-sectional shape of the dispersive light beam. The apparatus for detecting a dynamic micro object by using a light dispersion effect according to claim 6, wherein the slit of the optical baffle is at least one arcuate slit, and the axially parallel transmitted dispersive light beam passes through the arc a slit to produce at least one arc-shaped dispersive beam that is curved in a lateral direction. A method for detecting a dynamic miniature object by using a light dispersion effect, comprising the steps of: providing an axial beam comprising at least a first wavelength light and a second wavelength light; and passing the axial beam through a low Abbe number Dispersing the lens to become a dispersive beam; focusing the first and second wavelengths of the dispersive beam on two different spot positions in the same axial direction by a transmitting end objective lens to illuminate a lateral movement of the conveying device through the At least one micro object in the vicinity of the two light spots, and correspondingly generating at least one scattered light image; analyzing an individual intensity of the first and second wavelength lights in the scattered light image by using a spectral analysis unit; and calculating by an operation processing unit An intensity ratio of the first and second wavelengths of light in the scattered light image, and a line between the axial depth of the micro object and the intensity ratio of the first/second wavelength stored in advance by the arithmetic processing unit The sexual relationships are compared to obtain the actual depth parameters of the miniature object. The method for detecting a dynamic micro object by using a light dispersion effect as described in claim 8 wherein the number of the micro object is simultaneously obtained when the actual depth parameter of the micro object is obtained. A method for detecting a dynamic micro object using a light dispersion effect as described in claim 8 wherein the micro object is selected from the group consisting of a biological particle, a semiconductor wafer/wafer surface, or a tiny electronic component.