TW201327636A - Heating system - Google Patents

Abstract

The present invention discloses a heating system, comprises at least a heating element, at least one electrode and a purging gas module, wherein one terminal of the heating element and the electrode is coupled at a coupling location, the purging gas module is disposed around the coupling location to thereby prevent the coupling location from contacting with corrosive gases.

Description

Heating system

The present invention relates to a heating system, and more particularly to a heating system for a chemical vapor deposition apparatus.

Chemical vapor deposition (CVD) refers to the use of energy sources such as thermal energy, plasma discharge or ultraviolet light to cause a gaseous substance to chemically react on a solid surface and deposit on the surface to form a stable solid state. The process of the membrane. Chemical vapor deposition (CVD) technology is a widely used method for film growth in semiconductor integrated circuit processes. Thin film materials such as dielectrics, semiconductors, and conductors can be almost completed by CVD.
Please refer to Fig. 1, which is a schematic diagram of a conventional organometallic chemical vapor deposition apparatus. As shown, a general organometallic chemical vapor deposition (MOCVD) apparatus includes a shower head 12, a reaction chamber 14, a graphite susceptor 18, a heater 19, and at least one vent line 17. After a carrier 16 is placed on the graphite base 18, the substrate 15 is placed on the carrier 16 for heating. After the reaction gas enters the reaction chamber 14 from the inlet head 12, it reacts with the high temperature substrate 15 to form a deposition layer of the target material on the substrate 15. The residual gas after the reaction is removed by the exhaust line 17.
Please refer to Fig. 2 and Fig. 3, which are respectively a schematic diagram of a resistor piece of a conventional heater and a partial sectional view of the heater. Conventional heaters include a plurality of resistor sheets 22, 24, each of which is typically distributed over a heating plane 20. Each of the resistor sheets 22, 24 includes a first end 221, 241 and a second end 223, 243, as shown in FIG.
The two ends (221, 241) of the resistor plates 22 and 24 are respectively provided with a vertical terminal 321 and 341. The vertical terminals 321 and 341 are respectively connected to the corresponding electrodes 38, and an electrical coupling portion 386 is formed at the connection. In order to avoid the electrical coupling 386 from contacting corrosive gases.
Conventional techniques provide a purge gas to the electrode 38 and the vicinity of the electrical coupling 386 by a gas delivery conduit 39 to reduce the chance of corrosive gases contacting the electrical coupling 386. However, the distribution of the airflow provided by the single-point air blowing method is not uniform, and the airflow may be disturbed due to the operation of the exhaust line 17, and some of the corrosive gas may be in contact with the electrical coupling.

The present invention provides a heating system comprising: at least one heating element; at least one electrode electrically coupled to a coupling end of the heating element; and a purge gas module, the purge gas module surrounding the coupling to avoid Corrosive gases contact the coupling.
In one embodiment of the above heating system, the heating element comprises a planar resistor sheet and two vertical terminals are respectively connected to the two ends of the planar resistor sheet.
In one embodiment of the above heating system, the planar resistor piece and the two vertical terminals are integrally formed.
In one embodiment of the above heating system, the planar resistor piece and the two vertical terminals are separate components.
An embodiment of the heating system further includes a conductive fixing module for fixing the heating element and the electrode and providing a conductive contact area of the two.
In one embodiment of the above heating system, the conductive fixing module comprises a screw locking component.
In one embodiment of the above heating system, the conductive fixing module comprises at least one clamping fixing element.
In one embodiment of the heating system, the conductive fixing module comprises a first clamping fixing element for clamping the heating element, a second clamping fixing element for clamping the electrode, and the first clamping fixing element and the second clamping fixing The components are fixed to each other by a connecting element.
An embodiment of the above heating system has a plurality of heating elements and a plurality of electrodes, each electrode and one end of each heating element being electrically coupled to a coupling portion, the purge gas module having at least one gas passage, each gas The channel is used to surround a coupling.
An embodiment of the heating system further includes a cooling module disposed between the heating element and the purge gas module.
In one embodiment of the heating system described above, the cooling module has a plurality of coolant passages.
In one embodiment of the heating system described above, the cooling module and the purge gas module are integrally formed.
In one embodiment of the heating system described above, the cooling module and the purge gas module are separate components.
In one embodiment of the heating system, the purge gas module further includes a first air outlet, the first air outlet surrounding the heating element adjacent to the coupling portion, so as to guide the blowing gas through the coupling portion and then the heating element Side out.
In one embodiment of the heating system, the purge gas module further includes a second gas outlet, and the second gas outlet surrounds the electrode adjacent to the coupling portion, so as to guide the purge gas through the electrical coupling point and then the electrode Side out.

Please refer to FIG. 4 and FIG. 5, which are perspective views and partial cross-sectional views, respectively, of an embodiment of the present invention. As shown, the heating system 40 of the present invention includes at least one heating element 42, at least one electrode 44, and a purge gas module 46. The one end of the heating element 42 is electrically coupled to the electrode 44 to a coupling portion 442, and the purge gas module 46 is disposed around the coupling portion 442 to prevent corrosive gas from contacting the coupling portion 442.
In one embodiment of the invention, the heating system 40 can include a plurality of heating elements 42 and a plurality of electrodes 44. Each of the heating elements 42 includes a planar resistive sheet 421 and two vertical terminals 423. Each of the planar resistors 421 is disposed on a plane, and each of the vertical terminals 423 is disposed at each end of each of the planar resistors 421, and is electrically coupled to a corresponding electrode 44 at a coupling portion 442 to form a loop. The purge gas module 46 has at least one gas passage 461, and each gas passage 461 surrounds a coupling portion 442.
The planar resistor 421 of each heating element 42 and the corresponding two vertical terminals 423 may be integrally formed, or may be separate components, and the heating element 42 may be appropriately selected according to system requirements. The heating elements 42 and the corresponding electrodes 44 can be fixed to each other by a conductive fixing module, such as a screw locking member 45, which is fixed and provides a conductive contact area of the two.
In an embodiment of the invention, the purge gas module 46 can include a first air outlet 465. The first air outlet 465 surrounds the heating element 42 adjacent to the coupling portion 442 or its vertical terminal 423, and can guide the purge gas to flow through the coupling portion 442, and then flow out from the heating element 42 side through the first air outlet port 465. . The first air outlet 465 can be provided with an upper cover 467 for controlling the size of the first air outlet 465.
In an embodiment of the invention, the purge gas module 46 can include a second air outlet 466. The second air outlet 466 surrounds the electrode 44 adjacent to the coupling portion 442, and can guide the purge gas to flow through the coupling portion 442, and then flow out from the electrode 44 side via the second air outlet port 466. The second air outlet 466 can be provided with a cover 469 for controlling the size of the second air outlet 466.
In an embodiment of the invention, a gas supply device (not shown) and at least one airway 48 may be provided. The air guiding tube 48 is connected to the air supply device and the purge gas module 46, and the air supply device continuously supplies the purge gas to the purge gas module 46.
Please refer to Fig. 6, which is a partial cross-sectional view showing another embodiment of the present invention. As shown in the figure, the structure of the heating system of this embodiment is substantially the same as that of the embodiment shown in FIG. 5. However, in this embodiment, a cooling module 66 is added to the heating system.
The cooling module 66 is disposed between the heating element 42 and the purge gas module 46. The cooling module 66 can include a plurality of coolant channels 661. The lower electrode 44 is protected by introducing various coolants such as water, oil, or a refrigerant into the coolant passage 661 to achieve the effect of cooling and cooling.
In an embodiment of the present invention, the cooling module 66 and the purge gas module 46 may be integrally formed or separated components, and the object of the present invention can be achieved.
Please refer to Fig. 7, which is a partial cross-sectional view showing still another embodiment of the present invention. As shown, in the present embodiment, the conductive fixing module 42 in combination with the heating element 42 (vertical terminal 423) and the electrode 44 is implemented in the form of a clamping fixing member 72. Wherein, the gas passage 761 of the purge gas module 76 can surround an adjacent region including the coupling portion 442 of the clamping fixture 72.
In an embodiment of the invention, the clamping and fixing member 72 can include a first clamping and fixing member 721, a second clamping and fixing member 723, and a connecting member (not shown). The first clamping and fixing component 721 is configured to clamp the heating component 42 (vertical terminal 423), and the second clamping and fixing component 723 is configured to clamp the electrode 44, and then connected by the connecting component. The first clamping and fixing member 721 and the second clamping and fixing member 723 are fixed.
With the heating system of the present invention, it is possible to prevent the coupling portion 442 of the heating element 42 and the electrode 44 from being deteriorated by contact with the corrosive gas, ensuring that each of the coupling portions 442 has good electrical conductivity without causing an extra factor due to deterioration of the coupling portion 442. The situation of energy wastage.
The above is only the embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the equivalent changes and modifications of the shapes, structures, features, methods and spirits described in the claims of the present invention. All should be included in the scope of the patent application of the present invention.

10. . . Organometallic chemical vapor deposition device

12. . . Intake head

14. . . Reaction chamber

15. . . Substrate

16. . . Carrier

17. . . Exhaust line

18. . . Graphite base

19. . . Heater

20. . . Heating plane

twenty two. . . Resistor

221. . . First end

223. . . Second end

twenty four. . . Resistor

241. . . First end

243. . . Second end

321. . . Conductive column

341. . . Conductive column

36. . . Partition

361. . . perforation

363. . . gap

38. . . electrode

386. . . contact

39. . . Gas pipe

391. . . Blowing port

40. . . Heating system

42. . . Heating element

421. . . Plane resistor

423. . . Vertical terminal

44. . . electrode

442. . . Coupling

45. . . Screw locking element

46. . . Blowing gas module

461. . . Gas passage

465. . . First air outlet

466. . . Second air outlet

467. . . Upper cover

469. . . Lower cover

48. . . Air duct

66. . . Cooling module

661. . . Coolant channel

72. . . Clamping fixture

721. . . First clamping fixture

723. . . Second clamping fixture

76. . . Blowing gas module

761. . . Gas passage

Figure 1: Schematic diagram of an organometallic chemical vapor deposition apparatus.
Figure 2: Schematic diagram of a conventional heater resistor.
Figure 3: A partial cross-sectional view of a conventional heater.
Figure 4 is a perspective view of an embodiment of the present invention.
Figure 5 is a partial cross-sectional view showing an embodiment of the present invention.
Figure 6 is a partial cross-sectional view showing another embodiment of the present invention.
Figure 7 is a partial cross-sectional view showing still another embodiment of the present invention.

42. . . Heating element

421. . . Plane resistor

423. . . Vertical terminal

44. . . electrode

442. . . Coupling

46. . . Blowing gas module

461. . . Gas passage

465. . . First air outlet

466. . . Second air outlet

467. . . Upper cover

469. . . Lower cover

Claims (15)

A heating system comprising:
At least one heating element;
At least one electrode electrically coupled to one end of the heating element to a coupling portion; and a purge gas module surrounding the coupling portion to prevent corrosive gas from contacting the coupling portion. The heating system of claim 1, wherein the heating element comprises a planar resistor and two vertical terminals are respectively connected to the two ends of the planar resistor. The heating resistor system of claim 2, wherein the planar resistor sheet and the two vertical terminals are integrally formed. The heating resistor system of claim 2, wherein the planar resistor piece and the two vertical terminals are separate components. The heating system of claim 1, further comprising a conductive fixing module for fixing the heating element and the electrode and providing a conductive contact area of the two. The heating system of claim 5, wherein the conductive fixing module comprises a screw locking component. The heating system of claim 5, wherein the conductive fixing module comprises at least one clamping fixing element. The heating system of claim 5, wherein the conductive fixing module comprises a first clamping fixing element for clamping the heating element, and a second clamping fixing element for clamping the electrode, the first clamping The holding element and the second clamping element are fixed to each other by a connecting element. The heating system of claim 1, comprising a plurality of heating elements and a plurality of electrodes, each electrode being electrically coupled to a coupling end at one end of each of the heating elements. The heating system of claim 1, wherein the purge gas module has at least one gas passage, each gas passage surrounding a coupling. The heating system of claim 9, further comprising a cooling module disposed between the heating element and the purge gas module. The heating system according to claim 11, wherein the cooling module and the purge gas module are integrally formed. The heating system according to claim 11, wherein the cooling module and the purge gas module are separate components. The heating system of claim 1, wherein the purge gas module further comprises a first air outlet, the first air outlet surrounding the heating element adjacent to the coupling, so as to guide the flow of the purge gas After the coupling, the side of the heating element flows out. The heating system of claim 1, wherein the purge gas module further comprises a second air outlet, the second air outlet surrounding the electrode adjacent to the coupling, so as to guide the flow of the purge gas through The coupling is then discharged from the side of the electrode.