TW201314826A - Ball sucking head, ball carrying device and manufacturing method of ball sucking head - Google Patents

Abstract

The subject of the present invention is to firmly carry the balls on the carrying object even if there are protrusions existed in the vicinity of the carrying object. The solution of the present invention comprises: a main body 21 formed with an opening 21c; a porous body 22 which is a plate and inserted in the opening 21c; and an alignment sheet 25 which is formed with through holes 51 for ball alignment and configured on the lower surface 21a of the main body 21 in the state of covering the opening 21c and the outer surface 41 of the porous body 22. The balls may be sucked at the forming portions of through holes 51 by air suction through the porous body 22. The alignment sheet 25 is fixed at the edge of the opening 21c in the lower surface 21a by pressing the press screw 26 of the porous body 22 from the inner side of the main body 21 toward the outer side, and the porous body 22 is protruded to the outside by the pressing force of the press screw 26 so that the outer surface 41 is located further outside than the lower surface 21a.

Description

Spherical adsorption head, spheroid loading device, and spheroid adsorption head manufacturing method

The present invention relates to a spheroid adsorption head that adsorbs a spherical body, a spherical body loading device including the spherical adsorption head such that the spherical body is mounted on the mounting target body, and a spherical shape for manufacturing the adsorption spherical body. A method for producing a spheroid adsorption head of a body adsorption head.

As such a spheroid adsorption head, a mounting head including a conductive ball mounting device disclosed in Japanese Patent No. 3228131 is known. The structure of the mounting head has a body, a porous body, and an orifice plate. In this case, on the lower surface side of the body, a vacuum suction space having a lower opening is formed. Further, the porous system has a plate shape, and the occlusion is formed in the opening portion of the vacuum suction space of the body, and is embedded and fixed to the body such that the lower surface of the porous body and the bottom surface of the body are flat. Further, one end of the orifice plate is fixed to the bottom surface of the body, and the other end portion is coupled to the screw having the handle, and is assembled along the lower surface of the porous body and the lower surface of the body while the tension is applied by the rotary handle. On the body.

[First technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 3228131 (pages 2 to 3, FIG. 2)

However, the above-mentioned mounting head has the following problems. That is, in the mounting head, the lower surface of the porous body to which the conductive sphere is adsorbed is planar with the bottom surface of the body. In other words, in the mounting head, there is a bottom surface of the body having no difference in height from the lower surface of the lower surface of the porous body to which the conductive spherical body is adsorbed. Therefore, in the mounting head, for example, when a projection such as an electronic component is placed in the vicinity of the terminal of the substrate to be mounted, the bottom surface of the main body contacts the projection, and the mounting of the conductive sphere becomes difficult. .

The present invention has been made in view of the above-described problems, and a main object of the present invention is to provide a spheroidal adsorption head and a ball that can accurately mount a spherical body on a target body even when a projection is present in the vicinity of the object to be mounted. A device for mounting a shape and a method for producing a spheroid adsorption head for producing the spheroid adsorption head.

A spheroid adsorption head according to claim 1, wherein the spheroid adsorption head includes: a body portion having an opening; a porous body having a plate shape and being embedded in the opening; and an entire column forming an entire column The through hole of the spherical body is disposed on one side of the main body portion in a state of covering the opening and the outer surface of the porous body, and the spherical body is adsorbed by the inhalation through the porous body. The formation portion of the through hole includes a pressing portion that presses the porous body from the inner side of the main body portion, and the entire row piece is fixed to the opening edge portion of the one surface, and the porous body is formed by the The pressing force of the pressing portion protrudes to the The outer side is such that the outer surface is located on the outer side than the aforementioned one side.

Further, the spheroid adsorption head according to the second aspect of the invention is the spheroid adsorption head according to the first aspect of the patent application, and has a plate body disposed between the pressing portion and the porous body, The pressing portion presses the porous body through the plate body.

Further, the spheroid adsorption head of the third application of the patent application is in the spheroid adsorption head of the first application of the patent application, and has an adjustable adjustment portion so that each side surface of the porous body and the opening portion are The separation distances between the circumferential surfaces are the same.

Further, the spheroid adsorption head of the fourth application of the patent application is in the spheroid adsorption head of the second application of the patent application, and has an adjustable adjustment portion so that each side surface of the porous body and the opening portion are The separation distances between the circumferential surfaces are the same.

Further, the spheroidal body loading device of claim 5, comprising: the spheroid adsorption head according to any one of claims 1 to 4; and a conveying device for adsorbing the spheroid The spheroid adsorption head that adsorbs the spheroid is transported to the arrangement position of the object to be mounted, and the spheroid is mounted on the object to be mounted.

Further, the method for producing a spheroid adsorption head according to claim 6 is characterized in that the main body portion is formed with an opening portion; the porous body is plate-shaped and embedded in the opening portion; and the entire column is formed to form an entire row of balls. The through hole of the shape is disposed on one side of the main body portion in a state of covering the opening portion and the outer surface of the porous body; and the porous body is passed through the porous body a spheroid adsorption head that adsorbs the spheroids at a portion where the through holes are formed, and fixes the rim portion of the aligning sheet on the one surface from the inside to the outside of the body portion The porous body embedded in the opening portion is pressed to protrude the porous body to the outside, so that the outer surface is located outside the one surface.

Further, in the method for producing a spheroid adsorption head according to the sixth aspect of the invention, in the method for producing a spheroid adsorption head according to claim 6, the porous body is pressed through the plate body.

Further, in the method for producing a spheroid adsorption head according to the sixth aspect of the invention, in the method for producing a spheroid adsorption head according to the sixth aspect of the invention, the side surface of the porous body and the inner peripheral surface of the opening are adjusted. The separation distances are the same, and the porous body is pressed.

Further, in the method for producing a spheroid adsorption head according to the seventh aspect of the invention, in the method for producing a spheroid adsorption head according to the seventh aspect of the invention, the side surface of the porous body and the inner peripheral surface of the opening are adjusted. The separation distances are the same, and the porous body is pressed.

The spheroid adsorption head manufacturing method according to any one of claims 6 to 9, wherein the spheroid adsorption head is used in the method of manufacturing the spheroid adsorption head according to any one of claims 6 to 9, The aligning sheet is disposed at a position in which the through-holes are arranged in a state before the one surface side, and the mounting target body on which the spherical body is mounted is reduced in the extending portion of the aligning sheet in a state in which the outer side is protruded only Match the location of the location.

The spheroid adsorption head described in the first application of the patent scope, application for In the spheroidal body loading device according to the fifth aspect of the invention, the method of manufacturing the spheroidal adsorption head according to the sixth aspect of the invention, wherein the spheroidal portion of the spheroidal body in the one surface of the body portion is fixed from the body The porous body embedded in the opening is pressed to the outside from the inside to make the porous body protrude outward, so that the outer surface is located outside the one side to manufacture the spherical adsorption head. Therefore, when the spheroid adsorption head, the spherical body mounting device, and the spheroid adsorption head manufacturing method are used, for example, even if a projection is disposed in the vicinity of the object to be mounted, the projection and the spherical shape can be avoided. The contact of the body adsorption head can be adsorbed to the apex of the spheroid adsorption head, and the target body is very close to the object to be mounted. As a result, the spheroid can be surely mounted on the object to be mounted. Further, when the spheroid adsorption head, the spherical body mounting device, and the spheroid adsorption head manufacturing method are used, the porous body can be easily protruded by pressing the porous body only by the pressing portion. Further, in the method for producing a spheroid adsorption head, the amount of protrusion of the porous body can be easily changed by merely adjusting the pressing force by the pressing portion. Therefore, when the spheroid adsorption head, the spheroid loading device, and the spheroid adsorption head manufacturing method are used, the spheroid adsorption head can be easily manufactured, and as a result, the manufacturing cost of the spheroid adsorption head can be sufficiently reduced.

When the spheroid adsorption head according to the second aspect of the invention, the spheroid loading device according to claim 5, and the spheroid adsorption head manufacturing method according to claim 7 of the patent application are used, By pressing the porous body through the plate body disposed between the pressing portion and the porous body, the pressing force by the pressing portion can be dispersed to be applied to the porous body. Therefore, when using the spheroid adsorption head, the spheroid loading device, and the spheroid adsorption head In the method, even when the porous body is made of a material having a low strength, the porous body can surely protrude to the outside without being damaged.

Further, the spheroid adsorption head according to the third and fourth aspects of the patent application, the spheroid loading device according to claim 5, and the spheroid described in claim 8 and 9. In the method for producing a sorbent head, the separation distance between each side surface of the porous body and the inner peripheral surface of the opening is adjusted to be the same, and the porous body is pressed. In this case, when the separation distance between each side surface of the porous body and the inner peripheral surface of the opening is the same (constant), any position in the side surface of the porous body (the inner peripheral surface of the opening) is accompanied by the porous material. The extension of the entire column of the body is roughly the same. As a result, the tension made by the extension becomes the same at any position on the side surface of the porous body (the inner peripheral surface of the opening), so that the inclination of the porous body caused by the difference in tension can be surely prevented to maintain the horizontal state.

Further, when the spheroid adsorption head manufacturing method according to claim 10 is used, the aligning sheet is used, and the aligning sheet is restricted from the arrangement of the through holes in a state before the one surface side, and only By arranging the extended portion of the entire row in the state of the outer side to reduce the position of the arrangement position of the object to be mounted, it is possible to surely arrange the through holes when the sheet is extended by the protrusion of the porous body. Since the position is the same as the arrangement position of the object to be mounted, the spherical body adsorbed to the spherical body adsorption head can be surely mounted on the object to be mounted while being aligned in the through hole.

Hereinafter, a spherical body adsorption head, a spherical body loading device, and a method of manufacturing a spherical body adsorption head will be described with reference to the drawings.

First, the configuration of the solder ball loading device 1 shown in Fig. 1 will be described. The solder ball loading device 1 is an example of a spherical body mounting device, and as shown in FIG. 1, the adsorption head 11, the suction mechanism 12, the storage container 13, the conveying device 14, and the control unit 15 can be made spherical. A soft solder ball (microsphere) 300 (see FIG. 4) of a microscopic spheroidal body as an example is mounted on a terminal 401 of a substrate 400 as a mounting target. In this case, the structure of the solder ball 300 is a spherical shape having a diameter L1 (refer to the same drawing) of about 80 μm. Further, the solder ball 300 is mounted on the terminal 401 of the substrate 400 by the solder ball mounting device 1 and then heated and melted, whereby a ball grid array (BGA) is formed on the substrate 400.

The configuration of the adsorption head 11 is an example of a spheroid adsorption head manufactured by the following production method (the method for producing a spheroid adsorption head). As shown in FIGS. 2 and 3, the entire shape is formed into a cube shape, and the soft solder ball can be adsorbed. 300. Specifically, as shown in FIGS. 3 and 5, the adsorption head 11 has a main body portion 21, a porous body 22, a pressing plate (plate body) 23, a fixing member 24, an entire row piece 25, and a pressing screw 26. And sheet 27.

The configuration of the main body portion 21 is formed of a metal, and as shown in FIGS. 3 and 5, has four side wall portions 31a to 31d (hereinafter, if not distinguished, also referred to as "side wall portion 31"). The whole is in the shape of a cube. Further, the main body portion 21 is formed with an opening portion 21c that communicates from the lower surface (one surface) 21a to the upper surface 21b. In this case, as shown in Fig. 9, the opening portion 21c is sized on the side of the lower surface 21a so that the porous body 22 can be embedded. Further, only a slight gap (as an example of about 0.5 mm to 1 mm) is generated between the side faces 43 of the porous body 22 and the inner peripheral surface 32 of the opening portion 21c.

Further, as shown in FIGS. 3 and 5, a segment portion 33 in which the fixing member 24 is fitted is formed in one of the four side wall portions 31a constituting the main body portion 21. Further, a screw hole 33a into which the fixing screw 24a is screwed is formed on the upper surface of the step portion 33. Further, at the end portion on the upper surface 21b side of the side wall portion 31b of the opposing side wall portion 31a, a protruding portion 34 that protrudes toward the center portion side of the opening portion 21c is formed. Further, the protruding portion 34 is formed with a plurality of screw holes 34a which are screwed into the pressing screw 26 which functions as a pressing portion.

The porous body 22 is formed of a ceramic having an open cell structure as shown in Fig. 5, and has a rectangular plate shape as shown in Fig. 5. Moreover, as shown in FIG. 3, the porous body 22 is fitted in the side of the lower surface 21a of the opening part 21c of the main-body part 21. Further, the porous body 22 is protruded to the outside by the pressing force of the pressing screw 26, so that the outer surface 41 is located outside (the lower side in the same plane) than the lower surface 21a of the main body portion 21, by the pressing force of the pressing screw 26. The tension of the entire sheet 25 is maintained in this state (the state of being protruded to the outside). Further, a plate 27 having the same thickness corresponding to the adjustment portion is inserted into a gap between each side surface 43 of the porous body 22 (see FIG. 9) and the inner peripheral surface 32 of the opening portion 21c (see FIG. 9). The sheet material 27 is adjusted so that the separation distance between each side surface 43 and each inner peripheral surface 32 is the same. Further, although a plate-like member formed of various materials can be used as the plate member 27, in this example, a plate-like member formed of metal (specifically, a member for thickness gauge) is used as the plate member 27. .

One example of the pressing plate 23 is formed of a metal, and as shown in Fig. 5, it is a rectangular plate having the same size as the porous body 22. As shown in Fig. 3, the pressing plate 23 is disposed between the pressing screw 26 and the porous body 22, and has a function of preventing the porous body 22 from being damaged by dispersing the pressing force by the pressing screw 26. Further, a concave portion 23a is formed at a central portion on the lower surface side of the pressing plate 23. Further, the pressing plate 23 is formed with a vent hole 23b that communicates with the recess 23a.

One example of the fixing member 24 is formed of a metal, and as shown in Fig. 5, it can be fitted into a cube shape of the segment portion 33 of the body portion 21. Further, the fixing member 24 is formed with a plurality of (three in one example) through holes 24b, and a fixing screw 24a for fixing the main body portion 21 (see FIG. 3); and a plurality (for example, three) The screw hole 24c is screwed into the pressing screw 26.

The entire sheet 25 is composed of a flexible resin sheet (formed as a polyester as an example). Further, as shown in FIGS. 3 and 5, the entire row of sheets 25 is formed in a rectangular thin plate shape larger than the opening portion 21c of the main body portion 21 (in this example, the same size as the lower surface 21a). Further, the entire line piece 25 is disposed on the lower surface 21a side of the main body portion 21 so as to cover the outer surface 41 of the porous body 22 and the opening portion 21c (the porous body 22 and the opening portion 21c) which are fitted into the opening portion 21c of the main body portion 21. The gap between the inner peripheral surface 32 (see Fig. 9)). In this case, the entire row piece 25 is subsequently fixed to the edge of the opening portion 21c in the lower surface 21a of the body portion 21 with an adhesive.

In the entire line piece 25, a plurality of through holes 51 having a function of arranging the positions of the terminals 401 in the substrate 400 as the object to be mounted and having the function of the entire row of the solder balls 300 are formed (see FIGS. 5 and 6). In this case, As shown in Fig. 4, the diameter L2 of the through hole 51 is limited to be about 40 μm shorter than the diameter L1 of the solder ball 300 (80 μm in this example). Further, when the adsorption head 11 is manufactured by the following manufacturing method, when the porous body 22 is protruded to the outside of the main body portion 21, the portion covering the outer surface 41 of the porous body 22 is protruded together with the porous body 22. To the outside, as a result, as shown in Fig. 3, the portion covering the outer surface 41 extends only by the length of the projection amount. Therefore, in order to prevent the displacement of the position of the through hole 51 due to the extension in the above-described aligning sheet 25, the arrangement position of the through hole 51 in the state before being disposed on the lower surface 21a side of the main body portion 21 is It is restricted to the position at which the positions of the terminals 401 are arranged in a position where only the entire column piece 25 in the state corresponding to the outer side is extended.

In the adsorption head 11, the space formed by the inner surface 42 of the porous body 22 (see FIG. 3) and the concave portion 23a of the pressing plate 23 is decompressed by the exhaust gas from the exhaust hole 23b. The inhalation of the porous body 22 adsorbs the solder ball 300 at the portion where the through hole 51 is formed in the aligned sheet 25 disposed on the outer surface 41 of the outer surface 41 of the porous body 22 (in this example, the edge of the through hole 51 is adsorbed) Part: Refer to Fig. 4), and when the space returns to normal pressure (when the pressure is released), the adsorption of the solder ball 300 can be released.

The suction mechanism 12 has a vacuum pump, a solenoid valve, and the like which are connected to the exhaust hole 23b of the pressing plate 23 in the adsorption head 11 through a pipe, and are sucked from the exhaust hole 23b as controlled by the control unit 15. (Exhaust) The air in the space formed by the inner surface 42 of the porous body 22 and the concave portion 23a of the pressing plate 23.

As shown in Fig. 14, the storage container 13 is configured to receive a solder ball. 300. Further, the storage container 13 can float the solder ball 300 by the air supply from the air supply means outside the drawing. Further, a restriction plate 61 for restricting (having a restriction action) adsorption of the remaining soft solder balls 300 by the adsorption head 11 is attached to the upper portion of the storage container 13. In this case, the limiting plate 61 has a thickness L3 (see FIG. 4) which is a plate shape of about 75 μm thinner than the diameter L1 of the solder ball 300 (80 μm in this example).

Further, in the state of the restriction plate 61, when the alignment sheet 25 in the adsorption head 11 is brought close to (or in contact with) the restriction plate 61 (see Fig. 14), the alignment sheets 25 in the opposite adsorption heads 11 are each penetrated. A through hole 62 is formed at the position of the hole 51. In this case, as shown in Fig. 4, the diameter L4 of the through hole 62 is formed longer than the diameter L1 of the solder ball 300 (80 μm in this example) and is shorter than twice the diameter L1. About 100μm.

The conveyance device 14 conveys the arrangement position (adsorption position) of the adsorption head 11 to the storage container 13 and the arrangement position of the substrate 400 under the control of the control unit 15.

The control unit 15 controls the respective constituent elements constituting the solder ball loading device 1. Specifically, the control unit 15 controls the transport device 14 to transport the adsorption head 11 to the arrangement position of the storage container 13 and the arrangement position of the substrate 400. Further, the control unit 15 controls the suction mechanism 12 to suck the air in the internal space of the adsorption head 11.

Next, a method of manufacturing the adsorption head 11 (a method of manufacturing a spherical body adsorption head) will be described with reference to the drawings.

In this manufacturing method, initially, the entire row piece 25 is fixed to the edge portion of the opening portion 21c in the lower surface 21a of the main body portion 21. Here, in this manufacturing method, As described below, when the porous body 22 protrudes to the outside of the body portion 21, a portion covering the outer surface 41 of the porous body 22 in the entire row of sheets 25 protrudes to the outside with the porous body 22, and the portion extends only by the amount of protrusion. The length. Therefore, in the alignment sheet 25 used in the present manufacturing method, the arrangement position of the through holes 51 is restricted to be reduced only by the length corresponding to the extension length (that is, the length corresponding to the amount of protrusion of the porous body 22). The arrangement position of the terminal 401 of the object body.

When the entire alignment sheet 25 is fixed, first, an adhesive (an example of a fluororesin-based adhesive) is applied to the edge portion of the opening portion 21c in the lower surface 21a of the main body portion 21. Next, as shown in Fig. 6 and Fig. 7, the entire line piece 25 is placed (mounted) on the lower surface 21a so as to cover the opening portion 21c, and then the edge portion of the entire line piece 25 is pressed toward the opening portion 21c (adhesive coating) Cloth part). Next, by placing it until the adhesive is dried, the entire row piece 25 is fixed to the edge of the opening portion 21c. In this case, by applying tension to the entire sheet 25, slack is prevented from occurring. Further, in the above example, although the adhesive is applied to the lower surface 21a of the main body portion 21, the adhesive may be applied to the upper surface of the entire alignment sheet 25 (the surface facing the lower surface 21a of the main body portion 21), The adhesive may be applied to the upper surface 21a of the body portion 21 and the upper surface of the entire sheet 25.

Then, as shown in Fig. 8 and Fig. 9, the porous body 22 is inserted into the opening 21c from the upper surface 21b side of the main body portion 21, and the porous body 22 is fitted to the lower surface 21a side of the opening portion 21c. Next, as shown in Fig. 9, a plate 27 of the same thickness is inserted into a gap between each side surface (four side faces) of the porous body 2 and the inner peripheral surface 32 of the opening portion 21c. Thereby, the adjustment is such that the separation distance between each side surface 43 and the inner circumferential surface 32 is equal.

Next, as shown in FIGS. 10 and 11, the pressing plate 23 is inserted into the opening 21c from the upper surface 21b side of the main body portion 21 in an inclined state. At this time, as the tip end portion (the left end portion in FIG. 10) of the pressing plate 23 approaches the inner peripheral surface 32 of the opening portion 21c, the rear end portion (the right end portion in Fig. 10) of the pressing plate 23 is brought close to the porous body. 22. Thereby, it is placed (placed) above the porous body 22. Next, as shown in Fig. 12, the fixing member 24 is fitted into the segment portion 33 of the body portion 21. Next, the fixing screw 24a is inserted into the through hole 24b of the fixing member 24, and the fixing screw 24a is screwed into the screw hole 33a of the side wall portion 31a, whereby the fixing member 24 is fixed to the side wall portion 31a.

Next, as shown in Fig. 13, the pressing screw 26 is screwed into the screw hole 24c formed in the fixing member 24 and the screw hole 34a formed in the protruding portion 34 of the main body portion 21. At this time, the pressing plate 26 is pressed by the pressing screw 26, and the pressing plate 23 is pressed outward from the inside of the main body portion 21, and the pressing plate 23 presses the porous body 22 toward the outside. In other words, the pressing screw 26 as the pressing portion passes through the pressing plate 23 disposed between the porous body 22 and presses the porous body 22.

Further, as shown in FIG. 3, the porous body 22 pressed by the pressing screw 26 is protruded against the tension of the entire row piece 25 so that the outer surface 41 is located outside the lower surface 21a of the main body portion 21. Further, as the porous body 22 protrudes, a portion covering the outer surface 41 of the entire row of sheets 25 is protruded to the outside together with the porous body 22. Next, at the stage where the porous body 22 protrudes only by a predetermined amount of protrusion, the screwing of the pressing screw 26 (the pressing by the pressing screw 26) is stopped.

Here, in this state, the porous body 22 is pressed against the inner side of the main body portion 21 by the tension of the entire row piece 25, and is made by the tension of the above-mentioned entire piece 25 The pressing force is balanced with the pressing force by the pressing screw 26, and the porous body 22 is held in a state of being protruded to the outside. Further, in the above-described entire row piece 25, as described above, the through hole 51 is formed at a position where only the length of the extension is reduced. Therefore, the entire sheet piece 25 is extended by the protrusion of the porous body 22, and the arrangement position (forming position) of each of the through holes 51 coincides with the arrangement position of the terminal 401 of the mounting object.

Thereby, the manufacture of the adsorption head 11 is completed. In this manufacturing method, only the porous body 22 is pressed by the pressing screw 26, so that the porous body 22 can be easily protruded, so that the outer surface 41 of the porous body 22 is located outside the lower surface 21a of the main body portion 21. Further, in this manufacturing method, the amount of protrusion of the porous body 22 can be easily changed by merely adjusting the pressing force (the amount of screwing of the pressing screw 26).

Next, a method of mounting the solder ball 300 on the terminal 401 of the substrate 400 and the operation of the solder ball mounting device 1 at this time using the solder ball mounting device 1 including the adsorption head 11 manufactured as described above will be described with reference to the drawings.

In the solder ball loading device 1, when the operation is started, the control unit 15 controls the transport device 14 to transport the adsorption head 11 to the upper side of the storage container 13, and then, as shown in Fig. 14, lowers the adsorption head 11, so that the adsorption head 11 is lowered. The lower surface of the entire row piece 25 in the adsorption head 11 abuts (or approaches) the restriction plate 61 of the storage container 13. Next, the control unit 15 controls the suction mechanism 12 to suck (exhaust) air from the space formed by the inner surface 42 of the porous body 22 and the concave portion 23a of the pressing plate 23 from the exhaust hole 23b of the pressing plate 23. At this time, the space is depressurized, and then the continuous air bubbles in the porous body 22 are transmitted, and the air on the outer surface 41 side of the porous body 22 is sucked (inhaled).

Next, the control unit 15 supplies the gas into the storage container 13 from the air supply means outside the drawing. At this time, the solder ball 300 accommodated in the storage container 13 by the supply of air is floated. Further, as shown in Fig. 15, the solder ball 300 floating in the storage container 13 is pulled against the porous body 22 by the suction force of the air permeating through the porous body 22 of the adsorption head 11. The outer surface 41 side is permeated through the through hole 62 formed in the restricting plate 61 of the storage container 13, and is attracted to the through hole 51 forming portion (edge portion of the through hole 51) in the entire row piece 25 of the adsorption head 11.

Further, since the solder balls 300 are minute, the strength of the solder balls 300 is relatively large with respect to the weight. As a result, as shown in Fig. 15, other solder balls 300 (hereinafter, this also The solder ball 300 is referred to as "the remaining solder ball 300") and is attached to the solder ball 300 that is adhered to the portion of the through hole 51 formed in the entire sheet 25 (hereinafter, the solder ball 300 is also referred to as "equipped Soft solder ball 300").

Next, the control unit 15 stops the floating of the solder ball 300 by stopping the supply of air to the storage container 13. Next, the control unit 15 controls the conveying device 14, and as shown in Fig. 16, the adsorption head 11 is moved upward. At this time, since the entire row piece 25 of the adsorption head 11 is separated from the restriction plate 61 of the storage container 13, the soft solder ball 300 and the remaining soft solder ball 300 which are mounted on the portion where the through hole 51 is formed are interposed. The remaining soft solder ball 300 is pulled away from the solder ball 300 to be mounted, and as a result, as shown in the same figure, the remaining solder ball 300 is dropped by its own weight.

Next, the control unit 15 controls the transport device 14 to move the adsorption head 11 above the arrangement position of the substrate 400, and then, as shown in Fig. 17, the suction is lowered. The tip end 11 is at a position near the tip end portion of the solder ball 300 adsorbed to the adsorption head 11 near the terminal 401 of the substrate 400.

In this case, in the adsorption head 11, the outer surface 41 of the porous body 22 protrudes to the outer position from the lower surface 21a of the body portion 21. Therefore, as shown in Fig. 17, even when the substrate 400 is provided with a projection such as the electronic component 402, the projection can be prevented from coming into contact with the adsorption head 11, and the solder ball adsorbed on the adsorption head 11 can be prevented. The tip end portion of the 300 is very close to the terminal 401 of the substrate 400.

Next, the control unit 15 controls the suction mechanism 12 to stop the suction. Thereby, the internal space of the adsorption head 11 returns to normal pressure (decompression is released), and the suction through the porous body 22 is stopped, and as a result, the adsorption of the solder ball 300 by the adsorption head 11 is released. The solder ball 300 is mounted on the terminal 401.

Next, the control unit 15 controls the transport device 14 to move the adsorption head 11 to the upper position and then transport it to the initial position. Thereby, the operation of mounting the solder ball 300 on the terminal 401 of the substrate 400 is completed.

In the adsorption head 11, the solder ball loading device 1, and the method of manufacturing the spherical body adsorption head, the entire alignment piece 25 is fixed to the edge of the opening 21c in the lower surface 21a of the main body portion 21 so as to be fitted into the opening portion 21c. The porous body 22 is pressed outward from the inside of the main body portion 21 by using the pressing screw 26, so that the porous body 22 protrudes to the outside, so that the outer surface 41 is located outside the lower surface 21a. Therefore, when the adsorption head 11, the solder ball mounting apparatus 1 and the spheroid adsorption head manufacturing method are used, even if the projections of the electronic component 402 are disposed in the vicinity of the terminal 401 of the substrate 400 as the object to be mounted, continued When the projection is prevented from coming into contact with the adsorption head 11, the tip end portion of the solder ball 300 adsorbed on the adsorption head 11 is very close to the terminal 401 of the substrate 400, and as a result, it can be reliably mounted on the object to be mounted. Solder ball 300. Moreover, when the adsorption head 11, the solder ball mounting apparatus 1, and the spherical body adsorption head manufacturing method are used, the porous body 22 can be easily protruded only by pressing the porous body 22 with the pressing screw 26 as the pressing portion. Outside. Further, in the method for producing a spheroid adsorption head, the amount of protrusion of the porous body 22 can be easily changed by merely adjusting the pressing force (the amount of screwing of the pressing screw 26). Therefore, when the adsorption head 11, the solder ball loading device 1, and the spheroid adsorption head manufacturing method are used, the adsorption head 11 can be easily manufactured, and as a result, the manufacturing cost of the adsorption head 11 can be sufficiently reduced.

Further, when the adsorption head 11, the solder ball loading device 1 and the spherical body adsorption head manufacturing method are used, the porous body 22 is pressed by the pressing plate 23 disposed between the pressing screw 26 and the porous body 22 The pressing force by the pressing screw 26 can be dispersed and applied to the porous body 22. Therefore, when the adsorption head 11, the solder ball mounting apparatus 1, and the spheroid adsorption head manufacturing method are used, even if the porous body 22 is made of a low-strength material, the porous body 22 can be surely protruded without being damaged. To the outside.

Further, in the adsorption head 11, the solder ball loading device 1, and the method of manufacturing the spherical body adsorption head, the separation distance between the side faces 43 of the porous body 22 and the inner circumferential faces 32 of the respective side faces 43 is adjusted to be the same. And the porous body 22 is pressed. In this case, when the separation distance between the inner circumferential surface 32 of the opening 21c and the side surface 43 of the porous body 22 is the same (constant), the side surface 43 of the porous body 22 (the inner circumferential surface 32 of the opening 21c) Any bit The amount of extension of the entire row of sheets 25 that protrudes along with the porous body 22 is substantially the same. As a result, at any position in the side surface 43 of the porous body 22 (the inner peripheral surface 32 of the opening portion 21c), the tension by the extension becomes the same, so that the inclination of the porous body 22 caused by the difference in tension can be surely prevented. To maintain a level.

When the adsorption head 11, the solder ball loading device 1 and the spherical body adsorption head manufacturing method are used, the alignment sheet 25 is used, and the alignment sheet 25 restricts the through holes in the state before being disposed on the lower surface 21a side of the main body portion 21. In the position where the alignment piece 25 is extended only to the outer side, the position of the arrangement of the terminal 401 is reduced, whereby the protrusion of the porous body 22 is used, and the entire sheet 25 is extended. Since the position of the through-holes 51 is arranged to be in the same position as the position of each of the terminals 401 to be mounted, the solder ball 300 that is adsorbed on the adsorption head 11 can be surely mounted in a state in which the through-holes 51 are arranged in a row. On each terminal 401.

Further, the spheroid adsorption head, the spheroid loading device, and the spheroid adsorption head manufacturing method are not limited to the above configuration and method. For example, although the above-described configuration and method of the entire row piece 25 in which the through hole 51 (before being fixed to the main body portion 21) is formed in advance is used, the entire piece 25 in which the through hole 51 is not formed may be used in the body. After the portion 21, a structure or a method of forming a through hole 51 by using a laser or a drill, or a column 9 of a state in which the through hole 51 is not formed is fixed to the body portion 21 to protrude the porous body 22, and then a mine is used. A configuration or method of forming a through hole 51 by shooting or a drill.

Although it is explained that the entire sheet is fixed to the body portion 21 by using an adhesive. Although the configuration and method are employed, the configuration and method of fixing the main body portion 21 by screws may be employed. Further, although the configuration and method of forming the entire sheet 25 by the resin sheet have been described, the configuration and method of forming the entire sheet 25 from a material other than a resin such as metal may be employed.

Further, it has been described that the plate member 27 serving as the adjustment portion is inserted between the side surface 43 of the porous body 22 and the inner peripheral surface 32 of the side wall portion 31, whereby the side faces 43 of the porous body 22 and the inner periphery of the side wall portion 31 are adjusted. The configuration and method of the same distance between the faces 32 are the same. However, for example, a screw hole in the lateral direction may be formed in each of the side wall portions 31, and a screw as an adjusting portion may be screwed into the screw hole to press the porous body 22 The side surface 43, thereby adjusting the configuration and method of the separation distance between the side surface 43 and the inner circumferential surface 32.

Further, although the configuration in which the diameter L2 of the through hole 51 is shorter than the diameter L1 of the solder ball 300 and the soft solder ball 300 is sucked at the edge of the through hole 51 has been described, the diameter L2 of the through hole 51 may be specified. The solder ball 300 has a longer diameter L1 and is configured to adsorb the solder ball 300 in the through hole 51 (another example of the portion where the through hole 51 is formed).

1‧‧‧Soft solder ball mounting device

11‧‧‧Adsorption head

14‧‧‧Transportation device

21‧‧‧ Body Department

21a‧‧‧lower surface

21c‧‧‧ openings

22‧‧‧Porous body

23‧‧‧ Press plate

25‧‧‧ hologram

26‧‧‧Pushing screws

27‧‧‧ Thickness

41‧‧‧ outer surface

51‧‧‧through holes

300‧‧‧Soft solder balls

Fig. 1 is a configuration diagram showing the configuration of the solder ball loading device 1.

Fig. 2 is a perspective view showing the configuration of the adsorption head 11.

Fig. 3 is a cross-sectional view of the adsorption head 11 cut along the plane A in Fig. 2.

Fig. 4 is an explanatory view showing the relationship between the diameter L1 of the solder ball 300, the diameter L2 of the through hole 51, the thickness L3 of the limiting plate body 61, and the diameter L4 of the through hole 62.

Fig. 5 is an exploded perspective view of the adsorption head 11.

Fig. 6 is a first explanatory view for explaining a method of manufacturing the adsorption head 11.

Fig. 7 is a second explanatory view showing a method of manufacturing the adsorption head 11.

Fig. 8 is a third explanatory view showing a method of manufacturing the adsorption head 11.

Fig. 9 is a fourth explanatory view showing a method of manufacturing the adsorption head 11.

Fig. 10 is a fifth explanatory diagram for explaining the method of manufacturing the adsorption head 11.

Fig. 11 is a sixth explanatory diagram for explaining the method of manufacturing the adsorption head 11.

Fig. 12 is a seventh explanatory view showing a method of manufacturing the adsorption head 11.

Fig. 13 is a view for explaining the eighth embodiment of the manufacturing method of the adsorption head 11.

Fig. 14 is a first explanatory view showing a step of mounting the solder ball 300.

Fig. 15 is a second explanatory view showing a step of mounting the solder ball 300.

Fig. 16 is a third explanatory view showing a step of mounting the solder ball 300.

Fig. 17 is a fourth explanatory view showing a step of mounting the solder ball 300.

11‧‧‧Adsorption head

21‧‧‧ Body Department

21a‧‧‧lower surface

21b‧‧‧ upper surface

21c‧‧‧ openings

22‧‧‧Porous body

23‧‧‧ Press plate

23a‧‧‧ recess

23b‧‧‧ venting holes

24‧‧‧Fixed components

24a‧‧‧ fixing screws

24b‧‧‧through holes

24c‧‧‧ screw hole

25‧‧‧ hologram

26‧‧‧Pushing screws

27‧‧‧ Thickness

31a, 31b‧‧‧ Side wall

33‧‧‧ Section

33a‧‧‧ screw holes

34‧‧‧Protruding

34a‧‧‧ screw holes

41‧‧‧ outer surface

42‧‧‧ side

51‧‧‧through holes

Claims (10)

A spheroid adsorption head comprising: a body portion having an open porous body formed in a plate shape and embedded in the opening; and an entire row of through holes forming an entire spherical body covering the opening and a surface of the outer surface of the porous body is disposed on one side of the main body portion, and the spherical body is adsorbed to a portion where the through hole is formed by inhalation through the porous body, wherein the body portion is included The inner side of the inner side presses the pressing portion of the porous body, and the aligned sheet is fixed to the opening edge portion of the one surface, and the porous body protrudes to the outer side by the pressing force of the pressing portion, so that the outer surface ratio is The aforementioned side is also located on the aforementioned outer side. The spheroid adsorption head according to the first aspect of the invention, wherein the spheroid adsorption head is disposed between the pressing portion and the porous body, and the pressing portion presses the porous body through the plate body. The spheroid adsorption head according to claim 1, wherein the spheroid adsorption head has an adjustable adjustment portion such that each separation surface between the side faces of the porous body and the inner peripheral surface of the opening is the same. The spheroid adsorption head according to claim 2, wherein the spheroid adsorption head has an adjustable adjustment portion such that the separation distance between each side surface of the porous body and the inner circumferential surface of the opening is the same. A spherical body loading device comprising: a spheroid adsorption head according to any one of claims 1 to 4; and a conveying device that transports the spheroid adsorption head at an adsorption position where the spheroid is adsorbed, and simultaneously adsorbs the ball The spheroid adsorption head of the body is transported to an arrangement position of the mounted object, and the spherical body is mounted on the mounted object. A method for producing a spheroid adsorption head, comprising: a spheroid adsorption head comprising: a body portion having an opening; a porous body having a plate shape and being embedded in the opening; and an entire column, a through hole in which the entire spherical body is formed, and is disposed on one surface side of the main body portion in a state of covering the opening portion and the outer surface of the porous body; and the spheroid is formed by inhalation through the porous body Adsorbed in a portion where the through-hole is formed, wherein the edge of the opening in the one surface of the aligned sheet is fixed, and the porous body embedded in the opening is pressed outward from the inside of the main body to make the porous body The body protrudes to the outside such that the aforementioned outer surface is located outside the aforementioned side. The method for producing a spheroid adsorption head according to claim 6, wherein the porous body is pressed through the plate body. The method for producing a spheroid adsorption head according to claim 6, wherein the separation distance between each side surface of the porous body and the inner peripheral surface of the opening is the same, and the porous body is pressed. The spheroid adsorption head manufacturer as described in claim 7 In the method, the separation distance between each side surface of the porous body and the inner circumferential surface of the opening is the same, and the porous body is pressed. The spheroid adsorption head manufacturing method according to any one of claims 6 to 9, wherein the aligning sheet is used to restrict the arrangement of the through holes in a state before the one side In the position, the position of the arrangement position of the mounting target body on which the spherical body is mounted is reduced by the extension portion of the entire row in the state corresponding to the outer side.