TW201346347A - Methods for manufacturing color filter substrate - Google Patents

Abstract

A method for manufacturing a color film substrate including the following steps is provided. A substrate is provided. A first conductive black matrix extending along a first direction is formed on the substrate. A color film layer is formed on the substrate, and the normal projections of the color film layer and the first conductive black matrix on the substrate are not overlapped. A plurality of insulating spacers is formed on the first conductive black matrix, and the height of the insulating spacers is greater than the thickness of the color film layer. A second conductive black matrix extending along a second direction and covering the insulating spacers is formed on the substrate. A passivation layer is formed to cover the first conductive black matrix, the color film layer, the insulating spacers and the second conductive black matrix. A transparent conductive layer is formed on the passivation layer.

Description

Color filter substrate manufacturing method

The present invention relates to a method for fabricating a color filter substrate, and more particularly to a method for fabricating a color filter substrate having a touch function.

In recent years, with the rapid development and application of information technology, wireless mobile communication and information appliances, many information products have been input devices such as traditional keyboards or mice for the purpose of being more convenient, lighter and more humanized. The switch uses a touch panel as an input device, and the touch display device is the most popular product today.

The existing touch panels can be roughly classified into a capacitive type, a resistive type, and a photosensitive type, and a capacitive touch panel is a mainstream product. According to the structure composition, the touch panel can be divided into two types: on-cell type and in-cell type, wherein the integrated/built-in touch panel It can be integrated with the entire panel process (such as the process of color filter substrate) and helps to reduce the thickness of the overall product to meet the trend of thinner and lighter products.

The conventional touch color filter substrate is formed by sequentially forming a lower electrode layer, an insulating layer, an upper electrode layer, a color filter layer, a protective layer, a common electrode layer, and a spacer on the substrate. The lower electrode layer is disposed on the substrate, and the insulating layer is located between the upper electrode layer and the lower electrode layer, wherein the upper electrode layer and the lower electrode layer both serve as a black matrix. The color filter layer includes a plurality of color filter units that are respectively disposed on the substrate and are not disposed to overlap with the lower electrode layer. The protective layer The color filter layer, the upper electrode layer and the lower electrode layer are covered, and the common electrode layer is disposed on the protective layer, and the spacer is disposed on the common electrode layer.

In view of the above, the fabrication of the conventional touch color filter substrate is two more steps than the fabrication of the conventional color filter substrate, that is, the insulating layer for electrically insulating the upper electrode layer from the lower electrode layer is fabricated and fabricated. The steps of the electrode layer, so the process is complicated, and the process yield cannot be ensured. Therefore, how to improve the process of the touch color filter substrate to further reduce the process steps and improve the process yield is a major problem that needs to be overcome in the fabrication technology of the touch color filter substrate.

The invention provides a method for fabricating a color filter substrate, wherein the insulating spacer can also serve as an insulating layer, which can effectively reduce the process steps and reduce the manufacturing cost.

The invention provides a method for fabricating a color filter substrate, which comprises the following steps. A substrate is provided. A first conductive black matrix is formed on the substrate, and the first conductive black matrix extends along a first direction. A color filter layer is formed on the substrate, and the color filter layer does not overlap with the orthographic projection of the first conductive black matrix on the substrate. A plurality of insulating spacers are formed on the first conductive black matrix, and the height of the insulating spacers is greater than the thickness of the color filter layer. Forming a second conductive black matrix on the substrate, wherein the second conductive black matrix extends along a second direction and covers the insulating spacer, and the second direction and the first direction intersect each other. A protective layer is formed to cover the first conductive black matrix, the color filter layer, the insulating spacer, and the second conductive black matrix. Forming a transparent conductive layer to protect On the cover.

The invention further provides a method for fabricating a color filter substrate, comprising the following steps. A substrate is provided. A first conductive black matrix is formed on the substrate, and the first conductive black matrix extends along a first direction. A color filter layer is formed on the substrate, and the color filter layer does not overlap with the orthographic projection of the first conductive black matrix on the substrate. Forming a plurality of first spacers on the first conductive black matrix, and a height of the first spacer plus a thickness of the first conductive black matrix is equal to a thickness of the color filter layer, and a material and a color filter of the first spacer The layers are of the same material. Forming a second conductive black matrix on the substrate, wherein the second conductive black matrix extends along a second direction and covers the first spacer, and the second direction and the first direction intersect each other. A protective layer is formed to cover the first conductive black matrix, the color filter layer, the first spacer, and the second conductive black matrix. A transparent conductive layer is formed on the protective layer. A plurality of second spacers are formed on the transparent conductive layer, and the second spacers overlap with the orthographic projection of the first spacers on the substrate.

In an embodiment of the invention, the first conductive black matrix has a plurality of first strip-shaped conductive patterns, and the first strip-shaped conductive patterns are electrically insulated from each other.

In an embodiment of the invention, the second conductive black matrix has a plurality of second strip-shaped conductive patterns. The second strip-shaped conductive patterns are electrically insulated from each other, and the second strip-shaped conductive patterns vertically intersect the first strip-shaped conductive patterns.

In an embodiment of the invention, the material of the first conductive black matrix and the material of the second conductive black matrix comprise a metal or a semiconductor material.

In an embodiment of the invention, the color filter layer comprises a plurality of A red filter film, a plurality of green filter films, and a plurality of blue filter films.

In an embodiment of the invention, the color filter layer is connected to the first spacer.

In an embodiment of the invention, the color filter layer and the first spacer are not connected to each other.

Based on the above, the color filter substrate of the present invention is formed by sequentially forming a first conductive black matrix, a color filter layer, an insulating spacer, a second conductive black matrix, a protective layer, and a transparent conductive layer on the substrate, wherein the insulating film is insulated. The height of the spacer is greater than the thickness of the color filter layer. Therefore, the insulating spacer can serve as a support to maintain the spacing between the two substrates (ie, the color filter substrate and the opposite substrate), and can also serve as insulation between the first conductive black matrix and the second conductive black matrix. Floor. Therefore, compared with the conventional method for manufacturing the touch color filter substrate, the color filter substrate of the present invention can effectively reduce the manufacturing process and reduce the manufacturing cost.

The above described features and advantages of the present invention will be more apparent from the following description.

1A to 1G are top plan views showing a method of fabricating a color filter substrate according to a first embodiment of the present invention, and FIGS. 2A to 2G(b) are color filters along a line I-I' in FIG. A schematic cross-sectional view of a method of fabricating a substrate. Hereinafter, a method of fabricating the color filter substrate 100 of the present embodiment will be described in detail with reference to FIGS. 1A to 1G and FIGS. 2A to 2G(b).

Referring to FIG. 1A and FIG. 2A, firstly, a substrate 110 is provided, wherein The board 110 is, for example, a glass substrate, but is not limited thereto.

Next, referring to FIG. 1B and FIG. 2B, a first conductive black matrix 120 is formed on the substrate 110, wherein the first conductive black matrix 120 extends along the first direction D1. In the embodiment, the first conductive black matrix 120 has a plurality of first strip-shaped conductive patterns 122, and the first strip-shaped conductive patterns 122 are electrically insulated from each other. In particular, the first conductive black matrix 120 of the present embodiment can provide a good electrical conduction effect in addition to a good light shielding effect. Therefore, the material of the first conductive black matrix 120 is metal, which is, for example, chromium (Cr); or the material of the first conductive black matrix 120 is a semiconductor material, which is, for example, carbon black (C).

Next, referring to FIG. 1C and FIG. 2C , the color filter layer 130 is formed on the substrate 110 , and the color filter layer 130 and the orthographic projection of the first conductive black matrix 120 on the substrate 110 do not overlap. In this embodiment, the color filter layer 130 includes a plurality of red filter films R, a plurality of green filter films G, and a plurality of blue filter films B, wherein the red filter film R, the green filter film G, and The blue filter films B are arranged in a matrix on the substrate 110 and are alternately arranged with the first strip-shaped conductive patterns 122 of the first conductive black matrix 120. Although the pattern shown in FIG. 1C is a color filter film of the same color arranged in a row, the color filter films of different colors are arranged in a line. However, in other embodiments not shown, the color filter films of different colors may be arranged in a row, and the color filter films of the same color are arranged in a row; or the color filter films of different colors are alternately arranged. And columns, here are not limited.

Next, referring to FIG. 1D and FIG. 2D, a plurality of insulating spacers are formed. 140 is on the first conductive black matrix 120. In particular, the insulating spacers 140 of the present embodiment are located on the first conductive black matrix 120, and the height H of the insulating spacers 140 is substantially larger than the thickness T of the color filter layer 130. In addition, the material of the insulating spacer 140 is not electrically conductive, so that the insulating spacer 140 can be directly disposed on the first conductive black matrix 120 having conductivity without causing a short circuit.

Next, referring to FIG. 1E and FIG. 2E, a second conductive black matrix 150 is formed on the substrate 110, wherein the second conductive black matrix 150 extends along the second direction D2 and covers the insulating spacer 140, and the second direction D2 and the second One direction D1 intersects each other. In this embodiment, the second conductive black matrix 150 has a plurality of second strip conductive patterns 152, wherein the second strip conductive patterns 152 are electrically insulated from each other, and the second strip conductive patterns 152 are electrically conductive with the first strips. The patterns 122 intersect substantially perpendicularly. In particular, the second conductive black matrix 150 of the present embodiment can provide a good electrical conduction effect in addition to a good light shielding effect. Therefore, the material of the second conductive black matrix 150 is a metal or a semiconductor material, which may be the same as or different from the material of the first conductive black matrix 120, and is, for example, chromium (Cr) or carbon black (C).

Since the height H of the insulating spacer 140 is greater than the thickness T of the color filter layer 130, the insulating spacer 140 can serve as a support to maintain the color filter substrate 100 and the opposite substrate (not shown) for subsequent applications. In addition, the insulating layer between the first conductive black matrix 120 and the second conductive black matrix 150 can prevent the first conductive black matrix 120 having conductivity from directly contacting the second conductive black matrix 150 to cause a short circuit. .

Next, referring to FIG. 1F and FIG. 2F, a protective layer 160 is formed to cover The first conductive black matrix 120, the color filter layer 130, the insulating spacer 140, and the second conductive black matrix 150.

Finally, referring to FIG. 1G and FIG. 2G( a ), a transparent conductive layer 170 is formed on the protective layer 160 , wherein the transparent conductive layer 170 can be a metal oxide such as Indium Tin Oxide (ITO), indium zinc oxide. Indium Zinc Oxide (IZO), Aluminum Zinc Oxide (AZO) or other suitable transparent conductive material. More specifically, the transparent conductive layer 170 of the present embodiment is disposed on the protective layer 160 on the color filter layer 130 and on the protective layer 160 on the second conductive black matrix 150, as shown in FIG. 2G(a). Of course, in other embodiments of the present invention, the transparent conductive layer 170 may also be disposed only on the protective layer 160 on the color filter layer 130, as shown in FIG. 2G(b), and the invention is not limited thereto.

The color filter substrate 100 of the present embodiment is formed by sequentially forming a first conductive black matrix 120, a color filter layer 130, an insulating spacer 140, a second conductive black matrix 150, a protective layer 160, and the like on the substrate 110. The transparent conductive layer 170, wherein the height H of the insulating spacer 140 is greater than the thickness T of the color filter layer 130. Therefore, the insulating spacer 140 can serve as a support to maintain the spacing between the color filter substrate 100 and the opposite substrate (not shown) of the subsequent application, and can also serve as the first conductive black matrix 120 and the second conductive An insulating layer between the black matrices 150. Therefore, the color filter substrate 100 of the present embodiment can effectively reduce the manufacturing process and reduce the manufacturing cost, compared with the conventional method of manufacturing the touch color filter substrate.

3A to 3H are color filter substrates according to a second embodiment of the present invention; FIG. 4A to FIG. 4H are schematic cross-sectional views showing a method of fabricating a color filter substrate taken along line II-II' in FIG. The method of fabricating the color filter substrate 200 of the present embodiment will be described in detail below with reference to FIGS. 3A to 3H and FIGS. 4A to 4H.

Referring to FIG. 3A and FIG. 4A , first, a substrate 210 is provided, wherein the substrate 210 is, for example, a glass substrate, but is not limited thereto.

Next, referring to FIG. 3B and FIG. 4B, a first conductive black matrix 220 is formed on the substrate 210, wherein the first conductive black matrix 220 extends along the first direction D1'. In the embodiment, the first conductive black matrix 220 has a plurality of first strip-shaped conductive patterns 222, and the first strip-shaped conductive patterns 222 are electrically insulated from each other. In particular, the first conductive black matrix 220 of the present embodiment can provide a good conductive effect in addition to a good light blocking effect. Therefore, the material of the first conductive black matrix 220 is metal, which is, for example, chromium (Cr); or the material of the first conductive black matrix 220 is a semiconductor material, which is, for example, carbon black (C).

Next, referring to FIG. 3C and FIG. 4C, the color filter layer 230 is formed on the substrate 210, and the color filter layer 230 and the orthographic projection of the first conductive black matrix 220 on the substrate 210 do not overlap. In this embodiment, the color filter layer 230 includes a plurality of red filter films R, a plurality of green filter films G, and a plurality of blue filter films B, wherein the red filter film R, the green filter film G, and The blue filter films B are arranged in a matrix on the substrate 210 and are alternately arranged with the first strip-shaped conductive patterns 222 of the first conductive black matrix 220. Although the pattern shown in FIG. 3C is a color filter film of the same color arranged in a row, the color filter films of different colors are arranged in a line. However, in other embodiments not shown, color filter films of different colors may also be used. The color filter films of the same color are arranged in a row; or the color filter films of different colors are alternately arranged in rows and columns, which are not limited herein.

Next, referring to FIG. 3D(a) and FIG. 4D(a), a plurality of first spacers 240 are formed on the first conductive black matrix 220. In particular, the first spacer 240 of the embodiment is located on the first conductive black matrix 220, and the material of the first spacer 240 is the same as the material of the color filter layer 230. Furthermore, the height H' of the first spacer 240 plus the thickness t of the first conductive black matrix 220 is equal to the thickness T' of the color filter layer such that the surface of the first spacer 240 is co-planned with the surface of the color filter layer 230. flat. In addition, the material of the first spacer 240 is not electrically conductive, so that the first spacer 240 can be directly disposed on the first conductive black matrix 220 having conductivity without causing a short circuit.

It should be noted that, since the material of the first spacer 240 of the embodiment is the same as the material of the color filter layer 230, the first spacer 240 and the color filter layer 230 can be completed through the same process. In addition, the color filter layer 230 and the first spacers 240 of the embodiment are not connected to each other, as shown in FIG. 3D(a). In other embodiments of the present invention, the color filter layer 230 can be connected to the first spacer 240, as shown in FIG. 3D(b) and FIG. 4D(b), and the invention is not limited thereto.

Next, referring to FIG. 3E and FIG. 4E, a second conductive black matrix 250 is formed on the substrate 210, wherein the second conductive black matrix 250 extends along the second direction D2' and covers the first spacer 240, and the second direction D2 'The first direction D1' intersects each other. In the embodiment, the second conductive black matrix 250 has a plurality of second strip-shaped conductive patterns 252, wherein the second strip-shaped conductive patterns 252 Electrically insulated from each other, and the second strip-shaped conductive pattern 252 substantially perpendicularly intersects the first strip-shaped conductive pattern 222. In particular, the second conductive black matrix 250 of the present embodiment can provide a good electrical conduction effect in addition to a good light shielding effect. Therefore, the material of the second conductive black matrix 250 is a metal or a semiconductor material, which may be the same as or different from the material of the first conductive black matrix 220, and is, for example, chromium (Cr) or carbon black (C). In addition, the first spacer 240 is located between the first conductive black matrix 220 and the second conductive black matrix 250, so that the conductive first conductive black matrix 220 and the second conductive black matrix 250 are directly contacted to generate a short circuit.

Next, referring to FIG. 3F and FIG. 4F , a protective layer 260 is formed to cover the first conductive black matrix 220 , the color filter layer 230 , the first spacer 240 , and the second conductive black matrix 250 .

Next, referring to FIG. 3G and FIG. 4G, a transparent conductive layer 270 is formed on the protective layer 260, wherein the transparent conductive layer 270 can be a metal oxide such as Indium Tin Oxide (ITO) or indium zinc oxide ( Indium Zinc Oxide, IZO), Aluminum Zinc Oxide (AZO) or other suitable transparent conductive material.

Finally, referring to FIG. 3H and FIG. 4H, a plurality of second spacers 280 are formed on the transparent conductive layer 270, wherein the material of the second spacers 280 needs to have no conductivity, so that the second spacers 280 can be directly disposed on The conductive transparent conductive layer 270 is formed without causing a short circuit. In addition, the second spacer 280 overlaps with the orthographic projection of the first spacer 240 on the substrate 210. The second spacer 280 can serve as a support to maintain the spacing between the color filter substrate 200 and the opposing substrate (not shown) of the subsequent application.

The color filter substrate 200 of the present embodiment is formed by sequentially forming a first conductive black matrix 220, a color filter layer 230, a first spacer 240, a second conductive black matrix 250, and a protective layer 260 on the substrate 210. The transparent conductive layer 270 and the second spacer 280, wherein the material of the first spacer 240 is the same as the material of the color filter layer 230. Therefore, in addition to being an insulating layer between the first conductive black matrix 220 and the second conductive black matrix 250, the first spacer 240 can be fabricated through the same process as the color filter layer 230. As a result, the color filter substrate 200 of the present embodiment can effectively reduce the manufacturing process and reduce the manufacturing cost compared with the conventional method of manufacturing the touch color filter substrate.

In addition, the color filter substrate 100 and the color filter substrate 200 manufactured by the method for fabricating the color filter substrate according to the first embodiment and the second embodiment of the present invention are more applicable to the production of a liquid crystal display panel.

FIG. 5A is a schematic diagram of a color filter substrate of FIG. 2G(b) applied to a touch display panel. Referring to FIG. 5A, the color filter substrate 100 produced by the method for fabricating a color filter substrate according to the first embodiment of the present invention can be applied to the liquid crystal display panel 50. The liquid crystal display panel 50 includes a color filter substrate 100, a liquid crystal layer 102, and an opposite substrate 104. The color filter substrate 100 is disposed opposite to the opposite substrate 104, and the insulating spacer 140 of the color filter substrate 100 is used as a support to maintain the spacing between the color filter substrate 100 and the opposite substrate 104, and the liquid crystal layer 102 is maintained. It is disposed between the color filter substrate 100 and the opposite substrate 104. In addition, the color filter substrate 100 of the embodiment has a touch function. Therefore, the liquid crystal display panel 50 can be a touch-sensitive liquid crystal display panel.

FIG. 5B is a schematic diagram of the color filter substrate of FIG. 4H applied to the touch display panel. Referring to FIG. 5B, the color filter substrate 200 fabricated by the method for fabricating a color filter substrate according to the second embodiment of the present invention can be applied to the liquid crystal display panel 60. The liquid crystal display panel 60 includes a color filter substrate 200, a liquid crystal layer 202, and an opposite substrate 204. The color filter substrate 200 is disposed opposite to the opposite substrate 204, and the second spacer 280 of the color filter substrate 100 is used as a support to maintain the spacing between the color filter substrate 200 and the opposite substrate 204, and the liquid crystal layer 202 Then, it is disposed between the color filter substrate 200 and the opposite substrate 204. In addition, the color filter substrate 200 of the embodiment has a touch function. Therefore, the liquid crystal display panel 60 can be a touch-sensitive liquid crystal display panel.

In summary, the present invention provides a method for fabricating a color filter substrate, which sequentially forms a first conductive black matrix, a color filter layer, an insulating spacer, a second conductive black matrix, a protective layer, and a transparent conductive on the substrate. a layer wherein the height of the insulating spacer is greater than the thickness of the color filter layer. Therefore, in addition to serving as a support to maintain the spacing between the color filter substrate and the opposite substrate, the insulating spacer can also serve as an insulating layer between the first conductive black matrix and the second conductive black matrix. Accordingly, the method for fabricating the color filter substrate proposed by the present invention can effectively reduce the process steps and reduce the manufacturing cost.

In addition, the present invention further provides a method for fabricating a color filter substrate, which sequentially forms a first conductive black matrix, a color filter layer, a first spacer, a second conductive black matrix, a protective layer, and a transparent conductive layer on the substrate. And a second spacer, wherein the material of the first spacer is the same as the material of the color filter layer. Therefore, the first spacer can be used as the first conductive black matrix and the second The insulating layer between the conductive black matrices can be fabricated through the same process as the color filter layer. Accordingly, the method for fabricating the color filter substrate proposed by the present invention can effectively reduce the process steps and reduce the manufacturing cost.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

50, 60‧‧‧ LCD panel

100,200‧‧‧ color filter substrate

110, 210‧‧‧ substrate

120, 220‧‧‧ first conductive black matrix

122, 222‧‧‧ first strip of conductive pattern

130, 230‧‧‧ color filter layer

140‧‧‧Insulation spacers

150, 250‧‧‧second conductive black matrix

152, 252‧‧‧Second strip conductive pattern

160, 260‧ ‧ protective layer

170, 270‧‧‧ transparent conductive layer

240‧‧‧First spacer

280‧‧‧Second spacer

D1, D1’‧‧‧ first direction

D2, D2’‧‧‧ second direction

R‧‧‧ red filter film

G‧‧‧Green filter film

B‧‧‧Blue filter film

H, H’‧‧‧ Height

T, T', t‧‧ thickness

1A to 1G are schematic plan views showing a method of fabricating a color filter substrate according to a first embodiment of the present invention.

2A to 2G(b) are schematic cross-sectional views showing a method of fabricating a color filter substrate taken along the line I-I' in Fig. 1.

3A to 3H are top plan views showing a method of fabricating a color filter substrate according to a second embodiment of the present invention.

4A to 4H are schematic cross-sectional views showing a method of fabricating a color filter substrate taken along line II-II' in Fig. 3.

FIG. 5A is a schematic diagram of a color filter substrate of FIG. 2G(b) applied to a touch display panel.

FIG. 5B is a schematic diagram of the color filter substrate of FIG. 4H applied to the touch display panel.

100‧‧‧Color filter substrate

110‧‧‧Substrate

120‧‧‧First conductive black matrix

122‧‧‧First strip of conductive pattern

130‧‧‧Color filter layer

140‧‧‧Insulation spacers

150‧‧‧Second conductive black matrix

152‧‧‧Second strip conductive pattern

160‧‧‧Protective layer

170‧‧‧Transparent conductive layer

R‧‧‧ red filter film

G‧‧‧Green filter film

B‧‧‧Blue filter film

Claims (12)

A method for fabricating a color filter substrate, comprising: providing a substrate; forming a first conductive black matrix on the substrate, the first conductive black matrix extending along a first direction; forming a color filter layer on the substrate The color filter layer does not overlap with the orthographic projection of the first conductive black matrix on the substrate; forming a plurality of insulating spacers on the first conductive black matrix, wherein the height of the insulating spacers is greater than the a thickness of the color filter layer; forming a second conductive black matrix on the substrate, wherein the second conductive black matrix extends along a second direction and covers the insulating spacers, and the second direction and the first The directions intersect each other; a protective layer is formed to cover the first conductive black matrix, the color filter layer, the insulating spacers, and the second conductive black matrix; and a transparent conductive layer is formed on the protective layer. The method of fabricating a color filter substrate according to claim 1, wherein the first conductive black matrix has a plurality of first strip-shaped conductive patterns, and the first strip-shaped conductive patterns are electrically insulated from each other. The method of fabricating a color filter substrate according to claim 2, wherein the second conductive black matrix has a plurality of second strip-shaped conductive patterns, and the second strip-shaped conductive patterns are electrically insulated from each other, and The second strip-shaped conductive patterns intersect perpendicularly with the first strip-shaped conductive patterns. The method for fabricating a color filter substrate according to claim 1, wherein the material of the first conductive black matrix and the second conductive black moment The material of the array includes metal or semiconductor materials. The method of fabricating a color filter substrate according to claim 1, wherein the color filter layer comprises a plurality of red filter films, a plurality of green filter films, and a plurality of blue filter films. A method for fabricating a color filter substrate, comprising: providing a substrate; forming a first conductive black matrix on the substrate, the first conductive black matrix extending along a first direction; forming a color filter layer on the substrate The color filter layer does not overlap with the orthographic projection of the first conductive black matrix on the substrate; forming a plurality of first spacers on the first conductive black matrix, wherein the heights of the first spacers The thickness of the first conductive black matrix is equal to the thickness of the color filter layer, and the materials of the first spacers are the same as the material of the color filter layer; forming a second conductive black matrix on the substrate, The second conductive black matrix extends along a second direction and covers the first spacers, and the second direction and the first direction intersect each other; forming a protective layer to cover the first conductive black matrix, the a color filter layer, the first spacers and the second conductive black matrix; forming a transparent conductive layer on the protective layer; and forming a plurality of second spacers on the transparent conductive layer, wherein the second Interstitial Some overlap orthogonal projection of the first spacer on the substrate. The method for fabricating a color filter substrate according to claim 6, wherein the first conductive black matrix has a plurality of first strip-shaped conductive patterns. And the first strip-shaped conductive patterns are electrically insulated from each other. The method of manufacturing the color filter substrate of claim 7, wherein the second conductive black matrix has a plurality of second strip-shaped conductive patterns, and the second strip-shaped conductive patterns are electrically insulated from each other, and The second strip-shaped conductive patterns intersect perpendicularly with the first strip-shaped conductive patterns. The method for fabricating a color filter substrate according to claim 6, wherein the material of the first conductive black matrix and the material of the second conductive black matrix comprise a metal or a semiconductor material. The method of fabricating a color filter substrate according to claim 6, wherein the color filter layer comprises a plurality of red filter films, a plurality of green filter films, and a plurality of blue filter films. The method of fabricating a color filter substrate according to claim 6, wherein the color filter layer is connected to the first spacers. The method of fabricating a color filter substrate according to claim 6, wherein the color filter layer and the first spacers are not connected to each other.