TW201306336A - Multi-layer composite having electroactive layers - Google Patents

Multi-layer composite having electroactive layers Download PDF

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TW201306336A
TW201306336A TW101107713A TW101107713A TW201306336A TW 201306336 A TW201306336 A TW 201306336A TW 101107713 A TW101107713 A TW 101107713A TW 101107713 A TW101107713 A TW 101107713A TW 201306336 A TW201306336 A TW 201306336A
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layer
multilayer composite
electrically conductive
dielectric elastomer
piezoelectric layer
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TW101107713A
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Werner Jenninger
Reimund Gerhard
Werner Wirges
Juergen Maas
Christian Graf
Harald Mundinger
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Bayer Materialscience Ag
Uni Potsdam
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Abstract

The invention relates to a multi-layer composite (2, 2.1, 2.2, 18) comprising at least two electroactive layers (4, 6) positioned between a first electrically conductive layer (12) and a second electrically conductive layer (14), wherein at least one electrically conductive sub-layer (8) is positioned between the at least two electroactive layers (4, 6), and wherein at least one of the at least two electroactive layers (4, 6) is a piezo layer (6), wherein at least one other of the at least two electroactive layers (4, 6) is a dielectric elastomer layer (4).

Description

具電活化層之多層複合物 Multilayer composite with electroactive layer

本發明係相關於一種多層複合物,其包含至少二電活化層,該等電活化層位於一第一電導層和一第二電導層之間;其中至少一電導子層係位於至少二電活化層之間;以及其中至少二電活化層的至少其中之一係一壓電層。本發明亦相關於一機電轉換器裝置,其包含此多層複合物且相關於製造多層複合物的方法。 The present invention relates to a multilayer composite comprising at least two electroactive layers between a first electrically conductive layer and a second electrically conductive layer; wherein at least one of the electrically conductive sublayers is at least two electrically activated Between the layers; and at least one of the at least two electroactive layers is a piezoelectric layer. The invention is also related to an electromechanical transducer device comprising such a multilayer composite and related to a method of making a multilayer composite.

塑膠複合物被使用於大量應用中。例如,適當的多層複合物被使用為包裝材料,絕緣材料或建築材料。除了這習知使用,多層複合物被使用為感測應用中的主動元件或用於已知為能量擷取的能量回收或能量轉換正在增加。 Plastic composites are used in a wide variety of applications. For example, suitable multilayer composites are used as packaging materials, insulating materials or building materials. In addition to this conventional use, multilayer composites are being used as active components in sensing applications or for energy recovery or energy conversion known as energy extraction.

例如,世界專利第2010/066347 A2號揭示具有複數壓電層的多層複合物,換言之,該等壓電層從壓電材料製造。壓電材料可被使用來將作用於多層複合物的機械力變化線性轉換為電子信號。由於它們轉換機械力變化為例如電流、電壓或能量的電量的能力,壓電層適合感測器應用或能量擷取。 For example, World Patent Publication No. 2010/066347 A2 discloses multilayer composites having a plurality of piezoelectric layers, in other words, the piezoelectric layers are fabricated from piezoelectric materials. Piezoelectric materials can be used to linearly convert mechanical force changes acting on the multilayer composite into electrical signals. The piezoelectric layer is suitable for sensor application or energy extraction because of their ability to convert mechanical forces into electrical quantities such as current, voltage or energy.

多層複合物現今係例如使用於鍵盤或觸控板、加速感應器、麥克風、揚聲器、超音波轉換器的結構性壓力感應器,用來應用於醫學工程、海洋工程或用於材料測試。 Multilayer composites are now used, for example, in structural pressure sensors for keyboards or trackpads, acceleration sensors, microphones, speakers, ultrasonic transducers, for medical engineering, marine engineering, or for material testing.

一具有壓電元件為轉換器裝置的高頻傳輸器例如已知於歐洲專利EP 1 312 171 B1。此處作用於壓電元件上的機械力變化係轉換為電能且使用於高頻傳輸器的自主操作。 A high-frequency transmitter having a piezoelectric element as a converter device is known, for example, from the European patent EP 1 312 171 B1. The mechanical force changes acting on the piezoelectric element here are converted into electrical energy and used for autonomous operation of the high frequency transmitter.

然而,習知的缺點是雖然具有高壓電常數的壓電層的多層複合物適合用於感應器應用和適合於能量擷取,但因為可能的行程太小一對應壓電層僅限制地合適於啟動器應用。 However, a conventional disadvantage is that although a multilayer composite of piezoelectric layers having a high voltage constant is suitable for sensor applications and is suitable for energy extraction, the possible stroke is too small and the corresponding piezoelectric layer is only limitedly suitable. For the launcher application.

因此,本發明的目的係提供一多層複合物,其不僅適用於感應器和能量擷取應用且適用於啟動器應用。 Accordingly, it is an object of the present invention to provide a multilayer composite that is suitable not only for inductors and energy extraction applications but also for actuator applications.

依據本發明的一在一多層複合物中的第一態樣,可達成上述導出的和敘述的目的,該多層複合物包含位於第一電導層和第二電導層間的至少二電活化層。其中至少一電導子層係位於該至少二電活化層之間;以及其中至少二電活化層的至少其中之一者係一壓電層;其中至少二電活化層中的至少一另一者係一介電彈性體層。 In accordance with a first aspect of the invention in a multilayer composite, the above-described derivation and recited objectives are achieved, the multilayer composite comprising at least two electroactive layers between the first electrically conductive layer and the second electrically conductive layer. Wherein at least one conductivity sublayer is between the at least two electroactive layers; and wherein at least one of the at least two electroactive layers is a piezoelectric layer; wherein at least one of the at least two electroactive layers A dielectric elastomer layer.

對照於習知技藝,依據本發明的教示,藉由至少兩不同類型的電活化層,感應器、啟動器和能量擷取的功能被齊集於依據本發明的一單一多層複合物。 In accordance with the teachings of the present invention, in accordance with the teachings of the present invention, the functions of the inductor, actuator, and energy extraction are integrated into a single multilayer composite in accordance with the present invention by at least two different types of electroactive layers.

壓電層例如可以是從一合適的壓電聚合物形成且可以是一壓電聚合物薄膜。依據一較佳實施例, 壓電層可以是一鐵電駐極體層(ferroelectret layer),例如一鐵電駐極體薄膜。壓電層可具有持續的壓電性質。例如藉由充電或極化壓電層這些可被產生。利用一高的壓電常數,壓電層特別可被用於一感測器應用和/或用於能量擷取。壓電層例如可具有高至1000 pC/N的壓電常數。 The piezoelectric layer can be formed, for example, from a suitable piezoelectric polymer and can be a piezoelectric polymer film. According to a preferred embodiment, The piezoelectric layer can be a ferroelectret layer, such as a ferroelectric electret film. The piezoelectric layer can have sustained piezoelectric properties. These can be produced, for example, by charging or polarizing the piezoelectric layer. With a high piezoelectric constant, the piezoelectric layer can be used in particular for a sensor application and/or for energy extraction. The piezoelectric layer can have, for example, a piezoelectric constant of up to 1000 pC/N.

依據本發明的多層複合物更包括至少一介電彈性體層。介電彈性體層較佳具有一相對高的介電常數。再者,介電彈性體層較佳具有一低的機械硬度。這些性質導致高至大約300%的延伸值。介電彈性體層特別可被用於一啟動器應用。 The multilayer composite according to the invention further comprises at least one dielectric elastomer layer. The dielectric elastomer layer preferably has a relatively high dielectric constant. Furthermore, the dielectric elastomer layer preferably has a low mechanical hardness. These properties result in extension values as high as about 300%. The dielectric elastomer layer can be used in particular for a starter application.

至少一電導子層係位於壓電層和介電彈性體層之間。子層被理解為意味著電導材料僅部份呈現於至少二電活化層之間。例如可形成一結構性或分段的層可。應理解的是該層也可為完整層。 At least one of the electrically conductive sublayers is between the piezoelectric layer and the dielectric elastomer layer. A sublayer is understood to mean that the electrically conductive material is only partially present between at least two electroactive layers. For example, a structural or segmented layer can be formed. It should be understood that the layer may also be a full layer.

再者,一電導層係位在多層複合物的頂側上,且一電導層位在多層複合物的下側。 Furthermore, an electrically conductive layer is anchored on the top side of the multilayer composite and an electrically conductive layer is positioned on the underside of the multilayer composite.

電導層可特別被設計為一電極。應理解的是下側或頂側可僅部份塗敷以一電導層。 The electrically conductive layer can in particular be designed as an electrode. It should be understood that the underside or top side may only be partially coated with an electrically conductive layer.

一電導層可較佳從一材料形成,該材料選自包含金屬、金屬合金、導電低聚物或聚合物、導電氧化物和/或以導電填充物填充的聚合物的群組。 An electrically conductive layer may preferably be formed from a material selected from the group consisting of metals, metal alloys, electrically conductive oligomers or polymers, electrically conductive oxides, and/or polymers filled with electrically conductive fillers.

依據至少一介電彈性體層和至少一壓電層的本發明,藉由組合單獨層類型的特定性質可被齊集於多層複合物中。得到具有感測器、啟動器和能量擷取功能的混合且簡潔的多層複合物。 According to the invention of at least one dielectric elastomer layer and at least one piezoelectric layer, the specific properties of the individual layer types can be combined in a multilayer composite. A hybrid and compact multilayer composite with sensor, actuator and energy extraction capabilities is obtained.

假設至少一壓電層和至少一介電彈性體層被包含入,多層複合物原則上可具有大量的電活化層。依據本發明的多層複合物的一第一實施例,至少另一介電層係可位於第一電導層和第二電導層之間。例如藉由二或更多壓電層的提供,更多機械能可被轉換成電能。壓電層可從相同或不同的材料形成。它們可較佳為鐵電駐極體層。 Assuming that at least one piezoelectric layer and at least one dielectric elastomer layer are incorporated, the multilayer composite can in principle have a large number of electroactive layers. In accordance with a first embodiment of the multilayer composite of the present invention, at least one other dielectric layer can be positioned between the first electrically conductive layer and the second electrically conductive layer. More mechanical energy can be converted into electrical energy, for example by the provision of two or more piezoelectric layers. The piezoelectric layers can be formed from the same or different materials. They may preferably be a ferroelectric electret layer.

另外或此外,至少另一介電彈性體層係可位於第一電導層和第二電導層間。在一啟動器應用中,可調整多層複合物的可能厚度改變且特別是增加。應被注意的是在複數電活化層的情形中一電導層較佳可至少部份位於所有相鄰層之間。 Additionally or alternatively, at least another dielectric elastomer layer can be positioned between the first electrically conductive layer and the second electrically conductive layer. In a starter application, the possible thickness variations of the multilayer composite can be adjusted and in particular increased. It should be noted that in the case of a plurality of electroactive layers, an electrically conductive layer may preferably be at least partially located between all adjacent layers.

壓電層可被設計為一發泡聚合物薄膜或設計為包括聚合物薄膜或聚合物纖維的多層系統且可包括一多孔中空結構。再者,依據一較佳實施例,壓電層可由一聚合物層狀結構形成。聚合物層狀結構可包括空穴。例如,空穴內含一氣體,該氣體選自包含氮,一氧化二氮和/或六氟化硫的群組。結構性壓電層可包含至少二封閉外層和例如一有孔的或穿孔的中間層。 The piezoelectric layer can be designed as a foamed polymer film or as a multilayer system comprising a polymeric film or polymer fiber and can comprise a porous hollow structure. Still further, in accordance with a preferred embodiment, the piezoelectric layer can be formed from a polymeric layered structure. The polymeric layered structure can include voids. For example, the cavity contains a gas selected from the group consisting of nitrogen, nitrous oxide, and/or sulfur hexafluoride. The structural piezoelectric layer can comprise at least two closed outer layers and, for example, a perforated or perforated intermediate layer.

隨著壓電層的電性充電或極化,不同極化的電荷可被分佈於空穴的相反表面上。每一空穴可形成偶極。若一機械力被施在一壓電層上,偶極大小且因此偶極距改變。產生電流的流動於兩電極之間,該兩電極被附著於壓電層的二表面。具有對應的聚合物層狀結構的壓電層特別適合於感測器應用以及 適合於能量擷取。 As the piezoelectric layer is electrically charged or polarized, differently polarized charges can be distributed on opposite surfaces of the cavity. Each cavity can form a dipole. If a mechanical force is applied to a piezoelectric layer, the dipole size and hence the dipole moment change. The flow of current is generated between the two electrodes, which are attached to the two surfaces of the piezoelectric layer. Piezoelectric layers with corresponding polymer layer structures are particularly suitable for sensor applications and Suitable for energy extraction.

依據本發明的多層複合物的另一實施例,壓電層可有利的包含一物質,該物質選自包含聚碳酸酯、全氟化或部分氟化的聚合物和共聚物、聚四氟乙烯、氟乙烯丙烯、全氟化烷氧基乙烯、聚酯,聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯、聚醯亞胺、聚醚醯亞胺、聚醚、聚(甲基)丙烯酸甲酯、環狀烯烴聚合物、環烯烴共聚物和/或聚烯烴的群組。 According to another embodiment of the multilayer composite of the present invention, the piezoelectric layer may advantageously comprise a substance selected from the group consisting of polycarbonate, perfluorinated or partially fluorinated polymers and copolymers, and polytetrafluoroethylene. , fluoroethylene propylene, perfluorinated alkoxyethylene, polyester, polyethylene terephthalate, polyethylene naphthalate, poly phthalimide, polyether phthalimide, polyether, poly (a Group of methyl acrylate, cyclic olefin polymer, cyclic olefin copolymer and/or polyolefin.

再者,依據本發明的一較佳實施例,介電彈性體層可包含一物質,該物質例如選自包含聚氨酯彈性體,聚矽氧彈性體和/或丙烯酸酯彈性體的群組。 Still further in accordance with a preferred embodiment of the present invention, the dielectric elastomer layer may comprise a substance selected, for example, from the group comprising polyurethane elastomers, polyoxyxides, and/or acrylate elastomers.

本發明的另一態樣係包含上面所述的多層複合物的機電轉換器裝置。依據本發明的轉換器裝置可特別被建構以轉換作用於它的機械力變化為電能或轉換為電子信號,並根據電子信號的應用改變幾何形狀,特別是一電場。如已敘明,在具有如上述的多層複合物的一機電轉換器裝置中啟動器,感測器和能量擷取功能被齊集於一單一裝置中。應理解的是一機電轉換器裝置可具有二或多個多層複合物。 Another aspect of the invention is an electromechanical transducer device comprising the multilayer composite described above. The converter device according to the invention can be specially constructed to convert the mechanical force acting on it into electrical energy or into an electrical signal and to change the geometry, in particular an electric field, depending on the application of the electronic signal. As has been described, in an electromechanical transducer device having a multilayer composite as described above, the actuator, sensor and energy extraction functions are integrated into a single device. It should be understood that an electromechanical transducer device can have two or more multilayer composites.

依據本發明的機電轉換器裝置的一第一實施例,多層複合物可被連接一使用者介面,使得轉換作用於使用者介面上的機械力變化為一電子信號。換言之,可提供一感測器功能。使用者介面的啟動使多層複合物改變形狀 In accordance with a first embodiment of the electromechanical transducer device of the present invention, the multilayer composite can be coupled to a user interface such that the mechanical force converted to the user interface changes to an electrical signal. In other words, a sensor function can be provided. The activation of the user interface changes the shape of the multilayer composite

多層複合物的形狀的變化產生一電壓,例如,其可藉由適當的手段偵測。 The change in shape of the multilayer composite produces a voltage that can be detected, for example, by appropriate means.

另外或此外,多層複合物可連接一使用者介面,使得可轉換作用於使用者介面上的機械力變化為電能。使用者介面特別可以是一表面,例如開關的按鈕,其可被一使用者啟動。使用者介面可連接多層複合物,特別是多層複合物的一電極,使得作用於使用者介面上的力亦作用在多層複合物上,機械力變化,例如來自使用者手指的壓力則可被轉換為電能或轉換為一電子信號。 Additionally or alternatively, the multilayer composite can be coupled to a user interface such that the mechanical force that can be converted to act on the user interface changes to electrical energy. The user interface can in particular be a surface, such as a button of a switch, which can be activated by a user. The user interface can be connected to a multi-layer composite, in particular an electrode of the multilayer composite, such that forces acting on the user interface also act on the multilayer composite, mechanical forces being varied, for example pressure from the user's fingers can be converted For electrical energy or converted to an electrical signal.

依據本發明的的機電轉換器裝置的另一實施例,提供可電性連接多層複合物的電路配置以便進一步處理所產生的電子信號或使用所產生的電能。電路配置可以以一適當方式連接電導層。電路配置可具有類比和/或數位構件以便進一步處理一電子信號,例如電壓或電流和/或至少暫時儲存電能。可提供例如合適電容元件於電路配置中作為一儲存裝置。電路配置更可以被建構,在此種方式上,一電壓可以被施加於至少多層複合物的一些電極。應被理解的是電路配置可依據機電轉換器裝置需要的功能來設計。 In accordance with another embodiment of the electromechanical transducer device of the present invention, a circuit configuration for electrically connecting the multilayer composite is provided to further process the generated electrical signals or to use the generated electrical energy. The circuit configuration can be connected to the electrically conductive layer in an appropriate manner. The circuit configuration can have analog and/or digital components to further process an electronic signal, such as a voltage or current and/or at least temporarily store electrical energy. For example, a suitable capacitive element can be provided as a storage device in a circuit configuration. The circuit configuration can be constructed in such a way that a voltage can be applied to at least some of the electrodes of the multilayer composite. It should be understood that the circuit configuration can be designed in accordance with the functionality required of the electromechanical converter device.

依據本發明機電裝置的一較佳實施例,它可供給電路配置藉由機械能轉換為電能可自主操作。換言之,電路配置可利用作用在裝置上的機械力專有地操作,特別是獨立於另外的電源供應器。沒有任何額外的能量儲存裝置作為一額外的能量供應器是必要的。然而,應理解的是能量儲存裝置可提供作為由機械力變化產生的電能的儲存,特別是暫時的 儲存。例如,所產生的電能可被收集在一儲存裝置中,例如一電容、超電容和/或電池。若多重啟動不是需要的而不足夠的能量可能由機電轉換裝置的單一啟動提供,則這可能是必要的。一旦收集足夠的能量,則可實施所期望的動作。 According to a preferred embodiment of the electromechanical device of the present invention, the supply circuit configuration can be operated autonomously by converting mechanical energy into electrical energy. In other words, the circuit configuration can be operated exclusively using mechanical forces acting on the device, in particular independent of the additional power supply. It is necessary to have no additional energy storage device as an additional energy supply. However, it should be understood that the energy storage device can provide storage of electrical energy as a result of changes in mechanical forces, particularly temporary. Store. For example, the generated electrical energy can be collected in a storage device, such as a capacitor, ultracapacitor, and/or battery. This may be necessary if multiple starts are not required and insufficient energy may be provided by a single start of the electromechanical conversion device. Once sufficient energy is collected, the desired action can be performed.

另外,電路配置可包括一電源供應器。若可由多層複合物產生的電能不足以執行一或多個期望的動作,例如一能量儲存裝置形式的額外電源供應器係可必需的。例如,因為多層複合物的指定且緊湊的並特別是平面的設計和/或因為要執行的功能,所以能量可能不足。 Additionally, the circuit configuration can include a power supply. If the electrical energy generated by the multilayer composite is insufficient to perform one or more desired actions, an additional power supply, such as in the form of an energy storage device, may be necessary. For example, energy may be insufficient because of the specified and compact and especially planar design of the multilayer composite and/or because of the function to be performed.

電路配置可較佳被建構成電路配置可藉由機械能轉換為電能從閒置狀態移至操作狀態。換言之,電路配置從一休眠狀態被喚醒。然後它可從例如一電池的能量儲存裝置供應能量。在執行至少一動作後電路配置可被(自動)移回閒置狀態。以此方式能量儲存裝置的壽命可被有效延長。例如,可達到20年的壽命(例如,使用鋰-二氧化錳電池)。更大規模可製造包含處理器和儲存裝置等的電路配置,它們係低維護費且具有一長壽命。 The circuit configuration can preferably be constructed to allow the circuit configuration to be converted from electrical energy to an operational state by mechanical energy conversion. In other words, the circuit configuration is awakened from a sleep state. It can then supply energy from an energy storage device such as a battery. The circuit configuration can be (automatically) moved back to the idle state after performing at least one action. In this way, the life of the energy storage device can be effectively extended. For example, a life of 20 years can be achieved (for example, using a lithium-manganese dioxide battery). Circuit configurations including processors and storage devices, etc., can be manufactured on a larger scale, which are low maintenance and have a long life.

依據一有利的實施例,電路配置可包括一傳輸元件用以輸送一信號。特別是此可為一送出例如一短脈衝或資料包等的無線信號的傳輸元件。例如傳輸元件可具有一天線配置。無線信號可例如被輸送至一遠端接收器。例如,該接收器可包括一啟動器和可控制一消耗者,該消耗者例如係一加熱器或燈 光裝置。 According to an advantageous embodiment, the circuit arrangement may comprise a transmission element for transmitting a signal. In particular, this can be a transmission element that sends a wireless signal such as a short pulse or packet. For example, the transmission element can have an antenna configuration. The wireless signal can be delivered, for example, to a remote receiver. For example, the receiver can include an actuator and can control a consumer, such as a heater or a light Optical device.

例如,無線信號更可具有一唯一識別碼,其使傳輸器(換言之機電轉換器裝置)被辨識。一對應裝置可例如被使用在保全系統或個人監視系統。由識別碼可定位一操作者。 For example, the wireless signal may further have a unique identification code that causes the transmitter (in other words, the electromechanical transducer device) to be identified. A corresponding device can be used, for example, in a security system or a personal monitoring system. An operator can be located by the identification code.

在轉換裝置中藉由機械壓力可觸發一動作。然而,特別若轉換器裝置具有很短的啟動器行程,使用者不能確認他的觸碰是否已真正被登錄。為了提供使用者一機電轉換器裝置的啟動已真正被觸發的回饋,機電轉換器裝置的多層複合物可依據一較佳實施例被設計成經由使用者介面給予一觸覺回饋。例如藉由震動和/或(反)壓力給予觸覺回饋。 An action can be triggered by mechanical pressure in the conversion device. However, especially if the converter device has a very short actuator stroke, the user cannot confirm whether his touch has actually been logged in. In order to provide feedback that the activation of the electromechanical transducer device has been truly triggered by the user, the multilayer composite of the electromechanical transducer device can be designed to impart a tactile feedback via the user interface in accordance with a preferred embodiment. For example, tactile feedback is imparted by vibration and/or (reverse) pressure.

依據本發明的機電轉換器裝置的另一較佳實施例,對於觸覺回饋,一電壓可被施加至至少一介電彈性體層,以以下方式達成:至少0.1微米且較佳至少10微米的彈性層的厚度變化係以一可預先界定的頻率產生。一電場,特別是交流電場可至少施加至位於至少一介電彈性體層的表面的二電極。已被認知的是若機電轉換器裝置以使用者的手指被啟動,例如,足夠的觸覺回饋的達成依賴於厚度和頻率的改變。特別已認知的是在200和250赫茲間的頻率範圍中人的手指是在最敏感的感知閾值約0.1微米。例如藉由提供複數介電彈性體層在其它頻率範圍中可得到厚度較大的改變。甚至以短啟動器行程使一使用者接收一良好的觸覺回饋。 In accordance with another preferred embodiment of the electromechanical transducer device of the present invention, for tactile feedback, a voltage can be applied to the at least one dielectric elastomer layer in an elastic layer of at least 0.1 microns and preferably at least 10 microns. The thickness variation is produced at a predefinable frequency. An electric field, particularly an alternating electric field, can be applied to at least two electrodes on the surface of at least one of the dielectric elastomer layers. It has been recognized that if the electromechanical transducer device is activated with the user's finger, for example, sufficient haptic feedback is achieved depending on thickness and frequency changes. It has been particularly recognized that in the frequency range between 200 and 250 Hz the human finger is at the most sensitive perceptual threshold of about 0.1 micron. Larger variations in thickness can be obtained in other frequency ranges, for example, by providing a plurality of dielectric elastomer layers. Even a short starter stroke allows a user to receive a good tactile feedback.

使用者介面更可被設計為觸發一或多個動作的 一區段。依照另一實施例,使用者介面可包含一觸發第一動作的第一區段和觸發一第二動作的至少一第二區段。例如,每一區段可連接一分離的多層複合物以便得到不同地觸發動作。應理解的是操作者控制亦可被分為三至四個區段,例如用來執行另外的動作。 The user interface can be designed to trigger one or more actions One section. According to another embodiment, the user interface can include a first segment that triggers the first action and at least a second segment that triggers a second action. For example, each segment can be connected to a separate multilayer composite to achieve different triggering actions. It should be understood that operator control can also be divided into three to four segments, for example to perform additional actions.

依據另外的實施例機電轉換器裝置可為一感應器裝置,例如一開關裝置。例如,機電轉換器裝置可以是一觸覺感應器、平面感應器或地板感應器。 According to a further embodiment the electromechanical converter device can be an inductor device, such as a switching device. For example, the electromechanical transducer device can be a tactile sensor, a planar sensor, or a floor sensor.

習知設計的觸覺感應器可較佳形成有二或更多個壓電層。此容許例如直到大約2毫米的啟動器行程。再者,二或更多壓電層容許例如直到大約5牛頓的力。藉由機械和電子調整,利用例如直到大約2毫米的啟動器行程和直到大約5牛頓的力可產生一足夠大的、暫時儲存的電能,利用此電能的輔助一自主觸覺感測器,可操作例如無線搖桿按鈕。 A tactile sensor of the conventional design may preferably be formed with two or more piezoelectric layers. This allows, for example, an actuator stroke of up to about 2 mm. Again, two or more piezoelectric layers allow, for example, a force of up to about 5 Newtons. By mechanical and electronic adjustment, a sufficiently large, temporarily stored electrical energy can be generated using, for example, a starter stroke of up to about 2 mm and a force of up to about 5 Newtons, which can be operated by an auxiliary autonomous tactile sensor that utilizes this electrical energy. For example a wireless rocker button.

具有視覺吸引力且特別是一平面設計,平面感應器可具有剛好一壓電層和一介電彈性體層。在此平面感測器(查覺不出的)中可得到少於500微米的啟動器行程。特別是藉由介電彈性體層,可提供作為確認操作平面感測器的觸覺回饋。除了觸覺回饋,可從被啟動的元件轉移回饋信號至使用者,例如,可輸送一無線信號。 With a visual appeal and especially a planar design, the planar sensor can have exactly one piezoelectric layer and one dielectric elastomer layer. A starter stroke of less than 500 microns is available in this planar sensor (not detectable). In particular, by means of a dielectric elastomer layer, tactile feedback can be provided as a confirmation operating plane sensor. In addition to haptic feedback, a feedback signal can be transferred from the activated component to the user, for example, a wireless signal can be transmitted.

機電裝置的另外的可能應用係一地板感測器,例如一智慧型地板元件(聰明地毯)。裝置可以例如以一磁磚的形式形成,例如其可具有100cm2或更大 的表面積。磁磚可更具有大約1毫米的深度。此地板元件可特別具有多層壓電層。大約100牛頓和更多的操作力係可能的。以此方式可得到多於300微焦耳的能量。除了能量回收功能,多層複合物可被使用為一感測元件以定位例如踏在地板上的操作者。 Another possible application of electromechanical devices is a floor sensor, such as a smart floor element (smart carpet). The device may for example be formed in the form of a tile, for example it may have a surface area of 100 cm 2 or more. The tile may have a depth of about 1 mm. This floor element can in particular have a multi-layer piezoelectric layer. Approximately 100 Newtons and more operating forces are possible. More than 300 microjoules of energy can be obtained in this way. In addition to the energy recovery function, the multilayer composite can be used as a sensing element to position an operator, for example, on the floor.

一觸覺感測器、平面感測器或地板感測器例如可被使用在建築物自動系統中或在個人監視中,例如病患監視。例如,在機械負載下,對應的感測器可輸送一信號至一或多個接收器。可處理所接收的信號且觸發一動作(例如一警報),或激活或鈍化一消耗者。 A tactile sensor, plane sensor or floor sensor can be used, for example, in a building automation system or in personal monitoring, such as patient monitoring. For example, under mechanical load, a corresponding sensor can deliver a signal to one or more receivers. The received signal can be processed and an action (eg, an alarm) can be triggered, or a consumer can be activated or deactivated.

例如,可提供大量的地板感測器於一建築物中且唯一識別碼被派定給每一感測器。在一監視系統中,使用者可藉由一過程來定位,其中當一感測器被啟動時它輸送它的識別碼至一處理裝置,該處理裝置使感測器的位置和因而操作者的位置被推斷。 For example, a large number of floor sensors can be provided in a building and a unique identification code is assigned to each sensor. In a surveillance system, the user can be located by a process in which when a sensor is activated it delivers its identification code to a processing device that positions the sensor and thus the operator The location is inferred.

假若電子輸出變數係例如可重製且提供長期穩定性以及使與一人或物的重量相關聯,量測的“重量”可被整合入一無線照相以提供有關在一智慧地板上的人或車輛的額外訊息。這導致例如在老人醫學和在所有形式的環境輔助智慧系統(ambient assisted living,AAL)的有趣應用。 If the electronic output variable is, for example, reproducible and provides long-term stability and correlates with the weight of a person or object, the measured "weight" can be integrated into a wireless camera to provide information about a person or vehicle on a smart floor. Additional message. This has led to interesting applications such as in elderly medicine and in all forms of ambient assisted living (AAL).

亦可使用一觸覺感應器於一鑰匙,例如車鑰匙或門鑰匙,例如以便藉由無線解鎖對應的裝置。例如可自主使用一車鑰匙。 A touch sensor can also be used for a key, such as a car key or a door key, for example to unlock the corresponding device by wireless. For example, a car key can be used autonomously.

應被理解的是依照另外的變化,依據本發明的多層複合物或依據本發明的機電裝置亦可被使用於其它的應用,例如在鍵盤或觸控板、加速感應器、麥克風、揚聲器的結構性感應器在醫學工程、海洋工程中的應用或材料測試的超音波轉換器中。作為一般的機械壓力感應器的應用亦有可能在自動化工程和汽車工程中,在後者的情形中例如作為方向盤感應器或座位感應器。 It should be understood that the multilayer composite according to the present invention or the electromechanical device according to the present invention can also be used for other applications, such as in a keyboard or touch pad, an acceleration sensor, a microphone, a speaker structure, according to another variation. Sexy instrumentation in medical engineering, marine engineering applications or material testing in ultrasonic transducers. The use as a general mechanical pressure sensor is also possible in automation engineering and automotive engineering, in the latter case, for example as a steering wheel sensor or a seat sensor.

較佳被使用的高敏感度的材料亦容許一感應器被使用於一僅稍微能變形但另有剛性的板之下。這特徵係使用於例如具有一薄鋼板的防破壞鍵板,例如由Screentec公司(芬蘭)製造,但例如亦可被使用於前述的“聰明地板”感應器的應用中。 The highly sensitive materials that are preferably used also allow an inductor to be used under a plate that is only slightly deformable but otherwise rigid. This feature is used, for example, for a tamper-resistant keypad with a thin steel plate, for example manufactured by Screentec (Finland), but can for example also be used in the aforementioned "smart floor" sensor applications.

本發明的另外態樣係製造多層複合物的方法,該多層複合物具有至少二電活化層,該至少二電活化層係位於一第一電導層和一第二電導層之間,其中至少一電導子層係位於該至少二電活化層之間,其中該至少二電活化層的至少其中之一者係一壓電層,且其中至少二電活化層中的至少一另一者係一介電彈性體層,該方法包含以下步驟:提供至少一壓電層;提供至少一介電彈性體層;連接壓電層至介電彈性體層;其中在連接壓電層至介電彈性體層之前,至少一電導子層係被舖在壓電層和/或介電彈性體層。 A further aspect of the invention is a method of making a multilayer composite having at least two electroactive layers, the at least two electroactive layers being between a first electrically conductive layer and a second electrically conductive layer, at least one of which The electrically conductive sublayer is between the at least two electroactive layers, wherein at least one of the at least two electroactive layers is a piezoelectric layer, and wherein at least one of the at least two electroactive layers is An electroelastic layer, the method comprising the steps of: providing at least one piezoelectric layer; providing at least one dielectric elastomer layer; connecting the piezoelectric layer to the dielectric elastomer layer; wherein at least one is connected before connecting the piezoelectric layer to the dielectric elastomer layer The electrically conductive sublayer is laid down on the piezoelectric layer and/or the dielectric elastomer layer.

被提供的壓電層例如可較佳至少部分被提供一電導層於其兩側。介電彈性體層則可較佳被直接連 接於這些電導層中的其中至少之一者。在一進一步的步驟中介電彈性體層更可至少部分被提供一另外的電導層。應被理解的是介電彈性體層可較佳首先被塗佈以電導層於其兩側。壓電層則可接著被塗佈。 The provided piezoelectric layer may, for example, preferably be at least partially provided with an electrically conductive layer on both sides thereof. The dielectric elastomer layer can preferably be directly connected Connected to at least one of these electrically conductive layers. In a further step, the dielectric elastomer layer may be at least partially provided with an additional electrically conductive layer. It will be appreciated that the dielectric elastomer layer may preferably be first coated with an electrically conductive layer on both sides thereof. The piezoelectric layer can then be coated.

更應被理解的是依據本發明的另外變化,另外的壓電層和/或另外的介電彈性體層可在另外的步驟中被定位。例如,位於二電導層之間的包含至少一壓電層和一介電彈性體層的一多層複合物可與相同構造的一多層複合物串接。 It will further be appreciated that in accordance with a further variation of the invention, the additional piezoelectric layer and/or the additional dielectric elastomer layer may be positioned in a further step. For example, a multilayer composite comprising at least one piezoelectric layer and a dielectric elastomer layer between the two electrically conductive layers can be connected in series with a multilayer composite of the same construction.

再者,依據本發明的的方法的第一實施例,介電彈性體層或壓電層可被層壓於電導層。這以一簡單方式導致對應層之間的特別良好接觸。 Still further, in accordance with a first embodiment of the method of the present invention, a dielectric elastomer layer or a piezoelectric layer can be laminated to the electrically conductive layer. This leads to particularly good contact between the corresponding layers in a simple manner.

依據本發明的方法的一較佳實施例,介電彈性體層或壓電層可被至少部分以一電導層印刷。例如,一結構性電極可被印刷。一印刷方法可以以一簡單方式實施。特別地,多層複合物的大量生產以高的生產速率進行是可能的。 In accordance with a preferred embodiment of the method of the present invention, the dielectric elastomer layer or piezoelectric layer can be printed at least in part by an electrically conductive layer. For example, a structural electrode can be printed. A printing method can be implemented in a simple manner. In particular, it is possible to mass-produce a multilayer composite at a high production rate.

現有大量的可能性用來美化和進一步發展依據本發明的多層複合物,依據本發明的機電轉換裝置和依據本發明的製造多層複合物的方法。在這方面,首先涉及依附獨立項的附屬項,以及其次涉及結合圖式的實施例的敘述。 A large number of possibilities exist for beautifying and further developing the multilayer composite according to the invention, the electromechanical conversion device according to the invention and the method for producing a multilayer composite according to the invention. In this regard, the first relates to the dependent items attached to the independent items, and the second relates to the description of the embodiments in conjunction with the drawings.

圖1顯示依據本發明的多層複合物2的第一實施例的示意圖。圖示的多層複合物2包含二電活化 層4和6. Figure 1 shows a schematic view of a first embodiment of a multilayer composite 2 in accordance with the present invention. The illustrated multilayer composite 2 comprises two electroactivation Layers 4 and 6.

電活化層4係一介電彈性體層4。介電彈性體層4有利地具有一相對高的介電常數。再者,介電彈性體層4有利地具有一低的機械剛性。此導致上至大約300%的可能延伸值。介電彈性體層4特別可被用於一致動器應用。 The electroactive layer 4 is a dielectric elastomer layer 4. The dielectric elastomer layer 4 advantageously has a relatively high dielectric constant. Furthermore, the dielectric elastomer layer 4 advantageously has a low mechanical rigidity. This results in a possible extension of up to approximately 300%. The dielectric elastomer layer 4 can be used in particular for actuator applications.

第二電活化層6係形成為一壓電層6。圖示的壓電層可例如從一合適的壓電聚合物形成和可例如是一壓電聚合物薄膜或一鐵電駐極體(ferroelectret)薄膜。圖示的壓電層6具有一聚合物層狀結構。聚合物層狀結構具有(有意地)併入的空穴10。 The second electroactive layer 6 is formed as a piezoelectric layer 6. The illustrated piezoelectric layer can be formed, for example, from a suitable piezoelectric polymer and can be, for example, a piezoelectric polymer film or a ferroelectret film. The illustrated piezoelectric layer 6 has a polymer layered structure. The polymer layered structure has (intentionally) incorporated voids 10.

為了產生空穴10,例如可提供一平坦的聚合物層和一波狀的聚合物層,其等彼此連接於波槽。在壓電層6的另外實施例中二平坦的聚合物層可藉由肋連接而形成空穴10。 In order to generate the voids 10, for example, a flat polymer layer and a corrugated polymer layer may be provided, which are connected to each other in the wave grooves. In a further embodiment of the piezoelectric layer 6, the two flat polymer layers may be joined by ribs to form the voids 10.

壓電層6被放置於多層複合物2中之前壓電層6可被電性充電。例如可藉由直接充電或電暈放電執行電性充電或極化。充電或極化給予壓電層6持續的壓電性質。壓電層6可特別地被使用於一感應器應用和/或能量擷取。 The piezoelectric layer 6 can be electrically charged before the piezoelectric layer 6 is placed in the multilayer composite 2. Electrical charging or polarization can be performed, for example, by direct charging or corona discharge. Charging or polarization imparts sustained piezoelectric properties to the piezoelectric layer 6. The piezoelectric layer 6 can be used in particular for a sensor application and/or energy extraction.

圖1可進一步推斷至少一電導子層8係位於介電彈性體層4和壓電層6之間。將可理解的是多層和/或一完全層亦可被定位。電導子層8較佳可相向連接介電彈性體層4和/或壓電層6。電導子層8可特別地被設計為一電極。例如,可從一金屬、金屬合金、導電低聚合物或高分子、導電氧化物和/或以 導電性填料填充的聚合物形成電極。 FIG. 1 further concludes that at least one of the electrically conductive sub-layers 8 is between the dielectric elastomer layer 4 and the piezoelectric layer 6. It will be appreciated that multiple layers and/or a full layer may also be positioned. The electrically conductive sub-layer 8 is preferably connected to the dielectric elastomer layer 4 and/or the piezoelectric layer 6 in opposite directions. The electrically conductive sub-layer 8 can in particular be designed as an electrode. For example, it can be from a metal, a metal alloy, a conductive low polymer or polymer, a conductive oxide, and/or The conductive filler-filled polymer forms an electrode.

再者,兩個電活化層4和6係位於二個另外的電導層12和14之間。 Furthermore, two electroactive layers 4 and 6 are located between the two additional electrically conductive layers 12 and 14.

電導層14係塗佈在壓電層6的頂部上且特別是實際上包覆壓電層6的整個表面。電導層12可被塗佈在介電彈性體層4的頂部上。例如,可提供一分割層12。電導層12和14亦較佳係以金屬為基礎而形成。 The electrically conductive layer 14 is applied on top of the piezoelectric layer 6 and in particular covers the entire surface of the piezoelectric layer 6. Conductive layer 12 can be coated on top of dielectric elastomer layer 4. For example, a split layer 12 can be provided. Conductive layers 12 and 14 are also preferably formed on a metal basis.

包含至少一介電彈性體層4和至少一壓電層6的混合多層複合物2特別是其特徵在三個功能可被組合和在一單一多層複合物中可獲得。特別是致動器、能量擷取和感應器的功能由一單一多層複合物提供。 The hybrid multilayer composite 2 comprising at least one dielectric elastomer layer 4 and at least one piezoelectric layer 6 is particularly characterized in that three functions can be combined and obtained in a single multilayer composite. In particular, the functions of the actuator, energy extraction and inductor are provided by a single multilayer composite.

但在一介電彈性體層中當施予一電場時介電彈性體層的表面面積改變、在一鐵電駐極體薄膜中(只有)鐵電駐極體的厚度實質改變。兩類型電活化層的組態意味著可達成只有垂直於層4和6的方向X之形狀的改變。因此,多層複合物2的厚度可被改變,換言之被增加或減少,而不可能在另一方向有形狀的實質改變。應注意的是依照實際應用,在另一方向的形狀改變是允許的。 However, when an electric field is applied in a dielectric elastomer layer, the surface area of the dielectric elastomer layer changes, and the thickness of the ferroelectric electret in a ferroelectric electret film substantially changes. The configuration of the two types of electroactive layers means that a change in shape only in the direction X perpendicular to the layers 4 and 6 can be achieved. Therefore, the thickness of the multilayer composite 2 can be changed, in other words, increased or decreased, and it is impossible to have a substantial change in shape in the other direction. It should be noted that shape changes in the other direction are permissible depending on the actual application.

再者,圖2顯示依據本發明的多層複合物2.1的另一實施例。如從圖2可推斷,多層複合物2.1具有依據圖1的二多層複合物2。特別地,多層複合物2以鏡面對稱設置而位於彼此的頂部上。應被理解的是可提供僅一電導層12或多層複合物2的兩 導電層12可被彼此連接而形成一電導層12。 Furthermore, Figure 2 shows another embodiment of a multilayer composite 2.1 in accordance with the present invention. As can be inferred from Figure 2, the multilayer composite 2.1 has the two-layer composite 2 according to Figure 1. In particular, the multilayer composites 2 are arranged in a mirror-symmetrical arrangement on top of each other. It should be understood that only one conductive layer 12 or two layers of composite 2 can be provided. The conductive layers 12 may be connected to each other to form an electrically conductive layer 12.

圖3顯示依據本發明的一多層複合物2.2的第三實施例。多層複合物2.2例如包含依據圖2的串接多層複合物2.1。應被理解的是進一步的串接是可能的。又應被理解的是僅提供一層14或多層複合物2.1的兩層14可彼此連接而形成一層14。 Figure 3 shows a third embodiment of a multilayer composite 2.2 in accordance with the present invention. The multilayer composite 2.2 comprises, for example, a tandem multilayer composite 2.1 according to FIG. It should be understood that further concatenation is possible. It should also be understood that the two layers 14 which provide only one layer of 14 or multi-layer composite 2.1 may be joined to each other to form a layer 14.

亦應被理解的是依據本發明的其它變化,假若提供至少一介電彈性體層和至少一壓電層,一複合物層可以任何其它形式建構。例如,二或更多壓電層加上一(或更多)彈性體層可被提供。 It should also be understood that in accordance with other variations of the present invention, a composite layer can be constructed in any other form provided that at least one dielectric elastomer layer and at least one piezoelectric layer are provided. For example, two or more piezoelectric layers plus one (or more) elastomer layers may be provided.

圖4顯示一依據本發明的機電轉換器裝置16的實施例的簡化視圖。例如,機電轉換器裝置16可被設計為一開關,例如一觸覺感應器、平面感應器、或設計為一智慧地板元件。特別是轉換器裝置16可被用於建築物自動系統。因此,轉換器裝置16可被用來控制加熱器、照明、遮陰設備等,或使用於老人醫學(活動或跌倒偵測)或使用於保全科技。 Figure 4 shows a simplified view of an embodiment of an electromechanical transducer device 16 in accordance with the present invention. For example, the electromechanical transducer device 16 can be designed as a switch, such as a tactile sensor, a planar sensor, or as a smart floor element. In particular, the converter device 16 can be used in a building automation system. Thus, the transducer device 16 can be used to control heaters, lighting, shading devices, etc., or for use in elderly medicine (activity or fall detection) or for use in security technology.

機電轉換器裝置16包含一多層複合物18,為了更好的說明其不被詳細顯示。例如可使用依據圖1至圖3的多層複合物2、2.1或2.2。 The electromechanical transducer device 16 includes a multilayer composite 18 which is not shown in detail for better illustration. For example, multilayer composites 2, 2.1 or 2.2 according to Figures 1 to 3 can be used.

多層複合物18的設計特別地可被機電轉換器裝置16的應用支配。 The design of the multilayer composite 18 is particularly dictated by the application of the electromechanical converter device 16.

習知設計的觸覺感測器可較佳以二或更多壓電層6形成。這容許啟動器行程可例如高至大約2毫米。再者,二或更多壓電層6意味例如高至大約5牛頓的機械力可轉換為電力。 A tactile sensor of conventional design may preferably be formed with two or more piezoelectric layers 6. This allows the actuator stroke to be, for example, up to about 2 mm. Furthermore, two or more piezoelectric layers 6 mean that mechanical forces, for example up to about 5 Newtons, can be converted to electricity.

相比之下,平面感應器能具有盡可能小數目的層及/或低厚度的層。例如,平面感應器可具有一壓電層及一介電彈性體層。在如此平面感應器中(不能察覺出的)可達成小於500微米的啟動器行程。以一小於1牛頓立即可啟動平面感應器。特別是藉由施加一電壓至介電彈性體層,可提供作為確認平面感測器操作的觸覺回饋。除了觸覺回饋外,回饋信號可從被啟動的元件傳輸至使用者。例如,這能經由一無線信號發生。 In contrast, a planar sensor can have as few layers as possible and/or layers of low thickness. For example, the planar sensor can have a piezoelectric layer and a dielectric elastomer layer. In such a planar sensor (undetectable) an actuator stroke of less than 500 microns can be achieved. The planar sensor can be activated immediately with a less than 1 Newton. In particular, by applying a voltage to the dielectric elastomer layer, haptic feedback can be provided as a confirmation of the operation of the planar sensor. In addition to the haptic feedback, the feedback signal can be transmitted from the activated component to the user. For example, this can occur via a wireless signal.

轉換器裝置16的又一可能應用係一例如智慧地板元件的地板感應器。轉換器裝置16例如能以磁磚的形式形成,例如,該磁磚可具有100cm2或更大的面積。此外,磁磚可具有大約1毫米的深度。這底板元件特別能具有多重壓電層。100牛頓和更大的操作力係可能的。以此方式,可得到超過300微焦耳的能量大小。 Yet another possible application of the converter device 16 is a floor sensor such as a smart floor element. The converter device 16 can be formed, for example, in the form of a tile, for example, the tile can have an area of 100 cm 2 or more. Additionally, the tiles may have a depth of approximately 1 millimeter. This bottom plate element can in particular have multiple piezoelectric layers. 100 Newtons and greater operating force are possible. In this way, an energy level in excess of 300 microjoules can be obtained.

多層複合物18,特別是頂部電極可連接一使用者介面20。使用者介面被理解為可被一使用者啟動的表面,換言之,例如有施加到它的壓力以便產生期望的功能。 The multilayer composite 18, and in particular the top electrode, can be connected to a user interface 20. The user interface is understood to be a surface that can be activated by a user, in other words, for example, the pressure applied to it to produce the desired function.

原則上,可以任何方式設計使用者介面20。使用者介面20可具有一第一區段20.1和一第二區段20.2,其等例如可視覺上不同於彼此。第一區段20.1可提供一第一動作且第二區段20.2可提供一第二動作。應被理解的是多於剛好兩個區段和多於剛好一個區段亦可被提供。 In principle, the user interface 20 can be designed in any way. The user interface 20 can have a first section 20.1 and a second section 20.2, which can be, for example, visually distinct from each other. The first section 20.1 can provide a first action and the second section 20.2 can provide a second action. It should be understood that more than just two segments and more than one segment may also be provided.

一電路配置22可連接於多層複合物18。電路配置22可連接多層複合物18的電極。電路配置22和多層複合物18可被整合在一外殼(圖未示)中或模組構造中。模組構造例如容許不同元件有彈性的組合而達到不同的功能。 A circuit configuration 22 can be coupled to the multilayer composite 18. Circuit configuration 22 can connect the electrodes of multilayer composite 18. Circuit configuration 22 and multilayer composite 18 can be integrated into a housing (not shown) or in a modular configuration. The modular construction, for example, allows for a flexible combination of different components to achieve different functions.

電路配置22可被安裝而基於電子信號產生動作,該等電子信號係歸之於機電轉換器裝置的啟動。例如,一輸送元件24可配置於電路配置22中。當接收來自多層複合物18的電子信號時,這傳輸元件24能傳送出一項資訊。特別是無線信號可被送出。應被理解的是有線介面亦可被提供為代替品或添加物。 Circuit configuration 22 can be installed to generate an action based on an electronic signal that is attributed to the activation of the electromechanical converter device. For example, a delivery element 24 can be disposed in circuit configuration 22. When receiving an electrical signal from the multilayer composite 18, the transmission component 24 can transmit a message. In particular, wireless signals can be sent out. It should be understood that the wired interface can also be provided as a substitute or additive.

被送出的資訊可由一或多個接收器28.1、28.2接收。接收器28.1、28.2能包含啟動器或可連接啟動器以便依照接收的資訊控制消耗者(圖未示)。如上所述,可控制例如一加熱器或類似物。再者,被接收的資訊,例如識別碼可使操作者的位置被推斷。 The information sent can be received by one or more receivers 28.1, 28.2. The receivers 28.1, 28.2 can include an initiator or a connectable initiator to control the consumer (not shown) in accordance with the received information. As described above, for example, a heater or the like can be controlled. Furthermore, the received information, such as an identification code, can cause the operator's location to be inferred.

供給線路配置22能量而產生無線信號的可能性例如包括使用機械力作用於使用者介面20上。如上所述,壓電層6特別適合能量擷取。在上面所述的觸覺感應器中,例如,轉換成電能的機械能可足以送出一無線信號。特別是例如利用一電容、超電容或電池可收集被產生的電能和暫時儲存它。一旦足夠量的能量儲存以執行一動作,可執行這動作。可提供一自主的機電轉換器裝置16。 The possibility of supplying line energy 22 to generate a wireless signal includes, for example, the use of mechanical forces on the user interface 20. As mentioned above, the piezoelectric layer 6 is particularly suitable for energy extraction. In the tactile sensor described above, for example, mechanical energy converted into electrical energy may be sufficient to deliver a wireless signal. In particular, for example, a capacitor, an ultracapacitor or a battery can be used to collect the generated electrical energy and temporarily store it. This action can be performed once a sufficient amount of energy is stored to perform an action. An autonomous electromechanical transducer device 16 can be provided.

電路配置22可選擇性包括一能量儲存裝置26 (例如電池)。特別若藉由機械力變化能產生的電能對電路配置22的自主操作係不足夠時一能量儲存裝置26可以是必需的。這是平面感應器會產生的情況,例如,其例如僅能包含一壓電層6。例如考慮到可用空間,大約100pJ(微微焦耳)可被產生。此能量能被使用來將電路配置22從閒置狀態轉移至操作狀態,換言之喚醒它。電路配置22則可藉由能量儲存裝置26提供能量以便執行至少一期望的功能。電路配置則較佳能被自動轉移回閒置狀態。 Circuit configuration 22 can optionally include an energy storage device 26 (eg battery). An energy storage device 26 may be necessary, particularly if the electrical energy generated by the mechanical force change is insufficient for the autonomous operating system of the circuit configuration 22. This is the case where a planar sensor can be produced, for example, it can only comprise a piezoelectric layer 6, for example. For example, considering the available space, approximately 100 pJ (picojoules) can be generated. This energy can be used to shift circuit configuration 22 from an idle state to an operational state, in other words to wake it up. Circuit configuration 22 can then be powered by energy storage device 26 to perform at least a desired function. The circuit configuration is preferably automatically transferred back to the idle state.

在此種機電轉換器裝置16中待機電流消耗接近能量儲存裝置26的自放電。喚醒能量可藉由機械力改變專門產生。例如可達成多於20年的壽命(例如使用鋰/二氧化錳電池)。 The standby current draw in such an electromechanical converter device 16 is close to the self-discharge of the energy storage device 26. Arousal energy can be specifically produced by mechanical force changes. For example, a lifetime of more than 20 years can be achieved (eg, using a lithium/manganese dioxide battery).

若被電路佈置的操作需要多於機械力變化所能提供的能量,一能量儲存裝置可以有必要。應被理解的是電路配置可更包括例如一處理器、儲存裝置或介面等的元件。 An energy storage device may be necessary if the operation of the circuit arrangement requires more energy than can be provided by mechanical force changes. It should be understood that the circuit configuration may further include elements such as a processor, storage device or interface.

電路配置22更可被連接至至少介電彈性體層4的電極,使得一電場係可供給一啟動器應用以便產生厚度的改變。例如,一觸覺回饋可藉由機電轉換器裝置16的啟動器功能被給予使用者。因此,可產生具有頻率200至250赫茲的交流電場。例如藉由這交流電場可產生至少0.1微米,較佳10微米的機電轉換器裝置16的厚度變化。已確認的是人類的手指特別敏感的正是這些參數值。 The circuit configuration 22 can be further connected to at least the electrodes of the dielectric elastomer layer 4 such that an electric field system can be supplied to an actuator application to produce a change in thickness. For example, a haptic feedback can be given to the user by the actuator function of the electromechanical transducer device 16. Therefore, an alternating electric field having a frequency of 200 to 250 Hz can be generated. The variation in thickness of the electromechanical transducer device 16 of at least 0.1 micron, preferably 10 micron, can be produced, for example, by this alternating electric field. It has been confirmed that these parameter values are particularly sensitive to human fingers.

圖5顯示依據本發明的製造多層複合物的方法 的一第一實施例。 Figure 5 shows a method of making a multilayer composite in accordance with the present invention A first embodiment of the invention.

在第1步驟601中一壓電層6,可提供例如鐵電駐極體薄膜。在第二步驟602中一電導子層8可例如藉由塗佈被舖在壓電層6的至少一側。然後在步驟603中被提供的介電彈性體層4可藉由層壓被舖在至少一電導層8。具有壓電層4和介電彈性體層6的多層複合物2.1可以以一簡單方式製造。 In the first step 601, a piezoelectric layer 6 can provide, for example, a ferroelectric electret film. In a second step 602 a conductive sub-layer 8 can be applied to at least one side of the piezoelectric layer 6, for example by coating. The dielectric elastomer layer 4 then provided in step 603 can be laid over at least one electrically conductive layer 8 by lamination. The multilayer composite 2.1 having the piezoelectric layer 4 and the dielectric elastomer layer 6 can be produced in a simple manner.

應被理解的是製造步驟原則上可以是任意的。特別地,介電彈性體層4可供選擇被提供在第一步驟中,其然後可首先提供一電導層8。然後接著可提供一壓電層6。 It should be understood that the manufacturing steps can in principle be arbitrary. In particular, a dielectric elastomer layer 4 is optionally provided in the first step, which may then first provide an electrically conductive layer 8. A piezoelectric layer 6 can then be provided.

圖6顯示依據本發明製造多層複合物的方法的另一實施例。 Figure 6 shows another embodiment of a method of making a multilayer composite in accordance with the present invention.

在第一步驟701中可首先提供一例如鐵電駐極體薄膜的壓電層6。 In a first step 701, a piezoelectric layer 6, such as a ferroelectric electret film, may first be provided.

在第二步驟702中壓電層6可較佳在兩側上被塗佈以電導層8、14.。特別是可在兩側上於整個表面塗佈壓電層6。除了整個面塗佈外壓電層亦可以分別塗佈電導層8或14僅一部份。可製造一結構性電極。特別是主動和被動區域係可以以此方式產生。 In a second step 702, the piezoelectric layer 6 can preferably be coated on both sides with an electrically conductive layer 8, 14. In particular, the piezoelectric layer 6 can be applied to the entire surface on both sides. In addition to the entire surface coated outer piezoelectric layer, only a portion of the electrically conductive layer 8 or 14 may be coated separately. A structural electrode can be fabricated. In particular, active and passive zones can be generated in this way.

然後在步驟703中介電彈性體層4,特別是一彈性體薄膜可被層壓在頂部或底部電導層8、14上。 The electroelastic layer 4, in particular an elastomeric film, can then be laminated on the top or bottom electrically conductive layers 8, 14 in step 703.

可較佳讓介電彈性體層4(僅)部份被層壓。特別因為介電彈性體層4和壓電層6具有不同延伸值,這能是有利的。 It is preferred that the dielectric elastomer layer 4 is (only) partially laminated. This can be advantageous in particular because the dielectric elastomer layer 4 and the piezoelectric layer 6 have different extension values.

在下一步驟704中介電彈性體層4係可以以一 較佳分段的電導層12(例如結構化電極)依次印刷在其頂側上。一結構性電極尤其以被動和主動區域為特徵。在多層複合物2的隨後操作中它可以以此方式從接地點隔離。 In the next step 704, the intermediate electro-elastic layer 4 can be A preferably segmented electrically conductive layer 12 (e.g., a structured electrode) is sequentially printed on its top side. A structural electrode is characterized in particular by passive and active regions. In the subsequent operation of the multilayer composite 2 it can be isolated from the ground point in this way.

再者,此多層複合物2可以特別是藉由層壓以鏡面對稱組態連接相同構造的多層複合物2(步驟706)。例如層12可以彼此連接。 Furthermore, the multilayer composite 2 can be joined to the multilayer composite 2 of the same construction, in particular by lamination in a mirror-symmetrical configuration (step 706). For example, layers 12 can be connected to each other.

多層複合物可選擇性藉由層疊二或更多這些多層複合物2.1而被製造。例如,二多層複合物2.1可藉由堆疊、黏結或層壓而串接。 The multilayer composite can be selectively fabricated by laminating two or more of these multilayer composites 2.1. For example, the two-layer composite 2.1 can be connected in series by stacking, bonding or laminating.

在進一步的步驟708中已被製造的多層複合物可以以可預先界定的尺寸產生一期望的形狀。例如單獨的多層複合物可被沖壓出。 The multilayer composite that has been fabricated in a further step 708 can produce a desired shape in a predefinable size. For example, a separate multilayer composite can be stamped out.

在進一步的方法中所製造的多層複合物則可被電性連接至一電路配置。特別是電路配置可連接設計為電極的電導層。 The multilayer composites produced in the further methods can be electrically connected to a circuit configuration. In particular, the circuit arrangement can be connected to an electrically conductive layer designed as an electrode.

此處亦應被理解的是依據本發明的其它變化,可有不同順序的步驟且此可特別依照多層複合物的特定實施例。例如,兩個相同的層可首先連接彼此,才舖上其它類型層。 It should also be understood herein that in accordance with other variations of the invention, there may be steps in a different order and this may be particularly in accordance with particular embodiments of the multilayer composite. For example, two identical layers can be connected to each other before they are layered.

2、2.1 2.2、18‧‧‧多層複合物 2, 2.1 2.2, 18‧‧‧ multilayer composite

4、6‧‧‧電活化層(介電彈性體層、壓電層) 4, 6‧‧‧Electrical activation layer (dielectric elastomer layer, piezoelectric layer)

8‧‧‧電導子層 8‧‧‧ Conductance sublayer

10‧‧‧空穴 10‧‧‧ hole

12‧‧‧第一電導層 12‧‧‧First Conductive Layer

14‧‧‧第二電導層 14‧‧‧Second Conductive Layer

16‧‧‧機電轉換器裝置 16‧‧‧Mechanical converter device

20‧‧‧使用者介面 20‧‧‧User interface

20.1‧‧‧第一區段 20.1‧‧‧First section

20.2‧‧‧第二區段 20.2‧‧‧Second section

22‧‧‧電路配置 22‧‧‧Circuit configuration

24‧‧‧輸送元件 24‧‧‧Conveying components

26‧‧‧電源供應器(能量儲存裝置) 26‧‧‧Power supply (energy storage device)

28.1、28.2‧‧‧接收器 28.1, 28.2‧‧‧ Receiver

圖1顯示依據本發明的一多層複合物的一第一實施例的示意圖;圖2係顯示依據本發明的一多層複合物的一第二實施例的示意圖; 圖3係顯示依據本發明的一多層複合物的一第三實施例的示意圖;圖4顯示依據本發明的一機電轉換器裝置的一第一實施例的示意圖;圖5顯示依據本發明的一製造多層複合物的方法的一第一實施例的流程圖;以及圖6顯示依據本發明的一製造多層複合物的方法的一第二實施例的流程圖。 1 is a schematic view showing a first embodiment of a multilayer composite according to the present invention; and FIG. 2 is a schematic view showing a second embodiment of a multilayer composite according to the present invention; Figure 3 is a schematic view showing a third embodiment of a multilayer composite in accordance with the present invention; Figure 4 is a schematic view showing a first embodiment of an electromechanical transducer device in accordance with the present invention; A flow chart of a first embodiment of a method of making a multilayer composite; and Figure 6 shows a flow chart of a second embodiment of a method of making a multilayer composite in accordance with the present invention.

2‧‧‧多層複合物 2‧‧‧Multilayer composite

4‧‧‧介電彈性體層 4‧‧‧dielectric elastomer layer

6‧‧‧壓電層 6‧‧‧Piezoelectric layer

8‧‧‧電導子層 8‧‧‧ Conductance sublayer

10‧‧‧空穴 10‧‧‧ hole

12‧‧‧第一電導層 12‧‧‧First Conductive Layer

14‧‧‧第二電導層 14‧‧‧Second Conductive Layer

Claims (15)

一種多層複合物(2、2.1、2.2、18),包含:至少二電活化層(4、6),位於一第一電導層(12)和一第二電導層(14)之間;其中至少一電導子層(8)係位於該至少二電活化層(4、6)之間;以及其中該至少二電活化層(4、6)的至少其中之一者係一壓電層(6);其特徵在於:該至少二電活化層(4、6)中的至少一另一者係一介電彈性體層(4)。 A multilayer composite (2, 2.1, 2.2, 18) comprising: at least two electroactive layers (4, 6) between a first electrically conductive layer (12) and a second electrically conductive layer (14); a conducting sublayer (8) between the at least two electroactive layers (4, 6); and wherein at least one of the at least two electroactive layers (4, 6) is a piezoelectric layer (6) It is characterized in that at least one of the at least two electroactive layers (4, 6) is a dielectric elastomer layer (4). 根據申請專利範圍第1項所述之多層複合物(2、2.1、2.2、18),其中:至少一另外的壓電層(6)係位於該第一電導層(12)和該第二電導層(14)之間;和/或至少一另外的介電彈性體層(4)係位於該第一電導層(12)和該第二電導層(14)之間。 The multilayer composite (2, 2.1, 2.2, 18) of claim 1, wherein: at least one additional piezoelectric layer (6) is located in the first electrically conductive layer (12) and the second conductance Between layers (14); and/or at least one additional dielectric elastomer layer (4) is located between the first electrically conductive layer (12) and the second electrically conductive layer (14). 根據申請專利範圍第1至2項中任一項所述之多層複合物(2、2.1、2.2、18),其中:該壓電層(6)係一鐵電駐極體層(ferroelectret layer)。 The multilayer composite (2, 2.1, 2.2, 18) according to any one of claims 1 to 2, wherein the piezoelectric layer (6) is a ferroelectret layer. 根據申請專利範圍第1至3項中任一項所述之多層複合物(2、2.1、2.2、18),其中: 該壓電層(6)包含一材料,其選自包含聚碳酸酯、全氟化或部分氟化的聚合物和共聚物、聚四氟乙烯、氟乙烯丙烯、全氟化烷氧基乙烯、聚酯,聚對苯二甲酸乙二酯、聚萘二甲酸乙二酯、聚醯亞胺、聚醚醯亞胺、聚醚、聚(甲基)丙烯酸甲酯、環狀烯烴聚合物、環烯烴共聚物和/或聚烯烴的群組,和/或該介電彈性體層(4)包含一材料,其選自包含聚氨酯彈性體,聚矽氧彈性體和/或丙烯酸酯彈性體的群組。 The multilayer composite (2, 2.1, 2.2, 18) according to any one of claims 1 to 3, wherein: The piezoelectric layer (6) comprises a material selected from the group consisting of polycarbonate, perfluorinated or partially fluorinated polymers and copolymers, polytetrafluoroethylene, fluoroethylene propylene, perfluorinated alkoxyethylene, Polyester, polyethylene terephthalate, polyethylene naphthalate, polyimide, polyether phthalimide, polyether, poly(methyl) acrylate, cyclic olefin polymer, ring The group of olefin copolymers and/or polyolefins, and/or the dielectric elastomer layer (4) comprises a material selected from the group consisting of polyurethane elastomers, polyoxyxides and/or acrylate elastomers. . 一種機電轉換器裝置(16),包含根據申請專利範圍第1至4項中所述任一項之多層複合物(2、2.1、2.2、18)。 An electromechanical transducer device (16) comprising a multilayer composite (2, 2.1, 2.2, 18) according to any one of claims 1 to 4. 根據申請專利範圍第5項所述之機電轉換器裝置(16),其中:該多層複合物(2、2.1、2.2、18)係連接一使用者介面(20),使得一作用在該使用者介面(20)上的機械力變化可被轉換成一電子信號和/或轉換成電能。 The electromechanical transducer device (16) according to claim 5, wherein the multilayer composite (2, 2.1, 2.2, 18) is connected to a user interface (20) such that a user acts on the user The change in mechanical force on the interface (20) can be converted to an electrical signal and/or converted to electrical energy. 根據申請專利範圍第5至6項中任一項所述之機電轉換器裝置(16),其中:提供一可連接該多層複合物(2、2.1、2.2、18)的電路配置(22)。 The electromechanical transducer device (16) of any of claims 5 to 6, wherein a circuit configuration (22) is provided to connect the multilayer composite (2, 2.1, 2.2, 18). 根據申請專利範圍第5至7項中任一項所述之機電轉換器裝置(16),其中:藉由機械能轉換成電能,可自主操作該電路配置(22);或該電路配置(22)包含一電源供應器(26),其中藉由該機械能轉換成電能,該電路配置(22)可從一閒置狀態移至一操作狀態。 The electromechanical transducer device (16) according to any one of claims 5 to 7, wherein the circuit configuration (22) is autonomously operable by mechanical energy conversion into electrical energy; or the circuit configuration (22) A power supply (26) is included, wherein the circuit configuration (22) can be moved from an idle state to an operational state by the mechanical energy being converted into electrical energy. 根據申請專利範圍第5至8項中任一項所述之機電轉換器裝置(16),其中:該電路配置(22)包含一輸送元件(24),用來輸送一信號。 The electromechanical transducer device (16) according to any one of claims 5 to 8, wherein the circuit arrangement (22) comprises a transport element (24) for transmitting a signal. 根據申請專利範圍第9項所述之機電轉換器裝置(16),其中:對於一觸覺回饋,施加一電壓至至少該一介電彈性體層(4),使得至少0.1微米的該多層複合物(2、2.1、2.2、18)的一厚度變化係以一可預先界定的頻率產生。 The electromechanical transducer device (16) of claim 9, wherein: for a haptic feedback, applying a voltage to at least the dielectric elastomer layer (4) such that the multilayer composite of at least 0.1 micron ( 2. A thickness variation of 2., 2.2, 18) is produced at a predefinable frequency. 根據申請專利範圍第5至10項中任一項所述之機電轉換器裝置(16),其中:該使用者介面(20)包含一第一區段(20.1)和至少一第二區段(20.2),其中該第一區段(20.1)用於觸發一第一動作,而該第二區段(20.2)用於觸發一第二動作。 The electromechanical transducer device (16) according to any one of claims 5 to 10, wherein the user interface (20) comprises a first segment (20.1) and at least a second segment ( 20.2), wherein the first segment (20.1) is used to trigger a first action and the second segment (20.2) is used to trigger a second action. 根據申請專利範圍第5至11項中任一項所述之機電轉換器裝置(16),其中:該機電轉換器裝置(10)係一機械壓力感應器,特別是一觸覺感應器、一平面感應器或一地板感應器。 The electromechanical transducer device (16) according to any one of claims 5 to 11, wherein the electromechanical transducer device (10) is a mechanical pressure sensor, in particular a tactile sensor, a plane Sensor or a floor sensor. 一種製造一多層複合物(2、2.1、2.2、18)的方法,該多層複合物(2、2.1、2.2、18)至少具有二電活化層(4、6),該二電活化層(4、6)係位於一第一電導層(12)和一第二電導層(14)之間,其中至少一電導子層(8)係位於該至少二電活化層(4、6)之間,其中該至少二電活化層(4、6)的至少其中之一者係一壓電層(6),且其中該至少二電活化層(4、6)中的至少一另一者係一介電彈性體層(4),該方法包含:提供該至少一壓電層(6);提供該至少一介電彈性體層(4);連接該壓電層(6)至該介電彈性體層(4);其中在連接該壓電層(6)至該介電彈性體層(4)之前,該至少一電導子層(8)係被舖至該壓電層(6)和/或該介電彈性體層(4)。 A method of producing a multilayer composite (2, 2.1, 2.2, 18) having at least two electroactive layers (4, 6), the second electroactive layer ( 4, 6) is located between a first electrically conductive layer (12) and a second electrically conductive layer (14), wherein at least one electrically conductive sublayer (8) is located between the at least two electroactive layers (4, 6) Wherein at least one of the at least two electroactive layers (4, 6) is a piezoelectric layer (6), and wherein at least one of the at least two electroactive layers (4, 6) is one a dielectric elastomer layer (4), the method comprising: providing the at least one piezoelectric layer (6); providing the at least one dielectric elastomer layer (4); connecting the piezoelectric layer (6) to the dielectric elastomer layer ( 4); wherein the at least one electrically conductive sublayer (8) is laid onto the piezoelectric layer (6) and/or the dielectric before connecting the piezoelectric layer (6) to the dielectric elastomer layer (4) Elastomer layer (4). 根據申請專利範圍第13項所述之方法,其中:該介電彈性體層(4)或該壓電層(6)係層壓至該電導子層(8)。 The method of claim 13, wherein the dielectric elastomer layer (4) or the piezoelectric layer (6) is laminated to the conductor layer (8). 根據申請專利範圍第13至14項任一項所述之 方法,其中:該介電彈性體層(4)或該壓電層(6)係至少部份以該導電層印刷(12、14)。 According to any one of claims 13 to 14 of the patent application scope The method wherein the dielectric elastomer layer (4) or the piezoelectric layer (6) is at least partially printed with the conductive layer (12, 14).
TW101107713A 2011-03-07 2012-03-07 Multi-layer composite having electroactive layers TW201306336A (en)

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