201243192 六、發明說明： c 明戶斤屬軒々貝】 技術領域 本發明係有關於一種泛用用途之流體控制閥，特別是 有關於一種使用於半導體及平板顯示器、太陽電池等產。 之零件製造之藥液及純水之控制所使用之流體控制間。 L· ^kzj. 4^. ^ 背景技術 使用於半導體製造之藥液之流量控制以往已使用單動 式或複動式之膜片閥。單動式之膜片閥可使膜片閥体朝閉 閥方向受賦勢，並朝開閥方向施加驅動力，而藉賦勢力二 驅動力之平衡而操作閥開度。複動式之膜片閥則可藉開^ 方：與閉閥方向之驅動力之平衡而操作闕開度。為 ^貫現確實之祕狀態，須防止_面之漏歧水鍵 象二漏茂’短期可藉賦勢力(複動式時為驅動力)之增大 封性，長期則將因賦勢力(複動式時為驅動力)之择 座之㈣料發生歷時之變形造成_，故有9 艮1題。另’水鎚現象係因藥液之慣性力(動量守 有造成配管等之損叙問題。 ❹象進而亦 對於上述問題，本發明人等 :::勢力 又馱U具體而言，係將臈片閥体之 較閥座之徑部更偏内側處—片間体=:在 201243192 膜片閥体之外形尺寸可承受藥液之壓力而對抗賦勢力，並 可作為水鎚現象之受壓面，故予以減小即可解決問題。即， 本發明人等人已發現減小藥液之受壓面積抑制因藥液之壓 力而承受驅動力之膜片閥体之問題之方法。 【先行技術文獻】 【專利文獻】 【專利文獻1】曰本專利公開公報特開2005-155895號 【專利文獻2】曰本專利公開公報特開2007-178006號 【專利文獻3】日本專利公開公報特開2003-278927號 【專利文獻4】曰本專利公開公報特開201 〇-169200號 【發明内容】 發明概要 發明欲解決之課題 然而，本發明人並不滿足上述成果，不僅降低受壓面積 以抑制藥液之壓力導致承受驅動力之膜片閥体，進而並投入 於就原理方面予以解決之方法。 本發明即為解決上述之習知問題而創作者，目的在於 提供一種可改善控制流體之流動之控制閥之操作性之技 術0 用以欲解決課題之手段 以下’即就可有效解決上述問題之方法等，視需要而 揭露效果等並進行說明。 方法1.一種流體控制閥，其特徵在於包含有：閥本體， 内部形成有相互連通之第1流道與第2流道，並設有包圍前 201243192 述第1流道與前述第2流道之連通口之本體側閥座面；及， 閥體部，具有落座於前述本體側閥座面上之閥體側問座 面，並可位移成前述閥體側閥座面落座於本體側閥座面上 之狀態及該閥體側閥座面與本體側閥座面分離之狀態；且 前述閥體部包含：第1可撓性構件，具可撓性，並自前述閱 本體之外部密封前述第1流道；第2可撓性構件，具可撓性， 並自前述閥本體之外部密封前述第2流道；軸部，與前述第 1可撓性構件與前述第2可撓性構件連接；及，閥座部，形 成於前述第1可撓性構件及前述第2可撓性構件之間而自前 述軸部朝徑向突出，並形成有前述閥體側閥座面；前述第丄 可撓性構件可對應前述第i流道内之第丨壓力而朝前述閥體 部施加可使前述閥體側閥座面與本體側閥座面分離之開閥 方向之負載之開閥方向負載，前述第2可撓性構件則可對應 前述第2流道内之第2壓力而朝前述閥體部施加可使前述問 體側閥座面朝本體側閥座面落座之閉閥方向之負載之閉閥 方向負載，前關座料前述落座時，可對應前述^墨力 而朝前述閥體部施加可減輕前述開關太& a & u i . 载之第1減輕負載， 加可減輕前述閉閥；5 -201243192 VI. INSTRUCTIONS: c. The present invention relates to a fluid control valve for general use, and more particularly to a product for use in semiconductors, flat panel displays, solar cells, and the like. The fluid control room used for the control of the chemical liquid and pure water produced by the parts. L·^kzj. 4^. ^ Background Art A single-acting or double-acting diaphragm valve has been conventionally used for flow control of a chemical liquid used in semiconductor manufacturing. The single-acting diaphragm valve allows the diaphragm valve body to be biased toward the valve closing direction and applies a driving force toward the valve opening direction, and operates the valve opening degree by the balance of the driving force and the driving force. The double-acting diaphragm valve can operate the opening degree by balancing the driving force with the valve closing direction. In order to ensure the true state of the secret, it is necessary to prevent the leakage of the water surface of the _ surface, such as the second leakage, the short-term can be used to increase the sealing power (the driving force in the double-action type), and the long-term will be due to the power ( In the case of double-acting, it is the driving force). (4) The deformation of the material occurs over time, so there are 9 艮 1 questions. In addition, the 'water hammer phenomenon is due to the inertial force of the liquid medicine (the momentum is responsible for the damage caused by the piping, etc.) and the inventors of the above-mentioned problems, etc.::: The force is also 驮U specifically, the system will be The valve body is more inward than the diameter of the valve seat - the inter-plate body =: in 201243192, the diaphragm body can withstand the pressure of the liquid medicine against the force of the liquid, and can be used as the pressure surface of the water hammer phenomenon. Therefore, the present inventors have found a method of reducing the pressure-receiving area of the chemical liquid to suppress the problem of the diaphragm valve body that is subjected to the driving force due to the pressure of the chemical liquid. [Patent Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 4] Japanese Laid-Open Patent Publication No. 201-169200 SUMMARY OF INVENTION Technical Problem However, the inventors of the present invention have not satisfied the above-mentioned results, and have not only reduced the pressure receiving area to suppress the drug. Liquid The force causes the diaphragm valve body to be subjected to the driving force, and is further put into a method for solving the principle. The present invention is to solve the above-mentioned conventional problems, and aims to provide a control valve which can improve the flow of the control fluid. The operability technique 0 is a means for solving the problem, and the method for effectively solving the above problem, and exposing the effect and the like as needed. The method 1. A fluid control valve characterized by comprising: a valve body having a first flow passage and a second flow passage that communicate with each other, and a main body side valve seat surface surrounding a communication port between the first flow passage and the second flow passage of the front portion 201243192; and a valve body a portion having a valve body side seating surface seated on the body side valve seat surface, and being displaceable into a state in which the valve body side valve seat surface is seated on the body side valve seat surface and the valve body side valve seat surface and a state in which the body side valve seat surface is separated; and the valve body portion includes: a first flexible member that is flexible and seals the first flow path from the outside of the body; the second flexible member has Flexible, and Sealing the second flow passage from the outside of the valve body; the shaft portion is connected to the first flexible member and the second flexible member; and the valve seat portion is formed on the first flexible member and The valve body side valve seat surface is formed to protrude from the shaft portion in the radial direction between the second flexible members, and the second flexible member is adapted to correspond to the second pressure in the i-th flow path. The valve body portion is provided with a load in the valve opening direction in which the valve body side valve seat surface and the body side valve seat surface are separated from each other in a valve opening direction, and the second flexible member is adapted to correspond to the second flow path. (2) applying a load in the valve closing direction to the valve body portion to apply a load in a valve closing direction in which the body side valve seat surface is seated on the body side valve seat surface, and the front seat material can be used to correspond to the ink in the valve closing direction. The force applied to the valve body portion can reduce the aforementioned switch too & a & ui. The first load is reduced, and the above-mentioned valve closing can be alleviated;
-之負載之第2減輕負載。 動力之條件設計放寬本負载之要求條件 方法1係於閥體部設有可產生減輕開閱方向負載之方 向之負載之第1減輕負載，以及減輕閉閥方向負載之方向之 負载之第2減輕負載之閥座部。藉此，可藉流道内之壓力⑼ 变力及第2壓力）在原理上抵銷對閥體部施加之負載，故可 。本發明人在 201243192 一例之單動式之流體控制閥中，藉作動氣體進行閥體部之 驅動而加以實驗，已成功將驅動壓力及作動氣體之消耗量 減半’但複動式亦可適用本方法。 進而，依據本發明人之解析，亦已確認可有效抑止水 鎚現象之發生。水鎚現象之發生係因流體壓力對閥體部施 加之負载所導致閥體部之加速，並急劇地隔絕流道所致。 相對於此，方法1則藉抵銷而減輕流體壓力對閥體部施加之 負載，而可有效抑制閥體部之加速。 另，開閥方向負載及閉閥方向負載分別意指第i可撓性 構件及第2可撓性構件因流體壓力而產生之負載中朝閥體 部側施加之負載。因此，並非意指第丨可撓性構件及第2可 撓性構件所產生之全部貞載，而具有上述貞載巾由闊體部 側所承受之分擔負載之意義。分擔負載亦可將第1可撓性構 件及第2可撓性構件之受壓面巾與流向閥體部側之負載(施 加之負載)對應之文壓面之面積定義為有效受壓面積，並以 该面積為基準而設計閥座部。 又，本方法不僅適用於所謂常閉型之流體控制閥，即， 未文驅動力施;時呈關狀態之越控侧，亦適用於所 月常開型之机體控制閥，即，未受驅動力施加時呈開闊狀 態之流體控制閱。 圖式簡單說明 第1圖係顯示閉閥時之、，流體控制閥10之構造之截面圖。 第2圖係顯示開閥時之流體控制閥1〇之構造之截面圖。 第3圖係顯示閉閥時之閥體部5〇之構造之放大截面圖。 6 201243192- The second load of the load is reduced. Conditions for the design of the power condition The method 1 for relaxing the load is provided with a first mitigation load that can reduce the load in the direction of the load in the opening direction and a second mitigation of the load in the direction of the load in the valve closing direction. The seat of the load. Thereby, the pressure applied to the valve body portion can be offset in principle by the pressure in the flow passage (9) and the second pressure). In the case of the single-acting fluid control valve of the example of 201243192, the inventors have experimented with the driving of the valve body by using the moving gas, and have successfully halved the driving pressure and the consumption of the operating gas, but the double-acting type can also be applied. This method. Further, according to the analysis by the inventors, it has been confirmed that the occurrence of the water hammer phenomenon can be effectively suppressed. The occurrence of the water hammer phenomenon is caused by the acceleration of the valve body portion caused by the load applied to the valve body portion by the fluid pressure, and the flow passage is sharply isolated. On the other hand, in the method 1, the load applied to the valve body portion by the fluid pressure is reduced by the offset, and the acceleration of the valve body portion can be effectively suppressed. Further, the load in the valve opening direction and the load in the valve closing direction mean the load applied to the valve body side in the load generated by the fluid pressure due to the i-th flexible member and the second flexible member, respectively. Therefore, it does not mean that all of the load generated by the second flexible member and the second flexible member has the meaning of the load shared by the hollow carrier on the side of the wide body portion. The load-bearing surface of the first flexible member and the second flexible member and the load (load applied) on the side of the valve body portion may be defined as an effective pressure receiving area, and The valve seat portion is designed based on the area. Moreover, the method is applicable not only to the so-called normally closed type fluid control valve, that is, to the non-driving force application; the over-control side of the closed state is also applicable to the body control valve of the monthly normally open type, that is, not The fluid is controlled by the fluid when it is applied by the driving force. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the configuration of a fluid control valve 10 at the time of valve closing. Fig. 2 is a cross-sectional view showing the configuration of the fluid control valve 1 when the valve is opened. Fig. 3 is an enlarged cross-sectional view showing the structure of the valve body portion 5's at the time of valve closing. 6 201243192
Id] •糸顯示閉閥時(靜態）之閥體部50附近之壓力狀態 之截面圖。 第5圖係顯示開閥時(靜態）之閥體部50附近之壓力狀態 之截面圖。 第6圖係顯示開閥動作時(遷移狀態）之閥體部50附近之 壓力狀態之戴面圖。 第7圖係骷- Ά $閉閥動作時(遷移狀態）之閥體部50附近之 壓力狀態之截面圖。 【實絶方式】 用以實施發明之形態 以下，參照圖示說明已具體化本發明之實施形態。本實 施形態已就半導體製造裝置所使狀開予以具體化。 (開閉閥之構造） 第1圖係顯示閉閥時之流體控制閥10之構造之截面 圖第2圖係顯示開閥時之流體控制閥10之構造之截面圖。 第3圖係顯示閉閥時之閥體部5 〇之構造之放大截面圖。流體 控制閥1G係用以開閉半導體之製造過程所使用之藥液之流 動之開閉閥。流體控制閥1〇宜於開放（開閥狀態）時可在較小 之壓力損失下使藥液流動，並在Μ(關狀態）時確實隔絕 藥液。上述特性則可藉以下所說明之構造而實現。 流體控制閥10包含閥體部5 〇、可容置閥體部5 〇之閥箱 80、閥蓋30、可驅動閥體部50之致動器6〇、可容置致動器 60之致動器箱40、及致動器蓋7〇。閥箱8〇安裝於致動器箱 4〇與閥蓋30之間。致動器箱40則安裝於閥箱8〇與致動器蓋 201243192 70之間。另，閥箱80亦稱為閥本體。 閥箱80及閥體部50可以對藥液之耐触性較高之材料、 諸如氟系合成樹脂之成形零件製造。另，其它構成要素， 即閥蓋30、致動H6G、致動器箱微致動器蓋％可以諸如 聚丙稀樹脂之成料件製造^另，閥箱⑽及閥體部5〇亦可 以諸如橡膠膜片或泛用工程塑膠、金屬等材料製造。 閥箱80及閥體部50如第〖圖乃至第3圖所示，形成有藥 液流道。藥液流道則包含可供藥液流入之藥液流入口 2ι、 上游側閥室23、與藥液流人σ21及上游侧室23連通之連 接流道22、與上游側閥室23連通之下游側閥室％、與下游 側閥室24連通而可供藥液流出之藥液流出〇25。本藥液流 道係構成藉閥體部50操作（開閉）上游側閥室23與下游側閥 至24之間之連通狀態而進行藥液之流動之開閉控制。 另，上游側Μ室23與下游側閥室Μ亦分別稱為第成道 與第2流道。且’本實施形態巾n於瞭解制而假設藥 液係自上游側閥室23朝下游側閥室24之方向流動而進行說 明’但藥液之流動方向亦可為反向。卩卩，流體控制閥1〇亦 可以自下游側閥室24朝上游側閱室23之方向之流動的方式 來使用。如此之使用時亦可獲致相同之效果。 藥液流入口 21及藥液流出口 25形成於與閥箱8〇、致動 器箱40及閥蓋3G之安裝方向大略垂直之方向上並共用中 心轴線。上游側閥室23則配置於自藥液流人⑽及藥液流 出口 25之中心轴線減動器箱4()側偏移之位置上。連接流 道22則自藥液流人口21朝上游側閥室23傾斜而延伸。 8 201243192 上游側閥室2 3如第3圖所示，传 之圓柱狀⑯由構絲成於閥箱80内 ,g| , 相内孔83，以及其局部容置於上游 1 内孔咖之_獅賴⑽成者。上制㈣U3則與 γ、作為構成其底面之平面之本體側閥座面Μ連接。上游 側内孔83並經由為本體側閥座面85所包圍之連通〇86而與 下游側内⑽連通。下游側内孔_設成足以在與後述之 ^軸。P 5 8之間形成充分之流道⑽隙）而不致發生過度 之壓力損失之較大直徑。 閥體4 5 0於上游側内孔8 3之内部設有圓柱狀之上游測 由、與上游測軸料連接之可撓性之甜甜圈狀 (膜狀)之膜片54、環繞膜片54之外周而連接之甜甜圈狀之膜 ^ a自上游測軸部58之外周面在徑向上朝本體側 閥座面85側之方向傾斜而延伸之上游側受壓面（第【受壓 < )51自上游測轴部58之外周面朝徑向垂直延伸之下游側 :[面（第2受壓面)52、形成於下游側受壓面52上之呈環狀 突起之環狀突起53。環狀突起53係朝上游測軸部58之中心 ^方向而自下㈣受壓面52突起。上制軸部58之中心 軸線亦稱為驅動軸線。上關受壓面51、下_受壓面52 及環狀突起53_為閥座部。 另，膜片54亦稱為第1可撓性構件。環狀突起53亦稱為 閥體側閥座面。且H妹53料設於本體㈣座面85 側。此時’下游側受壓面52上設於本體側閥座面85側之環 狀大起53所抵接之面（下游側受壓面52之面）即稱為閥體側 閥座面。 201243192 上游側閥室23係藉膜片54與膜片支持部％、上游測轴 部58’而自安裝於閥箱_之致動器箱4〇側（閥箱⑽之外部 側）受密封。膜片支持部54a則受祕於閥細之本體構件 81與致動器箱4G之本體構件41之間，而作為密封構件(塾片） 使用。膜片支持部54a並經膜片54而連接上游測軸部58。膜 片54則與膜片支持部54a連接而可使上游測軸料朝其轴 線方向移動，並限制上游測軸部58之徑向之位置。 另，膜片54在與致動器箱4〇之本體構件41之間隔設有 可供膜片54進行移動之退避空間49。退避空間49則藉通口 48與大氣流道47而呈大氣開放狀態。藉此，膜片54即可改 變退避空間49之内部容積而順暢進行變動(位移、變形）。 下游側閥室2 4則如第3圖所示，係、由構成形成於閥箱8 〇 内之圓柱狀之空間之下游側内孔84，以及其局部容置於下 游側内孔84内之閥體部5G所隔設者。閥體部·下游側内 孔84内部設有藉螺合部57而對上游測軸部58螺合之下游側 軸部56、與下游側轴部56連接之可撓性之甜狀（膜狀） 之膜片55、環繞膜片55之外周而連接之甜甜圈狀之膜片支 持部55a。 下游側閥室24則藉膜片55、膜片支持部恤及下游側轴 =56 ’而自安裝於閥箱8〇内之閥蓋3〇側（閥箱⑼之外部側） 受密封’片支持部55a則受錄於閥獅之本體構件81與 閥蓋30之本體構件31之間，而作為密封構件(塾片）使用。膜 片支持部55a並經膜片55而連接下游側轴部(轴部)56。膜片 55與膜片支持部55a連接而可使下游側軸料朝其轴線方 10 201243192 向移動，：限制下游側軸部56之經向之位置。下游側軸部 56之中心軸線亦稱為驅_線，並共用上游測㈣Μ 心軸線。 另，膜片55在與閥蓋3〇之本體構件^之間隔設有可供 膜片55進行移動之退避空間32。退避空間藉大氣产道 33與大氣通口34而呈大氣開放狀態。藉此，膜片55即^改 變退避空間32之内部容積而順暢進行變動(位移、變形）。 且膜片55係呈具有與膜片54相同之内經與外徑之甜 甜圈形狀。膜片55亦稱為第2可撓性構件。 如此，閥體部50裝設成在上游測轴部58與下游側轴部 56上之徑向之位置受限制，而可朝其軸線方向移動。藉此， 閥體部50即可在2個膜片54、55可變形之範圍内進行移動而 不致對其軸線過度傾斜。閥體部5〇可藉其軸線方向之移動 而進行上游側内孔8 3與下游側内孔8 4之連通狀態之開閉操 作。閥體部50係受致動器60所驅動。 ' 致動器60如第1及第2圖所示，包含致動器本體61、2個 襯墊67、68、1個墊片66。致動器本體61則包含藉螺合部的 而對閥體部50螺合之驅動軸部64、朝與驅動軸部64之驅動 軸線垂直之徑向延伸之活塞桿65。活塞桿65則將形成於敎 動器箱40内部之内孔43加以劃設形成有作動室63與退避空 間6 9。作動室6 3則經甜甜圈狀之凹部之作動氣體分配空間 44、作動氣體流道45及作動氣體通口 46而與未圖示之電子 氣動控制閥之輸出端口連接。另，退避空間69則經貫通济 道72與大氣通口73而呈大氣開放狀態。 11 201243192 々致動器6 0包含可對閥體部5 〇朝閉閥方向歟勢之賦勢彈 簧62。賦勢彈簧62可對致動器本體61賦勢而使閥體部5〇具 有之狀突起53與本體側閥座面85抵接（落座），以隔絕上游 側内孔83與下游側内孔84之連通狀態。致動⑽並可藉自 1體通口 46供給之作動氣體而加壓作動室63，以朝開 閥方向進行驅動。 職勢彈簧62之賦勢力設為可使流體控制閥1〇不致因假 運用狀態下之樂液之壓力而開閥之大小。藉此，即可 防止在體控制閥10之意外漏洩，而實現確實之隔絕功能。 另’作動氣體朝作動室63之供給壓力須為可對抗賦勢彈赞 62之賦勢力而驅動閥體部50之大小。 然而’流體控制閥10之確實隔絕所需之賦勢力之增大 乃閥體部50具有之環狀突起53之歷時變形（潛變）或本體側 闊座面85之歷時變形（凹陷之潛變）所致流體控制閥1〇之壽 命縮短之重要因素。另，作動氣體之供給壓力之上昇則為 驅動動力之增大原因。如上所述，流體控制閥10之確實動 作之實現與其運用壽命及驅動動力之間，發生了難以兼顧 之問題。 本實施形態之流體控制閥10則可解決上述難以兼顧之 問題’並減小賦勢彈簧62之賦勢力。其結果，則可延長流 體控制閥10之運用壽命，並降低驅動動力。 (流體控制閥10之動作與壓力狀態） 第4圖係顯示閉閥時(靜態）之閥體部5 〇附近之壓力狀態 之截面圖。本圖中，圓筒C1係使2個膜片54、55之外形朝驅 12 201243192 轴邱58*下^伸㈣成H ®筒C2則係包含上游測 轴糊與下游側轴部56之外表面之圓筒。 圓筒C3係基於上游測㈣％與⑼支持料&之負載 2率及下_軸部56與膜片支持部％之負載分擔率而 °又疋之圓筒。負載分擔率係藥液對膜片54、55施加之負載 ^上游測軸部58及下游側軸部56分擔m圓筒⑽ 可疋義為圓筒C3之底面之面積s(有效受壓面齡)設定成後 述之供給壓力pi與有效受壓面糾之積與上游測軸部58及 下游側軸部56所分擔之負載一致的圓筒。 換言之，膜片54可使因藥液之壓力而產生之負載朝2方 向分流。第1方向係經膜片支持部54a而朝閥箱8〇之本體構 件81流動之方向。流向第1方向之負載則如前述般定義為對 圓筒C1與圓筒C3之間之受壓面積施加之負載。第2方向則 係朝上游測軸部58流動之方向。流向第2方向之負載則如前 述般定義為對圓筒C3與圓筒C2之間之受壓面積（有效受壓 面積S)施加之負載。膜片55亦與膜片54相同而使負載朝2方 向分流。 閉閥時，將對藥液流入口 21施加非壓縮性流體之藥液 之供給壓力Pl(計示壓），藥液流出口 25之流出壓力p2則假 設為大氣開放(計示壓為零）。本狀態之閉閥時，藥液流入口 21至上游側閥室23之流道中齡液呈靜止狀態，故不發生壓 力損失，上游側閥室23之内壓與藥液之供給壓力ρι為相同 之壓力。另，上游側閥室23之内壓亦稱為第1麼力。 膜片54可對應供給壓力P1而對上游測軸部58施加軸線 201243192 方向之開閥方向（第4圖中上側）之負載之上游側開閥方向負 載Fl(=有效受壓面積Sx供給壓力P1)。上游側開閥方向負載 F1係膜片5 4對應供給壓力P1而發生之總負載中由上游測軸 部58分擔之負載。其餘負載則由膜片支持部54a分擔之。負 載之分擔率則可藉模擬(模擬實驗）或實驗而求出。如上所 述，膜片54可對應供給壓力P1而對上游測軸部5§施加上游 側開閥方向負載F1。 另，閥體部50可對應供給壓力pi而發生上游側減輕負 載F2 »上游側減輕負載F2係對應上游側閥室23内之供給壓 力P1而發生者。因此，上游側減輕負載F2具有對因環狀突 起53與本體側閥座面85之抵接而受包圍之領域（圓筒€3内 之領域）之面積及上游測軸部58與下游側軸部56之内部領 域（圓筒C2内之領域）之面積之差，乘以供給壓力？1所得之 大小。此則因供給壓力P1未施加於藉環狀突起53與本體側 閥座面85之抵接而受包圍之下游領域（下游側閥室μ側之 領域）之故。 閥體部50係構成可使其環狀突起53與本體側閱座面以 之抵接所致受包圍之領域之面積產生與上游側開閥方向負 載F1 —致之上游側減輕負載F2。具體而言，流體控制閥⑺ 可藉設定閥體部50之上游側受壓面51及下游側受壓面u自 驅動軸線朝徑向延伸之長度（或外形），而使上游側減輕負栽 F2與上游側開閥方向負載F1—致（或大略一致）。 其次，假設下游側閥室24中因某種重要因素而發生壓 力之上昇。即’假設為流出壓力P2已上昇之狀態。此時 201243192 膜片55將對應流出壓力P2之上昇而發生軸線方向之閉閥方 向（第4圖中下側）之負載之下游側閉閥方向負載F4。下游側 閉閥方向負載F4係膜片55對應流出壓力P2之上昇而發生之 總負載中由下游側軸部56分擔之負載。其餘負載則由膜片支 持部55a分擔之。另，下游側閥室24之内壓亦稱為第2壓力。 膜片55與膜片54具有相同之構造，故下游側轴部56所 分擔之下游側閉閥方向負載F4與上游測軸部58所分擔之上 游側開閥方向負載F1 —致。因此，閥體部50構成為若設定 為可發生與上游側開閥方向負載F1 —致之上游側減輕負載 F2 ’則可發生與下游側閉閥方向負載F4一致（大略一致）之 下游側減輕負載F3。另，上游側開閥方向負載打、上游側 減輕負載F2、下游側減輕負載F3及下游側閉閥方向負載料 亦分別稱為開閥方向負載、第1減輕負載、第2減輕負載及 閉閥方向負載。 如此，本實施形態之閥體部5 0係構成可抵銷（平衡）閉閥 時於上游側閥室23與下游側閥室24中之任一者皆對應藥液 之壓力產生之對閥體部5〇之負載。由此可知，閥體部5〇可 確實維持隔絕狀態，即便閉閥時分別於上游側閥室23與下 游側閥室24中個別發生壓力變動，亦不受影響。 第5圖係顯示開閥時(靜態）之閥體部附近之壓力狀態 之截面圖》開閥時，假設對藥液流入口 21施加非壓縮性流 體之藥液之供給壓力Pl(計示壓）。開閥時，上游側閥室23 及下游側閥室24中幾乎不發生壓力損失，故流出壓力p2與 藥液之供給壓力P1(計示壓）大略一致。因此，上游側閥室23 15 201243192 〇下游側閥室24將發生相同之供給壓力ρι。 臈片54可對應供給壓力ρι而發生軸線方向之開閥方向 之負載之上游側開閥方向貞載F1。另，則55則可對應供 壓力P1而發生轴線方向之開閥方向之負載之下游側閉間 方向負載F4。膜片55具有與膜片54相同之構造，故上游側 開閥方向負載F1與下游側閉閥方向負载F4—致（或大略— 致）。 然而，本實施形態中’雖使2個膜片54、55之受壓面積 相同而實現負載平衡，但即便使2個膜片54、55之受壓面積 不同，亦可實現負載平衡。舉例言之’若構成在未對上游 側閥室23及下游側閥室24施加藥液之供給壓力之狀態下先 發生初始負載’則宜使2個膜片54'55之受壓面積互異以減 輕初始負載。本發現乃發明人已藉實驗而確認者。 具體而言，可構成在未對流體控制閥10施加藥液之供 給壓力之狀態下’於閉閥狀態下藉2個膜片54、55之彈性而 朝開閥方向先發生初始負載。此時’例如亦可使膜片55之 受壓面積為膜片54之受壓面積之1.5倍程度’而實現抵銷其 初始負載之調整。 如此，本實施形態之閥體部50僅須構成可抵銷在開閥 時亦對應上游側閥室23與下游側閥室24内部之藥液之壓力 而發生之對閥體部50之負載即可。亦可對應流體控制闊10 之構造而使2個膜片54、55之受壓面積相同以實現負載平 衡。或，亦可使2個膜片54、55之受壓面積不同而抵銷閉閥 時之初始負載以實現之。 16 201243192 ' 、栽之大小隨閥體部5 0之位置而變動時，宜 ::::座位置上實現負載平衡。此則因在落座位置附近 里之順鴨操作之實現及搞現象之減輕可獲致顯著 I效禾之故。作， —巾可構成在其它位置上實現負載平衡。 壓力狀態之Γ面示Γ物作時(遷移狀態）之閥體部50附近之 座祕之間之領作時，環狀妓53與本體側閱 能。今孔口5中產生創、間隙而呈形成有孔口之狀 係：開間動:::損失δρ而使藥液通過。壓力損失4 面85之間之距離擴= 狀突起53與本趙輪 β大而減小者。另，配置於本孔口之上谁 之内部及下游之下游側閥室24之内部並不 λ貝失，故呈大略均一之麗力狀態。 =:間室23中不發生壓力編ρ，而維 閥方向負載卩1(=有效Α厭&灶。 …… 供給壓力Ρ1)與上游側減 (_有效受壓面積Sx供給墨力Ρ1)平衡之狀態。另， 閥至24巾料生壓力損失5p，但藉T_閉閥方 向負載F㈣效受壓_Sx(供給壓力ρι—壓力損失⑽ 與:游側減輕負載F3(=有效受壓面積㈣供給壓力P卜壓 力才貝失(5 p))而仍維持平衡之狀態。 如此’可知壓力#失δ ?不對上游側閥室Μ之負載平衡 U游側關方向負載叫上_減輕貞鱗之關係)及下 游側閥室24之負載平衡（下游侧減輕負細與下游側閉閥 方向負載F4之關係)造成影響。 如此，而可構成開閥動作時即便因孔口效果而發生壓 17 201243192 力損失5 p，亦可抵銷對應上游側閥室23與下游側間室24之 各内部之藥液壓力而發生之對閥體部50之負载。 第7圖係顯示閉閥動作時(遷移狀態）之閥體部5〇附近之 壓力狀態之截面圖。閉閥動作時，自環狀突起53與本體側 閥座面85之間存在間隙之狀態遷移至間隙消失之狀，離、（抵 接狀態）。閉閥動作時，可看到因非壓縮性之藥液流道内之 藥液之流速急劇改變，而對流道施加相當於藥液流道内之藥 液之動量之衝量所對應之負載之現象。本現象亦稱為水鎚現 象，成為對藥液配管等造成過度振動之發生及破損之原因。 水鎚現象依本發明人之解析係因以下之機制而發生。 閉閥動作時，閥體部50之環狀突起53與本體侧閥座面85之 間之間隙會縮小而遷移至抵接狀態。上述間隙一旦縮小， 則將因孔口效果所造成之壓力損失<5 p(參照第6圖）而導致 下游側閥室24之壓力降低。此時，假設若未裝設有膜片55， 而朝下游側閥室24側吸引閥體部50，則環狀突起53在接近 抵接狀態時將急劇加速而碰撞本體側閥座面85。因為如此 急劇之隔絕動作’將使非壓縮性之藥液流道内之藥液之流 速急劇改變而發生水鎚現象。 然而，本實施形態之流體控制閥10具有膜片55，而可 產生對抗壓力損失5p所致之對閥體部50之吸引之負載，故 藉此可防止閥體部50之急劇加速以抑制水鎚現象之發生。 另’即便不至於發生水鎚現象，閉閥動作時，亦將於 閥體部5 0之環狀突起5 3與本體側閥座面8 5之間之間隙之上 游側發生壓力上昇<5pl，另一方面並於其間隙之下游側發 18 201243192 生壓力下降(5 p2。然而，本實施形態之流體控制閥l〇可與 靜態下之閉閥時（參照第4圖）之壓力狀態相同而加以抵鎖。 因此，藥液之壓力所致之意外之驅動力將不發生於閥體部 50，而可防止意外之開閥等之發生以維持安定之動作。 如上所述，可知在靜態之閉閥時及開閥時或動態之開 閥動作及閉閥動作時’均不於閥體部5〇發生對應藥液之壓 力之負載。 (與特定之習知技術在技術思想上之差異） 習知技術亦已揭露於上游側與下游側之雙方設有膜片 之構造（特開2007-178006號公報、特開2003-278927號公報 及特開2010-169200號公報）。然而，其等之技術思想在本質 上是不同的’故並非本實施形態之流體控制閥10之創作基 礎。以下則說明其理由。 第1習知技術，即特開2007-178006號公報及特開 2003-278927號公報所揭露之技術，係以避免滴液為目的， 而於下游側裝設有作為倒吸閥之膜片。然而’為作為倒吸 閥使用，膜片之直徑須明顯大於隔絕位置（圓筒:環狀突 起53與本體側閥座面85之抵接位置）之直徑。這是因為習知 技術之倒吸閥雖可藉閥體之動作而達到吸引藥液之效果， 但下游側受壓面52將訂游_送藥液，而將降低倒吸之 效果之故。 八如此，第1習知技術中，倒吸閥（膜片）之吸力須設成充 分小於藉下游側受壓面52而推出之藥液量。因此，環狀突 起與本體側閥座面85之抵接位置之直徑須明顯小於倒吸 201243192 閥（膜片）之直徑，以增大兩直徑之差。相對於此，流體控制 閥10因使下游側減輕負載F3與下游側閉閥方向負載F4近似 而使膜片54、55之直徑相近，故在技術思想上完全相反。 如此思想上之差異在構造上外顯為倒吸閥（膜片）之直 控與閥體之隔絕面之直徑之差。具體而言，第1習知技術 中’間體之隔絕面之直徑設為甚小至相對於倒吸閥（膜片） 之直杻可加以忽視之程度。 另’第2習知技術，即特開2010-169200號公報所揭露 之技術則為弓丨示調整器。引示調整器可對應下游側之藥液 之壓力而驅動閥體，並對應下游測之壓力上昇而朝閉閥方 向進订驅動’另一方面對應下游側之壓力下降而朝開閥方 向進仃驅動。本驅動力係對應膜片之受壓面積與閥體朝下 游側之對向面積之差而產生。在本原理下，膜片之受壓面 積與閥體朝下游側之對向面積之差若不存在則不進行驅 旦對第2習知技術應用實施形態之技術思想，即無 法發揮引示調整器之功能。 如此思想上之差異與第1習知技術同樣在構造上外顯 為膜片之直杈與閥體之隔絕面之直徑之差。具體而言，第2 習知技術中，介收 邓將閥體之隔絕面之直徑設為甚小至可相對 於二之直:而加以忽視之程度。 載一致上述實施形態雖構成使第1減輕負載與開閥方向負 第2減輕負載與閉閥方向負載一致，但亦無必構 成—致之必要。 冉 具體而言 例如使上游側減輕負載F2(第1減輕負載)構 20 201243192 成（S史定為）更接近上游側開閥方向負載F1(開閥方向負載) 而甚於負載為零之狀態（上述可加以忽視之狀態）即可。且， 可使下游側減輕負載F3(第2減輕負載)構成(設定為）更接近 下游側閉閥方向負載F4(閉閥方向負載）而甚於負載為零之 狀態（上述可加以忽視之狀態）。換言之，可將第丨減輕負載 設在開閥方向負載之0.5倍乃至1.5倍之範圍内，並將第2減 輕負載設在閉閥方向負載之〇_5倍乃至ι·5倍之範圍内。 以上已詳述之本實施形態具有以下優點。 (1) 可減小賦勢彈簧62之賦勢力，故可抑制閥座面之潛 變而延長運用壽命。 (2) 可減低作動氣體之供給壓力而減低驅動動力。 (3) 驅動力之降低有助於實現致動器之小型化。 (4) 可抑制藥液之流動所導致之閥體部5 〇之意外動 作’故可輕易使將閥開度保持一定之控制安定。 (5) 可抑制閉閥時之加速，故可實現緩慢之閉閥動作 (緩閉）以抑制水鎚現象。 (6) 可減小膜片之外徑而有助於使流體控制閥1〇小型化。 進而’依據本發明人之解析等’已發現上游側減輕負 載F2(第1減輕負載)若設在上游側開閥方向負載Fl(開閥方 向負載）之0.8乃至1·2倍之範圍内（或0.8乃至1.〇倍），而下游 側減輕負載F3(第2減輕負載）設在下游側閉閥方向負載 F4(閉閥方向負載）之〇_8乃至〖2倍（或0 8乃至1 〇倍）之範圍 内，效果甚佳。 但，已發現若將上游側減輕負載F2設在上游側開間方 21 201243192 向負載F1之〇.85乃至u5倍之範圍内，並將下游側減輕負載 F3(第2減輕負載)設在下游側閉閥方向負獅(閉閥方向負 載）之〇·85乃至M5倍之範圍内，效果更為明顯。且，已確 認上游側減輕負載F2設在上游侧開閥方向負載F12〇 9# 至1.1倍之範圍内，而下游側減輕負載F3(第2減輕負載)設在 下游側閉閥方向負載F4(閉閥方向負載）之〇 9乃至i」倍之 牵色圍内時’效果則開始飽和。 在此，開閥方向負載及閉閥方向負載分別意指第i可撓 性構件及第2可撓性構件因流體壓力而發生之負載中朝閥 體部側施加之負載。因此，具有並非意指第丨可撓性構件及 第2可撓性構件所發生之全部負載，而為上述負載中由閥體 部側所承受之分擔負載之意義。分擔負載一如前述，亦可 將第1可撓性構件及第2可撓性構件之受壓面中與流向閥體 部側之負載（施加之負載）對應之受壓面之面積定義為有效 受壓面積S，並以該面積為基準而設計閥座部。 如此’已確認流體控制閥10可操作閥體部50而不受流 體所影響，且可有效抑制水鎚現象之發生。藉此，而可明 顯減低賦勢彈簧62之賦勢力而大幅減低驅動動力，並實現 順暢之隔絕操作及閥開度（閥吊升量）之精密操作。 (其它實施形態） 本發明不受限於上述實施形態’舉例言之亦可實施如下。 (1)上述實施形態中，流體控制閥10雖為開閉閥，但亦 可應用於諸如可藉閥開度之調整而連續調整流量及壓力損 失之調整閥，或壓力調整閥、針閥等各種閥。本發明已抑 22 201243192 制築液之〃,L動對閥體驅動之影響而提高操作性，故可提供 兼顧較高之調整功能與隔絕之控制閥。 (2)上述實施形態雖構成使上游側開閥方向負載打（開 閥方向負載)與下游側閉閥方向負載F4(閉閥方向負載）一 致但並無必構成一致之必要。即便開間方向負載與閉闊 方向負載不一致，若將第1減輕負載設成更接近開閥方向負 載而甚於零值，且第2減輕負載設成更接近閉閥方向負載而 甚於零值，即可減輕_時自流體承受之負載。 、但，使開閥方向負載與閉閥方向負載相互接近，不僅 閥狀態時，即便在開閥狀態時，亦可充分抑制閥體部 、體承文之負載。其結果，閉閥狀態與開閥狀態之間之 遷移動作（閉_作及開嶋作)時，則可抑糊體部因流體 之驅動而發生之意外之加減速。 藉此，不僅於閉閥狀態時，即便在開閥狀態時，亦可 p抑制閥體部自流體承受之負载。故而，在閉間狀態與 開閥狀態之間之遷移動作（閉閥動作及開閥動作）時，可抑制 閥體部因流體之驅動而發生之意外之加減速並進而使開 間動作及關動作更順H依據本發明人之解析及模 擬(模擬實驗)等，開閥方向負載宜設在閉閥方向負載之08 =至U倍之範圍内^但，設在閉閥方向負載之〇 乃至1 倍之範圍内，效果將更明顯，設在閉閥方向負栽之〇9乃至 倍之範圍内則效果將開始飽和。 亦可 (3)上述實施形態中，雖藉作動氣體驅動閥體部％，但 藉電磁力或手動進行驅動。電磁力之驅動不因藥液之 23 201243192 流動而需要過度之驅動力’故幾乎沒有電磁驅動導致過熱 之疑慮。藉此’即可實現電磁驅動型之小型流體控制閥。 另’手動驅動時’則可抑制藥液之流動所致之對閥體部之 意外之驅動力之發生，故可實現不致對人類手部發生不適 之抗力之手動塑之流體控制閥。 (4) 上述實施形態中，已就所謂常閉型之流體控制閥， 即未施加驅動力時為閉閥狀態之流體控制閥加以說明。然 而，所謂常開螌之流體控制閥，即未施加驅動力時為開閥 狀態之流體控制閥亦可應用本發明。這是因為在常開型之 流體控制閥中亦與常閉型之流體控制閥相同，可獲致驅動 力之減低及水链現象之抑制等效果之故。 (5) 上述貫施形態中，雖已例示單動式之流體控制閥， 但雙動式之流體控制閥亦可應用本發明。這是因為在雙動 式之流體控制閥中亦與單動式之流體控制閥相同，可獲致 驅動力之減低及水鎚現象之抑制等效果之故。 (6) 上述實施形態中，雖係藥液流向流體控制閥1〇，但 亦可為諸如純水。本流體控制閥並可應用於一般可控制流 體之流動之設備。 【圖式簡單說明】 第1圖係顯示閉閥時之流體控制閥1〇之構造之截面圖。 第2圖係顯示開閥時之流體控制閥1〇之構造之截面圖。 第3圖係顯示閉閥時之閥體部5〇之構造之放大截面圖。 第4圖係顯示閉閥時(靜態）之閥體部5〇附近之壓力狀態 之截面圖。 24 201243192 第5圖係顯示開閥時(靜態）之閥體部50附近之壓力狀態 之截面圖。 第6圖係顯示開閥動作時（遷移狀態）之閥體部50附近之 壓力狀態之截面圖。 第7圖係顯示閉閥動作時(遷移狀態）之閥體部50附近之 壓力狀態之截面圖。 【主要元件符號說明】 10…流體控制閥 21…藥液流入口 22…連接流道 23…上游側閥室 24…下游側閥室 25…藥液流出口 30…閥蓋 31、41、81…本體構件 32…退避空間 33、 47…大氣流道 34、 73…大氣通口 40…致動器箱 43…内孔 44…作動氣體分配空間 45…作動氣體流道 46…作動氣體通口 48…通口 49…退避空間 50…閥體部 51…上游側受壓面 52···下游側受壓面 53…環狀突起 54、55…膜片 54a、55a…膜片支持部 56…下游側軸部 57、59···螺合部 58…上游測軸部 60···致動器 61…致動器本體 62…賦勢彈簧 63…作動室 64…驅動轴部 65…活塞桿 66…墊片 25 201243192 67、68…概塾 Cl、C2、C3···圓筒 69…退避空間 Fl···上游側開閥方向負載 70…致動器蓋 F2…上游側減輕負載 72…貫通流道 F3···下游側減輕負載 80…閥箱 F4..·下游側閉閥方向負載 83···上游側内孔 P1…供給壓力 84···下游側内孑L P2…流出壓力 85…本體側閥座面 S…有效受壓面積 86…連通口 26Id] • A cross-sectional view showing the pressure state near the valve body portion 50 when the valve is closed (static). Fig. 5 is a cross-sectional view showing a state of pressure in the vicinity of the valve body portion 50 at the time of valve opening (static). Fig. 6 is a front view showing the pressure state in the vicinity of the valve body portion 50 at the time of the valve opening operation (migration state). Fig. 7 is a cross-sectional view showing the pressure state in the vicinity of the valve body portion 50 at the time of the valve closing operation (migration state). [Embodiment] Embodiments for carrying out the invention Hereinafter, embodiments of the present invention will be described with reference to the drawings. This embodiment has been embodied in the form of a semiconductor manufacturing apparatus. (Structure of On-Off Valve) Fig. 1 is a cross-sectional view showing the structure of the fluid control valve 10 at the time of valve closing. Fig. 2 is a cross-sectional view showing the configuration of the fluid control valve 10 at the time of valve opening. Fig. 3 is an enlarged cross-sectional view showing the structure of the valve body portion 5 when the valve is closed. The fluid control valve 1G is an on-off valve for opening and closing the flow of the chemical liquid used in the manufacturing process of the semiconductor. The fluid control valve 1 is adapted to flow the chemical solution with a small pressure loss in the open (open state) and to reliably isolate the liquid in the Μ (off state). The above characteristics can be realized by the configuration described below. The fluid control valve 10 includes a valve body portion 5, a valve box 80 that can accommodate the valve body portion 5, a valve cover 30, an actuator 6 that can drive the valve body portion 50, and an actuator 60 can be accommodated. The actuator case 40 and the actuator cover 7 are. The valve box 8 is mounted between the actuator case 4A and the valve cover 30. The actuator case 40 is then mounted between the valve box 8A and the actuator cover 201243192 70. In addition, the valve box 80 is also referred to as a valve body. The valve box 80 and the valve body portion 50 can be manufactured of a material having high contact resistance to a chemical liquid, such as a molded part of a fluorine-based synthetic resin. Further, other constituent elements, that is, the valve cover 30, the actuation H6G, and the actuator case microactuator cover % may be manufactured by a material such as a polypropylene resin, and the valve case (10) and the valve body portion 5 may also be used, for example. Rubber diaphragm or general engineering plastic, metal and other materials. The valve box 80 and the valve body portion 50 are formed with a drug flow path as shown in Fig. 3 to Fig. 3. The chemical solution flow path includes a chemical solution inlet 2 through which the chemical solution flows, an upstream side valve chamber 23, a connection flow path 22 communicating with the chemical liquid flow person σ21 and the upstream side chamber 23, and a downstream side communicating with the upstream side valve chamber 23 The valve chamber % communicates with the downstream side valve chamber 24 to allow the chemical liquid flowing out of the chemical solution to flow out of the crucible 25. The chemical liquid passage system is configured to open and close the flow of the chemical liquid by the operation of the valve body portion 50 to open (close) the communication between the upstream side valve chamber 23 and the downstream side valve chamber 24. Further, the upstream side chamber 23 and the downstream side valve chamber Μ are also referred to as a first passage and a second flow passage, respectively. Further, the present embodiment is described with reference to the fact that the liquid medicine flows from the upstream side valve chamber 23 toward the downstream side valve chamber 24, and the flow direction of the chemical liquid may be reversed.流体, the fluid control valve 1〇 can also be used from the downstream side valve chamber 24 in the direction of the upstream side reading chamber 23. The same effect can be obtained when used in such a manner. The chemical solution inlet port 21 and the drug solution outlet port 25 are formed in a direction substantially perpendicular to the mounting direction of the valve box 8A, the actuator case 40, and the valve cover 3G, and share the center axis. The upstream side valve chamber 23 is disposed at a position offset from the center axis reducer case 4 () side of the chemical liquid flow person (10) and the chemical liquid flow outlet 25. The connecting flow passage 22 extends obliquely from the chemical liquid flow population 21 toward the upstream side valve chamber 23. 8 201243192 The upstream side valve chamber 2 3 is as shown in Fig. 3, and the cylindrical shape 16 is formed by the wire in the valve box 80, the g|, the inner hole 83, and the part thereof are accommodated in the upstream 1 inner hole coffee. _ Lion Lai (10) is a winner. The upper system (4) U3 is connected to γ as the body side valve seat surface of the plane constituting the bottom surface thereof. The upstream side inner hole 83 communicates with the downstream side inner side (10) via a communication port 86 surrounded by the body side valve seat surface 85. The downstream side inner hole _ is set to be sufficient for the axis described later. A sufficient flow path (10) gap is formed between P 5 8 without causing a large diameter of excessive pressure loss. The valve body 450 is provided with a cylindrical pre-shaped, flexible doughnut-shaped (membrane-like) membrane 54 connected to the upstream shaft material, and a surrounding membrane inside the upstream inner hole 83. a doughnut-shaped film that is connected to the outer circumference of the outer surface of the upstream shaft portion 58 is inclined upward in the radial direction toward the side of the body-side valve seat surface 85 (the first pressure-receiving surface) <) 51 is a downstream side extending perpendicularly from the outer peripheral surface of the upstream shaft portion 58 in the radial direction: a surface (second pressure receiving surface) 52, and a ring-shaped projection formed on the downstream pressure receiving surface 52. Protrusion 53. The annular projection 53 projects from the lower (four) pressure receiving surface 52 toward the center of the upstream shaft portion 58. The central axis of the upper shaft portion 58 is also referred to as the drive axis. The upper pressure receiving surface 51, the lower pressure receiving surface 52, and the annular projection 53_ are valve seat portions. Further, the diaphragm 54 is also referred to as a first flexible member. The annular projection 53 is also referred to as a valve body side seating surface. And H sister 53 material is placed on the side of the body (four) seat surface 85. At this time, the surface of the downstream side pressure receiving surface 52 which is provided on the side of the main body side valve seat surface 85 and the surface on which the annular large surface 53 abuts (the surface of the downstream side pressure receiving surface 52) is referred to as a valve body side valve seat surface. 201243192 The upstream side valve chamber 23 is sealed from the side of the actuator case 4 (the outer side of the valve case (10)) by the diaphragm 54 and the diaphragm support portion % and the upstream shaft portion 58'. The diaphragm supporting portion 54a is used between the valve body member 81 and the body member 41 of the actuator case 4G, and is used as a sealing member. The diaphragm supporting portion 54a is connected to the upstream spindle portion 58 via the diaphragm 54. The diaphragm 54 is coupled to the diaphragm supporting portion 54a to move the upstream shaft to its axial direction and to restrict the radial position of the upstream shaft portion 58. Further, the diaphragm 54 is provided with a retreat space 49 for moving the diaphragm 54 at a distance from the body member 41 of the actuator case 4. The retreat space 49 is open to the atmosphere by the port 48 and the large air passage 47. Thereby, the diaphragm 54 can change the internal volume of the evacuation space 49 and smoothly change (displacement and deformation). The downstream side valve chamber 24, as shown in Fig. 3, is formed by the downstream side inner hole 84 constituting the cylindrical space formed in the valve box 8 and partially housed in the downstream side inner hole 84. The valve body portion 5G is separated from each other. The valve body portion and the downstream side inner hole 84 are provided with a flexible side (membrane-like) that is connected to the downstream side shaft portion 56 and the downstream side shaft portion 56 by the screwing portion 57 by the screwing portion 57. The diaphragm 55 is a donut-shaped diaphragm supporting portion 55a that is connected around the outer periphery of the diaphragm 55. The downstream side valve chamber 24 is sealed by the diaphragm 55, the diaphragm support t-shirt, and the downstream side shaft = 56' from the valve cover 3〇 side (the outer side of the valve box (9)) installed in the valve box 8〇. The support portion 55a is recorded between the body member 81 of the valve lion and the body member 31 of the valve cover 30, and is used as a sealing member. The diaphragm supporting portion 55a is connected to the downstream side shaft portion (shaft portion) 56 via the diaphragm 55. The diaphragm 55 is connected to the diaphragm supporting portion 55a to move the downstream side shaft toward the axial direction 10 201243192 to restrict the position of the downstream side shaft portion 56 in the warp direction. The central axis of the downstream side shaft portion 56 is also referred to as the drive line, and shares the upstream (four) core axis. Further, the diaphragm 55 is provided with a retreat space 32 for moving the diaphragm 55 at a distance from the body member of the valve cover 3. The retreat space is open to the atmosphere through the atmospheric passage 33 and the atmosphere port 34. Thereby, the diaphragm 55 changes the internal volume of the evacuation space 32 and smoothly changes (displaces and deforms). Further, the diaphragm 55 has a doughnut shape having the same inner and outer diameters as the diaphragm 54. The diaphragm 55 is also referred to as a second flexible member. Thus, the valve body portion 50 is installed to be restricted in the radial direction on the upstream shaft portion 58 and the downstream side shaft portion 56, and is movable in the axial direction. Thereby, the valve body portion 50 can be moved within a range in which the two diaphragms 54, 55 are deformable without excessively tilting the axis thereof. The valve body portion 5 is opened and closed by the movement of the upstream side inner hole 8 3 and the downstream side inner hole 8 4 by the movement in the axial direction. The valve body portion 50 is driven by the actuator 60. As shown in Figs. 1 and 2, the actuator 60 includes an actuator main body 61, two spacers 67 and 68, and one spacer 66. The actuator body 61 includes a drive shaft portion 64 that is screwed to the valve body portion 50 by a screw portion, and a piston rod 65 that extends in a radial direction perpendicular to the drive axis of the drive shaft portion 64. The piston rod 65 is formed with an inner hole 43 formed in the inside of the damper case 40 to form an operation chamber 63 and a retreat space 69. The actuating chamber 63 is connected to an output port of an electropneumatic control valve (not shown) via a donut-shaped recessed operating gas distribution space 44, an actuating gas flow path 45, and an actuating gas port 46. Further, the evacuation space 69 is opened to the atmosphere through the passage channel 72 and the atmosphere port 73. 11 201243192 The 々 actuator 60 includes an energizing spring 62 that can bias the valve body portion 5 toward the valve closing direction. The biasing spring 62 can bias the actuator body 61 such that the valve body portion 5 has a protrusion 53 that abuts (seats) the body side valve seat surface 85 to isolate the upstream side inner hole 83 and the downstream side inner hole. 84 connected state. Actuating (10) can pressurize the operating chamber 63 by the actuating gas supplied from the one-port port 46 to drive in the valve opening direction. The biasing force of the duty spring 62 is set such that the fluid control valve 1 does not open due to the pressure of the liquid in the false application state. Thereby, the accidental leakage of the body control valve 10 can be prevented, and the actual isolation function can be realized. Further, the supply pressure of the actuating gas toward the operating chamber 63 must be such that it can drive the valve body portion 50 against the force of the biasing force. However, the increase in the force required for the isolation of the fluid control valve 10 is the temporal deformation (latent change) of the annular projection 53 of the valve body portion 50 or the temporal deformation of the body-side wide seat surface 85 (the creep of the depression) The important factor that shortens the life of the fluid control valve 1〇. In addition, the increase in the supply pressure of the actuating gas is the cause of the increase in the driving force. As described above, the realization of the actual operation of the fluid control valve 10 and the operational life and the driving power thereof are difficult to achieve. The fluid control valve 10 of the present embodiment can solve the above-mentioned problem that is difficult to achieve and reduce the biasing force of the biasing spring 62. As a result, the operating life of the fluid control valve 10 can be extended and the driving power can be reduced. (Operation and Pressure State of Fluid Control Valve 10) Fig. 4 is a cross-sectional view showing a pressure state in the vicinity of the valve body portion 5 ( at the time of valve closing (static). In the figure, the cylinder C1 is such that the two diaphragms 54, 55 are formed outside the drive 12 201243192, and the extension (4) is formed into the H® cylinder C2, which includes the upstream shaft and the downstream shaft portion 56. The cylinder of the surface. The cylinder C3 is based on the upstream (four)% and (9) support material & load ratio 2 and the load ratio of the lower-shaft portion 56 and the diaphragm support portion %. The load sharing ratio is the load applied to the diaphragms 54, 55 by the chemical solution. The upstream shaft portion 58 and the downstream shaft portion 56 share the m cylinder (10). The area s of the bottom surface of the cylinder C3 can be used as the effective pressure surface. The cylinder is set so that the product of the supply pressure pi and the effective pressure receiving surface, which will be described later, coincides with the load shared by the upstream shaft portion 58 and the downstream shaft portion 56. In other words, the diaphragm 54 allows the load due to the pressure of the chemical to be shunted in the two directions. The first direction passes through the diaphragm supporting portion 54a and flows in the direction in which the body member 81 of the valve box 8 is moved. The load flowing in the first direction is defined as a load applied to the pressure receiving area between the cylinder C1 and the cylinder C3 as described above. The second direction is the direction in which the upstream shaft portion 58 flows. The load flowing in the second direction is defined as a load applied to the pressure receiving area (effective pressure receiving area S) between the cylinder C3 and the cylinder C2 as described above. The diaphragm 55 is also the same as the diaphragm 54 to divert the load in the two directions. When the valve is closed, the supply pressure P1 (counting pressure) of the chemical solution of the non-compressible fluid is applied to the chemical solution inlet 21, and the outflow pressure p2 of the chemical solution outlet 25 is assumed to be open to the atmosphere (the gauge pressure is zero). . When the valve is closed in this state, the medium-age liquid in the flow path from the chemical solution inlet 21 to the upstream valve chamber 23 is in a stationary state, so that no pressure loss occurs, and the internal pressure of the upstream side valve chamber 23 is the same as the supply pressure of the chemical liquid. The pressure. Further, the internal pressure of the upstream side valve chamber 23 is also referred to as a first force. The diaphragm 54 can apply the pressure P1 to the upstream shaft portion 58 to apply the load in the valve opening direction of the axis 201243192 (the upper side in FIG. 4) to the upstream side valve opening direction load F1 (= effective pressure receiving area Sx supply pressure P1) ). The upstream side valve opening direction load F1 is a load shared by the upstream shaft measuring portion 58 among the total loads generated by the supply pressure P1. The remaining load is shared by the diaphragm support portion 54a. The load sharing ratio can be obtained by simulation (simulation experiment) or experiment. As described above, the diaphragm 54 can apply the upstream side valve opening direction load F1 to the upstream shaft detecting portion 5 corresponding to the supply pressure P1. Further, the valve body portion 50 can generate the upstream side mitigation load F2 corresponding to the supply pressure pi. » The upstream side mitigation load F2 is generated corresponding to the supply pressure P1 in the upstream side valve chamber 23. Therefore, the upstream side lightening load F2 has an area surrounded by the abutment of the annular protrusion 53 and the body side valve seat surface 85 (the area in the cylinder 3), and the upstream shaft measuring portion 58 and the downstream side shaft. What is the difference between the area of the internal area of the part 56 (the area within the cylinder C2) multiplied by the supply pressure? 1 The size of the resulting. In this case, the supply pressure P1 is not applied to the downstream region (the area on the downstream side valve chamber μ side) surrounded by the abutment of the annular projection 53 and the body-side valve seat surface 85. The valve body portion 50 is configured such that the area of the region in which the annular projection 53 and the body-side reading surface abut against each other causes the upstream side relief load F2 to be generated in the upstream side valve opening direction load F1. Specifically, the fluid control valve (7) can reduce the length (or shape) of the upstream side pressure receiving surface 51 and the downstream side pressure receiving surface u of the valve body portion 50 from the driving axis in the radial direction, thereby reducing the upstream side. F2 is consistent with (or roughly coincident with) the upstream side valve opening direction load F1. Next, it is assumed that the pressure rises in the downstream side valve chamber 24 due to some important factor. That is, it is assumed that the outflow pressure P2 has risen. At this time, the 201243192 diaphragm 55 will cause the downstream side closing direction load F4 of the load in the valve closing direction (lower side in Fig. 4) in the axial direction in response to the rise of the outflow pressure P2. The downstream side valve closing direction load F4 diaphragm 55 is a load shared by the downstream side shaft portion 56 in the total load which occurs when the outflow pressure P2 rises. The remaining load is shared by the diaphragm support portion 55a. Further, the internal pressure of the downstream side valve chamber 24 is also referred to as a second pressure. Since the diaphragm 55 and the diaphragm 54 have the same structure, the downstream side closing direction load F4 shared by the downstream side shaft portion 56 and the upstream shaft measuring portion 58 share the upper side valve opening direction load F1. Therefore, the valve body portion 50 is configured such that the upstream side lightening load F2' which is generated in the upstream side valve opening direction load F1 can be generated, and the downstream side can be reduced in accordance with the downstream side closing direction load F4 (substantially coincident). Load F3. In addition, the upstream side valve opening direction load, the upstream side relief load F2, the downstream side relief load F3, and the downstream side closing direction load material are also referred to as a valve opening direction load, a first mitigation load, a second mitigation load, and a valve closing. Direction load. As described above, the valve body portion 50 of the present embodiment constitutes a valve body that generates pressure corresponding to the chemical liquid in either of the upstream side valve chamber 23 and the downstream side valve chamber 24 when the valve is closed (balanced). The load of the 5th. From this, it can be seen that the valve body portion 5 is surely maintained in an insulated state, and the pressure fluctuation occurs in each of the upstream side valve chamber 23 and the downstream side valve chamber 24, respectively, even when the valve is closed, and is not affected. Fig. 5 is a cross-sectional view showing the pressure state in the vicinity of the valve body portion at the time of opening the valve (static). When the valve is opened, it is assumed that the supply pressure P1 of the chemical liquid to which the non-compressible fluid is applied to the chemical solution inlet 21 (measurement pressure) ). When the valve is opened, the pressure loss is hardly generated in the upstream side valve chamber 23 and the downstream side valve chamber 24, so that the outflow pressure p2 substantially coincides with the supply pressure P1 (counting pressure) of the chemical liquid. Therefore, the same supply pressure ρι will occur in the upstream side valve chamber 23 15 201243192 〇 downstream side valve chamber 24. The cymbal piece 54 can generate the upstream side valve opening direction load F1 of the load in the valve opening direction in the axial direction in accordance with the supply pressure ρ. On the other hand, in the case of 55, the downstream side closing direction load F4 of the load in the valve opening direction in the axial direction is generated in accordance with the pressure P1. The diaphragm 55 has the same configuration as the diaphragm 54, so that the upstream side valve opening direction load F1 and the downstream side valve closing direction load F4 (or roughly the same). However, in the present embodiment, load balancing is achieved by making the pressure areas of the two diaphragms 54 and 55 the same, but load balancing can be achieved even if the pressure areas of the two diaphragms 54 and 55 are different. For example, if the initial load is generated in a state where the supply pressure of the chemical liquid is not applied to the upstream side valve chamber 23 and the downstream side valve chamber 24, it is preferable to make the pressure areas of the two diaphragms 54'55 different. To reduce the initial load. This finding was confirmed by the inventors by experiment. Specifically, in the state where the supply pressure of the chemical liquid is not applied to the fluid control valve 10, the initial load is first applied to the valve opening direction by the elasticity of the two diaphragms 54, 55 in the valve closed state. At this time, for example, the pressure-receiving area of the diaphragm 55 can be made 1.5 times the pressure-receiving area of the diaphragm 54, and the adjustment of the initial load can be offset. As described above, the valve body portion 50 of the present embodiment is only required to be able to offset the load on the valve body portion 50 which is generated when the pressure of the chemical liquid corresponding to the inside of the upstream side valve chamber 23 and the downstream side valve chamber 24 during the valve opening is canceled. can. It is also possible to make the pressure areas of the two diaphragms 54, 55 the same in accordance with the configuration of the fluid control width 10 to achieve load balance. Alternatively, the pressure areas of the two diaphragms 54, 55 may be different to offset the initial load at the time of valve closing. 16 201243192 ' When the size of the plant changes with the position of the valve body 50, the load balance should be achieved at the :::: seat position. This is due to the realization of the operation of the duck in the vicinity of the seating position and the reduction of the phenomenon. The towel can be configured to achieve load balancing at other locations. When the pressure state indicates the relationship between the secret parts near the valve body portion 50 at the time of the object (migration state), the annular cymbal 53 and the body side are read. In the present orifice 5, a wound is created and a gap is formed in the form of an opening: opening::: loss of δρ causes the liquid to pass. The pressure loss between the four faces 85 is expanded. The protrusion 53 is larger and smaller than the present Zhao. Further, the inside of the downstream side valve chamber 24 disposed above and below the orifice is not λ, so it is in a state of being substantially uniform. =: Pressure ρ does not occur in the chamber 23, and the load 卩1 in the valve direction (= effective Α && stove. ...... supply pressure Ρ 1) and upstream side reduction (_ effective pressure receiving area Sx supply ink force Ρ 1) The state of balance. In addition, the valve to 24 towel material pressure loss 5p, but by T_ closed valve direction load F (four) effect pressure _Sx (supply pressure ρι - pressure loss (10) and: swim side to reduce the load F3 (= effective pressure area (four) supply pressure P Bu pressure is lost (5 p)) and still maintains a state of balance. So 'know pressure # loses δ? Does not affect the load balance of the upstream side valve chamber U 游 侧 方向 _ _ _ _ _ _ 贞 贞 贞 贞 贞 贞The load balance of the downstream side valve chamber 24 (the relationship between the downstream side mitigating negative and the downstream side closing direction load F4) affects. In this way, even if a pressure loss of 5 201243192 is generated due to the effect of the orifice during the valve opening operation, the pressure of the liquid corresponding to the inside of the upstream side valve chamber 23 and the downstream side chamber 24 can be offset. The load on the valve body portion 50. Fig. 7 is a cross-sectional view showing a pressure state in the vicinity of the valve body portion 5'' at the time of the valve closing operation (migration state). At the time of the valve closing operation, the state in which there is a gap between the annular projection 53 and the body-side valve seat surface 85 shifts to the state in which the gap disappears, and the (abutment state). When the valve is closed, the flow rate of the chemical liquid in the non-compressible chemical flow path is sharply changed, and the load corresponding to the momentum corresponding to the momentum of the chemical liquid in the chemical flow path is applied to the flow path. This phenomenon is also known as the water hammer phenomenon, which is the cause of excessive vibration and damage to the liquid pipe. The water hammer phenomenon occurs according to the inventors' analysis because of the following mechanism. At the time of the valve closing operation, the gap between the annular projection 53 of the valve body portion 50 and the body-side valve seat surface 85 is reduced to migrate to the contact state. When the gap is reduced, the pressure loss due to the orifice effect < 5 p (see Fig. 6) causes the pressure of the downstream side valve chamber 24 to decrease. At this time, if the diaphragm 55 is not attached and the valve body portion 50 is sucked toward the downstream side valve chamber 24, the annular projection 53 abruptly accelerates toward the body side valve seat surface 85 when approaching the abutting state. Because of such a sharp isolation action, the flow rate of the liquid in the non-compressible liquid flow path is sharply changed to cause a water hammer phenomenon. However, the fluid control valve 10 of the present embodiment has the diaphragm 55, and can generate a load against the suction of the valve body portion 50 due to the pressure loss 5p, whereby the rapid acceleration of the valve body portion 50 can be prevented to suppress the water. The occurrence of the hammer phenomenon. In addition, even if the water hammer phenomenon does not occur, the pressure rises on the upstream side of the gap between the annular projection 5 3 of the valve body portion 50 and the body-side valve seat surface 85 when the valve is closed. On the other hand, on the downstream side of the gap, the pressure drop is 15 201243192 (5 p2. However, the fluid control valve of the present embodiment can be the same as the pressure state when the valve is closed under static conditions (refer to FIG. 4). Therefore, the driving force of the accident caused by the pressure of the chemical liquid will not occur in the valve body portion 50, and the occurrence of an unexpected valve opening or the like can be prevented to maintain the stability action. As described above, it can be known that the static action is performed. When the valve is closed and when the valve is opened or during the dynamic valve opening operation and the valve closing operation, the load of the corresponding liquid pressure is not generated in the valve body portion 5 (the technical difference from the specific prior art) The prior art is also disclosed in the structure in which the diaphragm is provided on both the upstream side and the downstream side (Japanese Laid-Open Patent Publication No. 2007-178006, JP-A-2003-278927, and JP-A-2010-169200). The technical ideas are different in nature, so it is not The basis of the creation of the fluid control valve 10 of the embodiment is described below. The first disclosed technique is disclosed in Japanese Laid-Open Patent Publication No. 2007-178006 and No. 2003-278927. The purpose is to install a diaphragm as a reverse suction valve on the downstream side. However, for use as a reverse suction valve, the diameter of the diaphragm must be significantly larger than the isolation position (cylinder: annular projection 53 and body side seating surface 85) The diameter of the abutment position). This is because the reverse suction valve of the prior art can achieve the effect of attracting the liquid medicine by the action of the valve body, but the downstream side pressure receiving surface 52 will be ordered to send the liquid medicine, and In the first prior art, the suction force of the reverse suction valve (diaphragm) must be set to be sufficiently smaller than the amount of the liquid medicine pushed out by the downstream side pressure receiving surface 52. Therefore, the ring shape The diameter of the abutment position of the protrusion and the body side valve seat surface 85 must be significantly smaller than the diameter of the back suction 201243192 valve (diaphragm) to increase the difference between the two diameters. In contrast, the fluid control valve 10 reduces the load on the downstream side. F3 is similar to the downstream side closing direction load F4 to cause the diaphragm 54 The diameter of 55 is similar, so the technical idea is completely opposite. The difference in thinking is structurally obvious as the difference between the diameter of the direct control of the suction valve (diaphragm) and the diameter of the insulating surface of the valve body. Specifically, In the first prior art, the diameter of the insulating surface of the inter-body is set to be as small as the straight-line relative to the suction valve (diaphragm). The second conventional technique, namely, the special opening 2010- The technique disclosed in Japanese Patent No. 169200 is a bow adjuster. The pilot adjuster can drive the valve body corresponding to the pressure of the liquid medicine on the downstream side, and can drive the drive toward the valve closing direction corresponding to the pressure rise in the downstream direction. On the one hand, in response to the pressure drop on the downstream side, the drive is driven in the valve opening direction. This driving force is generated corresponding to the difference between the pressure receiving area of the diaphragm and the opposing area of the valve body toward the downstream side. Under the present principle, if there is no difference between the pressure-receiving area of the diaphragm and the opposing area of the valve body toward the downstream side, the technical idea of applying the second conventional technique to the second conventional technique is not performed, that is, the indication adjustment cannot be performed. The function of the device. Such a difference in thinking is similarly related to the first conventional technique in that the difference between the diameter of the diaphragm and the insulating body of the valve body is externally revealed. Specifically, in the second prior art, the diameter of the insulating surface of the valve body is set to be as small as possible to the extent that it is negligible. In the above embodiment, the first mitigation load and the valve opening direction are the second mitigation load and the valve closing direction load, but they are not necessarily required. Specifically, for example, the upstream side mitigation load F2 (first mitigation load) 20 201243192 (S history is set) is closer to the upstream side valve opening direction load F1 (opening direction load) and the load is zero (The above can be ignored). Further, the downstream side lightening load F3 (second lightening load) can be configured (set to be closer to the downstream side closing direction load F4 (closed valve direction load) and the load is zero (the above-mentioned negligible state) ). In other words, the second damper load can be set in the range of 0.5 times or 1.5 times the load in the valve opening direction, and the second light reducing load can be set in the range of 〇5 times or even 5 times the load in the valve closing direction. The present embodiment, which has been described in detail above, has the following advantages. (1) The force of the biasing spring 62 can be reduced, so that the creep of the valve seat surface can be suppressed and the service life can be prolonged. (2) The supply pressure of the operating gas can be reduced to reduce the driving force. (3) The reduction in driving force contributes to the miniaturization of the actuator. (4) The accidental movement of the valve body 5 导致 caused by the flow of the chemical liquid can be suppressed. Therefore, the valve opening degree can be easily controlled to a certain degree. (5) The acceleration at the time of valve closing can be suppressed, so that a slow valve closing action (slow closing) can be achieved to suppress the water hammer phenomenon. (6) The outer diameter of the diaphragm can be reduced to help miniaturize the fluid control valve 1 . Further, it has been found that the upstream side mitigation load F2 (first mitigation load) is set in the range of 0.8 or 1.2 times the upstream side valve opening direction load F1 (load opening direction load) (in accordance with the analysis of the present inventors). Or 0.8 or 1.〇 times), and the downstream side lightening load F3 (second lightening load) is set in the downstream side closing direction load F4 (closed valve direction load) 〇8 or even 2 times (or 0 8 or 1) Within the range of 〇), the effect is very good. However, it has been found that if the upstream side mitigation load F2 is set in the range of the upstream side opening 21 201243192 to the load F1 85.85 or even u5 times, and the downstream side mitigation load F3 (second mitigation load) is provided on the downstream side. In the range of the closed lion (closed valve load), 85 or even M5 times, the effect is more obvious. Further, it has been confirmed that the upstream side mitigation load F2 is set in the range of the upstream side valve opening direction load F12 〇 9# to 1.1 times, and the downstream side mitigation load F3 (second mitigation load) is provided in the downstream side closing direction load F4 ( When the valve is closed in the direction of the load, the effect is saturated with the 〇9 or even i" times the color. Here, the load in the valve opening direction and the load in the valve closing direction mean the load applied to the valve body side in the load generated by the fluid pressure in the i-th flexible member and the second flexible member, respectively. Therefore, it does not mean that the entire load generated by the second flexible member and the second flexible member is a load that is shared by the valve body side in the above load. As described above, the area of the pressure receiving surface corresponding to the load (load applied) of the first flexible member and the second flexible member may be defined as effective in the pressure receiving surface of the first flexible member and the second flexible member. The area S is pressed, and the valve seat portion is designed based on the area. Thus, it has been confirmed that the fluid control valve 10 can operate the valve body portion 50 without being affected by the fluid, and can effectively suppress the occurrence of the water hammer phenomenon. Thereby, it is possible to significantly reduce the biasing force of the biasing spring 62 and greatly reduce the driving power, and achieve a smooth operation of the smooth isolation operation and the valve opening degree (valve lifting amount). (Other Embodiments) The present invention is not limited to the above-described embodiments. (1) In the above embodiment, the fluid control valve 10 is an on-off valve, but may be applied to, for example, a regulating valve that continuously adjusts the flow rate and pressure loss by adjusting the valve opening degree, or a pressure regulating valve, a needle valve, and the like. valve. The invention has been suppressed 22 201243192 制 制 制 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 (2) In the above embodiment, it is necessary to make the load in the upstream side opening direction (load in the valve opening direction) and the load in the downstream side closing direction F4 (load in the closing direction), but it is not necessary to conform. Even if the load in the open direction does not match the load in the closed direction, if the first mitigation load is set closer to the load in the valve opening direction than the zero value, and the second mitigation load is set closer to the load in the valve closing direction than the zero value, It can reduce the load from the fluid when _. However, the load in the valve opening direction and the load in the valve closing direction are close to each other, and the valve body and the body load can be sufficiently suppressed not only in the valve state but also in the valve opening state. As a result, in the case of the migration operation between the closed state and the open state (closed and open), the acceleration and deceleration of the paste portion due to the driving of the fluid can be suppressed. Thereby, not only in the valve closing state, but also in the valve opening state, the load of the valve body portion from the fluid can be suppressed. Therefore, in the transition operation between the closed state and the open state (the valve closing operation and the valve opening operation), it is possible to suppress the acceleration and deceleration of the valve body due to the driving of the fluid, and to further the opening and closing operations. More smoothly H According to the analysis and simulation (simulation experiment) of the present inventors, the load in the valve opening direction should be set in the range of 08 = to U times in the valve closing direction. However, the load in the valve closing direction is even 1 Within the range of the multiple, the effect will be more obvious, and the effect will begin to saturate in the range of 〇9 or even times in the closed valve direction. (3) In the above embodiment, the valve body portion is driven by the moving gas, but the electromagnetic force or the manual driving is performed. The driving of the electromagnetic force does not require excessive driving force due to the flow of the liquid 2012 23192. Therefore, there is almost no doubt that the electromagnetic drive causes overheating. By this, an electromagnetically driven small fluid control valve can be realized. In the case of "manual driving", it is possible to suppress the occurrence of an unexpected driving force to the valve body portion caused by the flow of the chemical liquid, so that it is possible to realize a manual plastic fluid control valve that does not cause discomfort to the human hand. (4) In the above embodiment, a fluid control valve of a normally closed type, that is, a fluid control valve that is in a closed state when no driving force is applied, has been described. However, the present invention can also be applied to a fluid control valve that is normally open, that is, a fluid control valve that is in an open state when no driving force is applied. This is because the fluid control valve of the normally open type is also the same as the normally closed fluid control valve, and the effect of reducing the driving force and suppressing the water chain phenomenon can be obtained. (5) In the above-described embodiment, a single-acting fluid control valve has been exemplified, but the double-acting fluid control valve can also be applied to the present invention. This is because the double-acting fluid control valve is also the same as the single-acting fluid control valve, and the effect of reducing the driving force and suppressing the water hammer phenomenon can be obtained. (6) In the above embodiment, the chemical liquid flows to the fluid control valve 1 , but may be, for example, pure water. The fluid control valve can be applied to equipment that generally controls the flow of fluid. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the configuration of a fluid control valve 1 闭 at the time of valve closing. Fig. 2 is a cross-sectional view showing the configuration of the fluid control valve 1 when the valve is opened. Fig. 3 is an enlarged cross-sectional view showing the structure of the valve body portion 5's at the time of valve closing. Fig. 4 is a cross-sectional view showing a pressure state in the vicinity of the valve body portion 5〇 at the time of valve closing (static). 24 201243192 Fig. 5 is a cross-sectional view showing the pressure state in the vicinity of the valve body portion 50 at the time of valve opening (static). Fig. 6 is a cross-sectional view showing the pressure state in the vicinity of the valve body portion 50 at the time of the valve opening operation (migration state). Fig. 7 is a cross-sectional view showing the pressure state in the vicinity of the valve body portion 50 at the time of the valve closing operation (migration state). [Description of main component symbols] 10: fluid control valve 21: chemical liquid inlet 22... connection flow path 23... upstream side valve chamber 24... downstream side valve chamber 25... chemical liquid flow outlet 30... valve cover 31, 41, 81... Main body member 32...Retraction space 33, 47... Large air passages 34, 73... Atmospheric opening 40... Actuator tank 43... Inner hole 44... Actuating gas distribution space 45... Actuating gas flow path 46... Actuating gas port 48... Opening port 49...Retraction space 50...Valve body portion 51...Upstream side pressure receiving surface 52···Back side pressure receiving surface 53...Circular protrusions 54,55...Film sheets 54a, 55a...Film support portion 56...Bottom side Shaft portion 57, 59 ... screwing portion 58 ... upstream shaft measuring portion 60 · actuator 61 ... actuator body 62 ... biasing spring 63 ... actuating chamber 64 ... driving shaft portion 65 ... piston rod 66 ... Shim 25 201243192 67, 68...Generally, Cl, C2, C3···Cylinder 69...Retraction space Fl···Upstream side valve opening direction load 70...Actuator cover F2...Upstream side relief load 72...through flow Road F3···downstream side lightening load 80...valve box F4..·downstream side closing direction load 83···upstream side inner hole P1...supply pressure Force 84··· downstream side inner 孑L P2... outflow pressure 85...body side seat surface S...effective pressure receiving area 86...communication port 26