TW201330919A - Chemical filter device for processing low-concentration carbon disulphide - Google Patents

Abstract

The invention relates to a chemical filter device for processing low-concentration carbon disulphide. The chemical filter device includes a side frame and at least one filter nets disposed in the side frame in the form of a V-shaped crease pattern. The filter net has a V-shaped crease angle which is preferably in the range from 30 DEG to 40 DEG, better of 33 DEG. A coal-based activated carbon is utilized as a filter material for the filter net, in particular a smokeless coal-based activated carbon is utilized. Accordingly, the low-concentration of carbon disulfide at which an adverse effect can be solved, and the treatment effects for low-concentration carbon disulphide can be enhanced.

Description

Treatment of chemical filtration devices containing low concentrations of carbon disulfide contaminants

The present invention relates to a chemical filtration device for treating pollutants containing low concentrations of carbon disulfide, and more particularly to a designer who designs a sieve into a V-shaped wrinkle and uses coal-based activated carbon as a filter material.

In order to improve the process yield, the semiconductor factory usually installs a chemical filtering device in the external air-conditioning box and the air circulation area to treat the micro-pollution substances (AMC: Airborne Molecular Contamination) contained in the clean room, thereby reducing sulfur content. The influence of micro-pollutants such as substances, acidic substances, alkaline substances and volatile organic compounds (VOCs: Volatile Organic Compounds) on the process yield.

Sub-press, the boiling point is 46 ° C, the poor water-soluble pure carbon disulfide has a chloroform-like aromatic sweetness, but once the carbon disulfide is slightly impure, it will be mixed with other sulfides (such as carbonyl sulfide) and become yellowish, and there are Unpleasant rotten radish flavor; however, for contaminants containing low concentrations (about tens of ppb) of carbon disulfide, the filter media used in current chemical filtration devices are not effective in treating low concentrations of carbon disulfide.

The main object of the present invention is to solve the problem that the prior art has a poor effect on the treatment of low-concentration carbon disulfide, and has the effect of enhancing the treatment effect of low-concentration carbon disulfide.

In order to achieve the above effects, the structural features of the present invention include: a frame; and at least one screen disposed inside the frame, and the screen uses coal-based activated carbon as the filter material.

Further, the filter screen has a V-shaped pleated shape, and the V-shaped crease angle of the filter screen is preferably 30 to 40, and the V-shaped crease angle of the filter is preferably 33°.

Furthermore, the filter screen adopts anthracite-based activated carbon as a filter material; further, the filter material of the filter mesh is further synthesized into a modifier, and the modifier is Cu-EDTA; further, the filter medium of the filter mesh is further impregnated. And the first heavy reforming agent is zinc acetate or manganese acetate, and the second heavy modifying agent is potassium carbonate or potassium hydroxide.

First, referring to FIG. 1 and FIG. 2, the present invention includes: a frame 10; and at least one screen 20 disposed inside the frame 10 in a V-shaped wrinkle shape, and The V-shaped wrinkle angle θ of the screen 20 is preferably 30° to 40°, more preferably 33°, and the screen 20 uses coal-based activated carbon as a filter material, particularly anthracite-based activated carbon as a filter material.

Furthermore, the filter material of the filter screen 20 is further synthesized into a modifier, and the modifier can be Cu-EDTA, and the procedure for synthesizing the reform is: (1) taking the dried activated carbon to test the water absorption amount (assuming that it absorbs water The amount is 50 grams of water / 100 grams of dry carbon); (2) taking copper nitrate (crystal water) 360 grams dissolved in 1 liter of deionized water; (3) 2 kg of activated carbon is poured into the copper nitrate solution in batches, Make it completely dry the copper nitrate solution (this is to make copper nitrate / activated carbon = 18 wt%), dry the activated carbon containing copper nitrate for 4 hours; (4) take EDTA (ethylenediaminetetraacetic acid) 18 g is dissolved in 1 liter of deionized water; (5) the activated carbon containing copper nitrate is poured into a solution containing EDTA, stirred, and then allowed to stand for 30 minutes and then filtered; (6) the prepared activated carbon is placed at 100 degrees. Dry in the oven and dry for 4 hours. [00010] In addition, the filter medium of the filter screen 20 is further impregnated with a double modifier, the first reforming agent may be zinc acetate or manganese acetate, and the second heavy modifier may be potassium carbonate or potassium hydroxide. The procedure of double impregnation modification is as follows: firstly, 868.5 g of water is used to dissolve 131.5 g of zinc acetate/manganese acetate (11% zinc acetate/manganese acetate solution), and after soaking in activated carbon for 40 minutes, it is filtered to obtain the first Secondary impregnation of activated carbon; second reuse 1155 grams of water to dissolve 345 grams of potassium carbonate / potassium hydroxide (23% potassium carbonate / potassium hydroxide solution), added to the first impregnation of activated carbon for 40 minutes, filtered, soaked after activity The carbon is dried in a heating oven at 100 ° C until the activated carbon moisture is below 2%. During the first half hour of drying, the activated carbon needs to be stirred from time to time. [00011] Based on the configuration, the present invention designs the screen 20 into a V-shaped wrinkle, and uses coal-based activated carbon as a filter material, and even further synthesizes the filter material or doubles the impregnation, and It can treat the low concentration of carbon disulfide contained in the pollutants more effectively, and has the effect of strengthening the treatment effect of low concentration carbon disulfide. [00012] In summary, the technical means disclosed in the present invention have the invention patents such as "novelty", "progressiveness" and "available for industrial use", and pray for the patent to encourage the invention. There is no sense of morality. The above drawings and descriptions are merely preferred embodiments of the present invention, and those skilled in the art who are familiar with the art, the modifications or equivalent changes made according to the spirit of the present invention should still include the patent application in this case. Within the scope.

10. . . frame

20. . . Filter

1 is a perspective view showing the structure of the present invention. Figure 2 is a schematic view of a mesh screen of the present invention.

10. . . frame

20. . . Filter

Claims (9)

A chemical filtration device for treating a pollutant having a low concentration of carbon disulfide comprises: a frame; and at least one filter disposed inside the frame, and the filter uses coal-based activated carbon as a filter material. A chemical filtration device comprising a low concentration of carbon disulfide contaminant as claimed in claim 1, wherein the sieve is in the form of a V-shaped wrinkle. A chemical filtration device comprising a low concentration of carbon disulfide contaminant as claimed in claim 2, wherein the filter has a V-shaped wrinkle angle of 30 to 40. A chemical filtration device comprising a low concentration of carbon disulfide contaminant as claimed in claim 3, wherein the filter has a V-shaped wrinkle angle of 33°. The chemical filtration device containing a low concentration of carbon disulfide contaminant is treated according to any one of claims 1 to 4, wherein the sieve uses anthracite-based activated carbon as a filter medium. A chemical filtration device comprising a low concentration of carbon disulfide contaminant as claimed in claim 5, wherein the filter material of the filter is further synthesized into a modifier. A chemical filtration device comprising a low concentration of carbon disulfide contaminant as claimed in claim 5, wherein the filter material of the filter is further impregnated with a double modifier. The chemical filtering device containing the low concentration of carbon disulfide contaminant according to claim 6, wherein the modifying agent is Cu-EDTA, and the process of synthesizing the upgrading is: (1) taking the dried activated carbon; (2) taking The copper nitrate is dissolved in deionized water; (3) the activated carbon is poured into the copper nitrate solution in batches to dry the copper nitrate solution, and the activated carbon containing copper nitrate is dried; (4) taking EDTA (Ethylene) (Aminotetraacetic acid) is dissolved in deionized water; (5) The activated carbon containing copper nitrate is poured into a solution containing EDTA, stirred, and then left to be filtered; (6) The prepared activated carbon is dried in an oven. . The chemical filtering device for treating a low concentration of carbon disulfide contaminant according to claim 7, wherein the first heavy modifying agent is zinc acetate or manganese acetate, and the second heavy modifying agent is potassium carbonate or potassium hydroxide, and the double The procedure of impregnation modification is as follows: the first heavy water dissolves zinc acetate/manganese acetate (11% zinc acetate/manganese acetate solution), is immersed in activated carbon and filtered to obtain the first impregnation of activated carbon; the second heavy water dissolves carbonic acid Potassium/potassium hydroxide (23% potassium carbonate/potassium hydroxide solution), added to the first impregnated activated carbon soaked, filtered, and after soaking, the activated carbon is dried in a heating furnace until the activated carbon moisture is below 2%.