TW201247338A - Casting mold, cu-ga allow slab, sputtering target, and cu-ga alloy slab manufacturing method - Google Patents

Casting mold, cu-ga allow slab, sputtering target, and cu-ga alloy slab manufacturing method Download PDF

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TW201247338A
TW201247338A TW101104930A TW101104930A TW201247338A TW 201247338 A TW201247338 A TW 201247338A TW 101104930 A TW101104930 A TW 101104930A TW 101104930 A TW101104930 A TW 101104930A TW 201247338 A TW201247338 A TW 201247338A
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Taiwan
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main body
mold
casting
mold main
alloy
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TW101104930A
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Chinese (zh)
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Kazuki Yamashita
Naoya Satoh
Toshiaki Kumagai
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Sumitomo Chemical Co
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    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C9/00—Alloys based on copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22C—FOUNDRY MOULDING
    • B22C9/00—Moulds or cores; Moulding processes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D21/00—Casting non-ferrous metals or metallic compounds so far as their metallurgical properties are of importance for the casting procedure; Selection of compositions therefor
    • B22D21/02—Casting exceedingly oxidisable non-ferrous metals, e.g. in inert atmosphere
    • B22D21/025—Casting heavy metals with high melting point, i.e. 1000 - 1600 degrees C, e.g. Co 1490 degrees C, Ni 1450 degrees C, Mn 1240 degrees C, Cu 1083 degrees C
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D7/00—Casting ingots, e.g. from ferrous metals
    • B22D7/005—Casting ingots, e.g. from ferrous metals from non-ferrous metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D7/00—Casting ingots, e.g. from ferrous metals
    • B22D7/06—Ingot moulds or their manufacture

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Continuous Casting (AREA)

Abstract

The present invention provides a casting mold used when manufacturing Cu-Ga alloy slabs by a melting and casting method. A casting mold (100) includes a casting body (1) and a sloped member (2). The sloped member (2) has a sloped surface (21), wherein the more the sloped surface (21) extends inwards from an opening (11) of the casting body (1), the more said sloped surface (21) approaches the bottom surface (12) of the casting body (1). Between the edge (22) of the sloped member (2) and the inner circumferential surface of the casting body (1), a gap (G) is formed which is the opening through which an Cu-Ga alloy melt is poured into the casting body (1).

Description

201247338 六、發明說明 【發明所屬之技術領域】 本發明係關於將Cu-Ga合金鑄錠藉由熔鑄法製作時所 使用之鑄造用鑄模、Cu-Ga合金緣錠、濺鍍靶 '以及Cu-Ga合金鑄錠之製造方法。 【先前技術】201247338 VI. Description of the Invention [Technical Field] The present invention relates to a casting mold, a Cu-Ga alloy ingot, a sputtering target, and a Cu- used in the production of a Cu-Ga alloy ingot by a melt casting method. A method of manufacturing a Ga alloy ingot. [Prior Art]

Ga(鎵）的組成比較大之Cu-Ga合金，主要用來作爲薄 膜型太陽電池的光吸收層之薄膜形成用的濺鍍靶。 濺鍍靶，是將藉由熔鑄法製造之長方體形狀（例如大 小爲300mmx400mmxl000mm)之合金鑄塊使用車床、圓鋸 切割成好幾片，將切割後的合金片（鑄錠）實施輥軋、切削 而製造出。 例如，在專利文獻1揭示，藉由熔鑄法製造濺鍍靶用 CU_Ga合金鑄錠之方法。然而’在專利文獻1所揭示的技 術，僅能製造較小尺寸的Cu-Ga合金鑄錠。又依據專利文 獻1所揭示的技術，每次都必須準備配合所期望的Cu-Ga 合金鑄錠大小之模具，因此生產性極低。 作爲製造濺鍍靶用Cu-Ga合金鑄錠之其他方法，與陶 瓷等的成形同樣的，藉由將Cu-Ga合金粉末燒結而成形爲 期望形狀的方法是已知的。然而，藉由該方法所製造之 Cu-Ga合金鑄錠，當力口工成濺鍍靶時’成爲相對密度95% 以下之低密度，且氧含有率高達數l〇〇〇PPm，存在著濺鍍 成膜時的異常放電、氧化物所造成的污染等問題。 -5- 201247338 因此，在製作濺鍍靶時使用Cu-Ga合金鑄錠的情況， Cu-Ga合金鑄錠宜藉由一般的熔鑄法來製造。A Cu-Ga alloy having a relatively large composition of Ga (gallium) is mainly used as a sputtering target for forming a thin film of a light absorbing layer of a thin film type solar cell. The sputtering target is an alloy ingot having a rectangular parallelepiped shape (for example, 300 mm x 400 mm x 1000 mm) manufactured by a smelting method, which is cut into several pieces using a lathe or a circular saw, and the cut alloy piece (ingot) is rolled and cut. Made out. For example, Patent Document 1 discloses a method of producing a CU_Ga alloy ingot for a sputtering target by a melt casting method. However, in the technique disclosed in Patent Document 1, only a Cu-Ga alloy ingot of a smaller size can be manufactured. Further, according to the technique disclosed in Patent Document 1, it is necessary to prepare a mold having a desired Cu-Ga alloy ingot size each time, and thus productivity is extremely low. As another method of producing a Cu-Ga alloy ingot for a sputtering target, a method of forming a desired shape by sintering a Cu-Ga alloy powder is known similarly to the molding of ceramics or the like. However, the Cu-Ga alloy ingot produced by the method has a low density of 95% or less when the force is formed into a sputtering target, and the oxygen content rate is as high as several 〇〇〇PPm, and there is Problems such as abnormal discharge during sputtering film formation and contamination by oxides. -5- 201247338 Therefore, in the case of using a Cu-Ga alloy ingot in the production of a sputtering target, the Cu-Ga alloy ingot is preferably produced by a general melt casting method.

Ga組成比較大的Cu-Ga合金，延性、展性差，硬度 高且容易破裂（脆）。因此，藉由熔鑄法製造的Cu-Ga合金 鑄錠，會有發生龜裂的情況。爲了將如此般發生龜裂後的 Cu-Ga合金鑄錠予以製品化，例如必須將發生龜裂的部分 切削除去。此外，所產生的切削屑中會因切削而混入雜 質，因此無法作爲濺鍍靶的原料進行再利用。因此，會產 生無法再利用之大量切削屑，而使Cu-Ga合金鑄錠製品的 良率變差。 例如，在非專利文獻1中，作爲將銅合金鑄物藉由熔 鑄法製造時之龜裂發生抑制方法係揭示出：改變鑄模形狀 以減少應力發生源的方法、將鑄物各部位實施均一地冷卻 以減少溫度梯度而將應力緩和的方法、在鑄模上部等的冒 口部設置發熱材、保溫材等的方法等。 [專利文獻1]日本特開2000-73163號公報 [非專利文獻1 ]「銅合金鑄物之生產技術」，財團法 人素形材中心，P.391〜392 【發明內容】 然而’ Ga組成比較大的Cu-Ga合金，由於屬於硬度 高之脆性材料’作爲將Cu-Ga合金鑄錠藉由熔鑄法製造時 之龜裂對策’即使是採用非專利文獻1所揭示的技術，要 充分抑制龜裂發生而製造出大型Cu-Ga合金鑄錠是困難。 -6- 201247338 本發明的目的是爲了提供一種能抑制龜裂發生而製造 出大型Cu-Ga合金鑄錠之Cu-Ga合金鑄錠之製造方法。 此外’本發明的其他目的，是爲了提供實施該方法時所使 用的鑄造用鑄模、使用該鑄造用鑄模藉由熔鑄法製作出之 Cu-Ga合金鑄錠、以及濺鍍靶。 本發明之鑄造用鑄模，是將Cu-Ga合金鑄錠藉由熔鑄 法製作時所使用之鑄造用鑄模；係具備鑄模主體及導引 部； 該鑄模主體，是形成有底筒狀且具有開口部，在該開 口部形成用來供應Cu-Ga合金熔融液之開口； 該導引部，是設置在前述鑄模主體之前述開口部，將 朝向前述開口部供應之Cu-Ga合金熔融液以減少該熔融液 動能的方式導引並注入前述鑄模主體內。 又本發明之鑄造用鑄模較佳爲，前述導引部係具備形 成有傾斜面之傾斜構件，該傾斜面，是讓朝向前述鑄模主 體的前述開口部供應之Cu-Ga合金熔融液流過，且是以隨 著從前述鑄模主體之前述開口部朝向內方而接近前述鑄模 主體之底面的方式延伸； 在前述傾斜構件之最接近前述鑄模主體底面之前端部 和前述鑄模主體的內周面之間形成間隙，該間隙是讓沿著 前述傾斜構件之前述傾斜面流過的Cu-Ga合金熔融液注入 前述鑄模主體內。 又本發明之鑄造用鑄模較佳爲，前述鑄模主體是形成 前述開口部呈長方形的四角筒狀； 201247338 前述傾斜構件之前述傾斜面，是以隨著從前述鑄模主 體之前述開口部的一方短邊朝向內方而接近前述鑄模主體 之底面的方式延伸。 又本發明之鑄造用鑄模較佳爲，前述導引部係具備第 1傾斜構件及第2傾斜構件； 該第1傾斜構件具有：以隨著從前述鑄模主體之前述 開口部朝向內方而接近前述鑄模主體之底面的方式延伸之 傾斜面； 該第2傾斜構件，在與前述鑄模主體的底面平行的方 向是設置成與前述第1傾斜構件相對向，且具有：以隨著 從前述鑄模主體之前述開口部朝向內方而接近前述鑄模主 體之底面的方式延伸之傾斜面； 將前述第1傾斜構件和前述第2傾斜構件配置成，使 最接近前述鑄模主體的底面之各自的前端部，以不接觸對 方的傾斜面的方式在與前述鑄模主體之底面平行的方向上 位於不同的位置。 又本發明之鑄造用鑄模較佳爲，將前述第1傾斜構件 和前述第2傾斜構件配置成，使各自的前端部位於與前述 鑄模主體的底面平行之同一平面上，且在各自的前端部彼 此間形成間隙。 又本發明之鑄造用鑄模較佳爲，將前述第1傾斜構件 和前述第2傾斜構件配置成，使各自的前端部彼此間所形 成之前述間隙位於前述鑄模主體之前述開口部的中央。 又本發明之鑄造用鑄模較佳爲，前述鑄模主體是形成 -8 - 201247338 前述開口部呈長方形的四角筒狀； 前述第1傾斜構件及前述第2傾斜構件各自的傾斜 面，是以隨著從在前述鑄模主體之前述開口部相對向的2 個短邊分別朝向內方而接近前述鑄模主體之底面的方式延 伸。 又本發明之鑄造用鑄模較佳爲，在前述鑄模主體之外 周面，關於前述鑄模主體的底面之法線方向而在形成有底 面之法線方向下方側的既定區域設置冷卻抑制構件，該冷 卻抑制構件，可抑制注入前述鑄模主體內之Cu-Ga合金熔 融液發生過度冷卻》 又本發明之鑄造用鑄模較佳爲，前述冷卻抑制構件之 前述法線方向的長度，是前述鑄模主體之前述法線方向的 長度之1/4以上。 又本發明之鑄造用鑄模較佳爲，前述冷卻抑制構件， 可將前述鑄模主體之最高到達溫度（°C )調整成注入前述鑄 模主體內前的Cu-Ga合金熔融液的溫度（°C)之22%以上 6 2 %以下。 又本發明之Cu-Ga合金鑄錠，是使用前.述鑄造用鑄模 藉由熔鑄法製作之Cu-Ga合金鑄錠； 其G a組成比爲1 0 a t %以上5 0 a t %以下。 又本發明之濺鍍靶，是Cu-Ga合金所構成的濺鍍靶； 其是使用前述Cu-Ga合金鑄錠所製作的。 又本發明之Cu-Ga合金鑄錠之製造方法，是用來製造 Cu-Ga合金鑄錠的方法：係包含： -9 - 201247338 在坩堝內置入銅（Cu)及鎵（Ga)並減壓至lO^Torr以下 減壓的步驟： 在此壓力下，以昇溫速度 5~20°C /分昇溫至 8 00°C〜1 l〇〇°C後’在此溫度下保持30分鐘〜12小時並減壓 至8xl(T4T〇rr以下，而在坩堝內獲得Cu-Ga合金熔融液 的步驟； 使用前述鑄造用鑄模將坩堝內的前述熔融液進行鑄造 的步驟’是朝向前述導引部供應前述熔融液，藉此將前述 熔融液注入前述鑄模主體內而進行鑄造的步驟；以及 將在前述鑄模主體內鑄造後的Cu-Ga合金冷卻至室溫 後’從前述鑄模主體取出Cu-Ga合金而獲得Cu-Ga合金 鑄錠的步驟。 又本發明的Cu-Ga合金鑄錠之製造方法較佳爲，進一 步包含以下步驟： 在從前述鑄模主體取出Cu-Ga合金後，將該Cu-Ga 合金在大氣壓下以450°C以上未達700°C的溫度加熱1小 時以上1 2小時以下的時間。 本發明之鑄造用鑄模，是將Cu-Ga合金鑄錠藉由熔鑄 法製作時所使用的鑄模。該鑄造用鑄模係包含鑄模主體及 導引部。鑄模主體是形成有底筒狀，且具有用來供應Cu-Ga合金熔融液之開口部。導引部是設置於鑄模主體的開 口部，用來將朝向該開口部供應的Cu-Ga合金熔融液以減 少該熔融液之動能的方式導引而注入鑄模主體內。 使用以上構造的鑄造用鑄模而將Cu_Ga合金鑄錠藉由 -10- 201247338 熔鑄法製作的情況，Cu-G a合金熔融液是朝向設置於鑄模 主體的開口部之導引部供應。亦即，使用本發明之鑄造用 鑄模而將Cu-Ga合金鑄錠藉由熔鑄法製作的情況，Cu-Ga 合金熔融液不是從開口部直接注入鑄模主體內，而是藉由 導引部以動能減少後的狀態注入鑄模主體內。如此，能夠 抑制注入鑄模主體內時之熔融液發生對流，而在鑄模主體 內使熔融液均一地凝固。因此，能抑制龜裂發生而製造出 大型Cu-Ga合金鑄淀》 又依據本發明，導引部較佳爲具備傾斜構件。該傾斜 構件形成有傾斜面，該傾斜面是以隨著從鑄模主體之開口 部朝向內方而接近鑄模主體之底面的方式延伸。而且，在 傾斜構件之最接近鑄模主體的底面之前端部和鑄模主體的 內周面之間形成間隙，該間隙是讓沿著傾斜構件之傾斜面 流過的Cu-Ga合金熔融液注入鑄模主體內。 使用以上構造的鑄造用鑄模將Cu-Ga合金鑄錠藉由熔 鑄法製作的情況，Cu-Ga合金熔融液是朝向設置於鑄模主 體的開口部之導引部中的傾斜構件之傾斜面供應。被供應 至傾斜構件的傾斜面之Cu-Ga合金熔融液，沿著傾斜面流 過後到達前端部。而且，到達前端部後之Cu-Ga合金熔融 液，是從前端部和鑄模主體的內周面間所形成的間隙，以 沿著鑄模主體的內周面的方式注入鑄模主體內。 使用上述鑄造用鑄模將Cu-Ga合金鑄錠藉由熔鑄法製 作的情況’如前述般，Cu-Ga合金熔融液不是從開口部直 接注入鑄模主體內，而是沿著傾斜構件的傾斜面流過 > 從 -11 - 201247338 前端部和鑄模主體的內周面之間所形成的間隙以沿著鑄模 主體的內周面的方式注入鑄模主體內，因此可減少注入鑄 模主體內時之熔融液的動能，且能防止注入時碰撞鑄模主 體的內周面（特別是底面）所造成之熔融液飛濺。如此，能 夠抑制注入鑄模主體內時熔融液發生對流，可防止熔融液 飛濺，因此能在鑄模主體內讓熔融液均一地凝固。如此， 可抑制龜裂發生以及內部缺陷發生而製造出大型Cu-Ga合 金鑄錠。 又依據本發明較佳爲，鑄模主體是形成開口部呈長方 形的四角筒狀。此外較佳爲，傾斜構件的傾斜面，是以隨 著從鑄模主體之開口部的一方短邊朝向內方而接近鑄模主 體之底面的方式延伸。如此，可充分確保傾斜構件之傾斜 面的長度，因此可提昇沿著傾斜面流過之熔融液流過速度 的控制性。如此，可提昇讓注入鑄模主體內時之熔融液的 動能減少之控制性。 又依據本發明較佳爲，導引部係具備第1傾斜構件和 第2傾斜構件。第1傾斜構件具有：以隨著從鑄模主體之 開口部朝向內方而接近鑄模主體之底面的方式延伸之傾斜 面。第2傾斜構件，在與鑄模主體的底面平行的方向是設 置成與第1傾斜構件相對向。該第2傾斜構件具有：以隨 著從鑄模主體之開口部朝向內方而接近鑄模主體之底面的 方式延伸之傾斜面·>而且將第1傾斜構件和第2傾斜構件 配置成，使最接近鑄模主體的底面之各自的前端部，以不 接觸對方的傾斜面的方式在與鑄模主體之底面平行的方向 -12- 201247338 上位於不同的位置。 使用以上構造的鑄造用鑄模將Cu-Ga合金鑄錠藉由熔 鑄法製作的情況，Cu-Ga合金熔融液’是朝向設置於鑄模 主體的開口部之第1傾斜構件或第2傾斜構件的傾斜面供 應。被供應至第1傾斜構件或第2傾斜構件的傾斜面之 Cu-Ga合金熔融液，沿著傾斜面流過後到達前端部。第1 傾斜構件和第2傾斜構件各自的前端部，是以不接觸對方 的傾斜面的方式在與鑄模主體之底面平行的方向上位於不 同的位置，因此到達前端部後之Cu-Ga合金熔融液可注入 鑄模主體內。 使用上述鑄造用鑄模將Cu-Ga合金鑄錠藉由熔鑄法製 作的情況，如前述般，Cu-Ga合金熔融液不是從開口部直 接注入鑄模主體內，而是沿著第1傾斜構件或第2傾斜構 件的傾斜面流過後從前端部注入鑄模主體內，因此能夠減 少注入鑄模主體內時之熔融液的動能。如此，能夠抑制注 入鑄模主體內時之熔融液發生對流，因此能在鑄模主體內 讓熔融液均一地凝固。如此，能抑制龜裂發生而製造出大 型Cu-Ga合金鑄錠。 又依據本發明較佳爲，將第1傾斜構件和第2傾斜構 件配置成’使各自的前端部位於與鑄模主體之底面平行的 同一平面上’且在各自的前端部彼此間形成間隙。如此， 被供應至第1傾斜構件或第2傾斜構件的傾斜面之C u _ G a 合金熔融液，是沿著傾斜面流過後，從第丨傾斜構件及第 2傾斜構件各自的前端部彼此間所形成的間隙注入鑄模主 -13- 201247338 體內，因此可減少注入鑄模主體內時之熔融液的動能。 又依據本發明較佳爲，將第1傾斜構件和第2傾斜構 件配置成，使各自的前端部彼此間所形成之前述間隙位於 鑄模主體之開口部的中央。如此，被供應至第1傾斜構件 或第2傾斜構件的傾斜面之Cu-Ga合金熔融液，是沿著傾 斜面流過後，從位於鑄模主體之開口部中央的間隙注入鑄 模主體內，因此能減少注入鑄模主體內時之熔融液的動 能。 又依據本發明較佳爲，鑄模主體是形成開口部呈長方 形之四角筒狀。此外較佳爲，第1傾斜構件及第2傾斜構 件各自的傾斜面，是以隨著從鑄模主體之開口部之相對向 的2個短邊分別朝向內方而接近鑄模主體之底面的方式延 伸。如此，可充分地確保第1傾斜構件及第2傾斜構件之 各傾斜面的長度，而能提昇沿著傾斜面流過之熔融液流過 速度的控制性。因此，可提昇讓注入鑄模主體內時之熔融 液的動能減少之控制性。 又依據本發明較佳爲，在鑄模主體之外周面，關於鑄 模主體的底面之法線方向而在形成有底面之法線方向下方 側的既定區域設置冷卻抑制構件，該冷卻抑制構件，可抑 制注入鑄模主體內之Cu-Ga合金熔融液發生過度冷卻。如 此，可防止沿著第1傾斜構件或第2傾斜構件的傾斜面流 過後從前端部注入鑄模主體內之熔融液被急劇地冷卻，因 此能在鑄模主體內讓熔融液均一地凝固。 又依據本發明較佳爲，冷卻抑制構件之前述法線方向 -14 - 201247338 的長度爲鑄模主體之前述法線方向的長度之1/4以上 此，可確實地防止沿著第1傾斜構件或第2傾斜構件 斜面流過後從前端部注入鑄模主體內之熔融液被急劇 卻，因此能在鑄模主體內讓熔融液均一地凝固。 又依據本發明較佳爲，冷卻抑制構件可將鑄模主 最高到達溫度（°C)調整成注入鑄模主體內前的Cu-Ga 熔融液的溫度（°C)之22%以上62%以下。如此，可防 入鑄模主體內的熔融液被急劇地冷卻，且能在鑄模主 讓熔融液均一且高效率地凝固。 又依據本發明較佳爲，Cu-Ga合金鑄錠之Ga組 爲1 Oat%以上50at%以下。Ga組成比較大的Cu-Ga合 屬於硬度高之脆性材料，因此在將Cu-Ga合金鑄錠藉 鑄法製造時可能發生龜裂。針對於，本發明之Cu-Ga 鑄錠，是使用讓注入鑄模主體內時之熔融液動能減少 造用鑄模，而藉由熔鑄法所製作的，因此能抑制龜 生。 又依據本發明，濺鍍靶是使用能抑制龜裂發生之 明的Cu-Ga合金鑄錠所製作的。如此，本發明的濺鍍 用於作爲：例如薄膜型太陽電池之光吸收層的薄膜形 濺鍍靶。 又依據本發明的Cu-Ga合金鑄錠之製造方法，首 坩堝內置入銅（Cu)以及鎵（Ga)，減壓至li^Torr以下 著在此壓力下，以昇溫速度5〜2CTC/分昇溫至800°C~1 °C的溫度後，在此溫度下保持3 0分鐘〜1 2小時並減 。如 的傾 地冷 體之 合金 止注 體內 成比 金是 由熔 合金 之鑄 裂發 本發 靶適 成用 先在 。接 1 00 壓至 -15- 201247338 8xl(T4T〇rr以下，而在坩堝內獲得Cu-Ga合金熔融液。接 著，將坩堝內之前述熔融液使用本發明之鑄造用鑄模進行 鑄造。具體而言，藉由朝向鑄造用鑄模之導引部供應熔融 液，以將熔融液注入鑄模主體內而進行鑄造。然後，將在 鑄模主體內鑄造後之Cu-Ga合金冷卻至室溫後，從鑄模主 體將Cu-Ga合金取出而獲得Cu-Ga合金鏡淀。 在本發明的Cu-Ga合金鑄錠之製造方法，如前述般， Cu-Ga合金熔融液不是從開口部直接注入鑄模主體內，而 是藉由導引部以動能減少後的狀態注入鑄模主體內。如 此，能夠抑制注入鑄模主體內時的熔融液發生對流，因此 能在鑄模主體內讓熔融液均一地凝固。如此，能抑制龜裂 發生而製造出大型Cu-Ga合金鑄錠。 又依據本發明的Cu-Ga合金鑄錠之製造方法較佳爲， 從鑄模主體將Cu-Ga合金取出後，將該Cu-Ga合金在大 氣壓下以4 5 0 °C以上未達7 0 0 °C的溫度加熱1小時以上1 2 小時以下的時間。如此，在鑄模主體內讓熔融液凝固而獲 得之Cu-Ga合金鑄錠中，可抑制在Cu中發生Ga偏析， 且能釋放在Cu-Ga合金鑄錠內部所發生的應力。 【實施方式】 以下，參照圖式詳細說明本發明之較佳實施例》 (鑄造用鑄模） 第1圖係顯示本發明的第1實施方式之鑄造用鑄模 -16- 201247338 100的構造之立體圖。在第1圖，爲了讓鑄造用鑄模100 的內部構造容易理解，是將鑄模主體1之1個側壁予以省 略。第2圖係顯示鑄造用鑄模1〇〇的構造之截面圖。 本實施方式之鑄造用鑄模100，是將Cu-Ga合金鑄錠 藉由熔鑄法製作時所使用之鑄模。 構成鑄造用鑄模1〇〇的材料，可列舉砂、金屬、陶 瓷、石墨（碳）等。其中，考慮到不致成爲 Cu-Ga合金中 之金屬污染源的觀點，較佳爲砂、陶瓷、石墨等，考慮到 熱容量及熱傳導率高、冷卻效率高之觀點，最佳爲石墨。 鑄造用鑄模1〇〇係具備鑄模主體1、導引部100A以 及冷卻抑制構件3。本實施方式之鑄造用鑄模1 〇〇的導引 部100A，只要能將朝向鑄模主體1之開口.部1 1供應的 Cu-Ga合金熔融液，以減少該熔融液動能的方式導引而注 入鑄模主體1內即可，其構造沒有特別的限定。該導引部 1 〇〇 A，是讓朝向鑄模主體1之開口部11供應的Cu-Ga合 金熔融液，不致從開口部11直接注入鑄模主體1內。具 體而言，導引部100A係具有被直接供應Cu-Ga合金熔融 液之供應部分，該供應部分之周緣部的一部分連接於開口 部11，周緣部的另一部分是在開口部11的內方成爲自由 端。 前述導引部100A，在前述供應部分被直接供應Cu-Ga合金熔融液之供應面，例如可形成階梯狀，也能呈平 面狀傾斜延伸而形成傾斜面。在本實施方式，前述導引部 1 〇〇A，是由前述供應面形成傾斜面之傾斜構件2所構 -17- 201247338 成。 鑄模主體1，是用來收容Cu-Ga合金熔融液’在本實 施方式是形成有底四角筒狀，其與底面12相對向的開口 部11呈長方形》該開口部11成爲用來供應Cu-Ga合金熔 融液之開口。 設鑄模主體1的內周面之與開口部1 1的長邊平行的 方向（以下稱「長邊方向」）χ的長度、亦即鑄模主體1的 內周面之開口部1 1長邊的長度（以下稱「長邊內徑」）爲 XI，設鑄模主體1的內周面之與開口部11的短邊平行的 方向（以下稱「短邊方向」）Y的長度、亦即鑄模主體1的 內周面之開口部11短邊的長度（以下稱「短邊內徑」）爲 Υ1，設鑄模主體1的內周面之與底面12的法線平行的方 向（以下稱「法線方向」）ζ的長度、亦即鑄模主體1的內 周面之高度（以下稱「高度內徑」）爲Ζ1的情況，鑄模主 體1大小較佳爲，開口部11的長邊內徑XI爲l〇〇mm以 上1 000mm以下、開口部U的短邊內徑¥1爲2〇mm以上 1 000mm以下、鑄模主體1的高度內徑Z1爲2〇mm以上 1 00 0mm以下。更佳爲’開口部丨〗的長邊內徑XI爲 150mm以上800mm以下、開口部丨丨的短邊內徑γι爲 3 0mm以上150mm以下、鑄模主體！的高度內徑zi爲 5 0mm以上900mm以下。特佳爲，開口部！ i的長邊內徑 XI爲200mm以上500mm以下、開口部11的短邊內徑Y1 爲40mm以上l〇〇mm以下、鑄模主體1的高度內徑Z1爲 100mm以上8 00mm以下。再者，在鑄模主體i中，開口 -18- 201247338 部11的長邊內徑XI和開口部11的短邊內徑Y1宜具有 X1>Y1的關係。 若鑄模主體1的大小過小，由於Cu-Ga合金鑄錠的生 產性降低，且會產生Cu-Ga合金熔融液的驟冷，因此可能 成爲脆性破裂的原因。此外，若鑄模主體1的大小過大， 不僅鑄造後在Cu-Ga合金鑄錠內部會蓄積應力而成爲脆性 破裂的原因，且由於Cu-Ga合金熔融液之最終凝固位置位 於中央部而成爲內部缺陷發生的原因。 此外，在鑄模主體1中，開口部1 1的長邊內徑X1 與開口部11的短邊內徑Y1之長度比率，當Y1爲「1」 的情況，Yl: XI宜爲1:2〜1:15»Y1:X1更佳爲1: 3〜1: 10〇該「Υ1: XI」中 XI値較小的情況，Cu-Ga合 金熔融液在鑄模主體1內的凝固形態會改變，應力會蓄積 在法線方向Z的中央部，成爲脆性破裂的原因，又即使爲 了減少應力發生而進行漸冷的情況，也可能成爲偏析發生 的原因。再者，該「Y1 : X1」中X1値較大的情況，由於 長邊內徑XI比短邊內徑Y1大，在與鑄模主體1內之底 面12平行的面內’對於Cu-Ga合金熔融液之冷卻會發生 不均一，應力變大而容易發生龜裂。此外，在「Y1: XI」中XI値較大的情況，要將鑄造後獲得的Cu_Ga合金 鑄錠拿起而進行加工等時，會有較多力施加於長邊方向X 的中央部，在該部分發生破裂的可能性變高。 此外’鑄模主體1的內容積，按照構成鑄造用鑄模 1 00的材料之比熱、密度、熱傳導率等的條件，配合鑄造 -19- 201247338 時的鑄造溫度、後述冷卻抑制構件3所進行之鑄模主體1 的調整溫度等的條件而適當地選定即可。 傾斜構件2具有傾斜面2 1，該傾斜面2 1是從鑄模主 體1的開口部11之一方短邊朝向長邊方向X的內方延 伸’且以隨著朝向內方而接近鑄模主體1之底面12的方 式形成傾斜。而且，在傾斜構件2之最接近鑄模主體1的 底面12之前端部22和鑄模主體1的內周面之間形成間隙 G ’該間隙G是成爲讓沿著傾斜構件2的傾斜面2 1流過 之Cu-Ga合金熔融液注入鑄模主體1內之開口。 傾斜構件2的形狀沒有特別的限定，從鑄模主體1的 開口部11之短邊方向Y觀察時的形狀可列舉三角形、梯 形、矩形等》 此外，傾斜構件2的配置位置，只要是能充分地確保 注入鑄模主體1內之Cu-Ga合金熔融液量的位置、亦即使 鑄造後的Cu-Ga合金鑄錠成爲期望大小的位置即可，並沒 有特別的限定。傾斜構件2，當鑄模主體1之高度內徑Z 1 爲「1」的情況，傾斜構件2的最下部位置較佳爲從鑄模 主體1最下部起算1/2以上的場所，更佳爲3/5以上的場 所’特佳爲2/3以上的場所。傾斜構件2之最下部配置在 鑄模主體1內之過度下方側的情況，相對於鑄模主體1的 內容積’所獲得的Cu-Ga合金鑄錠變小，因此較佳爲在鑄 模主體1內儘量配置在上方側。 使用以上構造的鑄造用鑄模100將Cu-Ga合金鑄錠藉 由熔鑄法製作的情況’ Cu-Ga合金熔融液是朝向設置於鑄 -20- 201247338 模主體1的開口部1 1之傾斜構件2的傾斜面2 1供應 供應至傾斜構件2的傾斜面2 1之C u - G a合金熔融液 著傾斜面2 1流過後到達前端部2 2。接著，到達前端; 後之Cu-Ga合金熔融液，是從前端部22和鑄模主體 內周面之間所形成的間隙G，以沿著鑄模主體1的內 的方式注入鑄模主體1內。在本實施方式，傾斜構件 傾斜面21’是從鑄模主體1的開口部u之一方短邊 長邊方向X的內方連續設置，且在前端部22和鑄模 1的內周面之間形成間隙G，因此從間隙G注入鑄模 1內的Cu-Ga合金熔融液，在鑄模主體丨的內周面當 可沿著包含開口部11之另一方短邊的內周面而注入 此，可縮小沿著鑄模主體1的內周面注入之Cu-Ga合 融液的與鑄模主體1的內周面之接觸面積，因此能夠 在鑄模主體1內Cu-Ga合金熔融液發生驟冷。因此， 防止鑄造後獲得的Cu-Ga合金鑄錠表面變粗糙。 使用本實施方式的鑄造用鑄模100將Cu-Ga合金 藉由熔鑄法製作的情況，如前述般，Cu-Ga合金熔融 是從開口部1 1直接注入鑄模主體1內，而是沿著傾 件2的傾斜面2 1流過後從前端部22和鑄模主體1的 面間所形成的間隙G，以沿著鑄模主體1的內周面的 注入鑄模主體1內，因此能夠減少注入鑄模主體1內 熔融液動能，能防止在注入時碰撞鑄模主體1的內 (特別是底面1 2)所造成的熔融液飛濺。如此，可抑制 鑄模主體1內的熔融液發生對流，而能防止熔融液飛 。被 ，沿 迅22 1的 周面 2的 朝向 主體 主體 中， 。如 金熔 防止 能夠 鑄錠 液不 斜構 內周 方式 時之 周面 注入 濺， -21 - 201247338 因此能在鑄模主體1內讓熔融液均一地凝固。如此，可抑 制龜裂發生以及內部缺陷發生而製造出大型Cu-Ga合金鑄 錠。 此外’傾斜構件2的傾斜面21與鑄模主體1的底面 12所形成的角度、即傾斜角度θ，較佳爲10。以上70。以 下’更佳爲15°以上60°以下，特佳爲20。以上40°以下。 傾斜角度Θ過小的情況，Cu-Ga合金熔融液流過傾斜面21 時的流過速度變得過慢’在鑄造初期和鑄造末期Cu-Ga合 金熔融液的凝固狀態不同，不僅鑄造後的Cu-Ga合金鑄錠 會發生龜裂，且存在有：在傾斜面21上發生Cu-Ga合金 熔融液的凝固、在鑄模主體1內無法凝固的問題。當傾斜 角度Θ過大的情況’ Cu-Ga合金熔融液流過傾斜面21時 的流過速度變得過快，注入鑄模主體1內之Cu-Ga合金熔 融液會發生強烈的對流，而在鑄造後的Cu-Ga合金鑄錠會 發生龜裂。 此外’傾斜構件2的前端部22和鑄模主體1的內周 面間所形成的間隙G之面積，較佳爲500mm2以上、 3000mm2以下，更佳爲600mm2以上、2100mm2以下。間 隙G面積過小的情況，沿著傾斜面21流過之Cu-Ga合金 熔融液無法平順地注入鑄模主體1內，存在有：在傾斜面 21上發生Cu-Ga合金熔融液的凝固、在鑄模主體丨內無 法凝固的問題。此外，當間隙G面積過大的情況，注入 鑄模主體1內之Cu-Ga合金熔融液發生強烈的對流，鑄造 後的Cu-Ga合金鑄錠會發生龜裂。 -22- 201247338 又將傾斜構件2從法線方向Z觀察時之長邊方向X 的長度X2，只要配合前述傾斜面21的傾斜角度Θ、間隙 G面積等而適當設定即可。 此外，本實施方式之鑄造用鑄模1 00係具備冷卻抑制 構件3。冷卻抑制構件3，是在鑄模主體1的外周面，關 於鑄模主體1的底面12之法線方向Z設置成覆蓋形成有 底面1 2之法線方向Z下方側的既定區域。該冷卻抑制構 件3，可抑制注入鑄模主體1內之Cu-Ga合金熔融液被過 度冷卻。如此，沿著傾斜構件2的傾斜面21流過後從前 端部22和鑄模主體1的內周面間所形成的間隙G，以沿 著鑄模主體1內周面的方式注入鑄模主體1內之熔融液， 由於可防止發生急劇冷卻，而能在鑄模主體1內讓熔融液 均一地凝固。 冷卻抑制構件3，只要對於鑄模主體1下部可發揮保 溫效果及加熱效果當中至少任一方的效果即可，並沒有特 別的限定。作爲可發揮保溫效果之保溫材，可列舉通常作 爲隔熱材所使用之玻璃棉和KRECA氈、作爲耐火材所使 用之芳族聚醯胺纖維薄片等；作爲可發揮加熱效果之加熱 材，可列舉管式加熱器等。 此外，冷卻抑制構件3之法線方向Z的長度（冷卻抑 制構件3高度）Z3，相對於鑄模主體1之法線方向z的長 度（鑄模主體1高度）Z2，較佳爲1/4以上3/4以下，更佳 爲3/10以上2/3以下，特佳爲2/5以上3/5以下。如此， 沿著傾斜構件2的傾斜面2 1流過後從前端部22和鑄模主 -23- 201247338 體1的內周面間所形成的間隙G，以沿著鑄模主體1內周 面的方式注入鑄模主體1內之熔融液，可更確實地防止發 生急劇冷卻。 此外，冷卻抑制構件3可將鑄模主體1下部側的最高 到達溫度（°C)調整成，注入鑄模主體1內之前的Cu-Ga合 金熔融液的溫度（鑄造溫度°C )之 22%以上 62%以下（較 佳），更佳爲25 %以上50%以下》冷卻抑制構件3所實施 之鑄模主體1調整溫度過低的情況，對於鑄模主體1的下 部側區域之保溫或加熱效果不佳，鑄模主體1的法線方向 Z之溫度梯度變大，因此鑄造後的Cu-Ga合金鑄錠容易發 生龜裂。此外，冷卻抑制構件3所實施之鑄模主體1調整 溫度過高的情況，由於冷卻速度過慢，應力會集中在Cu-Ga合金熔融液之最終凝固位置，不僅造成鑄造後的Cu-Ga合金鑄旋發生龜裂，且有發生偏析之虞。 第3圖係顯示本發明的第2實施方式之鑄造用鑄模 2〇〇構造之立體圖。在第3圖，爲了讓鑄造用鑄模200的 內部構造容易理解，是將鑄模主體1之1個側壁予以省 略。第4圖係顯示鑄造用鑄模200的構造之截面圖。鑄造 用鑄模200’是與前述第1實施方式的鑄造用鑄模10〇類 似’對於相對應的部分是賦予相同參照符號而省略其說 明。 鑄造用鑄模200’除了導引部200A(將朝向鑄模主體 1的開口部1 1供應之Cu-Ga合金熔融液以減少該熔融液 動能的方式導引而注入鑄模主體1內）的構造與前述導引 -24 · 201247338 部100A不同以外，是採用與鑄造用鑄模1〇〇同樣的構 造。鑄造用鑄模1 0 0的導引部1 〇 〇 A由i個傾斜構件2所 構成’相對於此’鑄造用鑄模200的導引部200A是由第 1傾斜構件2 0 1及第2傾斜構件2 0 2所構成。 第1傾斜構件2 01具有第1傾斜面2 01 1，該第1傾 斜面2011是從鑄模主體1的開口部11之—方短邊朝向長 邊方向X的內方延伸’且以隨著朝向內方而接近鑄模主 體1之底面12的方式形成傾斜。 第2傾斜構件202，在長邊方向X(與底面12平行的 方向）設置成與第1傾斜構件201相對向。該第2傾斜構 件202具有第2傾斜面202 1，該第2傾斜面202 1是從鑄 模主體1之開口部11的另一方短邊朝向長邊方向X的內 方延伸’且以隨著朝向內方而接近鑄模主體i之底面12 的方式形成傾斜。 第1傾斜構件201的前端部（最接近鑄模主體1之底 面12的部分）、即第〗前端部2 0丨2，不接觸第2傾斜構 件202的傾斜面、即第2傾斜面202 1 ;第2傾斜構件202 的前端部（最接近鑄模主體1之底面12的部分）、即第2 前端部2 0 2 2，不接觸第1傾斜構件2 0 1的傾斜面、即第1 傾斜面201 1。而且，將第1傾斜構件201和第2傾斜構 件202配置成，使第i前端部2012和第2前端部2022在 與鑄模主體1的底面12平行的方向（長邊方向X)位於不 同位置。此外，在本實施方式，將第1傾斜構件2 01和第 2傾斜構件202配匱成，使第1前端部2012和第2前端 -25- 201247338 部2 02 2位於與鑄模主體1之底面12平行的同一平面上 再者，在第1前端部2012和第2前端部2022之間，在 模主體1之開口部1 1的長邊方向X中央部形成有間 G1。 第1傾斜構件201及第2傾斜構件202的形狀沒有 別的限定，從鑄模主體1之開口部11的短邊方向Y觀 時的形狀，可列舉三角形、梯形、矩形等。 此外，第1傾斜構件201及第2傾斜構件202的配 位置，只要是能充分地確保注入鑄模主體1內之Cu-Ga 金熔融液量的位置、亦即使鑄造後的Cu-Ga合金鑄錠成 期望大小的位置即可，並沒有特別的限定。第1傾斜構 201及第2傾斜構件202，設鑄模主體1之高度內徑Z1 「1」的情況’第1傾斜構件201及第2傾斜構件202 自的最下部位置，較佳爲配置在從鑄模主體1的最下部 算1 /2以上的場所，更佳爲配置在3 / 5以上的場所，特 爲配置在2/3以上的場所。第1傾斜構件201及第2傾 構件2〇2各自的最下部，在鑄模主體〗內配置在過度下 側的情況，相對於鑄模主體1內容積，所獲得的Cu_Ga 金鑄錠變小’因此在鑄模主體1內宜儘量配置在上方側 使用以上構造之鑄造用鑄模200而將Cu-Ga合金鑄 藉由熔鑄法製作的情況，Cu-Ga合金熔融液，是朝向設 於鑄模主體1的開口部1 1之第1傾斜構件201的傾 面、即第1傾斜面2 01 1供應。被供應至第1傾斜構 201的第1傾斜面2〇ιι之Cu-Ga合金熔融液，一部分 鑄 隙 特 察 置 合 爲 件 爲 各 起 佳 斜 方 合 〇 錠 置 斜 件 沿 -26- 201247338 著第1傾斜面201 1流過，剩餘部分從第1傾斜面201 1飛 濺至第2傾斜構件202的第2傾斜面202 1後，沿著第2 傾斜面202 1流過。沿著第1傾斜面201 1流過之熔融液到 達第1前端部2012，沿著第2傾斜面202 1流過之熔融液 到達第2前端部2022。接著，到達第1前端部20 12及第 2前端部2022後的熔融液被注入鑄模主體1內。 使用本實施方式的鑄造用鑄模200將Cu-Ga合金鑄錠 藉由熔鑄法製作的情況，如前述般，C u - G a合金熔融液不 是從開口部U直接注入禱模主體1內，而是沿著第1傾 斜面201 1及第2傾斜面202 1流過，在鑄模主體1之開口 部11的長邊方向X中央部，從第1前端部2012和第2 前端部2022間所形成的間隙G1注入鑄模主體1內，因 此可減少注入鑄模主體1內時之熔融液的動能。如此，能 夠抑制注入鑄模主體1內時之熔融液發生對流，因此能在 鑄模主體1內讓熔融液均一地凝固。因此，可抑制龜裂發 生而製造出大型Cu-Ga合金鑄錠。 此外，第1傾斜構件201的第1傾斜面201 1和鑄模 主體1的底面12所形成的角度、即第1傾斜角度θ 1、以 及第2傾斜構件202的第2傾斜面202 1和鑄模主體1的 底面12所形成的角度、即第2傾斜角度θ2，較佳爲10。 以上70°以下’更佳爲15。以上60。以下，特佳爲20。以上 4 0°以下。第1傾斜角度01及第2傾斜角度02過小的情 況’ C u - G a合金熔融液流過第〗傾斜面2 〇丨1及第2傾斜 面2 0 2 1時的流過速度變得過慢，在鑄造初期和鑄造末期 -27- 201247338The Ga-Ga alloy with a relatively large composition of Ga has poor ductility and malleability, high hardness and is easily broken (brittle). Therefore, the Cu-Ga alloy ingot produced by the melt casting method may be cracked. In order to product the Cu-Ga alloy ingot which has been cracked as described above, for example, it is necessary to cut and remove the cracked portion. Further, since the generated chips are mixed with impurities due to the cutting, they cannot be reused as a raw material of the sputtering target. Therefore, a large amount of chips which cannot be reused are generated, and the yield of the Cu-Ga alloy ingot product is deteriorated. For example, Non-Patent Document 1 discloses a method for suppressing crack occurrence when a copper alloy casting is produced by a melt casting method, and discloses a method of changing a shape of a mold to reduce a stress generating source, and uniformly forming each part of the casting. A method of cooling the stress by reducing the temperature gradient, a method of providing a heating material, a heat insulating material, or the like in a riser portion such as an upper portion of the mold. [Patent Document 1] JP-A-2000-73163 [Non-Patent Document 1] "Production Technology of Copper Alloy Castings", Foundation Law Human Body Shape Center, P. 391~392 [Summary of the Invention] However, the 'Cu-Ga alloy with a relatively large Ga composition is a brittle material having a high hardness' as a cracking countermeasure when a Cu-Ga alloy ingot is produced by a melt casting method. According to the technique disclosed in Patent Document 1, it is difficult to sufficiently suppress the occurrence of cracks to produce a large-sized Cu-Ga alloy ingot. -6-201247338 An object of the present invention is to provide a method for producing a Cu-Ga alloy ingot which can suppress the occurrence of cracks and to produce a large Cu-Ga alloy ingot. Further, another object of the present invention is to provide a casting mold used for carrying out the method, a Cu-Ga alloy ingot produced by the casting method using the casting mold, and a sputtering target. The casting mold of the present invention is a casting mold used for casting a Cu-Ga alloy ingot by a melt casting method; the mold main body and the guiding portion are provided; the main body of the casting mold has a bottomed cylindrical shape and has an opening a portion for forming an opening for supplying a Cu-Ga alloy melt to the opening; the guiding portion is provided in the opening portion of the mold body to reduce a Cu-Ga alloy melt supplied toward the opening portion The kinetic energy of the melt is guided and injected into the body of the mold. Further, in the casting mold of the present invention, it is preferable that the guide portion includes a slanting member having an inclined surface through which a Cu-Ga alloy melt supplied to the opening of the mold main body flows. And extending toward the bottom surface of the mold main body inwardly from the opening portion of the mold main body; the end portion of the inclined member closest to the bottom surface of the mold main body and the inner peripheral surface of the mold main body A gap is formed between the Cu-Ga alloy melt flowing along the inclined surface of the inclined member to be injected into the mold body. Further, in the casting mold of the present invention, it is preferable that the mold main body has a rectangular tubular shape in which the opening portion has a rectangular shape; and 201247338, the inclined surface of the inclined member is shorter than one of the openings from the mold main body. It extends in such a manner as to approach the inner side and approach the bottom surface of the mold body. Further, in the casting mold of the present invention, the guide portion preferably includes a first inclined member and a second inclined member, and the first inclined member has a shape that is close to the inside from the opening of the mold main body. An inclined surface extending from a bottom surface of the mold main body; the second inclined member is disposed to face the first inclined member in a direction parallel to a bottom surface of the mold main body, and has a follow-up from the mold main body The inclined portion extending so as to approach the bottom surface of the mold body toward the inside; and the first inclined member and the second inclined member are disposed so as to be closest to the front end portion of the bottom surface of the mold main body The different positions are located in a direction parallel to the bottom surface of the mold main body so as not to contact the inclined surface of the other side. Further, in the casting mold of the present invention, it is preferable that the first inclined member and the second inclined member are disposed such that their respective distal end portions are located on the same plane parallel to the bottom surface of the mold main body, and at the respective front end portions. A gap is formed between each other. Further, in the casting mold of the present invention, it is preferable that the first inclined member and the second inclined member are disposed such that a gap formed between the respective distal end portions is located at a center of the opening of the mold main body. Further, in the casting mold of the present invention, it is preferable that the mold main body is formed in a rectangular tubular shape in which the opening portion is -8 - 201247338; and the inclined surfaces of the first inclined member and the second inclined member are The two short sides facing each other in the opening portion of the mold main body extend inward toward the bottom surface of the mold main body. Further, in the casting mold of the present invention, it is preferable that a cooling suppressing member is provided in a predetermined region on the outer peripheral surface of the main body of the mold main body in a direction normal to the bottom surface of the bottom surface of the mold main body. The suppressing member can suppress excessive cooling of the Cu-Ga alloy melt injected into the mold main body. Further, in the casting mold of the present invention, the length of the cooling suppressing member in the normal direction is the aforementioned The length of the normal direction is 1/4 or more. Further, in the casting mold of the present invention, it is preferable that the cooling suppression member adjusts a maximum temperature (° C.) of the mold main body to a temperature (° C.) of the Cu-Ga alloy melt before being injected into the mold main body. 22% or more and 62% or less. Further, the Cu-Ga alloy ingot of the present invention is used before use. Casting mold for casting A Cu-Ga alloy ingot produced by a melt casting method; the composition ratio of Ga is 10% or more and 5 0% or less. Further, the sputtering target of the present invention is a sputtering target composed of a Cu-Ga alloy; it is produced by using the aforementioned Cu-Ga alloy ingot. Further, the method for producing a Cu-Ga alloy ingot according to the present invention is a method for producing a Cu-Ga alloy ingot: the system comprises: -9 - 201247338 A copper (Cu) and gallium (Ga) are built in a crucible and decompressed. The step of decompressing to below lO^Torr: Under this pressure, the temperature is raised to 5 to 20 ° C / min to 800 ° C ~ 1 l ° ° C after 'at this temperature for 30 minutes ~ 12 hours And depressurizing to 8xl (T4T〇rr or less, and obtaining a Cu-Ga alloy melt in the crucible; the step of casting the melt in the crucible using the casting mold described above) is supplying the aforementioned guide portion a step of casting the melt into the mold body to perform casting; and cooling the Cu-Ga alloy cast in the mold body to room temperature to remove the Cu-Ga alloy from the mold body A step of obtaining a Cu-Ga alloy ingot. The method for producing a Cu-Ga alloy ingot of the present invention preferably further comprises the steps of: after extracting the Cu-Ga alloy from the body of the mold, the Cu-Ga alloy Heating at a temperature of 450 ° C or higher and less than 700 ° C under atmospheric pressure 1 The mold for casting of the present invention is a mold used for casting a Cu-Ga alloy ingot by a melt casting method. The mold for casting includes a mold main body and a guide portion. The bottom portion has a bottomed cylindrical shape and has an opening for supplying a molten liquid of the Cu-Ga alloy. The guiding portion is an opening portion provided in the main body of the mold for supplying the Cu-Ga alloy melt supplied toward the opening portion. The kinetic energy of the melt is reduced and introduced into the mold main body. When the Cu_Ga alloy ingot is produced by the -10-201247338 smelting method using the casting mold of the above structure, the Cu-G a alloy melt is oriented. The guide portion provided in the opening portion of the mold main body is supplied. That is, when the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold of the present invention, the Cu-Ga alloy melt is not directly from the opening portion. The injection mold is injected into the main body of the mold by the guide portion, and the molten metal is injected into the main body of the mold while being reduced. The melt is uniformly solidified. Therefore, it is possible to suppress the occurrence of cracks to produce a large-sized Cu-Ga alloy cast. According to the present invention, the guide portion is preferably provided with a slanting member. The inclined member is formed with an inclined surface, the inclined surface The method extends so as to approach the bottom surface of the mold body as it goes inward from the opening of the mold body. Further, a gap is formed between the end portion of the inclined member closest to the bottom surface of the mold body and the inner peripheral surface of the mold body. This gap is such that the Cu-Ga alloy melt flowing through the inclined surface of the inclined member is injected into the mold main body. The Cu-Ga alloy ingot is produced by the melt casting method using the casting mold of the above structure, Cu-Ga The alloy melt is supplied toward the inclined surface of the inclined member provided in the guide portion of the opening portion of the mold main body. The Cu-Ga alloy melt supplied to the inclined surface of the inclined member flows along the inclined surface and reaches the front end portion. Further, the Cu-Ga alloy melt which has reached the tip end portion is injected into the mold body from the tip end portion and the inner peripheral surface of the mold main body so as to be along the inner peripheral surface of the mold main body. In the case where the Cu-Ga alloy ingot is produced by the melt casting method using the above casting mold, as described above, the Cu-Ga alloy melt is not directly injected into the mold main body from the opening portion, but flows along the inclined surface of the inclined member. The gap formed between the front end portion and the inner peripheral surface of the mold main body from -11 - 201247338 is injected into the mold main body along the inner peripheral surface of the mold main body, thereby reducing the melt liquid injected into the main body of the mold main body. The kinetic energy can prevent splashing of the melt caused by the inner peripheral surface (especially the bottom surface) of the main body of the casting body during the injection. Thus, it is possible to suppress the convection of the melt when injected into the main body of the mold, and to prevent the melt from splashing, so that the melt can be uniformly solidified in the main body of the mold. In this way, it is possible to suppress the occurrence of cracks and the occurrence of internal defects to produce a large-sized Cu-Ga alloy ingot. Further, according to the present invention, it is preferable that the main body of the mold is formed in a rectangular tubular shape in which the opening portion has a rectangular shape. Further, it is preferable that the inclined surface of the inclined member extends so as to approach the bottom surface of the main body of the mold as it goes inward from one short side of the opening of the mold main body. Thus, the length of the inclined surface of the inclined member can be sufficiently ensured, so that the controllability of the flow rate of the molten metal flowing along the inclined surface can be improved. Thus, the controllability of reducing the kinetic energy of the molten metal when injected into the main body of the mold can be improved. Further preferably, according to the invention, the guide portion includes the first inclined member and the second inclined member. The first inclined member has an inclined surface that extends so as to approach the bottom surface of the mold body as it goes inward from the opening of the mold body. The second inclined member is disposed to face the first inclined member in a direction parallel to the bottom surface of the mold main body. The second inclined member has an inclined surface that extends so as to approach the bottom surface of the mold main body inward from the opening of the mold main body, and the first inclined member and the second inclined member are disposed so as to be the most The respective front end portions of the bottom surface of the mold main body are located at different positions in a direction -12-201247338 parallel to the bottom surface of the mold main body so as not to contact the inclined surface of the other mold body. When the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold of the above structure, the Cu-Ga alloy melt 'is inclined toward the first inclined member or the second inclined member provided in the opening of the mold main body. Surface supply. The Cu-Ga alloy melt supplied to the inclined surface of the first inclined member or the second inclined member flows along the inclined surface and reaches the tip end portion. The front end portions of the first inclined member and the second inclined member are located at different positions in a direction parallel to the bottom surface of the mold main body so as not to contact the inclined surface of the other side, so that the Cu-Ga alloy is melted after reaching the front end portion. The liquid can be injected into the body of the mold. When the Cu-Ga alloy ingot is produced by the melt casting method using the above casting mold, as described above, the Cu-Ga alloy melt is not directly injected into the mold main body from the opening portion, but is along the first inclined member or the first Since the inclined surface of the inclined member flows and is injected into the mold main body from the front end portion, the kinetic energy of the molten liquid when injected into the main body of the mold can be reduced. Thus, the convection of the molten liquid when injected into the main body of the mold can be suppressed, so that the molten metal can be uniformly solidified in the main body of the mold. Thus, a large Cu-Ga alloy ingot can be produced by suppressing the occurrence of cracks. Further, according to the present invention, it is preferable that the first inclined member and the second inclined member are disposed such that "the front end portions are located on the same plane parallel to the bottom surface of the mold main body" and a gap is formed between the respective front end portions. In this way, the C u _ G a alloy melt supplied to the inclined surface of the first slanting member or the second slanting member flows along the inclined surface, and the front end portions of each of the second slanting member and the second slanting member are mutually The gap formed between the injections is injected into the body of the mold main-13-201247338, thereby reducing the kinetic energy of the molten metal injected into the main body of the mold. Further, according to the invention, it is preferable that the first inclined member and the second inclined member are disposed such that the gap formed between the respective distal end portions is located at the center of the opening of the mold main body. In this way, the Cu-Ga alloy melt supplied to the inclined surface of the first inclined member or the second inclined member is injected into the mold main body from the gap located at the center of the opening of the mold main body after flowing along the inclined surface. The kinetic energy of the melt when injected into the body of the mold is reduced. Further, according to the invention, it is preferable that the main body of the mold is formed in a rectangular tubular shape in which the opening portion has a rectangular shape. Further, it is preferable that each of the inclined surfaces of the first inclined member and the second inclined member extends so as to approach the bottom surface of the mold main body with the two short sides facing from the opening portion of the mold main body facing inward. . In this manner, the length of each inclined surface of the first inclined member and the second inclined member can be sufficiently ensured, and the controllability of the flow rate of the molten metal flowing along the inclined surface can be improved. Therefore, the controllability of reducing the kinetic energy of the molten metal when injected into the main body of the mold can be improved. Further, according to the present invention, it is preferable that a cooling suppressing member is provided in a predetermined region on the outer peripheral surface of the main body of the mold main body in the normal direction of the bottom surface of the main mold body in the normal direction of the bottom surface. The Cu-Ga alloy melt injected into the main body of the mold is excessively cooled. As a result, the molten metal injected into the mold main body from the tip end portion after flowing along the inclined surface of the first inclined member or the second inclined member can be prevented from being rapidly cooled, so that the molten liquid can be uniformly solidified in the mold main body. Further, according to the present invention, it is preferable that the length of the normal direction 14 - 201247338 of the cooling suppressing member is 1/4 or more of the length of the main body of the mold main body, thereby reliably preventing the first inclined member or Since the molten metal injected into the mold main body from the tip end portion is abrupt after the inclined surface of the second inclined member flows, the molten liquid can be uniformly solidified in the mold main body. Further, according to the present invention, it is preferable that the cooling suppressing member adjusts the maximum maximum reaching temperature (°C) of the mold to 22% or more and 62% or less of the temperature (°C) of the Cu-Ga melt before being injected into the main body of the mold. In this way, the molten metal in the mold main body can be prevented from being rapidly cooled, and the molten metal can be uniformly and efficiently solidified in the mold. Further, according to the present invention, it is preferable that the Ga group of the Cu-Ga alloy ingot is 1 Oat% or more and 50 at% or less. Cu-Ga, which has a relatively large Ga composition, is a brittle material having a high hardness, and thus cracking may occur when a Cu-Ga alloy ingot is produced by a casting method. In the Cu-Ga ingot of the present invention, since the kinetic energy of the molten metal which is injected into the main body of the casting mold is reduced and the casting mold is used, the casting mold is produced by the melt casting method, so that the turtle can be suppressed. Further, according to the present invention, the sputtering target is produced by using a Cu-Ga alloy ingot which can suppress the occurrence of cracks. Thus, the sputtering of the present invention is used as a thin film-shaped sputtering target such as a light absorbing layer of a thin film type solar cell. Further, according to the method for producing a Cu-Ga alloy ingot according to the present invention, copper (Cu) and gallium (Ga) are built in the first crucible, and the pressure is reduced to below Li^Torr under the pressure at a temperature increase rate of 5 to 2 CTC/min. After heating to a temperature of 800 ° C to 1 ° C, it is kept at this temperature for 30 minutes to 12 hours and reduced. Such as the alloy of the cold body of the cold body, the ratio of gold to the body is cast by the molten alloy, the target is suitable for use. After pressing 100 to -15-201247338 8xl (T4T〇rr or less, the Cu-Ga alloy melt is obtained in the crucible. Then, the melt in the crucible is cast using the casting mold of the present invention. Specifically, The molten metal is supplied to the guide portion of the casting mold to inject the molten metal into the mold main body to perform casting. Then, the Cu-Ga alloy cast in the mold main body is cooled to room temperature, and then the main body of the mold is molded. The Cu-Ga alloy is taken out to obtain a Cu-Ga alloy mirror. In the method for producing a Cu-Ga alloy ingot according to the present invention, as described above, the Cu-Ga alloy melt is not directly injected into the mold body from the opening portion, but The guide portion is injected into the mold main body in a state where the kinetic energy is reduced. Thus, the convection of the molten metal when injected into the mold main body can be suppressed, so that the molten liquid can be uniformly solidified in the mold main body. A large Cu-Ga alloy ingot is produced by cracking. Further, in the method for producing a Cu-Ga alloy ingot according to the present invention, after the Cu-Ga alloy is taken out from the main body of the mold, the Cu-Ga alloy is at atmospheric pressure. Heating at a temperature of 450 ° C or higher and less than 700 ° C for 1 hour or more and 12 hours or less. Thus, in the Cu-Ga alloy ingot obtained by solidifying the molten metal in the mold main body, it can be suppressed Ga segregation occurs in Cu, and stress generated inside the Cu-Ga alloy ingot can be released. [Embodiment] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the drawings (casting mold). A perspective view showing the structure of the casting mold--16-201247338 100 according to the first embodiment of the present invention. In the first drawing, in order to make the internal structure of the casting mold 100 easy to understand, one side wall of the casting main body 1 is given. Fig. 2 is a cross-sectional view showing a structure of a casting mold 1〇〇. The casting mold 100 of the present embodiment is a mold used for producing a Cu-Ga alloy ingot by a melt casting method. The material of the mold 1 , can be exemplified by sand, metal, ceramics, graphite (carbon), etc. Among them, sand, ceramics, graphite, etc. are preferable in view of the viewpoint of not becoming a metal contamination source in the Cu-Ga alloy. Heat capacity and heat transfer From the viewpoint of high conductivity and high cooling efficiency, it is preferably graphite. The casting mold 1 includes a mold main body 1, a guide portion 100A, and a cooling suppressing member 3. The casting mold 1 of the present embodiment is guided by a crucible. Part 100A, as long as it can be oriented toward the opening of the mold body 1. The Cu-Ga alloy melt supplied from the portion 1 1 is introduced into the mold main body 1 so as to reduce the kinetic energy of the melt, and the structure thereof is not particularly limited. The guide portion 1 〇〇 A is a Cu-Ga alloy melt supplied to the opening portion 11 of the mold main body 1, and is not directly injected into the mold main body 1 from the opening portion 11. Specifically, the guide portion 100A has a supply portion to which the Cu-Ga alloy melt is directly supplied, a part of the peripheral portion of the supply portion is connected to the opening portion 11, and the other portion of the peripheral portion is inside the opening portion 11. Become a free end. The guide portion 100A is directly supplied with the supply surface of the Cu-Ga alloy melt, and may be formed in a stepped shape, for example, and may be inclined in a flat shape to form an inclined surface. In the present embodiment, the guide portion 1A is formed by the inclined member 2 which forms the inclined surface on the supply surface, -17-201247338. The mold main body 1 is for accommodating a Cu-Ga alloy melt. In the present embodiment, a bottomed rectangular tube is formed, and the opening portion 11 facing the bottom surface 12 has a rectangular shape. The opening portion 11 serves to supply Cu- The opening of the Ga alloy melt. The length of the inner peripheral surface of the mold main body 1 parallel to the long side of the opening 1 1 (hereinafter referred to as "longitudinal direction"), that is, the long side of the opening 1 1 of the inner peripheral surface of the mold main body 1 The length (hereinafter referred to as "long-side inner diameter") is XI, and the length of the inner peripheral surface of the mold main body 1 parallel to the short side of the opening portion 11 (hereinafter referred to as "short-side direction") Y, that is, the mold main body The length of the short side of the opening portion 11 of the inner peripheral surface of 1 (hereinafter referred to as "short side inner diameter") is Υ1, and the inner peripheral surface of the mold main body 1 is parallel to the normal line of the bottom surface 12 (hereinafter referred to as "normal" The length of the 」"), that is, the height of the inner peripheral surface of the mold main body 1 (hereinafter referred to as "height inner diameter") is Ζ1, and the size of the mold main body 1 is preferably such that the inner diameter XI of the long side of the opening portion 11 is L〇〇mm or more and 1 000 mm or less, the short side inner diameter of the opening U is ¥1 to 2 mm or more and 1 000 mm or less, and the height inner diameter Z1 of the mold main body 1 is 2 mm or more and 100 mm or less. More preferably, the long-side inner diameter XI of the opening portion is 150 mm or more and 800 mm or less, and the short-side inner diameter γι of the opening portion is 30 mm or more and 150 mm or less, and the main body of the mold is formed! The height inner diameter zi is 50 mm or more and 900 mm or less. Especially good, the opening! The long side inner diameter XI of i is 200 mm or more and 500 mm or less, the short side inner diameter Y1 of the opening portion 11 is 40 mm or more and 10 mm or less, and the height inner diameter Z1 of the mold main body 1 is 100 mm or more and 800 mm or less. Further, in the mold main body i, the long side inner diameter XI of the opening -18 - 201247338 portion 11 and the short side inner diameter Y1 of the opening portion 11 preferably have a relationship of X1 > Y1. If the size of the mold main body 1 is too small, the productivity of the Cu-Ga alloy ingot is lowered, and the Cu-Ga alloy melt is quenched, which may cause brittle fracture. Further, if the size of the mold main body 1 is too large, not only the stress is accumulated in the Cu-Ga alloy ingot after casting, but also the brittle fracture occurs, and the final solidification position of the Cu-Ga alloy melt is located at the center portion to become an internal defect. The reason for the occurrence. Further, in the mold main body 1, the ratio of the length of the long side inner diameter X1 of the opening portion 1 1 to the inner diameter Y1 of the short side of the opening portion 11 is Y1: XI is preferably 1:2 when Y1 is "1". 1:15»Y1: X1 is more preferably 1: 3~1: 10〇 In the case of XI値 in "Υ1: XI", the solidification form of the Cu-Ga alloy melt in the mold body 1 changes, stress The central portion of the normal direction Z is accumulated, which causes brittle fracture, and even if the temperature is gradually reduced in order to reduce the occurrence of stress, segregation may occur. Further, in the case where the X1値 in the "Y1: X1" is large, since the long-side inner diameter XI is larger than the short-side inner diameter Y1, in the plane parallel to the bottom surface 12 in the mold main body 1, 'for the Cu-Ga alloy The cooling of the melt is uneven, and the stress is increased to cause cracking. In addition, when the XI 値 is large in the "Y1: XI", when the Cu_Ga alloy ingot obtained after casting is picked up and processed, a large amount of force is applied to the central portion of the longitudinal direction X. The possibility of rupture in this part becomes higher. In addition, the internal volume of the mold main body 1 is matched with the casting temperature of the casting -19-201247338 and the casting main body of the cooling suppression member 3 which will be described later, in accordance with the conditions of the specific heat, density, thermal conductivity, and the like of the material constituting the casting mold 100. The condition of adjusting the temperature of 1 or the like may be appropriately selected. The inclined member 2 has an inclined surface 2 1 which extends from the short side of one of the opening portions 11 of the mold main body 1 toward the inner side in the longitudinal direction X and approaches the mold main body 1 toward the inner side. The way of the bottom surface 12 forms an inclination. Further, a gap G' is formed between the end portion 22 of the inclined member 2 closest to the bottom surface 12 of the mold main body 1 and the inner peripheral surface of the mold main body 1, and the gap G is made to flow along the inclined surface 2 of the inclined member 2. The Cu-Ga alloy melt is injected into the opening in the mold body 1. The shape of the inclined member 2 is not particularly limited, and a shape when viewed from the short side direction Y of the opening portion 11 of the mold main body 1 is a triangle, a trapezoid, a rectangle, or the like. Further, the arrangement position of the inclined member 2 is sufficient The position at which the amount of the Cu-Ga alloy melt injected into the mold main body 1 is ensured is also set to a position of a desired size even if the cast Cu-Ga alloy ingot is not particularly limited. In the case of the inclined member 2, when the height inner diameter Z 1 of the mold main body 1 is "1", the lowermost position of the inclined member 2 is preferably 1/2 or more from the lowest portion of the mold main body 1, and more preferably 3/. A place of 5 or more is particularly good for a place of 2/3 or more. When the lowermost portion of the inclined member 2 is disposed on the excessive lower side in the mold main body 1, the Cu-Ga alloy ingot obtained with respect to the internal volume ' of the mold main body 1 becomes small, and therefore it is preferable to be as far as possible in the mold main body 1. Configured on the upper side. In the case where the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 100 of the above structure, the Cu-Ga alloy melt is oriented toward the inclined member 2 of the opening portion 1 of the mold body 1 of the casting -20-201247338. The inclined surface 21 is supplied with the C u - G a alloy melt supplied to the inclined surface 2 1 of the inclined member 2, and the molten metal flows to the front end portion 2 2 with the inclined surface 21 . Then, the leading end of the Cu-Ga alloy melt is injected into the mold main body 1 so as to be along the inside of the mold main body 1 from the gap G formed between the tip end portion 22 and the inner peripheral surface of the mold main body. In the present embodiment, the inclined surface 21' of the inclined member is continuously provided from the inner side in the short side direction X of one of the opening portions u of the mold main body 1, and a gap is formed between the front end portion 22 and the inner peripheral surface of the mold 1. G, therefore, the Cu-Ga alloy melt injected into the mold 1 from the gap G is injected into the inner peripheral surface of the mold main body 沿着 along the inner peripheral surface including the other short side of the opening portion 11, thereby narrowing the edge Since the contact area of the Cu-Ga melted liquid injected into the inner peripheral surface of the mold main body 1 and the inner peripheral surface of the mold main body 1 is formed, the Cu-Ga alloy melt in the mold main body 1 can be rapidly cooled. Therefore, the surface of the Cu-Ga alloy ingot obtained after casting is prevented from being roughened. When the Cu-Ga alloy is produced by the melt casting method using the casting mold 100 of the present embodiment, as described above, the Cu-Ga alloy is melted directly from the opening portion 1 1 into the mold main body 1, but along the pouring member. The gap G formed between the front end portion 22 and the surface of the mold main body 1 after flowing through the inclined surface 21 of 2 is injected into the mold main body 1 along the inner circumferential surface of the mold main body 1, so that the injection mold main body 1 can be reduced. The kinetic energy of the melt prevents splashing of the melt caused by collision with the inside of the mold main body 1 (especially the bottom surface 12) at the time of injection. Thus, convection of the melt in the mold main body 1 can be suppressed, and the melt can be prevented from flying. The direction of the circumference 2 along the edge of the body 2 is toward the main body. For example, the gold melt prevents the casting liquid from being inclined in the inner circumference. When the inner surface is sprayed, the molten metal is uniformly solidified in the main body 1 of the mold. In this way, a large Cu-Ga alloy ingot can be produced by suppressing the occurrence of cracks and the occurrence of internal defects. Further, the angle formed by the inclined surface 21 of the inclined member 2 and the bottom surface 12 of the mold main body 1, i.e., the inclination angle θ, is preferably 10. Above 70. The following is more preferably 15° or more and 60° or less, and particularly preferably 20. Above 40°. When the inclination angle is too small, the flow rate of the Cu-Ga alloy melt flowing over the inclined surface 21 becomes too slow. 'The solidification state of the Cu-Ga alloy melt at the initial stage of casting and the end of casting is different, not only the Cu after casting. The -Ga alloy ingot is cracked, and there is a problem that solidification of the Cu-Ga alloy melt occurs on the inclined surface 21 and solidification cannot be performed in the mold main body 1. When the inclination angle Θ is too large, the flow rate of the Cu-Ga alloy melt flowing through the inclined surface 21 becomes too fast, and the Cu-Ga alloy melt injected into the mold body 1 undergoes strong convection, while casting After the Cu-Ga alloy ingot is cracked. Further, the area of the gap G formed between the distal end portion 22 of the inclined member 2 and the inner circumferential surface of the mold main body 1 is preferably 500 mm 2 or more and 3,000 mm 2 or less, more preferably 600 mm 2 or more and 2100 mm 2 or less. When the gap G area is too small, the Cu-Ga alloy melt flowing along the inclined surface 21 cannot be smoothly injected into the mold main body 1. There is a solidification of the Cu-Ga alloy melt on the inclined surface 21, and the mold is molded. The problem that the main body cannot be solidified. Further, when the gap G area is excessively large, the Cu-Ga alloy melt injected into the mold main body 1 is strongly convected, and the cast Cu-Ga alloy ingot is cracked. -22-201247338 Further, the length X2 of the longitudinal direction X when the inclined member 2 is viewed from the normal direction Z may be appropriately set in accordance with the inclination angle Θ of the inclined surface 21, the area of the gap G, and the like. Further, the casting mold 100 of the present embodiment includes the cooling suppressing member 3. The cooling suppressing member 3 is disposed on the outer peripheral surface of the mold main body 1 in a normal direction Z with respect to the bottom surface 12 of the mold main body 1 so as to cover a predetermined region on the lower side in the normal direction Z in which the bottom surface 12 is formed. This cooling suppressing member 3 can suppress the Cu-Ga alloy melt injected into the mold main body 1 from being excessively cooled. In this way, the gap G formed between the front end portion 22 and the inner peripheral surface of the mold main body 1 after flowing along the inclined surface 21 of the inclined member 2 is injected into the molten metal in the mold main body 1 along the inner peripheral surface of the mold main body 1. The liquid allows the melt to be uniformly solidified in the mold main body 1 because rapid cooling can be prevented. The cooling suppressing member 3 is not particularly limited as long as it exerts at least one of the heat retaining effect and the heating effect on the lower portion of the mold main body 1. Examples of the heat insulating material that can exhibit the heat insulating effect include glass wool and KRECA felt which are generally used as heat insulating materials, and aramid fiber sheets which are used as a refractory material, and can be used as a heating material which can exhibit a heating effect. List tube heaters, etc. Further, the length of the cooling suppression member 3 in the normal direction Z (the height of the cooling suppression member 3) Z3 is preferably 1/4 or more with respect to the length of the normal direction z of the mold main body 1 (the height of the mold main body 1) Z2. /4 or less, more preferably 3/10 or more and 2/3 or less, and particularly preferably 2/5 or more and 3/5 or less. In this way, the gap G formed between the front end portion 22 and the inner peripheral surface of the main body of the mold main -23-201247338 is flowed along the inclined surface 21 of the inclined member 2, and is injected along the inner peripheral surface of the mold main body 1. The molten liquid in the mold main body 1 can more reliably prevent rapid cooling from occurring. Further, the cooling suppressing member 3 can adjust the highest reaching temperature (° C.) on the lower side of the mold main body 1 to 22% or more of the temperature (casting temperature ° C ) of the Cu-Ga alloy melt before being injected into the mold main body 1 . % or less (preferably), more preferably 25% or more and 50% or less. When the temperature of the mold main body 1 by the cooling suppression member 3 is too low, the heat insulating or heating effect on the lower side region of the mold main body 1 is not good. Since the temperature gradient in the normal direction Z of the mold main body 1 becomes large, the Cu-Ga alloy ingot after casting is likely to be cracked. Further, in the case where the mold main body 1 of the cooling suppression member 3 is adjusted to have a too high temperature, since the cooling rate is too slow, the stress concentrates on the final solidification position of the Cu-Ga alloy melt, which not only causes the Cu-Ga alloy casting after casting. Cracking occurs and there is a segregation. Fig. 3 is a perspective view showing a structure of a casting mold according to a second embodiment of the present invention. In Fig. 3, in order to make the internal structure of the casting mold 200 easy to understand, one side wall of the mold main body 1 is omitted. Fig. 4 is a cross-sectional view showing the structure of a casting mold 200. The casting mold 200' is similar to the casting mold 10 of the first embodiment, and the same reference numerals will be given to the corresponding portions, and the description thereof will be omitted. The casting mold 200' has a structure in which the guide portion 200A (the Cu-Ga alloy melt supplied to the opening portion 1 1 of the mold main body 1 is guided to reduce the kinetic energy of the melt and injected into the mold main body 1) and the foregoing Guide-24 · 201247338 The same structure as the casting mold 1〇〇 is used except for the 100A. The guide portion 1 of the casting mold 100 is formed of i tilt members 2. The guide portion 200A of the casting mold 200 is the first inclined member 20 1 and the second inclined member. 2 0 2 constitutes. The first inclined member 209 has a first inclined surface 211 1 which extends from the short side of the opening portion 11 of the mold main body 1 toward the inner side in the longitudinal direction X. The inner side is inclined to approach the bottom surface 12 of the mold main body 1. The second inclined member 202 is disposed to face the first inclined member 201 in the longitudinal direction X (the direction parallel to the bottom surface 12). The second inclined member 202 has a second inclined surface 202 1 which extends from the other short side of the opening portion 11 of the mold main body 1 toward the inner side in the longitudinal direction X. The inner side is inclined to approach the bottom surface 12 of the mold main body i. The front end portion of the first inclined member 201 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the front end portion 20?2, does not contact the inclined surface of the second inclined member 202, that is, the second inclined surface 2021; The front end portion of the second inclined member 202 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the second front end portion 2 0 2 2 does not contact the inclined surface of the first inclined member 210, that is, the first inclined surface 201 1. Further, the first inclined member 201 and the second inclined member 202 are disposed such that the i-th front end portion 2012 and the second distal end portion 2022 are located at different positions in the direction (longitudinal direction X) parallel to the bottom surface 12 of the mold main body 1. Further, in the present embodiment, the first inclined member 209 and the second inclined member 202 are arranged such that the first front end portion 2012 and the second front end portion -25 - 201247338 portion 202 2 are located on the bottom surface 12 of the mold main body 1 . Further, in the parallel parallel plane, a gap G1 is formed between the first front end portion 2012 and the second front end portion 2022 in the central portion in the longitudinal direction X of the opening portion 1 of the mold main body 1. The shape of the first slanting member 201 and the second slanting member 202 is not particularly limited, and examples of the shape from the short side direction Y of the opening portion 11 of the mold main body 1 include a triangle, a trapezoid, a rectangle, and the like. In addition, the position of the first slanting member 201 and the second slanting member 202 is a Cu-Ga alloy ingot after the casting, as long as the position of the amount of the Cu-Ga gold melt injected into the mold main body 1 can be sufficiently ensured. The position of the desired size is not particularly limited. In the first inclined structure 201 and the second inclined member 202, the height of the inner diameter Z1 of the mold main body 1 is "1". The lowermost position of the first inclined member 201 and the second inclined member 202 is preferably arranged in the lowermost position. The place where the lowest part of the mold main body 1 is 1⁄2 or more is more preferably placed in a place of 3 / 5 or more, and is placed in a place of 2/3 or more. When the lowermost portion of each of the first inclined member 201 and the second inclined member 2〇2 is disposed excessively on the lower side in the mold main body, the obtained Cu_Ga gold ingot becomes smaller with respect to the internal volume of the mold main body 1 In the mold main body 1, it is preferable to arrange the Cu-Ga alloy cast by the casting method using the casting mold 200 of the above structure on the upper side as much as possible, and the Cu-Ga alloy melt is oriented toward the opening provided in the mold main body 1. The inclined surface of the first inclined member 201 of the portion 1 1 , that is, the first inclined surface 201 1 is supplied. The Cu-Ga alloy melt supplied to the first inclined surface 2〇ι of the first inclined structure 201, and a part of the casting gap is specially formed into pieces for each of the preferred oblique squared ingots to be placed along the -26-201247338 The first inclined surface 201 1 flows, and the remaining portion splashes from the first inclined surface 201 1 to the second inclined surface 202 1 of the second inclined member 202 and then flows along the second inclined surface 202 1 . The molten material flowing along the first inclined surface 201 1 reaches the first distal end portion 2012, and the molten liquid flowing along the second inclined surface 202 1 reaches the second distal end portion 2022. Then, the molten liquid that has reached the first distal end portion 20 12 and the second distal end portion 2022 is injected into the mold main body 1. When the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 200 of the present embodiment, as described above, the Cu-G a alloy melt is not directly injected into the prayer main body 1 from the opening U. It flows along the first inclined surface 201 1 and the second inclined surface 202 1 and is formed between the first front end portion 2012 and the second front end portion 2022 in the central portion in the longitudinal direction X of the opening portion 11 of the mold main body 1 . The gap G1 is injected into the mold body 1, so that the kinetic energy of the melt when injected into the mold body 1 can be reduced. Thus, the convection of the molten liquid when injected into the mold main body 1 can be suppressed, so that the molten metal can be uniformly solidified in the mold main body 1. Therefore, a large Cu-Ga alloy ingot can be produced by suppressing cracking. Further, the angle formed by the first inclined surface 201 1 of the first inclined member 201 and the bottom surface 12 of the mold main body 1 , that is, the first inclined angle θ 1 and the second inclined surface 202 1 of the second inclined member 202 and the mold main body The angle formed by the bottom surface 12 of 1, that is, the second inclination angle θ2 is preferably 10. Above 70° or less is more preferably 15. Above 60. Below, the special is 20. Above 40 ° below. When the first inclination angle 01 and the second inclination angle 02 are too small, the flow rate when the C u - G a alloy melt flows through the first inclined surface 2 〇丨1 and the second inclined surface 2 0 2 1 Slow, at the beginning of casting and at the end of casting -27- 201247338

Cu-Ga合金熔融液的凝固狀態不同，不僅在鑄造後的cu-Ga合金鑄錠會發生龜裂，而存在著：在第1傾斜面2011 及第2傾斜面202 1上發生Cu-Ga合金熔融液的凝固、在 鑄模主體1內無法凝固的問題。第1傾斜角度Θ1及第2 傾斜角度Θ2過大的情況，Cu_Ga合金熔融液流過第1傾 斜面20 1 1及第2傾斜面202 1時的流過速度變得過快，注 入鑄模主體1內之Cu-Ga合金熔融液會發生強烈對流，而 使鑄造後的Cu-Ga合金鑄錠發生龜裂。 又在第1傾斜構件201及第2傾斜構件202，第1傾 斜面201 1之第1傾斜角度01與第2傾斜面202 1之第2 傾斜角度Θ2是相同或不同皆可。 此外’在鑄模主體1之開口部11的長邊方向X中央 部’第1傾斜構件2 01的第1前端部2 012和第2傾斜構 件2 02的第2前端部2022間所形成之間隙G1面積，較 佳爲500mm2以上、3000mm2以下，更佳爲600mm2以 上、2100mm2以下。當間隙G1面積過小的情況，沿著第 1傾斜面201 1及第2傾斜面202 1流過之Cu-Ga合金熔融 液無法平順地注入鑄模主體1內，而存在著：在第i傾斜 面2011及第2傾斜面2021上發生Cu-Ga合金熔融液的凝 固、在鑄模主體1內無法凝固的問題。此外，當間隙G 1 面積過大的情況’注入鑄模主體1內之Cu-Ga合金熔融液 發生強烈對流，而使鑄造後的Cu-Ga合金鑄錠發生龜裂》 又將第1傾斜構件201從法線方向Z觀察時的長邊方 向X的長度X3、及將第2傾斜構件202從法線方向Z觀 -28 - 201247338 察時的長邊方向X的長度X4，按照前述第丨傾斜面2011 的第1傾斜角度θ 1、第2傾斜面2 0 21的第2傾斜角度 Θ2、間隙G 1面積等而適當設定即可。 第5圖係顯示本發明的第3實施方式之鑄造用鑄模 300構造之截面圖。鑄造用鑄模300，是與前述第2實施 方式的鑄造用鑄模200類似，對於相對應的部分是賦予相 同參照符號而省略其說明。 鑄造用鑄模300，除了導引部300A(將朝向鑄模主體 1的開口部1 1供應之Cu-Ga合金熔融液以減少該熔融液 動能的方式導引並注入鑄模主體1內）之第1傾斜構件 3 01及第2傾斜構件3〇2的構造是與前述導引部200A之 第1傾斜構件201及第2傾斜構件202不同以外，是採用 與鑄造用鑄模200相同的構造。 鑄造用鑄模3 00之第1傾斜構件3 0 1具有第1傾斜面 3 0 1 1 ’該第1傾斜面3 01 1是從鑄模主體1之開口部1 1的 一方短邊朝向內方延伸，以隨著朝向內方而接近鑄模主體 1之底面12的方式形成傾斜。鑄造用鑄模300之第2傾 斜構件302是在長.邊.方向X設置成與第！.傾斜構件301 相對向。該第2傾斜構件3 02具有第2傾斜面3 02 1，該 第2傾斜面3021是從鑄模主體1之開口部11的另一方短 邊朝向內方延伸’以隨著朝向內方而接近鑄模主體1之底 面1 2的方式形成傾斜。 第1傾斜構件3 01之前端部（最接近鑄模主體1之底 面12的部分）、即第1前端部3012，不接觸第2傾斜構 -29- 201247338 件302的傾斜面、即第2傾斜面302 1 ;第2傾斜構件302 之前端部（最接近鑄模主體1之底面12的部分）、即第2 前端部3022，不接觸第1傾斜構件301的傾斜面、即第1 傾斜面3011。而且，將第1傾斜構件301和第2傾斜構 件3 02配置成，使第1前端部3012和第2前端部3022在 與鑼模主體1之底面12平行的方向（長邊方向X)位於不 同位置。 在前述鑄造用鑄模200中，雖是將第1傾斜構件201 和第2傾斜構件2 0 2配置成，使第1前端部2 01 2和第2 前端部2022位於與鑄模主體1的底面12平行之同一平面 上；但在鑄造用鑄模3 00中，則是將第1傾斜構件3 01和 第2傾斜構件302配置成，不是使第1前端部3012和第 2前端部3 02 2位於與底面12平行的同一平面上，而是使 第1前端部3012位於第2前端部3022之法線方向Z的上 方。此外，將鑄造用鑄模300從法線方向Z觀察的情況， 看不到第1傾斜構件3 0 1和第2傾斜構件3 0 2重疊的部 分。 使用以上構造的鑄造用鑄模300將Cu-Ga合金鑄錠藉 由熔鑄法製作的情況，Cu-Ga合金熔融液是朝向設置於鑄 模主體1的開口部1 1之第1傾斜構件3 01的傾斜面、即 第1傾斜面3 〇 1 1供應。供應至第1傾斜構件3 01的第1 傾斜面3 0 1 1之C u - G a合金熔融液，一部分沿著第1傾斜 面3 0 1 1流過，剩餘部分從第1傾斜面3 01 1飛濺到第2傾 斜構件302的第2傾斜面302 1後，沿著第2傾斜面302 1 -30- 201247338 流過。沿著第1傾斜面3 01 1流過之熔融液到達第1前端 部3 Ο 1 2 ’沿著第2傾斜面3 0 2 1流過之熔融液到達第2前 端部3 022。接著，到達第丨前端部3012以及第2前端部 3 022後的熔融液被注入鑄模主體！內。 使用本實施方式的鑄造用鑄模3 00將Cu-Ga合金鑄錠 藉由熔鑄法製作的情況，如前述般，Cu-Ga合金熔融液不 是從開口部1 1直接注入鑄模主體1內，而是沿著第i傾 斜面3011及第2傾斜面3 02 1流過後，從第1前端部 3012及第2前端部3022注入鑄模主體1內，因此能減少 注入鑄模主體1內時的熔融液之動能。如此，可抑制注入 鑄模主體1內時熔融液發生對流，而能在鑄模主體1內讓 熔融液均一地凝固。因此，可抑制龜裂發生而製造出大型 Cu-Ga合金鑄錠。 第6圖係顯示本發明的第4實施方式之鑄造用鑄模 4〇〇構造之截面圖。鑄造用鑄模400，是與前述第2實施 方式的鑄造用鑄模2 0 0類似，對於相對應的部分是賦予同 —參照符號而省略其說明。 鑄造.用鑄模400，除了導引部400A(將朝向鑄模主體 1的開口部1 1供應之Cu-Ga合金熔融液以減少該熔融液 動能的方式導引並注入鑄模主體1內）之第1傾斜構件 401及第2傾斜構件402的構造，與前述導引部200A之 第1傾斜構件201及第2傾斜構件202不同以外，是採用 與鑄造用鑄模200同樣的構造。 鑄造用鑄模4 0 0之第1傾斜構件4 0 1具有第1傾斜面 -31 - 201247338 40 1 1，該第1傾斜面40 1 1是從鑄模主體1之開口部1 1的 一方短邊朝向內方延伸，以隨著朝向內方而接近鑄模主體 1之底面12的方式形成傾斜。鑄造用鑄模400之第2傾 斜構件402，是在長邊方向X設置成與第1傾斜構件401 相對向。該第2傾斜構件402具有第2傾斜面402 1，該 第2傾斜面402 1是從鑄模主體1之開口部1 1的另一方短 邊朝向內方延伸，以隨著朝向內方而接近鑄模主體1之底 面1 2的方式形成傾斜》 第1傾斜構件40 1的前端部（最接近鑄模主體1之底 面12的部分）、即第1前端部4012，不接觸第2傾斜構 件402的傾斜面、即第2傾斜面402 1 ;第2傾斜構件402 的前端部（最接近鑄模主體1之底面12的部分）、即第2 前端部4022，不接觸第1傾斜構件401的傾斜面、即第1 傾斜面4 01 1。而且，將第1傾斜構件4 01和第2傾斜構 件4〇2配置成，使第1前端部4012和第2前端部4022在 與鑄模主體1的底面12平行的方向（長邊方向X)位於不 同位置。 在前述鑄造用鑄模200，雖是將第1傾斜構件20〗和 第2傾斜構件2〇2配置成，使第1前端部2012和第2前 端部2022位於與鑄模主體1的底面12平行的同一平面 上；在鑼造用鑄模400，則是將第1傾斜構件401和第2 傾斜構件402配置成，不是使第1前端部4012和第2前 端部4022位於與底面12平行的同一平面上，而是使第1 前端部4012位於第2前端部4022之法線方向Z的上方。 -32- 201247338 此外’將鑄造用鑄模400從法線方向Z觀察的情況，可看 到第1傾斜構件40 1和第2傾斜構件402重疊的部分。 使用以上構造的鑄造用鑄模400將Cu-Ga合金鑄錠藉 由熔鑄法製作的情況’ Cu-Ga合金熔融液，是朝向設置於 鑄模主體1的開口部1 1之第1傾斜構件40 1的傾斜面、 即第1傾斜面4 01 1供應。供應至第1傾斜構件4 〇丨的第 1傾斜面401 1之Cu-Ga合金熔融液，一部分沿著第1傾 斜面4 0 1 1流過，剩餘部分從第1傾斜面4 0 1 1飛濺到第2 傾斜構件4 0 2的第2傾斜面4 0 2 1後，沿著第2傾斜面 4021流過。沿著第1傾斜面4011流過的熔融液到達第1 前端部4012，然後往第2傾斜面402 1上落下，再沿著第 2傾斜面4021流過》沿著第2傾斜面402 1流過的熔融液 到達第2前端部4022。接著，到達第2前端部4022後的 熔融液被注入鑄模主體1內。 使用本實施方式的鑄造用鑄模400將Cu-Ga合金鑄錠 藉由熔鑄法製作的情況，如前述般，Cu-Ga合金熔融液不 是從開口部1 1直接注入鑄模主體1內，而是沿著第1傾 斜面4〇11及第2傾斜面402 1流過後，從第2前端部 4022注入鑄模主體1內，因此可減少注入鑄模主體1內 時的熔融液動能。如此，可抑制注入鑄模主體1內時的熔 融液發生對流，而能在鑄模主體1內讓熔融液均一地凝 固。因此，可抑制龜裂發生而製造出大型Cu-Ga合金鑄 錠。 -33- 201247338 (Cu-Ga合金鑄錠） 本實施方式之Cu-Ga合金鑄錠，是由藉由熔鑄法所製 作的Cu-Ga合金構成。Cu-Ga合金中的Ga組成比，並沒 有特別的限定，較佳爲l〇at%以上、50at%以下，更佳爲 20at%以上、40 at%以下。又在本發明，「at%」表示原子 百分率，是指Cu-Ga合金全體的原子數爲1〇〇的情況之特 定元素（Ga)的原子數，是作爲「莫耳％」的同義詞。The solidification state of the Cu-Ga alloy melt differs not only in the cu-Ga alloy ingot after casting, but also in the Cu-Ga alloy on the first inclined surface 2011 and the second inclined surface 202 1 The solidification of the melt does not cause solidification in the mold body 1. When the first inclination angle Θ1 and the second inclination angle Θ2 are excessively large, the flow rate when the Cu_Ga alloy melt flows through the first inclined surface 20 1 1 and the second inclined surface 202 1 becomes too fast, and is injected into the mold main body 1 The Cu-Ga alloy melt undergoes strong convection, and the cast Cu-Ga alloy ingot is cracked. Further, in the first inclined member 201 and the second inclined member 202, the first inclination angle 01 of the first inclined surface 201 1 and the second inclination angle Θ2 of the second inclined surface 202 1 may be the same or different. Further, 'the center portion in the longitudinal direction X of the opening portion 11 of the mold main body 1', the gap G1 formed between the first distal end portion 2 012 of the first inclined member 209 and the second distal end portion 2022 of the second inclined member 902 The area is preferably 500 mm 2 or more and 3000 mm 2 or less, more preferably 600 mm 2 or more and 2100 mm 2 or less. When the area of the gap G1 is too small, the Cu-Ga alloy melt flowing along the first inclined surface 201 1 and the second inclined surface 202 1 cannot be smoothly injected into the mold main body 1, but there is: the i-th inclined surface The solidification of the Cu-Ga alloy melt on the 2011 and the second inclined surface 2021 causes a problem that solidification cannot be performed in the mold main body 1. Further, when the area of the gap G 1 is excessively large, the Cu-Ga alloy melt injected into the mold main body 1 is strongly convected, and the cast Cu-Ga alloy ingot is cracked. The first inclined member 201 is again The length X3 of the longitudinal direction X when the normal direction Z is observed, and the length X4 of the longitudinal direction X when the second inclined member 202 is viewed from the normal direction Z -28 - 201247338, according to the aforementioned first inclined surface 2011 The first inclination angle θ 1 , the second inclination angle 第 2 of the second inclined surface 2 0 21 , the area of the gap G 1 , and the like may be appropriately set. Fig. 5 is a cross-sectional view showing the structure of a casting mold 300 according to a third embodiment of the present invention. The casting mold 300 is similar to the casting mold 200 of the second embodiment, and the same reference numerals will be given to the corresponding portions, and the description thereof will be omitted. The casting mold 300 is the first tilt of the guide portion 300A (the Cu-Ga alloy melt supplied toward the opening portion 1 of the mold main body 1 is guided to reduce the kinetic energy of the melt and injected into the mold main body 1). The structure of the member 301 and the second slanting member 3 〇 2 is the same as that of the casting mold 200 except for the first slanting member 201 and the second slanting member 202 of the guiding portion 200A. The first inclined member 301 of the casting mold 300 has a first inclined surface 3 0 1 1 '. The first inclined surface 311 1 extends inward from one short side of the opening 1 1 of the mold main body 1 . The inclination is formed so as to approach the bottom surface 12 of the mold main body 1 toward the inner side. The second inclined member 302 of the casting mold 300 is set in the long side and the direction X. The inclined members 301 are opposed to each other. The second inclined member 312 has a second inclined surface 312, and the second inclined surface 3021 extends inward from the other short side of the opening portion 11 of the mold main body 1 to approach the mold as it goes inward. The manner in which the bottom surface 12 of the main body 1 is formed is inclined. The front end portion of the first inclined member 3 01 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the first front end portion 3012 does not contact the inclined surface of the second inclined structure -29-201247338 member 302, that is, the second inclined surface. 302 1 ; The front end portion of the second inclined member 302 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the second front end portion 3022 does not contact the inclined surface of the first inclined member 301, that is, the first inclined surface 3011. Further, the first inclined member 301 and the second inclined member 312 are disposed such that the first distal end portion 3012 and the second distal end portion 3022 are different in the direction (longitudinal direction X) parallel to the bottom surface 12 of the die body 1 position. In the casting mold 200 for casting, the first inclined member 201 and the second inclined member 220 are disposed such that the first distal end portion 012 and the second distal end portion 2022 are located parallel to the bottom surface 12 of the mold body 1. On the same plane, in the casting mold 300, the first inclined member 301 and the second inclined member 302 are disposed such that the first front end portion 3012 and the second front end portion 032 2 are not located on the bottom surface. The first front end portion 3012 is located above the normal direction Z of the second front end portion 3022 on the same plane parallel to the 12th. Further, when the casting mold 300 is viewed from the normal direction Z, the portion where the first inclined member 301 and the second inclined member 030 are overlapped is not seen. When the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 300 having the above-described structure, the Cu-Ga alloy melt is inclined toward the first inclined member 301 provided in the opening portion 1 of the mold main body 1. The surface, that is, the first inclined surface 3 〇1 1 is supplied. The C u - G a alloy melt supplied to the first inclined surface 3 0 1 1 of the first inclined member 301 flows partially along the first inclined surface 3 0 1 1 , and the remaining portion passes from the first inclined surface 3 01 1 splashes on the second inclined surface 302 1 of the second inclined member 302 and then flows along the second inclined surface 302 1 -30- 201247338. The molten liquid flowing along the first inclined surface 301 1 reaches the first front end portion 3 Ο 1 2 ' The molten liquid flowing along the second inclined surface 3 0 2 1 reaches the second front end portion 3 022. Then, the molten liquid that has reached the second end portion 3012 and the second front end portion 3 022 is injected into the mold main body! Inside. When the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 300 of the present embodiment, the Cu-Ga alloy melt is not directly injected into the mold main body 1 from the opening portion 1 as described above, but is instead After flowing along the i-th inclined surface 3011 and the second inclined surface 312 1 , the first distal end portion 3012 and the second distal end portion 3022 are injected into the mold main body 1 , so that the kinetic energy of the molten metal when injected into the mold main body 1 can be reduced. . Thus, the convection of the molten metal when injected into the mold main body 1 can be suppressed, and the molten metal can be uniformly solidified in the mold main body 1. Therefore, a large-sized Cu-Ga alloy ingot can be produced by suppressing the occurrence of cracks. Fig. 6 is a cross-sectional view showing the structure of a casting mold according to a fourth embodiment of the present invention. The casting mold 400 is similar to the casting mold 200 of the second embodiment, and the same reference numerals will be given to the corresponding portions, and the description thereof will be omitted. The casting mold 400 is the first in addition to the guide portion 400A (the Cu-Ga alloy melt supplied toward the opening portion 1 of the mold main body 1 is guided to reduce the kinetic energy of the melt and injected into the mold main body 1). The structure of the inclined member 401 and the second inclined member 402 is the same as that of the casting mold 200 except that the first inclined member 201 and the second inclined member 202 of the guiding portion 200A are different from each other. The first inclined member 401 of the casting mold 400 has a first inclined surface -31 - 201247338 40 1 1 , and the first inclined surface 40 1 1 is oriented from one short side of the opening 1 1 of the mold main body 1. The inner side is extended to form an inclination so as to approach the bottom surface 12 of the mold main body 1 toward the inner side. The second inclined member 402 of the casting mold 400 is disposed to face the first inclined member 401 in the longitudinal direction X. The second inclined member 402 has a second inclined surface 4021 that extends inward from the other short side of the opening 1 1 of the mold main body 1 to approach the mold as it goes inward. The front end portion of the first inclined member 40 1 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the first front end portion 4012, does not contact the inclined surface of the second inclined member 402. That is, the second inclined surface 402 1 ; the front end portion of the second inclined member 402 (the portion closest to the bottom surface 12 of the mold main body 1), that is, the second front end portion 4022 does not contact the inclined surface of the first inclined member 401, that is, the first 1 Inclined face 4 01 1. Further, the first inclined member 401 and the second inclined member 〇2 are disposed such that the first distal end portion 4012 and the second distal end portion 4022 are located in a direction (longitudinal direction X) parallel to the bottom surface 12 of the mold main body 1. different positions. In the casting mold 200 for casting, the first inclined member 20 and the second inclined member 2〇2 are disposed such that the first distal end portion 2012 and the second distal end portion 2022 are located in parallel with the bottom surface 12 of the mold main body 1. In the casting mold 400, the first inclined member 401 and the second inclined member 402 are disposed such that the first distal end portion 4012 and the second distal end portion 4022 are not placed on the same plane parallel to the bottom surface 12, Instead, the first distal end portion 4012 is positioned above the normal direction Z of the second distal end portion 4022. -32-201247338 Further, when the casting mold 400 is viewed from the normal direction Z, the portion where the first inclined member 40 1 and the second inclined member 402 overlap can be seen. In the case where the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 400 having the above-described structure, the Cu-Ga alloy melt is directed toward the first inclined member 40 1 provided in the opening 1 1 of the mold main body 1. The inclined surface, that is, the first inclined surface 401 is supplied. The Cu-Ga alloy melt supplied to the first inclined surface 401 1 of the first inclined member 4 , flows partially along the first inclined surface 4 0 1 1 , and the remaining portion is splashed from the first inclined surface 4 0 1 1 After the second inclined surface 4 0 2 1 of the second inclined member 420, the second inclined surface 4021 flows. The molten metal flowing along the first inclined surface 4011 reaches the first front end portion 4012, and then falls onto the second inclined surface 402 1 and flows along the second inclined surface 4021" flows along the second inclined surface 402 1 The passed melt reaches the second tip end portion 4022. Then, the molten liquid that has reached the second tip end portion 4022 is injected into the mold main body 1. When the Cu-Ga alloy ingot is produced by the melt casting method using the casting mold 400 of the present embodiment, as described above, the Cu-Ga alloy melt is not directly injected into the mold main body 1 from the opening portion 1, but along the After the first inclined surface 4〇11 and the second inclined surface 4021 flow, the second tip end portion 4022 is injected into the mold main body 1. Therefore, the kinetic energy of the melt when injected into the mold main body 1 can be reduced. Thus, the convection of the molten metal when injected into the mold main body 1 can be suppressed, and the molten metal can be uniformly solidified in the mold main body 1. Therefore, a large Cu-Ga alloy ingot can be produced by suppressing the occurrence of cracks. -33-201247338 (Cu-Ga alloy ingot) The Cu-Ga alloy ingot of the present embodiment is composed of a Cu-Ga alloy produced by a melt casting method. The Ga composition ratio in the Cu-Ga alloy is not particularly limited, but is preferably l〇at% or more and 50 at% or less, more preferably 20 at% or more and 40 at% or less. Further, in the present invention, "at%" means the atomic percentage, and refers to the atomic number of a specific element (Ga) in the case where the total number of atoms of the Cu-Ga alloy is 1 Å, which is a synonym for "mol%".

Ga濃度低的情況，由於會在Cu中產生Ga固溶，可 減少龜裂發生。Ga濃度過高的情況，由於超過固溶界 限，會形成金屬間化合物而使龜裂發生變多，且在鑄造時 容易引起偏析。When the Ga concentration is low, the formation of Ga solid solution in Cu can reduce the occurrence of cracks. When the Ga concentration is too high, the intermetallic compound is formed to exceed the solid solution limit, and the occurrence of cracks is increased, and segregation is likely to occur during casting.

Ga組成比較大的Cu-Ga合金，是屬於硬度高之脆性 材料，因此在將Cu-Ga合金鑄錠藉由熔鑄法製造時會有發 生龜裂之虞。針對此，本實施方式的Cu-Ga合金鑄錠，是 使用本责施方式的鑄造用鑄模1〇〇,200,300,400(可減少注 入鑄模主體1內時之熔融液的動能）而藉由熔鑄法所製作 出，因此能夠抑制龜裂發生。 (濺鍍靶） 本實施方式的濺鍍靶，是使用本實施方式的Cu-Ga合 金鑄錠所製作出。作爲將Cu-Ga合金鑄錠加工成濺鍍靶的 方法，可採用：線放電加工、放電加工、雷射加工、使用 硏削機之鑽石切斷加工、切削加工、噴水加工、線鋸、鋸 片切割等一般的方法。在這些加工方法中，考慮到Cu-Ga -34- 201247338 合金屬於硬度高之脆性材料時，較佳爲線放電加工、放電 加工、雷射加工、線鋸、噴水加工等，更佳爲線放電加 工、線鋸，最佳爲線放電加工。 將Cu-Ga合金鑄錠藉由線放電加工予以加工成濺鍍靶 的情況，較佳爲使用0.1mm以上、0.4mm以下的線材， 更佳爲使用0.2mm以上、0.4mm以下的線材。此外，線 放電加工的切斷速度（加工速度）較佳爲0.1mm/分以上、 8mm/分以下，更佳爲0.1mm/分以上、3mm/分以下。關於 線材的粗細，當過細時，成爲線材在加工中斷裂的原因； 又關於加工速度，當過慢時會造成生產性降低，當過快時 成爲破裂的原因。 本實施方式的濺鍍靶，是使用可抑制龜裂發生之本實 施方式的Cu-Ga合金鑄錠所製作出，因此適用於作爲例如 薄膜型太陽電池之光吸收層的薄膜形成用濺鍍靶。 (Cu-Ga合金鑄錠之製造方法） 本實施方式的Cu-Ga合金鑄錠之製造方法，首先在坩 堝內置入銅（Cu)及鎵（Ga)的必要量。此時的置入量，可按 照增渦尺寸、或鑄造用鑄模尺寸、鑄造用鑄模個數而適當 地選定。然後’將放入坩堝後之腔室內減壓至1 0-iTorr以 下。 當確認腔室內被減壓到10·iTorr以下後，在此壓力下 以昇溫速度5〜2 0°C/分、較佳爲分昇溫至 8 00°C〜1 1 00 °C的溫度。昇溫速度過快時，有引起突沸的可 -35- 201247338 能性，昇溫速度過慢時會造成生產性降低。昇溫後的保持 溫度（鑄造溫度），是按照合金組成的熔點、鑄造用鑄模的 材料、體積、比熱、密度等而改變。例如、合金組成熔點 爲8 5 0°C的情況，昇溫後的保持溫度（鑄造溫度）較佳爲 9 0 0 °C以上、1 0 0 0 °C以下，更佳爲9 3 0 °C以上、9 7 0 °C以下。 又在大氣中進行昇溫的情況，會發生原料氧化等的問題， 而造成良率降低。 然後，在昇溫後的溫度（鑄造溫度）下較佳爲保持3 0 分鐘〜1 2小時，更佳爲保持1小時~ 5小時。如此，使C u 和Ga的混合物成爲合金液體（熔融液）。當保持時間過短 的情況，合金可能無法完全混合，或殘存於合金液體中的 氣體可能無法完全除去，在之後的進一步高真空化的步 驟，可能成爲引起突沸的原因。此外，當保持時間過長的 情況，會造成生產性降低。 然後，在前述鑄造溫度下，減壓至8xl (T4T〇rr以下、 較佳爲5xl(T4T〇rr’保持30分鐘以上、12小時以下，較 佳爲保持1小時以上、5小時以下。如此般，昇溫至鑄造 溫度後減壓成高真空的理由在於，若昇溫前過度減壓可能 成爲突沸的原因。當鑄造時的腔室內壓力高的情況，鑄造 後的Cu-G a合金鑄錠內會有氣體捲入，而成爲內部缺陷的 原因。又過低的情況，必須提昇泵性能，而造成製造機器 的高成本化。當保持時間短的情況，存在於熔融液中的氣 體無法完全除去，成爲內部缺陷的原因。相反地過長的情 況，會造成生產性降低。 -36- 201247338 經過以上步驟在坩堝內獲得Cu-Ga合金熔 著，以將腔室內的溫度保持於前述鑄造溫度、將 於8x1 (T4Torr以下的狀態下，使用前述本實施方 用鑄模1 00,200,300,400將坩堝內的前述熔融 造。具體而言’藉由朝向鑄造用鑄模1 00的傾斜 傾斜面21、鑄造用鑄模200,300,400的第1 201，301，401 之第 1 傾斜面 201 1,30 1 1,40 1 1 供應 將熔融液注入鑄模主體1內而進行鑄造。又將鑄 1 00,200,300,40〇當中任一者複數個排在一起， 行鑄造亦可。接著，讓在鑄模主體1內鑄造後的 金自然冷卻至室溫後，從鑄模主體1將Cu-Ga合 接著，較佳爲將從鑄模主體1取出的Cu-Ga 氣壓下或真空下（基於裝置設備等的觀點較佳爲： 進行加熱處理。加熱處理時的溫度爲450 °C以 7〇〇°C，更佳爲500°C以上、600°C以下。藉由對 金實施加熱處理，在鑄模主體1內讓熔融液凝固 Cu-Ga合金中，可抑制在Cu中發生Ga偏析，且 Cu-Ga合金內部所產生的應力。當加熱處理時的 的情況，凝固時產生的應力無法釋放，又過高的 起偏析。加熱處理時間較佳爲1小時以上、1 下，更佳爲2小時以上、8小時以下。加熱處理 的情況，Cu-Ga合金的內部應力無法釋放，過長 造成生產性降低。 如此般獲得Cu-Ga合金鑄錠。本實施方式 融液。接 壓力保持 式的鑄造 液進行鑄 構件2之 傾斜構件 熔融液， 造用鑄模 而同時進 Cu-Ga 合 金取出。 合金在大 k氣壓下） 上、未達 Cu-Ga 合 而獲得的 能釋放在 溫度過低 情況會引 2小時以 時間過短 的情況會 的 Cu-Ga -37- 201247338 合金鑄旋之製造方法，如前述般，Cu-Ga合金熔融液不是 從鑄模主體1的開口部1 1直接注入鑄模主體1內，而是 沿著傾斜構件2的傾斜面21、第1傾斜構件201，3 01，401 的第1傾斜面2011，3011，4011、及第2傾斜構件 202,302,402的第2傾斜面202 1,3021,4021流過後，從前 端部22、第1前端部2012,3012,4012、及第2前端部 2022,3022,4022注入鎢模主體1內，因此可減少注入鑄模 主體1內時之熔融液的動能。如此，能夠抑制注入鑄模主 體1內時的熔融液發生對流，能在鑄模主體1內讓熔融液 均一地凝固。因此，可抑制龜裂發生而製造出大型Cu-Ga 合金鑄錠。 [實施例] 以下，利用實施例更詳細地說明本發明，但實施例僅 是本發明的一實施態樣，並非用來限定本發明。 (實施例1) <鑄造用鑄模> 作爲鑄造用鑄模，是使用第1圖所示的鑄造用鑄模。 •材質：高純度石墨（碳） .鑄模主體：是使用形成爲開口部呈長方形的有底四 角筒狀者，在鑄模主體的內周面’開口部的長邊內徑 2 5 0mm、開口部的短邊內徑5 0mm(開口部的內徑比爲短 邊：長邊=1: 5)，鑄模主體的高度內徑650mm。 -38 - 201247338 •傾斜構件：是使用傾斜面的傾斜角度3 0°，俯視時與 開口部的長邊平行的長邊方向之長度230mm。 •間隙：形成於傾斜構件的前端部和鑄模主體的內周 面間之間隙的面積爲1 0 0 0 m m2。 •冷卻抑制構件：在鑄模主體的外周面，以覆蓋鑄模 主體之形成有底面的下方側的方式設置冷卻抑制構件 (KRECA氈）。冷卻抑制構件的高度，設定成鑄模主體高 度的1 /2。此外，冷卻抑制構件，能將鑄模主體的最高到 達溫度ΓΟ調整成鑄造溫度（°C)的46.0%。 <Cu_Ga合金f毒錶的製造〉 在坩堝內置入銅（Cu)44200g、鎵（Ga)20800g，將放入 坩堝後的腔室內減壓到lxlO^Torr後，在此壓力下，以昇 溫速度8.5t：/分昇溫到940°C(鑄造溫度）。然後，在940°C 下保持1小時後，減壓到2xl(T4Torr保持 2小時，獲得 Cu-Ga合金熔融液》 接著，以將腔室內的溫度保持於前述鑄造溫度、將壓 力保持於2x1 0_4Torr的狀態，將坩堝內的熔融液使用上述 鑄造用鑄模進行鑄造。具體而言，藉由朝向鑄造用鑄模之 傾斜構件的傾斜面供應熔融液，讓熔融液沿著傾斜面流過 後，從形成於前端部和鑄模主體的內周面間之間隙’以沿 著鑄模主體的內周面（包含開口部的短邊之內周面）的方式 將熔融液注入鑄模主體內而進行鑄造。接著’讓在鑄模主 體內所鑄造之Cu-Ga合金自然冷卻至室溫後’從鑄模主體 -39- 201247338 將Cu-G a合金取出，使用熱風循環爐於500 °C進行2小時 熱處理。然後，將外周4邊切斷，獲得240mmx400mmx 50mm(t)之長方體形狀的Cu-Ga合金鑄錠。 (實施例2) <鑄造用鑄模> 作爲鑄造用鑄模，是使用第3圖所示的鑄造用鑄模。 •材質：高純度石墨（碳） •鑄模主體：是使用形成爲開口部呈長方形之有底四 角筒狀者，在鑄模主體的內周面，開口部的長邊內徑 250mm，開口部的短邊內徑50mm(開口部的內徑比爲短 邊：長邊=1 : 5)，鑄模主體的高度內徑65 0mm。 •第1傾斜構件：是使用第1傾斜面的第1傾斜角度 30°、俯視時與開口部的長邊平行的長邊方向之長度 1 20mm 者。 •第2傾斜構件：是使用第2傾斜面的第2傾斜角度 45°、俯視時與開口部的長邊平行的長邊方向之長度 1 0 0 m m 者。 •間隙：將第1傾斜構件和第2傾斜構件配置成，使 第1前端部和第2前端部位於與鑄模主體的底面平行之同 —平面上。而且，在鑄模主體的開口部之長邊方向中央 部，形成於第1前端部和第2前端部間之間隙面積爲 1 5 00mm20 •冷卻抑制構件：在鑄模主體的外周面，以覆蓋鑄 -40- 201247338 模主體之形成有底面的下方側的方式設置冷卻抑制構件 (KRECA氈）》冷卻抑制構件的高度，設定成鑄模主體高 度的1/2。此外，冷卻抑制構件，能將鑄模主體的最高到 達溫..度（°C)調整成鑄造溫度（°C)的46.0%。 <Cu_Ga合金鑄錠之製造> 在坩堝內置入銅（Cu)44200g、鎵（Ga)20800g，將放入 坩堝後的腔室內減壓到1 MO^Torr後，在此壓力下，以昇 溫速度8.5°C/分昇溫到940°C(鑄造溫度）。然後，在940〇C 下保持1小時後，減壓到2x l(T4Torr保持2小時，獲得 Cu-Ga合金熔融液。 接著，以將腔室內的溫度保持於前述鑄造溫度、將壓 力保持於2xl(T4T〇rr的狀態，將坩堝內的熔融液使用上述 鑄造用鑄模進行鑄造。具體而言，藉由朝向鑄造用鑄模的 第1傾斜構件之第1傾斜面供應熔融液，讓熔融液沿著第 1傾斜面及第2傾斜面流過後，將熔融液注入鑄模主體內 而進行鑄造。接著，讓在鑄模主體內所鑄造之Cu-Ga合金 自然冷卻至室溫後，從鑄模主體將Cu-Ga合金取出，使用 熱風循環爐於5 00 °C進行2小時熱處理。然後，將外周4 邊切斷，獲得 240mmx400mmx50mm(t)之長方體形狀的 Cu-Ga合金鑄錠。 (比較例1) 作爲鑄造用鑄模，除了不配置傾斜構件，且冷卻抑制 • 41 - 201247338 構件能將鑄模主體的最高到達溫度（°c)調整成鑄造溫度（°c) 的4 9.0 %以外，是與實施例1相同。 (比較例2) 作爲鑄造用鑄模，除了不配置傾斜構件，且管式加熱 器所構成的冷卻抑制構件能將鑄模主體的最高到達溫度 (°C)調整成鑄造溫度（°C)的58.0%以外，是與實施例1相 同。 (比較例3) 作爲鑄造用鑄模’除了不配置傾斜構件，鑄模主體的 開口部之內徑比爲短邊：長邊=1: 1.8，且不配置冷卻抑 制構件以外，是與實施例1相同。 (比較例4 ) 作爲鑄造用鑄模，除了不配置傾斜構件，且不配置冷 卻抑制構件以外’是與實施例1相同。又將熔融液注入鑄 造用鑄模時之鑄模主體的最高到達溫度（°c)爲鑄造溫度fc) 的 2 1 . 9 %。 (比較例5) 作爲鑄造用鑄模，除了不配置傾斜構件，且在鑄模主 體的上部配置冷卻抑制構件（冷卻抑制構件的高度爲鑄模 主體高度之1/3)以外’是與實施例1相同。 -42- .201247338 (比較例6 ) 作爲鑄造用鑄模’除了不配置傾斜構件，且冷卻抑制 構件能將鑄模主體的最高到達溫度rc)調整成鑄造溫度（乞） 的6 2.7%以外，是與實施例1相同。 關於實施例1，2、及比較例1〜6所獲得的Cu-Ga合金 鑄錠，進行以下的評價。 <龜裂及內部缺陷的評價> 將實施例 1，2、及比較例 1〜6 所獲得的 240mmx400mmx50mm⑴的Cu-Ga合金鑄錠，使用線放電 加工機（0.3mm線材），以加工速度 〇.7_mm/分加工成 240mmx400mm><12mm(t)共 4 片的切片板。 將所獲得的4片的切片板浸漬於染色滲透探傷劑（株 式會社TASETO製）中。作爲該染色滲透探傷劑，是使用 能將深度30μιη以上、寬度Ιμιη以上的缺陷予以染色者。 對於浸漬於染色滲透探傷劑後的4片的切片板，目視確認 其染色狀態，評價每1 000cm2的龜裂數。此外，對於Cu-Ga 合金 鑄錠實 施切片 加工後 的表面 （3 面 ）， 以目視 評價具 有0.5mm以上的寬度尺寸之內部缺陷個數。評價結果顯 示於表1。 -43- 201247338 一嗽 內部缺陷評價 1___ — 切片加工後之3面的表面都沒 有發生「內部缺陷」 切片加工後之3面的表面都發 生7個「內部缺陷」 鹬 ύ m 谳 S 1 晅塑 ^ Μ 忉插 H L 呂擊 dl; ^ 切片加工後之3面的表面都發 生2個「內部缺陷」 粼 ύ 瞄 撇 Ν筢 H L ° Μ dt；们 运廿I 切片加工後之3面的表面都發 生2個「內部缺陷」 餾 ύ 陌 撇 § ~1 N镝 斑e H ^ 后奧 dt； cn 这廿1 龜裂評價 1_ 4片的切片板都沒有發 生「龜裂」 ^ S! 4片中有2片的切片板 發生1道「龜裂」 4片中4片的切片板發 生20道「龜裂」 4片中4片的切片板發 生9道「龜裂」 m ^ S； S銥 5 & •0·挪 dr ^ m m 寸_ fro dr ^ 鑄造用鑄模 冷卻抑制構件 棚州 ίΐ i< μ 迄鳙_ 諒·Ν珠: 46.0% 49.0% 1_ 58.0% 壊 裢 1 62.7% 鹚·Ν 容W | 葙騮乸 Τ +Η W. CN (N rn (N 配置位置 1_ 鑄模主體的下部 鑄模主體的下部 鑄模主體的下部 鑄模主體的上部 鑄模主體的下部 蜃I 摧 壊 壊 摧 裢 壊 鑄模主體 jj 0 S Έ 1¾ S ·. §s m □蹈 00 r»H 實施例1 比較例1 比較例2 比較例3 比較例4 比較例5 比較例6 -44- 201247338 在實施例1，2’ 4片的切片板都沒有發生龜裂 片加工後之3面的表面都沒有發生內部缺陷。相對 在比較例1，4片的切片板當中2片的切片板發生 裂，在切片加工後的3面的表面都發生7個內部缺 比較例2，4片的切片板當中2片的切片板發生 裂，切片加工後之3面的表面都發生5個內部缺陷 較例3,6，4片的切片板都發生20道龜裂’切片加 3面的表面都發生2個內部缺陷。在比較例4，4 片板都發生9道龜裂，切片加工後之3面的表面都 個內部缺陷。在比較例5，4片的切片板都發生 裂，切片加工後之3面的表面都發生2個內部缺陷 根據以上結果可知，在將Cu-Ga合金鑄錠藉由 製作時，藉由讓Cu-Ga合金熔融液沿著傾斜構件 面、或第1，第2傾斜構件的第1,第2傾斜面流過 鑄模主體內以進行鑄造，能不發生龜裂及內部缺陷 出Cu-Ga合金鑄錠》 本發明，在不脫離其精神或主要特徴下，能以 種方式實施。因此，前述實施方式只不過是例示， 的範圍是如申請專利範圍所記載，並不受說明書本 束。再者，屬於申請專利範圍之變形、變更也都包 發明的範圍內。 【圖式簡單說明】 本發明的目的、特色、以及優點，參照詳細說 ，且切 於此， 1道龜 陷。在 1道龜 。在比 工後之 片的切 發生5 9道龜 〇 熔鑄法 的傾斜 而注入 而製造 其他各 本發明 文的拘 含於本 明及圖 -45- 201247338 式而能更爲明確。 第1圖係顯示本發明的第1實施方式之鑄造用鑲模 100構造之立體圖。 第2圖係顯示鑄造用鑄模100的構造之截面圖。 第3圖係顯示本發明的第2實施方式之鑄造用鑄模 200構造之立體圖。 第4圖係顯示鑄造用鑄模200的構造之截面圖。 第5圖係顯示本發明的第3實施方式之鑄造用鑄模 3 00構造之截面圖。 第6圖係顯示本發明的第4實施方式之鑄造用鑄模 400構造之截面圖。 【主要元件符號說明】 1 :鑄模主體 2 :傾斜構件 3 :冷卻抑制構件 1 1 :開口部 1 2 :底面 21 :傾斜面 22 :前端部 1 00,200,300,400 :鑄造用鑄模 201，301，401:第1傾斜構件 202,302,402 ：第2傾斜構件 201 1,301 1,401 1 :第 1 傾斜面 -46- 201247338 2012,3012,40 12:第 1 前端部 2021，3021，4021 :第 2 傾斜面 2022,3022,4022 :第 2 前端部A Cu-Ga alloy having a relatively large Ga composition is a brittle material having a high hardness. Therefore, when a Cu-Ga alloy ingot is produced by a melt casting method, cracks may occur. In the Cu-Ga alloy ingot according to the present embodiment, the casting molds of the casting method 1 〇〇, 200, 300, 400 (the kinetic energy of the melt when the injection molding body 1 is injected) are used by the casting method. It is produced so that cracking can be suppressed. (Splating target) The sputtering target of the present embodiment is produced by using the Cu-Ga alloy ingot of the present embodiment. As a method of processing a Cu-Ga alloy ingot into a sputtering target, wire discharge machining, electric discharge machining, laser machining, diamond cutting processing using a boring machine, cutting processing, water jet processing, wire saw, sawing General methods such as sheet cutting. Among these processing methods, it is preferable that the Cu-Ga-34-201247338 alloy is a brittle material having a high hardness, and is preferably a wire discharge machining, an electric discharge machining, a laser machining, a wire saw, a water jet processing, etc., and more preferably a wire discharge. Processing, wire saw, the best for wire electrical discharge machining. When the Cu-Ga alloy ingot is processed into a sputtering target by wire electric discharge machining, it is preferable to use a wire of 0.1 mm or more and 0.4 mm or less, and more preferably a wire of 0.2 mm or more and 0.4 mm or less. Further, the cutting speed (machining speed) of the wire electric discharge machining is preferably 0.1 mm/min or more and 8 mm/min or less, more preferably 0.1 mm/min or more and 3 mm/min or less. Regarding the thickness of the wire, when it is too fine, it becomes a cause of breakage of the wire during processing; and regarding the processing speed, when it is too slow, productivity is lowered, and when it is too fast, it becomes a cause of cracking. The sputtering target of the present embodiment is produced by using a Cu-Ga alloy ingot of the present embodiment which can suppress the occurrence of cracks, and is therefore suitable for use as a sputtering target for forming a thin film type solar cell. . (Manufacturing Method of Cu-Ga Alloy Ingot) In the method for producing a Cu-Ga alloy ingot according to the present embodiment, first, a necessary amount of copper (Cu) and gallium (Ga) is incorporated in the crucible. The amount of the insertion at this time can be appropriately selected in accordance with the size of the vortex, the size of the casting mold, and the number of casting molds. Then, the chamber placed in the crucible is depressurized to below 10 - iTorr. After confirming that the pressure in the chamber is reduced to 10 iTorr or less, the temperature is raised to a temperature of 800 ° C to 1 00 ° C at a temperature increase rate of 5 to 20 ° C / min, preferably. When the heating rate is too fast, there is a possibility of causing a sudden boiling, and the productivity is lowered when the heating rate is too slow. The holding temperature (casting temperature) after the temperature rise is changed in accordance with the melting point of the alloy composition, the material of the casting mold, the volume, the specific heat, the density, and the like. For example, when the melting point of the alloy composition is 850 ° C, the holding temperature after heating (casting temperature) is preferably 190 ° C or higher, 100 ° C or lower, more preferably 930 ° C or higher. , 9 7 0 °C or less. When the temperature is raised in the atmosphere, problems such as oxidation of the raw material occur, and the yield is lowered. Then, it is preferably maintained at a temperature (casting temperature) after the temperature rise for 30 minutes to 12 hours, more preferably for 1 hour to 5 hours. Thus, a mixture of C u and Ga is made into an alloy liquid (melt). When the holding time is too short, the alloy may not be completely mixed, or the gas remaining in the alloy liquid may not be completely removed, and the step of further high vacuum may become the cause of the sudden boiling. In addition, when the holding time is too long, productivity is lowered. Then, at the above casting temperature, the pressure is reduced to 8xl (T4T〇rr or less, preferably 5xl (T4T〇rr' is maintained for 30 minutes or longer, 12 hours or shorter, preferably for 1 hour or longer, 5 hours or shorter. The reason why the temperature is raised to the casting temperature and then decompressed to a high vacuum is that excessive decompression before heating may cause a sudden boiling. When the pressure in the chamber during casting is high, the cast Cu-G a alloy ingot will be inside. There is gas entrapment, which is the cause of internal defects. In the case of too low, the pump performance must be improved, resulting in high cost of the manufacturing machine. When the holding time is short, the gas present in the melt cannot be completely removed. The reason for being an internal defect. On the contrary, if it is too long, the productivity will be lowered. -36- 201247338 After the above steps, the Cu-Ga alloy is melted in the crucible to maintain the temperature in the chamber at the aforementioned casting temperature. In the state of 8x1 (less than T4Torr), the above-described melt molding in the crucible is carried out using the molds of the present embodiment, 100, 300, 300, 400. Specifically, by tilting toward the casting mold 100 The inclined surface 21, the first inclined surface 201, 30 1 1, 40 1 1 of the first 201, 301, 401 of the casting molds 200, 300, 400 are supplied by injecting molten metal into the mold main body 1 and casting, and again casting 00, 200, 300, One of the 40 turns may be arranged in a row, and the casting may be performed. Then, after the gold cast in the mold main body 1 is naturally cooled to room temperature, Cu-Ga is bonded from the mold main body 1, preferably The Cu-Ga gas pressure taken out from the mold main body 1 is under vacuum or under vacuum (it is preferably subjected to heat treatment from the viewpoint of equipment, etc., and the temperature at the time of heat treatment is 450 ° C to 7 ° C, more preferably 500) °C or more, 600 ° C or less. By heat-treating gold, the melt is solidified in the Cu-Ga alloy in the mold main body 1, and Ga segregation in Cu is suppressed, and the inside of the Cu-Ga alloy is generated. Stress. When the heat treatment is performed, the stress generated during solidification cannot be released, and the segregation is too high. The heat treatment time is preferably 1 hour or more, 1 time, more preferably 2 hours or more, or 8 hours or less. In the case of treatment, the internal stress of the Cu-Ga alloy cannot be released If the length is too long, the productivity is lowered. The Cu-Ga alloy ingot is obtained in this way. The molten liquid of the present embodiment is melted by the pressure-holding casting liquid, and the molten material of the inclined member of the cast member 2 is cast, and the mold is molded while the Cu-Ga alloy is simultaneously introduced. Cu-Ga-37-201247338 alloy casting spinning, which can be released when the temperature is too low, and the temperature is too low for the time when the temperature is too low. In the manufacturing method, as described above, the Cu-Ga alloy melt is not directly injected into the mold main body 1 from the opening portion 1 of the mold main body 1, but is along the inclined surface 21 of the inclined member 2, and the first inclined member 201, 310 The first inclined surface 2011, 3011, 4011 of the 401, and the second inclined surfaces 202 1, 3021, and 4021 of the second inclined members 202, 302, 402 flow from the front end portion 22, the first front end portion 2012, 3012, 4012, and Since the front end portions 2022, 3022, and 4022 are injected into the tungsten mold main body 1, the kinetic energy of the molten metal when injected into the mold main body 1 can be reduced. Thus, the convection of the molten metal when injected into the mold main body 1 can be suppressed, and the molten metal can be uniformly solidified in the mold main body 1. Therefore, a large Cu-Ga alloy ingot can be produced by suppressing the occurrence of cracks. [Examples] Hereinafter, the present invention will be described in more detail by way of examples, but the examples thereof are only one embodiment of the invention and are not intended to limit the invention. (Example 1) <Casting mold for casting> As a casting mold, a casting mold shown in Fig. 1 was used. • Material: High-purity graphite (carbon). The main body of the mold is a bottomed rectangular tube formed into a rectangular shape with an opening. The inner diameter of the opening of the main body of the mold main body is 2 500 mm in the long side of the opening. The inner diameter of the short side is 50 mm (the inner diameter ratio of the opening is the short side: the long side = 1: 5), and the inner diameter of the main body of the mold is 650 mm. -38 - 201247338 • Tilting member: The inclination angle of the inclined surface is 30°, and the length in the longitudinal direction parallel to the long side of the opening is 230 mm in plan view. • Gap: The area of the gap formed between the front end portion of the inclined member and the inner peripheral surface of the mold main body is 100 m 2 m 2 . • Cooling suppressing member: A cooling suppressing member (KRECA felt) is provided on the outer peripheral surface of the mold main body so as to cover the lower side of the bottom surface of the mold main body. The height of the cooling suppressing member is set to 1 / 2 of the height of the main body of the mold. Further, the cooling suppressing member can adjust the maximum temperature ΓΟ of the mold main body to 46.0% of the casting temperature (°C). <Production of Cu_Ga alloy f poisoning table> Into the crucible, 44,200 g of copper (Cu) and 20,800 g of gallium (Ga) were placed, and the pressure was reduced to lxlO^Torr after the chamber was placed in the crucible, and then the temperature was raised at this pressure. 8.5t: / minutes to 940 ° C (casting temperature). Then, after maintaining at 940 ° C for 1 hour, the pressure was reduced to 2 x 1 (T4 Torr was maintained for 2 hours to obtain a Cu-Ga alloy melt). Next, the temperature in the chamber was maintained at the aforementioned casting temperature, and the pressure was maintained at 2x1 0_4 Torr. In the state, the molten metal in the crucible is cast using the above-described casting mold. Specifically, the molten liquid is supplied to the inclined surface of the inclined member of the casting mold, and the molten liquid flows along the inclined surface, and is formed from The gap between the tip end portion and the inner peripheral surface of the mold main body is injected into the mold main body so as to be cast along the inner peripheral surface of the mold main body (including the inner peripheral surface of the short side of the opening). After the Cu-Ga alloy cast in the main body of the mold was naturally cooled to room temperature, the Cu-G a alloy was taken out from the mold main body-39-201247338, and heat-treated at 500 ° C for 2 hours using a hot air circulating furnace. Then, the outer circumference was 4 sides were cut to obtain a Cu-Ga alloy ingot having a rectangular parallelepiped shape of 240 mm x 400 mm x 50 mm (t). (Example 2) <Mold for casting> As a casting mold, a casting mold shown in Fig. 3 was used. • Material: High-purity graphite (carbon) • Mold main body: It is a bottomed rectangular tube formed into a rectangular shape with an opening, and the inner diameter of the main body of the mold main body is 250 mm in the long side of the opening. The inner diameter of the short side is 50 mm (the inner diameter ratio of the opening is the short side: the long side = 1: 5), and the inner diameter of the main body of the mold is 65 mm. • The first inclined member: the first inclined angle using the first inclined surface 30°, the length of the longitudinal direction parallel to the long side of the opening is 20 mm in plan view. • The second inclined member: the second inclined angle of 45° using the second inclined surface, and the long side of the opening in plan view The length of the parallel longitudinal direction is 100 mm. • Gap: The first inclined member and the second inclined member are disposed such that the first front end portion and the second front end portion are located in parallel with the bottom surface of the mold main body. Further, in the central portion in the longitudinal direction of the opening portion of the mold main body, the gap area formed between the first tip end portion and the second tip end portion is 1 500 mm 20 • The cooling suppressing member is covered on the outer peripheral surface of the mold main body Cast-40- 201247338 The main body of the mold has a bottom surface The height of the cooling suppressing member is set to 1/2 of the height of the main body of the mold, and the cooling suppressing member can reach the maximum temperature of the mold main body (°C). 40.00% of the casting temperature (°C) was adjusted. <Production of Cu_Ga alloy ingot> 44200 g of copper (Cu) and 20800 g of gallium (Ga) were placed in the crucible, and the chamber was placed under reduced pressure to 1 in the chamber. After MO^Torr, the temperature was raised to 940 ° C (casting temperature) at a temperature increase rate of 8.5 ° C / min. Then, after holding at 940 ° C for 1 hour, the pressure was reduced to 2 x 1 (T4 Torr was maintained for 2 hours to obtain a Cu-Ga alloy melt. Next, the temperature in the chamber was maintained at the aforementioned casting temperature, and the pressure was maintained at 2 x 1 (In the state of T4T〇rr, the melt in the crucible is cast using the above-described casting mold. Specifically, the molten liquid is supplied to the first inclined surface of the first inclined member of the casting mold, and the molten liquid is allowed to flow along After the first inclined surface and the second inclined surface flow, the molten metal is injected into the mold main body to perform casting. Then, the Cu-Ga alloy cast in the mold main body is naturally cooled to room temperature, and then Cu- is molded from the main body of the mold. The Ga alloy was taken out and heat-treated at 500 ° C for 2 hours using a hot air circulating furnace. Then, the outer peripheral side 4 was cut to obtain a Cu-Ga alloy ingot having a rectangular shape of 240 mm x 400 mm x 50 mm (t). (Comparative Example 1) As a casting The mold is the same as the first embodiment except that the inclined member is not disposed and the cooling is suppressed. 41 - 201247338 The member can adjust the maximum reaching temperature (°c) of the casting body to 49.0% of the casting temperature (°c). (ratio Comparative Example 2) As a casting mold, a cooling member composed of a tube heater can adjust the maximum temperature (° C.) of the mold main body to 58.0% of the casting temperature (° C.), except that the inclined member is not disposed. (Comparative Example 3) As a casting mold for casting, the inner diameter ratio of the opening of the mold main body is the short side: the long side = 1: 1.8, and the cooling suppressing member is not disposed, except that the inclined member is not disposed. In the same manner as in the first embodiment, the casting mold is the same as in the first embodiment except that the inclined member is not disposed and the cooling suppressing member is not disposed. When the molten metal is injected into the casting mold, The maximum reaching temperature (°c) of the main body of the casting mold is 21.9% of the casting temperature fc). (Comparative Example 5) As the casting mold, a cooling member is disposed on the upper portion of the mold body except that the inclined member is not disposed. The height of the restraining member is other than 1/3 of the height of the main body of the mold. The same as in the first embodiment. -42-.201247338 (Comparative Example 6) As a casting mold for casting, except that the inclined member is not disposed, and the cooling suppressing member is disposed The maximum reaching temperature of the mold body RC) adjusted to a casting temperature (begging) 6 than 2.7%, the same as in Example 1. The Cu-Ga alloy ingots obtained in Examples 1, 2 and Comparative Examples 1 to 6 were subjected to the following evaluations. <Evaluation of cracks and internal defects> The 240-mm x 400 mm x 50 mm (1) Cu-Ga alloy ingot obtained in Examples 1, 2 and Comparative Examples 1 to 6 was processed using a wire electric discharge machine (0.3 mm wire) at a processing speed. 7.7_mm/min is processed into 240mmx400mm><12mm(t) a total of 4 slices of the plate. The obtained three-piece slicing plates were immersed in a dye penetrant-detecting agent (manufactured by TASETO Co., Ltd.). As the dyeing penetrant, it is possible to dye a defect having a depth of 30 μm or more and a width of Ιμη or more. For the four pieces of the diced sheets immersed in the dye-penetrating sensitizing agent, the dyeing state was visually confirmed, and the number of cracks per 1 000 cm 2 was evaluated. Further, the number of internal defects having a width of 0.5 mm or more was visually evaluated on the surface (three sides) after the slicing of the Cu-Ga alloy ingot. The evaluation results are shown in Table 1. -43- 201247338 I. Internal defect evaluation 1___ — No "internal defects" occurred on the surface of the three sides after slicing. Seven "internal defects" occurred on the surface of the three sides after slicing. 鹬ύ m 谳S 1 ^ Μ 忉 HL LV dl; ^ 2 "internal defects" occur on the surface of the 3 sides after slicing. 撇Ν筢 撇Ν筢 HL ° Μ dt; Two "internal defects" occurred. Distillation § ~1 N Freckle e H ^ Post-Odt; cn This 廿1 crack evaluation 1_ 4 slices of the plate did not occur "crack" ^ S! 4 pieces There are 2 "cracks" in 2 slices, 4 "cracks" in 4 slices in 4 slices, and 9 "cracks" in 4 slices in 4 slices; m ^ S; S铱5 & •0·诺dr ^ mm inch_ fro dr ^ Casting mold cooling suppression member 棚州ίΐ i< μ 鳙 鳙 谅 Ν Ν :: 46.0% 49.0% 1_ 58.0% 壊裢1 62.7% 鹚·Ν W | 葙骝乸Τ +Η W. CN (N rn (N configuration position 1_ on the lower mold body of the lower mold body of the lower mold body of the mold body) The lower part of the mold body 壊壊I destroys the mold body jj 0 S Έ 13⁄4 S ·. §sm □ 00 r»H Example 1 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 -44- 201247338 In the Example 1, 2' 4-piece slicing plate, no crack occurred on the surface of the three sides after the cracking of the cracked sheet. In Comparative Example 1, two of the four slicing plates were The sliced plate was cracked, and 7 internal defects occurred on the surface of the three sides after the slice processing. Comparative Example 2, 2 of the 4 sliced plates were split, and the surface of the 3 faces after the slice processing occurred 5 The internal defects were 20 cracks in the 3, 6 and 4 sliced plates. There were 2 internal defects on the surface of the slice plus 3 faces. In Comparative Example 4, 9 cracks occurred in 4 plates, and the slices were sliced. The surface of the three sides after the processing has an internal defect. In Comparative Example 5, four of the sliced sheets were cracked, and two internal defects occurred on the surface of the three sides after the slicing. According to the above results, Cu-Ga was formed. Alloy ingots are produced by making the Cu-Ga alloy melt along the inclined structure The surface of the first or second inclined surface of the first and second inclined members flows through the mold main body to perform casting, and the Cu-Ga alloy ingot can be produced without cracking or internal defects. Spiritual or major features can be implemented in a variety of ways. Therefore, the foregoing embodiments are merely illustrative, and the scope of the invention is as described in the appended claims. Further, variations and modifications belonging to the scope of the patent application are also included in the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS The objects, features, and advantages of the present invention will be described in detail with reference to the details. In 1 turtle. In the case of the cutting of the sheet after the work, the inclination of the turf casting method is injected and manufactured. The other inventions are more clearly defined in the present invention and in the drawings -45-201247338. Fig. 1 is a perspective view showing the structure of a casting insert 100 according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing the structure of a casting mold 100. Fig. 3 is a perspective view showing the structure of a casting mold 200 according to a second embodiment of the present invention. Fig. 4 is a cross-sectional view showing the structure of a casting mold 200. Fig. 5 is a cross-sectional view showing the structure of a casting mold 300 according to a third embodiment of the present invention. Fig. 6 is a cross-sectional view showing the structure of a casting mold 400 according to a fourth embodiment of the present invention. [Description of main component symbols] 1 : Mold main body 2 : Tilting member 3 : Cooling suppressing member 1 1 : Opening portion 1 2 : Bottom surface 21 : Inclined surface 22 : Front end portion 1 00, 200, 300, 400 : Casting mold 201, 301, 401: 1st Inclined members 202, 302, 402: second inclined members 201 1,301 1,401 1 : first inclined surface -46 - 201247338 2012, 3012, 40 12: first front end portion 2021, 3021, 4021: second inclined surface 2022, 3022, 4022: second Front end

Claims (1)

201247338 七、申請專利範圍 1. 一種鑄造用鑄模，是將Cu-Ga合金鑄錠藉由熔鑄 法製作時所使用之鑄造用鑄模；係具備鑄模主體及導引 部； 該鑄模主體，是形成有底筒狀且具有開口部，在該開 口部形成用來供應Cu-Ga合金熔融液之開口； 該導引部，是設置在前述鑄模主體之前述開口部，將 朝向前述開口部供應之Cu-Ga合金熔融液以減少該熔融液 動能的方式導引並注入前述鑄模主體內。 2. 如申請專利範圍第1項所述之鑄造用鑄模，其 中， 前述導引部係具備形成有傾斜面之傾斜構件，該傾斜 面，是讓朝向前述鑄模主體的前述開口部供應之Cu-Ga合 金熔融液流過，且是以隨著從前述鑄模主體之前述開口部 朝向內方而接近前述鑄模主體之底面的方式延伸； 在前述傾斜構件之最接近前述鑄模主體底面之前端部 和前述鑄模主體的內周面之間形成間隙，該間隙是讓沿著 前述傾斜構件之前述傾斜面流過的Cu-Ga合金熔融液注入 前述鑄模主體內。 3. 如申請專利範圍第2項所述之鑄造用鑄模，其 中， 前述鑄模主體是形成前述開口部呈長方形的四角筒 狀； 前述傾斜構件之前述傾斜面，是以隨著從前述鑄模主 -48- 201247338 體之前述開口部的一方短邊朝向內方而接近前述鑄模主體 之底面的方式延伸。 4·如申請專利範圍第1項所述之鑄造用鑄模，其 中， 前述導引部係具備第1傾斜構件及第2傾斜構件； 該第1傾斜構件具有：以隨著從前述鑄模主體之前述 開口部朝向內方而接近前述鑄模主體之底面的方式延伸之 傾斜面； 該第2傾斜構件，在與前述鑄模主體的底面平行的方 向是設置成與前述第1傾斜構件相對向，且具有：以隨著 從前述鑄模主體之前述開口部朝向內方而接近前述鑄模主 體之底面的方式延伸之傾斜面； 將前述第1傾斜構件和前述第2傾斜構件配置成，使 最接近前述鑄模主體的底面之各自的前端部，以不接觸對 方的傾斜面的方式在與前述鑄模主體之底面平行的方向上 位於不同的位置。 5. 如申請專利範圍第4項所述之鑄造用鑄模，其 中， 將前述第1傾斜構件和前述第2傾斜構件配置成，使 各自的前端部位於與前述鑄模主體的底面平行之同一平面 上，且在各自的前端部彼此間形成間隙。 6. 如申請專利範圍第5項所述之鑄造用鑄模，其 中， 將前述第1傾斜構件和前述第2傾斜構件配置成，使 -49- 201247338 各自的前端部彼此間所形成之前述間隙位於前述鑄模主體 之前述開口部的中央。 7.如申請專利範圍第4項所述之鑄造用鑄模，其 中 前述鑄模主體是形成前述開口部呈長方形的四角筒 狀； 前述第1傾斜構件及前述第2傾斜構件各自的傾斜 面，是以隨著從在前述鑄模主體之前述開口部相對向的2 個短邊分別朝向內方而接近前述鑄模主體之底面的方式延 伸。 8 ·如申請專利範圍第1項所述之鑄造用鑄模，其 中， 在前述鑼模主體之外周面，關於前述鑄模主體的底面 之法線方向而在形成有底面之法線方向下方側的既定區域 設置冷卻抑制構件，該冷卻抑制構件，可抑制注入前述鑄 模主體內之Cu-Ga合金熔融液發生過度冷卻。 9.如申請專利範圍第8項所述之鑄造用鑄模，其 中， 前述冷卻抑制構件之前述法線方向的長度，是前述鑄 模主體之前述法線方向的長度之1/4以上。 1 〇.如申請專利範圍第8項所述之鑄造用鑄模，其 中， 前述冷卻抑制構件，可將前述鑄模主體之最高到達溫 度（°C)調整成注入前述鑄模主體內前的Cu-Ga合金熔融液 -50- 201247338 的溫度（°C)之22%以上62%以下》 1 1 . 一種Cu-Ga合金鑄錠，是使用申請專利範圍第1 項所述之鑄造用鑄模藉由熔鑄法製作之Cu-Ga合金鑄錠； 其Ga組成比爲l〇at%以上50at%以下。 12. —種濺鍍靶，是Cu-Ga合金所構成的濺鍍靶； 其是使用申S靑專利範園第11項所述之Cu-Ga合金鑄 錠所製作的。 13. —種CU-Ga合金鑄錠之製造方法，是用來製造 Cu-Ga合金鑄銳的方法；係包含： 在坦禍內置入銅（Cu)及鎵（Ga)並減壓至lO^Torr以下 減壓的步驟； 在此壓力下，以昇溫速度 5〜20°C/分昇溫至 800°C〜1100 °C後’在此溫度下保持30分鐘〜12小時並減壓 至8x10_4Torr以下，而在坩堝內獲得Cu-Ga合金熔融液 的步驟； 使用申請專利範圍第1至1 0項中任一項所述之鑄造 用鑄模將坩堝內的前述熔融液進行鑄造的步驟，是朝向前 述導引部供應前述熔融液，藉此將前述熔融液注入前述鑄 模主體內而進行鑄造的步驟；以及 將在前述鑄模主體內鑄造後的Cu-Ga合金冷卻至室溫 後，從前述鑄模主體取出Cu-Ga合金而獲得Cu-Ga合金 鑄錠的步驟》 14. 如申請專利範圍第13項所述之Cu-Ga合金鑄錠 之製造方法，其中，進一步包含以下步驟： -51 - 201247338 在從則述齡模主體取出Cu-Ga合金後♦將該Cu-Ga 合金在大氣壓下以45 0t以上未達700°C的溫度加熱1小 時以上1 2小時以下的時間。 -52-201247338 VII. Patent application scope 1. A casting mold for casting, which is a casting mold used for casting a Cu-Ga alloy ingot by a smelting method; a mold main body and a guiding portion; the main body of the casting mold is formed a bottom cylindrical shape having an opening, wherein an opening for supplying a Cu-Ga alloy melt is formed in the opening; the guiding portion is provided in the opening portion of the mold main body, and Cu- is supplied toward the opening portion The Ga alloy melt is guided and injected into the mold body in such a manner as to reduce the kinetic energy of the melt. 2. The casting mold according to claim 1, wherein the guiding portion includes a slanting member formed with an inclined surface that is supplied to the opening portion of the mold main body. The Ga alloy melt flows and extends so as to approach the bottom surface of the mold main body inwardly from the opening portion of the mold main body; the end portion of the inclined member closest to the bottom surface of the mold main body and the foregoing A gap is formed between the inner peripheral surfaces of the mold main body, and the gap is such that a Cu-Ga alloy melt flowing along the inclined surface of the inclined member is injected into the mold main body. 3. The casting mold according to claim 2, wherein the mold main body has a rectangular tubular shape in which the opening portion has a rectangular shape; and the inclined surface of the inclined member is a main mold from the mold- 48-201247338 The short side of the opening of the body extends inwardly toward the bottom surface of the mold body. The casting mold according to the first aspect of the invention, wherein the guiding portion includes a first inclined member and a second inclined member; the first inclined member has a shape that follows from the molded body An inclined surface that extends toward the inner side and close to the bottom surface of the mold main body; the second inclined member is disposed to face the first inclined member in a direction parallel to the bottom surface of the mold main body, and has: An inclined surface extending so as to approach the bottom surface of the mold main body inwardly from the opening portion of the mold main body; and the first inclined member and the second inclined member are disposed so as to be closest to the mold main body The front end portions of the bottom surfaces are located at different positions in a direction parallel to the bottom surface of the mold main body so as not to contact the inclined surface of the other side. 5. The casting mold according to claim 4, wherein the first inclined member and the second inclined member are disposed such that respective front end portions are located on a same plane parallel to a bottom surface of the mold main body. And a gap is formed between the respective front end portions. 6. The casting mold according to claim 5, wherein the first inclined member and the second inclined member are disposed such that the gap formed between the front end portions of each of -49-201247338 is located The center of the opening of the mold body. 7. The casting mold according to claim 4, wherein the mold main body has a rectangular tubular shape in which the opening portion has a rectangular shape; and each of the inclined surfaces of the first inclined member and the second inclined member is It extends so as to approach the bottom surface of the mold main body from the two short sides facing the opening of the mold main body toward the inner side. The casting mold according to the first aspect of the invention, wherein the outer peripheral surface of the mold main body is formed on the lower side in the normal direction of the bottom surface with respect to the normal direction of the bottom surface of the mold main body. The cooling suppressing member is disposed in the region, and the Cu-Ga alloy melt injected into the mold main body is prevented from being excessively cooled. 9. The casting mold according to claim 8, wherein the length of the cooling suppression member in the normal direction is 1/4 or more of the length of the mold main body in the normal direction. The casting mold according to claim 8, wherein the cooling suppressing member adjusts a maximum temperature (° C.) of the mold main body to a Cu-Ga alloy before being injected into the main body of the mold. The temperature of the melt -50 to 201247338 is 22% or more and 62% or less. 1 1 . A Cu-Ga alloy ingot is produced by the casting method using the casting mold described in the first application of the patent application. The Cu-Ga alloy ingot has a Ga composition ratio of 10 〇 at% or more and 50 at% or less. 12. A sputtering target, which is a sputtering target composed of a Cu-Ga alloy; it is produced by using a Cu-Ga alloy ingot as described in Item 11 of the patent application. 13. A method for manufacturing a CU-Ga alloy ingot, which is a method for manufacturing a Cu-Ga alloy casting sharpness; the method comprises: incorporating copper (Cu) and gallium (Ga) into a disaster and depressurizing to lO^ The step of depressurizing the pressure below Torr; at this pressure, the temperature is raised to 800 ° C to 1100 ° C at a temperature increase rate of 5 to 20 ° C / min, and the temperature is maintained at this temperature for 30 minutes to 12 hours and the pressure is reduced to 8 x 10 4 seconds or less. And the step of obtaining the Cu-Ga alloy melt in the crucible; and the step of casting the melt in the crucible by using the casting mold according to any one of claims 1 to 10, which is directed toward the guide a step of supplying the molten liquid into the mold main body to perform casting, and cooling the Cu-Ga alloy cast in the mold main body to room temperature, and then taking out Cu from the mold main body. The method for producing a Cu-Ga alloy ingot according to the invention of the present invention, further comprising the following steps: -51 - 201247338 After the body of the ageing mold is taken out of the Cu-Ga alloy, ♦ Cu-Ga alloy to less than 45 0t above 700 ° C at atmospheric pressure a temperature of the heating time is one hour or more in 12 hours or less. -52-
TW101104930A 2011-02-16 2012-02-15 Casting mold, cu-ga allow slab, sputtering target, and cu-ga alloy slab manufacturing method TW201247338A (en)

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JPS5456029A (en) * 1977-10-12 1979-05-04 Nippon Steel Corp Upper pouring type steel casting method
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JP2010280944A (en) * 2009-06-04 2010-12-16 Hitachi Cable Ltd Cu-Ga ALLOY, SPUTTERING TARGET, METHOD FOR PRODUCING THE Cu-Ga ALLOY, AND METHOD FOR PRODUCING THE SPUTTERING TARGET

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