TW201335705A - Photosensitive resin composition, photosensitive resin film produced using said composition, and electronic component produced using said composition or said film - Google Patents

Photosensitive resin composition, photosensitive resin film produced using said composition, and electronic component produced using said composition or said film Download PDF

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TW201335705A
TW201335705A TW101143702A TW101143702A TW201335705A TW 201335705 A TW201335705 A TW 201335705A TW 101143702 A TW101143702 A TW 101143702A TW 101143702 A TW101143702 A TW 101143702A TW 201335705 A TW201335705 A TW 201335705A
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photosensitive resin
meth
compound
resin composition
film
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TW101143702A
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Chinese (zh)
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Sadaaki Katou
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Hitachi Chemical Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F299/00Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
    • C08F299/02Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
    • C08F299/022Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polycondensates with side or terminal unsaturations
    • C08F299/024Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polycondensates with side or terminal unsaturations the unsaturation being in acrylic or methacrylic groups
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F299/00Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers
    • C08F299/02Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates
    • C08F299/06Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polyurethanes
    • C08F299/065Macromolecular compounds obtained by interreacting polymers involving only carbon-to-carbon unsaturated bond reactions, in the absence of non-macromolecular monomers from unsaturated polycondensates from polyurethanes from polyurethanes with side or terminal unsaturations
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/10Esters
    • C08F222/1006Esters of polyhydric alcohols or polyhydric phenols
    • C08F222/106Esters of polycondensation macromers
    • C08F222/1061Esters of polycondensation macromers of alcohol terminated polyesters or polycarbonates, e.g. polyester (meth)acrylates
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F222/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a carboxyl radical and containing at least one other carboxyl radical in the molecule; Salts, anhydrides, esters, amides, imides, or nitriles thereof
    • C08F222/10Esters
    • C08F222/1006Esters of polyhydric alcohols or polyhydric phenols
    • C08F222/106Esters of polycondensation macromers
    • C08F222/1065Esters of polycondensation macromers of alcohol terminated (poly)urethanes, e.g. urethane(meth)acrylates
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48257Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a die pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/49105Connecting at different heights
    • H01L2224/49107Connecting at different heights on the semiconductor or solid-state body
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93Batch processes
    • H01L2224/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L2224/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
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  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Materials For Photolithography (AREA)

Abstract

A photosensitive resin composition comprising (A) a (meth)acrylate compound and (B) a photopolymerization initiator, wherein a (meth)acrylate compound having a urethane bond is contained as the component (A). The photosensitive resin composition enables the formation of a fine pattern even when the resin composition is formed into a film having a large thickness. A photosensitive resin layer formed from the resin composition has an excellent visible light transmissivity, and also has excellent heat resistance to such an extent that the resin layer undergoes less resin discoloration even when subjected to a long-term high-temperature thermal history.

Description

感光性樹脂組成物、使用此組成物而得之感光性樹脂薄膜、以及使用此等而得之電子零件 Photosensitive resin composition, photosensitive resin film obtained by using the composition, and electronic parts using the same

本發明是有關一種感光性樹脂組成物、使用此組成物而得之感光性樹脂薄膜、以及使用此等將發光元件的上部予以密封而成之電子零件。 The present invention relates to a photosensitive resin composition, a photosensitive resin film obtained by using the composition, and an electronic component obtained by sealing an upper portion of a light-emitting element using the same.

隨著LED(Light-Emitting Diode,發光二極體)顯示器的小型化、高畫質化,而亦對LED元件等發光元件要求小型化、高密度構裝。例如:行動電話等所使用之LED顯示器,需要精細度高、消耗電力少。此外,隨著朝向民生機器和車輛搭載用途等展開,而亦要求能夠忍耐嚴苛環境之耐熱性。因此,對於覆蓋LED元件等發光元件的上部之密封構件,不僅要求微細圖案之加工性和透光率優異,亦要求高耐熱性。 With the miniaturization and high image quality of LED (Light-Emitting Diode) displays, it is required to reduce the size and density of light-emitting elements such as LED elements. For example, LED displays used in mobile phones and the like require high definition and low power consumption. In addition, it is required to be able to withstand the heat resistance of a harsh environment as it is deployed to people's livelihood machines and vehicle-mounted applications. Therefore, in the sealing member covering the upper portion of the light-emitting element such as the LED element, not only the fine pattern is required to have excellent workability and light transmittance, but also high heat resistance is required.

例如:專利文獻1揭示一種透明密封樹脂,但由於是藉由樹脂接合來予以密封,故有不適合微細加工之缺點。 For example, Patent Document 1 discloses a transparent sealing resin, but since it is sealed by resin bonding, it is disadvantageous in that it is not suitable for microfabrication.

此外,雖亦考慮使用像專利文獻2、3所揭示之材料這樣的具有高穿透率之感光性樹脂組成物來作為密封樹脂,但有樹脂會因熱歷程而著色之問題,而有會對LED等發光元件之色相變化和亮度降低等造成影響之虞。 Further, although a photosensitive resin composition having a high transmittance such as those disclosed in Patent Documents 2 and 3 is considered as a sealing resin, there is a problem that the resin may be colored due to a thermal history, and there may be a problem. The hue changes and brightness reduction of light-emitting elements such as LEDs are affected.

[先前技術文獻] [Previous Technical Literature] (專利文獻) (Patent Literature)

專利文獻1:日本特開2007-308695號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-308695

專利文獻2:日本特開2010-32991號公報 Patent Document 2: Japanese Laid-Open Patent Publication No. 2010-32991

專利文獻3:日本特開2004-35821號公報 Patent Document 3: Japanese Laid-Open Patent Publication No. 2004-35821

本發明是為了解決上述問題而研創,目的在於提供一種感光性樹脂組成物、感光性樹脂薄膜、以及使用此等而得之電子零件,該感光性樹脂組成物,在形成為厚膜時仍能夠形成微細圖案,並且,具有優異的可見光穿透率且具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程時樹脂著色仍很少。 The present invention has been made in order to solve the above problems, and an object of the invention is to provide a photosensitive resin composition, a photosensitive resin film, and an electronic component using the same, which can be formed into a thick film. A fine pattern is formed, and has excellent visible light transmittance and excellent heat resistance, which is that resin coloration is still small at a high temperature over a long period of heat history.

本發明人等致力進行研究後,結果發現使用具有胺酯(urethane)鍵之(甲基)丙烯酸酯化合物來作為光聚合性化合物並使用光聚合起始劑,即能夠達成上述目的,遂完成本發明。 As a result of intensive studies, the present inventors have found that the use of a (meth) acrylate compound having an urethane bond as a photopolymerizable compound and a photopolymerization initiator can achieve the above object. invention.

換言之,本發明提供下述[1]~[3]。 In other words, the present invention provides the following [1] to [3].

[1]一種感光性樹脂組成物,其包含(A)(甲基)丙烯酸酯化合物與(B)光聚合起始劑,其中,作為(A)成分,包含具有胺酯鍵之(甲基)丙烯酸酯化合物。 [1] A photosensitive resin composition comprising (A) a (meth) acrylate compound and (B) a photopolymerization initiator, wherein (A) component contains a (meth) group having an amine ester bond Acrylate compound.

[2]一種感光性樹脂薄膜,其具有感光性樹脂層,該感光 性樹脂層是將上述[1]所述之感光性樹脂組成物成形為薄膜狀而成。 [2] A photosensitive resin film having a photosensitive resin layer, the photosensitive The photosensitive resin layer is formed by molding the photosensitive resin composition described in the above [1] into a film shape.

[3]一種電子零件,是使用上述[1]所述之感光性樹脂組成物或上述[2]所述之感光性樹脂薄膜,將發光元件的上部予以密封而成。 [3] An electronic component obtained by sealing the upper portion of the light-emitting device using the photosensitive resin composition according to the above [1] or the photosensitive resin film according to the above [2].

本發明之感光性樹脂組成物,在形成為厚膜時仍能夠形成微細圖案,並且,其硬化物具有優異的可見光穿透率且具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程後樹脂著色仍很少。 The photosensitive resin composition of the present invention can form a fine pattern even when formed into a thick film, and the cured product has excellent visible light transmittance and excellent heat resistance, which is high temperature over a long period of time. Resin coloration is still rare after the thermal history.

10‧‧‧感光性樹脂薄膜 10‧‧‧Photosensitive resin film

11‧‧‧支持用薄膜 11‧‧‧Support film

12‧‧‧感光性樹脂層 12‧‧‧Photosensitive resin layer

12a‧‧‧(曝光部之)感光性樹脂層 12a‧‧‧(Exposure part) photosensitive resin layer

50‧‧‧附有發光元件的線路板 50‧‧‧PCB with light-emitting components

51‧‧‧電子線路板 51‧‧‧Electronic circuit board

52a、52b‧‧‧線路 52a, 52b‧‧‧ lines

53‧‧‧金屬線 53‧‧‧Metal wire

54‧‧‧電極 54‧‧‧Electrode

55‧‧‧發光元件 55‧‧‧Lighting elements

56‧‧‧反射器 56‧‧‧ reflector

60‧‧‧電子零件 60‧‧‧Electronic parts

110‧‧‧積層機 110‧‧‧Laminator

120‧‧‧負型遮罩 120‧‧‧negative mask

130‧‧‧顯影機 130‧‧‧Developing machine

第1圖是顯示使用本發明之感光性樹脂薄膜,將發光元件的上部予以密封而成之電子零件的製造方法的一例的剖面圖。 1 is a cross-sectional view showing an example of a method of manufacturing an electronic component in which an upper portion of a light-emitting element is sealed by using the photosensitive resin film of the present invention.

第2圖是顯示使用本發明之感光性樹脂薄膜,將具備反射器之發光元件的上部予以密封而成之電子零件的製造方法的一例的剖面圖。 2 is a cross-sectional view showing an example of a method of manufacturing an electronic component in which an upper portion of a light-emitting element including a reflector is sealed by using the photosensitive resin film of the present invention.

第3圖是顯示使用本發明之感光性樹脂薄膜,將具備反射器之發光元件的上部予以密封而成之電子零件的製造方法的一例的剖面圖。 3 is a cross-sectional view showing an example of a method of manufacturing an electronic component in which an upper portion of a light-emitting element including a reflector is sealed by using the photosensitive resin film of the present invention.

[實施發明的較佳形態] [Preferred form of implementing the invention] [感光性樹脂組成物] [Photosensitive Resin Composition]

本發明之感光性樹脂組成物,其包含(A)(甲基)丙烯酸酯化合物與(B)光聚合起始劑,其中,作為(A)成分,包含具有胺酯鍵之(甲基)丙烯酸酯化合物。 The photosensitive resin composition of the present invention comprising (A) a (meth) acrylate compound and (B) a photopolymerization initiator, wherein (A) component contains a (meth)acrylic acid having an amine ester bond Ester compound.

再者,在本發明中,所謂「(甲基)丙烯酸酯化合物」,是以表示丙烯酸酯化合物或甲基丙烯酸酯化合物之用語的形式來使用,所謂「(甲基)丙烯醯基」,是以表示丙烯醯基或甲基丙烯醯基之用語的形式來使用。此外,其他類似用語亦相同。 In the present invention, the "(meth) acrylate compound" is used in the form of an acryl compound or a methacrylate compound, and the "(meth) acrylonitrile group" is It is used in the form of a term indicating an acryloyl group or a methacryl group. In addition, other similar terms are also the same.

本發明之感光性樹脂組成物,由於包含上述各成分,故在形成為厚膜時仍能夠形成微細圖案,並且,具有優異的可見光穿透率且具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程後波長450~740 nm的光的透光性優異而樹脂著色很少。 Since the photosensitive resin composition of the present invention contains the above-described respective components, it is possible to form a fine pattern even when formed into a thick film, and has excellent visible light transmittance and excellent heat resistance, which is high temperature. After a long period of heat history, light having a wavelength of 450 to 740 nm is excellent in light transmittance and resin coloring is small.

其理由應為如下所述。 The reason should be as follows.

換言之,(A)成分亦即(甲基)丙烯酸酯化合物,透明性高且可見光穿透性優異。此外,會因光、熱而進行聚合來進行三維交聯,因此會發揮優異的耐熱性。此外,(A)成分之(甲基)丙烯酸酯化合物,由於相溶性優異,故能夠與(B)成分充分相溶。 In other words, the (meth) acrylate compound which is a component (A) has high transparency and excellent visible light transmittance. In addition, since it is polymerized by light or heat to perform three-dimensional crosslinking, it exhibits excellent heat resistance. Further, since the (meth) acrylate compound of the component (A) is excellent in compatibility, it can be sufficiently compatible with the component (B).

此外,將(A)成分與(B)成分之光聚合起始劑併用,而在形成為厚膜時深部硬化性仍良好,故能夠形成高解析度的圖案。 Further, when the photopolymerization initiator of the component (A) and the component (B) are used in combination, the deep curability is good when formed into a thick film, so that a high-resolution pattern can be formed.

並且,作為(A)成分所包含之具有胺酯鍵之(甲基)丙烯酸酯,即使在空氣環境中長時間暴露於高溫,仍能夠抑制樹脂著色、黃變,而能夠提高耐熱性並維持高穿透性。 Further, the (meth) acrylate having an amine ester bond contained in the component (A) can suppress the coloration and yellowing of the resin even when exposed to a high temperature for a long period of time in an air atmosphere, and can improve heat resistance and maintain high. Penetration.

以下,說明本發明之感光性樹脂組成物中所含之各成分。 Hereinafter, each component contained in the photosensitive resin composition of the present invention will be described.

((A)成分:(甲基)丙烯酸酯化合物) ((A) component: (meth) acrylate compound)

在本發明中,作為(A)成分之(甲基)丙烯酸酯化合物,包含具有胺酯鍵之(甲基)丙烯酸酯化合物。 In the present invention, the (meth) acrylate compound as the component (A) contains a (meth) acrylate compound having an amine ester bond.

再者,從獲得解析度優異而圖案形成性優異的感光性樹脂組成物之觀點來看,(A)成分相對於本發明之感光性樹脂組成物的總量之含量,以80質量%以上為佳,以85質量%以上較佳,以90質量%以上更佳,以95質量%以上再更佳。 In addition, from the viewpoint of obtaining a photosensitive resin composition having excellent resolution and excellent pattern formation, the content of the component (A) relative to the total amount of the photosensitive resin composition of the present invention is 80% by mass or more. Preferably, it is preferably 85 mass% or more, more preferably 90 mass% or more, and still more preferably 95 mass% or more.

此外,(A)成分之含量之上限值,無特別限制,從確保(B)成分之含量且獲得在形成為厚膜時深部硬化性仍良好而能夠形成高解析度的圖案之感光性樹脂組成物之觀點來看,(A)成分相對於本發明之感光性樹脂組成物的總量之含量,以99.9質量%以下為佳,以99.5質量%以下較佳,以99.0質量%以下更佳。 In addition, the upper limit of the content of the component (A) is not particularly limited, and a photosensitive resin capable of forming a high-resolution pattern when a deep film is formed in a thick film while securing the content of the component (B) is obtained. From the viewpoint of the composition, the content of the component (A) relative to the total amount of the photosensitive resin composition of the present invention is preferably 99.9% by mass or less, preferably 99.5% by mass or less, more preferably 99.0% by mass or less. .

<具有胺酯鍵之(甲基)丙烯酸酯化合物> <(meth)acrylate compound having an amine ester bond>

在本發明中,以下所記載之具有胺酯鍵之(甲基)丙烯酸酯化合物(以下亦稱為「胺酯系化合物(A1)」),可單獨使用或組合2種以上使用。 In the present invention, the (meth) acrylate compound having an amine ester bond (hereinafter also referred to as "amine ester compound (A1)")) may be used singly or in combination of two or more.

作為胺酯系化合物(A1),可舉例如:由具有羥基之(甲基)丙烯酸酯與異氰酸酯所得之反應物。 The amine ester-based compound (A1) may, for example, be a reactant obtained from a (meth) acrylate having a hydroxyl group and an isocyanate.

作為具有羥基之(甲基)丙烯酸酯,以一分子中具有1個羥基及1~5個(甲基)丙烯醯基之化合物為佳。 As the (meth) acrylate having a hydroxyl group, a compound having one hydroxyl group and one to five (meth) acrylonitrile groups in one molecule is preferred.

此外,作為異氰酸酯,以一分子中具有1~3個異氰酸基之異氰酸酯為佳。 Further, as the isocyanate, an isocyanate having 1 to 3 isocyanate groups in one molecule is preferred.

作為由一分子中具有1個羥基及1~5個(甲基)丙烯醯基之(甲基)丙烯酸酯與一分子中具有1~3個異氰酸基之異氰酸酯所得之反應物,可舉例如下述通式(A-1)所示的化合物。 As a reactant obtained from a (meth) acrylate having one hydroxyl group and 1 to 5 (meth) acrylonitrile groups in one molecule and an isocyanate having 1 to 3 isocyanate groups in one molecule, for example, A compound represented by the following formula (A-1).

上述通式(A-1)中,Ra表示具有1~5個(甲基)丙烯醯基之1價有機基,可舉例如:從一分子中具有1個羥基及1~5個(甲基)丙烯醯基之(甲基)丙烯酸酯之中去除羥基而得之殘基等。Rb表示脂肪族、脂環式、或芳香族骨架之1價有機基,可舉例如:從異氰酸酯之中去除1個異氰酸基而得之殘基等。 In the above formula (A-1), R a represents a monovalent organic group having 1 to 5 (meth)acrylonyl groups, and examples thereof include one hydroxyl group and 1 to 5 molecules in one molecule (A) A residue obtained by removing a hydroxyl group among (meth) acrylates of an acrylonitrile group. R b represents a monovalent organic group of an aliphatic, alicyclic or aromatic skeleton, and examples thereof include a residue obtained by removing one isocyanate group from an isocyanate.

從維持感光性樹脂組成物之透明性,並且使耐熱性、低吸濕性、強韌性保持良好,且提高對顯影液所使用之溶劑之溶解性而獲得高解析度之觀點來看,本發明之樹脂組成物中所含之胺酯系化合物(A1),較佳是包含:具有脂肪族骨架及脂環式骨架中的至少一種且具有胺酯鍵之(甲基)丙烯酸酯化合物。 The present invention is obtained from the viewpoint of maintaining the transparency of the photosensitive resin composition, maintaining good heat resistance, low hygroscopicity, and toughness, and improving the solubility of the solvent used in the developer to obtain high resolution. The amine ester compound (A1) contained in the resin composition preferably contains a (meth) acrylate compound having at least one of an aliphatic skeleton and an alicyclic skeleton and having an amine ester bond.

從維持感光性樹脂組成物之透明性,並且使耐熱性、低吸濕性、強韌性保持良好,且獲得高解析度之觀點來看,相對於胺酯系化合物(A1)的總量,上述具有脂肪族骨架及脂環式骨架中的至少一種且具有胺酯鍵之(甲基)丙烯酸酯化合物之含量,以70質量%以上為佳,以80質量%以上較佳,以 90質量%以上更佳。 From the viewpoint of maintaining the transparency of the photosensitive resin composition and maintaining good heat resistance, low hygroscopicity, and toughness, and obtaining high resolution, the above is relative to the total amount of the amine ester compound (A1). The content of the (meth) acrylate compound having at least one of an aliphatic skeleton and an alicyclic skeleton and having an amine ester bond is preferably 70% by mass or more, and more preferably 80% by mass or more. More preferably 90% by mass or more.

為了將脂肪族骨架、脂環式骨架導入至胺酯系化合物(A1)之結構中,作為胺酯系化合物(A1)之原料化合物,較佳是使用:上述具有脂肪族骨架、脂環式骨架之異氰酸酯;具有脂肪族骨架、脂環式骨架之二醇化合物。 In order to introduce an aliphatic skeleton or an alicyclic skeleton into the structure of the amine ester compound (A1), as the raw material compound of the amine ester compound (A1), it is preferred to use the above-mentioned aliphatic skeleton or alicyclic skeleton. Isocyanate; a diol compound having an aliphatic skeleton or an alicyclic skeleton.

當使用二醇化合物來作為胺酯系化合物(A1)之原料化合物時,作為胺酯系化合物(A1),以使具有羥基之(甲基)丙烯酸酯化合物與由二醇化合物與二異氰酸酯所得之加成聚合物之末端異氰酸基進行反應而得之反應物為佳,該反應物以下式通式(A-2)所示的化合物為佳。 When a diol compound is used as a raw material compound of the amine ester-based compound (A1), the amine ester-based compound (A1) is obtained by a (meth) acrylate compound having a hydroxyl group and a diol compound and a diisocyanate. It is preferred that the terminal isocyanate group of the addition polymer is reacted to obtain a reactant, and the reactant is preferably a compound represented by the following formula (A-2).

上述通式(A-2)中,R11分別獨立地表示具有1~5個(甲基)丙烯醯基之1價有機基,可舉例如:從一分子中具有1個羥基及1~5個(甲基)丙烯醯基之(甲基)丙烯酸酯之中去除羥基而得之殘基等。 In the above formula (A-2), R 11 each independently represents a monovalent organic group having 1 to 5 (meth)acryl fluorenyl groups, and may, for example, have one hydroxyl group and 1 to 5 from one molecule. A residue obtained by removing a hydroxyl group among (meth)acryloyl (meth)acrylates.

R12表示脂肪族、脂環式、或芳香族骨架之2價有機基,可舉例如:從二異氰酸酯之中去除2個異氰酸基而得之殘基等。 R 12 represents a divalent organic group of an aliphatic, alicyclic or aromatic skeleton, and examples thereof include a residue obtained by removing two isocyanato groups from a diisocyanate.

R13表示碳數2~30的有機基,以碳數2~20的飽和烴基為佳,可舉例如:直鏈伸烷基、分枝伸烷基、脂環式伸烷基、或脂環式伸烷基與直鏈伸烷基及/或分支伸烷基之組合。n為5~20的整數。 R 13 represents an organic group having 2 to 30 carbon atoms, preferably a saturated hydrocarbon group having 2 to 20 carbon atoms, and examples thereof include a linear alkyl group, a branched alkyl group, an alicyclic alkyl group, or an alicyclic ring. A combination of an alkyl group and a linear alkyl group and/or a branched alkyl group. n is an integer from 5 to 20.

此外,作為胺酯系化合物(A1),亦可舉例如:使像下述通式(A-3)所示的化合物這樣的具有羥基之(甲基)丙烯酸酯及異氰脲酸型三異氰酸酯進行反應而得之反應物,該異氰脲酸型三異氰酸酯為二異氰酸酯之三聚物。 Further, the amine ester-based compound (A1) may, for example, be a (meth) acrylate having a hydroxyl group and a isocyanuric acid type triisocyanate such as a compound represented by the following formula (A-3). The reaction product obtained by the reaction, the isocyanuric acid type triisocyanate is a terpolymer of a diisocyanate.

上述式(A-3)中,R11、R12、R13及n,與上述式(A-2)相同。 In the above formula (A-3), R 11 , R 12 , R 13 and n are the same as those in the above formula (A-2).

此外,式(A-3)之基A之結構中之*,表示上述記載之結構中之與氮原子鍵結之部分。 Further, * in the structure of the group A of the formula (A-3) represents a portion bonded to a nitrogen atom in the above-described structure.

作為一分子中具有1個羥基及1~5個(甲基)丙烯醯基之化合物,可舉例如:(甲基)丙烯酸2-羥基乙酯、季戊四醇三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯等β位具有羥基之(甲基)丙烯酸酯、羥基丙基化三羥甲基丙烷三丙烯酸酯、環氧丙醇二(甲基)丙烯酸酯等。此等化合物可單獨使用或組合2種以上使用。 Examples of the compound having one hydroxyl group and one to five (meth)acrylonium groups in one molecule include 2-hydroxyethyl (meth)acrylate, pentaerythritol tri(meth)acrylate, and dipentaerythritol. A (meth) acrylate having a hydroxyl group at a β-position such as a (meth) acrylate, a hydroxypropylated trimethylolpropane triacrylate, or a propylene glycol di(meth)acrylate. These compounds may be used singly or in combination of two or more.

此等中,以季戊四醇三(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯為佳。 Among these, pentaerythritol tri(meth)acrylate and dipentaerythritol penta(meth)acrylate are preferred.

作為一分子中具有1~3個異氰酸基之異氰酸酯,可 舉例如:苯基異氰酸酯等單異氰酸酯;異佛酮二異氰酸酯、氫化二甲苯二異氰酸酯、降冰片烯二異氰酸酯等具有脂環族骨架之二異氰酸酯;苯二異氰酸酯、甲苯二異氰酸酯、二甲苯二異氰酸酯、萘二異氰酸酯等具有芳香族骨架之二異氰酸酯;六亞甲基二異氰酸酯、2,4,4-三甲基六亞甲基二異氰酸酯等三甲基六亞甲基二異氰酸酯等具有脂肪族骨架之二異氰酸酯;將此等二異氰酸酯分別製作成三聚物而得之化合物,當為三聚物時,能夠作為異氰脲酸型三異氰酸酯使用。 As an isocyanate having 1 to 3 isocyanato groups in one molecule, For example, monoisocyanate such as phenyl isocyanate; diisocyanate having an alicyclic skeleton such as isophorone diisocyanate, hydrogenated xylene diisocyanate or norbornene diisocyanate; phenyl diisocyanate, toluene diisocyanate, xylene diisocyanate, a diisocyanate having an aromatic skeleton such as naphthalene diisocyanate; trimethylhexamethylene diisocyanate such as hexamethylene diisocyanate or 2,4,4-trimethylhexamethylene diisocyanate having an aliphatic skeleton; A diisocyanate; a compound obtained by preparing these diisocyanates into a trimer, and when it is a terpolymer, can be used as an isocyanuric acid type triisocyanate.

在本發明中,上述異氰酸酯,可為此等異氰酸酯本身,亦可為由此等異氰酸酯與二醇化合物所得之加成聚合物等自此等異氰酸酯所衍生之化合物。 In the present invention, the isocyanate may be a compound derived from such an isocyanate, such as an isocyanate itself or an addition polymer obtained from the isocyanate and the diol compound.

作為本發明中所使用之二醇化合物,可舉例如:下述式(A-4)所示的二醇化合物。 The diol compound used in the present invention may, for example, be a diol compound represented by the following formula (A-4).

HO-R-OH (A-4) HO-R-OH (A-4)

上述式(A-4)中,R表示可具有取代基之碳數1~20的烴基。該烴基之碳數為1~20,以1~15為佳,以1~12較佳。 In the above formula (A-4), R represents a hydrocarbon group having 1 to 20 carbon atoms which may have a substituent. The hydrocarbon group has a carbon number of 1 to 20, preferably 1 to 15, more preferably 1 to 12.

作為該烴基,以飽和烴基為佳,較佳是可具有取代基之直鏈伸烷基、可具有取代基之分枝伸烷基、可具有取代基之脂環式伸烷基。再者,可將可具有取代基之脂環式伸烷基與可具有取代基之直鏈伸烷基及/或分枝伸烷基組合使用。 As the hydrocarbon group, a saturated hydrocarbon group is preferred, and a linear alkyl group which may have a substituent, a branched alkyl group which may have a substituent, and an alicyclic alkyl group which may have a substituent are preferable. Further, an alicyclic alkyl group which may have a substituent may be used in combination with a linear alkyl group and/or a branched alkyl group which may have a substituent.

作為取代基,可舉例如:烷基、烷氧基、芳基、芳烷氧基、芳氧基、芳氧基烷氧基、烷硫基、芳烷硫基、芳硫基及芳硫基烷硫基、鹵素原子等。 The substituent may, for example, be an alkyl group, an alkoxy group, an aryl group, an aralkyloxy group, an aryloxy group, an aryloxyalkoxy group, an alkylthio group, an aralkylthio group, an arylthio group or an arylthio group. An alkylthio group, a halogen atom or the like.

作為具有直鏈狀伸烷基之二醇化合物,以下述通式(A-5)所示的二醇化合物為佳。 The diol compound having a linear alkyl group is preferably a diol compound represented by the following formula (A-5).

HO-(CH2)m-OH(m=2~12) (A-5) HO-(CH 2 ) m -OH(m=2~12) (A-5)

作為上述式(A-5)所示的二醇化合物,可舉例如:乙二醇、1,6-己二醇、1,9-壬二醇、1,10-癸二醇、1,12-十二烷二醇等。 Examples of the diol compound represented by the above formula (A-5) include ethylene glycol, 1,6-hexanediol, 1,9-nonanediol, 1,10-decanediol, and 1,12. - dodecanediol and the like.

m為1~20的整數,以1~15的整數為佳,以1~12的整數較佳。 m is an integer of 1 to 20, preferably an integer of 1 to 15, and preferably an integer of 1 to 12.

此外,作為具有分枝伸烷基之二醇化合物,可舉例如:十八烷二醇、丙二醇、1,3-丁二醇、異戊二醇等。 Further, examples of the diol compound having a branched alkyl group include octadecanediol, propylene glycol, 1,3-butylene glycol, and isoprene glycol.

從提高聚合後之聚合物之玻璃轉移溫度(Tg)而使透明性提高之觀點、以及加成長鏈的烷基而使耐水性提高之觀點來看,此等中,以十八烷二醇為佳。 From the viewpoint of improving the glass transition temperature (Tg) of the polymer after polymerization to improve the transparency and the effect of increasing the water resistance by adding a chain alkyl group, among these, octadecanediol is used. good.

從上述觀點來看,作為十八烷二醇,以下述式(A-5a)所示的1,2-十八烷二醇、下述式(A-5b)所示的1,4-十八烷二醇、下述式(A-5c)所示的1,10-十八烷二醇、下述式(A-5d)所示的1,12-十八烷二醇為佳。 From the above viewpoint, as the octadecanediol, 1,2-octadecanediol represented by the following formula (A-5a), and 1,4-tenth represented by the following formula (A-5b) The octanediol, 1,10-octadecanediol represented by the following formula (A-5c), and 1,12-octadecanediol represented by the following formula (A-5d) are preferred.

從提高聚合後之聚合物之玻璃轉移溫度(Tg)而使透明性及耐濕熱性提高之觀點來看,作為具有脂環式伸烷基之二醇化合物,以下述式(A-6a)所示的1,4-環己烷二甲醇、下述式(A-6b)所示的1,4-環己烷二醇、下述式(A-6c)所示的1,3-環己烷二醇、下述式(3-24)所示的氫化雙酚A為佳。 From the viewpoint of improving the glass transition temperature (Tg) of the polymer after polymerization and improving the transparency and the moist heat resistance, the diol compound having an alicyclic alkyl group is represented by the following formula (A-6a). 1,4-cyclohexanedimethanol, 1,4-cyclohexanediol represented by the following formula (A-6b), and 1,3-cyclohexane represented by the following formula (A-6c) The alkanediol and the hydrogenated bisphenol A represented by the following formula (3-24) are preferred.

從加成多官能基而使堅固性更加提高以使剛性更加 提高之觀點、以及使耐熱性更加提高之觀點來看,作為上述以外之二醇化合物,以具有2個羥基及2個(甲基)丙烯醯基之環氧(甲基)丙烯酸酯等化合物為佳,具體而言可舉例如:下述式(A-7)所示的化合物。 Increased robustness by adding polyfunctional groups to make rigidity even more From the viewpoint of the improvement of the viewpoint and the improvement of the heat resistance, as the diol compound other than the above, a compound such as an epoxy (meth) acrylate having two hydroxyl groups and two (meth) acrylonitrile groups is used. Specifically, for example, a compound represented by the following formula (A-7) can be mentioned.

上述式(A-7)中,R21分別獨立地為氫原子或甲基。 In the above formula (A-7), R 21 is each independently a hydrogen atom or a methyl group.

R22表示2價有機基,該有機基,以可具有取代基之碳數1~15的直鏈伸烷基或分枝伸烷基、可具有取代基之碳數1~20的脂環式伸烷基為佳。此外,可將可具有取代基之脂環式伸烷基與可具有取代基之直鏈伸烷基及/或分枝伸烷基組合使用。 R 22 represents a divalent organic group which has a linear alkyl or branched alkyl group having 1 to 15 carbon atoms which may have a substituent, and an alicyclic ring having 1 to 20 carbon atoms which may have a substituent Alkyl is preferred. Further, an alicyclic alkyl group which may have a substituent may be used in combination with a linear alkyl group and/or a branched alkyl group which may have a substituent.

再者,作為取代基,可舉例如:烷基、烷氧基、芳基、芳烷氧基、芳氧基、芳氧基烷氧基、烷硫基、芳烷硫基、芳硫基及芳硫基烷硫基、鹵素原子等。 Further, examples of the substituent include an alkyl group, an alkoxy group, an aryl group, an aralkyloxy group, an aryloxy group, an aryloxyalkoxy group, an alkylthio group, an aralkylthio group, and an arylthio group. An arylthioalkylthio group, a halogen atom or the like.

此外,從使剛性及耐熱性提高之觀點來看,通式(A-7)所示的二醇化合物中,以下述通式(A-7a)所示的二醇化合物為佳。 In the diol compound represented by the formula (A-7), the diol compound represented by the following formula (A-7a) is preferred from the viewpoint of the improvement of the rigidity and the heat resistance.

再者,在本發明中,此等二醇化合物可單獨使用或組合2種以上使用。 Furthermore, in the present invention, these diol compounds may be used singly or in combination of two or more.

從抑制加熱時之著色性之觀點、以及密著性之觀點來看,使用上述原料化合物而得之胺酯系化合物(A1),以下述式(A-8)所示的化合物為佳,該式(A-8)所示的化合物為使用上述通式(A-7)所示的二醇化合物所合成之化合物。 The amine ester compound (A1) obtained by using the above-mentioned raw material compound is preferably a compound represented by the following formula (A-8), from the viewpoint of suppressing the coloring property at the time of heating and the adhesion. The compound represented by the formula (A-8) is a compound synthesized using the diol compound represented by the above formula (A-7).

上述式(A-8)中,R1及R2分別獨立地表示2價有機基,該有機基,以可具有取代基之碳數1~15的直鏈伸烷基或分枝伸烷基、可具有取代基之碳數1~20的脂環式伸烷基為佳。此外,可將可具有取代基之脂環式伸烷基與可具有取代基之直鏈伸烷基及/或分枝伸烷基組合使用。作為取代基,可舉例如:作為式(A-7)中之R22可具有之取代基所例示之基。p是1以上的整數,以1~5的整數為佳,以1~3的整數較佳。 In the above formula (A-8), R 1 and R 2 each independently represent a divalent organic group which has a linear alkyl group or a branched alkyl group having 1 to 15 carbon atoms which may have a substituent. An alicyclic alkylene group having 1 to 20 carbon atoms which may have a substituent is preferred. Further, an alicyclic alkyl group which may have a substituent may be used in combination with a linear alkyl group and/or a branched alkyl group which may have a substituent. The substituent may, for example, be a group exemplified as a substituent which R 22 in the formula (A-7) may have. p is an integer of 1 or more, preferably an integer of 1 to 5, and preferably an integer of 1 to 3.

從透明性、耐水性、耐濕性之觀點來看,上述式(A-8)所示的化合物中,以式(A-8)中之R2是下述結構所示的2價基為 佳。 In the compound represented by the above formula (A-8), R 2 in the formula (A-8) is a divalent group represented by the following structure, from the viewpoints of transparency, water resistance, and moisture resistance. good.

此外,使用上述原料化合物而得之胺酯系化合物(A1),可舉例如:下述式(A-9)~(A-13)所示的化合物。 In addition, the amine ester type compound (A1) obtained by using the above-mentioned raw material compound may, for example, be a compound represented by the following formulas (A-9) to (A-13).

[再者,上述式(A-9)中,n表示5~20的整數]。 [Further, in the above formula (A-9), n represents an integer of 5 to 20].

作為上述式(A-9)所示的化合物之市售物,可舉例如:UN-952(商品名,根上工業股份有限公司,官能基數:10,Mw:6500~11000,具有胺酯鍵之丙烯酸酯化合物)等。 The commercial product of the compound represented by the above formula (A-9) may, for example, be UN-952 (trade name, Gensei Industrial Co., Ltd., functional group number: 10, Mw: 6500 to 11000, having an amine ester bond) Acrylate compound) and the like.

[再者,上述式(A-10)中,n表示5~20的整數,基A之結構中之**表示上述記載之結構中之與碳原子鍵結之部分]。 Further, in the above formula (A-10), n represents an integer of 5 to 20, and ** in the structure of the group A represents a moiety bonded to a carbon atom in the above-described structure].

[再者,上述式(A-11)中,n表示5~20的整數]。 [Further, in the above formula (A-11), n represents an integer of 5 to 20].

[再者,上述式(A-12)中,n表示5~20的整數,*、**及***表示鍵結部分]。 [Further, in the above formula (A-12), n represents an integer of 5 to 20, and *, **, and *** represent a bonding portion].

[上述式(A-13)中,n表示5~20的整數]。 [In the above formula (A-13), n represents an integer of 5 to 20].

再者,本發明之感光性樹脂組成物中所含之胺酯系化合物(A1),亦可使用環氧乙烷(EO)或環氧丙烷(PO)改質之胺酯二(甲基)丙烯酸酯等具有環氧烷骨架之胺酯(甲基)丙烯酸酯,從防止耐熱性降低之觀點來看,以不含具有環氧烷骨架之胺酯(甲基)丙烯酸酯為佳。 Further, the amine ester compound (A1) contained in the photosensitive resin composition of the present invention may be an amine ester di(methyl) modified with ethylene oxide (EO) or propylene oxide (PO). An amine ester (meth) acrylate having an alkylene oxide skeleton such as acrylate is preferable from the viewpoint of preventing a decrease in heat resistance, and an amine ester (meth) acrylate having an alkylene oxide skeleton is not preferred.

(A)成分中,具有環氧烷骨架之胺酯(甲基)丙烯酸酯之含量,以5質量%以下為佳,以1質量%以下較佳,以0.1質量%以下更佳,以實質上是0質量%再更佳。 In the component (A), the content of the amine ester (meth) acrylate having an alkylene oxide skeleton is preferably 5% by mass or less, more preferably 1% by mass or less, even more preferably 0.1% by mass or less, and substantially It is 0% by mass and even better.

此外,從防止相溶性降低之觀點來看,作為胺酯系化合物(A1),以不含具有聚酯系的結構之胺酯(甲基)丙烯酸酯為佳。 Further, from the viewpoint of preventing the decrease in compatibility, the amine ester compound (A1) is preferably an amine ester (meth) acrylate which does not contain a polyester system.

(A)成分中,具有聚酯系的結構之胺酯(甲基)丙烯酸酯之含量,以5質量%以下為佳,以1質量%以下較佳,以0.1質量%以下更佳,以實質上是0質量%再更佳。 In the component (A), the content of the amine ester (meth) acrylate having a polyester structure is preferably 5% by mass or less, preferably 1% by mass or less, more preferably 0.1% by mass or less, and substantially Above is 0% by mass and even better.

再者,依所使用之胺酯系化合物(A1),有時亦會因合成時之溫度和所選擇之觸媒而具有初期著色,但從透明性之觀點來看,以不含具有初期著色之胺酯(甲基)丙烯酸酯為佳。 Further, depending on the temperature at the time of synthesis and the selected catalyst, the amine ester-based compound (A1) used may have initial coloration, but from the viewpoint of transparency, it does not contain initial coloration. The amine ester (meth) acrylate is preferred.

作為具有初期著色之胺酯(甲基)丙烯酸酯,可舉例如:UA-21(商品名,新中村化學工業股份有限公司製)、TMCH-5R(商品名,日立化成工業公司製)、JTX-0309N(商品名,日立化成工業公司製)等。 The amine ester (meth) acrylate which has an initial coloring, for example, UA-21 (trade name, manufactured by Shin-Nakamura Chemical Co., Ltd.), TMCH-5R (trade name, manufactured by Hitachi Chemical Co., Ltd.), JTX -0309N (trade name, manufactured by Hitachi Chemical Co., Ltd.).

(A)成分中,具有初期著色之胺酯(甲基)丙烯酸酯之含量,以5質量%以下為佳,以1質量%以下較佳,以0.1質量%以下更佳,以實質上是0質量%再更佳。 In the component (A), the content of the amine ester (meth) acrylate having an initial coloration is preferably 5% by mass or less, more preferably 1% by mass or less, even more preferably 0.1% by mass or less, and substantially 0. The quality % is even better.

並且,從決定能夠使耐熱性、剛性與高密著性並存之樹脂結構之觀點來看,以使具有胺酯鍵之(甲基)丙烯酸酯化合物之官能基數((甲基)丙烯醯基數)及重量平均分子量最佳化為佳。包含這樣的具有胺酯鍵之(甲基)丙烯酸酯化合物,由 於低黏度的材料的選擇範圍會變廣,故容易任意調整在形成LED密封部分時塗佈於基板上之感光性樹脂組成物之黏度。所塗佈之感光性樹脂組成物之低黏度化,亦能夠使用溶劑來進行,但當至少使用該化合物時,能夠減少會對硬化後之樹脂組成物之特性和可靠性造成不良影響之溶劑之量。 In addition, from the viewpoint of determining a resin structure capable of coexisting heat resistance, rigidity, and high adhesion, the number of functional groups ((meth)acryl fluorenyl group) of the (meth) acrylate compound having an amine ester bond and The weight average molecular weight is preferably optimized. Containing such a (meth) acrylate compound having an amine ester bond, Since the selection range of the material having a low viscosity is widened, it is easy to arbitrarily adjust the viscosity of the photosensitive resin composition applied to the substrate at the time of forming the LED sealing portion. The low viscosity of the applied photosensitive resin composition can also be carried out using a solvent, but when at least the compound is used, the solvent which adversely affects the characteristics and reliability of the cured resin composition can be reduced. the amount.

具有胺酯鍵之(甲基)丙烯酸酯化合物之官能基數((甲基)丙烯醯基數),從耐熱性、密著性、塗刷性、及圖案形成性之觀點來看,以一分子中為2~15個為佳,從使所得之硬化物之物性和特性安定化之觀點來看,以2~12個較佳,以2~10個更佳。 The number of functional groups ((meth) acrylonitrile group) of the (meth) acrylate compound having an amine ester bond, in terms of heat resistance, adhesion, paintability, and pattern formability, in one molecule It is preferably from 2 to 15 and from 2 to 12, more preferably from 2 to 10, from the viewpoint of stabilizing the physical properties and characteristics of the obtained cured product.

若該官能基數為2個以上,則能夠使耐熱性提高,而能夠提高高溫中之硬化物之剛性。 When the number of the functional groups is two or more, the heat resistance can be improved, and the rigidity of the cured product at a high temperature can be improved.

另一方面,若該官能基數為15個以下,則能夠抑制硬化物變脆,而能夠保持良好的密著性。此外,由於化合物之重量平均分子量亦不會過大,故能夠製作成具有適當的黏度之樹脂組成物,而使塗刷性良好。並且,當對塗刷後之樹脂組成物進行照光時,能夠抑制僅表面部分容易急速進行光硬化而內部不會充分進行光硬化之現象,而能夠使優異的解析度顯現,而使圖案形成性良好。此外,因在光硬化及/或熱硬化後會殘留大量的未反應之(甲基)丙烯醯基,因此亦能夠抑制所得之硬化物之物性和特性容易發生變動之問題。 On the other hand, when the number of the functional groups is 15 or less, it is possible to prevent the cured product from becoming brittle and to maintain good adhesion. Further, since the weight average molecular weight of the compound is not excessively large, a resin composition having an appropriate viscosity can be produced, and the paintability is good. In addition, when the brushed resin composition is irradiated, it is possible to suppress the phenomenon that the surface portion is easily photocured and the photo hardening is not sufficiently performed inside, and the excellent resolution can be exhibited to form the pattern formability. good. Further, since a large amount of unreacted (meth) acrylonitrile group remains after photohardening and/or thermal curing, the problem that the physical properties and characteristics of the obtained cured product are likely to be easily changed can be suppressed.

此外,具有胺酯鍵之(甲基)丙烯酸酯化合物之重量平均分子量(Mw),以950~25000為佳,從塗佈性及提高解析度之觀點來看,以950~15000較佳,從顯影性和相溶性之觀 點來看,以950~11000更佳。再者,在本發明中,重量平均分子量(Mw)之值,是意指藉由凝膠滲透層析法(GPC),使用四氫呋喃或甲苯等展開溶劑來測得之值。 Further, the weight average molecular weight (Mw) of the (meth) acrylate compound having an amine ester bond is preferably 950 to 25,000, and is preferably 950 to 15,000 from the viewpoint of coatability and resolution. Developability and compatibility Point to see, 950~11000 is better. Further, in the present invention, the value of the weight average molecular weight (Mw) means a value measured by gel permeation chromatography (GPC) using a developing solvent such as tetrahydrofuran or toluene.

若該重量平均分子量為950以上,則所得之樹脂組成物之黏度不會過低,在塗佈於基板上時所塗佈之組成物亦不會鬆弛。此外,亦能夠抑制難以形成厚膜、或硬化收縮造成樹脂之應力增加而可靠性降低之問題。 When the weight average molecular weight is 950 or more, the viscosity of the obtained resin composition is not too low, and the composition applied when applied to a substrate does not relax. Further, it is also possible to suppress the problem that it is difficult to form a thick film or hardening shrinkage causes an increase in stress of the resin and a decrease in reliability.

另一方面,若該重量平均分子量為25000以下,則所得之樹脂組成物之黏度不會過高,而能夠使塗刷性良好,亦能夠形成厚膜。此外,由於對顯影液之溶解性亦良好,故能夠顯現優異的解析度。並且,能夠抑制硬化物亦即樹脂隨著分子量增加而發生著色,而能夠獲得一種硬化物,其具有作為透明材料所要求之優異的穿透率。 On the other hand, when the weight average molecular weight is 25,000 or less, the viscosity of the obtained resin composition is not excessively high, and the coating property can be improved, and a thick film can be formed. Further, since the solubility in the developer is also good, excellent resolution can be exhibited. Further, it is possible to suppress the coloring of the resin, that is, the resin, as the molecular weight increases, and it is possible to obtain a cured product having excellent transmittance required as a transparent material.

作為具有胺酯鍵之(甲基)丙烯酸酯化合物之市售物,具有胺酯鍵之丙烯酸酯化合物(具有丙烯醯基之化合物),可舉例如:UN-904(官能基數:10,Mw:4900)、UN-952(官能基數:10,Mw:6500~11000)、UN-333(官能基數:2,Mw:5000)、UN-1255(官能基數:2,Mw:8000)、UN-2600(官能基數:2,Mw:2500)、UN-6200(官能基數:2,Mw:6500)、UN-3320HA(官能基數:6,Mw:1500)、UN-3320HC(官能基數:6,Mw:1500)、UN-9000PEP(官能基數:2,Mw:5000)、UN-9200A(官能基數:2,Mw:15000)、UN-3320HS(官能基數:15,Mw:4900)、UN-6301(官能基數:2,Mw:33000)(以上均為商品名,根上工業股份有限公司製);TMCH-5R(商品 名,日立化成工業公司製);KRM 8452(官能基數=10,Mw=1200)、EBECRYL 8405(胺酯丙烯酸酯/1,6-己二醇二丙烯酸酯=80/20之加成反應物,官能基數=4,Mw=2700)(以上均為商品名,DAICEL CYTEC股份有限公司製)等。 As a commercially available product of a (meth) acrylate compound having an amine ester bond, an acrylate compound having an amine ester bond (a compound having an acryl oxime group), for example, UN-904 (functional number: 10, Mw: 4900), UN-952 (functional group number: 10, Mw: 6500~11000), UN-333 (functional group number: 2, Mw: 5000), UN-1255 (functional group number: 2, Mw: 8000), UN-2600 (Function number: 2, Mw: 2500), UN-6200 (functional number: 2, Mw: 6500), UN-3320HA (functional number: 6, Mw: 1500), UN-3320HC (functional number: 6, Mw: 1500), UN-9000PEP (functional number: 2, Mw: 5000), UN-9200A (functional number: 2, Mw: 15000), UN-3320HS (functional number: 15, Mw: 4900), UN-6301 (functional) Base: 2, Mw: 33000) (all of the above are trade names, manufactured by Gensei Industrial Co., Ltd.); TMCH-5R (commodities) Name, manufactured by Hitachi Chemical Co., Ltd.; KRM 8452 (functional group number = 10, Mw = 1200), EBECRYL 8405 (amine ester acrylate / 1,6-hexanediol diacrylate = 80/20 addition reaction, The number of functional groups = 4, Mw = 2700) (all of the above are trade names, manufactured by DAICEL CYTEC Co., Ltd.) and the like.

作為具有胺酯鍵之甲基丙烯酸酯化合物(具有甲基丙烯醯基之化合物),可舉例如:UN-6060PTM(官能基數:2,Mw:6000,商品名,根上工業股份有限公司製)、JTX-0309(商品名,日立化成工業公司製)、UA-21(商品名,新中村化學工業股份有限公司製)等。 The methacrylate compound (compound having a methacryl oxime group) having an amine ester bond, for example, UN-6060PTM (functional group number: 2, Mw: 6000, trade name, manufactured by Gensei Industrial Co., Ltd.), JTX-0309 (trade name, manufactured by Hitachi Chemical Co., Ltd.), UA-21 (trade name, manufactured by Shin-Nakamura Chemical Co., Ltd.), etc.

從初期著色少而具有高初期透明性之觀點來看,此等市售物中,以UN-904、UN-952等不具有芳香族骨架之胺酯(甲基)丙烯酸酯為佳,該等胺酯(甲基)丙烯酸酯為由一分子中具有2個羥基且不具有芳香族骨架之環氧(甲基)丙烯酸酯與2官能異氰酸酯所得之反應物。此外,使用UN-904、UN-952等該胺酯(甲基)丙烯酸酯,即能夠提高耐濕性、疏水性及耐藥品性(耐酸、耐鹼性),故在LED元件之切割步驟中能夠充分抑制因切削水而吸濕,並且,在基板構裝後之線接合(wire bonding)步驟中,能夠充分抑制電極墊洗淨液之侵蝕。 From the viewpoint of low initial coloration and high initial transparency, it is preferable to use an amine ester (meth) acrylate having no aromatic skeleton such as UN-904 or UN-952 in such commercial products. The amine ester (meth) acrylate is a reactant obtained from an epoxy (meth) acrylate having two hydroxyl groups in one molecule and having no aromatic skeleton, and a bifunctional isocyanate. Further, by using the amine ester (meth) acrylate such as UN-904 or UN-952, moisture resistance, hydrophobicity, and chemical resistance (acid resistance and alkali resistance) can be improved, so that in the cutting step of the LED element. It is possible to sufficiently suppress moisture absorption by the cutting water, and it is possible to sufficiently suppress the erosion of the electrode pad cleaning liquid in the wire bonding step after the substrate assembly.

從使耐熱性提高之觀點來看,相對於(A)成分的總量,具有胺酯鍵之(甲基)丙烯酸酯之含量,以10質量%以上為佳,較佳是30質量%以上,更佳是50質量%以上,進而更佳是55質量百分比以上,進一歩以65質量%以上為更佳。若該含量為10質量%以上,則一面保持塗刷性、圖案形成性及對樹脂組成物之硬化物要求之各種物性和特性,一面即使 在空氣環境中長時間暴露於高溫,仍能夠抑制樹脂著色、黃變,而能夠使耐熱性提高且維持高穿透性。 From the viewpoint of improving the heat resistance, the content of the (meth) acrylate having an amine ester bond is preferably 10% by mass or more, and more preferably 30% by mass or more, based on the total amount of the component (A). More preferably, it is 50% by mass or more, and more preferably 55 mass% or more, and more preferably 65% by mass or more. When the content is 10% by mass or more, even if various properties and characteristics required for the coating property, the formability, and the cured product of the resin composition are maintained, When exposed to a high temperature for a long period of time in an air environment, it is possible to suppress coloration and yellowing of the resin, and it is possible to improve heat resistance and maintain high penetration.

此外,從能夠考慮所得之樹脂組成物之塗刷性、圖案形成性及對樹脂組成物之硬化物要求之物性和特性來選擇性地調配後述之其他(甲基)丙烯酸酯化合物之觀點來看,具有胺酯鍵之(甲基)丙烯酸酯之含量之上限值,以95質量%以下為佳,較佳是90質量%以下,更佳是85質量%以下,進而更佳是80質量%以下更佳,進一歩以75質量%以下為更佳。 In addition, from the viewpoint of selectively adjusting other (meth) acrylate compounds to be described later, in consideration of the paintability, pattern formability, and physical properties and characteristics required for the cured product of the resin composition The upper limit of the content of the (meth) acrylate having an amine ester bond is preferably 95% by mass or less, preferably 90% by mass or less, more preferably 85% by mass or less, and still more preferably 80% by mass. The following is better, and it is more preferable to further reduce the amount to 75% by mass or less.

具有胺酯鍵之(甲基)丙烯酸酯亦即胺酯系化合物(A1)以外之作為(A)成分所包含之(甲基)丙烯酸酯,較佳為從下述化合物之中選出之1種以上的化合物(以下亦稱為「化合物(A2)」):具有醯胺鍵之(甲基)丙烯酸酯化合物;使α,β-不飽和羧酸與多元醇進行反應而得之化合物;雙酚A系(甲基)丙烯酸酯化合物;使α,β-不飽和羧酸與含環氧丙基化合物進行反應而得之化合物;在(甲基)丙烯酸烷酯之共聚物中導入有乙烯性不飽和基之化合物。 The (meth) acrylate having an amine ester bond, that is, the (meth) acrylate which is contained in the component (A) other than the amine ester compound (A1), is preferably one selected from the following compounds. The above compound (hereinafter also referred to as "compound (A2)"): a (meth) acrylate compound having a guanamine bond; a compound obtained by reacting an α,β-unsaturated carboxylic acid with a polyhydric alcohol; bisphenol A-based (meth) acrylate compound; a compound obtained by reacting an α,β-unsaturated carboxylic acid with a glycidyl-containing compound; and introducing an ethylenicity into a copolymer of an alkyl (meth) acrylate A compound of a saturated group.

此等能夠單獨使用或併用2種以上。 These can be used alone or in combination of two or more.

具有胺酯鍵之(甲基)丙烯酸酯亦即胺酯系化合物(A1)與化合物(A2)之質量比[(A1)/(A2)],以10/90~95/5為佳,較佳是30/70~90/10,更佳是50/50~85/15,進而更佳是55/45~80/20,進一歩以60/40~75/25為更佳,該化合物(A2)為從下述化合物之中選出之1種以上:具有醯胺鍵之(甲基)丙烯酸酯化合物;使α,β-不飽和羧酸與多元醇進行反應而得之化合物;雙酚A系(甲基)丙烯酸酯化合物;使α,β-不飽和羧 酸與含環氧丙基化合物進行反應而得之化合物;在(甲基)丙烯酸烷酯之共聚物中導入有乙烯性不飽和基之化合物。 The (meth) acrylate having an amine ester bond, that is, the mass ratio of the amine ester compound (A1) to the compound (A2) [(A1)/(A2)], preferably 10/90 to 95/5, Preferably, it is 30/70~90/10, more preferably 50/50~85/15, and even more preferably 55/45~80/20, and more preferably 60/40~75/25, the compound ( A2) is one or more selected from the group consisting of a (meth) acrylate compound having a guanamine bond; a compound obtained by reacting an α,β-unsaturated carboxylic acid with a polyol; bisphenol A a (meth) acrylate compound; an α,β-unsaturated carboxy group A compound obtained by reacting an acid with a glycidyl group-containing compound; and a compound having an ethylenically unsaturated group introduced into a copolymer of an alkyl (meth)acrylate.

<具有醯胺鍵之(甲基)丙烯酸酯化合物> <(meth)acrylate compound having a guanamine bond>

從解析度及密著性之觀點來看,具有醯胺鍵之(甲基)丙烯酸酯化合物,以下述通式(1)所示的化合物為佳。 From the viewpoint of the resolution and the adhesion, the (meth) acrylate compound having a guanamine bond is preferably a compound represented by the following formula (1).

上述式(1)中,R31、R32及R33分別獨立地表示2價有機基,R34表示氫原子或甲基,R35及R36分別獨立地表示氫原子、碳數1~4的烷基或苯基。 In the above formula (1), R 31 , R 32 and R 33 each independently represent a divalent organic group, R 34 represents a hydrogen atom or a methyl group, and R 35 and R 36 each independently represent a hydrogen atom and have a carbon number of 1 to 4; Alkyl or phenyl.

作為2價有機基,可舉例如:可具有取代基之伸苯基、可具有取代基之伸吡啶基、碳數1~10的可分枝之伸烷基、碳數1~10的可具有取代基之含脂環結構基等。 The divalent organic group may, for example, be a phenyl group which may have a substituent, a pyridine group which may have a substituent, a branchable alkyl group having a carbon number of 1 to 10, or a carbon number of 1 to 10. An alicyclic structure-containing group or the like of a substituent.

上述通式(1)所示的聚合性化合物,以具有醯胺鍵之二(甲基)丙烯酸酯為佳,該具有醯胺鍵之二(甲基)丙烯酸酯是使含唑啉(oxazoline)基化合物與含羧基化合物及/或含酚性羥基化合物進行反應而得。藉由使用此化合物,即容易獲得高彈性且高耐熱性的樹脂硬化物。 The polymerizable compound represented by the above formula (1) is preferably a di(meth)acrylate having a guanamine bond, and the di(meth)acrylate having a guanamine bond is contained. An oxazoline-based compound is obtained by reacting a carboxyl group-containing compound and/or a phenol-containing hydroxy compound. By using this compound, it is easy to obtain a cured resin of high elasticity and high heat resistance.

這樣的上述通式(1)所示的聚合性化合物,能夠藉由下述方式來獲得,例如:使下述通式(2)所示的雙唑啉與1分子中具有2個酚性羥基之化合物與(甲基)丙烯酸進行反應。 The polymerizable compound represented by the above formula (1) can be obtained by, for example, a double represented by the following formula (2) The oxazoline reacts with (meth)acrylic acid with a compound having two phenolic hydroxyl groups in one molecule.

通式(2)中,Y4表示2價有機基,以可具有取代基之伸苯基、可具有取代基之伸吡啶基、或碳數1~10的可分枝之伸烷基、碳數1~10的可具有取代基之含脂環結構基為佳。此外,R45及R46分別獨立表示氫原子、碳數1~4的烷基或苯基。 In the formula (2), Y 4 represents a divalent organic group, a phenyl group which may have a substituent, a pyridyl group which may have a substituent, or a branched alkyl group having a carbon number of 1 to 10, carbon The alicyclic structure-containing group having a substituent of 1 to 10 is preferred. Further, R 45 and R 46 each independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms or a phenyl group.

作為通式(2)所示的雙唑啉,可舉例如:2,2’-(1,3-伸苯基)雙-2-唑啉、2,6-雙(4-異丙基-2-唑啉-2-基)吡啶、2-2’-亞異丙基雙(4-苯基-2-唑啉)、2-2’-亞異丙基雙(4-三級丁基-2-唑啉)等。此等能夠單獨使用或組合2種以上使用。 As the double shown in the general formula (2) An oxazoline, for example, 2,2'-(1,3-phenylene)bis-2- Oxazoline, 2,6-bis(4-isopropyl-2- Oxazolin-2-yl)pyridine, 2-2'-isopropylidene bis(4-phenyl-2- Oxazoline), 2-2'-isopropylidene bis(4-tert-butyl-2- Oxazoline) and the like. These can be used individually or in combination of 2 or more types.

作為1分子中具有2個酚性羥基之化合物,可舉例如:聯苯酚、四甲基聯苯酚、二羥基萘、二羥基甲基萘、二羥基二甲基萘、雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸(bis(4-hydroxyphenyl)sulfone)、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基) 丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀等。 Examples of the compound having two phenolic hydroxyl groups in one molecule include biphenol, tetramethylbiphenol, dihydroxynaphthalene, dihydroxymethylnaphthalene, dihydroxydimethylnaphthalene, and bis(4-hydroxyphenyl). Ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, bis(4-hydroxy-3,5-dichlorophenyl) ketone, bis(4-hydroxyphenyl)anthracene (bis) 4-hydroxyphenyl)sulfone), bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy-3,5-dichlorophenyl)anthracene, bis(4-hydroxyphenyl) Hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane, bis(4-hydroxyphenyl) ) dimethyl decane, bis(4-hydroxy-3,5-dimethylphenyl)dimethyl decane, bis(4-hydroxy-3,5-dichlorophenyl)dimethyl decane, bis (4) -hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl)methane, 2,2-bis(4-hydroxyl Phenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-dichlorophenyl) Propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl)ether, double (4-hydroxy-3,5-dimethylphenyl)ether, bis(4-hydroxy-3,5-dichlorophenyl)ether, 9,9-bis(4-hydroxyphenyl)anthracene, 9, 9-bis(4-hydroxy-3-methylphenyl)anthracene, 9,9-bis(4-hydroxy-3-chlorophenyl)anthracene, 9,9-bis(4-hydroxy-3-bromophenyl) ), 9,9-bis(4-hydroxy-3-fluorophenyl)fluorene, 9,9-bis(4-hydroxy-3-methoxyphenyl)fluorene, 9,9-bis(4-hydroxyl) -3,5-dimethylphenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dibromo Phenyl) oxime and the like.

此等中,以2,2-雙(4-羥基-3,5-二氯苯基)丙烷為佳。此等能夠單獨使用或組合2種以上使用。 Among these, 2,2-bis(4-hydroxy-3,5-dichlorophenyl)propane is preferred. These can be used individually or in combination of 2 or more types.

唑啉基化合物與含羧基化合物及/或含酚性羥基化合物進行之反應,以在反應溫度50~200℃進行為佳。若反應溫度為50℃以上,則能夠使反應有效率地進行,若反應溫度為200℃以下,則能夠充分抑制副反應。此外,該反應可因應需要而在二甲基甲醯胺、二甲基乙醯胺、二甲基亞碸(dimethyl sulfoxide)等極性有機溶劑中進行。 Contain The reaction of the oxazoline group compound with the carboxyl group-containing compound and/or the phenol-containing hydroxy compound is preferably carried out at a reaction temperature of 50 to 200 °C. When the reaction temperature is 50° C. or higher, the reaction can be efficiently carried out, and when the reaction temperature is 200° C. or lower, the side reaction can be sufficiently suppressed. Further, the reaction can be carried out in a polar organic solvent such as dimethylformamide, dimethylacetamide or dimethyl sulfoxide as needed.

<使α,β-不飽和羧酸與多元醇進行反應而得之化合物> <Compound obtained by reacting an α,β-unsaturated carboxylic acid with a polyhydric alcohol>

作為使α,β-不飽和羧酸與多元醇進行反應而得之化合物,可舉例如:伸乙基數為2~14之聚乙二醇二(甲基)丙烯酸酯、伸丙基數為2~14之聚丙二醇二(甲基)丙烯酸酯、伸乙基數為2~14且伸丙基數為2~14之聚乙二醇-聚丙二醇二(甲基)丙烯酸酯、三羥甲基丙烷二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、環氧乙烷(EO)改質三羥甲基丙烷三(甲基)丙 烯酸酯、環氧丙烷(PO)改質三羥甲基丙烷三(甲基)丙烯酸酯、EO及PO改質三羥甲基丙烷三(甲基)丙烯酸酯、四羥甲基甲烷三(甲基)丙烯酸酯、四羥甲基甲烷四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等。此等能夠單獨使用或併用2種以上。 The compound obtained by reacting an α,β-unsaturated carboxylic acid with a polyhydric alcohol may, for example, be a polyethylene glycol di(meth)acrylate having an ethyl group number of 2 to 14 and a stretching number of 2 to 2. 14 polypropylene glycol di(meth) acrylate, polyethylene glycol-polypropylene glycol di(meth) acrylate, trimethylolpropane di (ethylene glycol) having an ethyl group number of 2 to 14 and a propyl group number of 2 to 14. Methyl) acrylate, trimethylolpropane tri(meth) acrylate, ethylene oxide (EO) modified trimethylolpropane tri(methyl) propyl Ethyl ester, propylene oxide (PO) modified trimethylolpropane tri(meth) acrylate, EO and PO modified trimethylolpropane tri(meth) acrylate, tetramethylol methane three ( Methyl) acrylate, tetramethylol methane tetra(meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like. These can be used alone or in combination of two or more.

<雙酚A系(甲基)丙烯酸酯化合物> <Bisphenol A-based (meth) acrylate compound>

作為雙酚A系(甲基)丙烯酸酯化合物,可舉例如:2,2-雙(4-((甲基)丙烯醯氧基聚乙氧基)苯基)丙烷、2,2-雙(4-((甲基)丙烯醯氧基聚丙氧基)苯基)丙烷、2,2-雙(4-((甲基)丙烯醯氧基聚丁氧基)苯基)丙烷、2,2-雙(4-((甲基)丙烯醯氧基聚乙氧基聚丙氧基)苯基)丙烷等。此等能夠單獨使用或併用2種以上。 Examples of the bisphenol A-based (meth) acrylate compound include 2,2-bis(4-((meth)propenyloxypolyethoxy)phenyl)propane, 2,2-bis ( 4-((meth)acryloxypolypropoxy)phenyl)propane, 2,2-bis(4-((meth)propenyloxypolybutoxy)phenyl)propane, 2,2 - bis(4-((meth)acryloxypolyethoxypolypropyloxy)phenyl)propane or the like. These can be used alone or in combination of two or more.

<使α,β-不飽和羧酸與含環氧丙基化合物進行反應而得之化合物> <Compound obtained by reacting an α,β-unsaturated carboxylic acid with a glycidyl group-containing compound>

作為使α,β-不飽和羧酸與含環氧丙基化合物進行反應而得之化合物,可舉例如使環氧樹脂與(甲基)丙烯酸進行反應而得之環氧丙烯酸酯化合物等,該環氧樹脂為:酚醛清漆型環氧樹脂、雙酚型環氧樹脂、水楊醛型環氧樹脂等。 The compound obtained by reacting an α,β-unsaturated carboxylic acid and a glycidyl group-containing compound may, for example, be an epoxy acrylate compound obtained by reacting an epoxy resin with (meth)acrylic acid. The epoxy resin is a novolak type epoxy resin, a bisphenol type epoxy resin, a salicylaldehyde type epoxy resin, or the like.

此外,亦能夠使用酸改質環氧丙烯酸酯化合物,該酸改質環氧丙烯酸酯化合物是使四氫鄰苯二甲酸酐等酸酐與上述環氧丙烯酸酯化合物之OH基進行反應而得。這樣的酸改質環氧丙烯酸酯化合物,商業上能夠取得例如下述通式(3)所示的EA-6340(新中村化學製,商品名)。 Further, an acid-modified epoxy acrylate compound obtained by reacting an acid anhydride such as tetrahydrophthalic anhydride with an OH group of the above epoxy acrylate compound can also be used. For the acid-modified epoxy acrylate compound, for example, EA-6340 (manufactured by Shin-Nakamura Chemical Co., Ltd., trade name) represented by the following formula (3) can be obtained commercially.

[式中,m與n之比為100/0~0/100]。 [wherein, the ratio of m to n is 100/0 to 0/100].

<在(甲基)丙烯酸烷酯之共聚物中導入有乙烯性不飽和基之化合物> <Compound in which an ethylenically unsaturated group is introduced into a copolymer of an alkyl (meth) acrylate>

作為在(甲基)丙烯酸烷酯之共聚物中導入有乙烯性不飽和基之化合物,可舉例如:在(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯等之共聚物中導入有乙烯性不飽和基之化合物。此等能夠單獨使用或併用2種以上。 The compound having an ethylenically unsaturated group introduced into the copolymer of the alkyl (meth)acrylate may, for example, be methyl (meth)acrylate, ethyl (meth)acrylate or butyl (meth)acrylate. A compound in which an ethylenically unsaturated group is introduced into a copolymer of an ester or 2-ethylhexyl (meth)acrylate. These can be used alone or in combination of two or more.

從提高耐熱性及密著性之觀點來看,以上作為(A)成分所包含之(甲基)丙烯酸酯中,以包含碳-氮鍵之(甲基)丙烯酸酯為佳,以具有醯胺鍵之(甲基)丙烯酸酯化合物及/或具有胺酯鍵之(甲基)丙烯酸酯化合物較佳。 From the viewpoint of improving heat resistance and adhesion, the (meth) acrylate contained in the above (A) component is preferably a (meth) acrylate containing a carbon-nitrogen bond, and has a decylamine. The (meth) acrylate compound of the bond and/or the (meth) acrylate compound having an amine ester bond is preferred.

此外,從使交聯密度提高而使密著性提高之觀點、以及透明性、解析度、耐熱性之平衡之觀點來看,以包含具有醯胺鍵之(甲基)丙烯酸酯化合物及具有胺酯鍵之(甲基)丙烯酸酯化合物作為(A)成分為佳。 In addition, from the viewpoint of improving the adhesion density and improving the adhesion, and the balance between transparency, resolution, and heat resistance, a (meth) acrylate compound having a guanamine bond and an amine are contained. The (meth) acrylate compound of the ester bond is preferred as the component (A).

當併用上述化合物時,具有胺酯鍵之(甲基)丙烯酸酯化合物與具有醯胺鍵之(甲基)丙烯酸酯化合物之含有比例[具有胺 酯鍵之(甲基)丙烯酸酯化合物/具有醯胺鍵之(甲基)丙烯酸酯化合物],以40/60~90/10為佳,以50/50~85/15較佳,以60/40~80/20更佳。 When the above compound is used in combination, the ratio of the (meth) acrylate compound having an amine ester bond to the (meth) acrylate compound having a guanamine bond [having an amine The (meth) acrylate compound of the ester bond / the (meth) acrylate compound having a guanamine bond is preferably 40/60 to 90/10, preferably 50/50 to 85/15, and 60/ 40~80/20 is better.

((B)成分:光聚合起始劑) (Component (B): Photopolymerization initiator)

本發明中所使用之(B)光聚合起始劑,只要會因活性光線而生成游離自由基,則無特別限制。 The (B) photopolymerization initiator used in the present invention is not particularly limited as long as it generates free radicals due to active light.

作為(B)光聚合起始劑,可舉例如:醯基膦氧化物、肟酯類、芳香族酮、醌類、安息香醚化合物、苯甲基衍生物、2,4,5-三芳基咪唑二聚物、吖啶(acridine)衍生物、香豆素系化合物、N-苯基甘胺酸、N-苯基甘胺酸衍生物等。再者,本發明中所使用之光聚合起始劑(B),可藉由慣用方法來合成,亦可取得市售物。 The (B) photopolymerization initiator may, for example, be a mercaptophosphine oxide, an oxime ester, an aromatic ketone, an anthracene, a benzoin ether compound, a benzyl derivative or a 2,4,5-triarylimidazole. Dimer, acridine derivative, coumarin compound, N-phenylglycine, N-phenylglycine derivative, and the like. Further, the photopolymerization initiator (B) used in the present invention can be synthesized by a conventional method, and a commercially available product can also be obtained.

從提高光硬化性和高感度化、硬化膜之透明性之觀點來看,此等中,以醯基膦氧化物、肟酯類為佳。 From the viewpoint of improving photocurability, high sensitivity, and transparency of the cured film, among these, a mercaptophosphine oxide or an oxime ester is preferred.

再者,(B)光聚合起始劑能夠單獨使用或組合2種以上使用。 Further, the (B) photopolymerization initiator may be used singly or in combination of two or more.

<醯基膦氧化物> <Mercaptophosphine oxide>

作為醯基膦氧化物,可舉例如:雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物(市售物:「IRGACURE-819(BASF公司製)」)、2,4,6-三甲基苯甲醯基-二苯基-膦氧化物(市售物:「LUCIRIN TPO(BASF公司製)」)等。 Examples of the mercaptophosphine oxide include bis(2,4,6-trimethylbenzylidene)-phenylphosphine oxide (commercial product: "IRGACURE-819 (manufactured by BASF Corporation)"), 2,4,6-trimethylbenzylidene-diphenyl-phosphine oxide (commercial product: "LUCIRIN TPO (manufactured by BASF Corporation)").

<肟酯類> <肟 esters>

作為肟酯類,可舉例如:下述式(4)所示的1,2-辛二酮-1-[4-(苯硫基)苯基]-2-(O-苯甲醯基肟)(市售物: 「IRGACURE-OXE01(BASF公司製)」)、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]乙酮-1-(O-乙醯基肟)(市售物:「IRGACURE-OXE02(BASF公司製)」)、1-苯基-1,2-丙二酮-2-[O-(乙氧羰基)肟](市售物:「Quantacure-PDO(日本化藥公司製)」)等。 Examples of the oxime esters include 1,2-octanedione-1-[4-(phenylthio)phenyl]-2-(O-benzopyridinyl) represented by the following formula (4). ) (commercially available: "IRGACURE-OXE01 (manufactured by BASF Corporation)"), 1-[9-ethyl-6-(2-methylbenzhydryl)-9H-indazol-3-yl]ethanone-1-(O- Ethyl acetate (commercial product: "IRGACURE-OXE02 (manufactured by BASF)"), 1-phenyl-1,2-propanedione-2-[O-(ethoxycarbonyl)anthracene] (commercially available) ("Quantacure-PDO (manufactured by Nippon Kayaku Co., Ltd.)").

<芳香族酮> <aromatic ketone>

作為芳香族酮,可舉例如:二苯甲酮、N,N’-四甲基-4,4’-二胺基二苯甲酮(米其勒(Michler's)酮)、N,N’-四乙基-4,4’-二胺基二苯甲酮、4-甲氧基-4’-二甲基胺基二苯甲酮、2,2-二甲氧基-1,2-二苯基乙-1-酮(市售物:「IRGACURE-651(BASF公司製)」)、2-苯甲基-2-二甲基胺基-1-(4-(N-嗎啉基)苯基)丁-1-酮(市售物:「IRGACURE-369(BASF公司製)」)、2-甲基-1-[4-(甲硫基)苯基]-2-(N-嗎啉基)丙-1-酮(市售物:「IRGACURE-907(BASF公司製)」)等。 The aromatic ketone may, for example, be benzophenone, N,N'-tetramethyl-4,4'-diaminobenzophenone (Michler's ketone), N, N'- Tetraethyl-4,4'-diaminobenzophenone, 4-methoxy-4'-dimethylaminobenzophenone, 2,2-dimethoxy-1,2-di Phenylethyl-1-one (commercial product: "IRGACURE-651 (manufactured by BASF)"), 2-benzyl-2-dimethylamino-1-(4-(N-morpholinyl) Phenyl)butan-1-one (commercial product: "IRGACURE-369 (manufactured by BASF)"), 2-methyl-1-[4-(methylthio)phenyl]-2-(N-? Polinyl)propan-1-one (commercial product: "IRGACURE-907 (manufactured by BASF Corporation)").

<醌類> <醌>

作為醌類,可舉例如:2-乙基蒽醌、菲醌、2-三級丁基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-苯并蒽醌、2-苯基蒽醌、2,3-二苯基蒽醌、1-氯蒽醌、2-甲基蒽醌、1,4-萘醌、9,10-菲醌、2-甲基-1,4-萘醌、2,3-二甲基蒽醌等。 Examples of the hydrazines include 2-ethyl hydrazine, phenanthrenequinone, 2-tributyl sulfonium, octamethyl hydrazine, 1,2-benzopyrene, and 2,3-benzopyrene. , 2-phenylindole, 2,3-diphenylanthracene, 1-chloroindole, 2-methylindole, 1,4-naphthoquinone, 9,10-phenanthrenequinone, 2-methyl- 1,4-naphthoquinone, 2,3-dimethylhydrazine, and the like.

<安息香醚化合物> <benzoin ether compound>

作為安息香醚化合物,可舉例如:安息香甲基醚、安息香乙基醚、安息香苯基醚等。 Examples of the benzoin ether compound include benzoin methyl ether, benzoin ethyl ether, and benzoin phenyl ether.

<苯甲基衍生物> <Benzylmethyl derivative>

作為苯甲基衍生物,可舉例如:安息香、甲基安息香、乙基安息香等安息香化合物;苯甲基二甲基縮酮等。 Examples of the benzyl derivative include benzoin compounds such as benzoin, methylbenzoin, and ethyl benzoin; and benzyl dimethyl ketal.

<2,4,5-三芳基咪唑二聚物> <2,4,5-triaryl imidazole dimer>

作為2,4,5-三芳基咪唑二聚物,可舉例如:2-(2-氯苯基)-1-[2-(2-氯苯基)-4,5-二苯基-1,3-二唑-2-基]-4,5-二苯基咪唑等2-(鄰氯苯基)-4,5-二苯基咪唑二聚物;2-(鄰氯苯基)-4,5-二(甲氧基苯基)咪唑二聚物;2-(鄰氟苯基)-4,5-二苯基咪唑二聚物;2-(鄰甲氧基苯基)-4,5-二苯基咪唑二聚物;2-(對甲氧基苯基)-4,5-二苯基咪唑二聚物等。 As the 2,4,5-triaryl imidazole dimer, for example, 2-(2-chlorophenyl)-1-[2-(2-chlorophenyl)-4,5-diphenyl-1 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer such as 3-oxazol-2-yl]-4,5-diphenylimidazole; 2-(o-chlorophenyl)- 4,5-bis(methoxyphenyl)imidazole dimer; 2-(o-fluorophenyl)-4,5-diphenylimidazole dimer; 2-(o-methoxyphenyl)-4 , 5-diphenylimidazole dimer; 2-(p-methoxyphenyl)-4,5-diphenylimidazole dimer, and the like.

<吖啶衍生物> <Acridine derivative>

作為吖啶衍生物,可舉例如:9-苯基吖啶、1,7-雙(9,9’-吖啶基)庚烷等。 The acridine derivative may, for example, be 9-phenylacridine or 1,7-bis(9,9'-acridinyl)heptane.

<香豆素系化合物> <Coumarin Compound>

作為香豆素系化合物,可舉例如:7-胺基-4-甲基香豆素、7-二甲胺基-4-甲基香豆素、7-二乙胺基-4-甲基香豆素、7-甲胺基-4-甲基香豆素、7-乙胺基-4-甲基香豆素、7-二甲胺基環戊并[c]香豆素、7-胺基環戊并[c]香豆素、7-二乙胺基環戊并[c]香豆素、4,6-二甲基-7-乙胺基香豆素、4,6-二乙基-7-乙胺基香豆素、4,6-二甲基-7-二乙胺基香豆素、4,6-二甲基-7-二甲胺基香豆素、4,6-二乙基-7-乙胺基香豆素、4,6-二乙基-7-二甲 胺基香豆素、2,3,6,7,10,11-己烷氫-1H,5H-環戊并[3,4][1]苯并哌喃并[6,7,8-ij]喹12(9H)-酮、7-二乙胺基-5’,7’-二甲氧基-3,3’-羰基雙香豆素、3,3’-羰基雙[7-(二乙胺基)香豆素]、7-二乙胺基-3-噻吩氧基香豆素等。 Examples of the coumarin-based compound include 7-amino-4-methylcoumarin, 7-dimethylamino-4-methylcoumarin, and 7-diethylamino-4-methyl. Coumarin, 7-methylamino-4-methylcoumarin, 7-ethylamino-4-methylcoumarin, 7-dimethylaminocyclopenta[c]coumarin, 7- Aminocyclopenta[c]coumarin, 7-diethylaminocyclopenta[c]coumarin, 4,6-dimethyl-7-ethylaminocoumarin, 4,6-di Ethyl-7-ethylaminocoumarin, 4,6-dimethyl-7-diethylaminocoumarin, 4,6-dimethyl-7-dimethylaminocoumarin, 4, 6-Diethyl-7-ethylaminocoumarin, 4,6-diethyl-7-dimethylaminocoumarin, 2,3,6,7,10,11-hexanehydrogen-1H ,5H-cyclopenta[3,4][1]benzopyrano[6,7,8-ij]quina 12(9H)-ketone, 7-diethylamino-5',7'-dimethoxy-3,3'-carbonyl dicoumarin, 3,3'-carbonyl bis[7-(diethylamine) Keto), 7-diethylamino-3-thienyloxycoumarin, and the like.

相對於(A)成分100質量份,光聚合起始劑(B)之調配量,以0.1~20質量份為佳,以0.5~10質量份較佳,以0.75~5質量份更佳。將該調配量設為上述範圍,即能夠使感光性樹脂組成物之感度及光硬化性提高,而防止光阻形狀惡化,並且使圖案之形狀良好。 The amount of the photopolymerization initiator (B) to be added is preferably 0.1 to 20 parts by mass, more preferably 0.5 to 10 parts by mass, even more preferably 0.75 to 5 parts by mass, per 100 parts by mass of the component (A). When the amount is adjusted to the above range, the sensitivity and photocurability of the photosensitive resin composition can be improved, and the shape of the resist can be prevented from being deteriorated, and the shape of the pattern can be improved.

((C)成分:抗氧化劑) ((C) component: antioxidant)

本發明之樹脂組成物中,可進而調配(C)抗氧化劑。 In the resin composition of the present invention, (C) an antioxidant may be further formulated.

作為所調配之(C)抗氧化劑,無特別限制,以調配具有受阻酚系結構之化合物(以下亦稱為「受阻酚系化合物」)為佳。 The (C) antioxidant to be formulated is not particularly limited, and a compound having a hindered phenol-based structure (hereinafter also referred to as a "hindered phenol-based compound") is preferably added.

再者,作為本發明中所使用之「受阻酚系化合物」,可舉例如:1分子中具有至少1個下述式(5)所示的基(受阻酚基)之化合物。 In addition, the "hindered phenol type compound" used in the present invention may, for example, be a compound having at least one group (hindered phenol group) represented by the following formula (5) in one molecule.

上述式(5)中,R52、R53分別表示氫原子、直鏈狀烷基、或分枝狀烷基。再者,作為直鏈狀烷基,可舉例如:甲 基、乙基、丙基、丁基等。作為分枝狀烷基,可舉例如:異丙基、異丁基、三級丁基等。1分子中具有複數個式(5)所示的基時,複數個基中,R52及R53可相同或不同。此外,式(5)中之芳香族環中,除了酚基、R52、R53以外,亦可具有低烷基等的基。 In the above formula (5), R 52 and R 53 each independently represent a hydrogen atom, a linear alkyl group or a branched alkyl group. Further, examples of the linear alkyl group include a methyl group, an ethyl group, a propyl group, and a butyl group. Examples of the branched alkyl group include an isopropyl group, an isobutyl group, and a tertiary butyl group. When a plurality of groups represented by the formula (5) are present in one molecule, R 52 and R 53 may be the same or different in a plurality of groups. Further, the aromatic ring in the formula (5) may have a group such as a lower alkyl group in addition to the phenol group, R 52 and R 53 .

本發明中所使用之受阻酚系化合物(C),以上述式(5)中之R52及/或R53是分枝狀烷基之化合物為佳,以R52及R53中的至少一者是三級丁基之化合物較佳,以R52及R53均是三級丁基之化合物更佳。 The hindered phenol-based compound (C) used in the present invention is preferably a compound wherein R 52 and/or R 53 in the above formula (5) is a branched alkyl group, and at least one of R 52 and R 53 is used. The compound which is a tertiary butyl group is more preferable, and the compound in which R 52 and R 53 are each a tertiary butyl group is more preferable.

再者,這樣的受阻酚系化合物(C),可藉由慣用方法來合成,亦可取得市售物。 Further, such a hindered phenol compound (C) can be synthesized by a conventional method, and a commercially available product can also be obtained.

作為本發明中所使用之受阻酚系化合物(C),可舉例如:季戊四醇肆[3-(3,5-二(三級丁基)-4-羥基苯基)丙酸酯](市售物:「IRGANOX 1010(BASF公司製)」)、雙(3-三級丁基-4-羥基-5-甲基苯丙酸)伸乙基雙(氧伸乙基)酯(市售物:「IRGANOX 245(BASF公司製)」)、4-[[4,6-雙(辛硫基)-1,3,5-三-2-基]胺基]-2,6-二(三級丁基)苯酚(市售物:「IRGANOX 565(BASF公司製)」)、3-(3,5-二(三級丁基)-4-羥基苯基)丙酸十八烷酯(市售物:「IRGANOX 1076(BASF公司製)」)、N,N’-(1,6-己二基)雙[3,5-雙(1,1-二甲基乙基)-4-羥基苯丙醯胺](市售物:「IRGANOX 1098(BASF公司製)」)、參(4-三級丁基-3-羥基-2,6-二甲基苯甲基)異氰脲酸酯(市售物:「CYANOX 1790(American Cyanamid公司製)」)、6-三級丁基-4-[3-[(2,4,8,10-四(三級丁基)二苯并[d,f][1,3,2]二氧雜磷 雜環庚-6-基)氧基]丙基]-2-甲基苯酚(市售物:「Sumilizer GP(住友化學公司製)」)、3,9-雙[1,1-二甲基-2-{β-(3-三級丁基-4-羥基-5-甲基苯基)丙醯氧基}乙基]-2,4,8,10-四氧雜螺[5,5]十一烷(市售物:「ADEKA STAB AO80(ADEKA公司製)」)、2,2’-亞甲基雙(4-乙基-6-三級丁基苯酚)(市售物:「YOSHINOX 425(API Corporation公司製)」)等。 The hindered phenol-based compound (C) used in the present invention may, for example, be barium pentaerythritol [3-(3,5-di(tri-butyl)-4-hydroxyphenyl)propionate] (commercially available) "IRGANOX 1010 (manufactured by BASF)"), bis(3-tert-butyl-4-hydroxy-5-methylphenylpropionic acid)-extended ethyl bis(oxyethyl) ester (commercial product: "IRGANOX 245 (manufactured by BASF Corporation)"), 4-[[4,6-bis(octylthio)-1,3,5-three -2-yl]amino]-2,6-di(tributyl)phenol (commercial product: "IRGANOX 565 (manufactured by BASF)"), 3-(3,5-di(tributyl) Octadecyl 4-hydroxyphenyl)propionate (commercial product: "IRGANOX 1076 (manufactured by BASF)"), N,N'-(1,6-hexanediyl) bis [3,5- Bis(1,1-dimethylethyl)-4-hydroxybenzamide] (commercial product: "IRGANOX 1098 (manufactured by BASF)"), ginseng (4-tertiary butyl-3-hydroxy-) 2,6-Dimethylbenzyl)isocyanurate (commercial product: "CYANOX 1790 (manufactured by American Cyanamid)"), 6-tertiary butyl-4-[3-[(2,4) ,8,10-tetrakis(tributyl)dibenzo[d,f][1,3,2]dioxaphosphin-6-yloxy]propyl]-2-methyl Phenol (commercial product: "Sumilizer GP (manufactured by Sumitomo Chemical Co., Ltd.)"), 3,9-bis[1,1-dimethyl-2-{β-(3-tert-butyl-4-hydroxy-5) -Methylphenyl)propenyloxy}ethyl]-2,4,8,10-tetraoxaspiro[5,5]undecane (commercial product: "ADEKA STAB AO80 (made by ADEKA)" ), 2,2'-methylenebis(4-ethyl-6-tributylphenol) (commercial product: "YOSHINOX 425 (manufactured by API Corporation)").

特別是從分子量及溶解性之觀點來看,此等中,以季戊四醇肆[3-(3,5-二(三級丁基)-4-羥基苯基)丙酸酯](市售物:IRGANOX 1010)為佳。 Particularly, from the viewpoints of molecular weight and solubility, among these, pentaerythritol 肆 [3-(3,5-di(tri-butyl)-4-hydroxyphenyl)propionate] (commercially available: IRGANOX 1010) is preferred.

再者,此等(C)成分能夠單獨使用或組合2種以上使用。 In addition, these (C) components can be used individually or in combination of 2 or more types.

相對於(A)成分100質量份,(C)成分之調配量,以0.1~20質量份為佳,以0.5~10質量份較佳,以0.75~5質量份更佳。將該調配量設為上述範圍,即能夠防止感光性樹脂組成物之膜物性脆化和圖案形狀惡化,並且能夠抑制高溫中之樹脂著色。 The compounding amount of the component (C) is preferably 0.1 to 20 parts by mass, more preferably 0.5 to 10 parts by mass, even more preferably 0.75 to 5 parts by mass, per 100 parts by mass of the component (A). By setting the blending amount to the above range, it is possible to prevent the film property of the photosensitive resin composition from being embrittled and the pattern shape from being deteriorated, and it is possible to suppress coloration of the resin at a high temperature.

((D)成分:光安定化劑) ((D) component: light stabilizer)

此外,本發明之感光性樹脂組成物,可進而調配(D)光安定化劑。 Further, the photosensitive resin composition of the present invention may be further formulated with a (D) light stabilizer.

作為所調配之(D)光安定化劑,可舉例如:TINUVIN 144、TINUVIN 765、TINUVIN 744DF(均為商品名,BASF公司製)等受阻胺系化合物等。 Examples of the (D) light stabilizer to be blended include hindered amine compounds such as TINUVIN 144, TINUVIN 765, and TINUVIN 744DF (all trade names, manufactured by BASF Corporation).

相對於(A)成分100質量份,(D)成分之調配量,以0.1~30質量份為佳,以0.2~20質量份較佳,以0.5~10質量份更佳。 The blending amount of the component (D) is preferably 0.1 to 30 parts by mass, more preferably 0.2 to 20 parts by mass, even more preferably 0.5 to 10 parts by mass, per 100 parts by mass of the component (A).

((E)成分:UV吸收劑) ((E) component: UV absorber)

此外,本發明之感光性樹脂組成物,可進而調配(E)UV吸收劑。 Further, the photosensitive resin composition of the present invention may be further formulated with (E) a UV absorber.

作為所調配之(E)UV吸收劑,可舉例如:TINUVIN P、TINUVIN 234、TINUVIN 326、TINUVIN 328、TINUVIN 213、TINUVIN 571(均為商品名,BASF公司製)等苯并三唑系化合物等。 Examples of the (E) UV absorber to be blended include benzotriazole-based compounds such as TINUVIN P, TINUVIN 234, TINUVIN 326, TINUVIN 328, TINUVIN 213, and TINUVIN 571 (all trade names, manufactured by BASF Corporation). .

相對於(A)成分100質量份,(E)成分之調配量,以0.1~30質量份為佳,以0.2~20質量份較佳,以0.5~10質量份更佳。 The amount of the component (E) is preferably 0.1 to 30 parts by mass, more preferably 0.2 to 20 parts by mass, even more preferably 0.5 to 10 parts by mass, per 100 parts by mass of the component (A).

((F)成分:熱自由基產生劑) ((F) component: thermal radical generator)

此外,本發明之感光性樹脂組成物,可進而調配(F)熱自由基產生劑。 Further, the photosensitive resin composition of the present invention may further contain (F) a thermal radical generating agent.

作為所調配之(F)熱自由基產生劑,可舉例如:三級丁基枯烯基過氧化物(t-butylcumyl peroxide)(市售物:「PERBUTYL C(商品名,日油股份有限公司製)」)、4,4-二(三級丁基過氧基)戊酸正丁酯(市售物:「PERHEXA V(商品名,日油股份有限公司製)」)、二枯烯基過氧化物(市售物:「PERCUMYL D(商品名,日油股份有限公司製)」)等過氧化物等。 As the (F) thermal radical generating agent to be formulated, for example, t-butylcumyl peroxide (commercial product: "PERBUTYL C (trade name, Nippon Oil Co., Ltd.) is mentioned. )))), n-butyl 4,4-di(tertiary butylperoxy)pentanoate (commercial product: "PERHEXA V (trade name, manufactured by Nippon Oil Co., Ltd.)"), dicumyl Peroxide (commercially available as a peroxide such as "PERCUMYL D (trade name, manufactured by Nippon Oil Co., Ltd.)").

相對於(A)成分100質量份,(F)成分之調配量,以0.1~30質量份為佳,以0.2~20質量份較佳,以0.5~10質量份更佳。 The amount of the component (F) is preferably 0.1 to 30 parts by mass, more preferably 0.2 to 20 parts by mass, more preferably 0.5 to 10 parts by mass, per 100 parts by mass of the component (A).

(其他成分) (other ingredients)

此外,感光性樹脂組成物中,可為了使感光性樹脂組成 物與基板間之黏著性提高,而因應需要來添加黏著助劑。作為黏著助劑,可舉例如:γ-環氧丙氧基矽烷、胺基矽烷、γ-脲基矽烷等矽烷耦合劑等。 Further, in the photosensitive resin composition, in order to make the photosensitive resin The adhesion between the object and the substrate is improved, and an adhesion aid is added as needed. Examples of the adhesion aid include a decane coupling agent such as γ-glycidoxydecane, amino decane or γ-ureido decane.

相對於(A)成分100質量份,黏著助劑之調配量,以0.1~10質量份為佳,以0.2~5質量份較佳,以0.5~2質量份更佳。 The amount of the adhesion aid is preferably 0.1 to 10 parts by mass, more preferably 0.2 to 5 parts by mass, more preferably 0.5 to 2 parts by mass, per 100 parts by mass of the component (A).

此外,本發明之感光性樹脂組成物,當塗佈於薄膜或支持基板上時,從操作性之觀點來看,以加入溶劑來設為使上述各成分溶解而成之溶液的形態為佳。 In addition, when applied to a film or a support substrate, the photosensitive resin composition of the present invention is preferably in the form of a solution obtained by dissolving the above components by adding a solvent from the viewpoint of workability.

作為所使用之溶劑,無特別限制,可舉例如:以N-甲基-2-吡咯啶酮、N,N-二甲基乙醯胺、N,N-二甲基甲醯胺、丙二醇單甲基醚乙酸酯等為主成分之極性溶劑;γ-丁內酯等溶劑。此等溶劑可單獨使用或製作成2種以上的混合物使用。 The solvent to be used is not particularly limited, and examples thereof include N-methyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, and propylene glycol. A polar solvent such as methyl ether acetate or the like; a solvent such as γ-butyrolactone. These solvents may be used singly or in combination of two or more.

當設為溶液的形態時,感光性樹脂組成物溶液之固形份濃度,以20~85質量%為佳,以30~80質量%較佳。 When it is in the form of a solution, the solid content concentration of the photosensitive resin composition solution is preferably from 20 to 85% by mass, more preferably from 30 to 80% by mass.

[感光性樹脂薄膜] [Photosensitive Resin Film]

本發明之感光性樹脂薄膜具有感光性樹脂層,該感光性樹脂層是將上述本發明之感光性樹脂組成物成形為薄膜狀而成。 The photosensitive resin film of the present invention has a photosensitive resin layer obtained by molding the photosensitive resin composition of the present invention into a film shape.

本發明之感光性樹脂薄膜,可設為僅由上述感光性樹脂層所構成之單層,亦可設為支持薄膜上具有感光性樹脂層之複數層。 The photosensitive resin film of the present invention may be a single layer composed only of the above-mentioned photosensitive resin layer, or may be a plurality of layers having a photosensitive resin layer on the support film.

本發明之感光性樹脂薄膜,能夠在使本發明之感光性樹脂組成物溶於上述溶劑中後,藉由習知的各種方法,來 塗佈於聚對苯二甲酸乙二酯等之有機薄膜等支持薄膜上,而形成塗佈膜後,乾燥而將塗佈膜中所含之溶劑予以去除,藉此於支持薄膜上形成感光性樹脂層,而以2層感光性樹脂薄膜(乾膜光阻)之形式獲得。 The photosensitive resin film of the present invention can be obtained by dissolving the photosensitive resin composition of the present invention in the above solvent, by various methods known in the art. It is applied to a support film such as an organic film such as polyethylene terephthalate, and after forming a coating film, it is dried to remove the solvent contained in the coating film, thereby forming photosensitivity on the support film. The resin layer was obtained in the form of two layers of photosensitive resin film (dry film photoresist).

並且,可於此感光性樹脂層上,積層聚對苯二甲酸乙二酯、聚乙烯薄膜、聚丙烯薄膜等保護膜,而設為3層感光性樹脂薄膜。 Further, a protective film such as polyethylene terephthalate, a polyethylene film, or a polypropylene film may be laminated on the photosensitive resin layer to form a three-layer photosensitive resin film.

此外,只要由本發明之感光性樹脂組成物所構成之感光性樹脂層具有自身支持性,則亦能夠將支持薄膜剝離,而設為無支持薄膜之僅由感光性樹脂層所構成之單層感光性樹脂薄膜。 In addition, as long as the photosensitive resin layer composed of the photosensitive resin composition of the present invention has self-supporting property, the support film can be peeled off, and the single-layer photosensitive film composed only of the photosensitive resin layer can be used as the unsupported film. Resin film.

當製作成感光性樹脂薄膜時,所構成之感光性樹脂層、支持薄膜等支持用薄板、保護膜之厚度,能夠依用途來適當設定較佳的厚度。 When a photosensitive resin film is produced, the thickness of the support sheet such as the photosensitive resin layer or the support film and the thickness of the protective film can be appropriately set depending on the application.

例如:感光性樹脂層之厚度以1~500 μm為佳,支持用薄板之厚度以10 μm~3 mm為佳,保護膜之厚度以10~200 μm為佳。 For example, the thickness of the photosensitive resin layer is preferably from 1 to 500 μm, and the thickness of the support sheet is preferably from 10 μm to 3 mm, and the thickness of the protective film is preferably from 10 to 200 μm.

再者,當將本發明之感光性樹脂薄膜用於將具有凹凸之附有電子零件的線路板等之LED元件等發光元件予以密封之用途時,從凹凸填埋性及形成平坦的面之觀點來看,感光性樹脂層之厚度,以10~500 μm為佳,以20~450 μm較佳,以30~400 μm更佳。 In addition, when the photosensitive resin film of the present invention is used for sealing a light-emitting element such as an LED element such as a wiring board with an electronic component having irregularities, from the viewpoint of the unevenness of the landfill and the formation of a flat surface The thickness of the photosensitive resin layer is preferably 10 to 500 μm, more preferably 20 to 450 μm, and still more preferably 30 to 400 μm.

此外,當將本發明之感光性樹脂薄膜用於上述用途時,從抑制在密封時在感光性樹脂層產生皺紋之觀點來看,支持 用薄板之厚度,以18~100 μm為佳,以25~75 μm較佳。 In addition, when the photosensitive resin film of the present invention is used for the above-mentioned use, it is supported from the viewpoint of suppressing generation of wrinkles in the photosensitive resin layer at the time of sealing. The thickness of the sheet is preferably 18 to 100 μm, preferably 25 to 75 μm.

感光性樹脂薄膜之膜厚30 μm的感光性樹脂層,其波長450 nm的光的光穿透率,以85%以上為佳,以87%以上較佳,以89%以上更佳。 The photosensitive resin layer having a film thickness of 30 μm in the photosensitive resin film preferably has a light transmittance of light of 450 nm or more, preferably 85% or more, more preferably 87% or more, more preferably 89% or more.

膜厚30 μm的感光性樹脂層,其波長365 nm的光的光穿透率,以65%以上為佳,以70%以上較佳,以75%以上更佳。 The photosensitive resin layer having a film thickness of 30 μm preferably has a light transmittance of light of 365 nm or more, preferably 65% or more, more preferably 70% or more, and still more preferably 75% or more.

膜厚30 μm的感光性樹脂層,其波長740 nm的光的光穿透率,以80%以上為佳,以85%以上較佳,以88%以上更佳。 The photosensitive resin layer having a film thickness of 30 μm preferably has a light transmittance of 80% or more of light having a wavelength of 740 nm, preferably 85% or more, more preferably 88% or more.

再者,此等波長的光的光穿透率之值,是意指藉由實施例中所記載之方法來測得之值。 Furthermore, the value of the light transmittance of light of such wavelengths means the value measured by the method described in the examples.

本發明之感光性樹脂組成物之硬化物亦即感光性樹脂層,具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程時樹脂著色仍很少。 The photosensitive resin layer which is a cured product of the photosensitive resin composition of the present invention has excellent heat resistance, and the heat resistance is such that the resin coloration is still small at a high temperature over a long period of heat history.

在130℃歷經500小時的熱歷程後,膜厚30 μm的感光性樹脂層,其波長450 nm的光的光穿透率,以80%以上為佳,以83%以上較佳,以85%以上更佳。 After a heat history of 500 hours at 130 ° C, the photosensitive resin layer having a film thickness of 30 μm has a light transmittance of light of 450 nm or more, preferably 80% or more, more preferably 83% or more, and 85%. The above is better.

在130℃歷經500小時的熱歷程後,膜厚30 μm的感光性樹脂層,其波長365 nm的光的光穿透率,以55%以上為佳,以60%以上較佳,以65%以上更佳。 After a heat history of 500 hours at 130 ° C, the photosensitive resin layer having a film thickness of 30 μm preferably has a light transmittance of light of 365 nm or more, preferably 55% or more, more preferably 60% or more, and 65%. The above is better.

在130℃歷經500小時的熱歷程後,膜厚30 μm的感光性樹脂層,其波長740 nm的光的光穿透率,以85%以上為佳,以87%以上較佳,以89%以上更佳。 After a heat history of 500 hours at 130 ° C, the photosensitive resin layer having a film thickness of 30 μm has a light transmittance of light of 740 nm, preferably 85% or more, more preferably 87% or more, and 89%. The above is better.

再者,上述熱歷程之各條件、光穿透率之值,是依據實施例之記載。 In addition, the conditions of each of the above thermal history and the value of the light transmittance are described in the examples.

[圖案形成方法] [Pattern forming method]

本發明之感光性樹脂組成物及感光性樹脂薄膜,能夠藉由下述方法來形成期望的圖案。圖案形成方法能夠經過下述步驟來形成期望的圖案:積層步驟,其於基板上積層使用上述感光性樹脂組成物或感光性樹脂薄膜所形成之感光性樹脂層(感光性樹脂膜);曝光步驟,其通過遮罩來對該感光性樹脂層之規定部分照射活性光線使曝光部進行光硬化;去除步驟,其使用顯影液來將感光性樹脂層之前述曝光部以外之部分予以去除;以及熱硬化步驟,其使感光性樹脂層之前述曝光部進行熱硬化而形成樹脂硬化物。 The photosensitive resin composition and the photosensitive resin film of the present invention can form a desired pattern by the following method. The pattern forming method can form a desired pattern by a laminating step of laminating a photosensitive resin layer (photosensitive resin film) formed using the photosensitive resin composition or the photosensitive resin film on a substrate; and an exposure step And irradiating the predetermined portion of the photosensitive resin layer with a mask to photo-curing the exposed portion, and removing the step of removing the portion of the photosensitive resin layer other than the exposed portion by using a developing solution; In the hardening step, the exposed portion of the photosensitive resin layer is thermally cured to form a cured resin.

(積層步驟) (layering step)

在本積層步驟中,能夠藉由將上述感光性樹脂組成物或感光性樹脂薄膜塗佈於支持基板上並乾燥、或積層於支持基板上,來形成感光性樹脂膜。 In the present lamination step, the photosensitive resin film can be formed by applying the photosensitive resin composition or the photosensitive resin film onto a support substrate, drying it, or laminating it on a support substrate.

作為支持基板,可舉例如:玻璃基板、半導體、金屬氧化物絕緣體(例如TiO2、SiO2等)、氮化矽、陶瓷壓電基板等。 Examples of the support substrate include a glass substrate, a semiconductor, a metal oxide insulator (for example, TiO 2 or SiO 2 ), a tantalum nitride, a ceramic piezoelectric substrate, and the like.

當塗佈感光性樹脂組成物時,以使其溶於上述溶劑中而設為溶液的形態為佳。而且,作為感光性樹脂組成物之塗佈方法,無特別限定,可舉例如:使用旋轉器(spinner)來進行之旋轉塗佈、噴霧塗佈、浸漬塗佈、輥塗覆等方法。此外,當使用感光性樹脂薄膜時,能夠使用積層機等來積層。 When the photosensitive resin composition is applied, it is preferably a form in which it is dissolved in the above solvent to form a solution. In addition, the coating method of the photosensitive resin composition is not particularly limited, and examples thereof include spin coating, spray coating, dip coating, and roll coating using a spinner. Further, when a photosensitive resin film is used, it can be laminated using a laminator or the like.

感光性樹脂組成物之塗佈膜厚,因塗佈手段、感光性樹脂組成物之固形份濃度及黏度等而不同,通常以使乾燥後被膜(感光性樹脂層)之膜厚成為1~500 μm之方式塗佈,以 1~300 μm為佳,以1~250 μm較佳。 The coating film thickness of the photosensitive resin composition differs depending on the coating means, the solid content concentration and the viscosity of the photosensitive resin composition, and the film thickness of the film (photosensitive resin layer) after drying is usually 1 to 500. Μm method of coating, 1 to 300 μm is preferred, and 1 to 250 μm is preferred.

特別是,若所得之被膜之膜厚為300 μm以下,則解析度良好。當使用感光性樹脂薄膜時,能夠以使感光性樹脂層之膜厚預先成為上述膜厚之方式預先形成。 In particular, when the film thickness of the obtained film is 300 μm or less, the resolution is good. When a photosensitive resin film is used, it can be formed in advance so that the film thickness of the photosensitive resin layer becomes the film thickness mentioned above.

此外,為了使乾燥後被膜之膜厚成為上述範圍,較佳是以上述溶劑來溶解上述感光性樹脂組成物而設為溶液的形態,但此溶液之黏度,以0.5~20 Pa.s為佳,以1~10 Pa.s較佳。 Further, in order to set the film thickness of the film after drying to the above range, it is preferred to dissolve the photosensitive resin composition in the solvent to form a solution, but the viscosity of the solution is 0.5 to 20 Pa. s is better, with 1~10 Pa. s is preferred.

然後,藉由使用加熱板、烘箱等來在60~120℃之溫度範圍內加熱乾燥1分鐘~1小時,即能夠於支持基板上形成感光性樹脂膜。 Then, by heating and drying in a temperature range of 60 to 120 ° C for 1 minute to 1 hour using a hot plate, an oven, or the like, a photosensitive resin film can be formed on the support substrate.

(曝光步驟) (exposure step)

在曝光步驟中,對在支持基板上成為被膜之感光性樹脂膜,因應需要而隔著具有期望的圖案之負型遮罩來對規定部分照射活性光線,使曝光部進行光硬化。 In the exposure step, the photosensitive resin film which is a film on the support substrate is irradiated with a reactive light to a predetermined portion via a negative mask having a desired pattern, and the exposed portion is photocured.

此處,作為曝光所使用之活性光線,可舉例如:紫外線、可見光、電子束、X射線等。此等中,特別是以紫外線、可見光為佳。 Here, examples of the active light used for the exposure include ultraviolet rays, visible light, electron beams, and X-rays. Among them, ultraviolet light and visible light are particularly preferable.

在本發明中,可在進行曝光步驟時,提高支持基板上之由感光性樹脂組成物所構成之被膜(感光性樹脂層)之溫度,來進行曝光。 In the present invention, when the exposure step is performed, the temperature of the film (photosensitive resin layer) composed of the photosensitive resin composition on the support substrate can be increased to perform exposure.

被膜(感光性樹脂層)之溫度,只要為能夠抑制被膜之物性變化之溫度即可,能夠因應加熱方法或加熱裝置來設定為100℃以下。此時,溫度調整,可提高具有被膜之支持基板之溫 度,且亦可使用從被膜之上方藉由溫風等來加熱、或提高曝光環境整體之溫度之方法。藉此,本發明,由於相較於不含光自由基產生劑之情形,光照射部藉由聚合反應來進行之硬化會更加進行,故在後述之顯影步驟中會抑制圖案發生塌邊或破裂等,而能夠提高圖案形成性及解析度。 The temperature of the film (photosensitive resin layer) may be a temperature that can suppress the change in the physical properties of the film, and can be set to 100 ° C or lower in accordance with the heating method or the heating device. At this time, the temperature adjustment can increase the temperature of the support substrate having the film. In addition, a method of heating from a temperature above the film by warm air or the like, or increasing the temperature of the entire exposure environment may be used. According to the present invention, since the hardening of the light-irradiating portion by the polymerization reaction is further performed as compared with the case where the photo-radical generating agent is not contained, the pattern is prevented from collapsing or cracking in the developing step described later. In addition, pattern formation and resolution can be improved.

(去除步驟) (removal step)

作為去除步驟,在藉由使用有機溶劑系或鹼性水溶液的顯影液,來將感光性樹脂層之曝光部以外之部分(未曝光部)予以去除,而形成圖案後,使感光性樹脂層之曝光部進行熱硬化,而形成由樹脂硬化物所構成之圖案。 In the removal step, a portion other than the exposed portion of the photosensitive resin layer (unexposed portion) is removed by using a developing solution of an organic solvent or an alkaline aqueous solution to form a pattern, and then the photosensitive resin layer is formed. The exposed portion is thermally cured to form a pattern composed of a cured resin.

作為顯影液,能夠使用有機溶劑或鹼性水溶液。 As the developer, an organic solvent or an alkaline aqueous solution can be used.

作為有機溶劑,可舉例如:N-甲基吡咯啶酮、乙醇、環己酮、環戊酮、丙二醇甲基醚乙酸酯等。 The organic solvent may, for example, be N-methylpyrrolidone, ethanol, cyclohexanone, cyclopentanone or propylene glycol methyl ether acetate.

作為鹼性水溶液,可舉例如:氫氧化鈉、氫氧化鉀、矽酸鈉、氨、乙胺、二乙胺、三乙胺、三乙醇胺、氫氧化四甲基銨等之水溶液。 The alkaline aqueous solution may, for example, be an aqueous solution of sodium hydroxide, potassium hydroxide, sodium citrate, ammonia, ethylamine, diethylamine, triethylamine, triethanolamine or tetramethylammonium hydroxide.

從顯影速度之觀點來看,此等中,以使用丙二醇甲基醚乙酸酯為佳。 From the viewpoint of the development speed, among these, propylene glycol methyl ether acetate is preferably used.

此外,在本去除步驟後,較佳是因應需要而使用下述液體來洗淨(沖洗):水;甲醇、乙醇、異丙醇等醇類;乙酸正丁酯、丙二醇單甲基醚乙酸酯、二乙二醇二甲基醚乙酸酯等。 Further, after the removal step, it is preferred to wash (flush) with the following liquids as needed: water; alcohols such as methanol, ethanol, isopropanol; n-butyl acetate, propylene glycol monomethyl ether acetate Ester, diethylene glycol dimethyl ether acetate, and the like.

以進而進行熱硬化步驟為佳,該熱硬化步驟是使前述感光性樹脂層之前述曝光部進行熱硬化而形成樹脂硬化 物。顯影後之熱硬化(熟成),以一面選擇溫度來階段性地升溫一面實施1~2小時為佳。熱硬化步驟中之溫度,以120~240℃為佳,當階段性地升溫時,較佳是:在120℃左右及160℃左右各進行熱處理10~50分鐘(以20~40分鐘為佳)後,在220℃左右進行熱處理30~100分鐘(以50~70分鐘為佳)。 It is preferable to further perform a thermal curing step of thermally curing the exposed portion of the photosensitive resin layer to form a resin hardening step. Things. It is preferable to carry out heat hardening (cooking) after development for 1 to 2 hours while gradually increasing the temperature while selecting the temperature. The temperature in the thermal hardening step is preferably 120 to 240 ° C. When the temperature is raised stepwise, it is preferred to heat treatment at about 120 ° C and about 160 ° C for 10 to 50 minutes (20 to 40 minutes is preferred) After that, heat treatment is carried out at about 220 ° C for 30 to 100 minutes (preferably 50 to 70 minutes).

本發明之感光性樹脂組成物,在形成為厚膜時仍能夠形成微細圖案,並且,具有優異的可見光穿透率且具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程後樹脂著色仍很少。因此,本發明之感光性樹脂組成物或感光性樹脂薄膜,適合作為LED元件等發光元件之密封構件,該發光元件被要求小型化、高密度安裝且是在高溫環境中長時間使用。換言之,使用此等本發明之感光性樹脂組成物或感光性樹脂薄膜將LED元件等發光元件的上部予以密封而成之電子零件,能夠應用作為行動電話等所使用之相機用之照明和LED顯示器之零件。 The photosensitive resin composition of the present invention can form a fine pattern even when formed into a thick film, and has excellent visible light transmittance and excellent heat resistance, which is after a long heat history at a high temperature. Resin coloring is still rare. Therefore, the photosensitive resin composition or the photosensitive resin film of the present invention is suitable as a sealing member for a light-emitting element such as an LED element, and the light-emitting element is required to be small-sized, high-density mounted, and used for a long period of time in a high-temperature environment. In other words, the electronic component obtained by sealing the upper portion of the light-emitting element such as an LED element using the photosensitive resin composition or the photosensitive resin film of the present invention can be used as a camera illumination and LED display for use in a mobile phone or the like. Parts.

以下,使用第1~3圖,來說明使用本發明之感光性樹脂薄膜來作為LED元件等發光元件之密封構件之情形。 Hereinafter, a case where the photosensitive resin film of the present invention is used as a sealing member of a light-emitting element such as an LED element will be described using the first to third drawings.

第1圖是顯示使用本發明之感光性樹脂薄膜將發光元件的上部予以密封而成之電子零件的製造方法的一例的剖面圖。 1 is a cross-sectional view showing an example of a method of manufacturing an electronic component in which an upper portion of a light-emitting element is sealed using the photosensitive resin film of the present invention.

第1圖(a)所示的附有發光元件的線路板50,具有:電子線路板51;及LED元件等發光元件55,其是設置於該線路板50上。電子線路板51,形成有使電力通過其內部之線路52a,且與形成於線路板50之表面之線路52b連接。而且,此線路 52b,是透過金屬線53來與設置於發光元件55之電極54電性連接。 The wiring board 50 with a light-emitting element shown in Fig. 1(a) has an electronic circuit board 51, and a light-emitting element 55 such as an LED element, which is provided on the wiring board 50. The electronic circuit board 51 is formed with a line 52a through which electric power is passed, and is connected to a line 52b formed on the surface of the wiring board 50. And this line 52b is electrically connected to the electrode 54 provided on the light-emitting element 55 via the metal wire 53.

發光元件55之密封,能夠像第1圖(b)所示這樣以下述方式進行:從附有發光元件的線路板50之具備發光元件55之面來積層感光性樹脂薄膜10。 The sealing of the light-emitting element 55 can be performed by laminating the photosensitive resin film 10 from the surface of the wiring board 50 with the light-emitting element provided with the light-emitting element 55 as shown in Fig. 1(b).

再者,雖在第1圖(b)中是使用感光性樹脂薄膜10來予以密封,但亦可以旋轉塗覆法等來將清漆狀的感光性樹脂組成物之溶液塗佈於基板上來予以密封。惟,從面平滑性、凹凸填埋性之觀點來看,以使用感光性樹脂薄膜來予以密封為佳。 In addition, in the first drawing (b), the photosensitive resin film 10 is used for sealing. However, a solution of a varnish-like photosensitive resin composition may be applied to a substrate by a spin coating method or the like to be sealed. . However, it is preferable to use a photosensitive resin film for sealing from the viewpoint of surface smoothness and uneven landfill.

再者,像第1圖(b)所示這樣,所使用之感光性樹脂薄膜10較佳是:預先將保護膜剝離後,在附有支持薄膜等支持用薄板11之狀態下,以使感光性樹脂層12朝向發光元件55側之方式,使用積層機110來積層。 Further, as shown in Fig. 1(b), the photosensitive resin film 10 to be used is preferably formed by peeling off the protective film in advance and attaching the supporting sheet 11 such as a support film. The layer of the resin layer 12 is laminated on the side of the light-emitting element 55 by using the laminator 110.

作為積層之條件,較佳是以下述條件來進行,例如:溫度40~100℃、壓力0.05~2 MPa、速度0.1~3.0 m/min。藉由以該條件來進行積層,而具有下述效果:凹凸填埋性良好且與基板間之密著性優異。 The conditions for the lamination are preferably carried out under the following conditions, for example, a temperature of 40 to 100 ° C, a pressure of 0.05 to 2 MPa, and a speed of 0.1 to 3.0 m/min. By laminating under these conditions, there is an effect that the unevenness and the like are excellent, and the adhesion to the substrate is excellent.

再者,當所使用之感光性樹脂薄膜10具有支持用薄板11時,支持用薄板11,以在積層後從感光性樹脂層12剝離而去除為佳。 In addition, when the photosensitive resin film 10 to be used has the support sheet 11, the support sheet 11 is preferably removed by being peeled off from the photosensitive resin layer 12 after lamination.

在使用感光性樹脂薄膜來予以密封後,以藉由曝光步驟及去除步驟來對每個發光元件個別劃分圖案為佳。 After sealing with a photosensitive resin film, it is preferable to individually pattern each of the light-emitting elements by an exposure step and a removal step.

曝光步驟,較佳是像第1圖(c)所示這樣經過下述步驟:對於感光性樹脂層,隔著具有期望的圖案之負型遮罩120,以 規定的曝光量(以100~1000 mJ/cm2為佳)來對規定部分照射活性光線,使曝光部進行光硬化。 In the exposure step, preferably, as shown in FIG. 1(c), the photosensitive resin layer is subjected to a predetermined exposure amount (100 to 1000) via a negative mask 120 having a desired pattern. Preferably, mJ/cm 2 is applied to the predetermined portion to irradiate the active light to cause the exposed portion to be photocured.

再者,曝光步驟之各條件,是與上述圖案形成方法中之曝光步驟之條件相同。 Further, the conditions of the exposure step are the same as those of the exposure step in the pattern forming method described above.

顯影步驟,較佳是像第1圖(d)所示這樣經過下述步驟:使用顯影機130,來噴射出丙二醇甲基醚乙酸酯等有機溶劑系或鹼性水溶液的顯影液,將曝光部之感光性樹脂層12a以外之部分(未曝光部)溶解去除,並對每個發光元件55個別劃分圖案,而使曝光部之感光性樹脂層12a進行熱硬化。 In the developing step, preferably, as shown in FIG. 1(d), the developing machine 130 is used to eject a developing solution of an organic solvent system such as propylene glycol methyl ether acetate or an alkaline aqueous solution to expose the film. A portion (unexposed portion) other than the photosensitive resin layer 12a is dissolved and removed, and each of the light-emitting elements 55 is individually patterned, and the photosensitive resin layer 12a of the exposed portion is thermally cured.

再者,顯影步驟之各條件,是與上述圖案形成方法中之顯影步驟之條件相同,以使用有機溶劑來進行顯影為佳。 Further, the conditions of the developing step are the same as those of the developing step in the pattern forming method described above, and it is preferred to carry out development using an organic solvent.

然後,藉由切割步驟來對每個發光元件55個別分割,而能夠獲得像第1圖(e)所示這樣的電子零件60,該電子零件60是以感光性樹脂層12a將發光元件55的上部予以密封而成。 Then, each of the light-emitting elements 55 is individually divided by the dicing step, and an electronic component 60 such as that shown in FIG. 1(e) can be obtained, and the electronic component 60 is a light-emitting element 55 with the photosensitive resin layer 12a. The upper part is sealed.

此外,像第2及3圖所示這樣,對於發光元件55之周圍形成有反射器56之附有發光元件的線路板50,使用本發明之感光性樹脂薄膜將發光元件55予以密封。 Further, as shown in FIGS. 2 and 3, the wiring board 50 with the light-emitting element of the reflector 56 is formed around the light-emitting element 55, and the light-emitting element 55 is sealed using the photosensitive resin film of the present invention.

再者,反射器56之形成,可像第2圖(a)~(b)這樣,先於電子線路板51形成反射器56後,再以金屬線53來將電子線路板51之線路52b與發光元件55之電極54連接,亦可像第3圖(a)~(b)這樣,以金屬線53來將電子線路板51之線路52b與發光元件55之電極54連接後形成。 Further, the reflector 56 can be formed by forming the reflector 56 before the electronic circuit board 51 as in the second drawing (a) to (b), and then connecting the line 52b of the electronic circuit board 51 with the metal wire 53. The electrode 54 of the light-emitting element 55 is connected, and the line 52b of the electronic circuit board 51 and the electrode 54 of the light-emitting element 55 may be connected by a metal wire 53 as shown in Figs. 3(a) to 3(b).

形成有反射器56之附有發光元件的線路板50之密封方 法,能夠像第2及3圖之(c)~(f)所示這樣,藉由與上述相同的方法來進行,而製造電子零件60,該電子零件60是以感光性樹脂層12a將發光元件55予以密封而成。 The sealing side of the circuit board 50 with the light-emitting elements of the reflector 56 is formed The method can be carried out in the same manner as described above, as shown in FIGS. 2 and 3 (c) to (f), to manufacture an electronic component 60 which emits light by the photosensitive resin layer 12a. Element 55 is sealed.

[實施例] [Examples]

以下依據實施例及比較例來更具體說明本發明,但本發明並不受下述實施例所限定。 The present invention will be more specifically described below based on examples and comparative examples, but the present invention is not limited by the following examples.

[製造例1] [Manufacturing Example 1] [胺酯丙烯酸酯之合成] [Synthesis of Amine Ester Acrylate]

在安裝有溫度計、攪拌裝置之1 L的反應容器中,加入1,4-環己烷二甲醇72.0 g、異佛酮二異氰酸酯222.2 g、環己酮380 g,並一面在氮氣氣流中攪拌,一面加熱至90℃~100℃,使其進行反應1小時。然後,加入季戊四醇三丙烯酸酯306.0 g,進行反應直到在紅外線分光分析中異氰酸酯之吸收消失為止,而獲得下述式(6)所示的胺酯丙烯酸酯之溶液。所得之溶液之固形份為60質量%。 In a reaction vessel equipped with a thermometer and a stirring device, 12.0 g of 1,4-cyclohexanedimethanol, 222.2 g of isophorone diisocyanate, and 380 g of cyclohexanone were added, and stirred under a nitrogen gas stream. The mixture was heated to 90 ° C to 100 ° C for one hour. Then, 306.0 g of pentaerythritol triacrylate was added, and the reaction was carried out until the absorption of the isocyanate disappeared in the infrared spectroscopic analysis, and a solution of the amine ester acrylate represented by the following formula (6) was obtained. The solid content of the obtained solution was 60% by mass.

[製造例2] [Manufacturing Example 2] [醯胺甲基丙烯酸酯之合成] [Synthesis of guanamine methacrylate]

在安裝有溫度計、攪拌裝置之1 L的反應容器中,加入 1,3-伸苯基雙唑啉380.0 g(2.0 mol)及雙酚A 228.0 g(1.0 mol),並在150℃攪拌10小時。然後,加入對甲氧基苯酚500 ppm及甲基丙烯酸172.0 g(2.0 mol),並在100℃攪拌6小時後,滴入二甲基乙醯胺190 g,進而在100℃攪拌6小時,在酸值成為1.1 mgKOH/g時停止攪拌,而獲得下述式(7)所示的醯胺甲基丙烯酸酯之溶液。所得之溶液之固形份為80質量%。 Adding 1,3-phenylene double in a 1 L reaction vessel equipped with a thermometer and a stirring device Oxazoline 380.0 g (2.0 mol) and bisphenol A 228.0 g (1.0 mol) were stirred at 150 ° C for 10 hours. Then, 500 ppm of p-methoxyphenol and 172.0 g (2.0 mol) of methacrylic acid were added, and after stirring at 100 ° C for 6 hours, 190 g of dimethylacetamide was added dropwise, and the mixture was further stirred at 100 ° C for 6 hours. When the acid value became 1.1 mgKOH/g, the stirring was stopped, and a solution of the guanamine methacrylate represented by the following formula (7) was obtained. The solid content of the obtained solution was 80% by mass.

[實施例1~10、比較例1~3] [Examples 1 to 10, Comparative Examples 1 to 3]

以第1表所示的調配比例(質量份、固形份比),來將(A)及(B)成分、以及矽烷耦合劑混合,而獲得實施例1~10及比較例1~3之感光性樹脂組成物之溶液。 The components (A) and (B) and the decane coupling agent were mixed in the blending ratio (parts by mass and solid fraction) shown in Table 1, and the photosensitivity of Examples 1 to 10 and Comparative Examples 1 to 3 were obtained. A solution of a resin composition.

再者,所使用之胺酯丙烯酸酯及下述所示的胺酯丙烯酸酯之重量平均分子量(Mw),是使用四氫呋喃(THF)來作為溶析液,藉由GPC法來進行測定後,以標準聚苯乙烯來換算而求出,GPC法之細節是如下所述。 Further, the weight average molecular weight (Mw) of the amine ester acrylate to be used and the amine ester acrylate shown below is measured by a GPC method using tetrahydrofuran (THF) as a solution. The standard polystyrene was obtained by conversion, and the details of the GPC method are as follows.

●裝置名:HLC-8220GPC(製品名,東曹(股)製) ●Device name: HLC-8220GPC (product name, Tosoh Co., Ltd.)

●管柱:Gelpack R-420、R-430、R-440(製品名,日立化成工業(股)製) ●Pipe column: Gelpack R-420, R-430, R-440 (product name, manufactured by Hitachi Chemical Co., Ltd.)

●偵測器:RI偵測器 ●Detector: RI detector

●管柱溫度:40℃ ● Column temperature: 40 ° C

●溶析液:四氫呋喃(THF) ●Solution solution: tetrahydrofuran (THF)

●流速:1 mL/分鐘 ● Flow rate: 1 mL / minute

●標準物質:聚苯乙烯 ●Standard material: polystyrene

第1表中之各成分是如下所示。 The components in the first table are as follows.

<(A)成分> <(A) component>

●胺酯丙烯酸酯(上述製造例1中所得之上述式(6)所示的化合物) Amine ester acrylate (the compound represented by the above formula (6) obtained in the above Production Example 1)

●UN-904(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=10,Mw=4900,根上工業股份有限公司製) ●UN-904 (trade name, acrylate compound with amine ester bond, functional group number = 10, Mw = 4900, manufactured by Gensei Industrial Co., Ltd.)

●UN-952(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=10,Mw=6500~11000,根上工業股份有限公司製) ●UN-952 (trade name, acrylate compound with amine ester bond, functional group number = 10, Mw = 6500 ~ 11000, manufactured by Gensei Industrial Co., Ltd.)

●UN-2600(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=2,Mw=2500,根上工業股份有限公司製) ●UN-2600 (trade name, acrylate compound with amine ester bond, functional group number = 2, Mw = 2500, manufactured by Gensei Industrial Co., Ltd.)

●UN-6200(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=2,Mw=6500,根上工業股份有限公司製) ●UN-6200 (trade name, acrylate compound with amine ester bond, functional group number = 2, Mw = 6500, manufactured by Gensei Industrial Co., Ltd.)

●UN-9200A(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=2,Mw=15000,根上工業股份有限公司製) ●UN-9200A (trade name, acrylate compound with amine ester bond, functional group number = 2, Mw = 15000, manufactured by Gensei Industrial Co., Ltd.)

●EBECRYL 8405(商品名,胺酯丙烯酸酯/1,6-己二醇二丙烯酸酯=80/20之加成反應物,官能基數=4,Mw=2700,DAICEL CYTEC股份有限公司製) ●EBECRYL 8405 (trade name, amine ester acrylate / 1,6-hexanediol diacrylate = 80/20 addition reactant, functional group number = 4, Mw = 2700, manufactured by DAICEL CYTEC Co., Ltd.)

●KRM 8452(商品名,具有胺酯鍵之丙烯酸酯化合物,官能基數=10,Mw=1200,DAICEL CYTEC股份有限公司製) ●KRM 8452 (trade name, acrylate compound having an amine ester bond, functional group number = 10, Mw = 1,200, manufactured by DAICEL CYTEC Co., Ltd.)

●醯胺甲基丙烯酸酯(上述製造例2中所得之上述式(7)所示的化合物) • guanamine methacrylate (the compound represented by the above formula (7) obtained in the above Production Example 2)

●EA-6340(商品名,四氫鄰苯二甲酸酐改質含有乙烯基之酚型環氧樹脂,中村化學工業股份有限公司製) ●EA-6340 (trade name, tetrahydrophthalic anhydride modified vinyl-containing phenolic epoxy resin, manufactured by Nakamura Chemical Co., Ltd.)

●BPE-100(商品名,乙氧化雙酚A二甲基丙烯酸酯,新中村化學工業股份有限公司製) ●BPE-100 (trade name, ethoxylated bisphenol A dimethacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)

●A-BPEF(商品名,含有茀骨架之二丙烯酸酯,新中村化學工業股份有限公司製) ●A-BPEF (trade name, diacrylate containing anthracene skeleton, manufactured by Shin-Nakamura Chemical Co., Ltd.)

●A-DPH(商品名,二季戊四醇六丙烯酸酯,新中村化學工業股份有限公司製) ●A-DPH (trade name, dipentaerythritol hexaacrylate, manufactured by Shin-Nakamura Chemical Co., Ltd.)

<(B)成分> <(B) component>

●IRGACURE-OXE-01(商品名,1,2-辛二酮-1-[4-(苯硫基)苯基]-2-(O-苯甲醯基肟,BASF公司製) ●IRGACURE-OXE-01 (trade name, 1,2-octanedione-1-[4-(phenylthio)phenyl]-2-(O-benzhydrylhydrazine, manufactured by BASF)

●IRGACURE-819(商品名,雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物,BASF公司製) ●IRGACURE-819 (trade name, bis(2,4,6-trimethylbenzylidene)-phenylphosphine oxide, manufactured by BASF)

<其他成分> <Other ingredients>

●矽烷耦合劑:AY43-031(商品名,TORAY Dow Corning製) ● decane coupling agent: AY43-031 (trade name, manufactured by TORAY Dow Corning)

<解析度之評估> <Evaluation of resolution>

使用旋轉塗覆器,來將實施例及比較例中所得之感光性樹脂組成物之溶液均勻地塗佈於矽基板上,並使用90℃之加熱板來乾燥5分鐘,而形成乾燥後膜厚為30 μm的感光性樹脂層。對於形成有此感光性樹脂層之基板,隔著具有孔洞直徑60 μm 的開口圖案之負型遮罩,使用接近式曝光機(商品名:UX-1000SM,USHIO電機公司製),以曝光量100 mJ/cm2來進行感光性樹脂層之曝光。曝光後,將此測試基板於有機溶劑系顯影液、亦即丙二醇單甲基醚乙酸酯中浸漬3分鐘,進行顯影。以乙酸正丁酯來將顯影後之光阻圖案洗淨,乾燥後進行觀察,並依據下述基準來評估解析度(微細圖案形成 性)。結果是如第2表所示。 A solution of the photosensitive resin composition obtained in the examples and the comparative examples was uniformly applied onto a ruthenium substrate using a spin coater, and dried using a hot plate at 90 ° C for 5 minutes to form a film thickness after drying. It is a photosensitive resin layer of 30 μm. The substrate on which the photosensitive resin layer is formed is provided with a hole diameter of 60 μm. The negative-type mask of the opening pattern was exposed to a photosensitive resin layer at a exposure amount of 100 mJ/cm 2 using a proximity exposure machine (trade name: UX-1000SM, manufactured by USHIO Electric Co., Ltd.). After the exposure, the test substrate was immersed in an organic solvent-based developer, that is, propylene glycol monomethyl ether acetate, for 3 minutes to carry out development. The developed photoresist pattern was washed with n-butyl acetate, dried, and observed, and the resolution (fine pattern formation property) was evaluated in accordance with the following criteria. The result is as shown in the second table.

A:形成有孔洞直徑60 μm 的開口,且開口部為矩形。 A: formed with a hole diameter of 60 μm The opening is rectangular.

B:雖形成有孔洞直徑60 μm 的開口,但開口部為錐形。 B: Although the hole diameter is 60 μm The opening, but the opening is tapered.

C:未形成孔洞直徑60 μm 的開口,通孔被填埋。 C: No hole diameter 60 μm was formed The opening is filled and the through hole is filled.

<初期光穿透率之測定> <Measurement of initial light transmittance>

使用旋轉塗覆器,來將實施例及比較例中所得之感光性樹脂組成物之溶液均勻地塗佈於薄玻璃基板上,並使用90℃之加熱板來乾燥5分鐘,而形成乾燥後膜厚為30 μm的感光性樹脂層。對於形成有此感光性樹脂層之測試基板,使用接近式曝光機(商品名:UX-1000SM,USHIO電機公司製),以曝光量100 mJ/cm2來進行感光性樹脂層之曝光,使其進行光硬化。然後,將感光性樹脂層在150℃加熱60分鐘並在200℃加熱60分鐘,使其完全硬化,而獲得具有膜厚30 μm的感光性樹脂層之測試基板。 A solution of the photosensitive resin composition obtained in the examples and the comparative examples was uniformly applied onto a thin glass substrate using a spin coater, and dried using a hot plate at 90 ° C for 5 minutes to form a dried film. A photosensitive resin layer having a thickness of 30 μm. The test substrate on which the photosensitive resin layer was formed was exposed to a photosensitive resin layer at a exposure amount of 100 mJ/cm 2 using a proximity exposure machine (trade name: UX-1000SM, manufactured by USHIO Electric Co., Ltd.). Perform photohardening. Then, the photosensitive resin layer was heated at 150 ° C for 60 minutes and heated at 200 ° C for 60 minutes to be completely cured, thereby obtaining a test substrate having a photosensitive resin layer having a film thickness of 30 μm.

對於此附有樹脂之玻璃的穿透率,以玻璃單體的穿透率作為參考,使用紫外-可見分光光度計「U-3310 Spectrophotometer(Hitachi High-Technologies製)」,測定波長345 nm、450 nm、740 nm的光的光穿透率。結果是如第2表所示。 For the transmittance of the resin-attached glass, the transmittance of the glass monomer was used as a reference, and an ultraviolet-visible spectrophotometer "U-3310 Spectrophotometer (manufactured by Hitachi High-Technologies)" was used to measure a wavelength of 345 nm and 450. Light transmittance of light at nm and 740 nm. The result is as shown in the second table.

<130℃/500小時後的光穿透率之測定> <Measurement of light transmittance after <130 ° C / 500 hours>

在空氣環境中,將初期光穿透率之測定中所使用之上述測試基板在130℃之環境中放置500小時後,以與初期光穿透率同樣的測定方法,來測定波長345 nm、450 nm、740 nm的光的光穿透率。結果是如第2表所示。 In the air environment, the test substrate used for the measurement of the initial light transmittance was allowed to stand in an environment of 130 ° C for 500 hours, and then the wavelength of 345 nm and 450 was measured by the same measurement method as the initial light transmittance. Light transmittance of light at nm and 740 nm. The result is as shown in the second table.

<密著性之評估> <Evaluation of adhesion>

使用旋轉塗覆器,來將實施例及比較例之感光性樹脂組成物之溶液均勻地塗佈於形成有SiO2膜之矽基板上,並使用90℃之加熱板來乾燥5分鐘,而形成乾燥後膜厚為30 μm的感光性樹脂層。對於形成有此感光性樹脂層之測試基板,使用接近式曝光機(商品名:UX-1000SM,USHIO電機公司製),以曝光量100 mJ/cm2來進行感光性樹脂層之曝光,使其進行光硬化。 A solution of the photosensitive resin compositions of the examples and the comparative examples was uniformly applied onto a crucible substrate on which an SiO 2 film was formed, and dried using a hot plate at 90 ° C for 5 minutes using a spin coater. A photosensitive resin layer having a film thickness of 30 μm after drying. The test substrate on which the photosensitive resin layer was formed was exposed to a photosensitive resin layer at a exposure amount of 100 mJ/cm 2 using a proximity exposure machine (trade name: UX-1000SM, manufactured by USHIO Electric Co., Ltd.). Perform photohardening.

然後,將此測試基板在150℃加熱60分鐘並在200℃加熱60分鐘,使其硬化。然後,將此測試基板在121℃、100%RH(相對濕度)、2大氣壓之環境中放置100小時後,藉由棋盤格測試來評估密著性。評估基準是如下所述。 Then, the test substrate was heated at 150 ° C for 60 minutes and heated at 200 ° C for 60 minutes to be hardened. Then, the test substrate was allowed to stand in an environment of 121 ° C, 100% RH (relative humidity), and 2 atm for 100 hours, and the adhesion was evaluated by a checkerboard test. The evaluation criteria are as follows.

A:觀察不到有剝離。 A: No peeling was observed.

B:能夠觀察到些許剝離。 B: A little peeling can be observed.

由第2表所示的結果可知,實施例1~10之本發明之感光性樹脂組成物,在形成為厚膜時仍能夠形成微細圖案,並且,具有優異的可見光穿透率且具有優異的耐熱性, 該耐熱性是在高溫歷經長時間的熱歷程後樹脂著色仍很少。並且,密著性亦良好。 As a result of the results shown in the second table, the photosensitive resin composition of the present invention of Examples 1 to 10 can form a fine pattern even when formed into a thick film, and has excellent visible light transmittance and excellent Heat resistance, This heat resistance is that resin coloration is still small after a long period of heat history at a high temperature. Moreover, the adhesion is also good.

另一方面,比較例1~3為不含具有胺酯鍵之(甲基)丙烯酸酯化合物之組成物,結果熱歷程後的光穿透率降低且耐熱性不良。 On the other hand, Comparative Examples 1 to 3 are compositions containing no (meth) acrylate compound having an amine ester bond, and as a result, the light transmittance after the heat history is lowered and the heat resistance is poor.

[產業上之可利用性] [Industrial availability]

本發明之感光性樹脂組成物,在形成為厚膜時仍能夠形成微細圖案,並且,具有優異的可見光穿透率且具有優異的耐熱性,該耐熱性是在高溫歷經長時間的熱歷程後樹脂著色仍很少。因此,適合作為LED元件等發光元件之密封構件,該發光元件被要求小型化、高密度安裝且是在高溫環境中長時間使用。 The photosensitive resin composition of the present invention can form a fine pattern even when formed into a thick film, and has excellent visible light transmittance and excellent heat resistance, which is after a long heat history at a high temperature. Resin coloring is still rare. Therefore, it is suitable as a sealing member of a light-emitting element such as an LED element, which is required to be miniaturized, high-density mounting, and used for a long time in a high-temperature environment.

Claims (10)

一種感光性樹脂組成物,其包含(A)(甲基)丙烯酸酯化合物與(B)光聚合起始劑,其中,作為(A)成分,包含具有胺酯鍵之(甲基)丙烯酸酯化合物。 A photosensitive resin composition comprising (A) a (meth) acrylate compound and (B) a photopolymerization initiator, wherein (A) component comprises a (meth) acrylate compound having an amine ester bond . 如請求項1所述之感光性樹脂組成物,其中,前述具有胺酯鍵之(甲基)丙烯酸酯化合物,包含:具有脂肪族骨架及脂環式骨架中的至少一種且具有胺酯鍵之(甲基)丙烯酸酯化合物。 The photosensitive resin composition according to claim 1, wherein the (meth) acrylate compound having an amine ester bond comprises at least one of an aliphatic skeleton and an alicyclic skeleton and has an amine ester bond. (Meth) acrylate compound. 如請求項1所述之感光性樹脂組成物,其中,前述具有胺酯鍵之(甲基)丙烯酸酯化合物,是下述式(A-8)所示的化合物: [式(A-8)中,R1及R2分別獨立地表示2價有機基,p是1以上的整數]。 The photosensitive resin composition according to claim 1, wherein the (meth) acrylate compound having an amine ester bond is a compound represented by the following formula (A-8): In the formula (A-8), R 1 and R 2 each independently represent a divalent organic group, and p is an integer of 1 or more]. 如請求項1所述之感光性樹脂組成物,其中,作為(A)成分,進而包含具有醯胺鍵之(甲基)丙烯酸酯化合物。 The photosensitive resin composition according to claim 1, wherein the (A) component further contains a (meth) acrylate compound having a guanamine bond. 如請求項4所述之感光性樹脂組成物,其中,前述具有醯胺鍵之(甲基)丙烯酸酯化合物,是下述通式(1)所示的化合物: [式(1)中,R31、R32及R33分別獨立地表示2價有機基,R34表示氫原子或甲基,R35及R36分別獨立地表示氫原子、碳數1~4的烷基或苯基]。 The photosensitive resin composition according to claim 4, wherein the (meth) acrylate compound having a guanamine bond is a compound represented by the following formula (1): [In the formula (1), R 31 , R 32 and R 33 each independently represent a divalent organic group, R 34 represents a hydrogen atom or a methyl group, and R 35 and R 36 each independently represent a hydrogen atom and have a carbon number of 1 to 4; Alkyl or phenyl]. 一種感光性樹脂薄膜,其具有感光性樹脂層,該感光性樹脂層是將請求項1至5中任一項所述之感光性樹脂組成物成形為薄膜狀而成。 A photosensitive resin film having a photosensitive resin layer formed by molding the photosensitive resin composition according to any one of claims 1 to 5 into a film shape. 如請求項6所述之感光性樹脂薄膜,其中,膜厚30 μm的前述感光性樹脂層,其波長450 nm的光的光穿透率為85%以上。 The photosensitive resin film according to claim 6, wherein the photosensitive resin layer having a thickness of 30 μm has a light transmittance of light of a wavelength of 450 nm of 85% or more. 如請求項6或7所述之感光性樹脂薄膜,其中,在130℃歷經500小時的熱歷程後,膜厚30 μm的前述感光性樹脂層,其波長450 nm的光的光穿透率為80%以上。 The photosensitive resin film according to claim 6 or 7, wherein the photosensitive resin layer having a film thickness of 30 μm has a light transmittance of light having a wavelength of 450 nm after a heat history of 500 hours at 130 °C. More than 80%. 一種電子零件,是使用請求項1至5中任一項所述之感光性樹脂組成物或請求項6至8中任一項所述之感光性樹脂薄膜,將發光元件的上部予以密封而成。 An electronic component which is obtained by sealing the upper portion of the light-emitting element with the photosensitive resin composition according to any one of claims 1 to 5, or the photosensitive resin film according to any one of claims 6 to 8. . 如請求項9所述之電子零件,其中,前述發光元件是LED元件。 The electronic component of claim 9, wherein the light emitting component is an LED component.
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