TW201323143A - Compliance device - Google Patents

Compliance device Download PDF

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Publication number
TW201323143A
TW201323143A TW100145061A TW100145061A TW201323143A TW 201323143 A TW201323143 A TW 201323143A TW 100145061 A TW100145061 A TW 100145061A TW 100145061 A TW100145061 A TW 100145061A TW 201323143 A TW201323143 A TW 201323143A
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Taiwan
Prior art keywords
chamber
compliant device
rod
telescopic
moving portion
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TW100145061A
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Chinese (zh)
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TWI428201B (en
Inventor
Yuan-Yung Huang
Jan-Hao Chen
His-Hung Hsiao
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Ind Tech Res Inst
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Publication of TWI428201B publication Critical patent/TWI428201B/en

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  • Manipulator (AREA)

Abstract

A compliance device including a first body, a plurality of first stretchable elements, a second body, a plurality of second stretchable elements and a chuck is provided. The second body is connected to the first body via the first stretchable elements and suitable for moving back and forth relative to the first body along a first direction. The second body has a chamber and an opening communicated to the chamber. The chuck has a moving part, a connecting part and a clipping part. The moving part is disposed in the chamber via the second stretchable elements. The moving part is suitable for moving on a first plane via the second stretchable elements. The first direction is perpendicular to the first plane. The connecting part passes through the opening and connects the moving part and the clipping part. The clipping part is used for clipping a workpiece.

Description

柔順裝置Compliant device

本發明是有關於一種裝置,且特別是有關於一種柔順(compliance)裝置。This invention relates to a device and, more particularly, to a compliance device.

工具機發展快速且技術不斷進步,可取代人工進行精密的組裝工程。為了避免定位誤差造成組裝工件之間的碰撞與損毀,遠端中心柔順裝置常被應用來達成上述目的。一個遠端中心柔順裝置通常具備上下平行結構,上平行結構用來與機械手臂等組裝設備連接,下平行結構用來與夾頭連接。上下平行結構之間會配置相同的三個以上的彈性體,傾斜且對稱於遠端中心柔順裝置的中心軸。彈性體的軸心會交於一點,即所謂的柔順中心,此中心剛好落在夾頭所夾的工件的末端。當工件與插孔之間有位置或方位角的誤差時,彈性體會撓曲變形,使得物件得以順利插入插孔中。然而,此種遠端中心柔順裝置必須針對不同長度的工件調整彈性體的方位角,使用上並不便利。The development of the machine tool is fast and the technology is continuously improved, which can replace the manual assembly engineering. In order to avoid collisions and damage between assembly workpieces caused by positioning errors, remote center compliance devices are often used to achieve the above objectives. A distal center compliant device typically has an upper and lower parallel structure, the upper parallel structure is used to connect with an assembly device such as a robotic arm, and the lower parallel structure is used to connect to the collet. The same three or more elastomers will be placed between the upper and lower parallel structures, inclined and symmetrical to the central axis of the distal center compliant device. The axis of the elastomer will lie at one point, the so-called compliant center, which just falls to the end of the workpiece clamped by the collet. When there is a position or azimuth error between the workpiece and the socket, the elastic body will flex and deform, so that the object can be smoothly inserted into the socket. However, such a distal center compliant device must adjust the azimuth of the elastomer for workpieces of different lengths, which is not convenient to use.

本發明提供一種柔順裝置,可解決工件長度不同時必須調整裝置的問題。The present invention provides a compliant device that solves the problem of having to adjust the device when the length of the workpiece is different.

本發明的柔順裝置包括一第一結構體、多個第一伸縮件、一第二結構體、多個第二伸縮件以及一夾頭。第一結構體用以固定至一移動設備。第二結構體經由第一伸縮件連接至第一結構體而適於相對第一結構體延一第一方向往復移動。第二結構體具有一腔室與連通腔室的一開口。夾頭具有一移動部、一連接部與一夾持部。移動部經由第二伸縮件設置於腔室內。移動部適於藉由第二伸縮件在一第一平面上移動。第一方向垂直第一平面。連接部穿過開口而連接移動部與夾持部。夾持部用以夾持一工件。The compliant device of the present invention includes a first structural body, a plurality of first telescopic members, a second structural body, a plurality of second telescopic members, and a collet. The first structure is for fixing to a mobile device. The second structural body is coupled to the first structural body via the first telescopic member and adapted to reciprocate in a first direction relative to the first structural body. The second structure has a cavity and an opening communicating with the chamber. The collet has a moving portion, a connecting portion and a clamping portion. The moving portion is disposed in the chamber via the second telescopic member. The moving portion is adapted to move on a first plane by the second telescopic member. The first direction is perpendicular to the first plane. The connecting portion connects the moving portion and the nip portion through the opening. The clamping portion is for holding a workpiece.

在本發明之一實施例中,各第一伸縮件包括一伸縮桿與一彈簧。伸縮桿的兩端分別連接第一結構體與第二結構體。彈簧套於伸縮桿,且彈簧的兩端分別抵住第一結構體與第二結構體。In an embodiment of the invention, each of the first telescopic members includes a telescopic rod and a spring. Both ends of the telescopic rod are respectively connected to the first structure body and the second structure body. The spring sleeve is sleeved on the telescopic rod, and the two ends of the spring respectively abut the first structure body and the second structure body.

在本發明之一實施例中,移動部具有多個盲孔。各第二伸縮件包括一桿件與一彈簧。桿件的一端固定於腔室的腔壁,桿件的另一端位於彈簧內。彈簧套於桿件。彈簧的兩端分別抵住腔室的腔壁與對應的盲孔的底部。此外,桿件的另一端位於對應的盲孔外。或者,桿件的另一端位於對應的盲孔中。又或者,桿件的另一端抵住對應的盲孔的底部。另外,柔順裝置可更包括多個位移感測器,配置於桿件的另一端且適於電性連接移動設備。位移感測器用以在感測到與盲孔的底部的距離小於一臨界值時觸發移動裝置停止移動第一結構體。In an embodiment of the invention, the moving portion has a plurality of blind holes. Each of the second telescopic members includes a rod and a spring. One end of the rod is fixed to the chamber wall of the chamber, and the other end of the rod is located inside the spring. The spring is placed over the rod. The two ends of the spring respectively abut against the cavity wall of the chamber and the bottom of the corresponding blind hole. In addition, the other end of the rod is located outside the corresponding blind hole. Alternatively, the other end of the rod is located in the corresponding blind hole. Or alternatively, the other end of the rod abuts against the bottom of the corresponding blind hole. Additionally, the compliant device can further include a plurality of displacement sensors disposed at the other end of the rod and adapted to be electrically connected to the mobile device. The displacement sensor is configured to trigger the mobile device to stop moving the first structure when sensing that the distance from the bottom of the blind hole is less than a threshold.

在本發明之一實施例中,柔順裝置更包括多個位移感測器,配置於腔室內且適於電性連接移動設備。位移感測器用以在感測到與移動部的距離小於一臨界值時觸發移動裝置停止移動第一結構體。此外,各位移感測器與對應的第二伸縮件例如位於移動部的相對兩側。In an embodiment of the invention, the compliant device further includes a plurality of displacement sensors disposed within the chamber and adapted to be electrically connected to the mobile device. The displacement sensor is configured to trigger the mobile device to stop moving the first structure when sensing that the distance from the moving portion is less than a threshold. In addition, each displacement sensor and the corresponding second telescopic member are located, for example, on opposite sides of the moving portion.

基於上述,在本發明的柔順裝置中,兩種伸縮件使得夾頭具有多方位的彈性變化空間,可降低工件碰撞而受損的機會。Based on the above, in the compliant device of the present invention, the two types of telescopic members allow the collet to have a multi-directional elastic change space, which reduces the chance of damage due to collision of the workpiece.

為讓本發明之上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the present invention will be more apparent from the following description.

圖1至圖3分別是本發明一實施例的柔順裝置的外觀圖、垂直剖視圖與水平剖視圖。請參照圖1與圖2,本實施例的柔順裝置100包括一第一結構體110、多個第一伸縮件120、一第二結構體130、多個第二伸縮件140以及一夾頭150。第一結構體110用以固定至一移動設備(未繪示)。本實施例的第一結構體110適於被固定至一機械手臂(未繪示),但其他實施例的第一結構體也可以被固定至其他種類的移動設備。移動設備用於移動第一結構體110而帶動整個柔順裝置100。第二結構體130經由第一伸縮件120連接至第一結構體110,亦即第一伸縮件120連接於第一結構體110與第二結構體130之間。因為第一伸縮件120的作用,第二結構體130可以相對第一結構體110延一第一方向D10往復移動。本實施例中,第一伸縮件120的數量有三個,且大致平行於第一方向D10,例如是垂直地面之方向。1 to 3 are respectively an external view, a vertical sectional view and a horizontal sectional view of a compliant device according to an embodiment of the present invention. Referring to FIG. 1 and FIG. 2 , the compliant device 100 of the present embodiment includes a first structural body 110 , a plurality of first telescopic members 120 , a second structural body 130 , a plurality of second telescopic members 140 , and a collet 150 . . The first structure body 110 is used for fixing to a mobile device (not shown). The first structure 110 of the present embodiment is adapted to be fixed to a robot arm (not shown), but the first structure of other embodiments may also be fixed to other kinds of mobile devices. The mobile device is used to move the first structure 110 to drive the entire compliant device 100. The second structure body 130 is connected to the first structure body 110 via the first extension member 120 , that is, the first extension tube 120 is connected between the first structure body 110 and the second structure body 130 . Because of the action of the first telescopic member 120, the second structural body 130 can reciprocate relative to the first structural body 110 in a first direction D10. In this embodiment, the number of the first telescopic members 120 is three, and is substantially parallel to the first direction D10, for example, the direction of the vertical ground.

第二結構體130具有一腔室132與連通腔室132的一開口134。夾頭150具有一移動部152、一連接部154與一夾持部156。移動部152經由第二伸縮件140設置於腔室132內,亦即第二伸縮件140連接於移動部152與腔室132的腔壁之間。因為第二伸縮件140的作用,移動部152可以在一第一平面P10上移動。第一方向D10垂直第一平面P10,例如是平行於地面之平面。換言之,移動部152相對第二結構體130的移動方向大致上垂直於第一結構體110相對於第二結構體130的移動方向。另外,移動部152與腔室132的頂壁之間可保留一間隙X,以使移動部152在腔室132內有微幅的翻轉及上下移動的裕度。藉此,移動部152可相對移動設備進行三維空間的移動。連接部154穿過開口134而連接移動部152與夾持部156,移動部152則被侷限在腔室132中而無法通過開口134。本實施例的開口134的在第一平面P10的投影尺寸略大於連接部154在第一平面P10的投影尺寸,以避免限制移動部152在第一平面P10上的移動。夾持部156用以夾持一工件(未繪示)。The second structure 130 has a chamber 132 and an opening 134 communicating with the chamber 132. The collet 150 has a moving portion 152, a connecting portion 154 and a clamping portion 156. The moving portion 152 is disposed in the chamber 132 via the second telescopic member 140, that is, the second telescopic member 140 is coupled between the moving portion 152 and the chamber wall of the chamber 132. Because of the action of the second telescopic member 140, the moving portion 152 can move on a first plane P10. The first direction D10 is perpendicular to the first plane P10, for example parallel to the plane of the ground. In other words, the moving direction of the moving portion 152 with respect to the second structure body 130 is substantially perpendicular to the moving direction of the first structure body 110 with respect to the second structure body 130. In addition, a gap X may be left between the moving portion 152 and the top wall of the chamber 132, so that the moving portion 152 has a slight inversion and a vertical movement margin in the chamber 132. Thereby, the moving part 152 can perform three-dimensional movement with respect to the mobile device. The connecting portion 154 passes through the opening 134 to connect the moving portion 152 and the clamping portion 156, and the moving portion 152 is confined in the chamber 132 and cannot pass through the opening 134. The projected size of the opening 134 of the present embodiment on the first plane P10 is slightly larger than the projected size of the connecting portion 154 at the first plane P10 to avoid restricting the movement of the moving portion 152 on the first plane P10. The clamping portion 156 is for holding a workpiece (not shown).

在本實施例的柔順裝置100中,第一伸縮件120與第二伸縮件140共同提供了三維空間的移動自由度。因此,移動設備移動柔順裝置100以帶動工件進行對位與組裝的過程中,若因為對位誤差而導致工件與其他元件發生碰撞,也可以大幅降低碰撞的力道而避免損毀。In the compliant device 100 of the present embodiment, the first telescopic member 120 and the second telescopic member 140 together provide a degree of freedom of movement in a three-dimensional space. Therefore, when the mobile device moves the compliant device 100 to drive the workpiece for alignment and assembly, if the workpiece collides with other components due to the alignment error, the force of the collision can be greatly reduced to avoid damage.

本實施例的各個第一伸縮件120包括一伸縮桿122與一彈簧124。伸縮桿122的兩端分別連接第一結構體110與第二結構體130。彈簧124套於伸縮桿122,且彈簧124的兩端分別抵住第一結構體110與第二結構體130。伸縮桿122用以限制第一結構體110與第二結構體130之間的的相對移動的方向,彈簧124用以在發生相對移動後將第一結構體110與第二結構體130之間的距離回復至原始狀態。本實施例的移動部152具有多個盲孔152a。各個第二伸縮件140包括一桿件142與一彈簧144。桿件142的一端固定於腔室132的腔壁。彈簧144套於桿件142,故桿件142的另一端位於彈簧144內。彈簧144的兩端分別抵住腔室132的腔壁與對應的盲孔152a的底部,以提供移動部152在第一平面P10上移動的自由度與回復至初始位置之回復力。Each of the first telescopic members 120 of the embodiment includes a telescopic rod 122 and a spring 124. Both ends of the telescopic rod 122 are connected to the first structure body 110 and the second structure body 130, respectively. The spring 124 is sleeved on the telescopic rod 122, and the two ends of the spring 124 respectively abut the first structural body 110 and the second structural body 130. The telescopic rod 122 is used to limit the direction of relative movement between the first structural body 110 and the second structural body 130, and the spring 124 is used to connect the first structural body 110 and the second structural body 130 after relative movement occurs. The distance returns to the original state. The moving portion 152 of this embodiment has a plurality of blind holes 152a. Each of the second telescopic members 140 includes a rod 142 and a spring 144. One end of the rod 142 is fixed to the wall of the chamber 132. The spring 144 is placed over the rod 142 such that the other end of the rod 142 is located within the spring 144. The two ends of the spring 144 respectively abut against the cavity wall of the chamber 132 and the bottom of the corresponding blind hole 152a to provide the freedom of movement of the moving portion 152 on the first plane P10 and the restoring force to return to the initial position.

請參照圖2與圖3,本實施例的柔順裝置100更包括多個位移感測器160,配置於腔室132內且適於電性連接移動設備。位移感測器160用以在感測到位移感測器160與移動部152的距離小於一臨界值時,觸發移動裝置停止移動第一結構體110。在一實施例中,位移感測器160為非接觸式之近接開關。藉此設計,在工件與其他物品碰撞而導致夾頭150的位移量過大之前,就可以停止移動裝置的動作,以避免工件、柔順裝置100或移動裝置的損壞。本實施例中,移動部152是以呈圓盤狀為例。在初始位置時,三個第二伸縮件140的軸心延伸線則都通過移動部152的軸心,且彼此之間的夾角為120度。每個位移感測器160與對應的第二伸縮件140位於移動部152的相對兩側。本實施例的每個位移感測器160都位於對應的第二伸縮件140軸心的延伸線上。位移感測器160與移動裝置之間可以利用有線的方式傳遞訊號,也可利用無線的方式傳遞訊號。Referring to FIG. 2 and FIG. 3 , the compliant device 100 of the present embodiment further includes a plurality of displacement sensors 160 disposed in the cavity 132 and adapted to be electrically connected to the mobile device. The displacement sensor 160 is configured to trigger the mobile device to stop moving the first structure 110 when the distance between the displacement sensor 160 and the moving portion 152 is sensed to be less than a threshold. In an embodiment, the displacement sensor 160 is a non-contact proximity switch. With this design, the movement of the mobile device can be stopped before the workpiece collides with other objects and the displacement of the collet 150 is excessively large to avoid damage to the workpiece, the compliant device 100 or the mobile device. In the present embodiment, the moving portion 152 is exemplified by a disk shape. In the initial position, the axial extension lines of the three second telescopic members 140 all pass through the axis of the moving portion 152 with an angle of 120 degrees with each other. Each displacement sensor 160 and the corresponding second telescopic member 140 are located on opposite sides of the moving portion 152. Each of the displacement sensors 160 of the present embodiment is located on an extension line of the axis of the corresponding second telescopic member 140. The displacement sensor 160 and the mobile device can transmit signals by wire, or wirelessly.

在圖3中,桿件142的另一端位於對應的盲孔152a外。在圖4的實施例中,桿件242的另一端是接近對應的盲孔152a的底部並在部分狀況下可能抵住盲孔152a的底部。在圖5的實施例中,桿件342的另一端則是位於對應的盲孔152a中間而沒有接近盲孔152a的底部。各實施例中第二伸縮件的桿件的位置是以可適當限制移動部的位置為原則,並不做其他限制。另外,圖5的柔順裝置300的位移感測器360是配置於桿件342的另一端。在感測到與盲孔152a的底部的距離小於一臨界值時,位移感測器360用以觸發移動裝置停止移動柔順裝置300的第一結構體(圖未示)。In Figure 3, the other end of the rod 142 is located outside of the corresponding blind hole 152a. In the embodiment of Figure 4, the other end of the rod 242 is near the bottom of the corresponding blind hole 152a and may partially resist the bottom of the blind hole 152a in some cases. In the embodiment of Figure 5, the other end of the rod 342 is located in the middle of the corresponding blind hole 152a without approaching the bottom of the blind hole 152a. The position of the rod of the second telescopic member in each embodiment is based on the principle that the position of the moving portion can be appropriately limited, and is not limited. In addition, the displacement sensor 360 of the compliant device 300 of FIG. 5 is disposed at the other end of the rod 342. When it is sensed that the distance from the bottom of the blind hole 152a is less than a critical value, the displacement sensor 360 is used to trigger the mobile device to stop moving the first structure (not shown) of the compliant device 300.

綜上所述,在本發明的柔順裝置中,使用了伸縮方向不同的兩種伸縮件,以提供夾頭多方位的移動自由度,進而降低工件與其他元件碰撞而導致工件、柔順裝置或移動裝置的損壞的機會。In summary, in the compliant device of the present invention, two types of telescopic members having different telescopic directions are used to provide a multi-directional movement degree of movement of the collet, thereby reducing the collision of the workpiece with other components, resulting in the workpiece, the compliant device or the movement. The chance of damage to the device.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,故本發明之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. The scope of the invention is defined by the scope of the appended claims.

100...柔順裝置100. . . Compliant device

110...第一結構體110. . . First structure

120...第一伸縮件120. . . First telescopic piece

122...伸縮桿122. . . Telescopic rod

124、144...彈簧124, 144. . . spring

130...第二結構體130. . . Second structure

132...腔室132. . . Chamber

134...開口134. . . Opening

140...第二伸縮件140. . . Second telescopic piece

142、242、342...桿件142, 242, 342. . . Lever

150...夾頭150. . . Chuck

152...移動部152. . . Mobile department

152a...盲孔152a. . . Blind hole

154...連接部154. . . Connection

156...夾持部156. . . Grip

160、360...位移感測器160, 360. . . Displacement sensor

D10...第一方向D10. . . First direction

P10...第一平面P10. . . First plane

X...間隙X. . . gap

圖1至圖3分別是本發明一實施例的柔順裝置的外觀圖、垂直剖視圖與水平剖視圖。1 to 3 are respectively an external view, a vertical sectional view and a horizontal sectional view of a compliant device according to an embodiment of the present invention.

圖4與圖5分別是本發明另外兩個實施例的柔順裝置的水平剖視圖。4 and 5 are horizontal cross-sectional views of a compliant device in accordance with two further embodiments of the present invention, respectively.

100...柔順裝置100. . . Compliant device

110...第一結構體110. . . First structure

120...第一伸縮件120. . . First telescopic piece

122...伸縮桿122. . . Telescopic rod

124、144...彈簧124, 144. . . spring

130...第二結構體130. . . Second structure

132...腔室132. . . Chamber

134...開口134. . . Opening

140...第二伸縮件140. . . Second telescopic piece

142...桿件142. . . Lever

150...夾頭150. . . Chuck

152...移動部152. . . Mobile department

152a...盲孔152a. . . Blind hole

154...連接部154. . . Connection

156...夾持部156. . . Grip

160...位移感測器160. . . Displacement sensor

D10...第一方向D10. . . First direction

P10...第一平面P10. . . First plane

Claims (11)

一種柔順裝置,包括:一第一結構體,用以固定至一移動設備;多個第一伸縮件;一第二結構體,經由該些第一伸縮件連接至該第一結構體而適於相對該第一結構體延一第一方向往復移動,該第二結構體具有一腔室與連通該腔室的一開口;多個第二伸縮件;以及一夾頭,具有一移動部、一連接部與一夾持部,其中該移動部經由該些第二伸縮件設置於該腔室內,該移動部適於藉由該些第二伸縮件在一第一平面上移動,該第一方向垂直該第一平面,該連接部穿過該開口而連接該移動部與該夾持部,該夾持部用以夾持一工件。A compliant device comprising: a first structure for fixing to a mobile device; a plurality of first telescopic members; and a second structure coupled to the first structure via the first telescopic members Reciprocating relative to the first structure body in a first direction, the second structure body has a chamber and an opening communicating with the chamber; a plurality of second telescopic members; and a collet having a moving portion and a a connecting portion and a clamping portion, wherein the moving portion is disposed in the chamber via the second telescopic members, the moving portion is adapted to be moved on a first plane by the second telescopic members, the first direction The first plane is perpendicular to the connecting portion, and the connecting portion is connected to the moving portion and the clamping portion for clamping a workpiece. 如申請專利範圍第1項所述之柔順裝置,其中各該第一伸縮件包括一伸縮桿與一彈簧,該伸縮桿的兩端分別連接該第一結構體與該第二結構體,該彈簧套於該伸縮桿,且該彈簧的兩端分別抵住該第一結構體與該第二結構體。The compliant device of claim 1, wherein each of the first telescopic members comprises a telescopic rod and a spring, and the two ends of the telescopic rod are respectively connected to the first structural body and the second structural body, the spring The telescopic rod is sleeved, and the two ends of the spring respectively abut the first structure body and the second structure body. 如申請專利範圍第1項所述之柔順裝置,其中該移動部具有多個盲孔,各該第二伸縮件包括一桿件與一彈簧,該桿件的一端固定於該腔室的腔壁,該桿件的另一端位於該彈簧內,該彈簧套於該桿件,該彈簧的兩端分別抵住該腔室的腔壁與對應的該盲孔的底部。The compliant device of claim 1, wherein the moving portion has a plurality of blind holes, each of the second telescopic members comprising a rod and a spring, one end of the rod being fixed to the cavity wall of the chamber The other end of the rod is located in the spring, and the spring is sleeved on the rod. The two ends of the spring respectively abut against the cavity wall of the chamber and the bottom of the corresponding blind hole. 如申請專利範圍第3項所述之柔順裝置,其中該桿件的另一端位於對應的該盲孔外。The compliant device of claim 3, wherein the other end of the member is located outside the corresponding blind hole. 如申請專利範圍第3項所述之柔順裝置,其中該桿件的另一端位於對應的該盲孔中。The compliant device of claim 3, wherein the other end of the rod is located in the corresponding blind hole. 如申請專利範圍第3項所述之柔順裝置,其中該桿件的另一端接近對應的該盲孔的底部。The compliant device of claim 3, wherein the other end of the member is adjacent to a bottom of the corresponding blind hole. 如申請專利範圍第3項所述之柔順裝置,更包括多個位移感測器,配置於該些桿件的另一端且適於電性連接該移動設備,其中該些位移感測器用以在感測到與該盲孔的底部的距離小於一臨界值時觸發該移動裝置停止移動該第一結構體。The compliant device of claim 3, further comprising a plurality of displacement sensors disposed at the other end of the rods and adapted to be electrically connected to the mobile device, wherein the displacement sensors are used to Detecting that the distance from the bottom of the blind hole is less than a threshold value triggers the mobile device to stop moving the first structure. 如申請專利範圍第1項所述之柔順裝置,更包括多個位移感測器,配置於該腔室內且適於電性連接該移動設備,其中該些位移感測器用以在感測到與該移動部的距離小於一臨界值時觸發該移動裝置停止移動該第一結構體。The compliant device of claim 1, further comprising a plurality of displacement sensors disposed in the chamber and adapted to be electrically connected to the mobile device, wherein the displacement sensors are used to sense and When the distance of the moving portion is less than a threshold, the mobile device is triggered to stop moving the first structure. 如申請專利範圍第8項所述之柔順裝置,其中各該位移感測器與對應的該第二伸縮件位於該移動部的相對兩側。The compliant device of claim 8, wherein each of the displacement sensors and the corresponding second telescopic member are located on opposite sides of the moving portion. 如申請專利範圍第1項所述之柔順裝置,其中該移動部與該腔室的頂壁之間具有一間隙,用以提供該移動部在該腔室內微幅的翻轉及上下移動的裕度。The compliant device of claim 1, wherein the moving portion has a gap with the top wall of the chamber for providing a margin for the vertical flipping and moving up and down of the moving portion in the chamber. . 如申請專利範圍第1項所述之柔順裝置,其中該開口的在該第一平面的投影尺寸略大於該連接部在該第一平面的投影尺寸。The compliant device of claim 1, wherein the projected size of the opening in the first plane is slightly larger than the projected size of the connecting portion in the first plane.
TW100145061A 2011-12-07 2011-12-07 Compliance device TWI428201B (en)

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TWI428201B TWI428201B (en) 2014-03-01

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